ZA803342B - Positive working photosensitive film resist material - Google Patents

Positive working photosensitive film resist material

Info

Publication number
ZA803342B
ZA803342B ZA00803342A ZA803342A ZA803342B ZA 803342 B ZA803342 B ZA 803342B ZA 00803342 A ZA00803342 A ZA 00803342A ZA 803342 A ZA803342 A ZA 803342A ZA 803342 B ZA803342 B ZA 803342B
Authority
ZA
South Africa
Prior art keywords
resist material
film resist
positive working
photosensitive film
working photosensitive
Prior art date
Application number
ZA00803342A
Inventor
H Barzynski
D Saenger
Original Assignee
Basf Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Basf Ag filed Critical Basf Ag
Publication of ZA803342B publication Critical patent/ZA803342B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

A positive working photosensitive film resist material suitable for multiple image-wise exposure comprises, on a dimensionally stable base film, a photosensitive coating which contains (a) a polymer which possesses aromatic or hetero-aromatic o-nitrocarbinol ester groups (for example o-nitrobenzyl acrylate units) and which can be washed out, after exposure, with an alkaline solvent, and (b) a transparent plasticizer compatible with (a). The product may be used as photopolymer dry film resist material in the production of electrical conductor boards, chemically milled fine-line parts, and identification plates.
ZA00803342A 1979-06-05 1980-06-05 Positive working photosensitive film resist material ZA803342B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792922746 DE2922746A1 (en) 1979-06-05 1979-06-05 POSITIVELY WORKING LAYER TRANSFER MATERIAL

Publications (1)

Publication Number Publication Date
ZA803342B true ZA803342B (en) 1981-06-24

Family

ID=6072494

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA00803342A ZA803342B (en) 1979-06-05 1980-06-05 Positive working photosensitive film resist material

Country Status (7)

Country Link
US (1) US4576902A (en)
EP (1) EP0019770B1 (en)
JP (1) JPS55164824A (en)
AT (1) ATE4351T1 (en)
CA (1) CA1147195A (en)
DE (2) DE2922746A1 (en)
ZA (1) ZA803342B (en)

