WO2024075381A1 - Testing apparatus, testing system, testing method, and testing program - Google Patents

Testing apparatus, testing system, testing method, and testing program Download PDF

Info

Publication number
WO2024075381A1
WO2024075381A1 PCT/JP2023/028383 JP2023028383W WO2024075381A1 WO 2024075381 A1 WO2024075381 A1 WO 2024075381A1 JP 2023028383 W JP2023028383 W JP 2023028383W WO 2024075381 A1 WO2024075381 A1 WO 2024075381A1
Authority
WO
WIPO (PCT)
Prior art keywords
image processing
test
unit
image data
image
Prior art date
Application number
PCT/JP2023/028383
Other languages
French (fr)
Japanese (ja)
Inventor
聡洋 菅原
敏明 足立
Original Assignee
株式会社アドバンテスト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アドバンテスト filed Critical 株式会社アドバンテスト
Publication of WO2024075381A1 publication Critical patent/WO2024075381A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Definitions

  • the present invention relates to a test device, a test system, a test method, and a test program.
  • Patent Document 1 states that "an image signal output from a terminal in contact with the image sensor under test is captured and image-processed to determine pass/fail" (claim 1).
  • Patent Documents [Patent Documents] [Patent Document 1] JP-A-4-3686
  • a test apparatus in a first aspect of the present invention, includes an image data acquisition unit that acquires image data output by a device under test, which is an image sensor, in response to one or more light emission patterns corresponding to a plurality of test items; an image processing control unit that transmits the one or more image data acquired by the image data acquisition unit to two or more image processing devices and causes each of the two or more image processing devices to execute image processing corresponding to different test items in the plurality of test items in parallel; a test result acquisition unit that acquires test results for the test items corresponding to the image processing derived from the results of the image processing; and a judgment unit that judges whether the device under test is good or bad based on the test results for each test item acquired by the test result acquisition unit.
  • the image processing control unit may transmit identification information of the device under test together with image data to the two or more image processing devices, and the test result acquisition unit may acquire the identification information of the device under test together with the test results.
  • the image processing control unit may have a detection unit that detects the state of each image processing device, a first selection unit that sequentially selects each test item as a test item to be executed, a second selection unit that selects an image processing device from the multiple image processing devices in response to the selection of the test item to be executed, excluding at least one of an image processing device in an image processing execution state and an image processing device in a faulty state, and an execution instruction unit that transmits image data to the image processing device selected by the second selection unit from among the multiple image processing devices, and executes image processing corresponding to the test item to be executed.
  • the second selection unit may select an image processing device from the plurality of image processing devices to perform image processing corresponding to the test item to be executed, based at least on the processing performance of each image processing device.
  • the second selection unit may select the image processing device with the highest processing performance from among the plurality of image processing devices.
  • the first selection unit may preferentially select a test item corresponding to image processing requiring a longer time from among the multiple test items.
  • the first selection unit may select test items corresponding to image processing requiring a longer time than a reference in a discrete order.
  • test device at least one of the two or more image processing devices is implemented in at least one server device, and the test device may further include a communication unit that communicates with each server device.
  • any one of the at least one server devices may be a cloud server.
  • test devices may further include an image processing unit that performs image processing on image data as one of the two or more image processing devices.
  • the image processing control unit may supply the image data acquired by the image data acquisition unit to the image processing unit, and cause the image processing unit to perform image processing corresponding to some of the multiple test items.
  • the image processing control unit may cause the image processing unit to execute image processing in response to a busy state of a communication line between each of the two or more image processing devices and an image processing device other than the image processing unit.
  • test apparatuses may further include a statistical section that performs statistics on pixel values in the image data acquired by the image data acquisition section for each device under test.
  • the judgment section may judge a device under test to be defective if the statistical results for the device under test do not satisfy a reference condition, and may disable image processing for the device under test.
  • test apparatuses may further include a light source that irradiates the device under test with light of the one or more emission patterns.
  • a test system in a second aspect of the present invention, includes a plurality of test devices according to any one of the first aspects and a plurality of image processing devices shared by the plurality of test devices.
  • the image processing control unit of each test device may have a detection unit that detects the state of each image processing device, a first selection unit that sequentially selects each test item as a test item to be executed, a second selection unit that selects an image processing device from the multiple image processing devices in response to the selection of the test item to be executed, excluding at least one of an image processing device in an image processing execution state and an image processing device in a faulty state, and an execution instruction unit that transmits image data to the image processing device selected by the second selection unit from among the multiple image processing devices, and executes image processing corresponding to the test item to be executed.
  • a control device for controlling tests by each test device, and each test device may have a first selection unit for sequentially selecting each test item as a test item to be executed, a first transmission unit for transmitting a selection request signal for an image processing device to the control device in response to the selection of the test item to be executed, and an execution instruction unit for transmitting image data to an image processing device selected by the control device from among the plurality of image processing devices, and causing the image processing device to execute image processing corresponding to the test item to be executed.
  • the control device may have a detection unit for detecting the state of each image processing device, a third acquisition unit for sequentially acquiring the selection request signal from each test device, a third selection unit for selecting an image processing device from the plurality of image processing devices in response to the acquisition of the selection request signal, excluding at least one of an image processing device in an image processing execution state and an image processing device in a faulty state, and a second transmission unit for transmitting identification information of the image processing device selected by the third selection unit to the test device that is the source of the selection request signal.
  • a test method in a third aspect of the present invention, includes an image data acquisition step of acquiring image data output by a device under test, which is an image sensor, in response to light of one or more light emission patterns corresponding to a plurality of test items; an image processing control step of transmitting the one or more image data acquired in the image data acquisition step to two or more image processing devices and causing each of the two or more image processing devices to execute image processing corresponding to different test items in the plurality of test items in parallel; a test result acquisition step of acquiring test results of the test items corresponding to the image processing derived from the results of the image processing; and a judgment step of judging whether the device under test is good or bad based on the test results of each test item acquired in the test result acquisition step.
  • a test program causes a computer to function as an image data acquisition unit that acquires image data output by a device under test, which is an image sensor, in response to one or more light emission patterns corresponding to a plurality of test items; an image processing control unit that transmits the one or more image data acquired by the image data acquisition unit to two or more image processing devices and causes each of the two or more image processing devices to execute image processing corresponding to different test items in the plurality of test items in parallel; a test result acquisition unit that acquires test results for the test items corresponding to the image processing derived from the results of the image processing; and a judgment unit that judges whether the device under test is good or bad based on the test results for each test item acquired by the test result acquisition unit.
  • 1 shows a test system 1 according to an embodiment. 1 shows an example of the correspondence between light emission patterns, test items, and image processing. 4 shows the operation of the test device 2 regarding the first process. 4 shows the operation of the test device 2 regarding the second process. 1 shows a test system 1A according to a modified example. The operation of the test device 2A regarding the first process will be shown together with the operation of the control device 5. 22 illustrates an example computer 2200 in which aspects of the present invention may be embodied, in whole or in part.
  • Test system 1> 1 shows a test system 1 according to the present embodiment.
  • the test system 1 includes a device under test 100 to be tested, a plurality of test apparatuses 2, and a plurality of server apparatuses 3 each having a plurality of image processing apparatuses 30 shared by the plurality of test apparatuses 2.
  • the device under test 100 is an image sensor, and may be, for example, a CMOS sensor or a CCD sensor.
  • a plurality of devices under test 100 are formed on one wafer, but the wafer may be diced into individual devices, or may be sealed and packaged.
  • the device under test 100 may have a terminal that can be connected to an external device, and may output image data from the terminal according to the irradiated light.
  • the image data may include pixel values that indicate the color shade and brightness of each pixel.
  • the image data may be image data of a grayscale image, and may include pixel values that indicate the shade of black and white for each pixel.
  • the image data may be image data of a color image, and may include pixel values that indicate the shade of each color, such as RGB, for each pixel.
  • Each test apparatus 2 performs a test on one or more devices under test 100.
  • each test apparatus 2 may perform a test on each device under test 100 on the wafer.
  • Each test apparatus 2 may perform a test including two or more test items, and in the present embodiment, as an example, may perform a test on N test items (where N is a natural number of two or more).
  • N is a natural number of two or more.
  • one or more image data output from the device under test 100 may be acquired in response to irradiating the device under test 100 with light of one or more emission patterns corresponding to the test item, and the test result may be acquired by performing image processing corresponding to the test item on the image data. Details will be described later, but the image processing may be a process of extracting some information from the image data.
  • Each test device 2 has a light source 20, an image data acquisition unit 21, an image processing control unit 22, an image processing unit 23, a statistical unit 24, a communication unit 28, a test result acquisition unit 26, and a judgment unit 27.
  • Light source 20 irradiates each of the devices under test 100 with light of one or more emission patterns corresponding to N test items.
  • the light source 20 is disposed in a test head disposed opposite the devices under test 100.
  • the light source 20 may irradiate light onto each of the devices under test 100 on the wafer. As a result, image data may be output from each of the devices under test 100 irradiated with the light.
  • the light of one emission pattern may be light that is irradiated for a period of time during which one image can be captured by the device under test 100.
  • the light of one emission pattern may correspond to one or more test items, and may be irradiated when testing the one or more test items.
  • the light of the multiple emission patterns may be light that is irradiated for the time it takes the device under test 100 to capture multiple images.
  • the light of the multiple emission patterns may differ in intensity or wavelength depending on at least one of the irradiation position and irradiation time.
  • the light of the multiple emission patterns may correspond to one or more test items, and may be irradiated when testing the one or more test items.
  • the number of light emission patterns may be the same as the number of image data to be output from the device under test 100 to test the N test items, and may be the same as the number of image data acquired by the image data acquisition unit 21.
  • Image data acquisition unit 21 acquires each image data output by the device under test 100 in response to light of one or more emission patterns corresponding to the N test items.
  • the image data acquiring section 21 may acquire image data output by each device under test 100 in response to light irradiated from the light source 20.
  • the image data acquisition section 21 may supply the acquired image data to an execution instruction section 223 (described below) in the image processing control section 22.
  • the image data acquisition section 21 may supply identification information of the device under test 100 that output the image data to the execution instruction section 223 together with the image data.
  • the image data acquisition section 21 may supply identification information of the wafer that includes the device under test 100 that output the image data to the execution instruction section 223 together with the image data.
  • the image processing control unit 22 transmits one or more image data acquired by the image data acquisition unit 21 to two or more image processing devices 30, and causes the two or more image processing devices 30 to execute each image processing corresponding to the N test items.
  • the image processing control unit 22 may cause the two or more image processing devices 30 to execute image processing corresponding to different test items among the N test items in parallel.
  • the image processing control unit 22 may cause the two or more image processing devices 30 to execute image processing corresponding to M test items (where M is a natural number such that 2 ⁇ M ⁇ N) among the N test items in parallel.
  • the image processing control unit 22 may execute image processing in parallel between multiple test items corresponding to one light emission pattern, or may execute image processing in parallel between multiple test items corresponding to multiple light emission patterns. Note that executing two or more image processing in parallel may mean executing two or more image processing so that at least a part of the processing time overlaps.
  • the number of image processing devices 30 to which image data is transmitted from the image processing control unit 22 may be the same as the number N, M of test items, or may be different.
  • the image processing control unit 22 has a detection unit 220, a first selection unit 221, a second selection unit 222, and an execution instruction unit 223.
  • the detection section 220 detects the state of each image processing device 30.
  • the detection section 220 may communicate with each image processing device 30 included in the test system 1 to detect the state of the image processing device 30.
  • the detection section 220 may detect the state of each image processing device 30 by a conventionally known method.
  • the detection section 220 may detect whether each image processing device 30 is in a standby state, an image processing execution state, or a failure state.
  • the detection section 220 may supply the detected state of each image processing device 30 to the second selection section 222.
  • the first selection unit 221 sequentially selects each test item as a test item to be executed.
  • the test item to be executed may be a test item for which image processing is to be executed.
  • the first selection unit 221 may select a test item to be executed from the N test items.
  • the first selection unit 221 may preferentially select a test item from the N test items that corresponds to image processing that requires a longer time.
  • the time required for image processing may be measured in advance by performing image processing on one or more image data previously obtained.
  • the first selection unit 221 may obtain identification information of the light emission pattern irradiated to the device under test 100 from the light source 20 or the like, and select one of the M test items corresponding to the light emission pattern.
  • the first selection unit 221 may supply the identification information of the selected test item to be executed to the second selection unit 222.
  • the second selection unit 222 selects one of the image processing devices 30 from the multiple image processing devices 30 included in the test system 1 in response to the selection of the test item to be executed by the first selection unit 221.
  • the second selection unit 222 may select an image processing device 30 from the multiple image processing devices 30 included in the test system 1 by excluding at least one of an image processing device 30 in an execution state of image processing and an image processing device 30 in a faulty state.
  • the second selection unit 222 may select an image processing device 30 in a standby state from the multiple image processing devices 30.
  • the second selection unit 222 may supply identification information of the test item to be executed and identification information of the selected image processing device 30 to the execution instruction unit 223.
  • Execution instruction unit 223 transmits image data to an image processing device 30 selected by the second selection unit 222 from among the multiple image processing devices 30, and causes the image processing device 30 to execute image processing corresponding to the test item to be executed.
  • the execution instruction unit 223 may cause each image processing device 30 to execute image processing regardless of whether or not the test result of the test item corresponding to the image processing is acquired by the test result acquisition unit 26. In this way, image processing corresponding to M test items may be executed in parallel by two or more image processing devices 30.
  • the execution instruction unit 223 may transmit identification information of the test item to be executed together with the image data to the image processing device 30 selected by the second selection unit 222.
  • the execution instruction unit 223 may also transmit identification information of the device under test 100 that output the image data together with the image data to each image processing device 30 that executes the image processing.
  • the execution instruction unit 223 may transmit identification information of the wafer that includes the device under test 100 that output the image data and identification information of the test device 2 that includes the execution instruction unit 223 together with the image data to each image processing device 30 that executes the image processing.
  • the image processing unit 23 executes image processing on the image data.
  • the image processing unit 23 may function as one of the multiple image processing devices 30 included in the test system 1, and the image processing may be instructed by the image processing control unit 22.
  • the image processing unit 23 may receive the image data acquired by the image data acquisition unit 21 from the image processing control unit 22 and execute image processing corresponding to some of the N test items.
  • the image processing unit 23 may be one of two or more image processing devices 30 that execute image processing in parallel in response to an instruction from the image processing control unit 22.
  • the image processing unit 23 may execute image processing corresponding to the identification information of the test item supplied from the execution instruction unit 223.
  • image processing may be processing to extract some information from image data.
  • image processing may be processing to calculate an average pixel value, processing to calculate an index value for the sensitivity of the device under test 100, processing to calculate an index value for the uniformity of pixel values, processing to calculate an index value for the noise characteristics of the device under test 100, processing to calculate a standard deviation of pixel values in at least a partial area of the image data, or processing to detect dots or lines with unintended pixel values.
  • the image processing unit 23 may have lower processing performance than the image processing device 30 external to the test device 2. As an example, the image processing unit 23 may have a lower clock frequency than the image processing device 30.
  • the image processing unit 23 may supply data indicating the results of the image processing and the identification information of the device under test 100 to the test result acquisition unit 26.
  • the image processing unit 23 may further supply the identification information of these test items and the identification information of the wafer including the device under test 100 to the test result acquisition unit 26 together with the data indicating the results of the image processing.
  • the statistical section 24 performs statistics on pixel values in the image data acquired by the image data acquisition section 21 for each device under test 100.
  • the statistical section 24 performs statistics on pixel values in the image data acquired by the image data acquisition section 21 for each device under test 100.
  • the statistics section 24 may perform statistics of pixel values for each of the constituent colors, such as RGB.
  • the statistical section 24 may calculate statistical results indicating the variance, average, etc. of pixel values.
  • the statistical section 24 may supply the calculated statistical results to the determination section 27.
  • Test result acquisition unit 26 acquires the test result of the test item corresponding to the image processing, which is derived from the result of the image processing.
  • the test result acquiring section 26 may acquire the identification information of the device under test 100 together with the test result.
  • the test result acquisition unit 26 may derive the test result of the test item corresponding to the image processing from the data indicating the result of the image processing. However, if the result of the image processing indicates the test result of the test item, the test result acquisition unit 26 may acquire the result of the image processing as the test result.
  • the test result acquisition unit 26 may supply the acquired test results to the judgment unit 27.
  • the test result acquisition unit 26 may supply the test results to the judgment unit 27 together with the identification information of the device under test 100 and the identification information of the wafer.
  • the judging section 27 judges the pass/fail of the device under test 100 based on the test results of each test item acquired by the test result acquiring section 26.
  • the judging section 27 outputs the judgment result to the outside of the test apparatus 2. good.
  • the judgment section 27 may judge the pass/fail of the device under test 100 based on the test results of at least some of the N test items. In addition, the judgment section 27 may judge the pass/fail of the device under test 100 based on the statistical results by the statistics section 24. The judgment section 27 may judge a device under test 100 as defective when the statistical results for the device under test 100 do not satisfy the reference condition. The judgment section 27 may disable image processing for the device under test 100 when the statistical results for the device under test 100 do not satisfy the reference condition.
  • the statistical result of pixel values not satisfying the standard condition may mean that a value indicating the statistical result (for example, the variance or average of pixel values) is outside a standard range.
  • Disabling image processing for a device under test 100 determined to be defective may mean stopping the operation of the image processing control unit 22 for that device under test 100, or may mean stopping image processing that is currently being performed.
  • the communication unit 28 communicates with each server device 3. This may enable communication between each unit of the test device 2 and each image processing device 30 of the server device 3.
  • the detection unit 220 may detect the state of each image processing device 30 via the communication unit 28.
  • the execution instruction unit 223 may transmit image data to each image processing device 30 via the communication unit 28.
  • the test result acquisition unit 26 may acquire the results of image processing, etc. via the communication unit 28.
  • the communication network between the communication unit 28 and the server device 3 may be configured to include various networks such as the Internet, a wide area network (WAN), a local area network, or a combination thereof.
  • the communication network may include at least one of wired and wireless connection points.
  • the communication network may be realized by a dedicated line separated from a public line such as the Internet.
  • Each server device 3 provides various functions in response to requests from the test device 2.
  • Each server device 3 according to this embodiment is equipped with one or more image processing devices 30, and performs image processing in response to requests from the test device 2.
  • Each server device 3 may be located near the test device 2 (for example, in the same facility as the test device 2) or far from the test device 2 (for example, in a facility separate from the test device 2). Any of the multiple server devices 3 may be a cloud server. As an example, each of the multiple server devices 3 may be a cloud server, or some of the multiple server devices 3 may be cloud servers.
  • the cloud server may be a server built in a cloud environment.
  • Each image processing device 30 performs image processing instructed by the execution instructing unit 223 on image data supplied from the execution instructing unit 223 of each test device 2.
  • the image processing instructed by the execution instructing unit 223 may be image processing corresponding to the identification information of the test item supplied from the execution instructing unit 223.
  • Each image processing device 30 may store in advance correspondence information between the identification information of the test item and the content of the image processing corresponding to the test item, and may detect the image processing corresponding to the identification information of the test item supplied from the execution instructing unit 223 from the correspondence information.
  • Each image processing device 30 may obtain information indicating the characteristics of the device under test 100 from the image data by image processing.
  • Each image processing device 30 may include a GPU or a CPU.
  • Each image processing device 30 may supply data indicating the results of the image processing and identification information of the device under test 100 to the test result acquisition unit 26.
  • each image processing device 30 may supply identification information of the test item supplied from the execution instruction unit 223 and identification information of the wafer containing the device under test 100 to the test result acquisition unit 26 together with data indicating the results of the image processing.
  • Each image processing device 30 may transmit data indicating the results of image processing to the test device 2 including the execution instruction unit 223 that transmitted the image data.
  • each image processing device 30 may transmit data indicating the results of image processing to the test device 2 indicated by the identification information of the test device 2 transmitted together with the image data.
  • each image data output by the device under test 100 in response to one or more light emission patterns corresponding to multiple test items is sent to two or more image processing devices 30, and image processing corresponding to the different test items is performed in parallel. Then, the test results of the test items corresponding to these image processes are obtained, and the pass/fail of the device under test 100 is judged based on the test results of each test item. Therefore, the time until judgment can be shortened compared to when multiple image processes are performed sequentially by the same image processing device 30.
  • the identification information of the device under test 100 is sent to the image processing device 30 together with the image data, and the identification information of the device under test 100 is acquired together with the test results, so that the test results can be accurately associated with the device under test 100.
  • At least one of the image processing devices 30 in the image processing execution state and the image processing device 30 in the faulty state is excluded from the multiple image processing devices 30, and one of the image processing devices 30 is selected. Then, image data is sent to the selected image processing device 30, and image processing according to the test item to be executed is executed. Therefore, an available image processing device 30 can be reliably selected to perform image processing.
  • test items that correspond to image processing that requires a longer time are given priority for selection as the test item to be executed, so that test items for image processing that require a longer time can be completed first. This prevents test items for image processing that require a longer time from becoming a bottleneck and slowing down the evaluation, and allows for faster evaluation.
  • multiple image processing devices 30 are implemented in multiple server devices 3, and the test device 2 communicates with each server device 3, so that the image processing devices 30 implemented in the server devices 3 can be used for testing.
  • one of the server devices 3 is a cloud server
  • the image processing device 30 implemented in the cloud server can be used for testing.
  • the test device 2 is further provided with an image processing unit 23, and the acquired image data is supplied to the image processing unit 23, where image processing corresponding to some of the test items is performed. Therefore, the image processing unit 23 in the test device 2 can be used for testing.
  • test device 2 is further equipped with a light source 20
  • the processes from irradiating light to acquiring image data and transmitting the image data to the image processing device 30 can be performed in a coordinated manner, further shortening the test time.
  • pixel value statistics of the acquired image data are performed for each device under test 100, and if the statistical results for a device under test 100 do not satisfy the reference conditions, the device under test 100 is determined to be defective, and image processing for the device under test 100 is disabled. This makes it possible to prevent unnecessary image processing from being performed on a device under test 100 that is determined to be defective based on the statistical results of pixel values.
  • test system 1 since the test system 1 is equipped with multiple test devices 2 and multiple image processing devices 30 shared by the multiple test devices 2, the number of image processing devices 30 can be reduced, unlike when multiple test devices 2 each have exclusive use of multiple image processing devices 30.
  • each of the multiple test devices 2 in response to the selection of a test item to be executed from the multiple test items, at least one of the image processing devices 30 in the image processing execution state and the image processing device 30 in the faulty state is excluded from the multiple image processing devices 30, and an image processing device 30 is selected. Then, image data is sent to the selected image processing device 30, and an instruction to execute image processing according to the test item to be executed is issued. Therefore, each of the multiple test devices 2 can reliably select an available image processing device 30 to perform image processing.
  • Fig. 2 shows an example of the correspondence between the light emission pattern of the light source 20, the test items, and the image processing.
  • the multiple test items shown in Fig. 2 may be at least a part of the N test items executed by the test device 2. Also, at least a part of the multiple test items shown in Fig. 2 may be M test items for which image processing is executed in parallel.
  • the light emission pattern "ColorBar” of the light source 20 may correspond to the "ColorBar” test item.
  • the "ColorBar” light emission pattern may be a light emission pattern that causes the device under test 100 to output image data of a color bar.
  • the brightness level, color, etc. of the device under test 100 may be calculated by image processing of the image data.
  • the light emission pattern "DARK" of the light source 20 may correspond to the test items "Sensitivity", “Uniformity” and "Noise".
  • the "DARK" emission pattern may be an emission pattern that causes the device under test 100 to output image data in which the entire surface is black.
  • the output level e.g., average
  • an index value of the uniformity of the device under test 100 may be calculated by image processing of the image data.
  • the light emission pattern "STANDARD” of the light source 20 may correspond to the test items “Sensitivity”, “Sensitivity Ratio” and “Uniformity”.
  • the "STANDARD” light emission pattern may be a light emission pattern that causes the device under test 100 to output preset standard image data.
  • the pixel value ratio between the colors of the device under test 100 may be calculated by image processing of the image data.
  • First process> 3 shows the operation of the first process of the test apparatus 2.
  • the test apparatus 2 performs the processes of steps S11 to S33 to acquire image data from the device under test 100, and performs image processing on the image data to generate a plurality of images.
  • the processing device 30 executes the process.
  • step S11 the light source 20 irradiates light onto one or more devices under test 100.
  • the light source 20 irradiates light onto a single device under test 100 in each step S11, but it may also irradiate light onto multiple devices under test 100 at once.
  • the light source 20 may emit light of one or more emission patterns corresponding to the testing of one or more test items.
  • the process of step S11 is executed at least once, resulting in the emission of light of one or more emission patterns corresponding to multiple test items (M test items as an example in this embodiment).
  • the shutter exposure time
  • gain gain
  • image size image size
  • OTP One Time Programmable memory
  • step S13 the image data acquisition section 21 acquires each image data output by the device under test 100 in response to the irradiated light.
  • the process of step S13 is executed at least once, and each image data output by the device under test 100 in response to light of one or more emission patterns corresponding to M test items for which image processing is performed in parallel is acquired.
  • the image data acquisition section 21 may acquire image data for each device under test 100 in step S13. In this case, the processes of steps S15 to S31 described below may be performed for each device under test 100 irradiated with light.
  • step S15 the statistical unit 24 performs statistics on the pixel values in the acquired image data for each device under test 100. If light of multiple emission patterns is irradiated in the most recent step S11, the statistical unit 24 may perform statistics for each acquired image data. The statistical unit 24 may calculate statistical results indicating the variance and average of the pixel values.
  • step S17 the determination unit 27 determines whether the statistical result satisfies the standard condition. As an example, the determination unit 27 may determine whether the variance or average of the pixel values is outside a standard range. If it is determined that the statistical result satisfies the standard condition (step S17; Yes), the process may proceed to step S23. If it is determined that the statistical result does not satisfy the standard condition (step S17; No), the process may proceed to step S19.
  • step S19 the judgment section 27 disables image processing for the device under test 100 that output image data whose statistical results did not satisfy the reference condition.
  • the judgment section 27 may stop image processing that has already been instructed to be executed in step S29 described below for the image data output from the device under test 100.
  • the judgment section 27 may end the first processing after step S21 described below so that processing from step S23 described below onwards is not executed for the image data output from the device under test 100.
  • step S21 the judgment unit 27 judges the device under test 100 that outputs image data whose statistical results do not satisfy the reference condition to be defective.
  • step S21 the first process may be terminated, and the first process may be executed again for another device under test 100.
  • step S23 the first selection unit 221 selects a test item to be executed. As a result, the process of step S23 is repeated, and test items to be executed are selected sequentially.
  • the first selection unit 221 may select a single test item that has not yet been selected in step S23.
  • the first selection unit 221 may obtain identification information of the light emission pattern irradiated to the device under test 100 from the light source 20, and select one of the M test items corresponding to that light emission pattern. In this embodiment, as an example, the first selection unit 221 may select the test item corresponding to the image processing requiring the longest time from the M test items corresponding to the irradiated light emission pattern. In this way, the test item corresponding to the image processing requiring the longest time is preferentially selected from the M test items corresponding to the irradiated light emission pattern.
  • the detection unit 220 detects the state of each image processing device 30.
  • the detection unit 220 may detect whether each image processing device 30 included in the test system 1 is in a standby state, an image processing execution state, or a failure state.
  • the second selection unit 222 selects one of the image processing devices 30 included in the test system 1.
  • the second selection unit 222 may select an image processing device 30 from the multiple image processing devices 30 included in the test system 1 by excluding at least one of the image processing device 30 in the image processing execution state and the image processing device 30 in the faulty state (in this embodiment, as an example, both).
  • the image processing device 30 in the image processing execution state may be an image processing device 30 in the image processing execution state due to an instruction from the test device 2 including the second selection unit 222, or may be an image processing device 30 in the image processing execution state due to an instruction from another test device 2.
  • the second selection unit 222 may select the image processing unit 23 as the image processing device 30.
