JP5575503B2 - Electrostatic actuator and manufacturing method thereof - Google Patents

Description

  The present invention relates to an electrostatic actuator that expands and contracts due to a potential difference between stacked electrodes and a method for manufacturing the same.

  Since the electrostatic actuator can obtain a large driving force while being lightweight, it is expected to replace a motor using magnetic force.

  As an example of the electrostatic actuator, Patent Document 1 discloses a stacked electrostatic actuator having a configuration in which a large number of electrodes are stacked and expanded or contracted according to a voltage applied between the electrodes.

JP 2007-259663 A

  By the way, in the conventional technology such as Patent Document 1, a movable range corresponding to the number of stacks and a strong acting force can be expected, but since the space between the electrodes is expanded and contracted, it is easy when an external force is applied. It is difficult to maintain the shape by the actuator structure itself.

  Further, in order to increase the electrode plate area, it is necessary to arrange many stacked electrostatic actuators in parallel, but it takes time and cost to manufacture a large number of stacked electrostatic actuators.

  SUMMARY OF THE INVENTION In view of the above-described problems of the prior art, an object of the present invention is to provide a technique that can maintain its own shape against an external force and can be easily manufactured.

One aspect of the electrostatic actuator that exemplifies the present invention is an electrode group having a plurality of strip electrodes arranged in parallel at a predetermined interval on the same plane. crossed the electrode group and a second electrode group, and a plurality of laminated electrodes overlapping by folding the first electrode alternately stacked and a second electrode alternately, first Te laminated electrode smell two electrodes of the electrode and the second electrode are disposed to sandwich the strip electrodes in each region on the strip electrodes facing, and a plurality of plate-shaped members having a higher rigidity than the strip electrodes, there in the folded portion of the strip electrodes Among the plurality of hinge portions forming gaps that expand and contract in the stacking direction between the first electrode and the second electrode facing each other in the stacked electrode, and among the strip-shaped electrodes between the stacked electrodes that connect adjacent stacked electrodes , strip collector adjacent opposed in the laminating direction They were joined together, and a plurality of connecting portions for forming a space for expansion and contraction in the lamination direction between the first electrode and the second electrode facing the laminated electrode.

  The strip electrode may be covered with a dielectric.

In one aspect of the method for manufacturing an electrostatic actuator illustrating the present invention , a plurality of strip electrodes sandwiched between dielectrics having a predetermined thickness are formed, and the width of the strip electrode is set on both of the dielectric strips. A plurality of rectangular plate-like members having an interval are arranged , and among the regions of the band-like electrodes where the plate-like members are not arranged , adjacent and opposing regions in the laminating direction when the band-like electrodes are folded and laminated are mutually The connecting members to be joined are arranged in a part of the region, a part of the plurality of strip electrodes are arranged in parallel at a predetermined interval as the first electrode group, and the rest of the plurality of strip electrodes are arranged in the second electrode group As described above, the first electrode group is arranged in parallel at a predetermined interval so as to intersect with the first electrode group, and one of both plate-like members is overlapped at the position intersecting with the first electrode group. Or bend at the interval part of the position across the second electrode group, Folding the groups of electrodes and the second electrode group alternately, a first electrode and a second electrode are laminated so as to face alternately position superimposed is plate-like member, adjacent opposed in the laminating direction The regions are joined to each other with the arranged connection members .

According to another aspect of the method for manufacturing an electrostatic actuator illustrating the present invention , a plurality of strip electrodes sandwiched between dielectric bodies having a predetermined thickness are formed, and the width of the strip electrode is set to both of the strip electrode dielectrics. leaving a plurality of plateaus of the rectangular forming a plurality of grooves, among the plurality of grooves, adjacent connecting members joining the groove you face each other in the laminating direction when stacking folded strip electrodes part having the place in the groove, arranged in parallel at predetermined intervals a portion of the plurality of strip electrodes as the first electrode group, the remaining of the plurality of strip electrodes as the second electrode group, the first electrode group Are arranged in parallel at a predetermined interval so as to intersect with each other, one of both plateau portions is overlapped at a position intersecting with the first electrode group, and straddling the first electrode group or the second electrode group The first electrode group and the second electrode group are bent at the groove at the position Folding alternately a first electrode and a second electrode are laminated so as to face alternately in a position where the plateau portion are superimposed and joined together by connecting members disposed grooves adjacent opposed in the laminating direction .

