WO2024046438A1 - 开磨一体机 - Google Patents

开磨一体机 Download PDF

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Publication number
WO2024046438A1
WO2024046438A1 PCT/CN2023/116283 CN2023116283W WO2024046438A1 WO 2024046438 A1 WO2024046438 A1 WO 2024046438A1 CN 2023116283 W CN2023116283 W CN 2023116283W WO 2024046438 A1 WO2024046438 A1 WO 2024046438A1
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WO
WIPO (PCT)
Prior art keywords
edge
assembly
clamping
grinding
support
Prior art date
Application number
PCT/CN2023/116283
Other languages
English (en)
French (fr)
Inventor
戴鑫辉
吕清乐
徐公志
刘克村
郭世锋
王勇
周聪
李林
Original Assignee
青岛高测科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN202211058794.8A external-priority patent/CN115401810A/zh
Priority claimed from CN202223480425.6U external-priority patent/CN219768735U/zh
Application filed by 青岛高测科技股份有限公司 filed Critical 青岛高测科技股份有限公司
Publication of WO2024046438A1 publication Critical patent/WO2024046438A1/zh

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools

Definitions

  • the invention relates to the technical field of processing equipment for hard and brittle materials, and in particular to an integrated grinding machine.
  • the existing integrated grinding machine integrates the functions corresponding to the squaring device and the functions corresponding to the grinding device, so that the squaring operation and grinding operation of the silicon rod can be completed on the same integrated grinding machine.
  • current integrated grinding machines usually have the following problems: the work stations corresponding to the functions of the squaring device and the work stations corresponding to the functions of the grinding device are still basically functionally consistent with the functions before integration, such as corresponding
  • the work station that functions as a grinding device can still perform complete rough grinding and fine grinding of the grinding surface and chamfer of the square rod. In this way, there is still room for improvement in the collaboration between the different work stations after integration.
  • the present invention provides an integrated grinding machine.
  • the integrated grinding machine at least includes: a second station, which includes: a first grinding device, which can perform at least one grinding operation on the workpiece to be processed. A part of the grinding operation; and a second cutting device, which can perform at least part of the squaring operation on the workpiece to be processed and/or cut the edge to be processed;
  • the integrated grinding machine further includes: a first tool station, which includes a first cutting device capable of performing at least part of the squaring operation on the workpiece to be processed and/or cutting the edge to be processed; and/or a third station, which includes a second grinding station
  • the second grinding device is capable of performing at least part of the grinding operation on the workpiece to be processed.
  • first station in addition to square cutting operations, the first station can also perform other functions such as grinding operations or loading and unloading operations.
  • the second station in addition to square cutting and grinding operations, it can also perform other functions such as loading and unloading operations.
  • the workpiece to be processed is the silicon rod to be ground (hereinafter referred to as the silicon rod, for example, the silicon rod includes the original rod, the square rod and the state between the two (such as the round rod with a pair of edge skins removed)) and refer to
  • the silicon rod for example, the silicon rod includes the original rod, the square rod and the state between the two (such as the round rod with a pair of edge skins removed)) and refer to
  • the accompanying drawings are used to describe the preferred embodiments of the present invention.
  • Figure 1 shows a schematic three-dimensional structural diagram of an integrated grinding machine according to an embodiment of the present invention
  • Figure 2 shows an integrated grinding machine according to an embodiment of the present invention.
  • FIG. 5 shows a structural schematic diagram of the loading and unloading device of the integrated grinding machine according to an embodiment of the present invention
  • Figure 6 shows the structure of the bottom plate assembly in the loading and unloading device of the integrated grinding machine according to an embodiment of the present invention.
  • Figure 7 shows a structural schematic diagram of the loading assembly of the loading and unloading device of the integrated grinding machine according to one embodiment of the present invention;
  • Figure 8 shows the upper loading assembly of the integrated grinding machine according to one embodiment of the present invention.
  • FIG. 9 shows a (partial) cross-sectional schematic view of the feeding assembly of the all-in-one grinding machine according to an embodiment of the present invention
  • Figure 10 shows a schematic view of the material conveying assembly according to an embodiment of the present invention
  • Figure 11 shows a schematic structural view of the loading turning assembly in the loading assembly of the integrated grinding machine
  • Figure 12 shows A schematic structural view of the cutting assembly of the integrated grinding machine according to an embodiment of the present invention
  • Figure 13 shows a schematic structural view of the cutting jaw assembly of the cutting assembly of the integrated grinding machine according to an embodiment of the present invention
  • FIG. 14 Shown is the cutting and turning assembly of the cutting assembly of the integrated grinding machine according to an embodiment of the present invention.
  • Structural schematic diagram FIG. 15 shows a structural schematic diagram of the blanking and conveying assembly of the unloading assembly of the integrated grinding machine according to an embodiment of the present invention
  • Figure 16 shows the clamping and transfer of the integrated grinding machine according to an embodiment of the present invention.
  • FIG. 17 shows a partial schematic view of the clamping block in Figure 16;
  • Figure 18 shows a schematic structural view of the clamping and transfer column in the clamping and transfer device of the integrated grinding machine according to an embodiment of the present invention;
  • Figure 19 shows a schematic structural diagram of the second clamping head (floating clamping head) in the clamping head assembly in the clamping and transfer device of the integrated grinding machine according to an embodiment of the present invention;
  • Figure 20 shows an embodiment of the present invention.
  • Figure 21 shows the edge support assembly and edge support in the clamping and transfer device of the integrated grinding machine according to an embodiment of the present invention.
  • FIG. 1 A schematic structural diagram of the leather support assembly (taking the second edge support assembly as an example);
  • Figure 22 shows the edge support assembly (taking the second edge support assembly as an example) of the all-in-one grinding machine according to an embodiment of the present invention.
