CN102139465A - High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor - Google Patents
High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor Download PDFInfo
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Abstract
The invention provides a high-efficiency ultra-precision machining method for parts with aspheric curved surfaces and a high-efficiency ultra-precision machining device for the parts. In the machining method, the ultra-precision machining is carried out on the parts with the aspheric curved surfaces by utilizing the elastic deformation of a workpiece in a plane machining mode: a negative profiling mould is manufactured to serve as a workpiece fixture according to the profile of the expected working surface of the part, and the surface shape of the profiling mould is trimmed according to the material, size and machining parameters of the workpiece; a precise platy workpiece blank is tightly adsorbed on the surface of the negative profiling mould in the range of elastic deformation in a vacuum adsorption mode; the precision and ultra-precision machining is carried out on the blank by the technologies such as plane grinding, polishing and the like; finally, the workpiece is released from the negative profiling mould, the elastic deformation of the workpiece restores, and the machined surface forms the expected profile; the surface shape of a target is repeatedly duplicated on the negative profiling mould, thereby realizing the bulk machining for the workpieces with aspheric surfaces. The invention provides the new method for ultra-precision machining for the parts with the aspheric curved surfaces in bulk with high efficiency, low cost. The method has important theoretical significance and wide application prospect.
Description
Technical field
The present invention relates to a kind of efficient ultraprecise processing method and device of aspheric curve part.
Technical background
The aspheric curve part is the very important class parts in field such as national defence, Aero-Space, astronomy, and the application on civilian photovoltaic is also very extensive, and market just increases sharply to the demand of aspheric curve lens.The mainstream technology of aspheric curve part processing comprises precise polished technology and face type reproduction technology at present, precise polished technology is based on the aspheric curve polishing technology of CNC or robot, as computer control optical surface forming technique (Computer controlled optical surfacing, CCOS).CCOS is typical aspheric curve machine parts'precise processing method, and its basic thought is to utilize a polishing tool more much smaller than processed element, and the result according to optical surface face shape is detected by computer control machined parameters and machining path, finishes processing.By changing grinding/polishing tool, at these technical some new curved-surface processing methods such as air bag polishing, magnetorheological polishing, liquid jet polishing that occurred again.The process of computer control small tool polishing technology is very effective to the correction of local error, but is easy to generate local medium-high frequency residual error.Strain disc polishing (Stressed-lap polishing has appearred for this reason, SLP) method, it is the instrument basal disc that this method adopts the large scale resilient disc, under the effect of peripheral variable stresses, the face shape of dish can be deformed into needed shape in real time, match with the partial face shape of aspheric curve workpiece, carry out grinding and polishing processing.Face type reproduction technology is to copy to by the face shape with die to realize aspheric processing on the workpiece blank, mainly comprises two kinds of technology of plastic shaping and glass mold pressing; Wherein because optical property and deformation resistance, high temperature resistance and the moisture resistance difference etc. of plastics are all relatively poor, therefore each big optics manufacturer and research institution are all developing the accurate die pressing technology energetically at present.Glass mold pressing (Glass Molding) technological development is from the mid-80, with putting into precision die through preprocessing, chunk glass with optical surface quality, heats under the condition of anaerobic to material inversion temperature T
gMake blank softening, the disposable direct compression molding of pressurizeing subsequently goes out to reach the technology of the optical element of instructions for use, is widely used in the extensive precision optics commodity production.
Above-described aspheric curve processing method, shaping precise polished and workpiece all need the multi-shaft interlocked machine tool system of the digital control system of a complexity and high accuracy, high rigidity to guarantee machining accuracy, and the process complexity has high dependency to process equipment; And its process equipment or development on CNC or the basis in robot all have very high required precision to main shaft, guide rail etc., simultaneously need strict control vibration etc. to processing adverse factors in process, complex structure, and equipment cost is very high; And for hard brittle materials such as optical glass, in order to realize not having the Surface Machining of brittle damage, need carry out material at plastic region and remove, cutting-in generally requires submicron order and below the submicron order, therefore material removing rate is low, can't satisfy the demand that the precison optical component large-scale commercial applications is produced.Face type reproduction technology has partly satisfied the demand that the precison optical component large-scale commercial applications is produced, but owing in process, have the hot melt and the cooling of glass material, wanting soon of glass molds pressure ratio traditional cold processing cooling, slight decline can appear in its refraction coefficient, therefore all will demarcate the change of its refractive index to each piece workpiece of processing; Consider from working (machining) efficiency, be more suitable for processing the material of low inversion temperature, therefore restricted to the kind of glass, and the accurate die pressing technology is mainly used in the following medium and small aspheric surface of processing diameter 100mm at present.
