CN103403495B - Reduction for the microfabrication device that resonates turns to poor flexure support - Google Patents
Reduction for the microfabrication device that resonates turns to poor flexure support Download PDFInfo
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- CN103403495B CN103403495B CN201180044919.5A CN201180044919A CN103403495B CN 103403495 B CN103403495 B CN 103403495B CN 201180044919 A CN201180044919 A CN 201180044919A CN 103403495 B CN103403495 B CN 103403495B
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- 239000000725 suspension Substances 0.000 claims abstract description 107
- 239000000463 material Substances 0.000 claims description 32
- 238000005530 etching Methods 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000000992 sputter etching Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005452 bending Methods 0.000 description 15
- 238000010276 construction Methods 0.000 description 12
- 238000000708 deep reactive-ion etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000001939 inductive effect Effects 0.000 description 4
- 206010010254 Concussion Diseases 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000000295 complement Effects 0.000 description 1
- 230000001808 coupling Effects 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Abstract
One example includes the mems chip for sensing action, including: standing part；It is connected to the anchor of described standing part；The first nonlinear suspension member of described anchor it is connected in the side of described anchor；Be connected to the second nonlinear suspension member of described anchor in the described side of described anchor, described second nonlinear suspension member has and is mirrored into shape and the position of relation about anchor bisecting plane with described first nonlinear suspension member；And the mass of planar shaped, described mass is at least in part by described first nonlinear suspension member and described second nonlinear suspension member suspention, thus described mass can rotate around described anchor and can slide in the plane being parallel to described standing part.
Description
Priority request and related application
This application claims in entitled " the LOW-QUADRATURE SUSPENSION SYSTEM that JIUYUE in 2010 is submitted on the 18th
FOR MULTI-AXIS GYROSCOPES " U.S. Provisional Patent Application sequence number No.61/384,247 and in JIUYUE 20 in 2010
Entitled " the IMPROVED QUADRATURE REDUCTION STRUCTURE FOR RESONATING that day submits
MICROMACHINED DEVICES " U.S. Provisional Patent Application sequence number No.61/384, the priority of 512, entire contents
It is incorporated herein by.
The application is involved in entitled " the MICROMACHINED INERTIAL SENSOR submitted on August 3rd, 2010
DEVICES " U.S. patent application serial number No.12/849,742, submitted August 3 in 2010 entitled
The U.S. patent application serial number No.12/849 of " MICROMACHINED DEVICES AND FABRICATING THE SAME ",
787 and entitled " the MICROMACHINED MONOLITHIC6-AXIS INERTIAL that submits for 18th in JIUYUE in 2010
SENSOR " U.S. Provisional Patent Application sequence number No.61/384,240, entire contents is incorporated herein by.
Technical field
Background technology
Turning to mistake difference is one of principal element limiting microfabrication sensor (such as gyroscope) performance.In view of driving
Shake and the relative magnitude of sensing concussion, even if small part drive actions is coupled into inductive mode and all may arrange coriolis force
(Coriolis) response.
It practice, the imperfection made may result in undesirable geometry, such as gyroscope arrangement.Undesirable geometry knot
Structure can make to drive concussion to be partly coupled to inductive mode.Even if there is several cross-linked method, such as elastic, viscosity and quiet
Electric coupling method, but in some cases, due to the anisoelastic in suspension elements, Elastic Coupling increasing above in amplitude
Aspiration level.
Having outside face in the sensing system of (out-of-plane) mode of operation (such as gyroscope system), in face direction
Anisoelastic between the outer direction of dough-making powder is the leading root turning to mistake difference.Deep reaction ion etching (deep reactive-
Ion etching, " DRIE ") in sidewall deflection or inclination can result in the cross section of flexure support from rectangle deviation for parallel
Tetragon, causes the elastic axis of the flexure support of suspender to be offset to apparatus surface from parallel orthogonal.In an example,
The microfabrication sensor construction (such as gyroscope arrangement) of single shaft or multiaxis to be caused by DRIE etching inclination by least partly
Height turn to mistake difference impact.
And, existing resonator depends on simple linear flexure support to form deflection structure to allow device
Resonance shifts.It is deformed when being etched in flexure support, significant problem can be caused, cause the biggest unexpected shifting
Position, and induction mechanism would generally be ordered about.
Summary of the invention
Accompanying drawing explanation
In accompanying drawing (it is not drawn necessarily to scale), similar reference can represent similar in different views
Parts.The similar reference numerals with different letter suffix can represent the different examples of similar component.Accompanying drawing is with example rather than limits
The mode of system generally shows each embodiment discussed herein.
