WO2024073867A1 - Electrode and use thereof - Google Patents
Electrode and use thereof Download PDFInfo
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- WO2024073867A1 WO2024073867A1 PCT/CN2022/123677 CN2022123677W WO2024073867A1 WO 2024073867 A1 WO2024073867 A1 WO 2024073867A1 CN 2022123677 W CN2022123677 W CN 2022123677W WO 2024073867 A1 WO2024073867 A1 WO 2024073867A1
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- layer
- oxide layer
- alloy
- metal oxide
- interlayer
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- 239000010410 layer Substances 0.000 claims abstract description 119
- 230000003197 catalytic effect Effects 0.000 claims abstract description 48
- 229910003455 mixed metal oxide Inorganic materials 0.000 claims abstract description 39
- 238000000576 coating method Methods 0.000 claims abstract description 38
- 239000011248 coating agent Substances 0.000 claims abstract description 37
- 239000011241 protective layer Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 239000011229 interlayer Substances 0.000 claims abstract description 27
- 229920000554 ionomer Polymers 0.000 claims abstract description 4
- 238000012545 processing Methods 0.000 claims abstract description 3
- 238000011068 loading method Methods 0.000 claims description 33
- 229910045601 alloy Inorganic materials 0.000 claims description 29
- 239000000956 alloy Substances 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 229910052719 titanium Inorganic materials 0.000 claims description 17
- 229910052715 tantalum Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 15
- 238000007747 plating Methods 0.000 claims description 13
- 229910052741 iridium Inorganic materials 0.000 claims description 12
- 229910001362 Ta alloys Inorganic materials 0.000 claims description 10
- 229910010977 Ti—Pd Inorganic materials 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- 229910052707 ruthenium Inorganic materials 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 229910002835 Pt–Ir Inorganic materials 0.000 claims description 3
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 description 36
- 239000000654 additive Substances 0.000 description 26
- 230000000996 additive effect Effects 0.000 description 25
- 238000000034 method Methods 0.000 description 16
- 239000000243 solution Substances 0.000 description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 11
- 238000005979 thermal decomposition reaction Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 5
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000004626 scanning electron microscopy Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- OEIMLTQPLAGXMX-UHFFFAOYSA-I tantalum(v) chloride Chemical compound Cl[Ta](Cl)(Cl)(Cl)Cl OEIMLTQPLAGXMX-UHFFFAOYSA-I 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910017888 Cu—P Inorganic materials 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- 229910003192 Nb–Ta Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- YNJJJJLQPVLIEW-UHFFFAOYSA-M [Ir]Cl Chemical compound [Ir]Cl YNJJJJLQPVLIEW-UHFFFAOYSA-M 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
Definitions
- the present application relates to, but is not limited to, the field of electrochemistry, and specifically relates to, but is not limited to, an electrode and use thereof.
- a printed circuit board is a main component of an electronic device, and is widely used as a connection carrier for integrated electronics and other devices. Electroplating, for example, vertical conveyor plating (VCP) , is a common method for the preparation of a printed circuit board.
- VCP vertical conveyor plating
- a metal electrode with a mixed metal oxide (MMO) coating is conventionally used as an anode, and additives are usually required, such as carriers, brighteners and leveling agents, which may achieve tine grains, non-directional copper grain structures and a uniform copper thickness.
- MMO coated anode contact of metal (e.g., Ir) active sites with additive molecules needs to be prevented, in order to avoid additive consumption.
- the MMO coated anode has a much higher additive consumption rate.
- the present application provides an electrode, including a substrate, a catalytic layer and a protective layer; wherein the catalytic layer may be selected from a mixed metal oxide layer; and the protective layer may be selected from an organic ionomer layer, e.g., may be selected from a fluororesin layer, e.g., may be a sulfonated tetrafluoroethylene layer, e.g., may be Nafion.
- a surface coating may further be included between the catalytic layer and the protective layer, and the surface coating may be selected from a Ta oxide layer, e.g., may be a Ta 2 O 5 layer.
- an interlayer may further be included between the substrate and the catalytic layer, and the interlayer may be selected from a Ta oxide layer, a Ti oxide layer, a Ti-Ta mixed metal oxide layer, a Ti-Ta alloy layer or a Ti-Pd alloy layer.
- the catalytic layer and the surface coating may be alternately stacked multiple layers.
- a loading amount of the protective layer may be from 1g/m 2 to 10g/m 2 , and may also be from 2g/m 2 to 5g/m 2 .
- a Ta content in the surface coating may be from 1g/m 2 to 20g/m 2 , and may also be from 10g/m 2 to 15g/m 2 .
- the catalytic layer may be selected from a Ru-Ti mixed metal oxide layer, an Ir-Ti mixed metal oxide layer, a Ru-Ir-Ti mixed metal oxide layer, a Ru-Ta mixed metal oxide layer, an Ir-Ta mixed metal oxide layer, a Ru-Ir-Ta mixed metal oxide layer, or a Pt-Ir mixed metal oxide layer.
- a content of Ti, Ta or Pt in the catalytic layer may be from 10wt%to 80wt%, and may also be from 20wt%to 70wt%, of the total mass of metal elements.
- a loading amount of Ru, Ir or Pt in the catalytic layer may be from 2g/m 2 to 20g/m 2 , may also be from 5g/m 2 to 10g/m 2 , and may also be from 6g/m 2 to 8g/m 2 .
- a Ta content in the interlayer Ti-Ta mixed metal oxide layer may be not less than 10wt%of the total mass of metal elements, may also be not less than 20wt%of the total mass of metal elements, and may further be from 40wt%to 50wt%of the total mass of metal elements.
