WO2025218649A1 - 一种快排阀结构及清洗装置 - Google Patents

一种快排阀结构及清洗装置

Info

Publication number
WO2025218649A1
WO2025218649A1 PCT/CN2025/088978 CN2025088978W WO2025218649A1 WO 2025218649 A1 WO2025218649 A1 WO 2025218649A1 CN 2025088978 W CN2025088978 W CN 2025088978W WO 2025218649 A1 WO2025218649 A1 WO 2025218649A1
Authority
WO
WIPO (PCT)
Prior art keywords
sleeve assembly
sealing sleeve
piston rod
sealing
valve tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/CN2025/088978
Other languages
English (en)
French (fr)
Inventor
王建峰
赵宏宇
王锐廷
李广义
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Naura Microelectronics Equipment Co Ltd
Original Assignee
Beijing Naura Microelectronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Naura Microelectronics Equipment Co Ltd filed Critical Beijing Naura Microelectronics Equipment Co Ltd
Publication of WO2025218649A1 publication Critical patent/WO2025218649A1/zh
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/02—Spindle sealings with stuffing-box ; Sealing rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing

Definitions

  • the present application relates to the field of semiconductor technology, and in particular to a quick exhaust valve structure and a cleaning device.
  • FIG. 1 shows a schematic diagram of a semiconductor tank cleaning system used to clean wafers.
  • the system includes a tank 10a and a valve 20a located on the bottom side of tank 10a.
  • wafer 101a is submerged below a cleaning solution level 102a.
  • valve 20a is opened to drain the cleaning solution from tank 10a.
  • the draining speed needs to be slowed down. Otherwise, the rapid lateral flow of the liquid can easily cause wafer 101a to overlap. This stage is defined as the slow draining stage.
  • the valve 20a is opened wider, allowing the liquid to drain rapidly. This stage is defined as the fast draining stage.
  • the present application provides a quick-drain valve structure and a cleaning device, which can improve the problem that existing semiconductor tank cleaning equipment cannot adjust the drainage time of the slow-drain stage according to different working conditions.
  • an embodiment of the present application provides a quick exhaust valve structure, comprising:
  • a valve tube comprising a first end and a second end oppositely disposed, wherein the first end is used to connect to the cleaning tank, and the valve tube is provided with at least one drain port;
  • a cylinder sleeved in the valve tube and connected to the second end;
  • a valve core assembly including a sealing sleeve assembly and a piston rod
  • the sealing sleeve assembly is sleeved in the valve tube and forms a dynamic sealing surface with the inner wall of the valve tube that is sealed and slidable relative to each other, and a drainage groove is provided between the sealing sleeve assembly and the dynamic sealing surface of the valve tube at a portion near the first end; the sealing sleeve assembly is movably sleeved on the outer side of the cylinder at one end facing the second end;
  • One end of the piston rod is disposed in the cylinder, and the other end extends from the interior of the cylinder and is movably connected to the sealing sleeve assembly along the radial direction of the piston rod, for driving the sealing sleeve assembly to move along the axial direction of the piston rod;
  • the sealing sleeve assembly has a first extreme position close to the first end and a second extreme position close to the second end. When the sealing sleeve assembly is at the first extreme position, it blocks the first end. When the sealing sleeve assembly is away from the first extreme position, the drainage groove is connected to the drainage port. When the sealing sleeve assembly is at the second extreme position, it avoids at least part of the drainage port.
  • the sealing sleeve assembly includes:
  • a sealing plug which is sleeved in the valve tube and forms the dynamic sealing surface; an end of the sealing plug facing the second end is provided with a blind hole extending along the axial direction of the piston rod;
  • a support bowl one end of which faces the second end and is sleeved on the outside of the cylinder, and the support bowl is also sleeved in the blind hole;
  • a stepped hole is provided on the bottom of the support bowl, and the stepped hole includes a first hole section with a larger diameter facing the first end and a second hole section with a smaller diameter facing the second end;
  • a locking piece is arranged in the stepped hole with a clearance fit in the radial direction of the piston rod, and the other end of the piston rod passes through the second hole section with a clearance fit in the radial direction of the piston rod and is connected to the locking piece, and the locking piece is respectively fitted with the step of the stepped hole and the sealing plug in a direction parallel to the axial direction of the piston rod for upper limit positioning.
  • one end of the piston rod disposed in the cylinder divides the internal space of the cylinder into a first air chamber and a second air chamber;
  • the cylinder is provided with a first gas channel communicating with the first gas cavity, a second gas channel communicating with the second gas cavity, and a breathing hole communicating with the third gas cavity;
  • the first gas channel and the second gas channel are used to connect to an external air pressure control device, and the breathing hole connects the third air cavity to the external atmospheric environment.
  • the cylinder comprises:
  • a cylinder body having an opening at one end thereof facing the first end
  • a first flange disposed at an end of the cylinder body away from the opening
  • the piston rod extends from the end cover, and a first sealing ring is provided between the outer periphery of the piston rod and the inner periphery of the end cover, and a second sealing ring is provided between one end of the piston rod arranged in the cylinder body and the inner wall of the cylinder body to separate the first air cavity and the second air cavity.
  • the contact surface of the end surface of the end cover facing the second end and contacting the cylinder body is an inclined surface, and the distance between the inclined surface and the axis of the piston rod decreases in a direction approaching the second end; and/or,
  • a third sealing ring is provided between the outer periphery of the end cover and the inner periphery of the cylinder body.
  • a positioning boss is provided on the end surface of the first flange facing the valve pipe, and the outer peripheral wall of the positioning boss cooperates with the inner wall of the valve pipe;
  • the cylinder body is connected to the end surface of the positioning boss facing the valve pipe.
  • the valve tube comprises:
  • a second flange disposed at the first end of the valve pipe body, wherein the inner diameter of the second flange is larger than the inner diameter of the valve pipe body;
  • the sealing sleeve assembly When the sealing sleeve assembly is located at the first limit position, it abuts against the sealing ring to seal the drainage groove.
  • the abutting surfaces between the sealing sleeve assembly and the sealing ring are inclined surfaces.
  • a fourth sealing ring is provided on a side of the sealing ring away from the valve tube body.
  • a fifth sealing ring is provided between the sealing sleeve assembly and the inner wall of the valve tube, and the fifth sealing ring is provided close to the second end.
  • the drainage groove is a groove provided on the surface of the sealing sleeve assembly opposite to the inner wall of the valve tube, and the groove extends from the end surface of the sealing sleeve assembly close to the first end along the axial direction of the piston rod.
  • the groove is discontinuous in the circumferential direction of the sealing sleeve assembly.
  • a diameter of a portion of the sealing sleeve assembly close to the first end is smaller than a diameter of a portion of the sealing sleeve assembly close to the second end, and an annular gap between the portion of the sealing sleeve assembly close to the first end and the inner wall of the valve tube constitutes the groove;
  • the inner diameter of the portion of the valve tube near the first end is larger than the inner diameter of the portion of the valve tube near the second end, and the annular gap between the portion of the valve tube near the first end and the sealing sleeve assembly constitutes the drainage groove;
  • an embodiment of the present application further provides a cleaning device, comprising a cleaning tank and the quick exhaust valve structure as described in the above embodiments;
  • a drain pipe is provided on the side wall of the cleaning tank, and the quick drain valve structure is connected to the drain pipe.
  • the quick-discharge valve structure of this embodiment successively experiences a slow-discharge stage and a quick-discharge stage during the process of the valve core assembly moving from the first extreme position to the second extreme position.
  • the discharge time of the slow-discharge stage can be adjusted by controlling the moving speed of the valve core assembly within the movement stroke.
  • the piston rod and the sealing sleeve assembly can be movably connected along the radial direction of the piston rod, it is possible to avoid the sealing sleeve assembly applying radial stress to the piston rod when the piston rod is deformed by force in the radial direction, thereby damaging the reliability of the sealing structure of the outer wall of the piston rod. It can also reduce the installation accuracy requirements between the piston rod and the sealing sleeve assembly, that is, allow the coaxiality error between the two to be appropriately increased.
  • FIG1 is a schematic diagram of a semiconductor tank cleaning device for cleaning wafers
  • FIG2 is a schematic diagram of a three-dimensional structure of a quick exhaust valve structure in related art
  • FIG3 is a schematic cross-sectional view of the structure of FIG2 ;
  • FIG4 is a schematic diagram of the discharge time adjustment of the quick discharge valve structure of FIG2 ;
  • FIG5 is a schematic structural diagram of a cleaning device provided in an embodiment of the present application.
  • FIG6 is a structural diagram of a valve-pipe connection state provided in an embodiment of the present application.
  • FIG. 7 to 10 are schematic structural diagrams of a quick exhaust valve structure in different motion states provided by an embodiment of the present application.
  • FIG11 is a schematic cross-sectional view of a quick exhaust valve structure provided in an embodiment of the present application.
  • FIG12 is a schematic diagram of a connection structure of a piston rod provided in an embodiment of the present application.
  • FIG13 is a schematic structural diagram of a cylinder body (including a first flange) provided in an embodiment of the present application;
  • FIG14 is an enlarged structural diagram of portion E in FIG8 ;
  • FIGS. 15a-15d are schematic structural diagrams of a valve tube body provided in an embodiment of the present application.
