WO2024070063A1 - Vibration device - Google Patents

Vibration device Download PDF

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Publication number
WO2024070063A1
WO2024070063A1 PCT/JP2023/021009 JP2023021009W WO2024070063A1 WO 2024070063 A1 WO2024070063 A1 WO 2024070063A1 JP 2023021009 W JP2023021009 W JP 2023021009W WO 2024070063 A1 WO2024070063 A1 WO 2024070063A1
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WO
WIPO (PCT)
Prior art keywords
vibration device
vibration
light
transmitting body
connection portion
Prior art date
Application number
PCT/JP2023/021009
Other languages
French (fr)
Japanese (ja)
Inventor
佑果 田中
友基 石井
滋久 矢後
Original Assignee
株式会社村田製作所
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Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Publication of WO2024070063A1 publication Critical patent/WO2024070063A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/08—Waterproof bodies or housings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details

Definitions

  • This disclosure relates to a vibration device.
  • Patent Document 1 discloses a droplet removal device that includes an optical element with a dome portion, a vibration member that generates bending vibration in the dome portion, a vibration control device that controls the vibration member, and a drip-proof seal that prevents droplets from entering the device.
  • the droplet removal device described in Patent Document 1 still has room for improvement in terms of reducing the stress on the translucent body while suppressing the infiltration of droplets into the device.
  • the present disclosure aims to provide a vibration device that can reduce the stress on the translucent body while suppressing the infiltration of liquid droplets into the interior.
  • a vibration device includes: A vibrating body; a piezoelectric element located at one end of the vibrating body in a first direction; a light-transmitting body located at the other end of the vibrating body in the first direction; a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction; a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion; a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body; The thickness of the first member is greater than or equal to the thickness of the second member.
  • a vibration device includes: A vibrating body; a piezoelectric element located at one end of the vibrating body in a first direction; a light-transmitting body located at the other end of the vibrating body in the first direction; a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction; a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion; a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body; The Young's modulus of the first member is equal to or less than the Young's modulus of the second member.
  • the vibration device of the above aspect can reduce the stress on the translucent body while suppressing the infiltration of droplets into the interior.
  • FIG. 1 is a perspective view showing a vibration device according to an embodiment of the present disclosure.
  • FIG. 2 is a cross-sectional view taken along line II-II in FIG.
  • FIG. 3 is a partial enlarged view of FIG. 2 for explaining a first member
  • FIG. 3 is a partial enlarged view of FIG. 2 for explaining a second member
  • 11 is a graph showing the relationship between the thickness of the first member and the second member and the maximum displacement amount of the lens apex.
  • 6 is a graph showing the relationship between the thickness of the first member and the second member and the maximum thermal stress applied to the lens.
  • 1 is a contour diagram showing thermal stress on a lens.
  • FIG. 11 is a graph showing the relationship between the Young's modulus of the first member and the second member and the maximum displacement amount of the lens apex.
  • 5 is a graph showing the relationship between the Young's modulus of the first member and the second member and the maximum thermal stress applied to the lens.
  • FIG. 2 is a cross-sectional view showing a first modified example of the vibration device of FIG. 1 .
  • FIG. 4 is a cross-sectional view showing a second modified example of the vibration device of FIG. 1 .
  • FIG. 4 is a cross-sectional view showing a third modified example of the vibration device of FIG. 1 .
  • FIG. 13 is a cross-sectional view showing a fourth modified example of the vibration device of FIG. FIG.
  • FIG. 13 is a cross-sectional view showing a fifth modified example of the vibration device of FIG.
  • FIG. 13 is a cross-sectional view showing a sixth modified example of the vibration device of FIG.
  • FIG. 13 is a cross-sectional view showing a seventh modified example of the vibration device of FIG.
  • FIG. 17 is a cross-sectional view taken along line XVII-XVII in FIG. 13 .
  • FIG. 13 is a cross-sectional view showing an eighth modified example of the vibration device of FIG.
  • the vibration device comprises: A vibrating body; a piezoelectric element located at one end of the vibrating body in a first direction; a light-transmitting body located at the other end of the vibrating body in the first direction; a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction; a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion; a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body; The thickness of the first member is greater than or equal to the thickness of the second member.
  • the first member and the second member act as a buffer layer that attenuates the thermal stress caused by the difference in the linear expansion coefficient of each of the translucent body, the vibrating body, and the pressing portion. This makes it possible to improve the bonding reliability between the translucent body and the vibrating body, as well as the bonding reliability between the translucent body and the pressing portion.
  • a vibration device is the vibration device according to the first aspect,
  • the Young's modulus of the first member is equal to or less than the Young's modulus of the second member.
  • the vibration device of the second aspect can more reliably improve the reliability of the connection between the translucent body and the vibrating body, as well as the reliability of the connection between the translucent body and the pressing portion.
  • a vibration device is the vibration device according to the first or second aspect,
  • the second member includes a material having an adhesive function.
  • the vibration device of the third aspect can more reliably suppress vibration damping of the vibration device.
  • a vibration device is the vibration device according to any one of the first to third aspects,
  • the first member includes a material having a waterproof function.
  • the vibration device of the fourth aspect can more reliably prevent liquid droplets from entering the interior of the vibration device.
  • the vibration device is A vibrating body; a piezoelectric element located at one end of the vibrating body in a first direction; a light-transmitting body located at the other end of the vibrating body in the first direction; a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction; a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion; a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body;
  • the Young's modulus of the first member is equal to or less than the Young's modulus of the second member.
  • the first member and the second member act as a buffer layer that attenuates the thermal stress caused by the difference in the linear expansion coefficients of the translucent body, the vibrating body, and the pressing portion. This improves the reliability of the joint between the translucent body and the vibrating body, as well as the joint between the translucent body and the pressing portion.
  • a vibration device is the vibration device according to the fifth aspect, The thickness of the first member is greater than or equal to the thickness of the second member.
  • the vibration device of the sixth aspect can more reliably improve the reliability of the joint between the translucent body and the vibrating body, as well as the reliability of the joint between the translucent body and the pressing portion.
  • a seventh aspect of the present disclosure provides a vibration device according to the fifth or sixth aspect of the present disclosure,
  • the second member includes a material having an adhesive function.
  • the seventh aspect of the vibration device makes it possible to more reliably suppress vibration damping of the vibration device.
  • a vibration device is the vibration device according to any one of the fifth to seventh aspects,
  • the first member includes a material having a waterproof function.
  • the eighth aspect of the vibration device makes it possible to more reliably prevent liquid droplets from entering the interior of the vibration device.
  • a vibration device is the vibration device according to any one of the first to eighth aspects,
  • the device includes an external vibrator and a stopper portion.
  • the external vibrator is a first connection portion provided with the pressing portion and connected to the light-transmitting body via the pressing portion; a second connection portion extending from the first connection portion in a direction away from the light-transmitting body along a direction intersecting the first direction; a fixing portion connected to an end portion of the second connection portion opposite to an end portion connected to the first connection portion, the fixing portion being connected to the end portion of the second connection portion in a direction intersecting the first direction;
  • the stopper portion is connected to the fixed portion in a state in which the second connection portion can come into contact with the fixed portion, A first gap is provided between the stopper portion and the second connection portion in the first direction.
  • the vibration device of the ninth aspect for example, when an external force is applied to the light-transmitting body toward the inside of the vibration device, the second connection portion comes into contact with the stopper portion, thereby preventing the light-transmitting body from colliding with a member located inside the vibration device. Also, for example, when stress is applied to the second connection portion, the second connection portion comes into contact with the stopper portion, thereby preventing excessive deformation of the second connection portion.
  • a vibration device is the vibration device according to the ninth aspect, the stopper portion has an inclined surface facing the second connection portion in the first direction, The inclined surface inclines in a direction away from the second connection portion in the first direction as it approaches the first connection portion in a direction intersecting the first direction.
  • the vibration device of the tenth aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
  • the vibration device of an eleventh aspect of the present disclosure is the vibration device of the ninth or tenth aspect,
  • the fixing portion is configured to surround the vibration body around the optical axis of the light-transmitting body,
  • the stopper portion has an annular shape extending in a circumferential direction with respect to the optical axis.
  • the vibration device of the eleventh aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
  • a vibration device is the vibration device according to the ninth or tenth aspect,
  • the fixing portion is configured to surround the vibration body around the optical axis of the light-transmitting body,
  • the stopper portion includes a plurality of members spaced apart from one another along a circumferential direction relative to the optical axis.
  • the vibration device of the twelfth aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
  • a vibration device is the vibration device according to any one of the ninth to twelfth aspects, The fixing portion and the stopper portion are integrally formed.
  • the vibration device of the thirteenth aspect eliminates the need to connect the stopper portion to the fixed portion, thereby reducing the manufacturing costs of the vibration device.
  • a vibration device is the vibration device according to any one of the ninth to thirteenth aspects, the fixing portion has a first opposing surface that faces the second connection portion with a gap therebetween in the first direction, The stopper portion is connected to the first opposing surface.
  • the vibration device of the 14th aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
  • a vibration device is the vibration device according to any one of the ninth to thirteenth aspects, the fixed portion has a second opposing surface that faces the vibration body with a gap therebetween in a direction intersecting the first direction, The stopper portion is connected to the second opposing surface.
  • the size of the first gap can be adjusted depending on the structure of the vibration device and the materials of each component that constitutes the vibration device.
  • a vibration device is the vibration device according to any one of the ninth to fifteenth aspects, the stopper portion has a first layer and a second layer stacked in the first direction, The first layer is located closer to the second connection portion than the second layer, and is configured to have a smaller elastic modulus than the second layer.
  • the vibration device of the 16th aspect reduces the deformation speed of the second connection part that comes into contact with the stopper part, making it possible to more reliably prevent excessive deformation of the second connection part. In addition, damage to the second connection part when it comes into contact with the stopper part can be prevented.
  • a vibration device is the vibration device according to any one of the ninth to sixteenth aspects,
  • the first gap has a size equal to or larger than the maximum amplitude of the light-transmitting body and smaller than the second gap.
  • the vibration device of the 17th aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
  • the vibration device 1 includes a lens 5 (an example of a light-transmitting body), an internal vibration body (an example of a vibration body) 7, a piezoelectric element 9, a pressing portion 31b, a first member 40, and a second member 50.
  • the lens 5 is made of glass, for example. As shown in FIG. 1, the upper surface of the lens 5 is convex, and the surface is coated with a water-repellent coating and an anti-reflection film (AR coating). A protrusion 501 extending radially outward is provided at the radial outer end of the lens 5. The upper surface 502 (see FIG. 3) of the protrusion 501 is curved along the curved surface 317 of the pressing portion 31b, which will be described later.
  • AR coating anti-reflection film
  • the internal vibrator 7 has a cylindrical body, for example, and amplifies the vibration from the piezoelectric element 9 to vibrate the lens 5.
  • the internal vibrator 7 is composed of a first part 71 that contacts the lens 5, a second part 72 to which the piezoelectric element 9 is attached, and a third part 73 that connects the first part 71 and the second part 72 and has a cross-sectional shape of an approximately S-shape.
  • the first part 71 has a cylindrical shape that is elongated in the axial direction of the cylindrical body (for example, the first direction Z).
  • the first part 71 extends in the radial direction of the cylindrical body and is connected to the external vibrator 3.
  • the second part 72 is a part that vibrates together with the vibration of the piezoelectric element 9, and has a plate thickness larger than that of the first part 71 and the third part 73. This makes it easier to transmit the vibration of the piezoelectric element 9 to the lens 5 more efficiently.
  • the third part 73 is a part that supports the first part 71 and transmits the vibration of the second part 72 to the first part 71.
  • the third portion 73 constitutes one end of the internal vibrator 7 in the first direction Z, and the first portion 71 constitutes the other end of the internal vibrator 7 in the first direction Z.
  • the piezoelectric element 9 includes a piezoelectric body and an electrode.
  • the piezoelectric body includes, for example, piezoelectric ceramics such as barium titanate (BaTiO3), lead zirconate titanate (PZT: PbTiO3.PbZrO3), lead titanate (PbTiO3), lead metaniobate (PbNb2O6), bismuth titanate (Bi4Ti3O12), (K,Na)NbO3, or piezoelectric single crystals such as LiTaO3 and LiNbO3.
  • the electrode may be, for example, a Ni electrode.
  • the electrode may be an electrode made of a metal thin film such as Ag or Au formed by a sputtering method. Alternatively, the electrode can be formed by plating or vapor deposition in addition to the sputtering method.
  • the piezoelectric element 9 is connected to the second part 72 of the internal vibrator 7 by adhesive and is formed in a ring shape when viewed along the first direction Z, but this is not limited to this and any shape that can vibrate the internal vibrator 7 may be used.
  • the pressing portion 31b constitutes a part of the external vibrator 3.
  • the external vibrator 3 includes a first connection portion 31 and a second connection portion 33 in addition to the fixing portion 35.
  • the pressing portion 31b is configured to be able to clamp the protrusion portion 501 of the lens 5 together with the first part 71 of the internal vibrator 7.
  • the first connection portion 31 is located radially outside the first part 71 of the internal vibrator 7 and the lens 5, and extends from the second connection portion 33 toward the outside of the vibration device 1 along the first direction Z.
  • the pressing portion 31b protrudes toward the lens 5 from the end of the first connection portion 31 farther from the second connection portion 33 in the first direction Z.
