WO2024052427A1 - Composant optique - Google Patents
Composant optique Download PDFInfo
- Publication number
- WO2024052427A1 WO2024052427A1 PCT/EP2023/074502 EP2023074502W WO2024052427A1 WO 2024052427 A1 WO2024052427 A1 WO 2024052427A1 EP 2023074502 W EP2023074502 W EP 2023074502W WO 2024052427 A1 WO2024052427 A1 WO 2024052427A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical component
- membrane
- light
- waveguide
- section
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 60
- 239000012528 membrane Substances 0.000 claims abstract description 85
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 230000003993 interaction Effects 0.000 claims description 13
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- 230000001902 propagating effect Effects 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 229910004205 SiNX Inorganic materials 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 230000001788 irregular Effects 0.000 claims description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 18
- 238000010521 absorption reaction Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000005253 cladding Methods 0.000 description 5
- 238000004611 spectroscopical analysis Methods 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 239000004038 photonic crystal Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004476 mid-IR spectroscopy Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 238000006880 cross-coupling reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000001285 laser absorption spectroscopy Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000012306 spectroscopic technique Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- IGELFKKMDLGCJO-UHFFFAOYSA-N xenon difluoride Chemical compound F[Xe]F IGELFKKMDLGCJO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/004—Specially adapted to detect a particular component for CO, CO2
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
Abstract
La présente invention concerne un composant optique (6) qui comprend un substrat (10), une entrée (12) conçue pour recevoir de la lumière, une sortie (14) conçue pour émettre de la lumière et un agencement de guide d'ondes (16) conçu pour diriger la lumière de l'entrée vers la sortie. L'agencement de guide d'ondes comprend une membrane (18) s'étendant sur un canal (22) dans le substrat pour former une partie non supportée (20) qui est séparée du substrat. La partie non supportée comprend une section de cœur ininterrompue (24) s'étendant entre des première et seconde surfaces de la membrane et une section structurée (26) adjacente à la section de cœur comprenant une pluralité de trous (28) dans ladite membrane. La section de cœur et la section structurée forment un guide d'ondes conçu pour diriger la lumière au moins à mi-chemin de l'entrée vers la sortie.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2213015.7 | 2022-09-06 | ||
| GBGB2213015.7A GB202213015D0 (en) | 2022-09-06 | 2022-09-06 | Optical components |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2024052427A1 true WO2024052427A1 (fr) | 2024-03-14 |
Family
ID=83933391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2023/074502 WO2024052427A1 (fr) | 2022-09-06 | 2023-09-06 | Composant optique |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB202213015D0 (fr) |
| WO (1) | WO2024052427A1 (fr) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140264030A1 (en) * | 2013-03-12 | 2014-09-18 | Massachusetts Institute Of Technology | Methods and apparatus for mid-infrared sensing |
| US20170227456A1 (en) * | 2014-10-16 | 2017-08-10 | Agency For Science, Technology And Research | Optical waveguide structure and optical gas sensor, and methods of fabrication thereof |
| JP6346796B2 (ja) * | 2014-06-06 | 2018-06-20 | 株式会社フジクラ | モード変換素子及び光導波路素子 |
| WO2021066721A1 (fr) * | 2019-10-04 | 2021-04-08 | Ottonello Briano Floria | Dispositif de capteur et procédé de détection d'un composant dans un fluide |
| US20210349261A1 (en) * | 2018-03-14 | 2021-11-11 | Floria Ottonello Briano | Device with a Waveguide with a Support Structure Comprising a Polymer Layer and Method for its Fabrication |
-
2022
- 2022-09-06 GB GBGB2213015.7A patent/GB202213015D0/en not_active Ceased
-
2023
- 2023-09-06 WO PCT/EP2023/074502 patent/WO2024052427A1/fr unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140264030A1 (en) * | 2013-03-12 | 2014-09-18 | Massachusetts Institute Of Technology | Methods and apparatus for mid-infrared sensing |