  • the second selection unit 222 may select an image processing device 30 that performs image processing according to the test item to be executed, based on at least the processing performance of each image processing device 30. Selecting an image processing device 30 based on the processing performance of each image processing device 30 may, for example, preferentially select an image processing device 30 with high processing performance or an image processing device 30 with low processing performance.
  • the second selection unit 222 may select a single image processing device 30. As an example in this embodiment, the second selection unit 222 may select an image processing device 30 with the highest processing performance among the multiple image processing devices 30.
  • the processing performance of the image processing device 30 may, for example, be at least one of the clock frequency, thermal design power, power efficiency, memory capacity, and memory bandwidth.
  • the second selection unit 222 may select an image processing device 30 based on at least one of the load of image processing corresponding to the test item to be executed and the number of pixels of the device under test 100, in addition to the processing performance of each image processing device 30. For example, when the load of image processing of the test item to be executed is greater than a reference, the second selection unit 222 may select an image processing device 30 having a processing performance higher than the reference. This ensures that image processing is executed even when the load of image processing is large. When the number of pixels of the device under test 100 is greater than a reference, the second selection unit 222 may select an image processing device 30 having a processing performance higher than the reference (for example, memory capacity or memory bandwidth). This ensures that image processing is executed even when the amount of image data is large.
  • the load of image processing corresponding to the test item to be executed may be the time required for image processing measured in advance by any of the image processing devices 30, or the amount of data generated during the calculation process of image processing.
  • the second selection section 222 may store in advance correspondence information between the identification information of each test item and information indicating the image processing load corresponding to the test item, and the second selection section 222 may detect the image processing load associated with the identification information of the test item supplied from the first selection section 221 from the correspondence information.
  • the second selection section 222 selects the image processing device 30 based on the number of pixels of the device under test 100, it may acquire information indicating the number of pixels from the image data acquisition section 21.
  • step S29 the execution instruction unit 223 transmits one or more pieces of image data acquired by the image data acquisition unit 21 to the image processing device 30, and causes image processing corresponding to the test items to be performed.
  • the execution instruction unit 223 may transmit image data to a single image processing device 30 in one step S29 to cause image processing to be performed.
  • image data is transmitted to two or more image processing devices 30, including the image processing device 30 targeted in the current step S29 and another image processing device 30 targeted in one or more step S29s before the previous one or after the next one, and image processing corresponding to different test items is performed in parallel.
  • the execution instruction unit 223 may send image data to an image processing device 30 selected by the second selection unit 222 from among the multiple image processing devices 30, and cause the image processing device 30 to execute image processing according to the test item to be executed.
  • the execution instruction unit 223 may send image data to the image processing unit 23 and cause the image processing device 30 to execute image processing.
  • step S31 the first selection unit 221 determines whether or not all M test items corresponding to the emission patterns irradiated to the device under test 100 in step S11 have already been selected in step S23. If it is determined that at least one test item has not yet been selected (step S31; No), processing may proceed to the above-mentioned step S23. If it is determined that all test items have been selected (step S31; Yes), processing may proceed to step S33.
  • step S33 the light source 20 judges whether or not light of all the light emission patterns corresponding to the N test items has been irradiated. If it is judged that light of all the light emission patterns has not been irradiated (step S33; No), the process may proceed to step S11. In this case, before the test result of the test item corresponding to the light emission pattern irradiated in the previous step S11 is obtained in step S43 described below, light of the light emission pattern corresponding to another test item may be irradiated in the next step S11. Also, irradiation may be performed in the next step S11 on a device under test 100 other than the device under test 100 irradiated in the most recent step S11.
  • irradiation may be performed in the next step S11 on a device under test 100 on a wafer other than the device under test 100 irradiated in the most recent step S11. If it is judged that light of all the light emission patterns has been irradiated (step S33; Yes), the first process may end.
  • an image processing device 30 is selected to execute image processing corresponding to the test item to be executed, based at least on the processing performance of each image processing device 30. Therefore, it is possible to select the more appropriate image processing device 30 from among the multiple image processing devices 30 to execute image processing.
  • the image processing device 30 with the highest processing performance is selected from among the multiple image processing devices 30, so that the image processing device 30 with the highest processing performance can be made to execute image processing.
  • image processing is instructed to be performed on the image processing device 30 selected from among the multiple image processing devices 30, excluding at least one of the image processing device 30 in the image processing execution state and the image processing device 30 in the fault state.
  • image processing may be instructed to other image processing devices 30.
  • the execution instruction unit 223 of the image processing control unit 22 may cause the image processing unit 23 in the test device 2 to execute image processing in response to a busy state of the communication line between each image processing device 30 in the test system 1 and the image processing unit 23.
  • the detection unit 220 may detect whether the communication line between each image processing device 30 is busy or not.
  • the second selection unit 222 of the image processing control unit 22 may select the image processing unit 23 in the test device 2, and in step S29, the execution instruction unit 223 may transmit image data to the image processing unit 23 to execute image processing.
  • the execution instruction unit 223 may send image data to the image processing unit 23 in the test device 2 in step S29 to execute image processing, regardless of the image processing device 30 selected by the second selection unit 222 in step S27. This allows image processing to be performed and the test to proceed even if the communication line is busy.
  • Second Processing> 4 shows the operation of the test apparatus 2 regarding the second process.
  • the test apparatus 2 performs the processes of steps S41 to S47 to judge the device under test 100.
  • the operation of the second process may be started in response to the start of the operation of the first process, or may be executed in parallel with the first process.
  • the operation of the second process may be executed in parallel for each device under test 100 based on the identification information of the device under test supplied from the image processing apparatus 30 together with the result of the image processing.
  • step S41 the test result acquisition unit 26 determines whether or not the results of image processing have been received.
  • the test result acquisition unit 26 may receive the results of image processing from an image processing device 30 external to the test device 2, or may receive the results of image processing from an image processing unit 23 internal to the test device 2. If it is determined in step S41 that the results of image processing have not been received (step S41; No), the processing of step S41 may be repeated. If it is determined in step S41 that the results of image processing have been received (step S41; Yes), the processing may proceed to step S43.
  • step S43 the test result acquisition unit 26 acquires the test result of the test item corresponding to the image processing, which is derived from the result of the image processing.
  • the test result acquisition unit 26 may derive the test result of the test item corresponding to the image processing from the data indicating the result of the image processing.
  • the test result acquisition unit 26 may acquire the result of the image processing as the test result.
  • step S45 the judgment unit 27 judges whether or not test results have been obtained for all N test items. If it is judged that test results have not been obtained for one or more of the N test items (step S45; No), the process may proceed to step S41 described above. If it is judged that test results have been obtained for all N test items (step S45; Yes), the process may proceed to step S47.
  • step S47 the judgment unit 27 judges whether the device under test 100 is good or bad based on the acquired test results for each test item.
  • the second processing may be completed.
  • the pass/fail judgment of the device under test 100 has been described as being made after the test results for all N test items have been obtained, but the pass/fail judgment may be made before the test results for all test items have been obtained.
  • the judgment unit 27 may judge the device under test 100 that output the image data that was the subject of the image processing as defective in response to the fact that the result of the image processing is not received for a reference time after the execution of the image processing is instructed by the processing of step S29.
  • the cause of the image processing result not being received for a reference time may be an abnormality in the image data, or an abnormality in the image processing device 30 that executed the image processing.
  • the cause of the abnormality in the image data may be an abnormality in the device under test 100, or an abnormality in the light source 20.
  • the judging unit 27 may further judge other devices under test 100 that were irradiated with light together with the device under test 100 for which the image processing results have not been received for more than the reference time to be defective. This can reliably prevent a decrease in yield.
  • Test System 1A shows a test system 1A according to a modified example.
  • the test system 1A includes one or more test devices 2A and a control device 5.
  • the test system 1A differs from the test system 1 mainly in that the control device 5 selects an image processing device 30 that executes image processing.
  • components that are substantially the same as those in the test system 1 shown in FIG. 1 are designated by the same reference numerals, and descriptions thereof will be omitted.
  • Test device 2A Each test device 2A has an image processing control unit 22A.
  • Image processing control unit 22A transmits one or more image data acquired by the image data acquisition unit 21 to two or more image processing devices 30, and causes the two or more image processing devices 30 to execute image processing corresponding to the N test items.
  • the image processing control unit 22A may cause the two or more image processing devices 30 to execute image processing corresponding to different test items among the N test items in parallel.
  • the image processing control device 5A may cause the two or more image processing devices 30 to execute image processing corresponding to M test items among the N test items in parallel.
  • the number of image processing devices 30 to which the image data is transmitted may be the same as or different from the number N of test items.
  • the image processing control unit 22A has a first transmission unit 224A and an execution instruction unit 223A.
  • the first transmitting unit 224A may transmit the selection request signal in response to obtaining identification information of the test item to be executed from the first selecting unit 221.
  • the selection request signal may include identification information of the test apparatus 2A, and may further include identification information of the test item to be executed and the number of pixels of the device under test 100.
  • Execution instruction unit 223A transmits image data to the image processing device 30 selected by the control device 5 among the multiple image processing devices 30, and executes image processing according to the test item to be executed.
  • the execution instruction unit 223 may transmit identification information of the test item to be executed, together with the image data, to the image processing device 30 selected by the control device 5.
  • the execution instruction unit 223A may also transmit identification information of the device under test 100 that has output the image data, together with the image data, to each image processing device 30 that executes the image processing.
  • the execution instruction unit 223A may transmit identification information of the wafer including the device under test 100 that has output the image data, and identification information of the test device 2A including the execution instruction unit 223A, together with the image data, to each image processing device 30 that executes the image processing.
  • the control device 5 controls the tests performed by each test device 2 A.
  • the control device 5 includes a detection unit 50, a third acquisition unit 51, a third selection unit 52, a second transmission unit 53, and a communication unit 54.
  • the detection unit 50 detects the state of each image processing device 30.
  • the detection unit 50 may communicate with each image processing device 30 included in the test system 1A to detect the state of the image processing device 30.
  • the detection unit 50 may detect the state of each image processing device 30 by a conventionally known method.
  • the detection unit 50 may detect whether each image processing device 30 is in a standby state, an image processing execution state, or a failure state.
  • the detection unit 50 may supply the detected state of each image processing device 30 to the third selection unit 52.
  • the third acquiring section 51 sequentially acquires the selection request signal from each test apparatus 2 A.
  • the third acquiring section 51 may supply the acquired selection request signal to the third selecting section 52.
  • Third selection unit 52> In response to receiving the selection request signal, the third selection unit 52 selects an image processing device 30 by excluding at least one of the image processing device 30 in the execution state of image processing and the image processing device 30 in the faulty state from the multiple image processing devices 30 included in the test system 1A.
  • the third selection unit 52 may supply the second transmission unit 53 with identification information of the test item to be executed and identification information of the selected image processing device 30.
  • Second transmission unit 53 transmits the identification information of the image processing device 30 selected by the third selection unit 52 to the test device 2A that transmitted the selection request signal.
  • the second transmission unit 53 may supply the identification information of the selected image processing device 30 and the identification information of the test item to be executed to the test device 2A.
  • the execution instruction unit 223A transmits image data to the selected image processing device 30A, and causes the image processing to be performed according to the test item to be executed.
  • the communication unit 54 communicates with each test device 2A and each server device 3. This may enable communication between each unit of the control device 5 and each image processing device 30 of each test device 2A and each server device 3.
  • the detection unit 50 may detect the state of each image processing device 30 via the communication unit 54.
  • the third acquisition unit 51 may acquire a selection request signal from each test device 2A via the communication unit 54.
  • the second transmission unit 53 may transmit identification information of the selected image processing device 30 to the test device 2A via the communication unit 54.
  • the communication network between the communication unit 54 and each test device 2A and each server device 3 may be configured to include various networks such as the Internet, a wide area network (WAN), a local area network, or a combination thereof.
  • the communication network may include at least one of wired and wireless connection points.
  • the communication network may be realized by a dedicated line separated from a public line such as the Internet.
  • each of the multiple test devices 2A transmits a selection request signal for the image processing device 30 to the control device 5 in response to the selection of a test item to be executed from the multiple test items. Furthermore, in response to obtaining the selection request signal, the control device 5 selects one of the image processing devices 30 from the multiple image processing devices 30 by excluding at least one of the image processing devices 30 in the execution state of image processing and the image processing device 30 in the faulty state, and returns identification information of the selected image processing device 30 to the test device 2A. Then, in each test device 2A, image data is transmitted to the image processing device 30 selected by the control device 5, and an instruction is given to execute image processing according to the test item to be executed. Therefore, an available image processing device 30 can be reliably selected to perform image processing.
  • Operation of the test device 2A and the control device 5> 6 shows the operation of the test equipment 2A related to the first processing together with the operation of the control device 5.
  • the test equipment 2A and the control device 5 perform the processing of steps S61 to S83 and S91 to S97 to acquire image data from the device under test 100 and cause the image processing devices 30 to execute the image processing.
  • the operation of the test equipment 2A related to the second processing is the same as the operation of the test equipment 2 related to the second processing in the above embodiment, and therefore a description thereof will be omitted.
  • step S61 the light source 20 irradiates light to one or more devices under test 100.
  • the light source 20 may irradiate light of one or more emission patterns in the same manner as in step S11 in the above embodiment.
  • step S63 the image data acquisition unit 21 acquires each piece of image data output by the device under test 100 in response to the irradiated light.
  • each piece of image data output by the device under test 100 in response to light of one or more emission patterns corresponding to M test items for which image processing is performed in parallel is acquired.
  • the image data acquisition unit 21 may acquire image data in the same manner as step S13 in the above embodiment.
  • step S65 the statistical unit 24 performs statistics on the pixel values in the acquired image data for each device under test 100.
  • the statistical unit 24 may perform the statistics in the same manner as in step S15 in the above embodiment.
  • step S67 the determination unit 27 determines whether the statistical result satisfies the standard condition.
  • the determination unit 27 may perform the determination in the same manner as step S17 in the above-described embodiment. If it is determined that the statistical result does not satisfy the standard condition (step S67; No), the process may proceed to step S19 (see FIG. 3). If it is determined that the statistical result satisfies the standard condition (step S67; Yes), the process may proceed to step S73.
  • step S73 the first selection unit 221 selects the test item to be executed.
  • the first selection unit 221 may select the test item in the same manner as in step S23 in the above embodiment.
  • the first transmission unit 224A transmits a selection request signal for the image processing device 30 to the control device 5.
  • the selection request signal may include identification information for the test device 2A, and may further include identification information for the test item to be executed and the number of pixels of the device under test 100.
  • step S91 the third acquisition unit 51 of the control device 5 acquires a selection request signal.
  • step S93 the detection unit 50 of the control device 5 detects the state of each image processing device 30. The detection unit 50 may detect whether each image processing device 30 included in the test system 1A is in a standby state, an image processing execution state, or a failure state.
  • step S95 the third selection unit 52 of the control device 5 selects an image processing device 30 from the multiple image processing devices 30 included in the test system 1A by excluding at least one of the image processing devices 30 in the image processing execution state and the image processing device 30 in the faulty state.
  • the third selection unit 52 may select an image processing device 30 in the same manner as in step S27 in the above-mentioned embodiment.
  • step S97 the second transmission unit 53 of the control device 5 transmits the identification information of the selected image processing device 30 to the test device 2A that transmitted the selection request signal.
  • the second transmission unit 53 may supply the identification information of the selected image processing device 30 and the identification information of the test item to be executed to the execution instruction unit 223A of the test device 2A.
  • step S79 the execution instruction unit 223 of the test device 2A sends one or more pieces of image data acquired by the image data acquisition unit 21 to the image processing device 30, and causes image processing corresponding to the test item to be executed.
  • the execution instruction unit 223 may send image data to the image processing device 30 selected by the third selection unit 52, and causes image processing corresponding to the test item to be executed.
  • the execution instruction unit 223 may cause image processing to be executed in a manner similar to step S29 in the above-mentioned embodiment.
  • step S81 the first selection unit 221 determines whether or not all M test items corresponding to the emission patterns irradiated to the device under test 100 in step S61 have already been selected in step S73. If it is determined that at least one test item has not yet been selected (step S81; No), processing may proceed to the above-mentioned step S73. If it is determined that all test items have been selected (step S81; Yes), processing may proceed to step S83.
  • step S83 the light source 20 judges whether or not light of all the light emission patterns corresponding to the N test items has been irradiated. If it is judged that light of all the light emission patterns has not been irradiated (step S83; No), the process may proceed to step S61. In this case, before the test result of the test item corresponding to the light emission pattern irradiated in the previous step S61 is obtained in step S43, light of the light emission pattern corresponding to another test item may be irradiated in the next step S61. Furthermore, irradiation may be performed in the next step S61 on a device under test 100 other than the device under test 100 irradiated in the immediately preceding step S61.
  • irradiation may be performed in the next step S61 on a device under test 100 on a wafer other than the device under test 100 irradiated in the immediately preceding step S61. If it is judged that light of all the light emission patterns has been irradiated (step S83; Yes), the first process may end.
  • image processing is instructed to the image processing device 30 selected from among the multiple image processing devices 30, excluding at least one of the image processing device 30 in the image processing execution state and the image processing device 30 in the fault state.
  • image processing may be instructed to other image processing devices 30.
  • the execution instruction unit 223 of the image processing control unit 22 may cause the image processing unit 23 to execute image processing in response to a busy state of the communication line between each image processing device 30 in the test system 1A and each image processing device 30 other than the image processing unit 23.
  • the detection unit 50 may detect whether the communication line between each image processing device 30 and the test device 2A is busy or not.
  • step S95 the third selection unit 52 may select the image processing unit 23 in the test device 2A, and in step S79, the execution instruction unit 223 may transmit image data to the image processing unit 23 to execute image processing.
  • the third selection unit 52 may select the image processing unit 23 in the test device 2A, and in step S79, the execution instruction unit 223 may transmit image data to the image processing unit 23 to execute image processing.
  • the test apparatus 2, 2A has been described as having the light source 20, the image processing unit 23, and the statistical unit 24, but may not have at least one of them. If the test apparatus 2, 2A does not have the light source 20, the image data acquisition unit 21 may acquire image data output by the device under test 100 in response to the light of one or more light emission patterns being irradiated onto the device under test 100 from a light source as an external device. If the test apparatus 2, 2A does not have the image processing unit 23, the execution instruction unit 223 may transmit image data to an image processing device 30 outside the test apparatus 2, 2A to execute image processing. If the test apparatus 2, 2A does not have the statistical unit 24, the process of step S23 may be performed after the process of step S13, or the process of step S73 may be performed after the process of step S63.
  • the first selection unit 221 has been described as giving priority to selecting test items corresponding to image processing requiring a longer time from among N (or M) test items, the test items may be selected in other manners.
  • the first selection unit 221 may select each test item in the order of numbers preset for the test items.
  • the first selection unit 221 may select test items corresponding to image processing requiring a longer time than the reference in a discrete order.
  • a test item requiring a longer time than the reference may be a test item requiring a longer time than the reference time, or may be a test item requiring a longer time than the reference order.
  • the reference time and the reference order may be set arbitrarily.
  • Selecting test items in a discrete order may mean selecting test items in a discontinuous order, or may mean selecting test items in a discrete order. This makes it easier for the image processing device 30 with high processing performance to execute image processing requiring a longer time, unlike the case where test items corresponding to image processing requiring a longer time than the reference are selected in a continuous order. Therefore, by executing image processing that requires a long time on an image processing device 30 with high processing performance, the image processing can be made more efficient and judgments can be made more quickly.
  • the first selection unit 221 has been described as acquiring identification information of an already-illuminated light emission pattern from the light source 20 and selecting one of the test items corresponding to that light emission pattern as the test item to be executed, but the test item to be executed may be selected without acquiring identification information of the light emission pattern.
  • the first selection unit 221 may select one of the N test items, supply identification information of the light emission pattern corresponding to the selected test item to the light source 20, and irradiate light with that light emission pattern.
  • the second selection unit 222 has been described as selecting an image processing device 30 that will execute image processing according to the test item to be executed based at least on the processing performance of each image processing device 30, but the image processing device 30 may be selected in other ways.
  • the second selection unit 222 may preferentially select an image processing device 30 on the cloud, or may preferentially select an image processing unit 23 in the test device 2.
  • the second selection unit 222 may preferentially select an image processing unit 23 of the test device 2 for testing a test item with a lower load than the standard.
  • test system 1, 1A has been described as having multiple server devices 3 with one or more image processing devices 30 implemented, but it may also have a single server device with one or more image processing devices 30 implemented.
  • each image processing device 30 implemented in a server device 3 at least one image processing device 30 does not have to be implemented in a server device 3.
  • first selection unit 221 and the second selection unit 222 have been described as independently selecting the test items and image processing devices 30, they may cooperate to select the test items and image processing devices 30.
  • the first selection unit 221 and the second selection unit may optimize the selection order of the test items and image processing devices 30 so that the time required to complete the tests of all test items is minimized.
  • the first selection unit 221 and the second selection unit may use a conventionally known method for solving the bin packing problem to select the test items and image processing devices 30 so as to minimize the time required to complete the tests.
  • the first selection unit 221 and the second selection unit may set a tentative target time until the test is completed, and use a conventionally known method for solving the knapsack problem to select the test items and image processing devices 30 so as to fit within the tentative target time, and if the tentative target time is not within the tentative target time, the tentative target time may be extended, and if the tentative target time is within the tentative target time, the selected order may be adopted.
  • the test result may further be derived from the result of the image processing.
  • the image processing device 30 may extract some average pixel value from the image data by image processing, and further compare the average pixel value with a reference value to derive the test result.
  • the test result acquisition unit 26 may acquire the test result from the image processing device 30.
  • Various embodiments of the present invention may be described with reference to flow charts and block diagrams, where the blocks may represent (1) stages of a process in which operations are performed or (2) sections of an apparatus responsible for performing the operations. Particular stages and sections may be implemented by dedicated circuitry, programmable circuitry provided with computer readable instructions stored on a computer readable medium, and/or a processor provided with computer readable instructions stored on a computer readable medium.
  • Dedicated circuitry may include digital and/or analog hardware circuitry and may include integrated circuits (ICs) and/or discrete circuits.
  • Programmable circuitry may include reconfigurable hardware circuitry including logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, memory elements such as flip-flops, registers, field programmable gate arrays (FPGAs), programmable logic arrays (PLAs), and the like.
  • reconfigurable hardware circuitry including logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, memory elements such as flip-flops, registers, field programmable gate arrays (FPGAs), programmable logic arrays (PLAs), and the like.
  • a computer readable medium may include any tangible device capable of storing instructions that are executed by a suitable device, such that the computer readable medium having instructions stored thereon comprises an article of manufacture that includes instructions that can be executed to create means for performing the operations specified in the flow chart or block diagram.
  • Examples of computer readable media may include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, and the like.
  • Computer readable media may include floppy disks, diskettes, hard disks, random access memories (RAMs), read-only memories (ROMs), erasable programmable read-only memories (EPROMs or flash memories), electrically erasable programmable read-only memories (EEPROMs), static random access memories (SRAMs), compact disk read-only memories (CD-ROMs), digital versatile disks (DVDs), Blu-ray (RTM) disks, memory sticks, integrated circuit cards, and the like.
  • RAMs random access memories
  • ROMs read-only memories
  • EPROMs or flash memories erasable programmable read-only memories
  • EEPROMs electrically erasable programmable read-only memories
  • SRAMs static random access memories
  • CD-ROMs compact disk read-only memories
  • DVDs digital versatile disks
  • RTM Blu-ray
  • the computer readable instructions may include either assembler instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, or source or object code written in any combination of one or more programming languages, including object-oriented programming languages such as Smalltalk (registered trademark), JAVA (registered trademark), C++, etc., and conventional procedural programming languages such as the "C" programming language or similar programming languages.
  • ISA instruction set architecture
  • machine instructions machine-dependent instructions
  • microcode firmware instructions
  • state setting data or source or object code written in any combination of one or more programming languages, including object-oriented programming languages such as Smalltalk (registered trademark), JAVA (registered trademark), C++, etc., and conventional procedural programming languages such as the "C" programming language or similar programming languages.
  • Computer-readable instructions may be provided to a processor or programmable circuitry of a general-purpose computer, special-purpose computer, or other programmable data processing apparatus, either locally or over a wide-area network (WAN) such as a local area network (LAN), the Internet, etc., to execute the computer-readable instructions to create means for performing the operations specified in the flowcharts or block diagrams.
  • WAN wide-area network
  • LAN local area network
  • Internet Internet
  • processors include computer processors, processing units, microprocessors, digital signal processors, controllers, microcontrollers, etc.
  • FIG. 7 illustrates an example of a computer 2200 in which aspects of the present invention may be embodied in whole or in part.
  • Programs installed on the computer 2200 may cause the computer 2200 to function as or perform operations associated with an apparatus or one or more sections of the apparatus according to an embodiment of the present invention, and/or to perform a process or steps of a process according to an embodiment of the present invention.
  • Such programs may be executed by the CPU 2212 to cause the computer 2200 to perform specific operations associated with some or all of the blocks of the flowcharts and block diagrams described herein.
  • the computer 2200 includes a CPU 2212, a RAM 2214, a graphics controller 2216, and a display device 2218, which are interconnected by a host controller 2210.
  • the computer 2200 also includes input/output units such as a communication interface 2222, a hard disk drive 2224, a DVD-ROM drive 2226, and an IC card drive, which are connected to the host controller 2210 via an input/output controller 2220.
  • the computer also includes legacy input/output units such as a ROM 2230 and a keyboard 2242, which are connected to the input/output controller 2220 via an input/output chip 2240.
  • the CPU 2212 operates according to the programs stored in the ROM 2230 and the RAM 2214, thereby controlling each unit.
  • the graphics controller 2216 retrieves image data generated by the CPU 2212 into a frame buffer or the like provided in the RAM 2214 or into itself, and causes the image data to be displayed on the display device 2218.
  • the communication interface 2222 communicates with other electronic devices via a network.
  • the hard disk drive 2224 stores programs and data used by the CPU 2212 in the computer 2200.
  • the DVD-ROM drive 2226 reads programs or data from the DVD-ROM 2201 and provides the programs or data to the hard disk drive 2224 via the RAM 2214.
  • the IC card drive reads programs and data from an IC card and/or writes programs and data to an IC card.
  • ROM 2230 stores therein a boot program, etc., which is executed by computer 2200 upon activation, and/or a program that depends on the hardware of computer 2200.
  • Input/output chip 2240 may also connect various input/output units to input/output controller 2220 via a parallel port, a serial port, a keyboard port, a mouse port, etc.
  • the programs are provided by a computer-readable medium such as a DVD-ROM 2201 or an IC card.
  • the programs are read from the computer-readable medium and installed in the hard disk drive 2224, RAM 2214, or ROM 2230, which are also examples of computer-readable media, and executed by the CPU 2212.
  • the information processing described in these programs is read by the computer 2200, and brings about cooperation between the programs and the various types of hardware resources described above.
  • An apparatus or method may be constructed by realizing the manipulation or processing of information in accordance with the use of the computer 2200.
  • CPU 2212 may execute a communication program loaded into RAM 2214 and instruct communication interface 2222 to perform communication processing based on the processing described in the communication program.
  • communication interface 2222 reads transmission data stored in a transmission buffer processing area provided in RAM 2214, hard disk drive 2224, DVD-ROM 2201, or a recording medium such as an IC card, and transmits the read transmission data to the network, or writes received data received from the network to a reception buffer processing area or the like provided on the recording medium.
  • the CPU 2212 may also cause all or a necessary portion of a file or database stored on an external recording medium such as the hard disk drive 2224, the DVD-ROM drive 2226 (DVD-ROM 2201), an IC card, etc. to be read into the RAM 2214, and perform various types of processing on the data on the RAM 2214. The CPU 2212 then writes back the processed data to the external recording medium.
  • an external recording medium such as the hard disk drive 2224, the DVD-ROM drive 2226 (DVD-ROM 2201), an IC card, etc.
  • CPU 2212 may perform various types of processing on data read from RAM 2214, including various types of operations, information processing, conditional judgment, conditional branching, unconditional branching, information search/replacement, etc., as described throughout this disclosure and specified by the instruction sequence of the program, and write back the results to RAM 2214.
  • CPU 2212 may also search for information in a file, database, etc. in the recording medium.
  • CPU 2212 may search for an entry that matches a condition, in which an attribute value of the first attribute is specified, from among the multiple entries, read the attribute value of the second attribute stored in the entry, and thereby obtain the attribute value of the second attribute associated with the first attribute that satisfies a predetermined condition.
  • the above-described programs or software modules may be stored on a computer-readable medium on the computer 2200 or in the vicinity of the computer 2200.
  • a recording medium such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet can be used as a computer-readable medium, thereby providing the programs to the computer 2200 via the network.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Facsimiles In General (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

