WO2024183297A1 - In-line integrally-formed co-fired inductor and manufacturing method therefor - Google Patents

In-line integrally-formed co-fired inductor and manufacturing method therefor Download PDF

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Publication number
WO2024183297A1
WO2024183297A1 PCT/CN2023/127095 CN2023127095W WO2024183297A1 WO 2024183297 A1 WO2024183297 A1 WO 2024183297A1 CN 2023127095 W CN2023127095 W CN 2023127095W WO 2024183297 A1 WO2024183297 A1 WO 2024183297A1
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powder
mass
accounts
insulation
mixed powder
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PCT/CN2023/127095
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French (fr)
Chinese (zh)
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李伟健
邢冰冰
盖鹏祥
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天通控股股份有限公司
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Publication of WO2024183297A1 publication Critical patent/WO2024183297A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/04Fixed inductances of the signal type  with magnetic core
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/24Magnetic cores
    • H01F27/255Magnetic cores made from particles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/30Fastening or clamping coils, windings, or parts thereof together; Fastening or mounting coils or windings on core, casing, or other support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/32Insulating of coils, windings, or parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/34Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/34Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
    • H01F27/36Electric or magnetic shields or screens
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/12Insulating of windings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Definitions

  • the invention belongs to the field of magnetic functional materials, and in particular relates to a direct-insert integrated co-fired inductor and a preparation method thereof.
  • One-piece molded inductors are made by burying the wound copper coil in metal powder and die-casting. Due to the high degree of mechanization and the use of more automated equipment in the production process, the production efficiency is much higher than that of traditional inductors, and the product performance is uniform and the stability is good.
  • the one-piece molded inductor uses soft magnetic powder to wrap the copper conductor, so the one-piece molded inductor has a better magnetic shielding effect.
  • one-piece molded inductors also have some disadvantages.
  • the wound coil is buried inside the powder, in order to prevent the coil from deforming due to excessive force and causing the resistivity to increase, and to prevent the metal powder from piercing the coil insulation layer due to excessive pressure and causing the coil to short-circuit, the one-piece molded inductor cannot be pressed and formed using high pressure, which means that the metal powder cannot be compacted, and the lower density leads to lower magnetic permeability, and the product cannot obtain high inductance;
  • the coil needs to be coated with resins such as polyimide, and the powder will also be added with epoxy resin to increase the molding strength.
  • the Chinese patent with publication number CN106504854A discloses a plug-in inductor made of soft magnetic powder pressed with a spiral wire as the conductor. Although it reduces the magnetic leakage problem, in order to prevent the deformation of the spiral wire after pressing or the metal powder piercing the wire surface to cause short circuit problems, and the spiral wire expansion and cracking caused by high-temperature heat treatment, it can only be prepared by low-pressure molding and low-temperature heat treatment methods. However, the low inductance caused by low-pressure pressing and the high loss caused by the inability to perform high-temperature heat treatment have not been solved.
  • the conductor is cylindrical or square in shape, and the protruding conductor parts at both ends need to be folded during use, which makes the product prone to delamination, cracking and other problems, making it difficult to use.
  • the purpose of the present invention is to overcome the shortcomings of the prior art and provide a direct-insertion one-piece co-fired inductor and a preparation method thereof, which not only has the advantages of high magnetic shielding performance, high mechanization in production, and high performance uniformity of the one-piece molded inductor, but also has the advantages of high density and low loss of magnetic powder core materials.
  • a plug-in integrated co-fired inductor which consists of two parts: soft magnetic metal powder and an inverted U-shaped copper conductor.
  • the two ends of the copper conductor extend out of the powder, and the rest is buried in the powder. During use, the two ends of the copper conductor can be directly inserted into the reserved holes of the PCB board for welding without bending or trimming.
  • the soft magnetic metal powder includes aerosolized iron-nickel-molybdenum powder, aerosolized iron-nickel powder, a passivating agent, an insulating agent, a coating agent, and a lubricant;
  • the mass of the mixed powder of the atomized iron-nickel-molybdenum powder and the atomized iron-nickel powder is used as the calculation basis, the atomized iron-nickel-molybdenum powder accounts for 60-70% of the mass of the mixed powder, and the particle size D50 is 25-38 ⁇ m, and the atomized iron-nickel powder accounts for 40-30% of the mass of the mixed powder, and the particle size D50 is 10-15 ⁇ m;
  • the passivating agent is a mixed solution of phosphoric acid and chromic acid, wherein the mass of chromic acid accounts for 0.1-0.2% of the mass of the mixed powder, and the mass of phosphoric acid accounts for 0.4-0.6% of the mass of the mixed powder;
  • the insulating agent is a mixture of magnesium aluminum silicate, nano-alumina, zirconium tungstate and titanate coupling agent, wherein the mass of magnesium aluminum silicate accounts for 0.3-0.6% of the mass of the mixed powder, the mass of nano-alumina accounts for 0.2-1.0% of the mass of the mixed powder, the mass of zirconium tungstate accounts for 0.2-0.8% of the mass of the mixed powder, and the mass of titanate coupling agent accounts for 0.1-0.2% of the mass of the mixed powder;
  • the coating agent is a mixture of styrene block copolymer and thermoplastic polyurethane, the mass of styrene block copolymer accounts for 0.5-1.0% of the mass of the mixed powder, and the mass of thermoplastic polyurethane accounts for 0.4-1.2% of the mass of the mixed powder;
  • the lubricant is one or more of magnesium stearate, zinc stearate and stearic acid, and the mass of the lubricant accounts for 0.3-0.4% of the mass of the mixed powder;
  • the surface of the copper conductor is coated with silicon dioxide and hexagonal boron nitride colloid, and the coating thickness on the surface of the copper conductor is 1-2 ⁇ m.
  • a method for preparing a direct-insert integrated co-fired inductor comprises the following steps:
  • step (3) performing gradient annealing treatment on the product obtained in step (2) using a reducing atmosphere;
  • the annealed product is impregnated in a resin solution, and after washing and baking, a direct-insert integrated co-fired inductor is obtained.
  • the pretreatment of the soft magnetic metal powder includes mixing, passivation treatment, insulation treatment, coating treatment and adding lubricant of the soft magnetic metal powder, wherein:
  • passivation treatment passivating the mixed powder with a passivating agent to obtain a passivated mixed powder
  • Insulation treatment Use an insulating agent to insulate the passivated mixed powder
  • Coating treatment using a coating agent to coat the mixed powder after insulation treatment
  • Adding lubricant adding lubricant to the mixed powder after coating.
  • the reducing atmosphere is a mixed gas of hydrogen and nitrogen, wherein the volume of hydrogen accounts for 30-50% of the volume of the mixed gas, and the volume of nitrogen accounts for 50-70% of the volume of the mixed gas.
  • the gradient annealing treatment refers to a temperature gradient increase during annealing, and the gradient annealing treatment has five insulation stages, the insulation temperature of the first stage is 300-330°C, and the insulation time is 30-50min; the insulation temperature of the second stage is 490-510°C, and the insulation time is 40-50min; the insulation temperature of the third stage is 590-610°C, and the insulation time is 50-70min; the insulation temperature of the fourth stage is 690-710°C, and the insulation time is 50-70min; the insulation temperature of the fifth stage is 790-800°C, and the insulation time is 30-40min, and finally the furnace is cooled to room temperature.
  • the resin solution used for impregnating the product is an acetone solution of epoxy resin
  • the impregnation time is 30-50 min
  • the washing time after impregnation is 0.5-1.0 min
  • the baking conditions are 160-180° C. and kept warm for 60-80 min.
  • the present invention has the following advantages:
  • the coating layer with excellent insulation properties can be tightly wrapped on the surface of the powder, so that the powder has a certain formability, and there will be no problems such as delamination and cracking after pressing. At the same time, there will be no problems such as film rupture due to high-pressure pressing. Therefore, an integrated molding process can be used for preparation and molding. After molding, stress relief heat treatment can be performed, so that the direct-insertion integrated co-fired inductor has the advantages of high magnetic shielding characteristics, high mechanical manufacturing capability, high magnetic core density, high magnetic permeability, low loss, etc.
  • the original powders used are atomized iron-nickel-molybdenum powder and atomized iron-nickel powder, because iron-nickel-molybdenum powder has the lowest loss characteristics and the highest density among soft magnetic metal powders. Therefore, under the premise of determining the volume of the product, the use of iron-nickel-molybdenum powder can fill more powder, thereby obtaining a higher magnetic permeability, that is, the product obtains a higher inductance value.
  • the atomized iron-nickel powder has lower loss, higher density, and the best superposition characteristics among soft magnetic metal powders, so mixing the atomized iron-nickel powder can make the product have a high DC superposition characteristic.