| JP6346796B2 (ja) * | 2014-06-06 | 2018-06-20 | 株式会社フジクラ | モード変換素子及び光導波路素子 |
| US20170227456A1 (en) * | 2014-10-16 | 2017-08-10 | Agency For Science, Technology And Research | Optical waveguide structure and optical gas sensor, and methods of fabrication thereof |
| US20210349261A1 (en) * | 2018-03-14 | 2021-11-11 | Floria Ottonello Briano | Device with a Waveguide with a Support Structure Comprising a Polymer Layer and Method for its Fabrication |
| WO2021066721A1 (fr) * | 2019-10-04 | 2021-04-08 | Ottonello Briano Floria | Dispositif de capteur et procédé de détection d'un composant dans un fluide |
Non-Patent Citations (4)
| Title |
|---|
| LONCAR M ET AL: "WAVEGUIDING IN PLANAR PHOTONIC CRYSTALS", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 77, no. 13, 25 September 2000 (2000-09-25), pages 1937 - 1939, XP000964097, ISSN: 0003-6951, DOI: 10.1063/1.1311604 * |
| OSMAN A ET AL: "Suspended low-loss germanium waveguides for the longwave-infrared", SPIE PROCEEDINGS; [PROCEEDINGS OF SPIE ISSN 0277-786X], SPIE, US, vol. 10923, 4 March 2019 (2019-03-04), pages 1092308 - 1092308, XP060117587, ISBN: 978-1-5106-3673-6, DOI: 10.1117/12.2506553 * |
| SOLER PENADÉS J ET AL: "Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared", OPTICS LETTERS, OPTICAL SOCIETY OF AMERICA, US, vol. 39, no. 19, 1 October 2014 (2014-10-01), pages 5661 - 5664, XP001592013, ISSN: 0146-9592, [retrieved on 20140925], DOI: 10.1364/OL.39.005661 * |
| ZHENZHOU CHENG ET AL: "Mid-infrared Suspended Membrane Waveguide and Ring Resonator on Silicon-on-Insulator", IEEE PHOTONICS JOURNAL, IEEE, USA, vol. 4, no. 5, 1 October 2012 (2012-10-01), pages 1510 - 1519, XP011488217, ISSN: 1943-0655, DOI: 10.1109/JPHOT.2012.2210700 * |
Also Published As
| Publication number | Publication date |
|---|---|
| GB202213015D0 (en) | 2022-10-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9046650B2 (en) | Methods and apparatus for mid-infrared sensing | |
| US9164026B2 (en) | Packaged chip for multiplexing photonic crystal microcavity coupled waveguide and photonic crystal slot waveguide devices for chip-integrated label-free detection and absorption spectroscopy with high throughput, sensitivity, specificity, and wide dynamic range | |
| US8279445B2 (en) | Interferometer and sensor based on bimodal optical waveguides, and detection method | |
| US7411670B2 (en) | Collection probe for use in a Raman spectrometer system and methods of making and using the same | |
| US9678004B2 (en) | Plasmonic interferometer sensor | |
| US20120281957A1 (en) | Plasmonic and photonic resonator structures and methods for large electromagnetic field enhancements | |
| US20220334058A1 (en) | A sensor device and method for detection of a component in a fluid | |
| US20100017922A1 (en) | Integrated sensing probes, methods of fabrication thereof, and methods of use thereof | |
| Kraeh et al. | Slow light enhanced gas sensing in photonic crystals | |
| CN101694463B (zh) | 半导体激光内腔光微流生物传感器 | |
| JP2018521322A (ja) | ガス中の成分を検出するセンサ装置及び方法 | |
| TW200530571A (en) | Photonic crystal sensors | |
| CA2638561A1 (fr) | Capteur optique a guide d'ondes a moulure a reseau de bragg | |
| Gallacher et al. | Ultra-broadband mid-infrared Ge-on-Si waveguide polarization rotator | |
| Gilles et al. | Mid-infrared wavelength multiplexer in InGaAs/InP waveguides using a Rowland circle grating | |
| Baets et al. | Spectroscopy-on-chip applications of silicon photonics | |
| US20150103343A1 (en) | Tunable optical filter | |
| Gambino et al. | A review on dielectric resonant gratings: Mitigation of finite size and Gaussian beam size effects | |
| WO2024052427A1 (fr) | Composant optique | |
| CN201522429U (zh) | 一种半导体激光内腔光微流生物传感器 | |
| Peng et al. | Higher-order mode photonic crystal based nanofluidic sensor | |
| US20140233883A1 (en) | Resonator optimisation | |
| WO2014143204A1 (fr) | Procédés et appareil de détection des rayonnements infrarouges moyens | |
| Kassa-Baghdouche | Gas sensing performance of high-Q photonic crystal nanocavities based on a silicon-on-insulator platform | |
| Gylfason et al. | On-chip Spectroscopy of CO2 with MIR Waveguides |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 23768237 Country of ref document: EP Kind code of ref document: A1 |