CN103116072B - Microwave detecting system based on clamped beams and indirect power sensors and detecting method of microwave detecting system - Google Patents
Microwave detecting system based on clamped beams and indirect power sensors and detecting method of microwave detecting system Download PDFInfo
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- CN103116072B CN103116072B CN201310027752.2A CN201310027752A CN103116072B CN 103116072 B CN103116072 B CN 103116072B CN 201310027752 A CN201310027752 A CN 201310027752A CN 103116072 B CN103116072 B CN 103116072B
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Abstract
The invention discloses a microwave detecting system based on clamped beams and indirect power sensors and a detecting method of the microwave detecting system. The detecting system comprises an MEMS (micro-electro-mechanical-system) reconfigurable antenna, an MEMS adjustable filter, a control circuit and a microwave detector. The microwave detector is mounted on a GaAs substrate and comprises CPW (coplanar waveguide) transmission lines, two identical MEMS clamped beam structures, a power combiner, and four MEMS indirect waveform power sensors totally identical in structure. The microwave detecting system based on clamped beams and indirect power sensors is novel in structure and small in size, realizes integration of microwave signal frequency and power detection, and is compatible with a GaAs single-chip microwave integrated circuit.
Description
Technical field
The invention belongs to microelectromechanical systems MEMS technology field, is a kind of online microwave frequency detector based on clamped beam and indirect type power sensor and detection method thereof.
Background technology
In research of microwave technology, microwave power and frequency are two important parameters characterizing microwave signal feature.The detection of these two parameters is become to the important component part of electromagnetic measurement.The detecting device of microwave signal frequency and power has application widely in military affairs, personal communication and scientific research etc.Existing microwave frequency detection technique is mainly based on process of heterodyning, counting method, resonance method and phase comparing method, and microwave power detection technology is mainly based on the method for diode, thermopair and thermistor.Although these detection techniques are formed, its shortcoming is cannot system integration frequency detecting and power detection.Along with the development of science and technology, modern PCS Personal Communications System and radar system require more and more higher: microminiaturized, simplify the structure and online microwave frequency detector has become a kind of trend.In recent years, along with the fast development of MEMS technology and deepening continuously to MEMS fixed beam structure and the research of MEMS indirect-type microwave power sensor, make to become possibility based on clamped beam and the microwave frequency of indirect type power sensor and the system integration of power detection.
Summary of the invention
The problem to be solved in the present invention is: existing microwave signal detects cannot system integration frequency detecting and power detection, and user needs simple structure, less volume and can microwave frequency, the power detector of on-line checkingi.
Technical scheme of the present invention is: based on the microwave detection system of clamped beam and indirect type power sensor, described microwave detection system comprises MEMS reconfigurable antenna, MEMS adjustable filter, control circuit and microwave detector, MEMS reconfigurable antenna receives microwave signal, after MEMS adjustable filter, obtain microwave signal to be measured input microwave detector, control circuit connects MEMS reconfigurable antenna and MEMS adjustable filter respectively.
Described microwave detector is provided with measured signal transmission line on gaas substrates, two identical MEMS fixed beam structures of structure, a merit closes device and four identical MEMS indirect-type microwave power sensors of structure, measured signal transmission line is CPW transmission line, described CPW transmission line is made up of signal wire and ground wire, microwave signal to be measured inputs a MEMS indirect-type microwave power sensor by measured signal transmission line, two MEMS fixed beam structures are suspended from above the signal wire of measured signal transmission line, clamped beam one end of two MEMS fixed beam structures connects a MEMS indirect-type microwave power sensor respectively, the other end is connected to merit respectively and closes device, the output terminal that merit closes device connects a MEMS indirect-type microwave power sensor.
As preferably, centered by the distance L between two MEMS fixed beam structures of microwave detector wavelength corresponding to Frequency point 1/4, described center frequency points refers to the center frequency points of the frequency detection range of described microwave detector.
MEMS fixed beam structure and the merit of microwave detector are closed between device and MEMS indirect-type microwave power sensor and are connected by CPW transmission line, and merit is closed device and is connected by CPW transmission line with between MEMS indirect-type microwave power sensor; Fixed beam structure comprises clamped beam and anchor district, is provided with insulating medium layer between the signal wire of the measured signal transmission line of clamped beam and below.
The merit of microwave detector is closed device and is comprised asymmetric coplanar stripline ACPS signal wire, ground wire and isolation resistance, and it is asymmetric coplanar stripline ACPS signal wire that merit is closed between the input end of device and output terminal, and isolation resistance is arranged between two input ends.
