CN102967274A - Method for measuring object surface topography - Google Patents
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- CN102967274A CN102967274A CN201210455491XA CN201210455491A CN102967274A CN 102967274 A CN102967274 A CN 102967274A CN 201210455491X A CN201210455491X A CN 201210455491XA CN 201210455491 A CN201210455491 A CN 201210455491A CN 102967274 A CN102967274 A CN 102967274A
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Abstract
The invention discloses a method for measuring object surface topography. The method adopts a femtosecond laser optical comb light source and is a novel non-contact optical surface topography imaging method, double-optical-comb beat frequency detection technology and pulse space chirp technology are combined, spatial position information measurement is converted into distinguishable measurement of detecting light spectrum, ultra-sensitive optical surface topography detection with higher resolution accuracy is achieved, a stable phase-frequency relation of the optical comb light source is utilized, imaging sensitivity of an instrument is improved through a coherent measurement way, high solution imaging can be achieved on the surface topography by using optical comb heterodyning beat frequency detection and frequency spectrum coherent identification technology, a double-optical comb and a nanometer mobile platform are used for scanning an object to be tested automatically, a spatial beam expanding function of a detection light spot is combined, and large-area ultra-sensitive rapid imaging can be achieved on the surface of the object to be tested.
Description
[technical field]
The present invention relates to the laser optics imaging technique, relate in particular to a kind of method of novel non-contact measurement object surface appearance.
[background technology]
Detection and assessment for emerging technologies such as the harmless cutting of laser, laser surface spraying, laser surface texturing and polishing, special alloy welding, the requirement of the technology such as graphical analysis, data processing improves constantly, and the variation of essence has also occured the detection technique of material surface pattern.Not only develop into the Measurement and evaluation of quantification 3 d surface topography from the Measurement and evaluation at initial two-dimensional silhouette interface, and from traditional Measurement and evaluation to the plane surface pattern, develop into the Measurement and evaluation to the curved surface pattern.Yet most of traditional topography measurement instruments are because this limitation on design proposal can't be taken into account temporal resolution and spatial resolution.The micro-imaging detection technique of high-resolution, fast-response is demanded development urgently.What the present instrument majority that is applicable to material surface pattern imaging measurement both at home and abroad adopted is the contact type measurement mode, utilizes probe or visits the direct contactant of pearl surface, obtains its concave-convex surface pattern information.The benefit of this class contact pin type measuring instrument is that its imaging is intuitive and reliable, simple to operate, highly versatile, but measured surface easily scratches by contact pilotage and make the measurement data distortion, causes measurement result inaccurate thereby the contact pilotage wearing and tearing can cause also that lateral resolution reduces; Simultaneously, be subjected to the impact of stylus tip arc radius, contact pilotage is difficult to measure the real profile the lowest point of high-quality surface, thereby has reduced measuring accuracy.The precision of common this contact topography measurement instrument is in 1 micron dimension.In addition, existing surface figure measuring device also has the flying-spot microscope measuring instrument, this device is by computer picture monitor or CRT display controller observation measured surface image, its resolution is higher, but measurement range is little, usable range is limited to the measurement on atom level or nanoscale surface, and measuring condition is harsh.
The present invention namely proposes for the problems referred to above research.
[summary of the invention]
The technical problem to be solved in the present invention provides a kind of method of measuring object surface appearance, the method adopts femtosecond laser light comb light source, be novel non-contact optical surface topography formation method, realize that more the hypersensitive optical surface pattern of high-resolution precision is surveyed, can realize large tracts of land hypersensitive fast imaging to the testee surface.