Development along with the market demand, in modern aspheric surface commodity production, especially in mobile phone cam, camera lens are produced, product lot quantity is ten hundreds of, therefore the most urgent problem is exactly how to reduce cost, improve working (machining) efficiency and guarantee the batch repeatability of product, therefore is necessary to provide a kind of efficient ultraprecise processing method and device of the part of aspheric curve cheaply.
Summary of the invention
The objective of the invention is to propose a kind of efficient ultraprecise processing method and device of aspheric curve part, the efficient ultraprecise processing method of this aspheric curve part and device can greatly improve working (machining) efficiency, significantly cut down finished cost when guaranteeing machining accuracy.
Technical solution of the present invention is as follows:
A kind of efficient ultraprecise processing method of aspheric surface part is characterized in that: utilize the strain principle to adopt the mode of plane processing to process free form surface, may further comprise the steps:
Step 1: a face of a bulk material is processed as the curved surface face shape opposite with the curve form of target aspheric curve, and this bulk material forms a negative shape pattern corresponding with the target aspheric curve;
The one side that has curved surface face shape on the negative shape pattern is the pattern face; The one side of processing relative with the pattern face is even surface on negative shape pattern;
Gas channel when between the pattern face of bearing the shape pattern and even surface, getting through a passage at least as the generation negative pressure; Perhaps, the material selection porous crack class material of negative shape pattern;
Step 2: a two-sided level and smooth flat panel workpieces is contacted with the pattern face of described negative shape pattern; Start vavuum pump, vavuum pump produces negative pressure by gas channel between the pattern face of flat panel workpieces and negative shape pattern, described flat panel workpieces produces the perfect elasticity distortion under the effect of this negative pressure, and fit tightly with the pattern face, the face that does not contact with the pattern face after the described flat panel workpieces distortion is as surface to be machined, and machined surface is a curved surface;
The material of negative shape pattern also might be selected porous crack class materials such as porous ceramics or porous metals for use, makes the absorption of workpiece more even; So on procedure of processing, two kinds of parallel situations can occur.
Step 3: surface to be machined is processed into the plane;
Step 4: described flat panel workpieces is separated with negative shape pattern, flat panel workpieces produces restorative strain, described flat panel workpieces original with the contacted facial disfigurement of pattern face be the plane, the described surface to be machined formation face shape identical with target aspheric surface shape machines;
Repeat above-mentioned steps 2-4, can realize that the batch face type of workpiece duplicates processing.
Described negative shape pattern needed according to the material and the size of flat panel workpieces pattern face face shape to be revised earlier before the absorption flat panel workpieces.
Surface to be machined is ground and polishes processing with the plane processing mode, become the plane until surface to be machined.
Described negative shape pattern is made of rigid material, and described rigid material includes but not limited to carbide alloy or mould steel; Described flat panel workpieces is made of the material that possesses the elastic deformability, and the described elastic deformability's of possessing material includes but not limited to optical glass and carborundum.
A kind of efficient ultra-precision processing apparatus of aspheric surface part has a pattern face on the negative shape pattern, and the pattern face is processed to and the opposite curved surface of target aspheric curve shape; The one side of processing relative with the pattern face is even surface on negative shape pattern; On negative shape pattern, be provided with one or more and be used to be communicated with pattern face and even surface and the gas channel when producing negative pressure, perhaps, bear the material selection porous crack class material of shape pattern; Vavuum pump is arranged on even surface one side of bearing the shape pattern with the loading equipemtn that is used for imposed load, the one side of flat panel workpieces fits tightly with the pattern face under suction function, the another side of flat panel workpieces is a machined surface, is provided with milling apparatus and polissoir in machined surface one side.
Technical conceive of the present invention is:
In the process of planar part, the relative motion relation of workpiece and grinding/polishing tool is comparatively simple, need not complicated building motion, and process is controlled easily.Therefore in order to overcome current aspheric curve processing method process complexity, deficiency that equipment cost is high, the strain mechanism that the present invention utilizes elastomeric material changes the Machining of Curved Surface of complexity the processing of into simple, easy-operating plane.
