JP4791637B2
(en)
*
|
2001-01-22 |
2011-10-12 |
キヤノンアネルバ株式会社 |
CVD apparatus and processing method using the same
|
US6660662B2
(en)
*
|
2001-01-26 |
2003-12-09 |
Applied Materials, Inc. |
Method of reducing plasma charge damage for plasma processes
|
JP3886424B2
(en)
*
|
2001-08-28 |
2007-02-28 |
鹿児島日本電気株式会社 |
Substrate processing apparatus and method
|
US8150510B2
(en)
*
|
2002-04-15 |
2012-04-03 |
Imperception, Inc. |
Shock timing technology
|
KR20040007963A
(en)
*
|
2002-07-15 |
2004-01-28 |
삼성전자주식회사 |
Reaction apparatus for atomic layer deposition
|
US7029536B2
(en)
|
2003-03-17 |
2006-04-18 |
Tokyo Electron Limited |
Processing system and method for treating a substrate
|
KR101137901B1
(en)
*
|
2003-05-16 |
2012-05-02 |
에스브이티 어소시에이츠, 인코포레이티드 |
Thin-film deposition evaporator
|
KR20050001793A
(en)
*
|
2003-06-26 |
2005-01-07 |
삼성전자주식회사 |
In-situ analysis method for atomic layer deposition process
|
US20050178336A1
(en)
*
|
2003-07-15 |
2005-08-18 |
Heng Liu |
Chemical vapor deposition reactor having multiple inlets
|
US20050011459A1
(en)
*
|
2003-07-15 |
2005-01-20 |
Heng Liu |
Chemical vapor deposition reactor
|
US6829056B1
(en)
*
|
2003-08-21 |
2004-12-07 |
Michael Barnes |
Monitoring dimensions of features at different locations in the processing of substrates
|
US7071118B2
(en)
*
|
2003-11-12 |
2006-07-04 |
Veeco Instruments, Inc. |
Method and apparatus for fabricating a conformal thin film on a substrate
|
US20050103265A1
(en)
|
2003-11-19 |
2005-05-19 |
Applied Materials, Inc., A Delaware Corporation |
Gas distribution showerhead featuring exhaust apertures
|
US6983892B2
(en)
|
2004-02-05 |
2006-01-10 |
Applied Materials, Inc. |
Gas distribution showerhead for semiconductor processing
|
DE102004007984A1
(en)
*
|
2004-02-18 |
2005-09-01 |
Aixtron Ag |
CVD reactor with photodiode array
|
JP4550507B2
(en)
*
|
2004-07-26 |
2010-09-22 |
株式会社日立ハイテクノロジーズ |
Plasma processing equipment
|
US8084400B2
(en)
*
|
2005-10-11 |
2011-12-27 |
Intermolecular, Inc. |
Methods for discretized processing and process sequence integration of regions of a substrate
|
US7510624B2
(en)
*
|
2004-12-17 |
2009-03-31 |
Applied Materials, Inc. |
Self-cooling gas delivery apparatus under high vacuum for high density plasma applications
|
US7722719B2
(en)
*
|
2005-03-07 |
2010-05-25 |
Applied Materials, Inc. |
Gas baffle and distributor for semiconductor processing chamber
|
US20060216548A1
(en)
*
|
2005-03-22 |
2006-09-28 |
Ming Mao |
Nanolaminate thin films and method for forming the same using atomic layer deposition
|
US7351285B2
(en)
*
|
2005-03-29 |
2008-04-01 |
Tokyo Electron Limited |
Method and system for forming a variable thickness seed layer
|
US7718030B2
(en)
*
|
2005-09-23 |
2010-05-18 |
Tokyo Electron Limited |
Method and system for controlling radical distribution
|
US8776717B2
(en)
*
|
2005-10-11 |
2014-07-15 |
Intermolecular, Inc. |
Systems for discretized processing of regions of a substrate
|
US7955436B2
(en)
*
|
2006-02-24 |
2011-06-07 |
Intermolecular, Inc. |
Systems and methods for sealing in site-isolated reactors
|
US7902063B2
(en)
*
|
2005-10-11 |
2011-03-08 |
Intermolecular, Inc. |
Methods for discretized formation of masking and capping layers on a substrate
|
US8772772B2
(en)
*
|
2006-05-18 |
2014-07-08 |
Intermolecular, Inc. |
System and method for increasing productivity of combinatorial screening
|
KR101388389B1
(en)
*
|
2006-02-10 |
2014-04-22 |
인터몰레큘러 인코퍼레이티드 |
Method and apparatus for combinatorially varying materials, unit process and process sequence
|
JP2007324529A
(en)
*
|
2006-06-05 |
2007-12-13 |
Tokyo Electron Ltd |
Gas inlet apparatus, manufacturing method therefor, and processing apparatus
|
JP5045000B2
(en)
*
|
2006-06-20 |
2012-10-10 |
東京エレクトロン株式会社 |
Film forming apparatus, gas supply apparatus, film forming method, and storage medium
|
US7605078B2
(en)
|
2006-09-29 |
2009-10-20 |
Tokyo Electron Limited |
Integration of a variable thickness copper seed layer in copper metallization
|
US8986456B2
(en)
|
2006-10-10 |
2015-03-24 |
Asm America, Inc. |
Precursor delivery system
|
US7897008B2
(en)
*
|
2006-10-27 |
2011-03-01 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Apparatus and method for regional plasma control
|
US7758698B2
(en)
*
|
2006-11-28 |
2010-07-20 |
Applied Materials, Inc. |
Dual top gas feed through distributor for high density plasma chamber
|
US20080124944A1
(en)
*
|
2006-11-28 |
2008-05-29 |
Applied Materials, Inc. |
Gas baffle and distributor for semiconductor processing chamber
|
US20080121177A1
(en)
*
|
2006-11-28 |
2008-05-29 |
Applied Materials, Inc. |
Dual top gas feed through distributor for high density plasma chamber
|
US7740706B2
(en)
*
|
2006-11-28 |
2010-06-22 |
Applied Materials, Inc. |
Gas baffle and distributor for semiconductor processing chamber
|
US7879401B2
(en)
*
|
2006-12-22 |
2011-02-01 |
The Regents Of The University Of Michigan |
Organic vapor jet deposition using an exhaust
|
US8011317B2
(en)
*
|
2006-12-29 |
2011-09-06 |
Intermolecular, Inc. |
Advanced mixing system for integrated tool having site-isolated reactors
|
US7775236B2
(en)
*
|
2007-02-26 |
2010-08-17 |
Applied Materials, Inc. |
Method and apparatus for controlling gas flow to a processing chamber
|
US7846497B2
(en)
*
|
2007-02-26 |
2010-12-07 |
Applied Materials, Inc. |
Method and apparatus for controlling gas flow to a processing chamber
|
US8074677B2
(en)
*
|
2007-02-26 |
2011-12-13 |
Applied Materials, Inc. |
Method and apparatus for controlling gas flow to a processing chamber
|
US8287647B2
(en)
*
|
2007-04-17 |
2012-10-16 |
Lam Research Corporation |
Apparatus and method for atomic layer deposition
|
US8216419B2
(en)
*
|
2008-03-28 |
2012-07-10 |
Bridgelux, Inc. |
Drilled CVD shower head
|
US20090096349A1
(en)
*
|
2007-04-26 |
2009-04-16 |
Moshtagh Vahid S |
Cross flow cvd reactor
|
US7578177B2
(en)
|
2007-05-18 |
2009-08-25 |
Siemens Energy, Inc. |
MEMS emissions sensor system for a turbine engine
|
US9105449B2
(en)
*
|
2007-06-29 |
2015-08-11 |
Lam Research Corporation |
Distributed power arrangements for localizing power delivery
|
US8528498B2
(en)
*
|
2007-06-29 |
2013-09-10 |
Lam Research Corporation |
Integrated steerability array arrangement for minimizing non-uniformity
|
US8440259B2
(en)
*
|
2007-09-05 |
2013-05-14 |
Intermolecular, Inc. |
Vapor based combinatorial processing
|
US8039052B2
(en)
*
|
2007-09-06 |
2011-10-18 |
Intermolecular, Inc. |
Multi-region processing system and heads
|
US8668775B2
(en)
*
|
2007-10-31 |
2014-03-11 |
Toshiba Techno Center Inc. |
Machine CVD shower head
|
EP2067877A1
(en)
*
|
2007-11-23 |
2009-06-10 |
Applied Materials, Inc. |
Coating device and method of producing an electrode assembly
|
US20090133631A1
(en)
*
|
2007-11-23 |
2009-05-28 |
Applied Materials Inc. |
Coating device and method of producing an electrode assembly
|
US8387674B2
(en)
|
2007-11-30 |
2013-03-05 |
Taiwan Semiconductor Manufacturing Comany, Ltd. |
Chip on wafer bonder
|
US8129288B2
(en)
*
|
2008-05-02 |
2012-03-06 |
Intermolecular, Inc. |
Combinatorial plasma enhanced deposition techniques
|
CN101911253B
(en)
*
|
2008-01-31 |
2012-08-22 |
应用材料公司 |
Closed loop MOCVD deposition control
|
JP5202050B2
(en)
*
|
2008-03-14 |
2013-06-05 |
東京エレクトロン株式会社 |
Shower head and substrate processing apparatus
|
JP5179389B2
(en)
|
2008-03-19 |
2013-04-10 |
東京エレクトロン株式会社 |
Shower head and substrate processing apparatus
|
US20090236447A1
(en)
*
|
2008-03-21 |
2009-09-24 |
Applied Materials, Inc. |
Method and apparatus for controlling gas injection in process chamber
|
US8053036B2
(en)
*
|
2008-06-02 |
2011-11-08 |
Asm Japan K.K. |
Method for designing shower plate for plasma CVD apparatus
|
US20110180781A1
(en)
*
|
2008-06-05 |
2011-07-28 |
Soraa, Inc |
Highly Polarized White Light Source By Combining Blue LED on Semipolar or Nonpolar GaN with Yellow LED on Semipolar or Nonpolar GaN
|
US20090309127A1
(en)
*
|
2008-06-13 |
2009-12-17 |
Soraa, Inc. |
Selective area epitaxy growth method and structure
|
US8847249B2
(en)
*
|
2008-06-16 |
2014-09-30 |
Soraa, Inc. |
Solid-state optical device having enhanced indium content in active regions
|
US8805134B1
(en)
|
2012-02-17 |