  • the aerosolized iron-nickel-molybdenum powder used has a different particle size from the aerosolized iron-nickel powder.
  • large particles of iron-nickel-molybdenum powder will contact each other and produce a large number of gaps in the three-dimensional space.
  • small particles of iron-nickel powder can be filled into these gaps, so the product is fully filled, and the product has a higher density and a higher magnetic permeability.
  • a composite passivation process is used for the mixed powder, and a phosphate film layer is generated on the surface after phosphoric acid reacts with the metal.
  • Chromic acid has strong oxidizing properties and can further coat the unreacted area.
  • zirconium tungstate has a certain negative thermal expansion coefficient, which can reduce the expansion scale of the insulating layer, so that the insulating layer will not be broken due to the thermal decomposition of organic materials such as lubricants during the heat treatment process.
  • Magnesium aluminum silicate and nano-alumina have excellent insulation and thermal stability, ensuring that the powder still maintains high insulation resistance properties after heat treatment.
  • titanate coupling agent effectively enhances the connection between the insulating layer and the passivation layer.
  • the coating agent uses styrene block copolymer and thermoplastic polyurethane. This material can not only improve the strength of the product after pressing, but also has a certain elastic plasticity after heating, which can further prevent the product stratification or cracking caused by heat treatment during the preparation of the inductor.
  • the surface of the copper conductor used in the direct-insertion integrated co-fired inductor is treated with inorganic insulation, which solves the problem of decomposition of the organic insulation layer on the surface of the traditional copper conductor at high temperature.
  • the silica and hexagonal boron nitride colloids are stable at high temperatures, which can ensure the insulation properties of the copper conductor and avoid the risk of short circuit after heat treatment.
  • the copper conductor in the present invention is in an inverted U shape, which can be directly inserted into the reserved hole of the PCB board for welding after being made. The operation is simple, and there will be no problems such as product delamination and cracking caused by the angle bending process of the copper conductor.
  • the present invention abandons the traditional spiral coil, and the coil deformation problem and coil short circuit problem caused by excessive pressure can be ignored during the pressing process.
  • the heat treatment process used is a gradient annealing process under a reducing atmosphere.
  • the presence of hydrogen in the reducing atmosphere can avoid the problem of increased loss of powder due to oxidation, while nitrogen ensures safety and prevents the danger of combustion and explosion.
  • Heating according to the gradient curve can effectively avoid problems such as product cracking and delamination caused by uneven thermal expansion coefficients during the continuous heating process, greatly improving the qualified rate of products.
  • the plug-in integrated co-fired inductor is impregnated with an epoxy resin solution after the heat treatment, which can fill the gaps caused by the decomposition of some organic substances in the product due to the heat treatment, thereby strengthening the insulation properties inside the product and greatly improving the strength of the product, thereby ensuring the reliability of the product.
  • FIG1 is an inverted U-shaped copper conductor for a direct-insert integrated co-fired inductor
  • FIG2 is a direct-insertion integrated co-fired inductor, wherein: 1- is a copper conductor, 2- is a soft magnetic metal powder;
  • FIG. 3 is a gradient annealing curve of Example 1.
  • step (2) using silicon dioxide and hexagonal boron nitride colloid to coat an inverted U-shaped copper conductor 1 (see FIG. 1 ), and after the conductor surface is dried, embedding it in the soft magnetic metal powder 2 pretreated in step (1), and pressing it into shape using a pressure of 2000 MPa;
  • step (3) performing gradient annealing treatment on the product obtained in step (2) using a reducing atmosphere, wherein the reducing atmosphere is a mixed gas of hydrogen and nitrogen, wherein the volume of hydrogen accounts for 50% of the volume of the mixed gas, and the volume of nitrogen accounts for 50% of the volume of the mixed gas.
  • the annealing curve is shown in FIG. 3, wherein the product is kept at 300° C. for 50 min, 500° C. for 50 min, 600° C. for 60 min, 700° C. for 60 min, and 800° C. for 40 min, and then cooled to room temperature with the furnace;
  • the annealed product was immersed in an acetone solution of epoxy resin for 30 minutes, washed for 0.5 minutes, and baked at 180° C. for 60 minutes to obtain a direct-insert integrated co-fired inductor, as shown in FIG2 .
  • the copper conductor used in step (2) is a copper conductor with a surface coating of polyimide.
  • Example 1 The difference between this comparative example and Example 1 is that the annealing atmosphere used in step (3) is pure nitrogen.
  • the heat treatment condition in step (3) is a three-stage gradient annealing treatment, and the annealing method is: the insulation temperature of the first stage is 200°C, and the insulation time is 90 min; the insulation temperature of the second stage is 600°C, and the insulation time is 90 min; the insulation temperature of the third stage is 800°C, and the insulation time is 60 min, and finally the furnace is cooled to room temperature.
  • the difference between this comparative example and Example 1 is that the heat treatment condition in step (3) is to rapidly raise the temperature from room temperature to 800° C. and keep the temperature for 60 min, and then cool the furnace to room temperature.
  • step (3) is completed after completion, and there is no epoxy resin impregnation step.
  • the atomized iron-nickel-molybdenum and atomized iron-nickel powder have the best inductance value and the best loss characteristics after being heated and heat-treated in a reducing atmosphere according to a five-stage gradient annealing curve.
  • Example 2 After comparing Example 1 with the comparative example, it is found that in Comparative Example 2, the copper conductor retains the original organic coating layer, which will be slightly stratified during the heat treatment process, resulting in deterioration of the loss characteristics; in Comparative Example 3, if the surface of the copper conductor is uncoated, the eddy current loss formed between the copper conductor and the powder particles will be greatly increased, resulting in an increase in overall loss; in Comparative Examples 5 and 6, for the heat treatment process, directly heating to the highest temperature or the heating curve is too fast, the product will have tiny cracks or the internal stress is not completely released due to the different thermal expansion effects of the material, resulting in excessive loss or reduced inductance; in Comparative Example 7, after the heat treatment, no impregnation process is performed. Although the electromagnetic characteristics are better than other comparative examples, in the drop test experiment, the inductor is directly crushed and has no strength, so it cannot be used in actual production.
  • step (2) using silicon dioxide and hexagonal boron nitride colloid to coat an inverted U-shaped copper conductor, and after the surface of the conductor is dried, embedding it in the soft magnetic metal powder treated in step (1), and pressing it into shape using a pressure of 1800 MPa;
  • step (3) performing gradient annealing treatment on the product obtained in step (2) using a reducing atmosphere, wherein the reducing atmosphere is a mixed gas of hydrogen and nitrogen, wherein the volume of hydrogen accounts for 35% of the volume of the mixed gas, and the volume of nitrogen accounts for 65% of the volume of the mixed gas, and the annealing method is to keep the temperature at 300° C. for 50 min, keep the temperature at 500° C. for 50 min, keep the temperature at 600° C. for 60 min, keep the temperature at 700° C. for 60 min, and keep the temperature at 800° C. for 40 min, and then cool to room temperature with the furnace;
  • the reducing atmosphere is a mixed gas of hydrogen and nitrogen
  • the volume of hydrogen accounts for 35% of the volume of the mixed gas
  • the volume of nitrogen accounts for 65% of the volume of the mixed gas
  • the annealing method is to keep the temperature at 300° C. for 50 min, keep the temperature at 500° C. for 50 min, keep the temperature at 600° C. for 60 min, keep the temperature at 700
  • the annealed product was immersed in an acetone solution of epoxy resin for 30 minutes, washed for 0.5 minutes, and baked at 180° C. for 60 minutes to obtain a direct-insert integrated co-fired inductor.
  • the passivating agent used in step (1) is an aqueous solution of 0.6 g phosphoric acid, and 2.35 g epoxy resin is directly added for coating after the passivation is completed.
  • Example 2 The difference between this comparative example and Example 2 is that the insulating agent added after the powder passivation in step 1 is 1.25 g of nano magnesium oxide powder.
  • the product obtained by pressing the gas-atomized iron-nickel-molybdenum powder mixed with the gas-atomized iron-nickel powder obviously has the characteristics of high inductance, low loss and high superposition, because the gas-atomized iron-nickel-molybdenum powder has high magnetic permeability and the lowest loss, and the gas-atomized iron-nickel powder has good DC superposition characteristics and loss characteristics far superior to iron-silicon materials, so the mixed powder has the advantages of both powders.
  • Example 2 and Comparative Example 10 and Comparative Example 11 that under the condition that the magnetic permeability is not much different, the loss of the product is very different, because the product loss mainly includes hysteresis loss and eddy current loss, and hysteresis loss is the influence brought by the pressing process, heat treatment, etc., and eddy current loss includes eddy current inside the powder particles, eddy current between the powder particles, and eddy current between the powder and the conductor. Only when the powder insulation characteristics are good enough, the eddy current loss will be reduced. In Example 2, the powder is passivated, insulated, and coated, and the materials used also have good insulation, so the eddy current loss of the product can be effectively reduced, and then the overall loss is better than the comparative example.

