CN101551659A - Storage monitoring system integrating wireless radio-frequency identification - Google Patents
Storage monitoring system integrating wireless radio-frequency identification Download PDFInfo
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- CN101551659A CN101551659A CNA2008100909517A CN200810090951A CN101551659A CN 101551659 A CN101551659 A CN 101551659A CN A2008100909517 A CNA2008100909517 A CN A2008100909517A CN 200810090951 A CN200810090951 A CN 200810090951A CN 101551659 A CN101551659 A CN 101551659A
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 31
- 238000003860 storage Methods 0.000 title abstract description 10
- 239000004065 semiconductor Substances 0.000 claims abstract description 46
- 239000000969 carrier Substances 0.000 claims abstract description 7
- 235000012431 wafers Nutrition 0.000 claims description 78
- 230000010354 integration Effects 0.000 claims description 22
- 239000000523 sample Substances 0.000 claims description 21
- 238000012360 testing method Methods 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 18
- 238000012545 processing Methods 0.000 abstract description 14
- 238000000034 method Methods 0.000 description 7
- 230000032258 transport Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000007726 management method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 101000931462 Homo sapiens Protein FosB Proteins 0.000 description 2
- 102100020847 Protein FosB Human genes 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention relates to a storage monitoring system integrating wireless radio-frequency identification (RFID) technology, which is used for a semiconductor and comprises a plurality of carriers, a storage monitoring host computer, a plurality of RFID labels and a RFID reader, wherein each carrier carries at least one semiconductor object; the RFID labels are respectively arranged on each carrier and the semiconductor object, each RFID label is provided with label information; and the RFID reader can read or write label information from the RFID labels. The storage monitoring host computer comprises a database storing data relative to the storage monitoring system, a RFID mediate software processing the operation between the RFID reader and the RFID labels, a web interface processing commands transmitted by an operator of inside Internet online and outputting the corresponding result, an output and input interface processing the commands transmitted by the operator of inside Internet online and outputting the corresponding result, and a storage controller processing storage of data among the database, the RFID mediate software, the web interface and the output and input interface for executing the operation of the storage monitoring.
Description
Technical field
The present invention relevant a kind of warehouse compartment supervisory system, particularly the warehouse compartment supervisory system of relevant a kind of integration of wireless radio-frequency (RF) identification (RFID) technology.
Background technology
Disclose about using the RFID technology to disclose application case US20060043197 and TaiWan, China patent of invention TWI267029 in early days with the U.S. at wafer stock or the existing U.S. patent of invention US6330971 of prior art that transports.Wherein, U.S. patent of invention US6330971 discloses a kind of RFID technology of using to follow the trail of the system of wafer, shown in Figure 1A, this system 10 comprises a plurality of carriers 11, the RFID reading machine 12 of bearing wafer, be attached to the RFID label 14 and the controller 13 of carrier 11, wherein RFID reading machine 12 by a plurality of antennas 15 on it reading the RFID label 14 that is attached on each carrier 11, RFID the reading machine 12 and label information that reads is sent to controller 13 so that present carrier 11 and bearing wafer position thereof to be provided by the RS232 interface simultaneously.
In addition, the U.S. discloses application case US2006004319 in early days and discloses the carrier of a kind of RFID of use to carry out the system of wafer transportation, shown in Figure 1B, this system 100 comprises conveying arrangement 110, the carrier 111 of bearing wafer, handle board 115, RFID reading machine 116 and board controller 117, when carrier 111 is delivered to processing board 115 by conveying arrangement 110, the RFID reading machine 116 that then is installed on processing board 115 reads the RFID label 114 of carrier body 112, so that the carrier identification code of RFID label 114 records is delivered to board controller 117, handle the processing processing that board 115 carries out wafer sheet in this carrier 111 to provide.