2014-08-12 |
Soraa Laser Diode, Inc. |
Methods and apparatus for photonic integration in non-polar and semi-polar oriented wave-guided optical devices
|
US8767787B1
(en)
|
2008-07-14 |
2014-07-01 |
Soraa Laser Diode, Inc. |
Integrated laser diodes with quality facets on GaN substrates
|
US8143148B1
(en)
|
2008-07-14 |
2012-03-27 |
Soraa, Inc. |
Self-aligned multi-dielectric-layer lift off process for laser diode stripes
|
US8284810B1
(en)
|
2008-08-04 |
2012-10-09 |
Soraa, Inc. |
Solid state laser device using a selected crystal orientation in non-polar or semi-polar GaN containing materials and methods
|
CN102144294A
(en)
|
2008-08-04 |
2011-08-03 |
Soraa有限公司 |
White light devices using non-polar or semipolar gallium containing materials and phosphors
|
US10378106B2
(en)
|
2008-11-14 |
2019-08-13 |
Asm Ip Holding B.V. |
Method of forming insulation film by modified PEALD
|
TWI437622B
(en)
*
|
2008-11-26 |
2014-05-11 |
Ind Tech Res Inst |
Gas shower module
|
US8422525B1
(en)
|
2009-03-28 |
2013-04-16 |
Soraa, Inc. |
Optical device structure using miscut GaN substrates for laser applications
|
US9394608B2
(en)
*
|
2009-04-06 |
2016-07-19 |
Asm America, Inc. |
Semiconductor processing reactor and components thereof
|
US9531164B2
(en)
|
2009-04-13 |
2016-12-27 |
Soraa Laser Diode, Inc. |
Optical device structure using GaN substrates for laser applications
|
US8837545B2
(en)
|
2009-04-13 |
2014-09-16 |
Soraa Laser Diode, Inc. |
Optical device structure using GaN substrates and growth structures for laser applications
|
US8634442B1
(en)
|
2009-04-13 |
2014-01-21 |
Soraa Laser Diode, Inc. |
Optical device structure using GaN substrates for laser applications
|
US9800017B1
(en)
|
2009-05-29 |
2017-10-24 |
Soraa Laser Diode, Inc. |
Laser device and method for a vehicle
|
US9250044B1
(en)
|
2009-05-29 |
2016-02-02 |
Soraa Laser Diode, Inc. |
Gallium and nitrogen containing laser diode dazzling devices and methods of use
|
US8427590B2
(en)
|
2009-05-29 |
2013-04-23 |
Soraa, Inc. |
Laser based display method and system
|
US10108079B2
(en)
|
2009-05-29 |
2018-10-23 |
Soraa Laser Diode, Inc. |
Laser light source for a vehicle
|
US9829780B2
(en)
|
2009-05-29 |
2017-11-28 |
Soraa Laser Diode, Inc. |
Laser light source for a vehicle
|
US8247887B1
(en)
|
2009-05-29 |
2012-08-21 |
Soraa, Inc. |
Method and surface morphology of non-polar gallium nitride containing substrates
|
US8509275B1
(en)
|
2009-05-29 |
2013-08-13 |
Soraa, Inc. |
Gallium nitride based laser dazzling device and method
|
US7972899B2
(en)
*
|
2009-07-30 |
2011-07-05 |
Sisom Thin Films Llc |
Method for fabricating copper-containing ternary and quaternary chalcogenide thin films
|
US8883270B2
(en)
|
2009-08-14 |
2014-11-11 |
Asm America, Inc. |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species
|
US8877655B2
(en)
|
2010-05-07 |
2014-11-04 |
Asm America, Inc. |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
|
US8802201B2
(en)
*
|
2009-08-14 |
2014-08-12 |
Asm America, Inc. |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
|
US20110056429A1
(en)
*
|
2009-08-21 |
2011-03-10 |
Soraa, Inc. |
Rapid Growth Method and Structures for Gallium and Nitrogen Containing Ultra-Thin Epitaxial Structures for Devices
|
US8750342B1
(en)
|
2011-09-09 |
2014-06-10 |
Soraa Laser Diode, Inc. |
Laser diodes with scribe structures
|
US8355418B2
(en)
|
2009-09-17 |
2013-01-15 |
Soraa, Inc. |
Growth structures and method for forming laser diodes on {20-21} or off cut gallium and nitrogen containing substrates
|
US10147850B1
(en)
|
2010-02-03 |
2018-12-04 |
Soraa, Inc. |
System and method for providing color light sources in proximity to predetermined wavelength conversion structures
|
US8905588B2
(en)
|
2010-02-03 |
2014-12-09 |
Sorra, Inc. |
System and method for providing color light sources in proximity to predetermined wavelength conversion structures
|
US8178280B2
(en)
*
|
2010-02-05 |
2012-05-15 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Self-contained proximity effect correction inspiration for advanced lithography (special)
|
US20110247556A1
(en)
*
|
2010-03-31 |
2011-10-13 |
Soraa, Inc. |
Tapered Horizontal Growth Chamber
|
US20110256692A1
(en)
*
|
2010-04-14 |
2011-10-20 |
Applied Materials, Inc. |
Multiple precursor concentric delivery showerhead
|
US8551248B2
(en)
|
2010-04-19 |
2013-10-08 |
Texas Instruments Incorporated |
Showerhead for CVD depositions
|
US8451876B1
(en)
|
2010-05-17 |
2013-05-28 |
Soraa, Inc. |
Method and system for providing bidirectional light sources with broad spectrum
|
US9139910B2
(en)
*
|
2010-06-11 |
2015-09-22 |
Tokyo Electron Limited |
Method for chemical vapor deposition control
|
WO2011159690A2
(en)
*
|
2010-06-15 |
2011-12-22 |
Applied Materials, Inc. |
Multiple precursor showerhead with by-pass ports
|
US8869742B2
(en)
*
|
2010-08-04 |
2014-10-28 |
Lam Research Corporation |
Plasma processing chamber with dual axial gas injection and exhaust
|
US9184028B2
(en)
|
2010-08-04 |
2015-11-10 |
Lam Research Corporation |
Dual plasma volume processing apparatus for neutral/ion flux control
|
FI124113B
(en)
*
|
2010-08-30 |
2014-03-31 |
Beneq Oy |
Apparatus and method for working the surface of a substrate
|
TWI541378B
(en)
|
2010-10-16 |
2016-07-11 |
奧特科技公司 |
Ald coating system and method
|
US8816319B1
(en)
|
2010-11-05 |
2014-08-26 |
Soraa Laser Diode, Inc. |
Method of strain engineering and related optical device using a gallium and nitrogen containing active region
|
US9048170B2
(en)
|
2010-11-09 |
2015-06-02 |
Soraa Laser Diode, Inc. |
Method of fabricating optical devices using laser treatment
|
US9595813B2
(en)
|
2011-01-24 |
2017-03-14 |
Soraa Laser Diode, Inc. |
Laser package having multiple emitters configured on a substrate member
|
US9025635B2
(en)
|
2011-01-24 |
2015-05-05 |
Soraa Laser Diode, Inc. |
Laser package having multiple emitters configured on a support member
|
US9093820B1
(en)
|
2011-01-25 |
2015-07-28 |
Soraa Laser Diode, Inc. |
Method and structure for laser devices using optical blocking regions
|
KR101893471B1
(en)
|
2011-02-15 |
2018-08-30 |
어플라이드 머티어리얼스, 인코포레이티드 |
Method and apparatus for multizone plasma generation
|
US9236530B2
(en)
|
2011-04-01 |
2016-01-12 |
Soraa, Inc. |
Miscut bulk substrates
|
US9287684B2
(en)
|
2011-04-04 |
2016-03-15 |
Soraa Laser Diode, Inc. |
Laser package having multiple emitters with color wheel
|
US8715518B2
(en)
*
|
2011-10-12 |
2014-05-06 |
Intermolecular, Inc. |
Gas barrier with vent ring for protecting a surface region from liquid
|
US9312155B2
(en)
|
2011-06-06 |
2016-04-12 |
Asm Japan K.K. |
High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
|
US9793148B2
(en)
|
2011-06-22 |
2017-10-17 |
Asm Japan K.K. |
Method for positioning wafers in multiple wafer transport
|
US10364496B2
(en)
|
2011-06-27 |
2019-07-30 |
Asm Ip Holding B.V. |
Dual section module having shared and unshared mass flow controllers
|
US10854498B2
(en)
|
2011-07-15 |
2020-12-01 |
Asm Ip Holding B.V. |
Wafer-supporting device and method for producing same
|
US20130023129A1
(en)
|
2011-07-20 |
2013-01-24 |
Asm America, Inc. |
Pressure transmitter for a semiconductor processing environment
|
US9646827B1
(en)
|
2011-08-23 |
2017-05-09 |
Soraa, Inc. |
Method for smoothing surface of a substrate containing gallium and nitrogen
|
US10066297B2
(en)
*
|
2011-08-31 |
2018-09-04 |
Alta Devices, Inc. |
Tiled showerhead for a semiconductor chemical vapor deposition reactor
|
US9175393B1
(en)
*
|
2011-08-31 |
2015-11-03 |
Alta Devices, Inc. |
Tiled showerhead for a semiconductor chemical vapor deposition reactor
|
US8971370B1
(en)
|
2011-10-13 |
2015-03-03 |
Soraa Laser Diode, Inc. |
Laser devices using a semipolar plane
|
US9096931B2
(en)
|
2011-10-27 |
2015-08-04 |
Asm America, Inc |
Deposition valve assembly and method of heating the same
|
US9341296B2
(en)
|
2011-10-27 |
2016-05-17 |
Asm America, Inc. |
Heater jacket for a fluid line
|
US9017481B1
(en)
|
2011-10-28 |
2015-04-28 |
Asm America, Inc. |
Process feed management for semiconductor substrate processing
|
US20130125818A1
(en)
*
|
2011-11-22 |
2013-05-23 |
Intermolecular, Inc. |
Combinatorial deposition based on a spot apparatus