  • the tip of the pressing portion 31b (i.e., the end facing the lens 5) is provided with a curved surface 317 (see FIG. 3) that protrudes toward the lens 5.
  • the first connection portion 31 is provided with the pressing portion 31b.
  • the first connection part 31 is connected to the lens 5 via the pressing part 31b.
  • the second connection part 33 extends from the first connection part 31 in a direction (e.g., X direction) intersecting the first direction Z in a direction away from the lens 5.
  • the second connection part 33 extends in a ring shape in a direction perpendicular to the optical axis direction (e.g., the first direction Z) of the lens 5 (in other words, in a radial direction with respect to the optical axis direction).
  • the thickness of the second connection part 33 is smaller than the thickness of the fixing part 35, and is, for example, 0.2 mm to 1.0 mm.
  • the thickness of the second connection part 33 is, for example, 0.2 times to 1.5 times that of the third part 73 of the internal vibrator 7. Since the second connection part 33 has such a thin thickness, it functions as a leaf spring.
  • the second connection part 33 is configured to be elastically deformable along the first direction Z so as to absorb vibrations generated in the lens 5.
  • the fixed part 35 is connected to the end 332 opposite to the end 331 connected to the first connection part 31, among both ends of the second connection part 33 in the direction intersecting the first direction Z.
  • the fixed part 35 is connected to components such as a case (not shown) for storing an image sensor and a lens module 15 (see FIG. 13), and has a node that suppresses vibration to less than 1/100 of the displacement of the lens 5, and is configured not to transmit vibration to these components.
  • the larger the volume of the fixed part 35 the more the vibration of the fixed part 35 can be suppressed.
  • the fixed part 35 has a rectangular outer shape. If the outer shape is rectangular, the volume of the fixed part 35 can be increased without increasing the size of the vibration device 1. For example, a cube of 25 mm x 25 mm has a larger volume than a cylinder of 25 mm in diameter.
  • an elastic body such as rubber or an adhesive layer is provided in the portion 100 surrounded by the lens 5, the first connection portion 31 of the external vibrator 3, and the first portion 71 of the internal vibrator 7. This reduces the load on the lens 5.
  • the first member 40 is located between the lens 5 and the pressing portion 31b and is connected to the lens 5 and the pressing portion 31b.
  • the second member 50 is located between the lens 5 and the internal vibrator 7 and is connected to the lens 5 and the internal vibrator 7.
  • the first member 40 and the second member 50 include any material such as resin, metal, etc., and are configured to satisfy at least one of the following two conditions.
  • the thickness tA of the first member 40 is greater than or equal to the thickness tB of the second member 50 (tA ⁇ tB).
  • the Young's modulus yA of the first member 40 is equal to or less than the Young's modulus yB of the second member 50 (yA ⁇ yB).
  • the thickness tA of the first member 40 is defined at the point where the thickness of the first member 40 is at its smallest.
  • the thickness tB of the second member 50 is approximately uniform due to the flatness of the bonding surfaces of the lens 5 and the internal vibrator 7, so it may be defined at any point of the second member 50.
  • the thicknesses tA and tB of the first member 40 and the second member 50 can be controlled by the viscosity of the adhesive, the amount of pressure applied when the adhesive hardens, the diameter of the spacer added to the adhesive, etc.
  • the thicknesses tA and tB of the first member 40 and the second member 50 can be confirmed, for example, by observing the cross section of the vibration device 1 with a microscope.
  • the key is to amplify the minute breathing vibration of the piezoelectric element 9 by the internal vibrator 7 and the pressing part 31b, etc., and transmit the vibration to the lens 5.
  • the first member 40 and the second member 50 mainly have two roles: “transmitting vibration” and “strengthening the joint reliability between different materials.” In “transmitting vibration,” since the Young's modulus of the first member 40 and the second member 50 is small, it is advantageous for the first member 40 and the second member 50 to be thin.
  • FIG. 5 is a graph showing the relationship between the thicknesses tA and tB of the first member 40 and the second member 50 and the maximum displacement of the apex of the lens 5, calculated using FEM (finite element method).
  • FEM finite element method
  • the thickness of one of the first member 40 and the second member 50 was changed, the thickness of the other of the first member 40 and the second member 50 was fixed at 0.005 mm.
  • the sensitivity of the displacement of the top of the lens 5 to the thickness of the first member 40 and the second member 50 was greater for the second member 50 (tB), and the displacement of the top of the lens 5 attenuated as the second member 50 became thicker. This is for the following reason.
  • the epoxy resin which is the material of the first member 40 and the second member 50, is a material with a relatively small Young's modulus, so it has the effect of attenuating vibration by deformation.
  • the thicknesses tA and tB of the first member 40 and the second member 50 have different effects.
  • the greater the difference in the linear expansion coefficients specific to the members the greater the thermal stress applied to the joint between the different materials, which causes peeling of the first member 40 and the second member 50, member destruction, etc.
  • the linear expansion coefficient of the lens 5 glass
  • the linear expansion coefficient of the pressing portion 31b stainless steel
  • the thermal stress applied to each member of the lens 5, the internal vibrator 7, and the pressing portion 31b will be greater.
  • Figure 6 is a graph showing the relationship between the thicknesses tA and tB of the first member 40 and the second member 50 and the maximum thermal stress applied to the lens 5 using FEM.
  • the physical constants used in the FEM calculation results are as shown in Table 1 above.
  • the thickness of the other of the first member 40 and the second member 50 was fixed at 0.005 mm.
  • Figure 8 is a graph showing the relationship between the Young's moduli yA and yB of the first member 40 and the second member 50 using FEM and the maximum displacement of the apex of the lens 5.
  • the physical constants used in the FEM calculation results are as shown in Table 1 above.
  • the Young's modulus of one of the first member 40 and the second member 50 was changed, the Young's modulus of the other of the first member 40 and the second member 50 was fixed at 3 GPa.
  • the sensitivity of the displacement of the apex of the lens 5 to the Young's moduli yA and yB of the first member 40 and the second member 50 was greater for the second member 50 (yB), and that the displacement of the apex of the lens 5 increased with an increase in the Young's modulus.
  • the first member 40 (yA) has almost no sensitivity of the displacement of the apex of the lens 5 to the variation in the Young's modulus.
  • Figure 9 is a graph showing the relationship between the Young's moduli yA and yB of the first member 40 and the second member 50 using FEM, and the maximum thermal stress applied to the lens 5.
  • the physical constants used in the FEM calculation results are as shown in Table 1 above.
  • the Young's modulus of one of the first member 40 and the second member 50 was changed, the Young's modulus of the other of the first member 40 and the second member 50 was fixed at 3 GPa.
  • the second member 50 (yB) had almost no sensitivity of the thermal stress to the Young's modulus.
  • the effective relationship between yA and yB is "yA ⁇ yB" from the standpoint of "vibration transmission” and "strengthening joint reliability between dissimilar materials.” This relationship holds regardless of the type of material used for the first member 40 and the second member 50. In other words, the first member 40 and the second member 50 may be made of the same material or different materials.
  • the vibration device 1 of the present disclosure includes an internal vibrator 7, a piezoelectric element 9 located at one end of the internal vibrator 7 in the first direction, a lens 5 located at the other end of the internal vibrator 7 in the first direction, a pressing portion 31b that sandwiches the lens 5 together with the other end of the internal vibrator 7 in the first direction, and a first member 40 and a second member 50.
  • the first member 40 is located between the lens 5 and the pressing portion 31b and is connected to the lens 5 and the pressing portion 31b.
  • the second member 50 is located between the lens 5 and the internal vibrator 7 and is connected to the lens 5 and the internal vibrator 7.
  • the first member 40 and the second member 50 are configured to satisfy at least one of the following conditions.
  • the thickness tA of the first member 40 is equal to or greater than the thickness tB of the second member 50 (tA ⁇ tB).
  • the Young's modulus yA of the first member 40 is equal to or less than the Young's modulus yB of the second member 50 (yA ⁇ yB).
  • the vibration device 1 can also be configured as follows:
  • the first member 40 may include a material having a waterproof function. This can more reliably prevent liquid droplets from penetrating into the inside of the vibration device 1.
  • the material having a waterproof function includes, for example, a material that meets the IPX9K standard of the IP test based on the in-vehicle and automobile parts standard ISO20653.
  • the second member 50 may contain a material with an adhesive function. This ensures the vibration characteristics of the vibration device 1, and more reliably suppresses vibration damping of the vibration device 1.
  • the material with an adhesive function includes, for example, an adhesive whose tensile strength between the lens 5 and the internal vibrating body 7 is equal to or greater than the shear stress value or Z-normal stress value applied when the vibration device 1 is driven.
  • the shapes of the lens 5 and the pressing portion 31b are not limited to those of the above embodiment.
  • a linearly extending inclined surface 318 may be provided at the tip of the pressing portion 31b, and an inclined surface 503 facing the inclined surface 318 may be provided on the upper surface of the protrusion 501 of the lens 5.
  • a flat upper surface 504 may be provided on the lens 5, and a pressing surface 319 facing the upper surface 504 of the lens 5 may be provided at the tip of the pressing portion 31b.
  • the pressing portion is not limited to pressing portion 31b constituting a part of the vibrating body (external vibrating body 3 in the above embodiment).
  • it may be constituted by a member (also called pressing member) 60 separate from the vibrating body.
  • the pressing member 60 includes, for example, a cylindrical side wall 62 and a pressing portion 61 that protrudes inward (for example, in the X direction and in the direction approaching the lens 5) in the radial direction (hereinafter referred to as the radial direction) relative to the optical axis of the side wall 62.
  • the vibrating body 120 includes, for example, a cylindrical main body portion 121 and a support portion 122 that protrudes inward in the radial direction from the main body portion 121.
  • the vibration device 1 may include a stopper portion 80, as shown in Figs. 13 to 16.
  • the stopper portion 80 is connected to the fixed portion 35 in a state in which the second connection portion 33 can come into contact with the stopper portion 80.
  • a first gap 91 is provided between the stopper portion 80 and the second connection portion 33 in the first direction Z.
  • the stopper portion 80 may be made of any material, including metal and resin.
  • the fixing portion 35 has a first opposing surface 351 that faces the second connection portion 33 at a distance in the first direction Z.
  • the stopper portion 80 is connected to the first opposing surface 351 of the fixing portion 35.
  • the stopper portion 80 is a separate member from the fixing portion 35, and is fixed to the fixing portion 35 with an adhesive or the like.
  • the second connection portion 33 is composed of a first leaf spring portion 3301, a second leaf spring portion 3302, and a linking portion 3303.
  • the first leaf spring portion 3301 extends radially outward from the end 331 connected to the first connection portion 31.
  • the fixing portion 35 is located between the first leaf spring portion 3301 and the first opposing surface 351.
  • the second leaf spring portion 3302 extends from the end farther from the first connection portion 31 of both ends of the first leaf spring portion 3301 in the radial direction toward the fixing portion 35 along the first direction Z.
  • a third gap 93 is provided between the fixing portion 35 and the second leaf spring portion 3302. The third gap 93 does not have to be provided.
  • the linking portion 3303 extends radially outward from the end closer to the fixing portion 35 of both ends of the second leaf spring portion 3302 in the first direction Z along the first opposing surface 351.
  • the radially outer end of the connecting portion 3303 constitutes the end portion 332.
  • the second connection portion 33 is connected to the fixed portion 35 via the connecting portion 3303.
  • the second connection part 33 moves toward the inside of the vibration device 1 via the first connection part 31 connected to the lens 5 and comes into contact with the stopper part 80.
  • the stopper part 80 it is possible to prevent the lens 5 from colliding with a member (e.g., the lens module 15) located inside the vibration device 1.
  • the second connection part 33 comes into contact with the stopper part 80, and therefore excessive deformation of the second connection part 33 can be prevented.
  • the stopper portion 80 is connected to the first opposing surface 351 of the fixing portion 35, so that collision of the lens 5 with a component (e.g., the lens module 15) located inside the vibration device 1 can be more reliably prevented, and excessive deformation of the second connection portion 33 can be more reliably prevented.
  • a component e.g., the lens module 15
  • the first gap 91 has a size, for example, equal to or greater than the maximum amplitude of the lens 5 and less than the second gap 92. This configuration can more reliably prevent the lens 5 from colliding with a component (for example, the lens module 15) located inside the vibration device 1, and can more reliably prevent excessive deformation of the second connection portion 33.
  • the second gap 92 is, for example, the smallest gap between the lens 5 and the lens module 15 in the first direction Z.
  • the fixing portion 35 and the stopper portion 80 are integrally configured. By integrally configuring the fixing portion 35 and the stopper portion 80, it is no longer necessary to connect the stopper portion 80 to the fixing portion 35, and therefore the manufacturing cost of the vibration device 1 can be reduced.
  • the stopper portion 80 has an inclined surface 81 facing the second connection portion 33 in the first direction Z.
  • the inclined surface 81 is inclined in the first direction Z in a direction intersecting the first direction Z (e.g., the X direction) as it approaches the first connection portion 31.
  • the area in which the stopper portion 80 and the first leaf spring portion 3301 of the second connection portion 33 can contact each other can be made larger than in a vibration device 1 in which the stopper portion 80 does not have an inclined surface 81.
  • collision of the lens 5 with a member (e.g., the lens module 15) located inside the vibration device 1 can be more reliably prevented, and excessive deformation of the second connection portion 33 can be more reliably prevented.
  • the fixing portion 35 has a second opposing surface 352 that faces the internal vibrator 7 at a distance in a direction (e.g., the X direction) intersecting the first direction Z.