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Abstract

Provided are an in-line integrally-formed co-fired inductor and a manufacturing method therefor. The inductor consists of soft magnetic metal powder (2) and an inverted U-shaped copper conductor (1), wherein two ends of the copper conductor (1) extend out of the powder, and the remaining part thereof is embedded in the powder. The manufacturing method for the inductor comprises the steps: (1) pretreating the soft magnetic metal powder (2); (2) embedding the copper conductor (1) into the treated metal powder, and carrying out compression molding at a high pressure of 1700-2100 MPa; (3) by using a reducing atmosphere, carrying out gradient annealing on the product obtained in step (2); and (4) impregnating the annealed product in a resin solution, and then washing and baking the product to obtain the in-line integrally-formed co-fired inductor. The inductor not only has the advantages of high magnetic shielding performance, high mechanization of production and high performance uniformity of an integrally-formed inductor, but also has the advantages of high density and low loss of a magnetic powder core material.

Description

一种直插式一体成型共烧电感及其制备方法A direct-insertion integrated co-fired inductor and a preparation method thereof 技术领域Technical Field
本发明属于磁性功能材料领域,具体涉及一种直插式一体成型共烧电感及其制备方法。The invention belongs to the field of magnetic functional materials, and in particular relates to a direct-insert integrated co-fired inductor and a preparation method thereof.
背景技术Background Art
作为电子产品的重要组成部件,新型电子元器件正向着片式化、微型化、高频化、宽频化、高精度化、集成化和绿色环保的方向发展,对功率电感产品尺寸和性能提出了更高的要求,要求其同时具有小尺寸、大电流、较低功耗、高磁屏蔽效果、高产品均一性等的特点,因此,外界对一体成型电感的关注越来越多。一体成型电感是将绕制好的铜线圈埋于金属粉末内压铸而成,由于其生产过程中机械化程度高、自动化设备应用较多,因此生产效率远高于传统电感、产品性能均一、稳定性较好。而有别于传统绕线电感的“铜包铁”结构,一体成型电感所用软磁粉末包裹铜导体,因此一体成型电感磁屏蔽效果更优。但是,一体成型电感也存在着一些缺点,其一,因为绕制好的线圈埋在粉末内部,为了避免线圈因受力过大的变形导致电阻率提升,避免因压力过大导致金属粉末刺破线圈绝缘层导致线圈短路,致使一体成型电感无法使用高压力压制成型,这便意味着金属粉末无法被压密实,较低的密度带来较低的磁导率,产品无法得到高电感;其二,为了防止线圈短路,需要对线圈进行涂覆聚酰亚胺等树脂,粉末也会加入环氧树脂等用来增加成型强度,这些树脂的缺点是在高温下分解,这便导致了一体成型电感无法进行高温热处理,而所有材料在受力成型过程中均会产生内应力,一体成型电感的内应力会导致产品容易开裂、产品损耗高的问题,只有进行高温热处理,才能消除内应力,但是有机树脂的高温分解问题限制了热处理温度只能在小于200℃的条件下进行,这样内应力依然存在,高损耗、易开裂的风险仍未解决。As an important component of electronic products, new electronic components are developing in the direction of chip-type, miniaturization, high frequency, broadband, high precision, integration and green environmental protection, which puts forward higher requirements on the size and performance of power inductor products, requiring them to have the characteristics of small size, large current, low power consumption, high magnetic shielding effect, high product uniformity, etc. Therefore, the outside world is paying more and more attention to one-piece molded inductors. One-piece molded inductors are made by burying the wound copper coil in metal powder and die-casting. Due to the high degree of mechanization and the use of more automated equipment in the production process, the production efficiency is much higher than that of traditional inductors, and the product performance is uniform and the stability is good. Different from the "copper clad iron" structure of traditional wound inductors, the one-piece molded inductor uses soft magnetic powder to wrap the copper conductor, so the one-piece molded inductor has a better magnetic shielding effect. However, one-piece molded inductors also have some disadvantages. First, because the wound coil is buried inside the powder, in order to prevent the coil from deforming due to excessive force and causing the resistivity to increase, and to prevent the metal powder from piercing the coil insulation layer due to excessive pressure and causing the coil to short-circuit, the one-piece molded inductor cannot be pressed and formed using high pressure, which means that the metal powder cannot be compacted, and the lower density leads to lower magnetic permeability, and the product cannot obtain high inductance; second, in order to prevent the coil from short-circuiting, the coil needs to be coated with resins such as polyimide, and the powder will also be added with epoxy resin to increase the molding strength. The disadvantage of these resins is that they decompose at high temperatures, which makes it impossible for the one-piece molded inductor to undergo high-temperature heat treatment. All materials will produce internal stress during the stress molding process. The internal stress of the one-piece molded inductor will cause the product to crack easily and have high product loss. Only high-temperature heat treatment can eliminate the internal stress, but the high-temperature decomposition problem of organic resins limits the heat treatment temperature to less than 200°C, so the internal stress still exists, and the risk of high loss and easy cracking is still not solved.
公开号为CN106504854A的中国专利公开了螺旋线为导体、软磁粉末压制得到的直插式电感,虽然减少了漏磁问题,但是为了防止螺旋线压制后变形或金属粉末刺破线表皮导致的短路问题、高温热处理带来的螺旋线膨胀开裂问题,目前只能使用低压成型、低温热处理的方法制备,而低压力压制带来的低电感、无法进行高温热处理带来的高损耗问题仍未得到解决。公开号为CN112735752A的中国专利虽然解决了高压压制、高温热处理工艺带来的问题,但是忽略了粉末的处理工艺及配方仍是电感器件的核心,使用的传统配方仍无法达到高磁导率、高叠加特性、低损耗的目标,而铜导体、铝导 The Chinese patent with publication number CN106504854A discloses a plug-in inductor made of soft magnetic powder pressed with a spiral wire as the conductor. Although it reduces the magnetic leakage problem, in order to prevent the deformation of the spiral wire after pressing or the metal powder piercing the wire surface to cause short circuit problems, and the spiral wire expansion and cracking caused by high-temperature heat treatment, it can only be prepared by low-pressure molding and low-temperature heat treatment methods. However, the low inductance caused by low-pressure pressing and the high loss caused by the inability to perform high-temperature heat treatment have not been solved. Although the Chinese patent with publication number CN112735752A solves the problems caused by high-pressure pressing and high-temperature heat treatment processes, it ignores that the powder processing technology and formula are still the core of the inductor device. The traditional formula used still cannot achieve the goals of high magnetic permeability, high superposition characteristics, and low loss. Copper conductors and aluminum conductors
体或银导体不经过绝缘处理便压制产品也容易出现短路、高涡流损耗等问题,另外该导体形状为圆柱体或方体,在使用过程中需要对两端凸出导体部分进行折角,产品容易由此出现分层、开裂等问题,因此难以使用。If the body or silver conductor is pressed into the product without insulation treatment, it is easy to have problems such as short circuit and high eddy current loss. In addition, the conductor is cylindrical or square in shape, and the protruding conductor parts at both ends need to be folded during use, which makes the product prone to delamination, cracking and other problems, making it difficult to use.
因此,十分有必要研发出一种直插式一体成型共烧电感及其制备方法。Therefore, it is very necessary to develop a direct-insert integrated co-fired inductor and a preparation method thereof.
发明内容Summary of the invention
本发明的目的是为了克服现有技术的不足,提供一种直插式一体成型共烧电感及其制备方法,其不仅具有一体成型电感的高磁屏蔽性能、生产高机械化、高性能均一性的优点,而且兼备了磁粉心材料的高密度、低损耗的优点。The purpose of the present invention is to overcome the shortcomings of the prior art and provide a direct-insertion one-piece co-fired inductor and a preparation method thereof, which not only has the advantages of high magnetic shielding performance, high mechanization in production, and high performance uniformity of the one-piece molded inductor, but also has the advantages of high density and low loss of magnetic powder core materials.
一种直插式一体成型共烧电感,该电感由软磁金属粉末、倒U形铜导体两部分组成,铜导体两端伸出粉末外,其余部分埋于粉末中,在使用过程中,铜导体两端可直接插入PCB板预留孔位处焊接,无需折弯及整角;A plug-in integrated co-fired inductor, which consists of two parts: soft magnetic metal powder and an inverted U-shaped copper conductor. The two ends of the copper conductor extend out of the powder, and the rest is buried in the powder. During use, the two ends of the copper conductor can be directly inserted into the reserved holes of the PCB board for welding without bending or trimming.