|
US9005539B2
(en)
|
2011-11-23 |
2015-04-14 |
Asm Ip Holding B.V. |
Chamber sealing member
|
US9167625B2
(en)
|
2011-11-23 |
2015-10-20 |
Asm Ip Holding B.V. |
Radiation shielding for a substrate holder
|
US8900364B2
(en)
*
|
2011-11-29 |
2014-12-02 |
Intermolecular, Inc. |
High productivity vapor processing system
|
JP5541274B2
(en)
*
|
2011-12-28 |
2014-07-09 |
東京エレクトロン株式会社 |
Substrate processing apparatus, substrate processing method, and storage medium
|
US20130171350A1
(en)
*
|
2011-12-29 |
2013-07-04 |
Intermolecular Inc. |
High Throughput Processing Using Metal Organic Chemical Vapor Deposition
|
US9202727B2
(en)
|
2012-03-02 |
2015-12-01 |
ASM IP Holding |
Susceptor heater shim
|
US9020003B1
(en)
|
2012-03-14 |
2015-04-28 |
Soraa Laser Diode, Inc. |
Group III-nitride laser diode grown on a semi-polar orientation of gallium and nitrogen containing substrates
|
US8946830B2
(en)
|
2012-04-04 |
2015-02-03 |
Asm Ip Holdings B.V. |
Metal oxide protective layer for a semiconductor device
|
US9800016B1
(en)
|
2012-04-05 |
2017-10-24 |
Soraa Laser Diode, Inc. |
Facet on a gallium and nitrogen containing laser diode
|
US10559939B1
(en)
|
2012-04-05 |
2020-02-11 |
Soraa Laser Diode, Inc. |
Facet on a gallium and nitrogen containing laser diode
|
US9343871B1
(en)
|
2012-04-05 |
2016-05-17 |
Soraa Laser Diode, Inc. |
Facet on a gallium and nitrogen containing laser diode
|
TWI622664B
(en)
|
2012-05-02 |
2018-05-01 |
Asm智慧財產控股公司 |
Phase-stabilized thin films, structures and devices including the thin films, and methods of forming same
|
US8728832B2
(en)
|
2012-05-07 |
2014-05-20 |
Asm Ip Holdings B.V. |
Semiconductor device dielectric interface layer
|
US8933375B2
(en)
|
2012-06-27 |
2015-01-13 |
Asm Ip Holding B.V. |
Susceptor heater and method of heating a substrate
|
US9088135B1
(en)
|
2012-06-29 |
2015-07-21 |
Soraa Laser Diode, Inc. |
Narrow sized laser diode
|
US9558931B2
(en)
|
2012-07-27 |
2017-01-31 |
Asm Ip Holding B.V. |
System and method for gas-phase sulfur passivation of a semiconductor surface
|
US9117866B2
(en)
|
2012-07-31 |
2015-08-25 |
Asm Ip Holding B.V. |
Apparatus and method for calculating a wafer position in a processing chamber under process conditions
|
US9169975B2
(en)
|
2012-08-28 |
2015-10-27 |
Asm Ip Holding B.V. |
Systems and methods for mass flow controller verification
|
US9659799B2
(en)
|
2012-08-28 |
2017-05-23 |
Asm Ip Holding B.V. |
Systems and methods for dynamic semiconductor process scheduling
|
US9184563B1
(en)
|
2012-08-30 |
2015-11-10 |
Soraa Laser Diode, Inc. |
Laser diodes with an etched facet and surface treatment
|
US9021985B2
(en)
|
2012-09-12 |
2015-05-05 |
Asm Ip Holdings B.V. |
Process gas management for an inductively-coupled plasma deposition reactor
|
US9132436B2
(en)
|
2012-09-21 |
2015-09-15 |
Applied Materials, Inc. |
Chemical control features in wafer process equipment
|
US9324811B2
(en)
|
2012-09-26 |
2016-04-26 |
Asm Ip Holding B.V. |
Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same
|
US10714315B2
(en)
|
2012-10-12 |
2020-07-14 |
Asm Ip Holdings B.V. |
Semiconductor reaction chamber showerhead
|
US8663397B1
(en)
|
2012-10-22 |
2014-03-04 |
Intermolecular, Inc. |
Processing and cleaning substrates
|
KR102197576B1
(en)
*
|
2012-11-06 |
2020-12-31 |
어플라이드 머티어리얼스, 인코포레이티드 |
Apparatus for spatial atomic layer deposition with recirculation and methods of use
|
US9100342B1
(en)
*
|
2012-11-29 |
2015-08-04 |
Juniper Networks, Inc. |
External service plane
|
US9640416B2
(en)
|
2012-12-26 |
2017-05-02 |
Asm Ip Holding B.V. |
Single-and dual-chamber module-attachable wafer-handling chamber
|
US20160376700A1
(en)
|
2013-02-01 |
2016-12-29 |
Asm Ip Holding B.V. |
System for treatment of deposition reactor
|
US8894870B2
(en)
|
2013-02-01 |
2014-11-25 |
Asm Ip Holding B.V. |
Multi-step method and apparatus for etching compounds containing a metal
|
US9484191B2
(en)
|
2013-03-08 |
2016-11-01 |
Asm Ip Holding B.V. |
Pulsed remote plasma method and system
|
US9589770B2
(en)
|
2013-03-08 |
2017-03-07 |
Asm Ip Holding B.V. |
Method and systems for in-situ formation of intermediate reactive species
|
WO2014165669A2
(en)
|
2013-04-04 |
2014-10-09 |
Tokyo Electron Limited |
Pulsed gas plasma doping method and apparatus
|
JP6134191B2
(en)
*
|
2013-04-07 |
2017-05-24 |
村川 惠美 |
Rotary semi-batch ALD equipment
|
US9490149B2
(en)
*
|
2013-07-03 |
2016-11-08 |
Lam Research Corporation |
Chemical deposition apparatus having conductance control
|
US8993054B2
(en)
|
2013-07-12 |
2015-03-31 |
Asm Ip Holding B.V. |
Method and system to reduce outgassing in a reaction chamber
|
US9018111B2
(en)
|
2013-07-22 |
2015-04-28 |
Asm Ip Holding B.V. |
Semiconductor reaction chamber with plasma capabilities
|
US9396934B2
(en)
|
2013-08-14 |
2016-07-19 |
Asm Ip Holding B.V. |
Methods of forming films including germanium tin and structures and devices including the films
|
US9793115B2
(en)
|
2013-08-14 |
2017-10-17 |
Asm Ip Holding B.V. |
Structures and devices including germanium-tin films and methods of forming same
|
US9240412B2
(en)
|
2013-09-27 |
2016-01-19 |
Asm Ip Holding B.V. |
Semiconductor structure and device and methods of forming same using selective epitaxial process
|
JP6158025B2
(en)
*
|
2013-10-02 |
2017-07-05 |
株式会社ニューフレアテクノロジー |
Film forming apparatus and film forming method
|
US9556516B2
(en)
|
2013-10-09 |
2017-01-31 |
ASM IP Holding B.V |
Method for forming Ti-containing film by PEALD using TDMAT or TDEAT
|
US9605343B2
(en)
|
2013-11-13 |
2017-03-28 |
Asm Ip Holding B.V. |
Method for forming conformal carbon films, structures conformal carbon film, and system of forming same
|
US10179947B2
(en)
|
2013-11-26 |
2019-01-15 |
Asm Ip Holding B.V. |
Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition
|
US9087864B2
(en)
|
2013-12-19 |
2015-07-21 |
Intermolecular, Inc. |
Multipurpose combinatorial vapor phase deposition chamber
|
US20150206741A1
(en)
*
|
2014-01-17 |
2015-07-23 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Apparatus and method for in situ steam generation
|
US10683571B2
(en)
|
2014-02-25 |
2020-06-16 |
Asm Ip Holding B.V. |
Gas supply manifold and method of supplying gases to chamber using same
|
US9447498B2
(en)
|
2014-03-18 |
2016-09-20 |
Asm Ip Holding B.V. |
Method for performing uniform processing in gas system-sharing multiple reaction chambers
|
US10167557B2
(en)
|
2014-03-18 |
2019-01-01 |
Asm Ip Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same
|
US11015245B2
(en)
|
2014-03-19 |
2021-05-25 |
Asm Ip Holding B.V. |
Gas-phase reactor and system having exhaust plenum and components thereof
|
US9404587B2
(en)
|
2014-04-24 |
2016-08-02 |
ASM IP Holding B.V |
Lockout tagout for semiconductor vacuum valve
|
US11267012B2
(en)
*
|
2014-06-25 |
2022-03-08 |
Universal Display Corporation |
Spatial control of vapor condensation using convection
|
US11220737B2
(en)
|
2014-06-25 |
2022-01-11 |
Universal Display Corporation |
Systems and methods of modulating flow during vapor jet deposition of organic materials
|
EP2960059B1
(en)
|
2014-06-25 |
2018-10-24 |
Universal Display Corporation |
Systems and methods of modulating flow during vapor jet deposition of organic materials
|
US10196741B2
(en)
*
|
2014-06-27 |
2019-02-05 |
Applied Materials, Inc. |
Wafer placement and gap control optimization through in situ feedback
|
US10858737B2
(en)
|
2014-07-28 |
2020-12-08 |
Asm Ip Holding B.V. |
Showerhead assembly and components thereof
|
US9228260B1
(en)
*
|
2014-07-30 |
2016-01-05 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Wafer processing chamber, heat treatment apparatus and method for processing wafers
|
US9543180B2
(en)
|
2014-08-01 |
2017-01-10 |
Asm Ip Holding B.V. |
Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum
|
US9837254B2
(en)
*
|
2014-08-12 |
2017-12-05 |
Lam Research Corporation |
Differentially pumped reactive gas injector
|
US9890456B2
(en)
|
2014-08-21 |
2018-02-13 |
Asm Ip Holding B.V. |
Method and system for in situ formation of gas-phase compounds
|
US9406535B2
(en)
|
2014-08-29 |
2016-08-02 |
Lam Research Corporation |
Ion injector and lens system for ion beam milling
|
US10825652B2
(en)
|
