CN103594593B - There is the manufacture method of the inverted light-emitting diode (LED) of alligatoring transparency electrode - Google Patents
There is the manufacture method of the inverted light-emitting diode (LED) of alligatoring transparency electrode Download PDFInfo
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- CN103594593B CN103594593B CN201310555172.0A CN201310555172A CN103594593B CN 103594593 B CN103594593 B CN 103594593B CN 201310555172 A CN201310555172 A CN 201310555172A CN 103594593 B CN103594593 B CN 103594593B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000004020 conductor Substances 0.000 claims abstract description 4
- 239000010936 titanium Substances 0.000 claims description 22
- 229910052719 titanium Inorganic materials 0.000 claims description 22
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 20
- 239000002105 nanoparticle Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 4
- 239000006185 dispersion Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 239000012774 insulation material Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 abstract description 5
- 239000007769 metal material Substances 0.000 description 4
- 238000013517 stratification Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 238000007540 photo-reduction reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/385—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending at least partially onto a side surface of the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/42—Transparent materials
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
The invention discloses a kind of manufacture method with the inverted light-emitting diode (LED) of alligatoring transparency electrode, comprise: provide growth substrates, order forms n-type semiconductor layer (6), active layer (5), p-type semiconductor layer (4) and p-type reflecting electrode (2) thereon; Forming station stage structure; Form transparent insulating layer (3); Form transparent electrode layer (7); Form groove (8), and groove (8) have madial wall (8b) and lateral wall (8a); The transparent conductive material being used for transparent electrode layer (7) is filled in groove (8); Inverted light-emitting diode (LED) is cut, thus all define transparent electrode layer (7) on four sides and end face of whole inverted light-emitting diode (LED); The surface of alligatoring transparent electrode layer (7), thus alligatoring structure (9) is formed on the whole surface of transparent electrode layer (7).The light-emitting diode with transparency electrode that the method that the present invention proposes obtains can improve integrated level, Simplified flowsheet, without the need to pin configuration, thus reduces manufacturing cost, and can improve light extraction efficiency, thus promote whole lighting efficiency.
Description
Technical field
The invention belongs to technical field of semiconductors, particularly a kind of manufacture method with the inverted light-emitting diode (LED) of alligatoring transparency electrode.
Background technology
The advantage of semiconductor light-emitting-diode is that luminous intensity is high, light directive property is strong, energy consumption is low, cheap for manufacturing cost etc., therefore its application is increasingly extensive, in illumination, particularly have the trend replacing incandescent lamp and fluorescent lamp.The advantage of upside-down mounting (flip-chip) formula light-emitting diode is that heat dissipation characteristics is excellent and luminous efficiency is higher.And in recent years, in order to improve the brightness of light-emitting diode, develop the light-emitting diode of vertical stratification, relative to positive assembling structure, i.e. the light-emitting diode of platform (mesa) structure, the light-emitting diode of vertical stratification has plurality of advantages.Two electrodes of light emitting diode with vertical structure are in the both sides of light-emitting diode respectively, and electric current almost all flows vertically through semiconductor epitaxial layers, do not have the electric current of lateral flow, therefore homogeneous current distribution, and the heat of generation is relatively less.And because two electrodes of vertical stratification are in both sides, therefore go out the stop that can not be subject to same lateral electrode in photoreduction process, its light extraction efficiency is higher.
But the light-emitting diode Problems existing of above-mentioned vertical stratification is, two electrodes are in the both sides of light-emitting diode respectively, cause that integrated level is low, complex process, and also need pin configuration, and light extraction efficiency is low.
Summary of the invention
In view of this, the present invention is directed to the problem of prior art, propose a kind of manufacture method with the inverted light-emitting diode (LED) of alligatoring transparency electrode.By improving the n-type electrode of this light-emitting diode and the structure of p-type electrode and setting, integrated level, Simplified flowsheet can be improved, without the need to pin configuration, thus reducing manufacturing cost.And the inverted light-emitting diode (LED) with transparency electrode of the present invention can improve light extraction efficiency, thus promote whole lighting efficiency.