A detection method for the above-mentioned microwave detection system based on clamped beam and indirect type power sensor, receives microwave signal by MEMS reconfigurable antenna, after MEMS adjustable filter, obtains microwave signal to be measured, in input microwave detector; In microwave detector, microwave signal to be measured, through measured signal transmission line, is transferred to the MEMS indirect-type microwave power sensor being positioned at measured signal line end, detects the power P of microwave signal to be measured; Microwave signal to be measured from measured signal transmission line through out-of-date, two MEMS fixed beam structures are coupled out the microwave signal that a pair amplitude is equal, there is certain phase differential online, each microwave signal is divided into two-way, one tunnel input work is closed device and is carried out Vector modulation, another road input MEMS indirect-type microwave power sensor, measures the microwave signal power P be coupled out separately by two MEMS fixed beam structures
1, P
2; When two MEMS fixed beam structure distance L determine, there is a phase differential be directly proportional to microwave signal frequency to be measured in two microwave signals be coupled out
merit closes the power P of the composite signal of device
3with this phase differential
there is the relation of a cosine function:
The power P of the microwave signal that four MEMS indirect-type microwave power sensors detect the power P of microwave signal to be measured based on Seebeck principle, MEMS clamped beam is coupled out
1, P
2and merit closes the power P of device composite signal
3size, and with DC voltage form V, V
1, V
2and V
3export measurement result, based on formula (1), the frequency of microwave signal to be measured is:
Wherein, c is the light velocity, ε
erfor the effective dielectric constant of CPW transmission line.
Further, the voltage in MEMS reconfigurable antenna and MEMS adjustable filter on drive electrode is changed by control circuit, thus adjustment MEMS reconfigurable antenna and the centre frequency of MEMS adjustable filter, to realize the detection of microwave signal frequency in a certain characteristic frequency situation and power.
The invention provides a kind of microwave frequency based on clamped beam and indirect type power sensor and power detecting system, the microwave signal received by MEMS reconfigurable antenna, after MEMS adjustable filter, again through one section of CPW transmission line, be transferred to the MEMS indirect-type microwave power sensor being positioned at CPW line end, the power of microwave signal can be detected.To be positioned at above CPW transmission line the microwave signal that a pair amplitude and two structure identical MEMS clamped beams are in a distance coupled out online is equal, there is a phase differential, the supported signal getting microwave signal closes device through merit and carries out Vector modulation.The watt level of the rear microwave signal of synthesis and two microwave signals itself is detected by MEMS indirect-type microwave power sensor.According to the size of the DC voltage exported, infer the frequency of measured signal.The voltage on drive electrode can be changed, thus adjustment MEMS reconfigurable antenna and the centre frequency of MEMS adjustable filter, to realize the detection of microwave signal frequency in a certain characteristic frequency situation and power by control circuit.
Microwave frequency based on clamped beam and indirect type power sensor of the present invention and power detecting system not only have novel structure, be easy to the advantage measured, and it is integrated to realize microwave signal frequency and power detection, and compatible with GaAs monolithic integrated microwave circuit.
Accompanying drawing explanation
Fig. 1 the present invention is based on the microwave frequency of clamped beam and indirect type power sensor and the structural representation of power detecting system.
Fig. 2 is the A-A' sectional view in Fig. 1.
Fig. 3 is the B-B' sectional view in Fig. 1.
Embodiment
As Fig. 1, the present invention includes MEMS reconfigurable antenna, MEMS adjustable filter, control circuit and microwave detector, MEMS reconfigurable antenna receives microwave signal, after MEMS adjustable filter, obtain microwave signal to be measured input microwave detector, control circuit connects MEMS reconfigurable antenna and MEMS adjustable filter respectively.The present invention is produced on GaAs substrate 1, and microwave detector comprises co-planar waveguide CPW transmission line, two structure identical MEMS fixed beam structures, merits close device and four identical MEMS indirect-type microwave power sensors of structure.CPW transmission line is as the signal transmssion line of frequency detector of the present invention, for the transmission of microwave signal to be measured, and MEMS fixed beam structure, merit close the transmission of signal between device and MEMS indirect-type microwave power sensor, CPW transmission line is made up of signal wire and ground wire.
