CN100422697C - Acceleration transducer - Google Patents
Acceleration transducer Download PDFInfo
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- CN100422697C CN100422697C CNB2006100770261A CN200610077026A CN100422697C CN 100422697 C CN100422697 C CN 100422697C CN B2006100770261 A CNB2006100770261 A CN B2006100770261A CN 200610077026 A CN200610077026 A CN 200610077026A CN 100422697 C CN100422697 C CN 100422697C
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- bearing arm
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
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Abstract
An ultra-small and slim semiconductor acceleration sensor with high sensitivity is provided. The acceleration sensor has a mass portion formed at a center part of a silicon semiconductor substrate, a frame formed on an edge part of the substrate, thin elastic support arms which are provided on top surfaces of the mass portion and the frame and connect the mass portion and the frame, and strain gauges constituted by a plurality of pairs of piezoresistors formed on top surfaces of the elastic support arms. A distance between a pair of Z-axis strain gauges provided on the top surface of the elastic support arm is made longer by 0.4L to 1.2L or shorter by 1.0L to 1.8L than a distance between a pair of X-axis strain gauges, whereby output of the Z-axis strain gauge is made at the same level as output of the X-axis strain gauge. Alternatively, an angle formed by the Z-axis strain gauge with an X-axis is made 10 to 30 degrees or 65 to 90 degrees, whereby the output of the Z-axis strain gauge is made at the same level as the output of the X-axis strain gauge.
Description
The application is that application number is: 03108214.9, the applying date is: on March 25th, 2003, title divide an application for the Chinese patent application of " accelerator sensor ".
Technical field
The present invention relates to a kind of acceleration transducer that is used for sense acceleration, this acceleration transducer is used for toy, automobile, aircraft, portable terminal etc., especially relates to a kind of acceleration transducer that can utilize semiconductor technology to make.
Background technology
Developed the acceleration transducer that utilizes physical quantity to change piezo resistance effect for example and utilize static capacity to change, and commercialization.These acceleration transducers are widely used in various fields, but recently, need to detect simultaneously in high sensitivity the small-sized acceleration transducer of the acceleration of multiaxis direction.
Monocrystalline silicon becomes desirable elastic body owing to lattice imperfection is minimum, and semiconductor processing techniques can not have to be used for monocrystalline silicon under the situation of bigger variation, therefore, pay much attention to the semiconductor acceleration sensor of piezo resistance effect type, wherein, thin elastic supporting part branch is arranged on the single crystal silicon substrate, and the stress that is applied on this thin elastic bearing part is transformed into electric signal by piezoresister, so that export, this piezoresister for example is the piezo resistance effect element.
As three common direction of principal axis acceleration transducers, in the open No.63-169078 of Jap.P. a kind of such acceleration transducer is disclosed for example, Figure 13 has represented its planimetric map, and Figure 14 has represented along the cut-open view of the line XIV-XIV among Figure 13, and Figure 15 has represented skeleton view.These acceleration transducer 500 flexible supporting arms 530, each elastic bearing arm 530 is a girder construction, partly is made of the thin of single crystal silicon substrate.Link to each other this bulk portion 520 constituting at the bulk portion 520 at center by this elastic bearing arm 530 with framework 510 by single crystal silicon substrate than thickness portion in periphery.A plurality of piezoresisters 560 are formed on each axial direction of elastic bearing arm 530.
Introduce total below with reference to Figure 13,14 and 15.Sensor 500 has: bulk portion 520, this bulk portion 520 constituting than thickness portion by single crystal silicon substrate; Framework 510, this framework 510 is arranged to around this bulk portion 520; And the elastic bearing arm of two pairs of beam shapes, these two pairs of elastic bearing arms are perpendicular to one another, and partly are made of the thin of single crystal silicon substrate respectively, so that bridge joint bulk portion 520 and framework 510.When quickening, bulk portion moves in framework, so that make the distortion of elastic bearing arm, like this, this distortion is detected by the piezoresister on the elastic bearing arm, so that the acceleration that acquisition is worked.Acceleration along the X-direction among Figure 13 is measured by four piezoresisters 560 on the elastic bearing arm that extends along X-direction, and measures by four piezoresisters 560 on the elastic bearing arm that extends along Y direction along the acceleration of Y direction.Acceleration along Z-direction is measured by all piezoresisters 560.By in the single crystal silicon substrate of size, forming four L shaped through holes with framework 510, thereby be formed on the bulk portion 520 at center, at the framework 510 and their supporting arm of bridge joint 530 of periphery, and thinner, thereby make this acceleration transducer constitute deformable and very responsive by supporting arm portions is made.
Although in the acceleration transducer shown in Figure 13 to 15 500, acceleration along Z-direction detects and measures by piezoresister 560 that detects the X-direction acceleration and the piezoresister 560 that detects the Y direction acceleration, but the circuit that preferably detects the Z-direction acceleration separates with the circuit that detects X-axis/Y direction acceleration.In the patented claim of common pending trial, Chinese patent application N/A (on February 12nd, 2003), european patent application 03002164.6 (on February 3rd, 2003), korean patent application 10-2003-008738 (on February 12nd, 2003) and U. S. application No.10/357408 (on February 4th, 2003) are that the Japanese patent application 2002-33696 on February 12nd, 2002 applies for by same applicant based on the applying date, wherein, the piezoresister that is used to detect Z-direction is different with the piezoresister that is used to detect X-direction, although this Z-direction piezoresister is arranged in along on the elastic bearing arm of X-direction in the mode identical with the X-direction piezoresister.
In Figure 16, acceleration transducer 600 has bulk portion 620 at the center, around the thick framework 610 of this bulk portion and the elastic bearing arm 631,632,633 and 634 of this bulk portion 620 of bridge joint and thick framework 610.Because elastic bearing arm 631,632,633 and 634 is thinner, when acceleration acted on the bulk portion 620, this bulk portion made the distortion of elastic bearing arm.The moderate finite deformation of each elastic bearing arm occurs in the termination of elastic bearing arm, just the part that is connected with the elastic bearing arm of the inside edge of the top surface of the part that is connected with the elastic bearing arm of the edge of the top surface of bulk portion and thick framework.In order to improve the sensitivity of acceleration transducer, piezoresister be installed in the elastic bearing arm, by on the acceleration distortion the best part.