The manufacture method with the inverted light-emitting diode (LED) of alligatoring transparency electrode that the present invention proposes comprises:
(1) provide growth substrates, order forms n-type semiconductor layer (6), active layer (5), p-type semiconductor layer (4) and p-type reflecting electrode (2) thereon;
(2) exposed portion active layer (5) is etched with to part of p-type semiconductor layer (4) and p-type reflecting electrode (2), thus forming station stage structure;
(3) transparent insulation material is filled into ledge structure, thus forms transparent insulating layer (3);
(4) resulting structures is inverted, is arranged on bearing substrate (1), and peels off growth substrates, thus expose n-type semiconductor layer (6);
(5) in the n-type semiconductor layer exposed (6), transparent electrode layer (7) is formed;
(6) form groove (8), it penetrates transparent electrode layer (7), n-type semiconductor layer (6), active layer (5), transparent insulating layer (3), and groove (8) has madial wall (8b) and lateral wall (8a);
(7) in groove (8), the transparent conductive material being used for transparent electrode layer (7) is filled, such as ITO, ZnO, AZO, ATO, FTO, SnO
2deng in the laminated film of one or more or above-mentioned material;
(8) utilize lateral wall (8a) as cut-boundary, inverted light-emitting diode (LED) is cut, thus remove part transparent electrode layer (7), n-type semiconductor layer (6), active layer (5), transparent insulating layer (3), thus all define transparent electrode layer (7) on four sides and end face of whole inverted light-emitting diode (LED);
(9) titaniferous nanoparticle dispersion liquid is spin-coated on the whole surface of transparent electrode layer (7), thus forms individual layer titanium nanoparticulate thin films; Individual layer titanium nanoparticulate thin films is dried, forms the mask layer of the individual layer titanium nano particle needed for ICP etching; Utilize the mask layer of individual layer titanium nano particle to carry out ICP etching to transparent electrode layer (7), thus form alligatoring structure (9) on the whole surface of transparent electrode layer (7); Remove the mask layer of individual layer titanium nano particle
Accompanying drawing explanation
Fig. 1 is the sectional view with the inverted light-emitting diode (LED) of alligatoring transparency electrode of the present invention;
Fig. 2 is the sectional view in the manufacture with the inverted light-emitting diode (LED) of alligatoring transparency electrode of the present invention;
Fig. 3 is the vertical view with the inverted light-emitting diode (LED) of alligatoring transparency electrode in the manufacture of Fig. 2.
Embodiment
Inverted light-emitting diode (LED) and the manufacture method thereof with alligatoring transparency electrode of the present invention is described in detail below with reference to Fig. 1-3.For clarity sake, the equal not drawn on scale of each structure shown in accompanying drawing, and the present invention is not limited to structure shown in figure.
First with reference to figure 1, the inverted light-emitting diode (LED) with alligatoring transparency electrode comprises bearing substrate (1); P-type reflecting electrode (2) on bearing substrate (1); P-type semiconductor layer (4) on p-type reflecting electrode (2); Active layer (5) in p-type semiconductor layer (4); N-type semiconductor layer (6) on active layer (5); And the transparent electrode layer (7) in n-type semiconductor layer (6), wherein transparent electrode layer (7) covers end face and the side of whole inverted light-emitting diode (LED), and the whole surface of transparent electrode layer (7) all has alligatoring structure (9).
Bearing substrate (1) can be the combination of the metal material with highly reflective, such as Al, Au, Ag, Pt, Ni, Cu, Ti or above-mentioned metal material.
P-type reflecting electrode (2) is the metal material with highly reflective, the multi-layered electrode combined of such as Al, Au, Ag, Pt, Ni, Cu, Ti or above-mentioned metal material.
The material of p-type semiconductor layer (4), active layer (5) and n-type semiconductor layer (6) is such as III-V race's semi-conducting material, such as GaN, AlN, InGaN, AlGaN etc.
Transparent electrode layer (7) is transparent conductive oxide (TCO), can be specifically tin indium oxide (ITO), ZnO, AZO, ATO, FTO, SnO
2deng in the laminated film of one or more or above-mentioned material.
And as indicated in figs. 1 and 3, p-type reflecting electrode (2) and p-type semiconductor layer (4) area are in a top view less than the area of active layer (5) and n-type semiconductor layer (6), namely part of p-type reflecting electrode (2) and p-type semiconductor layer (4) is etched away by etching, thus exposed portion active layer (5), thus forming station stage structure, and in ledge structure, fill transparent insulating layer (3), such as Al
2o
3.And transparent electrode layer (7) covers end face and the side of whole inverted light-emitting diode (LED), specifically see Fig. 3, transparent electrode layer (7) covers the end face of inverted light-emitting diode (LED), namely cover whole n-type semiconductor layer (6), and cover the side of whole inverted light-emitting diode (LED), namely cover four sides of inverted light-emitting diode (LED).And transparent electrode layer (7) is as the n-electrode of inverted light-emitting diode (LED), and it is insulated from each other in order to make between the transparent electrode layer (7) of the n-electrode being used as inverted light-emitting diode (LED) and p-type reflecting electrode (2), to prevent short circuit, between the transparent electrode layer (7) and p-type reflecting electrode (2) of four sides of covering inverted light-emitting diode (LED), there is above-mentioned transparent insulating layer (3).
