WO2024071667A1 - Système d'holographie à balayage double et à division de polarisation pour réflecteur - Google Patents

Système d'holographie à balayage double et à division de polarisation pour réflecteur Download PDF

Info

Publication number
WO2024071667A1
WO2024071667A1 PCT/KR2023/011943 KR2023011943W WO2024071667A1 WO 2024071667 A1 WO2024071667 A1 WO 2024071667A1 KR 2023011943 W KR2023011943 W KR 2023011943W WO 2024071667 A1 WO2024071667 A1 WO 2024071667A1
Authority
WO
WIPO (PCT)
Prior art keywords
scan
polarized
polarized beam
splitter
polarization
Prior art date
Application number
PCT/KR2023/011943
Other languages
English (en)
Korean (ko)
Inventor
김태근
김봉연
이선필
Original Assignee
주식회사 큐빅셀
세종대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 큐빅셀, 세종대학교 산학협력단 filed Critical 주식회사 큐빅셀
Publication of WO2024071667A1 publication Critical patent/WO2024071667A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms

Definitions

  • the present invention relates to a polarization-splitting double scanning holography system for a reflector, and more specifically, to a polarization-splitting double scanning holography system for a reflector that can implement a scanning hologram for an object at ultra-high speed.
  • a conventional optical scanning hologram system uses an interferometer to form a beam pattern with a spatial distribution of a Fresnel zone plate, projects the formed beam pattern onto an object, and condenses the light reflected or transmitted from the object.
  • a hologram of an object is obtained through detection.
  • the purpose of the present invention is to provide a polarization-splitting double scanning holography system for a reflector that can implement a scanning hologram for an object at ultra-high speed.
  • the present invention modulates the phase of the first beam split from the light source, converts it into a first curvature beam through the first beam curvature generator, and converts the second beam into a second curvature beam through the second beam curvature generator,
  • a scan beam generator that forms a scan beam by interfering with the first and second curvature beams, and splits the scan beam into an s-polarized beam and a p-polarized beam to emit the two divided polarized beams side by side.
  • a scan beam consisting of a beam splitter and two polarized beams emitted side by side is received from the scan beam splitter and projected onto an object, and the scanning position of the scan beam with respect to the object is controlled in the horizontal and vertical directions to separate the object.
  • a scanning unit that transmits the signals to the s-polarized beam and the p-polarized beam, a light detection unit that separates and detects the s-polarized beam and the p-polarized beam from the beam reflected or fluorescent from the object, and the signals of the separately detected s-polarized beam and the p-polarized beam. It provides a polarization splitting double scanning holography system including a signal processing unit that processes and generates a hologram for the object.
  • the light detection unit is disposed in a direction biased to the optical axis of the beam projected to the object, and is spatially integrated through the first concentrator and a first concentrator for concentrating the reflected or fluorescent beam after being projected to the object.
  • a first polarizer that passes only the s-polarized beam component in the beam, a first photodetector that detects the s-polarized beam that has passed through the first polarizer, and a first polarizer that is disposed in a direction polarized to the optical axis of the beam projected to the object.
  • a second concentrator disposed in a position different from the first concentrator and concentrating the reflected or fluorescent beam after being projected to the object, and passing only the p-polarized beam component in the spatially integrated beam through the second concentrator. It may include a second polarizer, and a second photodetector that detects the p-polarized beam that has passed through the second polarizer.
  • the light detection unit includes a first light splitter that is disposed on the optical axis of the light projected to the object and receives the reflected or fluorescent beam from the object and reflects it to the outside, and receives the light reflected from the first light splitter and receives the light reflected from the first light splitter.
  • a second light splitter that transmits the p-polarized beam component of the incident beam and reflects the s-polarized beam component
  • a first concentrator that condenses the s-polarized beam component reflected by the second light splitter
  • the second light splitter A second concentrator for concentrating the p-polarized beam component transmitted from the light splitter, a first photodetector for detecting the spatially integrated beam through the first concentrator, and a spatially integrated beam through the second concentrator. It may further include a second photodetector for detection.
  • the light detection unit includes a first light splitter that is disposed on the optical axis of the light projected to the object and receives the reflected or fluorescent beam from the object and reflects it to the outside, and receives the light reflected from the first light splitter and receives the light reflected from the first light splitter.
  • a second light splitter that transmits part of the incident beam and reflects part of it, a first polarizer that receives the beam reflected from the second light splitter and allows only the s-polarized beam component to pass through, and is transmitted by the second light splitter.
  • a second polarizer that receives the incident beam and allows only the p-polarized beam component to pass through, a first concentrator that condenses the s-polarized beam component that has passed through the first polarizer, and a p-polarized beam that has passed through the second polarizer. It may include a second concentrator for concentrating a component, a first photodetector for detecting a spatially integrated beam through the first concentrator, and a second photodetector for detecting a spatially integrated beam through the second concentrator. You can.
  • the signal processor includes a first signal processor that processes the signal of the s-polarized beam detected by the first photodetector, and a second signal processor that processes the signal of the p-polarized beam detected by the second photodetector. It may include a processing unit, and a cross-array signal processing unit that generates a hologram for the object by synthesizing the hologram signal processed in the first signal processing unit and the hologram signal processed in the second signal processing unit in a manner that cross-arranges them line by line. there is.
  • the scan beam splitter is made of an anisotropic optical material, and separates the scan beam incident through the first side into an s-polarized beam and a p-polarized beam with polarizations orthogonal to each other and emits them in parallel through the second side. It may include a beam displacer.
  • the scan beam splitter is installed on the path of the shorter p-polarized beam among the paths of the s-polarized beam and the p-polarized beam emitted through the second surface, and is made of the same material as the beam displacer. It may further include an optical path difference correction unit that compensates for the difference in optical path length between the emitted s-polarized beam and the p-polarized beam.
  • the scan beam splitter is composed of a combination of two triangular prisms whose crystal axes are perpendicular to each other and made of different materials, and the scan beam incident through the first surface is transmitted parallel to the scan beam at the boundary surface of the two triangular prisms.
  • It includes a polarizing prism that separates a first polarized beam and a second polarized beam that travels at a set angle from the scan beam and emits them through a second surface, and if the first polarized beam is an s-polarized beam, the second polarized beam
  • the polarized beam may be a p-polarized beam, and if the first polarized beam is a p-polarized beam, the second polarized beam may be an s-polarized beam.
  • the scan beam splitter is sequentially installed on the path of the second polarized beam emitted through the second surface to change the beam path to determine the direction of travel of the second polarized beam.
  • a displacement control unit that adjusts the scan beam in parallel, and a first polarized beam that is installed on the path of the shorter first polarized beam among the paths of the first and second polarized beams that are emitted through the second surface, and is emitted; It may further include an optical path difference correction unit that compensates for a difference in optical path length between the second polarized beams.
  • the optical path difference correction unit includes third to sixth mirrors that are sequentially installed on the path of the first polarized beam emitted through the second surface to change the beam path, and the third and sixth mirrors It may include a mirror moving unit that compensates for the difference in optical path length while moving the fourth and fifth mirrors arranged in parallel and spaced apart from the mirror as a group.
  • the polarizing prism may have a Rochon prism or Senarmont prism structure.
  • the polarizing prism is installed in a state rotated by a set angle based on the center of the boundary surface, and the set angle is the angle between the travel directions of the first polarization beam and the second polarization beam separately emitted from the center of the boundary surface. It may be ⁇ /2, which is half of the difference ( ⁇ ).
  • the scan beam splitter includes first and second mirrors that are sequentially installed on the path of the second polarized beam emitted through the second surface to change the beam path, and a first and second mirrors that are sequentially installed on the path of the second polarized beam emitted through the second surface.
  • It further includes a displacement control unit including third and fourth mirrors that are sequentially installed on the path of the polarized beam to change the beam path and are installed symmetrically with the first and second mirrors, and wherein the displacement control unit
  • the travel directions of the second polarized beam that has passed through the second mirror and the first polarized beam that has passed through the fourth mirror may be adjusted to be parallel.
  • the scan beam splitter is composed of a combination of two triangular prisms whose crystal axes are perpendicular to each other and made of different materials, and the scan beam incident through the first surface is divided into two triangular prisms at the boundary surface of the two triangular prisms in the direction of the scan beam. It may include a polarizing prism of a Wollaston prism structure that separates the s-polarized beam and the p-polarized beam, which proceed symmetrically to each other at a set angle, and emits them through the second surface.
  • the scan beam splitter includes first and second mirrors that are sequentially installed on the path of the p-polarized beam emitted through the second surface to change the beam path, and s emitted through the second surface.
  • -It further includes a displacement control unit including third and fourth mirrors that are sequentially installed on the path of the polarizing beam to change the beam path and are installed symmetrically with the first and second mirrors, and are operated by the displacement control unit.
  • the travel directions of the p-polarized beam that passed through the second mirror and the s-polarized beam that passed through the fourth mirror may be adjusted to be parallel.
  • the scan beam splitter includes a first polarizing beam splitter that reflects the s-polarized beam component from the incident scan beam and transmits the p-polarized beam component, and a first polarizing beam splitter that reflects the s-polarized beam component from the first polarizing beam splitter.
