ZA886232B - Apparatus for the application of materials - Google Patents

Apparatus for the application of materials

Info

Publication number
ZA886232B
ZA886232B ZA886232A ZA886232A ZA886232B ZA 886232 B ZA886232 B ZA 886232B ZA 886232 A ZA886232 A ZA 886232A ZA 886232 A ZA886232 A ZA 886232A ZA 886232 B ZA886232 B ZA 886232B
Authority
ZA
South Africa
Prior art keywords
materials
application
Prior art date
Application number
ZA886232A
Inventor
Rolf Adam
Adam Rolf
Hans Aichert
Aichert Hans
Hans Betz
Betz Hans
Anton Dietrich
Dietrich Anton
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of ZA886232B publication Critical patent/ZA886232B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
ZA886232A 1987-09-21 1988-08-23 Apparatus for the application of materials ZA886232B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3731693 1987-09-21

Publications (1)

Publication Number Publication Date
ZA886232B true ZA886232B (en) 1989-05-30

Family

ID=6336485

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA886232A ZA886232B (en) 1987-09-21 1988-08-23 Apparatus for the application of materials

Country Status (2)

Country Link
KR (1) KR890005299A (en)
ZA (1) ZA886232B (en)

Also Published As

Publication number Publication date
KR890005299A (en) 1989-05-13

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