- a Ta content in the interlayer Ti-Ta alloy layer may be not less than 10wt%of a total mass of the alloy, may also be not less than 20wt%of the total mass of the alloy, and may further be from 40wt%to 50wt%of the total mass of the alloy.
- a Pd content in the interlayer Ti-Pd alloy layer may be from 0.01wt%to 0.25wt%of the total mass of the alloy, and may also be from 0.12wt%to 0.25wt%of the total mass of the alloy.
- a loading amount of Ta in the interlayer Ta oxide layer, the interlayer Ti-Ta mixed metal oxide layer and the interlayer Ti-Ta alloy layer may be from 1g/m 2 to 10g/m 2 , and may also be 4g/m 2 or 5g/m 2 .
- a loading amount of Ti in the interlayer Ti oxide layer and the interlayer Ti-Pd alloy layer may be from 1 g/m 2 to 10g/m 2 , and may also be 4g/m 2 or 5g/m 2 .
- the substrate may be selected from metal Ti, Ta, Nb or an alloy thereof.
- the present application further provides use of the electrode described above, wherein the electrode may be used as an anode for a surface processing application, may also be used as an anode for plating, and may further be used as an anode for copper plating or as an anode for vertical conveyor plating.
- the plating may be used for preparing a printed circuit board.
- FIG. 1 is a scanning electron microscopy picture of the substrate titanium mesh of the electrode prepared in Example 1;
- FIG. 2 is a scanning electron microscopy picture of a top view of a protective layer of the electrode prepared in Example 1.
- an example of the present application provides an electrode, for example, the electrode includes a substrate, a catalytic layer and a protective layer which are sequentially stacked from bottom to top.
- the protective layer can effectively prevent the contact between additive molecules and metal active sites, and exhibit chemical inertia in the oxygen evolution process, greatly reducing the additive consumption rate.
- the catalytic layer provides electrochemical activity for an oxygen evolution reaction and has the properties such as resistance to wear and catalyst corrosion stability.
- a surface coating may or may not be provided between the catalytic layer and the protective layer.
- the surface coating can provide a better interface for adhesion of the protective layer, improving the bonding of the protective layer to the catalytic layer.
- An interlayer may or may not be provided between the substrate and the catalytic layer.
- the interlayer has good corrosion resistance and can provide additional corrosion protection for the substrate.
- the catalytic layer and the surface coating may be alternately stacked multiple layers.
- the substrate may be selected from metals Ti, Ta, Nb or an alloy thereof.
- it may be metal titanium (Ti) ; may also be industrial pure titanium (e.g., ASTM Grade 1 or ASTM Grade 2 industrial pure titanium) ; and may further be a Ti-based alloy (e.g., ASTM Grade 7 or ASTM Grade 11 titanium alloy) , e.g., a Ti-Nb alloy containing a small amount of Nb, a Ti-Ta alloy containing a small amount of Ta, or a Ti-Nb-Ta alloy containing a small amount of Nb and Ta, for example, the total content of Nb and Ta does not exceed 5wt%of the total mass of the alloy.
- the substrate may be a mesh, a plate, a foam, a felt, etc., e.g. may be a metal titanium mesh.
- the interlayer may be selected from a Ta oxide, a Ti oxide, a Ti-Ta mixed metal oxide, a Ti-Ta alloy or a Ti-Pd alloy.
- the Ta content in the Ti-Ta mixed metal oxide layer may be not less than 10wt%of the total mass of metal elements, may also be not less than 20wt%of the total mass of metal elements, and may further be from 40wt%to 50wt%of the total mass of metal elements.
- the mass ratio of Ta to Ti may be 40: 60, 50: 50, etc.
- the Ta content in the Ti-Ta alloy may be not less than 10wt%of the total mass of the alloy, may also be not less than 20wt%of the total mass of the alloy, and may further be from 40wt%to 50wt%of the total mass of the alloy.
- the mass ratio of Ta to Ti may be 40: 60, 50: 50, etc.
- the Pd content in the Ti-Pd alloy layer may be from 0.01wt%to 0.25wt%of the total mass of the alloy, and may also be from 0.12wt%to 0.25wt%of the total mass of the alloy.
- the Pd content may be 0.15wt%, 0.18wt%, 0.20wt%, etc.
- the loading amount of Ta in the Ta oxide layer, the Ti-Ta mixed metal oxide layer and the Ti-Ta alloy layer may be from 1g/m 2 to 10g/m 2 , e.g., 4g/m 2 , 5g/m 2 , etc.
- the loading amount of Ti in the Ti oxide layer and the Ti-Pd alloy layer may be from 1g/m 2 to 10g/m 2 , e.g., 4g/m 2 or 5g/m 2 ; or the loading amount of Pd in the Ti-Pd alloy layer may be from 0.1mg/m 2 to 25mg/m 2 , e.g., 1mg/m 2 , 5mg/m 2 , 10mg/m 2 , 15mg/m 2 , etc.
- the interlayer may be prepared by a wet-chemical method or a vapor deposition method, e.g., a magnetron sputtering method, a chemical vapor deposition method, etc.
- a magnetron sputtering method e.g., a magnetron sputtering method, a chemical vapor deposition method, etc.
- the use of the magnetron sputtering method can enable the formation of a dense interlayer on the substrate, which improves the corrosion resistance.
- the temperature of the substrate is controlled to from 200°C to 400°C
- an inert gas is used as a sputtering gas
- a vacuum degree is from 0.1Pa to 0.5Pa
- the power of a DC power supply is from 100W to 500W
- a target-substrate distance is from 30mm to 100mm
- a required loading amount is obtained by controlling the ratio of simultaneously used target materials and adjusting the sputtering time.