For solving the problems of the technologies described above, a kind of method of measuring object surface appearance of the present invention, adopt step as follows:
1., adopt two light comb beat frequency Detection Techniques and space chirp technology, comprise the light comb that two light comb beat frequencies are surveyed that is used for that adopts two different repetition frequencys, one for transmitting terminal light comb as producing detecting light beam, another produces reference beam for local oscillations light comb is used as, and testee places on the two-dimensional nano mobile platform;
2., detecting light beam that step is produced in 1. focuses on directive testee surface through the space chirp technical finesse by microcobjective, detecting light beam produces reflection on the testee surface;
3., with step 2. in through the reflection detecting light beam return along original optical path, directive semi-transparent semi-reflecting lens back reflection, 1. the reference beam that produces and penetrate again semi-transparent semi-reflecting lens with step carries out the detection of two light comb frequency spectrum sign at the photodetector of high-speed response, by measuring the distribution of light intensity of different frequency composition, learn the concavo-convex information of surveying diverse location in the hot spot;
4., start two-dimentional accurate nano movable driven by motor nano moving platform and testee moves, 1. 2. 3. repeating step to the autoscan imaging of testee in the XY plane, measures testee surface topography information comprehensively.
Described pair of light comb beat frequency Detection Techniques are that detecting light beam and the relevant heterodyne beat of reference beam that transmitting terminal light comb and local oscillations light comb produce are respectively measured, there are the poor Δ f of small repetition frequency in described detecting light beam and reference beam, the beat signal of transmitting terminal light comb and local oscillations light comb is according to how much plus-minus relations of the light broach of two series each other, distributes in radio-frequency range with the difference on the frequency of Δ f.
Described space chirp technology be utilize the optical dispersion element to detecting light beam under optical dispersion component space dispersion interaction, the light wave of different frequency is evenly distributed on the diverse location of hot spot successively by wavelength length, described optical dispersion element is grating.
It is to utilize the detecting light beam of reference beam and space chirp to carry out the beat frequency detection that described pair of light comb frequency spectrum sign surveyed, and its beat signal is used for the frequency spectrum sign, measures concave-convex surface flatness corresponding to testee surface topography position.
Described transmitting terminal light comb is combed the imaging detection light source that adopts the accurate locking that possesses pulse repetition rate and pulse carrier envelope phase with local oscillations light.
Described transmitting terminal light comb adopts femtosecond laser light comb light source with local oscillations light comb, it has good spatial coherence and directivity, directly non-contact type, not damaged testee surface are little with time comb light source frequency uncertainty, can guarantee accuracy and the precision measured.
The frequency spectrum sign is that the detecting light beam that will have space chirp focuses on the testee surface, the irradiated region of hot spot on the testee surface is detected the light component institute mark of different frequency in the light beam, by measuring the light field information of different frequency, can obtain the testee surface convex-concave flatness of locus corresponding to this frequency.In fact, frequency spectrum sign be with light beam intensity-frequency relation I (ω) is corresponding to intensity-volume coordinate relations I (X), wherein ω is light frequency, X is that a certain light frequency composition is at the coordinate of directions X; The spatial discrimination precision of frequency spectrum sign depends on the distinguishable frequency accuracy of detecting light beam.
A kind of method of measuring object surface appearance of the present invention, the method adopts femtosecond laser light comb light source, be novel non-contact optical surface topography formation method, combine two light comb beat frequency Detection Techniques and pulse interval chirp technology, the spatial positional information measurement is converted to surveying the distinguishable measurement of optical spectrum, realizes that more the hypersensitive optical surface pattern of high-resolution precision is surveyed; Utilize the phase place-frequency relation of light comb light stability, the imaging sensitivity that improves instrument by the coherent measurement mode; Utilize simultaneously the heterodyne beat detection of light comb and the relevant identification technology effects on surface pattern of frequency spectrum can realize high-resolution imaging; Adopt two light combs and nano moving platform to the testee autoscan, and in conjunction with the space of surveying hot spot is expanded function, can realize large tracts of land hypersensitive fast imaging to the testee surface.
[description of drawings]
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail, wherein:
Fig. 1 is that the present invention is to testee measuring surface form principle schematic.
[embodiment]
Below in conjunction with accompanying drawing embodiments of the present invention are elaborated.
At first, simultaneously accurate locking of the carrier envelope phase of transmitting terminal light comb 1 and local oscillations end light comb 6 and repetition frequency.Allow two light combs have a small repetition frequency residual quantity, and two light comb is locked on the same frequency standard simultaneously, guaranteeing has minimum relative frequency shake between two light combs, described transmitting terminal light comb 1 and local oscillations end light comb 6 adopt femtosecond laser light comb light source, it has good spatial coherence and directivity, directly non-contact type, not damaged testee surface are little with time comb light source frequency uncertainty, can guarantee accuracy and the precision measured.