Provided is a testing apparatus that comprises: an image data acquisition unit that acquires items of image data outputted by an image sensor as a device to be tested, in accordance with light having one or a plurality of emission patterns corresponding to a plurality of test items; an image processing control unit that transmits the one or plurality of items of image data acquired by the image data acquisition unit to two or more image processing devices, and causes image processing corresponding to separate test items in the plurality of test items to be executed in parallel by each of the two or more image processing devices; a test result acquisition unit that acquires test results of the test items corresponding to the image processing, which are derived from results of the image processing; and a determination unit that determines the quality of the device to be tested on the basis of the test results for each test item acquired by the test result acquisition unit.

Description

試験装置、試験システム、試験方法および試験プログラムTest device, test system, test method and test program
　本発明は、試験装置、試験システム、試験方法および試験プログラムに関する。 The present invention relates to a test device, a test system, a test method, and a test program.
　特許文献１には「被試験イメージセンサに接触した端子から出力される画像信号…を取り込んで画像処理し…良否を判定する」（請求項１）などと記載されている。
［先行技術文献］
［特許文献］
　　［特許文献１］　特開平４－３６８６号公報 Patent Document 1 states that "an image signal output from a terminal in contact with the image sensor under test is captured and image-processed to determine pass/fail" (claim 1).
[Prior Art Literature]
[Patent Documents]
[Patent Document 1] JP-A-4-3686
一般的開示General Disclosure
　本発明の第１の態様においては、複数の試験項目に対応する１または複数の発光パターンの光に応じ、イメージセンサである被試験デバイスが出力する各画像データを取得する画像データ取得部と、前記画像データ取得部が取得した１または複数の画像データを２以上の画像処理装置へと送信して、前記複数の試験項目における別々の試験項目に応じた画像処理を、前記２以上の画像処理装置のそれぞれにより並行して実行させる画像処理制御部と、画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する試験結果取得部と、前記試験結果取得部により取得された各試験項目の試験結果に基づいて前記被試験デバイスの良否を判定する判定部と、を備える試験装置が提供される。 In a first aspect of the present invention, a test apparatus is provided that includes an image data acquisition unit that acquires image data output by a device under test, which is an image sensor, in response to one or more light emission patterns corresponding to a plurality of test items; an image processing control unit that transmits the one or more image data acquired by the image data acquisition unit to two or more image processing devices and causes each of the two or more image processing devices to execute image processing corresponding to different test items in the plurality of test items in parallel; a test result acquisition unit that acquires test results for the test items corresponding to the image processing derived from the results of the image processing; and a judgment unit that judges whether the device under test is good or bad based on the test results for each test item acquired by the test result acquisition unit.
　上記の試験装置においては、前記画像処理制御部は、前記被試験デバイスの識別情報を画像データと共に前記２以上の画像処理装置へと送信し、前記試験結果取得部は、前記被試験デバイスの識別情報を試験結果と共に取得してよい。 In the above test device, the image processing control unit may transmit identification information of the device under test together with image data to the two or more image processing devices, and the test result acquisition unit may acquire the identification information of the device under test together with the test results.
　上記何れかの試験装置においては、前記画像処理制御部は、各画像処理装置の状態を検知する検知部と、各試験項目を逐次、実行対象の試験項目として選択する第１選択部と、前記実行対象の試験項目が選択されることに応じて複数の画像処理装置から画像処理の実行状態の画像処理装置と、故障状態の画像処理装置との少なくとも一方を除外して、画像処理装置を選択する第２選択部と、前記複数の画像処理装置のうち、前記第２選択部により選択された画像処理装置へと画像データを送信して、前記実行対象の試験項目に応じた画像処理を実行させる実行指示部と、を有してよい。 In any of the above test devices, the image processing control unit may have a detection unit that detects the state of each image processing device, a first selection unit that sequentially selects each test item as a test item to be executed, a second selection unit that selects an image processing device from the multiple image processing devices in response to the selection of the test item to be executed, excluding at least one of an image processing device in an image processing execution state and an image processing device in a faulty state, and an execution instruction unit that transmits image data to the image processing device selected by the second selection unit from among the multiple image processing devices, and executes image processing corresponding to the test item to be executed.
　上記の試験装置においては、前記第２選択部は、少なくとも各画像処理装置の処理性能に基づいて、前記複数の画像処理装置から、前記実行対象の試験項目に応じた画像処理を実行させる画像処理装置を選択してよい。 In the above test device, the second selection unit may select an image processing device from the plurality of image processing devices to perform image processing corresponding to the test item to be executed, based at least on the processing performance of each image processing device.
　上記の試験装置においては、前記第２選択部は、前記複数の画像処理装置のうち、最も処理性能が高い画像処理装置を選択してよい。 In the above test device, the second selection unit may select the image processing device with the highest processing performance from among the plurality of image processing devices.
　画像処理制御部が第１選択部を有する上記何れかの試験装置においては、前記第１選択部は、前記複数の試験項目から、より所要時間の長い画像処理に対応する試験項目を優先して選択してよい。 In any of the above test devices in which the image processing control unit has a first selection unit, the first selection unit may preferentially select a test item corresponding to image processing requiring a longer time from among the multiple test items.
　画像処理制御部が第１選択部を有する上記何れかの試験装置においては、前記第１選択部は、基準よりも所要時間の長い画像処理に対応する試験項目を、離散的な順序で選択してよい。 In any of the above test devices in which the image processing control unit has a first selection unit, the first selection unit may select test items corresponding to image processing requiring a longer time than a reference in a discrete order.
　上記何れかの試験装置においては、前記２以上の画像処理装置のうち、少なくとも１つの画像処理装置は、少なくとも１つのサーバ装置に実装されており、当該試験装置は、各サーバ装置と通信する通信部をさらに備えてよい。 In any of the above test devices, at least one of the two or more image processing devices is implemented in at least one server device, and the test device may further include a communication unit that communicates with each server device.
　上記の試験装置においては、前記少なくとも１つのサーバ装置の何れかは、クラウドサーバであってよい。 In the above test device, any one of the at least one server devices may be a cloud server.
　上記何れかの試験装置においては、前記２以上の画像処理装置の１つとして、画像データに対する画像処理を実行する画像処理部をさらに備えてよい。前記画像処理制御部は、前記画像データ取得部が取得した画像データを前記画像処理部に供給して、前記複数の試験項目のうち一部の試験項目に応じた画像処理を実行させてよい。 Any of the above test devices may further include an image processing unit that performs image processing on image data as one of the two or more image processing devices. The image processing control unit may supply the image data acquired by the image data acquisition unit to the image processing unit, and cause the image processing unit to perform image processing corresponding to some of the multiple test items.
　上記の試験装置においては、前記画像処理制御部は、前記２以上の画像処理装置のうち前記画像処理部とは異なる各画像処理装置との間の通信回線がビジー状態であることに応じて、前記画像処理部に画像処理を実行させてよい。 In the above test device, the image processing control unit may cause the image processing unit to execute image processing in response to a busy state of a communication line between each of the two or more image processing devices and an image processing device other than the image processing unit.
　上記何れかの試験装置においては、前記画像データ取得部が取得した画像データにおける画素値の統計を被試験デバイスごとに実行する統計部をさらに備えてよい。前記判定部は、一の被試験デバイスについての統計結果が基準条件を満たさないことに応じて当該一の被試験デバイスを不良と判定し、前記一の被試験デバイスについての画像処理をディセーブルしてよい。 Any of the above test apparatuses may further include a statistical section that performs statistics on pixel values in the image data acquired by the image data acquisition section for each device under test. The judgment section may judge a device under test to be defective if the statistical results for the device under test do not satisfy a reference condition, and may disable image processing for the device under test.
　上記何れかの試験装置においては、前記被試験デバイスに対し、前記１または複数の発光パターンの光を照射する光源をさらに備えてよい。 Any of the above test apparatuses may further include a light source that irradiates the device under test with light of the one or more emission patterns.
　本発明の第２の態様においては、第１の態様の何れかの複数の試験装置と、前記複数の試験装置により共用される複数の画像処理装置と、を備える試験システムが提供される。 In a second aspect of the present invention, a test system is provided that includes a plurality of test devices according to any one of the first aspects and a plurality of image processing devices shared by the plurality of test devices.
　上記の試験システムにおいては、各試験装置の前記画像処理制御部は、各画像処理装置の状態を検知する検知部と、各試験項目を逐次、実行対象の試験項目として選択する第１選択部と、前記実行対象の試験項目が選択されることに応じて前記複数の画像処理装置から画像処理の実行状態の画像処理装置と、故障状態の画像処理装置との少なくとも一方を除外して、画像処理装置を選択する第２選択部と、前記複数の画像処理装置のうち、前記第２選択部により選択された画像処理装置へと画像データを送信して、前記実行対象の試験項目に応じた画像処理を実行させる実行指示部と、を有してよい。 In the above test system, the image processing control unit of each test device may have a detection unit that detects the state of each image processing device, a first selection unit that sequentially selects each test item as a test item to be executed, a second selection unit that selects an image processing device from the multiple image processing devices in response to the selection of the test item to be executed, excluding at least one of an image processing device in an image processing execution state and an image processing device in a faulty state, and an execution instruction unit that transmits image data to the image processing device selected by the second selection unit from among the multiple image processing devices, and executes image processing corresponding to the test item to be executed.
　第２の態様の試験システムにおいては、各試験装置による試験を制御する制御装置を備え、各試験装置は、各試験項目を逐次、実行対象の試験項目として選択する第１選択部と、前記実行対象の試験項目が選択されることに応じて前記制御装置に画像処理装置の選択要求信号を送信する第１送信部と、前記複数の画像処理装置のうち、前記制御装置により選択された画像処理装置へと画像データを送信して、前記実行対象の試験項目に応じた画像処理を実行させる実行指示部と、を有してよい。前記制御装置は、各画像処理装置の状態を検知する検知部と、各試験装置から逐次、前記選択要求信号を取得する第３取得部と、前記選択要求信号が取得されることに応じて前記複数の画像処理装置から画像処理の実行状態の画像処理装置と、故障状態の画像処理装置との少なくとも一方を除外して、画像処理装置を選択する第３選択部と、前記第３選択部が選択した画像処理装置の識別情報を、前記選択要求信号の送信元の前記試験装置に送信する第２送信部と、を有してよい。 In the second aspect of the test system, a control device is provided for controlling tests by each test device, and each test device may have a first selection unit for sequentially selecting each test item as a test item to be executed, a first transmission unit for transmitting a selection request signal for an image processing device to the control device in response to the selection of the test item to be executed, and an execution instruction unit for transmitting image data to an image processing device selected by the control device from among the plurality of image processing devices, and causing the image processing device to execute image processing corresponding to the test item to be executed. The control device may have a detection unit for detecting the state of each image processing device, a third acquisition unit for sequentially acquiring the selection request signal from each test device, a third selection unit for selecting an image processing device from the plurality of image processing devices in response to the acquisition of the selection request signal, excluding at least one of an image processing device in an image processing execution state and an image processing device in a faulty state, and a second transmission unit for transmitting identification information of the image processing device selected by the third selection unit to the test device that is the source of the selection request signal.
　本発明の第３の態様においては、複数の試験項目に対応する１または複数の発光パターンの光に応じ、イメージセンサである被試験デバイスが出力する各画像データを取得する画像データ取得段階と、前記画像データ取得段階で取得した１または複数の画像データを２以上の画像処理装置へと送信して、前記複数の試験項目における別々の試験項目に応じた画像処理を、前記２以上の画像処理装置のそれぞれにより並行して実行させる画像処理制御段階と、画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する試験結果取得段階と、前記試験結果取得段階により取得された各試験項目の試験結果に基づいて前記被試験デバイスの良否を判定する判定段階と、を備える試験方法が提供される。 In a third aspect of the present invention, a test method is provided that includes an image data acquisition step of acquiring image data output by a device under test, which is an image sensor, in response to light of one or more light emission patterns corresponding to a plurality of test items; an image processing control step of transmitting the one or more image data acquired in the image data acquisition step to two or more image processing devices and causing each of the two or more image processing devices to execute image processing corresponding to different test items in the plurality of test items in parallel; a test result acquisition step of acquiring test results of the test items corresponding to the image processing derived from the results of the image processing; and a judgment step of judging whether the device under test is good or bad based on the test results of each test item acquired in the test result acquisition step.
　本発明の第４の態様においては、コンピュータを、複数の試験項目に対応する１または複数の発光パターンの光に応じ、イメージセンサである被試験デバイスが出力する各画像データを取得する画像データ取得部と、前記画像データ取得部が取得した１または複数の画像データを２以上の画像処理装置へと送信して、前記複数の試験項目における別々の試験項目に応じた画像処理を、前記２以上の画像処理装置のそれぞれにより並行して実行させる画像処理制御部と、画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する試験結果取得部と、前記試験結果取得部により取得された各試験項目の試験結果に基づいて前記被試験デバイスの良否を判定する判定部と、として機能させる試験プログラムが提供される。 In a fourth aspect of the present invention, a test program is provided that causes a computer to function as an image data acquisition unit that acquires image data output by a device under test, which is an image sensor, in response to one or more light emission patterns corresponding to a plurality of test items; an image processing control unit that transmits the one or more image data acquired by the image data acquisition unit to two or more image processing devices and causes each of the two or more image processing devices to execute image processing corresponding to different test items in the plurality of test items in parallel; a test result acquisition unit that acquires test results for the test items corresponding to the image processing derived from the results of the image processing; and a judgment unit that judges whether the device under test is good or bad based on the test results for each test item acquired by the test result acquisition unit.
　なお、上記の発明の概要は、本発明の必要な特徴の全てを列挙したものではない。また、これらの特徴群のサブコンビネーションもまた、発明となりうる。 Note that the above summary of the invention does not list all of the necessary features of the present invention. Subcombinations of these features may also be inventions.
実施形態に係る試験システム１を示す。1 shows a test system 1 according to an embodiment. 発光パターンと、試験項目と、画像処理との対応の一例を示す。1 shows an example of the correspondence between light emission patterns, test items, and image processing. 試験装置２の第１処理に関する動作を示す。4 shows the operation of the test device 2 regarding the first process. 試験装置２の第２処理に関する動作を示す。4 shows the operation of the test device 2 regarding the second process. 変形例に係る試験システム１Ａを示す。1 shows a test system 1A according to a modified example. 試験装置２Ａの第１処理に関する動作を、制御装置５の動作と共に示す。The operation of the test device 2A regarding the first process will be shown together with the operation of the control device 5. 本発明の複数の態様が全体的または部分的に具現化されてよいコンピュータ２２００の例を示す。22 illustrates an example computer 2200 in which aspects of the present invention may be embodied, in whole or in part.
　以下、発明の実施の形態を通じて本発明を説明するが、以下の実施形態は請求の範囲にかかる発明を限定するものではない。また、実施形態の中で説明されている特徴の組み合わせの全てが発明の解決手段に必須であるとは限らない。 The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention as claimed. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.
　＜１．試験システム１＞
　図１は、本実施形態に係る試験システム１を示す。試験システム１は、試験対象の被試験デバイス１００と、複数の試験装置２と、複数の試験装置２により共用される複数の画像処理装置３０が実装された複数のサーバ装置３とを備える。 <1. Test system 1>
1 shows a test system 1 according to the present embodiment. The test system 1 includes a device under test 100 to be tested, a plurality of test apparatuses 2, and a plurality of server apparatuses 3 each having a plurality of image processing apparatuses 30 shared by the plurality of test apparatuses 2.
　＜１－１．被試験デバイス１００＞
　被試験デバイス１００は、イメージセンサであり、例えばＣＭＯＳセンサやＣＣＤセンサであってよい。本実施形態では一例として、被試験デバイス１００は、１つのウエハ上に複数形成されているが、ウエハをダイシングして個片化されていてもよいし、さらに封止されてパッケージングされていてもよい。 <1-1. Device under test 100>
The device under test 100 is an image sensor, and may be, for example, a CMOS sensor or a CCD sensor. In the present embodiment, as an example, a plurality of devices under test 100 are formed on one wafer, but the wafer may be diced into individual devices, or may be sealed and packaged.
　被試験デバイス１００は、外部接続可能な端子を有してよく、照射される光に応じた画像データを当該端子から出力してよい。画像データには、画素ごとの色の濃淡や明るさを示す画素値が含まれてよい。例えば、画像データはグレースケール画像の画像データであってよく、画素ごとに白黒の濃淡を示す画素値を含んでよい。これに代えて、画像データはカラー画像の画像データであってよく、画素ごとにＲＧＢなどの各色の濃淡を示す画素値を含んでよい。 The device under test 100 may have a terminal that can be connected to an external device, and may output image data from the terminal according to the irradiated light. The image data may include pixel values that indicate the color shade and brightness of each pixel. For example, the image data may be image data of a grayscale image, and may include pixel values that indicate the shade of black and white for each pixel. Alternatively, the image data may be image data of a color image, and may include pixel values that indicate the shade of each color, such as RGB, for each pixel.
　＜１－２．試験装置２＞
　各試験装置２は、１または複数の被試験デバイス１００に対して試験を行う。本実施形態では一例として、各試験装置２は、ウエハ上の各被試験デバイス１００に対して試験を行ってよい。各試験装置２は、２以上の試験項目を含む試験を行ってよく、本実施形態では一例としてＮ個（但しＮは２以上の自然数）の試験項目の試験を行ってよい。各試験項目の試験では、当該試験項目に対応する１または複数の発光パターンの光を被試験デバイス１００に照射したことに応じて当該被試験デバイス１００から出力される１または複数の画像データが取得されてよく、当該試験項目に対応する画像処理を画像データに行って試験結果が取得されてよい。詳細は後述するが、画像処理とは、画像データから何らかの情報を取り出す処理であってよい。 <1-2. Test device 2>
Each test apparatus 2 performs a test on one or more devices under test 100. In the present embodiment, as an example, each test apparatus 2 may perform a test on each device under test 100 on the wafer. Each test apparatus 2 may perform a test including two or more test items, and in the present embodiment, as an example, may perform a test on N test items (where N is a natural number of two or more). In the test of each test item, one or more image data output from the device under test 100 may be acquired in response to irradiating the device under test 100 with light of one or more emission patterns corresponding to the test item, and the test result may be acquired by performing image processing corresponding to the test item on the image data. Details will be described later, but the image processing may be a process of extracting some information from the image data.
　各試験装置２は、光源２０と、画像データ取得部２１と、画像処理制御部２２と、画像処理部２３と、統計部２４と、通信部２８と、試験結果取得部２６と、判定部２７とを有する。 Each test device 2 has a light source 20, an image data acquisition unit 21, an image processing control unit 22, an image processing unit 23, a statistical unit 24, a communication unit 28, a test result acquisition unit 26, and a judgment unit 27.
　＜１－２．１．光源２０＞
　光源２０は、Ｎ個の試験項目に対応する１または複数の発光パターンの光を各被試験デバイス１００に照射する。光源２０は、被試験デバイス１００に対向して配置されるテストヘッドに配置されてよい。光源２０は、ウエハ上の各被試験デバイス１００に対して光を照射してよい。これにより、光が照射された各被試験デバイス１００から画像データが出力されてよい。 <1-2.1. Light source 20>
The light source 20 irradiates each of the devices under test 100 with light of one or more emission patterns corresponding to N test items. The light source 20 is disposed in a test head disposed opposite the devices under test 100. The light source 20 may irradiate light onto each of the devices under test 100 on the wafer. As a result, image data may be output from each of the devices under test 100 irradiated with the light.
　一の発光パターンの光は、被試験デバイス１００により一の画像が撮像可能な時間だけ照射される光であってよい。一の発光パターンの光は、１または複数の試験項目に対応してよく、当該１または複数の試験項目の試験を行う場合に照射されてよい。 The light of one emission pattern may be light that is irradiated for a period of time during which one image can be captured by the device under test 100. The light of one emission pattern may correspond to one or more test items, and may be irradiated when testing the one or more test items.
　複数の発光パターンの光は、被試験デバイス１００により複数の画像が撮像される時間だけ照射される光であってよい。複数の発光パターンの光は、互いに照射位置および照射時間の少なくとも一方によって照射光の強度や波長が異なってよい。複数の発光パターンの光は、１または複数の試験項目に対応してよく、当該１または複数の試験項目の試験を行う場合に照射されてよい。 The light of the multiple emission patterns may be light that is irradiated for the time it takes the device under test 100 to capture multiple images. The light of the multiple emission patterns may differ in intensity or wavelength depending on at least one of the irradiation position and irradiation time. The light of the multiple emission patterns may correspond to one or more test items, and may be irradiated when testing the one or more test items.
　発光パターンの数は、Ｎ個の試験項目の試験を行うために被試験デバイス１００から出力させるべき画像データの数と同じであってよく、画像データ取得部２１により取得される画像データの数と同じであってよい。 The number of light emission patterns may be the same as the number of image data to be output from the device under test 100 to test the N test items, and may be the same as the number of image data acquired by the image data acquisition unit 21.
　＜１－２．２．画像データ取得部２１＞
　画像データ取得部２１は、Ｎ個の試験項目に対応する１または複数の発光パターンの光に応じて被試験デバイス１００が出力する各画像データを取得する。画像データ取得部２１は、光源２０から照射される光に応じて各被試験デバイス１００が出力する画像データを取得してよい。 <1-2.2. Image data acquisition unit 21>
The image data acquiring section 21 acquires each image data output by the device under test 100 in response to light of one or more emission patterns corresponding to the N test items. The image data acquiring section 21 may acquire image data output by each device under test 100 in response to light irradiated from the light source 20.
　画像データ取得部２１は、取得した画像データを画像処理制御部２２における後述の実行指示部２２３に供給してよい。画像データ取得部２１は、画像データを出力した被試験デバイス１００の識別情報を、当該画像データと共に実行指示部２２３に供給してよい。これに加えて、画像データ取得部２１は、画像データを出力した被試験デバイス１００が含まれるウエハの識別情報を、当該画像データと共に実行指示部２２３に供給してよい。 The image data acquisition section 21 may supply the acquired image data to an execution instruction section 223 (described below) in the image processing control section 22. The image data acquisition section 21 may supply identification information of the device under test 100 that output the image data to the execution instruction section 223 together with the image data. In addition, the image data acquisition section 21 may supply identification information of the wafer that includes the device under test 100 that output the image data to the execution instruction section 223 together with the image data.
　＜１－２．３．画像処理制御部２２＞
　画像処理制御部２２は、画像データ取得部２１が取得した１または複数の画像データを２以上の画像処理装置３０へと送信して、Ｎ個の試験項目に応じた各画像処理を、当該２以上の画像処理装置３０に実行させる。画像処理制御部２２は、Ｎ個の試験項目における別々の試験項目に応じた画像処理を、当該２以上の画像処理装置３０のそれぞれにより並行して実行させてよい。本実施形態では一例として、画像処理制御部２２は、Ｎ個の試験項目のうち、Ｍ個の試験項目（但し、Ｍは２≦Ｍ≦Ｎの自然数）に応じた画像処理を２以上の画像処理装置３０のそれぞれにより並行して実行させてよい。画像処理制御部２２は、一の発光パターンに対応する複数の試験項目同士で、並行に画像処理を実行させてもよいし、複数の発光パターンに対応する複数の試験項目同士で、並行に画像処理を実行させてもよい。なお、２以上の画像処理が並行して実行されるとは、少なくとも一部の処理時間が重なるように２以上の画像処理が実行されることであってよい。画像処理制御部２２から画像データが送信される画像処理装置３０の個数は、試験項目の個数Ｎ，Ｍと同じであってもよいし、異なってもよい。 <1-2.3. Image processing control unit 22>
The image processing control unit 22 transmits one or more image data acquired by the image data acquisition unit 21 to two or more image processing devices 30, and causes the two or more image processing devices 30 to execute each image processing corresponding to the N test items. The image processing control unit 22 may cause the two or more image processing devices 30 to execute image processing corresponding to different test items among the N test items in parallel. As an example in this embodiment, the image processing control unit 22 may cause the two or more image processing devices 30 to execute image processing corresponding to M test items (where M is a natural number such that 2≦M≦N) among the N test items in parallel. The image processing control unit 22 may execute image processing in parallel between multiple test items corresponding to one light emission pattern, or may execute image processing in parallel between multiple test items corresponding to multiple light emission patterns. Note that executing two or more image processing in parallel may mean executing two or more image processing so that at least a part of the processing time overlaps. The number of image processing devices 30 to which image data is transmitted from the image processing control unit 22 may be the same as the number N, M of test items, or may be different.
　画像処理制御部２２は、検知部２２０と、第１選択部２２１と、第２選択部２２２と、実行指示部２２３とを有する。 The image processing control unit 22 has a detection unit 220, a first selection unit 221, a second selection unit 222, and an execution instruction unit 223.
　＜１－２．３．１．検知部２２０＞
　検知部２２０は、各画像処理装置３０の状態を検知する。検知部２２０は、試験システム１に含まれる各画像処理装置３０と通信して、当該画像処理装置３０の状態を検知してよい。検知部２２０は、従来より公知の手法によって各画像処理装置３０の状態を検知してよい。検知部２２０は、各画像処理装置３０が待機状態と、画像処理の実行状態と、故障状態との何れであるかを検知してよい。検知部２２０は、検知された各画像処理装置３０の状態を第２選択部２２２に供給してよい。 <1-2.3.1. Detection unit 220>
The detection section 220 detects the state of each image processing device 30. The detection section 220 may communicate with each image processing device 30 included in the test system 1 to detect the state of the image processing device 30. The detection section 220 may detect the state of each image processing device 30 by a conventionally known method. The detection section 220 may detect whether each image processing device 30 is in a standby state, an image processing execution state, or a failure state. The detection section 220 may supply the detected state of each image processing device 30 to the second selection section 222.
　＜１－２．３．２．第１選択部２２１＞
　第１選択部２２１は、各試験項目を逐次、実行対象の試験項目として選択する。実行対象の試験項目とは、画像処理を実行させる試験項目であってよい。 <1-2.3.2. First selection unit 221>
The first selection unit 221 sequentially selects each test item as a test item to be executed. The test item to be executed may be a test item for which image processing is to be executed.
　第１選択部２２１は、Ｎ個の試験項目から実行対象の試験項目を選択してよい。第１選択部２２１は、Ｎ個の試験項目から、より所要時間の長い画像処理に対応する試験項目を優先して選択してよい。画像処理の所要時間は、以前に取得された１または複数の画像データで画像処理を行うことで予め測定されてよい。 The first selection unit 221 may select a test item to be executed from the N test items. The first selection unit 221 may preferentially select a test item from the N test items that corresponds to image processing that requires a longer time. The time required for image processing may be measured in advance by performing image processing on one or more image data previously obtained.
　第１選択部２２１は、被試験デバイス１００に照射された発光パターンの識別情報を光源２０などから取得して、当該発光パターンに対応するＭ個の試験項目から、何れかの試験項目を選択してもよい。第１選択部２２１は、選択した実行対象の試験項目の識別情報を第２選択部２２２に供給してよい。 The first selection unit 221 may obtain identification information of the light emission pattern irradiated to the device under test 100 from the light source 20 or the like, and select one of the M test items corresponding to the light emission pattern. The first selection unit 221 may supply the identification information of the selected test item to be executed to the second selection unit 222.
　＜１－２．３．３．第２選択部２２２＞
　第２選択部２２２は、第１選択部２２１により実行対象の試験項目が選択されることに応じて、試験システム１に含まれる複数の画像処理装置３０から何れかの画像処理装置３０を選択する。第２選択部２２２は、試験システム１に含まれる複数の画像処理装置３０から、画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方を除外して画像処理装置３０を選択してよい。第２選択部２２２は、複数の画像処理装置３０から、待機状態の画像処理装置３０を選択してよい。第２選択部２２２は、実行対象の試験項目の識別情報と、選択した画像処理装置３０の識別情報とを実行指示部２２３に供給してよい。 <1-2.3.3. Second selection unit 222>
The second selection unit 222 selects one of the image processing devices 30 from the multiple image processing devices 30 included in the test system 1 in response to the selection of the test item to be executed by the first selection unit 221. The second selection unit 222 may select an image processing device 30 from the multiple image processing devices 30 included in the test system 1 by excluding at least one of an image processing device 30 in an execution state of image processing and an image processing device 30 in a faulty state. The second selection unit 222 may select an image processing device 30 in a standby state from the multiple image processing devices 30. The second selection unit 222 may supply identification information of the test item to be executed and identification information of the selected image processing device 30 to the execution instruction unit 223.
　＜１－２．３．４．実行指示部２２３＞
　実行指示部２２３は、複数の画像処理装置３０のうち、第２選択部２２２により選択された画像処理装置３０へと画像データを送信して、実行対象の試験項目に応じた画像処理を実行させる。実行指示部２２３は、画像処理に応じた試験項目の試験結果が試験結果取得部２６に取得されるか否かに関わらず、各画像処理装置３０に画像処理を実行させてよい。これにより、Ｍ個の試験項目に応じた画像処理が２以上の画像処理装置３０により並行に実行されてよい。 <1-2.3.4. Execution instruction unit 223>
The execution instruction unit 223 transmits image data to an image processing device 30 selected by the second selection unit 222 from among the multiple image processing devices 30, and causes the image processing device 30 to execute image processing corresponding to the test item to be executed. The execution instruction unit 223 may cause each image processing device 30 to execute image processing regardless of whether or not the test result of the test item corresponding to the image processing is acquired by the test result acquisition unit 26. In this way, image processing corresponding to M test items may be executed in parallel by two or more image processing devices 30.
　実行指示部２２３は、第２選択部２２２により選択された画像処理装置３０に対し、実行対象の試験項目の識別情報を画像データと共に送信してよい。また、実行指示部２２３は、画像データを出力した被試験デバイス１００の識別情報を画像データと共に、画像処理を実行する各画像処理装置３０へと送信してよい。これに加えて、実行指示部２２３は、画像データを出力した被試験デバイス１００が含まれるウエハの識別情報や、当該実行指示部２２３が含まれる試験装置２の識別情報を、当該画像データと共に、画像処理を実行する各画像処理装置３０へと送信してよい。 The execution instruction unit 223 may transmit identification information of the test item to be executed together with the image data to the image processing device 30 selected by the second selection unit 222. The execution instruction unit 223 may also transmit identification information of the device under test 100 that output the image data together with the image data to each image processing device 30 that executes the image processing. In addition, the execution instruction unit 223 may transmit identification information of the wafer that includes the device under test 100 that output the image data and identification information of the test device 2 that includes the execution instruction unit 223 together with the image data to each image processing device 30 that executes the image processing.
　＜１－２．４．画像処理部２３＞
　画像処理部２３は、画像データに対する画像処理を実行する。画像処理部２３は、試験システム１に含まれる複数の画像処理装置３０の１つとして機能してよく、画像処理制御部２２により画像処理が指示されてよい。この場合には、画像処理部２３は、画像データ取得部２１が取得した画像データを画像処理制御部２２から供給されて、Ｎ個の試験項目のうち一部の試験項目に応じた画像処理を実行してよい。画像処理部２３は、画像処理制御部２２からの指示により画像処理を並行して実行する２以上の画像処理装置３０の１つであってよい。画像処理部２３は、実行指示部２２３から供給される試験項目の識別情報に対応する画像処理を実行してよい。 <1-2.4. Image processing unit 23>
The image processing unit 23 executes image processing on the image data. The image processing unit 23 may function as one of the multiple image processing devices 30 included in the test system 1, and the image processing may be instructed by the image processing control unit 22. In this case, the image processing unit 23 may receive the image data acquired by the image data acquisition unit 21 from the image processing control unit 22 and execute image processing corresponding to some of the N test items. The image processing unit 23 may be one of two or more image processing devices 30 that execute image processing in parallel in response to an instruction from the image processing control unit 22. The image processing unit 23 may execute image processing corresponding to the identification information of the test item supplied from the execution instruction unit 223.