- the catalytic layer may be selected from a Ru-Ti mixed metal oxide layer, an Ir-Ti mixed metal oxide layer, a Ru-Ir-Ti mixed metal oxide layer, a Ru-Ta mixed metal oxide layer, an Ir-Ta mixed metal oxide layer, a Ru-Ir-Ta mixed metal oxide layer, or a Pt-Ir mixed metal oxide layer.
- the content of Ti, Ta or Pt in the catalytic layer may be from 10wt%to 80wt%, and may also be from 20wt%to 70wt%, e.g., 30wt%, 40wt%, 50wt%, 60wt%, etc, of the total mass of metal elements.
- the loading amount of Ru, Ir or Pt in the catalytic layer may be from 2g/m 2 to 20g/m 2 , may also be from 5g/m 2 to 10g/m 2 , and may also be from 6g/m 2 to 8g/m 2 , e.g., 7g/m 2 etc.
- the catalytic layer provides electrochemical activity for an oxygen evolution reaction and has the properties such as resistance to wear and catalyst corrosion stability.
- the catalytic layer may be prepared by methods such as coating-thermal decomposition, chemical vapor deposition (e.g., atomic layer deposition (ALD) ) , plasma-thermal spray, and physical vapor deposition.
- coating-thermal decomposition the catalytic layer is formed by coating a coating solution, e.g., containing Ru and Ti, containing Ir and Ti, containing Ru, Ir and Ti, containing Ru and Ta, containing Ir and Ta, containing Ru, Ir and Ta, or containing Pt and Ir on the surface of the substrate or the interlayer, followed by drying and thermal decomposition.
- the coating-thermal decomposition process may be performed several times until a desired loading amount is obtained.
- the surface coating may be an oxide of tantalum, which, for example, may be Ta 2 O 5 .
- the Ta content in the surface coating may be from 1g/m 2 to 20g/m 2 , and may also be from 10g/m 2 to 15g/m 2 , e.g., 11g/m 2 , 12g/m 2 , 13g/m 2 , 14g/m 2 , etc.
- the surface coating may be prepared by methods such as coating-thermal decomposition, chemical vapor deposition (e.g., ALD) , plasma-thermal spray, and physical vapor deposition.
- coating-thermal decomposition the surface coating is formed by coating a coating solution containing Ta on the surface of the catalytic layer, followed by drying and thermal decomposition. The coating-thermal decomposition process may be performed several times until a desired loading amount is obtained.
- the protective layer may be an organic ionomer, e.g., may be fluororesin, e.g., may also be sulfonated tetrafluoroethylene, e.g., may further be Nation.
- the loading amount of the protective layer may be from 1g/m 2 to 10g/m 2 , and may also be from 2g/m 2 to 5g/m 2 , e.g., 3g/m 2 , 4g/m 2 , etc.
- the protective layer may be prepared by methods such as coating-thermal decomposition, chemical vapor deposition (e.g., ALD) , plasma-thermal spray, and physical vapor deposition.
- the electrode of the present application is suitable for use as an anode for plating, especially as an anode for copper plating or as an anode for vertical conveyor plating, for preparation of a printed circuit board.
- the present application has the following beneficial effects:
- the electrode of the present application has a dense protective layer (for example, a fluororesin layer) , which can effectively prevent the contact between additive molecules and metal active sites, and exhibit chemical inertia in the oxygen evolution process, greatly reducing the additive consumption rate.
- a dense protective layer for example, a fluororesin layer
- the protective layer of the present application may also provide ionic conductivity, thus reducing the resistance of the coating to ionic current.
- the combination of the protective layer and the surface coating (for example, a Ta 2 O 5 layer) in the electrode of the present application achieves a synergistic effect, enabling better adhesion of the protective layer to the surface coating, which is more beneficial to the reduction in the additive consumption rate.
- the electrode of the present application has a simple preparation process and a reduced production cost, which is beneficial to large-scale production.
- Metal titanium (Ti) was used as an electrode substrate.
- a 2mm thick titanium mesh, with a grid factor of 2.0 and meeting the requirement of ASTM-B265 Grade 1 was selected, and was then sandblasted with iron sand and pickled with sulfuric acid.
- An Ir-Ta MMO catalytic layer was formed on the substrate, wherein the loading amount of Ir was 5g/m 2 .
- a chloroiridium acid aqueous solution and a tantalum pentachloride salt were used to formulate an n-butanol solution with an iridium mass concentration of 3wt%, in which the mass ratio of iridium element to tantalum element was 65: 35.
- the solution was applied to the surface of the substrate with a brush. Each time when 1 g iridium was applied per square meter of coating, the substrate was dried at 80°C and decomposed at 500°C for 10 minutes, and then it was taken out for cooling and continued to be coated until the iridium loading target of 5g/m 2 was reached.
- a Ta 2 O 5 surface coating was formed on the catalytic layer, wherein the loading amount of Ta was 10g/m 2 .
- a tantalum pentachloride salt was used to formulate an n-butanol solution with a tantalum mass concentration of 3wt%. The solution was applied to the surface of the catalytic layer with a brush. Each time when 1g tantalum was applied per square meter of coating, the object was dried at 80°C and decomposed at 500°C for 10 minutes, and then it was taken out for cooling and continued to be coated until the tantalum loading target of 10g/m 2 was reached.
- a fluororesin protective layer was formed on the surface coating, wherein the loading amount of fluororesin was 2g/m 2 .
