CN103341818A - Vacuum adsorption clamp used for aspheric surface machining - Google Patents
Vacuum adsorption clamp used for aspheric surface machining Download PDFInfo
- Publication number
- CN103341818A CN103341818A CN201310282676XA CN201310282676A CN103341818A CN 103341818 A CN103341818 A CN 103341818A CN 201310282676X A CN201310282676X A CN 201310282676XA CN 201310282676 A CN201310282676 A CN 201310282676A CN 103341818 A CN103341818 A CN 103341818A
- Authority
- CN
- China
- Prior art keywords
- clamp body
- anchor clamps
- vacuum suction
- pattern
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
A vacuum adsorption clamp used for aspheric surface machining comprises a clamp body and a profiling mold, wherein a plurality of concentric circle grooves with radial slots are formed in the upper surface of the clamp body, a vacuum connector is arranged on the lower surface of the clamp body and communicated with the upper surface of the clamp body, and the vacuum connector is connected with an outer vacuum adsorption system through a vacuum connector clamp. The upper surface of the profiling mold is a profiling mold face, the profiling mold face is machined to be a curved surface which is opposite to a target surface shape and extends to the periphery of the clamp body, and the profiling mold is fixed on the concentric circle grooves in the upper surface of the clamp body. The vacuum absorption clamp used for the aspheric surface machining has the advantages that porous ceramics material is used, the problem that a workpiece in a groove profiling mold made of hard material is prone to cracking can be avoided, and stability and reliability of the process of elastic deformation surface type copying and machining are ensured; meanwhile, the porous ceramics material has the advantages of being even in adsorption and good in rigidity, and therefore surface type accuracy of the aspheric surface machining can be ensured.
Description
Technical field
The present invention relates to a kind of vacuum suction anchor clamps for aspheric curve processing, especially a kind of vacuum suction anchor clamps that are applicable to based on the aspheric curve processing of strain face type replicating principle.
Background technology
The aspheric curve part is the very important class parts in field such as national defence, Aero-Space, astronomy, and the application on civilian photovoltaic is also very extensive, and market just increases sharply to the demand of aspheric curve lens.The high efficiency, low cost process technology of accurate aspheric curve also becomes the research focus.
In the existing aspheric curve processing method, it is a kind of novel aspheric curve processing method (with reference to Chinese invention patent CN102139465B) that strain face type copies process technology, its basic principle is: according to expection plate part working surface profile, make negative shape pattern, serve as work piece holder; In regime of elastic deformation, use vacuum suction mode adsorbed close in negative shape cam surface the precision sheet workpiece blank; With technology such as plane lapping, polishings blank is carried out precision and ultraprecise processing; Machine the back and discharge workpiece from negative shape pattern, the workpiece strain is recovered, and surface to be machined namely forms the expection profile.This method is utilized the linear elasticity characteristic of materials such as optical glass, makes complicated Machining of Curved Surface change the processing of simple, easy-operating plane into.This method combines the characteristics that the face type copies forming mode and traditional material removal cold working mode, can be particularly suitable for the precise high-efficiency batch machining of slim aspheric curve guaranteeing to improve working (machining) efficiency and uniformity under the stable situation of workpiece machining accuracy and material character.
But at present the aspheric curve processing method that copies mechanism based on strain face type still is in the theoretical conception stage, does not see that it has Research on Practical Application, wherein main difficult point and effective for how to design, the reliable vacuum suction anchor clamps of key issue.Present existing vacuum suction anchor clamps major part is only applicable to plane processing, and part can be used for its pattern face of vacuum suction anchor clamps that strain face type copies aspheric curve processing and is the groove structure that rigidity hard materials such as steel or aluminium alloy are made.In reality processing, because workpiece mostly is the slim workpiece that fragile material such as optical glass is made, contact its surface stress skewness of back with the hard groove, easily produce stress concentrates at the slot wedge place, therefore workpiece easily produces cracked inefficacy in process, is difficult to guarantee the reliability of process.On the other hand, porous ceramic film material is because its inner micropore that interconnects in a large number that exists, therefore have absorption evenly, advantages such as good rigidly, be widely used in the workpiece absorption clamping in the hard brittle material attenuate processing such as silicon chip at present.But porous ceramic film material vacuum suction anchor clamps are plane processing suction jig at present, do not see the porous ceramics material vacuum suction anchor clamps for aspheric curve processing.