In the acceleration transducer 600 of Figure 16, be used to detect X-direction acceleration piezoresister 661,662,663 and 664 and the piezoresister 681,682,683 and 684 that is used to detect the acceleration of Z-direction be arranged in elastic bearing arm 631 and 633.Usually known as shown in figure 17 the relation output of 1G acceleration (when driving voltage is 1V with respect to) that between the sensitivity of X-axis piezoresister and Z axial compression sensitive resistor, exists.When the 1G acceleration along X-direction acted on the bulk portion, the bending moment that is applied on the elastic bearing arm was directly proportional with the product of the quality of distance from the top surface of bulk portion to the center of gravity of bulk portion and bulk portion.Because bending moment is directly proportional with distance and quality, therefore, the sensitivity of X-direction changes with the quadratic function relation of bulk portion thickness.On the other hand, when the 1G acceleration acted on Z-direction, the product that is applied to the quality of the length of bending moment and elastic bearing arm on the elastic bearing arm and bulk portion was directly proportional.When the variation in thickness of bulk portion, the length of elastic bearing arm does not change, and has only the mass change of bulk portion, and therefore, the susceptibility of Z-direction is linear function.
When utilizing the single crystal silicon substrate that is generally used for the semiconductor manufacturing, makes by the acceleration transducer shown in Figure 16 600, and when the thickness of single crystal silicon substrate is 625 μ m or 525 μ m, as seen from Figure 17, the sensitivity of Z-direction piezoresister becomes greater than the sensitivity of X-direction piezoresister.When the sensitivity of Z-direction piezoresister and X-direction piezoresister was roughly the same, the amplifier with roughly the same output magnification can be used for Z axial compression sensitive resistor and X-axis piezoresister.For the sensitivity that makes Z axial compression sensitive resistor identical with the sensitivity of X-axis piezoresister, preferably acceleration transducer 600 employing thickness are the single crystal silicon substrate of about 800 μ m, but the single crystal silicon substrate of thickness must only prepare for this acceleration transducer especially like this, and this has increased the cost of acceleration transducer.
Also can select, can change piezoelectric property by the impurity concentration that change is used for the piezoresister of Z-direction piezoresister and X (Y) direction of principal axis piezoresister in theory.But, when forming piezoresister, impurity is added in the Z-direction resistance and must carry out in independent treatment step, therefore increased cost.And, fear that also the Z-direction piezoresister is different with the thermal characteristics of X (Y) direction of principal axis piezoresister.
Also can select, can change the shape of Z-direction resistor, make it different with X (Y) direction of principal axis resistor, thereby reduce the output power of Z-direction resistor, thereby make the output of it and X (Y) direction of principal axis resistor roughly the same, but resistance value will change, thereby be difficult to keep bridge balance, therefore, wish that it is identical shaped making all resistance.
Summary of the invention
Therefore, the purpose of this invention is to provide a kind of compactness and thin acceleration transducer, the sensitivity difference of this acceleration transducer between three direction of principal axis resistors of X-axis, Y-axis and Z axle is very little, and very low manufacturing cost is arranged, and makes their resistivity and hot attribute keep par simultaneously.
According to the present invention, a kind of acceleration transducer is provided, comprising: bulk portion, this bulk portion is arranged on the center of acceleration transducer, and top surface is arranged; Thick framework, this thick frame loops is around bulk portion and leave this bulk portion one preset distance, and this thick framework has top surface; A plurality of elastic bearing arms, each elastic bearing arm stretches out from the top surface edge of bulk portion, and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame; Arrange two first piezoresisters on the top surface of each elastic bearing arm, they are along the bearing of trend of the elastic bearing arm at its place certain distance away from each other, and extend along the bearing of trend of this elastic bearing arm; And on being provided with the top surface of elastic bearing arm of described two first piezoresisters, each arranges two second piezoresisters, these two first piezoresisters detect the acceleration along elastic bearing arm bearing of trend, and these two second piezoresisters detect along the acceleration of the direction vertical with the top surface of bulk portion, it is characterized in that: the angled setting of bearing of trend of described two second piezoresisters and elastic bearing arm.
A kind of acceleration transducer of the present invention comprises:
Bulk portion, this bulk portion be at the center of acceleration transducer, and top surface is arranged;
Thick framework, this thick frame loops is around bulk portion and leave this bulk portion preset distance, and this thick framework has top surface;
A plurality of elastic bearing arms, each elastic bearing arm stretches out (for example along X-direction) from the top surface edge of bulk portion, and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame;
Two first piezoresisters, these two first piezoresisters are arranged on the top surface of each elastic bearing arm, they are along the bearing of trend (for example along X-direction) of elastic bearing arm certain distance away from each other, and along the bearing of trend (for example along X-direction) of this elastic bearing arm and extend; And
Two second piezoresisters, these two second piezoresisters are arranged on the top surface of elastic bearing arm of two first piezoresisters, distance along elastic bearing arm direction (for example along X-direction) between these two second piezoresisters is different with first piezoresister distance, and along the bearing of trend (for example along X-direction) of elastic bearing arm and extend
Two first piezoresisters detect the acceleration along elastic bearing arm bearing of trend (for example along X-direction), and two second piezoresisters detect along the acceleration of the direction (Z-direction) vertical with the top surface of bulk portion.
In above-mentioned acceleration transducer, one in two first piezoresisters can wholely be arranged on the top surface of elastic bearing arm, and the termination that makes this one first piezoresister is positioned at the inside edge of the top surface of thick framework substantially, and in these two first piezoresisters another can wholely be arranged on the top surface of elastic bearing arm, and make the termination of this another first piezoresister be positioned at the top surface edge of bulk portion substantially.A suitably-arranged in two second piezoresisters becomes the top surface of the thick framework of bridge joint and the top surface of elastic bearing arm, like this, a termination of this one second piezoresister is positioned on the top surface of elastic bearing arm, and another termination of this one second piezoresister is positioned on the top surface of thick framework.And, another suitably-arranged in two second piezoresisters becomes the top surface of bridge joint bulk portion and the top surface of elastic bearing arm, like this, a termination of this another second piezoresister is positioned on the top surface of bulk portion, and another termination of this another second piezoresister is positioned on the top surface of elastic bearing arm.
In this acceleration transducer, the distance between two second piezoresisters is preferably than 0.4 to 1.2 times of this piezoresister length of distance between two first piezoresisters.Be more preferably, the distance between two second piezoresisters is preferably than 0.6 to 1.0 times of this piezoresister length of distance between two first piezoresisters.