Fig. 1 exemplifies the sensor construction including overhung construction according to an example；
Fig. 2 A exemplifies the part of the suspender according to an example；
Fig. 2 B exemplifies hanging shown in Fig. 8 A being under the case of bending that top section is bent upwards in an example
Hang device；
Fig. 2 C exemplifies hanging shown in Fig. 8 A being under the reclinate case of bending of top section in an example
Hang device；
Fig. 3 exemplifies the twisting action around z-axis of the overhung construction according to an example；
Fig. 4 exemplifies the twisting action around x-axis of the overhung construction according to an example；
Fig. 5 exemplifies the twisting action around y-axis of the overhung construction according to an example；
Fig. 6 exemplifies and includes the low two axle gyroscopes turning to mistake difference suspender according to an example；
Fig. 7 exemplifies and includes the low three-axis gyroscope turning to mistake difference suspender according to an example；
What Fig. 8 exemplified the suspender of an example turns to mistake poor；
Fig. 9 exemplifies the drive pattern according to an example；
Figure 10 exemplifies the flexure support having four bending sections according to an example；
Figure 11 exemplifies the flexure support according to an example, and described flexure support includes the flexure support of flexure
With non-deflecting flexure support；
Figure 12 exemplifies the flexure support according to an example, and described flexure support includes than the flexure shown in Figure 11
The flexure support of the flexure that support is short and the non-deflecting flexure shorter than the non-deflecting flexure support shown in Figure 11 are propped up
Bearing portion；
Figure 13 A exemplifies the suspender with very wide arc gap according to an example；
Figure 13 B exemplifies the stress relevant to the deflection degree bending support；
Figure 14 exemplifies the suspender including zigzag portion according to an example；
Figure 15 exemplifies according to the suspender shown in Figure 14 around z-axis torsional deflection of an example；
Figure 16 A exemplifies according to the suspender shown in Figure 14 around z-axis torsional deflection of an example；
Figure 16 B exemplifies according to suspender shown in Figure 14 around y-axis flexure of an example；
Figure 16 C exemplifies according to suspender shown in Figure 14 around x-axis flexure of an example；
Figure 16 D exemplifies according to the suspender shown in Figure 14 along y-axis displacement flexure of an example；
Figure 17 exemplifies the low method turning to mistake difference suspender of manufacture according to an example.
Detailed description of the invention
Unnecessary side wall flexes may negatively affect the performance of flexure support (" deflection division "), described flexure support
For example, support the flexure support of one or more parts of MEMS (" the MEMS ") structure of such as chip.At one
In example, such as when inclined shaft is along the length of flexure support or beam (beam), if one or more sidewall has angle by mistake
Difference, then drive (in-plane drive) action can cause action outside face in face.In an example, pliable and tough or soft when tilt
Property flexure support or beam when being positioned at the opposition side of drive actions, the face extrinsic deflection of generation may cause or facilitate and turns to mistake
Difference (quadrature error).In an example, low poor suspension system (low-quadrature suspension is turned to
System) it is devoted to less desirable outer action is reduced or eliminated.
Fig. 1 shows the sensor construction including overhung construction according to an example.Multiple example discloses for passing
The low of sensor turns to poor suspension system.In an example, overhung construction can be used on and has mass (proof-mass), such as list
In the torsion multiaxis microfabrication gyroscope system of individual mass 104.In an example, mass 104 leads at its center
Cross single central anchor 106 to suspend in midair.In an example, described anchor 106 is connected to quality by one or more flexure supports
Block 104, as being connected to the main frame 116 of mass.In an example, one or more deflection divisions allow mass around three
Individual vertical axle torsionally shakes (oscillate).In an example, suspention flexure support or beam provide face intrinsic deflection and
Face extrinsic deflection, it is allowed to mass torsionally shakes around x-axis, y-axis and z-axis.
One example includes standing part 118, and wherein anchor 106 is connected to standing part 118.In an example, first
Nonlinear suspension member 108 is connected to anchor 106 in the side of anchor.In an example, the second nonlinear suspension member 120 is at anchor
The same side be connected to anchor 106, described second nonlinear suspension member has with described first nonlinear suspension member about anchor
Bisecting plane 122 (such as x-z face) is mirrored into shape and the position of relation.Multiple example includes the mass 104 of plane formula, described
Mass is suspended in midair by the first nonlinear suspension member 108 and the second nonlinear suspension member 120 at least in part so that mass
Can rotate around anchor 106 and can slide in the plane (such as x-y face) be parallel to described standing part.