  • FIG16 is a schematic structural diagram of a sealing plug provided in an embodiment of the present application.
  • FIG17 is a schematic diagram of FIG16 in the direction A;
  • Figure 18 is a schematic diagram of the valve tube and valve core assembly in the direction A after assembly
  • FIG19 is a schematic structural diagram of a sealing plug provided in an embodiment of the present application.
  • FIGS 20a and 20b are schematic structural diagrams of another valve tube body provided in an embodiment of the present application.
  • A, B, C means “any one of the following: A; B; C; A and B; A and C; B and C; A and B and C
  • A, B or C or "A, B and/or C” means "any one of the following: A; B; C; A and B; A and C; B and C; A and B and C”. Exceptions to this definition will only occur when the combination of elements, functions, steps or operations is inherently mutually exclusive in some way.
  • first, second, third, etc. may be used herein to describe various information, such information should not be limited to these terms. These terms are merely used to distinguish information of the same type from one another. For example, first information could also be referred to as second information, and similarly, second information could also be referred to as first information without departing from the scope of this document.
  • first information could also be referred to as second information
  • second information could also be referred to as first information without departing from the scope of this document.
  • the singular forms "a,” “an,” and “the” are intended to include the plural forms as well, unless the context indicates otherwise.
  • top, bottom, up”, “down”, “vertical”, “horizontal”, etc. indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
  • Figure 2 is a schematic three-dimensional diagram of a quick-exhaust valve structure in related art
  • Figure 3 is a schematic cross-sectional diagram of Figure 2.
  • This quick-exhaust valve structure includes a valve tube 10b, a cylinder 20b, and a valve core assembly 30b.
  • a drain port 11b is provided on the sidewall of the valve tube 10b.
  • the cylinder 20b is located at one end of the valve tube 10b, and the other end of the valve tube 10b is connected to the cleaning tank via a flange 12b.
  • the valve core assembly 30b includes a sealing sleeve 31b and a piston rod 32b.
  • the sealing sleeve 31b consists of a first section with a smaller outer diameter and a second section with a larger outer diameter. The junction of the two sections forms a step 33b.
  • One end of the piston rod 32b is located in the cylinder 20b, dividing the internal space of the cylinder 20b into two air chambers 21b and 22b.
  • the other end of the piston rod 32b is threadedly connected to the sealing sleeve 31b.
  • the cylinder 20b is provided with gas channels h1 and h2 that are connected to the above-mentioned two air chambers 21b and 22b in a one-to-one correspondence.
  • a slow exhaust channel h3 is formed between the first section of the sealing sleeve 31b and the inner wall of the flange 12b.
  • the step 33b can completely block the slow exhaust channel h3.
  • the cleaning liquid can flow through the slow exhaust channel h3 and be discharged from the drain port 11b, forming a slow exhaust.
  • the valve core assembly 30b moves away from the flange 12b and moves to the point where the end face of the sealing sleeve 31b separates and offsets from the end face of the flange 12b, the cleaning liquid is directly discharged through the drain port 11b, forming a fast exhaust.
  • Figure 4 is a schematic diagram of the drainage time adjustment of the quick exhaust valve structure.
  • the aforementioned quick-discharge valve structure can adjust the drain time during the slow-discharge phase for different operating conditions, the gravity of the water exerts a radial force on the sealing sleeve 31b during the opening and closing process of the valve core assembly 30b due to the inconsistent vertical forces acting on it.
  • the sealing sleeve 31b is threadedly connected to the piston rod 32b, and the movement of the sealing sleeve 31b is guided by the piston rod 32b.
  • Practice has shown that the sealing ring of the piston rod 32b is prone to seal failure when subjected to long-term radial forces. Based on this, the present application provides a quick-discharge valve structure and a cleaning device.
  • the cleaning device may include a quick exhaust valve structure 100 and a cleaning tank 200.
  • a plurality of wafers 102 to be cleaned can be placed vertically in the cleaning tank 200.
  • the side wall of the cleaning tank 200 is provided with a drain pipe 210.
  • the quick exhaust valve structure 100 is connected to the drain pipe 210 to control the discharge time of the cleaning solution after cleaning is completed.
  • the quick exhaust valve structure 100 of the following embodiments of the present application can be applied to the cleaning device.
  • the quick exhaust valve structure 100 of the present application is described in detail below with specific embodiments.
  • Figure 6 is a schematic diagram of a valve-pipe connection state according to an embodiment of the present application
  • Figures 7-10 are schematic diagrams of a quick exhaust valve structure according to an embodiment of the present application in different motion states
  • Figure 11 is a schematic cross-sectional view of a quick exhaust valve structure according to an embodiment of the present application.
  • the quick exhaust valve structure may include: a valve pipe 10, a cylinder 20, and a valve core assembly 30.
  • the valve tube 10 includes a first end 10c and a second end 10d, which are oppositely disposed.
  • the first end 10c is used to connect to the cleaning tank 200.
  • the valve tube 10 is provided with at least one drainage port 101.
  • the specific shape and size of the drainage port 101 are not particularly limited.
  • the structure shown in Figure 6 can be three drainage ports 101 evenly spaced along the circumference of the valve tube 10.
  • the drainage ports 101 can be rectangular, circular, trapezoidal, or other shapes.
  • the cylinder 20 is sleeved within the valve tube 10 and connected to the second end 10d of the valve tube 10.
  • the valve core assembly 30 includes a sealing sleeve assembly 31 and a piston rod 32.
  • the sealing sleeve assembly 31 is sleeved in the valve tube 10 and forms dynamic sealing surfaces with the inner wall of the valve tube 10 that are sealed and can slide relative to each other. That is, the surface of the sealing sleeve assembly 31 opposite to the inner wall of the valve tube 10 and the inner wall of the valve tube 10 are both sealing surfaces, and the two can slide relative to each other.
  • the cooperation between the sealing sleeve assembly 31 and the dynamic sealing surface of the valve tube 10 can guide the movement of the sealing sleeve assembly 31.
  • a drainage groove 301 is provided between the sealing sleeve assembly 31 and the dynamic sealing surface of the valve tube 10 near the first end 10c.
  • the specific structural form of the drainage groove 301 is not particularly limited in this embodiment.
  • the sealing sleeve assembly 31 can have a structure similar to the sealing outer sleeve 31b in FIG. 3 .
  • the sealing sleeve assembly 31 can include a first section with a smaller outer diameter and a second section with a larger outer diameter.
  • the second section is located near the second end 10d, and the surface of the second section opposite the inner wall of the valve tube 10 forms the aforementioned dynamic sealing surface.
  • the first section is located near the first end 10c, and the annular gap formed between the surface of the first section opposite the inner wall of the valve tube 10 and the inner wall of the valve tube 10 forms the aforementioned drainage groove 301.
  • the end of the sealing sleeve assembly 31 facing the second end 10d is movably mounted on the outer side of the cylinder 20.
  • a gap 302 is provided between the inner periphery of the sealing sleeve assembly 31 and the outer periphery of the cylinder 20 to ensure that no contact friction is generated when the two move relative to each other.
  • One end of the piston rod 32 is disposed within the cylinder 20, and the other end extends from the interior of the cylinder 20.
  • the piston rod 32 is movably connected to the sealing sleeve assembly 31 along the radial direction of the piston rod 32, thereby driving the sealing sleeve assembly 31 to move axially along the piston rod 32.
  • the outer periphery of the piston rod 32 and the sealing sleeve assembly 31 form a clearance fit, while the piston rod 32 and the sealing sleeve assembly 31 are limited in a direction parallel to the axial direction of the piston rod 32.
  • the sealing sleeve assembly 31 has a first extreme position Pmin near the first end 10c and a second extreme position Pmax near the second end 10d.
  • the distance between the first extreme position Pmin and the second extreme position Pmax is the movement stroke L of the valve core assembly 30.
  • Figures 7-10 which illustrate the entire process of the sealing sleeve assembly 31 moving from the first extreme position Pmin to the second extreme position Pmax.
  • the second extreme position Pmax in Figure 10 is for illustration only. In actual applications, the second extreme position Pmax can be offset a short distance to the left relative to the second extreme position Pmax in Figure 10, so that the sealing sleeve assembly 31 can be controlled to continue to move a short distance to the left based on the second extreme position Pmax in Figure 10.
  • the sealing sleeve assembly 31 When the sealing sleeve assembly 31 is at the first extreme position Pmin, it blocks the first end 10c (which can be used in the cleaning stage), please refer to Figure 7; when the sealing sleeve assembly 31 is away from the first extreme position Pmin, the drainage groove 301 is connected to the drainage port 101, please refer to Figures 8 and 9.
  • the sealing sleeve assembly 31 moves from the first extreme position Pmin to the critical position shown in Figure 9 (that is, the sealing sleeve assembly 31 just blocks the drainage port 101)
  • the liquid medicine can only flow through the drainage groove 301 first and then be discharged through the drainage port 101.
  • This stage belongs to the slow drainage stage.
  • the sealing sleeve assembly 31 When the sealing sleeve assembly 31 is away from the critical position, it avoids part of the drain port 101.
