CN101762340B - Method for calibrating temperature uniformity of vacuum equipment - Google Patents
Method for calibrating temperature uniformity of vacuum equipment Download PDFInfo
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- CN101762340B CN101762340B CN2008102465455A CN200810246545A CN101762340B CN 101762340 B CN101762340 B CN 101762340B CN 2008102465455 A CN2008102465455 A CN 2008102465455A CN 200810246545 A CN200810246545 A CN 200810246545A CN 101762340 B CN101762340 B CN 101762340B
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Abstract
The invention discloses a method for calibrating the temperature uniformity of vacuum equipment, belonging to the technical field of equipment temperature uniformity calibration field. The method is as follows: dividing the area under temperature measuring into sub-regions; selecting a type of metal to prepare a standard sample; putting the standard sample at the area under temperature measuring in a heater, vacuumizing, heating, reading the value T1 of the thermocouple when the standard sample melts and then cooling the standard sample; setting the heating rate, observing the state of the standard sample, and reading the value T0 of the thermocouple when the standard sample melts; and putting the standard sample in another area under temperature measuring, setting the heating rate, and reading the value of the thermocouple to work out the temperature deviation of the equipment. The method divides the area under temperature measuring into a plurality of sub-regions and then measures the melting points of the standard samples of crystalloids in all the sub-regions by taking the advantage of the physical property of fixed melting point of crystalloid. In this way, the method can accurately calibrate the temperature uniformity of the vacuum equipment.
Description
Technical field
The invention belongs to check and correction device temperature homogeneity technical field, particularly a kind of method of proofreading temperature uniformity of vacuum equipment.
Background technology
For heated condition prepared the large scale material down, temperature was evenly significant in the repeatability of temperature parameter, accuracy and the large tracts of land scope.Usually by in the large tracts of land scope, changing the homogeneity that thermocouple location comes the measuring equipment temperature.But be difficult in the operating process keep thermocouple location to repeat, therefore this temperature homogeneity measuring method itself can inevitably be introduced than mistake.
Summary of the invention
The purpose of this invention is to provide a kind of method of proofreading temperature uniformity of vacuum equipment.
A kind of method of proofreading temperature uniformity of vacuum equipment is characterized in that this method step is as follows,
(1) temperature measuring area is divided into the zonule;
(2) select a kind of metal, the preparation diameter is that 5～10mm, thickness are the standard sample of 0.5～1mm;
(3) standard sample is placed in the well heater in the zone to be measured, vacuumizes, back of the body end vacuum reaches 5.0 * 10
-3During Pa,,, when observing the standard sample fusing, read thermopair registration T1, subsequently standard sample is cooled off by view window observation caliber sample state variation with the heating rate heating of 20～40 ℃/s;
(4) set heating rate, the heating rate with 20～40 ℃/s is warming up to following 30 ℃ of T1 earlier, and the heating rate with 1 ℃/s heats up then, and observation caliber sample state reads thermopair registration T0 when standard sample melts;
(5) standard sample is placed in other zones of division, repeating step (4) reads thermocouple readings, obtains the device temperature deviation.
Described metal comprises zinc, aluminium, lead or lanthanum.
Beneficial effect of the present invention is: the present invention is divided into some zonules with the thermometric zone, utilize crystalline melting point to fix this crystal physics characteristic then, measure the method for each zonule crystal standard sample fusing point respectively, a kind of method of accurate check and correction temperature uniformity of vacuum equipment is provided.
Description of drawings
Fig. 1 is that temperature measuring area is divided into the zonule.