In an example, C-shaped flexure support 108 includes being connected to anchor 106 and in anchor bisecting plane 122 extends
Portion's part 110 and have the core 114 of proximal part and distal portions, wherein proximal part is connected to interior section
110, distal portions extends outwardly away from anchor 106 along anchor bisecting plane 122 and is connected to extend outwardly away from the outside portion of anchor bisecting plane 122
Divide 112.In an example, core 114 is perpendicular to interior section 110 and exterior section 112.In an example, in
Heart part 114 is parallel to anchor bisecting plane 122.
In an example, anchor the 106, first nonlinear suspension member the 108, second nonlinear suspension member 120 and quality
Block 104 is formed by monoblock type material (monolithic material).In an example, standing part 118 includes and anchor
106, first nonlinear suspension member the 108, second nonlinear suspension member 120 is different with the monoblock type material of mass 104
Fixing monoblock type material (fixed monolithic material).In an example, standing part 118 includes and anchor
106, first nonlinear suspension member the 108, second nonlinear suspension member 120 is identical with the monoblock type material of mass 104
Fixing monoblock type material.
In an example, flexure support is placed in every side of described central anchor, such as the opposition side of described anchor.At one
In example, each C-shaped of side bend action outside the face that support causes and offset by the flexure support of its symmetry.Accordingly
Ground, in an example, the mistake difference that turns to caused on each flexure support is reduced or eliminated on the spot.
In an example, centric sus-pension structure 102 is used in sensor, such as six degree of freedom (DOF) sensor 100
In (such as including the monoblock type six degree of freedom sensor of the flexure support of symmetry).In an example, symmetrical flexure supporting
Portion includes " C-shaped flexure support " 108.In an example, each C-shaped flexure support includes interior flexure support 110 He
The connection flexure support 114 of outer flexure support 112 and the high rigidity between said two flexure support.At one
In example, interior flexure support 112 is at one end connected to anchor 106, and outer flexure support 112 is connected to mass at the other end
104.In an example, suspension system 102 is formed by 8 C-shapeds flexure supports 108 altogether.In an example, two right
The C-shaped flexure supporting portion claimed is in every side of four sides of central anchor structure.
In an example, suspension system provides three kinds of gyroscope mode of operations: reverses in the face of z-axis, is used for driving
Dynamic action；Reverse outside the face of x-axis, for y-axis gyroscope sensing action；Reverse outside the face of y-axis, for x-axis gyro
Instrument sensing action.In an example, concussion pattern can switch the most mutually.
Fig. 2 A shows a part for the suspender according to an example.Fig. 2 B shows and is in top in an example
The suspender shown in Fig. 2 A of the case of bending that part is bent upwards.Fig. 2 C show be in an example top section to
The suspender shown in Fig. 2 A of the case of bending of lower bending.Shown example exemplifies the wheel that suspension gear deforms in all directions
Wide.In an example, in two kinds of deformations shown in Fig. 2 B and Fig. 2 C, bending is equal to and occurs on the contrary.At one
In example, in each direction, two flexure supports bend in the opposite manner.In an example, by producing mutually
The contrary out-of-plane deformation offset so that the overall out-of-plane deformation from deflection division one end to the other end minimizes.
Fig. 3 shows the twisting action around z-axis of the overhung construction according to an example.In an example, suspention system
System 300 is included in two symmetrical C-shaped flexure supports 302,304 of every side of central anchor structure 306.At an example
In, one or two in C-shaped flexure support 302,304 is by the high rigidity being placed between two flexure supports 310,312
Connect flexure support 308 to be formed.In an example, twisting action (such as parallel to action of the plane of the figure) phase in face
Between, each C-shaped of side outside the face that the deflection bending support bent in support causes, action is propped up by symmetrical flexure
Bearing portion 310 ', 312 ' is offset.Correspondingly, cause on each flexure support turns to mistake difference by (locally) on the spot
It is reduced or eliminated.
The example described exemplifies the twisting action around Z axis (i.e. extend into the page and extend the axle of the page).?
