CN102286778A - Infrared temperature measurement device of polycrystalline furnace and polycrystalline furnace using same - Google Patents
Infrared temperature measurement device of polycrystalline furnace and polycrystalline furnace using same Download PDFInfo
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- CN102286778A CN102286778A CN2011102243269A CN201110224326A CN102286778A CN 102286778 A CN102286778 A CN 102286778A CN 2011102243269 A CN2011102243269 A CN 2011102243269A CN 201110224326 A CN201110224326 A CN 201110224326A CN 102286778 A CN102286778 A CN 102286778A
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Abstract
The invention provides an infrared temperature measurement device of a polycrystalline furnace. The infrared temperature measurement device comprises a thermometer base frame, a first mirror, a second mirror, a plug screw, a quartz rod, a detection loop rod, an infrared thermometer and a component bearing part, wherein the thermometer base frame is fixed on of an upper flange of a chamber of the polycrystalline furnace; the thermometer base frame comprises a fixing seat fixed on the upper flange of the chamber, an observation drum fixed on the fixing seat and a sealing seat fixed on the observation drum; the center of the fixing seat is provided with an observation hole and a penetration hole; the observation hole and penetration hole are concentrically arranged; the through hole of the sealing seat and the observation hole of the observation drum are concentrically arranged; the first mirror is installed in the through hole of the sealing seat; the plug screw is screwed on the fixing seat of the thermometer base frame and is concentric with the penetration hole of the fixing seat; and the component bearing part is arranged on the thermometer base frame, so that the second mirror and infrared thermometer are placed above the sealing seat. The invention also provides the polycrystalline furnace using the infrared temperature measurement device of the polycrystalline furnace.
Description
Technical field:
The present invention relates to the silicon single crystal manufacturing apparatus technical field, the polycrystalline furnace of particularly a kind of polycrystalline furnace infrared temperature measurement apparatus and employing polycrystalline furnace infrared temperature measurement apparatus.
Background technology:
Polycrystalline furnace is that polycrystalline silicon material is converted into the indispensable equipment in the polysilicon ingot process process, and polycrystal silicon ingot is the basic material in photovoltaic generation and the semicon industry after art breading.Polycrystal silicon ingot is as the critical support material of advanced information society, is one of most important polycrystalline material in the world at present, and it is not only the major function material of development computer and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.Existing polycrystalline furnace all can be used the polycrystalline furnace infrared temperature measurement apparatus, wherein the effect of polycrystalline furnace infrared temperature measurement apparatus is as follows: in the polycrystalline silicon ingot casting process, through dissolving, during long brilliant, annealing operation, all need according to temperature in the technology controlling and process cavity, infrared thermometer can record temperature in the cavity, effectively reduce the ingot casting cost, made things convenient for operator's use simultaneously.
Yet there are the following problems for existing polycrystalline furnace infrared temperature measurement apparatus: operation process in, during naked-eye observation, need to take out infrared thermometer, eyepiece observation is installed, wasted operator's time greatly.
Summary of the invention:
In view of this, be necessary to provide a kind of simple to operate and can save the polycrystalline furnace infrared temperature measurement apparatus of operator's operating time.
Also be necessary to provide a kind of polycrystalline furnace that adopts this polycrystalline furnace infrared temperature measurement apparatus.
A kind of polycrystalline furnace infrared temperature measurement apparatus comprises thermometer pedestal, first mirror, second mirror, plug screw, quartz pushrod, detection loop bar, infrared thermometer, element supporting part.The thermometer pedestal is fixed on the upper flange of cavity of polycrystalline furnace, wherein, the thermometer pedestal comprises permanent seat, inspection section and sealing socket, permanent seat is fixed on the upper flange of cavity, the center of permanent seat offers vision slit and penetrates the hole, and an end of inspection section is fixed on the permanent seat and with vision slit is concentric and is provided with.Sealing socket is fixed on the other end of inspection section.Offer through hole on the sealing socket, and through hole is provided with the vision slit of inspection section is concentric, first mirror is installed in the through hole of sealing socket.Plug screw is spun on the permanent seat of thermometer pedestal, and with permanent seat on to penetrate the hole concentric.Quartz pushrod is inserted in the quartz crucible after passing plug screw and penetrating the hole.Detecting loop bar is communicated with by the inspection section of clip with the thermometer pedestal.The element supporting part is arranged on the thermometer pedestal, is used to carry second mirror, infrared thermometer, and second mirror, infrared thermometer are placed directly over the sealing socket.