  • the liquid medicine can be discharged directly from the drain port 101, entering the fast discharge stage.
  • the sealing sleeve assembly 31 When the sealing sleeve assembly 31 is at the second extreme position Pmax, it avoids at least part of the drain port 101. That is, the outer periphery of the sealing sleeve assembly 31 partially blocks the drain port 101 or does not block the drain port 101.
  • the end surface of the sealing sleeve assembly 31 facing the first end 10c of the valve tube 10 is exposed to the drain port 101.
  • the liquid medicine can be discharged directly from the drain port 101, and the discharge speed increases rapidly, corresponding to the fast discharge stage.
  • the second extreme position Pmax can be designed as follows: when the sealing sleeve assembly 31 is at the second extreme position Pmax, it completely avoids the drain port 101 and the discharge speed can reach the maximum.
  • the specific design can be based on needs.
  • the schematic diagram of the discharge time adjustment of the quick-discharge valve structure of this embodiment can be referred to FIG4 . It should be noted that, in the process from the discharge port 101 being just opened to being fully opened, the discharge speed is a continuous and rapid increase process, but the corresponding time is very short, so the "pulse-shaped" curve in FIG4 does not reflect this process.
  • the slow-discharge phase corresponds to the movement of the valve core assembly 30 from the first extreme position Pmin to the intermediate critical position (see FIG. 9 ), and the quick-discharge phase corresponds to the movement from the intermediate critical position to the second extreme position Pmax.
  • the discharge time of the slow-discharge phase can be adjusted by controlling the movement speed of the valve core assembly 30 within the movement stroke L.
  • the sealing sleeve assembly 31 can be prevented from applying radial stress to the piston rod 32 when the piston rod 32 is deformed by force in the radial direction of the piston rod 32, thereby preventing the sealing sleeve assembly 31 from applying radial stress to the piston rod 32 and damaging the reliability of the sealing structure of the outer wall of the piston rod 32.
  • the installation accuracy requirements between the piston rod 32 and the sealing sleeve assembly 31 can also be reduced, that is, the coaxiality error between the two can be appropriately increased.
  • the sealing sleeve assembly 31 may include: a sealing plug 311, a support bowl 312, and a locking member 313.
  • the sealing plug 311 is sleeved within the valve tube 10 and forms the aforementioned dynamic sealing surface with the inner wall of the valve tube 10; the end of the sealing plug 311 facing the second end 10d is provided with a blind hole 303 extending in the axial direction.
  • the end of the support bowl 312 facing the second end 10d is sleeved on the outside of the cylinder 20.
  • a gap 302 is provided between the inner periphery of the support bowl 312 and the outer periphery of the cylinder 20 to ensure that no contact friction is generated when the two move relative to each other.
  • the support bowl 312 is also sleeved in the blind hole 303; the bottom of the support bowl 312 is provided with a stepped hole 304, the stepped hole 304 includes a first hole section 3041 with a larger diameter toward the first end 10c, and a second hole section 3042 with a smaller diameter toward the second end 10d; the locking piece 313 is arranged in the stepped hole 304 with a clearance fit in the radial direction of the piston rod 32, and the other end of the piston rod 32 passes through the second hole section 3042 with a clearance fit in the radial direction of the piston rod 32 and is connected to the locking piece 313, and the locking piece 313 is respectively matched with the step of the stepped hole 304 and the sealing plug 311 in the direction parallel to the axial direction of the piston rod 32 to realize
  • the piston rod 32 can also move in the radial direction of the piston rod 32 along with the locking member 313 .
  • the sealing plug 311 and the support bowl 312 can be connected by a threaded structure.
  • the contact surface between the sealing plug 311 and the support bowl 312 is a stepped surface, which can include two, three or other multi-stage stepped surfaces.
  • the contact surface is a stepped structure composed of three stages, and the threaded structure 315 is provided on the middle stage of the three stages. This can reduce the difficulty of assembly while ensuring the stability of the assembly.
  • the support bowl 312 can be made of polymer materials such as PP, PVC, and PVDF, which have high rigidity, good temperature resistance and corrosion resistance.
  • the sealing plug 311 can be made of PTFE, which can provide high purity and chemical stability. When in contact with the chemical liquid medium, it will not cause corrosion, wear and other problems, nor will it contaminate the liquid.
  • the locking member 313 and the piston rod 32 can be connected in a variety of ways.
  • the two can be connected in a shaft-hole structure.
  • a through hole extending radially along the piston rod 32 can be provided at the end of the piston rod 32 facing the first end 10c
  • the locking member 313 can be a pin that mates with the through hole.
  • the end of the piston rod 32 facing the first end 10c can be provided with an external thread
  • the locking member 313 can be a component with an internal thread, such as a nut or cap, whose internal thread mates with the external thread at the end of the piston rod 32 facing the first end 10c.
  • the component can also be configured in a convex shape, with a clearance fit between the first hole segment 3041 and the second hole segment 3042 of the stepped hole 304 in the radial direction of the piston rod 32, as shown in Figure 12.
  • the piston rod 32 is connected to the sealing sleeve assembly 31 through a locking member 313, and is clearance-matched with the sealing sleeve assembly 31 in the radial direction of the piston rod 32, thereby preventing the sealing sleeve assembly 31 from applying radial stress to the piston rod 32 when the piston rod 32 is deformed by force in the radial direction of the piston rod 32, thereby damaging the reliability of the sealing structure of the outer wall of the piston rod 32.
  • Figure 13 is a schematic structural diagram of a cylinder body provided in an embodiment of the present application.
  • This application provides a detailed structural scheme for realizing a cylinder-driven piston rod.
  • the piston rod 32 is disposed at one end within the cylinder 20, dividing the internal space of the cylinder 20 into a first air chamber 305 and a second air chamber 306.
  • the end surface of the sealing sleeve assembly 31 facing the second end 10d forms a third air chamber 307 with the cylinder 20 and the valve tube 10.
  • the cylinder 20 is provided with a first gas channel 201 communicating with the first air chamber 305, a second gas channel 202 communicating with the second air chamber 306, and a breathing hole 203 communicating with the third air chamber 307.
  • the first gas channel 201 and the second gas channel 202 are used to connect to an external air pressure control device, and the breathing hole 203 connects the third air chamber 307 to the external atmospheric environment.
  • the piston rod 32 drives the sealing sleeve assembly 31 to the right. Conversely, when the first gas channel 201 is exhausting and the second gas channel 202 is venting, the piston rod 32 drives the sealing sleeve assembly 31 to the left. During this movement, the volume of the third air chamber 307 increases or decreases.
  • the breathing hole 203 connects the third air chamber 307 to the external atmosphere, balancing the internal and external air pressures of the third air chamber 307. In this embodiment, the breathing hole 203 is located away from the liquid medicine discharge channel to prevent liquid medicine from entering the third air chamber 307 through the breathing hole 203.
  • the cylinder 20 may include: a cylinder body 21, an end cover 22 and a first flange 23.
  • the cylinder body 21 is provided with an opening at one end facing the first end 10c, and the end cover 22 seals the opening.
  • the first flange 23 is provided at the end of the cylinder body 21 away from the above-mentioned opening, and the cylinder body 21 can be connected to the second end 10d of the valve pipe 10 through the first flange 23.
  • the piston rod 32 extends from the end cover 22, and a first sealing ring 41 is provided between the outer periphery of the piston rod 32 and the inner periphery of the end cover 22 to seal the gap therebetween.
  • a second sealing ring 42 is provided between the end of the piston rod 32 provided in the cylinder body 21 and the inner wall of the cylinder body 21 to separate the first air cavity 305 and the second air cavity 306.
  • the end surface of the end cap 22 facing the second end 10d of the valve tube 10, where it contacts the cylinder body 21 has a sloped contact surface 51. The distance between this sloped surface and the axis of the piston rod 32 decreases as it approaches the second end 10d of the valve tube 10.
  • the inner wall of the cylinder body 21 has a sloped surface designed to mate with the contact surface 51.
  • a third sealing ring 43 is provided between the outer periphery of the end cap 22 and the inner periphery of the cylinder body 21 to seal the gap therebetween.
  • Figure 14 is an enlarged structural diagram of portion E in Figure 8.
  • a positioning boss 231 is provided on the end surface of the first flange 23 facing the valve pipe 10. The outer peripheral wall of the positioning boss 231 is engaged with the inner wall of the valve pipe 10, and the cylinder body 21 is connected to the end surface of the positioning boss 231 facing the valve pipe 10.
  • the coaxiality of the two can be ensured.
  • the present application also provides a specific embodiment of a valve pipe.
  • Figures 15a-15d are schematic structural diagrams of a valve pipe body according to an embodiment of the present application.
  • the valve pipe 10 may include a valve pipe body 11, a second flange 12, and a sealing ring 13.
  • a drain port 101 is provided on the valve pipe body 11.
  • the second flange 12 is provided at the first end 10c of the valve pipe body 11.
  • the inner diameter of the second flange 12 is larger than that of the valve pipe body 11.
  • the sealing ring 13 is sleeved within the second flange 12 and abuts the first end 10c of the valve pipe body 11.