  • Structural schematic diagram one three-dimensional
  • Figure 23 shows a structural schematic diagram two of the edge support assembly of the all-in-one grinding machine according to one embodiment of the present invention
  • Figure 24 shows the edge cover of the all-in-one grinding machine according to one embodiment of the present invention.
  • FIG. 25 shows a structural schematic diagram of the changing block in the edge skin support assembly of the all-in-one grinding machine according to an embodiment of the present invention
  • Figure 26 shows a A schematic structural diagram of the cutting feed assembly in the cutting device of the integrated grinding machine (taking the second cutting device as an example)
  • Figure 27 shows the structure of the cutting head assembly in the cutting device of the integrated grinding machine according to an embodiment of the present invention.
  • Figure 28 shows a (partial) structural diagram of the cutting head assembly of the cutting device of the integrated grinding machine according to an embodiment of the present invention;
  • Figure 29 shows a schematic diagram of the cutting head assembly of the integrated grinding machine according to an embodiment of the present invention.
  • FIG. 30 shows the structure of the tension wheel assembly in the cutting head assembly of the all-in-one grinding machine according to an embodiment of the present invention Schematic diagram 1;
  • Figure 31 shows the structural schematic diagram 2 of the tension wheel assembly in the cutting head assembly of the integrated grinding machine according to one embodiment of the present invention;
  • Figure 32 shows the cutting of the integrated grinding machine according to one embodiment of the present invention.
  • Figure 33 shows a schematic structural view of the first cutting device of the integrated grinding machine according to an embodiment of the present invention;
  • Figure 34 shows a schematic structural view of the grinding machine according to an embodiment of the present invention.
  • FIG. 35 shows a schematic structural view of the edge peel unloading device of the all-in-one machine
  • Figure 35 shows a schematic structural view of the edge peel clamping assembly in the edge peel unloading device of the all-in-one grinding machine according to an embodiment of the present invention
  • Figure 36 shows an implementation of the present invention
  • Figure 37 shows a schematic structural view of the first telescopic component in the telescopic mechanism of the edge peel unloading device of the integrated grinding machine according to an embodiment of the present invention. 1
  • Figure 38 shows a schematic structural diagram of the first telescopic component in the telescopic mechanism of the edge peel unloading device of the integrated grinding machine according to one embodiment of the present invention
  • Figure 39 shows the integrated grinding machine according to one embodiment of the present invention.
  • FIG. 40 shows a structural schematic diagram of the rotary mechanism of the edge peel unloading device of the integrated grinding machine according to an embodiment of the present invention
  • Figure 41 shows the present invention
  • Figure 42 shows a schematic structural view of an edge collection box in an edge collection device of an integrated grinding machine according to an embodiment of the present invention
  • Figure 43 shows A schematic assembly diagram of the edge collection device and the edge unloading device of the integrated grinding machine according to an embodiment of the present invention is shown
  • Figure 44 shows the first grinding station in the second station of the integrated grinding machine according to an embodiment of the present invention.
  • a schematic structural view of the grinding device FIG. 45 shows a schematic structural view of the grinding spindle assembly of the first grinding device of the second station of the integrated grinding machine according to an embodiment of the present invention;
  • Figure 46 shows an embodiment of the present invention
  • Figure 47 shows a schematic structural diagram of the second grinding device of the integrated grinding machine according to an embodiment of the present invention;
  • Figure 48 shows an implementation of the present invention.
  • a schematic structural diagram of the second grinding head assembly in the second grinding device of the integrated grinding machine according to an embodiment of the present invention Figure 49 shows the composite shaft assembly in the second grinding device of the integrated grinding machine according to an embodiment of the present invention.
  • FIG. 50 shows a schematic structural diagram of the composite shaft transmission assembly in the second grinding device of the integrated grinding machine according to one embodiment of the present invention
  • Figure 51 shows the integrated grinding machine according to one embodiment of the present invention.
  • the second structural schematic diagram of the composite shaft transmission assembly in the second grinding device shows the structural schematic diagram of the second grinding feed assembly in the second grinding device of the integrated grinding machine according to an embodiment of the present invention
  • Figure 53 A schematic structural diagram showing the detection component in the second grinding device of the integrated grinding machine according to one embodiment of the present invention
  • Figure 54 shows the nitrogen gas in the second grinding device of the integrated grinding machine according to one embodiment of the present invention.
  • the terms “installation”, “setting” and “connection” should be understood in a broad sense.
  • it can be a fixed connection or a fixed connection. It is a detachable connection or an integral connection; it can be directly connected, indirectly connected through an intermediate medium, or internally connected between two components.
  • the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
  • numerous specific details are given in the following detailed description. Those skilled in the art should understand that the present invention can also be implemented without certain specific details. In some examples, the principles of grinding machines, etc., which are well known to those skilled in the art, are not described in detail in order to highlight the gist of the present invention.
  • the integrated grinding machine 100 of the present invention mainly includes an equipment body, and the equipment body includes a first station 1 , a second station 2 , and a third station 3 , among which, the first station can cut the raw material round bar to form a square bar (the raw material round bar is subjected to four (single-sided) peeling operations) or a semi-finished square bar (the raw material round bar is subjected to less than four (single) edge removal operations).
  • the second station can not only cut the raw round bar/semi-finished square bar but also grind the edge of the square bar (the first part of the grinding operation, chamfering).
  • the third station is mainly used for grinding the side of the square rod (the second part of the grinding operation).
  • the cutting operations in the first station and the second station mainly involve squaring round rods or semi-finished square rods by wire sawing the silicon rods with diamond wires.
  • the grinding operations at the second station and the third station can be interchanged or completed by any one of the stations.
  • the main body of the equipment also includes a loading and unloading device 4.