When optical glass material generation small deformation, can think that optical glass material meets isotropism and two basic assumptions of perfect elasticity.Some mechanical property on all directions that isotropism means in the workpiece is identical; And perfect elasticity means when the suffered external force of workpiece is no more than certain limit, after applying external force removes, but its distortion complete obiteration.Simultaneously, optical glass material also meets the independence and the principle of stacking of distortion and load, be that the distortion that causes of the distortion that causes of grinding and polishing tool and externally applied forces is separate, grinding and polishing tool can not influence the workpiece deformation that externally applied forces causes to the effect of workpiece in the process.Therefore for the aspheric curve lens little with the plane departure degree, can consider to process as follows, promptly use aspheric curve process technologies such as grinding, polishing to process the face shape of desire processing aspheric curve earlier on a rigid material, forming a negative shape pattern serves as work piece holder; Then precise flat Plate optical glass material workpiece blank is placed on the pattern face of negative shape pattern, and between workpiece and pattern face, produces negative pressure, make workpiece generation small deformation and with fit tightly by flour milling; Adopt the plane processing mode that workpiece is carried out precise finiss polishing processing subsequently; Machine the back and discharge negative pressure, treat to obtain required aspheric curve lens after the strain complete obiteration of workpiece, be about to complicated aspheric curve processing like this and be converted into easy plane and process.
Beneficial effect:
The present invention proposes a kind of workpiece strain of utilizing adopts the plane processing mode aspheric curve part to be carried out the new method of ultraprecise processing: according to expection plate part working surface profile, make negative shape pattern and serve as work piece holder, and pattern face face shape is repaired according to workpiece material and size; In regime of elastic deformation, use vacuum suction mode adsorbed close in negative shape cam surface the precise flat Plate workpiece blank; With technology such as plane lapping, polishings blank is carried out precision and ultraprecise processing; Machine the back and discharge workpiece from negative shape pattern, the workpiece strain is recovered, and surface to be machined promptly forms the expection profile.This method makes the Machining of Curved Surface of complexity change the processing of simple, easy-operating plane into, processes new method is provided for efficient, low-cost, the batch ultraprecise of aspheric curve part, has important significance for theories and wide application prospect.
The present invention has the following advantages:
1, when guaranteeing high manufacturing accuracy, obtains higher working (machining) efficiency, realize accurate ultra processing efficiently;
2, simplified processing process process realizes aspheric surface part batch machining cheaply; Adopt original processing technology, produce in batches if desired, need carry out ultraprecise processing respectively to each aspheric curve part, the processing cost that expends, instrument cost, human cost and testing cost etc. are all very huge, and adopt technology of the present invention, only need mould of Precision Machining (promptly negative shape pattern), mass-produce any a plurality of aspheric curve part that can reach the high precision requirement with this mould again, just as an egative film can flush out infinite multiple pictures, not only improved production efficiency greatly, and greatly reduce production cost, and can guarantee the batch repeatability of product fully, for the batch process of ultraprecise aspheric curve part provides great technological guidance and support.
3, reduction is to the dependence of process equipment.
Description of drawings
Fig. 1 is a target aspheric surface shape.
Pattern and workpiece blank that Fig. 2 finishes for the processing finishing.
Fig. 3 is adsorbed on the pattern for workpiece and produces strain.
Fig. 4 is for to carry out plane lapping to workpiece.
Fig. 5 finishes for workpiece planarization grinds.
Fig. 6 separates with pattern for negative pressure discharges the back workpiece.
Fig. 7 obtains target aspheric surface shape for after the workpiece elastic recovery.
The specific embodiment
Below with reference to figure and specific implementation process the present invention is described in further details.