  • the stopper portion 80 is connected to the second opposing surface 352 of the fixing portion 35.
  • the stopper portion 80 is a separate member from the fixing portion 35, and is fixed to the fixing portion 35 by adhesive or the like.
  • the stopper portion 80 has a first layer 801 and a second layer 802 stacked in the first direction Z.
  • the first layer 801 is located closer to the second connection portion 33 than the second layer 802.
  • a first gap 91 is formed between the first layer 801 and the first leaf spring portion 3301.
  • the first layer 801 is configured to have a smaller elastic modulus than the second layer 802.
  • the stopper portion 80 can be configured to have an annular shape extending in the circumferential direction relative to the optical axis L of the lens 5, as shown in FIG. 17, for example.
  • the fixing portion 35 is configured to surround the internal vibrator 7 around the optical axis L.
  • the stopper portion 80 is not limited to having an annular shape, and may be configured to include a plurality of members 82 positioned at intervals along the circumferential direction relative to the optical axis L, as shown in FIG. 18, for example. All of the plurality of members 82, or some of the plurality of members 82, may have substantially the same shape and size. All of the plurality of members 82 may have mutually different shapes and sizes.

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Abstract

This vibration device comprises: a vibration body; a piezoelectric element that is located at one end in a first direction of the vibration body; a light-transmitting body that is located at the other end in the first direction of the vibration body; a retaining part that, with the other end of the vibration body, sandwiches the light-transmitting body therebetween in the first direction; a first member that is located between the light-transmitting body and the retaining part and connected to the light-transmitting body and the retaining part; and a second member that is located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body. The thickness of the first member is greater than or equal to the thickness of the second member.

Description

振動装置Vibration device
　本開示は、振動装置に関する。 This disclosure relates to a vibration device.
　特許文献１には、ドーム部を備えた光学素子と、ドーム部に屈曲振動を発生させる加振部材と、加振部材を制御する振動制御装置と、内部への液滴の浸入を抑制する防滴シールとを備える液滴排除装置が開示されている。 Patent Document 1 discloses a droplet removal device that includes an optical element with a dome portion, a vibration member that generates bending vibration in the dome portion, a vibration control device that controls the vibration member, and a drip-proof seal that prevents droplets from entering the device.
特開２０１７－１７０３０３号公報JP 2017-170303 A
　特許文献１に記載の液滴排除装置では、内部への液滴の浸入を抑制しつつ、透光体にかかる応力を低減する点において未だ改善の余地がある。 The droplet removal device described in Patent Document 1 still has room for improvement in terms of reducing the stress on the translucent body while suppressing the infiltration of droplets into the device.
　本開示は、内部への液滴の浸入を抑制しつつ、透光体にかかる応力を低減できる振動装置を提供することを目的とする。 The present disclosure aims to provide a vibration device that can reduce the stress on the translucent body while suppressing the infiltration of liquid droplets into the interior.
　本開示の一態様の振動装置は、
　振動体と、
　前記振動体の第１方向の一端に位置する圧電素子と、
　前記振動体の前記第１方向の他端に位置する透光体と、
　前記振動体の他端と共に前記透光体を前記第１方向において挟み込む押え部と、
　前記透光体および前記押え部の間に位置し、前記透光体および前記押え部に接続された第１部材と、
　前記透光体および前記振動体の間に位置し、前記透光体および前記振動体に接続された第２部材と
を備え、
　前記第１部材の厚みが、前記第２部材の厚み以上である。 A vibration device according to one aspect of the present disclosure includes:
A vibrating body;
a piezoelectric element located at one end of the vibrating body in a first direction;
a light-transmitting body located at the other end of the vibrating body in the first direction;
a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction;
a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion;
a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body;
The thickness of the first member is greater than or equal to the thickness of the second member.
　本開示の一態様の振動装置は、
　振動体と、
　前記振動体の第１方向の一端に位置する圧電素子と、
　前記振動体の前記第１方向の他端に位置する透光体と、
　前記振動体の他端と共に前記透光体を前記第１方向において挟み込む押え部と、
　前記透光体および前記押え部の間に位置し、前記透光体および前記押え部に接続された第１部材と、
　前記透光体および前記振動体の間に位置し、前記透光体および前記振動体に接続された第２部材と
を備え、
　前記第１部材のヤング率が、前記第２部材のヤング率以下である。 A vibration device according to one aspect of the present disclosure includes:
A vibrating body;
a piezoelectric element located at one end of the vibrating body in a first direction;
a light-transmitting body located at the other end of the vibrating body in the first direction;
a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction;
a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion;
a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body;
The Young's modulus of the first member is equal to or less than the Young's modulus of the second member.
　前記態様の振動装置によれば、内部への液滴の浸入を抑制しつつ、透光体にかかる応力を低減できる。 The vibration device of the above aspect can reduce the stress on the translucent body while suppressing the infiltration of droplets into the interior.
本開示の一実施形態の振動装置を示す斜視図。FIG. 1 is a perspective view showing a vibration device according to an embodiment of the present disclosure. 図１のII-II線に沿った断面図。FIG. 2 is a cross-sectional view taken along line II-II in FIG. 第１部材を説明するための図２の部分拡大図。FIG. 3 is a partial enlarged view of FIG. 2 for explaining a first member; 第２部材を説明するための図２の部分拡大図。FIG. 3 is a partial enlarged view of FIG. 2 for explaining a second member; 第１部材および第２部材の厚みとレンズ頂部の最大変位量との関係を示すグラフ。11 is a graph showing the relationship between the thickness of the first member and the second member and the maximum displacement amount of the lens apex. 第１部材および第２部材の厚みと、レンズにかかる最大熱応力の関係を示すグラフ。6 is a graph showing the relationship between the thickness of the first member and the second member and the maximum thermal stress applied to the lens. レンズにかかる熱応力を示すコンター図。1 is a contour diagram showing thermal stress on a lens. 第１部材および第２部材のヤング率と、レンズ頂部の最大変位量との関係を示すグラフ。11 is a graph showing the relationship between the Young's modulus of the first member and the second member and the maximum displacement amount of the lens apex. 第１部材および第２部材のヤング率と、レンズにかかる最大熱応力との関係を示すグラフ。5 is a graph showing the relationship between the Young's modulus of the first member and the second member and the maximum thermal stress applied to the lens. 図１の振動装置の第１の変形例を示す断面図。FIG. 2 is a cross-sectional view showing a first modified example of the vibration device of FIG. 1 . 図１の振動装置の第２の変形例を示す断面図。FIG. 4 is a cross-sectional view showing a second modified example of the vibration device of FIG. 1 . 図１の振動装置の第３の変形例を示す断面図。FIG. 4 is a cross-sectional view showing a third modified example of the vibration device of FIG. 1 . 図１の振動装置の第４の変形例を示す断面図。FIG. 13 is a cross-sectional view showing a fourth modified example of the vibration device of FIG. 図１の振動装置の第５の変形例を示す断面図。FIG. 13 is a cross-sectional view showing a fifth modified example of the vibration device of FIG. 図１の振動装置の第６の変形例を示す断面図。FIG. 13 is a cross-sectional view showing a sixth modified example of the vibration device of FIG. 図１の振動装置の第７の変形例を示す断面図。FIG. 13 is a cross-sectional view showing a seventh modified example of the vibration device of FIG. 図１３のXVII-XVII線に沿った断面図。FIG. 17 is a cross-sectional view taken along line XVII-XVII in FIG. 13 . 図１の振動装置の第８の変形例を示す断面図。FIG. 13 is a cross-sectional view showing an eighth modified example of the vibration device of FIG.
　本開示の種々の態様について説明する。 Various aspects of this disclosure are described below.
　本開示の第１態様の振動装置は、
　振動体と、
　前記振動体の第１方向の一端に位置する圧電素子と、
　前記振動体の前記第１方向の他端に位置する透光体と、
　前記振動体の他端と共に前記透光体を前記第１方向において挟み込む押え部と、
　前記透光体および前記押え部の間に位置し、前記透光体および前記押え部に接続された第１部材と、
　前記透光体および前記振動体の間に位置し、前記透光体および前記振動体に接続された第２部材と
を備え、
　前記第１部材の厚みが、前記第２部材の厚み以上である。 The vibration device according to the first aspect of the present disclosure comprises:
A vibrating body;
a piezoelectric element located at one end of the vibrating body in a first direction;
a light-transmitting body located at the other end of the vibrating body in the first direction;
a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction;
a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion;
a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body;
The thickness of the first member is greater than or equal to the thickness of the second member.
　第１態様の振動装置によれば、第１部材および第２部材が、透光体、振動体および押え部の各部材の線膨張係数の差に伴う熱応力を減衰させる緩衝層として作用する。このため、透光体および振動体間の接合信頼性、並びに、透光体および押え部の接合信頼性を高めることができる。 In the vibration device of the first aspect, the first member and the second member act as a buffer layer that attenuates the thermal stress caused by the difference in the linear expansion coefficient of each of the translucent body, the vibrating body, and the pressing portion. This makes it possible to improve the bonding reliability between the translucent body and the vibrating body, as well as the bonding reliability between the translucent body and the pressing portion.
　本開示の第２態様の振動装置は、第１態様の振動装置において、
　前記第１部材のヤング率が、前記第２部材のヤング率以下である。 A vibration device according to a second aspect of the present disclosure is the vibration device according to the first aspect,
The Young's modulus of the first member is equal to or less than the Young's modulus of the second member.
　第２態様の振動装置によれば、透光体および振動体間の接合信頼性、並びに、透光体および押え部の接合信頼性をより確実に高めることができる。 The vibration device of the second aspect can more reliably improve the reliability of the connection between the translucent body and the vibrating body, as well as the reliability of the connection between the translucent body and the pressing portion.
　本開示の第３態様の振動装置は、第１態様または第２態様の振動装置において、
　前記第２部材が、接着機能を有する材料を含む。 A vibration device according to a third aspect of the present disclosure is the vibration device according to the first or second aspect,
The second member includes a material having an adhesive function.
　第３態様の振動装置によれば、振動装置の振動減衰をより確実に抑制できる。 The vibration device of the third aspect can more reliably suppress vibration damping of the vibration device.
　本開示の第４態様の振動装置は、第１態様～第３態様のいずれかの振動装置において、
　前記第１部材が、防水機能を有する材料を含む。 A vibration device according to a fourth aspect of the present disclosure is the vibration device according to any one of the first to third aspects,
The first member includes a material having a waterproof function.
　第４態様の振動装置によれば、振動装置の内部への液滴の浸入をより確実に抑制できる。 The vibration device of the fourth aspect can more reliably prevent liquid droplets from entering the interior of the vibration device.
　本開示の第５態様の振動装置は、
　振動体と、
　前記振動体の第１方向の一端に位置する圧電素子と、
　前記振動体の前記第１方向の他端に位置する透光体と、
　前記振動体の他端と共に前記透光体を前記第１方向において挟み込む押え部と、
　前記透光体および前記押え部の間に位置し、前記透光体および前記押え部に接続された第１部材と、
　前記透光体および前記振動体の間に位置し、前記透光体および前記振動体に接続された第２部材と
を備え、
　前記第１部材のヤング率が、前記第２部材のヤング率以下である。 The vibration device according to the fifth aspect of the present disclosure is
A vibrating body;
a piezoelectric element located at one end of the vibrating body in a first direction;
a light-transmitting body located at the other end of the vibrating body in the first direction;
a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction;
a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion;
a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body;
The Young's modulus of the first member is equal to or less than the Young's modulus of the second member.
　第５態様の振動装置によれば、第１部材および第２部材が、透光体、振動体および押え部の各部材の線膨張係数の差に伴う熱応力を減衰させる緩衝層として作用する。このため、透光体および振動体間の接合信頼性、並びに、透光体および押え部の接合信頼性を高めることができる。 In the vibration device of the fifth aspect, the first member and the second member act as a buffer layer that attenuates the thermal stress caused by the difference in the linear expansion coefficients of the translucent body, the vibrating body, and the pressing portion. This improves the reliability of the joint between the translucent body and the vibrating body, as well as the joint between the translucent body and the pressing portion.
　本開示の第６態様の振動装置は、第５態様の振動装置において、
　前記第１部材の厚みが、前記第２部材の厚み以上である。 A vibration device according to a sixth aspect of the present disclosure is the vibration device according to the fifth aspect,
The thickness of the first member is greater than or equal to the thickness of the second member.
　第６態様の振動装置によれば、透光体および振動体間の接合信頼性、並びに、透光体および押え部の接合信頼性をより確実に高めることができる。 The vibration device of the sixth aspect can more reliably improve the reliability of the joint between the translucent body and the vibrating body, as well as the reliability of the joint between the translucent body and the pressing portion.
　本開示の第７態様の振動装置は、第５態様または第６態様の振動装置において、
　前記第２部材が、接着機能を有する材料を含む。 A seventh aspect of the present disclosure provides a vibration device according to the fifth or sixth aspect of the present disclosure,
The second member includes a material having an adhesive function.
　第７態様の振動装置によれば、振動装置の振動減衰をより確実に抑制できる。 The seventh aspect of the vibration device makes it possible to more reliably suppress vibration damping of the vibration device.
　本開示の第８態様の振動装置は、第５態様～第７態様のいずれかの振動装置において、
　前記第１部材が、防水機能を有する材料を含む。 A vibration device according to an eighth aspect of the present disclosure is the vibration device according to any one of the fifth to seventh aspects,
The first member includes a material having a waterproof function.