  • the loading and unloading device is mainly used to load silicon rods in the form of raw material round rods, semi-finished square rods, square rods, etc. into or from the integrated grinding machine. Loading and unloading device for unloading/removal.
  • the main body of the equipment also includes a clamping and transferring device 5.
  • the clamping and transferring device is mainly used to transfer the silicon rods between corresponding devices at each station to ensure the continuity of the work of the integrated grinding machine. .
  • the main body of the equipment also includes an edge skin unloading device 7 and a edge skin collection device 8.
  • the edge skin unloading device is mainly used to remove the edge skin produced by cutting from the first/second work station to produce edge skin. The position is transferred to the edge collection device.
  • the edge collection device is mainly used to collect the edge material generated during the aforementioned cutting operation and remove it from the working area of the integrated grinding machine.
  • the direction of the grinding and grinding machine is marked as the Y direction, and the direction in the horizontal plane is perpendicular to the Y direction.
  • the direction is recorded as the X direction (such as the movement direction of the opening and closing mechanism, etc.), and the vertical direction is recorded as the Z direction.
  • the loading and unloading device 4 of the integrated grinding machine mainly includes loading silicon rods (such as round rods) into the loading assembly 41 of the integrated grinding machine, and loading the silicon rods.
  • the bottom plate assembly 43 mainly includes the X-axis bottom plate assembly 431 (perpendicular to the Y-axis, which can Realize the overall movement of the loading/unloading assembly) and the Y-axis base plate assembly 432 provided on the X-axis base plate assembly (the direction closer to/away from the clamping transfer device is called the loading and unloading direction).
  • the X-axis base plate assembly 431 includes an X-axis base plate 4311.
  • the X-axis base plate is equipped with an X-axis moving motor 4312.
  • the X-axis moving motor drives the entire Y-axis base plate assembly to move in the X direction through a screw nut mechanism. .
  • rollers and tripods are installed below the X-axis base plate to support it, guide rails are installed above the X-axis base plate, and slide bars or slide blocks matching the guide rails are installed below the Y-axis base plate assembly.
  • the X-axis moving motor drives the screw nut mechanism to move and under the guidance of the guide rail, the Y-axis base plate assembly and its loading and unloading components can move along the X direction, thereby ensuring that the loading and unloading components and clamps
  • the running devices can be accurately connected along the X direction.
  • the Y-axis bottom plate assembly 432 includes a loading Y-axis bottom plate 4321 and a lowering Y-axis bottom plate 4322 corresponding to the loading and unloading components.
  • the loading/unloading Y-axis bottom plates are respectively configured with loading Y-axis moving motor 4323 and unloading Y-axis moving motor 4324.
  • the loading Y-axis moving motor and the unloading Y-axis moving motor respectively drive the upper and lower material components to move in the Y direction through the screw nut mechanism, thereby driving the load on them.
  • the loading and unloading components are accurately connected with the clamping operating device along the Y direction.
  • the loading assembly 41 in the loading and unloading device mainly includes a loading conveying assembly 411, a loading clamp assembly 412 and a loading turning assembly 413.
  • the loading clamp assembly 411 is mainly used to clamp the silicon rod (such as a round rod) to be loaded
  • the loading conveying assembly 412 is mainly used to transport the silicon rod along the Y direction to the position corresponding to the docking station with the clamping and transfer device.
  • the loading and flipping assembly 413 is mainly used to flip the silicon rod upward from a horizontal state (lying) to a vertical state (standing) so as to reach a position where it can be directly docked with the clamping and transfer device.
  • the feeding and conveying assembly 411 mainly includes a feeding driving motor 4111 and a roller group 4112.
  • the roller group includes two rows of rollers with tapered surfaces.
  • the feeding driving motor is a double output shaft driving motor.
  • the output shaft drive motor drives the two rows of roller groups to roll in the feeding direction through chain transmission.
  • the surface of the silicon rod is in contact with the tapered surface of the roller, so that the horizontal transportation of the silicon rod along the Y direction is achieved through the synchronous rotation of the two rows of rollers.
  • the double-output shaft drive motor is only a preferred implementation.
  • both rows of roller groups can also be equipped with a loading drive motor.
  • the loading and conveying assembly includes a loading bottom plate 4113 provided on the loading Y-axis bottom plate and a loading pad 4114 provided on the loading bottom plate.
  • the roller group is provided on the loading pad, and the loading drive motor is fixed. to the feeding bottom plate.
  • the feeding conveyor assembly is equipped with a feeding cover 4116 at a position corresponding to the feeding chain 4115 connected between the feeding drive motor and the roller in the chain drive. If the feeding cover has dust-proof and fool-proof effects, it is close to The position of the upper end is fixed to the loading pad plate.
  • the loading height corresponding to the roller group can be changed by adjusting the loading pad.
  • the loading pad is only an exemplary description, for example, the loading pad and the height-adjustable support vertical plate corresponding to the unloading assembly below can be interchanged. That is, the loading assembly can adopt a structure similar to the height-adjustable support vertical plate to adjust the loading height.
  • the unloading assembly can also adopt a structure similar to the loading pad to adjust the unloading height.
  • it may be: adding a support vertical plate with an adjustable height based on a structure similar to the loading pad. Similar structure.
  • the feeding clamp assembly 412 mainly includes multiple pairs of feeding clamps distributed along the Y direction facing each other (for example, two pairs or four in this example). By making each pair of feeding clamps The clamping jaws move toward each other to clamp the round bar.
  • the surface of the loading clamping claw close to the silicon rod is generally a V-shaped surface to better clamp the round rod.
  • the loading clamp assembly 412 includes a loading clamp mounting base 4121.
  • the loading clamp mounting base is provided with a loading servo motor 4122 and a linear guide rail.
  • the loading servo motor is synchronized by loading.