- An isopropanol solution containing 5wt%Nation was formulated. The solution was applied to the surface of the surface coating with a brush. Each time when 1g fluororesin was applied per square meter of coating, the object was cured, and then it was taken out for cooling and continued to be coated until the fluororesin loading amount of2g/m 2 was reached.
- the same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
- Example 2 The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m 2 .
- Example 2 The same steps as in Example 1 were used to form a fluororesin protective layer on the catalytic layer, wherein the loading amount of fluororesin was 5g/m 2 .
- the same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
- Example 2 The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m 2 .
- Example 2 The same steps as in Example 1 were used to form a Ta 2 O 5 surface coating on the catalytic layer, wherein the loading amount of Ta was 1g/m 2 .
- Example 2 The same steps as in Example 1 were used to form a second Ir-Ta MMO catalytic layer on the surface coating, wherein the loading amount of Ir was 1 g/m 2 .
- Example 2 The same steps as in Example 1 were used to form a second Ta 2 O 5 surface coating on the second catalytic layer, wherein the loading amount of Ta was 10g/m 2 .
- Example 2 The same steps as in Example 1 were used to form a fluororesin protective layer on the second surface coating, wherein the loading amount of fluororesin was 5g/m 2 .
- the same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
- Example 2 The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m 2 .
- the same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
- Example 2 The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m 2 .
- Example 2 The same steps as in Example 1 were used to form a Ta 2 O 5 surface coating on the catalytic layer, wherein the loading amount of Ta was 10g/m 2 .
- the electrode prepared in Example 1 was tested by scanning electron microscopy.
- the substrate of the electrode is shown in FIG. 1, and the substrate is grid shaped.
- the protective layer of the electrode is shown in FIG. 2.
- the protective layer is a dense structure.
- the dense protective layer can effectively prevent the contact between additive molecules and metal active sites, and exhibit chemical inertia in an oxygen evolution process, greatly reducing the additive consumption rate.
- EMF-B is an additive used for continuous copper plating in manufacturing of a printed circuit board.
- the additive consumption rates of the electrodes (having a fluororesin protective layer) in Examples 1-3 of the present application are lower than the additive consumption rates of the electrodes (excluding a fluororesin protective layer) in Comparative examples 1-2, and in particular, the additive consumption rate in Example 3 is only 78mL/KAh, which is about one tenth of that in Comparative example 1.
- fluororesin is denser, which can effectively prevent contact between additive molecules and Ir active sites, and exhibits chemical inertia in the oxygen evolution process.
- Example 2 of the present application the additive consumption rate can still be effectively reduced in the case of excluding the surface coating and including only the fluororesin protective layer.
- the fluororesin protective layer is a key factor in reducing the additive consumption rate.
- Example 2 Even in the case where the loading amount of fluororesin in Example 1 is smaller than that in Example 2, the additive consumption rate in Example 1 is still lower than that in Example 2.
- the main reason is that the combination of the surface coating Ta 2 O 5 and the protective layer fluororesin produces a synergistic effect, and they can be combined better, which is more favorable to the reduction of the additive consumption rate.
- Example 3 the additive consumption rate in Example 3 is even lower, which indicates that alternately stacking the MMO layers and the surface coatings can achieve a better effect in reducing the additive consumption rate.
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Abstract
An electrode and use thereof. The electrode includes a substrate, a catalytic layer and a protective layer; wherein the catalytic layer is selected from a mixed metal oxide layer, and the protective layer is selected from an organic ionomer layer; a surface coating may further be included between the catalytic layer and the protective layer; and an interlayer may further be included between the substrate and the catalytic layer. The electrode may be used as an anode for a surface processing application.
Description
The present application relates to, but is not limited to, the field of electrochemistry, and specifically relates to, but is not limited to, an electrode and use thereof.
Background of the Related Art
A printed circuit board is a main component of an electronic device, and is widely used as a connection carrier for integrated electronics and other devices. Electroplating, for example, vertical conveyor plating (VCP) , is a common method for the preparation of a printed circuit board.
In the application of VCP of copper for a printed circuit board, a metal electrode with a mixed metal oxide (MMO) coating is conventionally used as an anode, and additives are usually required, such as carriers, brighteners and leveling agents, which may achieve tine grains, non-directional copper grain structures and a uniform copper thickness. In this case, for the MMO coated anode, contact of metal (e.g., Ir) active sites with additive molecules needs to be prevented, in order to avoid additive consumption. Compared with a Cu-P alloy anode, the MMO coated anode has a much higher additive consumption rate.
Content of the Invention
The following is a summary of the subject matter described in detail herein. This summary is not intended to limit the protection scope of the claims.
In order to reduce the additive consumption rate and reduce the production cost, the inventors of the present application have made improvements to the MMO coated electrode through years of careful research.
The present application provides an electrode, including a substrate, a catalytic layer and a protective layer; wherein the catalytic layer may be selected from a mixed metal oxide layer; and the protective layer may be selected from an organic ionomer layer, e.g., may be selected from a fluororesin layer, e.g., may be a sulfonated tetrafluoroethylene layer, e.g., may be Nafion.
In some embodiments, a surface coating may further be included between the catalytic layer and the protective layer, and the surface coating may be selected from a Ta oxide layer, e.g., may be a Ta
2O
5 layer.
In some embodiments, an interlayer may further be included between the substrate and the catalytic layer, and the interlayer may be selected from a Ta oxide layer, a Ti oxide layer, a Ti-Ta mixed metal oxide layer, a Ti-Ta alloy layer or a Ti-Pd alloy layer.