其中,软磁金属粉末包括气雾化铁镍钼粉末、气雾化铁镍粉末、钝化剂、绝缘剂、包覆剂、润滑剂;The soft magnetic metal powder includes aerosolized iron-nickel-molybdenum powder, aerosolized iron-nickel powder, a passivating agent, an insulating agent, a coating agent, and a lubricant;
其中,以气雾化铁镍钼粉末与气雾化铁镍粉末的混合粉末质量为计算基础,气雾化铁镍钼粉末占混合粉末质量的60-70%,粒径D50为25-38μm,气雾化铁镍粉末占混合粉末质量的40-30%,粒径D50为10-15μm;The mass of the mixed powder of the atomized iron-nickel-molybdenum powder and the atomized iron-nickel powder is used as the calculation basis, the atomized iron-nickel-molybdenum powder accounts for 60-70% of the mass of the mixed powder, and the particle size D50 is 25-38 μm, and the atomized iron-nickel powder accounts for 40-30% of the mass of the mixed powder, and the particle size D50 is 10-15 μm;
其中,钝化剂为磷酸和铬酸的混合溶液,铬酸质量占混合粉末质量的0.1-0.2%,磷酸质量占混合粉末质量的0.4-0.6%;The passivating agent is a mixed solution of phosphoric acid and chromic acid, wherein the mass of chromic acid accounts for 0.1-0.2% of the mass of the mixed powder, and the mass of phosphoric acid accounts for 0.4-0.6% of the mass of the mixed powder;
其中,绝缘剂为硅酸铝镁、纳米氧化铝、钨酸锆、钛酸脂偶联剂的混合物质,硅酸铝镁质量占混合粉末质量的0.3-0.6%,纳米氧化铝质量占混合粉末质量的0.2-1.0%,钨酸锆质量占混合粉末质量的0.2-0.8%,钛酸脂偶联剂质量占混合粉末质量的0.1-0.2%;The insulating agent is a mixture of magnesium aluminum silicate, nano-alumina, zirconium tungstate and titanate coupling agent, wherein the mass of magnesium aluminum silicate accounts for 0.3-0.6% of the mass of the mixed powder, the mass of nano-alumina accounts for 0.2-1.0% of the mass of the mixed powder, the mass of zirconium tungstate accounts for 0.2-0.8% of the mass of the mixed powder, and the mass of titanate coupling agent accounts for 0.1-0.2% of the mass of the mixed powder;
其中,包覆剂为苯乙烯嵌段共聚物、热塑性聚氨酯的混合物质,苯乙烯嵌段共聚物质量占混合粉末质量的0.5-1.0%,热塑性聚氨酯质量占混合粉末质量的0.4-1.2%;The coating agent is a mixture of styrene block copolymer and thermoplastic polyurethane, the mass of styrene block copolymer accounts for 0.5-1.0% of the mass of the mixed powder, and the mass of thermoplastic polyurethane accounts for 0.4-1.2% of the mass of the mixed powder;
其中,润滑剂为硬脂酸镁、硬脂酸锌、硬脂酸中的一种或几种,润滑剂质量占混合粉末质量的0.3-0.4%;The lubricant is one or more of magnesium stearate, zinc stearate and stearic acid, and the mass of the lubricant accounts for 0.3-0.4% of the mass of the mixed powder;
其中,铜导体表面涂覆了二氧化硅与六方氮化硼胶体,铜导体表面的涂层厚度为1-2μm。The surface of the copper conductor is coated with silicon dioxide and hexagonal boron nitride colloid, and the coating thickness on the surface of the copper conductor is 1-2 μm.
优选的,气雾化铁镍钼粉末粒径为D50=30μm,气雾化铁镍粉末粒径为D50=12μm。 Preferably, the particle size of the aerosolized iron-nickel-molybdenum powder is D50=30 μm, and the particle size of the aerosolized iron-nickel powder is D50=12 μm.
一种直插式一体成型共烧电感的制备方法,包括如下步骤:A method for preparing a direct-insert integrated co-fired inductor comprises the following steps:
(1)软磁金属粉末的预处理;(1) Pretreatment of soft magnetic metal powder;
(2)将倒U形铜导体两端伸出粉末外,其余部分埋入处理后的金属粉末中,使用1700-2100MPa高压进行压制成型;(2) The two ends of the inverted U-shaped copper conductor are extended out of the powder, and the rest is buried in the treated metal powder, and pressed into shape using a high pressure of 1700-2100 MPa;
(3)使用还原气氛对步骤(2)得到的产品进行梯度退火处理;(3) performing gradient annealing treatment on the product obtained in step (2) using a reducing atmosphere;
(4)将退火后的产品含浸于树脂溶液内,经过洗涤、烘烤后得到直插式一体成型共烧电感。(4) The annealed product is impregnated in a resin solution, and after washing and baking, a direct-insert integrated co-fired inductor is obtained.
优选的,步骤(1)中,软磁金属粉末的预处理包括软磁金属粉末的混合、钝化处理、绝缘处理、包覆处理和添加润滑剂,其中:Preferably, in step (1), the pretreatment of the soft magnetic metal powder includes mixing, passivation treatment, insulation treatment, coating treatment and adding lubricant of the soft magnetic metal powder, wherein:
a)软磁金属粉末的混合:将气雾化铁镍钼粉末与气雾化铁镍粉末进行混合,得到混合粉末;a) mixing of soft magnetic metal powders: mixing aerosolized iron-nickel-molybdenum powder with aerosolized iron-nickel powder to obtain a mixed powder;
b)钝化处理:使用钝化剂钝化混合粉末,得到钝化后的混合粉末;b) passivation treatment: passivating the mixed powder with a passivating agent to obtain a passivated mixed powder;
c)绝缘处理:使用绝缘剂对钝化后的混合粉末进行绝缘处理;c) Insulation treatment: Use an insulating agent to insulate the passivated mixed powder;
d)包覆处理:使用包覆剂包覆绝缘处理后的混合粉末;d) Coating treatment: using a coating agent to coat the mixed powder after insulation treatment;
e)添加润滑剂:将润滑剂加入到包覆后的混合粉末中。e) Adding lubricant: adding lubricant to the mixed powder after coating.
优选的,步骤(3)中,还原气氛为氢气与氮气的混合气体,其中氢气体积占混合气体体积的30-50%,氮气体积占混合气体体积的50-70%。Preferably, in step (3), the reducing atmosphere is a mixed gas of hydrogen and nitrogen, wherein the volume of hydrogen accounts for 30-50% of the volume of the mixed gas, and the volume of nitrogen accounts for 50-70% of the volume of the mixed gas.
优选的,步骤(3)中,梯度退火处理是指退火时温度呈梯度上升,梯度退火处理有五个保温阶段,第一阶段保温温度为300-330℃,保温时间为30-50min;第二阶段的保温温度为490-510℃,保温时间为40-50min;第三阶段的保温温度为590-610℃,保温时间为50-70min;第四阶段保温温度为690-710℃,保温时间为50-70min;第五阶段的保温温度为790-800℃,保温时间为30-40min,最后随炉冷却至室温。Preferably, in step (3), the gradient annealing treatment refers to a temperature gradient increase during annealing, and the gradient annealing treatment has five insulation stages, the insulation temperature of the first stage is 300-330°C, and the insulation time is 30-50min; the insulation temperature of the second stage is 490-510°C, and the insulation time is 40-50min; the insulation temperature of the third stage is 590-610°C, and the insulation time is 50-70min; the insulation temperature of the fourth stage is 690-710°C, and the insulation time is 50-70min; the insulation temperature of the fifth stage is 790-800°C, and the insulation time is 30-40min, and finally the furnace is cooled to room temperature.
优选的,步骤(4)中,用于含浸产品的树脂溶液为环氧树脂的丙酮溶液,含浸时间为30-50min,含浸后洗涤时间为0.5-1.0min,烘烤条件为160-180℃下保温60-80min。Preferably, in step (4), the resin solution used for impregnating the product is an acetone solution of epoxy resin, the impregnation time is 30-50 min, the washing time after impregnation is 0.5-1.0 min, and the baking conditions are 160-180° C. and kept warm for 60-80 min.
