AU2001271944A1 - Mems actuator with lower power consumption and lower cost simplified fabrication - Google Patents
Mems actuator with lower power consumption and lower cost simplified fabricationInfo
- Publication number
- AU2001271944A1 AU2001271944A1 AU2001271944A AU7194401A AU2001271944A1 AU 2001271944 A1 AU2001271944 A1 AU 2001271944A1 AU 2001271944 A AU2001271944 A AU 2001271944A AU 7194401 A AU7194401 A AU 7194401A AU 2001271944 A1 AU2001271944 A1 AU 2001271944A1
- Authority
- AU
- Australia
- Prior art keywords
- power consumption
- mems actuator
- simplified fabrication
- lower cost
- lower power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/04—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/07—Interconnects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/019—Bonding or gluing multiple substrate layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina
- Y10T156/1025—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina to form undulated to corrugated sheet and securing to base with parts of shaped areas out of contact
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49128—Assembling formed circuit to base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49146—Assembling to base an electrical component, e.g., capacitor, etc. with encapsulating, e.g., potting, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/613,489 US6646364B1 (en) | 2000-07-11 | 2000-07-11 | MEMS actuator with lower power consumption and lower cost simplified fabrication |
US09613489 | 2000-07-11 | ||
PCT/US2001/021665 WO2002005413A2 (en) | 2000-07-11 | 2001-07-10 | Mems actuator with lower power consumption and lower cost simplified fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001271944A1 true AU2001271944A1 (en) | 2002-01-21 |
Family
ID=24457516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001271944A Abandoned AU2001271944A1 (en) | 2000-07-11 | 2001-07-10 | Mems actuator with lower power consumption and lower cost simplified fabrication |
Country Status (5)
Country | Link |
---|---|
US (3) | US6646364B1 (en) |
EP (1) | EP1299939A2 (en) |
JP (1) | JP2004502562A (en) |
AU (1) | AU2001271944A1 (en) |
WO (1) | WO2002005413A2 (en) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI108204B (en) * | 1999-11-25 | 2001-11-30 | Kari Johannes Kirjavainen | A film for converting energies |
US6646364B1 (en) * | 2000-07-11 | 2003-11-11 | Honeywell International Inc. | MEMS actuator with lower power consumption and lower cost simplified fabrication |
US6930376B2 (en) * | 2002-02-13 | 2005-08-16 | Atr Advanced Telecommunications Research Institute International | Semiconductor device having a folded layer structure |
JP3762893B2 (en) * | 2002-02-13 | 2006-04-05 | 株式会社国際電気通信基礎技術研究所 | Reflector and manufacturing method thereof |
US20040100456A1 (en) * | 2002-11-21 | 2004-05-27 | Wang Michael Sujue | Computer pen apparatus |
US20050067919A1 (en) * | 2003-09-30 | 2005-03-31 | Horning Robert D. | Polymer actuator having a circular unit cell |
WO2005046443A2 (en) * | 2003-11-07 | 2005-05-26 | Georgia Tech Research Corporation | Combination catheter devices, methods, and systems |
US7112463B2 (en) * | 2003-11-13 | 2006-09-26 | Honeywell International Inc. | Method for making devices using ink jet printing |
US7030536B2 (en) * | 2003-12-29 | 2006-04-18 | General Electric Company | Micromachined ultrasonic transducer cells having compliant support structure |