In one example, in face during twisting action, the interior flexure support 310 in each C-shaped flexure support and outer flexure
Support 312 in-plane bending.In an example, high rigidity connection support 308 does not suffers from significantly bending.For mass
Around the rotation counterclockwise of z-axis, the top section of mass is moved to the left, as shown in the figure.In an example, high rigidity connects
Support is all moved to the left.Therefore, interior deflection division and the outer deflection division of the C-shaped flexure support on right side are bent downwardly, the most left
Interior deflection division and the outer deflection division of the C-shaped flexure support of side are bent upwards.Therefore, in an example, described action causes
The deflection in opposite direction of the deflection division of symmetrical C-shaped flexure support.Due to the deflection division in symmetrical C-shaped flexure support
Deflection in opposite direction, each C-shaped of side action outside the face that the deflection bending support bent in support causes
Offset by symmetrical flexure support.Therefore, the mistake difference that turns to caused on each flexure support is eliminated on the spot.
Fig. 4 exemplifies the twisting action around x-axis of the overhung construction according to an example.In an example, suspention knot
Structure can be used for the torsion multiaxis microfabrication gyroscope system with mass (mass 404 as single).At an example
In, mass 404 is suspended in midair by single central anchor 406 at its center.In an example, one or more flexure supportings
Anchor 406 is connected to mass 404 by portion 402.In an example, during twisting action outside the face of x-axis, mainly y
The C-shaped suspender of axle side is to 412,412 ' deflections.In an example, the interior flexure support 410 in these C-shaped suspenders,
410 ' torsionally bend around x-axis, play the effect of torsion hinge.
In an example, chip is slice-shaped (wafer shaped), and the first nonlinear suspension member 408 and second is non-
Linear suspension component 412 each has the cross section of general rectangular, and the height of described cross section is less than width.
Fig. 5 exemplifies the twisting action around y-axis of the overhung construction according to an example.In an example, suspention knot
Structure can be used for the torsion multiaxis microfabrication gyroscope system with mass (mass 404 as single).At an example
In, mass 404 is suspended in midair by single central anchor 406 at its center.In an example, one or more flexure supportings
Anchor 406 is connected to mass 404 by portion 402.In an example, during twisting action outside the face of y-axis, mainly exist
The C-shaped suspender of the x-axis side of anchor is to 412,412 ' deflections.These C-shapeds flexure support 414, the interior flexure support in 414 '
Torsionally bend around y-axis, play the effect of torsion hinge.
Fig. 6 shows and includes the low two axle gyroscopes turning to mistake difference suspender according to an example.At an example
In, structure 602 can be used for multiple torsion multiaxis microfabrication gyroscope system, described torsion multiaxis microfabrication gyroscope system
Having single mass 604, described single mass 604 is suspended in midair by single central anchor 606 at its center.Deflection division
Described anchor is connected to mass 604 and allows described mass torsionally to shake around all three axle by 608.Illustrated reality
Example detects around the respective action of x-axis and y-axis, and demonstrates gyroscope mode of operation in three: reverse in the face of z-axis, uses
In drive actions；Reverse outside the face of x-axis, for y-axis gyroscope sensing action；Reverse outside the face of y-axis, for x-axis
Gyroscope sensing action.In an example, one or more comb electrodes 616 are connected to the standing part of described device, and
Sensing is connected to the action of the comb electrode 618 of mass 604.In an example, the comb of comb electrode 618 is along second-class
The axle at the angle point between x-axis and x-axis and arrange.
Fig. 7 exemplifies and includes the low three-axis gyroscope turning to mistake difference suspender according to an example.At an example
In, structure 702 can be used for multiple torsion multiaxis microfabrication gyroscope system, described torsion multiaxis microfabrication gyroscope system
Having single mass 704, described single mass 704 is suspended in midair by single central anchor 706 at its center.Deflection division
Described anchor is connected to mass 704 by 708, and allows described mass torsionally to shake around all three axle.A reality
In example, device plays the function of three axles (X/Y/Z) gyroscope.In an example, suspension system 702 provides and shown in Fig. 6
The gyroscope mode of operation that device is similar.In an example, the device shown in Fig. 7 includes providing for z-axis inductive mode
Additional flexure support 720.In an example, one or more comb electrodes 716 are connected to the fixed part of described device
Point, and sense the action of the comb electrode 718 being connected to mass 704.In an example, the comb edge of comb electrode 718
The axle at the angle between bisection x-axis and x-axis and arrange.