  • First and second mirrors are sequentially installed on the path to change the beam path by 90 degrees, and are sequentially installed on the path of the p-polarized beam transmitted from the first polarizing beam splitter to change the beam path by 90 degrees.
  • the third to sixth mirrors, and an s-polarized beam that has passed through the second mirror and a p-polarized beam that has passed through the sixth mirror, are incident on each of the first and second surfaces, and after incident on the first face, It may include a second polarizing beam splitter that outputs the reflected s-polarized beam and the p-polarized beam transmitted after incident on the second surface in a parallel direction through the third surface.
  • the scan unit includes a horizontal scan mirror and a vertical scan mirror to control the scanning position of the scan beam with respect to the object, and can control the incident scan beam in horizontal and vertical directions and transmit it to the object.
  • the scan unit includes a scan mirror that controls the scan beam incident from the scan beam splitter in the horizontal direction and transmits it to the object so as to control the scanning position of the scan beam with respect to the object in the horizontal and vertical directions, It may include a translation stage that moves the object in the vertical direction at the rear end of the object.
  • the scan unit controls the scan beam incident from the scan beam splitter in the horizontal direction and transmits it to the object through spatial modulation so as to control the scanning position of the scan beam with respect to the object in the horizontal and vertical directions.
  • It may include a scanner and a translation stage that moves the object in the vertical direction at the rear end of the object.
  • the scan unit includes a vertical scanner and a horizontal scanner for controlling the scanning position of the scan beam with respect to the object in horizontal and vertical directions, and controls the scan beam incident from the scan beam splitter in the horizontal direction. It may include a horizontal spatial modulation scanner that transmits the scan beam to an object, and a vertical spatial modulation scanner that controls the scan beam in the vertical direction and transmits it to the object.
  • a hologram of an object can be acquired at ultra-high speed, faster than the scanning speed of a scanning mirror.
  • Figure 1 is a diagram showing the configuration of a polarization splitting double scanning holography system according to a first embodiment of the present invention.
  • Figure 2a is a diagram showing the configuration of a polarization splitting double scanning holography system according to a second embodiment of the present invention.
  • FIGS. 2B and 2C are views showing a modified example of FIG. 2A.
  • Figure 3 is a diagram showing the configuration of a polarization splitting double scanning holography system according to a third embodiment of the present invention.
  • Figure 4a is a diagram showing the configuration of a polarization splitting double scanning holography system according to a fourth embodiment of the present invention.
  • FIG. 4B is a diagram showing a modified example of FIG. 4A.
  • FIGS. 5A to 5H are diagrams illustrating various embodiments of the scan beam splitter shown in FIG. 1.
  • Figure 6 is a diagram explaining the operation of a signal processing unit according to an embodiment of the present invention.
  • Figure 7 is a diagram explaining the operating principle of a spatial modulation scanner.
  • Figure 8 is a diagram explaining the operating principle of the horizontal and vertical spatial modulation scanner.
  • the present invention relates to a polarization-splitting double scanning holography system, and proposes a polarization-splitting double scanning holography system for acquiring a hologram for a reflector, which is a reflective object, at high speed.
  • a polarization-splitting double scanning holography system for acquiring a hologram for a reflector, which is a reflective object, at high speed.
  • the system of the present invention is equally applicable to hologram acquisition for phosphors, which are fluorescence objects, as well as general reflectors.
  • the beam generated by the scan beam generator is divided into an s-polarized beam and a p-polarized beam, and then are emitted side by side and projected onto the object to be scanned.
  • Light reflected or fluorescent from the object is collected and transmitted to the light detection unit.
  • FIGS. 1 to 4 are diagrams showing the configuration of a polarization splitting double scanning holography system according to first to fourth embodiments of the present invention.
  • the polarization splitting double scanning holography system 100 largely includes a scan beam generator 110, a scan beam splitter 120, a scan unit 130, and an optical It includes a detection unit 140 and a signal processing unit 150.
  • This basic structure also applies to the remaining second to fourth embodiments.
  • the scan beam generator 110 frequency-shifts the first beam among the first and second beams split from the light source and converts it into a first curvature beam through the first beam curvature generator N1, and is converted into a second curvature beam through the second beam curvature generator N2, and then the first and second curvature beams are interfered to form a scan beam.
  • the scan beam generator 110 uses a mark-gender interferometer structure that splits a light source into first and second beams to generate first and second curved beams, and then combines the two generated beams again.
  • the scan beam generator 110 includes a first mirror (M1), a light splitter 111, a frequency shift means 112, second and third mirrors (M2, M3), and first and second beam curvature generators ( N1, N2), and an interference means 117, and may further include a light source.
  • the light source is the part that generates electromagnetic waves.
  • the light source may include various means such as a laser generator capable of generating electromagnetic waves, a light emitting diode (LED), and a beam with low coherence such as helogen light with a short coherence length.
  • a laser generator capable of generating electromagnetic waves
  • LED light emitting diode
  • a beam with low coherence such as helogen light with a short coherence length.
  • the light source implemented as a laser generator is taken as a representative example.
  • the beam output from the light source is transmitted to the first mirror (M1) and then reflected and input to the light splitter 111.
  • the light splitter 111 separates the incident beam into a first beam and a second beam, transmits the first beam to the phase modulation means 112 (acoustic-optical modulator), and transfers the second beam to the third mirror M3. Pass it to That is, the beam following the path of the first beam from the optical splitter 111 is transmitted to the phase modulation means 112, and the beam following the path of the second beam is transmitted to the third mirror M3.
  • the phase modulation means 112 acoustic-optical modulator
  • the optical splitter 111 may be composed of an optical fiber coupler, a beam splitter, a geometric phase lens, etc., and transmits the beam to the outside by guiding the free space. It can be implemented in this way.
  • a means that can split the beam on the co-axis in-line
  • a geometric phase lens it can be split into a first beam and a second beam on the co-axis.
  • each optical splitter is implemented as a beam splitter.
  • the phase modulation means 112 shifts the frequency of the first beam and then transmits it to the second mirror (M2).
  • the frequency shifting means that is, the phase modulating means, can shift the frequency of the first beam by ⁇ using a frequency generated by a function generator (not shown) and transmit it to the second mirror (M2).
  • the phase modulator may be implemented with various types of modulators that modulate the phase of light according to an electric signal, including an acousto-optic modulator and an electro-optic modulator.
  • the first beam reflected from the second mirror (M2) is transmitted to the first beam curvature generator (N1).
  • the second beam reflected from the third mirror (M3) is transmitted to the second beam curvature generator (N2).
  • the beam expander can be implemented as a collimator.
  • the first and second beam curvature generators N1 and N2 receive each beam and generate an enlarged beam having a curvature between negative and positive curvatures, including a collimated beam.
  • a specific example of implementation of the first beam curvature generator (N1) includes a first lens 113 that converts the first beam reflected from the second mirror (M2) into a spherical wave, and a beam that receives the spherical wave and has a curvature (first curvature As a beam expander having a second lens 115 that generates a beam, the curvature of the beam can be adjusted by adjusting the distance between the first lens 113 and the second lens 115.
  • a specific example of the second beam curvature generator (N2) includes a third lens 114 that converts the second beam reflected from the third mirror (M3) into a spherical wave, and a beam with a curvature (second curvature) that receives the spherical wave.
  • the curvature of the beam can be adjusted by adjusting the distance between the third lens 114 and the fourth lens 116.
  • the first beam curvature generator (N1) converts the first beam into a first curvature beam and transmits it to the interference means (117). That is, the first beam curvature generator N1 generates a second curvature beam by modulating the spatial distribution of the first beam.
  • the second beam curvature generator (N2) converts the second beam into a first curvature beam and transmits it to the interference means (117). That is, the second beam curvature generator N2 generates the second curvature beam by modulating the spatial distribution of the second beam.
  • the generated first and second curvature beams interfere with each other while passing through the interference means 117 and are transmitted to the scanning unit 130.
  • the interference means 117 may be implemented as a beam splitter.
  • the interference means 117 generates a first beam (first curved beam) that has passed through the first beam curvature generator (N1) and a second beam (second curved beam) that has passed through the second beam curvature generator (N2). They overlap and interfere with each other to form scan beams with an interference pattern of a Fresnel zone pattern.
  • the Fresnel annular pattern may represent a beam pattern generated by interference between a first and second curved beam whose curvatures are not completely the same.
  • the scan beam generator 110 converts the first beam and the second beam separated from the light source into the first and second curved beams and overlaps them through the interference means 117 to form a scan beam.
  • the scan beam is transmitted to the scan beam splitter 120.
  • the scan beam generated by the scan beam generator 110 is either linearly polarized at 45 degrees with respect to the horizontal direction of the scan beam splitter 120 (the direction in which the beam is incident on the scan beam splitter in FIG. 1) or is not linearly polarized. Preferably it is a beam.
  • the laser generates a beam linearly polarized at 45 degrees with respect to the horizontal direction of the scan beam splitter 120, or the laser outputs a linearly polarized beam in a random direction and the linearly polarized direction of the output laser beam is changed using a wave plate. ), a beam polarized at 45 degrees with respect to the horizontal direction of the scan beam splitter 120 can be generated.
  • a circularly polarized beam is generated from a laser beam, it can be changed to a linearly polarized beam using a wave plate.