And the whole surface of transparent electrode layer (7) all has alligatoring structure (9), alligatoring structure (9) is formed as follows: whole surface titaniferous nanoparticle dispersion liquid being spin-coated on transparent electrode layer (7), thus forms individual layer titanium nanoparticulate thin films; Individual layer titanium nanoparticulate thin films is dried, forms the mask layer of the individual layer titanium nano particle needed for ICP etching; Utilize the mask layer of individual layer titanium nano particle to carry out ICP etching to transparent electrode layer (7), thus form alligatoring structure (9) on the whole surface of transparent electrode layer (7); Remove the mask layer of individual layer titanium nano particle.And the roughness Ra of alligatoring structure (9) is 1nm-10nm, preferred 2.5nm, 3.5nm, 4.5nm, 6.5nm, 8.5nm, 9.5nm.
The manufacture method with the inverted light-emitting diode (LED) of alligatoring transparency electrode of the present invention is below described.Concrete with reference to Fig. 1-2.
(1) provide growth substrates, order forms n-type semiconductor layer (6), active layer (5), p-type semiconductor layer (4) and p-type reflecting electrode (2) thereon;
(2) exposed portion active layer (5) is etched with to part of p-type semiconductor layer (4) and p-type reflecting electrode (2), thus forming station stage structure;
(3) transparent insulation material is filled into ledge structure, thus forms transparent insulating layer (3);
(4) resulting structures is inverted, is arranged on bearing substrate (1), and peels off growth substrates, thus expose n-type semiconductor layer (6);
(5) in the n-type semiconductor layer exposed (6), transparent electrode layer (7) is formed;
(6) form groove (8), it penetrates transparent electrode layer (7), n-type semiconductor layer (6), active layer (5), transparent insulating layer (3), and groove (8) has madial wall (8b) and lateral wall (8a);
(7) in groove (8), the transparent conductive material being used for transparent electrode layer (7) is filled, such as ITO, ZnO, AZO, ATO, FTO, SnO
2deng in the laminated film of one or more or above-mentioned material;
(8) utilize lateral wall (8a) as cut-boundary, inverted light-emitting diode (LED) is cut, thus remove part transparent electrode layer (7), n-type semiconductor layer (6), active layer (5), transparent insulating layer (3), thus all define transparent electrode layer (7) on four sides and end face of whole inverted light-emitting diode (LED);
(9) titaniferous nanoparticle dispersion liquid is spin-coated on the whole surface of transparent electrode layer (7), thus forms individual layer titanium nanoparticulate thin films; Individual layer titanium nanoparticulate thin films is dried, forms the mask layer of the individual layer titanium nano particle needed for ICP etching; Utilize the mask layer of individual layer titanium nano particle to carry out ICP etching to transparent electrode layer (7), thus form alligatoring structure (9) on the whole surface of transparent electrode layer (7); Remove the mask layer of individual layer titanium nano particle.Form the inverted light-emitting diode (LED) with alligatoring transparency electrode of the present invention thus.
So far, foregoing description specifically understands inverted light-emitting diode (LED) and the manufacture method thereof with transparency electrode of the present invention, relative to the light-emitting diode that existing method is obtained, the light-emitting diode that the method that the present invention proposes obtains can improve integrated level, Simplified flowsheet, without the need to pin configuration, thus reduce manufacturing cost.And the inverted light-emitting diode (LED) with transparency electrode of the present invention can improve light extraction efficiency, thus promote whole lighting efficiency.The embodiment described above is only the preferred embodiments of the present invention, and it is not intended to limit the present invention.Those skilled in the art, under the prerequisite not departing from spirit of the present invention, can make any amendment, and protection scope of the present invention are limited to the appended claims to the present invention.