In this acceleration transducer, two second piezoresisters can wholely be arranged on the top surface of elastic bearing arm, and like this, the termination of elastic bearing arm is all left in all terminations of two second piezoresisters.At this moment, preferably, the distance between two second piezoresisters is than 1.0 to 1.8 times of short this piezoresister length of distance between two first piezoresisters.Be more preferably, the distance between two second piezoresisters is than 1.2 to 1.6 times of short this piezoresister length of distance between two first piezoresisters.
A kind of according to acceleration transducer of the present invention, comprising:
Bulk portion, this bulk portion be at the center of acceleration transducer, and top surface is arranged;
Thick framework, this thick frame loops is around bulk portion and leave this bulk portion preset distance, and this thick framework has top surface;
Two first elastic bearing arms, these two first elastic bearing arms stretch out from the parallel to each other and opposite direction in the opposite edges upper edge of the top surface of bulk portion (for example edge+X-direction and-X-direction), and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame;
Two first piezoresisters, these two first piezoresisters are arranged on the top surface of each first elastic bearing arm, they are along the bearing of trend of the first elastic bearing arm (for example edge+X-direction/-X-direction) certain distance away from each other, and along the bearing of trend of this first elastic bearing arm (for example edge+X-direction/-X-direction) and extend;
In these two first piezoresisters one is whole to be arranged on the top surface of the first elastic bearing arm, and the termination that makes this one first piezoresister is positioned at the inside edge of the top surface of thick framework substantially, and on the whole top surface that is arranged in the first elastic bearing arm of in these two first piezoresisters another, and make the termination of this another first piezoresister be positioned at the top surface edge of bulk portion substantially;
Two second piezoresisters, these two second piezoresisters are arranged on the top surface of the first elastic bearing arm, and the distance between them than between two first piezoresisters along 0.4 to 1.2 times of this piezoresister length of distance of the first elastic bearing arm bearing of trend (for example edge+X-direction/-X-direction), and extend along the direction of the first elastic bearing arm (for example edge+X-direction/-X-direction);
One in these two second piezoresisters is arranged to the top surface of the thick framework of bridge joint and the top surface of the first elastic bearing arm, like this, a termination of this one second piezoresister is positioned on the top surface of thick framework, and another termination of this one second piezoresister is positioned on the top surface of the first elastic bearing arm, and
In these two second piezoresisters another is arranged to the top surface of bridge joint bulk portion and the top surface of the first elastic bearing arm, like this, a termination of this another second piezoresister is positioned on the top surface of bulk portion, and another termination of this another second piezoresister is positioned on the top surface of the first elastic bearing arm;
Two second elastic bearing arms, these two second elastic bearing arms stretch out from the parallel to each other and opposite direction in other opposite edges upper edge of the top surface of bulk portion (for example edge+Y direction and-Y direction), and other top surface inward flange of other top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame; And
Two the 3rd piezoresisters, these two the 3rd piezoresisters are arranged on the top surface of each second elastic bearing arm, they are along the bearing of trend of the second elastic bearing arm (for example edge+Y direction/-Y direction) certain distance away from each other, and along the bearing of trend of this second elastic bearing arm (for example edge+Y direction/-Y direction) and extend;
In these two the 3rd piezoresisters one is whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this one the 3rd piezoresister be positioned at other inside edge of the top surface of thick framework substantially, and
In these two the 3rd piezoresisters another be whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this another the 3rd piezoresister be positioned at the top surface edge of bulk portion substantially;
These two first piezoresisters detect the acceleration along the first elastic bearing arm bearing of trend (for example along X-direction), these two second piezoresisters detect along the acceleration perpendicular to the direction (Z-direction) of the top surface of bulk portion, and two the 3rd piezoresisters detect the acceleration along the second elastic bearing arm bearing of trend (for example along Y direction).
A kind of acceleration transducer of the present invention comprises:
Bulk portion, this bulk portion be at the center of acceleration transducer, and top surface is arranged;
Thick framework, this thick frame loops is around bulk portion and leave this bulk portion preset distance, and this thick framework has top surface;
Two first elastic bearing arms, these two first elastic bearing arms stretch out from the parallel to each other and opposite direction in the opposite edges upper edge of the top surface of bulk portion (for example edge+X-direction and-X-direction), and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame;
Two first piezoresisters, these two first piezoresisters are arranged on the top surface of each first elastic bearing arm, they are along the bearing of trend of the first elastic bearing arm (for example edge+X-direction/-X-direction) certain distance away from each other, and along the bearing of trend of this first elastic bearing arm (for example edge+X-direction/-X-direction) and extend;
In these two first piezoresisters one is whole to be arranged on the top surface of the first elastic bearing arm, and the termination that makes this one first piezoresister is positioned at the inside edge of the top surface of thick framework substantially, and on the whole top surface that is arranged in the first elastic bearing arm of in these two first piezoresisters another, and make the termination of this another first piezoresister be positioned at the top surface edge of bulk portion substantially;
Two second piezoresisters, these two second piezoresisters are arranged on the top surface of the first elastic bearing arm, and the distance between them than between two first piezoresisters along 1.0 to 1.8 times of short this piezoresister length of distance of the first elastic bearing arm bearing of trend (for example edge+X-direction/-X-direction), and along the direction of the first elastic bearing arm (for example edge+X-direction/-X-direction) extension;
These two second piezoresisters are whole to be arranged on the top surface of the first elastic bearing arm, and like this, all terminations of the top surface of the first elastic bearing arm are all left in all terminations of these two second piezoresisters;
Two second elastic bearing arms, these two second elastic bearing arms stretch out from the parallel to each other and opposite direction in other opposite edges upper edge of the top surface of bulk portion (for example edge+Y direction and-Y direction), and other top surface inward flange of other top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame; And
Two the 3rd piezoresisters, these two the 3rd piezoresisters are arranged on the top surface of each second elastic bearing arm, they are along the bearing of trend of the second elastic bearing arm (for example edge+Y direction/-Y direction) certain distance away from each other, and along the bearing of trend of this second elastic bearing arm (for example edge+Y direction/-Y direction) and extend;
In these two the 3rd piezoresisters one is whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this one the 3rd piezoresister be positioned at other inside edge of the top surface of thick framework substantially, and
In these two the 3rd piezoresisters another be whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this another the 3rd piezoresister be positioned at the top surface edge of bulk portion substantially;
These two first piezoresisters detect the acceleration along the first elastic bearing arm bearing of trend (for example along X-direction), these two second piezoresisters detect along the acceleration perpendicular to the direction (Z-direction) of the top surface of bulk portion, and two the 3rd piezoresisters detect the acceleration along the second elastic bearing arm bearing of trend (for example along Y direction).