  • the sealing sleeve assembly 31 When the sealing sleeve assembly 31 is in the first extreme position Pmin, it abuts the sealing ring 13 to seal the drain trough 301.
  • the adapter flange 220 and the second flange 12 can be used to clamp and secure the flange of the drain pipe 210 therebetween, thereby achieving a fixed connection between the valve pipe body 11 and the drain pipe 210, thereby connecting the cleaning tank 200.
  • the distance L0 between the drain port 101 and the first end 10c of the valve tube body 11 corresponds to the travel during the slow-discharge phase.
  • the sealing ring 13 can be made of PTFE or PVDF to prevent corrosion and contamination of the liquid.
  • the adapter flange 220 can be composed of two half rings.
  • valve core assembly 30b directly acts on flange 12b.
  • flange 12b is typically made of PTFE, which is relatively soft and has poor dimensional stability, making it susceptible to deformation and causing overall failure.
  • sealing ring 13 only bears the extrusion force of valve core assembly 30.
  • the thrust of valve core assembly 30 is ultimately transmitted to valve tube 10.
  • Valve tube 10 is made of materials with greater rigidity than PTFE, such as PVC, PP, and PVDF. Therefore, this embodiment has greater dimensional stability.
  • the abutment surface 52 between the sealing sleeve assembly 31 and the sealing ring 13 is a beveled surface.
  • the inner peripheral edge of the end surface of the sealing ring 13 facing the valve tube body 11 is a beveled surface.
  • This beveled surface is located inward of the end surface of the first end 10 c of the valve tube body 11, and the distance between the beveled surface and the axis of the sealing ring 13 decreases as it moves away from the first end 10 c of the valve tube body 11.
  • the outer peripheral edge of the end surface of the sealing sleeve assembly 31 facing the sealing ring 13 is a beveled surface. This beveled surface mates with the beveled surface of the sealing ring 13 when the sealing sleeve assembly 31 is in the first extreme position P min .
  • a fourth sealing ring 44 is provided on the side of the sealing ring 13 facing away from the valve tube body 11. Furthermore, a fifth sealing ring 45 is provided between the sealing sleeve assembly 31 and the inner wall of the valve tube 10, positioned near the second end 10d. One or more fifth sealing rings 45 may be provided. These fifth sealing rings 45 prevent the chemical solution from penetrating the third air cavity 307 through the gap between the dynamic sealing surface and the inner wall of the valve tube 10, and from entering through the gap 302 between the sealing sleeve assembly 31 and the cylinder 20, potentially corroding the first sealing ring 41 and damaging the sealing performance of the cylinder 20. Furthermore, the high-temperature chemical solution may affect the dimensions of the cylinder 20.
  • the drainage groove 301 can be a groove provided on the surface of the sealing sleeve assembly 31 opposite the inner wall of the valve tube 10, and the groove extends axially from the end surface of the sealing sleeve assembly 31 near the first end 10c.
  • the drainage groove 301 can also be a groove provided on the inner wall of the valve tube 10.
  • drainage groove 301 can be implemented using the drainage groove structure shown in FIG3 .
  • the diameter of the portion of sealing sleeve assembly 31 near first end 10c is smaller than the diameter of the portion near second end 10d. That is, sealing sleeve assembly 31 has a stepped shaft structure.
  • the annular gap between the smaller diameter portion of sealing sleeve assembly 31 (i.e., the portion near first end 10c) and the inner wall of valve tube 10 forms drainage groove 301 (i.e., the aforementioned groove, which is an annular groove).
  • the larger diameter portion of sealing sleeve assembly 31 (i.e., the portion near second end 10d) and the inner wall of valve tube 10 form the aforementioned dynamic sealing surfaces.
  • Figure 16 is a structural schematic diagram of a sealing plug provided in an embodiment of the present application
  • Figure 17 is a schematic diagram of the direction A of Figure 16
  • Figure 18 is a schematic diagram of the direction A after the valve tube and the valve core assembly 30 are assembled
  • Figure 19 is a structural schematic diagram of a sealing plug provided in an embodiment of the present application.
  • the drainage groove 301 is a groove arranged on the surface of the sealing sleeve assembly 31 opposite to the inner wall of the valve tube 10. The groove extends from the end face of the sealing sleeve assembly 31 close to the first end 10c along the axial direction of the piston rod 32.
  • the groove is discontinuous in the circumferential direction of the sealing sleeve assembly 31, that is, the diameter of the sealing sleeve assembly 31 at each position in the direction parallel to the axial direction of the piston rod 32 remains unchanged, and the drainage groove 301 (a discontinuous groove in the circumferential direction) is only formed at a local position on the surface of the sealing sleeve assembly 31 opposite to the inner wall of the valve tube 10, so that the fit between the sealing sleeve assembly 31 and the valve tube 10 can be more stable.
  • one or more drainage grooves 301 may be provided. If multiple drainage grooves 301 are provided, they may be evenly distributed along the circumference of the sealing sleeve assembly 31.
  • the surface of the sealing sleeve assembly 31 may also include an unlimited number of annular grooves 314 for receiving a corresponding number of fifth sealing rings 45.
  • the radial cross-section (perpendicular to the axial direction of the piston rod 32) of the drainage groove 301 may be arc-shaped as shown in Figure 17, rectangular as shown in Figure 19, or other regular or irregular shapes.
  • the drain trough 301 of this embodiment can have a longer slow-discharge stage stroke. Furthermore, the structure shown in FIG3 achieves the slow-discharge stage by means of a variable diameter (i.e., a stepped shaft). Since there is no annular gap and no steps in this embodiment, the assembly and movement of the overall structure are more stable. As an example, the sum of the radial cross-sectional areas of all drain troughs 301 is between 100 and 300 square millimeters, which can adapt to the slow-discharge requirements of various working conditions.
  • Figures 20a and 20b are schematic structural diagrams of another valve tube body provided in an embodiment of the present application.
  • the inner diameter d1 of the portion of the valve tube 10 near the first end 10c is larger than the inner diameter d2 of the portion of the valve tube 10 near the second end 10d.
  • the annular gap between the portion of the valve tube 10 with the larger inner diameter (i.e., the portion of the valve tube 10 near the first end 10c) and the sealing sleeve assembly 31 constitutes the drainage groove 301.
  • the inner wall of the portion of the valve tube 10 with the smaller diameter (i.e., the portion of the valve tube 10 near the second end 10d) and the surface of the sealing sleeve assembly 31 opposite to the inner wall of the valve tube 10 respectively form the above-mentioned dynamic sealing surfaces.
  • the outer diameters of various locations on the sealing sleeve assembly 31 can be set to be consistent.