  • the scan beam splitter 120 splits the incident scan beam into an s-polarized beam and a p-polarized beam and emits the two split polarized beams side by side toward the scan unit 130. That is, the scan beam splitter 120 divides the scan beam received from the scan beam generator 110 into two scan beams (first scan beam: s-polarized beam, second scan beam: p-polarized beam) according to polarization. ) and then output in parallel parallel to each other to deliver it to the scanning unit 130.
  • This scan beam splitter 120 has the function of splitting the scan beam into an s-polarized beam and a p-polarized beam, the function of adjusting the optical path length between the two split beams to be the same, and the traveling direction of the two split beams. It can be implemented including a function that makes it parallel.
  • the first function it can be implemented through a beam displacer, polarizing prism, or polarized beam splitter (PBS), and for the second and third functions, a combination of multiple mirrors or multiple mirrors can be used. It can be implemented using a combination of mirrors and a polarizing beam splitter (PBS). This will be explained in detail through FIGS. 5A to 5B below.
  • PBS polarized beam splitter
  • the scan beam splitter 120 may be implemented in various structures as follows.
  • FIGS. 5A to 5H are diagrams illustrating various embodiments of the scan beam splitter shown in FIG. 1.
  • Figure 5a shows the first embodiment of the scan beam splitter.
  • the scan beam splitter 120-1 includes a beam displacer 121a corresponding to a polarization splitter, as shown in the right figure of Figure 5a. It may further include an optical path difference correction unit 122 for correcting the optical path difference between the two divided polarization beams.
  • the beam displacer 121a separates the scan beam incident through the first side into an s-polarized beam and a p-polarized beam with polarizations orthogonal to each other, and emits them in parallel through the second side.
  • the beam displacer 121a is made of an anisotropic optical material. Calcite, YVO4, ⁇ -BBO, TeO 2 , etc. may be used as the anisotropic optical material.
  • a ray whose polarization oscillates in the same direction as the optical axis of the beam displacer 121a is called an ordinary ray, and is perpendicular to the optical axis.
  • a ray whose polarization oscillates in the same direction is called an extra-ordinary ray.
  • the p-polarized beam emitted from the beam displacer 121a corresponds to a normal ray parallel to the optical axis of the beam displacer 121a, and the s-polarized beam corresponds to an abnormal ray perpendicular to the optical axis.
  • the beam displacer 121a when the beam displacer 121a is implemented using an optical material with an anisotropic material crystal structure, it has a birefringent characteristic in which the refractive index changes depending on polarization, so that a beam polarized at 45 degrees or unpolarized is incident and has a phase of 90 degrees. It can be split into two linearly polarized beams (s-polarized beam, p-polarized beam) with a difference.
  • an optical path difference occurs between the two polarized beams separately emitted from the beam displacer 121a, and the optical path difference correction unit 122 may be used to correct this.
  • an optical material under the same conditions as the beam displacer 121a can be installed at the position where the normal ray is emitted, and the optical path difference between the two beams can be corrected using this.
  • the optical path difference correction unit 122 is installed on the path of the shorter p-polarized beam among the paths of the s-polarized beam and the p-polarized beam emitted through the second surface of the beam displacer 121a. , It is implemented with the same optical material as the beam displacer 121a, and can compensate for the difference in optical path length between the emitted s-polarized beam and the p-polarized beam.
  • the thickness of the optical material (optical material) constituting the beam displacer 121a by adjusting the thickness of the optical material (optical material) constituting the beam displacer 121a, the emission position (inter-beam spacing) of the s-polarized beam and the p-polarized beam can be adjusted, and through this, the beam displacer 121a It is possible to control the displacement value of the emitted beam through .
  • FIG. 5B is a second embodiment of the scan beam splitter.
  • the scan beam splitter 120-2 shown in FIG. 5B is implemented including a polarizing prism 121b of a Rochon prism structure, and includes a plurality of polarizing prisms 121b. It may further include a displacement control unit and an optical path difference correction unit using a mirror.
  • the polarizing prism 121b shown in FIG. 5B is implemented as a Rochon prism and is composed of a combination of two triangular prisms whose crystal axes are perpendicular to each other and made of different materials.
  • the polarizing prism 121b divides the scan beam incident through the first surface into an s-polarized beam that travels parallel to the scan beam (incident ray) at the boundary of the two triangular prisms, and the scan beam (incident ray) at a set angle. It is separated into a p-polarized beam that travels with and is emitted through the second side.
  • the crystal axis of the first triangular prism that meets the incident ray is a uniaxial crystal and is in the same direction as the incident ray
  • the crystal axis of the second triangular prism is perpendicular to the crystal axis plane of the first prism.
  • the incident ray is an extra-ordinary ray that is emitted at an angle and an ordinary ray that is emitted parallel to the incident ray, depending on the wavelength of light and the refraction of the material at the boundary between the two triangular prism materials. is separated into
  • the s-polarized beam emitted parallel to the incident beam corresponds to normal ray
  • the p-polarized beam traveling at an angle with the incident beam corresponds to abnormal ray
  • the displacement control unit is implemented by including a plurality of mirrors, and may specifically include first and second mirrors M1 and M2.
  • the displacement control unit may further include a position control unit (L2) that adjusts the position of the second mirror (M2) at the rear end of the two mirrors.
  • the first and second mirrors M1 and M2 are sequentially installed on the path of the p-polarized beam emitted through the second surface of the polarizing prism 121b and change the beam path to change the direction of the p-polarized beam. It serves to adjust the beam to be parallel to the scan beam. That is, the p-polarized beam that has passed through the last second mirror (M2) becomes parallel to the scan beam. In addition, when adjusting the position of the second mirror (M2) through the position adjusting unit (L), the position of the p-polarized beam with respect to the s-polarized beam can be adjusted.
  • the displacement control unit plays the role of making the abnormal ray parallel to the normal ray through two mirrors (M1, M2) and adjusts the second mirror (M2) through the position control unit (L2) to adjust the displacement of the beam. It can play a regulating role.
  • the present invention is not necessarily limited to the above, and the positions or displacement values of the two beams emitted from the polarizing prism 121b may vary depending on the arrangement and angle of each of the plurality of mirrors M1 to M6 included in FIG. 5b. It can be adjusted.
  • the optical path length is equalized through the optical path difference correction unit. Please correct it properly.
  • the optical path difference correction unit is installed on the path of the s-polarized beam and the p-polarized beam emitted through the second surface of the polarizing prism 121b, and adjusts the emitted s-polarized beam and the p-polarized beam. It serves to compensate for the difference in optical path length between polarized beams, and for this purpose, it may include third to sixth mirrors (M3 to M6) and a mirror moving unit (L1).
  • the third to sixth mirrors are sequentially installed on the path of the s-polarized beam emitted through the second surface of the polarizing prism 121b to change the beam path, specifically, the s-polarized beam. They are sequentially installed in a ' ⁇ ' shape along the beam path, allowing the beam progression path of the s-polarized beam to be changed by 90 degrees.
  • the s-polarized beam that has passed through the last sixth mirror (M6) becomes parallel to the incident beam.
  • the p-polarized beam separated by the polarizing prism 121b it becomes parallel to the incident beam through the operation of the displacement control unit including the first and second mirrors M1 and M2 described above, and thus p- The polarized beam and the s-polarized beam ultimately become parallel to each other.
  • the mirror moving unit (L1) moves the fourth mirror (M4) and the fifth mirror (M5), which are spaced apart in parallel with the third mirror (M3) and the sixth mirror (M6), as a group, thereby s-
  • the optical path length of the polarized beam can be set to be the same as the optical path length of the p-polarized beam.
  • the optical path length of the s-polarized beam can be increased or decreased by adjusting the mirror moving part L1 up and down.
  • FIG. 5C shows a third embodiment of the scan beam splitter.
  • the scan beam splitter 120-3 shown in FIG. 5C includes a polarizing prism 121c of a Rochon prism structure and further includes a displacement adjustment unit. It can be included.
  • the polarizing prism 121c shown in FIG. 5C is implemented as a Rochon prism and is composed of a combination of two triangular prisms whose crystal axes are perpendicular to each other and made of different materials.
  • the scan beam incident through the first surface of the polarizing prism 121c has an s-polarized beam that travels parallel to the scan beam at the boundary of the two triangular prisms, and a set angle with the scan beam. are separated into p-polarized beams, each exiting through the second side.
  • the difference from FIG. 5B is that, as shown in the lower part of FIG. 5C, the polarizing prism 121c is installed (placed) rotated by a set angle ( ⁇ /2) based on the center of the boundary surface of the two triangular prisms. .
  • ⁇ corresponds to the angle difference between the travel directions of the s-polarized beam and the p-polarized beam separately emitted from the center of the boundary surface, as shown in the upper figure.
  • the polarizing prism 121c is arranged in a state rotated by ⁇ /2, which is half of the angle difference ⁇ of the polarized beam.
  • ⁇ /2 which is half of the angle difference ⁇ of the polarized beam.
  • the displacement control unit is sequentially installed on the path of the p-polarized beam emitted through the second surface of the polarizing prism 121c, and first and second mirrors M1 and M2 change the beam path. ), and third and fourth mirrors ( M3,M4). In this way, the travel direction of the p-polarized beam passing through the second mirror M2 and the s-polarized beam passing through the fourth mirror M4 are adjusted to be parallel by the displacement control unit.
  • the displacement control unit may further include a position control unit (L) that adjusts the positions of the second mirror (M2) and the fourth mirror (M4) by moving them as a group.
  • a position control unit (L) that adjusts the positions of the second mirror (M2) and the fourth mirror (M4) by moving them as a group.
  • the displacement control unit makes the abnormal ray (p-polarized beam) parallel to the incident ray through the first and second mirrors (M1, M2) and normalizes the incident ray through the third and fourth mirrors (M3, M4). It serves to make the light beam (s-polarized beam) parallel to the incident light, and also moves the positions of the second mirror (M2) and the fourth mirror (M4) as a group through the position control unit (L). It can additionally play a role in controlling the displacement value of the beam.