2014-08-29 |
2020-11-03 |
Lam Research Corporation |
Ion beam etch without need for wafer tilt or rotation
|
US9657845B2
(en)
|
2014-10-07 |
2017-05-23 |
Asm Ip Holding B.V. |
Variable conductance gas distribution apparatus and method
|
US10941490B2
(en)
|
2014-10-07 |
2021-03-09 |
Asm Ip Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
|
JP2016081945A
(en)
*
|
2014-10-09 |
2016-05-16 |
株式会社ニューフレアテクノロジー |
Vapor growth device and vapor phase epitaxy method
|
US9536748B2
(en)
|
2014-10-21 |
2017-01-03 |
Lam Research Corporation |
Use of ion beam etching to generate gate-all-around structure
|
US9246311B1
(en)
|
2014-11-06 |
2016-01-26 |
Soraa Laser Diode, Inc. |
Method of manufacture for an ultraviolet laser diode
|
KR102300403B1
(en)
|
2014-11-19 |
2021-09-09 |
에이에스엠 아이피 홀딩 비.브이. |
Method of depositing thin film
|
KR102263121B1
(en)
|
2014-12-22 |
2021-06-09 |
에이에스엠 아이피 홀딩 비.브이. |
Semiconductor device and manufacuring method thereof
|
US9478415B2
(en)
|
2015-02-13 |
2016-10-25 |
Asm Ip Holding B.V. |
Method for forming film having low resistance and shallow junction depth
|
US10529542B2
(en)
|
2015-03-11 |
2020-01-07 |
Asm Ip Holdings B.V. |
Cross-flow reactor and method
|
US10276355B2
(en)
|
2015-03-12 |
2019-04-30 |
Asm Ip Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same
|
US10458018B2
(en)
|
2015-06-26 |
2019-10-29 |
Asm Ip Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same
|
US10600673B2
(en)
|
2015-07-07 |
2020-03-24 |
Asm Ip Holding B.V. |
Magnetic susceptor to baseplate seal
|
US9899291B2
(en)
|
2015-07-13 |
2018-02-20 |
Asm Ip Holding B.V. |
Method for protecting layer by forming hydrocarbon-based extremely thin film
|
US10043661B2
(en)
|
2015-07-13 |
2018-08-07 |
Asm Ip Holding B.V. |
Method for protecting layer by forming hydrocarbon-based extremely thin film
|
US10083836B2
(en)
|
2015-07-24 |
2018-09-25 |
Asm Ip Holding B.V. |
Formation of boron-doped titanium metal films with high work function
|
US10087525B2
(en)
|
2015-08-04 |
2018-10-02 |
Asm Ip Holding B.V. |
Variable gap hard stop design
|
US9741593B2
(en)
|
2015-08-06 |
2017-08-22 |
Applied Materials, Inc. |
Thermal management systems and methods for wafer processing systems
|
US9647114B2
(en)
|
2015-08-14 |
2017-05-09 |
Asm Ip Holding B.V. |
Methods of forming highly p-type doped germanium tin films and structures and devices including the films
|
US9711345B2
(en)
|
2015-08-25 |
2017-07-18 |
Asm Ip Holding B.V. |
Method for forming aluminum nitride-based film by PEALD
|
US10504700B2
(en)
|
2015-08-27 |
2019-12-10 |
Applied Materials, Inc. |
Plasma etching systems and methods with secondary plasma injection
|
KR102420015B1
(en)
*
|
2015-08-28 |
2022-07-12 |
삼성전자주식회사 |
Shower head of Combinatorial Spatial Atomic Layer Deposition apparatus
|
US9960072B2
(en)
|
2015-09-29 |
2018-05-01 |
Asm Ip Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings
|
US9787963B2
(en)
|
2015-10-08 |
2017-10-10 |
Soraa Laser Diode, Inc. |
Laser lighting having selective resolution
|
US10566534B2
(en)
|
2015-10-12 |
2020-02-18 |
Universal Display Corporation |
Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP)
|
US9909214B2
(en)
|
2015-10-15 |
2018-03-06 |
Asm Ip Holding B.V. |
Method for depositing dielectric film in trenches by PEALD
|
US10211308B2
(en)
|
2015-10-21 |
2019-02-19 |
Asm Ip Holding B.V. |
NbMC layers
|
US10322384B2
(en)
|
2015-11-09 |
2019-06-18 |
Asm Ip Holding B.V. |
Counter flow mixer for process chamber
|
US9455138B1
(en)
|
2015-11-10 |
2016-09-27 |
Asm Ip Holding B.V. |
Method for forming dielectric film in trenches by PEALD using H-containing gas
|
US9905420B2
(en)
|
2015-12-01 |
2018-02-27 |
Asm Ip Holding B.V. |
Methods of forming silicon germanium tin films and structures and devices including the films
|
US9607837B1
(en)
|
2015-12-21 |
2017-03-28 |
Asm Ip Holding B.V. |
Method for forming silicon oxide cap layer for solid state diffusion process
|
US9735024B2
(en)
|
2015-12-28 |
2017-08-15 |
Asm Ip Holding B.V. |
Method of atomic layer etching using functional group-containing fluorocarbon
|
US9627221B1
(en)
|
2015-12-28 |
2017-04-18 |
Asm Ip Holding B.V. |
Continuous process incorporating atomic layer etching
|
US11139308B2
(en)
|
2015-12-29 |
2021-10-05 |
Asm Ip Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices
|
US9754779B1
(en)
|
2016-02-19 |
2017-09-05 |
Asm Ip Holding B.V. |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
|
US10529554B2
(en)
|
2016-02-19 |
2020-01-07 |
Asm Ip Holding B.V. |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
|
US10468251B2
(en)
|
2016-02-19 |
2019-11-05 |
Asm Ip Holding B.V. |
Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
|
US9779955B2
(en)
|
2016-02-25 |
2017-10-03 |
Lam Research Corporation |
Ion beam etching utilizing cryogenic wafer temperatures
|
JP6573559B2
(en)
*
|
2016-03-03 |
2019-09-11 |
東京エレクトロン株式会社 |
Vaporizing raw material supply apparatus and substrate processing apparatus using the same
|
JP6590735B2
(en)
*
|
2016-03-04 |
2019-10-16 |
東京エレクトロン株式会社 |
Mixed gas multi-system supply system and substrate processing apparatus using the same
|
US10501866B2
(en)
|
2016-03-09 |
2019-12-10 |
Asm Ip Holding B.V. |
Gas distribution apparatus for improved film uniformity in an epitaxial system
|
US10343920B2
(en)
|
2016-03-18 |
2019-07-09 |
Asm Ip Holding B.V. |
Aligned carbon nanotubes
|
US9892913B2
(en)
|
2016-03-24 |
2018-02-13 |
Asm Ip Holding B.V. |
Radial and thickness control via biased multi-port injection settings
|
US10865475B2
(en)
|
2016-04-21 |
2020-12-15 |
Asm Ip Holding B.V. |
Deposition of metal borides and silicides
|
US10087522B2
(en)
|
2016-04-21 |
2018-10-02 |
Asm Ip Holding B.V. |
Deposition of metal borides
|
US10190213B2
(en)
|
2016-04-21 |
2019-01-29 |
Asm Ip Holding B.V. |
Deposition of metal borides
|
US10032628B2
(en)
|
2016-05-02 |
2018-07-24 |
Asm Ip Holding B.V. |
Source/drain performance through conformal solid state doping
|
US10367080B2
(en)
|
2016-05-02 |
2019-07-30 |
Asm Ip Holding B.V. |
Method of forming a germanium oxynitride film
|
KR102592471B1
(en)
|
2016-05-17 |
2023-10-20 |
에이에스엠 아이피 홀딩 비.브이. |
Method of forming metal interconnection and method of fabricating semiconductor device using the same
|
US10504754B2
(en)
*
|
2016-05-19 |
2019-12-10 |
Applied Materials, Inc. |
Systems and methods for improved semiconductor etching and component protection
|
JP6608332B2
(en)
*
|
2016-05-23 |
2019-11-20 |
東京エレクトロン株式会社 |
Deposition equipment
|
US11453943B2
(en)
|
2016-05-25 |
2022-09-27 |
Asm Ip Holding B.V. |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
|
JP6797939B2
(en)
*
|
2016-05-27 |
2020-12-09 |
エーエスエム イーペー ホールディング ベー.フェー. |
Equipment for semiconductor wafer processing
|
JP6880076B2
(en)
*
|
2016-06-03 |
2021-06-02 |
アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated |
Board distance monitoring
|
US10388509B2
(en)
|
2016-06-28 |
2019-08-20 |
Asm Ip Holding B.V. |
Formation of epitaxial layers via dislocation filtering
|
US9859151B1
(en)
|
2016-07-08 |
2018-01-02 |
Asm Ip Holding B.V. |
Selective film deposition method to form air gaps
|
US10612137B2
(en)
|
2016-07-08 |
2020-04-07 |
Asm Ip Holdings B.V. |
Organic reactants for atomic layer deposition
|
US9793135B1
(en)
|
2016-07-14 |
2017-10-17 |
ASM IP Holding B.V |
Method of cyclic dry etching using etchant film
|
US10714385B2
(en)
|
2016-07-19 |
2020-07-14 |
Asm Ip Holding B.V. |
Selective deposition of tungsten
|
US10381226B2
(en)
|
2016-07-27 |
2019-08-13 |
Asm Ip Holding B.V. |
Method of processing substrate
|
KR102532607B1
(en)
|
2016-07-28 |
2023-05-15 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus and method of operating the same
|
US10177025B2
(en)
|
2016-07-28 |
2019-01-08 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US9887082B1
(en)
|
2016-07-28 |
2018-02-06 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US10395919B2
(en)
|
2016-07-28 |
2019-08-27 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US9812320B1
(en)
|
2016-07-28 |
2017-11-07 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US10090316B2
(en)
|
2016-09-01 |
2018-10-02 |
Asm Ip Holding B.V. |
3D stacked multilayer semiconductor memory using doped select transistor channel
