WO2024217271A1 - 基于射流的在线距离测量的设备和方法 - Google Patents

基于射流的在线距离测量的设备和方法 Download PDF

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Publication number
WO2024217271A1
WO2024217271A1 PCT/CN2024/085336 CN2024085336W WO2024217271A1 WO 2024217271 A1 WO2024217271 A1 WO 2024217271A1 CN 2024085336 W CN2024085336 W CN 2024085336W WO 2024217271 A1 WO2024217271 A1 WO 2024217271A1
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Prior art keywords
jet
unit
conductive
resistance
distance measurement
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French (fr)
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韩福柱
唐文翰
徐星汉
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Tsinghua University
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Tsinghua University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M10/00—Hydrodynamic testing; Arrangements in or on ship-testing tanks or water tunnels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/30—Assessment of water resources

Definitions

  • the embodiments of the present application relate to the field of processing measurement technology, and in particular to a device and method for online distance measurement based on jet.
  • Water-guided laser processing is a special processing technology that combines jet and laser.
  • the jet can only remain stable within a certain length range, that is, in laminar form. Once the length is exceeded, the liquid is no longer stable. When the jet liquid is unstable, the laser cannot be fully reflected in it, limiting the processing length.
  • measuring the jet will interfere with the jet and break it up, resulting in low measurement accuracy; or the measuring equipment depends on a specific position or a specific collision object, making it difficult to perform real-time measurement during the processing process.
  • the present application aims to solve one of the technical problems in the related art at least to some extent.
  • an embodiment of one aspect of the present application proposes a device for online distance measurement based on a jet, which measures the electrical signal of a stable conductive jet to obtain the jet length and can measure the jet in real time.
  • the device has high measurement accuracy and little interference with the jet.
  • Another embodiment of the present application provides a method for online distance measurement based on jet flow.
  • a device for online distance measurement based on jet flow comprising:
  • a jet unit used for providing a conductive jet for the device, the jet unit at least comprising a metal structure part, the metal structure part is in contact with the water cavity;
  • the detection unit is used to detect the electrical signal between the metal structure part of the jet unit and the processed part of the mechanical unit, so as to judge the state of the conductive jet according to the change value of the detected electrical signal.
  • the device for online jet measurement according to the above embodiment of the present application may also have the following additional technical features:
  • the conductive jet is regarded as a conductor of fixed width when in a stable state, and the resistance value of the conductor is:
  • ⁇ is the resistivity of the jet
  • l is the length of the conductive jet
  • S is the cross-sectional area of the conductive jet.
  • the resistance value of the conductor includes the series resistance of the jet unit resistance, the conductive jet resistance and the mechanical unit resistance.
  • the fluidic unit includes a coupling unit, and the coupling unit moves up and down to obtain up and down movement data;
  • the detection unit detects and obtains the electric signal change value according to the up and down movement data, so as to obtain the maximum value of the conductive jet length in a stable state according to the electric signal change value.
  • the detection unit detects the real-time conductive jet length and determines whether the conductive jet is interrupted based on the resistance value.
  • a conductive The detection unit detects the electrical signal between the metal structure part of the jet unit and the conductive structure of the processing part of the mechanical unit.
  • the jet-based online distance measurement device also includes a displacement unit, which is connected to the jet unit or the workpiece to enable the jet unit to move relative to the workpiece in a plane orthogonal to the up and down directions.
  • the present application proposes a method for online distance measurement based on jet flow, comprising:
  • the voltage value between the metal structure part of the jet unit and the processed part of the mechanical unit is detected based on the data processing result, so as to judge the state of the conductive jet according to the detected voltage value.
  • the device and method for online distance measurement based on jet in the embodiments of the present application realize online detection of the state and length of the conductive jet.
  • the jet length reflects the state of the processing system and the processing progress, and the actual processing situation can be understood.
  • FIG1 is a schematic structural diagram of a device for online distance measurement based on jet according to an embodiment of the present application
  • FIG. 2 is a diagram showing another structure of a device for online distance measurement based on jet according to an embodiment of the present application. Schematic diagram;
  • FIG3 is a schematic diagram of a detection signal variation trend according to an embodiment of the present application.
  • FIG4 is a schematic structural diagram of another device for online distance measurement based on jet according to an embodiment of the present application.
  • FIG5 is a flow chart of a method for online distance measurement based on jet according to an embodiment of the present application.