Moreover, the adhesive for connecting the groove adjacent opposed in the laminating direction to each other is applied to the bonding surface of the groove, the connecting member is located on the opposite side of the joint surface, when the strip electrodes are stacked folded The groove portions adjacent to and opposed to each other in the stacking direction may be pressure-bonded and joined at the joining surface.

  Further, the connecting member may be removed by etching.

  According to the present invention, it is possible to maintain its own shape against an external force and easily manufacture it.

The figure which shows the electrostatic actuator 100 which concerns on one Embodiment of this invention. The figure which shows an example of the structure of the electrode tape 13 Sectional view of the electrostatic actuator 100 in the XZ plane The figure which shows an example of the relationship between the thickness of an electrode holding | maintenance part, and deformation amount The figure which shows an example of the relationship between external force and displacement The figure explaining an example of the formation method of an electrode tape The figure explaining an example of the formation method of the electrode holding part 11 Sectional drawing of the electrostatic actuator 100 in which each set of electrode tapes 13 in the XZ plane is laminated The figure explaining another formation method of the electrode holding part 11

  FIG. 1 shows an external view of an electrostatic actuator 100 according to one embodiment of the present invention.

  The electrostatic actuator 100 according to the present embodiment includes two sets of electrode tapes that are strip-shaped electrodes having three widths L arranged in parallel on the same plane (XY plane) with a distance D therebetween. It consists of an electrode tape 13. Specifically, two sets of electrode tapes 13 are arranged so as to cross each other, and are folded and laminated so as to be alternately stacked. Thereby, the electrostatic actuator 100 has an electrode structure having nine laminated electrodes as shown in FIG. Each electrode tape 13 has a laminated electrode portion 12 in which a plate-like electrode holding portion 11 is sandwiched at a position (laminated electrode) intersecting with another set of electrode tapes 13. Moreover, the electrode tape 13 has the hinge part 14 which is a folding | returning part, and the connection part 15 which connects what is adjacent in the lamination direction (Z direction) in the flat part which straddles another set of electrode tapes 13. FIG.

  FIG. 2 shows an example of the structure of the electrode tape 13. As shown in the figure, the electrode tape 13 is formed by sandwiching a metal film such as copper between dielectric films. Further, the electrode tape 13 is sandwiched between two plate-like electrode holding portions 11 having a side length L and a thickness t1, and a plurality of laminated electrode portions 12 are formed. Thereby, the plate-like shape of the laminated electrode part 12 is maintained by the rigidity of the electrode holding part 11. The groove portions 16 between the laminated electrode portions 12 are utilized as hinge portions 14 and connection portions 15.

  FIG. 3 shows a cross-sectional view of the electrostatic actuator 100 in the XZ plane along one electrode tape 13 extending in the X direction. In FIG. 3, the laminated electrode portions 12 of the electrode tape 13 extending in the X direction are indicated by white rectangles and are shown to be coupled to each other by the electrode tape 13 indicated by a thick solid line. Further, another set of the electrode tape 13 and the laminated electrode portion 12 that extend in the Y direction and to which voltages of different polarities are applied are indicated by thick broken lines and shaded rectangles.

  As shown in FIG. 3, the hinge portion 14 is formed by bending the groove portion 16 itself at a position straddling another set of electrode tapes 13. On the other hand, the connection portion 15 is formed by joining a pair of adjacent groove portions 16 which are adjacent to each other in the stacking direction among the groove portions 16 located in the flat flat portion 17 straddling another set of electrode tapes 13. The hinge part 14 and the connection part 15 have an electrode structure such as a distance d1 between the laminated electrode parts 12 in the laminated electrode, depending on characteristics such as the length of the groove part 16 forming them and the elastic force and tension of the electrode tape 13 itself. Can be maintained. The width D ′ of the groove 16 is preferably determined as appropriate according to the characteristics of the electrode tape 13, the rigidity of the electrode holding portion 11, the required distance d 1 between the laminated electrode portions 12, and the like, together with the distance D.