本发明与现有技术相比,具有以下优点:Compared with the prior art, the present invention has the following advantages:
1.采用本发明方法对软磁金属粉末进行预处理后,绝缘性优良的包覆层可以紧密包裹在粉末表面,使粉末具有一定的成型性,压制后不会出现分层、开裂等问题,同时不会因为高压压制产生膜层破裂等问题,所以可以使用一体成型的工艺进行制备成型,成型后可以进行去应力热处理,使直插式一体成型共烧电感具有高磁屏蔽特性、高机械制成能力、磁心高密度、高磁导率、低损耗等优点。 1. After the soft magnetic metal powder is pretreated by the method of the present invention, the coating layer with excellent insulation properties can be tightly wrapped on the surface of the powder, so that the powder has a certain formability, and there will be no problems such as delamination and cracking after pressing. At the same time, there will be no problems such as film rupture due to high-pressure pressing. Therefore, an integrated molding process can be used for preparation and molding. After molding, stress relief heat treatment can be performed, so that the direct-insertion integrated co-fired inductor has the advantages of high magnetic shielding characteristics, high mechanical manufacturing capability, high magnetic core density, high magnetic permeability, low loss, etc.
2.本发明中,使用的原始粉末为气雾化铁镍钼粉末与气雾化铁镍粉末,因为铁镍钼粉末在软磁金属粉末中具有最低的损耗特性、最高的密度,因此在产品体积确定的前提下,使用铁镍钼粉末能够更多的填充粉末,从而获得更高的磁导率,即产品得到更高的电感值。气雾化铁镍粉末在软磁金属粉末中具有较低的损耗、较高的密度、最优的叠加特性,因此混合了气雾化铁镍粉末可以使产品具有高的直流叠加特性。2. In the present invention, the original powders used are atomized iron-nickel-molybdenum powder and atomized iron-nickel powder, because iron-nickel-molybdenum powder has the lowest loss characteristics and the highest density among soft magnetic metal powders. Therefore, under the premise of determining the volume of the product, the use of iron-nickel-molybdenum powder can fill more powder, thereby obtaining a higher magnetic permeability, that is, the product obtains a higher inductance value. The atomized iron-nickel powder has lower loss, higher density, and the best superposition characteristics among soft magnetic metal powders, so mixing the atomized iron-nickel powder can make the product have a high DC superposition characteristic.
3.本发明中,使用的气雾化铁镍钼粉末与气雾化铁镍粉末粒径不同,在产品的压制过程中,大颗粒的铁镍钼粉末相互接触后会在三维空间内会产生大量的空隙,此时小颗粒的铁镍粉末可以填充到这些空隙内,因此产品得到了充分的填充,产品的密度更高、磁导率更高。3. In the present invention, the aerosolized iron-nickel-molybdenum powder used has a different particle size from the aerosolized iron-nickel powder. During the pressing process of the product, large particles of iron-nickel-molybdenum powder will contact each other and produce a large number of gaps in the three-dimensional space. At this time, small particles of iron-nickel powder can be filled into these gaps, so the product is fully filled, and the product has a higher density and a higher magnetic permeability.
4.本发明中,对混合粉末使用了复合钝化工艺,利用磷酸与金属反应后会在表面生成磷酸盐膜层,铬酸具有强氧化性,可进一步对未反应的区域进行包覆。所用的绝缘剂中,钨酸锆具有一定的负热膨胀系数,可以降低绝缘层的膨胀尺度,使绝缘层在热处理过程不会因润滑剂等有机材料受热分解而产生破裂,硅酸铝镁、纳米氧化铝则都具有优异的绝缘性与热稳定性,保证粉末在热处理之后仍然保持高的绝缘电阻性质,钛酸脂偶联剂的加入则有效的提升了绝缘层与钝化层的连结作用。包覆剂采用苯乙烯嵌段共聚物、热塑性聚氨酯,该物质不仅可以提升产品压制后的强度,在受热后还具有一定的弹塑性,可进一步预防电感制备过程中的热处理导致的产品分层或开裂现象。4. In the present invention, a composite passivation process is used for the mixed powder, and a phosphate film layer is generated on the surface after phosphoric acid reacts with the metal. Chromic acid has strong oxidizing properties and can further coat the unreacted area. Among the insulating agents used, zirconium tungstate has a certain negative thermal expansion coefficient, which can reduce the expansion scale of the insulating layer, so that the insulating layer will not be broken due to the thermal decomposition of organic materials such as lubricants during the heat treatment process. Magnesium aluminum silicate and nano-alumina have excellent insulation and thermal stability, ensuring that the powder still maintains high insulation resistance properties after heat treatment. The addition of titanate coupling agent effectively enhances the connection between the insulating layer and the passivation layer. The coating agent uses styrene block copolymer and thermoplastic polyurethane. This material can not only improve the strength of the product after pressing, but also has a certain elastic plasticity after heating, which can further prevent the product stratification or cracking caused by heat treatment during the preparation of the inductor.
5.本发明中,直插式一体成型共烧电感所用铜导体表面进行了无机绝缘处理,解决了传统铜导体表面有机绝缘层在高温下分解的问题,二氧化硅与六方氮化硼胶体在高温下特性稳定,能够保证铜导体的绝缘特性,避免热处理后出现的短路风险。同时,本发明中的铜导体形状为倒U形,在制成后可以直接插入PCB板预留孔位进行焊接,操作简单,且不会产生因铜导体的折角工序带来的产品分层开裂等问题,进一步的,本发明摒弃了传统的螺形线圈,压制成型过程中可忽略因压力过大带来的线圈变形问题及线圈短路问题。5. In the present invention, the surface of the copper conductor used in the direct-insertion integrated co-fired inductor is treated with inorganic insulation, which solves the problem of decomposition of the organic insulation layer on the surface of the traditional copper conductor at high temperature. The silica and hexagonal boron nitride colloids are stable at high temperatures, which can ensure the insulation properties of the copper conductor and avoid the risk of short circuit after heat treatment. At the same time, the copper conductor in the present invention is in an inverted U shape, which can be directly inserted into the reserved hole of the PCB board for welding after being made. The operation is simple, and there will be no problems such as product delamination and cracking caused by the angle bending process of the copper conductor. Furthermore, the present invention abandons the traditional spiral coil, and the coil deformation problem and coil short circuit problem caused by excessive pressure can be ignored during the pressing process.
6.本发明中,使用的热处理工艺为还原气氛下的梯度退火处理,还原气氛中氢气的存在可以避免粉末因氧化带来的损耗升高问题,而氮气则是保障安全,防止燃烧、爆炸的危险。按照梯度曲线升温,能够有效避免产品在持续升温过程中因为热膨胀系数不均带来的产品开裂、分层等问题,大幅提升产品的合格率。 6. In the present invention, the heat treatment process used is a gradient annealing process under a reducing atmosphere. The presence of hydrogen in the reducing atmosphere can avoid the problem of increased loss of powder due to oxidation, while nitrogen ensures safety and prevents the danger of combustion and explosion. Heating according to the gradient curve can effectively avoid problems such as product cracking and delamination caused by uneven thermal expansion coefficients during the continuous heating process, greatly improving the qualified rate of products.
7.本发明中,直插式一体成型共烧电感在热处理结束后进行环氧树脂溶液的含浸,可以填充产品中部分有机物质因热处理而分解带来的空隙,从而加强了产品内部的绝缘特性,同时大幅提升产品的强度,产品可靠性得到了保证。7. In the present invention, the plug-in integrated co-fired inductor is impregnated with an epoxy resin solution after the heat treatment, which can fill the gaps caused by the decomposition of some organic substances in the product due to the heat treatment, thereby strengthening the insulation properties inside the product and greatly improving the strength of the product, thereby ensuring the reliability of the product.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为直插式一体成型共烧电感用倒U形铜导体;FIG1 is an inverted U-shaped copper conductor for a direct-insert integrated co-fired inductor;
图2为直插式一体成型共烧电感,其中:1-为铜导体,2-为软磁金属粉末;FIG2 is a direct-insertion integrated co-fired inductor, wherein: 1- is a copper conductor, 2- is a soft magnetic metal powder;
图3为实施例1的梯度退火曲线。FIG. 3 is a gradient annealing curve of Example 1.
具体实施方式DETAILED DESCRIPTION
下面通过具体实施例,对本发明的技术方案作进一步具体的说明。The technical solution of the present invention is further specifically described below through specific embodiments.
在本发明中,若非特指,所有原料均可从市场购得或是本行业常用的,下述实施例中的方法,如无特别说明,均为本领域常规方法。In the present invention, unless otherwise specified, all raw materials can be purchased from the market or are commonly used in the industry. The methods in the following embodiments, unless otherwise specified, are conventional methods in the art.