  • FIG6 is a schematic structural diagram of another jet-based online distance measurement device according to an embodiment of the present application.
  • FIG1 is a schematic structural diagram of a device for online distance measurement based on jet according to an embodiment of the present application.
  • the device for online distance measurement based on jet flow comprises:
  • a jet unit 200 used to provide a conductive jet for the device, the jet unit at least comprising a metal structure portion, the metal structure portion being in contact with the water cavity;
  • the mechanical unit 300 includes a processing part
  • the detection unit 400 is used to detect the electrical signal between the metal structure part of the jet unit 200 and the processed part of the mechanical unit 300, so as to judge the state of the conductive jet according to the change value of the detected electrical signal.
  • the jet unit 200 provides a conductive jet for the device, at least a part of which is a metal structure and contacts the water cavity; the mechanical unit 300 can be an actual processed part or a fixed detection surface; the detection unit 400 determines the state of the conductive jet by loading a voltage between the metal part of the jet unit 200 and the mechanical unit 300, and detecting the voltage and/or current.
  • the conductive jet can use an electrolyte solution such as water, a mixture of alcohol and glycerol as a conductive fluid, and the fluid can also be an acidic or alkaline electrolyte solution.
  • the conductive jet uses a conductive fluid for the purpose of measuring the electrical signal of the fluid and correlating the change value of the electrical signal with the length of the conductive jet, and the corresponding length of the conductive jet is obtained by measuring the electrical signal of the fluid.
  • the laser unit 100 provides laser for the device, and the laser unit 100 is not required to measure the length of the conductive jet. Turning on the laser unit 100 can achieve simultaneous measurement of the workpiece and laser processing, without removing the workpiece for measurement, and avoiding re-clamping and alignment, which can avoid new errors caused by re-clamping and avoid measurement affecting processing efficiency. The simultaneous measurement of the workpiece and laser processing helps to shorten the processing steps and improve processing accuracy and efficiency.
  • the conductive jet when it is in a stable state, it can be regarded as a conductor with a fixed width, and its resistance is:
  • ⁇ is the resistivity of water
  • l is the length of the conductive jet
  • S is the cross-sectional area of the conductive jet.
  • the actual overall resistance is a series connection of the conductive jet resistance and the resistance of other parts of the measurement loop.
  • the resistance of other parts of the measurement circuit may include the resistance of the jet unit and the mechanical unit. Resistance, etc. Since the cross-sectional area of the conductive jet is much smaller than that of the water cavity of the jet unit, the resistance of the water in the jet unit is much smaller than that of the conductive jet; the other part of the jet unit is a large area of metal, and its resistance can also be ignored; the same is true for the mechanical unit. In the measurement loop formed by the jet unit, the conductive jet and the mechanical unit, the resistance of the conductive jet is greater than the resistance of other parts to ensure that the change of the conductive jet resistance affects the change of the measurement loop resistance.
  • the resistance detected by the detection unit is substantially the resistance of the conductive jet.
  • the detection unit can detect a regular voltage and/or resistance value, and thus infer the length of the conductive jet.
  • the conductive jet when the conductive jet is in an unstable state, since the water flow is no longer in a stable state, its resistance value will fluctuate or even break, thereby detecting whether the conductive jet is in a stable state.
  • FIG2 is a schematic diagram of a device connection for determining the length of a conductive jet shown in the present application.
  • the jet unit can be a coupling unit 201, which moves up and down to obtain up and down movement data; the detection unit 300 obtains the electrical signal change value based on the up and down movement data, so as to obtain the maximum value of the conductive jet length in a stable state based on the electrical signal change value.
  • the coupling unit 201 moves up and down, and the detection unit 400 detects the change of the electrical signal to determine the stable maximum length.
  • Part 1 of FIG3 is a stable stage, and the detected voltage value increases with the downward moving distance; then the conductive jet breaks up, and the voltage rises to the power supply voltage.
  • FIG3 is a schematic diagram of the equipment connection for online monitoring in a processing state shown in the present application.
  • the mechanical unit 300 moves along three axes.
  • the detection unit 400 detects the length of the conductive jet and determines whether the jet is interrupted by the resistance value, thereby determining the processing loading and processing depth.
  • a conductive structure is provided on the non-measurement surface of the workpiece, and the detection unit detects the electrical signal between the metal structure portion of the jet unit and the conductive structure of the workpiece of the mechanical unit.