  • the belt 4123 drives the screw in the screw nut mechanism to rotate.
  • the nut in the screw nut mechanism is fixed to the bottom of the loading clamp 4124 and the bottom of the loading clamp is provided with a slider that matches the linear guide. In this way, Driven by the loading servo motor, a pair of clamping jaws in the loading clamp can move closer to each other along the X direction to clamp the silicon rod.
  • loading photoelectric switches 4125 are respectively installed on both sides of the middle part of the loading clamp along its width direction to detect whether a silicon rod is being loaded.
  • a loading contact sensor 4126 is installed at the middle position of the middle part of the loading clamp to detect the clamping degree of the silicon rod.
  • loading clamps there are two loading clamps on the same side.
  • the position of the loading clamp on the left is relatively fixed, and the loading clamp on the right is equipped with a loading clamp adjustment linear guide 4127 and a loading clamp.
  • Clamp adjustment motor 4128 so that by adjusting the loading clamp on the right side, round bars of different axial sizes can be clamped by two pairs of loading clamps.
  • the loading and turning assembly 413 mainly includes a loading and turning hydraulic cylinder 4131, a loading and turning plate 4133, and a loading and receiving baffle 4133, wherein the loading and turning plate and the loading and turning hydraulic cylinder are both
  • the pivot is arranged on the bottom plate of the Y-axis of the loading, and the power output end of the loading and turning hydraulic cylinder is connected to the loading and turning plate.
  • the loading and flipping plate gradually flips from the horizontal state corresponding to the horizontal state in a pivoting motion relative to the loading Y-axis base plate (denoted as flipping around the A1 axis).
  • the loading and receiving baffle is supported below the silicon rod when the silicon rod is in the vertical state.
  • the loading and turning assembly includes a loading limit switch group, and the loading limit switch group includes a first loading limit switch 4134 corresponding to the vertical state and a second loading limit switch corresponding to the horizontal state. 4135.
  • the loading flip plate when the loading flip plate is flipped counterclockwise around the A1 axis from a horizontal state to a position in contact with the first loading limit switch, it can be determined that it has been flipped in place.
  • the loading flip plate is flipped clockwise around the A1 axis from the vertical state to the position in contact with the second loading limit switch, it can also be confirmed that it has been flipped in place.
  • the initial position of the loading and flipping assembly is as shown in Figures 5 and 7.
  • the loading and flipping plate is in contact with the second loading limit switch.
  • the silicon rod is placed horizontally on the two rows of rollers of the feeding and conveying assembly.
  • the silicon rod is transported by the loading and conveying assembly to the position corresponding to the material receiving baffle, and then the loading clamp assembly clamps the silicon rod.
  • the power provided by the loading and flipping hydraulic cylinder causes the loading and flipping plate to flip around the A1 axis to a position in contact with the first loading limit switch as shown in Figure 9.
  • Loading and receiving preparation The loading assembly moves to the Y direction to the loading position of the grinding machine, and the loading clamp assembly The two opposite pairs of clamping jaws are separated from each other and are ready to receive the silicon rod.
  • Loading clamping and conveying Place the silicon rod horizontally on the loading and conveying assembly, where the loading photoelectric switch can detect the presence of the silicon rod.
  • the downstream end of the silicon rod moves to the position corresponding to the material receiving baffle under the action of two rows of rollers, the rollers stop moving and the two pairs of feeding clamps move inward.
  • the feeding contact sensor can detect the silicon rod. Whether it is clamped.
  • the loading assembly adjusts its position in the X direction through the bottom plate assembly to ensure that the silicon rod can be smoothly transported to the processing position of the integrated grinding machine.
  • Loading and flipping The power output end of the loading and flipping hydraulic cylinder extends. Under the support of the power output end, the loading assembly flips upward 90° along the A1 axis to convert the horizontally placed silicon rod into an upright state. In this case , the loading operation of the silicon rod can be completed through the connection and reception with the clamping and transfer assembly. The accuracy of the position of the silicon rod before and after flipping can be ensured through the (first and second) loading limit switches.
  • the unloading assembly 42 in the loading and unloading device mainly includes a unloading clamp assembly 421 , a unloading turning assembly 422 and a unloading conveying assembly 423 .
  • the unloading clamp assembly is mainly used to clamp the silicon rods (such as square rods) to be unloaded
  • the unloading and flipping assembly is mainly used to flip the silicon rods downward from the vertical state (upright) to the horizontal state (horizontal).
  • the blanking and conveying assembly is mainly used to transport the silicon rods along the Y direction to the blanking position where the silicon rods can be separated from the grinding machine.
  • the blanking jaw assembly 421 mainly includes a pair of blanking jaws 4211, a blanking jaw cylinder 4212 (the lowering jaw cylinder is a locking cylinder), and a blanking jaw linear guide 4213 , connecting rod 4214 and floating push block 4215.
  • the power output end of the blanking clamp cylinder is connected to the floating push block, and the two blanking clamps pass through a
  • the connecting rod is connected to the floating push block.
  • the connecting rod, the floating push block and the corresponding blanking clamps are all pivotally connected.
  • Below the two blanking clamps there is a linear guide rail matching the blanking clamps.
  • the guide groove of the blanking jaw In this way, the blanking jaw cylinder pushes the floating push block to move in the With the cooperation between the linear guide rails, a pair of blanking jaws open and close relative to each other to realize the loosening/clamping of the silicon rod.
  • the blanking clamp is a plate-shaped structure, and the inside of the plate-like structure (the side where the two blanking clamps are close to each other) is provided with a blanking support structure that can directly contact the square rod.
  • the material support structure includes multiple strip structures.
  • the plate-shaped structure is provided with a blanking clamp reinforcement rib on the outside, and the plate-shaped structure has a blanking clamp mounting part extending in a direction close to the connecting rod, and the mounting part is extended in a direction close to the connecting rod.