|
US10410943B2
(en)
|
2016-10-13 |
2019-09-10 |
Asm Ip Holding B.V. |
Method for passivating a surface of a semiconductor and related systems
|
WO2018075972A1
(en)
|
2016-10-21 |
2018-04-26 |
Quantumscape Corporation |
Electrolyte separators including lithium borohydride and composite electrolyte separators of lithium-stuffed garnet and lithium borohydride
|
US10643826B2
(en)
|
2016-10-26 |
2020-05-05 |
Asm Ip Holdings B.V. |
Methods for thermally calibrating reaction chambers
|
US11532757B2
(en)
|
2016-10-27 |
2022-12-20 |
Asm Ip Holding B.V. |
Deposition of charge trapping layers
|
US10643904B2
(en)
|
2016-11-01 |
2020-05-05 |
Asm Ip Holdings B.V. |
Methods for forming a semiconductor device and related semiconductor device structures
|
US10714350B2
(en)
|
2016-11-01 |
2020-07-14 |
ASM IP Holdings, B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
|
US10229833B2
(en)
|
2016-11-01 |
2019-03-12 |
Asm Ip Holding B.V. |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
|
US10435790B2
(en)
|
2016-11-01 |
2019-10-08 |
Asm Ip Holding B.V. |
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
|
US10134757B2
(en)
|
2016-11-07 |
2018-11-20 |
Asm Ip Holding B.V. |
Method of processing a substrate and a device manufactured by using the method
|
KR102546317B1
(en)
|
2016-11-15 |
2023-06-21 |
에이에스엠 아이피 홀딩 비.브이. |
Gas supply unit and substrate processing apparatus including the same
|
US10340135B2
(en)
|
2016-11-28 |
2019-07-02 |
Asm Ip Holding B.V. |
Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
|
KR20180068582A
(en)
|
2016-12-14 |
2018-06-22 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus
|
US11581186B2
(en)
|
2016-12-15 |
2023-02-14 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus
|
US11447861B2
(en)
|
2016-12-15 |
2022-09-20 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
|
US9916980B1
(en)
|
2016-12-15 |
2018-03-13 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
|
KR20180070971A
(en)
|
2016-12-19 |
2018-06-27 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus
|
US10269558B2
(en)
|
2016-12-22 |
2019-04-23 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
|
US10867788B2
(en)
|
2016-12-28 |
2020-12-15 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
|
US11390950B2
(en)
|
2017-01-10 |
2022-07-19 |
Asm Ip Holding B.V. |
Reactor system and method to reduce residue buildup during a film deposition process
|
US10655221B2
(en)
|
2017-02-09 |
2020-05-19 |
Asm Ip Holding B.V. |
Method for depositing oxide film by thermal ALD and PEALD
|
US10468261B2
(en)
|
2017-02-15 |
2019-11-05 |
Asm Ip Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
|
US20180245216A1
(en)
*
|
2017-02-28 |
2018-08-30 |
Tokyo Electron Limited |
Film forming apparatus
|
US10529563B2
(en)
|
2017-03-29 |
2020-01-07 |
Asm Ip Holdings B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
|
US10283353B2
(en)
|
2017-03-29 |
2019-05-07 |
Asm Ip Holding B.V. |
Method of reforming insulating film deposited on substrate with recess pattern
|
US10103040B1
(en)
|
2017-03-31 |
2018-10-16 |
Asm Ip Holding B.V. |
Apparatus and method for manufacturing a semiconductor device
|
USD830981S1
(en)
|
2017-04-07 |
2018-10-16 |
Asm Ip Holding B.V. |
Susceptor for semiconductor substrate processing apparatus
|
KR102457289B1
(en)
|
2017-04-25 |
2022-10-21 |
에이에스엠 아이피 홀딩 비.브이. |
Method for depositing a thin film and manufacturing a semiconductor device
|
US10446393B2
(en)
|
2017-05-08 |
2019-10-15 |
Asm Ip Holding B.V. |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
|
US10770286B2
(en)
|
2017-05-08 |
2020-09-08 |
Asm Ip Holdings B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
|
US10892156B2
(en)
|
2017-05-08 |
2021-01-12 |
Asm Ip Holding B.V. |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
|
US11276559B2
(en)
|
2017-05-17 |
2022-03-15 |
Applied Materials, Inc. |
Semiconductor processing chamber for multiple precursor flow
|
US11276590B2
(en)
|
2017-05-17 |
2022-03-15 |
Applied Materials, Inc. |
Multi-zone semiconductor substrate supports
|
US10504742B2
(en)
|
2017-05-31 |
2019-12-10 |
Asm Ip Holding B.V. |
Method of atomic layer etching using hydrogen plasma
|
US10886123B2
(en)
|
2017-06-02 |
2021-01-05 |
Asm Ip Holding B.V. |
Methods for forming low temperature semiconductor layers and related semiconductor device structures
|
JP2019007048A
(en)
*
|
2017-06-23 |
2019-01-17 |
トヨタ自動車株式会社 |
Film deposition apparatus
|
US11306395B2
(en)
|
2017-06-28 |
2022-04-19 |
Asm Ip Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
|
US10685834B2
(en)
|
2017-07-05 |
2020-06-16 |
Asm Ip Holdings B.V. |
Methods for forming a silicon germanium tin layer and related semiconductor device structures
|
KR20190009245A
(en)
|
2017-07-18 |
2019-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
Methods for forming a semiconductor device structure and related semiconductor device structures
|
US10541333B2
(en)
|
2017-07-19 |
2020-01-21 |
Asm Ip Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures
|
US11018002B2
(en)
|
2017-07-19 |
2021-05-25 |
Asm Ip Holding B.V. |
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
|
US11374112B2
(en)
|
2017-07-19 |
2022-06-28 |
Asm Ip Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures
|
US10590535B2
(en)
|
2017-07-26 |
2020-03-17 |
Asm Ip Holdings B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same
|
US10312055B2
(en)
|
2017-07-26 |
2019-06-04 |
Asm Ip Holding B.V. |
Method of depositing film by PEALD using negative bias
|
US10605530B2
(en)
|
2017-07-26 |
2020-03-31 |
Asm Ip Holding B.V. |
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
|
US10692741B2
(en)
|
2017-08-08 |
2020-06-23 |
Asm Ip Holdings B.V. |
Radiation shield
|
US10770336B2
(en)
|
2017-08-08 |
2020-09-08 |
Asm Ip Holding B.V. |
Substrate lift mechanism and reactor including same
|
US10249524B2
(en)
|
2017-08-09 |
2019-04-02 |
Asm Ip Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly
|
US11139191B2
(en)
|
2017-08-09 |
2021-10-05 |
Asm Ip Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
|
US11769682B2
(en)
|
2017-08-09 |
2023-09-26 |
Asm Ip Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
|
US10236177B1
(en)
|
2017-08-22 |
2019-03-19 |
ASM IP Holding B.V.. |
Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures
|
USD900036S1
(en)
|
2017-08-24 |
2020-10-27 |
Asm Ip Holding B.V. |
Heater electrical connector and adapter
|
US11830730B2
(en)
|
2017-08-29 |
2023-11-28 |
Asm Ip Holding B.V. |
Layer forming method and apparatus
|
US11056344B2
(en)
|
2017-08-30 |
2021-07-06 |
Asm Ip Holding B.V. |
Layer forming method
|
US11295980B2
(en)
|
2017-08-30 |
2022-04-05 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
|
KR102491945B1
(en)
|
2017-08-30 |
2023-01-26 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus
|
US10607895B2
(en)
|
2017-09-18 |
2020-03-31 |
Asm Ip Holdings B.V. |
Method for forming a semiconductor device structure comprising a gate fill metal
|
KR102630301B1
(en)
|
2017-09-21 |
2024-01-29 |
에이에스엠 아이피 홀딩 비.브이. |
Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same
|
US10844484B2
(en)
|
2017-09-22 |
2020-11-24 |
Asm Ip Holding B.V. |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
|
US10658205B2
(en)
|
2017-09-28 |
2020-05-19 |
Asm Ip Holdings B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
|
US10771155B2
(en)
|
2017-09-28 |
2020-09-08 |
Soraa Laser Diode, Inc. |
Intelligent visible light with a gallium and nitrogen containing laser source
|
US10403504B2
(en)
|
2017-10-05 |
2019-09-03 |
Asm Ip Holding B.V. |
Method for selectively depositing a metallic film on a substrate
|
US10319588B2
(en)
|
2017-10-10 |
2019-06-11 |
Asm Ip Holding B.V. |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition
|
US10923344B2
(en)
|
2017-10-30 |
2021-02-16 |
Asm Ip Holding B.V. |
Methods for forming a semiconductor structure and related semiconductor structures
|
US10910262B2
(en)
|
2017-11-16 |
2021-02-02 |
Asm Ip Holding B.V. |
Method of selectively depositing a capping layer structure on a semiconductor device structure
|
KR102443047B1
(en)
|
2017-11-16 |
2022-09-14 |
에이에스엠 아이피 홀딩 비.브이. |