In addition, TaiWan, China patent of invention TW I267029 discloses the carrier of a kind of RFID of use to carry out the system of wafer transportation, shown in Fig. 1 C, this transportation system 1000 comprises wafer case 1010, RFID label 1020, conveying arrangement 1030, handle board 1040, RFID reading machine 1050, main frame 1060 and trigger 1070, when the RFID label 1020 of a wafer case 1010 appears at when handling near the board 1040, because the RFID inductor directly receives RFID label 1020 and starts conveying arrangement 1030 automatically, possible errors is sent to year portion of unloading with wafer case 1010 by mechanical arm and accidentally injures the operator, when respond to but control the RFID inductor so that main frame 1060 is issued an order, avoid RFID inductor induced RF ID label and the mechanical arm accident is activated and endangers operator's safety undeservedly by operator's direct control trigger 1070.
The content of above-mentioned prior art mainly is to utilize RFID to carry out wafer transport or tracking, but the infosystem with RFID technology and warehouse compartment monitoring does not effectively integrate together, monitor to provide operator (operator) can monitor in real time based on the warehouse compartment of wafer (wafer based), therefore the infosystem of a kind of RFID of integration technology to the warehouse compartment monitoring be provided, make the operator can grasp the bucket management of semiconductor goods and the scheduling planning of semiconductor test on line in real time, the real problem of being badly in need of solution for industry.
Summary of the invention
For a kind of warehouse compartment monitoring that can monitor in real time based on the carrier or the semiconductor object of wafer (wafer based) is provided, to solve the desirable not to the utmost part of above-mentioned prior art, the invention provides one and have the warehouse compartment supervisory system of integrating the RFID technology, include a plurality of carriers (carriers), warehouse compartment, a plurality of RFID label (tags) and a plurality of RFID reading machines (RFID readers) of a warehouse compartment monitoring host computer in order to monitor each carrier or object.Wherein, carrier is placed in the pre-set space (predetermined space) of manufacturer, and each carrier is in order to carry at least one semiconductor object.RFID label (tags) is arranged at each carrier (carrier) or object respectively, and each RFID label has a label information (tag information).The RFID reading machine is disposed in the pre-set space of manufacturer, reads or write label information by RF-wise from this RFID label.The warehouse compartment monitoring host computer comprises in order to monitor the warehouse compartment of each carrier or semiconductor object: a database (legacy database) stores the data relevant with this warehouse compartment supervisory system; One RFID middleware is in order to operate between processing RF ID reading machine and the RFID label; One web interface is assigned the instruction result corresponding with output in order to the operator who handles by (B2B) network on-line (internet) between enterprise; One output/input interface is assigned the instruction result corresponding with output in order to the operator who handles by Intranet online (intranet); An and warehouse compartment controller, the access of data between process database and RFID middleware, web interface, the output/input interface, to carry out the operation of warehouse compartment monitoring, in view of the above, but on operator's line of semiconductor factory (on-line) management monitor based on the warehouse compartment of the carrier of wafer (wafer based) or semiconductor object.
Therefore, fundamental purpose of the present invention provides a kind of warehouse compartment supervisory system of the RFID of integration technology, by the RFID technology so that the warehouse compartment information of monitoring semiconductor object in real time to be provided on operator or the system line.
In addition, secondary objective of the present invention provides a kind of warehouse compartment supervisory system of the RFID of integration technology, the coding that can further pass through the RFID label is as search index, so that the up-and down-stream vendors present position of network real-time control semiconductor object, state and test result internally to be provided.
In addition, a further object of the present invention provides a kind of warehouse compartment supervisory system of the RFID of integration technology, can be further coding by the RFID label as search index, but so that the operator to be provided network real time access semiconductor goods internally.
In addition, another purpose of the present invention provides a kind of warehouse compartment supervisory system of the RFID of integration technology, can further provide the operator internally network with the test status of the present semiconductor object of real-time control and the management and running of producing line.
In addition, a further object of the present invention provides a kind of warehouse compartment supervisory system of the RFID of integration technology, the operator that turnover goods can further be provided or build the gateway gate inhibition's regulatory area in the object space internally network with the turnover situation of real-time control semiconductor goods.
Description of drawings
Figure 1A to Fig. 1 C is the synoptic diagram of lamellar system of a kind of RFID of use of prior art.