Families Citing this family (198)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551416A (en) * 1981-05-22 1985-11-05 At&T Bell Laboratories Process for preparing semiconductors using photosensitive bodies
DE3231145A1 (en) * 1982-08-21 1984-02-23 Basf Ag, 6700 Ludwigshafen NEGATIVE WORKING METHOD FOR THE PRODUCTION OF RELIEF IMAGES OR RESIST PATTERNS
DE3231144A1 (en) * 1982-08-21 1984-02-23 Basf Ag, 6700 Ludwigshafen METHOD FOR PRODUCING PRINTING FORMS WITH PLASTIC PRINT LAYERS
DE3231147A1 (en) * 1982-08-21 1984-02-23 Basf Ag, 6700 Ludwigshafen POSITIVELY WORKING METHOD FOR PRODUCING RELIEF IMAGES OR RESIST PATTERNS
JPS6010250A (en) * 1983-06-30 1985-01-19 Fujitsu Ltd Formation of pattern
DE3326036A1 (en) * 1983-07-20 1985-01-31 Basf Ag, 6700 Ludwigshafen LIGHT-SENSITIVE RECORDING MATERIAL SUITABLE FOR THE PRODUCTION OF RELIEF IMAGES OR RESIST PATTERNS
DE3331691A1 (en) * 1983-09-02 1985-03-21 Basf Ag, 6700 Ludwigshafen LIGHT-SENSITIVE, CURABLE MIXTURE SUITABLE FOR POSITIVE RECORDING MATERIAL
DE3340154A1 (en) * 1983-11-07 1985-05-15 Basf Ag, 6700 Ludwigshafen METHOD FOR PRODUCING IMAGERALLY STRUCTURED RESIST LAYERS AND DRY FILM RESIST SUITABLE FOR THIS METHOD
DE3586263D1 (en) * 1984-03-07 1992-08-06 Ciba Geigy Ag METHOD FOR PRODUCING IMAGES.
DE3642184A1 (en) * 1986-12-10 1988-06-23 Basf Ag COPOLYMERISATE WITH O-NITROCARBINOLESTER GROUPS AND THEIR USE
US4755446A (en) * 1987-01-12 1988-07-05 E. I. Du Pont De Nemours And Company Photosensitive compositions containing microcapsules concentrated in surface layer
DE3701569A1 (en) * 1987-01-21 1988-08-04 Basf Ag COPOLYMERISATE WITH O-NITROCARBINOLESTER GROUPINGS, THE USE THEREOF AND METHOD FOR THE PRODUCTION OF SEMICONDUCTOR COMPONENTS
DE3702035A1 (en) * 1987-01-24 1988-08-04 Basf Ag COPOLYMERISATE WITH O-NITROCARBINOLESTER GROUPS AND METHOD FOR THE PRODUCTION OF TWO-LAYER RESISTORS AND SEMICONDUCTOR COMPONENTS
EP0345305A4 (en) * 1987-12-10 1991-10-02 Macdermid Incorporated Image-reversible dry-film photoresists
DE3812325A1 (en) * 1988-04-14 1989-10-26 Basf Ag RADIATION-SENSITIVE MIXTURE FOR LIGHT-SENSITIVE COATING MATERIALS AND METHOD FOR PRODUCING RELIEF PATTERNS AND RELIEF IMAGES
US5252743A (en) * 1989-11-13 1993-10-12 Affymax Technologies N.V. Spatially-addressable immobilization of anti-ligands on surfaces
JPH0954437A (en) 1995-06-05 1997-02-25 Fuji Photo Film Co Ltd Chemical amplification type positive resist composition
US6462107B1 (en) 1997-12-23 2002-10-08 The Texas A&M University System Photoimageable compositions and films for printed wiring board manufacture
US7192681B2 (en) 2001-07-05 2007-03-20 Fuji Photo Film Co., Ltd. Positive photosensitive composition
US7521168B2 (en) 2002-02-13 2009-04-21 Fujifilm Corporation Resist composition for electron beam, EUV or X-ray
US7771915B2 (en) 2003-06-27 2010-08-10 Fujifilm Corporation Two-photon absorbing optical recording material and two-photon absorbing optical recording and reproducing method
US7125467B2 (en) * 2003-06-30 2006-10-24 Hitachi Global Storage Technologies Netherlands B.V. Slider processing system utilizing polyvinyl alcohol release layer
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US20050260522A1 (en) * 2004-02-13 2005-11-24 William Weber Permanent resist composition, cured product thereof, and use thereof
US7462394B2 (en) * 2004-05-06 2008-12-09 Ppg Industries Ohio, Inc. Method of stabilizing metal pigments against gassing
US7449280B2 (en) * 2004-05-26 2008-11-11 Microchem Corp. Photoimageable coating composition and composite article thereof
JP4524154B2 (en) 2004-08-18 2010-08-11 富士フイルム株式会社 Chemically amplified resist composition and pattern forming method using the same
US7504193B2 (en) 2004-09-02 2009-03-17 Fujifilm Corporation Positive resist composition and pattern forming method using the same
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US7947421B2 (en) 2005-01-24 2011-05-24 Fujifilm Corporation Positive resist composition for immersion exposure and pattern-forming method using the same
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US20060204732A1 (en) 2005-03-08 2006-09-14 Fuji Photo Film Co., Ltd. Ink composition, inkjet recording method, printed material, method of producing planographic printing plate, and planographic printing plate
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US20070049651A1 (en) 2005-08-23 2007-03-01 Fuji Photo Film Co., Ltd. Curable composition, ink composition, inkjet recording method, printed material, method of producing planographic printing plate, planographic printing plate, and oxcetane compound
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JP2022164585A (en) 2021-04-15 2022-10-27 住友化学株式会社 Salt, acid generator, resist composition, and method for producing resist pattern
US20230004084A1 (en) 2021-05-06 2023-01-05 Sumitomo Chemical Company, Limited Salt, acid generator, resist composition and method for producing resist pattern
JP2022183074A (en) 2021-05-28 2022-12-08 住友化学株式会社 Salt, acid generator, resist composition, and method for producing resist pattern
JP2022183077A (en) 2021-05-28 2022-12-08 住友化学株式会社 Salt, acid generator, resist composition, and method for producing resist pattern
US20230113512A1 (en) 2021-08-06 2023-04-13 Sumitomo Chemical Company, Limited Resist composition and method for producing resist pattern
JP2023124171A (en) * 2022-02-25 2023-09-06 信越化学工業株式会社 Flattening agent for organic film formation, composition for organic film formation, organic film formation method, and pattern formation method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547730A (en) * 1966-12-16 1970-12-15 Du Pont Machine for making resist images
US4193797A (en) * 1971-03-22 1980-03-18 E. I. Dupont De Nemours And Company Method for making photoresists
DE2150691C2 (en) * 1971-10-12 1982-09-09 Basf Ag, 6700 Ludwigshafen Photosensitive mixture and use of a photosensitive mixture for the production of a planographic printing plate
US3782939A (en) * 1972-02-09 1974-01-01 Mining And Mfg Co Dry positive-acting photoresist
US4006013A (en) * 1972-12-28 1977-02-01 Outokumpu Oy Process for fining carbonaceous alloys of iron, nickel and/or cobalt
DE2522598B2 (en) * 1975-05-22 1977-12-22 Polysius Ag, 4723 Neubeckum METHOD FOR HEAT TREATMENT OF FINE-GRAINED GOODS
US4071367A (en) * 1974-11-27 1978-01-31 E. I. Du Pont De Nemours And Company Channeled photosensitive element
SU941918A1 (en) * 1976-08-10 1982-07-07 Предприятие П/Я Г-4444 Dry film protoresist material
US4075051A (en) * 1976-11-29 1978-02-21 E. I. Du Pont De Nemours And Company Method of trimming photoresist film

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CA1147195A (en) 1983-05-31
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ATE4351T1 (en) 1983-08-15
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JPS55164824A (en) 1980-12-22
EP0019770B1 (en) 1983-07-27
US4576902A (en) 1986-03-18

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