CN103424069A - Optical device, interference system and optical measuring method used for measuring multiple geometric errors - Google Patents
Optical device, interference system and optical measuring method used for measuring multiple geometric errors Download PDFInfo
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Abstract
The invention discloses an optical device used for measuring multiple geometric errors. The optical device is composed of an interference optical lens set and a reflecting optical lens set. The interference optical lens set comprises a first optical unit, a second optical unit and a base assembly. The first optical unit is used for measuring displacement X and angles including Rx, Ry and Rz. The second optical unit is used for measuring straightness Y and straightness Z. The base assembly is used for being connected with the first optical unit and the second optical unit. The reflecting lens set is used for returning a beam from the interference lens set in the original path and the beam is away from incident light by a certain distance. The invention meanwhile discloses a double-frequency laser interference measuring system and an optical method for measuring the geometric errors.
Description
Technical field
The present invention relates to precision machine tool and the error measure of accurate complicated machinery equipment geometric sense, relate in particular to a kind of optical devices for many geometric errors measurement amount, interference system and measuring method.
Background technology
Along with modern processing and high-end equipment sophisticated manufacturing development, more and more higher to the requirement on machining accuracy of numerically-controlled machine.To assemble out in order producing the high precision precision machine tool that meets Production requirement, and to make lathe keep high-accuracy state.Detection to lathe geometric error amount will become the problem that can't avoid.Only detect the geometric error of lathe, could confirm whether the lathe of producing meets the demands, and just can further improve the machining precision of lathe, or the systematic error of existing lathe is compensated.
In general, the process need of debuging lathe is detected every geometric error, to debug design accuracy.Lathe dispatches from the factory and need to be detected the lathe global error, to confirm overall performance.In the use procedure of lathe, need the regular geometric error to lathe to be detected, to guarantee machine finish, do not drift about.According to existing precision machine tool geometric error detection means, once can only detect a margin of error, each detection all needs detecting instrument is made to accurate state.And, for the high-precision numerical control lathe, its margin of error at least will detect 21, therefore.Each margin of error of the complete complete lathe of detection, the needed time very tediously long (even 2-3 days).Because precision machine tool is very expensive, the invisible cost therefore caused is very considerable.
In history, people attempt to address this problem always, and have developed many measuring methods and technology.Sum up and comprise: traditional optical means, the method based on diffraction of light, the method that the method for following the trail of based on laser and laser interference combine with laser alignment.Wherein, the state-of-the-art method based on laser interference and the current application of laser alignment, and have the people to apply for Patents.As US5798828 " laser five shaft position measuring systems " (laser aligned five-axis position measurement device), US5900938 " laser measurement system of Fast Correction machine tool " (Laser measurement system for rapid calibration of machine tool), US6316779 " has the corner of phase detection sensitivity and a displacement measurement " (Rotation and translation measurement with phase sensitive detection).The patent CN97191384.6 " five-axis/six-axis measuring system, " of the API company of U.S. application but other physical quantitys except displacement of this system in fact by displacement transducer PSD detection, can not accomplish to trace to the source, the precision authority is low.And sensing head needs active device to carry out the signal transmission, its warming-up effect measuring accuracy.
In view of this, be badly in need of wanting a kind of new optical devices and method for many geometric errors measurement amount in prior art.
Summary of the invention
In order to overcome the defect existed in prior art, the invention provides a kind of optical devices for many geometric errors measurement amount, interference system and measuring method, can shorten detection time, improve detection efficiency.
In order to realize the foregoing invention purpose, the present invention discloses a kind of optical devices for many geometric errors measurement amount, and these optical devices consist of an interferometric optical mirror group and a catoptrics mirror group, this interferometric optical mirror group comprises: the first optical unit, for measuring displacement X and angle Rx, Ry, Rz; The second optical unit, for measuring linearity Y and measuring linearity Z; Base assembly, for being connected with this first, second optical unit; This catoptron group will be for returning and be separated by a distance with incident light from the former road of light beam of this interferometric optical mirror group.
Further, this incident light enters the first optical unit and is divided into five parts, and three parts of light wherein form first incident light, second incident light and three incident light parallel with X-axis, utilizes this first, second, third incident light to obtain displacement X and angle Rx, Ry, Rz; Remaining two parts of light enter respectively the second optical unit for measuring linearity Y and measuring linearity Z.
