ZA813998B - Low temperature process for depositing oxide layers by photochemical vapor deposition - Google Patents

Low temperature process for depositing oxide layers by photochemical vapor deposition

Info

Publication number
ZA813998B
ZA813998B ZA813998A ZA813998A ZA813998B ZA 813998 B ZA813998 B ZA 813998B ZA 813998 A ZA813998 A ZA 813998A ZA 813998 A ZA813998 A ZA 813998A ZA 813998 B ZA813998 B ZA 813998B
Authority
ZA
South Africa
Prior art keywords
low temperature
vapor deposition
oxide layers
temperature process
photochemical vapor
Prior art date
Application number
ZA813998A
Inventor
J Peters
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Priority to ZA813998A priority Critical patent/ZA813998B/en
Publication of ZA813998B publication Critical patent/ZA813998B/en

Links

ZA813998A 1981-06-15 1981-06-15 Low temperature process for depositing oxide layers by photochemical vapor deposition ZA813998B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ZA813998A ZA813998B (en) 1981-06-15 1981-06-15 Low temperature process for depositing oxide layers by photochemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ZA813998A ZA813998B (en) 1981-06-15 1981-06-15 Low temperature process for depositing oxide layers by photochemical vapor deposition

Publications (1)

Publication Number Publication Date
ZA813998B true ZA813998B (en) 1982-07-28

Family

ID=25575462

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA813998A ZA813998B (en) 1981-06-15 1981-06-15 Low temperature process for depositing oxide layers by photochemical vapor deposition

Country Status (1)

Country Link
ZA (1) ZA813998B (en)

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