What Fig. 8 showed an example suspender turns to mistake poor.In an example, the angle of flexure support is to turning
To difference (quadrature), there is appreciable impact.In an example, for each design, it is possible to selected angle is to optimize by altogether
What the inclination (skew) of the deflection division of the device that shakes flexure support produced turns to mistake poor.In an example, for desired
The installation of suspension system, best angle is 15 degree.In an example, best angle depends on planform, and based on accordingly
The structure of device and select.In an example, for desired structure, two flexure supports are set to identical position, angle
Move, but two flexure supports can be readily provided as different angles.
Fig. 9 exemplifies the drive pattern according to an example.Inventor recognizes that obliquity effects is in the suspention including anchor 906
Structure causes and turns to mistake poor, and they can by same deflection division 902 or deflection division to 904 on produce contrary inclining
Tiltedly above-mentioned impact is minimized.Being accordingly, there are the flexure support of two flexures separated by framework, each flexure supports
Portion deforms in driving mode of operation in the opposite direction.Rightabout deformation results in rightabout out-of-plane deformation
Tilting, when being ultimately connected to mobile parts, rightabout out-of-plane deformation cancels each other.This is substituted for only including one
The existing machinery device of flexure support, the inclination of a flexure support of described existing machinery device is the most in one direction
It is deformed, causes substantial amounts of the outer action without any counteracting.
But, in some instances, interior flexure support 910,910 ' and outer flexure support 912,912 ' rotate, thus
During drive pattern activates, deformation makes a flexure support be bent upwards, a flexure support is bent downwardly.One
In individual example, drive pattern is the rotary mode around central anchor.In an example, for four suspenders in 404
Every a pair, drive pattern makes one to deform in one direction and another is upwardly-deformed the opposing party.
Figure 10 exemplifies the flexure support of four bending sections according to an example.In an example, deflection division
1002 can include more than one bending section.In an example, this can allow to produce action outside the face more firmly controlled.
In an example, including multiple zigzag portions 1004.In an example, zigzag portion defines and extends to quality from anchor 1006
The zigzag circuit (zigzag) of block 1005.In an example, zigzag circuit includes extending to quality along from anchor 1006
The zigzag portion of the regular amplitude of the pattern (patter) of block 1005.In a further embodiment, described amplitude is change.?
In one example, described zigzag portion is C-shaped, has parallel to each other but is not parallel to the overhead of high rigidity part 1016
1008 and bottom member 1014.
Figure 11 exemplifies the flexure support according to an example, and described flexure support includes the flexure support of flexure
With non-deflecting flexure support.In an example, also by the flexure support 1110,1114 extending or shortening flexure
Or non-deflecting flexure support 1112 determines the parameter of deflection division 1102.In the example shown in Figure 12, shorten outside
The flexure support 1110 of flexure and non-deflecting flexure support 1112.
Figure 12 exemplifies the flexure support according to an example, and described flexure support includes propping up than the flexure in Figure 11
The flexure support of the flexure that bearing portion is short and non-deflecting flexure support is short than in Figure 11 non-deflecting flexure support.With
The parts of Figure 11 are compared, and shorten the flexure support 1210 of outside flexure and non-deflecting flexure support 1212.
Figure 13 A exemplifies the suspender with very wide arc gap according to an example.Figure 13 B exemplifies and bends support
The relevant stress (stress) of deflection degree.In instances, between flexure support 1304 and mass 1306, there is space
1302。
Figure 14 exemplifies the chip 1400 including having the suspender in zigzag portion according to an example.Zigzag portion 1402
Extend between C-shaped flexure support 1406 and mass 1408.At least due to zigzag portion 1402 reduce at least partly by
Bending outside the face that DRIE etching is brought, therefore the increase in zigzag portion 1402 further reduces and turns to mistake poor.
In an example, the exterior section 1412 of the first nonlinear suspension member 1416 has proximal part and distal portion
Point, wherein proximal part is connected to the core 1420 of the first nonlinear suspension member 1416, and distal portions extends outwardly away from anchor
Bisecting plane 1422, the Part IV 1402 of the first nonlinear suspension member 1416 is in the close end office of this Part IV 1402
It is connected to the distal portions of described exterior section, and extends to the distal portions of described Part IV towards anchor 1404, described
Tetrameric distal portions is connected to the Part V extended towards anchor bisecting plane 1422 of the first nonlinear suspension member
1424.In an example, interior section 1410 is linear and parallel with exterior section 1412.
