ZA201106897B - Method and apparatus for determining dopant density in semiconductor materials - Google Patents

Method and apparatus for determining dopant density in semiconductor materials

Info

Publication number
ZA201106897B
ZA201106897B ZA2011/06897A ZA201106897A ZA201106897B ZA 201106897 B ZA201106897 B ZA 201106897B ZA 2011/06897 A ZA2011/06897 A ZA 2011/06897A ZA 201106897 A ZA201106897 A ZA 201106897A ZA 201106897 B ZA201106897 B ZA 201106897B
Authority
ZA
South Africa
Prior art keywords
semiconductor materials
dopant density
determining dopant
determining
density
Prior art date
Application number
ZA2011/06897A
Inventor
Johannes Reinhardt Botha
Magnus Carr Wagener
Viera Wagener
Original Assignee
Nelson Mandela Metropolitian Univ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nelson Mandela Metropolitian Univ filed Critical Nelson Mandela Metropolitian Univ
Publication of ZA201106897B publication Critical patent/ZA201106897B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
ZA2011/06897A 2009-04-07 2011-09-21 Method and apparatus for determining dopant density in semiconductor materials ZA201106897B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ZA200902415 2009-04-07
PCT/IB2010/051404 WO2010116293A1 (en) 2009-04-07 2010-03-31 Method and apparatus for determining dopant density in semiconductor materials

Publications (1)

Publication Number Publication Date
ZA201106897B true ZA201106897B (en) 2013-01-30

Family

ID=42307185

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA2011/06897A ZA201106897B (en) 2009-04-07 2011-09-21 Method and apparatus for determining dopant density in semiconductor materials

Country Status (2)

Country Link
WO (1) WO2010116293A1 (en)
ZA (1) ZA201106897B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2974180B1 (en) 2011-04-15 2013-04-26 Commissariat Energie Atomique METHOD FOR DETERMINING THE INTERSTITIAL OXYGEN CONCENTRATION
JP7270185B2 (en) * 2019-02-08 2023-05-10 国立大学法人大阪大学 Temperature gradient forming device and Seebeck coefficient calculation method
CN111289559B (en) * 2020-02-24 2021-03-19 厦门大学 Single-molecule junction thermal potential measuring method and equipment based on STM-BJ

Also Published As

Publication number Publication date
WO2010116293A1 (en) 2010-10-14

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