　第８態様の振動装置によれば、振動装置の内部への液滴の浸入をより確実に抑制できる。 The eighth aspect of the vibration device makes it possible to more reliably prevent liquid droplets from entering the interior of the vibration device.
　本開示の第９態様の振動装置は、第１態様～第８態様のいずれかの振動装置において、
　外部振動体と、ストッパー部とを備え、
　前記外部振動体は、
　前記押え部が設けられ、前記押え部を介して前記透光体と接続された第１接続部と、
　前記第１接続部から前記第１方向に交差する方向に沿って前記透光体から離れる方向に延びる第２接続部と、
　前記第２接続部の前記第１方向に交差する方向の両端のうち、前記第１接続部に接続されている端部とは反対側の端部に接続された固定部と
を有し、
　前記ストッパー部は、前記第２接続部が接触可能な状態で前記固定部に接続され、
　前記第１方向における前記ストッパー部および前記第２接続部の間に第１隙間が設けられている。 A vibration device according to a ninth aspect of the present disclosure is the vibration device according to any one of the first to eighth aspects,
The device includes an external vibrator and a stopper portion.
The external vibrator is
a first connection portion provided with the pressing portion and connected to the light-transmitting body via the pressing portion;
a second connection portion extending from the first connection portion in a direction away from the light-transmitting body along a direction intersecting the first direction;
a fixing portion connected to an end portion of the second connection portion opposite to an end portion connected to the first connection portion, the fixing portion being connected to the end portion of the second connection portion in a direction intersecting the first direction;
the stopper portion is connected to the fixed portion in a state in which the second connection portion can come into contact with the fixed portion,
A first gap is provided between the stopper portion and the second connection portion in the first direction.
　第９態様の振動装置によれば、例えば、透光体に対して振動装置の内部に向かって外力が加えられた場合、第２接続部がストッパー部に接触するので、透光体の振動装置の内部に位置する部材への衝突を防止できる。また、例えば、第２接続部に応力が加えられた場合、第２接続部がストッパー部に接触するので、第２接続部の過度の変形を防止できる。 According to the vibration device of the ninth aspect, for example, when an external force is applied to the light-transmitting body toward the inside of the vibration device, the second connection portion comes into contact with the stopper portion, thereby preventing the light-transmitting body from colliding with a member located inside the vibration device. Also, for example, when stress is applied to the second connection portion, the second connection portion comes into contact with the stopper portion, thereby preventing excessive deformation of the second connection portion.
　本開示の第１０態様の振動装置は、第９態様の振動装置において、
　前記ストッパー部が、前記第１方向において前記第２接続部に対向する傾斜面を有し、
　前記傾斜面は、前記第１方向に交差する方向において前記第１接続部に接近するに従って前記第１方向において前記第２接続部から離れる方向に傾斜する。 A vibration device according to a tenth aspect of the present disclosure is the vibration device according to the ninth aspect,
the stopper portion has an inclined surface facing the second connection portion in the first direction,
The inclined surface inclines in a direction away from the second connection portion in the first direction as it approaches the first connection portion in a direction intersecting the first direction.
　第１０態様の振動装置によれば、透光体の振動装置の内部に位置する部材への衝突をより確実に防止でき、第２接続部の過度の変形をより確実に防止できる。 The vibration device of the tenth aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
　本開示の第１１態様の振動装置は、第９態様または第１０態様の振動装置において、
　前記固定部は、前記振動体を前記透光体の光軸まわりに取り囲むように構成され、
　前記ストッパー部は、前記光軸に対する周方向に延びる円環状を有する。 The vibration device of an eleventh aspect of the present disclosure is the vibration device of the ninth or tenth aspect,
The fixing portion is configured to surround the vibration body around the optical axis of the light-transmitting body,
The stopper portion has an annular shape extending in a circumferential direction with respect to the optical axis.
　第１１態様の振動装置によれば、透光体の振動装置の内部に位置する部材への衝突をより確実に防止でき、第２接続部の過度の変形をより確実に防止できる。 The vibration device of the eleventh aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
　本開示の第１２態様の振動装置は、第９態様または第１０態様の振動装置において、
　前記固定部は、前記振動体を前記透光体の光軸まわりに取り囲むように構成され、
　前記ストッパー部は、前記光軸に対する周方向に沿って間隔を空けて位置する複数の部材を含む。 A vibration device according to a twelfth aspect of the present disclosure is the vibration device according to the ninth or tenth aspect,
The fixing portion is configured to surround the vibration body around the optical axis of the light-transmitting body,
The stopper portion includes a plurality of members spaced apart from one another along a circumferential direction relative to the optical axis.
　第１２態様の振動装置によれば、透光体の振動装置の内部に位置する部材への衝突をより確実に防止でき、第２接続部の過度の変形をより確実に防止できる。 The vibration device of the twelfth aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
　本開示の第１３態様の振動装置は、第９態様～第１２態様のいずれかの振動装置において、
　前記固定部および前記ストッパー部が一体に構成されている。 A vibration device according to a thirteenth aspect of the present disclosure is the vibration device according to any one of the ninth to twelfth aspects,
The fixing portion and the stopper portion are integrally formed.
　第１３態様の振動装置によれば、ストッパー部を固定部に接続する必要がなくなるので、振動装置の製造コストを低減できる。 The vibration device of the thirteenth aspect eliminates the need to connect the stopper portion to the fixed portion, thereby reducing the manufacturing costs of the vibration device.
　本開示の第１４態様の振動装置は、第９態様～第１３態様のいずれかの振動装置において、
　前記固定部が、前記第１方向において前記第２接続部に対して間隔を空けて対向する第１対向面を有し、
　前記ストッパー部が、前記第１対向面に接続されている。 A vibration device according to a fourteenth aspect of the present disclosure is the vibration device according to any one of the ninth to thirteenth aspects,
the fixing portion has a first opposing surface that faces the second connection portion with a gap therebetween in the first direction,
The stopper portion is connected to the first opposing surface.
　第１４態様の振動装置によれば、透光体の振動装置の内部に位置する部材への衝突をより確実に防止でき、第２接続部の過度の変形をより確実に防止できる。 The vibration device of the 14th aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
　本開示の第１５態様の振動装置は、第９態様～第１３態様のいずれかの振動装置において、
　前記固定部が、前記第１方向に交差する方向において前記振動体に対して間隔を空けて対向する第２対向面を有し、
　前記ストッパー部が、前記第２対向面に接続されている。 A vibration device according to a fifteenth aspect of the present disclosure is the vibration device according to any one of the ninth to thirteenth aspects,
the fixed portion has a second opposing surface that faces the vibration body with a gap therebetween in a direction intersecting the first direction,
The stopper portion is connected to the second opposing surface.
　第１５態様の振動装置によれば、振動装置の構造および振動装置を構成する各部材の材質等に応じて、第１隙間の大きさを調整できる。 According to the fifteenth aspect of the vibration device, the size of the first gap can be adjusted depending on the structure of the vibration device and the materials of each component that constitutes the vibration device.
　本開示の第１６態様の振動装置は、第９態様～第１５態様のいずれかの振動装置において、
　前記ストッパー部が、前記第１方向に積層された第１層および第２層を有し、
　前記第１層は、前記第２層よりも前記第２接続部の近くに位置し、前記第２層よりも弾性率が小さくなるように構成されている。 A vibration device according to a sixteenth aspect of the present disclosure is the vibration device according to any one of the ninth to fifteenth aspects,
the stopper portion has a first layer and a second layer stacked in the first direction,
The first layer is located closer to the second connection portion than the second layer, and is configured to have a smaller elastic modulus than the second layer.
　第１６態様の振動装置によれば、ストッパー部に接触した第２接続部の変形速度が緩やかになり、第２接続部の過度の変形をより確実に防止できる。また、第２接続部がストッパー部に接触する際における第２接続部の損傷を防止できる。 The vibration device of the 16th aspect reduces the deformation speed of the second connection part that comes into contact with the stopper part, making it possible to more reliably prevent excessive deformation of the second connection part. In addition, damage to the second connection part when it comes into contact with the stopper part can be prevented.
　本開示の第１７態様の振動装置は、第９態様～第１６態様のいずれかの振動装置において、
　前記第１隙間が、前記透光体の最大振幅以上かつ前記第２隙間未満の大きさを有する。 A vibration device according to a seventeenth aspect of the present disclosure is the vibration device according to any one of the ninth to sixteenth aspects,
The first gap has a size equal to or larger than the maximum amplitude of the light-transmitting body and smaller than the second gap.
　第１７態様の振動装置によれば、透光体の振動装置の内部に位置する部材への衝突をより確実に防止でき、第２接続部の過度の変形をより確実に防止できる。 The vibration device of the 17th aspect can more reliably prevent the translucent body from colliding with a component located inside the vibration device, and can more reliably prevent excessive deformation of the second connection portion.
　以下、本開示の実施形態について図面を参照しながら説明する。以下の説明は、本開示を限定するものではなく、本質的に例示に過ぎず、本開示の主旨を逸脱しない範囲で適宜変更が可能である。図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 Below, an embodiment of the present disclosure will be described with reference to the drawings. The following description does not limit the present disclosure, but is essentially merely illustrative, and can be modified as appropriate without departing from the spirit of the present disclosure. The drawings are schematic, and the ratios of the dimensions, etc. do not necessarily correspond to reality.
　本開示の一実施形態の振動装置１は、図１～図４に示すように、レンズ５（透光体の一例）と、内部振動体（振動体の一例）７と、圧電素子９と、押え部３１ｂと、第１部材４０と、第２部材５０とを備える。 As shown in Figures 1 to 4, the vibration device 1 according to one embodiment of the present disclosure includes a lens 5 (an example of a light-transmitting body), an internal vibration body (an example of a vibration body) 7, a piezoelectric element 9, a pressing portion 31b, a first member 40, and a second member 50.
　レンズ５は、一例として、ガラス製である。図１に示すように、レンズ５の上面は凸形状になっており、表面に撥水コート及び反射防止膜（ＡＲコート）がコーティングされている。レンズ５の径方向の外端には、径方向外向きに延びる突起部５０１が設けられている。突起部５０１の上面５０２（図３参照）は、後述する押え部３１ｂの湾曲面３１７に沿って湾曲している。 The lens 5 is made of glass, for example. As shown in FIG. 1, the upper surface of the lens 5 is convex, and the surface is coated with a water-repellent coating and an anti-reflection film (AR coating). A protrusion 501 extending radially outward is provided at the radial outer end of the lens 5. The upper surface 502 (see FIG. 3) of the protrusion 501 is curved along the curved surface 317 of the pressing portion 31b, which will be described later.
　内部振動体７は、一例として、筒状体を有し、圧電素子９からの振動を増幅して、レンズ５を振動させる。本実施形態では、内部振動体７は、図２に示すように、内部振動体７は、レンズ５と接する第１部分７１と、圧電素子９が取り付けられた第２部分７２と、第１部分７１および第２部分７２を接続する略Ｓ字の断面形状の第３部分７３とで構成されている。第１部分７１は、筒状体の軸方向（例えば、第１方向Ｚ）に形状を延伸させた円筒形状を有している。第１部分７１は、筒状体の径方向に延びて、外部振動体３に接続されている。第２部分７２は、圧電素子９の振動とともに振動する部分であり、第１部分７１および第３部分７３に比べて板厚が大きい。これにより、圧電素子９の振動をレンズ５により効率的に伝え易くしている。第３部分７３は、第１部分７１を支持するとともに、第２部分７２の振動を第１部分７１に伝える部分である。第３部分７３が、内部振動体７の第１方向Ｚの一端を構成し、第１部分７１が、内部振動体７の第１方向Ｚの他端を構成している。 The internal vibrator 7 has a cylindrical body, for example, and amplifies the vibration from the piezoelectric element 9 to vibrate the lens 5. In this embodiment, as shown in FIG. 2, the internal vibrator 7 is composed of a first part 71 that contacts the lens 5, a second part 72 to which the piezoelectric element 9 is attached, and a third part 73 that connects the first part 71 and the second part 72 and has a cross-sectional shape of an approximately S-shape. The first part 71 has a cylindrical shape that is elongated in the axial direction of the cylindrical body (for example, the first direction Z). The first part 71 extends in the radial direction of the cylindrical body and is connected to the external vibrator 3. The second part 72 is a part that vibrates together with the vibration of the piezoelectric element 9, and has a plate thickness larger than that of the first part 71 and the third part 73. This makes it easier to transmit the vibration of the piezoelectric element 9 to the lens 5 more efficiently. The third part 73 is a part that supports the first part 71 and transmits the vibration of the second part 72 to the first part 71. The third portion 73 constitutes one end of the internal vibrator 7 in the first direction Z, and the first portion 71 constitutes the other end of the internal vibrator 7 in the first direction Z.
　第１部分７１、第２部分７２および第３部分７３は、一体で形成しても、個別に形成してもよい。図２に示すように、第３部分７３の最大外形寸法（＝Ｘ方向の最大寸法）は、第１部分７１の最大外形寸法よりも大きく、第２部分７２の最大外形寸法は、第３部分７３の最大外形寸法よりも大きい。これにより、圧電素子９の振動をレンズ５に効率よく伝えることができる。 The first portion 71, the second portion 72, and the third portion 73 may be formed integrally or separately. As shown in FIG. 2, the maximum outer dimension of the third portion 73 (= the maximum dimension in the X direction) is larger than the maximum outer dimension of the first portion 71, and the maximum outer dimension of the second portion 72 is larger than the maximum outer dimension of the third portion 73. This allows the vibration of the piezoelectric element 9 to be efficiently transmitted to the lens 5.