A kind of acceleration transducer of the present invention comprises:
Bulk portion, this bulk portion be at the center of acceleration transducer, and top surface is arranged;
Thick framework, this thick frame loops is around bulk portion and leave this bulk portion preset distance, and this thick framework has top surface;
A plurality of elastic bearing arms, each elastic bearing arm stretches out (for example along X-direction) from the top surface edge of bulk portion, and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame;
Two first piezoresisters, these two first piezoresisters are arranged on the top surface of each elastic bearing arm, they are along the bearing of trend (for example along X-direction) of elastic bearing arm certain distance away from each other, and along the bearing of trend (for example along X-direction) of this elastic bearing arm and extend; And
Two second piezoresisters, these two second piezoresisters are arranged on the top surface of elastic bearing arm of two first piezoresisters, and angled with the bearing of trend (for example along X-direction) of elastic bearing arm,
Two first piezoresisters detect the acceleration along elastic bearing arm bearing of trend (for example along X-direction), and two second piezoresisters detect along the acceleration of the direction (Z-direction) vertical with the top surface of bulk portion.
In above-mentioned acceleration transducer, one in two first piezoresisters one and two second piezoresisters can wholely be arranged on the top surface of elastic bearing arm, and the termination that makes this one first piezoresister and this one second piezoresister all is positioned at the inside edge of the top surface of thick framework substantially, and in another and this two second piezoresisters in these two first piezoresisters another can wholely be arranged on the top surface of elastic bearing arm, and make the termination of this another first piezoresister and this another second piezoresister all be positioned at the top surface edge of bulk portion substantially.Preferably, all to be arranged to bearing of trend (for example X-direction) angulation with the elastic bearing arm be 10 to 30 degree or 65 to 90 degree to each in two second piezoresisters.
A kind of acceleration transducer of the present invention comprises:
Bulk portion, this bulk portion be at the center of acceleration transducer, and top surface is arranged;
Thick framework, this thick frame loops is around bulk portion and leave this bulk portion preset distance, and this thick framework has top surface;
Two first elastic bearing arms, these two first elastic bearing arms stretch out from the parallel to each other and opposite direction in the opposite edges upper edge of the top surface of bulk portion (for example edge+X-direction and-X-direction), and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame;
Two first piezoresisters, these two first piezoresisters are arranged on the top surface of each first elastic bearing arm, they are along the bearing of trend (for example along X-direction) of first elastic bearing arm certain distance away from each other, and along the bearing of trend (for example along X-direction) of this first elastic bearing arm and extend;
Two second piezoresisters, these two second piezoresisters are arranged on the top surface of each first elastic bearing arm, and with bearing of trend (for example X-direction) angulation of elastic bearing arm be 10 to 30 degree or 65 to 90 degree.
In in these two first piezoresisters one and these two second piezoresisters one is whole to be arranged on the top surface of the first elastic bearing arm, and the termination that makes this one first piezoresister and this one second piezoresister all is positioned at the inside edge of the top surface of thick framework substantially, and
In another and this two second piezoresisters in these two first piezoresisters another be all whole to be arranged on the top surface of the first elastic bearing arm, and makes the termination of this another first piezoresister and this another second piezoresister all be positioned at the top surface edge of bulk portion substantially.
Two second elastic bearing arms, these two second elastic bearing arms stretch out from the parallel to each other and opposite direction in other opposite edges upper edge of the top surface of bulk portion (for example edge+Y direction and-Y direction), and other top surface inward flange of other top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame; And
Two the 3rd piezoresisters, these two the 3rd piezoresisters are arranged on the top surface of each second elastic bearing arm, they are along the bearing of trend (for example along Y direction) of second elastic bearing arm certain distance away from each other, and along the bearing of trend (for example along Y direction) of this second elastic bearing arm and extend;
In these two the 3rd piezoresisters one is whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this one the 3rd piezoresister be positioned at other inside edge of the top surface of thick framework substantially, and
In these two the 3rd piezoresisters another be whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this another the 3rd piezoresister be positioned at the top surface edge of bulk portion substantially;
These two first piezoresisters detect the acceleration along the first elastic bearing arm bearing of trend (for example along X-direction), these two second piezoresisters detect along the acceleration perpendicular to the direction (Z-direction) of the top surface of bulk portion, and two the 3rd piezoresisters detect the acceleration along the second elastic bearing arm bearing of trend (for example along Y direction).
Also have, a kind of acceleration transducer of the present invention comprises:
Bulk portion, this bulk portion be at the center of acceleration transducer, and top surface is arranged;
Thick framework, this thick frame loops is around bulk portion and leave this bulk portion preset distance, and this thick framework has top surface;
A plurality of elastic bearing arms, each elastic bearing arm stretches out (for example along X-direction) from the top surface edge of bulk portion, and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame;
Two first piezoresisters, these two first piezoresisters are arranged on the top surface of each elastic bearing arm, they are along the bearing of trend (for example along X-direction) of elastic bearing arm certain distance away from each other, and along the bearing of trend (for example along X-direction) of this elastic bearing arm and extend; And
Two second piezoresisters, these two second piezoresisters are arranged on the top surface of elastic bearing arm of two first piezoresisters, distance along elastic bearing arm direction (for example along X-direction) between these two second piezoresisters is different with first piezoresister distance, and with the angled extension of bearing of trend (for example along X-direction) of elastic bearing arm
Two first piezoresisters detect the acceleration along elastic bearing arm bearing of trend (for example along X-direction), and two second piezoresisters detect along the acceleration of the direction (Z-direction) vertical with the top surface of bulk portion.
In above-mentioned acceleration transducer, preferably, one in two first piezoresisters one and two second piezoresisters can wholely be arranged on the top surface of elastic bearing arm, and the termination that makes this one first piezoresister and this one second piezoresister all is positioned at the inside edge of the top surface of thick framework substantially, and in another and this two second piezoresisters in these two first piezoresisters another can wholely be arranged on the top surface of elastic bearing arm, and make the termination of this another first piezoresister and this another second piezoresister all be positioned at the top surface edge of bulk portion substantially.Preferably, all to be arranged to bearing of trend (for example X-direction) angulation with the elastic bearing arm be 10 to 30 degree or 65 to 90 degree to each in two second piezoresisters.Preferably, the distance between two second piezoresisters is than 0.4 to 1.2 times of this piezoresister length of distance between two first piezoresisters.Be more preferably, the distance between two second piezoresisters is preferably than 0.6 to 1.0 times of this piezoresister length of distance between two first piezoresisters.Also can select, the distance between two second piezoresisters is than 1.0 to 1.8 times of short this piezoresister length of distance between two first piezoresisters.Be more preferably, the distance between two second piezoresisters is than 1.2 to 1.6 times of short this piezoresister length of distance between two first piezoresisters.