Further, this interferometric optical mirror group comprises four component optical assemblies, a polarization splitting prism assembly, three groups of prism of corner cube assemblies and two groups of Wollaston prism assemblies.This four components optical assembly forms by a triangular prism assembly and a parallelogram prism assemblies, physical method or other method gummed for a side of one of them inclined-plane of this parallelogram prism assemblies and this triangular prism assembly.Next-door neighbour's face of this triangular prism assembly and this parallelogram prism assemblies all arranges a depolarization spectro-film, this parallelogram prism assemblies reflected light face plating high-reflecting film, other workplace coating anti reflection films.The depolarization spectro-film ratio of this depolarization spectro-film of the setting of this four components optical assembly is respectively 4:1,3:1,2:1,1:1.
Further, this polarization splitting prism assembly is comprised of two triangular prisms, physical method or other method gummed for the side of these two triangular prisms.Next-door neighbour's face plating High Extinction Ratio polarization beam splitter of these two triangular prisms, all the other workplace coating anti reflection films.
Further, the equal coating anti reflection film of the plane of incidence of these three groups of prism of corner cube assemblies, reflecting surface all plates the depolarization reflectance coating.
Further, the equal coating anti reflection film of the workplace of these two groups of Wollaston prism assemblies.
Further, this catoptrics mirror group comprises three groups of linearity mirror assemblies and three groups of prism of corner cube reflection subassemblies.The reflecting surface plating high-reflecting film of these three groups of linearity mirror assemblies, the plane of incidence coating anti reflection film of these three groups of prism of corner cube reflection subassemblies, reflecting surface plating depolarization reflectance coating.
The present invention discloses a kind of double-frequency laser interferometry system simultaneously, comprising: laser instrument, for providing frequency difference and polarization state an orthogonal laser beam; Optical devices, for this laser beam being formed to reference light and measuring light, this reference light and measurement light form an interference signal; The laser numbered card, for receiving this interference signal and being converted into a displacement signal; These optical devices adopt structure as described above.
The present invention discloses a kind of method for many geometric errors measurement amount simultaneously, comprise: utilize a laser instrument that frequency difference and the orthogonal laser beam of polarization state are provided, make these laser beam incident one optical devices form reference light and measure light, this reference light and measurement light form an interference signal, utilize this interference signal to obtain error measuring value, it is characterized in that, this laser beam is divided into five parts after entering these optical devices, three parts of light wherein form first incident light parallel with X-axis, the second incident light and the 3rd incident light, utilize this first, second, the 3rd incident light obtains displacement X and angle Rx, Ry, Rz, remaining two parts of light are respectively used to measure linearity Y and measure linearity Z.These optical devices adopt structure as described above.
Further, displacement X, angle Rx, Ry, the computing formula of Rz is:
,
,
,
, wherein, the displacement signal that X1 is the first parallel incident light of X-axis, the displacement signal that X2 is the second parallel incident light of X-axis, the displacement signal that X3 is the 3rd parallel incident light of X-axis.
Compared with prior art, the optical devices for many geometric errors measurement amount provided by the present invention, interference system and measuring method, based on the double-frequency laser interferometry system, can measure six physical quantitys simultaneously, comprise a displacement, 2 linearitys, 3 rotation amounts.Thereby can shorten detection time greatly, and improve detection efficiency, and its tractability being strong, sensing head is passive device, can not introduce heat and disturb, and does not need the cable output signal, and then eliminates heat and disturb the error caused.Precision is high.Simultaneously, the present invention possesses very strong application.
The accompanying drawing explanation
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Figure 1 shows that the structural representation of the optical devices that are applied to many geometric errors measurement amount that go out shown in the present;
Figure 2 shows that the structural representation of catoptrics mirror group of the present invention;
Figure 3 shows that the structural representation of interferometric optical mirror group of the present invention;
Figure 4 shows that the structural representation of spectrum groupware of the present invention;
Figure 5 shows that the structural representation of polarization splitting prism PBS assembly of the present invention;
Figure 6 shows that the structural representation of linearity mirror assembly of the present invention;
Figure 7 shows that the principle schematic of the method that is applied to many geometric errors measurement amount gone out shown in the present;
Figure 8 shows that the principle schematic of the method that is applied to many geometric errors measurement amount gone out shown in the present;
Figure 9 shows that the principle schematic of the method that is applied to many geometric errors measurement amount gone out shown in the present;
Figure 10 shows that the structural representation principle schematic of the two-frequency laser interferometer system shown in prior art;
Figure 11 shows that measurement axle X1 of the present invention, X2, the displacement measurement principle light channel structure schematic diagram of X3;
Figure 12 shows that the straight line degree measurement principle light channel structure schematic diagram of measurement axle Y of the present invention and Z.