Two identical MEMS clamped beams of structure are positioned at the top of the insulating medium layer 6 on the signal wire 2 of measured signal transmission line.When microwave signal to be measured is through measured signal transmission line, it is identical but there is the microwave signal of certain phase differential that two clamped beams separated by a distance are coupled out a pair amplitude, there is a phase differential be directly proportional to microwave signal frequency to be measured in this pair microwave signal, this being sent into merit to microwave signal and closes device Vector modulation, there is cosine function relationship in the power and the described phase differential that close the composite signal of device output through merit.In order to measure the size of the microwave signal power be coupled out by clamped beam, one end of two fixed beam structures is connected to MEMS indirect-type microwave power sensor respectively, recycling indirect-type microwave power sensor detects the size that merit closes the synthesis power that device exports, and finally realizes the detection of microwave signal frequency to be measured.
The specific embodiments of detection system of the present invention is as follows:
As Fig. 1, the present invention is arranged on GaAs substrate 1, comprises MEMS reconfigurable antenna, MEMS adjustable filter, control circuit and microwave detector, microwave detector comprises CPW signal wire 2, ground wire 3, MEMS clamped beam 4, anchor district 5, insulating medium layer 6, power splitter isolation resistance 7, ACPS signal wire 8, terminal resistance 9, metal thermocouple arm 10, semiconductor thermocouple arm 11, metal contact wires 12 and direct current IOB 13.Gallium arsenide substrate 1 is provided with MEMS reconfigurable antenna, MEMS adjustable filter, control circuit, co-planar waveguide CPW transmission line, two identical MEMS clamped beams, merits conjunction device and four MEMS indirect-type microwave power sensors.
MEMS reconfigurable antenna and MEMS adjustable filter are prior art, no longer describe in detail.
In microwave detector, CPW transmission line comprises signal wire 2 and ground wire 3.Measured signal transmission line adopts CPW transmission line, the microwave signal to be measured received by MEMS reconfigurable antenna is after MEMS adjustable filter, CPW transmission line is entered from the input end of measured signal transmission line, export a MEMS indirect-type microwave power sensor to by output terminal again, detect the power obtaining microwave signal to be measured.
MEMS fixed beam structure comprises clamped beam 4 and anchor district 5.The top of insulating medium layer 6 on the signal wire 2 that the clamped beam 4 of two L is in a distance suspended from measured signal transmission line, as preferably, centered by distance L wavelength corresponding to Frequency point 1/4, described center frequency points refers to the center frequency points of the frequency detection range of described microwave frequency detector.When measured signal from the signal wire of measured signal transmission line through out-of-date, two structure identical MEMS clamped beams 4 are coupled out the microwave signal that a pair amplitude is equal, there is certain phase differential online, and of getting in each microwave signal closes device Vector modulation by merit below.In order to measure the microwave signal power be coupled out by clamped beam 4, another in often pair of microwave signal is connected to MEMS indirect-type microwave power sensor respectively.
Merit is closed device and is comprised asymmetric coplanar stripline ACPS signal wire 8, ground wire 3 and isolation resistance 7.The effect that merit closes device is two the microwave signal Vector modulation be coupled out by MEMS fixed beam structure.When microwave signal to be measured passes through the signal wire of measured signal transmission line, because the clamped beam of two on signal wire has certain distance L, there is a phase differential be directly proportional to microwave signal frequency to be measured in two microwave signals be coupled out, described phase differential be that L is corresponding, when L fixes, phase differential is a definite value, and merit closes the power P of the composite signal that device exports
3the relation of a cosine function is there is with this phase differential:
Wherein, P
1, P
2be respectively the power of the microwave signal that the MEMS clamped beam other end on signal wire is coupled out.Therefore the power that MEMS indirect-type microwave power sensor obtains is corresponding with microwave signal to be measured.
MEMS indirect-type microwave power sensor comprises terminal resistance 9, metal thermocouple arm 10, semiconductor thermocouple arm 11, metal contact wires 12 and direct current IOB 13.The power P of the microwave signal that four MEMS indirect-type microwave power sensors detect the power P of microwave signal to be measured based on Seebeck principle, MEMS clamped beam is coupled out
1, P
2and merit closes the power P of device composite signal
3size, and with DC voltage form V, V
1, V
2and V
3export measurement result, based on formula (1), the frequency of microwave signal to be measured is:
Wherein, c is the light velocity, ε
erfor the effective dielectric constant of CPW transmission line.
Further, the voltage in MEMS reconfigurable antenna and MEMS adjustable filter on drive electrode is changed by control circuit, thus adjustment MEMS reconfigurable antenna and the centre frequency of MEMS adjustable filter, to realize the detection of microwave signal frequency in a certain characteristic frequency situation and power.