Brief description of drawings
Fig. 1 is the planimetric map of the acceleration transducer of expression example 1 of the present invention;
Fig. 2 is that acceleration transducer among Fig. 1 is along the cut-open view of the line II-II among Fig. 1;
Fig. 3 is the amplification view of elastic bearing arm of the acceleration transducer of expression example 1 of the present invention;
Fig. 4 is illustrated in the acceleration transducer of example 1 of the present invention, the curve map of the relation between the difference of the ratio of the output of the output of Z-direction piezoresister and X-direction piezoresister and Z-direction piezoresister distance and X-direction piezoresister distance;
Fig. 5 is the planimetric map of the acceleration transducer of expression example 2 of the present invention;
Fig. 6 is the amplification view of elastic bearing arm of the acceleration transducer of expression example 2 of the present invention;
Fig. 7 is illustrated in the acceleration transducer of example 2 of the present invention, the ratio of the output of Z-direction piezoresister and the output of X-direction piezoresister, with the curve map of the difference of Z-direction piezoresister distance and X-direction piezoresister distance;
Fig. 8 is the planimetric map of the acceleration transducer of expression example 3 of the present invention;
Fig. 9 is the amplification view of elastic bearing arm of the acceleration transducer of expression example 3 of the present invention;
Figure 10 is illustrated in the acceleration transducer of example 3 of the present invention, and the ratio of the output of Z-direction piezoresister and the output of X-direction piezoresister is with the curve map of Z-direction piezoresister with respect to the angle of X-direction piezoresister;
Figure 11 is illustrated in the acceleration transducer of example 3 of the present invention, the ratio of the output of Z-direction piezoresister and the output of X-direction piezoresister, with the curve map of Z-direction piezoresister with respect to the angle of X-direction piezoresister;
Figure 12 A to 12E is the synoptic diagram of the manufacture method of acceleration transducer of the present invention;
Figure 13 is the planimetric map of disclosed acceleration transducer in Jap.P. is open;
Figure 14 is that acceleration transducer among Figure 13 is along the cut-open view of the line XIV-XIV among Figure 13;
Figure 15 is the skeleton view of the acceleration transducer among Figure 13;
Figure 16 is the planimetric map of the acceleration transducer that proposes in the patented claim of the applicant's common pending trial; And
Figure 17 is illustrated in the acceleration transducer that proposes in the patented claim of common pending trial, the thickness of sensitivity of X-direction piezoresister and bulk portion and the sensitivity of Y direction piezoresister, with the curve map of the thickness of bulk portion.
Embodiment
Example 1
Introduce the acceleration transducer of example 1 of the present invention below with reference to Fig. 1 to 4.Fig. 1 is the planimetric map of acceleration transducer.Fig. 2 is the cut-open view along the line II-II among Fig. 1.Fig. 3 is the amplification view of the elastic bearing arm of expression acceleration transducer.Fig. 4 is illustrated in the acceleration transducer of example 1 of the present invention, the curve map that concerns between the difference of the ratio of the output of the output of Z-direction piezoresister and X-direction piezoresister and Z-direction piezoresister distance and X-direction piezoresister distance.
Acceleration transducer of the present invention adopts the single crystal silicon substrate with soi layer, and this soi layer passes through SiO
2Insulation course forms, and is the SOI wafer, so that can control the thickness of elastic bearing arm with high precision very.SOI is the abbreviation of the silicon on insulator.In this example, by at thickness being the SiO that is formed with thinly on the Si wafer of about 625 μ m as the etching interceptor
2Insulation course (about 1 μ m) and the wafer that forms are as matrix, and forming thickness on the Si wafer is the n type single crystal silicon layer of about 10 μ m.In the acceleration transducer 100 of this example, in the identical square single crystal silicon substrate of size and framework 110, form four L shaped through holes 150, thereby be formed on the bulk portion 120 at center, around the thick framework 110 of this bulk portion and be arranged in supporting arm between them, and by making the thin elastic bearing arm 131,132,133 and 134 that forms of supporting arm portions.Acceleration transducer 100 has piezoresister 161 to 164,171 to 174 and 181 to 184, these piezoresisters are arranged in the elastic bearing arm, so that with two vertical detection axles (axle X and Y) and corresponding, and four piezoresisters are all arranged for each axis perpendicular to the detection axis (axle Z) of the top surface of acceleration transducer.That is, piezoresister is separately positioned on the elastic bearing arm 131 and 133 of X-direction extension 161 and 162 and 163 and 164, is used to detect the acceleration of X-direction.Piezoresister is separately positioned on along on the elastic bearing arm 132 and 134 of Y direction extension 171 and 172 and 173 and 174, is used to detect the acceleration along Y direction.And piezoresister is separately positioned on the elastic bearing arm 131 and 133 that extends along X-direction 181 and 182 and 183 and 184, is used to detect the acceleration of Z-direction.In this example, detect by the piezoresister on elastic bearing arm 131 and 133, also can be arranged on elastic bearing arm 132 and 134 but detect along the element of the acceleration of Z-direction along the acceleration of Z-direction.Be used to detect the full electric bridge testing circuit of the independent formation of four piezoresisters of each axial acceleration.
Below main reference Fig. 1 and Fig. 3 are introduced the acceleration transducer 100 of example 1 of the present invention, two piezoresisters 161 of acceleration on elastic bearing arm 131, that be used to detect X-direction and 162 are along the X-direction alignment, and extend along X-direction.These two piezoresisters are at the two ends of elastic bearing arm 131, and the respective end of two piezoresisters is located on the top surface inward flange of thick framework 110 and the border between the elastic bearing arm 131 and is located on the border between the top surface edge of elastic bearing arm 131 and bulk portion 120.Two piezoresisters 163 of acceleration on elastic bearing arm 133, that be used to detect X-direction and 164 are along the X-direction alignment, and extend along X-direction.These two piezoresisters are at the two ends of elastic bearing arm 133, and the respective end of two piezoresisters is located on the top surface edge of bulk portion 120 and the border between the elastic bearing arm 133 and is located on the border between the top surface inward flange of elastic bearing arm 133 and thick framework 110.Two piezoresisters 161 on elastic bearing arm 131 and 162 distances separated from one another deduct the result of the length L of piezoresister for the length of this elastic bearing arm 131.Equally, two piezoresisters 163 on elastic bearing arm 133 and 164 distances separated from one another deduct the result of the length L of piezoresister for the length of this elastic bearing arm 133.