  • the conductive structure is installed on the non-measurement surface of the workpiece, which can be the side of the workpiece, etc.
  • the conductive jet flows to the non-measurement surface to form a complete loop between the jet unit, the workpiece and the detection unit.
  • the jet When the jet is in a stable state, the jet can be regarded as a conductor with uniform conductivity, and its electrical properties can be measured and calculated.
  • the resistance of the stable conductive jet can be calculated by the following formula;
  • L is the total length of the jet
  • l is the distance from the jet section to the nozzle
  • S(l) is the cross-sectional area of the jet at the distance from the nozzle
  • ⁇ is the conductivity of the electrolyte solution.
  • the cross-sectional area S(l) of the jet changes in l and is considered as a constant S. If the cross-sectional area S of the jet is known, the total length L of the jet can be calculated by measuring the resistance of the jet, thereby realizing the measurement of the distance between the jet unit and the workpiece.
  • the detection unit uses a resistance meter to detect the resistance between the workpiece and the jet unit.
  • the resistance of the workpiece itself is too large to be detected by the resistance meter to calculate the resistance of the conductive jet.
  • the detection unit uses a resistance meter to detect the resistance between the workpiece and the jet unit.
  • the conductive structure set on the non-measuring surface of the workpiece can avoid the resistance meter from detecting the resistance of the workpiece.
  • the conductive structure can be a conductive material adhered to the non-detection surface of the workpiece.
  • the conductive material can be a double-conducting copper tape.
  • the two ends of the resistance meter are respectively in contact with the double-conducting copper tape and the metal structure of the jet unit.
  • the resistance measured by the resistance meter includes the series connection of the jet unit resistance, the jet resistance and the double-conducting copper tape resistance. Resistance, jet unit resistance and double-conducting copper tape resistance can be ignored.
  • the jet unit can be adjusted before processing, or on-machine measurement can be performed to detect the processing status when the jet unit is working. In the initial state, the jet contacts the workpiece and liquid accumulates. The liquid is connected to the measuring end of the resistance meter to measure the resistance. When the liquid flows to the non-measuring surface of the workpiece and contacts the conductive material, the liquid can be connected to the measuring end of the resistance meter to form a loop.
  • the jet-based online distance measurement device further includes a displacement unit connected to the jet unit or the workpiece so that the jet unit moves relative to the workpiece in a plane orthogonal to the up and down directions.
  • the workpiece has an edge position.
  • the jet and the workpiece change from a non-contact state to a contact state, so that the detection unit can detect the change of electrical characteristics.
  • the displacement unit records the position information to measure the position of the jet, which is convenient for the equipment to confirm the jet position by tool setting, or measure the shape of the surface to be processed of the workpiece.
  • the resistance value of the jet in the laminar state is obtained.
  • the cross-sectional area of the jet is used as a constant.
  • the jet length is calculated according to the resistance value of the jet.
  • the position measurement is completed according to the jet length, the state change of the jet and the position information recorded by the displacement unit.
  • Tool setting and angle adjustment can be performed before processing, and on-machine measurement can be performed during processing to detect the processing state.
  • the displacement unit can move the jet in the front, back, left and right directions of the workpiece. Unlike the coupling unit moving in the up and down directions of the workpiece, the displacement unit causes the jet and the workpiece to move relative to each other. When the jet contacts the workpiece, an electrical signal is generated. When the jet leaves the workpiece, the electrical signal is interrupted. There is no need to disassemble the workpiece and then repeatedly clamp the workpiece to detect the processing state, simplifying the process and improving the processing efficiency.
  • the length and state of the conductive jet are detected to measure the processing position information, and the measurement method adopted by the present application does not need to add complex and expensive equipment, and does not require major adjustments to the overall structure.
  • online depth measurement can be achieved.
  • measure the processing status of the workpiece can also perform tool setting, angle adjustment, and on-machine measurement of the workpiece to improve processing efficiency.
  • the equipment and method of the present application can be applied to the detection and measurement of workpieces before processing; online monitoring of workpieces during processing, and morphology and roughness detection of workpieces after processing.
  • this embodiment further provides a method for online distance measurement based on jet flow, including:
  • processing parameters include the required processing shape and basic machine tool parameters.
  • the initial position information is obtained through the physical change state of the conductive jet close to the workpiece.
  • the workpiece of the mechanical unit is processed to obtain the data processing result; during the processing, the actual processing shape can be obtained according to the processing parameter data and the conductive jet data.