In some embodiments, the catalytic layer and the surface coating may be alternately stacked multiple layers.
In some embodiments, a loading amount of the protective layer may be from 1g/m
2 to 10g/m
2, and may also be from 2g/m
2 to 5g/m
2.
In some embodiments, a Ta content in the surface coating may be from 1g/m
2 to 20g/m
2, and may also be from 10g/m
2 to 15g/m
2.
In some embodiments, the catalytic layer may be selected from a Ru-Ti mixed metal oxide layer, an Ir-Ti mixed metal oxide layer, a Ru-Ir-Ti mixed metal oxide layer, a Ru-Ta mixed metal oxide layer, an Ir-Ta mixed metal oxide layer, a Ru-Ir-Ta mixed metal oxide layer, or a Pt-Ir mixed metal oxide layer.
In some embodiments, a content of Ti, Ta or Pt in the catalytic layer may be from 10wt%to 80wt%, and may also be from 20wt%to 70wt%, of the total mass of metal elements.
In some embodiments, a loading amount of Ru, Ir or Pt in the catalytic layer may be from 2g/m
2 to 20g/m
2, may also be from 5g/m
2 to 10g/m
2, and may also be from 6g/m
2 to 8g/m
2.
In some embodiments, a Ta content in the interlayer Ti-Ta mixed metal oxide layer may be not less than 10wt%of the total mass of metal elements, may also be not less than 20wt%of the total mass of metal elements, and may further be from 40wt%to 50wt%of the total mass of metal elements.
In some embodiments, a Ta content in the interlayer Ti-Ta alloy layer may be not less than 10wt%of a total mass of the alloy, may also be not less than 20wt%of the total mass of the alloy, and may further be from 40wt%to 50wt%of the total mass of the alloy.
In some embodiments, a Pd content in the interlayer Ti-Pd alloy layer may be from 0.01wt%to 0.25wt%of the total mass of the alloy, and may also be from 0.12wt%to 0.25wt%of the total mass of the alloy.
In some embodiments, a loading amount of Ta in the interlayer Ta oxide layer, the interlayer Ti-Ta mixed metal oxide layer and the interlayer Ti-Ta alloy layer may be from 1g/m
2 to 10g/m
2, and may also be 4g/m
2 or 5g/m
2.
In some embodiments, a loading amount of Ti in the interlayer Ti oxide layer and the interlayer Ti-Pd alloy layer may be from 1 g/m
2 to 10g/m
2, and may also be 4g/m
2 or 5g/m
2.
In some embodiments, the substrate may be selected from metal Ti, Ta, Nb or an alloy thereof.
The present application further provides use of the electrode described above, wherein the electrode may be used as an anode for a surface processing application, may also be used as an anode for plating, and may further be used as an anode for copper plating or as an anode for vertical conveyor plating.
In some embodiments, the plating may be used for preparing a printed circuit board.
Other features and the advantages of the present application will be set forth in the following description. Other advantages of the present application may be realized and obtained by the solutions described in the description and the drawings. Other aspects will become apparent upon reading and understanding the accompanying drawings and the detailed description.
Description of the Drawings
The accompanying drawings are used to provide an understanding of the technical solutions of the present application, and constitute a part of the specification. They are used to explain the technical solutions of the present application together with the examples of the present application, and do not constitute a limitation to the technical solutions of the present application.
FIG. 1 is a scanning electron microscopy picture of the substrate titanium mesh of the electrode prepared in Example 1;
FIG. 2 is a scanning electron microscopy picture of a top view of a protective layer of the electrode prepared in Example 1.
Detailed Description of Embodiments
Examples of the present application will be described in detail below in conjunction with the drawings. It should be noted that the examples in the present application and the features in the examples may be arbitrarily combined with each other provided that there is no conflict.
An example of the present application provides an electrode, for example, the electrode includes a substrate, a catalytic layer and a protective layer which are sequentially stacked from bottom to top. The protective layer can effectively prevent the contact between additive molecules and metal active sites, and exhibit chemical inertia in the oxygen evolution process, greatly reducing the additive consumption rate.
It is also feasible to symmetrically arrange the catalytic layer and the protective layer on both sides of the substrate, or arrange the catalytic layer and the protective layer on one side of the substrate and arrange only the catalytic layer on the other side of the substrate. The catalytic layer provides electrochemical activity for an oxygen evolution reaction and has the properties such as resistance to wear and catalyst corrosion stability.
A surface coating may or may not be provided between the catalytic layer and the protective layer. The surface coating can provide a better interface for adhesion of the protective layer, improving the bonding of the protective layer to the catalytic layer.
An interlayer may or may not be provided between the substrate and the catalytic layer. The interlayer has good corrosion resistance and can provide additional corrosion protection for the substrate.
The catalytic layer and the surface coating may be alternately stacked multiple layers.
The substrate may be selected from metals Ti, Ta, Nb or an alloy thereof. For example, it may be metal titanium (Ti) ; may also be industrial pure titanium (e.g., ASTM Grade 1 or ASTM Grade 2 industrial pure titanium) ; and may further be a Ti-based alloy (e.g., ASTM Grade 7 or ASTM Grade 11 titanium alloy) , e.g., a Ti-Nb alloy containing a small amount of Nb, a Ti-Ta alloy containing a small amount of Ta, or a Ti-Nb-Ta alloy containing a small amount of Nb and Ta, for example, the total content of Nb and Ta does not exceed 5wt%of the total mass of the alloy. The substrate may be a mesh, a plate, a foam, a felt, etc., e.g. may be a metal titanium mesh.