  • the extended end of the jaw of the lower material includes a pair of mounting plates with holes, and the connecting rod is pivotally arranged on the mounting plate by means of the cooperation between bolts and other connecting parts and the holes.
  • the aforementioned unloading guide groove is provided at the bottom of the installation part.
  • the blanking jaw assembly includes a blanking jaw mounting base, and the aforementioned blanking jaw cylinder and blanking jaw linear guide are both arranged on the blanking jaw mounting base.
  • the linear guide rail of the blanking jaw is arranged on the transverse part of the mounting base of the blanking jaw
  • the blanking jaw cylinder is arranged on the vertical part of the mounting base of the blanking jaw.
  • the bottom of the blanking clamp mounting base is also provided with a mounting plate connected to the slider of the crank slider mechanism below.
  • the blanking clamp mounting base is provided with mounting base reinforcement ribs at positions corresponding to the mounting plate to ensure installation. reliability.
  • the blanking and flipping assembly 422 mainly includes a blanking and flipping hydraulic cylinder 4221, a blanking crank slider mechanism 4222, a linear guide rail that cooperates with the slider of the blanking crank slider mechanism 4223, and a blanking and flipping hydraulic cylinder 4221.
  • the clamping jaw is installed with a blanking turning frame fixedly connected to the base body.
  • the left side of the blanking turning frame is pivotally connected to the blanking Y-axis base plate through a rotating shaft, and the right side is pivotally connected to the slider of the blanking crank slider mechanism. Based on this, the vertical square bar can be flipped to a horizontal state that can be connected with the blanking and conveying assembly.
  • the vertically placed square bar is clamped by a pair of blanking jaws.
  • the power output end of the blanking and turning hydraulic cylinder is retracted to the right to drive the slider of the blanking crank slider mechanism to slide along the linear guide rail, and stops when the slider slides to the blanking hydraulic buffer 4224 on the right side.
  • the square rod is placed horizontally above the unloading and conveying assembly. After that, a pair of blanking jaws are released, and the square bar is transported by the blanking conveyor assembly.
  • the blanking and conveying assembly 423 mainly includes a blanking and conveying frame 4231, a blanking and conveying support vertical plate 4232, a blanking and conveying motor 4233, and a blanking and conveying conveyor belt 4234.
  • the unloading conveyor motor drives the sprocket to drive the unloading conveyor chain for transmission, and the square bar placed above the unloading conveyor belt is transported to the unloading position.
  • the blanking assembly is equipped with a blanking photoelectric switch 4235 at a position corresponding to the upper position of the blanking conveyor belt to detect whether there is a square bar being blanked on the current blanking conveyor.
  • two pairs of blanking conveyor support vertical plates are installed on the blanking Y-axis bottom plate.
  • the blanking conveyor support vertical plates and the blanking conveyor frame can be fixedly connected by means of fasteners such as screws.
  • the frame The support height can be adjusted by the locking position of the screw.
  • two blanking conveyor installation slots 4236 distributed in the vertical direction are provided on the blanking conveyor support vertical plate, and the threaded parts of the screws can pass through different positions of the mounting slots to connect with the blanking conveyor frame.
  • those skilled in the art can set multiple threaded holes on the unloading conveyor frame at positions corresponding to the unloading conveyor installation slot according to actual needs.
  • the support height corresponding to the unloaded material can be adjusted according to actual needs.
  • two screws are configured in each installation slot, that is, 16 screws are used to achieve the fixation between the blanking conveyor support vertical plate and the blanking conveyor frame.
  • the operation process of the silicon rod during blanking through the blanking assembly is as follows: Preparation for blanking and receiving: the blanking assembly flips upward 90° (recorded as flipping around the A2 axis) and moves along the Y direction to the blanking position. At the same time, the pair of blanking jaws are separated from each other to prepare for receiving the silicon rod. Clamping and flipping of the blanking material: A pair of blanking jaws are brought together in the direction (inside) close to each other in the X direction until the blanking jaws are in close contact with the surface of the square bar and the applied clamping force can ensure a pair of blanking The clamping jaws are securely fixed to the square rod.
  • the power output end of the blanking jaw cylinder extends out to push the floating push block to move forward.
  • the floating push block pushes the connecting rod to move.
  • the unloading clamp assembly is flipped 90 degrees along the A2 axis to switch the vertical square bar to a horizontal position.
  • Blanking and conveying The square bar is transported to the blanking position along the Y direction through the blanking conveyor belt. The accuracy of the turning position can be ensured through the setting of the hydraulic buffer.
  • the clamping and transfer device 5 mainly includes a basic workbench 51 and a rotary workbench rotatably installed (denoted as rotating around the B axis) on the basic workbench. 52 and a clamping and transfer column 53 provided on the rotating workbench.
  • the clamping and transfer column is roughly a triangular prism structure.
  • the three sides of the clamping and transfer column are respectively equipped with a sliding seat assembly 56, a clamping head assembly 57 and a side support assembly 58 to be responsible for clamping and transferring the silicon rods between various positions.
  • the rotary worktable may be rotated using gear transmission.
  • the clamping transfer column includes a clamping transfer column main body.
  • Three connecting rods 54 are inserted into the main body of the clamping transfer column at positions corresponding to its three edges. By applying pretension to the connecting rods, force to improve the rigidity of the clamping transfer column.
  • a clamping block 55 is installed on the main body of the clamping and transfer column to improve the installation accuracy of the silicon rod clamping and operating device.
  • the clamping block includes a clamping block base for being clamped on the side of the slide assembly, and a clamping block disposed on the clamping block base that can clamp the transfer column along the side to be close to the slide.