  • the workpiece unit has an edge position.
  • the conductive jet can be brought close to the workpiece, and the position information can be obtained by detecting the state change of the conductive jet. It can be understood that when performing water-conducting laser processing, the laser data of the laser unit belongs to the processing parameters.
  • the conductive jet when it is in a stable state, it is regarded as a conductor with a fixed width, and the resistance value of the conductor is:
  • ⁇ is the resistivity of the jet
  • l is the length of the conductive jet
  • S is the cross-sectional area of the conductive jet.
  • the resistance value of the conductor includes the series resistance of the jet unit resistance, the conductive jet resistance and the mechanical unit resistance.
  • the resistance value is obtained based on the conductive jet. Data of monotonic variation of electrojet length.
  • the jet-based online distance measurement method of the embodiment of the present application online detection of the conductive jet state and the conductive jet length is achieved, and the measurement method adopted in the present application does not require the addition of complex and expensive equipment, and does not require major adjustments to the overall structure. At the same time, online depth measurement can be achieved, and then the processing state of the workpiece can be measured.
  • first and second are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as “first” and “second” may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality” is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Laser Beam Processing (AREA)

Abstract

本申请公开了用于基于射流的在线距离测量设备及方法，该方法包括：获取加工参数数据和射流单元的导电射流数据；基于加工参数数据和导电射流数据对机械单元的加工件进行数据加工得到数据加工结果；基于数据加工结果检测射流单元的金属结构部分和机械单元的加工件之间的电压值，以根据检测的电压值大小判断导电射流状态。本发明采用的在线距离测量方法可以不添加复杂昂贵的设备，对于整体结构不需要做很大调整，同时可以实现在线测量深度，进而测量工件的加工状态。

Description

基于射流的在线距离测量的设备和方法
相关申请的交叉引用
本申请基于申请号为202310405400.X、申请日为2023年4月17、申请名称为“用于在线测量水导激光导电射流的设备及方法”的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此引入本申请作为参考。
技术领域
本申请的实施例涉及加工测量技术领域，特别是涉及基于射流的在线距离测量的设备和方法。
背景领域
