YU44559B - Dispersing arrangement with a magnetron cathode - Google Patents
Dispersing arrangement with a magnetron cathodeInfo
- Publication number
- YU44559B YU44559B YU1673/82A YU167382A YU44559B YU 44559 B YU44559 B YU 44559B YU 1673/82 A YU1673/82 A YU 1673/82A YU 167382 A YU167382 A YU 167382A YU 44559 B YU44559 B YU 44559B
- Authority
- YU
- Yugoslavia
- Prior art keywords
- magnetron cathode
- dispersing arrangement
- dispersing
- arrangement
- magnetron
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
YU1673/82A YU44559B (en) | 1981-02-12 | 1982-08-02 | Dispersing arrangement with a magnetron cathode |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/233,974 US4356073A (en) | 1981-02-12 | 1981-02-12 | Magnetron cathode sputtering apparatus |
YU1673/82A YU44559B (en) | 1981-02-12 | 1982-08-02 | Dispersing arrangement with a magnetron cathode |
Publications (2)
Publication Number | Publication Date |
---|---|
YU167382A YU167382A (en) | 1985-04-30 |
YU44559B true YU44559B (en) | 1990-10-31 |
Family
ID=26927425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
YU1673/82A YU44559B (en) | 1981-02-12 | 1982-08-02 | Dispersing arrangement with a magnetron cathode |
Country Status (1)
Country | Link |
---|---|
YU (1) | YU44559B (en) |
-
1982
- 1982-08-02 YU YU1673/82A patent/YU44559B/en unknown
Also Published As
Publication number | Publication date |
---|---|
YU167382A (en) | 1985-04-30 |
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