Embodiment
The invention will be further described below in conjunction with embodiment:
A kind of method of proofreading temperature uniformity of vacuum equipment, this method step is as follows,
(1) temperature measuring area is divided into the zonule, as shown in Figure 1;
(2) select purity be 99.9% as cast condition Al as the standard sample starting material, standard sample size: diameter
For 5mm, thickness are 1mm;
(3) standard sample is placed in the well heater in to be measured regional 23, vacuumizes, back of the body end vacuum reaches 5.0 * 10
-3Pa (can avoid the standard specimen surface because of oxidation or nitrogenize test findings to be exerted an influence, and can avoid the influence of air pressure change to fusing point) time, heating rate heating with 20 ℃/s, by view window observation caliber sample state variation, when observing the standard sample fusing, read T1=730 ℃ of thermopair registration, subsequently standard sample is cooled off;
(4) set heating rate, heating rate with 20 ℃/s is warming up to 700 ℃ earlier, heating rate with 1 ℃/s heats up then, observation caliber sample state reads T0=721 ℃ of thermopair registration (avoiding the heating rate difference to cause standard specimen temperature of fusion difference by slow intensification) when standard sample melts;
(5) standard sample is placed in other zones to be measured, repeating step (4) reads thermocouple readings, and reading value is as shown in table 1, and obtaining the device temperature deviation is 5 ℃.
A kind of method of proofreading temperature uniformity of vacuum equipment, this method step is as follows,
(1) temperature measuring area is divided into the zonule, as shown in Figure 1;
(2) select purity be 99.9% as cast condition Zn as the standard sample starting material, standard sample size: diameter
For 5mm, thickness are 1mm;
(3) standard sample is placed in the well heater in to be measured regional 23, vacuumizes, back of the body end vacuum reaches 5.0 * 10
-3Pa (can avoid the standard specimen surface because of oxidation or nitrogenize test findings to be exerted an influence, and can avoid the influence of air pressure change to fusing point) time, heating rate heating with 20 ℃/s, by view window observation caliber sample state variation, when observing the standard sample fusing, read T1=488 ℃ of thermopair registration, subsequently standard sample is cooled off;
(4) set heating rate, heating rate with 20 ℃/s is warming up to 458 ℃ earlier, heating rate with 1 ℃/s heats up then, observation caliber sample state reads T0=480 ℃ of thermopair registration (avoiding the heating rate difference to cause standard specimen temperature of fusion difference by slow intensification) when standard sample melts;
(5) standard sample is placed in other zones to be measured of division, repeating step (4) reads thermocouple readings, and reading value is as shown in table 1, and obtaining the device temperature deviation is 5 ℃.
Table 1 surveyed area temperature reading
Claims (1)
1. a method of proofreading temperature uniformity of vacuum equipment is characterized in that, this method step is as follows,
(1) temperature measuring area is divided into the zonule;
(2) select a kind of metal, the preparation diameter is that 5～10mm, thickness are the standard sample of 0.5～1mm, and described metal comprises zinc, aluminium, lead or lanthanum;
(3) standard sample is placed in the well heater in the zone to be measured, vacuumizes, back of the body end vacuum reaches 5.0 * 10
-3During Pa,,, when observing the standard sample fusing, read thermopair registration T1, subsequently standard sample is cooled off by view window observation caliber sample state variation with the heating rate heating of 20～40 ℃/s;
(4) set heating rate, the heating rate with 20～40 ℃/s is warming up to following 30 ℃ of T1 earlier, and the heating rate with 1 ℃/s heats up then, and observation caliber sample state reads thermopair registration T0 when standard sample melts;
(5) standard sample is placed in other zones of division, repeating step (4) reads thermocouple readings, obtains the device temperature deviation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102465455A CN101762340B (en) | 2008-12-25 | 2008-12-25 | Method for calibrating temperature uniformity of vacuum equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102465455A CN101762340B (en) | 2008-12-25 | 2008-12-25 | Method for calibrating temperature uniformity of vacuum equipment |
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| Publication Number | Publication Date |
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| CN101762340A CN101762340A (en) | 2010-06-30 |
| CN101762340B true CN101762340B (en) | 2011-11-09 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103558244B (en) * | 2013-10-23 | 2015-09-16 | 国家电网公司 | A kind of determinator of crystalline melting point and assay method |
| CN106153209A (en) * | 2016-07-13 | 2016-11-23 | 云南大学 | Between a kind of temp controlled meter temperature display degree and Material growth temperature, deviation revises method |
| CN111912542B (en) * | 2020-07-02 | 2022-04-19 | 核工业西南物理研究院 | Temperature measuring method based on antimony-containing alloy |
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Effective date of registration: 20190404 Address after: 101407 No. 11 Xingke East Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Research Institute of engineering and Technology Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: General Research Institute for Nonferrous Metals |