AU2001289158A1 - Micromechanical device having two degrees of motion - Google Patents

Micromechanical device having two degrees of motion

Info

Publication number
AU2001289158A1
AU2001289158A1 AU2001289158A AU8915801A AU2001289158A1 AU 2001289158 A1 AU2001289158 A1 AU 2001289158A1 AU 2001289158 A AU2001289158 A AU 2001289158A AU 8915801 A AU8915801 A AU 8915801A AU 2001289158 A1 AU2001289158 A1 AU 2001289158A1
Authority
AU
Australia
Prior art keywords
degrees
motion
micromechanical device
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001289158A
Inventor
John H Jerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iolon Inc
Original Assignee
Iolon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iolon Inc filed Critical Iolon Inc
Publication of AU2001289158A1 publication Critical patent/AU2001289158A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
AU2001289158A 2000-08-25 2001-08-24 Micromechanical device having two degrees of motion Abandoned AU2001289158A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22793300P 2000-08-25 2000-08-25
US60227933 2000-08-25
PCT/US2001/041881 WO2002017470A1 (en) 2000-08-25 2001-08-24 Micromechanical device having two degrees of motion

Publications (1)

Publication Number Publication Date
AU2001289158A1 true AU2001289158A1 (en) 2002-03-04

Family

ID=22855042

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001289158A Abandoned AU2001289158A1 (en) 2000-08-25 2001-08-24 Micromechanical device having two degrees of motion

Country Status (3)

Country Link
US (1) US6833652B2 (en)
AU (1) AU2001289158A1 (en)
WO (1) WO2002017470A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001289158A1 (en) * 2000-08-25 2002-03-04 Iolon, Inc. Micromechanical device having two degrees of motion
US6664707B2 (en) 2001-03-15 2003-12-16 Iolon, Inc. Miniature device with translatable member
FR2874907B1 (en) * 2004-09-03 2006-11-24 Silmach Soc Par Actions Simpli TRAINING DEVICE, IN PARTICULAR FOR WATCHMAKING MECHANISM
CA2551194A1 (en) * 2006-06-23 2007-12-23 Xinyu Liu Mems-based nanomanipulators/nanopositioners
US9621772B2 (en) 2006-11-09 2017-04-11 Digitaloptics Corporation Integrated lens barrel, actuator, and MEMS snubber systems and methods
US8947797B2 (en) 2010-11-15 2015-02-03 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US9397585B2 (en) 2010-11-15 2016-07-19 DigitalOptics Corporation MEMS MEMS shock cushion spring systems and methods
US9465187B2 (en) 2010-11-15 2016-10-11 DigitalOptics Corporation MEMS Thermal despace compensation systems and methods
CN105209950B (en) * 2013-03-15 2018-09-25 数位光学Mems有限公司 Miniature MEMS actuator
KR102482842B1 (en) * 2015-11-13 2022-12-29 삼성전자 주식회사 Electrostatic induction device for performing power generating function

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5179499A (en) 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
US5536988A (en) 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
US5963367A (en) 1997-09-23 1999-10-05 Lucent Technologies, Inc. Micromechanical xyz stage for use with optical elements
US5998906A (en) 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof
US6411589B1 (en) * 1998-07-29 2002-06-25 Hewlett-Packard Company System and method for forming electrostatically actuated data storage mechanisms
US6175170B1 (en) 1999-09-10 2001-01-16 Sridhar Kota Compliant displacement-multiplying apparatus for microelectromechanical systems
WO2001043268A2 (en) 1999-11-29 2001-06-14 Iolon, Inc. Balanced microdevice and rotary electrostatic microactuator for use therewith
AU2001289158A1 (en) * 2000-08-25 2002-03-04 Iolon, Inc. Micromechanical device having two degrees of motion

Also Published As

Publication number Publication date
US20020067103A1 (en) 2002-06-06
US6833652B2 (en) 2004-12-21
WO2002017470A1 (en) 2002-02-28

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