  • the sealing sleeve assembly 31 is sleeved in the valve tube 10, and an annular gap is formed between the sealing sleeve assembly 31 and the inner wall of the portion with the larger inner diameter of the valve tube 10, and the annular gap constitutes the drainage groove 301.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)

Abstract

一种快排阀结构及清洗装置，快排阀结构包括：阀管（10），包括相对设置的第一端（10c）和第二端（10d），第一端（10c）用于与清洗槽（200）连接，阀管（10）上设置有至少一个排液口（101）；气缸（20），套设于阀管（10）内，并与第二端（10d）连接；阀芯组件（30），包括密封套组件（31）以及活塞杆（32）；密封套组件（31）套设于阀管（10）内，并与阀管（10）的内壁分别形成彼此密封且可相对滑动的动力密封面，并且密封套组件（31）与阀管（10）的动力密封面之间在靠近第一端（10c）的部分设有排液槽（301）；密封套组件（31）朝向第二端（10d）的一端可移动地套设于气缸（20）的外侧；活塞杆（32）的一端设置于气缸（20）内，另一端从气缸（20）的内部伸出，并与密封套组件（31）可沿活塞杆（32）的径向活动地连接。

Description

一种快排阀结构及清洗装置 技术领域
本申请涉及半导体技术领域，具体涉及一种快排阀结构及清洗装置。
背景技术
半导体槽式清洗设备用于清洗晶圆，请参阅图1，图1是一种半导体槽式清洗设备清洗晶圆的示意图，该半导体槽式清洗设备包括容置槽10a，以及设置于容置槽10a的底部侧面的阀门20a。清洗时，晶圆101a浸没于清洗药液的液面102a以下，清洗完成后，打开阀门20a，将清洗药液从容置槽10a排出。
排液时，在排液开始阶段，需要降低排液速度，否则药液的快速横向流动容易导致晶圆101a叠片，此阶段定义为慢排阶段。当液面102a下降到不会出现叠片风险时，阀门20a的阀门开度变大，药液快速排放，此阶段定义为快排阶段。
由于不同晶圆101a的厚度、所用药液的温度、粘度等工况不同，因而亟需提供一种可以对慢排阶段的排液时间进行调节的快排阀结构。
发明内容
针对上述技术问题，本申请提供一种快排阀结构及清洗装置，可以改善现有的半导体槽式清洗设备不能针对不同工况对慢排阶段的排液时间进行调节的问题。
为解决上述技术问题，第一方面，本申请实施例提供一种快排阀结构，包括：
阀管，包括相对设置的第一端和第二端，所述第一端用于与清洗槽连接，所述阀管上设置有至少一个排液口；
气缸，套设于所述阀管内，并与所述第二端连接；
阀芯组件，包括密封套组件以及活塞杆；
所述密封套组件套设于所述阀管内，并与所述阀管的内壁分别形成彼此密封且可相对滑动的动力密封面，并且所述密封套组件与所述阀管的所述动力密封面之间在靠近所述第一端的部分设有排液槽；所述密封套组件朝向所述第二端的一端可移动地套设于所述气缸的外侧；
所述活塞杆的一端设置于所述气缸内，另一端从所述气缸的内部伸出，并与所述密封套组件可沿所述活塞杆的径向活动地连接，用于带动所述密封套组件沿所述活塞杆的轴向移动；
所述密封套组件具有靠近所述第一端的第一极限位置和靠近所述第二端的第二极限位置，所述密封套组件位于所述第一极限位置时封堵所述第一端，所述密封套组件远离所述第一极限位置时，所述排液槽与所述排液口连通；所述密封套组件位于所述第二极限位置时避让至少部分所述排液口。
在一些实施例中，所述密封套组件包括：
密封堵头，套设于所述阀管内，并形成所述动力密封面；所述密封堵头朝向所述第二端的一端设有沿所述活塞杆的轴向延伸的盲孔；
支撑碗，朝向所述第二端的一端套设于所述气缸的外侧，所述支撑碗还套设于所述盲孔中；所述支撑碗的碗底设有阶梯孔，所述阶梯孔包括朝向所述第一端的直径较大的第一孔段，以及朝向所述第二端的直径较小的第二孔段；
锁止件，在所述活塞杆的径向上间隙配合地设置于所述阶梯孔中，所述活塞杆的另一端在所述活塞杆的径向上间隙配合地穿过所述第二孔段并与所述锁止件连接，所述锁止件分别与所述阶梯孔的台阶以及所述密封堵头在平行于所述活塞杆的轴向的方向上限位配合。
在一些实施例中，所述活塞杆设置于所述气缸内的一端将所述气缸的内部空间分隔为第一气腔和第二气腔；
所述密封套组件朝向所述第二端的端面与所述气缸以及所述阀管围成第三气腔；
所述气缸上设置有与所述第一气腔连通的第一气体通道、与所述第二气腔连通的第二气体通道，以及与所述第三气腔连通的呼吸孔；
所述第一气体通道和所述第二气体通道用于连接外部气压控制装置，所述呼吸孔将所述第三气腔与外部大气环境连通。
在一些实施例中，所述气缸包括：
气缸本体，朝向所述第一端的一端设有开口；
第一法兰，设置于所述气缸本体远离所述开口的一端；
端盖，封盖在所述开口处；
所述活塞杆从所述端盖伸出，并且所述活塞杆的外周与所述端盖的内周之间设置有第一密封圈，所述活塞杆设置于所述气缸本体内的一端与所述气缸本体的内壁之间设置有第二密封圈，以隔断所述第一气腔和所述第二气腔。
在一些实施例中，所述端盖朝向所述第二端的端面与所述气缸本体相接触的接触面为斜面，所述斜面与所述活塞杆的轴线之间的距离沿靠近所述第二端的方向递减；和/或，
所述端盖的外周与所述气缸本体的内周之间设有第三密封圈。
在一些实施例中，所述第一法兰朝向所述阀管的端面设置有定位凸台，所述定位凸台的外周壁与所述阀管的内壁配合；
所述气缸本体连接于所述定位凸台朝向所述阀管的端面。
在一些实施例中，所述阀管包括：
阀管本体；
第二法兰，设置于所述阀管本体的第一端，所述第二法兰的内径大于所述阀管本体的内径；
密封环，套设于所述第二法兰内，并抵接于所述阀管本体的第一端；
所述密封套组件位于所述第一极限位置时与所述密封环抵接，以将所述排液槽封堵。
在一些实施例中，所述密封套组件与所述密封环彼此相抵接的抵接面为斜面。
在一些实施例中，所述密封环远离所述阀管本体的一面设有第四密封圈。
在一些实施例中，所述密封套组件与所述阀管的内壁之间设有第五密封圈，所述第五密封圈靠近所述第二端设置。
在一些实施例中，所述排液槽为设置于所述密封套组件与所述阀管的内壁相对的表面的凹槽，并且所述凹槽由所述密封套组件靠近所述第一端的端面沿所述活塞杆的轴向延伸。
在一些实施例中，所述凹槽在所述密封套组件的周向上是非连续的。
在一些实施例中，所述密封套组件靠近所述第一端的部分的直径小于所述密封套组件靠近所述第二端的部分的直径，所述密封套组件靠近所述第一端的部分与所述阀管的内壁之间的环形间隙构成所述凹槽；
所述密封套组件靠近所述第二端的部分与所述阀管的内壁分别形成所述动力密封面。
在一些实施例中，所述阀管靠近所述第一端的部分的内径大于所述阀管靠近所述第二端的部分的内径，所述阀管靠近所述第一端的部分与所述密封套组件之间的环形间隙构成所述排液槽；
所述阀管靠近所述第二端的部分的内壁与所述密封套组件与所述阀管的内壁相对的表面分别形成所述动力密封面。
第二方面，本申请实施例还提供一种清洗装置，包括清洗槽，以及如上各实施例所述的快排阀结构；
所述清洗槽的侧壁设有排液管，所述快排阀结构与所述排液管连接。
如上所述，本实施例的快排阀结构，当阀芯组件从第一极限位置向第二极限位置运动的过程中，先后经历慢排阶段和快排阶段，可以通过控制阀芯组件在运动行程内的移动速度，来调节慢排阶段的排液时间。
此外，本实施例中由于活塞杆与密封套组件之间可沿活塞杆的径向活动地连接，从而可以避免密封套组件在活塞杆的径向上受力变形时对活塞杆施加径向的应力，损害活塞杆外壁密封结构的可靠性，还可以降低活塞杆与密封套组件之间的安装精度要求，即允许两者的同轴度误差适当增大。
附图说明
此处的附图被并入说明书中并构成本说明书的一部分，示出了符合本申请的实施例，并与说明书一起用于解释本申请的原理。为了更清楚地说明本申请实施例的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，对于本领域普通技术人员而言，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。
图1是一种半导体槽式清洗设备清洗晶圆的示意图；
图2是相关技术的一种快排阀结构的立体结构示意图；
图3是图2的剖视结构示意图；
图4是图2的快排阀结构的排液时间调节示意图；
图5是本申请实施例提供的一种清洗装置的结构示意图；
图6是本申请实施例提供的一种阀管连接状态的结构示意图；
图7-图10是本申请实施例提供的一种快排阀结构处于不同运动状态的结构示意图；
图11是本申请实施例提供的一种快排阀结构的剖视结构示意图；
图12是本申请实施例提供的一种活塞杆的连接结构示意图；
图13是本申请实施例提供的一种气缸本体(含第一法兰)的结构示意图；
图14是图8中E部分的放大结构示意图；
图15a-图15d为本申请实施例提供的一种阀管本体的结构示意图；
图16是本申请实施例提供的一种密封堵头的结构示意图；
图17是图16的A向示意图；
图18是阀管与阀芯组件组装后的A向示意图；
图19是本申请实施例提供的一种密封堵头的结构示意图；
图20a、图20b是本申请实施例提供的另一种阀管本体的结构示意图。