Claims (5)
1. there is a manufacture method for the inverted light-emitting diode (LED) of alligatoring transparency electrode, comprising:
(1) provide growth substrates, order forms n-type semiconductor layer (6), active layer (5), p-type semiconductor layer (4) and p-type reflecting electrode (2) thereon;
(2) exposed portion active layer (5) is etched with to part of p-type semiconductor layer (4) and p-type reflecting electrode (2), thus forming station stage structure;
(3) transparent insulation material is filled into ledge structure, thus forms transparent insulating layer (3);
(4) resulting structures is inverted, is arranged on bearing substrate (1), and peels off growth substrates, thus expose n-type semiconductor layer (6);
(5) in the n-type semiconductor layer exposed (6), transparent electrode layer (7) is formed;
(6) groove (8) is formed, it penetrates transparent electrode layer (7), n-type semiconductor layer (6), active layer (5), transparent insulating layer (3), and groove (8) has madial wall (8b) and lateral wall (8a);
(7) in groove (8), fill the transparent conductive material being used for transparent electrode layer (7);
(8) utilize lateral wall (8a) as cut-boundary, inverted light-emitting diode (LED) is cut, thus remove part transparent electrode layer (7), n-type semiconductor layer (6), active layer (5), transparent insulating layer (3), thus all define transparent electrode layer on four sides and end face of whole inverted light-emitting diode (LED);
(9) surface of alligatoring transparent electrode layer (7), thus alligatoring structure (9) is formed on the whole surface of transparent electrode layer (7).
2. the manufacture method of inverted light-emitting diode (LED) according to claim 1, the method wherein forming alligatoring structure (9) comprises the following steps:
Titaniferous nanoparticle dispersion liquid is spin-coated on the whole surface of transparent electrode layer (7), thus forms individual layer titanium nanoparticulate thin films; Individual layer titanium nanoparticulate thin films is dried, forms the mask layer of the individual layer titanium nano particle needed for ICP etching;
Utilize the mask layer of individual layer titanium nano particle to carry out ICP etching to transparent electrode layer (7), thus form alligatoring structure (9) on the whole surface of transparent electrode layer (7);
Remove the mask layer of individual layer titanium nano particle.
3. the manufacture method of inverted light-emitting diode (LED) according to claim 2, wherein transparent insulating layer (3) be clamped in cover inverted light-emitting diode (LED) the transparent electrode layer (7) of side and bearing substrate (1) on p-type reflecting electrode (2) between, to make transparent electrode layer (7) and p-type reflecting electrode (2) insulated from each other, and transparent insulating layer (3) is Al
2o
3.
4. the manufacture method of inverted light-emitting diode (LED) according to claim 3, wherein transparent electrode layer (7) is ITO, ZnO, AZO, ATO, FTO, SnO
2in a kind of laminated film of or above-mentioned material.
5. the manufacture method of inverted light-emitting diode (LED) according to claim 4, the roughness Ra of wherein alligatoring structure (9) is 1nm-10nm.
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| CN201310555172.0A CN103594593B (en) | 2013-11-08 | 2013-11-08 | There is the manufacture method of the inverted light-emitting diode (LED) of alligatoring transparency electrode |
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| CN201310555172.0A CN103594593B (en) | 2013-11-08 | 2013-11-08 | There is the manufacture method of the inverted light-emitting diode (LED) of alligatoring transparency electrode |
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| CN112397495B (en) * | 2020-11-18 | 2023-11-07 | 珠海市大鹏电子科技有限公司 | High-sensitivity miniaturized photoelectric coupler and high-sensitivity processing method thereof |
| CN113555479B (en) * | 2021-07-26 | 2023-09-01 | 苏州汉骅半导体有限公司 | Inverted deep ultraviolet LED and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101075652A (en) * | 2006-09-05 | 2007-11-21 | 武汉迪源光电科技有限公司 | Production of coarsening electrode for high-brightness packed LED chip and vertical LED chip |
| CN102163673A (en) * | 2010-02-18 | 2011-08-24 | Lg伊诺特有限公司 | Light emitting device and light emitting device package |
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| US20030189215A1 (en) * | 2002-04-09 | 2003-10-09 | Jong-Lam Lee | Method of fabricating vertical structure leds |
| DE102007032555A1 (en) * | 2007-07-12 | 2009-01-15 | Osram Opto Semiconductors Gmbh | Semiconductor chip and method for producing a semiconductor chip |
| JP2013008817A (en) * | 2011-06-24 | 2013-01-10 | Toshiba Corp | Semiconductor light emitting element and manufacturing method of the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101075652A (en) * | 2006-09-05 | 2007-11-21 | 武汉迪源光电科技有限公司 | Production of coarsening electrode for high-brightness packed LED chip and vertical LED chip |
| CN102163673A (en) * | 2010-02-18 | 2011-08-24 | Lg伊诺特有限公司 | Light emitting device and light emitting device package |
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Effective date of registration: 20170724 Address after: Licheng Town East Street Liyang city 213300 Jiangsu city of Changzhou province No. 182 Patentee after: Liyang Technology Development Center Address before: Li Town of Liyang City, Jiangsu province 213300 Changzhou City Dongmen Street No. 67 Patentee before: LIYANG JIANGDA TECHNOLOGY TRANSFER CENTER CO., LTD. |