  • FIG. 5D shows a fourth embodiment of the scan beam splitter.
  • the scan beam splitter 120-4 shown in FIG. 5D includes a polarizing prism 121d of a Senarmont prism structure and adjusts displacement. It may further include a unit and an optical path difference correction unit.
  • the polarizing prism 121d shown in FIG. 5D is implemented as a Senardmont prism and is composed of a combination of two triangular prisms whose crystal axes are perpendicular to each other and made of different materials.
  • the polarizing prism 121d is a p-polarized beam that travels parallel to the scan beam at the boundary of the two triangular prisms for the scan beam incident through the first surface, and an s-polarized beam that travels at a set angle with the scan beam. It is separated and emitted through the second side.
  • the crystal axis of the second triangular prism is perpendicular to the crystal axis of the first triangular prism.
  • the crystal axis of the second triangular prism has a vertical direction different from the crystal axis of the second triangular prism in FIG. 5B.
  • the incident ray is divided into an ordinary ray, which is emitted at an angle depending on the wavelength of light and the refraction of the material at the boundary between the two triangular prism materials, and an extra-ordinary ray, which is emitted parallel to the incident ray. separated.
  • the p-polarized beam that is emitted parallel to the incident beam corresponds to an abnormal ray
  • the s-polarized beam that travels at an angle to the incident beam corresponds to a normal ray
  • the configuration of the displacement control unit including M1, M2, and L2 and the optical path difference correction unit including M3 to M6 and L1 have the same structure and operating principle as those previously shown in FIG. 5B, and thus are related to this. Repeated explanations should be omitted.
  • Figure 5e shows a fifth embodiment of the scan beam splitter.
  • the scan beam splitter 120-5 shown in Figure 5e includes a polarizing prism 121e of a Senarmont prism structure, and Figure 5c As shown, it may further include a displacement control unit including M1 to M4 and L.
  • FIG. 5E the overall structure of the scan beam splitter is simplified as in FIG. 5C by rotating the polarizing prism shown in FIG. 5D by ⁇ /2.
  • the basic structure and operating principle are the same as those of FIG. 5C except that it is implemented with a Senardmont prism, so repeated description thereof will be omitted.
  • Figure 5f shows a sixth embodiment of the scan beam splitter.
  • the scan beam splitter 120-6 shown in Figure 5f includes a polarizing prism 121f of a Wollaston prism structure, and in Figure 5c. As shown, it may further include a displacement control unit including M1 to M4 and L.
  • the polarizing prism 121f is composed of a combination of two triangular prisms whose crystal axes are perpendicular to each other and made of different materials.
  • the scan beam incident through the first surface is adjusted at a set angle with respect to the direction of the scan beam at the boundary surface of the two triangular prisms. It is separated into an s-polarized beam and a p-polarized beam, which proceed symmetrically to each other, and are emitted through the second surface.
  • the incident ray is transmitted at the interface between the two materials.
  • the incident ray is transmitted at the interface between the two materials.
  • it is divided into normal rays and abnormal rays that emit at an angle.
  • the structure of Figure 5f has the advantage that, unlike Figures 5c or 5e, there is no need to separately rotate the polarizing prism.
  • the basic structure and operating principle of the displacement control unit implemented including M1 to M4 and L are the same as those of FIG. 5C described above, so detailed description will be omitted.
  • the displacement values of the two beams can be adjusted by moving M2 and M4 simultaneously as a group.
  • Figure 5g shows the seventh embodiment of the scan beam splitter
  • the scan beam splitter 120-7 shown in Figure 5g includes the first and second polarizing beam splitters (PBS1 and PBS2), and the first to second polarizing beam splitters (PBS1, PBS2). It is implemented including 6 mirrors (M1 to M6).
  • the scan beam splitter 120g may further include a mirror moving unit L1 and a position adjusting unit L2.
  • the first polarizing beam splitter (PBS1) reflects the s-polarized beam component from the incident scan beam and transmits the p-polarized beam component.
  • the first and second mirrors M1 and M2 are sequentially installed on the path of the s-polarized beam reflected from the first polarizing beam splitter PBS1 to change the beam path by 90 degrees.
  • the third to sixth mirrors (M3 to M6) are sequentially installed in a ' ⁇ ' shape on the path of the p-polarized beam transmitted from the first polarizing beam splitter (PBS1) and change the beam path by 90 degrees.
  • the second polarizing beam splitter uses the s-polarized beam reflected using the first mirror (M1) and the second mirror (M2) and the p-polarized beam reflected using the third to sixth mirrors (M3 to M6).
  • a polarized beam is incident on each of the first and second surfaces.
  • the second polarizing beam splitter (PBS2) reflects the s-polarized beam incident on the first side and transmits the p-polarized beam incident on the second side, thereby dividing the reflected s-polarized beam and the transmitted p-polarized beam. Make sure to emit light in a parallel direction through the third side.
  • the s-polarized beam and p-polarized beam emitted in this way have a direction parallel to the incident ray.
  • the mirror moving unit (L1) groups the fourth mirror (M4) and the fifth mirror (M5), which are spaced apart in parallel with the third mirror (M3) and the sixth mirror (M6), and moves them up and down
  • the optical path length of the p-polarized beam can be set to be the same as the optical path length of the s-polarized beam.
  • the position adjuster (L2) can adjust the position of the second mirror (M2) left and right to adjust the displacement of the s-polarized beam emitted through the second polarizing beam splitter (PB2).
  • FIGS. 5A to 5G The various structures of the scan beam splitter 120 (120-1, 120-2, 120-3, 120-4, 120-5, 120-6, 120-7) shown in FIGS. 5A to 5G according to the present invention. It is applicable to all of the first to fourth embodiments (FIGS. 1, 2, 3, and 4).
  • two polarized beams (s-polarized beam and p-polarized beam) emitted side by side by the scan beam splitter 120 are transmitted to the scan unit 130.
  • the beam incident on the scan unit 130 is transmitted to the object through the horizontal scan mirror 131 (hereinafter, x-scan mirror) and the vertical scan mirror 132 (hereinafter, y-scan mirror).
  • the scan unit 130 includes an x-scan mirror 131 and a y-scan mirror 132 to control the scanning position of the scan beam with respect to the object.
  • the scan unit 130 uses the scan mirror to control the incident scan beam in the horizontal direction (x direction) and vertical direction (y direction) and transmits it to the object.
  • the scan unit 130 receives a scan beam consisting of two polarized beams emitted side by side from the scan beam splitter 120 and projects it onto the object, and the scanning position of the scan beam with respect to the object is adjusted in the horizontal and vertical directions. It is controlled and transmitted to the object.
  • the scanning unit 130 uses a mirror scanner.
  • the mirror scanner has an It consists of an x-y scanner.
  • the scanning unit is not limited to a mirror scanner, and similar means or other known scanning means may be used.
  • an x-scan mirror and a y-scan mirror instead of an x-space modulation scanner and a y-space modulation scanner can be replaced.
  • the scan unit 130 may be operated by receiving a scanning control signal from a scan control unit (not shown) within the signal processing unit 150.
  • the scan control unit (not shown) may generate a scanning control signal to control the scanning position of the scan unit 130.
  • the scanning control signal may include a horizontal scan signal and a vertical scan signal for controlling the x-scan mirror and the y-scan mirror in the horizontal and vertical directions, respectively.
  • the horizontal scan signal is a signal for sequentially moving the scan position in the horizontal direction (x-axis direction) by preset distance units, and has a period T for scan movement in arbitrary distance units.
  • the vertical scan signal is a control signal that enables a horizontal scan operation for the next y position when the horizontal scan operation in the x-axis direction for an arbitrary y position is completed, and its period is larger than the horizontal scan signal.
  • the optical axes of the first and second curved beams are rotated as the scan mirror rotates, and the scan beam pattern with the rotated optical axes is projected onto the object.
  • the scan unit 130 can project an interference beam (scan beam by the scan unit) between the first and second curvature beams onto an object using a scan mirror.
  • the s-wave component and the p-wave component for each curvature beam have a structure in which they are separated vertically by the previous scan beam splitter 120, and the interference beam may also have a structure in which the two polarized waves are separated vertically.
  • the scan unit 130 has a structure using a horizontal scan mirror 131 and a vertical scan mirror 132 as shown in FIG. 1, as well as a horizontal scan mirror 331 and a translation stage 332 as shown in FIG. 3, which will be described later. It is also possible to change the scan unit structure using .
  • the scan unit structure when replacing the horizontal scan mirror 331 with a spatial modulation scanner, can also be changed using a spatial modulation scanner and a translation stage 332. do.
  • the horizontal scan mirror 131 and the vertical scan mirror 132 can be replaced with a horizontal spatial modulation scanner and a vertical spatial modulation scanner, respectively.
  • the scan unit 130 can be implemented by a combination of a horizontal scan mirror and a vertical scan mirror, a combination of a horizontal scan mirror and a translation stage, and a combination of a spatial light modulator and a translation stage.
  • Other embodiments of the scan unit will be described in detail later with reference to FIG. 3.
  • the scan beam irradiated by the scan unit 130 is projected onto an object and then reflected or fluorescently incident on the light detection unit 140.
  • the scan beam consists of two polarized beams (s-polarized beam and p-polarized beam) split by the scan beam splitter 120.
  • the light detection unit 140 separates and detects the s-polarized beam and the p-polarized beam from the beam reflected or fluorescent from the object after being projected onto the object by the scanning unit 130.
  • the light detection unit 140 detects an s-polarized beam and a p-polarized beam from the beam reflected from the object.
  • the reflector may correspond to ordinary objects (e.g., people, objects, objects, etc.) that reflect light from an incident light source.
  • the light detection unit 140 receives the fluorescent beam from the object and separates it into two polarized beams for detection.
  • the phosphor may correspond to various objects having fluorescence.
  • the light detection unit 140 transmits the separately detected s-polarized beam and the p-polarized beam to the signal processing unit 150.
  • the light detection unit 140 includes a first concentrator 141a, a first polarizer 142a, a first photodetector 143a, a second concentrator 141b, a second polarizer 142b, and a first concentrator 141b. Includes 2 photodetectors 143b.