WO2005077012A2 (en) * | 2004-02-06 | 2005-08-25 | Georgia Tech Research Corporation | Cmut devices and fabrication methods |
WO2005084284A2 (en) * | 2004-02-27 | 2005-09-15 | Georgia Tech Research Corporation | Multiple element electrode cmut devices and fabrication methods |
US7646133B2 (en) * | 2004-02-27 | 2010-01-12 | Georgia Tech Research Corporation | Asymmetric membrane cMUT devices and fabrication methods |
EP1761998A4 (en) * | 2004-02-27 | 2011-05-11 | Georgia Tech Res Inst | Harmonic cmut devices and fabrication methods |
US7254874B2 (en) * | 2004-03-10 | 2007-08-14 | Leonard Arnold Duffy | Molded surface fasteners and attachment methods |
CN101095277A (en) | 2004-03-12 | 2007-12-26 | 斯里国际 | Mechanical meta-materials |
EP1792088A1 (en) * | 2004-07-23 | 2007-06-06 | AFA Controls, LLC | Microvalve assemblies and related methods |
FR2883277B1 (en) * | 2005-03-18 | 2007-05-11 | Silmach Soc Par Actions Simpli | METHOD AND DEVICE FOR MOVING A DRIVE MEMBER USING AN ETCHED ACTUATOR MEMBER IN A SEMICONDUCTOR MATERIAL |
WO2006123300A2 (en) | 2005-05-18 | 2006-11-23 | Kolo Technologies, Inc. | Micro-electro-mechanical transducers |
JP2008541473A (en) * | 2005-05-18 | 2008-11-20 | コロ テクノロジーズ インコーポレイテッド | Through-wafer interconnection |
CA2608164A1 (en) * | 2005-06-17 | 2006-12-21 | Kolo Technologies, Inc. | Micro-electro-mechanical transducer having an insulation extension |
WO2007015219A2 (en) * | 2005-08-03 | 2007-02-08 | Kolo Technologies, Inc. | Micro-electro-mechanical transducer having a surface plate |
US7438030B1 (en) | 2005-08-26 | 2008-10-21 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Actuator operated microvalves |
KR100718896B1 (en) | 2005-10-20 | 2007-05-16 | 성균관대학교산학협력단 | Flexible Actuator and Tactile Display Device using thereof |
WO2007049240A1 (en) * | 2005-10-27 | 2007-05-03 | Koninklijke Philips Electronics N.V. | Shape changing playing pieces |
US7554787B2 (en) * | 2006-06-05 | 2009-06-30 | Sri International | Wall crawling devices |
US7551419B2 (en) | 2006-06-05 | 2009-06-23 | Sri International | Electroadhesion |
US9614462B2 (en) * | 2007-09-10 | 2017-04-04 | Lawrence Livermore National Security, Llc | Rippled disc electrostatic generator/motor configurations utilizing magnetic insulation |
US8704423B2 (en) * | 2008-08-22 | 2014-04-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Asymmetric dielectric elastomer composite material |
EP2286988A1 (en) * | 2008-12-13 | 2011-02-23 | Bayer MaterialScience AG | Ferroelectric dual and multiple layer compound and method for its manufacture |
JP5575503B2 (en) * | 2010-02-19 | 2014-08-20 | 国立大学法人東京工業大学 | Electrostatic actuator and manufacturing method thereof |
JP5935104B2 (en) * | 2012-05-18 | 2016-06-15 | 国立大学法人東京工業大学 | Electrostatic actuator and manufacturing method thereof |
US20130317339A1 (en) | 2012-05-23 | 2013-11-28 | Biosense Webster (Israel), Ltd. | Endobronchial catheter |
KR101325460B1 (en) * | 2012-08-06 | 2013-11-04 | 전남대학교산학협력단 | Three dimensional truss actuator composed of wires |
WO2015042192A1 (en) * | 2013-09-17 | 2015-03-26 | Pratheev Sabaratnam Sreetharan | Zipping actuator fluid motivation |
US10349543B2 (en) | 2013-02-22 | 2019-07-09 | Vibrant Composites Inc. | Layered assemblies |
DE102013209804A1 (en) | 2013-05-27 | 2014-11-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | ELECTROSTATIC ACTUATOR AND METHOD FOR MANUFACTURING THEREOF |
