WO2024131462A1 - Cutter height measurement method and apparatus, and device and readable storage medium - Google Patents

Cutter height measurement method and apparatus, and device and readable storage medium Download PDF

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Publication number
WO2024131462A1
WO2024131462A1 PCT/CN2023/134543 CN2023134543W WO2024131462A1 WO 2024131462 A1 WO2024131462 A1 WO 2024131462A1 CN 2023134543 W CN2023134543 W CN 2023134543W WO 2024131462 A1 WO2024131462 A1 WO 2024131462A1
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WO
WIPO (PCT)
Prior art keywords
tool
detection signal
value
preset
photoelectric sensor
Prior art date
Application number
PCT/CN2023/134543
Other languages
French (fr)
Chinese (zh)
Inventor
朱时成
陈阳
Original Assignee
苏州镁伽科技有限公司
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Filing date
Publication date
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Publication of WO2024131462A1 publication Critical patent/WO2024131462A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Definitions

  • the present application relates to the field of semiconductor cutting technology, and in particular to a method, device, equipment and readable storage medium for measuring the height of a tool.
  • the dicing machine is a key equipment in the semiconductor industry, mainly used for processing wafer cutting lanes.
  • the dicing machine uses the Z-axis air spindle to drive the grinding wheel tool to cut.
  • the tool is constantly wearing. If the corresponding Z-axis position of the tool remains unchanged during cutting, the corresponding cutting depth will gradually become shallower as the tool wears.
  • the present invention provides a method, device, equipment and readable storage medium for measuring the height of a tool, aiming to improve the accuracy of the tool height measurement results.
  • an embodiment of the present invention provides a method for measuring the height of a tool, the method comprising:
  • the tool is detected by a photoelectric sensor arranged on the moving path of the tool, and a tool detection signal output by the photoelectric sensor is obtained in real time;
  • the photoelectric sensor has a detection light path, and the detection light path is located on the moving path of the tool, when the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value, and when the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value toward the second value;
  • a first measured height of the tool is determined according to a distance between an initial position and the preset position.
  • the photoelectric sensor includes a light emitting unit and a light receiving unit, the light emitting unit emits detection light toward the light receiving unit to form the detection light path, and the step of acquiring the tool detection signal output by the photoelectric sensor includes:
  • the light receiving unit converts the light signal received from the light emitting unit into an electrical signal
  • the electric signal is converted into a digital signal to obtain the tool detection signal.
  • the light receiving unit converts the optical signal received from the light emitting unit into an electrical signal, comprising:
  • converting the electrical signal into a digital signal to obtain the tool detection signal comprises:
  • the electrical signal corresponding to each preset cycle is converted into a digital signal.
  • the method before judging whether the tool has reached a preset position according to the tool detection signal, the method further comprises:
  • the digital signal is sampled based on a preset sampling interval, and the sampled digital signal is used as a tool detection signal.
  • judging whether the tool has reached a preset position according to the tool detection signal includes:
  • each preset cycle based on the tool detection signal corresponding to the cycle, it is searched whether there is a second value exceeding the preset threshold value, and if the search result is yes, it is determined that the tool has reached the preset position.
  • the method for measuring the height of the tool further includes:
  • a second measured height is determined based on the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, wherein the height relationship between the preset position and the processing table is pre-calibrated.
  • the tool detection signal output by the photoelectric sensor decreases.
  • the extreme value of the tool detection signal is lower than a preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position.
  • an embodiment of the present invention provides a tool height measuring device, the device comprising:
  • a control module used for controlling the tool to rotate and move downward from an initial position
  • An acquisition module used to detect the tool through a photoelectric sensor arranged on the moving path of the tool, and acquire a tool detection signal output by the photoelectric sensor in real time;
  • a judgment module for judging whether the tool has reached a preset position according to the tool detection signal, wherein, when the extreme value of the tool detection signal changes from a first value to a second value and the second value exceeds a preset threshold value, it is determined that the lowest point of the edge of the tool during rotation has reached the preset position, the photoelectric sensor has a detection light path, the detection light path is located on the moving path of the tool, when the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value, when the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value toward the second value;
  • the first determination module is used to determine a first measured height of the tool according to a distance between an initial position and the preset position.
  • the photoelectric sensor includes a light emitting unit and a light receiving unit, and the light emitting unit emits light toward the light receiving unit.
  • the detection light is used to form a detection light path, and the acquisition module 302 specifically includes:
  • a first conversion unit used for the light receiving unit to convert the optical signal received from the light emitting unit into an electrical signal
  • the second conversion unit is used to convert the electrical signal into a digital signal to obtain a tool detection signal.
  • the first conversion unit is specifically used to convert the optical signal output by the light receiving unit in the current cycle into an electrical signal in a preset cycle, and the preset cycle is greater than or equal to the length of time required for the tool to rotate one circle, and is an integer multiple of the length of time required for the tool to rotate one circle;
  • the second conversion unit is specifically used to convert the electrical signal into a digital signal to obtain a tool detection signal, including: converting the electrical signal corresponding to each preset period into a digital signal.
  • the device further comprises:
  • a filtering module used for performing sliding filtering on the digital signal corresponding to each preset period
  • the first sampling module is used to sample the signal after the sliding filter to obtain a tool detection signal corresponding to the preset period.
  • the second sampling module is used to sample the digital signal based on a preset sampling interval and use the sampled digital signal as a tool detection signal.
  • the judgment module is specifically used to search whether there is a second value exceeding a preset threshold value within each preset cycle based on the tool detection signal corresponding to the cycle, and determine that the tool has reached the preset position if the search result is yes.
  • the device further comprises:
  • the second determination module is used to determine a second measured height according to the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, wherein the height relationship between the preset position and the processing table is pre-calibrated.
  • an embodiment of the present invention provides a device, the device comprising:
  • a processor is used to execute the computer program so that the device executes the tool height measurement method described in any one of the first aspects above.
  • an embodiment of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method for measuring the height of a tool as described in any one of the first aspects is implemented.
  • the present invention has the following beneficial effects:
  • the present invention discloses a method, device, equipment and readable storage medium for measuring the height of a tool, which controls the tool to rotate and move downward from an initial position, detects the tool through a photoelectric sensor set on the tool's moving path, obtains the tool detection signal output by the photoelectric sensor in real time, and determines whether the tool has reached a preset position based on the tool detection signal.
  • the extreme value of the tool detection signal changes from a first value to a second value, and the second value exceeds a preset threshold, it is determined that the lowest point of the edge of the tool during rotation has reached the preset position, and finally the first measured height of the tool is determined based on the distance between the initial position and the preset position.
  • the present invention does not require contact height measurement of the tool, and the height measurement process The problem that the resistance values of different types of blades from different manufacturers are often quite different will not be affected. This will improve the accuracy of the tool height measurement result.
  • the present invention can detect the second value to identify the position of the lowest point of the tool edge, and can achieve accurate height measurement when the tool itself is eccentric due to quality problems or actual wear, thereby avoiding the influence of tool eccentricity on the measurement accuracy.
  • FIG1 is a schematic diagram of a system framework involved in an application scenario in an embodiment of the present invention.
  • FIG2 is a flow chart of a method for measuring the height of a tool provided by an embodiment of the present invention
  • FIG3 is a schematic structural diagram of a tool height measuring device provided by an embodiment of the present invention.
  • FIG4 is a schematic diagram of the structure of a computer-readable medium provided in an embodiment of the present invention.
  • FIG. 5 is a schematic diagram of the hardware structure of a server provided in an embodiment of the present invention.
  • the dicing machine is a key equipment in the semiconductor industry, mainly used for processing wafer cutting lanes.
  • the dicing machine uses the Z-axis air spindle to drive the grinding wheel tool to cut. As the processing progresses, the tool is constantly wearing. If the Z-axis position remains unchanged, the corresponding cutting depth will gradually become shallower.
  • the present invention discloses a method, device, equipment and readable storage medium for measuring the height of a tool, which controls the tool to rotate and move downward from an initial position, detects the tool through a photoelectric sensor set on the moving path of the tool, obtains the tool detection signal output by the photoelectric sensor in real time, and determines whether the tool has reached a preset position based on the tool detection signal.
  • the extreme value of the tool detection signal changes from a first value to a second value, and the second value exceeds a preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process reaches the preset position, and finally the first measured height of the tool is determined based on the distance between the initial position and the preset position.
  • the scenario includes a tool 101 and a photoelectric sensor 102, wherein the photoelectric sensor detects a rotating tool moving downward from an initial position, and determines whether the tool reaches a preset position through a tool detection signal.
  • a computer can be used to implement a method for measuring the height of a tool using the implementation provided by the embodiments of the present invention.
  • the embodiments of the present invention are not limited in terms of the execution subject, as long as the actions disclosed in the implementation provided by the embodiments of the present invention are executed.
  • this figure is a flow chart of a method for measuring the height of a tool provided by an embodiment of the present invention.
  • the method for measuring the height of a tool provided by an embodiment of the present invention may include:
  • S201 Control the tool to rotate and move downward from the initial position.
  • the tool can be controlled to rotate and move from the zero point of the Z-axis movement. Of course, it can also move downward from any other calibrated position.
  • the Z-axis is taken as an example in the embodiment of the present invention.
  • S202 Detecting the tool through a photoelectric sensor disposed on the moving path of the tool, and acquiring a tool detection signal output by the photoelectric sensor in real time.
  • the photoelectric sensor includes a light emitting unit and a light receiving unit.
  • the light emitting unit emits detection light toward the light receiving unit to form a detection light path.