The piezoresister 171 to 174 that is used to detect Y direction extends along the Y direction alignment and along Y direction.Wherein, piezoresister 171 and 172 each end at elastic bearing arm 132, and be arranged on the elastic bearing arm 132, like this, piezoresister 171 and 172 respective end are located on the top surface inward flange of thick framework 110 and the border between the elastic bearing arm 132 and are located on the border between the top surface edge of elastic bearing arm 132 and bulk portion 120.Piezoresister 173 and 174 each end at elastic bearing arm 134, and be arranged on the elastic bearing arm 134, like this, piezoresister 173 and 174 respective end are located on the top surface edge of bulk portion 120 and the border between the elastic bearing arm 134 and are located on the border between the top surface inward flange of elastic bearing arm 134 and thick framework 110.Two piezoresisters 171 on elastic bearing arm 132 and 172 distances separated from one another deduct the result of the length L of piezoresister for the length of this elastic bearing arm 132.Equally, two piezoresisters 173 on elastic bearing arm 134 and 174 distances separated from one another deduct the result of the length L of piezoresister for the length of this elastic bearing arm 134.
Two piezoresisters 181 on elastic bearing arm 131 and 182 distances separated from one another deduct the result of the length L of piezoresister greater than the length of this elastic bearing arm 131.Equally, two piezoresisters 183 on elastic bearing arm 133 and 184 distances separated from one another deduct the result of the length L of piezoresister greater than the length of this elastic bearing arm 133.
In acceleration transducer of the present invention, because elastic bearing arm 131 and elastic bearing arm 133 have formed equal length usually, the distance that is used to detect between two piezoresisters of acceleration of Z-direction is longer than the distance between two piezoresisters that are used to detect X-direction (or Y direction).Preferably, the difference between these distances is 0.4 to 1.2 times of piezoresister length L.Be more preferably, the difference between these distances is 0.6 to 1.0 times of piezoresister length L.
Curve representation among Fig. 4 export result with the ratio of X-direction piezoresister output by making difference between Z-direction piezoresister distance and the X-direction piezoresister distance between 0 to 2.4L, change the Z-direction piezoresister that records.As shown in the figure, when range difference was about 0.8L, Z-direction piezoresister output/X-direction piezoresister was output as 1.0.When range difference was 0.6L to 1.0L, output was than being 1.2 to 0.8.By this curve map as can be known, in acceleration transducer of the present invention, Z-direction output and X-direction (or Y direction) output are substantially at par.
Example 2
Introduce the acceleration transducer of example 2 of the present invention below with reference to Fig. 5 to 7.Fig. 5 is the planimetric map of acceleration transducer 200, Fig. 6 is the amplification view of an elastic bearing arm in the presentation graphs 5, and Fig. 7 is illustrated in the acceleration transducer of example 2 of the present invention, the curve map of the relation between the difference of the ratio of the output of the output of Z-direction piezoresister and X-direction piezoresister and Z-direction piezoresister distance and X-direction piezoresister distance.Acceleration transducer 200 is basic identical with the acceleration transducer 100 of example 1, but top surface edge and border between the elastic bearing arm 231 and the border between the top surface edge of elastic bearing arm 231 and bulk portion 220 at thick framework 210 are all left in the termination 281 and 282 that is used to detect the piezoresister of Z-direction acceleration, and are arranged on the elastic bearing arm 231.For on elastic bearing arm 233, along two piezoresisters 283 and 284 of Z-direction, their termination all separately is arranged on top surface edge and the border between the elastic bearing arm 233 and the border between the top surface inward flange of elastic bearing arm 233 and thick framework 210 of bulk portion 220.
Two Z- direction piezoresisters 281 and 282 distances separated from one another deduct piezoresister than the length of this elastic bearing arm 231 the result of length L is shorter.Equally, deduct the result of length L of piezoresister than the length of this elastic bearing arm 233 shorter for two Z- direction piezoresisters 283 and 284 distances separated from one another.Because elastic bearing arm 231 is made identical length usually with elastic bearing arm 233, therefore, in the acceleration transducer of example 2, be used to detect along the distance between two piezoresisters of Z-direction acceleration shorter along the distance between two piezoresisters of X-direction (or Y direction) acceleration than being used for detection.Preferably, the difference between these distances is 1.0L to 1.8L.Be more preferably, the difference between these distances is that 1.2L is to 1.6L.
Curve representation among Fig. 7 export result with the ratio of X-direction piezoresister output by making difference between Z-direction piezoresister distance and the X-direction piezoresister distance between 0 to 2.4L, change the Z-direction piezoresister that records.As shown in the figure, when range difference was about 1.4L, Z-direction piezoresister output/X-direction piezoresister was output as 1.0.When range difference was 1.0L to 1.8L, output was than being 1.15 to 0.8.When range difference was 1.2L to 1.6L, this was than being 1.1 to 0.9.By this curve map as can be known, in acceleration transducer of the present invention, Z-direction output and X-direction (or Y direction) output are substantially at par.
Example 3
Introduce the acceleration transducer of example 3 of the present invention below with reference to Fig. 8 to 11.Fig. 8 is the planimetric map of acceleration transducer 300, Fig. 9 is the amplification view of an elastic bearing arm in the presentation graphs 8, and Figure 10 and 11 is illustrated in the acceleration transducer of example 3 of the present invention, at the ratio of the output of the output of Z-direction piezoresister and X-direction piezoresister and the curve map of the relation between Z-direction piezoresister and the formed angle θ of X-direction.Acceleration transducer 300 is basic identical with the acceleration transducer 100 of example 1, but the piezoresister 381 and 382 that is used to detect the Z-direction acceleration is arranged on elastic bearing arm 331, and with the angled θ of X-direction.Be arranged on two piezoresisters 383 on the elastic bearing arm 331, Z-direction and 384 and the angled θ of X-direction.
Between the Z- direction piezoresister 381 and 382 and the distance between 383 and 384 than the distance 2L between X-direction piezoresister 361 and 362 and between 363 and 364 (1-cos θ), because the angled θ of Z-direction piezoresister and X-direction, but when θ hour, can think between the Z-direction piezoresister distance almost with the X-direction piezoresister between distance identical.