Fig. 2 is a kind of synoptic diagram of integrating the warehouse compartment supervisory system of RFID of first preferred embodiment of the present invention.
Fig. 3 is the synoptic diagram according to second preferred embodiment of the warehouse compartment supervisory system of the another kind integration RFID of Fig. 2 proposition.
Embodiment
Because the present invention discloses a kind of warehouse compartment supervisory system of the RFID of integration technology, to provide the operator can monitor in real time based on the carrier of wafer (wafer based) or the bucket management and the product line traffic control pipe of semiconductor object, the know-why of semiconductor test that is utilized and radio frequency identification wherein, for having, correlative technology field knows that usually the knowledgeable can understand, so, no longer do complete description with explanation hereinafter.Simultaneously, with the accompanying drawing that is hereinafter contrasted, be to express the structural representation relevant with feature of the present invention, also do not need according to the complete drafting of physical size.
At first please refer to Fig. 2, first preferred embodiment proposed by the invention is shown, warehouse compartment supervisory system 20 for a kind of integration of wireless radio-frequency (RF) identification (RFID) technology, be used for semiconductor factory 21, this warehouse compartment supervisory system 20 includes: a plurality of carriers 22, a warehouse compartment monitoring host computer 26, a plurality of RFID label 24 and a plurality of RFID reading machines 23.Wherein carrier 22 is placed on the pre-set space (being meant specific factory building or operation area) of semiconductor factory 21, in order to carry at least one semiconductor object 220, this semiconductor object 220 can be wafer, probe or mask, and the carrier 22 of bearing semiconductor object 220 can be crystal-boat box, wafer handling casket (FOUP), wafer transport case (FOSB), trolley or probe cartridge (Probe Card Box).In addition, the a plurality of RFID reading machines 23 of configuration in this semiconductor factory 21, and a plurality of RFID labels 24 are set at each carrier and object different azimuth, to guarantee that the label information that each RFID label 24 is put down in writing can be read or write by RFID reading machine 23 in the radio-frequency region of this pre-set space, this label information comprises tag recognition sign indicating number (tag ID), carrier or wafer lot number (carrier or LotID), customer number (customer ID), wafer model (wafer part ID), wafer number (wafer ID), number of wafers (wafer Q ' ty), good dies quantity (Good Die Q ' ty) and probe numbering (probe cardID) etc., above-mentioned in addition RFID label 24 can be passive type (passive) or active (active).In view of the above, above-mentioned warehouse compartment monitoring host computer 26 can provide the operator to monitor the warehouse compartment information of carrier or semiconductor object in real time.
In the above-described embodiments, the characteristics of warehouse compartment monitoring host computer 26 are to comprise a database 260, a RFID middleware 261, a web interface 262, a warehouse compartment controller 263, and an output/input interface 264.The warehouse compartment data such as numbering, quantity, situation and position that wherein above-mentioned database 260 storages are relevant with carrier or semiconductor object, for example: related libraries bit data such as carrier or wafer lot number, customer number, wafer model, wafer number, number of wafers, good dies quantity and probe numbering, carrier or object deposit position, processing of wafers machining information, wafer sort result and probe service recorder; RFID middleware 261 is in order to running between processing RF ID reading machine 23 and the RFID label 24, RFID middleware 261 is also by a Data Transport Protocol and driver 230 in addition, as selecting one from various wired or wireless transmission modes such as RS232, Ethernet, USB or WLAN carrying out the data transmission between warehouse compartment monitoring host computer 26 and the RFID reading machine 23, data read and writing between processing RF ID reading machine 23 and the RFID label 24 simultaneously; Web interface 262 provides the operator to pass through network between enterprise (B2Binternet) to assign the instruction result corresponding with output, for example: the operator is by warehouse compartment information or the processes information of network between enterprise with semiconductor object 220 under the search particular customer; Output/input interface 264 can external a plurality of outputs and input media, provides the operator to assign instruction and the interface of exporting corresponding result; Data transmission between warehouse compartment controller 263 process database 260, RFID middleware 261, web interface 262, the output/input interface 264 is to carry out the operation of warehouse compartment monitoring.