  • the light receiving unit first converts the light signal received from the light emitting unit into an electrical signal, and then converts the electrical signal into a digital signal to obtain a tool detection signal.
  • the tool is always in a rotating state, and the time length required for the tool to rotate one circle can be set as a cycle. Therefore, the light signal output by the light receiving unit in the current cycle can be converted into an electrical signal in a preset cycle.
  • the preset cycle is greater than or equal to the time length required for the tool to rotate one circle, and is an integer multiple of the time length required for the tool to rotate one circle.
  • S203 Determine whether the tool has reached a preset position based on the tool detection signal.
  • the extreme value of the tool detection signal output by the photoelectric sensor is a first value.
  • the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value to the second value.
  • the extreme value of the tool detection signal changes from the first value to the second value, and the second value exceeds the preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position.
  • S204 Determine a first measured height of the tool according to the distance between the initial position and the preset position.
  • the second measured height is determined according to the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, and the height relationship between the preset position and the processing table is pre-calibrated.
  • the present invention discloses a method for measuring the height of a tool.
  • the present invention does not require contact height measurement of the tool, and the height measurement process will not be affected by the problem that the resistance values of different types of blades from different manufacturers are often quite different. This improves the accuracy of the tool height measurement result.
  • the present invention completes the detection when the tool detection signal reaches a second data exceeding a preset threshold value during the detection process, even if the tool being detected has an eccentricity problem, there will not be a large error in the detection result, and thus will not lead to excessive compensation for tool wear in the subsequent process.
  • the solution of the present invention can also overcome the influence of tool eccentricity on height measurement accuracy.
  • the blade is not absolutely circular, that is, there is an eccentricity problem.
  • the detection light path of the photoelectric sensor is blocked by the edge of the tool, because the edge of the blade is not a standard circle, the luminous flux of the detection light path that is not blocked will also change as the blade rotates. This results in the light signal not being a constant value within one rotation of the tool, and the corresponding Electrical signals can also fluctuate.
  • the present invention can identify the edge of the eccentric tool that first reaches the preset position during the rotation process by detecting a second value that exceeds a preset threshold value, and determine the height to which the tool moves downward at this time, so that this height can be determined as the height to which the tool moves downward during cutting. In this way, the edge with the largest protrusion can be used for cutting, thereby preventing the protruding edge from damaging the carrier that carries the workpiece to be cut.
  • the photoelectric sensor used in the present invention includes a light emitting unit and a light receiving unit, the light emitted by the light emitting unit is the detection light path, and the emitted light will be received by the light receiving unit.
  • the photoelectric sensor also has a photoelectric conversion module for outputting a corresponding signal according to the amount of light received by the light receiving unit. If the detection light path is blocked, as the blocked part becomes larger, the luminous flux will decrease, and the signal voltage value output by the photoelectric conversion module will also decrease.
  • the preset position corresponds to the lowest position of the tool when cutting.
  • the edge of the tool that protrudes the most outward the position with the greatest distance from the tool axis
  • the preset position the lowest value of the voltage value output by the photoelectric sensor will be lower than the preset threshold value, and at this time, it is considered that the tool has reached the preset position.
  • the measurement accuracy will not be affected by the problem of tool eccentricity. If the accuracy needs to be improved, it is only necessary to reduce the speed at which the tool moves downward. The slower the moving speed, the more accurate the measurement result and the higher the accuracy, thereby being able to improve the accuracy of tool height measurement as a whole.
  • the present invention can also perform sliding filtering on the digital signal corresponding to each preset period after acquiring the tool detection signal output by the photoelectric sensor in real time, and then sample the signal after sliding filtering to obtain the tool detection signal corresponding to the preset period, and finally sample the digital signal based on the preset sampling interval, and use the sampled digital signal as the tool detection signal.
  • each preset period based on the tool detection signal corresponding to the period, it is searched whether there is a second value exceeding the preset threshold, and if the search result is yes, it is determined that the tool has reached the preset position.
  • the signal after sliding filtering is sampled to complete the downsampling process, and all the signals of the downsampling process are from the originally acquired signal. If downsampling is performed first and then sliding filtering is performed, the originally acquired signal will lose effective information due to downsampling, which will eventually lead to a large error in the result.
  • the device at least includes: a control module 301 , an acquisition module 302 , a judgment module 303 and a first determination module 304 .
  • a control module 301 is used to control the tool to rotate and move downward from an initial position
  • An acquisition module 302 is used to detect the tool through a photoelectric sensor arranged on the moving path of the tool, and acquire a tool detection signal output by the photoelectric sensor in real time;
  • the judgment module 303 is used to judge whether the tool has reached the preset position according to the tool detection signal, wherein when the extreme value of the tool detection signal changes from a first value to a second value and the second value exceeds a preset threshold value, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position, the photoelectric sensor has a detection light path, and the detection light path is located on the moving path of the tool. When the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is the first value. When the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value to the second value.
  • the first determination module 304 is used to determine a first measured height of the tool according to the distance between the initial position and the preset position.
  • the photoelectric sensor includes a light emitting unit and a light receiving unit, the light emitting unit emits detection light toward the light receiving unit to form a detection light path, and the acquisition module 302 specifically includes:
  • a first conversion unit used for the light receiving unit to convert the optical signal received from the light emitting unit into an electrical signal
  • the second conversion unit is used to convert the electrical signal into a digital signal to obtain a tool detection signal.
  • the first conversion unit is specifically used to convert the optical signal output by the light receiving unit in the current cycle into an electrical signal in a preset cycle, and the preset cycle is greater than or equal to the length of time required for the tool to rotate one circle, and is an integer multiple of the length of time required for the tool to rotate one circle;
  • the second conversion unit is specifically used to convert the electrical signal into a digital signal to obtain a tool detection signal, including: converting the electrical signal corresponding to each preset period into a digital signal.
  • the device further comprises:
  • a filtering module used for performing sliding filtering on the digital signal corresponding to each preset period
  • the first sampling module is used to sample the signal after the sliding filter to obtain a tool detection signal corresponding to the preset period.
  • the second sampling module is used to sample the digital signal based on a preset sampling interval and use the sampled digital signal as a tool detection signal.
  • the judgment module 303 is specifically used to search whether there is a second value exceeding a preset threshold value within each preset cycle based on the tool detection signal corresponding to the cycle, and determine that the tool has reached the preset position if the search result is yes.
  • the device further comprises:
  • the second determination module is used to determine a second measured height according to the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, wherein the height relationship between the preset position and the processing table is pre-calibrated.
  • the present invention discloses a tool height measuring device, wherein a control module 301 is used to control the tool to rotate and move downward from an initial position, and an acquisition module 302 is used to detect the tool through a photoelectric sensor arranged on the moving path of the tool, and obtain the tool detection signal output by the photoelectric sensor in real time.
  • a judgment module 303 is used to judge whether the tool has reached a preset position according to the tool detection signal, wherein when the extreme value of the tool detection signal changes from a first value to a second value and the second value exceeds a preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position, and the photoelectric sensor has a detection light path, and the detection light path is located on the moving path of the tool.
  • a first determination module 304 is used to determine the first measured height of the tool according to the distance between the initial position and the preset position. It can be seen that the present invention does not need to perform contact height measurement on the tool, and the height measurement process will not be affected by the problem that the resistance values of different types of blades from different manufacturers are often quite different, thereby improving the accuracy of the tool height measurement result.
  • this embodiment provides a computer-readable medium 400 on which a computer program 411 is stored.
  • the computer program 411 is executed by a processor, the steps of the tool height measurement method described in FIG. 2 are implemented.
  • a machine-readable medium may be a tangible medium that may contain or store a program for use by an instruction execution system, device, or apparatus or used in conjunction with an instruction execution system, device, or apparatus.
  • the machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium.
  • the machine-readable medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices, or any suitable combination of the foregoing. More specific examples of machine-readable storage media may include electronic devices based on one or more wires.
  • a portable computer disk a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.
  • RAM random access memory
  • ROM read-only memory
  • EPROM or flash memory erasable programmable read-only memory
  • CD-ROM compact disk read-only memory
  • CD-ROM compact disk read-only memory
  • magnetic storage device a magnetic storage device
  • the above-mentioned machine-readable medium of the present invention may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two.
  • the computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above.
  • Computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.
  • a computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device.
  • a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries a computer-readable program code.
  • This propagated data signal may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above.
  • the computer readable signal medium may also be any computer readable medium other than a computer readable storage medium, which may send, propagate or transmit a program for use by or in conjunction with an instruction execution system, apparatus or device.
  • the program code contained on the computer readable medium may be transmitted using any suitable medium, including but not limited to: wires, optical cables, RF (radio frequency), etc., or any suitable combination of the above.
  • the computer-readable medium may be included in the electronic device, or may exist independently without being incorporated into the electronic device.
  • the server 500 may have relatively large differences due to different configurations or performances, and may include one or more central processing units (CPU) 522 (for example, one or more processors) and a memory 532, and one or more storage media 530 (for example, one or more mass storage devices) storing application programs 540 or data 544.
  • the memory 532 and the storage medium 530 can be short-term storage or permanent storage.
  • the program stored in the storage medium 530 may include one or more modules (not shown in the figure), and each module may include a series of instruction operations in the server.
  • the central processing unit 522 can be configured to communicate with the storage medium 530 and execute a series of instruction operations in the storage medium 530 on the server 500.
  • the server 500 may also include one or more power supplies 526, one or more wired or wireless network interfaces 550, one or more input and output interfaces 558, and/or one or more operating systems 541, such as Windows ServerTM, Mac OS XTM, UnixTM, LinuxTM, FreeBSDTM, etc.