  • the first concentrator 141a is disposed in a direction biased to the optical axis of the beam projected onto the object, and condenses the reflected or fluorescent beam after being projected onto the object.
  • This first concentrator 141a may be implemented as a condenser lens.
  • the first polarizer 142a passes only the s-polarized beam component in the spatially integrated beam through the first concentrator 141a. That is, the first polarizer 142a is disposed behind the first concentrator 141a and transmits only the s-polarized beam component of the beam collected by the first concentrator 141a.
  • the first photodetector 143a detects the s-polarized beam that has passed through the first polarizer 142a and transmits it to the first signal processing unit 151.
  • the second concentrator 141b is disposed in a direction that is biased to the optical axis of the beam projected to the object, but is disposed in a different position from the first concentrator 141a, and condenses the reflected or fluorescent beam after being projected to the object.
  • This second concentrator 141b may be implemented as a condenser lens.
  • the second concentrator 141b may be arranged symmetrically or asymmetrically with the first concentrator 141a.
  • the second polarizer 142b may be disposed from the spatially integrated beam through the second concentrator 141b. Only the p-polarized beam component is passed. That is, the second polarizer 142b is disposed behind the second concentrator 141b and transmits only the p-polarized beam component of the beam collected by the second concentrator 141b.
  • the second photodetector 143b detects the p-polarized beam that has passed through the second polarizer 142b and transmits it to the second signal processing unit 152.
  • the structure of the light detection unit 140 in the present invention is not necessarily limited to FIG. 1, and can also be changed to the structure of FIG. 2, which will be described later. This will be explained in detail later.
  • the signal processing unit 150 processes signals of the s-polarized beam and the p-polarized beam separately detected by the light detection unit 150 to generate a hologram for the object.
  • the scan beam generated by the scan beam generator 110 is split into two polarized beams according to polarization, and then the divided two polarized beams are used as scan beams to scan the object, so the scan beam Compared to the case of scanning the object as is without dividing it, twice the sampling is possible compared to the same time, and a hologram of the object can be created at twice the speed.
  • Figure 6 is a diagram explaining the operation of a signal processing unit according to an embodiment of the present invention.
  • the signal processing unit 151 includes a first signal processing unit 151, a second signal processing unit 152, and a cross-array signal processing unit 153.
  • the structure and operating principle of the signal processing unit 150 can be equally applied to the systems (FIGS. 2, 3, and 4) according to the second to fourth embodiments of the present invention.
  • the first signal processor 151 processes the signal of the s-polarized beam detected by the first photodetector 143a and sends it to the cross-array processor 153
  • the second signal processor 142 processes the signal of the s-polarized beam detected by the first photodetector 143a.
  • the signal of the p-polarized beam detected is processed and sent to the cross-array processing unit 153. These operations may occur simultaneously.
  • the cross-array signal processing unit 150 synthesizes the hologram signal processed in the first signal processing unit 151 and the hologram signal processed in the second signal processing unit 152 by alternating them line by line. Creates a hologram of an object.
  • the scan beam generated by the scan beam generator 110 is divided into two beams (s-polarized beam, p-polarized beam) according to polarization, and the two divided polarized beams are simultaneously projected onto the object once. Since two lines of signal can be sampled (scanned) in (unit time), the number of samples in the y direction is doubled compared to the case of scanning without splitting the scan beam, and a hologram of an object can be generated at twice the speed. there is.
  • the first photodetector 143a generates a current signal proportional to the intensity of the concentrated light and transmits it to a two-channel lock-in amplifier, and the two-channel lock-in amplifier demodulates the current signal.
  • the object's in-phase and quadrature-phase holographic information is extracted into electrical signals.
  • a two-channel lock-in amplifier can be implemented by converting it into a digital signal through an analog to digital converter (ADC) and processing it on a computer.
  • ADC analog to digital converter
  • the extracted electrical signal is converted into a digital signal and transmitted to a digital computer, and the digital computer synthesizes the digital signals of the real and imaginary parts using complex number synthesis and stores them according to each scanning position to obtain the complex number of the object.
  • Hologram information is recorded. At this time, the recorded hologram is called the first hologram.
  • the second photodetector 143b generates a current signal proportional to the intensity of the focused light and transmits it to a two-channel lock-in amplifier, and the two-channel lock-in amplifier demodulates the current signal.
  • the object's in-phase and quadrature-phase holographic information is extracted into electrical signals.
  • a two-channel lock-in amplifier can be implemented by converting it into a digital signal through an analog to digital converter (ADC) and processing it on a computer.
  • ADC analog to digital converter
  • the extracted electrical signal is converted into a digital signal and transmitted to a digital computer, and the digital computer synthesizes the digital signals of the real and imaginary parts using complex number synthesis and stores them according to each scanning position to obtain the complex number of the object.
  • Hologram information is recorded.
  • the recorded hologram is called the second hologram.
  • the signal processing unit 150 can synthesize the first hologram and the second hologram by alternating them to implement a scan that is twice as long as the scan by the horizontal scan mirror.
  • the polarization splitting double scanning holography system 200 largely includes a scan beam generator 110, a scan beam splitter 120, a scan unit 130, and a light detection unit ( 240) and a signal processing unit 150. Redundant descriptions of components having the same symbols as those in FIG. 1 will be omitted.
  • the basic structure of the device is the same as that of the first embodiment, but the configuration of the light detection unit 240 is different, and the operating principle is as follows.
  • the light detection unit 240 includes a first light splitter 241, a second light splitter 242, a first concentrator 243a, a second concentrator 243b, a first light detector 244a, and a second light detector 243b. Includes 2 photodetectors 244b.
  • the first light splitter 241 is disposed on the optical axis of the light projected to the object, receives the reflected or fluorescent beam from the object, and reflects it to the outside.
  • the first light splitter 241 can reflect a portion of the reflected or fluorescent beam from the object and transmit it to the second light splitter 242.
  • the first optical splitter 241 can be implemented as a general beam splitter.
  • the second light splitter 242 receives the light reflected from the first light splitter 241, transmits the p-polarized beam component of the incident beam, and reflects the s-polarized beam component.
  • This second light splitter 242 may be implemented as a polarization beam splitter (PBS).
  • PBS polarization beam splitter
  • the s-polarized beam is reflected from the second light splitter 242 and transmitted to the first concentrator 243a, and p- The polarized beam passes through and is delivered to the second concentrator 243b.
  • the first concentrator 243a condenses the s-polarized beam component reflected by the second light splitter 242, and the second concentrator 243b condenses the p-polarized beam component transmitted by the second light splitter 242. do.
  • These first and second concentrators 243a and 243b may be implemented as condensing lenses.
  • the first photodetector 244a detects a spatially integrated beam (s-polarized beam) through the first concentrator 243a and transmits it to the first signal processor 151 in the signal processor 150. Additionally, the second photodetector 244b detects a spatially integrated beam (p-polarized beam) through the second concentrator 243b and transmits it to the second signal processor 152 in the signal processor 150.
  • first and second photodetectors 244a and 244b respectively generate first and second electrical signals in proportion to the intensity of transmitted light.
  • the first photodetector 244a transmits the first electrical signal to the first signal processor 151
  • the second photodetector 244b transmits the second electrical signal to the second signal processor 152.
  • the second beam splitter 242 can be replaced with a beam splitter (BS) instead of the polarization beam splitter (PBS), and in this case, the role of the polarization beam splitter (PBS) is through the combination of the beam splitter (BS) and the two polarizers. can be performed. This is explained through Figure 2b.
  • BS beam splitter
  • PBS polarization beam splitter
  • the light detection unit 240 includes a first light splitter 241, a second light splitter 242, a first polarizer 245a, a second polarizer 245b, a first concentrator 243a, and a second concentrator ( 243b), a first photodetector 244a, and a second photodetector 244b.
  • reference numerals 241, 244a, and 244b perform the same functions as those in FIG. 2A, so duplicate description thereof will be omitted.
  • the second light splitter 242 is a BS (Beam Splitter), which receives the light reflected from the first light splitter 241 and splits it by transmitting part of the incident beam and reflecting part of it.
  • BS Beam Splitter
  • the first polarizer 245a receives the beam reflected from the second light splitter 242 and passes only the s-polarized beam component
  • the second polarizer 245b receives the beam transmitted from the second light splitter 242 and passes only the s-polarized beam component. Only the polarized beam component passes through.
  • the first concentrator 243a condenses the s-polarized beam component that has passed through the first polarizer 245a
  • the second concentrator 243b condenses the p-polarized beam component that has passed through the second polarizer 245b.
  • the subsequent operations of the first and second photo detectors 244a and 244b are the same as those described above.
  • the polarization splitting double scanning holography system 300 largely includes a scan beam generator 110, a scan beam splitter 120, a scan unit 330, and a light detection unit ( 140) and a signal processing unit 150. Redundant descriptions of components having the same symbols as those in FIG. 1 will be omitted.
  • the basic structure of the device is the same as the first embodiment, but the configuration of the scan unit 330 is different, and the operating principle is as follows.
  • the scan unit 330 is installed at the rear end of the scan beam splitter 120 to control the scanning position of the scan beam for the object in the horizontal and vertical directions and divides the scan beam incident from the scan beam splitter 120. It includes a scan mirror 331 that controls the object in the horizontal direction (x direction) and transmits it to the object, and a translation stage 332 that moves the object in the vertical direction (y direction) at the rear end of the object. .
  • a scan beam including two polarized beams emitted from the scan beam splitter 330 is incident on the scan unit 330.
  • the beam incident on the scanning unit 330 is transmitted to the object through the scanning mirror 331.