In sum, copy mechanism based on strain face type and carry out aspheric curve and add man-hour using at present, lack the vacuum suction anchor clamps that are applicable to aspheric curve processing effectively, reliably.
Summary of the invention
Be at existing its pattern face of vacuum suction anchor clamps that copies aspheric curve processing for strain face type and use the hard material groove structure, have easily cracked, process problem of unstable of workpiece, the present invention proposes a kind of effectively, reliable, the vacuum suction anchor clamps that are used for aspheric curve processing that can guarantee the surface precision of aspheric curve processing.
Vacuum suction anchor clamps for aspheric curve processing of the present invention, it is characterized in that: comprise clamp body, pattern, the upper surface of described clamp body has some the concentric grooves that have radial slot, the vacuum interface that the lower surface setting of described clamp body is communicated with the clamp body upper surface, described vacuum interface is connected by the vacuum suction system of vacuum interface anchor clamps with the outside; The upper surface of described pattern is the pattern face, and described pattern face is processed to opposite with target face shape and extends to the curved surface of clamp body periphery, and described pattern is fixed on the concentric groove of described clamp body upper surface.
The upper surface of described clamp body evenly is provided with some the concentric grooves that have radial slot.
Described clamp body adopts the rigidity hard material to make.
Described pattern adopts porous ceramic film material to make.
Described clamp body adopts No. 45 steel.
Described pattern is the corundum porous ceramics of the porosity 50%, average pore size 100 μ m, and the face type of described pattern face is the spill parabola of diameter 40mm, curvature of centre radius 2500mm.
During use, earlier a two-sided level and smooth flat panel workpieces is contacted with the pattern face of anchor clamps, be connected with the source of the gas of vacuum suction system by the vacuum interface on the clamp body then, then produce negative pressure between flat panel workpieces and the pattern face, fit tightly with the pattern face when flat panel workpieces produces the perfect elasticity distortion, the flat panel workpieces distortion afterwards its face that does not contact with the pattern face as surface to be machined; Grind and polish processing with the workpiece of plane processing mode after to distortion by abrasive disk, become the plane until described surface to be machined; Remove the source of the gas of vacuum suction system, discharge the negative pressure between flat panel workpieces and the pattern face, flat panel workpieces produces restorative strain, and surface to be machined forms the face shape identical with the pattern face, and flat panel workpieces and the contacted facial disfigurement of pattern face are to the plane.
The invention has the beneficial effects as follows: the vacuum suction anchor clamps that use the porous ceramics material to make as minus pattern material, can avoid easily cracked problem of workpiece in the hard material groove pattern, guarantee that strain face type copies stability and the reliability of process; Simultaneously porous ceramic film material have absorption evenly, the characteristics of good rigidly, can guarantee the surface precision of aspheric curve processing, thereby realize the precise high-efficiency processing of aspheric curve.
Description of drawings
Fig. 1 is structure chart of the present invention.
Fig. 2 is that use vacuum suction anchor clamps of the present invention carry out aspheric curve process schematic diagram A.
Fig. 3 is that use vacuum suction anchor clamps of the present invention carry out aspheric curve process schematic diagram B.
Fig. 4 is that use vacuum suction anchor clamps of the present invention carry out aspheric curve process schematic diagram C(left side arrow and represent the flat panel workpieces direction of rotation; Right side arrow represents the abrasive disk direction of rotation).
Fig. 5 is that use vacuum suction anchor clamps of the present invention carry out aspheric curve process schematic diagram D.
Fig. 6 is that use vacuum suction anchor clamps of the present invention carry out aspheric curve process schematic diagram E.
Fig. 7 is that use vacuum suction anchor clamps of the present invention carry out aspheric curve process schematic diagram F.