  • the steps executed by the tool height measurement method in the above embodiment can be based on the server structure shown in FIG. 5 .
  • an embodiment of the present invention includes a computer program product, which includes a computer program carried on a non-transitory computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart in FIG2.

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Abstract

A cutter height measurement method, comprising: controlling a cutter (101) to rotate and move downwards from an initial position; performing detection on the cutter (101) by means of a photoelectric sensor (102), which is arranged on a movement path of the cutter (101), and acquiring, in real time, a cutter detection signal which is outputted by the photoelectric sensor (102); determining, according to the cutter detection signal, whether the cutter (101) arrives at a preset position; when an extreme value of the cutter detection signal changes from a first numerical value to a second numerical value and the second numerical value exceeds a preset threshold value, determining that the lowest point of an edge of the cutter (101) arrives at the preset position during the rotation process; and finally, determining a first measurement height of the cutter according to the distance between the initial position and the preset position. By means of the cutter height measurement method, it is unnecessary to perform contact-type height measurement on a cutter, such that a height measurement process is not affected by a difference in resistance values of blades of different manufacturers, which blades are of different types, thereby improving the accuracy of a measurement result. Further provided are a cutter height measurement apparatus, and a device and a readable storage medium.

Description

一种刀具的高度测定方法、装置、设备及可读存储介质A method, device, equipment and readable storage medium for measuring the height of a tool
本发明要求于2022年12月20日提交中华人民共和国国家知识产权局、申请号为202211641382.7、申请名称为“一种刀具的高度测定方法、装置、设备及可读存储介质”的中国专利申请的优先权，其全部内容通过引用结合在本发明中。The present invention claims priority to the Chinese patent application filed with the State Intellectual Property Office of the People's Republic of China on December 20, 2022, with application number 202211641382.7 and application name "A method, device, equipment and readable storage medium for measuring the height of a tool", the entire contents of which are incorporated by reference into the present invention.
技术领域Technical Field
本申请涉及半导体切割技术领域，特别是涉及一种刀具的高度测定方法、装置、设备及可读存储介质。The present application relates to the field of semiconductor cutting technology, and in particular to a method, device, equipment and readable storage medium for measuring the height of a tool.
背景技术Background technique
划片机是半导体行业的关键设备，主要用于晶圆切割道的加工。划片机由Z轴承载空气主轴带动砂轮刀具进行划切，随着加工的进行，刀具在不断磨损，如果刀具切割时对应的Z轴位置保持不变的话，相应的切割深度会随着刀具磨损而逐渐变浅。The dicing machine is a key equipment in the semiconductor industry, mainly used for processing wafer cutting lanes. The dicing machine uses the Z-axis air spindle to drive the grinding wheel tool to cut. As the processing progresses, the tool is constantly wearing. If the corresponding Z-axis position of the tool remains unchanged during cutting, the corresponding cutting depth will gradually become shallower as the tool wears.
因此，需要对刀具进行测高从而保持加工时刀具与材料的相对位置不变。目前大多使用触式测高方法，利用刀具与工作台之间接入一定的电压，接入模数转换电路，最终通过电压变化计算电阻的方式判断刀具与工作台是否接触，再通过计算公式将刀具的磨损量计算出来。这种测高方法由于不同厂家不同类型的刀具的电阻值往往差异较大，从几十欧姆到几百上千欧姆的跨度很大，很难做到在大电阻及小电阻刀具切换时仍能做到高精度测高，存在着对刀具进行测高结果不准确的问题。Therefore, it is necessary to measure the height of the tool to keep the relative position of the tool and the material unchanged during processing. At present, most of the touch height measurement methods are used, which use a certain voltage between the tool and the workbench, connect to the analog-to-digital conversion circuit, and finally determine whether the tool is in contact with the workbench by calculating the resistance through the voltage change, and then calculate the wear of the tool through the calculation formula. This height measurement method is difficult to achieve high-precision height measurement when switching between high-resistance and low-resistance tools because the resistance values of different types of tools from different manufacturers often vary greatly, ranging from tens of ohms to hundreds of thousands of ohms. There is a problem of inaccurate tool height measurement results.
发明内容Summary of the invention
基于上述问题，本发明提供了一种刀具的高度测定方法、装置、设备及可读存储介质，旨在提高提高刀具测高结果的准确性。Based on the above problems, the present invention provides a method, device, equipment and readable storage medium for measuring the height of a tool, aiming to improve the accuracy of the tool height measurement results.
第一方面，本发明实施例提供了一种刀具的高度测定方法所述方法包括：In a first aspect, an embodiment of the present invention provides a method for measuring the height of a tool, the method comprising:
控制所述刀具旋转且从初始位置向下移动；Controlling the tool to rotate and move downward from an initial position;
通过设置在所述刀具的移动路径上的光电传感器对所述刀具进行检测，实时获取光电传感器输出的刀具检测信号；The tool is detected by a photoelectric sensor arranged on the moving path of the tool, and a tool detection signal output by the photoelectric sensor is obtained in real time;
根据所述刀具检测信号判断所述刀具是否到达预设位置，其中，在所述刀具检测信号的极值从第一数值变化为第二数值、且所述第二数值超出预设阈值的情况下，确定所述刀具在旋转过程中边缘的最低点到达所述预设位置，所述光电传感器具有检测光路，所述检测光路位于所述刀具的移动路径上，在所述检测光路未被遮挡时，所述光电传感器输出的刀具检测信号的极值为第一数值，当所述检测光路的被遮挡时，随着光通量的降低，所述光电传感器输出的刀具检测信号的极值将以从第一数值朝向第二数值的趋势进行变化；Determining whether the tool has reached a preset position according to the tool detection signal, wherein, when the extreme value of the tool detection signal changes from a first value to a second value, and the second value exceeds a preset threshold value, it is determined that the lowest point of the edge of the tool during rotation has reached the preset position, the photoelectric sensor has a detection light path, and the detection light path is located on the moving path of the tool, when the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value, and when the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value toward the second value;
根据初始位置与所述预设位置之间的距离确定所述刀具的第一测定高度。A first measured height of the tool is determined according to a distance between an initial position and the preset position.
可选的，所述光电传感器包括光发射单元和光接收单元，所述光发射单元朝向所述光接收单元发射检测光以形成所述检测光路，并且，所述获取光电传感器输出的刀具检测信号，包括：Optionally, the photoelectric sensor includes a light emitting unit and a light receiving unit, the light emitting unit emits detection light toward the light receiving unit to form the detection light path, and the step of acquiring the tool detection signal output by the photoelectric sensor includes:
所述光接收单元将其从光发射单元所接收到的光信号转换为电信号； The light receiving unit converts the light signal received from the light emitting unit into an electrical signal;
将所述电信号转换为数字信号得到所述刀具检测信号。The electric signal is converted into a digital signal to obtain the tool detection signal.
可选的，所述光接收单元将其从光发射单元所接收到的光信号转换为电信号，包括：Optionally, the light receiving unit converts the optical signal received from the light emitting unit into an electrical signal, comprising:
以预设周期将所述光接收单元在当前周期内输出的光信号转换为电信号，所述预设周期大于或等于所述刀具旋转一周所需的时间长度、且为刀具旋转一周所需时间长度的整数倍；Converting the optical signal output by the light receiving unit in the current cycle into an electrical signal in a preset cycle, wherein the preset cycle is greater than or equal to the length of time required for the tool to rotate one circle and is an integer multiple of the length of time required for the tool to rotate one circle;
并且，将所述电信号转换为数字信号得到所述刀具检测信号包括：Furthermore, converting the electrical signal into a digital signal to obtain the tool detection signal comprises:
将每个预设周期对应的电信号转换为数字信号。The electrical signal corresponding to each preset cycle is converted into a digital signal.
可选的，在根据所述刀具检测信号判断所述刀具是否到达预设位置之前，包括：Optionally, before judging whether the tool has reached a preset position according to the tool detection signal, the method further comprises:
对每个预设周期所对应的数字信号进行滑动滤波；Perform sliding filtering on the digital signal corresponding to each preset period;
对滑动滤波后的信号进行采样，得到对应该预设周期的刀具检测信号；Sampling the signal after sliding filtering to obtain a tool detection signal corresponding to the preset period;
基于预设采样间隔对所述数字信号进行采样，将采样后的数字信号作为刀具检测信号。The digital signal is sampled based on a preset sampling interval, and the sampled digital signal is used as a tool detection signal.
可选的，根据所述刀具检测信号判断所述刀具是否到达预设位置，包括：Optionally, judging whether the tool has reached a preset position according to the tool detection signal includes:
在每个预设周期内，基于该周期对应的刀具检测信号查找是否存在超出所述预设阈值的第二数值，并在查找结果为是的情况下，确定所述刀具到达所述预设位置。In each preset cycle, based on the tool detection signal corresponding to the cycle, it is searched whether there is a second value exceeding the preset threshold value, and if the search result is yes, it is determined that the tool has reached the preset position.
可选的，所述刀具的高度测定方法还包括：Optionally, the method for measuring the height of the tool further includes:
根据所述刀具的第一测定高度确定第二测定高度，其中，所述第二测定高度为在加工过程中所述刀具从所述初始位置朝向加工台面下降的最大高度，其中，所述预设位置与所述加工台面的高度关系是预先标定的。A second measured height is determined based on the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, wherein the height relationship between the preset position and the processing table is pre-calibrated.