A kind of polycrystalline furnace that adopts the polycrystalline furnace infrared temperature measurement apparatus, comprise cavity, thermal field, quartz crucible and polycrystalline furnace infrared temperature measurement apparatus, quartz crucible is installed on the interior pallet of thermal field, and thermal field is contained in the cavity, and the polycrystalline furnace infrared temperature measurement apparatus is fixed on the upper flange of cavity.The polycrystalline furnace infrared temperature measurement apparatus comprises thermometer pedestal, first mirror, second mirror, plug screw, quartz pushrod, detection loop bar, infrared thermometer, element supporting part.The thermometer pedestal is fixed on the upper flange of cavity of polycrystalline furnace, wherein, the thermometer pedestal comprises permanent seat, inspection section and sealing socket, permanent seat is fixed on the upper flange of cavity, the center of permanent seat offers vision slit and penetrates the hole, and an end of inspection section is fixed on the permanent seat and with vision slit is concentric and is provided with.Sealing socket is fixed on the other end of inspection section.Offer through hole on the sealing socket, and through hole is provided with the vision slit of inspection section is concentric, first mirror is installed in the through hole of sealing socket.Plug screw is spun on the permanent seat of thermometer pedestal, and with permanent seat on to penetrate the hole concentric.Quartz pushrod is inserted in the quartz crucible after passing plug screw and penetrating the hole.Detecting loop bar is communicated with by the inspection section of clip with the thermometer pedestal.The element supporting part is arranged on the thermometer pedestal, is used to carry second mirror, infrared thermometer, and second mirror, infrared thermometer are placed directly over the sealing socket.
The polycrystalline furnace of polycrystalline furnace infrared temperature measurement apparatus provided by the invention and employing polycrystalline furnace infrared temperature measurement apparatus, when utilizing the polycrystalline furnace infrared temperature measurement apparatus to measure in the stove of polycrystalline furnace temperature, only need infrared thermometer is placed in temperature in the stove that just can record polycrystalline furnace on the thermometer pedestal, when need observing in the stove situation, only need second mirror is placed in situation in the stove that just can observe polycrystalline furnace on the thermometer pedestal, so this polycrystalline furnace infrared temperature measurement apparatus installation, easy to operate, and then reduction operator's working hour.
Description of drawings:
Accompanying drawing 1 is the plan structure synoptic diagram of the polycrystalline furnace of a better embodiment.
Accompanying drawing 2 is cross-sectional view of polycrystalline furnace among Fig. 1.
Accompanying drawing 3 is enlarged views of polycrystalline furnace infrared temperature measurement apparatus among Fig. 2.
Accompanying drawing 4 is perspective view of polycrystalline furnace infrared temperature measurement apparatus among Fig. 1.
Accompanying drawing 5 is cross-sectional view of the polycrystalline furnace infrared temperature measurement apparatus of another better embodiment.
Accompanying drawing 6 is perspective view of polycrystalline furnace infrared temperature measurement apparatus among Fig. 5.
Among the figure: polycrystalline furnace 10, cavity 20, thermal field 30, quartz crucible 40, silicon material 50, polycrystalline furnace infrared temperature measurement apparatus 60, thermometer pedestal 61, permanent seat 611, inspection section 612, sealing socket 613, first mirror 63, second mirror 64, plug screw 65, quartz pushrod 66, detect loop bar 67, infrared thermometer 68, element supporting part 69, rotating shaft base 691, turning axle 692, temperature measurer mounting plate 693, contiguous block 694, microscope base 695, polycrystalline furnace infrared temperature measurement apparatus 80, thermometer pedestal 81, first mirror 83, second mirror 84, plug screw 85, quartz pushrod 86, detect loop bar 87, infrared thermometer 88, element supporting part 89
Embodiment:
Please be simultaneously referring to Fig. 1, Fig. 2, polycrystalline furnace 10 comprises cavity 20, thermal field 30, quartz crucible 40 and polycrystalline furnace infrared temperature measurement apparatus 60.Silicon material 50 is contained in the quartz crucible 40, and quartz crucible 40 is installed on the pallet in the thermal field 30, and thermal field 30 is contained in the cavity 20, and polycrystalline furnace infrared temperature measurement apparatus 60 is fixed on the upper flange 21 of cavity 20.