  Thereby, in the electrostatic actuator 100 of the present embodiment, when voltages having different polarities are applied to the two sets of electrode tapes 13, an electric field is applied to each of the opposed laminated electrode portions 12. An electrostatic force according to the electric field between the opposing laminated electrode portions 12 acts. Due to the electrostatic force, the gap between the stacked electrode portions 12 facing each other is contracted. As a result, the electrostatic actuator 100 contracts in the stacking direction (Z direction), and the force at the time of contraction can be applied.

  Next, the electrostatic actuator 100 of the present embodiment is configured as described above, thereby realizing a large operating range and an appropriate spring characteristic in this operating range, and resistance to deformation exceeding the operating range. The point which balances realization is demonstrated.

  The magnitude of the electrostatic force per unit area acting between the two opposing laminated electrode portions 12 is inversely proportional to the square of the distance d1 between these electrodes. Therefore, in order to obtain a large acting force by the electrostatic actuator 100, it is necessary to combine the two stacked electrode portions 12 facing each other in proximity to each other.

  However, in order to secure a large operating range, the width of the gap obtained by subtracting twice the thickness t1 of each electrode holding portion 11 and the thickness t2 of the electrode tape 13 from the distance d1 between the laminated electrode portions 12 facing each other. It is necessary to secure d2. In addition, in order to maintain the shapes of the electrostatic actuator 100 and the laminated electrode portion 12 and prevent deformation due to external force, the thickness t1 of the electrode holding portion 11 is also set to a certain thickness or more so as to behave as a very hard spring outside the operating range. There is a need.

  FIG. 4 shows a simulation of the electrostatic actuator modeled by changing the thickness t1 of the electrode holder 11 having a side length L (for example, 100 μm), and the size L of the electrode holder 11 and the electrode holder 11 are simulated. The relationship which should satisfy | fill with thickness t1 of this is shown. In the electrostatic actuator model to be simulated, the electrode tape 13 is formed by sandwiching a copper strip electrode with a film of PET (polyethylene terephthalate) resin as a dielectric, and has a thickness t2 of, for example, 1 μm. The electrode tape 13 is sandwiched between PET resin plates having a thickness t1 as the electrode holding plate 11 to form the laminated electrode portion 12. Using such an electrostatic actuator model, simulation was performed to determine how the distance between the two stacked electrode portions 12 changes according to the magnitude of the external force that stretches the stacked electrode in the stacking direction (Z direction). .

  FIG. 4 shows the simulation results when the external force as described above is applied to the models in which the thickness t1 of the electrode holding part 11 is 5 μm, 10 μm, 15 μm, and 20 μm, respectively. The thin solid line, thick broken line, thick dashed line and Shown in bold solid line. From FIG. 4, when the electrode holder 11 having a square shape of 100 μm square is provided, if the thickness of the electrode holder 11 is 10 μm or more which corresponds to 1/10 of the length of one side, regardless of the action of external force, It can be seen that the deformation amount of the electrostatic actuator can be suppressed to a very small value. In addition, the deformation suppression effect can be expected to some extent even when the thickness of the electrode holding portion 11 is about 5 μm, which is 1/20 of the length of one side. On the other hand, it can be seen that the deformation suppression effect is almost the same regardless of whether the thickness of the electrode holding portion 11 is 15 μm corresponding to 15% of the length of one side or 20 μm corresponding to 20%.

  In view of this result and the nature of the electrostatic force, when the electrostatic actuator 100 is configured with the square electrode holding portion 11 as shown in FIG. 1, the size L and the thickness t1 of the electrode holding portion 11 are expressed by the following equation: It was found by this simulation that the relationship (1) is satisfied.

5 × t1 ≦ L ≦ 20 × t1 (1)
That is, when the thickness t2 of the electrode tape 13 is sufficiently smaller than the thickness t1 of the electrode holding portion 11, the laminated electrode portion includes the square electrode holding portion 11 that satisfies the condition shown in the expression (1). The rigidity of 12 can be increased.