Then, utilize the space chirp technology, make detecting light beam pass through optical dispersion element 2, described optical dispersion element 2 is a pair of grating that is parallel to each other, under the space dispersive effect of grating, make the light wave of different frequency can be evenly distributed on successively according to wavelength length the diverse location of hot spot, finally make detecting light beam have the space chirp distribution character.
Then, utilize frequency spectrum sign that detecting light beam is focused on the testee surface through microcobjective 3, survey hot spot this moment and be detected the light component institute mark of different frequency in the light beam at the irradiated region of body surface; Simultaneously, collect the folded light beam of returning along original optical path by same microcobjective 3, utilize reference beam and detecting light beam to carry out beat frequency through the folded light beam of semi-transparent semi-reflecting lens 8 at photodetector 7 and survey.Beat frequency rate is exactly that reference beam and detecting light beam are through the Optical frequency difference of the folded light beam of semi-transparent semi-reflecting lens 8 reflections, because transmitting terminal light comb 1 is different from the repetition frequency of local oscillations light comb 6, and contain a plurality of frequency contents, so a series of beat signal can appear in the beat frequency frequency spectrum, the frequency interval between each signal is exactly that transmitting terminal light comb 1 is poor with the repetition frequency of local oscillations light comb 6.By comparing successively reference beam and folded light beam, and the Strength Changes between the corresponding beat signal that does not produce through the detecting light beam on testee surface, namely can determine the concavo-convex information of the locus of each frequency sign in the spot area.
At last, start two-dimentional accurate nano movable motor 5 drive nano moving platforms 4 and testee and move, on XY space interscan testee surface, can obtain testee surface appearance feature image information one by one.
Femtosecond laser light comb light source to the transmitting terminal light comb 1 that produces detecting light beam should satisfy:
(1) repetition frequency fr accurately locks.
(2) carrier envelope phase zero-frequency f0 accurately locks.
(3) femtosecond laser light comb light source repetition frequency fr1=100.000132MHz, locking precision Δ fr1＜1mHz; Carrier envelope phase zero-frequency f01=20MHz, locking precision Δ f01＜10mHz; Central wavelength lambda=the 1031nm of laser instrument, spectral width are Δ λ=10nm, and the number that namely comprises the longitudinal mode frequency is about N=c (Δ λ/λ 2)/fr=7 * 104, and wherein c is vacuum light speed.
Femtosecond laser light comb light source for the local oscillations light comb 6 that produces reference beam should satisfy:
(1) the repetition frequency fr of femtosecond laser light comb light source and carrier envelope phase zero-frequency f0 are accurately locked simultaneously.
(2) repetition frequency fr2=100.005303MHz, repetition frequency is shaken less than 1mHz; Carrier envelope phase zero-frequency f02=f01=20MHz, the locking precision is Δ f02＜10mHz, centre wavelength 1031nm, spectral width are Δ λ=10nm.
The realization that spatial frequency is warbled requires: the angle when detecting light beam is the strongest with grating first-order diffraction light is injected the grating pair of a parallel placement, its outgoing beam space-wavelength occurs under the grating dispersion effect, be that space-frequency distributes, the high order end of hot spot is long wave, low order end is shortwave, presses wavelength in the middle of the two ends and distributes successively from growing to lacking.It is 7 * 104 that detecting light beam contains the longitudinal mode number, so hot spot has been become 1/7th * 104 of former spot size by space segmentation.The diameter of former hot spot is 10mm in the present embodiment, and in the case, the diameter of the small light spot that each light frequency is corresponding is about 10mm/ (7 * 104)=140nm.This also is the minimum resolving accuracy of testee measuring surface form ideally.
Two light comb frequency spectrums are identified other realization, should satisfy:
(1) detecting light beam produces beat signal afterwards through overlapping through semi-transparent semi-reflecting lens 8 meeting spatial on photodetector 7 with reference beam behind the testee surface reflection.