可选的，随着光通量的降低，所述光电传感器输出的刀具检测信号减小，在根据所述刀具检测信号判断所述刀具是否到达预设位置时，当所述刀具检测信号的极值低于预设阈值的情况下，确定所述刀具在旋转过程中边缘的最低点到达所述预设位置。Optionally, as the light flux decreases, the tool detection signal output by the photoelectric sensor decreases. When judging whether the tool has reached the preset position based on the tool detection signal, when the extreme value of the tool detection signal is lower than a preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position.
第二方面，本发明实施例提供了一种刀具的高度测定装置，所述装置包括：In a second aspect, an embodiment of the present invention provides a tool height measuring device, the device comprising:
控制模块，用于控制所述刀具旋转且从初始位置向下移动；A control module, used for controlling the tool to rotate and move downward from an initial position;
获取模块，用于通过设置在所述刀具的移动路径上的光电传感器对所述刀具进行检测，实时获取光电传感器输出的刀具检测信号；An acquisition module, used to detect the tool through a photoelectric sensor arranged on the moving path of the tool, and acquire a tool detection signal output by the photoelectric sensor in real time;
判断模块，用于根据所述刀具检测信号判断所述刀具是否到达预设位置，其中，在所述刀具检测信号的极值从第一数值变化为第二数值、且所述第二数值超出预设阈值的情况下，确定所述刀具在旋转过程中边缘的最低点到达所述预设位置，所述光电传感器具有检测光路，所述检测光路位于所述刀具的移动路径上，在所述检测光路未被遮挡时，所述光电传感器输出的刀具检测信号的极值为第一数值，当所述检测光路的被遮挡时，随着光通量的降低，所述光电传感器输出的刀具检测信号的极值将以从第一数值朝向第二数值的趋势进行变化；a judgment module, for judging whether the tool has reached a preset position according to the tool detection signal, wherein, when the extreme value of the tool detection signal changes from a first value to a second value and the second value exceeds a preset threshold value, it is determined that the lowest point of the edge of the tool during rotation has reached the preset position, the photoelectric sensor has a detection light path, the detection light path is located on the moving path of the tool, when the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value, when the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value toward the second value;
第一确定模块，用于根据初始位置与所述预设位置之间的距离确定所述刀具的第一测定高度。The first determination module is used to determine a first measured height of the tool according to a distance between an initial position and the preset position.
可选的，光电传感器包括光发射单元和光接收单元，光发射单元朝向光接收单元发射 检测光以形成检测光路，并且，获取模块302具体包括：Optionally, the photoelectric sensor includes a light emitting unit and a light receiving unit, and the light emitting unit emits light toward the light receiving unit. The detection light is used to form a detection light path, and the acquisition module 302 specifically includes:
第一转换单元，用于光接收单元将其从光发射单元所接收到的光信号转换为电信号；A first conversion unit, used for the light receiving unit to convert the optical signal received from the light emitting unit into an electrical signal;
第二转换单元，用于将电信号转换为数字信号得到刀具检测信号。The second conversion unit is used to convert the electrical signal into a digital signal to obtain a tool detection signal.
可选的，第一转换单元，具体用于以预设周期将光接收单元在当前周期内输出的光信号转换为电信号，预设周期大于或等于刀具旋转一周所需的时间长度、且为刀具旋转一周所需时间长度的整数倍；Optionally, the first conversion unit is specifically used to convert the optical signal output by the light receiving unit in the current cycle into an electrical signal in a preset cycle, and the preset cycle is greater than or equal to the length of time required for the tool to rotate one circle, and is an integer multiple of the length of time required for the tool to rotate one circle;
可选的，第二转换单元，具体用于将电信号转换为数字信号得到刀具检测信号包括：将每个预设周期对应的电信号转换为数字信号。Optionally, the second conversion unit is specifically used to convert the electrical signal into a digital signal to obtain a tool detection signal, including: converting the electrical signal corresponding to each preset period into a digital signal.
可选的，所述装置还包括：Optionally, the device further comprises:
滤波模块，用于对每个预设周期所对应的数字信号进行滑动滤波；A filtering module, used for performing sliding filtering on the digital signal corresponding to each preset period;
第一采样模块，用于对滑动滤波后的信号进行采样，得到对应该预设周期的刀具检测信号。The first sampling module is used to sample the signal after the sliding filter to obtain a tool detection signal corresponding to the preset period.
第二采样模块，用于基于预设采样间隔对数字信号进行采样，将采样后的数字信号作为刀具检测信号。The second sampling module is used to sample the digital signal based on a preset sampling interval and use the sampled digital signal as a tool detection signal.
可选的，判断模块，具体用于在每个预设周期内，基于该周期对应的刀具检测信号查找是否存在超出预设阈值的第二数值，并在查找结果为是的情况下，确定刀具到达预设位置。Optionally, the judgment module is specifically used to search whether there is a second value exceeding a preset threshold value within each preset cycle based on the tool detection signal corresponding to the cycle, and determine that the tool has reached the preset position if the search result is yes.
可选的，所述装置还包括：Optionally, the device further comprises:
第二确定模块，用于根据刀具的第一测定高度确定第二测定高度，其中，第二测定高度为在加工过程中刀具从初始位置朝向加工台面下降的最大高度，其中，预设位置与加工台面的高度关系是预先标定的。The second determination module is used to determine a second measured height according to the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, wherein the height relationship between the preset position and the processing table is pre-calibrated.
第三方面，本发明实施例提供了一种设备，所述设备包括：In a third aspect, an embodiment of the present invention provides a device, the device comprising:
存储器，用于存储计算机程序；Memory for storing computer programs;
处理器，用于执行所述计算机程序，以使所述设备执行前述第一方面任一项所述一种刀具的高度测定方法。A processor is used to execute the computer program so that the device executes the tool height measurement method described in any one of the first aspects above.
第四方面，本发明实施例提供了一种计算机可读存储介质，所述计算机可读存储介质中存储有计算机程序，所述计算机程序被处理器执行时实现前述第一方面任一项所述一种刀具的高度测定方法，In a fourth aspect, an embodiment of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method for measuring the height of a tool as described in any one of the first aspects is implemented.
相较于现有技术，本发明具有以下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
本发明公开了一种刀具的高度测定方法、装置、设备及可读存储介质，控制刀具旋转且从初始位置向下移动，通过设置在刀具的移动路径上的光电传感器对刀具进行检测，实时获取光电传感器输出的刀具检测信号，根据刀具检测信号判断刀具是否到达预设位置，当刀具检测信号的极值从第一值变化为第二数值，并且第二数值超出预设阈值的情况下，确定刀具在旋转过程中边缘的最低点到达预设位置，最终根据初始位置与预设位置之间的距离确定刀具的第一测定高度。由此可见，本发明无需对刀具进行接触式测高，测高过程 不会受到因于不同厂家不同类型的刀片的电阻值往往差异较大的问题。进而提高了刀具测高结果的准确性。另外，本发明通过检测第二数值来识别刀具边缘最低点的位置，能够在刀具本身因质量问题或实际磨损原因导致偏心的情况下，实现精准测高，避免刀具偏心影响测高精度。The present invention discloses a method, device, equipment and readable storage medium for measuring the height of a tool, which controls the tool to rotate and move downward from an initial position, detects the tool through a photoelectric sensor set on the tool's moving path, obtains the tool detection signal output by the photoelectric sensor in real time, and determines whether the tool has reached a preset position based on the tool detection signal. When the extreme value of the tool detection signal changes from a first value to a second value, and the second value exceeds a preset threshold, it is determined that the lowest point of the edge of the tool during rotation has reached the preset position, and finally the first measured height of the tool is determined based on the distance between the initial position and the preset position. It can be seen that the present invention does not require contact height measurement of the tool, and the height measurement process The problem that the resistance values of different types of blades from different manufacturers are often quite different will not be affected. This will improve the accuracy of the tool height measurement result. In addition, the present invention can detect the second value to identify the position of the lowest point of the tool edge, and can achieve accurate height measurement when the tool itself is eccentric due to quality problems or actual wear, thereby avoiding the influence of tool eccentricity on the measurement accuracy.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
图1为本发明实施例中一种应用场景所涉及的系统框架示意图；FIG1 is a schematic diagram of a system framework involved in an application scenario in an embodiment of the present invention;
图2为本发明实施例提供的一种刀具的高度测定方法的方法流程图；FIG2 is a flow chart of a method for measuring the height of a tool provided by an embodiment of the present invention;
图3为本发明实施例提供的一种刀具的高度测定装置的结构示意图；FIG3 is a schematic structural diagram of a tool height measuring device provided by an embodiment of the present invention;
图4为本发明实施例提供的计算机可读介质的结构示意图；FIG4 is a schematic diagram of the structure of a computer-readable medium provided in an embodiment of the present invention;
图5为本发明实施例提供的服务器的硬件结构示意图。FIG. 5 is a schematic diagram of the hardware structure of a server provided in an embodiment of the present invention.
具体实施方式Detailed ways
正如前文描述，划片机是半导体行业的关键设备，主要用于晶圆切割道的加工。划片机由Z轴承载空气主轴带动砂轮刀具进行划切，随着加工的进行，刀具在不断磨损，如果Z轴位置保持不变的话，相应的切割深度会慢慢变浅。As described above, the dicing machine is a key equipment in the semiconductor industry, mainly used for processing wafer cutting lanes. The dicing machine uses the Z-axis air spindle to drive the grinding wheel tool to cut. As the processing progresses, the tool is constantly wearing. If the Z-axis position remains unchanged, the corresponding cutting depth will gradually become shallower.