Further, please referring to Fig. 3 and Fig. 4, polycrystalline furnace infrared temperature measurement apparatus 60 comprises thermometer pedestal 61, first mirror 63, second mirror 64, plug screw 65, quartz pushrod 66, detects loop bar 67, infrared thermometer 68, element supporting part 69.
Thermometer pedestal 61 is fixed on the upper flange 21 of cavity 20 of polycrystalline furnace 10.Wherein, thermometer pedestal 61 comprises permanent seat 611, inspection section 612 and sealing socket 613, permanent seat 611 is fixed on the upper flange 21 of cavity 20, and the center of permanent seat 611 offers vision slit and penetrates the hole, and an end of inspection section 612 is fixed on the permanent seat 611 and with vision slit is concentric and is provided with.Sealing socket 613 is fixed on the other end of inspection section 612.Offer through hole on the sealing socket 613, and through hole is provided with the vision slit of inspection section 612 is concentric, first mirror 63 is installed in the through hole of sealing socket 613, so can observe the melting state of the silicon material 50 of polycrystalline furnace 10 inside by first mirror 63.
Detect loop bar 67 and be communicated with, when the pressure in the polycrystalline furnace 10 changes, can feed argon gas, adjust the pressure in the polycrystalline furnace 10 by detecting loop bar 67 by the inspection section of clip with thermometer pedestal 61.
Utilize polycrystalline furnace infrared temperature measurement apparatus 60 to measure in polycrystalline furnaces 10 stoves temperature and when observing in the stove situation: by rotation turning axle 692, make thermometer mounting plate 693, microscope base 695 alternately is positioned at the upper end of sealing socket 62, and limiting section by temperature measurer mounting plate 693, the limiting section of microscope base 695 and quartz pushrod 66 are realized temperature measurer mounting plate 693, the location of microscope base 695, the melting state that utilizes infrared thermometer 68 realization automatic temperature measurements that are installed on the temperature measurer mounting plate 693 and the silicon material 50 that utilizes second mirror, 64 realization naked-eye observation polycrystalline furnaces, 10 inside that are installed on the microscope base 695 like this etc.
In other embodiments, please be simultaneously referring to Fig. 5, Fig. 6, polycrystalline furnace infrared temperature measurement apparatus 80 comprises thermometer pedestal 81, first mirror 83, second mirror 84, plug screw 85, quartz pushrod 86, detects loop bar 87, infrared thermometer 88, element supporting part 89.Thermometer pedestal 81, first mirror 83, plug screw 85, quartz pushrod 86, detect thermometer pedestal 61 in position relation and the polycrystalline furnace infrared temperature measurement apparatus 60 between the loop bar 87, sealing socket 62, first mirror 63, plug screw 65, quartz pushrod 66, the position detected between the loop bar 67 concerns identical.Difference is, element supporting part 89 is arranged on the sealing socket 813, element supporting part 89 is cylindric, element supporting part 89 is provided with the through hole of sealing socket 813 is concentric, second mirror 84, infrared thermometer 88 are laid according to actual needs, for example infrared thermometer 88 is installed on the element supporting part 89 during thermometric, when observing in the polycrystalline furnace situation second mirror 84 is installed on the element supporting part 89.