The preparation method that the present invention is based on the online microwave frequency detector of clamped beam and indirect type power sensor is:
1) gallium arsenide substrate is prepared: the semi-insulating GaAs substrate selecting extension, wherein extension N
+the doping content of gallium arsenide is 10
18cm
-3, its square resistance is 100 ~ 130 Ω/;
2) photoetching isolate the N of extension
+gallium arsenide, forms figure and the ohmic contact regions of the semiconductor thermocouple arm of thermoelectric pile;
3) N is anti-carved
+gallium arsenide, forming its doping content is 10
17cm
-3the semiconductor thermocouple arm of thermoelectric pile;
4) photoetching: remove and will retain the local photoresist of gold germanium nickel/gold;
5) sputter gold germanium nickel/gold, its thickness is altogether
6) peel off, form the metal thermocouple arm of thermoelectric pile;
7) photoetching: remove the photoresist that will retain tantalum nitride place;
8) sputter tantalum nitride, its thickness is 1 μm;
9) peel off;
10) photoetching: remove the photoresist that will retain the place of ground floor gold;
11) evaporate ground floor gold, its thickness is 0.3 μm;
12) peel off, form CPW signal wire and ground wire, the anchor district of MEMS clamped beam;
13) anti-carve tantalum nitride, form terminal resistance and isolation resistance, its square resistance is 25 Ω/;
14) deposit silicon nitride: with plasma-enhanced chemical vapour deposition technique (PECVD) growth
thick silicon nitride medium layer;
15) photoetching etch nitride silicon dielectric layer: be retained in the silicon nitride on CPW signal wire below MEMS clamped beam;
16) deposit photoetching polyimide sacrificial layer: apply 1.6 μm of thick polyimide sacrificial layer in gallium arsenide substrate, pit is filled up in requirement, and the thickness of polyimide sacrificial layer determines MEMS clamped beam and the distance below it on main line CPW between silicon nitride medium layer; Photoetching polyimide sacrificial layer, only retains the sacrifice layer below clamped beam;
17) evaporate titanium/gold/titanium, its thickness is
the down payment of evaporation for electroplating;
18) photoetching: remove and will electroplate local photoresist;
19) electrogilding, its thickness is 2 μm;
20) photoresist is removed: remove and do not need to electroplate local photoresist;
21) anti-carve titanium/gold/titanium, corrosion down payment, forms CPW signal wire, ground wire, MEMS clamped beam, direct current IOB and metal contact wires;
22) by this gallium arsenide substrate thinning back side to 100 μm;
23) discharge polyimide sacrificial layer: developer solution soaks, remove the polyimide sacrificial layer under MEMS clamped beam, deionized water soaks slightly, and absolute ethyl alcohol dewaters, and volatilizees, dry under normal temperature.
Above-mentioned steps adopts the processes well known in MEMS technology, no longer describes in detail.
Whether distinguish is that the standard of structure of the present invention is as follows:
The online microwave frequency detector detection system of microelectron-mechanical of the present invention comprises MEMS reconfigurable antenna, MEMS adjustable filter, control circuit and microwave detector, and microwave detector comprises two identical MEMS fixed beam structures and four identical MEMS indirect-type microwave power sensors.When microwave signal to be measured is through measured signal transmission line, it is identical but there is the microwave signal of certain phase differential that separated by a distance and two the identical clamped beams be suspended from above signal wire are coupled out a pair amplitude, microwave signal closes device Vector modulation through merit, and the phase differential between the power of composite signal and two microwave signals exists cosine function relationship.In order to measure the size of the microwave signal power be coupled out by clamped beam, each microwave signal inputs MEMS indirect-type microwave power sensor respectively separately.Utilize indirect-type microwave power sensor to detect the size of coupled signal, composite signal and the power of microwave signal to be measured own, finally realize the detection of microwave signal frequency to be measured and power.
Namely the structure meeting above condition is considered as the online microwave frequency detector based on clamped beam and indirect type power sensor of the present invention and detection method.