  • the scan mirror 331 scans the object in the x-direction
  • the translation stage 332 located at the rear of the object scans the object in the y-direction.
  • the scan mirror 331 controls the scan beam incident from the scan beam splitter 120 in the horizontal direction and transmits it to the object.
  • the translation stage 332 is installed at the rear of the object and directly moves the object receiving the scan beam in the vertical direction, enabling y-direction scanning of the object through the scan beam.
  • This translation stage 332 corresponds to a moving objective plate that implements an objective plate on which an object is placed to be movable in the y-axis direction. Although this translation stage 332 is physically separated from the scan mirror 331, it is a means of controlling the scanning position of the beam with respect to the object, so it is a component of the scan unit 330 together with the scan mirror 331. Included.
  • the scan unit 330 uses the scan mirror 331 and the translation stage 332 to control the scan beam in the horizontal direction (x direction) and the vertical direction (y direction) based on the object.
  • the scanning unit 330 uses a mirror scanner.
  • the mirror scanner has an x-scan mirror 321 that scans an object in the x direction (left and right directions) around the y axis.
  • the scanning unit is not limited to a mirror scanner, and similar means or other known scanning means may be used.
  • the scan unit 330 may be operated by receiving a scanning control signal from a scan control unit (not shown) within the signal processing unit 150.
  • the scan control unit (not shown) generates a scanning control signal to control the scanning position of the scan unit 330.
  • the scanning control signal may include a horizontal scan signal and a vertical scan signal for controlling the scan mirror 331 and the translation stage 332 in the horizontal and vertical directions, respectively.
  • the horizontal scan signal is a signal for sequentially moving the scan position in the horizontal direction (x-axis direction) by preset distance units, and has a period T for scan movement in arbitrary distance units.
  • the vertical scan signal which is a signal that moves the translation stage 332 in the vertical direction, is a translation that enables a horizontal scan operation for the next y position when the horizontal scan operation in the x-axis direction for an arbitrary y position is completed.
  • a stage control signal its period is larger than that of the horizontal scan signal.
  • the scan mirror 331 can be replaced with a spatial modulation scanner.
  • the scanning unit 330 may be implemented including a spatial modulation scanner 331 and a translation stage 332.
  • the spatial modulation scanner will be described by assigning code 331.
  • the beam incident on the scanning unit 330 is transmitted to the object through the spatial modulation scanner 331.
  • the spatial modulation scanner 331 scans the object in the x-direction
  • the translation stage 332 located at the rear of the object scans the object in the y-direction.
  • the spatial modulation scanner 331 controls the scan beam incident from the scan beam splitter 120 in the horizontal direction and delivers it to the object, and the translation stage 132 receives the scan beam from the rear end of the object.
  • the spatial modulation scanner 331 controls the scan beam incident from the scan beam splitter 120 in the horizontal direction and delivers it to the object, and the translation stage 132 receives the scan beam from the rear end of the object.
  • the scan unit 330 may control the scan beam in the horizontal direction (x direction) and vertical direction (y direction) based on the object using the spatial modulation scanner 331 and the translation stage 332. there is.
  • the spatial modulation scanner modulates the spatial distribution of the incident beam and operates to scan the beam in a specific direction.
  • a spatial modulation scanner can be implemented with a spatial light modulator (SLM), a digital micromirror device (DMD), an acoustic-optic deflector, etc. Accordingly, the spatial modulation scanner is configured to include one type of spatial modulation scanner selected from SLM, DMD, and acoustic-optical deflector.
  • SLM spatial light modulator
  • DMD digital micromirror device
  • acoustic-optic deflector etc. Accordingly, the spatial modulation scanner is configured to include one type of spatial modulation scanner selected from SLM, DMD, and acoustic-optical deflector.
  • FIG. 7 is a diagram explaining the operating principle of a spatial modulation scanner.
  • the spatial modulation scanner is an element that can replace the scan mirror 131 in the scan unit 330 of FIG. 3 and corresponds to a horizontal spatial modulation scanner that scans an object in the x direction.
  • Figure 7 explains the principle of this horizontal spatial modulation scanner.
  • the spacing of the grating pattern (P) changes sequentially over time according to the input of a scanning control signal by a scan control unit (not shown), thereby controlling the scan beam in the horizontal direction. can do.
  • the spacing of the grating pattern formed in the horizontal spatial modulation scanner by the electrical signal is adjusted over time, allowing the incident beam to move in the x-direction.
  • the spacing between patterns becomes narrower, the light is bent at a greater angle.
  • the scan beam can move in the horizontal direction by adjusting the size of the gap between the grating patterns (P) formed along the horizontal direction according to the scanning control signal.
  • the direction of the incident beam is electrically controlled.
  • the scan unit 330 operates by receiving a scanning control signal from the scan control unit (not shown) in the signal processing unit 150.
  • the scanning control signal for the spatial modulation scanner 331 may include a signal that sequentially changes the spacing size of the grating pattern over time.
  • the scanning control signal for the translation stage 332 may include a signal that moves the translation stage 332 in the vertical direction over time.
  • the scanning control signal may include a horizontal scan signal and a vertical scan signal for controlling the scan beam in the horizontal and vertical directions, respectively.
  • the horizontal scan signal for controlling the scan beam incident on the spatial modulation scanner 331 in the horizontal direction is a signal for sequentially moving the scan position in the horizontal direction (x-axis direction) by preset distance units, and is a random distance unit. It has a period T for scan movement.
  • the vertical scan signal which is a signal that moves the translation stage 332 in the vertical direction, is a translation that enables a horizontal scan operation for the next y position when the horizontal scan operation in the x-axis direction for an arbitrary y position is completed. As a stage control signal, its period is larger than that of the horizontal scan signal.
  • both the horizontal scan mirror 131 and the vertical scan mirror 132 of FIG. 1 can be replaced with a spatial modulation scanner.
  • the scanning unit 120 is a horizontal spatial modulation scanner (x-space) that scans the object in the x direction. It can be implemented as an x-y scanner with a modulation scanner) and a vertical spatial modulation scanner (y-space modulation scanner) scanning in the y direction.
  • Figure 8 is a diagram explaining the operating principle of the horizontal and vertical spatial modulation scanner. As shown in FIG. 8, in a vertical or horizontal spatial modulation scanner, the spacing of the grating pattern (P) changes sequentially over time according to the input of a scanning control signal by a scan control unit (not shown), thereby directing the scan beam vertically. Or control in the horizontal direction.
  • a scan control unit not shown
  • the spacing of the grating pattern formed in the spatial modulation scanner by the electrical signal is adjusted over time, allowing the incident beam to move in the x-direction.
  • the spacing between patterns becomes narrower, the light is bent at a greater angle.
  • the scan beam can move in the horizontal direction by adjusting the size of the gap between the grating patterns (P) formed along the horizontal direction according to the scanning control signal.
  • the scan beam can move in the vertical direction by adjusting the size of the gap between the grating patterns (P) formed along the vertical direction according to the scanning control signal.
  • the direction of the incident beam is electrically controlled.
  • the polarization splitting double scanning holography system 400 largely includes a scan beam generator 110, a scan beam splitter 120, a scan unit 330, and a light detection unit ( 240) and a signal processing unit 150. Redundant descriptions of components having the same symbols as those in FIG. 1 will be omitted.
  • the basic structure of the device is the same as that of the first embodiment, but the configurations of the scanning unit 330 and the light detection unit 240 are different.
  • the operation of the scanning unit 330 has been described in detail with reference to FIG. 3, and the operation of the light detection unit 240 has been described in detail with reference to FIG. 2A, so duplicate descriptions will be omitted.
  • the first to fourth embodiments of the present invention may additionally include a circular polarization conversion unit.
  • the role of this circular polarization converter can be implemented through the configuration of ⁇ /4 wave plates (WP; WP1, WP2) inserted with dotted lines in FIGS. 1 and 2A, respectively.
  • WP ⁇ /4 wave plates
  • FIGS. 3 and 4A a circular polarization conversion unit like that of FIGS. 1 and 2A may also be applied.
  • FIG. 1 as a representative example, the case of FIG. 1 includes a first ⁇ /4 wave plate (WP1) and a second ⁇ /4 wave plate (WP2).
  • WP1 first ⁇ /4 wave plate
  • WP2 second ⁇ /4 wave plate
  • the first ⁇ /4 wave plate WP1 is installed between the scan unit 130 and the object, converts the scan beam into circularly polarized light, and projects it onto the object.
  • the second ⁇ /4 wave plate WP2 is installed between the object and the light detection unit 140 to convert the circularly polarized beam back into linearly polarized light and provide it to the light detection unit 140.
  • the second ⁇ /4 wave plate WP2 is individually installed between the object and the first light collection unit 141a, and between the object and the second light collection unit 141b.
  • a method of splitting a scan beam into two according to polarization and individually detecting beams corresponding to the polarization is to separate a first hologram and a second hologram in the case of an object whose reflection or transmittance depends on polarization. There may be differences depending on polarization.
  • a wave plate is placed between the scan unit 130 and the object (object) to convert the polarization of the scan beam into circular polarization and project it onto the object, and between the object (object) and the condenser 141.
  • the first ⁇ /4 wave plate WP1 is installed in the path between the scanning unit 130 and the object, more specifically, between the scanning unit 130 and the first optical splitter 241.
  • the second ⁇ /4 wave plate WP2 may be installed between the object and the light detection unit 240, more specifically, between the first and second light splitters 241 and 242 on the corresponding path.
  • Figure 2c is a modified example of Figure 2a, and the same effect as Figure 2a can be obtained even when a ⁇ /4 wave plate (WP) is inserted between the first light splitter 241 of the light detection unit 140 and the object. there is.
  • a hologram of an object can be acquired at ultra-high speed, faster than the scanning speed of a scanning mirror.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