Claims (8)
1. polycrystalline furnace infrared temperature measurement apparatus, it is characterized in that: the polycrystalline furnace infrared temperature measurement apparatus comprises thermometer pedestal, first mirror, second mirror, plug screw, quartz pushrod, detection loop bar, infrared thermometer, element supporting part; The thermometer pedestal is fixed on the upper flange of cavity of polycrystalline furnace, wherein, the thermometer pedestal comprises permanent seat, inspection section and sealing socket, permanent seat is fixed on the upper flange of cavity, the center of permanent seat offers vision slit and penetrates the hole, one end of inspection section is fixed on the permanent seat and with vision slit is concentric and is provided with, and sealing socket is fixed on the other end of inspection section; Offer through hole on the sealing socket, and through hole is provided with the vision slit of inspection section is concentric, first mirror is installed in the through hole of sealing socket; Plug screw is spun on the permanent seat of thermometer pedestal, and with permanent seat on to penetrate the hole concentric; Quartz pushrod is inserted in the quartz crucible after passing plug screw and penetrating the hole; Detecting loop bar is communicated with by the inspection section of clip with the thermometer pedestal; The element supporting part is arranged on the thermometer pedestal, is used to carry second mirror, infrared thermometer, and second mirror, infrared thermometer are placed directly over the sealing socket.
2. polycrystalline furnace infrared temperature measurement apparatus according to claim 1 is characterized in that: the element supporting part is arranged on the permanent seat of thermometer pedestal, and the element supporting part comprises rotating shaft base, turning axle, temperature measurer mounting plate, contiguous block, microscope base; Rotating shaft base is fixed on the permanent seat of thermometer pedestal, and turning axle is spun on the rotating shaft base, and wherein plug screw is between rotating shaft base and inspection section; One end of temperature measurer mounting plate is fixed on the upper end of turning axle, and the middle part of temperature measurer mounting plate is provided with limiting section, and the other end of temperature measurer mounting plate offers open holes, and infrared thermometer is installed in the open holes on the temperature measurer mounting plate; Contiguous block is installed in the side of turning axle, and an end of microscope base is fixed on the contiguous block, and the middle part of microscope base is provided with limiting section, and the other end of microscope base offers open holes, and second mirror is placed in the open holes of microscope base.
3. polycrystalline furnace infrared temperature measurement apparatus according to claim 2 is characterized in that: the setting that meets at right angles of microscope base and temperature measurer mounting plate.
4. polycrystalline furnace infrared temperature measurement apparatus according to claim 1 is characterized in that: the element supporting part is arranged on the sealing socket, and the element supporting part is cylindric, and the element supporting part is provided with the through hole of sealing socket is concentric.
5. polycrystalline furnace that adopts the polycrystalline furnace infrared temperature measurement apparatus, comprise cavity, thermal field, quartz crucible and polycrystalline furnace infrared temperature measurement apparatus, quartz crucible is installed on the interior pallet of thermal field, thermal field is contained in the cavity, the polycrystalline furnace infrared temperature measurement apparatus is fixed on the upper flange of cavity, it is characterized in that: the polycrystalline furnace infrared temperature measurement apparatus comprises thermometer pedestal, first mirror, second mirror, plug screw, quartz pushrod, detection loop bar, infrared thermometer, element supporting part; The thermometer pedestal is fixed on the upper flange of cavity of polycrystalline furnace, wherein, the thermometer pedestal comprises permanent seat, inspection section and sealing socket, permanent seat is fixed on the upper flange of cavity, and the center of permanent seat offers vision slit and penetrates the hole, and an end of inspection section is fixed on the permanent seat and with vision slit is concentric and is provided with, sealing socket is fixed on the other end of inspection section, offer through hole on the sealing socket, and through hole is provided with the vision slit of inspection section is concentric, first mirror is installed in the through hole of sealing socket; Plug screw is spun on the permanent seat of thermometer pedestal, and with permanent seat on to penetrate the hole concentric; Quartz pushrod is inserted in the quartz crucible after passing plug screw and penetrating the hole; Detecting loop bar is communicated with by the inspection section of clip with the thermometer pedestal; The element supporting part is arranged on the thermometer pedestal, is used to carry second mirror, infrared thermometer, and second mirror, infrared thermometer are placed directly over the sealing socket.