水导激光加工是一种射流与激光复合的特种加工技术。实际使用过程中，射流只能在一定长度范围内保持稳定，即层流形态，一旦超出该长度，液体不再稳定，当射流液体不稳定时，便无法使激光在其中发生全反射，限制了加工长度。相关技术中测量射流会对射流产生干扰从而破碎射流，测量精度低；或者测量设备依赖特定位置或特定碰撞对象，在加工过程中难以进行实时测量。
发明内容
本申请旨在至少在一定程度上解决相关技术中的技术问题之一。
为此，本申请的一个方面的实施例提出一种基于射流的在线距离测量的设备，该用于射流的距离测量设备测量稳定的导电射流的电信号得出射流长度，可以对射流实时测量，该设备的测量精度高且对射流干扰小。
本申请的另一个方面的实施例提出一种基于射流的在线距离测量的方法。
为达上述目的，本申请一方面提出一种基于射流的在线距离测量的设备，包括：
射流单元，用于为设备提供导电射流，所述射流单元至少包括金属结构部分，所述金属结构部分与水腔接触；
机械单元，包括加工件；
检测单元，用于检测所述射流单元的金属结构部分和所述机械单元的加工件之间的电信号，以根据检测的电信号变化值判断导电射流状态。
另外，根据本申请上述实施例的用于在线测量射流的设备还可以具有以下附加的技术特征：
进一步地，在本申请的一个实施例中，所述导电射流状态处于稳定状态时视为一段固定宽度的导体，所述导体的电阻值为：
其中，ρ为射流的电阻率，l为导电射流长度，S为导电射流截面积。
进一步地，在本申请的一个实施例中，所述导体的电阻值，包括射流单元电阻、导电射流电阻和机械单元电阻的串联电阻。
进一步地，在本申请的一个实施例中，当导电射流处于所述稳定状态时，得到所述电阻值基于所述导电射流长度的单调变化数据。
进一步地，在本申请的一个实施例中，所述射流单元，包括耦合单元，所述耦合单元上下移动得到上下移动数据；
所述检测单元根据所述上下移动数据检测得到电信号变化值，以根据所述电信号变化值得到稳定状态下的导电射流长度的最大值
进一步地，在本申请的一个实施例中，所述机械单元沿预设的三个轴运动对加工件进行加工的同时，所述检测单元检测实时导电射流长度，并根据电阻值大小判断导电射流是否中断。
进一步地，在本申请的一个实施例中，所述加工件的非测量面上设置导电 结构，所述检测单元检测所述射流单元的金属结构部分和所述机械单元的加工件的导电结构之间的电信号。
进一步地，在本申请的一个实施例中，基于射流的在线距离测量的设备还包括位移单元，所述位移单元与所述射流单元或所述加工件相连以使所述射流单元相对所述加工件在正交于上下方向的平面内移动。
为达上述目的，本申请另一方面提出一种基于射流的在线距离测量的方法，包括：
获取加工参数数据和射流单元的导电射流数据；
基于所述加工参数数据和导电射流数据对机械单元的加工件进行数据加工得到数据加工结果；
基于所述数据加工结果检测所述射流单元的金属结构部分和机械单元的加工件之间的电压值，以根据检测的电压值大小判断导电射流状态。
本申请实施例的基于射流的在线距离测量的设备及方法，实现在线检测导电射流状态与导电射流长度，射流长度反映加工系统状态和加工进度，可以了解加工实际情况。
本申请附加的方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本申请的实践了解到。
附图说明
本申请上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解，其中：
图1是根据本申请实施例的一种基于射流的在线距离测量的设备的结构示意图；
图2是根据本申请实施例的另一种基于射流的在线距离测量的设备的结 构示意图；
图3是根据本申请实施例的检测信号变化趋势的示意图；
图4是根据本申请实施例的又一种基于射流的在线距离测量的设备的结构示意图；
图5是根据本申请实施例的基于射流的在线距离测量的方法的流程图。
图6是根据本申请实施例的另一种基于射流的在线距离测量的设备的结构示意图。
具体实施方式
下面详细描述本申请的实施例，所述实施例的示例在附图中示出。下面通过参考附图描述的实施例是示例性的，旨在用于解释本申请，而不能理解为对本申请的限制。在本申请的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。
下面参考附图描述根据本申请实施例提出的基于射流的在线距离测量的设备和方法。
图1是本申请实施例的基于射流的在线距离测量的设备的结构示意图。
如图1所示，该基于射流的在线距离测量的设备，包括：
射流单元200，用于为设备提供导电射流，射流单元至少包括金属结构部分，金属结构部分与水腔接触；
机械单元300，包括加工件；
检测单元400，用于检测射流单元200的金属结构部分和机械单元300的加工件之间的电信号，以根据检测的电信号变化值判断导电射流状态。
具体地，射流单元200，为设备提供导电射流，至少有一部分为金属结构并与水腔接触；机械单元300，可以为实际加工件，也可以为固定的检测面；检测单元400，其通过将电压加载于射流单元200金属部分及机械单元300之间，并检测电压和/或电流，判断导电射流状态。导电射流可以采用水、酒精与甘油混合物等电解质溶液作为可导电的流体，该流体还可以是酸性或碱性电解质溶液。导电射流采用可导电的流体目的在于测量流体的电信号并将电信号的变化值与导电射流的长度相关联，通过测量流体的电信号得出对应的导电射流的长度。