(2) in the scope of frequency spectrum 0～2fr1, the frequency interval of beat signal is transmitting terminal light comb 1 and the local oscillations light comb 6 longitudinal mode difference on the frequencies that correspond to each other, be ∑ (nfr2+f0)-∑ (nfr1+f0)=∑ n (fr2-fr1)=∑ n Δ fr, wherein n is positive integer, and Δ fr=5.171kHz is that the repetition frequency of two light combs is poor.
(3) each root frequency tooth of beat signal has represented a position coordinates on testee surface, concavo-convex degree Δ Z on this position coordinates will cause the phase difference φ between detecting light beam and the reference light comb, i.e. Δ φ=(Δ Z/ λ) (2 π).Phase difference φ can cause the amplitude variations Δ E of beat signal, i.e. Δ E=E1E2exp (Δ φ), and wherein E1 and E2 are respectively the amplitude of detecting light beam and reference beam.So, can obtain concavo-convex situation on a certain position coordinates in testee surface by the Strength Changes of measuring beat signal.
(4) utilize bandwidth less than 5.171kHz, the circuit filtering device that centre frequency is adjustable, the beat signal that scanning probe arrives on frequency, reading frequency is Δ fr successively, 2 Δ fr, 3 Δ fr ... n Δ fr, spectrum intensity, can obtain the concavo-convex situation of testee surface correspondence position.
A kind of method of measuring object surface appearance of the present invention, transmitting terminal light comb 1 produces detecting light beam, and directive parallel grating, detecting light beam penetrates after the parallel grating reflection and penetrated semi-transparent semi-reflecting lens 8 directive microcobjectives 3, and detecting light beam directive after microcobjective 3 focuses on is placed on the testee on the two-dimensional nano mobile platform 4; The detecting light beam of described directive testee returns along original optical path, and detecting light beam is through normal sheaf semi-transparent semi-reflecting lens 8 behind the microcobjective 3, and semi-transparent semi-reflecting lens 8 reflects directive photodetector 7 with detecting light beam; Meanwhile, described local oscillations light comb 6 produces reference beams, reference beam penetrate semi-transparent semi-reflecting lens 8 also 7 pairs of testee surface topographies of directive photodetector survey.
Claims (6)
1. method of measuring object surface appearance, step is as follows:
1., adopt two light comb beat frequency Detection Techniques and space chirp technology, comprise the light comb that two light comb beat frequencies are surveyed that is used for that adopts two different repetition frequencys, comb (1) for transmitting terminal light for one and be used as the generation detecting light beam, another produces reference beam for local oscillations light comb (6) is used as, and testee places on the two-dimensional nano mobile platform (4);
2., detecting light beam that step is produced in 1. focuses on directive testee surface through the space chirp technical finesse by microcobjective (3), detecting light beam produces reflection on the testee surface;
3., with step 2. in through the reflection detecting light beam return along original optical path, directive semi-transparent semi-reflecting lens (8) back reflection, 1. the reference beam that produces and penetrate again semi-transparent semi-reflecting lens (8) with step carries out the detection of two light comb frequency spectrum sign at the photodetector (7) of high-speed response, by measuring the distribution of light intensity of different frequency composition, learn the concavo-convex information of surveying diverse location in the hot spot;
4., start that two-dimentional accurate nano movable motor (5) drives nano moving platform and testee moves, 1. 2. 3. repeating step to the scanning imagery of testee in the XY plane, measures testee surface topography information comprehensively.
2. described a kind of method of measuring object surface appearance according to claim 1, it is characterized in that described pair of light comb beat frequency Detection Techniques are that detecting light beam and the relevant heterodyne beat of reference beam that transmitting terminal light comb (1) and local oscillations light comb (6) produce are respectively measured, there are the poor Δ f of small repetition frequency in described detecting light beam and reference beam, the beat signal of transmitting terminal light comb (1) and local oscillations light comb (6) is according to how much plus-minus relations of the light broach of two series each other, distributes in radio-frequency range with the difference on the frequency of Δ f.
3. described a kind of method of measuring object surface appearance according to claim 1, it is characterized in that described space chirp technology be utilize optical dispersion element (2) to detecting light beam under optical dispersion component space dispersion interaction, the light wave of different frequency is evenly distributed on the diverse location of hot spot successively by wavelength length, and described optical dispersion element is grating.