  • the first adjustment member 551 that moves in an assembly manner and the second adjustment member 552 that can move along the side of the clamping transfer column away from the slide assembly are pushed and pulled by the first adjustment member and the second adjustment member.
  • the structure can adjust the installation position of the slide assembly on the side of the clamping transfer column to ensure that the axis of the slide assembly is perpendicular to the rotating worktable.
  • the clamping and transfer column is installed on the rotating workbench so that the three sides can be in different positions as the rotating workbench rotates.
  • the position corresponding to the loading station in the loading and unloading device is used as the starting point of 0° to rotate the clamping transfer column 60° counterclockwise to the first station.
  • the bar can be squared for the first time ( For example, it can be the entire square rooting operation or only a part of the square rooting operation). After the first squaring is completed, after the edge peel is removed through the edge peel unloading device, the clamping and transfer column is rotated 120° to the second station.
  • the second station performs a second squaring on the bar material after the first squaring. After the second squaring is completed, the edge skin is removed through the edge skin unloading device. At the same time, the four edges of the square bar are processed at the second station. Perform grinding. Obviously, in the case where all the square cutting operations are performed for the first time, only the chamfering operation is performed at the second station. After the chamfering operation is completed, the clamping and transfer column is rotated 120° to the third station, and the four sides of the square bar after the squaring and chamfering operations are ground to achieve the required accuracy. Grinding operations usually include rough grinding and fine grinding.
  • the clamping and transfer column is finally rotated 60° to the unloading station in the loading and unloading device. After that, the clamping, turning, loosening, conveying and other operations of the unloading assembly can be carried out to achieve the convenience. Great cut.
  • the processing time of the first station is about 16 minutes
  • the processing time of the second station is about 16 minutes
  • the processing time of the station is about 22 minutes
  • the processing time of the third station is about 25 minutes.
  • the slide assembly 56 mainly includes a slide support, a slide linear guide, a slide motor and a slide connection plate 561, where the slide support is disposed on the side of the transfer column ( Clamping surface), a pair of slide linear guide rails are installed on the slide support in the vertical direction, the slide connecting plate is movably set on the slide linear guide rail, and the slide motor is used to drive the sliding connecting plate along the sliding The seat moves on the linear guide.
  • the slide motor drives the screw in the screw nut mechanism to rotate, and the nut in the screw nut mechanism fixed to the slide connection plate moves along the slide linear guide, thus driving the slide connection plate vertically. direction movement.
  • the clamping head assembly 57 includes a first clamping head 571 located above and a second clamping head 572 located below, wherein the first clamping head is disposed on the first clamping head base. 5711, the first clamping head base is arranged on the sliding base connecting plate, so that the first clamping head (movable chuck) can move in the vertical direction against the sliding base connecting plate.
  • the second clamping head (fixed clamping head) is provided on the second clamping head base 5721, and the second clamping head base is fixedly provided on the side of the clamping transfer column, so that the second clamping head 5721 can be clamped by the cooperation with the movable chuck.
  • the silicon rod is clamped and supported at the same time.
  • the movable chuck and fixed chuck are respectively equipped with movable chuck rotating motors and fixed chuck rotating motors, which are mainly used to rotate the silicon rods. If it is necessary to perform rotation on different (pairs) sides of the silicon rods through the third station During grinding, the movable chuck rotating motor and the fixed chuck rotating motor corresponding to the clamping head assembly of the third station can be used to rotate the silicon rod from the state where a pair of side surfaces are aligned with the rough/finish grinding wheel to The other pair of sides are aligned with the rough/finish grinding wheels.
  • the end face of the silicon rod and the axis of the silicon rod are not completely vertical in the ideal state.
  • the silicon rod may also be bent to a certain extent. tilt. Therefore, in one possible implementation, the fixed clamping head is a floating clamping head to compensate for the non-verticality of the end surface of the silicon rod.
  • a fixed chuck reducer and a fixed chuck bearing box are provided between the fixed chuck rotating motor and the floating clamping head.
  • the floating clamping head mainly includes a shell, an elastic diaphragm and a floating ball, where,
  • the shell includes an inner shell connected to the bearing box and an outer shell capable of contacting the end face of the silicon rod.
  • the diaphragm is connected to the inner shell and the outer shell respectively to allow a certain offset between the inner shell and the outer shell.
  • the floating ball is accommodated in the middle of the annular structure diaphragm.
  • the movement of the moving ball in the floating ball seats arranged on the inner and outer casings is expected to cause the outer casing to tilt in any direction relative to the inner casing, thereby producing a certain amount of floating, and thereby making up for the non-verticality of the end face of the silicon rod.
  • the above-mentioned fixed clamping head is a floating clamping head and the specific structural form of the floating clamping head is only an exemplary description.
  • those skilled in the art can adopt other forms of floating clamping heads according to actual needs, or
  • the movable chuck is also adjusted to a clamping head with circumferential buffering function.
  • the support cover assembly 58 mainly includes a support cover support 581, a support cover cylinder 582, a support cover linear guide 583, a support bracket 584 and a support assembly 585.
  • the armrest leather support is fixedly connected to or integrally formed with the aforementioned first clamping head seat 5711 so that the armrest leather assembly is fixedly disposed on the aforementioned slide support 561, and the armrest leather cylinder and the armrest leather linear guide are both Set on the edge support leather support.
  • the armrest cylinder is a rodless cylinder, and the rodless cylinder is connected to the support bracket. In this way, the armrest cylinder drives the support bracket to move up and down along the direction of the armrest linear guide rail, so that the support assembly can tightly abut the support bracket. Attach to the end of the edge.
  • the support bracket includes two support sub-brackets, the two support sub-brackets are connected through the support skin connection structure, and the rodless cylinder is disposed on the support skin support and is connected to the power output end and the support support.
  • the edge skin connection structure is connected.