可以理解的，激光单元100为设备提供激光，测量导电射流长度时无需激光单元100参与，开启激光单元100能够实现加工件测量与激光加工同步进行，无需取下加工件进行测量、也避免了重新装夹和对准，能够避免再次装夹产生新的误差，并避免测量影响加工效率。加工件测量与激光加工同步进行有助于缩短加工步骤，提高加工精度和效率。
在本申请的一些实施例中，导电射流于稳定状态时，可以视为一段固定宽度的导体，其电阻为：
其中ρ为水的电阻率，l为导电射流长度，S为导电射流截面积。
在本申请的一些实施例中，实际整体电阻为导电射流电阻和测量回路其他部分电阻的串联。
可以理解的是，测量回路其他部分电阻可以包括射流单元电阻和机械单元 电阻等，由于导电射流截面积相比于射流单元的水腔小很多，所以射流单元水的电阻比导电射流小很多；射流单元另一部分为大面积金属，电阻亦可忽略；机械单元同理。在射流单元、导电射流和机械单元形成的测量回路上，导电射流电阻大于其他部分的电阻，以确保导电射流电阻变化影响测量回路电阻变化。
可以理解的是，检测单元所检测电阻基本为导电射流的电阻。
在本申请的一些实施例中，当导电射流处于所述稳定状态时，得到所述电阻值基于所述导电射流长度的单调变化数据。
具体地，当导电射流处于稳定状态时，电阻值随导电射流长度单调变化，电阻与长度具有一一对应的关系，电阻值的变化规律可以是线性的。因此检测单元可以检测到有规律的电压和/或电阻值，从而反推出导电射流的长度。
在本申请的一些实施例中，而当导电射流处于不稳定状态时，由于水流不再处于稳定状态，其电阻值会产生波动甚至断路，由此可以检测导电射流是否处于稳定状态内。
在本申请的一些实施例中，图2为本申请展示的一种用于确定导电射流长度的设备连接示意图。
可以理解的是，射流单元，可以为耦合单元201，耦合单元201上下移动得到上下移动数据；检测单元300根据上下移动数据检测得到电信号变化值，以根据电信号变化值得到稳定状态下的导电射流长度的最大值。
具体地，耦合单元201上下移动，检测单元400检测电信号的变化，以此确定稳定的最大长度。
进一步地，随距离变化，其检测信号变化趋势如图3所示，在图3的①部分中为稳定阶段，检测到的电压值随向下移动的距离而增加；随后导电射流破碎，电压上升至电源电压。
在本申请的一些实施例中，图3为本申请展示的一种加工状态中在线监测的设备连接示意图，如图3所示，机械单元300沿三个轴运动，水导激光进行加工的同时，检测单元400检测导电射流长度，通过电阻值判断射流是否中断，以此判断加工装填与加工深度。
在本申请的一些实施例中，加工件的非测量面上设置导电结构，检测单元检测射流单元的金属结构部分和机械单元的加工件的导电结构之间的电信号。
具体地，导电结构安装在加工件的非测量面上，非测量面可以是工件的侧面等，导电射流流淌至非测量面在射流单元、加工件和检测单元之间形成了完整回路。当射流处于稳定状态时，射流可以视为一段电导率均匀的导体，进而可以对其电学性质进行测量和计算，稳定导电射流的电阻可以通过下式进行计算；
其中，L为射流总长度，l为射流截面到喷嘴的距离，S(l)为射流在距离喷嘴处的截面面积，σ为电解质溶液的电导率。射流的截面面积S(l)在l变化是看成不变量S，已知射流截面面积S可以通过测量射流的电阻计算射流总长度L，实现对射流单元至加工件之间距离的测量。
在一些实施例中，机械单元的加工件是非金属材质等绝缘材质时，检测单元采用电阻计检测加工件到射流单元之间的电阻，加工件自身电阻过大不便电阻计检测计算导电射流的电阻，检测单元采用电阻计检测加工件到射流单元之间的电阻，此时设置在加工件的非测量面的导电结构可以避免电阻计检测加工件的电阻，导电结构可以是黏贴在加工件非检测面的导电材料，导电材料可以是双导铜胶带，电阻计的两端分别与双导铜胶带和射流单元的金属结构相接触，此时电阻计测量的电阻包括射流单元电阻、射流电阻和双导铜胶带电阻的串联 电阻，射流单元电阻和双导铜胶带电阻可忽略，测量电阻时不局限在固定位置和固定加工件，既可以在加工前对射流单元进行调整，也可以在射流单元工作时进行在机测量检测加工状态，初始状态下射流与加工件接触发生液体的累积，液体与电阻计的测量端相连即可测量得到电阻，液体在加工件流动至非测量面与导电材料接触能实现液体与电阻计的测量端的相连形成回路。
在本申请的一个实施例中，基于射流的在线距离测量的设备还包括位移单元，位移单元与射流单元或加工件相连以使射流单元相对加工件在正交于上下方向的平面内移动。
具体地，每次加工完成后，加工件都具有边缘位置，通过位移单元的驱动，使得射流与加工件从非接触状态变为接触状态，从而检测单元可以检测到电学特性的变化，位移单元记录位置信息可以进行射流的位置测量，进而便于设备进行对刀确认射流位置，或者对加工件待加工面的形状测量。根据电学特性的变化得出处于层流状态的射流的电阻值，射流的截面面积作为不变量，根据射流的电阻值计算射流长度，根据射流长度、射流的状态变化和位移单元记录的位置信息完成位置测量，可以在加工前进行对刀、角度调整，也可以在加工过程中进行在机测量，检测加工状态。位移单元能够使射流在加工件的前、后、左、右方向上移动，不同于耦合单元在加工件的上下方向移动，位移单元令射流和加工件产生相对移动，射流与加工件接触时产生电信号，射流离开加工件时电信号中断，无需拆卸加工件进而反复装夹加工件检测加工状态，简化工序提高加工效率。