　圧電素子９は、圧電体および電極を含む。圧電体は、例えば、チタン酸バリウム（ＢａＴｉＯ３）、チタン酸・ジルコン酸鉛（ＰＺＴ：ＰｂＴｉＯ３・ＰｂＺｒＯ３）、チタン酸鉛（ＰｂＴｉＯ３）、メタニオブ酸鉛（ＰｂＮｂ２Ｏ６）、チタン酸ビスマス（Ｂｉ４Ｔｉ３Ｏ１２）、（Ｋ，Ｎａ）ＮｂＯ３等の圧電セラミックス、または、ＬｉＴａＯ３、ＬｉＮｂＯ３等の圧電単結晶を含む。電極は、例えば、Ｎｉ電極であってもよい。電極は、スパッタリング法により形成される、ＡｇまたはＡｕなどの金属薄膜からなる電極であってもよい。あるいは、電極はスパッタリング法の他、めっき、蒸着でも形成可能である。 The piezoelectric element 9 includes a piezoelectric body and an electrode. The piezoelectric body includes, for example, piezoelectric ceramics such as barium titanate (BaTiO3), lead zirconate titanate (PZT: PbTiO3.PbZrO3), lead titanate (PbTiO3), lead metaniobate (PbNb2O6), bismuth titanate (Bi4Ti3O12), (K,Na)NbO3, or piezoelectric single crystals such as LiTaO3 and LiNbO3. The electrode may be, for example, a Ni electrode. The electrode may be an electrode made of a metal thin film such as Ag or Au formed by a sputtering method. Alternatively, the electrode can be formed by plating or vapor deposition in addition to the sputtering method.
　本実施形態では、圧電素子９は、接着剤によって、内部振動体７の第２部分７２に接続され、第１方向Ｚに沿って見たときに、リング状に形成されているが、これに限らず、内部振動体７を振動させることのできる形状であればよい。 In this embodiment, the piezoelectric element 9 is connected to the second part 72 of the internal vibrator 7 by adhesive and is formed in a ring shape when viewed along the first direction Z, but this is not limited to this and any shape that can vibrate the internal vibrator 7 may be used.
　押え部３１ｂは、外部振動体３の一部を構成している。図１に示すように、外部振動体３は、固定部３５のほか、第１接続部３１と、第２接続部３３とを含む。押え部３１ｂは、内部振動体７の第１部分７１と共にレンズ５の突起部５０１を挟み込み可能に構成されている。本実施形態では、第１接続部３１は、内部振動体７の第１部分７１およびレンズ５の径方向外側に位置し、第２接続部３３から第１方向Ｚに沿って振動装置１の外部に向かって延びている。押え部３１ｂは、第１接続部３１の第１方向Ｚにおける第２接続部３３から遠い方の端からレンズ５に向かって突出している。押え部３１ｂの先端（つまり、レンズ５に対向する端）には、レンズ５に向かって突出する湾曲面３１７（図３参照）が設けられている。つまり、第１接続部３１には、押え部３１ｂが設けられている。第１接続部３１は、押え部３１ｂを介してレンズ５と接続されている。 The pressing portion 31b constitutes a part of the external vibrator 3. As shown in FIG. 1, the external vibrator 3 includes a first connection portion 31 and a second connection portion 33 in addition to the fixing portion 35. The pressing portion 31b is configured to be able to clamp the protrusion portion 501 of the lens 5 together with the first part 71 of the internal vibrator 7. In this embodiment, the first connection portion 31 is located radially outside the first part 71 of the internal vibrator 7 and the lens 5, and extends from the second connection portion 33 toward the outside of the vibration device 1 along the first direction Z. The pressing portion 31b protrudes toward the lens 5 from the end of the first connection portion 31 farther from the second connection portion 33 in the first direction Z. The tip of the pressing portion 31b (i.e., the end facing the lens 5) is provided with a curved surface 317 (see FIG. 3) that protrudes toward the lens 5. In other words, the first connection portion 31 is provided with the pressing portion 31b. The first connection part 31 is connected to the lens 5 via the pressing part 31b.
　第２接続部３３は、第１接続部３１から第１方向Ｚに交差する方向（例えば、Ｘ方向）に沿ってレンズ５から離れる方向に延びている。本実施形態では、第２接続部３３は、レンズ５の光軸方向（例えば、第１方向Ｚ）と垂直な方向（言い換えると、光軸方向に対する径方向）に沿って環状に延びている。第２接続部３３の厚みは、固定部３５の厚みよりも小さく、例えば、０．２ｍｍ以上１．０ｍｍ以下の厚みである。また、第２接続部３３の厚みは、例えば、内部振動体７の第３部分７３の０．２倍以上１．５倍以下である。第２接続部３３は、このような薄い肉厚であるので、板ばねとしての機能を有している。本実施形態では、第２接続部３３は、レンズ５で発生した振動を吸収するように、第１方向Ｚに沿って弾性変形可能に構成されている。 The second connection part 33 extends from the first connection part 31 in a direction (e.g., X direction) intersecting the first direction Z in a direction away from the lens 5. In this embodiment, the second connection part 33 extends in a ring shape in a direction perpendicular to the optical axis direction (e.g., the first direction Z) of the lens 5 (in other words, in a radial direction with respect to the optical axis direction). The thickness of the second connection part 33 is smaller than the thickness of the fixing part 35, and is, for example, 0.2 mm to 1.0 mm. In addition, the thickness of the second connection part 33 is, for example, 0.2 times to 1.5 times that of the third part 73 of the internal vibrator 7. Since the second connection part 33 has such a thin thickness, it functions as a leaf spring. In this embodiment, the second connection part 33 is configured to be elastically deformable along the first direction Z so as to absorb vibrations generated in the lens 5.
　固定部３５は、第２接続部３３の第１方向Ｚに交差する方向の両端のうち、第１接続部３１に接続されている端部３３１とは反対側の端部３３２に接続されている。固定部３５は、例えば、撮像素子を収納するケース（図示せず）およびレンズモジュール１５（図１３参照）等の部材が接続され、レンズ５の変位量の１００分の１以下の振動に抑えるノードがあり、これら部材に振動を伝搬させないように構成されている。固定部３５の体積が大きいほど、固定部３５の振動を抑えることができる。本実施形態では、固定部３５は、四角形状の外形を有している。外形が四角形状であれば、振動装置１のサイズを大きくすることなく、固定部３５の体積を大きくすることができる。例えば、直径２５ｍｍの円柱形状よりも、２５ｍｍ×２５ｍｍの立方体のほうが、体積が大きい。 The fixed part 35 is connected to the end 332 opposite to the end 331 connected to the first connection part 31, among both ends of the second connection part 33 in the direction intersecting the first direction Z. The fixed part 35 is connected to components such as a case (not shown) for storing an image sensor and a lens module 15 (see FIG. 13), and has a node that suppresses vibration to less than 1/100 of the displacement of the lens 5, and is configured not to transmit vibration to these components. The larger the volume of the fixed part 35, the more the vibration of the fixed part 35 can be suppressed. In this embodiment, the fixed part 35 has a rectangular outer shape. If the outer shape is rectangular, the volume of the fixed part 35 can be increased without increasing the size of the vibration device 1. For example, a cube of 25 mm x 25 mm has a larger volume than a cylinder of 25 mm in diameter.
　振動装置１では、レンズ５、外部振動体３の第１接続部３１および内部振動体７の第１部分７１で囲まれた部分１００にゴム等の弾性体または接着層が設けられている。これにより、レンズ５の負荷が軽減される。 In the vibration device 1, an elastic body such as rubber or an adhesive layer is provided in the portion 100 surrounded by the lens 5, the first connection portion 31 of the external vibrator 3, and the first portion 71 of the internal vibrator 7. This reduces the load on the lens 5.
　第１部材４０は、図３に示すように、レンズ５および押え部３１ｂの間に位置し、レンズ５および押え部３１ｂに接続されている。第２部材５０は、図４に示すように、レンズ５および内部振動体７の間に位置し、レンズ５および内部振動体７に接続されている。第１部材４０および第２部材５０は、樹脂、金属等の任意の材料を含み、次に示す２つの条件の少なくともいずれかを満たすように構成されている。
　　・第１部材４０の厚みｔＡが、第２部材５０の厚みｔＢ以上である（ｔＡ≧ｔＢ）。
　　・第１部材４０のヤング率ｙＡが、第２部材５０のヤング率ｙＢ以下である（ｙＡ≦ｙＢ）。 As shown in Fig. 3, the first member 40 is located between the lens 5 and the pressing portion 31b and is connected to the lens 5 and the pressing portion 31b. As shown in Fig. 4, the second member 50 is located between the lens 5 and the internal vibrator 7 and is connected to the lens 5 and the internal vibrator 7. The first member 40 and the second member 50 include any material such as resin, metal, etc., and are configured to satisfy at least one of the following two conditions.
The thickness tA of the first member 40 is greater than or equal to the thickness tB of the second member 50 (tA≧tB).
The Young's modulus yA of the first member 40 is equal to or less than the Young's modulus yB of the second member 50 (yA≦yB).
　第１部材４０の厚みｔＡは、第１部材４０の厚みが最小となる箇所で定義する。第２部材５０の厚みｔＢは、レンズ５および内部振動体７の接合面の平面度によって略均一となるので、第２部材５０の任意の箇所で定義してもよい。 The thickness tA of the first member 40 is defined at the point where the thickness of the first member 40 is at its smallest. The thickness tB of the second member 50 is approximately uniform due to the flatness of the bonding surfaces of the lens 5 and the internal vibrator 7, so it may be defined at any point of the second member 50.
　第１部材４０および第２部材５０の厚みｔＡ、ｔＢは、例えば、第１部材４０および第２部材５０が液体状の接着剤で構成されている場合、接着剤の粘度、接着剤硬化時の加圧量、接着剤に添加するスペーサー径等によって制御可能である。第１部材４０および第２部材５０の厚みｔＡ、ｔＢは、例えば、振動装置１の断面をマイクロスコープで観察することにより確認できる。 When the first member 40 and the second member 50 are made of a liquid adhesive, for example, the thicknesses tA and tB of the first member 40 and the second member 50 can be controlled by the viscosity of the adhesive, the amount of pressure applied when the adhesive hardens, the diameter of the spacer added to the adhesive, etc. The thicknesses tA and tB of the first member 40 and the second member 50 can be confirmed, for example, by observing the cross section of the vibration device 1 with a microscope.
　レンズ５の振動を極大化する設計においては、圧電素子９の微細な呼吸振動を内部振動体７および押え部３１ｂ等で増幅させ、レンズ５に振動を伝達させることがポイントとなる。第１部材４０および第２部材５０には、主に「振動の伝達」と「異種材間の接合信頼性の強化」との２つの役割がある。「振動の伝達」においては、第１部材４０および第２部材５０のヤング率が小さいことから、第１部材４０および第２部材５０の厚みは薄いほうが有利である。「異種材間の接合信頼性の強化」においては、レンズ５、内部振動体７および押え部３１ｂの各部材の線膨張係数の差に伴う熱応力を減衰させる緩衝層としての作用を考慮すると、第１部材４０および第２部材５０が比較的厚みを有しているほうが有利となる。ただし、第１部材４０および第２部材５０の箇所によって、振動特性と熱応力の厚み感度が異なることが分かった。すなわち、厚み感度の関係性が明らかとなれば、部分ごとに第１部材４０および第２部材５０の厚みを制御することで、「振動の伝達」および「異種材間の接合信頼性の強化」の双方にとって有利な関係を選択することが可能となる。 In a design that maximizes the vibration of the lens 5, the key is to amplify the minute breathing vibration of the piezoelectric element 9 by the internal vibrator 7 and the pressing part 31b, etc., and transmit the vibration to the lens 5. The first member 40 and the second member 50 mainly have two roles: "transmitting vibration" and "strengthening the joint reliability between different materials." In "transmitting vibration," since the Young's modulus of the first member 40 and the second member 50 is small, it is advantageous for the first member 40 and the second member 50 to be thin. In "strengthening the joint reliability between different materials," it is advantageous for the first member 40 and the second member 50 to be relatively thick, considering the function as a buffer layer that attenuates the thermal stress caused by the difference in the linear expansion coefficient of each member of the lens 5, the internal vibrator 7, and the pressing part 31b. However, it was found that the vibration characteristics and thickness sensitivity of thermal stress differ depending on the location of the first member 40 and the second member 50. In other words, if the relationship of thickness sensitivity becomes clear, it will be possible to select a relationship that is advantageous for both "transmission of vibration" and "strengthening the joint reliability between dissimilar materials" by controlling the thickness of the first member 40 and the second member 50 for each part.
　図５は、ＦＥＭ（有限要素法）を用いた第１部材４０および第２部材５０の厚みｔＡ、ｔＢとレンズ５頂部の最大変位量との関係を示すグラフである。ＦＥＭ計算結果に使用した物性定数は下記表１のとおりである。
Figure JPOXMLDOC01-appb-T000001
 5 is a graph showing the relationship between the thicknesses tA and tB of the first member 40 and the second member 50 and the maximum displacement of the apex of the lens 5, calculated using FEM (finite element method). The physical constants used in the FEM calculation are shown in Table 1 below.