6. the polycrystalline furnace of employing polycrystalline furnace infrared temperature measurement apparatus according to claim 5, it is characterized in that: the element supporting part is arranged on the permanent seat of thermometer pedestal, and the element supporting part comprises rotating shaft base, turning axle, temperature measurer mounting plate, contiguous block, microscope base; Rotating shaft base is fixed on the permanent seat of thermometer pedestal, and turning axle is spun on the rotating shaft base, and wherein plug screw is between rotating shaft base and inspection section; One end of temperature measurer mounting plate is fixed on the upper end of turning axle, and the middle part of temperature measurer mounting plate is provided with limiting section, and the other end of temperature measurer mounting plate offers open holes, and infrared thermometer is installed in the open holes on the temperature measurer mounting plate; Contiguous block is installed in the side of turning axle, and an end of microscope base is fixed on the contiguous block, and the middle part of microscope base is provided with limiting section, and the other end of microscope base offers open holes, and second mirror is placed in the open holes of microscope base.
7. the polycrystalline furnace of employing polycrystalline furnace infrared temperature measurement apparatus according to claim 6 is characterized in that: the setting that meets at right angles of microscope base and temperature measurer mounting plate.
8. the polycrystalline furnace of employing polycrystalline furnace infrared temperature measurement apparatus according to claim 5 is characterized in that: the element supporting part is arranged on the sealing socket, and the element supporting part is cylindric, and the element supporting part is provided with the through hole of sealing socket is concentric.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110224326.9A CN102286778B (en) | 2011-08-08 | 2011-08-08 | Infrared temperature measurement device of polycrystalline furnace and polycrystalline furnace using same |
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| CN201110224326.9A CN102286778B (en) | 2011-08-08 | 2011-08-08 | Infrared temperature measurement device of polycrystalline furnace and polycrystalline furnace using same |
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| CN102286778A true CN102286778A (en) | 2011-12-21 |
| CN102286778B CN102286778B (en) | 2014-02-19 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102644107A (en) * | 2012-04-20 | 2012-08-22 | 上海汉虹精密机械有限公司 | Polycrystal furnace chamber buckling device |
| CN103290486A (en) * | 2012-02-29 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | Liquid level temperature measuring device for single crystal furnace |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007020706A1 (en) * | 2005-08-19 | 2007-02-22 | Sumco Solar Corporation | Silicon electromagnetic casting apparatus and method for operating said apparatus |
| CN102140683A (en) * | 2010-02-03 | 2011-08-03 | 中国科学院福建物质结构研究所 | View window system for polysilicon smelting furnace |
| CN202220220U (en) * | 2011-08-08 | 2012-05-16 | 宁夏日晶新能源装备股份有限公司 | Polycrystalline furnace infrared temperature measuring device and polycrystalline furnace adopting same |
-
2011
- 2011-08-08 CN CN201110224326.9A patent/CN102286778B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007020706A1 (en) * | 2005-08-19 | 2007-02-22 | Sumco Solar Corporation | Silicon electromagnetic casting apparatus and method for operating said apparatus |
| CN102140683A (en) * | 2010-02-03 | 2011-08-03 | 中国科学院福建物质结构研究所 | View window system for polysilicon smelting furnace |
| CN202220220U (en) * | 2011-08-08 | 2012-05-16 | 宁夏日晶新能源装备股份有限公司 | Polycrystalline furnace infrared temperature measuring device and polycrystalline furnace adopting same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290486A (en) * | 2012-02-29 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | Liquid level temperature measuring device for single crystal furnace |
| CN102644107A (en) * | 2012-04-20 | 2012-08-22 | 上海汉虹精密机械有限公司 | Polycrystal furnace chamber buckling device |
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| CN102286778B (en) | 2014-02-19 |
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Address after: Sheng Road Economic Development Zone Shizuishan city the Ningxia Hui Autonomous Region Xin 753000 Patentee after: Ningxia Rijing New Energy Euipment Co., Ltd. Address before: Sheng Road Economic Development Zone Shizuishan city the Ningxia Hui Autonomous Region Xin 753000 Patentee before: Ningxia Rijing New Energy Euipment Co., Ltd. |
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Effective date of registration: 20171227 Address after: 753000, 16, Xin Sheng Road, Dawukou District, the Ningxia Hui Autonomous Region, Shizuishan Patentee after: Ningxia Xu Sakura Amperex Technology Limited Address before: Sheng Road Economic Development Zone Shizuishan city the Ningxia Hui Autonomous Region Xin 753000 Patentee before: Ningxia Rijing New Energy Euipment Co., Ltd. |
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