　ここで、画像処理は、画像データから何らかの情報を取り出す処理であってよい。例えば、画像処理は、画素値の平均を算出する処理であってもよいし、被試験デバイス１００の感度の指標値を算出する処理であってもよいし、画素値の均一性の指標値を算出する処理であってもよいし、被試験デバイス１００のノイズ特性の指標値を算出する処理であってもよいし、画像データの少なくとも一部の領域での画素値の標準偏差を算出する処理であってもよいし、意図しない画素値のドットやラインを検出する処理であってもよい。 Here, image processing may be processing to extract some information from image data. For example, image processing may be processing to calculate an average pixel value, processing to calculate an index value for the sensitivity of the device under test 100, processing to calculate an index value for the uniformity of pixel values, processing to calculate an index value for the noise characteristics of the device under test 100, processing to calculate a standard deviation of pixel values in at least a partial area of the image data, or processing to detect dots or lines with unintended pixel values.
　なお、画像処理部２３は、試験装置２の外部の画像処理装置３０よりも処理性能が低くてよい。一例として、画像処理部２３は画像処理装置３０よりもクロック周波数が低くてよい。 The image processing unit 23 may have lower processing performance than the image processing device 30 external to the test device 2. As an example, the image processing unit 23 may have a lower clock frequency than the image processing device 30.
　画像処理部２３は、画像処理の結果を示すデータと、被試験デバイス１００の識別情報とを試験結果取得部２６に供給してよい。試験項目の識別番号や、被試験デバイス１００が含まれるウエハの識別番号が実行指示部２２３から供給される場合には、画像処理部２３は、これらの試験項目の識別情報や、被試験デバイス１００が含まれるウエハの識別情報を、画像処理の結果を示すデータと共に試験結果取得部２６にさらに供給してよい。 The image processing unit 23 may supply data indicating the results of the image processing and the identification information of the device under test 100 to the test result acquisition unit 26. When the identification number of the test item and the identification number of the wafer including the device under test 100 are supplied from the execution instruction unit 223, the image processing unit 23 may further supply the identification information of these test items and the identification information of the wafer including the device under test 100 to the test result acquisition unit 26 together with the data indicating the results of the image processing.
　＜１－２．５．統計部２４＞
　統計部２４は、画像データ取得部２１が取得した画像データにおける画素値の統計を被試験デバイス１００ごとに実行する。画像データがグレースケール画像を示す場合には、統計部２４は、白黒の濃淡を示す画素値の統計を実行してよい。画像データがカラー画像を示す場合には、統計部２４は、ＲＧＢなどの構成色それぞれについて、画素値の統計を実行してよい。統計部２４は、画素値の分散や平均などを示す統計結果を算出してよい。統計部２４は、算出した統計結果を判定部２７に供給してよい。 <1-2.5. Statistics Department 24>
The statistical section 24 performs statistics on pixel values in the image data acquired by the image data acquisition section 21 for each device under test 100. When the image data represents a grayscale image, the statistical section 24 performs statistics on pixel values in the image data acquired by the image data acquisition section 21 for each device under test 100. If the image data represents a color image, the statistics section 24 may perform statistics of pixel values for each of the constituent colors, such as RGB. The statistical section 24 may calculate statistical results indicating the variance, average, etc. of pixel values. The statistical section 24 may supply the calculated statistical results to the determination section 27.
　＜１－２．６．試験結果取得部２６＞
　試験結果取得部２６は、画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する。画像処理装置３０に対して画像データと共に被試験デバイス１００の識別情報が送信される場合には、試験結果取得部２６は、被試験デバイス１００の識別情報を試験結果と共に取得してよい。 <1-2.6. Test result acquisition unit 26>
The test result acquiring section 26 acquires the test result of the test item corresponding to the image processing, which is derived from the result of the image processing. When the identification information of the device under test 100 is transmitted to the image processing device 30 together with the image data, the test result acquiring section 26 may acquire the identification information of the device under test 100 together with the test result.
　試験結果取得部２６は、画像処理の結果を示すデータから、当該画像処理に対応する試験項目の試験結果を導出してよい。但し、画像処理の結果が試験項目の試験結果を示す場合には、試験結果取得部２６は、画像処理の結果を試験結果として取得してもよい。 The test result acquisition unit 26 may derive the test result of the test item corresponding to the image processing from the data indicating the result of the image processing. However, if the result of the image processing indicates the test result of the test item, the test result acquisition unit 26 may acquire the result of the image processing as the test result.
　試験結果取得部２６は、取得した試験結果を判定部２７に供給してよい。試験結果取得部２６は、試験結果を被試験デバイス１００の識別情報やウエハの識別情報と共に判定部２７に供給してよい。 The test result acquisition unit 26 may supply the acquired test results to the judgment unit 27. The test result acquisition unit 26 may supply the test results to the judgment unit 27 together with the identification information of the device under test 100 and the identification information of the wafer.
　＜１－２．７．判定部２７＞
　判定部２７は、試験結果取得部２６により取得された各試験項目の試験結果に基づいて被試験デバイス１００の良否を判定する。判定部２７は、判定結果を試験装置２の外部に出力してよい。 <1-2.7. Determination unit 27>
The judging section 27 judges the pass/fail of the device under test 100 based on the test results of each test item acquired by the test result acquiring section 26. The judging section 27 outputs the judgment result to the outside of the test apparatus 2. good.
　判定部２７は、Ｎ個の試験項目のうち少なくとも一部の試験項目の試験結果に基づいて被試験デバイス１００の良否を判定してよい。これに加えて、判定部２７は、統計部２４による統計結果に基づいて、被試験デバイス１００の良否を判定してよい。判定部２７は、一の被試験デバイス１００についての統計結果が基準条件を満たさないことに応じて当該一の被試験デバイス１００を不良と判定してよい。判定部２７は、一の被試験デバイス１００についての統計結果が基準条件を満たさないことに応じて当該一の被試験デバイス１００についての画像処理をディセーブルしてよい。 The judgment section 27 may judge the pass/fail of the device under test 100 based on the test results of at least some of the N test items. In addition, the judgment section 27 may judge the pass/fail of the device under test 100 based on the statistical results by the statistics section 24. The judgment section 27 may judge a device under test 100 as defective when the statistical results for the device under test 100 do not satisfy the reference condition. The judgment section 27 may disable image processing for the device under test 100 when the statistical results for the device under test 100 do not satisfy the reference condition.
　ここで、画素値の統計結果が基準条件を満たさないとは、統計結果を示す値（一例として画素値の分散や平均）が基準範囲外となることであってよい。不良と判定された一の被試験デバイス１００についての画像処理をディセーブルするとは、当該一の被試験デバイス１００についての画像処理制御部２２の動作を停止させることであってもよいし、実行中の画像処理を停止させることであってもよい。 Here, the statistical result of pixel values not satisfying the standard condition may mean that a value indicating the statistical result (for example, the variance or average of pixel values) is outside a standard range. Disabling image processing for a device under test 100 determined to be defective may mean stopping the operation of the image processing control unit 22 for that device under test 100, or may mean stopping image processing that is currently being performed.
　＜１－２．８．通信部２８＞
　通信部２８は、各サーバ装置３と通信する。これにより、試験装置２の各部と、サーバ装置３の各画像処理装置３０との間で通信が可能となってよい。例えば検知部２２０は、通信部２８を介して各画像処理装置３０の状態を検知してよい。実行指示部２２３は、通信部２８を介して各画像処理装置３０へと画像データを送信してよい。試験結果取得部２６は、通信部２８を介して画像処理の結果などを取得してよい。 <1-2.8. Communication unit 28>
The communication unit 28 communicates with each server device 3. This may enable communication between each unit of the test device 2 and each image processing device 30 of the server device 3. For example, the detection unit 220 may detect the state of each image processing device 30 via the communication unit 28. The execution instruction unit 223 may transmit image data to each image processing device 30 via the communication unit 28. The test result acquisition unit 26 may acquire the results of image processing, etc. via the communication unit 28.
　通信部２８と、サーバ装置３との間の通信ネットワークは、インターネット、広域ネットワーク（ＷＡＮ）、ローカルエリアネットワーク等の各種ネットワークまたはその組み合わせを含んで構成されてよい。通信ネットワークは、有線および無線の少なくとも一方による接続ポイントを含んでよい。通信ネットワークは、インターネットなどの公衆回線から分離された専用回線により実現されてもよい。 The communication network between the communication unit 28 and the server device 3 may be configured to include various networks such as the Internet, a wide area network (WAN), a local area network, or a combination thereof. The communication network may include at least one of wired and wireless connection points. The communication network may be realized by a dedicated line separated from a public line such as the Internet.
　＜１－３．サーバ装置３＞
　各サーバ装置３は、試験装置２からの要求に応じて種々の機能を提供する。本実施形態に係る各サーバ装置３には、１または複数の画像処理装置３０が実装されており、試験装置２からの要求により画像処理を行う。 <1-3. Server device 3>
Each server device 3 provides various functions in response to requests from the test device 2. Each server device 3 according to this embodiment is equipped with one or more image processing devices 30, and performs image processing in response to requests from the test device 2.
　各サーバ装置３は、試験装置２の近傍（一例として試験装置２と同じ設備内）に配置されてもよいし、試験装置２の遠方（一例として試験装置２とは別の設備内）に配置されてもよい。複数のサーバ装置３の何れかは、クラウドサーバであってよい。一例として、複数のサーバ装置３がそれぞれクラウドサーバであってもよいし、複数のサーバ装置３のうち一部のサーバ装置３がクラウドサーバであってもよい。クラウドサーバは、クラウド環境に構築されたサーバであってよい。 Each server device 3 may be located near the test device 2 (for example, in the same facility as the test device 2) or far from the test device 2 (for example, in a facility separate from the test device 2). Any of the multiple server devices 3 may be a cloud server. As an example, each of the multiple server devices 3 may be a cloud server, or some of the multiple server devices 3 may be cloud servers. The cloud server may be a server built in a cloud environment.
　＜１－３．１．画像処理装置３０＞
　各画像処理装置３０は、各試験装置２の実行指示部２２３から供給される画像データに対し、実行指示部２２３から指示される画像処理を行う。実行指示部２２３から指示される画像処理は、実行指示部２２３から供給される試験項目の識別情報に対応する画像処理であってよい。各画像処理装置３０は、試験項目の識別情報と、当該試験項目に対応する画像処理の内容との対応情報を予め記憶してよく、実行指示部２２３から供給される試験項目の識別情報に対応する画像処理を当該対応情報から検出してよい。 <1-3.1. Image processing device 30>
Each image processing device 30 performs image processing instructed by the execution instructing unit 223 on image data supplied from the execution instructing unit 223 of each test device 2. The image processing instructed by the execution instructing unit 223 may be image processing corresponding to the identification information of the test item supplied from the execution instructing unit 223. Each image processing device 30 may store in advance correspondence information between the identification information of the test item and the content of the image processing corresponding to the test item, and may detect the image processing corresponding to the identification information of the test item supplied from the execution instructing unit 223 from the correspondence information.
　各画像処理装置３０は、画像処理により、被試験デバイス１００の特性を示す情報を画像データから取得してよい。各画像処理装置３０はＧＰＵまたはＣＰＵを含んでよい。 Each image processing device 30 may obtain information indicating the characteristics of the device under test 100 from the image data by image processing. Each image processing device 30 may include a GPU or a CPU.
　各画像処理装置３０は、画像処理の結果を示すデータと、被試験デバイス１００の識別情報とを試験結果取得部２６に供給してよい。これに加えて、各画像処理装置３０は、実行指示部２２３から供給された試験項目の識別情報や、被試験デバイス１００が含まれるウエハの識別情報を、画像処理の結果を示すデータと共に試験結果取得部２６に供給してよい。 Each image processing device 30 may supply data indicating the results of the image processing and identification information of the device under test 100 to the test result acquisition unit 26. In addition, each image processing device 30 may supply identification information of the test item supplied from the execution instruction unit 223 and identification information of the wafer containing the device under test 100 to the test result acquisition unit 26 together with data indicating the results of the image processing.
　各画像処理装置３０は、画像データの送信元の実行指示部２２３を含む試験装置２に対して画像処理の結果を示すデータなどを送信してよい。一例として、各画像処理装置３０は、画像データと共に送信された試験装置２の識別情報で示される試験装置２に対して、画像処理の結果を示すデータなどを送信してよい。 Each image processing device 30 may transmit data indicating the results of image processing to the test device 2 including the execution instruction unit 223 that transmitted the image data. As an example, each image processing device 30 may transmit data indicating the results of image processing to the test device 2 indicated by the identification information of the test device 2 transmitted together with the image data.
　以上の試験装置２によれば、複数の試験項目に対応する１または複数の発光パターンの光に応じて被試験デバイス１００が出力する各画像データが２以上の画像処理装置３０へと送信されて、別々の試験項目に応じた画像処理が並行して実行される。そして、これらの画像処理に応じた試験項目の試験結果が取得され、各試験項目の試験結果に基づいて被試験デバイス１００の良否が判定される。従って、複数の画像処理が同じ画像処理装置３０で順に実行される場合と比較して、判定までの時間を短縮することができる。 According to the above test apparatus 2, each image data output by the device under test 100 in response to one or more light emission patterns corresponding to multiple test items is sent to two or more image processing devices 30, and image processing corresponding to the different test items is performed in parallel. Then, the test results of the test items corresponding to these image processes are obtained, and the pass/fail of the device under test 100 is judged based on the test results of each test item. Therefore, the time until judgment can be shortened compared to when multiple image processes are performed sequentially by the same image processing device 30.
　また、被試験デバイス１００の識別情報が画像データと共に画像処理装置３０へと送信され、被試験デバイス１００の識別情報が試験結果と共に取得されるので、試験結果を被試験デバイス１００に対して正確に対応付けることができる。 In addition, the identification information of the device under test 100 is sent to the image processing device 30 together with the image data, and the identification information of the device under test 100 is acquired together with the test results, so that the test results can be accurately associated with the device under test 100.
　また、各試験項目が実行対象の試験項目として選択されることに応じて複数の画像処理装置３０から画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方が除外されて何れかの画像処理装置３０が選択される。そして、選択された画像処理装置３０へと画像データが送信されて、実行対象の試験項目に応じた画像処理が実行される。従って、利用可能な画像処理装置３０を確実に選択して画像処理を行わせることができる。 Furthermore, in response to each test item being selected as the test item to be executed, at least one of the image processing devices 30 in the image processing execution state and the image processing device 30 in the faulty state is excluded from the multiple image processing devices 30, and one of the image processing devices 30 is selected. Then, image data is sent to the selected image processing device 30, and image processing according to the test item to be executed is executed. Therefore, an available image processing device 30 can be reliably selected to perform image processing.
　また、より所要時間の長い画像処理に対応する試験項目が実行対象として優先して選択されるので、所要時間の長い画像処理の試験項目を先に終了することができる。従って、所要時間の長い画像処理の試験項目がボトルネックとなって判定が遅くなってしまうのを防止し、判定を早めることができる。 In addition, test items that correspond to image processing that requires a longer time are given priority for selection as the test item to be executed, so that test items for image processing that require a longer time can be completed first. This prevents test items for image processing that require a longer time from becoming a bottleneck and slowing down the evaluation, and allows for faster evaluation.
　また、複数の画像処理装置３０が複数のサーバ装置３に実装されており、試験装置２は各サーバ装置３と通信するので、サーバ装置３に実装された画像処理装置３０を試験に用いることができる。 In addition, multiple image processing devices 30 are implemented in multiple server devices 3, and the test device 2 communicates with each server device 3, so that the image processing devices 30 implemented in the server devices 3 can be used for testing.
　また、サーバ装置３の何れかはクラウドサーバであるので、クラウドサーバに実装された画像処理装置３０を試験に用いることができる。 Also, since one of the server devices 3 is a cloud server, the image processing device 30 implemented in the cloud server can be used for testing.
　また、画像処理部２３が試験装置２にさらに具備され、取得された画像データが画像処理部２３に供給されて一部の試験項目に応じた画像処理が実行される。従って、試験装置２内の画像処理部２３を試験に用いることができる。 The test device 2 is further provided with an image processing unit 23, and the acquired image data is supplied to the image processing unit 23, where image processing corresponding to some of the test items is performed. Therefore, the image processing unit 23 in the test device 2 can be used for testing.
　また、光源２０が試験装置２にさらに具備されるので、光の照射から画像データの取得、画像処理装置３０に対する画像データの送信までを連動して行い、試験の時間をいっそう短縮することができる。 In addition, since the test device 2 is further equipped with a light source 20, the processes from irradiating light to acquiring image data and transmitting the image data to the image processing device 30 can be performed in a coordinated manner, further shortening the test time.
　また、取得した画像データにおける画素値の統計が被試験デバイス１００ごとに実行され、一の被試験デバイス１００についての統計結果が基準条件を満たさないことに応じて当該一の被試験デバイス１００が不良と判定され、当該一の被試験デバイス１００についての画像処理がディセーブルされる。従って、画素値の統計結果から不良と判定される被試験デバイス１００について画像処理が無駄に行われるのを防止することができる。 In addition, pixel value statistics of the acquired image data are performed for each device under test 100, and if the statistical results for a device under test 100 do not satisfy the reference conditions, the device under test 100 is determined to be defective, and image processing for the device under test 100 is disabled. This makes it possible to prevent unnecessary image processing from being performed on a device under test 100 that is determined to be defective based on the statistical results of pixel values.
　また、複数の試験装置２と、複数の試験装置２により共用される複数の画像処理装置３０とが試験システム１に具備されるので、複数の試験装置２が別々に複数の画像処理装置３０を専有して使用する場合と異なり、画像処理装置３０の数を低減することができる。 In addition, since the test system 1 is equipped with multiple test devices 2 and multiple image processing devices 30 shared by the multiple test devices 2, the number of image processing devices 30 can be reduced, unlike when multiple test devices 2 each have exclusive use of multiple image processing devices 30.
　また、複数の試験装置２ではそれぞれ、複数の試験項目から実行対象の試験項目が選択されることに応じて複数の画像処理装置３０から画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方が除外されて何れかの画像処理装置３０が選択される。そして、選択された画像処理装置３０へと画像データが送信されて、実行対象の試験項目に応じた画像処理の実行の指示が行われる。従って、複数の試験装置２がそれぞれ利用可能な画像処理装置３０を確実に選択して画像処理を行わせることができる。 Furthermore, in each of the multiple test devices 2, in response to the selection of a test item to be executed from the multiple test items, at least one of the image processing devices 30 in the image processing execution state and the image processing device 30 in the faulty state is excluded from the multiple image processing devices 30, and an image processing device 30 is selected. Then, image data is sent to the selected image processing device 30, and an instruction to execute image processing according to the test item to be executed is issued. Therefore, each of the multiple test devices 2 can reliably select an available image processing device 30 to perform image processing.
　＜２．発光パターン、試験項目および画像処理の具体例＞
　図２は、光源２０の発光パターンと、試験項目と、画像処理との対応の一例を示す。なお、図２に示される複数の試験項目は、試験装置２で実行されるＮ個の試験項目の少なくとも一部であってよい。また、図２に示される複数の試験項目の少なくとも一部は、画像処理が並行して実行されるＭ個の試験項目であってよい。 2. Specific examples of light emission patterns, test items, and image processing
Fig. 2 shows an example of the correspondence between the light emission pattern of the light source 20, the test items, and the image processing. Note that the multiple test items shown in Fig. 2 may be at least a part of the N test items executed by the test device 2. Also, at least a part of the multiple test items shown in Fig. 2 may be M test items for which image processing is executed in parallel.
　光源２０の発光パターン「ＣｏｌｏｒＢａｒ」は、「ＣｏｌｏｒＢａｒ」の試験項目と対応してよい。「ＣｏｌｏｒＢａｒ」の発光パターンはカラーバーの画像データを被試験デバイス１００に出力させる発光パターンであってよい。「ＣｏｌｏｒＢａｒ」の試験項目の試験では、画像データの画像処理により、被試験デバイス１００の輝度レベルや色などが算出されてよい。 The light emission pattern "ColorBar" of the light source 20 may correspond to the "ColorBar" test item. The "ColorBar" light emission pattern may be a light emission pattern that causes the device under test 100 to output image data of a color bar. In testing the "ColorBar" test item, the brightness level, color, etc. of the device under test 100 may be calculated by image processing of the image data.
　光源２０の発光パターン「ＤＡＲＫ」は「Ｓｅｎｓｉｔｉｖｉｔｙ」、「Ｕｎｉｆｏｒｍｉｔｙ」および「Ｎｏｉｓｅ」の試験項目と対応してよい。「ＤＡＲＫ」の発光パターンは一例として全面が黒色の画像データを被試験デバイス１００に出力させる発光パターンであってよい。「Ｓｅｎｓｉｔｉｖｉｔｙ」の試験項目の試験では、画像データの画像処理により、画素値の出力レベル（例えば平均）などが算出されてよい。「Ｕｎｉｆｏｒｍｉｔｙ」の試験項目の試験では、画像データの画像処理により、被試験デバイス１００の均一性の指標値が算出されてよい。 The light emission pattern "DARK" of the light source 20 may correspond to the test items "Sensitivity", "Uniformity" and "Noise". As an example, the "DARK" emission pattern may be an emission pattern that causes the device under test 100 to output image data in which the entire surface is black. In a test for the "Sensitivity" test item, the output level (e.g., average) of pixel values may be calculated by image processing of the image data. In a test for the "Uniformity" test item, an index value of the uniformity of the device under test 100 may be calculated by image processing of the image data.
　光源２０の発光パターン「ＳＴＡＮＤＡＲＤ」は「Ｓｅｎｓｉｔｉｖｉｔｙ」、「Ｓｅｎｓｉｔｉｖｉｔｙ　Ｒａｔｉｏ」および「Ｕｎｉｆｏｒｍｉｔｙ」の試験項目と対応してよい。「ＳＴＡＮＤＡＲＤ」の発光パターンは予め設定された標準的な画像データを被試験デバイス１００に出力させる発光パターンであってよい。「Ｓｅｎｓｉｔｉｖｉｔｙ　Ｒａｔｉｏ」の試験項目の試験では、画像データの画像処理により、被試験デバイス１００の色間での画素値の比率が算出されてよい。 The light emission pattern "STANDARD" of the light source 20 may correspond to the test items "Sensitivity", "Sensitivity Ratio" and "Uniformity". The "STANDARD" light emission pattern may be a light emission pattern that causes the device under test 100 to output preset standard image data. In testing the "Sensitivity Ratio" test item, the pixel value ratio between the colors of the device under test 100 may be calculated by image processing of the image data.
　＜３．動作＞
　＜３．１．第１処理＞
　図３は、試験装置２の第１処理に関する動作を示す。試験装置２は、ステップＳ１１～Ｓ３３の処理を行うことにより、被試験デバイス１００から画像データを取得し、その画像処理を複数の画像処理装置３０に実行させる。 <3. Operation>
<3.1. First process>
3 shows the operation of the first process of the test apparatus 2. The test apparatus 2 performs the processes of steps S11 to S33 to acquire image data from the device under test 100, and performs image processing on the image data to generate a plurality of images. The processing device 30 executes the process.
　ステップＳ１１において光源２０は、１または複数の被試験デバイス１００に光を照射する。本実施形態においては一例として、光源２０は一回のステップＳ１１において単一の被試験デバイス１００に対して光を照射するが、複数の被試験デバイス１００に対し、一括して光を照射してもよい。 In step S11, the light source 20 irradiates light onto one or more devices under test 100. In this embodiment, as an example, the light source 20 irradiates light onto a single device under test 100 in each step S11, but it may also irradiate light onto multiple devices under test 100 at once.
　光源２０は、何れか１または複数の試験項目の試験に対応する１または複数の発光パターンの光を照射してよい。これにより、ステップＳ１１の処理が少なくとも一回、実行されることで、複数の試験項目（本実施形態では一例としてＭ個の試験項目）に対応する１または複数の発光パターンの光が照射されることとなる。なお、被試験デバイス１００に光が照射される場合には、光源２０や被試験デバイス１００に対してシャッター（露光時間）やゲイン、画像サイズ、ＯＴＰ（Ｏｎｅ　Ｔｉｍｅ　Ｐｒｏｇｒａｍａｂｌｅ　ｍｅｍｏｒｙ）などの設定が適宜、行われてよい。 The light source 20 may emit light of one or more emission patterns corresponding to the testing of one or more test items. As a result, the process of step S11 is executed at least once, resulting in the emission of light of one or more emission patterns corresponding to multiple test items (M test items as an example in this embodiment). When light is irradiated onto the device under test 100, the shutter (exposure time), gain, image size, OTP (One Time Programmable memory), and other settings may be appropriately configured for the light source 20 and the device under test 100.
　ステップＳ１３において画像データ取得部２１は、照射された光に応じて被試験デバイス１００が出力する各画像データを取得する。これにより、ステップＳ１３の処理が少なくとも一回、実行されることで、画像処理が並行して行なわれるＭ個の試験項目に対応する１または複数の発光パターンの光に応じて被試験デバイス１００が出力する各画像データが取得されることとなる。なお、ステップＳ１１において複数の被試験デバイス１００に対して一括に光が照射される場合には、ステップＳ１３において画像データ取得部２１は、被試験デバイス１００ごとに画像データを取得してよい。この場合には、後述のステップＳ１５～Ｓ３１の処理は、光を照射された被試験デバイス１００ごとに行われてよい。 In step S13, the image data acquisition section 21 acquires each image data output by the device under test 100 in response to the irradiated light. As a result, the process of step S13 is executed at least once, and each image data output by the device under test 100 in response to light of one or more emission patterns corresponding to M test items for which image processing is performed in parallel is acquired. Note that, if light is irradiated simultaneously to multiple devices under test 100 in step S11, the image data acquisition section 21 may acquire image data for each device under test 100 in step S13. In this case, the processes of steps S15 to S31 described below may be performed for each device under test 100 irradiated with light.
　ステップＳ１５において統計部２４は、取得された画像データにおける画素値の統計を被試験デバイス１００ごとに実行する。直近のステップＳ１１において複数の発光パターンの光が照射されている場合には、統計部２４は、取得された画像データごとに統計を実行してよい。統計部２４は、画素値の分散や平均などを示す統計結果を算出してよい。 In step S15, the statistical unit 24 performs statistics on the pixel values in the acquired image data for each device under test 100. If light of multiple emission patterns is irradiated in the most recent step S11, the statistical unit 24 may perform statistics for each acquired image data. The statistical unit 24 may calculate statistical results indicating the variance and average of the pixel values.
　ステップＳ１７において判定部２７は、統計結果が基準条件を満たすか否かを判定する。一例として、判定部２７は、画素値の分散や平均が基準範囲外となるか否かを判定してよい。統計結果が基準条件を満たすと判定された場合（ステップＳ１７；Ｙｅｓ）にはステップＳ２３に処理が移行してよい。統計結果が基準条件を満たさないと判定された場合（ステップＳ１７；Ｎｏ）にはステップＳ１９に処理が移行してよい。 In step S17, the determination unit 27 determines whether the statistical result satisfies the standard condition. As an example, the determination unit 27 may determine whether the variance or average of the pixel values is outside a standard range. If it is determined that the statistical result satisfies the standard condition (step S17; Yes), the process may proceed to step S23. If it is determined that the statistical result does not satisfy the standard condition (step S17; No), the process may proceed to step S19.
　ステップＳ１９において判定部２７は、統計結果が基準条件を満たさなかった画像データを出力した被試験デバイス１００についての画像処理をディセーブルする。一例として、判定部２７は、当該被試験デバイス１００から出力された画像データについて後述のステップＳ２９により既に実行指示が行われた画像処理を停止させてよい。また、判定部２７は、当該被試験デバイス１００から出力された画像データについて後述のステップＳ２３以降の処理が実行されないよう、後述のステップＳ２１の後に第１処理を終了させてよい。 In step S19, the judgment section 27 disables image processing for the device under test 100 that output image data whose statistical results did not satisfy the reference condition. As an example, the judgment section 27 may stop image processing that has already been instructed to be executed in step S29 described below for the image data output from the device under test 100. In addition, the judgment section 27 may end the first processing after step S21 described below so that processing from step S23 described below onwards is not executed for the image data output from the device under test 100.
　ステップＳ２１において判定部２７は、統計結果が基準条件を満たさなかった画像データを出力した被試験デバイス１００を不良と判定する。ステップＳ２１が終了したら、第１処理は終了してよく、他の被試験デバイス１００に対して改めて第１処理が実行されてよい。 In step S21, the judgment unit 27 judges the device under test 100 that outputs image data whose statistical results do not satisfy the reference condition to be defective. When step S21 is completed, the first process may be terminated, and the first process may be executed again for another device under test 100.
　ステップＳ２３において第１選択部２２１は、実行対象の試験項目を選択する。これにより、ステップＳ２３の処理が繰り返されることで実行対象の試験項目が逐次、選択されることとなる。第１選択部２２１は、ステップＳ２３で未だ選択されていない単一の試験項目を選択してよい。 In step S23, the first selection unit 221 selects a test item to be executed. As a result, the process of step S23 is repeated, and test items to be executed are selected sequentially. The first selection unit 221 may select a single test item that has not yet been selected in step S23.
　第１選択部２２１は、被試験デバイス１００に照射された発光パターンの識別情報を光源２０から取得して、当該発光パターンに対応するＭ個の試験項目の何れかを選択してよい。本実施形態においては一例として、第１選択部２２１は、照射された発光パターンに対応するＭ個の試験項目から、最も所要時間の長い画像処理に対応する試験項目を選択してよい。これにより、照射された発光パターンに対応するＭ個の試験項目から、より所要時間の長い画像処理に対応する試験項目が優先して選択されることとなる。 The first selection unit 221 may obtain identification information of the light emission pattern irradiated to the device under test 100 from the light source 20, and select one of the M test items corresponding to that light emission pattern. In this embodiment, as an example, the first selection unit 221 may select the test item corresponding to the image processing requiring the longest time from the M test items corresponding to the irradiated light emission pattern. In this way, the test item corresponding to the image processing requiring the longest time is preferentially selected from the M test items corresponding to the irradiated light emission pattern.
　ステップＳ２５において検知部２２０は、各画像処理装置３０の状態を検知する。検知部２２０は、試験システム１に含まれる各画像処理装置３０が待機状態と、画像処理の実行状態と、故障状態との何れであるかを検知してよい。 In step S25, the detection unit 220 detects the state of each image processing device 30. The detection unit 220 may detect whether each image processing device 30 included in the test system 1 is in a standby state, an image processing execution state, or a failure state.
　ステップＳ２７において第２選択部２２２は、試験システム１に含まれる複数の画像処理装置３０から何れかの画像処理装置３０を選択する。第２選択部２２２は、試験システム１に含まれる複数の画像処理装置３０から、画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方（本実施形態では一例として両方）を除外して画像処理装置３０を選択してよい。画像処理の実行状態の画像処理装置３０は、第２選択部２２２が含まれる試験装置２からの指示により画像処理の実行状態の画像処理装置３０であってもよいし、他の試験装置２からの指示により画像処理の実行状態の画像処理装置３０であってもよい。第２選択部２２２は、画像処理部２３を画像処理装置３０として選択してもよい。 In step S27, the second selection unit 222 selects one of the image processing devices 30 included in the test system 1. The second selection unit 222 may select an image processing device 30 from the multiple image processing devices 30 included in the test system 1 by excluding at least one of the image processing device 30 in the image processing execution state and the image processing device 30 in the faulty state (in this embodiment, as an example, both). The image processing device 30 in the image processing execution state may be an image processing device 30 in the image processing execution state due to an instruction from the test device 2 including the second selection unit 222, or may be an image processing device 30 in the image processing execution state due to an instruction from another test device 2. The second selection unit 222 may select the image processing unit 23 as the image processing device 30.
　第２選択部２２２は、少なくとも各画像処理装置３０の処理性能に基づいて、実行対象の試験項目に応じた画像処理を実行させる画像処理装置３０を選択してよい。各画像処理装置３０の処理性能に基づいて画像処理装置３０を選択するとは、一例として、処理性能が高い画像処理装置３０、または、処理性能が低い画像処理装置３０を優先して選択することであってよい。第２選択部２２２は、単一の画像処理装置３０を選択してよい。本実施形態では一例として、第２選択部２２２は、複数の画像処理装置３０のうち、最も処理性能が高い画像処理装置３０を選択してよい。画像処理装置３０の処理性能は、一例としてクロック周波数、熱設計電力（Ｔｈｅｒｍａｌ　Ｄｅｓｉｇｎ　Ｐｏｗｅｒ）、電力効率、メモリ容量、および、メモリ帯域幅の少なくとも１つであってよい。第２選択部２２２が各画像処理装置３０の処理性能に基づいて画像処理装置３０を選択する場合には、第２選択部２２２には各画像処理装置３０の処理性能が予め記憶されてよい。 The second selection unit 222 may select an image processing device 30 that performs image processing according to the test item to be executed, based on at least the processing performance of each image processing device 30. Selecting an image processing device 30 based on the processing performance of each image processing device 30 may, for example, preferentially select an image processing device 30 with high processing performance or an image processing device 30 with low processing performance. The second selection unit 222 may select a single image processing device 30. As an example in this embodiment, the second selection unit 222 may select an image processing device 30 with the highest processing performance among the multiple image processing devices 30. The processing performance of the image processing device 30 may, for example, be at least one of the clock frequency, thermal design power, power efficiency, memory capacity, and memory bandwidth. When the second selection unit 222 selects an image processing device 30 based on the processing performance of each image processing device 30, the processing performance of each image processing device 30 may be stored in advance in the second selection unit 222.