根据本申请实施例的基于射流的在线距离测量的设备，检测导电射流长度与射流状态进而测得加工位置信息，并且本申请采用的测量方法可以不添加复杂昂贵的设备，对于整体结构不需要做很大调整，同时可以实现在线测量深度， 进而测量工件的加工状态。本申请还可以进行对刀、角度调整，对工件进行在机测量，提高加工效率。本申请的设备和方法可以应用在对加工件加工前的检测、测量；对加工件加工中的在线监测、对加工件加工后的形貌检测、粗糙度检测等应用场景。
为了实现上述实施例，如图4所示，本实施例中还提供了基于射流的在线距离测量的方法，包括：
S1，获取加工参数数据和射流单元的导电射流数据；加工参数包括要求加工形状和机床基本参数。通过靠近加工件的导电射流的物理变化状态得到初始位置信息。
S2，基于加工参数数据和导电射流数据对机械单元的加工件进行数据加工得到数据加工结果；在加工过程中，根据加工参数数据和导电射流数据可以得到实际加工形状。在每次加工完成后，加工件单元都具有边缘位置。通过系统的规划，可以使导电射流靠近加工件，通过检测导电射流的状态变化得到位置信息。可以理解的，进行水导激光加工时，激光单元的激光数据属于加工参数。
S3，基于数据加工结果检测射流单元的金属结构部分和机械单元的加工件之间的电压值，以根据检测的电压值大小判断导电射流状态。
进一步地，所述导电射流状态处于稳定状态时视为一段固定宽度的导体，所述导体的电阻值为：
其中，ρ为射流的电阻率，l为导电射流长度，S为导电射流截面积。
进一步地，所述导体的电阻值，包括射流单元电阻、导电射流电阻和机械单元电阻的串联电阻。
进一步地，当导电射流处于所述稳定状态时，得到所述电阻值基于所述导 电射流长度的单调变化数据。
根据本申请实施例的基于射流的在线距离测量的方法，实现在线检测导电射流状态与导电射流长度，并且本申请采用的测量方法可以不添加复杂昂贵的设备，对于整体结构不需要做很大调整，同时可以实现在线测量深度，进而测量工件的加工状态。
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本申请的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外，在不相互矛盾的情况下，本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本申请的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。

Claims (12)

  1. 一种用于基于射流的在线距离测量的设备，其特征在于，包括：
    射流单元，用于为设备提供导电射流，所述射流单元至少包括金属结构部分，所述金属结构部分与水腔接触；
    机械单元，包括加工件；
    检测单元，用于检测所述射流单元的金属结构部分和所述机械单元的加工件之间的电信号，以根据检测的电信号变化值判断导电射流状态。
  2. 根据权利要求1所述的用于基于射流的在线距离测量的设备，其特征在于，所述导电射流状态处于稳定状态时视为一段固定宽度的导体，所述导体的电阻值为：
    其中，ρ为水的电阻率，l为导电射流长度，S为导电射流截面积。
  3. 根据权利要求2所述的用于基于射流的在线距离测量的设备，其特征在于，所述导体的电阻值，包括射流单元电阻、导电射流电阻和机械单元电阻的串联电阻。
  4. 根据权利要求2所述的用于基于射流的在线距离测量的设备，其特征在于，当导电射流处于所述稳定状态时，得到所述电阻值基于所述导电射流长度的线性变化数据。
  5. 根据权利要求1-4中任一项所述的用于基于射流的在线距离测量的设备，其特征在于，所述射流单元，包括耦合单元，所述耦合单元上下移动得到上下移动数据；所述检测单元根据所述上下移动数据检测得到电信号变化值，以根据所述电信号变化值得到稳定状态下的导电射流长度的最大值。
  6. 根据权利要求1-5中任一项所述的用于基于射流的在线距离测量的设备，其特征在于，还包括激光单元，所述激光单元用于为设备提供激光，所述机械单元沿预设的三个轴运动以使所述激光单元对加工件进行加工的同时，所 述检测单元检测实时导电射流长度，并根据电阻值大小判断导电射流是否中断。
  7. 根据权利要求1-6中任一项所述的用于基于射流的在线距离测量的设备，其特征在于，所述加工件的非测量面上设置导电结构，所述检测单元检测所述射流单元的金属结构部分和所述机械单元的加工件的导电结构之间的电信号。
  8. 根据权利要求1-7中任一项所述的基于射流的在线距离测量的设备，其特征在于，还包括位移单元，所述位移单元与所述射流单元或所述加工件相连以使所述射流单元相对所述加工件在正交于上下方向的平面内移动。
  9. 一种基于射流的在线距离测量的方法，其特征在于，包括：
    获取加工参数数据和射流单元的导电射流数据；
    基于所述加工参数数据和导电射流数据对机械单元的加工件进行数据加工得到数据加工结果；