  • Each supporting sub-bracket is equipped with a supporting component to ensure that a pair of side skins can be supported at the same time.
  • the support component 585 includes an edge support installation base and an edge support structure 586 disposed on the edge support installation base.
  • each edge support installation base is provided with two edge support installation structures, and the edge support installation structures are cylindrical. In this way, the edge support can be ensured through multi-point contact. reliability.
  • those skilled in the art can select the specific structural form, number, etc. of the edge support and installation structures according to actual needs.
  • the edge skin support installation base includes a first edge skin support installation part and a second edge skin support installation part.
  • the edge skin support structure is provided on the first edge skin support installation part, and the first edge skin support installation part passes through the third edge skin support installation part.
  • the supporting installation part of the two-sided skin is fixed to the supporting bracket.
  • the second side support and installation part includes two L-shaped mounting brackets, two columnar bodies are arranged between the two L-shaped mounting brackets, and the transverse part of the L-shaped mounting bracket is fixedly arranged on the first side support and installation part, L
  • the vertical part of the mounting bracket is fixedly connected to the outside of the edge clamping bracket.
  • the edge support component resists the edge removed from the silicon rod, thereby protecting the edge. For example, it can effectively prevent the edges on both sides of the silicon rod from tilting, Tilting and other phenomena.
  • the silicon rod After the silicon rod is transported to the processing area of the grinding machine by the loading assembly of the loading and unloading device, it passes through the loading conveying assembly (transported to the clamping position), the loading clamp assembly (clamp clamping) and the loading
  • the turning assembly turning over the silicon rod in the clamped state
  • the loading assembly can move out of the processing area along the Y direction to avoid other operations.
  • both the first workstation 1 and the second workstation 2 are equipped with cutting devices, which are respectively referred to as the first cutting device 11 and the second cutting device 21 .
  • the first/second cutting device mainly includes a first/second edge support component (12, 22), a first/second cutting feed component (13, 23), The first/second cutting head assembly (14, 24) and the first/second cutting column (15, 25) (in this example, the cutting column and the corresponding edge unloading column are integrally formed).
  • the first/second cutting device is mainly used to cut the silicon rod from a round rod into a square rod.
  • the first/second cutting feed assembly is arranged on the cutting column to drive the cutting section between the cutting head assembly to cut the silicon rod and generate edge skin.
  • the first/second edge support assembly is used during the cutting operation. It contacts the position corresponding to the edge skin on the bottom of the silicon rod, so that the edge skin produced by cutting can be stably supported at the cutting station by cooperating with the aforementioned edge support skin component.
  • the following description takes the second cutting device 21 (hereinafter also referred to as a cutting device) as an example.
  • the second cutting device also includes a first grinding device 26 .
  • the second cutting device is also equipped with a balancing cylinder assembly 27 .
  • the reason why the second station is equipped with a balanced cylinder assembly is because the grinding device needs to rise and fall quickly during operation, while the cutting device rises and falls slowly during operation. Since the second station contains both a grinding device and a cutting device, by configuring a balancing cylinder for the first grinding device, the dead weight of the first grinding device during use can be balanced, thus achieving good dynamic performance. .
  • the balance cylinder assembly 27 mainly includes a balance cylinder, a sprocket bracket provided on the cutting column, a sprocket installed on the sprocket bracket, and a plate chain matching and connected to the sprocket. If the balance cylinder is fixed on the balance cylinder bracket, the balance cylinder bracket is fixed on the cutting column.
  • the balancing cylinder assembly is mainly used to balance the weight of the cutting head assembly.
  • the leaf chain uses sprockets to support the direction change and is connected to the balance weight on the back side of the transverse cutting feed lifting slide.
  • the cutting head assembly of the second station is also equipped with a first grinding device for grinding chamfers. Therefore, the balancing cylinder assembly can be used to balance the second cutting device and the first grinding device in the second station. weight of the grinding unit, thus extending the service life of the vertical feed assembly.
  • the second edge cover support assembly 22 mainly includes an edge cover support cylinder 221, an edge cover support frame 222, a top edge cover assembly 223 and a reshaping block 224.
  • the edge skin support cylinder drives the screw of the edge skin support screw nut mechanism installed on the basic workbench to rotate.
  • the nut of the edge skin support screw nut mechanism is connected to the top edge skin assembly through the edge skin support frame and the bottom of the nut The end can slide in the edge support linear slide rail also installed on the basic workbench.
  • the edge skin support component is mainly used to support the edge skin produced after cutting.
  • the changing block is mainly used to enable the top edge skin assembly to support the edge skins of silicon rods of different specifications.
  • the edge skin support frame includes a lower edge skin support frame base and a first edge skin support frame provided on the first edge skin support frame and corresponding to a pair of edge skins in the double cutting operation. and a second side skin support frame.
  • the first side skin support frame and the second side skin support frame are respectively provided with two top side skin assemblies corresponding to one of the side skins.
  • a changing block is disposed above the first side skin support frame and the second side skin support frame respectively.
  • the top edge cover assembly can move along the direction of the linear guide rail (Y direction).
  • the edge skin support frame is provided with a first edge skin support limiting structure 2291 and a second edge skin support limiting structure 2292 along the moving direction of the top edge skin assembly on the linear guide rail.
  • the top leather assembly 224 mainly includes a top leather cylinder 225 and a top leather rod 226 .
  • the top edge skin cylinder drives the top edge skin rod to move upward, thereby pushing the edge skin to move upward in the Z direction to lift the edge skin.
  • the edge skin can then be moved out of the cutting area by the edge skin unloading device.