WO2015084422A1 (en) | 2013-12-05 | 2015-06-11 | Massachusetts Institute Of Technology | Object of additive manufacture with encoded predicted shape change |
JP6616607B2 (en) * | 2015-07-14 | 2019-12-04 | 国立大学法人東京工業大学 | Electrostatic actuator and method for manufacturing electrostatic actuator |
CA2997841C (en) * | 2015-09-10 | 2024-01-30 | The University Of British Columbia | Variable thermal insulation assembly |
US10104773B2 (en) * | 2016-01-27 | 2018-10-16 | Northrop Grumman Systems Corporation | Resilient micro lattice electrical interconnection assembly |
US11052597B2 (en) | 2016-05-16 | 2021-07-06 | Massachusetts Institute Of Technology | Additive manufacturing of viscoelastic materials |
US10633772B2 (en) | 2017-01-12 | 2020-04-28 | Massachusetts Institute Of Technology | Active woven materials |
US10549505B2 (en) * | 2017-01-12 | 2020-02-04 | Massachusetts Institute Of Technology | Active lattices |
JP2020512943A (en) | 2017-04-04 | 2020-04-30 | マサチューセッツ インスティテュート オブ テクノロジー | Additive manufacturing in a gel-supported environment |
US11039579B2 (en) * | 2017-12-12 | 2021-06-22 | 3M Innovative Properties Company | Electrically switchable shutter |
US11390025B2 (en) | 2018-11-12 | 2022-07-19 | Ossur Iceland Ehf | Medical device including a structure based on filaments |
CN113875144A (en) * | 2019-05-31 | 2021-12-31 | Strawb股份有限公司 | Laminated electrostatic actuator |
EP3979486A4 (en) * | 2019-05-31 | 2023-05-17 | Strawb Inc. | Electrostatic actuator having multilayer structure |
CN114727871A (en) | 2019-11-12 | 2022-07-08 | 奥索冰岛有限公司 | Ventilated prosthetic liner |
US11581823B2 (en) * | 2020-02-20 | 2023-02-14 | Toyota Jidosha Kabushiki Kaisha | Actuator and actuator manufacturing method |
US11689123B2 (en) * | 2021-03-30 | 2023-06-27 | Toyota Motor Engineering & Manufacturing North America, Inc. | Modular inflation systems and inflation segments including artificial muscles |
US11601075B2 (en) * | 2021-03-30 | 2023-03-07 | Toyota Motor Engineering & Manufacturing North America, Inc. | Layered actuation structures comprising artificial muscles and connecting ledges |
JP2022179102A (en) * | 2021-05-21 | 2022-12-02 | トヨタ自動車株式会社 | actuator |
EP4155540A1 (en) * | 2021-09-28 | 2023-03-29 | Laclaree | Electrostatically actuated device |
Family Cites Families (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2975307A (en) * | 1958-01-02 | 1961-03-14 | Ibm | Capacitive prime mover |
US3070775A (en) | 1959-10-16 | 1962-12-25 | Jr Daniel E Andrews | Electroacoustic piezoelectricpaste transducer |
US3083469A (en) * | 1960-04-28 | 1963-04-02 | Bogue Elec Mfg Co | Leveling device |
FR2338607A1 (en) | 1976-01-16 | 1977-08-12 | France Etat | QUARTZ RESONATOR WITH NON-ADHERENT CRYSTAL ELECTRODES |
US4234245A (en) | 1977-04-22 | 1980-11-18 | Rca Corporation | Light control device using a bimorph element |
US4287014A (en) * | 1978-12-27 | 1981-09-01 | Mitsubishi Gas Chemical Company, Inc. | Novel crosslinkable resin composition and method for producing a laminate using said composition |
US4295010A (en) | 1980-02-22 | 1981-10-13 | Lectret S.A. | Plural piezoelectric polymer film acoustic transducer |
AU572615B2 (en) * | 1983-12-27 | 1988-05-12 | Sony Corporation | Electrically conductive adhesive sheet circuit board and electrical connection structure |
US4654546A (en) | 1984-11-20 | 1987-03-31 | Kari Kirjavainen | Electromechanical film and procedure for manufacturing same |