　なお、第２選択部２２２は各画像処理装置３０の処理性能に加えて、実行対象の試験項目に応じた画像処理の負荷と、被試験デバイス１００の画素数との少なくとも一方に基づいて、画像処理装置３０を選択してもよい。例えば、第２選択部２２２は、実行対象の試験項目の画像処理の負荷が基準より大きい場合には、基準より処理性能が高い画像処理装置３０を選択してよい。これにより、画像処理の負荷が大きい場合であっても確実に画像処理が実行される。第２選択部２２２は、被試験デバイス１００の画素数が基準より大きい場合には、基準より処理性能（一例としてメモリ容量やメモリ帯域幅）が高い画像処理装置３０を選択してよい。これにより、画像データのデータ量が大きい場合であっても確実に画像処理が実行される。実行対象の試験項目に応じた画像処理の負荷は、予め何れかの画像処理装置３０で測定された画像処理の所要時間であってもよいし、画像処理の演算過程で生じるデータ量であってもよい。 The second selection unit 222 may select an image processing device 30 based on at least one of the load of image processing corresponding to the test item to be executed and the number of pixels of the device under test 100, in addition to the processing performance of each image processing device 30. For example, when the load of image processing of the test item to be executed is greater than a reference, the second selection unit 222 may select an image processing device 30 having a processing performance higher than the reference. This ensures that image processing is executed even when the load of image processing is large. When the number of pixels of the device under test 100 is greater than a reference, the second selection unit 222 may select an image processing device 30 having a processing performance higher than the reference (for example, memory capacity or memory bandwidth). This ensures that image processing is executed even when the amount of image data is large. The load of image processing corresponding to the test item to be executed may be the time required for image processing measured in advance by any of the image processing devices 30, or the amount of data generated during the calculation process of image processing.
　第２選択部２２２が画像処理の負荷に基づいて画像処理装置３０を選択する場合には、第２選択部２２２には各試験項目の識別情報と、当該試験項目に対応する画像処理の負荷を示す情報との対応情報が予め記憶されてよく、第２選択部２２２は、第１選択部２２１から供給される試験項目の識別情報に対応付けられた画像処理の負荷を当該対応情報から検出してよい。第２選択部２２２が被試験デバイス１００の画素数に基づいて画像処理装置３０を選択する場合には、画像データ取得部２１から画素数を示す情報を取得してよい。 When the second selection section 222 selects the image processing device 30 based on the image processing load, the second selection section 222 may store in advance correspondence information between the identification information of each test item and information indicating the image processing load corresponding to the test item, and the second selection section 222 may detect the image processing load associated with the identification information of the test item supplied from the first selection section 221 from the correspondence information. When the second selection section 222 selects the image processing device 30 based on the number of pixels of the device under test 100, it may acquire information indicating the number of pixels from the image data acquisition section 21.
　ステップＳ２９において実行指示部２２３は、画像データ取得部２１が取得した１または複数の画像データを画像処理装置３０へと送信して、試験項目に応じた画像処理を実行させる。本実施形態では一例として、実行指示部２２３は、一回のステップＳ２９では単一の画像処理装置３０に画像データを送信して画像処理を行わせてよい。これにより、今回のステップＳ２９により対象とされる画像処理装置３０と、前回以前や次回以降の１回または複数回のステップＳ２９により対象とされる他の画像処理装置３０との２以上の画像処理装置３０に画像データが送信されて別々の試験項目に応じた画像処理が並行して実行される。 In step S29, the execution instruction unit 223 transmits one or more pieces of image data acquired by the image data acquisition unit 21 to the image processing device 30, and causes image processing corresponding to the test items to be performed. In this embodiment, as an example, the execution instruction unit 223 may transmit image data to a single image processing device 30 in one step S29 to cause image processing to be performed. As a result, image data is transmitted to two or more image processing devices 30, including the image processing device 30 targeted in the current step S29 and another image processing device 30 targeted in one or more step S29s before the previous one or after the next one, and image processing corresponding to different test items is performed in parallel.
　実行指示部２２３は、複数の画像処理装置３０のうち、第２選択部２２２により選択された画像処理装置３０へと画像データを送信して、実行対象の試験項目に応じた画像処理を実行させてよい。画像処理部２３が画像処理装置３０として選択されている場合には、実行指示部２２３は、当該画像処理部２３に画像データを送信して画像処理を実行させてもよい。 The execution instruction unit 223 may send image data to an image processing device 30 selected by the second selection unit 222 from among the multiple image processing devices 30, and cause the image processing device 30 to execute image processing according to the test item to be executed. When the image processing unit 23 is selected as the image processing device 30, the execution instruction unit 223 may send image data to the image processing unit 23 and cause the image processing device 30 to execute image processing.
　ステップＳ３１において第１選択部２２１は、これまでにステップＳ１１で被試験デバイス１００に照射された発光パターンに対応するＭ個全ての試験項目をステップＳ２３で既に選択したか否かを判定する。少なくとも１つの試験項目が未だ選択されていないと判定された場合（ステップＳ３１；Ｎｏ）には上述のステップＳ２３に処理が移行してよい。全ての試験項目を選択したと判定された場合（ステップＳ３１；Ｙｅｓ）にはステップＳ３３に処理が移行してよい。 In step S31, the first selection unit 221 determines whether or not all M test items corresponding to the emission patterns irradiated to the device under test 100 in step S11 have already been selected in step S23. If it is determined that at least one test item has not yet been selected (step S31; No), processing may proceed to the above-mentioned step S23. If it is determined that all test items have been selected (step S31; Yes), processing may proceed to step S33.
　ステップＳ３３において、光源２０は、Ｎ個の試験項目に対応する全ての発光パターンの光を照射したか否かを判定する。全ての発光パターンの光が照射されていないと判定された場合（ステップＳ３３；Ｎｏ）には、ステップＳ１１に処理が移行してよい。この場合には、以前に行われたステップＳ１１で照射された発光パターンに対応する試験項目の試験結果が後述のステップＳ４３で取得される前に、次のステップＳ１１において他の試験項目に対応する発光パターンの光が照射されてよい。また、直近のステップＳ１１で照射された被試験デバイス１００とは別の被試験デバイス１００に対して、次のステップＳ１１において照射が行われてよい。この場合、直近のステップＳ１１で照射された被試験デバイス１００とは別のウエハ上の被試験デバイス１００に対して、次のステップＳ１１において照射が行われてもよい。全ての発光パターンの光が照射されたと判定された場合（ステップＳ３３；Ｙｅｓ）には、第１処理が終了してよい。 In step S33, the light source 20 judges whether or not light of all the light emission patterns corresponding to the N test items has been irradiated. If it is judged that light of all the light emission patterns has not been irradiated (step S33; No), the process may proceed to step S11. In this case, before the test result of the test item corresponding to the light emission pattern irradiated in the previous step S11 is obtained in step S43 described below, light of the light emission pattern corresponding to another test item may be irradiated in the next step S11. Also, irradiation may be performed in the next step S11 on a device under test 100 other than the device under test 100 irradiated in the most recent step S11. In this case, irradiation may be performed in the next step S11 on a device under test 100 on a wafer other than the device under test 100 irradiated in the most recent step S11. If it is judged that light of all the light emission patterns has been irradiated (step S33; Yes), the first process may end.
　以上の動作によれば、少なくとも各画像処理装置３０の処理性能に基づいて、当該実行対象の試験項目に応じた画像処理を実行させる画像処理装置３０が選択される。従って、複数の画像処理装置３０のなかで、より適切な画像処理装置３０に画像処理を実行させることができる。 According to the above operation, an image processing device 30 is selected to execute image processing corresponding to the test item to be executed, based at least on the processing performance of each image processing device 30. Therefore, it is possible to select the more appropriate image processing device 30 from among the multiple image processing devices 30 to execute image processing.
　また、複数の画像処理装置３０のうち、最も処理性能が高い画像処理装置３０が選択されるので、最も処理性能が高い画像処理装置３０に画像処理を実行させることができる。 In addition, the image processing device 30 with the highest processing performance is selected from among the multiple image processing devices 30, so that the image processing device 30 with the highest processing performance can be made to execute image processing.
　なお、上記の動作においては、複数の画像処理装置３０のうち、画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方を除外して選択された画像処理装置３０に対して画像処理が指示されることとして説明したが、他の画像処理装置３０に画像処理が指示されてもよい。例えば、ステップＳ２９において画像処理制御部２２の実行指示部２２３は、試験システム１における各画像処理装置３０のうち画像処理部２３とは異なる各画像処理装置３０との間の通信回線がビジー状態であることに応じて、試験装置２内の画像処理部２３に画像処理を実行させてよい。この場合には、ステップＳ２５において検知部２２０は、各画像処理装置３０との間で通信回線がビジー状態であるか否かを検知してよい。通信回線がビジー状態であることに応じて、ステップＳ２７において画像処理制御部２２の第２選択部２２２は試験装置２内の画像処理部２３を選択し、ステップＳ２９において実行指示部２２３は画像処理部２３に画像データを送信して画像処理を実行させてよい。これに代えて、通信回線がビジー状態であることに応じて、ステップＳ２７において第２選択部２２２により選択された画像処理装置３０とは無関係に、ステップＳ２９において実行指示部２２３は試験装置２内の画像処理部２３に画像データを送信して画像処理を実行させてもよい。これにより、通信回線がビジー状態であっても、画像処理を行い、試験を進めることができる。 In the above operation, it has been described that image processing is instructed to be performed on the image processing device 30 selected from among the multiple image processing devices 30, excluding at least one of the image processing device 30 in the image processing execution state and the image processing device 30 in the fault state. However, image processing may be instructed to other image processing devices 30. For example, in step S29, the execution instruction unit 223 of the image processing control unit 22 may cause the image processing unit 23 in the test device 2 to execute image processing in response to a busy state of the communication line between each image processing device 30 in the test system 1 and the image processing unit 23. In this case, in step S25, the detection unit 220 may detect whether the communication line between each image processing device 30 is busy or not. In response to the busy state of the communication line, in step S27, the second selection unit 222 of the image processing control unit 22 may select the image processing unit 23 in the test device 2, and in step S29, the execution instruction unit 223 may transmit image data to the image processing unit 23 to execute image processing. Alternatively, in response to the communication line being busy, the execution instruction unit 223 may send image data to the image processing unit 23 in the test device 2 in step S29 to execute image processing, regardless of the image processing device 30 selected by the second selection unit 222 in step S27. This allows image processing to be performed and the test to proceed even if the communication line is busy.
　＜３．２．第２処理＞
　図４は、試験装置２の第２処理に関する動作を示す。試験装置２は、ステップＳ４１～Ｓ４７の処理を行うことにより、被試験デバイス１００の判定を行う。なお、第２処理の動作は第１処理の動作が開始したことに応じて開始されてよく、第１処理と並行に実行されてよい。また、第２処理の動作は、画像処理装置３０から画像処理の結果と共に供給される被試験デバイスの識別情報に基づいて、被試験デバイス１００ごとに並行して実行されてよい。 <3.2. Second Processing>
4 shows the operation of the test apparatus 2 regarding the second process. The test apparatus 2 performs the processes of steps S41 to S47 to judge the device under test 100. The operation of the second process may be started in response to the start of the operation of the first process, or may be executed in parallel with the first process. The operation of the second process may be executed in parallel for each device under test 100 based on the identification information of the device under test supplied from the image processing apparatus 30 together with the result of the image processing.
　ステップＳ４１において試験結果取得部２６は、画像処理の結果を受信したか否かを判定する。試験結果取得部２６は、試験装置２の外部の画像処理装置３０から画像処理の結果を受信してもよいし、試験装置２の内部の画像処理部２３から画像処理の結果を受信してもよい。ステップＳ４１において画像処理の結果が受信されていないと判定された場合（ステップＳ４１；Ｎｏ）にはステップＳ４１の処理が繰り返されてよい。ステップＳ４１において画像処理の結果が受信されたと判定された場合（ステップＳ４１；Ｙｅｓ）には、ステップＳ４３に処理が移行してよい。 In step S41, the test result acquisition unit 26 determines whether or not the results of image processing have been received. The test result acquisition unit 26 may receive the results of image processing from an image processing device 30 external to the test device 2, or may receive the results of image processing from an image processing unit 23 internal to the test device 2. If it is determined in step S41 that the results of image processing have not been received (step S41; No), the processing of step S41 may be repeated. If it is determined in step S41 that the results of image processing have been received (step S41; Yes), the processing may proceed to step S43.
　ステップＳ４３において試験結果取得部２６は、画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する。試験結果取得部２６は、画像処理の結果を示すデータから、当該画像処理に対応する試験項目の試験結果を導出してよい。画像処理の結果が試験項目の試験結果を示す場合には、試験結果取得部２６は、画像処理の結果を試験結果として取得してもよい。 In step S43, the test result acquisition unit 26 acquires the test result of the test item corresponding to the image processing, which is derived from the result of the image processing. The test result acquisition unit 26 may derive the test result of the test item corresponding to the image processing from the data indicating the result of the image processing. When the result of the image processing indicates the test result of the test item, the test result acquisition unit 26 may acquire the result of the image processing as the test result.
　ステップＳ４５において判定部２７は、Ｎ個の試験項目の全てについて試験結果が取得されたか否かを判定する。Ｎ個の試験項目のうち、１つ以上の試験項目の試験結果が取得されていないと判定された場合（ステップＳ４５；Ｎｏ）には上述のステップＳ４１に処理が移行してよい。Ｎ個の試験項目の全てについて試験結果が取得されたと判定された場合（ステップＳ４５；Ｙｅｓ）には、ステップＳ４７に処理が移行してよい。 In step S45, the judgment unit 27 judges whether or not test results have been obtained for all N test items. If it is judged that test results have not been obtained for one or more of the N test items (step S45; No), the process may proceed to step S41 described above. If it is judged that test results have been obtained for all N test items (step S45; Yes), the process may proceed to step S47.
　ステップＳ４７において判定部２７は、取得された各試験項目の試験結果に基づいて被試験デバイス１００の良否を判定する。ステップＳ４７の処理が終了したら、第２処理が終了してよい。 In step S47, the judgment unit 27 judges whether the device under test 100 is good or bad based on the acquired test results for each test item. When the processing of step S47 is completed, the second processing may be completed.
　なお、上記の動作においては、Ｎ個の試験項目の全てについて試験結果が取得された後に被試験デバイス１００の良否が判定されることとして説明したが、全ての試験項目について試験結果が取得される前に良否が判定されてもよい。例えば、判定部２７は、ステップＳ２９の処理によって画像処理の実行が指示されてから基準時間を超えて画像処理の結果が受信されないことに応じて、当該画像処理の対象とされた画像データを出力した被試験デバイス１００を不良と判定してよい。基準時間を超えて画像処理の結果が受信されない原因は、画像データに異常があることであってもよいし、画像処理を実行した画像処理装置３０に異常があることであってもよい。画像データに異常が生じる原因は、被試験デバイス１００に異常があることであってもよいし、光源２０に異常があることであってもよい。画像処理の結果が受信されない場合に試験をやり直さずに被試験デバイス１００を不良と判定することにより、試験時間が延びることによる歩留まりの低下を防止することができる。 In the above operation, the pass/fail judgment of the device under test 100 has been described as being made after the test results for all N test items have been obtained, but the pass/fail judgment may be made before the test results for all test items have been obtained. For example, the judgment unit 27 may judge the device under test 100 that output the image data that was the subject of the image processing as defective in response to the fact that the result of the image processing is not received for a reference time after the execution of the image processing is instructed by the processing of step S29. The cause of the image processing result not being received for a reference time may be an abnormality in the image data, or an abnormality in the image processing device 30 that executed the image processing. The cause of the abnormality in the image data may be an abnormality in the device under test 100, or an abnormality in the light source 20. By judging the device under test 100 as defective without rerunning the test when the result of the image processing is not received, it is possible to prevent a decrease in yield due to an extension of the test time.
　これに加え、ステップＳ１１において複数の被試験デバイス１００に一括して光が照射されている場合には、判定部２７は、基準時間を超えて画像処理の結果が受信されない被試験デバイス１００と一緒に光が照射された他の被試験デバイス１００を、さらに不良と判定してもよい。これにより、歩留まりの低下を確実に防止することができる。 In addition, if light is irradiated simultaneously to multiple devices under test 100 in step S11, the judging unit 27 may further judge other devices under test 100 that were irradiated with light together with the device under test 100 for which the image processing results have not been received for more than the reference time to be defective. This can reliably prevent a decrease in yield.
　＜２．変形例に係る試験システム１Ａ＞
　図５は、変形例に係る試験システム１Ａを示す。試験システム１Ａは１または複数の試験装置２Ａと、制御装置５とを備える。試験システム１Ａは主に、画像処理を実行する画像処理装置３０を制御装置５が選択する点で、試験システム１と異なっている。なお、本変形例において、図１に示された試験システム１の構成と略同一のものには同一の符号を付け、説明を省略する。 2. Test System 1A According to Modification
5 shows a test system 1A according to a modified example. The test system 1A includes one or more test devices 2A and a control device 5. The test system 1A differs from the test system 1 mainly in that the control device 5 selects an image processing device 30 that executes image processing. In this modified example, components that are substantially the same as those in the test system 1 shown in FIG. 1 are designated by the same reference numerals, and descriptions thereof will be omitted.
　＜２－１．試験装置２Ａ＞
　各試験装置２Ａは、画像処理制御部２２Ａを有する。 <2-1. Test device 2A>
Each test device 2A has an image processing control unit 22A.
　＜２－１．１．画像処理制御部２２Ａ＞
　画像処理制御部２２Ａは、画像データ取得部２１が取得した１または複数の画像データを２以上の画像処理装置３０へと送信して、Ｎ個の試験項目に応じた各画像処理を、当該２以上の画像処理装置３０に実行させる。画像処理制御部２２Ａは、Ｎ個の試験項目における別々の試験項目に応じた画像処理を、当該２以上の画像処理装置３０のそれぞれにより並行して実行させてよい。本変形例では一例として、画像処理制御装置５Ａは、Ｎ個の試験項目のうち、Ｍ個の試験項目に応じた画像処理を２以上の画像処理装置３０のそれぞれにより並行して実行させてよい。画像データが送信される画像処理装置３０の個数は、試験項目の個数Ｎと同じであってもよいし、異なってもよい。画像処理制御部２２Ａは、第１送信部２２４Ａと、実行指示部２２３Ａとを有する。 <2-1.1. Image processing control unit 22A>
The image processing control unit 22A transmits one or more image data acquired by the image data acquisition unit 21 to two or more image processing devices 30, and causes the two or more image processing devices 30 to execute image processing corresponding to the N test items. The image processing control unit 22A may cause the two or more image processing devices 30 to execute image processing corresponding to different test items among the N test items in parallel. In this modified example, as an example, the image processing control device 5A may cause the two or more image processing devices 30 to execute image processing corresponding to M test items among the N test items in parallel. The number of image processing devices 30 to which the image data is transmitted may be the same as or different from the number N of test items. The image processing control unit 22A has a first transmission unit 224A and an execution instruction unit 223A.
　＜２－１．１．１．第１送信部２２４Ａ＞
　第１送信部２２４Ａは、第１選択部２２１によって実行対象の試験項目が選択されることに応じて制御装置５に画像処理装置３０の選択要求信号を送信する。第１送信部２２４Ａは、実行対象の試験項目の識別情報を第１選択部２２１から取得することに応じて選択要求信号を送信してよい。選択要求信号には試験装置２Ａの識別情報が含まれてよく、実行対象の試験項目の識別情報と、被試験デバイス１００の画素数とがさらに含まれてもよい。 <2-1.1.1. First transmission unit 224A>
The first transmitting unit 224A transmits a selection request signal of the image processing device 30 to the control device 5 in response to the selection of the test item to be executed by the first selecting unit 221. The first transmitting unit 224A may transmit the selection request signal in response to obtaining identification information of the test item to be executed from the first selecting unit 221. The selection request signal may include identification information of the test apparatus 2A, and may further include identification information of the test item to be executed and the number of pixels of the device under test 100.
　＜２－２．１．２．実行指示部２２３Ａ＞
　実行指示部２２３Ａは、複数の画像処理装置３０のうち、制御装置５により選択された画像処理装置３０へと画像データを送信して、実行対象の試験項目に応じた画像処理を実行させる。実行指示部２２３は、制御装置５により選択された画像処理装置３０に対し、実行対象の試験項目の識別情報を画像データと共に送信してよい。また、実行指示部２２３Ａは、画像データを出力した被試験デバイス１００の識別情報を画像データと共に、画像処理を実行する各画像処理装置３０へと送信してよい。これに加えて、実行指示部２２３Ａは、画像データを出力した被試験デバイス１００が含まれるウエハの識別情報や、当該実行指示部２２３Ａが含まれる試験装置２Ａの識別情報を、当該画像データと共に、画像処理を実行する各画像処理装置３０へと送信してよい。 <2-2.1.2. Execution instruction unit 223A>
The execution instruction unit 223A transmits image data to the image processing device 30 selected by the control device 5 among the multiple image processing devices 30, and executes image processing according to the test item to be executed. The execution instruction unit 223 may transmit identification information of the test item to be executed, together with the image data, to the image processing device 30 selected by the control device 5. The execution instruction unit 223A may also transmit identification information of the device under test 100 that has output the image data, together with the image data, to each image processing device 30 that executes the image processing. In addition, the execution instruction unit 223A may transmit identification information of the wafer including the device under test 100 that has output the image data, and identification information of the test device 2A including the execution instruction unit 223A, together with the image data, to each image processing device 30 that executes the image processing.
　＜２－２．制御装置５＞
　制御装置５は、各試験装置２Ａによる試験を制御する。制御装置５は、検知部５０と、第３取得部５１と、第３選択部５２と、第２送信部５３と、通信部５４とを有する。 <2-2. Control device 5>
The control device 5 controls the tests performed by each test device 2 A. The control device 5 includes a detection unit 50, a third acquisition unit 51, a third selection unit 52, a second transmission unit 53, and a communication unit 54.
　＜２－２．１．検知部５０＞
　検知部５０は、各画像処理装置３０の状態を検知する。検知部５０は、試験システム１Ａに含まれる各画像処理装置３０と通信して、当該画像処理装置３０の状態を検知してよい。検知部５０は、従来より公知の手法によって各画像処理装置３０の状態を検知してよい。検知部５０は、各画像処理装置３０が待機状態と、画像処理の実行状態と、故障状態との何れであるかを検知してよい。検知部５０は、検知された各画像処理装置３０の状態を第３選択部５２に供給してよい。 <2-2.1. Detection unit 50>
The detection unit 50 detects the state of each image processing device 30. The detection unit 50 may communicate with each image processing device 30 included in the test system 1A to detect the state of the image processing device 30. The detection unit 50 may detect the state of each image processing device 30 by a conventionally known method. The detection unit 50 may detect whether each image processing device 30 is in a standby state, an image processing execution state, or a failure state. The detection unit 50 may supply the detected state of each image processing device 30 to the third selection unit 52.
　＜２－２．２．第３取得部５１＞
　第３取得部５１は、各試験装置２Ａから逐次、選択要求信号を取得する。第３取得部５１は、取得した選択要求信号を第３選択部５２に供給してよい。 <2-2.2. Third acquisition unit 51>
The third acquiring section 51 sequentially acquires the selection request signal from each test apparatus 2 A. The third acquiring section 51 may supply the acquired selection request signal to the third selecting section 52.
　＜２－２．３．第３選択部５２＞
　第３選択部５２は、選択要求信号が取得されることに応じて、試験システム１Ａに含まれる複数の画像処理装置３０から画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方を除外して、画像処理装置３０を選択する。第３選択部５２は、実行対象の試験項目の識別情報と、選択した画像処理装置３０の識別情報とを第２送信部５３に供給してよい。 <2-2.3. Third selection unit 52>
In response to receiving the selection request signal, the third selection unit 52 selects an image processing device 30 by excluding at least one of the image processing device 30 in the execution state of image processing and the image processing device 30 in the faulty state from the multiple image processing devices 30 included in the test system 1A. The third selection unit 52 may supply the second transmission unit 53 with identification information of the test item to be executed and identification information of the selected image processing device 30.
　＜２－２．４．第２送信部５３＞
　第２送信部５３は、第３選択部５２が選択した画像処理装置３０の識別情報を、選択要求信号の送信元の試験装置２Ａに送信する。第２送信部５３は、選択された画像処理装置３０の識別情報と、実行対象の試験項目の識別情報とを試験装置２Ａに供給してよい。これにより、選択要求信号を送信した試験装置２Ａでは、選択された画像処理装置３０Ａへと実行指示部２２３Ａが画像データを送信し、実行対象の試験項目に応じた画像処理をさせることとなる。 <2-2.4. Second transmission unit 53>
The second transmission unit 53 transmits the identification information of the image processing device 30 selected by the third selection unit 52 to the test device 2A that transmitted the selection request signal. The second transmission unit 53 may supply the identification information of the selected image processing device 30 and the identification information of the test item to be executed to the test device 2A. As a result, in the test device 2A that transmitted the selection request signal, the execution instruction unit 223A transmits image data to the selected image processing device 30A, and causes the image processing to be performed according to the test item to be executed.
　＜２－２．５．通信部５４＞
　通信部５４は、各試験装置２Ａおよび各サーバ装置３と通信する。これにより、制御装置５の各部と、各試験装置２Ａおよび各サーバ装置３の各画像処理装置３０との間で通信が可能となってよい。例えば、検知部５０は、通信部５４を介して各画像処理装置３０の状態を検知してよい。第３取得部５１は、通信部５４を介して各試験装置２Ａから選択要求信号を取得してよい。第２送信部５３は、通信部５４を介して、選択された画像処理装置３０の識別情報を試験装置２Ａに送信してよい。 <2-2.5. Communication unit 54>
The communication unit 54 communicates with each test device 2A and each server device 3. This may enable communication between each unit of the control device 5 and each image processing device 30 of each test device 2A and each server device 3. For example, the detection unit 50 may detect the state of each image processing device 30 via the communication unit 54. The third acquisition unit 51 may acquire a selection request signal from each test device 2A via the communication unit 54. The second transmission unit 53 may transmit identification information of the selected image processing device 30 to the test device 2A via the communication unit 54.
　通信部５４と、各試験装置２Ａおよび各サーバ装置３との間の通信ネットワークは、インターネット、広域ネットワーク（ＷＡＮ）、ローカルエリアネットワーク等の各種ネットワークまたはその組み合わせを含んで構成されてよい。通信ネットワークは、有線および無線の少なくとも一方による接続ポイントを含んでよい。通信ネットワークは、インターネットなどの公衆回線から分離された専用回線により実現されてもよい。 The communication network between the communication unit 54 and each test device 2A and each server device 3 may be configured to include various networks such as the Internet, a wide area network (WAN), a local area network, or a combination thereof. The communication network may include at least one of wired and wireless connection points. The communication network may be realized by a dedicated line separated from a public line such as the Internet.
　以上の試験システム１Ａによれば、複数の試験装置２Ａではそれぞれ、複数の試験項目から実行対象の試験項目が選択されることに応じて画像処理装置３０の選択要求信号が制御装置５に送信される。また、制御装置５では、選択要求信号が取得されることに応じて複数の画像処理装置３０から画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方が除外されて何れかの画像処理装置３０が選択され、選択された画像処理装置３０の識別情報が試験装置２Ａに返送される。そして、各試験装置２Ａでは、制御装置５により選択された画像処理装置３０へと画像データが送信されて、実行対象の試験項目に応じた画像処理の実行の指示が行われる。従って、利用可能な画像処理装置３０を確実に選択して画像処理を行わせることができる。 According to the above test system 1A, each of the multiple test devices 2A transmits a selection request signal for the image processing device 30 to the control device 5 in response to the selection of a test item to be executed from the multiple test items. Furthermore, in response to obtaining the selection request signal, the control device 5 selects one of the image processing devices 30 from the multiple image processing devices 30 by excluding at least one of the image processing devices 30 in the execution state of image processing and the image processing device 30 in the faulty state, and returns identification information of the selected image processing device 30 to the test device 2A. Then, in each test device 2A, image data is transmitted to the image processing device 30 selected by the control device 5, and an instruction is given to execute image processing according to the test item to be executed. Therefore, an available image processing device 30 can be reliably selected to perform image processing.
　＜２－３．試験装置２Ａおよび制御装置５の動作＞
　図６は、試験装置２Ａの第１処理に関する動作を、制御装置５の動作と共に示す。試験装置２Ａおよび制御装置５は、ステップＳ６１～Ｓ８３，Ｓ９１～Ｓ９７の処理を行うことにより、被試験デバイス１００から画像データを取得し、その画像処理を複数の画像処理装置３０に実行させる。なお、試験装置２Ａの第２処理に関する動作は、上記実施形態における試験装置２の第２処理に関する動作と同じであるため、説明を省略する。 <2-3. Operation of the test device 2A and the control device 5>
6 shows the operation of the test equipment 2A related to the first processing together with the operation of the control device 5. The test equipment 2A and the control device 5 perform the processing of steps S61 to S83 and S91 to S97 to acquire image data from the device under test 100 and cause the image processing devices 30 to execute the image processing. Note that the operation of the test equipment 2A related to the second processing is the same as the operation of the test equipment 2 related to the second processing in the above embodiment, and therefore a description thereof will be omitted.
　ステップＳ６１において光源２０は、１または複数の被試験デバイス１００に光を照射する。光源２０は、上述の実施形態におけるステップＳ１１と同様にして、１または複数の発光パターンの光を照射してよい。 In step S61, the light source 20 irradiates light to one or more devices under test 100. The light source 20 may irradiate light of one or more emission patterns in the same manner as in step S11 in the above embodiment.
　ステップＳ６３において画像データ取得部２１は、照射された光に応じて被試験デバイス１００が出力する各画像データを取得する。これにより、ステップＳ６３の処理が少なくとも一回、実行されることで、画像処理が並行して行なわれるＭ個の試験項目に対応する１または複数の発光パターンの光に応じて被試験デバイス１００が出力する各画像データが取得されることとなる。画像データ取得部２１は、上述の実施形態におけるステップＳ１３と同様にして、画像データを取得してよい。 In step S63, the image data acquisition unit 21 acquires each piece of image data output by the device under test 100 in response to the irradiated light. As a result, by executing the process of step S63 at least once, each piece of image data output by the device under test 100 in response to light of one or more emission patterns corresponding to M test items for which image processing is performed in parallel is acquired. The image data acquisition unit 21 may acquire image data in the same manner as step S13 in the above embodiment.
　ステップＳ６５において統計部２４は、取得された画像データにおける画素値の統計を被試験デバイス１００ごとに実行する。統計部２４は、上述の実施形態におけるステップＳ１５と同様にして統計を行ってよい。 In step S65, the statistical unit 24 performs statistics on the pixel values in the acquired image data for each device under test 100. The statistical unit 24 may perform the statistics in the same manner as in step S15 in the above embodiment.
　ステップＳ６７において判定部２７は、統計結果が基準条件を満たすか否かを判定する。判定部２７は、上述の実施形態におけるステップＳ１７と同様にして判定を行ってよい。統計結果が基準条件を満たさないと判定された場合（ステップＳ６７；Ｎｏ）にはステップＳ１９（図３参照）に処理が移行してよい。統計結果が基準条件を満たすと判定された場合（ステップＳ６７；Ｙｅｓ）にはステップＳ７３に処理が移行してよい。 In step S67, the determination unit 27 determines whether the statistical result satisfies the standard condition. The determination unit 27 may perform the determination in the same manner as step S17 in the above-described embodiment. If it is determined that the statistical result does not satisfy the standard condition (step S67; No), the process may proceed to step S19 (see FIG. 3). If it is determined that the statistical result satisfies the standard condition (step S67; Yes), the process may proceed to step S73.
　ステップＳ７３において第１選択部２２１は、実行対象の試験項目を選択する。第１選択部２２１は、上述の実施形態におけるステップＳ２３と同様にして、試験項目を選択してよい。 In step S73, the first selection unit 221 selects the test item to be executed. The first selection unit 221 may select the test item in the same manner as in step S23 in the above embodiment.
　ステップＳ７５において第１送信部２２４Ａは、制御装置５に画像処理装置３０の選択要求信号を送信する。選択要求信号には試験装置２Ａの識別情報が含まれてよく、実行対象の試験項目の識別情報と、被試験デバイス１００の画素数とがさらに含まれてもよい。 In step S75, the first transmission unit 224A transmits a selection request signal for the image processing device 30 to the control device 5. The selection request signal may include identification information for the test device 2A, and may further include identification information for the test item to be executed and the number of pixels of the device under test 100.