Referring to figs. 1 through Fig. 7, a kind of efficient ultraprecise processing method of aspheric curve part, this processing method comprises following steps:
(1), certain of a two-sided level and smooth rigid material piece simultaneously is processed as the face shape through finishing opposite with target aspheric curve shape 1, constitute a negative shape pattern 6; (2), between the pattern face 3 of described negative shape pattern 6 and even surface, get through the gas channel of a passage 5 when producing negative pressure at least;
(3), a two-sided level and smooth flat panel workpieces 2 is contacted with the pattern face 3 of described negative shape pattern 6;
(4), start vavuum pump and also between flat panel workpieces 2 described in (3) and described negative shape pattern 6, produce negative pressure by passage 5 described in (2).Described flat panel workpieces 2 produces the perfect elasticities distortion, and fits tightly with the pattern face 3 of described negative shape pattern.Described flat panel workpieces 2 its faces 7 that do not contact with described negative shape pattern pattern face of distortion back are as surface to be machined, and the face shape of surface to be machined 7 is opposite with target aspheric curve face shape 1;
(5), to 7 imposed loads 9 of surface to be machined described in (4), grind and polish processing by abrasive disk 8 with the plane processing mode, become the plane until described surface to be machined 7;
(6), stop vavuum pump, the negative pressure described in the release (3) between flat panel workpieces 2 and the described negative shape pattern 6, the restorative strain of described flat panel workpieces 2 generations.Described surface to be machined 7 forms the face shape identical with target aspheric curve shape 1, and described flat panel workpieces 2 and described negative shape pattern pattern face 3 contacted facial disfigurements are to the plane.
In described step (1), described negative shape pattern 6 is made of rigid materials such as carbide alloy, mould steel; In described step (3), described flat panel workpieces 2 is made of deformable material such as optical glass, carborundum.
Because optical glass does not have fixing characteristic strength, its characteristic strength depends primarily on the situation of face crack, therefore described flat panel workpieces needed earlier processing to be ground and polished on its surface, to eliminate the crackle on described flat panel workpieces surface before the pattern face that is adsorbed in negative shape pattern.
Described negative shape pattern needed elder generation according to the material and the size of flat panel workpieces pattern face face shape 4 to be trimmed to actual machined surface shape 3 before the absorption flat panel workpieces.
Embodiment 1:
Carried out the deformation processing test at the method that BK7 (K9) optical glass uses the present invention to propose, the workpiece material performance is as follows: Young's modulus E=7480kg/mm
2, Poisson's ratio v=0.23.Machined surface is contemplated to off axis paraboloid mirror, and basic parameter is as follows: vertex curvature radius R
0=4870mm, focal distance f=2435mm, from wheelbase t=160mm, clear aperture D=220mm, thickness h=30mm.Pattern gas channel number is 5, passage bore 10mm, employed vacuum generator is Shenzhen VA280 type vacuum generator of Chuangneng Science Co., Ltd forever, add man-hour vacuum and be-75kPa, abrasive material is a cerium oxide, the ratio of abrasive material and water is 1: 4, process equipment is the precise polished machine of Nanopoli-100 type that nanometer company of Hangzhou ACCTON produces, polish pressure is 2.5kPa, workpiece rotational frequency is 100rpm, polishing time is 1h, and last workpiece machines back actual measurement focal distance f '=2436.5 ± 1mm, from wheelbase t=161 ± 2mm.
Claims (5)
1. the efficient ultraprecise processing method of an aspheric surface part is characterized in that: utilize the strain principle to adopt the mode of plane processing to process free form surface, may further comprise the steps:
Step 1: a face of a bulk material is processed as the curved surface face shape opposite with the curve form of target aspheric curve, and this bulk material forms a negative shape pattern corresponding with the target aspheric curve;
The one side that has curved surface face shape on the negative shape pattern is the pattern face; The one side of processing relative with the pattern face is even surface on negative shape pattern;
Gas channel when between the pattern face of bearing the shape pattern and even surface, getting through a passage at least as the generation negative pressure; Perhaps, the material selection porous crack class material of negative shape pattern;
Step 2: a two-sided level and smooth flat panel workpieces is contacted with the pattern face of described negative shape pattern; Start vavuum pump, vavuum pump produces negative pressure by gas channel between the pattern face of flat panel workpieces and negative shape pattern, described flat panel workpieces produces the perfect elasticity distortion under the effect of this negative pressure, and fit tightly with the pattern face, the face that does not contact with the pattern face after the described flat panel workpieces distortion is as surface to be machined, and machined surface is a curved surface;
Step 3: surface to be machined is processed into the plane;
Step 4: described flat panel workpieces is separated with negative shape pattern, flat panel workpieces produces restorative strain, described flat panel workpieces original with the contacted facial disfigurement of pattern face be the plane, the described surface to be machined formation face shape identical with target aspheric surface shape machines;
2. the efficient ultraprecise processing method of aspheric surface part as claimed in claim 1 is characterized in that: described negative shape pattern needed revise pattern face face shape according to the material and the size of flat panel workpieces earlier before the absorption flat panel workpieces.
