ZA896789B - Formation of refractory metal silicide layers - Google Patents

Formation of refractory metal silicide layers

Info

Publication number
ZA896789B
ZA896789B ZA896789A ZA896789A ZA896789B ZA 896789 B ZA896789 B ZA 896789B ZA 896789 A ZA896789 A ZA 896789A ZA 896789 A ZA896789 A ZA 896789A ZA 896789 B ZA896789 B ZA 896789B
Authority
ZA
South Africa
Prior art keywords
formation
metal silicide
refractory metal
silicide layers
layers
Prior art date
Application number
ZA896789A
Inventor
Henry Berger
Berger Henry
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc filed Critical Boc Group Inc
Publication of ZA896789B publication Critical patent/ZA896789B/en

Links

ZA896789A 1988-10-03 1989-09-05 Formation of refractory metal silicide layers ZA896789B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25284488A 1988-10-03 1988-10-03

Publications (1)

Publication Number Publication Date
ZA896789B true ZA896789B (en) 1991-01-30

Family

ID=22957787

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA896789A ZA896789B (en) 1988-10-03 1989-09-05 Formation of refractory metal silicide layers

Country Status (1)

Country Link
ZA (1) ZA896789B (en)

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