　これに応じて、ステップＳ９１において制御装置５の第３取得部５１は、選択要求信号を取得する。ステップＳ９３において制御装置５の検知部５０は、各画像処理装置３０の状態を検知する。検知部５０は、試験システム１Ａに含まれる各画像処理装置３０が待機状態と、画像処理の実行状態と、故障状態との何れであるかを検知してよい。 In response to this, in step S91, the third acquisition unit 51 of the control device 5 acquires a selection request signal. In step S93, the detection unit 50 of the control device 5 detects the state of each image processing device 30. The detection unit 50 may detect whether each image processing device 30 included in the test system 1A is in a standby state, an image processing execution state, or a failure state.
　ステップＳ９５において制御装置５の第３選択部５２は、試験システム１Ａに含まれる複数の画像処理装置３０から画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方を除外して、画像処理装置３０を選択する。第３選択部５２は、上述の実施形態におけるステップＳ２７と同様にして、画像処理装置３０を選択してよい。 In step S95, the third selection unit 52 of the control device 5 selects an image processing device 30 from the multiple image processing devices 30 included in the test system 1A by excluding at least one of the image processing devices 30 in the image processing execution state and the image processing device 30 in the faulty state. The third selection unit 52 may select an image processing device 30 in the same manner as in step S27 in the above-mentioned embodiment.
　ステップＳ９７において制御装置５の第２送信部５３は、選択された画像処理装置３０の識別情報を、選択要求信号の送信元の試験装置２Ａに送信する。第２送信部５３は、選択された画像処理装置３０の識別情報と、実行対象の試験項目の識別情報とを試験装置２Ａの実行指示部２２３Ａに供給してよい。 In step S97, the second transmission unit 53 of the control device 5 transmits the identification information of the selected image processing device 30 to the test device 2A that transmitted the selection request signal. The second transmission unit 53 may supply the identification information of the selected image processing device 30 and the identification information of the test item to be executed to the execution instruction unit 223A of the test device 2A.
　これにより、ステップＳ７９において試験装置２Ａの実行指示部２２３は、画像データ取得部２１が取得した１または複数の画像データを画像処理装置３０へと送信して、試験項目に応じた画像処理を実行させる。実行指示部２２３は、第３選択部５２により選択された画像処理装置３０へと画像データを送信して、実行対象の試験項目に応じた画像処理を実行させてよい。実行指示部２２３は、上述の実施形態におけるステップＳ２９と同様にして、画像処理を実行させてよい。 As a result, in step S79, the execution instruction unit 223 of the test device 2A sends one or more pieces of image data acquired by the image data acquisition unit 21 to the image processing device 30, and causes image processing corresponding to the test item to be executed. The execution instruction unit 223 may send image data to the image processing device 30 selected by the third selection unit 52, and causes image processing corresponding to the test item to be executed. The execution instruction unit 223 may cause image processing to be executed in a manner similar to step S29 in the above-mentioned embodiment.
　ステップＳ８１において第１選択部２２１は、これまでにステップＳ６１で被試験デバイス１００に照射された発光パターンに対応するＭ個全ての試験項目をステップＳ７３で既に選択したか否かを判定する。少なくとも１つの試験項目が未だ選択されていないと判定された場合（ステップＳ８１；Ｎｏ）には上述のステップＳ７３に処理が移行してよい。全ての試験項目を選択したと判定された場合（ステップＳ８１；Ｙｅｓ）にはステップＳ８３に処理が移行してよい。 In step S81, the first selection unit 221 determines whether or not all M test items corresponding to the emission patterns irradiated to the device under test 100 in step S61 have already been selected in step S73. If it is determined that at least one test item has not yet been selected (step S81; No), processing may proceed to the above-mentioned step S73. If it is determined that all test items have been selected (step S81; Yes), processing may proceed to step S83.
　ステップＳ８３において、光源２０は、Ｎ個の試験項目に対応する全ての発光パターンの光を照射したか否かを判定する。全ての発光パターンの光が照射されていないと判定された場合（ステップＳ８３；Ｎｏ）には、ステップＳ６１に処理が移行してよい。この場合には、以前に行われたステップＳ６１で照射された発光パターンに対応する試験項目の試験結果がステップＳ４３で取得される前に、次のステップＳ６１において他の試験項目に対応する発光パターンの光が照射されてよい。また、直近のステップＳ６１で照射された被試験デバイス１００とは別の被試験デバイス１００に対して、次のステップＳ６１において照射が行われてよい。この場合、直近のステップＳ６１で照射された被試験デバイス１００とは別のウエハ上の被試験デバイス１００に対して、次のステップＳ６１において照射が行われてもよい。全ての発光パターンの光が照射されたと判定された場合（ステップＳ８３；Ｙｅｓ）には、第１処理が終了してよい。 In step S83, the light source 20 judges whether or not light of all the light emission patterns corresponding to the N test items has been irradiated. If it is judged that light of all the light emission patterns has not been irradiated (step S83; No), the process may proceed to step S61. In this case, before the test result of the test item corresponding to the light emission pattern irradiated in the previous step S61 is obtained in step S43, light of the light emission pattern corresponding to another test item may be irradiated in the next step S61. Furthermore, irradiation may be performed in the next step S61 on a device under test 100 other than the device under test 100 irradiated in the immediately preceding step S61. In this case, irradiation may be performed in the next step S61 on a device under test 100 on a wafer other than the device under test 100 irradiated in the immediately preceding step S61. If it is judged that light of all the light emission patterns has been irradiated (step S83; Yes), the first process may end.
　なお、上記の動作においては、複数の画像処理装置３０のうち、画像処理の実行状態の画像処理装置３０と、故障状態の画像処理装置３０との少なくとも一方を除外して選択された画像処理装置３０に対して画像処理が指示されることとして説明したが、他の画像処理装置３０に画像処理が指示されてもよい。例えば、ステップＳ７９において画像処理制御部２２の実行指示部２２３は、試験システム１Ａにおける各画像処理装置３０のうち画像処理部２３とは異なる各画像処理装置３０との間の通信回線がビジー状態であることに応じて、画像処理部２３に画像処理を実行させてよい。この場合には、ステップＳ９３において検知部５０は、各画像処理装置３０と試験装置２Ａとの間で通信回線がビジー状態であるか否かを検知してよい。通信回線がビジー状態であることに応じて、ステップＳ９５において第３選択部５２が試験装置２Ａ内の画像処理部２３を選択し、ステップＳ７９において実行指示部２２３が画像処理部２３に画像データを送信して画像処理を実行させてよい。これにより、通信回線がビジー状態であっても、画像処理を行い、試験を進めることができる。 In the above operation, it has been described that image processing is instructed to the image processing device 30 selected from among the multiple image processing devices 30, excluding at least one of the image processing device 30 in the image processing execution state and the image processing device 30 in the fault state. However, image processing may be instructed to other image processing devices 30. For example, in step S79, the execution instruction unit 223 of the image processing control unit 22 may cause the image processing unit 23 to execute image processing in response to a busy state of the communication line between each image processing device 30 in the test system 1A and each image processing device 30 other than the image processing unit 23. In this case, in step S93, the detection unit 50 may detect whether the communication line between each image processing device 30 and the test device 2A is busy or not. In response to the communication line being busy, in step S95, the third selection unit 52 may select the image processing unit 23 in the test device 2A, and in step S79, the execution instruction unit 223 may transmit image data to the image processing unit 23 to execute image processing. As a result, even if the communication line is busy, image processing can be performed and the test can be progressed.
　＜３．その他の変形例＞
　なお、上記の実施形態および変形例においては、試験装置２，２Ａは、光源２０と、画像処理部２３と、統計部２４とを有することとして説明したが、これらの少なくとも１つを有しなくてもよい。試験装置２，２Ａが光源２０を有しない場合には、外部装置としての光源から被試験デバイス１００に対して１または複数の発光パターンの光が照射されることに応じて被試験デバイス１００が出力する画像データを画像データ取得部２１が取得してよい。試験装置２，２Ａが画像処理部２３を有しない場合には、実行指示部２２３は、試験装置２，２Ａの外部の画像処理装置３０に画像データを送信して画像処理を実行させてよい。試験装置２，２Ａが統計部２４を有しない場合には、ステップＳ１３の処理後にステップＳ２３の処理が行われるか、ステップＳ６３の処理後にステップＳ７３の処理が行われてよい。 3. Other Modifications
In the above embodiment and modified example, the test apparatus 2, 2A has been described as having the light source 20, the image processing unit 23, and the statistical unit 24, but may not have at least one of them. If the test apparatus 2, 2A does not have the light source 20, the image data acquisition unit 21 may acquire image data output by the device under test 100 in response to the light of one or more light emission patterns being irradiated onto the device under test 100 from a light source as an external device. If the test apparatus 2, 2A does not have the image processing unit 23, the execution instruction unit 223 may transmit image data to an image processing device 30 outside the test apparatus 2, 2A to execute image processing. If the test apparatus 2, 2A does not have the statistical unit 24, the process of step S23 may be performed after the process of step S13, or the process of step S73 may be performed after the process of step S63.
　また、第１選択部２２１はＮ個（またはＭ個）の試験項目から、より所要時間の長い画像処理に対応する試験項目を優先して選択することとして説明したが、他の態様で試験項目を選択してもよい。例えば、第１選択部２２１は、試験項目に予め設定された番号順に、各試験項目を選択してよい。これに代えて、第１選択部２２１は、基準よりも所要時間の長い画像処理に対応する試験項目を、離散的な順序で選択してもよい。基準よりも所要時間の長い試験項目とは、基準時間よりも所要時間の長い試験項目でもよいし、基準順位よりも所要時間の長い試験項目でもよい。基準時間や基準順位は任意に設定されてよい。離散的な順序で試験項目を選択するとは、非連続な順序となるように試験項目を選択することであってよく、飛び飛びの順となるように試験項目を選択することであってよい。これにより、基準よりも所要時間の長い画像処理に対応する試験項目が連続的な順序で選択される場合と異なり、処理性能の高い画像処理装置３０に対し、所要時間の長い画像処理を実行させやすくすることができる。よって、所要時間の長い画像処理を、処理性能の高い画像処理装置３０で実行することで、画像処理を効率化し、判定を早めることができる。 In addition, although the first selection unit 221 has been described as giving priority to selecting test items corresponding to image processing requiring a longer time from among N (or M) test items, the test items may be selected in other manners. For example, the first selection unit 221 may select each test item in the order of numbers preset for the test items. Alternatively, the first selection unit 221 may select test items corresponding to image processing requiring a longer time than the reference in a discrete order. A test item requiring a longer time than the reference may be a test item requiring a longer time than the reference time, or may be a test item requiring a longer time than the reference order. The reference time and the reference order may be set arbitrarily. Selecting test items in a discrete order may mean selecting test items in a discontinuous order, or may mean selecting test items in a discrete order. This makes it easier for the image processing device 30 with high processing performance to execute image processing requiring a longer time, unlike the case where test items corresponding to image processing requiring a longer time than the reference are selected in a continuous order. Therefore, by executing image processing that requires a long time on an image processing device 30 with high processing performance, the image processing can be made more efficient and judgments can be made more quickly.
　また、第１選択部２２１は照射済みの発光パターンの識別情報を光源２０から取得して、当該発光パターンに対応する何れかの試験項目を実行対象として選択することとして説明したが、発光パターンの識別情報を取得せずに実行対象の試験項目を選択してもよい。例えば、第１選択部２２１は、Ｎ個の試験項目の何れかを選択し、選択した試験項目に対応する発光パターンの識別情報を光源２０に供給して、当該発光パターンで光を照射させてもよい。 In addition, the first selection unit 221 has been described as acquiring identification information of an already-illuminated light emission pattern from the light source 20 and selecting one of the test items corresponding to that light emission pattern as the test item to be executed, but the test item to be executed may be selected without acquiring identification information of the light emission pattern. For example, the first selection unit 221 may select one of the N test items, supply identification information of the light emission pattern corresponding to the selected test item to the light source 20, and irradiate light with that light emission pattern.
　また、第２選択部２２２は、少なくとも各画像処理装置３０の処理性能に基づいて、実行対象の試験項目に応じた画像処理を実行させる画像処理装置３０を選択することとして説明したが、他の態様で画像処理装置３０を選択してもよい。例えば、第２選択部２２２は、クラウド上の画像処理装置３０を優先して選択してもよいし、試験装置２内の画像処理部２３を優先して選択してもよい。また、第２選択部２２２は、基準より負荷の低い試験項目の試験に対し、試験装置２の画像処理部２３に優先して選択してもよい。 Furthermore, the second selection unit 222 has been described as selecting an image processing device 30 that will execute image processing according to the test item to be executed based at least on the processing performance of each image processing device 30, but the image processing device 30 may be selected in other ways. For example, the second selection unit 222 may preferentially select an image processing device 30 on the cloud, or may preferentially select an image processing unit 23 in the test device 2. Furthermore, the second selection unit 222 may preferentially select an image processing unit 23 of the test device 2 for testing a test item with a lower load than the standard.
　また、試験システム１，１Ａは１または複数の画像処理装置３０が実装された複数のサーバ装置３を備えることとして説明したが、１または複数の画像処理装置３０が実装された単一のサーバ装置を備えてもよい。また、各画像処理装置３０がサーバ装置３に実装されることとして説明したが、少なくとも１つの画像処理装置３０がサーバ装置３に実装されていなくてもよい。 In addition, the test system 1, 1A has been described as having multiple server devices 3 with one or more image processing devices 30 implemented, but it may also have a single server device with one or more image processing devices 30 implemented. In addition, although it has been described as having each image processing device 30 implemented in a server device 3, at least one image processing device 30 does not have to be implemented in a server device 3.
　また、第１選択部２２１および第２選択部２２２（または第３選択部５２）が独自に試験項目，画像処理装置３０を選択することとして説明したが、協働して試験項目，画像処理装置３０を選択してもよい。例えば、第１選択部２２１および第２選択部（または第３選択部５２）は、全ての試験項目の試験が完了するまでの時間が最短になるように試験項目，画像処理装置３０の選択順序を最適化してもよい。一例として、第１選択部２２１および第２選択部（または第３選択部５２）は、従来より公知のビンパッキング問題の解決手法を用い、試験完了までの時間を最小化するように試験項目，画像処理装置３０を選択してよい。これに代えて、第１選択部２２１および第２選択部（または第３選択部５２）は、試験完了までの仮の目標時間を設定し、従来より公知のナップサック問題の解決手法を用い、当該仮の目標時間に収まるように試験項目，画像処理装置３０を選択し、収まらない場合には仮の目標時間を延ばし、収まった場合には選択した順序を採用してもよい。 In addition, although the first selection unit 221 and the second selection unit 222 (or the third selection unit 52) have been described as independently selecting the test items and image processing devices 30, they may cooperate to select the test items and image processing devices 30. For example, the first selection unit 221 and the second selection unit (or the third selection unit 52) may optimize the selection order of the test items and image processing devices 30 so that the time required to complete the tests of all test items is minimized. As an example, the first selection unit 221 and the second selection unit (or the third selection unit 52) may use a conventionally known method for solving the bin packing problem to select the test items and image processing devices 30 so as to minimize the time required to complete the tests. Alternatively, the first selection unit 221 and the second selection unit (or the third selection unit 52) may set a tentative target time until the test is completed, and use a conventionally known method for solving the knapsack problem to select the test items and image processing devices 30 so as to fit within the tentative target time, and if the tentative target time is not within the tentative target time, the tentative target time may be extended, and if the tentative target time is within the tentative target time, the selected order may be adopted.
　また、画像処理装置３０は画像データに対し、試験項目に応じた画像処理を実行することとして説明したが、さらに画像処理の結果から試験結果を導出してもよい。一例として、画像処理装置３０は、試験項目が「Ｓｅｎｓｉｔｉｖｉｔｙ」である場合には、画像処理によって画像データから何らかの平均画素値を取り出し、さらに平均画素値を基準値と比較して試験結果を導出してよい。この場合には、試験結果取得部２６は画像処理装置３０から試験結果を取得してよい。 Furthermore, while the image processing device 30 has been described as performing image processing on the image data according to the test item, the test result may further be derived from the result of the image processing. As an example, when the test item is "Sensitivity", the image processing device 30 may extract some average pixel value from the image data by image processing, and further compare the average pixel value with a reference value to derive the test result. In this case, the test result acquisition unit 26 may acquire the test result from the image processing device 30.
　本発明の様々な実施形態は、フローチャートおよびブロック図を参照して記載されてよく、ここにおいてブロックは、（１）操作が実行されるプロセスの段階または（２）操作を実行する役割を持つ装置のセクションを表わしてよい。特定の段階およびセクションが、専用回路、コンピュータ可読媒体上に格納されるコンピュータ可読命令と共に供給されるプログラマブル回路、および／またはコンピュータ可読媒体上に格納されるコンピュータ可読命令と共に供給されるプロセッサによって実装されてよい。専用回路は、デジタルおよび／またはアナログハードウェア回路を含んでよく、集積回路（ＩＣ）および／またはディスクリート回路を含んでよい。プログラマブル回路は、論理ＡＮＤ、論理ＯＲ、論理ＸＯＲ、論理ＮＡＮＤ、論理ＮＯＲ、および他の論理操作、フリップフロップ、レジスタ、フィールドプログラマブルゲートアレイ（ＦＰＧＡ）、プログラマブルロジックアレイ（ＰＬＡ）等のようなメモリ要素等を含む、再構成可能なハードウェア回路を含んでよい。 Various embodiments of the present invention may be described with reference to flow charts and block diagrams, where the blocks may represent (1) stages of a process in which operations are performed or (2) sections of an apparatus responsible for performing the operations. Particular stages and sections may be implemented by dedicated circuitry, programmable circuitry provided with computer readable instructions stored on a computer readable medium, and/or a processor provided with computer readable instructions stored on a computer readable medium. Dedicated circuitry may include digital and/or analog hardware circuitry and may include integrated circuits (ICs) and/or discrete circuits. Programmable circuitry may include reconfigurable hardware circuitry including logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, memory elements such as flip-flops, registers, field programmable gate arrays (FPGAs), programmable logic arrays (PLAs), and the like.
　コンピュータ可読媒体は、適切なデバイスによって実行される命令を格納可能な任意の有形なデバイスを含んでよく、その結果、そこに格納される命令を有するコンピュータ可読媒体は、フローチャートまたはブロック図で指定された操作を実行するための手段を作成すべく実行され得る命令を含む、製品を備えることになる。コンピュータ可読媒体の例としては、電子記憶媒体、磁気記憶媒体、光記憶媒体、電磁記憶媒体、半導体記憶媒体等が含まれてよい。コンピュータ可読媒体のより具体的な例としては、フロッピー（登録商標）ディスク、ディスケット、ハードディスク、ランダムアクセスメモリ（ＲＡＭ）、リードオンリメモリ（ＲＯＭ）、消去可能プログラマブルリードオンリメモリ（ＥＰＲＯＭまたはフラッシュメモリ）、電気的消去可能プログラマブルリードオンリメモリ（ＥＥＰＲＯＭ）、静的ランダムアクセスメモリ（ＳＲＡＭ）、コンパクトディスクリードオンリメモリ（ＣＤ-ＲＯＭ）、デジタル多用途ディスク（ＤＶＤ）、ブルーレイ（ＲＴＭ）ディスク、メモリスティック、集積回路カード等が含まれてよい。 A computer readable medium may include any tangible device capable of storing instructions that are executed by a suitable device, such that the computer readable medium having instructions stored thereon comprises an article of manufacture that includes instructions that can be executed to create means for performing the operations specified in the flow chart or block diagram. Examples of computer readable media may include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, and the like. More specific examples of computer readable media may include floppy disks, diskettes, hard disks, random access memories (RAMs), read-only memories (ROMs), erasable programmable read-only memories (EPROMs or flash memories), electrically erasable programmable read-only memories (EEPROMs), static random access memories (SRAMs), compact disk read-only memories (CD-ROMs), digital versatile disks (DVDs), Blu-ray (RTM) disks, memory sticks, integrated circuit cards, and the like.
　コンピュータ可読命令は、アセンブラ命令、命令セットアーキテクチャ（ＩＳＡ）命令、マシン命令、マシン依存命令、マイクロコード、ファームウェア命令、状態設定データ、またはＳｍａｌｌｔａｌｋ（登録商標）、ＪＡＶＡ（登録商標）、Ｃ＋＋等のようなオブジェクト指向プログラミング言語、および「Ｃ」プログラミング言語または同様のプログラミング言語のような従来の手続型プログラミング言語を含む、１または複数のプログラミング言語の任意の組み合わせで記述されたソースコードまたはオブジェクトコードのいずれかを含んでよい。 The computer readable instructions may include either assembler instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, or source or object code written in any combination of one or more programming languages, including object-oriented programming languages such as Smalltalk (registered trademark), JAVA (registered trademark), C++, etc., and conventional procedural programming languages such as the "C" programming language or similar programming languages.
　コンピュータ可読命令は、汎用コンピュータ、特殊目的のコンピュータ、若しくは他のプログラム可能なデータ処理装置のプロセッサまたはプログラマブル回路に対し、ローカルにまたはローカルエリアネットワーク（ＬＡＮ）、インターネット等のようなワイドエリアネットワーク（ＷＡＮ）を介して提供され、フローチャートまたはブロック図で指定された操作を実行するための手段を作成すべく、コンピュータ可読命令を実行してよい。プロセッサの例としては、コンピュータプロセッサ、処理ユニット、マイクロプロセッサ、デジタル信号プロセッサ、コントローラ、マイクロコントローラ等を含む。 Computer-readable instructions may be provided to a processor or programmable circuitry of a general-purpose computer, special-purpose computer, or other programmable data processing apparatus, either locally or over a wide-area network (WAN) such as a local area network (LAN), the Internet, etc., to execute the computer-readable instructions to create means for performing the operations specified in the flowcharts or block diagrams. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, microcontrollers, etc.
　図７は、本発明の複数の態様が全体的または部分的に具現化されてよいコンピュータ２２００の例を示す。コンピュータ２２００にインストールされたプログラムは、コンピュータ２２００に、本発明の実施形態に係る装置に関連付けられる操作または当該装置の１または複数のセクションとして機能させることができ、または当該操作または当該１または複数のセクションを実行させることができ、および／またはコンピュータ２２００に、本発明の実施形態に係るプロセスまたは当該プロセスの段階を実行させることができる。そのようなプログラムは、コンピュータ２２００に、本明細書に記載のフローチャートおよびブロック図のブロックのうちのいくつかまたはすべてに関連付けられた特定の操作を実行させるべく、ＣＰＵ２２１２によって実行されてよい。 7 illustrates an example of a computer 2200 in which aspects of the present invention may be embodied in whole or in part. Programs installed on the computer 2200 may cause the computer 2200 to function as or perform operations associated with an apparatus or one or more sections of the apparatus according to an embodiment of the present invention, and/or to perform a process or steps of a process according to an embodiment of the present invention. Such programs may be executed by the CPU 2212 to cause the computer 2200 to perform specific operations associated with some or all of the blocks of the flowcharts and block diagrams described herein.
　本実施形態によるコンピュータ２２００は、ＣＰＵ２２１２、ＲＡＭ２２１４、グラフィックコントローラ２２１６、およびディスプレイデバイス２２１８を含み、それらはホストコントローラ２２１０によって相互に接続されている。コンピュータ２２００はまた、通信インターフェイス２２２２、ハードディスクドライブ２２２４、ＤＶＤ－ＲＯＭドライブ２２２６、およびＩＣカードドライブのような入／出力ユニットを含み、それらは入／出力コントローラ２２２０を介してホストコントローラ２２１０に接続されている。コンピュータはまた、ＲＯＭ２２３０およびキーボード２２４２のようなレガシの入／出力ユニットを含み、それらは入／出力チップ２２４０を介して入／出力コントローラ２２２０に接続されている。 The computer 2200 according to this embodiment includes a CPU 2212, a RAM 2214, a graphics controller 2216, and a display device 2218, which are interconnected by a host controller 2210. The computer 2200 also includes input/output units such as a communication interface 2222, a hard disk drive 2224, a DVD-ROM drive 2226, and an IC card drive, which are connected to the host controller 2210 via an input/output controller 2220. The computer also includes legacy input/output units such as a ROM 2230 and a keyboard 2242, which are connected to the input/output controller 2220 via an input/output chip 2240.
　ＣＰＵ２２１２は、ＲＯＭ２２３０およびＲＡＭ２２１４内に格納されたプログラムに従い動作し、それにより各ユニットを制御する。グラフィックコントローラ２２１６は、ＲＡＭ２２１４内に提供されるフレームバッファ等またはそれ自体の中にＣＰＵ２２１２によって生成されたイメージデータを取得し、イメージデータがディスプレイデバイス２２１８上に表示されるようにする。 The CPU 2212 operates according to the programs stored in the ROM 2230 and the RAM 2214, thereby controlling each unit. The graphics controller 2216 retrieves image data generated by the CPU 2212 into a frame buffer or the like provided in the RAM 2214 or into itself, and causes the image data to be displayed on the display device 2218.
　通信インターフェイス２２２２は、ネットワークを介して他の電子デバイスと通信する。ハードディスクドライブ２２２４は、コンピュータ２２００内のＣＰＵ２２１２によって使用されるプログラムおよびデータを格納する。ＤＶＤ－ＲＯＭドライブ２２２６は、プログラムまたはデータをＤＶＤ－ＲＯＭ２２０１から読み取り、ハードディスクドライブ２２２４にＲＡＭ２２１４を介してプログラムまたはデータを提供する。ＩＣカードドライブは、プログラムおよびデータをＩＣカードから読み取り、および／またはプログラムおよびデータをＩＣカードに書き込む。 The communication interface 2222 communicates with other electronic devices via a network. The hard disk drive 2224 stores programs and data used by the CPU 2212 in the computer 2200. The DVD-ROM drive 2226 reads programs or data from the DVD-ROM 2201 and provides the programs or data to the hard disk drive 2224 via the RAM 2214. The IC card drive reads programs and data from an IC card and/or writes programs and data to an IC card.
　ＲＯＭ２２３０はその中に、アクティブ化時にコンピュータ２２００によって実行されるブートプログラム等、および／またはコンピュータ２２００のハードウェアに依存するプログラムを格納する。入／出力チップ２２４０はまた、様々な入／出力ユニットをパラレルポート、シリアルポート、キーボードポート、マウスポート等を介して、入／出力コントローラ２２２０に接続してよい。 ROM 2230 stores therein a boot program, etc., which is executed by computer 2200 upon activation, and/or a program that depends on the hardware of computer 2200. Input/output chip 2240 may also connect various input/output units to input/output controller 2220 via a parallel port, a serial port, a keyboard port, a mouse port, etc.
　プログラムが、ＤＶＤ－ＲＯＭ２２０１またはＩＣカードのようなコンピュータ可読媒体によって提供される。プログラムは、コンピュータ可読媒体から読み取られ、コンピュータ可読媒体の例でもあるハードディスクドライブ２２２４、ＲＡＭ２２１４、またはＲＯＭ２２３０にインストールされ、ＣＰＵ２２１２によって実行される。これらのプログラム内に記述される情報処理は、コンピュータ２２００に読み取られ、プログラムと、上記様々なタイプのハードウェアリソースとの間の連携をもたらす。装置または方法が、コンピュータ２２００の使用に従い情報の操作または処理を実現することによって構成されてよい。 The programs are provided by a computer-readable medium such as a DVD-ROM 2201 or an IC card. The programs are read from the computer-readable medium and installed in the hard disk drive 2224, RAM 2214, or ROM 2230, which are also examples of computer-readable media, and executed by the CPU 2212. The information processing described in these programs is read by the computer 2200, and brings about cooperation between the programs and the various types of hardware resources described above. An apparatus or method may be constructed by realizing the manipulation or processing of information in accordance with the use of the computer 2200.
　例えば、通信がコンピュータ２２００および外部デバイス間で実行される場合、ＣＰＵ２２１２は、ＲＡＭ２２１４にロードされた通信プログラムを実行し、通信プログラムに記述された処理に基づいて、通信インターフェイス２２２２に対し、通信処理を命令してよい。通信インターフェイス２２２２は、ＣＰＵ２２１２の制御下、ＲＡＭ２２１４、ハードディスクドライブ２２２４、ＤＶＤ－ＲＯＭ２２０１、またはＩＣカードのような記録媒体内に提供される送信バッファ処理領域に格納された送信データを読み取り、読み取られた送信データをネットワークに送信し、またはネットワークから受信された受信データを記録媒体上に提供される受信バッファ処理領域等に書き込む。 For example, when communication is performed between computer 2200 and an external device, CPU 2212 may execute a communication program loaded into RAM 2214 and instruct communication interface 2222 to perform communication processing based on the processing described in the communication program. Under the control of CPU 2212, communication interface 2222 reads transmission data stored in a transmission buffer processing area provided in RAM 2214, hard disk drive 2224, DVD-ROM 2201, or a recording medium such as an IC card, and transmits the read transmission data to the network, or writes received data received from the network to a reception buffer processing area or the like provided on the recording medium.
　また、ＣＰＵ２２１２は、ハードディスクドライブ２２２４、ＤＶＤ－ＲＯＭドライブ２２２６（ＤＶＤ－ＲＯＭ２２０１）、ＩＣカード等のような外部記録媒体に格納されたファイルまたはデータベースの全部または必要な部分がＲＡＭ２２１４に読み取られるようにし、ＲＡＭ２２１４上のデータに対し様々なタイプの処理を実行してよい。ＣＰＵ２２１２は次に、処理されたデータを外部記録媒体にライトバックする。 The CPU 2212 may also cause all or a necessary portion of a file or database stored on an external recording medium such as the hard disk drive 2224, the DVD-ROM drive 2226 (DVD-ROM 2201), an IC card, etc. to be read into the RAM 2214, and perform various types of processing on the data on the RAM 2214. The CPU 2212 then writes back the processed data to the external recording medium.
　様々なタイプのプログラム、データ、テーブル、およびデータベースのような様々なタイプの情報が記録媒体に格納され、情報処理を受けてよい。ＣＰＵ２２１２は、ＲＡＭ２２１４から読み取られたデータに対し、本開示の随所に記載され、プログラムの命令シーケンスによって指定される様々なタイプの操作、情報処理、条件判断、条件分岐、無条件分岐、情報の検索／置換等を含む、様々なタイプの処理を実行してよく、結果をＲＡＭ２２１４に対しライトバックする。また、ＣＰＵ２２１２は、記録媒体内のファイル、データベース等における情報を検索してよい。例えば、各々が第２の属性の属性値に関連付けられた第１の属性の属性値を有する複数のエントリが記録媒体内に格納される場合、ＣＰＵ２２１２は、第１の属性の属性値が指定される、条件に一致するエントリを当該複数のエントリの中から検索し、当該エントリ内に格納された第２の属性の属性値を読み取り、それにより予め定められた条件を満たす第１の属性に関連付けられた第２の属性の属性値を取得してよい。 Various types of information, such as various types of programs, data, tables, and databases, may be stored on the recording medium and may undergo information processing. CPU 2212 may perform various types of processing on data read from RAM 2214, including various types of operations, information processing, conditional judgment, conditional branching, unconditional branching, information search/replacement, etc., as described throughout this disclosure and specified by the instruction sequence of the program, and write back the results to RAM 2214. CPU 2212 may also search for information in a file, database, etc. in the recording medium. For example, if multiple entries, each having an attribute value of a first attribute associated with an attribute value of a second attribute, are stored in the recording medium, CPU 2212 may search for an entry that matches a condition, in which an attribute value of the first attribute is specified, from among the multiple entries, read the attribute value of the second attribute stored in the entry, and thereby obtain the attribute value of the second attribute associated with the first attribute that satisfies a predetermined condition.
　上で説明したプログラムまたはソフトウェアモジュールは、コンピュータ２２００上またはコンピュータ２２００近傍のコンピュータ可読媒体に格納されてよい。また、専用通信ネットワークまたはインターネットに接続されたサーバーシステム内に提供されるハードディスクまたはＲＡＭのような記録媒体が、コンピュータ可読媒体として使用可能であり、それによりプログラムを、ネットワークを介してコンピュータ２２００に提供する。 The above-described programs or software modules may be stored on a computer-readable medium on the computer 2200 or in the vicinity of the computer 2200. In addition, a recording medium such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet can be used as a computer-readable medium, thereby providing the programs to the computer 2200 via the network.
　以上、本発明を実施の形態を用いて説明したが、本発明の技術的範囲は上記実施の形態に記載の範囲には限定されない。上記実施の形態に、多様な変更または改良を加えることが可能であることが当業者に明らかである。その様な変更または改良を加えた形態も本発明の技術的範囲に含まれ得ることが、請求の範囲の記載から明らかである。 The present invention has been described above using an embodiment, but the technical scope of the present invention is not limited to the scope described in the above embodiment. It will be clear to those skilled in the art that various modifications and improvements can be made to the above embodiment. It is clear from the claims that forms incorporating such modifications or improvements can also be included in the technical scope of the present invention.
　請求の範囲、明細書、および図面中において示した装置、システム、プログラム、および方法における動作、手順、ステップ、および段階等の各処理の実行順序は、特段「より前に」、「先立って」等と明示しておらず、また、前の処理の出力を後の処理で用いるのでない限り、任意の順序で実現しうることに留意すべきである。請求の範囲、明細書、および図面中の動作フローに関して、便宜上「まず、」、「次に、」等を用いて説明したとしても、この順で実施することが必須であることを意味するものではない。 The order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before" or "prior to," and it should be noted that the processes can be performed in any order, unless the output of a previous process is used in a later process. Even if the operational flow in the claims, specifications, and drawings is explained using "first," "next," etc. for convenience, it does not mean that it is necessary to perform the processes in that order.
　１　試験システム
　２　試験装置
　３　サーバ装置
　５　制御装置
　２０　光源
　２１　画像データ取得部
　２２　画像処理制御部
　２３　画像処理部
　２４　統計部
　２６　試験結果取得部
　２７　判定部
　２８　通信部
　３０　画像処理装置
　５０　検知部
　５１　第３取得部
　５２　第３選択部
　５３　第２送信部
　５４　通信部
　１００　被試験デバイス
　２２０　検知部
　２２１　第１選択部
　２２２　第２選択部
　２２３　実行指示部
　２２４　第１送信部
　２２００　コンピュータ
　２２０１　ＤＶＤ－ＲＯＭ
　２２１０　ホストコントローラ
　２２１２　ＣＰＵ
　２２１４　ＲＡＭ
　２２１６　グラフィックコントローラ
　２２１８　ディスプレイデバイス
　２２２０　入／出力コントローラ
　２２２２　通信インターフェイス
　２２２４　ハードディスクドライブ
　２２２６　ＤＶＤ－ＲＯＭドライブ
　２２３０　ＲＯＭ
　２２４０　入／出力チップ
　２２４２　キーボード LIST OF REFERENCE NUMERALS 1 Test system 2 Test device 3 Server device 5 Control device 20 Light source 21 Image data acquisition section 22 Image processing control section 23 Image processing section 24 Statistics section 26 Test result acquisition section 27 Judgment section 28 Communication section 30 Image processing device 50 Detection section 51 Third acquisition section 52 Third selection section 53 Second transmission section 54 Communication section 100 Device under test 220 Detection section 221 First selection section 222 Second selection section 223 Execution instruction section 224 First transmission section 2200 Computer 2201 DVD-ROM
2210 host controller 2212 CPU
2214 RAM
2216 Graphic controller 2218 Display device 2220 Input/output controller 2222 Communication interface 2224 Hard disk drive 2226 DVD-ROM drive 2230 ROM
2240 Input/Output Chip 2242 Keyboard