Figure JPOXMLDOC01-appb-T000001
　レンズ５頂部の変位量は、ｔＡ、ｔＢ共に、０．００１ｍｍ＝１００としたときの相対値とした。第１部材４０および第２部材５０の一方の厚みを変更したとき、第１部材４０および第２部材５０の他方の厚みは０．００５ｍｍで固定した。その結果、第１部材４０および第２部材５０の厚みに対するレンズ５頂部の変位量の感度は、第２部材５０（ｔＢ）のほうが大きく、第２部材５０の厚化に伴って、レンズ５頂部の変位量が減衰することが分かった。これは、次の理由による。圧電素子９で発生した微小変位が圧電素子９、内部振動体７、第２部材５０およびレンズ５を経る過程で振動が増幅されるのに伴い、第２部材５０にかかる応力が増大し、変形し易くなる。第１部材４０および第２部材５０の材料であるエポキシ樹脂は、ヤング率が比較的小さい材料であるから、変形により振動を減衰させる効果がある。つまり、変形量が小さく、レンズ５への振動伝搬の寄与度が小さい第１部材４０の厚みｔＡを厚くすることによるレンズ５頂部の変位量の減衰は小さいが、変形量が大きい第２部材５０の厚みｔＢを厚くすることによるレンズ５頂部の変位量の減衰は大きくなる。 The displacement of the top of the lens 5 was set as a relative value when tA and tB were both 0.001 mm = 100. When the thickness of one of the first member 40 and the second member 50 was changed, the thickness of the other of the first member 40 and the second member 50 was fixed at 0.005 mm. As a result, it was found that the sensitivity of the displacement of the top of the lens 5 to the thickness of the first member 40 and the second member 50 was greater for the second member 50 (tB), and the displacement of the top of the lens 5 attenuated as the second member 50 became thicker. This is for the following reason. As the vibration of the minute displacement generated by the piezoelectric element 9 is amplified in the process of passing through the piezoelectric element 9, the internal vibrator 7, the second member 50, and the lens 5, the stress applied to the second member 50 increases and it becomes easier to deform. The epoxy resin, which is the material of the first member 40 and the second member 50, is a material with a relatively small Young's modulus, so it has the effect of attenuating vibration by deformation. In other words, increasing the thickness tA of the first member 40, which has a small amount of deformation and contributes little to vibration propagation to the lens 5, reduces the amount of displacement at the top of the lens 5 by a small amount, but increasing the thickness tB of the second member 50, which has a large amount of deformation, reduces the amount of displacement at the top of the lens 5 by a large amount.
　一方で、異種材間の接合信頼性の強化という面において、第１部材４０および第２部材５０の厚みｔＡ、ｔＢは異なる作用をする。特に振動動作時ではなく、熱負荷でかかる熱応力による応力について注目する。異種材接合箇所には、部材特有の線膨張係数の差が大きいほど大きな熱応力がかかり、第１部材４０および第２部材５０の剥離、部材破壊などの原因となる。例えば、上記表１に示したように、レンズ５（ガラス）の線膨張係数は０．６×１０－５（１／ｄｅｇ）であり、押え部３１ｂ（ステンレス）の線膨張係数は１．０３×１０－５（１／ｄｅｇ）であり、異なっている。より線膨張係数が乖離する組み合わせを選定すると、レンズ５、内部振動体７および押え部３１ｂの各部材にかかる熱応力は大きくなる。 On the other hand, in terms of strengthening the joint reliability between different materials, the thicknesses tA and tB of the first member 40 and the second member 50 have different effects. In particular, attention is paid to the stress due to thermal stress applied by thermal load, not during vibration operation. The greater the difference in the linear expansion coefficients specific to the members, the greater the thermal stress applied to the joint between the different materials, which causes peeling of the first member 40 and the second member 50, member destruction, etc. For example, as shown in Table 1 above, the linear expansion coefficient of the lens 5 (glass) is 0.6×10 −5 (1/deg), and the linear expansion coefficient of the pressing portion 31b (stainless steel) is 1.03×10 −5 (1/deg), which are different. If a combination with a greater deviation in linear expansion coefficients is selected, the thermal stress applied to each member of the lens 5, the internal vibrator 7, and the pressing portion 31b will be greater.
　図６は、ＦＥＭを用いた第１部材４０および第２部材５０の厚みｔＡ、ｔＢと、レンズ５にかかる最大熱応力の関係を示すグラフである。ＦＥＭ計算結果に使用した物性定数は上記表１のとおりである。熱応力は、ｔＡ、ｔＢ共に、０．００１ｍｍ＝１００としたときの相対値とした。第１部材４０および第２部材５０の一方の厚みを変更したとき、第１部材４０および第２部材５０の他方の厚みは０．００５ｍｍで固定した。その結果、第１部材４０および第２部材５０の厚みｔＡ、ｔＢに対する熱応力の感度は、第１部材４０（ｔＡ）のほうが大きく、第１部材４０の厚化に伴って、熱応力が大きく減衰することが分かった。一方、第２部材５０（ｔＢ）の厚化に伴う熱応力の変化は殆どない。これは、熱応力が大きくかかる箇所が、押え部３１ｂの近傍であるためである（図７参照）。 Figure 6 is a graph showing the relationship between the thicknesses tA and tB of the first member 40 and the second member 50 and the maximum thermal stress applied to the lens 5 using FEM. The physical constants used in the FEM calculation results are as shown in Table 1 above. The thermal stresses tA and tB were both relative values when 0.001 mm = 100. When the thickness of one of the first member 40 and the second member 50 was changed, the thickness of the other of the first member 40 and the second member 50 was fixed at 0.005 mm. As a result, it was found that the sensitivity of the thermal stress to the thicknesses tA and tB of the first member 40 and the second member 50 was greater for the first member 40 (tA), and that the thermal stress attenuated significantly as the first member 40 became thicker. On the other hand, there was almost no change in the thermal stress as the second member 50 (tB) became thicker. This is because the area where the thermal stress was large was near the pressing portion 31b (see Figure 7).
　以上から、「振動の伝達」および「異種材間の接合信頼性の強化」の観点から、有効なｔＡ、ｔＢの関係は、「ｔＡ≧ｔＢ」であることが分かった。この関係は、レンズ５の形状問わず成り立つ。 From the above, it was found that the effective relationship between tA and tB from the standpoint of "transmission of vibration" and "strengthening the joint reliability between dissimilar materials" is "tA ≧ tB." This relationship holds regardless of the shape of the lens 5.
　図８は、ＦＥＭを用いた第１部材４０および第２部材５０のヤング率ｙＡ、ｙＢと、レンズ５頂部の最大変位量との関係を示すグラフである。ＦＥＭ計算結果に使用した物性定数は、上記表１のとおりである。レンズ５頂部の最大変位量は、ｙＡ、ｙＢ共に、３ＧＰａ＝１００としたときの相対値とした。第１部材４０および第２部材５０の一方のヤング率を変更したとき、第１部材４０および第２部材５０の他方のヤング率は３ＧＰａで固定した。その結果、第１部材４０および第２部材５０のヤング率ｙＡ、ｙＢに対するレンズ５頂部の変位量の感度は、第２部材５０（ｙＢ）のほうが大きく、ヤング率の増加に伴って、レンズ５頂部の変位量が増加することが分かった。一方、第１部材４０（ｙＡ）は、ヤング率の変動に対するレンズ５頂部の変位量の感度は殆どない。 Figure 8 is a graph showing the relationship between the Young's moduli yA and yB of the first member 40 and the second member 50 using FEM and the maximum displacement of the apex of the lens 5. The physical constants used in the FEM calculation results are as shown in Table 1 above. The maximum displacement of the apex of the lens 5 was set as a relative value when 3 GPa = 100 for both yA and yB. When the Young's modulus of one of the first member 40 and the second member 50 was changed, the Young's modulus of the other of the first member 40 and the second member 50 was fixed at 3 GPa. As a result, it was found that the sensitivity of the displacement of the apex of the lens 5 to the Young's moduli yA and yB of the first member 40 and the second member 50 was greater for the second member 50 (yB), and that the displacement of the apex of the lens 5 increased with an increase in the Young's modulus. On the other hand, the first member 40 (yA) has almost no sensitivity of the displacement of the apex of the lens 5 to the variation in the Young's modulus.
　図９は、ＦＥＭを用いた第１部材４０および第２部材５０のヤング率ｙＡ、ｙＢと、レンズ５にかかる最大熱応力との関係を示すグラフである。ＦＥＭ計算結果に使用した物性定数は、上記表１のとおりである。熱応力は、ｙＡ、ｙＢ共に、３ＧＰａ＝１００としたときの相対値とした。第１部材４０および第２部材５０の一方のヤング率を変更したとき、第１部材４０および第２部材５０の他方のヤング率は３ＧＰａで固定した。その結果、ヤング率に対する熱応力の感度は、第１部材４０（ｙＡ）のほうが大きく、ヤング率が小さくなるにしたがって、熱応力が大きく減衰することが分かった。一方、第２部材５０（ｙＢ）のヤング率に対する熱応力の感度は殆どない。 Figure 9 is a graph showing the relationship between the Young's moduli yA and yB of the first member 40 and the second member 50 using FEM, and the maximum thermal stress applied to the lens 5. The physical constants used in the FEM calculation results are as shown in Table 1 above. The thermal stresses, yA and yB, were both relative values when 3 GPa = 100. When the Young's modulus of one of the first member 40 and the second member 50 was changed, the Young's modulus of the other of the first member 40 and the second member 50 was fixed at 3 GPa. As a result, it was found that the sensitivity of the thermal stress to the Young's modulus was greater for the first member 40 (yA), and that the thermal stress attenuated significantly as the Young's modulus decreased. On the other hand, the second member 50 (yB) had almost no sensitivity of the thermal stress to the Young's modulus.
　以上から、「振動の伝達」および「異種材間の接合信頼性の強化」の観点から、有効なｙＡ、ｙＢの関係は「ｙＡ≦ｙＢ」であることが分かった。この関係は、第１部材４０および第２部材５０に使用される材料の種類を問わず成り立つ。つまり、第１部材４０および第２部材５０は、同じ材料で構成されていてもよいし、異なる材料で構成されていてもよい。 From the above, it was found that the effective relationship between yA and yB is "yA ≦ yB" from the standpoint of "vibration transmission" and "strengthening joint reliability between dissimilar materials." This relationship holds regardless of the type of material used for the first member 40 and the second member 50. In other words, the first member 40 and the second member 50 may be made of the same material or different materials.
　本開示の振動装置１は、内部振動体７と、内部振動体７の第１方向の一端に位置する圧電素子９と、内部振動体７の第１方向の他端に位置するレンズ５と、内部振動体７の他端と共にレンズ５を第１方向において挟み込む押え部３１ｂと、第１部材４０および第２部材５０とを備える。第１部材４０は、レンズ５および押え部３１ｂの間に位置し、レンズ５および押え部３１ｂに接続されている。第２部材５０は、レンズ５および内部振動体７の間に位置し、レンズ５および内部振動体７に接続されている。第１部材４０および第２部材５０は、少なくとも次のいずれかの条件を満たすように構成されている。このような構成により、レンズ５および内部振動体７間の接合信頼性、並びに、レンズ５および押え部３１ｂの接合信頼性を高めることができる。
　　・第１部材４０の厚みｔＡが、第２部材５０の厚みｔＢ以上である（ｔＡ≧ｔＢ）。　　・第１部材４０のヤング率ｙＡが、第２部材５０のヤング率ｙＢ以下である（ｙＡ≦ｙＢ）。 The vibration device 1 of the present disclosure includes an internal vibrator 7, a piezoelectric element 9 located at one end of the internal vibrator 7 in the first direction, a lens 5 located at the other end of the internal vibrator 7 in the first direction, a pressing portion 31b that sandwiches the lens 5 together with the other end of the internal vibrator 7 in the first direction, and a first member 40 and a second member 50. The first member 40 is located between the lens 5 and the pressing portion 31b and is connected to the lens 5 and the pressing portion 31b. The second member 50 is located between the lens 5 and the internal vibrator 7 and is connected to the lens 5 and the internal vibrator 7. The first member 40 and the second member 50 are configured to satisfy at least one of the following conditions. With this configuration, it is possible to increase the bonding reliability between the lens 5 and the internal vibrator 7, and the bonding reliability between the lens 5 and the pressing portion 31b.
The thickness tA of the first member 40 is equal to or greater than the thickness tB of the second member 50 (tA≧tB). The Young's modulus yA of the first member 40 is equal to or less than the Young's modulus yB of the second member 50 (yA≦yB).
　振動装置１は、次のように構成することもできる。 The vibration device 1 can also be configured as follows:
　第１部材４０は、防水機能を有する材料を含んでもよい。これにより、振動装置１の内部への液滴の浸入をより確実に抑制できる。防水機能を有する材料は、例えば、車載・自動車部品規格ＩＳＯ２０６５３に基づくＩＰ試験のＩＰＸ９Ｋを満たす材料を含む。 The first member 40 may include a material having a waterproof function. This can more reliably prevent liquid droplets from penetrating into the inside of the vibration device 1. The material having a waterproof function includes, for example, a material that meets the IPX9K standard of the IP test based on the in-vehicle and automobile parts standard ISO20653.