Method of processing a substrate and a device manufactured by the same
|
US11022879B2
(en)
|
2017-11-24 |
2021-06-01 |
Asm Ip Holding B.V. |
Method of forming an enhanced unexposed photoresist layer
|
KR102597978B1
(en)
|
2017-11-27 |
2023-11-06 |
에이에스엠 아이피 홀딩 비.브이. |
Storage device for storing wafer cassettes for use with batch furnaces
|
CN111344522B
(en)
|
2017-11-27 |
2022-04-12 |
阿斯莫Ip控股公司 |
Including clean mini-environment device
|
US10290508B1
(en)
|
2017-12-05 |
2019-05-14 |
Asm Ip Holding B.V. |
Method for forming vertical spacers for spacer-defined patterning
|
US10222474B1
(en)
|
2017-12-13 |
2019-03-05 |
Soraa Laser Diode, Inc. |
Lidar systems including a gallium and nitrogen containing laser light source
|
US11328909B2
(en)
|
2017-12-22 |
2022-05-10 |
Applied Materials, Inc. |
Chamber conditioning and removal processes
|
KR102534076B1
(en)
*
|
2018-01-04 |
2023-05-19 |
삼성디스플레이 주식회사 |
Deposition apparatus and method using the same
|
US10872771B2
(en)
|
2018-01-16 |
2020-12-22 |
Asm Ip Holding B. V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
|
CN111630203A
(en)
|
2018-01-19 |
2020-09-04 |
Asm Ip私人控股有限公司 |
Method for depositing gap filling layer by plasma auxiliary deposition
|
TW202325889A
(en)
|
2018-01-19 |
2023-07-01 |
荷蘭商Asm 智慧財產控股公司 |
Deposition method
|
USD903477S1
(en)
|
2018-01-24 |
2020-12-01 |
Asm Ip Holdings B.V. |
Metal clamp
|
US11018047B2
(en)
|
2018-01-25 |
2021-05-25 |
Asm Ip Holding B.V. |
Hybrid lift pin
|
USD880437S1
(en)
|
2018-02-01 |
2020-04-07 |
Asm Ip Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus
|
US10535516B2
(en)
|
2018-02-01 |
2020-01-14 |
Asm Ip Holdings B.V. |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
|
US11081345B2
(en)
|
2018-02-06 |
2021-08-03 |
Asm Ip Holding B.V. |
Method of post-deposition treatment for silicon oxide film
|
EP3737779A1
(en)
|
2018-02-14 |
2020-11-18 |
ASM IP Holding B.V. |
A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
|
US10896820B2
(en)
|
2018-02-14 |
2021-01-19 |
Asm Ip Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
|
US10731249B2
(en)
|
2018-02-15 |
2020-08-04 |
Asm Ip Holding B.V. |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
|
KR102636427B1
(en)
|
2018-02-20 |
2024-02-13 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing method and apparatus
|
US10658181B2
(en)
|
2018-02-20 |
2020-05-19 |
Asm Ip Holding B.V. |
Method of spacer-defined direct patterning in semiconductor fabrication
|
US10975470B2
(en)
|
2018-02-23 |
2021-04-13 |
Asm Ip Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
|
US11473195B2
(en)
|
2018-03-01 |
2022-10-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate
|
US11629406B2
(en)
|
2018-03-09 |
2023-04-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
|
US11114283B2
(en)
|
2018-03-16 |
2021-09-07 |
Asm Ip Holding B.V. |
Reactor, system including the reactor, and methods of manufacturing and using same
|
KR102646467B1
(en)
|
2018-03-27 |
2024-03-11 |
에이에스엠 아이피 홀딩 비.브이. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
|
US11230766B2
(en)
|
2018-03-29 |
2022-01-25 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
|
US10510536B2
(en)
|
2018-03-29 |
2019-12-17 |
Asm Ip Holding B.V. |
Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber
|
US11088002B2
(en)
|
2018-03-29 |
2021-08-10 |
Asm Ip Holding B.V. |
Substrate rack and a substrate processing system and method
|
KR102477354B1
(en)
*
|
2018-03-29 |
2022-12-15 |
삼성전자주식회사 |
Plasma processing apparatus including gas distribution plate
|
KR102501472B1
(en)
|
2018-03-30 |
2023-02-20 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing method
|
US10551728B1
(en)
|
2018-04-10 |
2020-02-04 |
Soraa Laser Diode, Inc. |
Structured phosphors for dynamic lighting
|
TW202344708A
(en)
|
2018-05-08 |
2023-11-16 |
荷蘭商Asm Ip私人控股有限公司 |
Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures
|
TWI816783B
(en)
|
2018-05-11 |
2023-10-01 |
荷蘭商Asm 智慧財產控股公司 |
Methods for forming a doped metal carbide film on a substrate and related semiconductor device structures
|
KR102596988B1
(en)
|
2018-05-28 |
2023-10-31 |
에이에스엠 아이피 홀딩 비.브이. |
Method of processing a substrate and a device manufactured by the same
|
US11270899B2
(en)
|
2018-06-04 |
2022-03-08 |
Asm Ip Holding B.V. |
Wafer handling chamber with moisture reduction
|
US11718913B2
(en)
|
2018-06-04 |
2023-08-08 |
Asm Ip Holding B.V. |
Gas distribution system and reactor system including same
|
US11286562B2
(en)
|
2018-06-08 |
2022-03-29 |
Asm Ip Holding B.V. |
Gas-phase chemical reactor and method of using same
|
US10797133B2
(en)
|
2018-06-21 |
2020-10-06 |
Asm Ip Holding B.V. |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
|
KR102568797B1
(en)
|
2018-06-21 |
2023-08-21 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing system
|
US11492703B2
(en)
|
2018-06-27 |
2022-11-08 |
Asm Ip Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
|
WO2020003000A1
(en)
|
2018-06-27 |
2020-01-02 |
Asm Ip Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
|
KR20200002519A
(en)
|
2018-06-29 |
2020-01-08 |
에이에스엠 아이피 홀딩 비.브이. |
Method for depositing a thin film and manufacturing a semiconductor device
|
US10612136B2
(en)
|
2018-06-29 |
2020-04-07 |
ASM IP Holding, B.V. |
Temperature-controlled flange and reactor system including same
|
US10755922B2
(en)
|
2018-07-03 |
2020-08-25 |
Asm Ip Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
|
US10388513B1
(en)
|
2018-07-03 |
2019-08-20 |
Asm Ip Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
|
US10767789B2
(en)
|
2018-07-16 |
2020-09-08 |
Asm Ip Holding B.V. |
Diaphragm valves, valve components, and methods for forming valve components
|
US10483099B1
(en)
|
2018-07-26 |
2019-11-19 |
Asm Ip Holding B.V. |
Method for forming thermally stable organosilicon polymer film
|
US11053591B2
(en)
|
2018-08-06 |
2021-07-06 |
Asm Ip Holding B.V. |
Multi-port gas injection system and reactor system including same
|
US10883175B2
(en)
|
2018-08-09 |
2021-01-05 |
Asm Ip Holding B.V. |
Vertical furnace for processing substrates and a liner for use therein
|
US11970775B2
(en)
*
|
2018-08-10 |
2024-04-30 |
Applied Materials, Inc. |
Showerhead for providing multiple materials to a process chamber
|
US10829852B2
(en)
|
2018-08-16 |
2020-11-10 |
Asm Ip Holding B.V. |
Gas distribution device for a wafer processing apparatus
|
US11430674B2
(en)
|
2018-08-22 |
2022-08-30 |
Asm Ip Holding B.V. |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
|
KR20200030162A
(en)
|
2018-09-11 |
2020-03-20 |
에이에스엠 아이피 홀딩 비.브이. |
Method for deposition of a thin film
|
US11024523B2
(en)
|
2018-09-11 |
2021-06-01 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
|
US11049751B2
(en)
|
2018-09-14 |
2021-06-29 |
Asm Ip Holding B.V. |
Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
|
US11834743B2
(en)
*
|
2018-09-14 |
2023-12-05 |
Applied Materials, Inc. |
Segmented showerhead for uniform delivery of multiple precursors
|
CN110970344A
(en)
|
2018-10-01 |
2020-04-07 |
Asm Ip控股有限公司 |
Substrate holding apparatus, system including the same, and method of using the same
|
US11232963B2
(en)
|
2018-10-03 |
2022-01-25 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
|
KR102592699B1
(en)
|
2018-10-08 |
2023-10-23 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same
|
US10847365B2
(en)
|
2018-10-11 |
2020-11-24 |
Asm Ip Holding B.V. |
Method of forming conformal silicon carbide film by cyclic CVD
|
US10811256B2
(en)
|
2018-10-16 |
2020-10-20 |
Asm Ip Holding B.V. |
Method for etching a carbon-containing feature
|
KR102546322B1
(en)
|
2018-10-19 |
2023-06-21 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus and substrate processing method
|
KR102605121B1
(en)
|
2018-10-19 |
2023-11-23 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus and substrate processing method
|
USD948463S1
(en)
|
2018-10-24 |
2022-04-12 |
Asm Ip Holding B.V. |
Susceptor for semiconductor substrate supporting apparatus
|
US10381219B1
(en)
|
2018-10-25 |
2019-08-13 |
Asm Ip Holding B.V. |
Methods for forming a silicon nitride film
|
US11087997B2
(en)
|
2018-10-31 |
2021-08-10 |
Asm Ip Holding B.V. |
Substrate processing apparatus for processing substrates
|
KR20200051105A