  In particular, when the relationship between the thickness and size equivalent to the case where the thickness of the electrode holding portion 11 is 10 μm is satisfied in the above-described model, the effect of suppressing the deformation amount and a large operating range are realized, and they are opposed to each other. Sufficient acting force can be obtained by the electrostatic force generated by the electric field applied to the laminated electrode portion 12.

  Further, for example, the thickness t1 of the electrode holding portion 11 of the laminated electrode is changed according to the distance of the Z axis, or in the laminated electrode, a layer composed of the laminated electrode portion 12 having a large thickness of the electrode holding portion 11 and a thin laminated layer A layer composed of the electrode portion 12 can be mixed. By using the laminated electrode provided with the electrode holding parts 11 having different thicknesses, for example, the pair of the laminated electrode parts 12 provided with the electrode holding parts 11 having a small thickness is first contracted, and the electrode holding parts 11 having a large thickness are provided. The pair of laminated electrode portions 12 can realize a response that contracts only when a strong electric field is applied.

  In this way, the electrostatic actuator 100 can be arbitrarily controlled in terms of the length and generated force that the electrostatic actuator 100 operates according to the strength of the electric field, and the electrostatic actuator 100 that exhibits a complex response according to the applied voltage is realized. can do. Furthermore, when the thickness t1 of the electrode holding part 11 is changed, as long as the thickness t1 and the size L of the electrode holding part 11 satisfy the relationship of the formula (1), the distance d1 between the stacked electrode parts 12 is the electric field. The electrostatic force generated when the voltage is applied is kept below the length that allows the electrostatic force to be reliably applied, and the electrostatic actuator 100 can be operated stably.

  FIG. 5 shows spring characteristics of an electrostatic actuator composed of a single laminated electrode and an electrostatic actuator obtained by combining two laminated electrodes in parallel, and shows a simulation result of displacement against an external force. The horizontal axis represents the external force pulling the electrostatic actuator, and the vertical axis represents the displacement. This indicates that the spring characteristics with less displacement with respect to the external force are better, and the spring characteristics of the electrostatic actuator that combines two stacked voltages in parallel are better. From this, the electrostatic actuator 100 according to this embodiment can maintain the electrode structure by suppressing the deformation due to the action of external force, particularly lateral force such as torsion, because a plurality of laminated electrodes are arranged in parallel. . Furthermore, the electrostatic actuator 100 can prevent non-uniformity in the laminated structure and ensure uniform expansion and contraction of the entire electrostatic actuator.

  Moreover, the electrostatic actuator 100 can be coupled in series to form an integrated actuator. In such an integrated actuator, it is possible to obtain the effect of increasing the working force due to the electrostatic actuator 100 having nine laminated electrodes arranged in parallel, and the effect of expanding the movable range due to the coupling in series. Further, if the electrostatic actuator 100 having the structure shown in FIG. 1 is miniaturized and the miniaturized electrostatic actuator 100 is connected in series to form an integrated actuator, a very large working force is realized. be able to.

  Next, based on FIGS. 6-8, the manufacturing method of the electrostatic actuator 100 is demonstrated.

  First, a method for forming the electrode tape 13 will be described with reference to FIG.

  As shown in FIG. 6A, the electrode sheet is formed by sandwiching a copper thin film between PET films. The electrode sheet is cut into a strip shape along a thick broken line (FIG. 6B). The cut surface (arrow in FIG. 6C) of the electrode sheet cut into a strip shape is etched, and the copper thin film exposed on the cut surface is removed. The cut surfaces are joined with the PET films on both sides (FIG. 6D), and the electrode tape 13 is generated (FIG. 6E).

  In the process of FIG. 6B, the electrode sheet is formed with a predetermined margin α in advance so that the width of the strip electrode of the copper thin film becomes the width W by etching the cut surface in the process of FIG. It is preferable to cut.

  Next, an example of a method for manufacturing the electrostatic actuator 100 will be described with reference to FIGS.