The specific embodiment
Further specify the present invention below in conjunction with accompanying drawing
With reference to accompanying drawing:
The embodiment 1 vacuum suction anchor clamps for aspheric curve processing of the present invention, comprise clamp body 1, pattern 2, the upper surface of described clamp body 1 has some the concentric grooves 11 that have radial slot, the vacuum interface 12 that the lower surface setting of described clamp body 1 is communicated with the clamp body upper surface, described vacuum interface 12 is connected by the vacuum suction system of vacuum interface anchor clamps with the outside; The upper surface of described pattern 2 is pattern face 21, and described pattern face 21 is processed to opposite with target face shape and extends to the curved surface of clamp body periphery, and described pattern 2 is fixed on the concentric groove 11 of described clamp body 1 upper surface.
Described clamp body 1 adopts the rigidity hard material to make.
Described pattern 2 adopts porous ceramic film material to make.
The upper surface of described clamp body 1 evenly is provided with some the concentric grooves 11 that have radial slot.
Described clamp body 1 adopts No. 45 steel.
Described pattern 2 is the corundum porous ceramics of the porosity 50%, average pore size 100 μ m, and the face type of described pattern face 21 is the spill parabola of diameter 40mm, curvature of centre radius 2500mm.
During use, earlier a two-sided level and smooth flat panel workpieces 3 is contacted with the pattern face 21 of anchor clamps, be connected with vacuum suction system by the vacuum interface 12 on the clamp body 1 then, then produce negative pressure between flat panel workpieces 3 and the pattern face 21, fit tightly with pattern face 21 when flat panel workpieces 3 produces the perfect elasticities distortion, flat panel workpieces 3 distortion afterwards its faces 31 that do not contact with pattern face 21 as surface to be machined; Grind and polish processing with the workpiece of plane processing mode after to distortion by abrasive disk 4, become the plane until described surface to be machined; Remove vacuum suction system, discharge the negative pressure between flat panel workpieces and the pattern face, flat panel workpieces produces restorative strain, and surface to be machined forms the face shape identical with the pattern face, and flat panel workpieces and the contacted facial disfigurement of pattern face are to the plane.
The setting of table 1 machined parameters
Process is steadily reliable, and the cracked phenomenon of workpiece does not take place, workpiece and pattern face favorable sealing property.Machining its surface precision of workpiece is P-V0.62 μ m, and surface roughness is R
a7nm, the vertex curvature radius actual measurement is 2498mm, has proved the present invention program's validity and reliability.
The described content of this specification embodiment only is enumerating the way of realization of inventive concept; protection scope of the present invention should not be regarded as only limiting to the concrete form that embodiment states, protection scope of the present invention also comprise those skilled in the art conceive according to the present invention the equivalent technologies means that can expect.
Claims (4)
1. the vacuum suction anchor clamps that are used for aspheric curve processing, it is characterized in that: comprise clamp body, pattern, the upper surface of described clamp body has some the concentric grooves that have radial slot, the vacuum interface that the lower surface setting of described clamp body is communicated with the clamp body upper surface, described vacuum interface is connected by the vacuum suction system of vacuum interface anchor clamps with the outside; The upper surface of described pattern is the pattern face, and described pattern face is processed to opposite with target face shape and extends to the curved surface of clamp body periphery, and described pattern is fixed on the concentric groove of described clamp body upper surface.
2. vacuum suction anchor clamps for aspheric curve processing as claimed in claim 1, it is characterized in that: the upper surface of described clamp body evenly is provided with some the concentric grooves that have radial slot.
3. vacuum suction anchor clamps for aspheric curve processing as claimed in claim 2, it is characterized in that: described clamp body adopts the rigidity hard material to make.