因此，需要对刀具进行测高从而保持加工时刀具与材料的相对位置不变。目前大多使用触式测高方法，利用刀具与工作台之间接入一定的电压，接入模数转换电路，最终通过电压变化计算电阻的方式判断刀具与工作台是否接触，再通过计算公式将刀具的磨损量计算出来。这种测高方法由于不同厂家不同类型的刀具的电阻值往往差异较大，从几十欧姆到几百上千欧姆的跨度很大，很难做到在大电阻及小电阻刀具切换时仍能做到高精度测高，存在着对刀具进行测高结果不准确的问题。Therefore, it is necessary to measure the height of the tool to keep the relative position of the tool and the material unchanged during processing. At present, most of the touch height measurement methods are used, which use a certain voltage between the tool and the workbench, connect to the analog-to-digital conversion circuit, and finally determine whether the tool is in contact with the workbench by calculating the resistance through the voltage change, and then calculate the wear of the tool through the calculation formula. This height measurement method is difficult to achieve high-precision height measurement when switching between high-resistance and low-resistance tools because the resistance values of different types of tools from different manufacturers often vary greatly, ranging from tens of ohms to hundreds of thousands of ohms. There is a problem of inaccurate tool height measurement results.
基于此，为了解决上述问题，本发明公开了一种刀具的高度测定方法、装置、设备及可读存储介质，控制刀具旋转且从初始位置向下移动，通过设置在刀具的移动路径上的光电传感器对刀具进行检测，实时获取光电传感器输出的刀具检测信号，根据刀具检测信号判断刀具是否到达预设位置，当刀具检测信号的极值从第一值变化为第二数值，并且第二数值超出预设阈值的情况下，确定刀具在旋转过程中边缘的最低点到达预设位置，最终根据初始位置与预设位置之间的距离确定刀具的第一测定高度。由此可见，本发明无需对刀具进行接触式测高，测高过程不会受到因于不同厂家不同类型的刀片的电阻值往往差异较大的问题。进而提高了刀具测高结果的准确性。Based on this, in order to solve the above problems, the present invention discloses a method, device, equipment and readable storage medium for measuring the height of a tool, which controls the tool to rotate and move downward from an initial position, detects the tool through a photoelectric sensor set on the moving path of the tool, obtains the tool detection signal output by the photoelectric sensor in real time, and determines whether the tool has reached a preset position based on the tool detection signal. When the extreme value of the tool detection signal changes from a first value to a second value, and the second value exceeds a preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process reaches the preset position, and finally the first measured height of the tool is determined based on the distance between the initial position and the preset position. It can be seen that the present invention does not need to perform contact height measurement on the tool, and the height measurement process will not be affected by the problem that the resistance values of different types of blades from different manufacturers are often quite different. This improves the accuracy of the tool height measurement results.
举例来说，本发明实施例的场景之一，可以是应用到如图1所示的场景中。该场景包括刀具101和光电传感器102，其中光电传感器对从初始位置向下移动的旋转刀具进行检测，通过刀具检测信号判断刀具是否到达预设位置。在本发明中可以使用计算机来采用本发明实施例提供的实施方式实现一种刀具的高度测定方法。另外，本发明实施例在执行主体方面不受限制，只要执行了本发明实施例提供的实施方式所公开的动作即可。For example, one of the scenarios of the embodiments of the present invention can be applied to the scenario shown in FIG1. The scenario includes a tool 101 and a photoelectric sensor 102, wherein the photoelectric sensor detects a rotating tool moving downward from an initial position, and determines whether the tool reaches a preset position through a tool detection signal. In the present invention, a computer can be used to implement a method for measuring the height of a tool using the implementation provided by the embodiments of the present invention. In addition, the embodiments of the present invention are not limited in terms of the execution subject, as long as the actions disclosed in the implementation provided by the embodiments of the present invention are executed.
需要说明的是，上述场景仅是本发明实施例提供的一个场景示例，本发明实施例并不 限于此场景。It should be noted that the above scenario is only an example of a scenario provided by the embodiment of the present invention, and the embodiment of the present invention does not Limited to this scene.
为了使本技术领域的人员更好地理解本发明方案，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
参见图2，该图为本发明实施例提供的一种刀具的高度测定方法的方法流程图。结合图2所示，本发明实施例提供的刀具的测高方法，可以包括：Referring to Fig. 2, this figure is a flow chart of a method for measuring the height of a tool provided by an embodiment of the present invention. In conjunction with Fig. 2, the method for measuring the height of a tool provided by an embodiment of the present invention may include:
S201：控制刀具旋转且从初始位置向下移动。S201: Control the tool to rotate and move downward from the initial position.
在本发明实施例中，可以控制刀具旋转，从Z轴运动的零点开始移动。当然，也可以从其他任何已标定的位置向下移动，为方便理解，在本发明实施例中以Z轴为例。In the embodiment of the present invention, the tool can be controlled to rotate and move from the zero point of the Z-axis movement. Of course, it can also move downward from any other calibrated position. For ease of understanding, the Z-axis is taken as an example in the embodiment of the present invention.
S202：通过设置在刀具的移动路径上的光电传感器对刀具进行检测，实时获取光电传感器输出的刀具检测信号。S202: Detecting the tool through a photoelectric sensor disposed on the moving path of the tool, and acquiring a tool detection signal output by the photoelectric sensor in real time.
其中，光电传感器包括光发射单元和光接收单元，光发射单元朝向光接收单元发射检测光以形成检测光路。首先光接收单元将其从光发射单元所接收到的光信号转换为电信号，之后将电信号转换为数字信号得到刀具检测信号。The photoelectric sensor includes a light emitting unit and a light receiving unit. The light emitting unit emits detection light toward the light receiving unit to form a detection light path. The light receiving unit first converts the light signal received from the light emitting unit into an electrical signal, and then converts the electrical signal into a digital signal to obtain a tool detection signal.
并且刀具是一直处于旋转状态的，可以设定刀具旋转一周所需的时间长度为一个周期，因此，可以以预设周期将光接收单元在当前周期内输出的光信号转换为电信号，预设周期大于或等于刀具旋转一周所需的时间长度、且为刀具旋转一周所需时间长度的整数倍。And the tool is always in a rotating state, and the time length required for the tool to rotate one circle can be set as a cycle. Therefore, the light signal output by the light receiving unit in the current cycle can be converted into an electrical signal in a preset cycle. The preset cycle is greater than or equal to the time length required for the tool to rotate one circle, and is an integer multiple of the time length required for the tool to rotate one circle.
S203：根据刀具检测信号判断刀具是否到达预设位置。S203: Determine whether the tool has reached a preset position based on the tool detection signal.
通过监测位于刀具的移动路径上光电传感器的检测光路的刀具检测信号，当刀具未下降至光电传感器之间，也就是检测光路未被遮挡时，光电传感器输出的刀具检测信号的极值为第一数值。当检测光路的被遮挡时，随着光通量的降低，光电传感器输出的刀具检测信号的极值将以从第一数值朝向第二数值的趋势进行变化。在刀具检测信号的极值从第一数值变化为第二数值、且第二数值超出预设阈值的情况下，确定刀具在旋转过程中边缘的最低点到达预设位置。By monitoring the tool detection signal of the detection light path of the photoelectric sensor located on the moving path of the tool, when the tool has not dropped between the photoelectric sensors, that is, when the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value. When the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value to the second value. When the extreme value of the tool detection signal changes from the first value to the second value, and the second value exceeds the preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position.
S204：根据初始位置与预设位置之间的距离确定刀具的第一测定高度。S204: Determine a first measured height of the tool according to the distance between the initial position and the preset position.
根据刀具的第一测定高度确定第二测定高度，其中，第二测定高度为在加工过程中刀具从初始位置朝向加工台面下降的最大高度，预设位置与加工台面的高度关系是预先标定的。The second measured height is determined according to the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, and the height relationship between the preset position and the processing table is pre-calibrated.
本发明公开了一种刀具的高度测定方法，本发明无需对刀具进行接触式测高，测高过程不会受到因于不同厂家不同类型的刀片的电阻值往往差异较大的问题。进而提高了刀具测高结果的准确性。并且由于本发明在检测的过程中是当刀具检测信号到达超过预设阈值的第二数据的情况下即完成检测，即使被检测的刀具出现偏心的问题，也不会出现存在检测结果误差较大的情况，进而不会导致后续对刀具磨损量补偿过大的情况。The present invention discloses a method for measuring the height of a tool. The present invention does not require contact height measurement of the tool, and the height measurement process will not be affected by the problem that the resistance values of different types of blades from different manufacturers are often quite different. This improves the accuracy of the tool height measurement result. In addition, since the present invention completes the detection when the tool detection signal reaches a second data exceeding a preset threshold value during the detection process, even if the tool being detected has an eccentricity problem, there will not be a large error in the detection result, and thus will not lead to excessive compensation for tool wear in the subsequent process.
另外，本发明的方案还可以克服因为刀具偏心对测高精度带来的影响。在实际应用中，由于刀片工艺等原因，刀片不是绝对的圆形，即，出现偏心的问题。当光电传感器的检测光路被刀具边缘遮挡时，因为刀片的边缘并非标准圆形，所以随着刀片的旋转，检测光路未被遮挡的光通量也会变化，这就导致刀具旋转一周内，光信号不是一个恒定值，对应的 电信号也会出现波动。In addition, the solution of the present invention can also overcome the influence of tool eccentricity on height measurement accuracy. In practical applications, due to reasons such as blade technology, the blade is not absolutely circular, that is, there is an eccentricity problem. When the detection light path of the photoelectric sensor is blocked by the edge of the tool, because the edge of the blade is not a standard circle, the luminous flux of the detection light path that is not blocked will also change as the blade rotates. This results in the light signal not being a constant value within one rotation of the tool, and the corresponding Electrical signals can also fluctuate.