In the above-described embodiments, RFID middleware 261 can further provide an index key (not icon) to give above-mentioned warehouse compartment controller 263, so that warehouse compartment controller 263 according to index key to carry out the access of database 260, for example the operator can the carrier lot number and wafer number be master index key (primary index key) and secondary index key (secondary index key), the search of carrying out database 260 on the line is to find out the present positional information of this wafer, and this index key system by RFID middleware 261 from what label information captured, just index key can be by the tag recognition sign indicating number, carrier or wafer lot number, customer number, the wafer model, wafer number and probe numbering are formed by combining.In addition, can alarming device 25 further be set, as be arranged in the semiconductor factory 21 discrepancy gate inhibition place, the security monitoring of operator's real-time to be provided and to follow the trail of the last state of semiconductor object 220 with carrier 22 at contiguous RFID reading machine 23.
Please refer to Fig. 3, is second preferred embodiment that the present invention proposes, and is the warehouse compartment supervisory system 30 of another kind of integration of wireless radio-frequency (RF) identification (RFID) technology.Be used for semiconductor factory 31, this warehouse compartment supervisory system 30 includes: a plurality of carriers 32, a warehouse compartment monitoring host computer 36, a plurality of RFID label 34, a plurality of RFID reading machine 33 and tester table district 37.Wherein carrier 32 is the pre-set space (meaning specific factory building or operation area) that is placed on semiconductor factory 31, in order to carry at least one semiconductor object 320, this semiconductor object 320 can be wafer, probe or mask, and the carrier 32 of bearing semiconductor object 320 can be crystal-boat box, wafer handling casket (FOUP), wafer transport case (FOSB), trolley or probe cartridge (Probe Card Box).In addition, the a plurality of RFID reading machines 33 of configuration in this semiconductor factory 31, and a plurality of RFID labels 34 are set at each carrier or semiconductor object different azimuth, to guarantee that the label information that each RFID label 34 is put down in writing can be read or write by RFID reading machine 33 in the radio-frequency region of this pre-set space, this label information comprises tag recognition sign indicating number (tag ID), carrier or wafer lot number (carrier or Lot ID), customer number (customer ID), wafer model (wafer part ID), wafer number (wafer ID), number of wafers (wafer Q ' ty), good dies quantity (Good Die Q ' ty) and probe numbering (probe card ID) etc., above-mentioned in addition RFID label 34 can be passive type (passive) or active (active).In addition, above-mentioned warehouse compartment monitoring host computer 36 further is connected to tester table district 37, and this tester table district 37 comprises a plurality of tester tables 38, a test macro 39 and a test database 40 on one line, test macro 39 is in order to provide the required test parameter of each tester table 38 and the behaviour in service of monitor wafer/probe on the line, test parameter or the machining information of test database 40 in order to deposit wafer technique, and wafer sort result, make test macro 39 on the line that the running situation of the present testing apparatus of operator can be provided in real time, integrate the real-time warehouse compartment information of warehouse compartment monitoring host computer 36 simultaneously by wafer that RFID produces and probe, can so output one available resources report 366, so that the operator can preset the scheduling of wafer sort, finish automatic testing jig machine (Setup) operation simultaneously.