　第２部材５０は、接着機能を有する材料を含んでもよい。これにより、振動装置１の振動特性が担保され、振動装置１の振動減衰をより確実に抑制できる。接着機能を有する材料は、例えば、レンズ５および内部振動体７間の引張強度が、振動装置１の駆動時にかかるせん断応力値またはＺ垂直応力値以上の接着剤を含む。 The second member 50 may contain a material with an adhesive function. This ensures the vibration characteristics of the vibration device 1, and more reliably suppresses vibration damping of the vibration device 1. The material with an adhesive function includes, for example, an adhesive whose tensile strength between the lens 5 and the internal vibrating body 7 is equal to or greater than the shear stress value or Z-normal stress value applied when the vibration device 1 is driven.
　レンズ５および押え部３１ｂの形状は、前記実施形態に限らない。例えば、図１０に示すように、押え部３１ｂの先端に直線的に延びる傾斜面３１８を設け、レンズ５の突起部５０１の上面に傾斜面３１８に対向する傾斜面５０３を設けてもよい。図１１に示すように、レンズ５に平坦な上面５０４を設け、押え部３１ｂの先端にレンズ５の上面５０４に対向する押え面３１９を設けてもよい。 The shapes of the lens 5 and the pressing portion 31b are not limited to those of the above embodiment. For example, as shown in FIG. 10, a linearly extending inclined surface 318 may be provided at the tip of the pressing portion 31b, and an inclined surface 503 facing the inclined surface 318 may be provided on the upper surface of the protrusion 501 of the lens 5. As shown in FIG. 11, a flat upper surface 504 may be provided on the lens 5, and a pressing surface 319 facing the upper surface 504 of the lens 5 may be provided at the tip of the pressing portion 31b.
　押え部は、振動体（上記実施形態では、外部振動体３）の一部を構成する押え部３１ｂである場合に限らない。例えば、図１２に示すように、振動体とは別の部材（押え部材とも言う。）６０で構成してもよい。図１２の振動装置１では、押え部材６０は、例えば、筒状の側壁６２と、側壁６２の光軸に対する径方向（以下、径方向という。）の内側（例えば、Ｘ方向でかつレンズ５に接近する方向）に突出する押圧部６１とを含む。振動体１２０は、例えば、筒状の本体部１２１と、本体部１２１から径方向の内側に突出する支持部１２２とを含む。 The pressing portion is not limited to pressing portion 31b constituting a part of the vibrating body (external vibrating body 3 in the above embodiment). For example, as shown in FIG. 12, it may be constituted by a member (also called pressing member) 60 separate from the vibrating body. In the vibration device 1 of FIG. 12, the pressing member 60 includes, for example, a cylindrical side wall 62 and a pressing portion 61 that protrudes inward (for example, in the X direction and in the direction approaching the lens 5) in the radial direction (hereinafter referred to as the radial direction) relative to the optical axis of the side wall 62. The vibrating body 120 includes, for example, a cylindrical main body portion 121 and a support portion 122 that protrudes inward in the radial direction from the main body portion 121.
　振動装置１は、図１３～図１６に示すように、ストッパー部８０を備えていてもよい。ストッパー部８０は、第２接続部３３が接触可能な状態で固定部３５に接続されている。第１方向Ｚにおけるストッパー部８０および第２接続部３３の間には、第１隙間９１が設けられている。ストッパー部８０は、金属および樹脂を含む任意の材料で形成することができる。 The vibration device 1 may include a stopper portion 80, as shown in Figs. 13 to 16. The stopper portion 80 is connected to the fixed portion 35 in a state in which the second connection portion 33 can come into contact with the stopper portion 80. A first gap 91 is provided between the stopper portion 80 and the second connection portion 33 in the first direction Z. The stopper portion 80 may be made of any material, including metal and resin.
　図１３に示す振動装置１では、固定部３５が、第１方向Ｚにおいて第２接続部３３に対して間隔を空けて対向する第１対向面３５１を有している。ストッパー部８０は、固定部３５の第１対向面３５１に接続されている。図１３に示す振動装置１では、ストッパー部８０は、固定部３５とは別の部材であり、接着剤等により固定部３５に固定されている。 In the vibration device 1 shown in FIG. 13, the fixing portion 35 has a first opposing surface 351 that faces the second connection portion 33 at a distance in the first direction Z. The stopper portion 80 is connected to the first opposing surface 351 of the fixing portion 35. In the vibration device 1 shown in FIG. 13, the stopper portion 80 is a separate member from the fixing portion 35, and is fixed to the fixing portion 35 with an adhesive or the like.
　第２接続部３３は、第１板ばね部３３０１と、第２板ばね部３３０２と、連結部３３０３とで構成されている。第１板ばね部３３０１は、第１接続部３１に接続されている端部３３１から径方向の外側に向かって延びている。第１板ばね部３３０１と第１対向面３５１との間に固定部３５が位置している。第２板ばね部３３０２は、第１板ばね部３３０１の径方向の両端のうち、第１接続部３１から遠い方の端部から第１方向Ｚに沿って固定部３５に向かって延びている。固定部３５と第２板ばね部３３０２の間には、第３隙間９３が設けられている。第３隙間９３は、設けられていなくてもよい。連結部３３０３は、第２板ばね部３３０２の第１方向Ｚの両端のうち、固定部３５に近い方の端部から第１対向面３５１に沿って径方向の外側に向かって延びている。連結部３３０３の径方向の外側の端部が端部３３２を構成している。第２接続部３３は、連結部３３０３を介して固定部３５に接続されている。 The second connection portion 33 is composed of a first leaf spring portion 3301, a second leaf spring portion 3302, and a linking portion 3303. The first leaf spring portion 3301 extends radially outward from the end 331 connected to the first connection portion 31. The fixing portion 35 is located between the first leaf spring portion 3301 and the first opposing surface 351. The second leaf spring portion 3302 extends from the end farther from the first connection portion 31 of both ends of the first leaf spring portion 3301 in the radial direction toward the fixing portion 35 along the first direction Z. A third gap 93 is provided between the fixing portion 35 and the second leaf spring portion 3302. The third gap 93 does not have to be provided. The linking portion 3303 extends radially outward from the end closer to the fixing portion 35 of both ends of the second leaf spring portion 3302 in the first direction Z along the first opposing surface 351. The radially outer end of the connecting portion 3303 constitutes the end portion 332. The second connection portion 33 is connected to the fixed portion 35 via the connecting portion 3303.
　例えば、レンズ５に対して振動装置１の内部に向かって外力が加えられた場合、レンズ５に接続されている第１接続部３１を介して第２接続部３３が振動装置１の内部に向かって移動し、ストッパー部８０に接触する。第２接続部３３がストッパー部８０に接触することで、振動装置１の内部に向かう方向における第２接続部３３の移動が規制され、その結果、振動装置１の内部に向かう方向におけるレンズ５の移動が規制される。つまり、ストッパー部８０を設けることで、レンズ５の振動装置１の内部に位置する部材（例えば、レンズモジュール１５）への衝突を防止できる。また、例えば、第２接続部３３に応力が加えられた場合、第２接続部３３がストッパー部８０に接触するので、第２接続部３３の過度の変形を防止できる。 For example, when an external force is applied to the lens 5 toward the inside of the vibration device 1, the second connection part 33 moves toward the inside of the vibration device 1 via the first connection part 31 connected to the lens 5 and comes into contact with the stopper part 80. When the second connection part 33 comes into contact with the stopper part 80, the movement of the second connection part 33 in the direction toward the inside of the vibration device 1 is restricted, and as a result, the movement of the lens 5 in the direction toward the inside of the vibration device 1 is restricted. In other words, by providing the stopper part 80, it is possible to prevent the lens 5 from colliding with a member (e.g., the lens module 15) located inside the vibration device 1. Also, for example, when stress is applied to the second connection part 33, the second connection part 33 comes into contact with the stopper part 80, and therefore excessive deformation of the second connection part 33 can be prevented.
　図１３に示す振動装置１では、ストッパー部８０が固定部３５の第１対向面３５１に接続されているので、レンズ５の振動装置１の内部に位置する部材（例えば、レンズモジュール１５）への衝突をより確実に防止でき、第２接続部３３の過度の変形をより確実に防止できる。 In the vibration device 1 shown in FIG. 13, the stopper portion 80 is connected to the first opposing surface 351 of the fixing portion 35, so that collision of the lens 5 with a component (e.g., the lens module 15) located inside the vibration device 1 can be more reliably prevented, and excessive deformation of the second connection portion 33 can be more reliably prevented.
　第１隙間９１は、例えば、レンズ５の最大振幅以上かつ第２隙間９２未満の大きさを有する。このように構成することで、レンズ５の振動装置１の内部に位置する部材（例えば、レンズモジュール１５）への衝突をより確実に防止でき、第２接続部３３の過度の変形をより確実に防止できる。第２隙間９２は、例えば、第１方向Ｚにおけるレンズ５およびレンズモジュール１５の間の隙間のうち、最小の隙間である。 The first gap 91 has a size, for example, equal to or greater than the maximum amplitude of the lens 5 and less than the second gap 92. This configuration can more reliably prevent the lens 5 from colliding with a component (for example, the lens module 15) located inside the vibration device 1, and can more reliably prevent excessive deformation of the second connection portion 33. The second gap 92 is, for example, the smallest gap between the lens 5 and the lens module 15 in the first direction Z.
　図１４に示す振動装置１では、固定部３５およびストッパー部８０が一体に構成されている。固定部３５およびストッパー部８０を一体に構成することで、ストッパー部８０を固定部３５に接続する必要がなくなるので、振動装置１の製造コストを低減できる。 In the vibration device 1 shown in FIG. 14, the fixing portion 35 and the stopper portion 80 are integrally configured. By integrally configuring the fixing portion 35 and the stopper portion 80, it is no longer necessary to connect the stopper portion 80 to the fixing portion 35, and therefore the manufacturing cost of the vibration device 1 can be reduced.
　図１４に示す振動装置１では、ストッパー部８０が、第１方向Ｚにおいて第２接続部３３に対向する傾斜面８１を有している。傾斜面８１は、第１方向Ｚに交差する方向（例えば、Ｘ方向）において第１接続部３１に接近するに従って第１方向Ｚにおいて第２接続部３３から離れる方向に傾斜している。傾斜面８１を設けることにより、ストッパー部８０が傾斜面８１を有していない振動装置１と比較して、ストッパー部８０と第２接続部３３の第１板ばね部３３０１とが接触可能な領域を大きくすることができる。その結果、レンズ５の振動装置１の内部に位置する部材（例えば、レンズモジュール１５）への衝突をより確実に防止でき、第２接続部３３の過度の変形をより確実に防止できる。 14, the stopper portion 80 has an inclined surface 81 facing the second connection portion 33 in the first direction Z. The inclined surface 81 is inclined in the first direction Z in a direction intersecting the first direction Z (e.g., the X direction) as it approaches the first connection portion 31. By providing the inclined surface 81, the area in which the stopper portion 80 and the first leaf spring portion 3301 of the second connection portion 33 can contact each other can be made larger than in a vibration device 1 in which the stopper portion 80 does not have an inclined surface 81. As a result, collision of the lens 5 with a member (e.g., the lens module 15) located inside the vibration device 1 can be more reliably prevented, and excessive deformation of the second connection portion 33 can be more reliably prevented.
　図１５に示す振動装置１では、固定部３５が、第１方向Ｚに交差する方向（例えば、Ｘ方向）において内部振動体７に対して間隔を空けて対向する第２対向面３５２を有する。ストッパー部８０は、固定部３５の第２対向面３５２に接続されている。図１５に示す振動装置１では、ストッパー部８０は、固定部３５とは別の部材であり、接着剤等により固定部３５に固定されている。ストッパー部８０を第２対向面３５２に設けることで、振動装置１の構造および振動装置１を構成する各部材の材質等に応じて、第１隙間９１の大きさを調整できる。 In the vibration device 1 shown in FIG. 15, the fixing portion 35 has a second opposing surface 352 that faces the internal vibrator 7 at a distance in a direction (e.g., the X direction) intersecting the first direction Z. The stopper portion 80 is connected to the second opposing surface 352 of the fixing portion 35. In the vibration device 1 shown in FIG. 15, the stopper portion 80 is a separate member from the fixing portion 35, and is fixed to the fixing portion 35 by adhesive or the like. By providing the stopper portion 80 on the second opposing surface 352, the size of the first gap 91 can be adjusted depending on the structure of the vibration device 1 and the materials of the members that make up the vibration device 1.
　図１６に示す振動装置１では、ストッパー部８０が、第１方向Ｚに積層された第１層８０１および第２層８０２を有している。第１層８０１は、第２層８０２よりも第２接続部３３の近くに位置している。つまり、第１層８０１と第１板ばね部３３０１との間に、第１隙間９１が形成されている。第１層８０１は、第２層８０２よりも弾性率が小さくなるように構成されている。このように構成することで、ストッパー部８０に接触した第２接続部３３の変形速度が緩やかになり、第２接続部３３の過度の変形をより確実に防止できる。また、第２接続部３３がストッパー部８０に接触する際における第２接続部３３の損傷を防止できる。 In the vibration device 1 shown in FIG. 16, the stopper portion 80 has a first layer 801 and a second layer 802 stacked in the first direction Z. The first layer 801 is located closer to the second connection portion 33 than the second layer 802. In other words, a first gap 91 is formed between the first layer 801 and the first leaf spring portion 3301. The first layer 801 is configured to have a smaller elastic modulus than the second layer 802. By configuring it in this way, the deformation speed of the second connection portion 33 that contacts the stopper portion 80 becomes slower, and excessive deformation of the second connection portion 33 can be more reliably prevented. In addition, damage to the second connection portion 33 when the second connection portion 33 contacts the stopper portion 80 can be prevented.