4. vacuum suction anchor clamps for aspheric curve processing as claimed in claim 1, it is characterized in that: described pattern adopts porous ceramic film material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310282676XA CN103341818A (en) | 2013-07-04 | 2013-07-04 | Vacuum adsorption clamp used for aspheric surface machining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310282676XA CN103341818A (en) | 2013-07-04 | 2013-07-04 | Vacuum adsorption clamp used for aspheric surface machining |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103341818A true CN103341818A (en) | 2013-10-09 |
Family
ID=49276667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310282676XA Pending CN103341818A (en) | 2013-07-04 | 2013-07-04 | Vacuum adsorption clamp used for aspheric surface machining |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103341818A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104600000A (en) * | 2013-10-30 | 2015-05-06 | 沈阳芯源微电子设备有限公司 | Surrounding absorbing roasting structure of base plate |
| CN104759964A (en) * | 2015-03-25 | 2015-07-08 | 中国科学院长春光学精密机械与物理研究所 | Deformation processing method for optical aspheric element |
| CN105108609A (en) * | 2015-08-12 | 2015-12-02 | 杭州利富豪机电设备有限公司 | Pressure cooker cover polishing machine |
| CN105374733A (en) * | 2014-08-20 | 2016-03-02 | 沈阳芯源微电子设备有限公司 | Wafer adsorption apparatus |
| CN107065121A (en) * | 2017-05-26 | 2017-08-18 | 东方电气集团东方锅炉股份有限公司 | A kind of sub- mirror surface-shaped control device and method of settled date mirror unit |
| CN107498472A (en) * | 2017-10-13 | 2017-12-22 | 株洲钻石切削刀具股份有限公司 | A kind of carbide chip cutting edge processing fixture and processing method |
| CN107498356A (en) * | 2017-08-18 | 2017-12-22 | 上海现代先进超精密制造中心有限公司 | Single point diamond turning o clamp for machining and method for ultra thin plate class optical element |
| CN107717671A (en) * | 2017-09-27 | 2018-02-23 | 广东星弛光电科技有限公司 | A kind of bend glass polisher |
| CN109836031A (en) * | 2017-11-27 | 2019-06-04 | 维达力实业(深圳)有限公司 | Transfer tool, 3D glass processing system and processing method |
| CN111745221A (en) * | 2020-06-23 | 2020-10-09 | 上海理工大学 | Clamping device for hard and brittle materials |
| CN112476210A (en) * | 2020-11-26 | 2021-03-12 | 邵阳学院 | Burnishing device of mechanical seal processing |
| CN113404007A (en) * | 2021-07-26 | 2021-09-17 | 北京丰润铭科贸有限责任公司 | Construction method of novel fast-assembly permanent dam |
| CN113909965A (en) * | 2021-11-16 | 2022-01-11 | 福建福特科光电股份有限公司 | Tool clamp for ultra-precision machining |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2746181Y (en) * | 2004-11-30 | 2005-12-14 | 大连理工大学 | Vacuum suction cup |
| KR100614797B1 (en) * | 2005-03-24 | 2006-08-28 | 한미반도체 주식회사 | Chuck table for manufacturing semiconductor |
| WO2010081617A1 (en) * | 2009-01-15 | 2010-07-22 | Suss Microtec Test Systems Gmbh | Chuck and method for receiving and holding thin test substrates |
| CN102139465A (en) * | 2010-09-16 | 2011-08-03 | 湖南大学 | High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor |
| CN102179708A (en) * | 2011-03-09 | 2011-09-14 | 浙江大学宁波理工学院 | Multipoint profiling rigid clamp and method for processing thin-wall workpiece by using same |
| KR20120069390A (en) * | 2010-12-20 | 2012-06-28 | 쿠어스텍아시아 유한회사 | A porous chuck of fixing semiconductor wafer with vacuum suction |
-
2013
- 2013-07-04 CN CN201310282676XA patent/CN103341818A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2746181Y (en) * | 2004-11-30 | 2005-12-14 | 大连理工大学 | Vacuum suction cup |
| KR100614797B1 (en) * | 2005-03-24 | 2006-08-28 | 한미반도체 주식회사 | Chuck table for manufacturing semiconductor |
| WO2010081617A1 (en) * | 2009-01-15 | 2010-07-22 | Suss Microtec Test Systems Gmbh | Chuck and method for receiving and holding thin test substrates |
| CN102139465A (en) * | 2010-09-16 | 2011-08-03 | 湖南大学 | High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor |
| KR20120069390A (en) * | 2010-12-20 | 2012-06-28 | 쿠어스텍아시아 유한회사 | A porous chuck of fixing semiconductor wafer with vacuum suction |