本发明通过检测超出预设阈值的第二数值，能够识别出偏心刀具在旋转过程中最先到达预设位置的边缘，并确定此时的刀具下移的高度，从而可以将此高度确定为切割时下移的高度，这样就能够利用突出最大的边缘进行切割，避免突出的边缘将承载被切割工件的载台切坏。The present invention can identify the edge of the eccentric tool that first reaches the preset position during the rotation process by detecting a second value that exceeds a preset threshold value, and determine the height to which the tool moves downward at this time, so that this height can be determined as the height to which the tool moves downward during cutting. In this way, the edge with the largest protrusion can be used for cutting, thereby preventing the protruding edge from damaging the carrier that carries the workpiece to be cut.
在一个实施例中，本发明采用的光电传感器包括光发射单元和光接收单元，光发射单元发射的光即为检测光路，且发出的光会被光接收单元所接收。光电传感器还具有光电转换模块，用于根据光接收单元所接收的光量输出对应的信号。如果检测光路被遮挡，随着被遮挡的部分原来越大，光通量会降低，光电转换模块输出的信号电压值也会降低。In one embodiment, the photoelectric sensor used in the present invention includes a light emitting unit and a light receiving unit, the light emitted by the light emitting unit is the detection light path, and the emitted light will be received by the light receiving unit. The photoelectric sensor also has a photoelectric conversion module for outputting a corresponding signal according to the amount of light received by the light receiving unit. If the detection light path is blocked, as the blocked part becomes larger, the luminous flux will decrease, and the signal voltage value output by the photoelectric conversion module will also decrease.
在本实施例中，预设位置对应于切割时刀具下降的最低位置。在测高时，当刀具旋转过程中刀具上向外突出最大的边缘(与刀具转轴距离最大的位置)到达预设位置时，光电传感器输出的电压值的最低值将低于预设阈值，此时即认为刀具到达预设位置。In this embodiment, the preset position corresponds to the lowest position of the tool when cutting. When measuring the height, when the edge of the tool that protrudes the most outward (the position with the greatest distance from the tool axis) reaches the preset position during the tool rotation, the lowest value of the voltage value output by the photoelectric sensor will be lower than the preset threshold value, and at this time, it is considered that the tool has reached the preset position.
因此，本发明在刀具的高度测量过程中，测量的精度不会收到刀具偏心问题的影响，需要进行精度提高的话，只需要降低刀具选装向下移动的速度，移动的速度越慢，结果测量越准确，精度越高，从而能够整体上提高刀具测高的精度。Therefore, in the process of measuring the height of the tool of the present invention, the measurement accuracy will not be affected by the problem of tool eccentricity. If the accuracy needs to be improved, it is only necessary to reduce the speed at which the tool moves downward. The slower the moving speed, the more accurate the measurement result and the higher the accuracy, thereby being able to improve the accuracy of tool height measurement as a whole.
此外，本发明为实现更加高效的刀具高度测量，在实时获取光电传感器输出的刀具检测信号后，还可以对每个预设周期所对应的数字信号进行滑动滤波，之后对滑动滤波后的信号进行采样，得到对应该预设周期的刀具检测信号，最终基于预设采样间隔对数字信号进行采样，将采样后的数字信号作为刀具检测信号。在每个预设周期内，基于该周期对应的刀具检测信号查找是否存在超出预设阈值的第二数值，并在查找结果为是的情况下，确定刀具到达预设位置。通过滑动滤波之后，对滑动滤波后的信号进行采样完成降采样处理，降采样处理的所有信号均来自于原始获取的信号。如果先进行降采样后进行滑动滤波处理，原始获取的信号会因降采样而丢失有效信息，最终导致结果误差较大。In addition, in order to achieve more efficient tool height measurement, the present invention can also perform sliding filtering on the digital signal corresponding to each preset period after acquiring the tool detection signal output by the photoelectric sensor in real time, and then sample the signal after sliding filtering to obtain the tool detection signal corresponding to the preset period, and finally sample the digital signal based on the preset sampling interval, and use the sampled digital signal as the tool detection signal. In each preset period, based on the tool detection signal corresponding to the period, it is searched whether there is a second value exceeding the preset threshold, and if the search result is yes, it is determined that the tool has reached the preset position. After sliding filtering, the signal after sliding filtering is sampled to complete the downsampling process, and all the signals of the downsampling process are from the originally acquired signal. If downsampling is performed first and then sliding filtering is performed, the originally acquired signal will lose effective information due to downsampling, which will eventually lead to a large error in the result.
参见图3，该图为本发明实施例提供的一种刀具的高度测定装置，该装置至少包括：控制模块301、获取模块302、判断模块303和第一确定模块304。3 , which shows a tool height measuring device provided by an embodiment of the present invention. The device at least includes: a control module 301 , an acquisition module 302 , a judgment module 303 and a first determination module 304 .
控制模块301，用于控制刀具旋转且从初始位置向下移动；A control module 301 is used to control the tool to rotate and move downward from an initial position;
获取模块302，用于通过设置在刀具的移动路径上的光电传感器对刀具进行检测，实时获取光电传感器输出的刀具检测信号；An acquisition module 302 is used to detect the tool through a photoelectric sensor arranged on the moving path of the tool, and acquire a tool detection signal output by the photoelectric sensor in real time;
判断模块303，用于根据刀具检测信号判断刀具是否到达预设位置，其中，在刀具检测信号的极值从第一数值变化为第二数值、且第二数值超出预设阈值的情况下，确定刀具在旋转过程中边缘的最低点到达预设位置，光电传感器具有检测光路，检测光路位于刀具的移动路径上，在检测光路未被遮挡时，光电传感器输出的刀具检测信号的极值为第一数值，当检测光路的被遮挡时，随着光通量的降低，光电传感器输出的刀具检测信号的极值将以从第一数值朝向第二数值的趋势进行变化；The judgment module 303 is used to judge whether the tool has reached the preset position according to the tool detection signal, wherein when the extreme value of the tool detection signal changes from a first value to a second value and the second value exceeds a preset threshold value, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position, the photoelectric sensor has a detection light path, and the detection light path is located on the moving path of the tool. When the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is the first value. When the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value to the second value.
第一确定模块304，用于根据初始位置与预设位置之间的距离确定刀具的第一测定高度。The first determination module 304 is used to determine a first measured height of the tool according to the distance between the initial position and the preset position.
可选的，光电传感器包括光发射单元和光接收单元，光发射单元朝向光接收单元发射检测光以形成检测光路，并且，获取模块302具体包括： Optionally, the photoelectric sensor includes a light emitting unit and a light receiving unit, the light emitting unit emits detection light toward the light receiving unit to form a detection light path, and the acquisition module 302 specifically includes:
第一转换单元，用于光接收单元将其从光发射单元所接收到的光信号转换为电信号；A first conversion unit, used for the light receiving unit to convert the optical signal received from the light emitting unit into an electrical signal;
第二转换单元，用于将电信号转换为数字信号得到刀具检测信号。The second conversion unit is used to convert the electrical signal into a digital signal to obtain a tool detection signal.
可选的，第一转换单元，具体用于以预设周期将光接收单元在当前周期内输出的光信号转换为电信号，预设周期大于或等于刀具旋转一周所需的时间长度、且为刀具旋转一周所需时间长度的整数倍；Optionally, the first conversion unit is specifically used to convert the optical signal output by the light receiving unit in the current cycle into an electrical signal in a preset cycle, and the preset cycle is greater than or equal to the length of time required for the tool to rotate one circle, and is an integer multiple of the length of time required for the tool to rotate one circle;
可选的，第二转换单元，具体用于将电信号转换为数字信号得到刀具检测信号包括：将每个预设周期对应的电信号转换为数字信号。Optionally, the second conversion unit is specifically used to convert the electrical signal into a digital signal to obtain a tool detection signal, including: converting the electrical signal corresponding to each preset period into a digital signal.
可选的，所述装置还包括：Optionally, the device further comprises:
滤波模块，用于对每个预设周期所对应的数字信号进行滑动滤波；A filtering module, used for performing sliding filtering on the digital signal corresponding to each preset period;
第一采样模块，用于对滑动滤波后的信号进行采样，得到对应该预设周期的刀具检测信号。The first sampling module is used to sample the signal after the sliding filter to obtain a tool detection signal corresponding to the preset period.
第二采样模块，用于基于预设采样间隔对数字信号进行采样，将采样后的数字信号作为刀具检测信号。The second sampling module is used to sample the digital signal based on a preset sampling interval and use the sampled digital signal as a tool detection signal.
可选的，判断模块303，具体用于在每个预设周期内，基于该周期对应的刀具检测信号查找是否存在超出预设阈值的第二数值，并在查找结果为是的情况下，确定刀具到达预设位置。Optionally, the judgment module 303 is specifically used to search whether there is a second value exceeding a preset threshold value within each preset cycle based on the tool detection signal corresponding to the cycle, and determine that the tool has reached the preset position if the search result is yes.
可选的，所述装置还包括：Optionally, the device further comprises:
第二确定模块，用于根据刀具的第一测定高度确定第二测定高度，其中，第二测定高度为在加工过程中刀具从初始位置朝向加工台面下降的最大高度，其中，预设位置与加工台面的高度关系是预先标定的。The second determination module is used to determine a second measured height according to the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, wherein the height relationship between the preset position and the processing table is pre-calibrated.