  In this embodiment, for example, each electrode tape 13 formed by sandwiching a strip electrode with a PET film having a thickness t1 + β leaves a plateau portion having a width L out of the PET film portions on both sides, as shown in FIG. The portion of the width D ′ shown by shading in a) is removed. As shown in FIG. 7B, the electrode tape 13 is formed with a structure in which plateau portions having a width L and grooves 16 having a width D ′ appear alternately. Note that the method of integrally forming the electrode holding portion 11 and the groove portion 16 in this way is particularly effective when, for example, a fine electrostatic actuator is manufactured by using a lithography technique. Further, the width D ′ of the groove portion 16 is a variable length, and as described above, the characteristics of the electrode tape 13, the rigidity of the electrode holding portion 11, and the required distance d 1 between the laminated electrode portions 12 as well as the distance D. It is preferable to determine appropriately according to the above.

  Further, an adhesive is applied to the groove 16 where the connecting portion 15 is formed, and an adhesive is applied to the bonding surface bonded to the adjacent and opposed groove 16 in the stacking direction, and an acrylic resin connecting member 20 is provided on the opposite surface of FIG. Arranged as shown in FIG. In addition, the connection member 20 in this embodiment has a width of L + D, and is disposed so as to protrude from the both ends of the electrode tape 13 by D / 2. Thereby, if each set of electrode tapes 13 is arranged so that the connecting members 20 are in contact with each other, the electrode tapes 13 are arranged in parallel with a distance D from each other. In addition, it is preferable that the height of the connection member 20 is appropriately determined according to the arrangement position of the connection portion 15, the distance d <b> 1 between the laminated electrode portions 12, and the like. Moreover, it is preferable that the adhesive which joins the connection member 20 to the groove part 16 of the electrode tape 13 is easily dissolved in an acetone solution, and the adhesive applied to the joining surface of the groove part 16 is an acetone-resistant solution.

  Next, the two sets of electrode tapes 13 are arranged in parallel on the acrylic resin substrate so as to cross each other and with a distance D therebetween, and both plateaus at each of the nine positions where the electrode tapes 13 cross each other. Overlapping one of the parts. A set of electrode tapes 13 arranged directly on the substrate is bent by a groove portion 16 at a position crossing and straddling another set of electrode tapes 13, folded as a hinge portion 14, and at each crossing position. Overlapping plateau parts. Similarly, the two sets of electrode tapes 13 are alternately folded, and the laminated electrode portions 12 of the respective sets of electrode tapes 13 are alternately overlapped and stacked. FIG. 8 is a cross-sectional view of the electrostatic actuator 100 stacked by the method of this embodiment in the same XZ plane as FIG. As shown in the figure, when two sets of electrode tapes 13 are laminated, the connection member 20 overlaps so as to form a connection portion 15 by joining a pair of adjacent groove portions 16 adjacent to each other in the lamination direction. Laminated. By pressing the connecting member 20 from the direction of the arrow shown in FIG. 8, the groove portion 16 in which the connecting portion 15 is formed is securely crimped and joined. The electrostatic actuator 100 of FIG. 8 is immersed in an acetone solution, and the acrylic resin substrate and the connecting member 20 are removed. The electrostatic actuator 100 shown in FIGS. 1 and 3 is generated.

  As described above, in the present embodiment, two sets of electrode tapes 13 are crossed and alternately folded and stacked, and a pair of adjacent groove portions 16 adjacent to each other in the stacking direction are joined to each other, so that an external force such as twisting can be obtained. The electrode structure can be maintained against the effects from the above.

Further, by simply crossing two sets of electrode tapes 13 and alternately folding and laminating them, a plurality of laminated electrodes arranged in parallel can be formed, and the electrostatic actuator 100 having a large-area electrode plate can be easily formed. And can be manufactured at low cost.
<< Additional items of embodiment >>
In the embodiment described above, the electrostatic actuator 100 is formed from two sets of three electrode tapes 13, but the present invention is not limited to this, and a plurality of electrode tapes 13 other than three are set as one set. An electrostatic actuator may be formed from two sets. The number of the two sets of electrode tapes 13 may be different from each other.

  In the above embodiment, the number of laminated electrodes is 12. However, it is preferable that the number of laminated electrodes is appropriately determined according to the movable range required for the electrostatic actuator 100 and the magnitude of force during contraction.