(en)
|
2018-11-02 |
2020-05-13 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate support unit and substrate processing apparatus including the same
|
US11572620B2
(en)
|
2018-11-06 |
2023-02-07 |
Asm Ip Holding B.V. |
Methods for selectively depositing an amorphous silicon film on a substrate
|
US11031242B2
(en)
|
2018-11-07 |
2021-06-08 |
Asm Ip Holding B.V. |
Methods for depositing a boron doped silicon germanium film
|
US10847366B2
(en)
|
2018-11-16 |
2020-11-24 |
Asm Ip Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
|
US10818758B2
(en)
|
2018-11-16 |
2020-10-27 |
Asm Ip Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
|
KR102641752B1
(en)
*
|
2018-11-21 |
2024-03-04 |
삼성전자주식회사 |
Gas injection module, substrate processing apparatus and method for manufacturing semiconductor device using the same
|
US10559458B1
(en)
|
2018-11-26 |
2020-02-11 |
Asm Ip Holding B.V. |
Method of forming oxynitride film
|
US11437242B2
(en)
|
2018-11-27 |
2022-09-06 |
Applied Materials, Inc. |
Selective removal of silicon-containing materials
|
US11217444B2
(en)
|
2018-11-30 |
2022-01-04 |
Asm Ip Holding B.V. |
Method for forming an ultraviolet radiation responsive metal oxide-containing film
|
KR102636428B1
(en)
|
2018-12-04 |
2024-02-13 |
에이에스엠 아이피 홀딩 비.브이. |
A method for cleaning a substrate processing apparatus
|
US11158513B2
(en)
|
2018-12-13 |
2021-10-26 |
Asm Ip Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
|
JP2020096183A
(en)
|
2018-12-14 |
2020-06-18 |
エーエスエム・アイピー・ホールディング・ベー・フェー |
Method of forming device structure using selective deposition of gallium nitride, and system for the same
|
US11421843B2
(en)
|
2018-12-21 |
2022-08-23 |
Kyocera Sld Laser, Inc. |
Fiber-delivered laser-induced dynamic light system
|
US11239637B2
(en)
|
2018-12-21 |
2022-02-01 |
Kyocera Sld Laser, Inc. |
Fiber delivered laser induced white light system
|
KR102208609B1
(en)
*
|
2018-12-28 |
2021-01-28 |
(주)에스테크 |
Shower head for chemical vapor deposition and depositing apparatus using the same
|
TWI819180B
(en)
|
2019-01-17 |
2023-10-21 |
荷蘭商Asm 智慧財產控股公司 |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
|
US11884202B2
(en)
|
2019-01-18 |
2024-01-30 |
Kyocera Sld Laser, Inc. |
Laser-based fiber-coupled white light system
|
KR20200091543A
(en)
|
2019-01-22 |
2020-07-31 |
에이에스엠 아이피 홀딩 비.브이. |
Semiconductor processing device
|
CN111524788B
(en)
|
2019-02-01 |
2023-11-24 |
Asm Ip私人控股有限公司 |
Method for topologically selective film formation of silicon oxide
|
KR102626263B1
(en)
|
2019-02-20 |
2024-01-16 |
에이에스엠 아이피 홀딩 비.브이. |
Cyclical deposition method including treatment step and apparatus for same
|
KR20200102357A
(en)
|
2019-02-20 |
2020-08-31 |
에이에스엠 아이피 홀딩 비.브이. |
Apparatus and methods for plug fill deposition in 3-d nand applications
|
TW202104632A
(en)
|
2019-02-20 |
2021-02-01 |
荷蘭商Asm Ip私人控股有限公司 |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
|
TW202044325A
(en)
|
2019-02-20 |
2020-12-01 |
荷蘭商Asm Ip私人控股有限公司 |
Method of filling a recess formed within a surface of a substrate, semiconductor structure formed according to the method, and semiconductor processing apparatus
|
TW202100794A
(en)
|
2019-02-22 |
2021-01-01 |
荷蘭商Asm Ip私人控股有限公司 |
Substrate processing apparatus and method for processing substrate
|
KR20200108242A
(en)
|
2019-03-08 |
2020-09-17 |
에이에스엠 아이피 홀딩 비.브이. |
Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer
|
KR20200108248A
(en)
|
2019-03-08 |
2020-09-17 |
에이에스엠 아이피 홀딩 비.브이. |
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
|
KR20200108243A
(en)
|
2019-03-08 |
2020-09-17 |
에이에스엠 아이피 홀딩 비.브이. |
Structure Including SiOC Layer and Method of Forming Same
|
JP2022525108A
(en)
*
|
2019-03-11 |
2022-05-11 |
アプライド マテリアルズ インコーポレイテッド |
Lid assembly equipment and methods for substrate processing chambers
|
JP2020167398A
(en)
|
2019-03-28 |
2020-10-08 |
エーエスエム・アイピー・ホールディング・ベー・フェー |
Door opener and substrate processing apparatus provided therewith
|
KR20200116855A
(en)
|
2019-04-01 |
2020-10-13 |
에이에스엠 아이피 홀딩 비.브이. |
Method of manufacturing semiconductor device
|
KR20200123380A
(en)
|
2019-04-19 |
2020-10-29 |
에이에스엠 아이피 홀딩 비.브이. |
Layer forming method and apparatus
|
KR20200125453A
(en)
|
2019-04-24 |
2020-11-04 |
에이에스엠 아이피 홀딩 비.브이. |
Gas-phase reactor system and method of using same
|
KR20200130118A
(en)
|
2019-05-07 |
2020-11-18 |
에이에스엠 아이피 홀딩 비.브이. |
Method for Reforming Amorphous Carbon Polymer Film
|
KR20200130121A
(en)
|
2019-05-07 |
2020-11-18 |
에이에스엠 아이피 홀딩 비.브이. |
Chemical source vessel with dip tube
|
KR20200130652A
(en)
|
2019-05-10 |
2020-11-19 |
에이에스엠 아이피 홀딩 비.브이. |
Method of depositing material onto a surface and structure formed according to the method
|
JP2020188255A
(en)
|
2019-05-16 |
2020-11-19 |
エーエスエム アイピー ホールディング ビー.ブイ. |
Wafer boat handling device, vertical batch furnace, and method
|
USD975665S1
(en)
|
2019-05-17 |
2023-01-17 |
Asm Ip Holding B.V. |
Susceptor shaft
|
USD947913S1
(en)
|
2019-05-17 |
2022-04-05 |
Asm Ip Holding B.V. |
Susceptor shaft
|
USD935572S1
(en)
|
2019-05-24 |
2021-11-09 |
Asm Ip Holding B.V. |
Gas channel plate
|
USD922229S1
(en)
|
2019-06-05 |
2021-06-15 |
Asm Ip Holding B.V. |
Device for controlling a temperature of a gas supply unit
|
KR20200141003A
(en)
|
2019-06-06 |
2020-12-17 |
에이에스엠 아이피 홀딩 비.브이. |
Gas-phase reactor system including a gas detector
|
KR20200143254A
(en)
|
2019-06-11 |
2020-12-23 |
에이에스엠 아이피 홀딩 비.브이. |
Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method
|
USD944946S1
(en)
|
2019-06-14 |
2022-03-01 |
Asm Ip Holding B.V. |
Shower plate
|
USD931978S1
(en)
|
2019-06-27 |
2021-09-28 |
Asm Ip Holding B.V. |
Showerhead vacuum transport
|
KR20210005515A
(en)
|
2019-07-03 |
2021-01-14 |
에이에스엠 아이피 홀딩 비.브이. |
Temperature control assembly for substrate processing apparatus and method of using same
|
JP2021015791A
(en)
|
2019-07-09 |
2021-02-12 |
エーエスエム アイピー ホールディング ビー.ブイ. |
Plasma device and substrate processing method using coaxial waveguide
|
CN112216646A
(en)
|
2019-07-10 |
2021-01-12 |
Asm Ip私人控股有限公司 |
Substrate supporting assembly and substrate processing device comprising same
|
KR20210010307A
(en)
|
2019-07-16 |
2021-01-27 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus
|
KR20210010820A
(en)
|
2019-07-17 |
2021-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
Methods of forming silicon germanium structures
|
KR20210010816A
(en)
|
2019-07-17 |
2021-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
Radical assist ignition plasma system and method
|
US11643724B2
(en)
|
2019-07-18 |
2023-05-09 |
Asm Ip Holding B.V. |
Method of forming structures using a neutral beam
|
CN112242296A
(en)
|
2019-07-19 |
2021-01-19 |
Asm Ip私人控股有限公司 |
Method of forming topologically controlled amorphous carbon polymer films
|
CN110331383B
(en)
*
|
2019-07-29 |
2024-03-01 |
陕西煤业化工技术研究院有限责任公司 |
Material surface treatment gas injection device
|
CN112309843A
(en)
|
2019-07-29 |
2021-02-02 |
Asm Ip私人控股有限公司 |
Selective deposition method for achieving high dopant doping
|
CN112309900A
(en)
|
2019-07-30 |
2021-02-02 |
Asm Ip私人控股有限公司 |
Substrate processing apparatus
|
CN112309899A
(en)
|
2019-07-30 |
2021-02-02 |
Asm Ip私人控股有限公司 |
Substrate processing apparatus
|
US11227782B2
(en)
|
2019-07-31 |
2022-01-18 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11587815B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11587814B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
KR20210018759A
(en)
|
2019-08-05 |
2021-02-18 |
에이에스엠 아이피 홀딩 비.브이. |
Liquid level sensor for a chemical source vessel
|
USD965524S1
(en)
|
2019-08-19 |
2022-10-04 |
Asm Ip Holding B.V. |
Susceptor support
|
USD965044S1
(en)
|
2019-08-19 |
2022-09-27 |
Asm Ip Holding B.V. |
Susceptor shaft
|
JP2021031769A
(en)
|
2019-08-21 |
2021-03-01 |
エーエスエム アイピー ホールディング ビー.ブイ. |
Production apparatus of mixed gas of film deposition raw material and film deposition apparatus
|
USD979506S1
(en)
|
2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Insulator
|
USD940837S1
(en)
|
2019-08-22 |
2022-01-11 |
Asm Ip Holding B.V. |
Electrode
|
KR20210024423A
(en)
|
2019-08-22 |
2021-03-05 |
에이에스엠 아이피 홀딩 비.브이. |
Method for forming a structure with a hole
|
USD949319S1
(en)
|