本发明公开了一种刀具的高度测定装置，控制模块301，用于控制刀具旋转且从初始位置向下移动，获取模块302，用于通过设置在刀具的移动路径上的光电传感器对刀具进行检测，实时获取光电传感器输出的刀具检测信号。判断模块303，用于根据刀具检测信号判断刀具是否到达预设位置，其中，在刀具检测信号的极值从第一数值变化为第二数值、且第二数值超出预设阈值的情况下，确定刀具在旋转过程中边缘的最低点到达预设位置，光电传感器具有检测光路，检测光路位于刀具的移动路径上，在检测光路未被遮挡时，光电传感器输出的刀具检测信号的极值为第一数值，当检测光路的被遮挡时，随着光通量的降低，光电传感器输出的刀具检测信号的极值将以从第一数值朝向第二数值的趋势进行变化。第一确定模块304，用于根据初始位置与预设位置之间的距离确定刀具的第一测定高度。由此可见，本发明无需对刀具进行接触式测高，测高过程不会受到因于不同厂家不同类型的刀片的电阻值往往差异较大的问题。进而提高了刀具测高结果的准确性。The present invention discloses a tool height measuring device, wherein a control module 301 is used to control the tool to rotate and move downward from an initial position, and an acquisition module 302 is used to detect the tool through a photoelectric sensor arranged on the moving path of the tool, and obtain the tool detection signal output by the photoelectric sensor in real time. A judgment module 303 is used to judge whether the tool has reached a preset position according to the tool detection signal, wherein when the extreme value of the tool detection signal changes from a first value to a second value and the second value exceeds a preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position, and the photoelectric sensor has a detection light path, and the detection light path is located on the moving path of the tool. When the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value. When the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value to the second value. A first determination module 304 is used to determine the first measured height of the tool according to the distance between the initial position and the preset position. It can be seen that the present invention does not need to perform contact height measurement on the tool, and the height measurement process will not be affected by the problem that the resistance values of different types of blades from different manufacturers are often quite different, thereby improving the accuracy of the tool height measurement result.
如图4所示，本实施例提供了一种计算机可读介质400，其上存储有计算机程序411，该计算机程序411被处理器执行时实现上述图2所述刀具的测高方法的步骤。As shown in FIG. 4 , this embodiment provides a computer-readable medium 400 on which a computer program 411 is stored. When the computer program 411 is executed by a processor, the steps of the tool height measurement method described in FIG. 2 are implemented.
需要说明的是，本发明的上下文中，机器可读介质可以是有形的介质，其可以包含或存储以供指令执行系统、装置或设备使用或与指令执行系统、装置或设备结合地使用的程序。机器可读介质可以是机器可读信号介质或机器可读储存介质。机器可读介质可以包括但不限于电子的、磁性的、光学的、电磁的、红外的、或半导体系统、装置或设备，或者上述内容的任何合适组合。机器可读存储介质的更具体示例会包括基于一个或多个线的电 气连接、便携式计算机盘、硬盘、随机存取存储器(RAM)、只读存储器(ROM)、可擦除可编程只读存储器(EPROM或快闪存储器)、光纤、便捷式紧凑盘只读存储器(CD-ROM)、光学储存设备、磁储存设备、或上述内容的任何合适组合。It should be noted that in the context of the present invention, a machine-readable medium may be a tangible medium that may contain or store a program for use by an instruction execution system, device, or apparatus or used in conjunction with an instruction execution system, device, or apparatus. The machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium. The machine-readable medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices, or any suitable combination of the foregoing. More specific examples of machine-readable storage media may include electronic devices based on one or more wires. air connection, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.
需要说明的是，本发明上述的机器可读介质可以是计算机可读信号介质或者计算机可读存储介质或者是上述两者的任意组合。计算机可读存储介质例如可以是——但不限于——电、磁、光、电磁、红外线、或半导体的系统、装置或器件，或者任意以上的组合。计算机可读存储介质的更具体的例子可以包括但不限于：具有一个或多个导线的电连接、便携式计算机磁盘、硬盘、随机访问存储器(RAM)、只读存储器(ROM)、可擦式可编程只读存储器(EPROM或闪存)、光纤、便携式紧凑磁盘只读存储器(CD-ROM)、光存储器件、磁存储器件、或者上述的任意合适的组合。在本发明中，计算机可读存储介质可以是任何包含或存储程序的有形介质，该程序可以被指令执行系统、装置或者器件使用或者与其结合使用。而在本发明中，计算机可读信号介质可以包括在基带中或者作为载波一部分传播的数据信号，其中承载了计算机可读的程序代码。这种传播的数据信号可以采用多种形式，包括但不限于电磁信号、光信号或上述的任意合适的组合。计算机可读信号介质还可以是计算机可读存储介质以外的任何计算机可读介质，该计算机可读信号介质可以发送、传播或者传输用于由指令执行系统、装置或者器件使用或者与其结合使用的程序。计算机可读介质上包含的程序代码可以用任何适当的介质传输，包括但不限于：电线、光缆、RF(射频)等等，或者上述的任意合适的组合。It should be noted that the above-mentioned machine-readable medium of the present invention may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present invention, a computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device. In the present invention, a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries a computer-readable program code. This propagated data signal may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. The computer readable signal medium may also be any computer readable medium other than a computer readable storage medium, which may send, propagate or transmit a program for use by or in conjunction with an instruction execution system, apparatus or device. The program code contained on the computer readable medium may be transmitted using any suitable medium, including but not limited to: wires, optical cables, RF (radio frequency), etc., or any suitable combination of the above.
上述计算机可读介质可以是上述电子设备中所包含的；也可以是单独存在，而未装配入该电子设备中。The computer-readable medium may be included in the electronic device, or may exist independently without being incorporated into the electronic device.
请参阅图5，图5是本发明实施例提供的一种服务器的硬件结构示意图，该服务器500可因配置或性能不同而产生比较大的差异，可以包括一个或一个以上中央处理器(central processing units，CPU)522(例如，一个或一个以上处理器)和存储器532，一个或一个以上存储应用程序540或数据544的存储介质530(例如一个或一个以上海量存储设备)。其中，存储器532和存储介质530可以是短暂存储或持久存储。存储在存储介质530的程序可以包括一个或一个以上模块(图示没标出)，每个模块可以包括对服务器中的一系列指令操作。更进一步地，中央处理器522可以设置为与存储介质530通信，在服务器500上执行存储介质530中的一系列指令操作。Please refer to Figure 5, which is a schematic diagram of the hardware structure of a server provided by an embodiment of the present invention. The server 500 may have relatively large differences due to different configurations or performances, and may include one or more central processing units (CPU) 522 (for example, one or more processors) and a memory 532, and one or more storage media 530 (for example, one or more mass storage devices) storing application programs 540 or data 544. Among them, the memory 532 and the storage medium 530 can be short-term storage or permanent storage. The program stored in the storage medium 530 may include one or more modules (not shown in the figure), and each module may include a series of instruction operations in the server. Furthermore, the central processing unit 522 can be configured to communicate with the storage medium 530 and execute a series of instruction operations in the storage medium 530 on the server 500.
服务器500还可以包括一个或一个以上电源526，一个或一个以上有线或无线网络接口550，一个或一个以上输入输出接口558，和/或，一个或一个以上操作系统541，例如Windows ServerTM，Mac OS XTM，UnixTM，LinuxTM，FreeBSDTM等等。The server 500 may also include one or more power supplies 526, one or more wired or wireless network interfaces 550, one or more input and output interfaces 558, and/or one or more operating systems 541, such as Windows ServerTM, Mac OS XTM, UnixTM, LinuxTM, FreeBSDTM, etc.
上述实施例中由刀具的测高方法所执行的步骤可以基于该图5所示的服务器结构。The steps executed by the tool height measurement method in the above embodiment can be based on the server structure shown in FIG. 5 .
还需要说明的，根据本发明的实施例，上述图2中的流程示意图描述的所述刀具的测高方法的过程可以被实现为计算机软件程序。例如，本发明的实施例包括一种计算机程序产品，其包括承载在非暂态计算机可读介质上的计算机程序，该计算机程序包含用于执行上述图2的流程示意图中所示的方法的程序代码。It should also be noted that, according to an embodiment of the present invention, the process of the tool height measurement method described in the flowchart in FIG2 can be implemented as a computer software program. For example, an embodiment of the present invention includes a computer program product, which includes a computer program carried on a non-transitory computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart in FIG2.
尽管已经采用特定于结构特征和/或方法逻辑动作的语言描述了本主题，但是应当理解所附权利要求书中所限定的主题未必局限于上面描述的特定特征或动作。相反，上面所描 述的特定特征和动作仅仅是实现权利要求书的示例形式。Although the subject matter has been described using language specific to structural features and/or methodological acts, it should be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. The specific features and acts described are merely example forms of implementing the claims.
虽然在上面论述中包含了若干具体实现细节，但是这些不应当被解释为对本发明的范围的限制。在单独的实施例的上下文中描述的某些特征还可以组合地实现在单个实施例中。相反地，在单个实施例的上下文中描述的各种特征也可以单独地或以任何合适的子组合的方式实现在多个实施例中。Although several specific implementation details are included in the above discussion, these should not be construed as limiting the scope of the present invention. Certain features described in the context of a separate embodiment may also be implemented in a single embodiment in combination. On the contrary, the various features described in the context of a single embodiment may also be implemented in multiple embodiments individually or in any suitable sub-combination.