实施例1Example 1
(1)软磁金属粉末的预处理:将D50=30μm的70g气雾化铁镍钼粉末与D50=12μm的30g气雾化铁镍粉末混合均匀;向混合粉末中加入铬酸0.2g、磷酸0.4g、适量蒸馏水搅拌并加热,待粉末干燥后冷却至室温;向冷却粉末中加入硅酸铝镁粉末0.5g、纳米氧化铝粉末0.8g、钨酸锆粉末0.7g、钛酸脂偶联剂0.2g,同时加入适量蒸馏水搅拌并加热,待粉末干燥后冷却至室温;向冷却粉末中加入0.8g苯乙烯嵌段共聚物、1.0g热塑性聚氨酯、适量的丙酮搅拌并抽风,待粉末干燥后加入0.3g硬脂酸锌作为润滑剂并混合均匀;(1) Pretreatment of soft magnetic metal powder: 70 g of atomized iron-nickel-molybdenum powder with D50=30 μm and 30 g of atomized iron-nickel powder with D50=12 μm are mixed evenly; 0.2 g of chromic acid, 0.4 g of phosphoric acid and an appropriate amount of distilled water are added to the mixed powder, stirred and heated, and the powder is cooled to room temperature after drying; 0.5 g of aluminum magnesium silicate powder, 0.8 g of nano-alumina powder, 0.7 g of zirconium tungstate powder and 0.2 g of titanate coupling agent are added to the cooled powder, and an appropriate amount of distilled water is added, stirred and heated, and the powder is cooled to room temperature after drying; 0.8 g of styrene block copolymer, 1.0 g of thermoplastic polyurethane and an appropriate amount of acetone are added to the cooled powder, stirred and ventilated, and 0.3 g of zinc stearate is added as a lubricant after the powder is dried and mixed evenly;
(2)使用二氧化硅与六方氮化硼胶体涂覆倒U形铜导体1(见图1),导体表面干燥后埋入步骤(1)预处理后的软磁金属粉末2中,使用2000MPa压力压制成型;(2) using silicon dioxide and hexagonal boron nitride colloid to coat an inverted U-shaped copper conductor 1 (see FIG. 1 ), and after the conductor surface is dried, embedding it in the soft magnetic metal powder 2 pretreated in step (1), and pressing it into shape using a pressure of 2000 MPa;
(3)使用还原气氛对步骤(2)得到的产品进行梯度退火处理,还原气氛为氢气与氮气的混合气体,其中氢气体积占混合气体体积的50%,氮气体积占混合气体体积的50%,退火曲线如图3所示,在300℃下保温50min、500℃下保温50min、600℃下保温60min、700℃下保温60min、800℃下保温40min,后随炉冷却至室温;(3) performing gradient annealing treatment on the product obtained in step (2) using a reducing atmosphere, wherein the reducing atmosphere is a mixed gas of hydrogen and nitrogen, wherein the volume of hydrogen accounts for 50% of the volume of the mixed gas, and the volume of nitrogen accounts for 50% of the volume of the mixed gas. The annealing curve is shown in FIG. 3, wherein the product is kept at 300° C. for 50 min, 500° C. for 50 min, 600° C. for 60 min, 700° C. for 60 min, and 800° C. for 40 min, and then cooled to room temperature with the furnace;
(4)将退火后的产品含浸于环氧树脂的丙酮溶液内30min,经过洗涤0.5min、180℃下烘烤60min后得到直插式一体成型共烧电感,见图2。(4) The annealed product was immersed in an acetone solution of epoxy resin for 30 minutes, washed for 0.5 minutes, and baked at 180° C. for 60 minutes to obtain a direct-insert integrated co-fired inductor, as shown in FIG2 .
对比例1 Comparative Example 1
本对比例与实施例1的区别在于,步骤(1)中使用的原始粉末为D50=30μm的70g气雾化铁镍钼粉末与D50=15μm的30g气雾化铁硅铬粉末。The difference between this comparative example and Example 1 is that the original powder used in step (1) is 70 g of atomized iron-nickel-molybdenum powder with D50=30 μm and 30 g of atomized iron-silicon-chromium powder with D50=15 μm.
对比例2Comparative Example 2
本对比例与实施例1的区别在于,步骤(2)中使用的铜导体为表面涂层为聚酰亚胺的铜导体。The difference between this comparative example and Example 1 is that the copper conductor used in step (2) is a copper conductor with a surface coating of polyimide.
对比例3Comparative Example 3
本对比例与实施例1的区别在于,步骤(2)中使用的铜导体表面无涂层。The difference between this comparative example and Example 1 is that the copper conductor used in step (2) has no coating on its surface.
对比例4Comparative Example 4
本对比例与实施例1的区别在于,步骤(3)中使用的退火气氛为纯氮气。The difference between this comparative example and Example 1 is that the annealing atmosphere used in step (3) is pure nitrogen.
对比例5Comparative Example 5
本对比例与实施例1的区别在于,步骤(3)中热处理条件为三段式梯度退火处理,退火方式为:第一阶段保温温度为200℃,保温时间为90min;第二阶段的保温温度为600℃,保温时间为90min;第三阶段的保温温度为800℃,保温时间为60min,最后随炉冷却至室温。The difference between this comparative example and Example 1 is that the heat treatment condition in step (3) is a three-stage gradient annealing treatment, and the annealing method is: the insulation temperature of the first stage is 200°C, and the insulation time is 90 min; the insulation temperature of the second stage is 600°C, and the insulation time is 90 min; the insulation temperature of the third stage is 800°C, and the insulation time is 60 min, and finally the furnace is cooled to room temperature.
对比例6Comparative Example 6
本对比例与实施例1的区别在于,步骤(3)中热处理条件为从室温迅速升温至800℃并保温60min,后随炉冷却至室温。The difference between this comparative example and Example 1 is that the heat treatment condition in step (3) is to rapidly raise the temperature from room temperature to 800° C. and keep the temperature for 60 min, and then cool the furnace to room temperature.
对比例7Comparative Example 7
本对比例与实施例1的区别在于,步骤(3)结束后完成,无环氧树脂含浸步骤。The difference between this comparative example and Example 1 is that step (3) is completed after completion, and there is no epoxy resin impregnation step.
实施例1与对比例1、对比例2、对比例3、对比例4、对比例5、对比例6、对比例7特性测试结果如表1所示:The test results of the characteristics of Example 1, Comparative Example 1, Comparative Example 2, Comparative Example 3, Comparative Example 4, Comparative Example 5, Comparative Example 6 and Comparative Example 7 are shown in Table 1:
表1实施例1与对比例1、对比例2、对比例3、对比例4、对比例5、对比例6、对比例7特性测试结果
Table 1 Characteristic test results of Example 1 and Comparative Examples 1, 2, 3, 4, 5, 6 and 7
通过以上实施例与对比例可以看到,采用气雾化铁镍钼与气雾化铁镍粉末在还原气氛下、按照五段式的梯度退火曲线升温热处理后,具有最优的电感值、最优的损耗特性。将实施例1与对比例对比后发现,对比例2中,铜导体保留原有有机物质包覆层会在热处理过程中发生轻微分层,导致损耗特性恶化;对比例3中,若铜导体表面无涂层,则会大幅提升铜导体与粉末颗粒之间形成的涡流损耗,导致整体损耗升高;对比例5和6中,对于热处理过程,直接升温至最高或升温曲线过快,会因材料的热膨胀效果不同导致产品有微小裂纹或内应力未完全释放,导致损耗过高或电感值降低;对比例7中,热处理结束后,没有进行含浸工艺,虽然电磁特性优于其他对比例,但是在跌落测试实验中,电感器直接粉碎,毫无强度,因此现实生产中根本无法使用。Through the above embodiments and comparative examples, it can be seen that the atomized iron-nickel-molybdenum and atomized iron-nickel powder have the best inductance value and the best loss characteristics after being heated and heat-treated in a reducing atmosphere according to a five-stage gradient annealing curve. After comparing Example 1 with the comparative example, it is found that in Comparative Example 2, the copper conductor retains the original organic coating layer, which will be slightly stratified during the heat treatment process, resulting in deterioration of the loss characteristics; in Comparative Example 3, if the surface of the copper conductor is uncoated, the eddy current loss formed between the copper conductor and the powder particles will be greatly increased, resulting in an increase in overall loss; in Comparative Examples 5 and 6, for the heat treatment process, directly heating to the highest temperature or the heating curve is too fast, the product will have tiny cracks or the internal stress is not completely released due to the different thermal expansion effects of the material, resulting in excessive loss or reduced inductance; in Comparative Example 7, after the heat treatment, no impregnation process is performed. Although the electromagnetic characteristics are better than other comparative examples, in the drop test experiment, the inductor is directly crushed and has no strength, so it cannot be used in actual production.