  In the embodiment described above, the width of the connection member 20 is set to L + D in order to arrange the electrode tapes 13 of each group in parallel with a gap D, but the present invention is not limited to this. For example, the width of the connecting member 20 is set to L which is the same as the width of the electrode tape 13. On the other hand, a plurality of acrylic resin prisms having a width D are arranged in a lattice pattern with a spacing L on an acrylic resin substrate. If each set of electrode tapes 13 is arranged along the prism, each electrode tape 13 is arranged in parallel with a distance D from each other, and both plateau portions can be easily located at positions where each electrode tape 13 intersects. Superimposed.

  In the above embodiment, the acrylic resin substrate and the connecting member 20 are removed with acetone. However, the present invention is not limited to this, and the adhesive used when the connecting member 20 is joined to the electrode tape 13 and disposed is also removed. May be.

  In the above embodiment, the connection member 20 and the substrate are formed using an acrylic resin. However, the present invention is not limited to this, and the connection member 20 and the substrate are formed using a material that is more soluble and easier to remove than the dielectric sandwiching the electrode tape 13. Also good.

  In the said embodiment, although the electrode holding part 11 and the groove part 16 were formed by removing a predetermined part among PET films which pinched | interposed the strip | belt-shaped electrode, this invention is not limited to this. For example, you may form the electrode holding part 11 and a groove part in the electrode tape which pinched | interposed the strip | belt-shaped electrode with the polyimide film of thickness t1, or another resin film.

  Moreover, it is preferable to determine the thickness β of the PET film remaining in the groove portion 16 illustrated in FIG. 7 based on, for example, the thickness t1 of the PET film in the plateau portion. Thereby, the elastic force, tension, etc. which the hinge part 14 and the connection part 15 which are formed by bending the groove part 16 can be adjusted, and the distance d1 between each laminated electrode part 12 can be adjusted. For example, in order to secure a gap twice as large as the thickness t1 of the electrode holding portion 11 between the laminated electrode portions 12, the deflection of the hinge portion 14 and the connection portion 15 is increased to 6 times the thickness t1 of the electrode holding portion 11. A groove 16 having a width to which a margin is taken into consideration is required. It is preferable that the thickness β of the PET film in the groove portion 16 is determined to be as thin as possible in terms of strength and to achieve the smallest possible elastic force.

  Further, as shown in FIG. 9, a square plate-like member having a length L of one side has a desired width D ′ on the electrode tape 13 formed by covering the strip electrode with a thin insulator film. The electrode holding portions 11 and the groove portions 16 may be alternately formed by bonding so that the groove portions 16 are formed.

Further, the electrode holding portion 11 may be formed by combining the electrode tape 13 with another member. For example, when the electrode holding part 11 is formed by bonding a plate-like member made of a material having a higher rigidity than PET resin such as silica (SiO ₂ ) to the electrode tape 13, the electrode holding part 11 is made using PET resin or the like. Compared to the case where the electrode holder 11 is formed, the thickness of the electrode holder 11 can be reduced. Thereby, the distance d1 between the opposing laminated electrode parts 12 can be shortened, and the action force of the electrostatic actuator 100 can be increased.

  Further, the electrode tape 13 may be formed by bonding plate members made of a resin mixed with glass fiber and hardened as described above. Further, the electrode holding portion 11 is formed by applying and curing an ultraviolet curable resin to a square region having a length L of one side so that the groove portion 16 having a desired width D ′ is formed on both surfaces of the electrode tape. May be formed. Alternatively, the electrode holding part 11 may be formed by applying an ultraviolet curable resin to both surfaces of the electrode tape and irradiating only the region where the electrode holding part 11 is desired to be irradiated with the ultraviolet light.

  From the above detailed description, features and advantages of the embodiments will become apparent. It is intended that the scope of the claims extend to the features and advantages of the embodiments as described above without departing from the spirit and scope of the right. Further, any person having ordinary knowledge in the technical field should be able to easily come up with any improvements and modifications, and there is no intention to limit the scope of the embodiments having the invention to those described above. It is also possible to use appropriate improvements and equivalents within the scope disclosed in.

  The electrostatic actuator having the basic configuration described above is small in size, has a large operating range, and can realize a large working force. It can be used as an actuator for moving a joint or the like.

  Further, the electrostatic actuator configured as described above can be used as a pressure sensor.