4. described a kind of method of measuring object surface appearance according to claim 1, it is characterized in that it is to utilize the detecting light beam of reference beam and space chirp to carry out the beat frequency detection that described pair of light comb frequency spectrum sign surveyed, and its beat signal is used for the frequency spectrum sign, measure concave-convex surface flatness corresponding to testee surface topography position.
5. described a kind of method of measuring object surface appearance according to claim 1 is characterized in that described transmitting terminal light comb (1) and local oscillations light comb (6) adopt the imaging detection light source of the accurate locking that possesses pulse repetition rate and pulse carrier envelope phase.
6. described a kind of method of measuring object surface appearance according to claim 5 is characterized in that described transmitting terminal light comb (1) and local oscillations light comb (6) adopt femtosecond laser light comb light source.
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Cited By (13)
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| CN104316180A (en) * | 2014-11-02 | 2015-01-28 | 华东师范大学 | Double-optical frequency comb optical imaging method based on continuous frequency stabilized laser |
| CN104897076A (en) * | 2014-03-07 | 2015-09-09 | 中国科学院光电研究院 | Three dimensional shape measurement method for micro nanoscale |
| CN105698705A (en) * | 2014-11-26 | 2016-06-22 | 北京智朗芯光科技有限公司 | Device for detecting two-dimensional morphology of wafer substrate |
| CN108204890A (en) * | 2017-12-27 | 2018-06-26 | 四川大学 | The test method and its detection device of lighting system light field uniformity |
| CN108844493A (en) * | 2018-07-04 | 2018-11-20 | 天津大学 | The double light comb topography measurement devices of Electro-optical Modulation and its method of calibration |
| CN108917643A (en) * | 2018-07-04 | 2018-11-30 | 天津大学 | Three dimensional shape measurement system and method based on the scanning ranging of double light combs |
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| CN108844493A (en) * | 2018-07-04 | 2018-11-20 | 天津大学 | The double light comb topography measurement devices of Electro-optical Modulation and its method of calibration |
| CN108917643A (en) * | 2018-07-04 | 2018-11-30 | 天津大学 | Three dimensional shape measurement system and method based on the scanning ranging of double light combs |
| CN109883350A (en) * | 2019-01-25 | 2019-06-14 | 北京航天计量测试技术研究所 | A kind of high precision measuring system and measurement method of abnormal curved surface inside configuration pattern |
| CN109709572A (en) * | 2019-02-01 | 2019-05-03 | 西安知微传感技术有限公司 | A kind of half coaxial optical path reception laser radar system |
| CN110260811A (en) * | 2019-04-26 | 2019-09-20 | 合肥工业大学 | A kind of multiple target 3D surface topography measuring method based on femtosecond pulse |
| CN111289223A (en) * | 2019-12-19 | 2020-06-16 | 西安空间无线电技术研究所 | Real-time phase measurement system and method based on double-optical comb beat frequency |
| CN111289223B (en) * | 2019-12-19 | 2021-12-07 | 西安空间无线电技术研究所 | Real-time phase measurement system and method based on double-optical comb beat frequency |
| CN111721231A (en) * | 2020-06-03 | 2020-09-29 | 华东师范大学 | Plant ecological monitoring system based on optical frequency comb |
| CN111721231B (en) * | 2020-06-03 | 2021-11-19 | 华东师范大学 | Plant ecological monitoring system based on optical frequency comb |
| CN112146592A (en) * | 2020-09-22 | 2020-12-29 | 中国科学院微电子研究所 | Micro-nano device surface contour line on-line measuring device and method based on optical frequency comb |
| CN112146592B (en) * | 2020-09-22 | 2022-04-22 | 中国科学院微电子研究所 | Micro-nano device surface contour line on-line measuring device and method based on optical frequency comb |
| CN113295106A (en) * | 2021-05-26 | 2021-08-24 | 清华大学 | Double-optical comb speckle interferometry system and method |
| CN113295106B (en) * | 2021-05-26 | 2022-07-15 | 清华大学 | Double-optical comb speckle interferometry system and method |
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Application publication date: 20130313 |