实施例2Example 2
(1)软磁金属粉末的预处理:将D50=30μm的60g气雾化铁镍钼粉末与D50=12μm的40g气雾化铁镍粉末混合均匀;向混合粉末中加入铬酸0.1g、磷酸0.5g、适量蒸馏水搅拌并加热,待粉末干燥后冷却至室温;向冷却粉末中加入硅酸铝镁粉末0.35g、纳米氧化铝粉末0.4g、钨酸锆粉末0.4g、钛酸脂偶联剂0.1g,同时加入适量蒸馏水搅拌并加热,待粉末干燥后冷却至室温;向冷却粉末中加入0.6g苯乙烯嵌段共聚物、0.5g热塑性聚氨酯、适量的丙酮搅拌并抽风,待粉末干燥后加入0.3g硬脂酸镁作为润滑剂并混合均匀; (1) Pretreatment of soft magnetic metal powder: 60 g of atomized iron-nickel-molybdenum powder with D50=30 μm and 40 g of atomized iron-nickel powder with D50=12 μm are mixed evenly; 0.1 g of chromic acid, 0.5 g of phosphoric acid and an appropriate amount of distilled water are added to the mixed powder, stirred and heated, and the powder is cooled to room temperature after drying; 0.35 g of aluminum magnesium silicate powder, 0.4 g of nano-alumina powder, 0.4 g of zirconium tungstate powder and 0.1 g of titanate coupling agent are added to the cooled powder, and an appropriate amount of distilled water is added, stirred and heated, and the powder is cooled to room temperature after drying; 0.6 g of styrene block copolymer, 0.5 g of thermoplastic polyurethane and an appropriate amount of acetone are added to the cooled powder, stirred and exhausted, and 0.3 g of magnesium stearate is added as a lubricant after the powder is dried and mixed evenly;
(2)使用二氧化硅与六方氮化硼胶体涂覆倒U形铜导体,导体表面干燥后埋入步骤(1)处理后的软磁金属粉末中,使用1800MPa压力压制成型;(2) using silicon dioxide and hexagonal boron nitride colloid to coat an inverted U-shaped copper conductor, and after the surface of the conductor is dried, embedding it in the soft magnetic metal powder treated in step (1), and pressing it into shape using a pressure of 1800 MPa;
(3)使用还原气氛对步骤(2)得到的产品进行梯度退火处理,还原气氛为氢气与氮气的混合气体,其中氢气体积占混合气体体积的35%,氮气体积占混合气体体积的65%,退火方式为在300℃下保温50min、500℃下保温50min、600℃下保温60min、700℃下保温60min、800℃下保温40min,后随炉冷却至室温;(3) performing gradient annealing treatment on the product obtained in step (2) using a reducing atmosphere, wherein the reducing atmosphere is a mixed gas of hydrogen and nitrogen, wherein the volume of hydrogen accounts for 35% of the volume of the mixed gas, and the volume of nitrogen accounts for 65% of the volume of the mixed gas, and the annealing method is to keep the temperature at 300° C. for 50 min, keep the temperature at 500° C. for 50 min, keep the temperature at 600° C. for 60 min, keep the temperature at 700° C. for 60 min, and keep the temperature at 800° C. for 40 min, and then cool to room temperature with the furnace;
(4)将退火后的产品含浸于环氧树脂的丙酮溶液内30min,经过洗涤0.5min,180℃下烘烤60min后得到直插式一体成型共烧电感。(4) The annealed product was immersed in an acetone solution of epoxy resin for 30 minutes, washed for 0.5 minutes, and baked at 180° C. for 60 minutes to obtain a direct-insert integrated co-fired inductor.
对比例8Comparative Example 8
本对比例与实施例2的区别在于,使用的原始粉末全部为铁硅铝粉末,且D50=30μm。The difference between this comparative example and Example 2 is that the original powders used are all Sendust powders, and D50=30 μm.
对比例9Comparative Example 9
本对比例与实施例2的区别在于,使用原始粉末全部为气雾化铁硅粉末,且D50=30μm。The difference between this comparative example and Example 2 is that the original powder used is all gas-atomized iron silicon powder, and D50=30 μm.
对比例10Comparative Example 10
本对比例与实施例2的区别在于,步骤(1)中使用的钝化剂为0.6g磷酸的水溶液,钝化结束后直接加入2.35g环氧树脂进行包覆。The difference between this comparative example and Example 2 is that the passivating agent used in step (1) is an aqueous solution of 0.6 g phosphoric acid, and 2.35 g epoxy resin is directly added for coating after the passivation is completed.
对比例11Comparative Example 11
本对比例与实施例2的区别在于,步骤1中粉末钝化之后加入的绝缘剂为1.25g纳米氧化镁粉末。The difference between this comparative example and Example 2 is that the insulating agent added after the powder passivation in step 1 is 1.25 g of nano magnesium oxide powder.
实施例2与对比例8、对比例9、对比例10、对比例11特性测试结果如表2所示:The test results of the characteristics of Example 2, Comparative Example 8, Comparative Example 9, Comparative Example 10 and Comparative Example 11 are shown in Table 2:
表2实施例2与对比例8、对比例9、对比例10、对比例11特性测试结果
Table 2 Characteristic test results of Example 2 and Comparative Examples 8, 9, 10 and 11
根据表2可以看出,使用气雾化铁镍钼粉末混合气雾化铁镍粉末压制得到的产品明显具有高电感值、低损耗、高叠加的特性,这是因为气雾化铁镍钼粉末磁导率高、损耗最低,气雾化铁镍粉末直流叠加特性好、损耗特性远优于铁硅材料,因此混合后的粉末兼具了两种粉末的优点。而通过实施例2与对比例10、对比例11的结果可以看到,在磁导率相差不大的条件下,产品的损耗具有很大差别,这是因为产品损耗主要包含了磁滞损耗与涡流损耗,磁滞损耗是压制过程、热处理等带来的影响,而涡流损耗又包含了粉末颗粒内部的涡流、粉末颗粒之间的涡流、粉末与导体之间的涡流,只有粉末绝缘特性最够好,涡流损耗才会降低,实施例2中对粉末进行了钝化、绝缘、包覆的处理,使用的材料也都具有良好绝缘性,因此能够有效降低产品的涡流损耗,进而整体损耗优于对比例。According to Table 2, it can be seen that the product obtained by pressing the gas-atomized iron-nickel-molybdenum powder mixed with the gas-atomized iron-nickel powder obviously has the characteristics of high inductance, low loss and high superposition, because the gas-atomized iron-nickel-molybdenum powder has high magnetic permeability and the lowest loss, and the gas-atomized iron-nickel powder has good DC superposition characteristics and loss characteristics far superior to iron-silicon materials, so the mixed powder has the advantages of both powders. And it can be seen from the results of Example 2 and Comparative Example 10 and Comparative Example 11 that under the condition that the magnetic permeability is not much different, the loss of the product is very different, because the product loss mainly includes hysteresis loss and eddy current loss, and hysteresis loss is the influence brought by the pressing process, heat treatment, etc., and eddy current loss includes eddy current inside the powder particles, eddy current between the powder particles, and eddy current between the powder and the conductor. Only when the powder insulation characteristics are good enough, the eddy current loss will be reduced. In Example 2, the powder is passivated, insulated, and coated, and the materials used also have good insulation, so the eddy current loss of the product can be effectively reduced, and then the overall loss is better than the comparative example.