本申请目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。通过上述附图，已示出本申请明确的实施例，后文中将有更详细的描述。这些附图和文字描述并不是为了通过任何方式限制本申请构思的范围，而是通过参考特定实施例为本领域技术人员说明本申请的概念。
具体实施方式
这里将详细地对示例性实施例进行说明，其示例表示在附图中。下面的描述涉及附图时，除非另有表示，不同附图中的相同数字表示相同或相似的要素。以下示例性实施例中所描述的实施方式并不代表与本申请相一致的所有实施方式。相反，它们仅是与如所附权利要求书中所详述的、本申请的一些方面相一致的装置和方法的例子。
需要说明的是，在本文中，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者装置不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者装置所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括该要素的过程、方法、物品或者装置中还存在另外的相同要素，此外，本申请不同实施例中具有同样命名的部件、特征、要素可能具有相同含义，也可能具有不同含义，其具体含义需以其在该具体实施例中的解释或者进一步结合该具体实施例中上下文进行确定。
应当进一步理解，术语“包含”、“包括”表明存在所述的特征、步骤、操作、元件、组件、项目、种类、和/或组，但不排除一个或多个其他特征、步骤、操作、元件、组件、项目、种类、和/或组的存在、出现或添加。本申请使用的术语“或”、“和/或”、“包括以下至少一个”等可被解释为包括性的，或意味着任一个或任何组合。例如，“包括以下至少一个：A、B、C”意味着“以下任一个：A；B；C；A和B；A和C；B和C；A和B和C”，再如，“A、B或C”或者“A、B和/或C”意味着“以下任一个：A；B；C；A和B；A和C；B和C；A和B和C”。仅当元件、功能、步骤或操作的组合在某些方式下内在地互相排斥时，才会出现该定义的例外。
应当理解，尽管在本文可能采用术语第一、第二、第三等来描述各种信息，但这些信息不应限于这些术语。这些术语仅用来将同一类型的信息彼此区分开。例如，在不脱离本文范围的情况下，第一信息也可以被称为第二信息，类似地，第二信息也可以被称为第一信息。取决于语境，在本文中所使用的，单数形式“一”、“一个”和“该”旨在也包括复数形式，除非上下文中有相反的指示。
应当理解的是，术语“顶”、“底”、“上”、“下”、“竖直”、“水平”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。
为了便于描述，以下各实施例中，均是以水平面和竖直方向形成的正交空间为例进行说明，该前提条件不应理解为对本申请的限制。
请参阅图2和图3，图2是相关技术的一种快排阀结构的立体结构示意图，图3是图2的剖视结构示意图，该快排阀结构包括阀管10b、气缸20b、阀芯组件30b。阀管10b的侧壁设置有排液口11b，气缸20b设置在阀管10b的一端，阀管10b的另一端通过法兰12b连接清洗槽。阀芯组件30b包括密封外套31b和活塞杆32b，密封外套31b由外径较小的第一段和外径较大的第二段组成，两者连接处形成台阶33b。活塞杆32b的一端位于气缸20b中将气缸20b的内部空间分为两个气腔21b和22b，活塞杆32b的另一端与密封外套31b螺纹连接，气缸20b上设有与前述两个气腔21b和22b一一对应连通的气体通道h1、h2，通过调节气腔21b和22b的气压控制活塞杆32b带动密封外套31b一起使整个阀芯组件30b做往复运动。
具体来说，密封外套31b的第一段与法兰12b的内壁之间形成慢排通道h3，阀芯组件30b向靠近法兰12b的方向运动时，台阶33b可以完全封堵慢排通道h3，阀芯组件30b向远离法兰12b的方向运动时，清洗药液可以流经慢排通道h3并从排液口11b排出，形成慢排；当阀芯组件30b向远离法兰12b的方向运动，并且运动至密封外套31b的端面与法兰12b的端面分离并错开时，清洗药液直接通过排液口11b排出，形成快排。假设密封外套31b的第一段的长度为Lb，可以通过控制阀芯组件30b的移动速度Vb，来控制慢排时间Tb(Tb＝Lb/Vb)，请参阅图4，图4是该快排阀结构的排液时间调节示意图。
上述快排阀结构虽然可以针对不同工况，对慢排阶段的排液时间进行调节，但是阀芯组件30b在打开和关闭过程中，由于水的重力影响，密封外套31b因受到的上下方向的作用力不一致而存在径向力，而密封外套31b与活塞杆32b之间为螺纹连接，密封外套31b的运动依靠活塞杆32b导向，实践证明，活塞杆32b的密封圈在长期径向力作用下运动，很容易发生密封失效。基于此，本申请提供了一种快排阀结构及清洗装置。
首先介绍本申请的快排阀结构的应用环境。请参阅图5，图5是本申请实施例提供的一种清洗装置的结构示意图，该清洗装置可以包括快排阀结构100和清洗槽200，清洗槽200中可以竖直放置多个待清洗晶圆102，清洗槽200的侧壁设有排液管210，快排阀结构100与排液管210连接，以控制清洗完成后清洗药液的排放时间。本申请以下各实施例的快排阀结构100可以应用于该清洗装置。下文以具体实施例对本申请的快排阀结构100进行详细说明。
请参阅图5-图11，图6是本申请实施例提供的一种阀管连接状态的结构示意图，图7-图10是本申请实施例提供的一种快排阀结构处于不同运动状态的结构示意图，图11是本申请实施例提供的一种快排阀结构的剖视结构示意图。该快排阀结构可以包括：阀管10、气缸20和阀芯组件30。
阀管10包括相对设置的第一端10c和第二端10d，第一端10c用于与清洗槽200连接，阀管10上设置有至少一个排液口101，排液口101的具体形状、大小均不作特别限定。例如，可以如图6所示结构，即，沿着阀管10的圆周方向均匀设置的三个排液口101，排液口101可以是矩形、圆形、梯形等形状。气缸20套设于阀管10内，并与阀管10的第二端10d连接。
阀芯组件30包括密封套组件31以及活塞杆32。密封套组件31套设于阀管10内，并与阀管10的内壁分别形成彼此密封且可相对滑动的动力密封面，即密封套组件31与阀管10的内壁相对的表面以及阀管10的内壁均为密封面，并且二者可以相对滑动，密封套组件31与阀管10的动力密封面的配合可以对密封套组件31进行运动导向。密封套组件31与阀管10的动力密封面之间在靠近第一端10c的部分设有排液槽301。排液槽301的具体结构形式本实施例不作特别限定。例如，密封套组件31可以如同图3的密封外套31b的结构，密封套组件31可以包括外径较小的第一段和外径较大的第二段，第二段靠近第二端10d，该第二段与阀管10的内壁相对的表面形成上述动力密封面，第一段靠近第一端10c，该第一段与阀管10的内壁相对的表面与阀管10的内壁之间形成的环形间隙构成上述排液槽301。密封套组件31朝向第二端10d的一端可移动地套设于气缸20的外侧。在一些实施例中，密封套组件31的内周与气缸20的外周之间设有间隙302，以确保两者发生相对运动时不会产生接触摩擦。
活塞杆32的一端设置于气缸20内，另一端从气缸20的内部伸出，并与密封套组件31可沿活塞杆32的径向活动地连接，用于带动密封套组件31沿活塞杆32的轴向移动。比如，活塞杆32与密封套组件31之间连接时，活塞杆32的外周与密封套组件31为间隙配合，而活塞杆32与密封套组件31在平行于活塞杆32的轴向的方向上限位配合，从而可以在实现带动密封套组件31沿活塞杆32的轴向移动的基础上，避免密封套组件31在活塞杆32的径向上受力变形时对活塞杆32施加沿活塞杆32的径向的应力，损害活塞杆32外壁密封结构的可靠性。
密封套组件31具有靠近第一端10c的第一极限位置Pmin和靠近第二端10d的第二极限位置Pmax，第一极限位置Pmin至第二极限位置Pmax的距离为阀芯组件30的运动行程L。请参阅图7-图10，其示出了密封套组件31从第一极限位置Pmin运动至第二极限位置Pmax的整个过程，其中，图10中第二极限位置Pmax仅作为示意，实际应用中的第二极限位置Pmax还可以相对于图10中第二极限位置Pmax向左侧偏移一小段距离，以在实际中能够控制密封套组件31在图10中第二极限位置Pmax的基础上继续向左侧移动一小段距离。
密封套组件31位于第一极限位置Pmin时封堵第一端10c(可以用于清洗阶段)，请参阅图7；密封套组件31远离第一极限位置Pmin时，排液槽301与排液口101连通，请参阅图8和图9，在密封套组件31由第一极限位置Pmin运动至图9所示的临界位置(即密封套组件31刚好封堵排液口101)时，药液只能先流经排液槽301，然后再通过排液口101排出，这个阶段均属于慢排阶段。密封套组件31在远离该临界位置时，避让部分排液口101，此时药液可以直接从排液口101排出，进入快排阶段；密封套组件31位于第二极限位置Pmax时避让至少部分排液口101，即，密封套组件31的外周遮挡部分排液口101或不遮挡排液口101，请参阅图10，密封套组件31朝向阀管10的第一端10c的端面暴露于排液口101中，药液可以直接从排液口101排出，排放速度迅速增大，对应快排阶段。可以理解的是，第二极限位置Pmax可以设计为：当密封套组件31位于第二极限位置Pmax时完全避让排液口101，排液速度可以达到最大，具体可以根据需要进行设计。本实施例的快排阀结构的排液时间调节示意图可以参照图4，需要说明的是，排液口101由刚好打开至完全打开的过程，排液速度是一个连续性迅速增加的过程，但是对应的时间非常短，因此图4中的“脉冲形”曲线未体现这一过程。