Claims (18)

  1. 　複数の試験項目に対応する１または複数の発光パターンの光に応じ、イメージセンサである被試験デバイスが出力する各画像データを取得する画像データ取得部と、
    　前記画像データ取得部が取得した１または複数の画像データを２以上の画像処理装置へと送信して、前記複数の試験項目における別々の試験項目に応じた画像処理を、前記２以上の画像処理装置のそれぞれにより並行して実行させる画像処理制御部と、
    　画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する試験結果取得部と、
    　前記試験結果取得部により取得された各試験項目の試験結果に基づいて前記被試験デバイスの良否を判定する判定部と、
    　を備える試験装置。     an image data acquisition unit that acquires image data output from a device under test, which is an image sensor, in response to light of one or more emission patterns corresponding to a plurality of test items;
    an image processing control unit that transmits one or more image data acquired by the image data acquisition unit to two or more image processing devices and causes the two or more image processing devices to execute image processing corresponding to different test items among the plurality of test items in parallel;
    a test result acquisition unit that acquires test results of test items corresponding to the image processing, the test results being derived from the result of the image processing;
    a judgment unit that judges pass/fail of the device under test based on the test results of each test item acquired by the test result acquisition unit;
    A test apparatus comprising:
  2. 　前記画像処理制御部は、前記被試験デバイスの識別情報を画像データと共に前記２以上の画像処理装置へと送信し、
    　前記試験結果取得部は、前記被試験デバイスの識別情報を試験結果と共に取得する、請求項１に記載の試験装置。     the image processing control unit transmits identification information of the device under test together with image data to the two or more image processing devices;
    2. The test apparatus according to claim 1, wherein the test result acquisition section acquires identification information of the device under test together with the test result.
  3. 　前記画像処理制御部は、
    　各画像処理装置の状態を検知する検知部と、
    　各試験項目を逐次、実行対象の試験項目として選択する第１選択部と、
    　前記実行対象の試験項目が選択されることに応じて複数の画像処理装置から画像処理の実行状態の画像処理装置と、故障状態の画像処理装置との少なくとも一方を除外して、画像処理装置を選択する第２選択部と、
    　前記複数の画像処理装置のうち、前記第２選択部により選択された画像処理装置へと画像データを送信して、前記実行対象の試験項目に応じた画像処理を実行させる実行指示部と、
    　を有する、請求項１に記載の試験装置。     The image processing control unit
    A detection unit that detects a state of each image processing device;
    a first selection unit that sequentially selects each test item as a test item to be executed;
    a second selection unit that selects an image processing device from the plurality of image processing devices in response to the selection of the test item to be executed, by excluding at least one of an image processing device in an execution state of image processing and an image processing device in a faulty state;
    an execution instruction unit that transmits image data to an image processing device selected by the second selection unit from among the plurality of image processing devices, and causes the image processing device to execute image processing corresponding to the test item to be executed;
    2. The test device of claim 1, comprising:
  4. 　前記第２選択部は、少なくとも各画像処理装置の処理性能に基づいて、前記複数の画像処理装置から、前記実行対象の試験項目に応じた画像処理を実行させる画像処理装置を選択する、請求項３に記載の試験装置。 The test device according to claim 3, wherein the second selection unit selects an image processing device from the plurality of image processing devices to perform image processing corresponding to the test item to be performed, based at least on the processing performance of each image processing device.
  5. 　前記第２選択部は、前記複数の画像処理装置のうち、最も処理性能が高い画像処理装置を選択する、請求項４に記載の試験装置。 The test device according to claim 4, wherein the second selection unit selects an image processing device having the highest processing performance from among the plurality of image processing devices.
  6. 　前記第１選択部は、前記複数の試験項目から、より所要時間の長い画像処理に対応する試験項目を優先して選択する、請求項３に記載の試験装置。 The test device according to claim 3, wherein the first selection unit preferentially selects, from the plurality of test items, a test item corresponding to image processing that requires a longer time.
  7. 　前記第１選択部は、基準よりも所要時間の長い画像処理に対応する試験項目を、離散的な順序で選択する、請求項３に記載の試験装置。 The test device according to claim 3, wherein the first selection unit selects test items corresponding to image processing that requires a longer time than a reference in a discrete order.
  8. 　前記２以上の画像処理装置のうち、少なくとも１つの画像処理装置は、少なくとも１つのサーバ装置に実装されており、
    　当該試験装置は、各サーバ装置と通信する通信部をさらに備える、請求項１に記載の試験装置。     At least one of the two or more image processing devices is implemented in at least one server device;
    The test apparatus according to claim 1 , further comprising a communication unit that communicates with each of the server devices.
  9. 　前記少なくとも１つのサーバ装置の何れかは、クラウドサーバである、請求項８に記載の試験装置。 The test device according to claim 8, wherein any one of the at least one server devices is a cloud server.
  10. 　前記２以上の画像処理装置の１つとして、画像データに対する画像処理を実行する画像処理部をさらに備え、
    　前記画像処理制御部は、前記画像データ取得部が取得した画像データを前記画像処理部に供給して、前記複数の試験項目のうち一部の試験項目に応じた画像処理を実行させる、請求項１に記載の試験装置。     One of the two or more image processing devices further includes an image processing unit that executes image processing on image data;
    2 . The test device according to claim 1 , wherein the image processing control unit supplies the image data acquired by the image data acquisition unit to the image processing unit, and causes the image processing unit to execute image processing corresponding to some of the plurality of test items.
  11. 　前記画像処理制御部は、前記２以上の画像処理装置のうち前記画像処理部とは異なる各画像処理装置との間の通信回線がビジー状態であることに応じて、前記画像処理部に画像処理を実行させる、請求項１０に記載の試験装置。 The test device according to claim 10, wherein the image processing control unit causes the image processing unit to execute image processing in response to a busy state of a communication line between each of the two or more image processing devices and an image processing device other than the image processing unit.
  12. 　前記画像データ取得部が取得した画像データにおける画素値の統計を被試験デバイスごとに実行する統計部をさらに備え、
    　前記判定部は、一の被試験デバイスについての統計結果が基準条件を満たさないことに応じて当該一の被試験デバイスを不良と判定し、前記一の被試験デバイスについての画像処理をディセーブルする、請求項１に記載の試験装置。     a statistics unit that performs statistics of pixel values in the image data acquired by the image data acquisition unit for each device under test,
    2. The test apparatus according to claim 1, wherein the judgment section judges a device under test to be defective when a statistical result for the device under test does not satisfy a reference condition, and disables image processing for the device under test.
  13. 　前記被試験デバイスに対し、前記１または複数の発光パターンの光を照射する光源をさらに備える、請求項１に記載の試験装置。 The test apparatus according to claim 1, further comprising a light source that irradiates the device under test with light of the one or more emission patterns.
  14. 　請求項１に記載の複数の試験装置と、
    　前記複数の試験装置により共用される複数の画像処理装置と、
    　を備える試験システム。     A plurality of test devices according to claim 1;
    a plurality of image processing devices shared by the plurality of test devices;
    A test system comprising:
  15. 　各試験装置の前記画像処理制御部は、
    　各画像処理装置の状態を検知する検知部と、
    　各試験項目を逐次、実行対象の試験項目として選択する第１選択部と、
    　前記実行対象の試験項目が選択されることに応じて前記複数の画像処理装置から画像処理の実行状態の画像処理装置と、故障状態の画像処理装置との少なくとも一方を除外して、画像処理装置を選択する第２選択部と、
    　前記複数の画像処理装置のうち、前記第２選択部により選択された画像処理装置へと画像データを送信して、前記実行対象の試験項目に応じた画像処理を実行させる実行指示部と、
    　を有する、請求項１４に記載の試験システム。     The image processing control unit of each test device includes:
    A detection unit that detects a state of each image processing device;
    a first selection unit that sequentially selects each test item as a test item to be executed;
    a second selection unit that selects an image processing device from the plurality of image processing devices by excluding at least one of an image processing device in an execution state of image processing and an image processing device in a faulty state in response to the selection of the test item to be executed;
    an execution instruction unit that transmits image data to an image processing device selected by the second selection unit from among the plurality of image processing devices, and causes the image processing device to execute image processing corresponding to the test item to be executed;
    The test system of claim 14 , comprising:
  16. 　各試験装置による試験を制御する制御装置を備え、
    　各試験装置は、
    　各試験項目を逐次、実行対象の試験項目として選択する第１選択部と、
    　前記実行対象の試験項目が選択されることに応じて前記制御装置に画像処理装置の選択要求信号を送信する第１送信部と、
    　前記複数の画像処理装置のうち、前記制御装置により選択された画像処理装置へと画像データを送信して、前記実行対象の試験項目に応じた画像処理を実行させる実行指示部と、
    　を有し、
    　前記制御装置は、
    　各画像処理装置の状態を検知する検知部と、
    　各試験装置から逐次、前記選択要求信号を取得する第３取得部と、
    　前記選択要求信号が取得されることに応じて前記複数の画像処理装置から画像処理の実行状態の画像処理装置と、故障状態の画像処理装置との少なくとも一方を除外して、画像処理装置を選択する第３選択部と、
    　前記第３選択部が選択した画像処理装置の識別情報を、前記選択要求信号の送信元の前記試験装置に送信する第２送信部と、
    を有する、請求項１４に記載の試験システム。     A control device is provided for controlling tests performed by each of the test devices,
    Each test device is
    a first selection unit that sequentially selects each test item as a test item to be executed;
    a first transmission unit that transmits a selection request signal for an image processing device to the control device in response to the selection of the test item to be executed;
    an execution instruction unit that transmits image data to an image processing device selected by the control device from among the plurality of image processing devices, and causes the image processing device to execute image processing corresponding to the test item to be executed;
    having
    The control device includes:
    A detection unit that detects a state of each image processing device;
    a third acquisition unit that acquires the selection request signal from each test device in sequence;
    a third selection unit that selects an image processing device from the plurality of image processing devices in response to acquisition of the selection request signal by excluding at least one of an image processing device in an execution state of image processing and an image processing device in a fault state;
    a second transmission unit that transmits identification information of the image processing device selected by the third selection unit to the test device that is a source of the selection request signal;
    The test system of claim 14 , comprising:
  17. 　複数の試験項目に対応する１または複数の発光パターンの光に応じ、イメージセンサである被試験デバイスが出力する各画像データを取得する画像データ取得段階と、
    　前記画像データ取得段階で取得した１または複数の画像データを２以上の画像処理装置へと送信して、前記複数の試験項目における別々の試験項目に応じた画像処理を、前記２以上の画像処理装置のそれぞれにより並行して実行させる画像処理制御段階と、
    　画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する試験結果取得段階と、
    　前記試験結果取得段階により取得された各試験項目の試験結果に基づいて前記被試験デバイスの良否を判定する判定段階と、
    　を備える試験方法。     an image data acquisition step of acquiring image data output from a device under test, which is an image sensor, in response to light of one or more emission patterns corresponding to a plurality of test items;
    an image processing control step of transmitting one or more image data acquired in the image data acquisition step to two or more image processing devices and causing each of the two or more image processing devices to execute image processing corresponding to different test items in the plurality of test items in parallel;
    a test result acquisition stage for acquiring test results of test items corresponding to the image processing, the test results being derived from the result of the image processing;
    a judging step of judging pass/fail of the device under test based on the test results of each test item acquired in the test result acquiring step;
    A test method comprising:
  18. 　コンピュータを、
    　複数の試験項目に対応する１または複数の発光パターンの光に応じ、イメージセンサである被試験デバイスが出力する各画像データを取得する画像データ取得部と、
    　前記画像データ取得部が取得した１または複数の画像データを２以上の画像処理装置へと送信して、前記複数の試験項目における別々の試験項目に応じた画像処理を、前記２以上の画像処理装置のそれぞれにより並行して実行させる画像処理制御部と、
    　画像処理の結果から導出される、当該画像処理に応じた試験項目の試験結果を取得する試験結果取得部と、
    　前記試験結果取得部により取得された各試験項目の試験結果に基づいて前記被試験デバイスの良否を判定する判定部と、
    　として機能させる試験プログラム。     Computer,
    an image data acquisition unit that acquires image data output from a device under test, which is an image sensor, in response to light of one or more emission patterns corresponding to a plurality of test items;
    an image processing control unit that transmits one or more image data acquired by the image data acquisition unit to two or more image processing devices and causes the two or more image processing devices to execute image processing corresponding to different test items among the plurality of test items in parallel;
    a test result acquisition unit that acquires test results of test items corresponding to the image processing, the test results being derived from the result of the image processing;
    a judgment unit that judges pass/fail of the device under test based on the test results of each test item acquired by the test result acquisition unit;
    A test program that functions as a
PCT/JP2023/028383 2022-10-03 2023-08-03 Testing apparatus, testing system, testing method, and testing program WO2024075381A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-159416 2022-10-03
JP2022159416A JP2024053276A (en) 2022-10-03 2022-10-03 Test device, test system, test method and test program