　ストッパー部８０は、例えば、図１７に示すように、レンズ５の光軸Ｌに対する周方向に延びる円環状を有するように構成することができる。この場合、固定部３５は、内部振動体７を光軸Ｌまわりに取り囲むように構成されている。ストッパー部８０は、円環状を有する場合に限らず、例えば、図１８に示すように、光軸Ｌに対する周方向に沿って間隔を空けて位置する複数の部材８２を含むように構成されていてもよい。複数の部材８２の全てが、または、複数の部材８２の中の一部が、略同一の形状および大きさを有していてもよい。複数の部材８２の全てが、相互に異なる形状および大きさを有していてもよい。このように構成することで、レンズ５の振動装置１の内部に位置する部材（例えば、レンズモジュール１５）への衝突をより確実に防止でき、第２接続部３３の過度の変形をより確実に防止できる。 The stopper portion 80 can be configured to have an annular shape extending in the circumferential direction relative to the optical axis L of the lens 5, as shown in FIG. 17, for example. In this case, the fixing portion 35 is configured to surround the internal vibrator 7 around the optical axis L. The stopper portion 80 is not limited to having an annular shape, and may be configured to include a plurality of members 82 positioned at intervals along the circumferential direction relative to the optical axis L, as shown in FIG. 18, for example. All of the plurality of members 82, or some of the plurality of members 82, may have substantially the same shape and size. All of the plurality of members 82 may have mutually different shapes and sizes. By configuring in this way, it is possible to more reliably prevent the lens 5 from colliding with a member (e.g., the lens module 15) located inside the vibration device 1, and more reliably prevent excessive deformation of the second connection portion 33.
　本開示は、前述の様々な実施形態および変形例のうち、任意の実施形態および／または変形例を適宜組み合わせることができる。実施形態および／または変形例の組み合わせには、実施形態に含まれる構成および／または実施例に含まれる構成の組み合わせも含まれる。 The present disclosure may be implemented by combining any of the various embodiments and modifications described above as appropriate. Combinations of embodiments and/or modifications include combinations of configurations included in the embodiments and/or configurations included in the examples.
　本開示は、添付図面を参照しながら前述の実施形態および／または変形例を通して充分に記載されているが、前述の実施形態および／または変形例は、本開示の全てを網羅したものではない。本開示の技術分野における当業者であれば、多くの修正および変形が可能である。このような変形および修正は、本開示の範囲から外れない限りにおいて、本開示に含まれると理解されるべきである。 The present disclosure has been fully described through the above-described embodiments and/or modifications with reference to the accompanying drawings, but the above-described embodiments and/or modifications are not exhaustive of the present disclosure. Many modifications and variations are possible for those skilled in the art of the present disclosure. Such modifications and variations should be understood to be included in the present disclosure as long as they do not deviate from the scope of the present disclosure.
１　振動装置
３　外部振動体
５　レンズ
７　内部振動体
９　圧電素子
１５　レンズモジュール
３１　第１接続部
３１ｂ　押え部
３３　第２接続部
３３０１　第１板ばね部
３３０２　第２板ばね部
３３０３　連結部
３３１、３３２　端部
３５　固定部
３５１　第１対向面
３５２　第２対向面
４０　第１部材
５０　第２部材
５１　押圧部
６０　押え部材
６１　押圧部
６２　側壁
７１　第１部分
７２　第２部分
７３　第３部分
８０　ストッパー部
８１　傾斜面
８２　複数の部材
８０１　第１層
８０２　第２層
９１　第１隙間
９２　第２隙間
９３　第３隙間
１００　部分
１２０　振動体
１２１　本体部
１２２　支持部
３１７　湾曲面
３１８　傾斜面
３１９　押え面
５０１　突起部
５０２　上面
５０３　傾斜面
５０４　上面 1 Vibration device 3 External vibrator 5 Lens 7 Internal vibrator 9 Piezoelectric element 15 Lens module 31 First connection portion 31b Pressing portion 33 Second connection portion 3301 First leaf spring portion 3302 Second leaf spring portion 3303 Connecting portion 331, 332 End portion 35 Fixed portion 351 First opposing surface 352 Second opposing surface 40 First member 50 Second member 51 Pressing portion 60 Pressing member 61 Pressing portion 62 Side wall 71 First portion 72 Second portion 73 Third portion 80 Stopper portion 81 Inclined surface 82 Multiple members 801 First layer 802 Second layer 91 First gap 92 Second gap 93 Third gap 100 Part 120 Vibration body 121 Main body portion 122 Support portion 317 Curved surface 318 Inclined surface 319 Pressing surface 501 Protrusion portion 502 Upper surface 503 Inclined surface 504 Upper surface

Claims (17)

  1. 　振動体と、
    　前記振動体の第１方向の一端に位置する圧電素子と、
    　前記振動体の前記第１方向の他端に位置する透光体と、
    　前記振動体の他端と共に前記透光体を前記第１方向において挟み込む押え部と、
    　前記透光体および前記押え部の間に位置し、前記透光体および前記押え部に接続された第１部材と、
    　前記透光体および前記振動体の間に位置し、前記透光体および前記振動体に接続された第２部材と
    を備え、
    　前記第１部材の厚みが、前記第２部材の厚み以上である、振動装置。     A vibrating body;
    a piezoelectric element located at one end of the vibrating body in a first direction;
    a light-transmitting body located at the other end of the vibrating body in the first direction;
    a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction;
    a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion;
    a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body;
    A vibration device, wherein the thickness of the first member is greater than or equal to the thickness of the second member.
  2. 　前記第１部材のヤング率が、前記第２部材のヤング率以下である、請求項１に記載の振動装置。 The vibration device according to claim 1, wherein the Young's modulus of the first member is equal to or less than the Young's modulus of the second member.
  3. 　前記第２部材が、接着機能を有する材料を含む、請求項１または２に記載の振動装置。 The vibration device according to claim 1 or 2, wherein the second member includes a material having an adhesive function.
  4. 　前記第１部材が、防水機能を有する材料を含む、請求項１～３のいずれかに記載の振動装置。 The vibration device according to any one of claims 1 to 3, wherein the first member includes a material having a waterproof function.
  5. 　振動体と、
    　前記振動体の第１方向の一端に位置する圧電素子と、
    　前記振動体の前記第１方向の他端に位置する透光体と、
    　前記振動体の他端と共に前記透光体を前記第１方向において挟み込む押え部と、
    　前記透光体および前記押え部の間に位置し、前記透光体および前記押え部に接続された第１部材と、
    　前記透光体および前記振動体の間に位置し、前記透光体および前記振動体に接続された第２部材と
    を備え、
    　前記第１部材のヤング率が、前記第２部材のヤング率以下である、振動装置。     A vibrating body;
    a piezoelectric element located at one end of the vibrating body in a first direction;
    a light-transmitting body located at the other end of the vibrating body in the first direction;
    a pressing portion that sandwiches the light-transmitting body together with the other end of the vibration body in the first direction;
    a first member located between the light-transmitting body and the pressing portion and connected to the light-transmitting body and the pressing portion;
    a second member located between the light-transmitting body and the vibration body and connected to the light-transmitting body and the vibration body;
    A vibration device, wherein the Young's modulus of the first member is less than or equal to the Young's modulus of the second member.
  6. 　前記第１部材の厚みが、前記第２部材の厚み以上である、請求項５に記載の振動装置。 The vibration device according to claim 5, wherein the thickness of the first member is equal to or greater than the thickness of the second member.
  7. 　前記第２部材が、接着機能を有する材料を含む、請求項５または６に記載の振動装置。 The vibration device according to claim 5 or 6, wherein the second member includes a material having an adhesive function.
  8. 　前記第１部材が、防水機能を有する材料を含む、請求項５～７のいずれかに記載の振動装置。 The vibration device according to any one of claims 5 to 7, wherein the first member includes a material having a waterproof function.
  9. 　外部振動体と、ストッパー部とを備え、
    　前記外部振動体は、
    　前記押え部が設けられ、前記押え部を介して前記透光体と接続された第１接続部と、
    　前記第１接続部から前記第１方向に交差する方向に沿って前記透光体から離れる方向に延びる第２接続部と、
    　前記第２接続部の前記第１方向に交差する方向の両端のうち、前記第１接続部に接続されている端部とは反対側の端部に接続された固定部と
    を有し、
    　前記ストッパー部は、前記第２接続部が接触可能な状態で前記固定部に接続され、
    　前記第１方向における前記ストッパー部および前記第２接続部の間に第１隙間が設けられている、請求項１～８のいずれかに記載の振動装置。     The device includes an external vibrator and a stopper portion.
    The external vibrator is
    a first connection portion provided with the pressing portion and connected to the light-transmitting body via the pressing portion;
    a second connection portion extending from the first connection portion in a direction away from the light-transmitting body along a direction intersecting the first direction;
    a fixing portion connected to an end portion of the second connection portion opposite to an end portion connected to the first connection portion, the fixing portion being connected to the end portion of the second connection portion in a direction intersecting the first direction;
    the stopper portion is connected to the fixed portion in a state in which the second connection portion can come into contact with the fixed portion,
    The vibration device according to claim 1 , wherein a first gap is provided between the stopper portion and the second connection portion in the first direction.
  10. 　前記ストッパー部が、前記第１方向において前記第２接続部に対向する傾斜面を有し、
    　前記傾斜面は、前記第１方向に交差する方向において前記第１接続部に接近するに従って前記第１方向において前記第２接続部から離れる方向に傾斜する、請求項９に記載の振動装置。     the stopper portion has an inclined surface facing the second connection portion in the first direction,
    The vibration device according to claim 9 , wherein the inclined surface is inclined in a direction away from the second connection portion in the first direction as the inclined surface approaches the first connection portion in a direction intersecting the first direction.
  11. 　前記固定部は、前記振動体を前記透光体の光軸まわりに取り囲むように構成され、
    　前記ストッパー部は、前記光軸に対する周方向に延びる円環状を有する、請求項９または１０に記載の振動装置。     The fixing portion is configured to surround the vibration body around the optical axis of the light-transmitting body,
    The vibration device according to claim 9 or 10, wherein the stopper portion has an annular shape extending in a circumferential direction about the optical axis.
  12. 　前記固定部は、前記振動体を前記透光体の光軸まわりに取り囲むように構成され、
    　前記ストッパー部は、前記光軸に対する周方向に沿って間隔を空けて位置する複数の部材を含む、請求項９または１０に記載の振動装置。     The fixing portion is configured to surround the vibration body around the optical axis of the light-transmitting body,
    The vibration device according to claim 9 or 10, wherein the stopper portion includes a plurality of members positioned at intervals along a circumferential direction about the optical axis.
  13. 　前記固定部および前記ストッパー部が一体に構成されている、請求項９～１２のいずれかに記載の振動装置。 The vibration device according to any one of claims 9 to 12, wherein the fixing portion and the stopper portion are integrally formed.
  14. 　前記固定部が、前記第１方向において前記第２接続部に対して間隔を空けて対向する第１対向面を有し、
    　前記ストッパー部が、前記第１対向面に接続されている、請求項９～１３のいずれかに記載の振動装置。     the fixing portion has a first opposing surface that faces the second connection portion with a gap therebetween in the first direction,
    The vibration device according to any one of claims 9 to 13, wherein the stopper portion is connected to the first opposing surface.
  15. 　前記固定部が、前記第１方向に交差する方向において前記振動体に対して間隔を空けて対向する第２対向面を有し、
    　前記ストッパー部が、前記第２対向面に接続されている、請求項９～１３のいずれかに記載の振動装置。     the fixed portion has a second opposing surface that faces the vibration body with a gap therebetween in a direction intersecting the first direction,
    The vibration device according to any one of claims 9 to 13, wherein the stopper portion is connected to the second opposing surface.
  16. 　前記ストッパー部が、前記第１方向に積層された第１層および第２層を有し、
    　前記第１層は、前記第２層よりも前記第２接続部の近くに位置し、前記第２層よりも弾性率が小さくなるように構成されている、請求項９～１５のいずれかに記載の振動装置。     the stopper portion has a first layer and a second layer stacked in the first direction,
    A vibration device as described in any one of claims 9 to 15, wherein the first layer is located closer to the second connection portion than the second layer and is configured to have a smaller elastic modulus than the second layer.
  17. 　前記振動体の内部に位置し、前記透光体との間に第２隙間が設けられたレンズモジュールを備え、
    　前記第１隙間が、前記透光体の最大振幅以上かつ前記第２隙間未満の大きさを有する、請求項９～１６のいずれかに記載の振動装置。     a lens module located inside the vibration body and having a second gap between the lens module and the light-transmitting body;
    The vibration device according to any one of claims 9 to 16, wherein the first gap has a size equal to or greater than the maximum amplitude of the translucent body and smaller than the second gap.
PCT/JP2023/021009 2022-09-28 2023-06-06 Vibration device WO2024070063A1 (en)

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JP2022155068 2022-09-28

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021210208A1 (en) * 2020-04-17 2021-10-21 株式会社村田製作所 Vibration device
JP7099633B2 (en) * 2020-05-15 2022-07-12 株式会社村田製作所 Vibration device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021210208A1 (en) * 2020-04-17 2021-10-21 株式会社村田製作所 Vibration device
JP7099633B2 (en) * 2020-05-15 2022-07-12 株式会社村田製作所 Vibration device

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