La présente invention concerne un système d'holographie à balayage double et à division de polarisation pour un réflecteur. Selon la présente invention, le système d'holographie à balayage double et à division de polarisation comprend : une unité de génération de faisceau de balayage qui module la phase d'un premier faisceau divisé à partir d'une source de lumière afin de transformer le premier faisceau en un premier faisceau de courbure et de transformer un second faisceau en un second faisceau de courbure, et qui amène ensuite les premier et second faisceaux de courbure à interférer l'un avec l'autre pour former un faisceau de balayage ; une unité de division de faisceau de balayage qui divise le faisceau de balayage en un faisceau polarisé s et un faisceau polarisé p et qui projette les faisceaux côte à côte ; une unité de balayage qui reçoit un faisceau de balayage comprenant deux faisceaux polarisés émis côte à côte, qui projette le faisceau de balayage sur un objet, et qui commande la position de balayage du faisceau de balayage par rapport à l'objet dans les directions horizontale et verticale pour transmettre le faisceau de balayage à l'objet ; et une unité de photodétection qui sépare et détecte le faisceau polarisé s et le faisceau polarisé p à partir du faisceau réfléchi ou émis par fluorescence par l'objet ; et une unité de traitement de signal qui traite les signaux des faisceaux polarisé s et polarisé p détectés pour générer un hologramme de l'objet. Selon la présente invention, l'hologramme de l'objet peut être acquis à une vitesse ultra-élevée, plus rapide que la vitesse de balayage d'un miroir de balayage.
PCT/KR2023/011943 2022-09-28 2023-08-11 Système d'holographie à balayage double et à division de polarisation pour réflecteur WO2024071667A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020220123459A KR102551611B1 (ko) 2022-09-28 2022-09-28 반사체에 대한 편광분할 더블 스캐닝 홀로그래피 시스템
KR10-2022-0123459 2022-09-28