Figure 15 exemplifies according to the suspender shown in Figure 14 around z-axis torsional deflection of an example.Figure 16 A exemplifies root
According to the suspender shown in Figure 14 around z-axis torsional deflection of an example.Figure 16 B exemplifies the y-axis flexure according to an example
The suspender shown in Figure 14.Figure 16 C exemplifies according to the suspender shown in Figure 14 around x-axis flexure of an example.Figure
16D shows according to the suspender shown in Figure 14 along y-axis displacement flexure of an example.
Figure 17 shows the low method turning to mistake difference suspender of manufacture according to an embodiment.In step 1702, institute
The method of stating includes that etachable material is to limit anchor.In step 1704, described method includes etching described material to be limited to described anchor
Side be connected to the first nonlinear suspension member of anchor.In step 1706, described method includes etching described material to limit
The second nonlinear suspension member of anchor, described second non-linear suspention structure it is connected in the side identical with above-mentioned side of described anchor
Part has and is mirrored into shape and the position of relation about anchor bisecting plane with described first nonlinear suspension member.In step
1708, described method includes the mass etching described material to limit planar shaped, and described mass is at least in part by described
First nonlinear suspension member and described second nonlinear suspension member suspention, thus described mass can revolve around described anchor
Turn and can slide in the plane be parallel to substrate.
There may be optional method, be included therein the method that etching includes deep reaction ion etching.Optional at some
Method in, described first nonlinear suspension member and described second nonlinear suspension member are first group of parts, including etching
Described material is to limit and described first group of contrary second group nonlinear suspension member.Some optional methods include: etching
For anchor is connected to the 3rd group of nonlinear suspension member of mass, and etching for being connected to the 4th of mass by anchor
Group nonlinear suspension member, wherein said 3rd group has and described first group and second group of similar key element with the 4th group
(factor) and by the second anchor bisecting plane being perpendicular to the first anchor bisecting plane (bisected) is halved.
Complementary annotations
Theme herein can describe with several examples.Example 1 includes a kind of microcomputer for sensing action
Electrical chip, including: standing part；It is connected to the anchor of described standing part；The first of described anchor it is connected in the side of described anchor
Nonlinear suspension member；The second nonlinear suspension member of described anchor it is connected in the described side of described anchor, described second non-
Linear suspension component has and is mirrored into shape and the position of relation about anchor bisecting plane with described first nonlinear suspension member；
And the mass of planar shaped, described mass is at least in part by described first nonlinear suspension member and described second non-thread
Property suspension member suspention, thus described mass can around described anchor rotate and can be parallel to described standing part put down
Slide in face.
Example 2 includes that the theme of example 1, wherein said first nonlinear suspension member are C-shaped.
Example 3 includes that the theme of example 2, wherein said C-shaped include being connected to described anchor and halving towards described anchor
Interior section that face extends and have the core of proximal part and distal portions, wherein said proximal part is connected to institute
Stating interior section, described distal portions extends outwardly away from described anchor along described anchor bisecting plane and is connected to extend outwardly away from described anchor two
Exterior section etc. facet.
Example 4 includes that the theme of example 3, the described exterior section of wherein said first nonlinear suspension member have connection
To the proximal part of the described core of described first nonlinear suspension member, and extend outwardly away from the remote of described anchor bisecting plane
End portion；The Part IV of described first nonlinear suspension member, is connected to the institute of described exterior section in its close end office
Stating distal portions, and extend to the distal portions of described Part IV towards described anchor, the distal portions of described Part IV is even
Receive the Part V extended towards described anchor bisecting plane of described first nonlinear suspension member.
Example 5 includes that the theme of any instance in example 3-4, wherein said interior section and described exterior section are linear
And it is parallel.
Example 6 includes that the theme of example 5, wherein said core are perpendicular to described interior section and described outside portion
Point.
Example 7 includes the theme of any instance in example 3-6, and wherein said core is parallel to described anchor and halves
Face.
Example 8 includes the theme of any instance in example 1-7, wherein said anchor, described first nonlinear suspension member, institute
State the second nonlinear suspension member and described mass is formed by monoblock type material.
Example 9 includes that the theme of example 8, wherein said standing part include and described anchor, described first non-linear suspention
The fixing monoblock type material that component, described second nonlinear suspension member are different with the described monoblock type material of described mass.
Example 10 includes the theme of any instance in example 1-9, wherein said standing part include with described anchor, described
Fix identical with the described monoblock type material of described mass of one nonlinear suspension member, described second nonlinear suspension member
Monoblock type material.