Embodiment
Describe the optical devices of the present invention for many geometric errors measurement amount in detail below in conjunction with accompanying drawing.Yet, the present invention should be understood as and be not limited to this embodiment described below, and technical concept of the present invention can be implemented with other known technologies or the combination of function other technologies identical with those known technologies.
In the following description, for clear structure of the present invention and the working method of showing, to be described by all multidirectional words, but should by 'fornt', 'back', " left side ", " right side ", " outward ", " interior ", " outwards ", " inwardly ", " on ", the Word Understanding such as D score is for convenience of term, and not should be understood to word of limitation.In addition, " Y-direction " word of using in the following description mainly refers to level to parallel direction, " directions X " word mainly refers to level to parallel and vertical with Y-direction direction, " Z direction " word mainly refers to level to vertical direction, " Rx direction " word mainly refer to around the X-axis sense of rotation, " Ry direction " word mainly refer to around the Y-axis sense of rotation, " Rz direction " word mainly refer to around the Z axis sense of rotation, " Y " word mainly refers to the linearity along Y, and " Z " word mainly refers to the linearity along Z.
The present invention discloses a kind of optical devices for many geometric errors measurement amount, and these optical devices consist of an interferometric optical mirror group and a catoptrics mirror group, and this interferometric optical mirror group comprises: the first optical unit, for measuring displacement X and angle Rx, Ry, Rz; The second optical unit, for measuring linearity Y and measuring linearity Z; Base assembly, for being connected with this first, second optical unit; This catoptron group will be for returning and be separated by a distance with incident light from the former road of light beam of this interferometric optical mirror group.Utilize optical devices disclosed in this invention, can measure six physical quantitys simultaneously, comprise a displacement, 2 linearitys, 3 rotation amounts.
In order to describe clearly its principle of work, first introduce basic composition and the principle of double-frequency laser interferometry system.As shown in figure 10, a double-frequency laser interferometry system comprises laser instrument 24, interference mirror group 25, motor reflex mirror 26, laser numbered card 29, signal processing unit 28, display device 27.It is f1 and the orthogonal light beam of f2 polarization state that laser instrument 24 sends frequency, and this light beam is divided into two parts at interference mirror group 25 places according to the difference of polarization state, and a part reflexes to fixed mirror and returns to formation reference light (being illustrated by the broken lines).A part projects kinetoscope 26 and returns to formation measurement light (being meaned by solid line).Two-way light converges to form and interferes, and this interference signal enters laser numbered card 29, is converted into displacement signal, and displacement signal shown equipment 27 after signal processing unit 28 is processed shows.
A kind of optical devices that are applied to many geometric errors measurement amount that wherein the present invention announces are equivalent to the interference mirror group 25 in Figure 10, and motor reflex mirror 26, for realizing six margins of error, comprise a displacement, and 2 linearitys are measured in the time of 3 rotation amounts.
A kind of optical devices that are applied to many geometric errors measurement amount that the present invention announces comprise interferometric optical mirror group and catoptrics mirror group, as shown in Figure 1.These optical devices consist of an interferometric optical mirror group and a catoptrics mirror group.Fig. 3 is the structural drawing of interferometric optical mirror group.Interferometric optical mirror group comprises: spectrum groupware 1, spectrum groupware 2, spectrum groupware 3, spectrum groupware 4, polarization splitting prism PBS assembly 5, prism of corner cube assembly 6, prism of corner cube assembly 7, prism of corner cube assembly 8, Wollaston prism assembly 9, Wollaston prism assembly 10, glass pedestal assembly 16.