以上描述仅为本发明的较佳实施例以及对所运用技术原理的说明。本领域技术人员应当理解，本发明中所涉及的公开范围，并不限于上述技术特征的特定组合而成的技术方案，同时也应涵盖在不脱离上述公开构思的情况下，由上述技术特征或其等同特征进行任意组合而形成的其它技术方案。例如上述特征与本发明中公开的(但不限于)具有类似功能的技术特征进行互相替换而形成的技术方案。 The above description is only a preferred embodiment of the present invention and an explanation of the technical principles used. Those skilled in the art should understand that the disclosure scope involved in the present invention is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the above disclosed concept. For example, the above features are replaced with the technical features with similar functions disclosed in the present invention (but not limited to) to form a technical solution.

Claims (10)

  1. 一种刀具的高度测定方法，其特征在于，所述方法包括：A method for measuring the height of a tool, characterized in that the method comprises:
    控制所述刀具旋转且从初始位置向下移动；Controlling the tool to rotate and move downward from an initial position;
    通过设置在所述刀具的移动路径上的光电传感器对所述刀具进行检测，实时获取光电传感器输出的刀具检测信号；The tool is detected by a photoelectric sensor arranged on the moving path of the tool, and a tool detection signal output by the photoelectric sensor is obtained in real time;
    根据所述刀具检测信号判断所述刀具是否到达预设位置，其中，在所述刀具检测信号的极值从第一数值变化为第二数值、且所述第二数值超出预设阈值的情况下，确定所述刀具在旋转过程中边缘的最低点到达所述预设位置，所述光电传感器具有检测光路，所述检测光路位于所述刀具的移动路径上，在所述检测光路未被遮挡时，所述光电传感器输出的刀具检测信号的极值为第一数值，当所述检测光路的被遮挡时，随着光通量的降低，所述光电传感器输出的刀具检测信号的极值将以从第一数值朝向第二数值的趋势进行变化；Determining whether the tool has reached a preset position according to the tool detection signal, wherein, when the extreme value of the tool detection signal changes from a first value to a second value, and the second value exceeds a preset threshold value, it is determined that the lowest point of the edge of the tool during rotation has reached the preset position, the photoelectric sensor has a detection light path, and the detection light path is located on the moving path of the tool, when the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value, and when the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value toward the second value;
    根据初始位置与所述预设位置之间的距离确定所述刀具的第一测定高度。A first measured height of the tool is determined according to a distance between an initial position and the preset position.
  2. 根据权利要求1所述的方法，其特征在于，所述光电传感器包括光发射单元和光接收单元，所述光发射单元朝向所述光接收单元发射检测光以形成所述检测光路，并且，所述获取光电传感器输出的刀具检测信号，包括：The method according to claim 1 is characterized in that the photoelectric sensor comprises a light emitting unit and a light receiving unit, the light emitting unit emits detection light toward the light receiving unit to form the detection light path, and the step of obtaining the tool detection signal output by the photoelectric sensor comprises:
    所述光接收单元将其从光发射单元所接收到的光信号转换为电信号；The light receiving unit converts the light signal received from the light emitting unit into an electrical signal;
    将所述电信号转换为数字信号得到所述刀具检测信号。The electric signal is converted into a digital signal to obtain the tool detection signal.
  3. 根据权利要求2所述的方法，其特征在于，所述光接收单元将其从光发射单元所接收到的光信号转换为电信号，包括：The method according to claim 2, characterized in that the light receiving unit converts the optical signal received from the light emitting unit into an electrical signal, comprising:
    以预设周期将所述光接收单元在当前周期内输出的光信号转换为电信号，所述预设周期大于或等于所述刀具旋转一周所需的时间长度、且为刀具旋转一周所需时间长度的整数倍；Converting the optical signal output by the light receiving unit in the current cycle into an electrical signal in a preset cycle, wherein the preset cycle is greater than or equal to the length of time required for the tool to rotate one circle and is an integer multiple of the length of time required for the tool to rotate one circle;
    并且，将所述电信号转换为数字信号得到所述刀具检测信号包括：Furthermore, converting the electrical signal into a digital signal to obtain the tool detection signal comprises:
    将每个预设周期对应的电信号转换为数字信号。The electrical signal corresponding to each preset cycle is converted into a digital signal.
  4. 根据权利要求3所述的方法，其特征在于，在所述根据所述刀具检测信号判断所述刀具是否到达预设位置之前，包括：The method according to claim 3 is characterized in that, before judging whether the tool has reached the preset position according to the tool detection signal, it includes:
    对每个预设周期所对应的数字信号进行滑动滤波；Perform sliding filtering on the digital signal corresponding to each preset period;
    对滑动滤波后的信号进行采样，得到对应该预设周期的刀具检测信号；Sampling the signal after sliding filtering to obtain a tool detection signal corresponding to the preset period;
    基于预设采样间隔对所述数字信号进行采样，将采样后的数字信号作为刀具检测信号。The digital signal is sampled based on a preset sampling interval, and the sampled digital signal is used as a tool detection signal.
  5. 根据权利要求4所述的方法，其特征在于，所述根据所述刀具检测信号判断所述刀具是否到达预设位置，包括：The method according to claim 4, characterized in that judging whether the tool has reached a preset position according to the tool detection signal comprises:
    在每个预设周期内，基于该周期对应的刀具检测信号查找是否存在超出所述预设阈值的第二数值，并在查找结果为是的情况下，确定所述刀具到达所述预设位置。In each preset cycle, based on the tool detection signal corresponding to the cycle, it is searched whether there is a second value exceeding the preset threshold value, and if the search result is yes, it is determined that the tool has reached the preset position.
  6. 根据权利要求1所述的方法，其特征在于，所述方法还包括：The method according to claim 1, characterized in that the method further comprises:
    根据所述刀具的第一测定高度确定第二测定高度，其中，所述第二测定高度为在加工过程中所述刀具从所述初始位置朝向加工台面下降的最大高度，其中，所述预设位置与所述加工台面的高度关系是预先标定的。 A second measured height is determined based on the first measured height of the tool, wherein the second measured height is the maximum height of the tool descending from the initial position toward the processing table during the processing, wherein the height relationship between the preset position and the processing table is pre-calibrated.
  7. 根据权利要求1所述的方法，其特征在于，随着光通量的降低，所述光电传感器输出的刀具检测信号减小，在根据所述刀具检测信号判断所述刀具是否到达预设位置时，当所述刀具检测信号的极值低于预设阈值的情况下，确定所述刀具在旋转过程中边缘的最低点到达所述预设位置。The method according to claim 1 is characterized in that as the light flux decreases, the tool detection signal output by the photoelectric sensor decreases, and when judging whether the tool has reached the preset position based on the tool detection signal, when the extreme value of the tool detection signal is lower than a preset threshold, it is determined that the lowest point of the edge of the tool during the rotation process has reached the preset position.
  8. 一种刀具的高度测定装置，其特征在于，所述装置包括：A tool height measuring device, characterized in that the device comprises:
    控制模块，用于控制所述刀具旋转且从初始位置向下移动；A control module, used for controlling the tool to rotate and move downward from an initial position;
    获取模块，用于通过设置在所述刀具的移动路径上的光电传感器对所述刀具进行检测，实时获取光电传感器输出的刀具检测信号；An acquisition module, used to detect the tool through a photoelectric sensor arranged on the moving path of the tool, and acquire a tool detection signal output by the photoelectric sensor in real time;
    判断模块，用于根据所述刀具检测信号判断所述刀具是否到达预设位置，其中，在所述刀具检测信号的极值从第一数值变化为第二数值、且所述第二数值超出预设阈值的情况下，确定所述刀具在旋转过程中边缘的最低点到达所述预设位置，所述光电传感器具有检测光路，所述检测光路位于所述刀具的移动路径上，在所述检测光路未被遮挡时，所述光电传感器输出的刀具检测信号的极值为第一数值，当所述检测光路的被遮挡时，随着光通量的降低，所述光电传感器输出的刀具检测信号的极值将以从第一数值朝向第二数值的趋势进行变化；a judgment module, for judging whether the tool has reached a preset position according to the tool detection signal, wherein, when the extreme value of the tool detection signal changes from a first value to a second value and the second value exceeds a preset threshold value, it is determined that the lowest point of the edge of the tool during rotation has reached the preset position, the photoelectric sensor has a detection light path, the detection light path is located on the moving path of the tool, when the detection light path is not blocked, the extreme value of the tool detection signal output by the photoelectric sensor is a first value, when the detection light path is blocked, as the light flux decreases, the extreme value of the tool detection signal output by the photoelectric sensor will change from the first value toward the second value;
    第一确定模块，用于根据初始位置与所述预设位置之间的距离确定所述刀具的第一测定高度。The first determination module is used to determine a first measured height of the tool according to a distance between an initial position and the preset position.
  9. 一种刀具的高度测定设备，其特征在于，包括：存储器和处理器；A tool height measuring device, characterized in that it comprises: a memory and a processor;
    所述存储器，用于存储程序；The memory is used to store programs;
    所述处理器，用于执行所述程序，实现如权利要求1至7中任一项所述的方法的各个步骤。The processor is used to execute the program to implement each step of the method according to any one of claims 1 to 7.
  10. 一种刀具的高度测定存储介质，其上存储有计算机程序，其特征在于，所述计算机程序被处理器执行时，实现如权利要求1至7中任一项所述的方法的各个步骤。 A tool height measurement storage medium having a computer program stored thereon, wherein when the computer program is executed by a processor, each step of the method as claimed in any one of claims 1 to 7 is implemented.
PCT/CN2023/134543 2022-12-20 2023-11-28 Cutter height measurement method and apparatus, and device and readable storage medium WO2024131462A1 (en)

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