Example 11 includes the theme of any instance in example 1-10, and wherein said chip is slice-shaped, described first non-thread
Property suspension member and described second nonlinear suspension member each have the cross section of general rectangular, the height of described cross section
Less than width.
Example 12 includes a kind of method, including: etachable material is to limit anchor；Etch described material to be limited to described anchor
Side is connected to the first nonlinear suspension member of anchor；Etch described material and be connected to institute with the described side being limited to described anchor
Stating the second nonlinear suspension member of anchor, described second nonlinear suspension member has closes with described first nonlinear suspension member
Shape and the position of relation it is mirrored in anchor bisecting plane；And etch the described material mass with restriction planar shaped, described
Mass is suspended in midair by described first nonlinear suspension member and described second nonlinear suspension member at least in part, thus described
Mass can rotate around described anchor and can slide in the plane be parallel to substrate.
Example 13 includes the theme of example 12, and wherein etching includes deep reaction ion etching.
Example 14 includes the theme of any instance in example 12-13, wherein said first nonlinear suspension member and described
Second nonlinear suspension member is first group of parts, including etching described material to limit and described first group of contrary second group
Nonlinear suspension member.
Example 15 includes the theme of example 14, non-for described anchor is connected to the 3rd group of described mass including etching
Linear suspension component, and etching for being connected to the 4th group of nonlinear suspension member of described mass, wherein by described anchor
Described 3rd group has with described 4th group and described first group and described second group of similar key element and by being perpendicular to the first anchor
Second anchor bisecting plane of bisecting plane is halved.
Detailed descriptions above includes the reference to accompanying drawing, and accompanying drawing defines a part for detailed description.Accompanying drawing is by showing
The mode of example is shown in which to put into practice the specific embodiment of the application.These embodiments can also be referred to as " example ".This
All publications, patent and patent document involved by literary composition is all as reference content herein, although they are the most in addition
Reference.If herein and there is purposes difference between reference paper, then the purposes of reference paper is regarded as purposes herein
Supplement；If there is implacable difference between the two, then it is as the criterion with purposes herein.
In this article, normally used with patent document as, term " " or " a certain " represent include one or more,
But other situations or use " at least one " or " one or more " time should except.In this article, except as otherwise noted, otherwise
Use term "or" refer to without exclusiveness or so that " A or B " including: " A but be not B ", " B but be not A " and " A and B ".
In the following claims, term " comprises " and " wherein " is equal to each term and " includes " and the plain English of " wherein ".
Equally, in this article, term " comprises " and " including " is open, i.e. system, equipment, article or step include except power
The parts beyond those parts listed after this term in profit requirement, still it is considered as the model in this claim that falls
Within enclosing.And, in the following claims, term " first ", " second " and " the 3rd " etc. are solely for label, the most right
Object has quantitative requirement.The effect of described above be explain orally and unrestricted.Such as, above-mentioned example (or one of example or many
Individual aspect) may be used in combination.Certain routine techniques of prior art on the basis of understanding description above, can be utilized to hold
Other embodiments of row.
Summary is provided, it is allowed to reader quickly determines character disclosed in this technology in accordance with the regulation of 37C.F. R. § 1.72 (b).
Should be understood that when submitting this summary to that this summary is not used in scope or the meaning explaining or limiting claim.Equally, above
Detailed description of the invention in, various features can be classified into by the disclosure rationalize.This is not construed as the open feature of failed call
Essential to any claim.On the contrary, the feature that subject of the present invention may be in is less than the institute of specifically disclosed embodiment
There is feature.Therefore, claim below is incorporated in detailed description of the invention accordingly, and each claim is all as one individually
Embodiment.Should be referring to appended claim, and all scopes of equivalent that these claim are enjoyed, determine this
The scope of application.
Claims (15)
1. for the mems chip that action is sensed, including:
Standing part；
It is connected to the anchor of described standing part；
The first nonlinear suspension member of described anchor it is connected in the side of described anchor；
The second nonlinear suspension member of described anchor, described second nonlinear suspension member it is connected in the described side of described anchor
Have and be mirrored into shape and the position of relation about anchor bisecting plane with described first nonlinear suspension member；And
The mass of planar shaped, described mass is at least in part by described first nonlinear suspension member and described second non-thread
Property suspension member suspention, thus described mass can around described anchor rotate and can be parallel to described standing part put down
Slide in face.
Chip the most according to claim 1, wherein said first nonlinear suspension member is C-shaped.