本实施例的快排阀结构，当阀芯组件30从第一极限位置Pmin运动至中间临界位置(参阅图9)的过程中对应慢排阶段，由中间的临界位置继续运动至第二极限位置Pmax时对应快排阶段，可以通过控制阀芯组件30在运动行程L内的移动速度，来调节慢排阶段的排液时间。此外，本实施例中由于活塞杆32与密封套组件31之间在活塞杆32的径向为可活动地连接，从而可以避免密封套组件31在活塞杆32的径向上受力变形时对活塞杆32施加径向的应力，损害活塞杆32外壁密封结构的可靠性，还可以降低活塞杆32与密封套组件31之间的安装精度要求，即允许两者的同轴度误差适当增大。
作为一个活塞杆32与密封套组件31可沿活塞杆32的径向活动地连接的示例，请继续参阅图8、图9和图11，密封套组件31可以包括：密封堵头311、支撑碗312和锁止件313。密封堵头311套设于阀管10内，并与阀管10的内壁之间形成前述动力密封面；密封堵头311朝向第二端10d的一端设有沿轴向延伸的盲孔303。支撑碗312朝向第二端10d的一端套设于气缸20的外侧，在一些实施例中，支撑碗312的内周与气缸20的外周之间设有间隙302，以确保两者发生相对运动时不会产生接触摩擦。支撑碗312还套设于盲孔303中；支撑碗312的碗底设有阶梯孔304，阶梯孔304包括朝向第一端10c的直径较大的第一孔段3041，以及朝向第二端10d的直径较小的第二孔段3042；锁止件313在活塞杆32的径向上间隙配合地设置于阶梯孔304中，活塞杆32的另一端在活塞杆32的径向上间隙配合地穿过第二孔段3042并与锁止件313连接，锁止件313分别与阶梯孔304的台阶以及密封堵头311在平行于活塞杆32的轴向的方向上限位配合，以实现活塞杆32带动密封套组件31沿活塞杆32的轴向移动。由于锁止件313在活塞杆32的径向上间隙配合地设置于阶梯孔304中，可以沿活塞杆32的径向进行活动，因此活塞杆32也可以随锁止件313沿活塞杆32的径向活动。
密封堵头311和支撑碗312之间可以通过螺纹结构连接。作为一个示例，请继续参阅图8，密封堵头311和支撑碗312之间的接触面为阶梯面，该阶梯面可以包括两段、三段等多段台阶面，图8中该接触面为由三段台阶面构成的阶梯结构，螺纹结构315设置于三段台阶面中位于中间的台阶面，这样可以在保证装配的稳定性的情况下，降低装配难度。作为一些示例，支撑碗312可以是PP，PVC，PVDF等聚合物材料，其刚性较高，耐温性能好并且耐腐蚀，内嵌于密封堵头311内部，可以为密封套组件31提供刚性支撑；密封堵头311可以是PTFE材质，可以提供较高的纯度和化学稳定性，与化学药液介质接触时，不产生腐蚀，磨损等问题，也不污染药液。
需要说明的是，锁止件313与活塞杆32的连接方式可以有多种，比如，两者之间可以是轴孔配合结构，例如，可以在活塞杆32朝向第一端10c的一端设置沿活塞杆32的径向延伸的通孔，锁止件313为与该通孔配合的销钉。在其他实施例中，活塞杆32朝向第一端10c的一端可以设置外螺纹，锁止件313可以是螺母或螺帽等具有内螺纹的部件，该部件的内螺纹与活塞杆32朝向第一端10c的一端的外螺纹配合。在此基础上，该部件还可以设置成凸字形，同时与阶梯孔304的第一孔段3041和第二孔段3042在活塞杆32的径向上间隙配合，如图12所示。
本实施例中，活塞杆32通过锁止件313与密封套组件31连接，并且与密封套组件31在活塞杆32的径向上间隙配合，从而可以避免密封套组件31在活塞杆32的径向上受力变形时对活塞杆32施加径向的应力，损害活塞杆32外壁密封结构的可靠性。
在一个实施例中，请参阅图9、图11和图13，图13是本申请实施例提供的一种气缸本体的结构示意图，本申请提供了一种实现气缸驱动活塞杆的详细结构方案。该实施例中，活塞杆32设置于气缸20内的一端将气缸20的内部空间分隔为第一气腔305和第二气腔306；密封套组件31朝向第二端10d的端面与气缸20以及阀管10围成第三气腔307；气缸20上设置有与第一气腔305连通的第一气体通道201、与第二气腔306连通的第二气体通道202，以及与第三气腔307连通的呼吸孔203。第一气体通道201和第二气体通道202用于连接外部气压控制装置，呼吸孔203将第三气腔307与外部大气环境连通。
工作时，以图9为例，当第一气体通道201通气，第二气体通道202排气时，活塞杆32带动密封套组件31向右侧运动，反之，当第一气体通道201排气，第二气体通道202通气时，活塞杆32带动密封套组件31向左侧运动。运动过程中，第三气腔307的体积会增大或减小，而呼吸孔203将第三气腔307与外部大气环境连通，起到平衡第三气腔307内外部气压的作用。本实施例中，呼吸孔203远离药液排放通道，可以防止药液通过呼吸孔203进入到第三气腔307内。
作为一个示例，请继续参阅图7、图10和图13，气缸20可以包括：气缸本体21、端盖22和第一法兰23。气缸本体21朝向第一端10c的一端设有开口，端盖22封盖在该开口处。第一法兰23设置于气缸本体21远离上述开口的一端，气缸本体21可以通过第一法兰23连接在阀管10的第二端10d。活塞杆32从端盖22伸出，并且活塞杆32的外周与端盖22的内周之间设置有第一密封圈41，用于对二者之间的间隙进行密封。活塞杆32设置于气缸本体21内的一端与气缸本体21的内壁之间设置有第二密封圈42，以隔断第一气腔305和第二气腔306。在一些实施例中，为了提高密封性，端盖22朝向阀管10的第二端10d的端面与气缸本体21相接触的接触面51为斜面，该斜面与活塞杆32的轴线之间的距离沿靠近阀管10的第二端10d的方向递减。对应的，气缸本体21的内壁具有用于与接触面51贴合的斜面。在一些实施例中，端盖22的外周与气缸本体21的内周之间设有第三密封圈43，用于对二者之间的间隙进行密封。
在一个实施例中，请参阅图13和图14，图14是图8中E部分的放大结构示意图，第一法兰23朝向阀管10的端面设置有定位凸台231，定位凸台231的外周壁与阀管10的内壁限位配合，气缸本体21连接于定位凸台231朝向阀管10的端面。本实施例通过在第一法兰23上设置定位凸台231与阀管10进行装配，可以确保两者的装配同轴度。
在一个实施例中，本申请还提供了一种阀管的具体实施例，请参阅图6、图7和图15a-图15d，图15a-图15d为本申请实施例提供的一种阀管本体的结构示意图，阀管10可以包括：阀管本体11、第二法兰12和密封环13。排液口101设置于阀管本体11上。第二法兰12设置于阀管本体11的第一端10c，第二法兰12的内径大于阀管本体11的内径，密封环13套设于第二法兰12内，并抵接于阀管本体11的第一端10c；密封套组件31位于第一极限位置Pmin时与密封环13抵接，以将排液槽301封堵。应用时，可以采用转接法兰220与第二法兰12将排液管210的法兰夹持固定于二者之间，以实现阀管本体11与排液管210的固定连接，从而实现连接清洗槽200。可以理解的是，排液口101与阀管本体11的第一端10c的距离L0对应慢排阶段的行程。作为一个示例，密封环13可以是PTFE或PVDF材质，避免与药液接触时发生腐蚀，以及避免污染药液。作为一个示例，转接法兰220可以是有两个半环构成。
图3所示相关技术的方案中，阀芯组件30b的推力会直接作用于法兰12b上，而法兰12b一般为PTFE材质，质地较软，尺寸稳定性很差，很容易变形引起整体失效。本申请的实施例中，密封环13只承受阀芯组件30的挤压力，阀芯组件30的推力最终会传递至阀管10上，而阀管10采用PVC、PP、PVDF等相对PTFE刚度更好的材料，因此，本实施例的尺寸稳定性更好。
在一些实施例中，请参阅图10，为了增强连接处的密封性，密封套组件31与密封环13彼此相抵接的抵接面52为斜面。具体地，密封环13朝向阀管本体11的端面的内周边缘区域为斜面，该斜面位于阀管本体11的第一端10c的端面内侧，且斜面与密封环13的轴线之间的距离沿远离阀管本体11的第一端10c的方向递减；密封套组件31朝向密封环13的端面的外周边缘区域为斜面，该斜面在密封套组件31位于第一极限位置Pmin时与密封环13的斜面相贴合。
在一些实施例中，密封环13远离阀管本体11的一面设有第四密封圈44。并进一步地，密封套组件31与阀管10的内壁之间设有第五密封圈45，第五密封圈45靠近第二端10d设置。第五密封圈45可以设置一个，或者一个以上，第五密封圈45可以阻挡药液通过动态密封面与阀管10的内壁之间的间隙渗入第三气腔307，并通过密封套组件31与气缸20之间的间隙302进入到内部腐蚀第一密封圈41，破坏气缸20的密封性，以及高温药液影响气缸20的尺寸。
本申请各实施例中，排液槽301可以为设置于密封套组件31与阀管10的内壁相对的表面的凹槽，并且该凹槽由密封套组件31靠近第一端10c的端面沿轴向延伸。当然，排液槽301也可以是设置于阀管10的内壁的凹槽。
作为一个示例，如上文所述，排液槽301可以采用如图3所示的排液槽结构来实现，具体来说，密封套组件31靠近第一端10c的部分的直径小于密封套组件31靠近第二端10d的部分的直径，即，密封套组件31为阶梯轴的结构。密封套组件31直径较小的部分(即，密封套组件31靠近第一端10c的部分)与阀管10的内壁之间的环形间隙构成排液槽301(即上述凹槽，该凹槽为环形凹槽)，密封套组件31直径较大的部分(即，密封套组件31靠近第二端10d的部分)与阀管10的内壁分别形成上述动力密封面。