Spectrum groupware 1, spectrum groupware 2, spectrum groupware 3, spectrum groupware 4 forms five axle light splitting separation structures, and its function is for to be equally divided into 5 parts by incident light.The structure of spectrum groupware as shown in Figure 4, it comprises that triangular prism assembly 18 forms with parallel quadrant prism assembly 17, between triangular prism assembly 18 and parallel quadrant prism assembly 17, depolarization spectro-film 20 is arranged, and spectrum groupware 1, spectrum groupware 2, spectrum groupware 3, the spectro-film of spectrum groupware 4 is respectively 4:1,3:1,3:1,2:1,1:1.Parallelogram prism assemblies reflected light face plating HR high-reflecting film 19, other workplace platings AR anti-reflective film.
Its detailed process is as follows: incident light enters spectrum groupware 1, is divided into 4:1.A copy of it light enters the incident light that polarization splitting prism PBS assembly 5 becomes axle X2, and 4 parts of light enter spectrum groupware 2.Spectrum groupware 2 is divided into 3:1 by it, and a copy of it light enters the incident light that polarization splitting prism PBS assembly 5 becomes axle X3, and 3 parts of light enter spectrum groupware 3.Spectrum groupware 3 is divided into 2:1 by it, and a copy of it light enters the incident light that polarization splitting prism PBS assembly 5 becomes axle X1, and 2 parts of light enter spectrum groupware 4.Spectrum groupware 4 is divided into 1:1 by it, enters respectively straight line degree measurement axle Y and Z.
Polarization splitting prism PBS assembly 5, prism of corner cube assembly 6, prism of corner cube assembly 7, prism of corner cube assembly 8 forms measures axle X1, X2, the interference mirror group part of X3.
As shown in Figure 5, plating polarization beam splitter 20 in polarization splitting prism PBS assembly 5, the plane of incidence of prism of corner cube assembly plates the AR anti-reflective film in addition, reflecting surface plating depolarization reflectance coating.
Its detailed process is as follows: contain two frequency f 1 and the orthogonal incident light of f2 polarization state, in polarization splitting prism PBS assembly 5, plating polarization beam splitter 20 places are divided into two bundles according to the polarization state difference, a branch of transmission forms measurement light and incides the catoptron group and returned by former direction, and spatially separates a segment distance.Returned by former direction through the prism of corner cube assembly after a branch of reflection, and spatially separate a segment distance.Finally converge the formation interference signal, this signal enters follow-up electronic system laser numbered card 29, signal processing unit 28, and display device 27, form displacement output, and Figure 11 is shown in by its displacement measurement principle light channel structure schematic diagram.
Wollaston prism assembly 9, Wollaston prism assembly 10 forms the interference mirror group part of straight line degree measurement axle Y and Z.
Its detailed process is as follows, contains two frequency f 1 and the orthogonal incident light of f2 polarization state forms according to the difference of polarization state the emergent light that there is certain angle in two bundles at Wollaston prism assembly place, and this emergent light incides the catoptron group and returned by former direction.And converge and interfere at Wollaston prism assembly place, form the output of straight line degree measurement axle Y and Z.If there is displacement in the catoptron group perpendicular to nominal kinematic axis direction on the emergent light plane, this displacement signal will be modulated onto in interference light signal so.
Fig. 2 is the structural drawing of catoptron group, and the catoptron group comprises: linearity mirror assembly 11, linearity mirror assembly 12, prism of corner cube reflection subassembly 13, prism of corner cube reflection subassembly 14, prism of corner cube reflection subassembly 15.
Linearity mirror assembly 11, the function of linearity mirror assembly 12 is returned for the former road of two-beam that Wollaston prism assembly 9 or 10 is separated, and separates a segment distance with incident light, reflecting surface plating HR high-reflecting film, as shown in Figure 6
Principle of work is as follows, and the angle of carefully adjusting face 21 and face 23 makes its coupling Wollaston prism assembly emergent light angle can make incident light return on former road separately.Simultaneously due to face 22 with face 21 be vertical relation, so the former road of two-beam that the Wollaston prism assembly can be separated returns, and separates a segment distance with incident light, Figure 12 is shown in by its measuring principle light channel structure schematic diagram.
The present invention discloses a kind of double-frequency laser interferometry system simultaneously, comprising: laser instrument, for providing frequency difference and polarization state an orthogonal laser beam; Optical devices, for this laser beam being formed to reference light and measuring light, this reference light and measurement light form an interference signal; The laser numbered card, for receiving this interference signal and being converted into a displacement signal; These optical devices adopt structure as described above.