Chip the most according to claim 2, wherein said C-shaped includes being connected to described anchor and halving towards described anchor
Interior section that face extends and have the core of proximal part and distal portions, wherein said proximal part is connected to institute
Stating interior section, described distal portions extends outwardly away from described anchor along described anchor bisecting plane and is connected to extend outwardly away from described anchor two
Exterior section etc. facet.
Chip the most according to claim 3, the described exterior section of wherein said first nonlinear suspension member has even
Receive the proximal part of the described core of described first nonlinear suspension member, and extend outwardly away from described anchor bisecting plane
Distal portions；The Part IV of described first nonlinear suspension member, is connected to described exterior section in its close end office
Described distal portions, and the distal portions of described Part IV is extended to towards described anchor, the distal portions of described Part IV
It is connected to the Part V extended towards described anchor bisecting plane of described first nonlinear suspension member.
5., according to the chip according to any one of claim 3-4, wherein said interior section and described exterior section are linear
And it is parallel.
Chip the most according to claim 5, wherein said core is perpendicular to described interior section and described outside portion
Point.
Chip the most according to claim 3, wherein said core is parallel to described anchor bisecting plane.
Chip the most according to claim 3, wherein said anchor, described first nonlinear suspension member, described second non-thread
Property suspension member and described mass are formed by monoblock type material.
Chip the most according to claim 8, wherein said standing part includes and described anchor, described first non-linear suspention
The fixing monoblock type material that component, described second nonlinear suspension member are different with the described monoblock type material of described mass.
Chip according to any one of-9 the most according to Claim 8, wherein said standing part include with described anchor, described
Fix identical with the described monoblock type material of described mass of one nonlinear suspension member, described second nonlinear suspension member
Monoblock type material.
11. chips according to claim 1, wherein said chip is slice-shaped, described first nonlinear suspension member and
Described second nonlinear suspension member each has the cross section of general rectangular, and the height of described cross section is less than width.
12. 1 kinds of methods manufacturing suspender, including:
Etachable material is to limit anchor；
Etch described material and be connected to the first nonlinear suspension member of anchor with the side being limited to described anchor；
Etch described material and be connected to the second nonlinear suspension member of described anchor with the described side being limited to described anchor, described
Second nonlinear suspension member has and is mirrored into the shape of relation about anchor bisecting plane with described first nonlinear suspension member
And position；And
Etching the described material mass with restriction planar shaped, described mass is at least in part by described first non-linear suspention
Component and described second nonlinear suspension member suspention, thus described mass can rotate around described anchor and can be parallel
Slide in the plane of substrate.
13. methods according to claim 12, wherein etching includes deep reaction ion etching.
14. according to the method according to any one of claim 12-13, wherein said first nonlinear suspension member and described
Two nonlinear suspension member are first group of nonlinear suspension member, including etching described material to limit and described first group of non-thread
Second group of nonlinear suspension member that property suspension member is contrary.
15. methods according to claim 14, including the 3rd group etched for described anchor is connected to described mass
Nonlinear suspension member, and etching for being connected to the 4th group of nonlinear suspension member of described mass by described anchor, its
Described in the 3rd group of nonlinear suspension member and described 4th group of nonlinear suspension member have with described first group non-linear outstanding
Hang the component key element similar with described second group of nonlinear suspension member and by the second anchor two being perpendicular to the first anchor bisecting plane
Halve etc. facet.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38424710P | 2010-09-18 | 2010-09-18 | |
| US61/384,247 | 2010-09-18 | ||
| US38451210P | 2010-09-20 | 2010-09-20 | |
| US61/384,512 | 2010-09-20 | ||
| PCT/US2011/052006 WO2012037501A2 (en) | 2010-09-18 | 2011-09-16 | Flexure bearing to reduce quadrature for resonating micromachined devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103403495A CN103403495A (en) | 2013-11-20 |
| CN103403495B true CN103403495B (en) | 2016-12-14 |
Family
ID=
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6250157B1 (en) * | 1998-06-22 | 2001-06-26 | Aisin Seiki Kabushiki Kaisha | Angular rate sensor |
| JP3882972B2 (en) * | 1998-06-18 | 2007-02-21 | アイシン精機株式会社 | Angular velocity sensor |
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3882972B2 (en) * | 1998-06-18 | 2007-02-21 | アイシン精機株式会社 | Angular velocity sensor |
| US6250157B1 (en) * | 1998-06-22 | 2001-06-26 | Aisin Seiki Kabushiki Kaisha | Angular rate sensor |
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