Z-direction piezoresister and X-direction angulation θ are 10 to 30 degree or 65 to 90 degree.Be more preferably, this angle is 15 to 25 degree or 70 to 90 degree.As by the Z-direction piezoresister output that Z-direction piezoresister and X-direction angulation θ changed record between 0 to 90 degree result with the ratio of X-direction piezoresister output, the curve representation of Figure 10 the output ratio of angle from 0 to 35 when spending, and the curve representation of Figure 11 the output ratio of angle from 55 to 90 when spending.Shown in these curves, when angle is about 20 degree or about 78 when spending, the ratio that Z-direction piezoresister output/X-direction piezoresister is exported is 1.0.When angle is 10 to 30 when spending, output is than being 1.35 to 0.65.When angle is 65 to 90 when spending, this output is than being 0.65 to 1.25.By these curve maps as can be known, in acceleration transducer of the present invention, Z-direction output and X-direction (or Y direction) output are substantially at par.
Introduce the manufacture method of acceleration transducer 100 of the present invention below.Figure 12 A to 12E has represented the section part (left-half) along the X-direction among Fig. 1 (II-II section), so that explain main processing procedure.As mentioned above, the SOI wafer is the Si single crystal silicon substrate, and this Si single crystal silicon substrate is by Si pedestal matrix 60, soi layer 80 and SiO
2Layer 70 process, this soi layer 80 is on top surface, and it is the Si active layer, this SiO
2Layer is 70 between Si pedestal matrix 60 and soi layer 80, and as the etching interceptor, shown in Figure 12 A.For their thickness, the thickness of pedestal matrix 60 is 625 μ m, SiO
2The thickness of layer is 1 μ m, and the thickness of soi layer is about 10 μ m.
Make the first step of handling and to utilize photoresist or thermal oxide SiO
2Films etc. form the figure of predetermined form at soi layer 80, and utilize and for example handle ion by diffusion of contaminants and inject the boron that spreads and form piezoresister 161 and 162 (Figure 12 A).Consider from temperature characterisitic and sensitivity aspect,, adopt about 2 * 10 for surface impurity density
18Atom/cm
3
Then, in order to protect piezoresister 161 and 162, form diaphragm 41 (Figure 12 B).For diaphragm 41, adopt normally used multilayer SiO in semiconductor technology
2And PSG (phosphosilicate glass), so that produce the movable ion inspiratory effects.Also can use two-layer SiO
2Replace two-layer SiO with the SiN film
2And psg film.Preferably, the thickness of diaphragm 41 can be made thin as far as possible, so that reduce stress under highly sensitive situation, therefore, it is made for 0.3 μ m to 0.5 μ m.
Then, by the wet etching that utilizes hydrofluorite to carry out, thereby in the diaphragm 41 at piezoresister 161 and 162 two ends, be formed for the through hole 40a (Figure 12 C) of connection electrode as principal ingredient.
Then, in order to form electrode connection, form aluminium alloy (aluminium, copper, silicon etc. are principal ingredient) film by sputter.Its thickness is 0.3 μ m to 0.5 μ m.Lead-in wire electrode 40 forms (Figure 12 D) by photoetch.
Then,, soi layer 80 is carried out etching, so that make the via hole image 150 shown in Fig. 1 form thin part by dry-etching method etc. although not shown.
Then, on the pedestal matrix 60 of rear surface, photoresist shielding forms bulk portion 120 and framework 110 shapes according to from the teeth outwards piezoresister 161 and 162 position, utilize two-sided alignment means and via hole image 150 is alignd with soi layer 80 grades, and pedestal matrix 60 is carried out etching, and as the SiO of etching interceptor by dry-etching method
2Layer is removed (Figure 12 E) by wet etching.In dry etching steps, on sidewall and inwall, alternately repeat following processing, mainly use SF
6The etch processes of gas and mainly comprise C
4F
8The processing of gas bonding polymer.As a kind of etching SiO
2The engraving method of layer adopts the hydrofluorite with buffering agent.Although elastic bearing arm 131,132,133 and 134 forms, in some cases, preferably stay SiO in dry etch process
2Layer 70 is not removed it as the etching interceptor, so that keep the balance of whole stress, thereby makes stacked SiO
2Layer and silicon layer form elastic bearing arm, SiO
2The part of layer 70 can be used as the etching interceptor and stays on the back side of elastic bearing arm.
Therefore, a plurality of acceleration sensor element that form on wafer are cut into sensor chip one by one by using dicer etc., and handle for example to seal etc. by assembling and form semiconductor acceleration sensor 100.
As mentioned above, in acceleration transducer of the present invention, the difference between Z-direction output and X-direction (or Y direction) are exported can be modified to 35% or littler, and preferably 20% or littler.In addition, the resistance value of piezoresister is identical with thermal characteristics, therefore, does not need each is axially all prepared amplifier, thereby three direction of principal axis acceleration transducers of compact and more cheap semiconductor type can be provided.
Claims (11)
1. acceleration transducer comprises:
Bulk portion, this bulk portion is arranged on the center of acceleration transducer, and top surface is arranged;
Thick framework, this thick frame loops is around bulk portion and leave this bulk portion one preset distance, and this thick framework has top surface;
A plurality of elastic bearing arms, each elastic bearing arm stretches out from the top surface edge of bulk portion, and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, and bulk portion is suspended on thick inside of frame;
Arrange two first piezoresisters on the top surface of each elastic bearing arm, they are along the bearing of trend of the elastic bearing arm at its place certain distance away from each other, and extend along the bearing of trend of this elastic bearing arm; And
On being provided with the top surface of elastic bearing arm of described two first piezoresisters, each arranges two second piezoresisters,
These two first piezoresisters detect the acceleration along elastic bearing arm bearing of trend, and these two second piezoresisters detect along the acceleration of the direction vertical with the top surface of bulk portion,
It is characterized in that: the angled setting of bearing of trend of described two second piezoresisters and described elastic bearing arm.
2. acceleration transducer according to claim 1, wherein: in two first piezoresisters one and two second piezoresisters one is whole to be arranged on the top surface of elastic bearing arm, and the termination that makes this one first piezoresister and this one second piezoresister all is positioned at the inside edge of the top surface of thick framework, and on all whole top surface that is arranged in the elastic bearing arm of in another and this two second piezoresisters in these two first piezoresisters another, and make the termination of this another first piezoresister and this another second piezoresister all be positioned at the top surface edge of bulk portion.
3. acceleration transducer according to claim 2, wherein: the bearing of trend angulation that each in two second piezoresisters all is arranged to the elastic bearing arm is 10 to 30 degree or 65 to 90 degree.