作为一个排液槽的实现方式的优选示例，请参阅13-图18，图16是本申请实施例提供的一种密封堵头的结构示意图，图17是图16的A向示意图，图18是阀管与阀芯组件30组装后的A向示意图，图19是本申请实施例提供的一种密封堵头的结构示意图，排液槽301为设置于密封套组件31与阀管10的内壁相对的表面的凹槽，该凹槽由密封套组件31靠近第一端10c的端面沿活塞杆32的轴向延伸，在此基础上，该凹槽在密封套组件31的周向上是非连续的，也就是说，密封套组件31在平行于活塞杆32的轴向的方向上各个位置的直径保持不变，只在密封套组件31的与阀管10的内壁相对的表面的局部位置形成排液槽301(在周向上非连续的凹槽)，这样可以使密封套组件31与阀管10之间的配合更稳定。在这种情况下，排液槽301可以设置一个或多个，当设置多个时，可以沿密封套组件31的周向均匀分布。密封套组件31的表面还可以设置数量不限的环形槽314，用于设置相应数量的第五密封圈45。排液槽301的径向截面(垂直于活塞杆32的轴向)形状可以是如图17所示的圆弧形，也可以是如图19所示的矩形，还可以是其他规则或不规则的形状。
本实施例的排液槽301相比图3所示结构，可以具有更长的慢排阶段行程。并且，图3所示结构是通过变径(即阶梯轴)实现慢排阶段，本实施例由于无环形间隙，不存在台阶，整体结构的装配及运动更加稳定。作为一个示例，所有排液槽301的径向截面面积之和在100-300平方毫米之间，可以适应多种工况的慢排要求。
作为另一个排液槽的实现方式的示例，请参阅图20a和图20b，图20a、图20b是本申请实施例提供的另一种阀管本体的结构示意图，阀管10靠近第一端10c的部分的内径d1大于阀管10靠近第二端10d的部分的内径d2，阀管10内径较大的部分(即，阀管10靠近第一端10c的部分)与密封套组件31之间的环形间隙构成排液槽301。阀管10直径较小的部分(即，阀管10靠近第二端10d的部分)的内壁与密封套组件31与阀管10的内壁相对的表面分别形成上述动力密封面。本实施例中，密封套组件31上各处的外径可以设置为一致，通过将阀管10的内径设置为一端大一端小(d1＞d2)的阶梯孔结构，密封套组件31套设在阀管10内，并且与阀管10内径较大的部分的内壁之间形成环形间隙，该环形间隙构成排液槽301。
以上对本申请所提供的一种快排阀结构及清洗装置进行了详细介绍，本文中应用了具体个例对本申请的原理及实施方式进行了阐述。需要说明的是，在本申请中，对各个实施例的描述都各有侧重，某个实施例中没有详述或记载的部分，可以参见其它实施例的相关描述。
以上仅为本申请的优选实施例，并非因此限制本申请的专利范围，本申请技术方案的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，凡是利用本申请说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，只要这些技术特征的组合不存在矛盾，均同理包括在本申请的专利保护范围内。

Claims (15)

  1. 一种快排阀结构，其特征在于，包括：
    阀管，包括相对设置的第一端和第二端，所述第一端用于与清洗槽连接，所述阀管上设置有至少一个排液口；
    气缸，套设于所述阀管内，并与所述第二端连接；
    阀芯组件，包括密封套组件以及活塞杆；
    所述密封套组件套设于所述阀管内，并与所述阀管的内壁分别形成彼此密封且可相对滑动的动力密封面，并且所述密封套组件与所述阀管的所述动力密封面之间在靠近所述第一端的部分设有排液槽；所述密封套组件朝向所述第二端的一端可移动地套设于所述气缸的外侧；
    所述活塞杆的一端设置于所述气缸内，另一端从所述气缸的内部伸出，并与所述密封套组件可沿所述活塞杆的径向活动地连接，用于带动所述密封套组件沿所述活塞杆的轴向移动；
    所述密封套组件具有靠近所述第一端的第一极限位置和靠近所述第二端的第二极限位置，所述密封套组件位于所述第一极限位置时封堵所述第一端，所述密封套组件远离所述第一极限位置时，所述排液槽与所述排液口连通；所述密封套组件位于所述第二极限位置时避让至少部分所述排液口。
  2. 根据权利要求1所述的快排阀结构，其特征在于，所述密封套组件包括：
    密封堵头，套设于所述阀管内，并形成所述动力密封面；所述密封堵头朝向所述第二端的一端设有沿所述活塞杆的轴向延伸的盲孔；
    支撑碗，朝向所述第二端的一端套设于所述气缸的外侧，所述支撑碗还套设于所述盲孔中；所述支撑碗的碗底设有阶梯孔，所述阶梯孔包括朝向所述第一端的直径较大的第一孔段，以及朝向所述第二端的直径较小的第二孔段；
    锁止件，在所述活塞杆的径向上间隙配合地设置于所述阶梯孔中，所述活塞杆的另一端在所述活塞杆的径向上间隙配合地穿过所述第二孔段并与所述锁止件连接，所述锁止件分别与所述阶梯孔的台阶以及所述密封堵头在平行于所述活塞杆的轴向的方向上限位配合。
  3. 根据权利要求1所述的快排阀结构，其特征在于，所述活塞杆设置于所述气缸内的一端将所述气缸的内部空间分隔为第一气腔和第二气腔；
    所述密封套组件朝向所述第二端的端面与所述气缸以及所述阀管围成第三气腔；
    所述气缸上设置有与所述第一气腔连通的第一气体通道、与所述第二气腔连通的第二气体通道，以及与所述第三气腔连通的呼吸孔；
    所述第一气体通道和所述第二气体通道用于连接外部气压控制装置，所述呼吸孔将所述第三气腔与外部大气环境连通。
  4. 根据权利要求3所述的快排阀结构，其特征在于，所述气缸包括：
    气缸本体，朝向所述第一端的一端设有开口；
    第一法兰，设置于所述气缸本体远离所述开口的一端；
    端盖，封盖在所述开口处；
    所述活塞杆从所述端盖伸出，并且所述活塞杆的外周与所述端盖的内周之间设置有第一密封圈，所述活塞杆设置于所述气缸本体内的一端与所述气缸本体的内壁之间设置有第二密封圈，以隔断所述第一气腔和所述第二气腔。
  5. 根据权利要求4所述的快排阀结构，其特征在于，所述端盖朝向所述第二端的端面与所述气缸本体相接触的接触面为斜面，所述斜面与所述活塞杆的轴线之间的距离沿靠近所述第二端的方向递减；和/或，
    所述端盖的外周与所述气缸本体的内周之间设有第三密封圈。
  6. 根据权利要求4所述的快排阀结构，其特征在于，所述第一法兰朝向所述阀管的端面设置有定位凸台，所述定位凸台的外周壁与所述阀管的内壁配合；
    所述气缸本体连接于所述定位凸台朝向所述阀管的端面。
  7. 根据权利要求1所述的快排阀结构，其特征在于，所述阀管包括：
    阀管本体；
    第二法兰，设置于所述阀管本体的第一端，所述第二法兰的内径大于所述阀管本体的内径；
    密封环，套设于所述第二法兰内，并抵接于所述阀管本体的第一端；
    所述密封套组件位于所述第一极限位置时与所述密封环抵接，以将所述排液槽封堵。
  8. 根据权利要求7所述的快排阀结构，其特征在于，所述密封套组件与所述密封环彼此相抵接的抵接面为斜面。
  9. 根据权利要求7所述的快排阀结构，其特征在于，所述密封环远离所述阀管本体的一面设有第四密封圈。
  10. 根据权利要求1所述的快排阀结构，其特征在于，所述密封套组件与所述阀管的内壁之间设有第五密封圈，所述第五密封圈靠近所述第二端设置。
  11. 根据权利要求1所述的快排阀结构，其特征在于，所述排液槽为设置于所述密封套组件与所述阀管的内壁相对的表面的凹槽，并且所述凹槽由所述密封套组件靠近所述第一端的端面沿所述活塞杆的轴向延伸。
  12. 根据权利要求11所述的快排阀结构，其特征在于，所述凹槽在所述密封套组件的周向上是非连续的。
  13. 根据权利要求11所述的快排阀结构，其特征在于，所述密封套组件靠近所述第一端的部分的直径小于所述密封套组件靠近所述第二端的部分的直径，所述密封套组件靠近所述第一端的部分与所述阀管的内壁之间的环形间隙构成所述凹槽；
    所述密封套组件靠近所述第二端的部分与所述阀管的内壁分别形成所述动力密封面。
  14. 根据权利要求1所述的快排阀结构，其特征在于，所述阀管靠近所述第一端的部分的内径大于所述阀管靠近所述第二端的部分的内径，所述阀管靠近所述第一端的部分与所述密封套组件之间的环形间隙构成所述排液槽；
    所述阀管靠近所述第二端的部分的内壁与所述密封套组件与所述阀管的内壁相对的表面分别形成所述动力密封面。
  15. 一种清洗装置，其特征在于，包括清洗槽，以及权利要求1-14任一项所述的快排阀结构；
    所述清洗槽的侧壁设有排液管，所述快排阀结构与所述排液管连接。
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CN210631014U (zh) * 2019-06-17 2020-05-29 张翼 减压水杯
CN115839435A (zh) * 2023-01-03 2023-03-24 海普瑞(常州)洁净系统科技有限公司 用于12英寸晶圆半导体制造的法兰式快排阀
CN118328154A (zh) * 2024-04-16 2024-07-12 北京北方华创微电子装备有限公司 一种快排阀结构及清洗装置

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