The interlayer may be selected from a Ta oxide, a Ti oxide, a Ti-Ta mixed metal oxide, a Ti-Ta alloy or a Ti-Pd alloy. The Ta content in the Ti-Ta mixed metal oxide layer may be not less than 10wt%of the total mass of metal elements, may also be not less than 20wt%of the total mass of metal elements, and may further be from 40wt%to 50wt%of the total mass of metal elements. For example, the mass ratio of Ta to Ti may be 40: 60, 50: 50, etc. The Ta content in the Ti-Ta alloy may be not less than 10wt%of the total mass of the alloy, may also be not less than 20wt%of the total mass of the alloy, and may further be from 40wt%to 50wt%of the total mass of the alloy. For example, the mass ratio of Ta to Ti may be 40: 60, 50: 50, etc. The Pd content in the Ti-Pd alloy layer may be from 0.01wt%to 0.25wt%of the total mass of the alloy, and may also be from 0.12wt%to 0.25wt%of the total mass of the alloy. For example, the Pd content may be 0.15wt%, 0.18wt%, 0.20wt%, etc. The loading amount of Ta in the Ta oxide layer, the Ti-Ta mixed metal oxide layer and the Ti-Ta alloy layer may be from 1g/m
2 to 10g/m
2, e.g., 4g/m
2, 5g/m
2, etc. The loading amount of Ti in the Ti oxide layer and the Ti-Pd alloy layer may be from 1g/m
2 to 10g/m
2, e.g., 4g/m
2 or 5g/m
2; or the loading amount of Pd in the Ti-Pd alloy layer may be from 0.1mg/m
2 to 25mg/m
2, e.g., 1mg/m
2, 5mg/m
2, 10mg/m
2, 15mg/m
2, etc.
The interlayer may be prepared by a wet-chemical method or a vapor deposition method, e.g., a magnetron sputtering method, a chemical vapor deposition method, etc. The use of the magnetron sputtering method can enable the formation of a dense interlayer on the substrate, which improves the corrosion resistance.
In an example of the magnetron sputtering process, the temperature of the substrate is controlled to from 200℃ to 400℃, an inert gas is used as a sputtering gas, a vacuum degree is from 0.1Pa to 0.5Pa, the power of a DC power supply is from 100W to 500W, a target-substrate distance is from 30mm to 100mm, and a required loading amount is obtained by controlling the ratio of simultaneously used target materials and adjusting the sputtering time.
The catalytic layer may be selected from a Ru-Ti mixed metal oxide layer, an Ir-Ti mixed metal oxide layer, a Ru-Ir-Ti mixed metal oxide layer, a Ru-Ta mixed metal oxide layer, an Ir-Ta mixed metal oxide layer, a Ru-Ir-Ta mixed metal oxide layer, or a Pt-Ir mixed metal oxide layer. The content of Ti, Ta or Pt in the catalytic layer may be from 10wt%to 80wt%, and may also be from 20wt%to 70wt%, e.g., 30wt%, 40wt%, 50wt%, 60wt%, etc, of the total mass of metal elements. The loading amount of Ru, Ir or Pt in the catalytic layer may be from 2g/m
2 to 20g/m
2, may also be from 5g/m
2 to 10g/m
2, and may also be from 6g/m
2 to 8g/m
2, e.g., 7g/m
2 etc. The catalytic layer provides electrochemical activity for an oxygen evolution reaction and has the properties such as resistance to wear and catalyst corrosion stability.
The catalytic layer may be prepared by methods such as coating-thermal decomposition, chemical vapor deposition (e.g., atomic layer deposition (ALD) ) , plasma-thermal spray, and physical vapor deposition. In an example of coating-thermal decomposition, the catalytic layer is formed by coating a coating solution, e.g., containing Ru and Ti, containing Ir and Ti, containing Ru, Ir and Ti, containing Ru and Ta, containing Ir and Ta, containing Ru, Ir and Ta, or containing Pt and Ir on the surface of the substrate or the interlayer, followed by drying and thermal decomposition. The coating-thermal decomposition process may be performed several times until a desired loading amount is obtained.
The surface coating may be an oxide of tantalum, which, for example, may be Ta
2O
5. The Ta content in the surface coating may be from 1g/m
2 to 20g/m
2, and may also be from 10g/m
2 to 15g/m
2, e.g., 11g/m
2, 12g/m
2, 13g/m
2, 14g/m
2, etc.
The surface coating may be prepared by methods such as coating-thermal decomposition, chemical vapor deposition (e.g., ALD) , plasma-thermal spray, and physical vapor deposition. In an example of coating-thermal decomposition, the surface coating is formed by coating a coating solution containing Ta on the surface of the catalytic layer, followed by drying and thermal decomposition. The coating-thermal decomposition process may be performed several times until a desired loading amount is obtained.
The protective layer may be an organic ionomer, e.g., may be fluororesin, e.g., may also be sulfonated tetrafluoroethylene, e.g., may further be Nation. The loading amount of the protective layer may be from 1g/m
2 to 10g/m
2, and may also be from 2g/m
2 to 5g/m
2, e.g., 3g/m
2, 4g/m
2, etc.
The protective layer may be prepared by methods such as coating-thermal decomposition, chemical vapor deposition (e.g., ALD) , plasma-thermal spray, and physical vapor deposition.
The electrode of the present application is suitable for use as an anode for plating, especially as an anode for copper plating or as an anode for vertical conveyor plating, for preparation of a printed circuit board.