In the above-described embodiments, warehouse compartment monitoring host computer 36 comprises a database 360, a RFID middleware 361, a web interface 362, a warehouse compartment controller 363, and an output/input interface 364.Wherein above-mentioned database 360 is the storage warehouse compartment data such as numbering, quantity, situation and position relevant with carrier or semiconductor object, for example: related datas such as carrier or wafer lot number, customer number, wafer model, wafer number, number of wafers, good dies quantity and probe numbering, carrier or object deposit position, processing of wafers machining information, wafer sort result and probe service recorder.RFID middleware 361 is in order to running between processing RF ID reading machine 33 and the RFID label 34, RFID middleware 361 is also by a Data Transport Protocol and driver 330 in addition, as selecting one from various wired or wireless transmission modes such as RS232, Ethernet, USB or WLAN carrying out the data transmission between warehouse compartment monitoring host computer 36 and the RFID reading machine 33, data read and writing between processing RF ID reading machine 33 and the RFID label 34 simultaneously.Web interface 362 provides the operator to pass through network between enterprise (B2B internet) to assign the instruction result corresponding with output, for example: the operator is by warehouse compartment information or the processes information of network between enterprise with semiconductor object 320 under the search particular customer; Output/input interface 364 can external a plurality of outputs and input media, provides the operator to assign instruction and the interface of exporting corresponding Query Result.Data transmission between warehouse compartment controller 363 process database 360, RFID middleware 361, web interface 362, the output/input interface 364 is to carry out the operation of warehouse compartment monitoring.
In the above-described embodiments, RFID middleware 361 can further provide an index key (not icon) to give above-mentioned warehouse compartment controller 363, so that warehouse compartment controller 363 according to index key to carry out the access of database 360, for example the operator can the carrier lot number and wafer number be master index key (primary index key) and secondary index key (secondary index key), the search of carrying out database 360 on the line is to find out the present warehouse compartment information of this wafer, and this index key is captured from label information by RFID middleware 361, and just index key can be by the tag recognition sign indicating number, carrier or wafer lot number, customer number, the wafer model, wafer number and probe numbering are formed by combining.
The above is preferred embodiment of the present invention only, is not in order to limit interest field of the present invention; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the disclosed spirit and change or modification, all should be included in the claim.
Claims (10)
1. the warehouse compartment supervisory system of an integration of wireless radio-frequency (RF) identification is used for semiconductor factory, includes:
A plurality of carriers are placed on this semiconductor factory corresponding preset space, and this each carrier is in order to carry at least one semiconductor object;
One warehouse compartment monitoring host computer is in order to monitor the warehouse compartment of this carrier or semiconductor object object; And
A plurality of wireless radio frequency identification marks and a plurality of radio frequency identification reading machine;
It is characterized in that:
These a plurality of wireless radio frequency identification marks be to be arranged at this each carrier or semiconductor object object respectively, and this each wireless radio frequency identification mark have a label information;
These a plurality of radio frequency identification reading machines are disposed in this semiconductor factory, read or write this label information by RF-wise from this wireless radio frequency identification mark;
This warehouse compartment monitoring host computer comprises:
One database stores the warehouse compartment information relevant with this carrier or semiconductor object;
One radio frequency identification middleware operates in order to handle between these radio frequency identification reading machines and the wireless radio frequency identification mark;
One web interface is assigned the instruction result corresponding with output in order to the operator who handles by network on-line between enterprise;
One output/input interface is assigned the instruction result corresponding with output in order to handle by the online operator of Intranet; And
One warehouse compartment controller is handled the access of data between this database and this radio frequency identification middleware, web interface, the output/input interface, to carry out the operation of warehouse compartment monitoring.
2. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1, it is characterized in that this semiconductor object can be mask, wafer or probe (probe card), and this warehouse compartment packets of information contains this carrier or the semiconductor object is positioned at the station of receiving, go out the goods station, test machine, nitrogen cabinet, track sled or trolley or carrier car or the positional information of building object space.
3. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1 is characterized in that this label information comprises tag recognition sign indicating number, carrier or wafer lot number, customer number, wafer model, wafer number, number of wafers, good dies quantity and probe numbering.
4. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1, it is characterized in that this radio frequency identification middleware further comprises a Data Transport Protocol and driver, in order to carrying out the data transmission between this warehouse compartment monitoring host computer and the radio frequency identification reading machine, and this Data Transport Protocol is one to be selected from by groups that transmission mode constituted such as RS232, Ethernet, USB and WLAN.
5. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1 it is characterized in that this wireless radio frequency identification mark can be a passive type or active, and this output/input interface can external a plurality of outputs and input media.
6. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1, it is characterized in that this radio frequency identification middleware can further provide an index key to this warehouse compartment controller, and the group that this tag recognition sign indicating number of the optional freedom of this index key, carrier or wafer lot number, customer number, wafer model, wafer number and probe numbering are formed, and this warehouse compartment controller according to this index key to carry out the access of this database.
7. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1 is characterized in that this radio frequency identification reading machine further comprises an alarming device, so that the operator to be provided real time monitoring.
8. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1 is characterized in that this warehouse compartment monitoring host computer further is connected to a tester table district, makes the operator can preset the scheduling and automatic testing jig machine operation of wafer sort.
9. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1 is characterized in that this carrier is one to be selected from by crystal-boat box, wafer handling casket, wafer transport case, trolley, and the group that constituted of probe cartridge.
10. the warehouse compartment supervisory system of integration of wireless radio-frequency (RF) identification according to claim 1, it is characterized in that this pre-set space is that this wireless radio frequency identification mark be may be read in the scope of radiofrequency signal by arbitrary contiguous radio frequency identification reading machine, and the configurable wireless radio frequency identification mark that at least more than one is arranged of this carrier or object.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100909517A CN101551659B (en) | 2008-03-31 | 2008-03-31 | Storage monitoring system integrating wireless radio-frequency identification |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008100909517A CN101551659B (en) | 2008-03-31 | 2008-03-31 | Storage monitoring system integrating wireless radio-frequency identification |
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| CN101551659A true CN101551659A (en) | 2009-10-07 |
| CN101551659B CN101551659B (en) | 2011-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008100909517A Expired - Fee Related CN101551659B (en) | 2008-03-31 | 2008-03-31 | Storage monitoring system integrating wireless radio-frequency identification |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253660A (en) * | 2011-01-19 | 2011-11-23 | 江苏宝亨新电气有限公司 | Method for tracking and recording production information |
| CN103136494A (en) * | 2011-11-23 | 2013-06-05 | 中兴通讯股份有限公司 | System and method for monitoring cabinet |
| CN106841980A (en) * | 2017-01-10 | 2017-06-13 | 芯原微电子(上海)有限公司 | A kind of Bluetooth integrated circuit test system and method for testing |
| CN110807131A (en) * | 2019-11-01 | 2020-02-18 | 中国海洋石油集团有限公司 | Drilling rod maintenance line with automatic identification function |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4827110A (en) * | 1987-06-11 | 1989-05-02 | Fluoroware, Inc. | Method and apparatus for monitoring the location of wafer disks |
| WO2000002236A2 (en) * | 1998-07-07 | 2000-01-13 | Memc Electronic Materials, Inc. | Radio frequency identification system and method for tracking silicon wafers |
| US7158850B2 (en) * | 2002-06-14 | 2007-01-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wireless wafer carrier identification and enterprise data synchronization |
| US7145459B2 (en) * | 2005-01-07 | 2006-12-05 | Taiwan Semiconductor Manufacturing Co,M Ltd. | Systems and methods for manufacturing control using radio frequency identification |
| CN100517566C (en) * | 2006-08-02 | 2009-07-22 | 台湾积体电路制造股份有限公司 | Electronic rack |
-
2008
- 2008-03-31 CN CN2008100909517A patent/CN101551659B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253660A (en) * | 2011-01-19 | 2011-11-23 | 江苏宝亨新电气有限公司 | Method for tracking and recording production information |
| CN103136494A (en) * | 2011-11-23 | 2013-06-05 | 中兴通讯股份有限公司 | System and method for monitoring cabinet |
| CN106841980A (en) * | 2017-01-10 | 2017-06-13 | 芯原微电子(上海)有限公司 | A kind of Bluetooth integrated circuit test system and method for testing |
| CN106841980B (en) * | 2017-01-10 | 2020-10-23 | 芯原微电子(上海)股份有限公司 | Bluetooth integrated circuit test system and test method |
| CN110807131A (en) * | 2019-11-01 | 2020-02-18 | 中国海洋石油集团有限公司 | Drilling rod maintenance line with automatic identification function |
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| Publication number | Publication date |
|---|---|
| CN101551659B (en) | 2011-09-28 |
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