US4732706A (en) * | 1985-03-20 | 1988-03-22 | Ferrofluidics Corporation | Method of preparing low viscosity, electrically conductive ferrofluid composition |
JPH07112041B2 (en) * | 1986-12-03 | 1995-11-29 | シャープ株式会社 | Method for manufacturing semiconductor device |
US5031308A (en) * | 1988-12-29 | 1991-07-16 | Japan Radio Co., Ltd. | Method of manufacturing multilayered printed-wiring-board |
JPH0360471A (en) * | 1989-07-25 | 1991-03-15 | Alps Electric Co Ltd | Production of laminated ceramics |
US5126618A (en) * | 1990-03-06 | 1992-06-30 | Brother Kogyo Kabushiki Kaisha | Longitudinal-effect type laminar piezoelectric/electrostrictive driver, and printing actuator using the driver |
JP3045531B2 (en) * | 1990-10-01 | 2000-05-29 | 日立金属株式会社 | Stacked displacement element |
US5206444A (en) * | 1990-11-16 | 1993-04-27 | Oliver Harry M | Device that displays count of rounds in firearm magazines |
US5206557A (en) * | 1990-11-27 | 1993-04-27 | Mcnc | Microelectromechanical transducer and fabrication method |
DE4201937C2 (en) * | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelectric laminated actuator |
JP3159729B2 (en) * | 1991-05-27 | 2001-04-23 | 俊郎 樋口 | Electrostatic actuator and control method thereof |
US5176358A (en) | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
US5350966A (en) * | 1991-11-12 | 1994-09-27 | Rockwell International Corporation | Piezocellular propulsion |
US5318651A (en) * | 1991-11-27 | 1994-06-07 | Nec Corporation | Method of bonding circuit boards |
FR2691596B1 (en) | 1992-05-22 | 1995-04-28 | Thomson Csf | Acoustic underwater antenna with area sensor. |
US5376862A (en) * | 1993-01-28 | 1994-12-27 | Applied Materials, Inc. | Dual coaxial magnetic couplers for vacuum chamber robot assembly |
US5413489A (en) * | 1993-04-27 | 1995-05-09 | Aptix Corporation | Integrated socket and IC package assembly |
US5563466A (en) | 1993-06-07 | 1996-10-08 | Rennex; Brian G. | Micro-actuator |
US5682075A (en) | 1993-07-14 | 1997-10-28 | The University Of British Columbia | Porous gas reservoir electrostatic transducer |
US5358648A (en) * | 1993-11-10 | 1994-10-25 | Bridgestone/Firestone, Inc. | Spin finish composition and method of using a spin finish composition |
US5434464A (en) | 1994-05-23 | 1995-07-18 | Mcnc | Unidirectional supporting structure for microelectromechanical transducers |
US5578877A (en) * | 1994-06-13 | 1996-11-26 | General Electric Company | Apparatus for converting vibratory motion to electrical energy |
US5761782A (en) | 1994-08-29 | 1998-06-09 | Oceaneering International, Inc. | Method of fabrication of piezoelectric bender elements |
US5757456A (en) * | 1995-03-10 | 1998-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method of fabricating involving peeling circuits from one substrate and mounting on other |
DE19520554B4 (en) * | 1995-06-06 | 2006-07-13 | ED. SCHARWäCHTER GMBH | Process for producing undercut thermoformed parts |
US5713670A (en) * | 1995-08-30 | 1998-02-03 | International Business Machines Corporation | Self pressurizing journal bearing assembly |
DE19637928C2 (en) | 1996-02-10 | 1999-01-14 | Fraunhofer Ges Forschung | Bistable membrane activation device and membrane |
AU5707796A (en) * | 1996-03-26 | 1997-10-17 | Mats Bexell | An actuator motor and a method for fabrication of such an actuator |
JP3197213B2 (en) * | 1996-05-29 | 2001-08-13 | 松下電器産業株式会社 | Printed wiring board and method of manufacturing the same |
IT1288761B1 (en) | 1996-10-17 | 1998-09-24 | Fiat Ricerche | ELECTROSTATIC LINEAR STEP MOTOR |