最后应说明的是,以上实施例仅用以说明本发明的技术方案,而非对其限制,尽管参照上述实施例对本发明进行了详细的说明,所属领域的普通技术人员应当理解,依然可以对本发明的具体实施方式进行修改或者等同替换,而未脱离本发明精神和范围的任何修改或者等同替换,其均应涵盖在本发明的权利要求范围当中。 Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that the specific implementation modes of the present invention can still be modified or replaced by equivalents, and any modification or equivalent replacement that does not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims (9)

  1. 一种直插式一体成型共烧电感,其特征在于,该电感由软磁金属粉末、倒U形铜导体两部分组成,铜导体两端伸出粉末外,其余部分埋于粉末中,铜导体和软磁金属粉末经过压制成型、梯度退火处理、含浸于树脂溶液、洗涤、烘烤后,得到直插式一体成型共烧电感;A plug-in integrated co-fired inductor, characterized in that the inductor consists of two parts: a soft magnetic metal powder and an inverted U-shaped copper conductor, the two ends of the copper conductor extend out of the powder, and the rest of the copper conductor is buried in the powder, and the copper conductor and the soft magnetic metal powder are pressed, gradient annealed, impregnated with a resin solution, washed, and baked to obtain a plug-in integrated co-fired inductor;
    其中,软磁金属粉末包括气雾化铁镍钼粉末、气雾化铁镍粉末、钝化剂、绝缘剂、包覆剂、润滑剂;The soft magnetic metal powder includes aerosolized iron-nickel-molybdenum powder, aerosolized iron-nickel powder, a passivating agent, an insulating agent, a coating agent, and a lubricant;
    其中,以气雾化铁镍钼粉末与气雾化铁镍粉末的混合粉末质量为计算基础,气雾化铁镍钼粉末占混合粉末质量的60-70%,粒径D50为25-38μm,气雾化铁镍粉末占混合粉末质量的40-30%,粒径D50为10-15μm;The mass of the mixed powder of the atomized iron-nickel-molybdenum powder and the atomized iron-nickel powder is used as the calculation basis, the atomized iron-nickel-molybdenum powder accounts for 60-70% of the mass of the mixed powder, and the particle size D50 is 25-38 μm, and the atomized iron-nickel powder accounts for 40-30% of the mass of the mixed powder, and the particle size D50 is 10-15 μm;
    其中,钝化剂为磷酸和铬酸的混合溶液,铬酸质量占混合粉末质量的0.1-0.2%,磷酸质量占混合粉末质量的0.4-0.6%;The passivating agent is a mixed solution of phosphoric acid and chromic acid, wherein the mass of chromic acid accounts for 0.1-0.2% of the mass of the mixed powder, and the mass of phosphoric acid accounts for 0.4-0.6% of the mass of the mixed powder;
    其中,绝缘剂为硅酸铝镁、纳米氧化铝、钨酸锆、钛酸脂偶联剂的混合物质;The insulating agent is a mixture of magnesium aluminum silicate, nano-aluminum oxide, zirconium tungstate and titanate coupling agent;
    其中,包覆剂为苯乙烯嵌段共聚物、热塑性聚氨酯的混合物质;Wherein, the coating agent is a mixture of styrene block copolymer and thermoplastic polyurethane;
    其中,铜导体表面涂覆了二氧化硅与六方氮化硼胶体;Among them, the copper conductor surface is coated with silicon dioxide and hexagonal boron nitride colloid;
    其中,梯度退火处理有五个保温阶段,第一阶段保温温度为300-330℃,保温时间为30-50min;第二阶段的保温温度为490-510℃,保温时间为40-50min;第三阶段的保温温度为590-610℃,保温时间为50-70min;第四阶段保温温度为690-710℃,保温时间为50-70min;第五阶段的保温温度为790-800℃,保温时间为30-40min,最后随炉冷却至室温。Among them, the gradient annealing treatment has five insulation stages. The insulation temperature of the first stage is 300-330℃, and the insulation time is 30-50min; the insulation temperature of the second stage is 490-510℃, and the insulation time is 40-50min; the insulation temperature of the third stage is 590-610℃, and the insulation time is 50-70min; the insulation temperature of the fourth stage is 690-710℃, and the insulation time is 50-70min; the insulation temperature of the fifth stage is 790-800℃, and the insulation time is 30-40min, and finally it is cooled to room temperature with the furnace.
  2. 如权利要求1所述的一种直插式一体成型共烧电感,其特征在于,所述润滑剂为硬脂酸镁、硬脂酸锌、硬脂酸中的一种或几种,润滑剂质量占混合粉末质量的0.3-0.4%。The plug-in integrated co-fired inductor according to claim 1 is characterized in that the lubricant is one or more of magnesium stearate, zinc stearate, and stearic acid, and the mass of the lubricant accounts for 0.3-0.4% of the mass of the mixed powder.
  3. 如权利要求1所述的一种直插式一体成型共烧电感,其特征在于,所述气雾化铁镍钼粉末粒径为D50=30μm,气雾化铁镍粉末粒径为D50=12μm。The plug-in integrated co-fired inductor according to claim 1 is characterized in that the particle size of the atomized iron-nickel-molybdenum powder is D50=30 μm, and the particle size of the atomized iron-nickel powder is D50=12 μm.
  4. 如权利要求1所述的一种直插式一体成型共烧电感,其特征在于,所述硅酸铝镁质量占混合粉末质量的0.3-0.6%,纳米氧化铝质量占混合粉末质量的0.2-1.0%,钨酸锆质量占混合粉末质量的0.2-0.8%,钛酸脂偶联剂质量占混合粉末质量的0.1-0.2%;所述苯乙烯嵌段共聚物质量占混合粉末质量的0.5-1.0%,热塑性聚氨酯质量占混合粉末质量的0.4-1.2%。 A plug-in integrated co-fired inductor as described in claim 1, characterized in that the mass of magnesium aluminum silicate accounts for 0.3-0.6% of the mass of the mixed powder, the mass of nano alumina accounts for 0.2-1.0% of the mass of the mixed powder, the mass of zirconium tungstate accounts for 0.2-0.8% of the mass of the mixed powder, and the mass of titanate coupling agent accounts for 0.1-0.2% of the mass of the mixed powder; the mass of the styrene block copolymer accounts for 0.5-1.0% of the mass of the mixed powder, and the mass of the thermoplastic polyurethane accounts for 0.4-1.2% of the mass of the mixed powder.
  5. 如权利要求1所述的一种直插式一体成型共烧电感,其特征在于,所述铜导体表面的涂层厚度为1-2μm。The direct-insert integrated co-fired inductor according to claim 1, characterized in that the coating thickness on the surface of the copper conductor is 1-2 μm.
  6. 权利要求1所述直插式一体成型共烧电感的制备方法,其特征在于,包含以下步骤:The method for preparing the direct-insertion integrated co-fired inductor according to claim 1 is characterized in that it comprises the following steps:
    (1)软磁金属粉末的预处理;(1) Pretreatment of soft magnetic metal powder;
    (2)将倒U形铜导体两端伸出粉末外,其余部分埋入处理后的金属粉末中,使用1700-2100MPa高压进行压制成型;(2) The two ends of the inverted U-shaped copper conductor are extended out of the powder, and the rest is buried in the treated metal powder, and pressed into shape using a high pressure of 1700-2100 MPa;
    (3)使用还原气氛对步骤(2)得到的产品进行梯度退火处理;(3) performing gradient annealing treatment on the product obtained in step (2) using a reducing atmosphere;
    (4)将退火后的产品含浸于树脂溶液内,经过洗涤、烘烤后得到直插式一体成型共烧电感。(4) The annealed product is impregnated in a resin solution, and after washing and baking, a direct-insert integrated co-fired inductor is obtained.
  7. 根据权利要求6所述的直插式一体成型共烧电感的制备方法,其特征在于,所述步骤(1)中,软磁金属粉末的预处理包括软磁金属粉末的混合、钝化处理、绝缘处理、包覆处理和添加润滑剂,其中:The method for preparing a plug-in integrated co-fired inductor according to claim 6 is characterized in that in the step (1), the pretreatment of the soft magnetic metal powder includes mixing, passivation, insulation, coating and adding lubricant of the soft magnetic metal powder, wherein:
    a)软磁金属粉末的混合:将气雾化铁镍钼粉末与气雾化铁镍粉末进行混合,得到混合粉末;a) mixing of soft magnetic metal powders: mixing aerosolized iron-nickel-molybdenum powder with aerosolized iron-nickel powder to obtain a mixed powder;
    b)钝化处理:使用钝化剂钝化混合粉末,得到钝化后的混合粉末;b) passivation treatment: passivating the mixed powder with a passivating agent to obtain a passivated mixed powder;
    c)绝缘处理:使用绝缘剂对钝化后的混合粉末进行绝缘处理;c) Insulation treatment: Use an insulating agent to insulate the passivated mixed powder;
    d)包覆处理:使用包覆剂包覆绝缘处理后的混合粉末;d) Coating treatment: using a coating agent to coat the mixed powder after insulation treatment;
    e)添加润滑剂:将润滑剂加入到包覆后的混合粉末中。e) Adding lubricant: adding lubricant to the mixed powder after coating.
  8. 根据权利要求6所述的直插式一体成型共烧电感的制备方法,其特征在于,所述步骤(3)中,还原气氛为氢气与氮气的混合气体,其中氢气体积占混合气体体积的30-50%,氮气体积占混合气体体积的50-70%。The method for preparing a plug-in integrated co-fired inductor according to claim 6 is characterized in that in the step (3), the reducing atmosphere is a mixed gas of hydrogen and nitrogen, wherein the volume of hydrogen accounts for 30-50% of the volume of the mixed gas, and the volume of nitrogen accounts for 50-70% of the volume of the mixed gas.
  9. 根据权利要求6所述的直插式一体成型共烧电感的制备方法,其特征在于,所述步骤(4)中,树脂溶液为环氧树脂的丙酮溶液,含浸时间为30-50min,含浸后洗涤时间为0.5-1.0min,烘烤条件为160-180℃条件下保温60-80min。 The method for preparing a plug-in integrated co-fired inductor according to claim 6 is characterized in that, in the step (4), the resin solution is an acetone solution of epoxy resin, the impregnation time is 30-50 min, the washing time after impregnation is 0.5-1.0 min, and the baking condition is 160-180 ° C and kept warm for 60-80 min.
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