YU44559B - Dispersing arrangement with a magnetron cathode - Google Patents

Dispersing arrangement with a magnetron cathode

Info

Publication number
YU44559B
YU44559B YU1673/82A YU167382A YU44559B YU 44559 B YU44559 B YU 44559B YU 1673/82 A YU1673/82 A YU 1673/82A YU 167382 A YU167382 A YU 167382A YU 44559 B YU44559 B YU 44559B
Authority
YU
Yugoslavia
Prior art keywords
magnetron cathode
dispersing arrangement
dispersing
arrangement
magnetron
Prior art date
Application number
YU1673/82A
Other versions
YU167382A (en
Inventor
H E Mckelvey
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/233,974 external-priority patent/US4356073A/en
Application filed by Boc Group Plc filed Critical Boc Group Plc
Priority to YU1673/82A priority Critical patent/YU44559B/en
Publication of YU167382A publication Critical patent/YU167382A/en
Publication of YU44559B publication Critical patent/YU44559B/en

Links

YU1673/82A 1981-02-12 1982-08-02 Dispersing arrangement with a magnetron cathode YU44559B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
YU1673/82A YU44559B (en) 1981-02-12 1982-08-02 Dispersing arrangement with a magnetron cathode

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/233,974 US4356073A (en) 1981-02-12 1981-02-12 Magnetron cathode sputtering apparatus
YU1673/82A YU44559B (en) 1981-02-12 1982-08-02 Dispersing arrangement with a magnetron cathode

Publications (2)

Publication Number Publication Date
YU167382A YU167382A (en) 1985-04-30
YU44559B true YU44559B (en) 1990-10-31

Family

ID=26927425

Family Applications (1)

Application Number Title Priority Date Filing Date
YU1673/82A YU44559B (en) 1981-02-12 1982-08-02 Dispersing arrangement with a magnetron cathode

Country Status (1)

Country Link
YU (1) YU44559B (en)

Also Published As

Publication number Publication date
YU167382A (en) 1985-04-30

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