| CN102179708A (en) * | 2011-03-09 | 2011-09-14 | 浙江大学宁波理工学院 | Multipoint profiling rigid clamp and method for processing thin-wall workpiece by using same |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104600000A (en) * | 2013-10-30 | 2015-05-06 | 沈阳芯源微电子设备有限公司 | Surrounding absorbing roasting structure of base plate |
| CN105374733A (en) * | 2014-08-20 | 2016-03-02 | 沈阳芯源微电子设备有限公司 | Wafer adsorption apparatus |
| CN104759964A (en) * | 2015-03-25 | 2015-07-08 | 中国科学院长春光学精密机械与物理研究所 | Deformation processing method for optical aspheric element |
| CN105108609A (en) * | 2015-08-12 | 2015-12-02 | 杭州利富豪机电设备有限公司 | Pressure cooker cover polishing machine |
| CN107065121A (en) * | 2017-05-26 | 2017-08-18 | 东方电气集团东方锅炉股份有限公司 | A kind of sub- mirror surface-shaped control device and method of settled date mirror unit |
| CN107498356A (en) * | 2017-08-18 | 2017-12-22 | 上海现代先进超精密制造中心有限公司 | Single point diamond turning o clamp for machining and method for ultra thin plate class optical element |
| CN107717671A (en) * | 2017-09-27 | 2018-02-23 | 广东星弛光电科技有限公司 | A kind of bend glass polisher |
| CN107498472A (en) * | 2017-10-13 | 2017-12-22 | 株洲钻石切削刀具股份有限公司 | A kind of carbide chip cutting edge processing fixture and processing method |
| CN109836031A (en) * | 2017-11-27 | 2019-06-04 | 维达力实业(深圳)有限公司 | Transfer tool, 3D glass processing system and processing method |
| CN111745221A (en) * | 2020-06-23 | 2020-10-09 | 上海理工大学 | Clamping device for hard and brittle materials |
| CN112476210A (en) * | 2020-11-26 | 2021-03-12 | 邵阳学院 | Burnishing device of mechanical seal processing |
| CN112476210B (en) * | 2020-11-26 | 2022-12-30 | 邵阳学院 | Burnishing device of mechanical seal processing |
| CN113404007A (en) * | 2021-07-26 | 2021-09-17 | 北京丰润铭科贸有限责任公司 | Construction method of novel fast-assembly permanent dam |
| CN113909965A (en) * | 2021-11-16 | 2022-01-11 | 福建福特科光电股份有限公司 | Tool clamp for ultra-precision machining |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103341818A (en) | Vacuum adsorption clamp used for aspheric surface machining | |
| CN102139465B (en) | High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor | |
| CN102350666B (en) | Diamond grinding wheel of elliptical working face and mutual wear forming and trimming method thereof | |
| CN101332584A (en) | Grinding method of sheet metal | |
| CN107498356A (en) | Single point diamond turning o clamp for machining and method for ultra thin plate class optical element | |
| CN103737488A (en) | Vacuum adsorption device and operating method thereof | |
| CN102430970A (en) | Deep hole type pressure adjustable electromagnetic chuck | |
| JP2008303097A (en) | Manufacturing process of silicon carbide single crystal substrate | |
| CN204321847U (en) | A kind of sanding apparatus of copper sheet | |
| CN208584220U (en) | A kind of milling fixture for thin wall circular | |
| CN101733662A (en) | fixture | |
| CN204471027U (en) | Large-scale sheet member milling Combined adjustable fixture | |
| CN208557108U (en) | The processing tool of gauge block | |
| CN202088057U (en) | Multi-chip fixture for optical cold working | |
| JP2015205459A (en) | Scribe device, scribe method and scribing tool | |
| CN205166425U (en) | Elasticity frock clamp suitable for processing of single -point diamond lathe | |
| 姜晨 et al. | Study on method and compensation technology of off-axis wedge aspheric parallel grinding | |
| CN202804484U (en) | Device for PCD (Poly Crystal Diamond) surface leveling processing using laser beams | |
| CN201815930U (en) | Dedicated clamping apparatus for finished polishing of test bars | |
| CN205520899U (en) | Ultra -thin optical element grinds and uses up offset plate structure | |
| CN206536311U (en) | Plate clamp on a kind of optical manufacturing of direct turn-over | |
| CN206169867U (en) | A frock clamp for double -sided lapping burnishing machine | |
| CN215999876U (en) | Large-diameter lens polishing clamp | |
| CN214418502U (en) | Diamond pellet correction wheel and correction wheel processing tool | |
| CN204036202U (en) | A kind of device for processing ceramic solid sphere |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20131009 |