Publications (1)

Publication Number Publication Date
WO2024075381A1 true WO2024075381A1 (en) 2024-04-11

Family

ID=90608003

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/028383 WO2024075381A1 (en) 2022-10-03 2023-08-03 Testing apparatus, testing system, testing method, and testing program

Country Status (2)

Country Link
JP (1) JP2024053276A (en)
WO (1) WO2024075381A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001016622A (en) * 1999-06-30 2001-01-19 Agilent Technologies Japan Ltd Debug device and test method for image pickup device
JP2001016623A (en) * 1999-06-30 2001-01-19 Agilent Technologies Japan Ltd Test method for image pickup element
JP2006203386A (en) * 2005-01-19 2006-08-03 Yokogawa Electric Corp Solid-state imaging element inspection system
JP2006203389A (en) * 2005-01-19 2006-08-03 Yokogawa Electric Corp Solid-state imaging element inspection system
JP2006222514A (en) * 2005-02-08 2006-08-24 Nikon Corp Method of inspecting solid-state imaging device, inspection program, and electronic camera
JP2006343227A (en) * 2005-06-09 2006-12-21 Fujifilm Holdings Corp Inspection method and device of solid-state imaging element

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001016622A (en) * 1999-06-30 2001-01-19 Agilent Technologies Japan Ltd Debug device and test method for image pickup device
JP2001016623A (en) * 1999-06-30 2001-01-19 Agilent Technologies Japan Ltd Test method for image pickup element
JP2006203386A (en) * 2005-01-19 2006-08-03 Yokogawa Electric Corp Solid-state imaging element inspection system
JP2006203389A (en) * 2005-01-19 2006-08-03 Yokogawa Electric Corp Solid-state imaging element inspection system
JP2006222514A (en) * 2005-02-08 2006-08-24 Nikon Corp Method of inspecting solid-state imaging device, inspection program, and electronic camera
JP2006343227A (en) * 2005-06-09 2006-12-21 Fujifilm Holdings Corp Inspection method and device of solid-state imaging element

Also Published As

Publication number Publication date
JP2024053276A (en) 2024-04-15

Similar Documents

Publication Publication Date Title
EP3785603B1 (en) Machine learning-based fundus image detection method, apparatus, and system
KR100885875B1 (en) A method and system for rasterization
WO2019227762A1 (en) Method, device and apparatus for detecting pixel defect of optical module
US8018612B2 (en) Image processing apparatuses, methods and systems that select an apparatus for performing image processing on an image
US7266232B2 (en) Apparatus and method for inspecting pattern
US20110214107A1 (en) Method and system for testing graphical user interfaces
US20060291713A1 (en) Board inspecting apparatus, its parameter setting method and parameter setting apparatus
TW200301817A (en) A surface conduction examination method and a subtrate examination device
US11573872B2 (en) Leveraging low power states for fault testing of processing cores at runtime
US20070165267A1 (en) Automated Print Rendering Verification
CN111316282A (en) Method and apparatus for processing retinal images
WO2024075381A1 (en) Testing apparatus, testing system, testing method, and testing program
US9508006B2 (en) System and method for identifying trees
JP2009246803A (en) Image recognizing apparatus, and computer program
TW202416710A (en) Test equipment, test system, test method and recording medium
KR20210022278A (en) Apparatus and Method for detecting Defective Parts with Infrared Camera
CN113409317B (en) Defect detection method, electronic device, device and computer readable storage medium
CN109165030A (en) A kind of online programming test method of single-chip microcontroller
JP4616598B2 (en) Diagnostic method for image processing circuit, particle image analyzer, and computer program
WO2023162940A1 (en) Inspection device, inspection method, and inspection program
WO2022044150A1 (en) Image generation device, image generation method, and program
CN116973311B (en) Detection device and detection method for foreign matters on film and under film
JP2006038543A (en) Template histogram forming method and pattern inspection device
JP2024021487A (en) Inspection method, inspection device and program
JP4858227B2 (en) Inspection parameter setting support device, control program and control method thereof

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23874514

Country of ref document: EP

Kind code of ref document: A1