2019-08-22 |
2022-04-19 |
Asm Ip Holding B.V. |
Exhaust duct
|
USD930782S1
(en)
|
2019-08-22 |
2021-09-14 |
Asm Ip Holding B.V. |
Gas distributor
|
US11286558B2
(en)
|
2019-08-23 |
2022-03-29 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
|
KR20210024420A
(en)
|
2019-08-23 |
2021-03-05 |
에이에스엠 아이피 홀딩 비.브이. |
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
|
KR20210029090A
(en)
|
2019-09-04 |
2021-03-15 |
에이에스엠 아이피 홀딩 비.브이. |
Methods for selective deposition using a sacrificial capping layer
|
KR20210029663A
(en)
|
2019-09-05 |
2021-03-16 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus
|
US11562901B2
(en)
|
2019-09-25 |
2023-01-24 |
Asm Ip Holding B.V. |
Substrate processing method
|
CN112593212B
(en)
|
2019-10-02 |
2023-12-22 |
Asm Ip私人控股有限公司 |
Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process
|
TW202129060A
(en)
|
2019-10-08 |
2021-08-01 |
荷蘭商Asm Ip控股公司 |
Substrate processing device, and substrate processing method
|
KR20210043460A
(en)
|
2019-10-10 |
2021-04-21 |
에이에스엠 아이피 홀딩 비.브이. |
Method of forming a photoresist underlayer and structure including same
|
KR20210045930A
(en)
|
2019-10-16 |
2021-04-27 |
에이에스엠 아이피 홀딩 비.브이. |
Method of Topology-Selective Film Formation of Silicon Oxide
|
US11637014B2
(en)
|
2019-10-17 |
2023-04-25 |
Asm Ip Holding B.V. |
Methods for selective deposition of doped semiconductor material
|
KR20210047808A
(en)
|
2019-10-21 |
2021-04-30 |
에이에스엠 아이피 홀딩 비.브이. |
Apparatus and methods for selectively etching films
|
US11646205B2
(en)
|
2019-10-29 |
2023-05-09 |
Asm Ip Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
|
KR20210054983A
(en)
|
2019-11-05 |
2021-05-14 |
에이에스엠 아이피 홀딩 비.브이. |
Structures with doped semiconductor layers and methods and systems for forming same
|
US11501968B2
(en)
|
2019-11-15 |
2022-11-15 |
Asm Ip Holding B.V. |
Method for providing a semiconductor device with silicon filled gaps
|
KR20210062561A
(en)
|
2019-11-20 |
2021-05-31 |
에이에스엠 아이피 홀딩 비.브이. |
Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
|
KR20210065848A
(en)
|
2019-11-26 |
2021-06-04 |
에이에스엠 아이피 홀딩 비.브이. |
Methods for selectivley forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
|
CN112951697A
(en)
|
2019-11-26 |
2021-06-11 |
Asm Ip私人控股有限公司 |
Substrate processing apparatus
|
CN112885693A
(en)
|
2019-11-29 |
2021-06-01 |
Asm Ip私人控股有限公司 |
Substrate processing apparatus
|
CN112885692A
(en)
|
2019-11-29 |
2021-06-01 |
Asm Ip私人控股有限公司 |
Substrate processing apparatus
|
JP2021090042A
(en)
|
2019-12-02 |
2021-06-10 |
エーエスエム アイピー ホールディング ビー.ブイ. |
Substrate processing apparatus and substrate processing method
|
KR20210070898A
(en)
|
2019-12-04 |
2021-06-15 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus
|
TW202125596A
(en)
|
2019-12-17 |
2021-07-01 |
荷蘭商Asm Ip私人控股有限公司 |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
|
KR20210080214A
(en)
|
2019-12-19 |
2021-06-30 |
에이에스엠 아이피 홀딩 비.브이. |
Methods for filling a gap feature on a substrate and related semiconductor structures
|
JP2021109175A
(en)
|
2020-01-06 |
2021-08-02 |
エーエスエム・アイピー・ホールディング・ベー・フェー |
Gas supply assembly, components thereof, and reactor system including the same
|
KR20210095050A
(en)
|
2020-01-20 |
2021-07-30 |
에이에스엠 아이피 홀딩 비.브이. |
Method of forming thin film and method of modifying surface of thin film
|
TW202130846A
(en)
|
2020-02-03 |
2021-08-16 |
荷蘭商Asm Ip私人控股有限公司 |
Method of forming structures including a vanadium or indium layer
|
TW202146882A
(en)
|
2020-02-04 |
2021-12-16 |
荷蘭商Asm Ip私人控股有限公司 |
Method of verifying an article, apparatus for verifying an article, and system for verifying a reaction chamber
|
US11776846B2
(en)
|
2020-02-07 |
2023-10-03 |
Asm Ip Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices
|
US11781243B2
(en)
|
2020-02-17 |
2023-10-10 |
Asm Ip Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon
|
US11876356B2
(en)
|
2020-03-11 |
2024-01-16 |
Asm Ip Holding B.V. |
Lockout tagout assembly and system and method of using same
|
KR20210116240A
(en)
|
2020-03-11 |
2021-09-27 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate handling device with adjustable joints
|
KR20210117157A
(en)
|
2020-03-12 |
2021-09-28 |
에이에스엠 아이피 홀딩 비.브이. |
Method for Fabricating Layer Structure Having Target Topological Profile
|
KR20210124042A
(en)
|
2020-04-02 |
2021-10-14 |
에이에스엠 아이피 홀딩 비.브이. |
Thin film forming method
|
TW202146689A
(en)
|
2020-04-03 |
2021-12-16 |
荷蘭商Asm Ip控股公司 |
Method for forming barrier layer and method for manufacturing semiconductor device
|
TW202145344A
(en)
|
2020-04-08 |
2021-12-01 |
荷蘭商Asm Ip私人控股有限公司 |
Apparatus and methods for selectively etching silcon oxide films
|
US11821078B2
(en)
|
2020-04-15 |
2023-11-21 |
Asm Ip Holding B.V. |
Method for forming precoat film and method for forming silicon-containing film
|
KR20210132600A
(en)
|
2020-04-24 |
2021-11-04 |
에이에스엠 아이피 홀딩 비.브이. |
Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element
|
US11898243B2
(en)
|
2020-04-24 |
2024-02-13 |
Asm Ip Holding B.V. |
Method of forming vanadium nitride-containing layer
|
KR20210132605A
(en)
|
2020-04-24 |
2021-11-04 |
에이에스엠 아이피 홀딩 비.브이. |
Vertical batch furnace assembly comprising a cooling gas supply
|
KR20210134226A
(en)
|
2020-04-29 |
2021-11-09 |
에이에스엠 아이피 홀딩 비.브이. |
Solid source precursor vessel
|
KR20210134869A
(en)
|
2020-05-01 |
2021-11-11 |
에이에스엠 아이피 홀딩 비.브이. |
Fast FOUP swapping with a FOUP handler
|
KR20210141379A
(en)
|
2020-05-13 |
2021-11-23 |
에이에스엠 아이피 홀딩 비.브이. |
Laser alignment fixture for a reactor system
|
KR20210143653A
(en)
|
2020-05-19 |
2021-11-29 |
에이에스엠 아이피 홀딩 비.브이. |
Substrate processing apparatus
|
KR20210145078A
(en)
|
2020-05-21 |
2021-12-01 |
에이에스엠 아이피 홀딩 비.브이. |
Structures including multiple carbon layers and methods of forming and using same
|
TW202201602A
(en)
|
2020-05-29 |
2022-01-01 |
荷蘭商Asm Ip私人控股有限公司 |
Substrate processing device
|
TW202218133A
(en)
|
2020-06-24 |
2022-05-01 |
荷蘭商Asm Ip私人控股有限公司 |
Method for forming a layer provided with silicon
|
TW202217953A
(en)
|
2020-06-30 |
2022-05-01 |
荷蘭商Asm Ip私人控股有限公司 |
Substrate processing method
|
TW202219628A
(en)
|
2020-07-17 |
2022-05-16 |
荷蘭商Asm Ip私人控股有限公司 |
Structures and methods for use in photolithography
|
TW202204662A
(en)
|
2020-07-20 |
2022-02-01 |
荷蘭商Asm Ip私人控股有限公司 |
Method and system for depositing molybdenum layers
|
KR20220027026A
(en)
|
2020-08-26 |
2022-03-07 |
에이에스엠 아이피 홀딩 비.브이. |
Method and system for forming metal silicon oxide and metal silicon oxynitride
|
USD990534S1
(en)
|
2020-09-11 |
2023-06-27 |
Asm Ip Holding B.V. |
Weighted lift pin
|
USD1012873S1
(en)
|
2020-09-24 |
2024-01-30 |
Asm Ip Holding B.V. |
Electrode for semiconductor processing apparatus
|
TW202229613A
(en)
|
2020-10-14 |
2022-08-01 |
荷蘭商Asm Ip私人控股有限公司 |
Method of depositing material on stepped structure
|
KR20220053482A
(en)
|
2020-10-22 |
2022-04-29 |
에이에스엠 아이피 홀딩 비.브이. |
Method of depositing vanadium metal, structure, device and a deposition assembly
|
TW202223136A
(en)
|
2020-10-28 |
2022-06-16 |
荷蘭商Asm Ip私人控股有限公司 |
Method for forming layer on substrate, and semiconductor processing system
|
TW202235675A
(en)
|
2020-11-30 |
2022-09-16 |
荷蘭商Asm Ip私人控股有限公司 |
Injector, and substrate processing apparatus
|
US11946137B2
(en)
|
2020-12-16 |
2024-04-02 |
Asm Ip Holding B.V. |
Runout and wobble measurement fixtures
|
TW202231903A
(en)
|
2020-12-22 |
2022-08-16 |
荷蘭商Asm Ip私人控股有限公司 |
Transition metal deposition method, transition metal layer, and deposition assembly for depositing transition metal on substrate
|
CN114790543A
(en)
*
|
2021-01-26 |
2022-07-26 |
Asm Ip私人控股有限公司 |
Method and system for depositing layers
|
USD981973S1
(en)
|
2021-05-11 |
2023-03-28 |
Asm Ip Holding B.V. |
Reactor wall for substrate processing apparatus
|
USD1023959S1
(en)
|
2021-05-11 |
2024-04-23 |
Asm Ip Holding B.V. |
Electrode for substrate processing apparatus
|
USD980814S1
(en)
|
2021-05-11 |
2023-03-14 |
Asm Ip Holding B.V. |
Gas distributor for substrate processing apparatus
|
USD980813S1
(en)
|
2021-05-11 |
2023-03-14 |
Asm Ip Holding B.V. |
Gas flow control plate for substrate processing apparatus
|
USD990441S1
(en)
|
2021-09-07 |
2023-06-27 |
Asm Ip Holding B.V. |
Gas flow control plate
|