A kind of method that is applied to many geometric errors measurement amount that the present invention announces, utilize a laser instrument that frequency difference and the orthogonal laser beam of polarization state are provided, make these laser beam incident one optical devices form reference light and measure light, this reference light and measurement light form an interference signal, utilize this interference signal to obtain error measuring value, it is characterized in that, this laser beam is divided into five parts after entering these optical devices, three parts of light wherein form first incident light parallel with X-axis, the second incident light and the 3rd incident light, utilize this first, second, the 3rd incident light obtains displacement X and angle Rx, Ry, Rz, remaining two parts of light are respectively used to measure linearity Y and measure linearity Z.
As shown in Figure 9, a kind of optical devices that are applied to many geometric errors measurement amount that the present invention announces, can export three road displacement signals, X1, X2, X3.
For the impact of better eliminating environmental error and vibration can be got on average exporting as displacement of three
?
Simultaneously apparent:
Rotation
Linearity Y=Y
Z=?Z
For being analyzed as follows of Rx:
Ultimate principle is: according to 3 of geometrical principles, just can determine a plane, and a kind of optical devices that are applied to many geometric errors measurement amount that the present invention announces, can export three road displacement signals, X1, X2, X3 ，Gai tri-road displacement signals can be confirmed a plane 30, just can monitor the rotation on plane 30 and then calculate Rx by monitoring three road displacement signals so.Making in the present invention the definite plane 30(of three tunnel displacements is definite plane, three prism of corner cube assembly summits in the catoptron group) not parallel with the ZY plane.So, its hair line
also not parallel with X-axis, suppose that its angle is
, as shown in Figure 8.If the ZY plane rotates around X-axis, so
also along with rotation.
Below derive
rotation and the relation of Rx:
As shown in Figure 7, suppose
for X-axis, the initial vector of unit length of face 30
, when the Rx rotation
the time, the vector of unit length of face 30
with initial vector of unit length
angle
, suppose the vector of unit length of face 30
with the angle of X-axis, be
.
In OAB,
In ABC,
From formula (1) (2)
?
(
,
),
for initial vector,
Compared with prior art, the optical devices for many geometric errors measurement amount provided by the present invention, interference system and measuring method, based on the double-frequency laser interferometry system, can measure six physical quantitys simultaneously, comprise a displacement, 2 linearitys, 3 rotation amounts.Thereby can shorten detection time greatly, and improve detection efficiency, and its tractability being strong, sensing head is passive device, can not introduce heat and disturb, and does not need the cable output signal, and then eliminates heat and disturb the error caused.Precision is high.Simultaneously, the present invention possesses very strong application.
Described in this instructions is preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (16)
1. the optical devices for many geometric errors measurement amount, is characterized in that, described optical devices are by an interferometric optical mirror group
With a catoptrics mirror group, form, described interferometric optical mirror group comprises:
The first optical unit, for measuring displacement X and angle Rx, Ry, Rz;
The second optical unit, for measuring linearity Y and measuring linearity Z;
Base assembly, for being connected with described first, second optical unit;
Described catoptron group will be for returning and be separated by a distance with incident light from the former road of light beam of described interferometric optical mirror group.
2. optical devices as claimed in claim 1, it is characterized in that described the first optical unit is divided into five parts by incident light, three parts of light wherein form first incident light, second incident light and three incident light parallel with X-axis, utilize described first, second, third incident light to obtain displacement X and angle Rx, Ry, Rz; Remaining two parts of light enter respectively the second optical unit for measuring linearity Y and measuring linearity Z.
3. optical devices as claimed in claim 1, is characterized in that, described interferometric optical mirror group comprises four component optical assemblies, a polarization splitting prism assembly, three groups of prism of corner cube assemblies and two groups of Wollaston prism assemblies.
4. optical devices as claimed in claim 3, it is characterized in that, described four component optical assemblies form by a triangular prism assembly and a parallelogram prism assemblies, physical method or other method gummed for a side of one of them inclined-plane of described parallelogram prism assemblies and described triangular prism assembly.
5. optical devices as claimed in claim 4, it is characterized in that, next-door neighbour's face of described triangular prism assembly and described parallelogram prism assemblies all arranges a depolarization spectro-film, described parallelogram prism assemblies reflected light face plating high-reflecting film, other workplace coating anti reflection films.
6. optical devices as claimed in claim 5, is characterized in that, the depolarization spectro-film ratio of the described depolarization spectro-film of the setting of described four component optical assemblies is respectively 4:1,3:1,2:1,1:1.