The present application has the following beneficial effects:
1. The electrode of the present application has a dense protective layer (for example, a fluororesin layer) , which can effectively prevent the contact between additive molecules and metal active sites, and exhibit chemical inertia in the oxygen evolution process, greatly reducing the additive consumption rate.
2. The protective layer of the present application may also provide ionic conductivity, thus reducing the resistance of the coating to ionic current.
3. The combination of the protective layer and the surface coating (for example, a Ta
2O
5 layer) in the electrode of the present application achieves a synergistic effect, enabling better adhesion of the protective layer to the surface coating, which is more beneficial to the reduction in the additive consumption rate.
4. The electrode of the present application has a simple preparation process and a reduced production cost, which is beneficial to large-scale production.
Example 1
Metal titanium (Ti) was used as an electrode substrate. A 2mm thick titanium mesh, with a grid factor of 2.0 and meeting the requirement of ASTM-B265 Grade 1 was selected, and was then sandblasted with iron sand and pickled with sulfuric acid.
An Ir-Ta MMO catalytic layer was formed on the substrate, wherein the loading amount of Ir was 5g/m
2. A chloroiridium acid aqueous solution and a tantalum pentachloride salt were used to formulate an n-butanol solution with an iridium mass concentration of 3wt%, in which the mass ratio of iridium element to tantalum element was 65: 35. The solution was applied to the surface of the substrate with a brush. Each time when 1 g iridium was applied per square meter of coating, the substrate was dried at 80℃ and decomposed at 500℃ for 10 minutes, and then it was taken out for cooling and continued to be coated until the iridium loading target of 5g/m
2 was reached.
A Ta
2O
5 surface coating was formed on the catalytic layer, wherein the loading amount of Ta was 10g/m
2. A tantalum pentachloride salt was used to formulate an n-butanol solution with a tantalum mass concentration of 3wt%. The solution was applied to the surface of the catalytic layer with a brush. Each time when 1g tantalum was applied per square meter of coating, the object was dried at 80℃ and decomposed at 500℃ for 10 minutes, and then it was taken out for cooling and continued to be coated until the tantalum loading target of 10g/m
2 was reached.
A fluororesin protective layer was formed on the surface coating, wherein the loading amount of fluororesin was 2g/m
2. An isopropanol solution containing 5wt%Nation was formulated. The solution was applied to the surface of the surface coating with a brush. Each time when 1g fluororesin was applied per square meter of coating, the object was cured, and then it was taken out for cooling and continued to be coated until the fluororesin loading amount of2g/m
2 was reached.
An electrode was thus prepared.
Example 2
The same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m
2.
The same steps as in Example 1 were used to form a fluororesin protective layer on the catalytic layer, wherein the loading amount of fluororesin was 5g/m
2.
An electrode was thus prepared.
Example 3
The same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m
2.
The same steps as in Example 1 were used to form a Ta
2O
5 surface coating on the catalytic layer, wherein the loading amount of Ta was 1g/m
2.
The same steps as in Example 1 were used to form a second Ir-Ta MMO catalytic layer on the surface coating, wherein the loading amount of Ir was 1 g/m
2.
The same steps as in Example 1 were used to form a second Ta
2O
5 surface coating on the second catalytic layer, wherein the loading amount of Ta was 10g/m
2.
The same steps as in Example 1 were used to form a fluororesin protective layer on the second surface coating, wherein the loading amount of fluororesin was 5g/m
2.
An electrode was thus prepared.
Comparative example 1
The same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m
2.
An electrode was thus prepared.
Comparative example 2
The same metal titanium (Ti) as in Example 1 was used as an electrode substrate.
The same steps as in Example 1 were used to form an Ir-Ta MMO catalytic layer on the substrate, wherein the loading amount of Ir was 5g/m
2.
The same steps as in Example 1 were used to form a Ta
2O
5 surface coating on the catalytic layer, wherein the loading amount of Ta was 10g/m
2.
An electrode was thus prepared.
Electrode microstructure
The electrode prepared in Example 1 was tested by scanning electron microscopy.
The substrate of the electrode is shown in FIG. 1, and the substrate is grid shaped.
The protective layer of the electrode is shown in FIG. 2. As can be seen from FIG. 2, the protective layer is a dense structure. The dense protective layer can effectively prevent the contact between additive molecules and metal active sites, and exhibit chemical inertia in an oxygen evolution process, greatly reducing the additive consumption rate.
Test of additive consumption rate
The electrodes obtained in the examples and comparative examples were tested for additive consumption rate. The test results are shown in Table 1:
Table 1 Additive consumption rate
Note: “EVF-B” is an additive used for continuous copper plating in manufacturing of a printed circuit board.
As can be seen from Table 1, the additive consumption rates of the electrodes (having a fluororesin protective layer) in Examples 1-3 of the present application are lower than the additive consumption rates of the electrodes (excluding a fluororesin protective layer) in Comparative examples 1-2, and in particular, the additive consumption rate in Example 3 is only 78mL/KAh, which is about one tenth of that in Comparative example 1. The main reason is that fluororesin is denser, which can effectively prevent contact between additive molecules and Ir active sites, and exhibits chemical inertia in the oxygen evolution process.
In addition, in Example 2 of the present application, the additive consumption rate can still be effectively reduced in the case of excluding the surface coating and including only the fluororesin protective layer. Thus, it can be seen that the fluororesin protective layer is a key factor in reducing the additive consumption rate.
Moreover, even in the case where the loading amount of fluororesin in Example 1 is smaller than that in Example 2, the additive consumption rate in Example 1 is still lower than that in Example 2. The main reason is that the combination of the surface coating Ta
2O
5 and the protective layer fluororesin produces a synergistic effect, and they can be combined better, which is more favorable to the reduction of the additive consumption rate.