DESCRIPTION OF SYMBOLS 11 Electrode holding part, 12 Stacked electrode part, 13 Electrode tape, 14 Hinge part, 15 Connection part, 16 Groove part, 17 Flat part, 20 Connection member, 100 Electrostatic actuator

Claims (6)

In an electrode group having a plurality of strip electrodes arranged in parallel on the same plane at a predetermined interval, the first electrode group and the second electrode group to which voltages of opposite polarities are applied are crossed, A plurality of stacked electrodes in which the first electrode and the second electrode are alternately stacked by alternately overlapping and folding;
The two electrodes of the laminated electrode odor Te and the first electrode and the second electrode are disposed to sandwich the strip electrodes in each region on the strip electrode opposing the plurality having a higher stiffness than the strip electrode A plate-shaped member of
A plurality of hinge portions that are folded portions of the belt-like electrode and that form gaps that expand and contract in the stacking direction between the first electrode and the second electrode facing each other in the stacked electrode;
Among the strip electrodes between the stacked electrodes that connect the adjacent stacked electrodes, the adjacent strip electrodes that are adjacent to each other in the stacking direction are joined to each other , and the first electrode and the second electrode facing each other in the stacked electrodes A plurality of connecting portions that form voids that expand and contract in the laminating direction between,
An electrostatic actuator comprising: The electrostatic actuator according to claim 1,
Electrostatic actuator the strip electrode, which is characterized that you have been covered with a dielectric. Forming a plurality of strip electrodes sandwiched between dielectrics having a predetermined thickness ;
A plurality of rectangular plate-like members having the length of the width of the belt-like electrode are arranged at both intervals on both the dielectrics of the belt-like electrode,
Among the regions of the strip electrode where the plate member is not disposed, a connection member that joins the adjacent regions facing each other in the stacking direction when the strip electrode is folded and stacked is disposed in some of the regions And
Arranging a part of the plurality of strip electrodes in parallel at a predetermined interval as a first electrode group,
The remainder of the plurality of strip electrodes is used as a second electrode group, arranged in parallel at the predetermined interval so as to intersect with the first electrode group, and both at positions intersecting with the first electrode group. One of the plate members
Folding the first electrode group and the second electrode group alternately by folding the first electrode group or the second electrode group at the interval portion across the first electrode group or the second electrode group, Laminating the second electrodes alternately facing each other at the position where the plate-like members are superimposed,
Joining each other with the connecting members arranged adjacent to each other in the stacking direction
Method of manufacturing an electrostatic actuator, characterized and this. Forming a plurality of strip electrodes sandwiched between dielectrics having a predetermined thickness;
Forming a plurality of groove portions leaving a plurality of rectangular plateau portions having the length of the width of the strip electrode on both of the dielectrics of the strip electrode;
Wherein the plurality of grooves, arranged connecting members adjacent joining groove you face each other in the laminating direction when stacking folded the strip electrodes in the groove part,
Arranging a part of the plurality of strip electrodes in parallel at a predetermined interval as a first electrode group,
The remainder of the plurality of strip electrodes is used as a second electrode group, arranged in parallel at the predetermined interval so as to intersect with the first electrode group, and both at positions intersecting with the first electrode group. Overlapping one of the plateau parts ,
Bent at the groove position straddling the first electrode group or the second group of electrodes, folded and said second electrode group and the first electrode group alternately, the said first electrode Laminating the second electrode alternately facing each other at the position where the plateau portion is overlaid,
A method for manufacturing an electrostatic actuator, wherein the connecting members arranged adjacent to and facing each other in the stacking direction are joined to each other. In the manufacturing method of the electrostatic actuator according to claim 4 ,
Applying an adhesive for bonding the groove portions adjacent and facing each other in the stacking direction to the bonding surface of the groove portions ,
The connecting member is disposed on a surface opposite to the bonding surface, and when the strip electrode is folded and stacked, the adjacent and opposed grooves in the stacking direction are pressure-bonded and bonded to each other at the bonding surface. A method for manufacturing an electrostatic actuator. In the manufacturing method of the electrostatic actuator according to claim 5 ,
The method of manufacturing an electrostatic actuator, wherein the connecting member is removed by etching .

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