US5908987A (en) * | 1997-02-11 | 1999-06-01 | Ferrofluidics Corporation | Sensor employing a sliding ferrofluid mass in a coated, non-wetting, housing |
US6184608B1 (en) * | 1998-12-29 | 2001-02-06 | Honeywell International Inc. | Polymer microactuator array with macroscopic force and displacement |
US6083082A (en) * | 1999-08-30 | 2000-07-04 | Lam Research Corporation | Spindle assembly for force controlled polishing |
US6411013B1 (en) * | 1999-12-30 | 2002-06-25 | Honeywell International Inc. | Microactuator array with integrally formed package |
US6313551B1 (en) * | 2000-02-04 | 2001-11-06 | Nikon Corporation | Magnet array for a shaft-type linear motor |
US6646364B1 (en) * | 2000-07-11 | 2003-11-11 | Honeywell International Inc. | MEMS actuator with lower power consumption and lower cost simplified fabrication |
US6570273B2 (en) * | 2001-01-08 | 2003-05-27 | Nikon Corporation | Electric linear motor |
-
2000
- 2000-07-11 US US09/613,489 patent/US6646364B1/en not_active Expired - Fee Related
-
2001
- 2001-07-10 AU AU2001271944A patent/AU2001271944A1/en not_active Abandoned
- 2001-07-10 EP EP01951004A patent/EP1299939A2/en not_active Withdrawn
- 2001-07-10 JP JP2002509161A patent/JP2004502562A/en not_active Withdrawn
- 2001-07-10 WO PCT/US2001/021665 patent/WO2002005413A2/en not_active Application Discontinuation
-
2002
- 2002-02-15 US US10/077,495 patent/US6684469B2/en not_active Expired - Fee Related
-
2004
- 2004-01-05 US US10/751,691 patent/US20040145277A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20040145277A1 (en) | 2004-07-29 |
WO2002005413A2 (en) | 2002-01-17 |
WO2002005413A3 (en) | 2002-04-04 |
US20020125790A1 (en) | 2002-09-12 |
JP2004502562A (en) | 2004-01-29 |
US6684469B2 (en) | 2004-02-03 |
US6646364B1 (en) | 2003-11-11 |
EP1299939A2 (en) | 2003-04-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU2001271944A1 (en) | Mems actuator with lower power consumption and lower cost simplified fabrication | |
AU2002213400A1 (en) | Microvalve | |
AU2000273430A1 (en) | Reduced-energy-consumption actuator | |
AU2002235128A1 (en) | Expression miniarrays and uses thereof | |
AU2001213236A1 (en) | Mini-cyclone biocollector and concentrator | |
AU2001259237A1 (en) | Reverse keno | |
EP1161115A3 (en) | Optical switch with power equalization | |
AU2001225482A1 (en) | Triangular cell honeycomb structure | |
AU2002233277A1 (en) | Ultra-low power basic blocks and their uses | |
AU2002211717A1 (en) | Stresscopins and their uses | |
AU2003221168A1 (en) | Micro actuator and optical switch using the actuator | |
AU2001283040A1 (en) | Air actuator | |
AU2001292936A1 (en) | Octahydro-indolizines and quinolizines and hexahydro-pyrrolizines | |
AU2002246543A1 (en) | Energy pathway arrangement | |
AU2001293593A1 (en) | Power saving circuitry | |
AU4427201A (en) | Noise-abatement structure and its constituting elements | |
AU2001295185A1 (en) | Multiplexing-interleaving and demultiplexing-deinterleaving | |
AU2001282405A1 (en) | Scanner for precise movement and low power consumption | |
AU2001240394A1 (en) | Energy element | |
GB2360544B (en) | Power actuator arrangement | |
AU2001294010A1 (en) | Stem cells | |
AU2001297019A1 (en) | Bi-stable micro-actuator and optical switch | |
AU2001272655A1 (en) | Improvements in valves | |
AU2001237592A1 (en) | Enzymes and uses relating thereto | |
AU2001288661A1 (en) | Micro-fluidic actuator |