3. the efficient ultraprecise processing method of aspheric surface part as claimed in claim 1, it is characterized in that: the process of step 3 is: surface to be machined is ground and polishes processing with the plane processing mode, become the plane until surface to be machined.
4. as the efficient ultraprecise processing method of each described a kind of aspheric surface part of claim 1-3, it is characterized in that: described negative shape pattern is made of rigid material, and described rigid material includes but not limited to carbide alloy or mould steel; Described flat panel workpieces is made of the material that possesses the elastic deformability, and the described elastic deformability's of possessing material includes but not limited to optical glass and carborundum.
5. the efficient ultra-precision processing apparatus of an aspheric surface part is characterized in that, has a pattern face on the negative shape pattern, and the pattern face is processed to and the opposite curved surface of target aspheric curve shape; The one side of processing relative with the pattern face is even surface on negative shape pattern; On negative shape pattern, be provided with one or more and be used to be communicated with pattern face and even surface and the gas channel when producing negative pressure, perhaps, bear the material selection porous crack class material of shape pattern; Vavuum pump is arranged on even surface one side of bearing the shape pattern with the loading equipemtn that is used for imposed load, the one side of flat panel workpieces fits tightly with the pattern face under suction function, the another side of flat panel workpieces is a machined surface, is provided with milling apparatus and polissoir in machined surface one side.
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| CN103268011A (en) * | 2013-06-05 | 2013-08-28 | 清华大学 | Deformable lens body mounting assembly |
| CN103341818A (en) * | 2013-07-04 | 2013-10-09 | 浙江工业大学 | Vacuum adsorption clamp used for aspheric surface machining |
| CN103465267A (en) * | 2013-08-09 | 2013-12-25 | 宁波维真显示科技有限公司 | Concave-convex surface vacuum adsorption device and manufacturing method of concave-convex surface vacuum adsorption device |
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| CN104759964A (en) * | 2015-03-25 | 2015-07-08 | 中国科学院长春光学精密机械与物理研究所 | Deformation processing method for optical aspheric element |
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| CN110713389A (en) * | 2019-11-29 | 2020-01-21 | 东莞市凯融光学科技有限公司 | Method for forming non-spherical ceramic mold core |
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| CN103143903A (en) * | 2011-12-07 | 2013-06-12 | 富泰华工业（深圳）有限公司 | Method for processing hole of metal piece |
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| CN103465267A (en) * | 2013-08-09 | 2013-12-25 | 宁波维真显示科技有限公司 | Concave-convex surface vacuum adsorption device and manufacturing method of concave-convex surface vacuum adsorption device |
| CN103624480A (en) * | 2013-12-02 | 2014-03-12 | 上海现代先进超精密制造中心有限公司 | Punching method for wedge-shaped plate of photoetching machine |
| CN104759964A (en) * | 2015-03-25 | 2015-07-08 | 中国科学院长春光学精密机械与物理研究所 | Deformation processing method for optical aspheric element |
| CN107065121A (en) * | 2017-05-26 | 2017-08-18 | 东方电气集团东方锅炉股份有限公司 | A kind of sub- mirror surface-shaped control device and method of settled date mirror unit |
| CN107717671A (en) * | 2017-09-27 | 2018-02-23 | 广东星弛光电科技有限公司 | A kind of bend glass polisher |
| CN109848838A (en) * | 2019-01-27 | 2019-06-07 | 浙江工业大学 | The material removing rate measuring device and method of elasticity modulus change of gradient polishing disk |
| CN109848838B (en) * | 2019-01-27 | 2023-09-05 | 浙江工业大学 | Material removal rate measuring device and method for elastic modulus gradient change polishing disc |
| CN110713389A (en) * | 2019-11-29 | 2020-01-21 | 东莞市凯融光学科技有限公司 | Method for forming non-spherical ceramic mold core |
| CN111390739A (en) * | 2020-03-31 | 2020-07-10 | 东莞泰升玻璃有限公司 | Double-side polishing device for curved glass |
| CN113909965A (en) * | 2021-11-16 | 2022-01-11 | 福建福特科光电股份有限公司 | Tool clamp for ultra-precision machining |
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