Claims (7)
1. based on the microwave detection system of clamped beam and indirect type power sensor, it is characterized in that described microwave detection system comprises MEMS reconfigurable antenna, MEMS adjustable filter, control circuit and microwave detector, MEMS reconfigurable antenna receives microwave signal, after MEMS adjustable filter, obtain microwave signal to be measured input microwave detector, control circuit connects MEMS reconfigurable antenna and MEMS adjustable filter respectively
Described microwave detector is provided with measured signal transmission line on gaas substrates, two identical MEMS fixed beam structures of structure, a merit closes device and four identical MEMS indirect-type microwave power sensors of structure, measured signal transmission line is CPW transmission line, described CPW transmission line is made up of signal wire and ground wire, microwave signal to be measured inputs a MEMS indirect-type microwave power sensor by measured signal transmission line, two MEMS fixed beam structures are suspended from above the signal wire of measured signal transmission line, clamped beam one end of two MEMS fixed beam structures connects a MEMS indirect-type microwave power sensor respectively, the other end is connected to merit respectively and closes device, the output terminal that merit closes device connects a MEMS indirect-type microwave power sensor.
2. the microwave detection system based on clamped beam and indirect type power sensor according to claim 1, centered by distance L between two the MEMS fixed beam structures that it is characterized in that microwave detector wavelength corresponding to Frequency point 1/4, described center frequency points refers to the center frequency points of the frequency detection range of described microwave detector.
3. the microwave detection system based on clamped beam and indirect type power sensor according to claim 1 and 2, it is characterized in that the MEMS fixed beam structure of microwave detector and merit are closed between device and MEMS indirect-type microwave power sensor to be connected by CPW transmission line, merit is closed device and is connected by CPW transmission line with between MEMS indirect-type microwave power sensor; Fixed beam structure comprises clamped beam and anchor district, is provided with insulating medium layer between the signal wire of the measured signal transmission line of clamped beam and below.
4. the microwave detection system based on clamped beam and indirect type power sensor according to claim 1 and 2, it is characterized in that the merit of microwave detector is closed device and comprised asymmetric coplanar stripline ACPS signal wire, ground wire and isolation resistance, it is asymmetric coplanar stripline ACPS signal wire that merit is closed between the input end of device and output terminal, and isolation resistance is arranged between two input ends.
5. the microwave detection system based on clamped beam and indirect type power sensor according to claim 3, it is characterized in that the merit of microwave detector is closed device and comprised asymmetric coplanar stripline ACPS signal wire, ground wire and isolation resistance, it is asymmetric coplanar stripline ACPS signal wire that merit is closed between the input end of device and output terminal, and isolation resistance is arranged between two input ends.
6. the detection method of the microwave detection system based on clamped beam and indirect type power sensor described in an any one of claim 1-5, it is characterized in that receiving microwave signal by MEMS reconfigurable antenna, microwave signal to be measured is obtained, in input microwave detector after MEMS adjustable filter; In microwave detector, microwave signal to be measured, through measured signal transmission line, is transferred to the MEMS indirect-type microwave power sensor being positioned at measured signal line end, detects the power P of microwave signal to be measured; Microwave signal to be measured from measured signal transmission line through out-of-date, two MEMS fixed beam structures are coupled out the microwave signal that a pair amplitude is equal, there is certain phase differential online, each microwave signal is divided into two-way, one tunnel input work is closed device and is carried out Vector modulation, another road input MEMS indirect-type microwave power sensor, measures the microwave signal power P be coupled out separately by two MEMS fixed beam structures
1, P
2; When two MEMS fixed beam structure distance L determine, there is a phase differential be directly proportional to microwave signal frequency to be measured in two microwave signals be coupled out
merit closes the power P of the composite signal of device
3with this phase differential
there is the relation of a cosine function:
The power P of the microwave signal that four MEMS indirect-type microwave power sensors detect the power P of microwave signal to be measured based on Seebeck principle, MEMS clamped beam is coupled out
1, P
2and merit closes the power P of device composite signal
3size, and with DC voltage form V, V
1, V
2and V
3export measurement result, based on formula (1), the frequency of microwave signal to be measured is:
Wherein, c is the light velocity, ε
erfor the effective dielectric constant of CPW transmission line.
7. the detection method of the microwave detection system based on clamped beam and indirect type power sensor according to claim 6, it is characterized in that by the voltage on drive electrode in control circuit change MEMS reconfigurable antenna and MEMS adjustable filter, thus adjustment MEMS reconfigurable antenna and the centre frequency of MEMS adjustable filter, to realize the detection of microwave signal frequency in a certain characteristic frequency situation and power.
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| CN103338039B (en) * | 2013-06-19 | 2016-01-20 | 东南大学 | Based on phase-locked loop and the preparation method of micromechanics clamped beam condenser type power sensor |
| CN105388320B (en) * | 2015-12-03 | 2018-09-18 | 东南大学 | A kind of airspeedometer based on micromechanics coupler and indirect type power sensor |
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