    基于所述数据加工结果检测所述射流单元的金属结构部分和机械单元的加工件之间的电压值，以根据检测的电压值大小判断导电射流状态。
  10. 根据权利要求9所述方法，其特征在于，所述导电射流状态处于稳定状态时视为一段固定宽度的导体，所述导体的电阻值为：其中，ρ为射流的电阻率，l为导电射流长度，S为导电射流截面积。
  11. 根据权利要求10所述的方法，其特征在于，所述导体的电阻值，包括射流单元电阻、导电射流电阻和机械单元电阻的串联电阻。
  12. 根据权利要求9所述的方法，其特征在于，当导电射流处于所述稳定状态时，得到所述电阻值基于所述导电射流长度的单调变化数据。
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Publication number Priority date Publication date Assignee Title
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10320330A1 (de) * 2002-05-08 2003-11-20 Klaus Nordmann Verfahren und Vorrichtung zum Erfassen eines Werkzeuges oder Werkstückes, insbesondere Abstandsmessung
JP2005288472A (ja) * 2004-03-31 2005-10-20 Shibuya Kogyo Co Ltd ハイブリッド加工装置の軸合せ方法及びハイブリッド加工装置
CN109623140A (zh) * 2018-12-11 2019-04-16 中国科学院宁波材料技术与工程研究所 光纤与水导激光耦合加工装置及系统
CN111372715A (zh) * 2017-11-21 2020-07-03 辛诺瓦有限公司 用于测量引导激光束的流体射流的设备
CN113210894A (zh) * 2021-05-21 2021-08-06 上海大学 一种电场辅助水导激光切割装置
CN114043073A (zh) * 2021-11-18 2022-02-15 哈尔滨工业大学 一种基于声学信号实时监测的水助激光加工系统及方法
CN116399556A (zh) * 2023-04-17 2023-07-07 清华大学 用于在线测量水导激光水射流的设备及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3527349A1 (de) * 1985-07-31 1987-02-12 Wiederaufarbeitung Von Kernbre Verfahren und anordnung zur kontinuierlichen messung der fuellstandshoehe einer radioaktiven glasschmelze
CN103983421A (zh) * 2014-05-16 2014-08-13 北京科技大学 一种高压水射流自激喷嘴腔内振荡信号检测装置与方法
CN107168276A (zh) * 2017-04-05 2017-09-15 上海大学 一种水射流装备在线故障预警方法
CN107907296A (zh) * 2017-10-27 2018-04-13 清华大学 水洞实验用非定常空化流激振动多场同步测量系统

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10320330A1 (de) * 2002-05-08 2003-11-20 Klaus Nordmann Verfahren und Vorrichtung zum Erfassen eines Werkzeuges oder Werkstückes, insbesondere Abstandsmessung
JP2005288472A (ja) * 2004-03-31 2005-10-20 Shibuya Kogyo Co Ltd ハイブリッド加工装置の軸合せ方法及びハイブリッド加工装置
CN111372715A (zh) * 2017-11-21 2020-07-03 辛诺瓦有限公司 用于测量引导激光束的流体射流的设备
CN109623140A (zh) * 2018-12-11 2019-04-16 中国科学院宁波材料技术与工程研究所 光纤与水导激光耦合加工装置及系统
CN113210894A (zh) * 2021-05-21 2021-08-06 上海大学 一种电场辅助水导激光切割装置
CN114043073A (zh) * 2021-11-18 2022-02-15 哈尔滨工业大学 一种基于声学信号实时监测的水助激光加工系统及方法
CN116399556A (zh) * 2023-04-17 2023-07-07 清华大学 用于在线测量水导激光水射流的设备及方法

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