7. optical devices as claimed in claim 3, is characterized in that, described polarization splitting prism assembly is comprised of two triangular prisms, physical method or other method gummed for the side of described two triangular prisms.
8. optical devices as claimed in claim 7, is characterized in that, next-door neighbour's face plating High Extinction Ratio polarization beam splitter of described two triangular prisms, all the other workplace coating anti reflection films.
9. optical devices as claimed in claim 3, is characterized in that, the equal coating anti reflection film of the plane of incidence of described three groups of prism of corner cube assemblies, and reflecting surface all plates the depolarization reflectance coating.
10. optical devices as claimed in claim 3, is characterized in that, the equal coating anti reflection film of the workplace of described two groups of Wollaston prism assemblies.
11. optical devices as claimed in claim 1, is characterized in that, described catoptrics mirror group comprises three groups of linearity mirror assemblies and three groups of prism of corner cube reflection subassemblies.
12. optical devices as claimed in claim 11, is characterized in that, the reflecting surface plating high-reflecting film of described three groups of linearity mirror assemblies, the plane of incidence coating anti reflection film of described three groups of prism of corner cube reflection subassemblies, reflecting surface plating depolarization reflectance coating.
13. a double-frequency laser interferometry system, is characterized in that, comprising:
Laser instrument, for providing frequency difference and polarization state an orthogonal laser beam;
Optical devices, for described laser beam being formed to reference light and measuring light, described reference light and measurement light form an interference signal;
The laser numbered card, for receiving described interference signal and being converted into a displacement signal;
Described optical devices adopt structure as described as claim 1 to 12 any one.
14. the method for many geometric errors measurement amount, comprise: utilize a laser instrument that frequency difference and the orthogonal laser beam of polarization state are provided, make described laser beam incident one optical devices form reference light and measure light, described reference light and measurement light form an interference signal, utilize described interference signal to obtain error measuring value, it is characterized in that, described laser beam is divided into five parts after entering described optical devices, three parts of light wherein form first incident light parallel with X-axis, the second incident light and the 3rd incident light, utilize described first, second, the 3rd incident light obtains displacement X and angle Rx, Ry, Rz, remaining two parts of light are respectively used to measure linearity Y and measure linearity Z.
15. the method for many geometric errors measurement amount as claimed in claim 14, is characterized in that, described optical devices adopt structure as described as claim 1 to 12 any one.
16. the method for many geometric errors measurement amount as claimed in claim 14, is characterized in that, described displacement X, and angle Rx, Ry, the computing formula of Rz is:
,
,
,
, wherein, the displacement signal that X1 is the first parallel incident light of X-axis, the displacement signal that X2 is the second parallel incident light of X-axis, the displacement signal that X3 is the 3rd parallel incident light of X-axis.
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| CN105492860A (en) * | 2015-01-22 | 2016-04-13 | 北京交通大学 | Laser measurement system and method capable of detecting 21 geometric errors |
| WO2016115704A1 (en) * | 2015-01-22 | 2016-07-28 | 北京交通大学 | Laser measurement system and method capable of detecting 21 geometric errors |
| CN105492860B (en) * | 2015-01-22 | 2018-03-09 | 北京交通大学 | A kind of laser measurement system and method that can detect 21 geometric errors |
| CN107490343A (en) * | 2017-09-21 | 2017-12-19 | 北京工业大学 | One kind is used for six geometric error high-efficiency measurement methods of turntable |
| CN110068272A (en) * | 2019-05-17 | 2019-07-30 | 浙江理工大学 | A kind of two dimension straightness error and its position simultaneous measuring apparatus and method |
| CN111189390A (en) * | 2020-01-09 | 2020-05-22 | 陕西科技大学 | Machine tool geometric error measuring device based on laser interference principle |
| CN111189390B (en) * | 2020-01-09 | 2021-08-10 | 陕西科技大学 | Machine tool geometric error measuring device based on laser interference principle |
| CN114705138A (en) * | 2022-04-29 | 2022-07-05 | 北方民族大学 | Multi-reflection type angle measurement system and measurement method |
| CN114705138B (en) * | 2022-04-29 | 2024-04-12 | 天航长鹰(江苏)科技有限公司 | Multi-reflection angle measurement system and measurement method |
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