4. acceleration transducer according to claim 3, wherein:
Described a plurality of elastic bearing arm comprises two first elastic bearing arms and two second elastic bearing arms, these two first elastic bearing arms stretch out from the parallel to each other and opposite direction in the opposite edges upper edge of the top surface of bulk portion, and the top surface inward flange of the top surface edge of bridge joint bulk portion and thick framework, these two second elastic bearing arms stretch out from the parallel to each other and opposite direction in other opposite edges upper edge of the top surface of bulk portion, and other top surface inward flange of other top surface edge of bridge joint bulk portion and thick framework;
Wherein: on the top surface of each described first elastic bearing arm, arrange described two first piezoresisters and described two second piezoresisters, and
Wherein: each described second elastic bearing arm has two the 3rd piezoresisters, these two the 3rd piezoresisters are arranged on the top surface of each second elastic bearing arm, they are along the bearing of trend of the second elastic bearing arm at its place certain distance away from each other, and along the bearing of trend of this second elastic bearing arm and extend
In these two the 3rd piezoresisters one is whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this one the 3rd piezoresister be arranged in an inside edge of other top surface inward flange of described thick framework,
In these two the 3rd piezoresisters another be whole to be arranged on the top surface of the second elastic bearing arm, and makes the termination of this another the 3rd piezoresister be arranged in the edge at other top surface edge of bulk portion, and
These two the 3rd piezoresisters detect the acceleration along the second elastic bearing arm bearing of trend.
5. acceleration transducer according to claim 1, wherein:
Described two second piezoresisters are arranged between these two second piezoresisters different with the distance along elastic bearing arm direction between two first piezoresisters on the top surface of described elastic bearing arm along the distance of elastic bearing arm direction, and with the angled extension of the bearing of trend of elastic bearing arm.
6. acceleration transducer according to claim 5, wherein: the bearing of trend angulation that each in two second piezoresisters all is arranged to the elastic bearing arm is 10 to 30 degree or 65 to 90 degree.
7. acceleration transducer according to claim 6, wherein: in two first piezoresisters one and two second piezoresisters one is whole to be arranged on the top surface of elastic bearing arm, and the termination that makes this one first piezoresister and this one second piezoresister all is positioned at the inside edge of the top surface of thick framework, and on all whole top surface that is arranged in the elastic bearing arm of in another and this two second piezoresisters in these two first piezoresisters another, and make the termination of this another first piezoresister and this another second piezoresister all be positioned at the top surface edge of bulk portion.
8. acceleration transducer according to claim 7, wherein: the distance between two second piezoresisters is than 0.4 to 1.2 times of the distance piezoresister length L between two first piezoresisters.
9. acceleration transducer according to claim 8, wherein: the distance between two second piezoresisters is than 0.6 to 1.0 times of the distance piezoresister length L between two first piezoresisters.
10. acceleration transducer according to claim 6, wherein: two second piezoresisters are whole to be arranged on the top surface of elastic bearing arm, and makes all terminations of two second piezoresisters all leave the termination of elastic bearing arm.
11. acceleration transducer according to claim 10, wherein: the distance between two second piezoresisters is than 1.0 to 1.8 times of the short piezoresister length L of distance between two first piezoresisters.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002083161A JP3642054B2 (en) | 2002-03-25 | 2002-03-25 | Piezoresistive 3-axis acceleration sensor |
| JP083161/2002 | 2002-03-25 | ||
| JP103364/2002 | 2002-04-05 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031082149A Division CN100334453C (en) | 2002-03-25 | 2003-03-25 | Acceleration transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1841072A CN1841072A (en) | 2006-10-04 |
| CN100422697C true CN100422697C (en) | 2008-10-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100770261A Expired - Fee Related CN100422697C (en) | 2002-03-25 | 2003-03-25 | Acceleration transducer |
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|---|---|
| JP (1) | JP3642054B2 (en) |
| CN (1) | CN100422697C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005062060A1 (en) | 2003-12-24 | 2005-07-07 | Hitachi Metals, Ltd. | Semiconductor type 3-axis acceleration sensor |
| TWI277735B (en) | 2004-09-30 | 2007-04-01 | Hitachi Metals Ltd | Semiconductor acceleration sensor |
| JP2006133161A (en) | 2004-11-09 | 2006-05-25 | Fujitsu Media Device Kk | Acceleration sensor |
| JP2006177823A (en) | 2004-12-22 | 2006-07-06 | Oki Electric Ind Co Ltd | Acceleration sensor |
| JP4838229B2 (en) | 2007-07-27 | 2011-12-14 | トレックス・セミコンダクター株式会社 | Accelerometer |
| CN102408089A (en) * | 2010-09-20 | 2012-04-11 | 利顺精密科技股份有限公司 | Micro electronmechanical sensor capable of simultaneously measuring acceleration and pressure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04339266A (en) * | 1991-02-08 | 1992-11-26 | Tokai Rika Co Ltd | Acceleration sensor and its manufacture |
| US5295386A (en) * | 1989-12-28 | 1994-03-22 | Kazuhiro Okada | Apparatus for detecting acceleration and method for testing this apparatus |
| DE4340664A1 (en) * | 1993-11-30 | 1995-06-01 | Crazzolara Helmut Dipl Ing | Piezo-resistive acceleration sensor, e.g. for airbag or seat-belt restraint system in vehicle |
| JPH08285883A (en) * | 1995-04-14 | 1996-11-01 | Matsushita Electric Works Ltd | Acceleration sensor |
-
2002
- 2002-03-25 JP JP2002083161A patent/JP3642054B2/en not_active Expired - Fee Related
-
2003
- 2003-03-25 CN CNB2006100770261A patent/CN100422697C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5295386A (en) * | 1989-12-28 | 1994-03-22 | Kazuhiro Okada | Apparatus for detecting acceleration and method for testing this apparatus |
| JPH04339266A (en) * | 1991-02-08 | 1992-11-26 | Tokai Rika Co Ltd | Acceleration sensor and its manufacture |
| DE4340664A1 (en) * | 1993-11-30 | 1995-06-01 | Crazzolara Helmut Dipl Ing | Piezo-resistive acceleration sensor, e.g. for airbag or seat-belt restraint system in vehicle |
| JPH08285883A (en) * | 1995-04-14 | 1996-11-01 | Matsushita Electric Works Ltd | Acceleration sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003279592A (en) | 2003-10-02 |
| JP3642054B2 (en) | 2005-04-27 |
| CN1841072A (en) | 2006-10-04 |
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