As can be further seen from Table 1, the additive consumption rate in Example 3 is even lower, which indicates that alternately stacking the MMO layers and the surface coatings can achieve a better effect in reducing the additive consumption rate.
Although the embodiments disclosed in the present application are as above, the contents described are only the embodiments adopted for the convenience of understanding the present application, and are not used to limit the present application. Any person skilled in the field to which the present application belongs can make any modifications and changes in the implementation form and details without departing from the spirit and scope disclosed by the present application, but the scope of patent protection of the present application shall still be subject to the scope defined by the appended claims.
Claims (14)
- An electrode, comprising a substrate, a catalytic layer and a protective layer;wherein the catalytic layer is selected from a mixed metal oxide layer,the protective layer is selected from an organic ionomer layer, preferably a fluororesin layer, and more preferably a sulfonated tetrafluoroethylene layer.
- The electrode according to claim 1, further comprising a surface coating between the catalytic layer and the protective layer, the surface coating being selected from a Ta oxide layer, preferably a Ta 2O 5 layer.
- The electrode according to claim 1 or 2, further comprising an interlayer between the substrate and the catalytic layer, the interlayer being selected from a Ta oxide layer, a Ti oxide layer, a Ti-Ta mixed metal oxide layer, a Ti-Ta alloy layer, or a Ti-Pd alloy layer.
- The electrode according to any one of claims 1-3, wherein the catalytic layer and the surface coating are alternately stacked multiple layers.
- The electrode according to any one of claims 1-3, wherein a loading amount of the protective layer is from 1g/m 2 to 10g/m 2, preferably from 2g/m 2 to 5g/m 2.
- The electrode according to any one of claims 2-5, wherein a Ta content in the surface coating is from 1g/m 2 to 20g/m 2, preferably from 10g/m 2 to 15g/m 2.
- The electrode according to any one of claims 1-6, wherein the catalytic layer is selected from a Ru-Ti mixed metal oxide layer, an Ir-Ti mixed metal oxide layer, a Ru-Ir-Ti mixed metal oxide layer, a Ru-Ta mixed metal oxide layer, an Ir-Ta mixed metal oxide layer, a Ru-Ir-Ta mixed metal oxide layer, or a Pt-Ir mixed metal oxide layer.
- The electrode according to claim 7, wherein a content of Ti, Ta or Pt in the catalytic layer is from 10wt%to 80wt%, preferably from 20wt%to 70wt%, of the total mass of metal elements.
- The electrode according to claim 7 or 8, wherein a loading amount of Ru, Ir or Pt in the catalytic layer is from 2g/m 2 to 20g/m 2, preferably from 5g/m 2 to 10g/m 2, and more preferably from 6g/m 2 to 8g/m 2.
- The electrode according to any one of claims 3-9, wherein a Ta content in the interlayer Ti-Ta mixed metal oxide layer is not less than 10wt%, preferably not less than 20wt%, and more preferably from 40wt%to 50wt%, of the total mass of metal elements;a Ta content in the interlayer Ti-Ta alloy layer is not less than 10wt%, preferably not less than 20wt%, and more preferably from 40wt%to 50wt%, of a total mass of the alloy; anda Pd content in the interlayer Ti-Pd alloy is from 0.01wt%to 0.25wt%, preferably from 0.12wt%to 0.25wt%, of the total mass of the alloy.
- The electrode according to any one of claims 3-10, wherein a loading amount of Ta in the interlayer Ta oxide layer, the interlayer Ti-Ta mixed metal oxide layer and the interlayer Ti-Ta alloy layer is from 1g/m 2 to 10g/m 2, preferably 4g/m 2 or 5g/m 2; anda loading amount of Ti in the interlayer Ti oxide layer and the interlayer Ti-Pd alloy layer is from 1g/m 2 to 10g/m 2, preferably 4g/m 2 or 5g/m 2.
- The electrode according to any one of claims 1-11, wherein the substrate is selected from metal Ti, Ta, Nb or an alloy thereof.
- Use of the electrode according to any one of claims 1-12, the electrode being used as an anode for a surface processing application, preferably as an anode for plating, and more preferably as an anode for copper plating or as an anode for vertical conveyor plating.
- The use according to claim 13, wherein the plating is used for preparing a printed circuit board.
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US20130264215A1 (en) * | 2010-12-18 | 2013-10-10 | Umicore Galvanotechnik Gmbh | Direct-contact membrane anode for use in electrolysis cells |
JP2019108580A (en) * | 2017-12-18 | 2019-07-04 | 日進化成株式会社 | Insoluble anode, and method of producing insoluble anode |
WO2021047687A2 (en) * | 2019-09-10 | 2021-03-18 | Magneto Special Anodes (suzhou) Co., Ltd. | Electrode and preparation method and use thereof |
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2022
- 2022-10-02 WO PCT/CN2022/123677 patent/WO2024073867A1/en unknown
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US20130264215A1 (en) * | 2010-12-18 | 2013-10-10 | Umicore Galvanotechnik Gmbh | Direct-contact membrane anode for use in electrolysis cells |
JP2019108580A (en) * | 2017-12-18 | 2019-07-04 | 日進化成株式会社 | Insoluble anode, and method of producing insoluble anode |
WO2021047687A2 (en) * | 2019-09-10 | 2021-03-18 | Magneto Special Anodes (suzhou) Co., Ltd. | Electrode and preparation method and use thereof |
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