Publications (1)

Publication Number Publication Date
WO2024071667A1 true WO2024071667A1 (fr) 2024-04-04

Family

ID=87186129

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2023/011943 WO2024071667A1 (fr) 2022-09-28 2023-08-11 Système d'holographie à balayage double et à division de polarisation pour réflecteur

Country Status (2)

Country Link
KR (1) KR102551611B1 (fr)
WO (1) WO2024071667A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102551611B1 (ko) * 2022-09-28 2023-07-06 세종대학교 산학협력단 반사체에 대한 편광분할 더블 스캐닝 홀로그래피 시스템

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100056000A (ko) * 2008-11-19 2010-05-27 한국표준과학연구원 결맞은 광섬유 테이퍼를 이용한 간섭무늬 안정화된 간섭계
KR20130081127A (ko) * 2012-01-06 2013-07-16 세종대학교산학협력단 홀로그램 레코딩 장치
JP5626687B2 (ja) * 2009-06-11 2014-11-19 国立大学法人 筑波大学 ２ビーム型光コヒーレンストモグラフィー装置
KR20190096352A (ko) * 2016-12-16 2019-08-19 Horiba France Sas 차동 편광 간섭계를 이용하여 에칭 깊이를 측정하는 방법 및 기기, 그리고 이러한 측정 기기를 포함하는 글로우 방전 분광 측정 장치
KR20210048427A (ko) * 2019-10-23 2021-05-03 세종대학교산학협력단 스캔 거울과 트랜슬레이션 스테이지를 사용한 인라인 플라잉 오버 빔 패턴 스캐닝 홀로그램 현미경 장치
KR102551611B1 (ko) * 2022-09-28 2023-07-06 세종대학교 산학협력단 반사체에 대한 편광분할 더블 스캐닝 홀로그래피 시스템

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52108313A (en) * 1976-03-10 1977-09-10 Kawasaki Steel Co Production of si semikilled ingot having good surface

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100056000A (ko) * 2008-11-19 2010-05-27 한국표준과학연구원 결맞은 광섬유 테이퍼를 이용한 간섭무늬 안정화된 간섭계
JP5626687B2 (ja) * 2009-06-11 2014-11-19 国立大学法人 筑波大学 ２ビーム型光コヒーレンストモグラフィー装置
KR20130081127A (ko) * 2012-01-06 2013-07-16 세종대학교산학협력단 홀로그램 레코딩 장치
KR20190096352A (ko) * 2016-12-16 2019-08-19 Horiba France Sas 차동 편광 간섭계를 이용하여 에칭 깊이를 측정하는 방법 및 기기, 그리고 이러한 측정 기기를 포함하는 글로우 방전 분광 측정 장치
KR20210048427A (ko) * 2019-10-23 2021-05-03 세종대학교산학협력단 스캔 거울과 트랜슬레이션 스테이지를 사용한 인라인 플라잉 오버 빔 패턴 스캐닝 홀로그램 현미경 장치
KR102551611B1 (ko) * 2022-09-28 2023-07-06 세종대학교 산학협력단 반사체에 대한 편광분할 더블 스캐닝 홀로그래피 시스템

Also Published As

Publication number Publication date
KR102551611B1 (ko) 2023-07-06

Similar Documents

Publication Publication Date Title
WO2014163322A1 (fr) Dispositif d'imagerie stéréoscopique
WO2024071667A1 (fr) Système d'holographie à balayage double et à division de polarisation pour réflecteur
WO2024071668A1 (fr) Système d'holographie à balayage double et à division de polarisation pour corps de transmission
WO2022055194A1 (fr) Dispositif microscope holographique à balayage de motif de faisceau de survol utilisant un miroir de balayage et une platine de translation
WO2019124769A1 (fr) Système optique et appareil d'affichage habitronique le comprenant
WO2017204494A1 (fr) Affichage tête haute pour véhicule
WO2018166038A1 (fr) Dispositif de source de lumière et système de projection
WO2018155766A1 (fr) Visualisation tête haute pour véhicule
WO2020080692A1 (fr) Appareil de tomographie par cohérence optique et procédé de génération d'image utilisant ce dernier
US7502154B2 (en) Spatial light modulator alignment
US20230341814A1 (en) Optical scanning holography system
WO2019088370A1 (fr) Dispositif d'inspection d'un objet à grande vitesse sur une grande surface
WO2018164356A1 (fr) Dispositif et procédé de stabilisation de distribution de clé quantique
US4642701A (en) Device of switching a scanning beam diameter
WO2024101604A1 (fr) Système d'acquisition d'hologrammes de différentes couleurs
WO2017003141A1 (fr) Projecteur à balayage
US5420714A (en) Device for beam division
WO2022035068A1 (fr) Système d'holographie à phase géométrique à balayage en ligne pour objet transmissif
EP3465330A1 (fr) Affichage tête haute pour véhicule
WO2021054680A1 (fr) Système d'holographie à balayage en ligne pour phosphore et émetteur
KR102625393B1 (ko) 반사체에 대한 각도 기울임을 사용한 편광분할 더블 스캐닝 홀로그래피 시스템
KR102625392B1 (ko) 투과체에 대한 각도 기울임을 사용한 편광분할 더블 스캐닝 홀로그래피 시스템
WO2022225177A1 (fr) Dispositif de microscope à hologramme à balayage à faisceau en survol utilisant un scanner à modulation spatiale et une platine de translation
JP2572111B2 (ja) レーザ干渉測定装置
WO2017061706A1 (fr) Système de marquage laser et procédé de marquage laser l'utilisant

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23872790

Country of ref document: EP

Kind code of ref document: A1