  • the top edge leather assembly also includes a edge leather rod guide sleeve 227 and a side leather rod pad 228, wherein the top edge leather rod guide sleeve is mainly used to guide the edge leather rod to move in the Z direction, and the edge leather rod pad is provided with
  • the top edge skin rod is close to the end of the silicon rod, so that it is in direct contact with the edge skin of the silicon rod during the top edge skin operation.
  • the area of the side skin rod pad is usually larger than the cross-sectional area of the side skin rod to ensure the stability of the operation.
  • two top skin assemblies are configured for each side of the skin.
  • the top side leather rod guide sleeve has a mounting flange below
  • the first/second side leather support frame includes two side leather support brackets corresponding to the two top side leather assemblies, and the two side leather support brackets
  • An edge skin support connection frame is provided between the brackets, and the guide sleeve is arranged on the edge skin support connection frame through an installation flange and thus is arranged on the edge skin support frame.
  • top side skin assembly described above is only an exemplary description. Those skilled in the art can adjust the structure of the top side skin assembly according to actual needs, such as setting the surface of the pad to a curved surface, changing the edge
  • the leather rod guide sleeve and protective sleeve are integrated into one.
  • the reshape block 224 is provided with installation positions that can be adapted to silicon rods of different specifications. By selecting different installation positions and installing corresponding top edge skin components on them, the installation position can be adjusted. The edges of silicon rods of different specifications are used for support.
  • two sets of mounting holes 2241 are provided above the reshaping block 224 and a set of mounting holes are provided below.
  • any one of the two sets of mounting holes can be used. If you need to use the lower set of mounting holes, first adjust the changing block up and down and reinstall it on the edge support frame, and then use the original lower set of mounting holes for installation.
  • the silicon rod is loaded by the loading assembly in the loading and unloading device and then transported to the clamping and operating device. It is clamped by the clamping head assembly of the clamping and operating device and rotated by the clamping and transferring column to the corresponding position.
  • the top edge skin assembly moves along the Y direction to the position below the silicon rod corresponding to the edge skin.
  • the top edge skin rod (the top edge skin pad) extends to contact the lower end surface of the silicon rod's edge skin and then tightens it.
  • the first/third cutting device can start cutting the silicon rod.
  • the generated edge is transferred from the edge unloading device to the edge collection device, and the edge support assembly returns to its original position (avoidance) along the Y direction. That is: during and after the cutting operation (until the edge skin clamping assembly of the edge skin unloading device clamps the edge skin), the top edge skin assembly maintains a supporting effect on the lower end surface of the edge skin. It can be understood that after the cutting is completed, the diamond wire cutting section should be exactly between the fixed chuck below the clamping head assembly and the top skin assembly (the top skin rod) of the first/second skin support assembly. in the gap.
  • the first/second cutting feed assembly mainly includes a vertical cutting feed assembly 231 and a transverse cutting feed assembly 232.
  • the cutting feed assembly is mainly used to realize the cutting head assembly along the transverse direction ( Linear feed motion in X direction) and vertical direction (Z direction).
  • the vertical cutting and feeding assembly 231 mainly includes a vertical cutting and feeding motor 2311 provided on the first/second cutting column, a vertical cutting linear guide 2312 and a vertical cutting screw nut.
  • Mechanism 2313, the vertical cutting feed motor is connected to the screw of the vertical cutting screw nut mechanism, and the screw of the vertical cutting screw nut mechanism is The nut is connected to the transverse cutting feed assembly, and the nut of the vertical cutting screw nut mechanism can slide along the vertical cutting linear guide rail.
  • the vertical feed assembly is also slidingly connected with two linear guide rails provided on the cutting column.
  • the vertical feed assembly can drive the transverse feed assembly to move along the Z direction, and further enable the cutting head assembly provided on the transverse feed assembly to feed the cutting silicon rod vertically downward.
  • a detection component such as a proximity switch is provided at the bottom of the first/second cutting device so that the cutting can be accurately stopped after the cutting is in place (completed).
  • a buffer pad is also provided near the bottom of the cutting device to contact the bottom of the transverse cutting and feeding assembly to ensure that the transverse cutting and feeding assembly can stably drop to the lowest position.
  • the transverse cutting and feeding assembly 232 mainly includes a transverse cutting and feeding lifting slide 2321, a transverse cutting and feeding motor 2322 and a transverse cutting and feeding screw nut mechanism provided on the transverse cutting and feeding lifting and sliding table. 2323.
  • the transverse cutting lifting slide is slidingly connected to the aforementioned vertical cutting feed assembly, so that the vertical cutting feed motor drives the transverse cutting lifting slide and the cutting head assembly mounted thereon to move along the Z direction.
  • the transverse cutting feed motor is connected to the screw of the transverse cutting screw nut mechanism and the rotation directions of the two ends of the screw are opposite.
  • the two nuts of the transverse cutting screw nut mechanism are respectively connected to form a diamond.
  • a pair of cutting wheels of the wire cutting section (two pairs of cutting wheels, forming a diamond wire cutting section between the pair of cutting wheels corresponding to one nut), the nut of the transverse cutting screw nut mechanism can be arranged on the cutting head assembly along linear guide slide.
  • the opening and closing between two pairs of cutting wheels can be realized through a transverse cutting feed motor, so that silicon rods of different specifications (radial dimensions) can be processed. Double line cutting (produces one pair of edges at a time).
  • the transverse cutting feed assembly is also configured with a transverse cutting feed limiting structure 2324 to ensure the proximity between the two pairs of cutting wheels.
  • the first/second cutting head assembly 24 each includes a cutting wheel assembly, a retracting and unwinding wire assembly, a wire arrangement wheel assembly 243, a tension wheel assembly 244, a passing wheel assembly, and a cutting wheel base.
  • the retracting and unwinding wire assembly is mainly used to release the diamond wire on the upstream side and to retract the diamond wire on the downstream side, thereby forming a circulating cutting line 246 (such as usually a diamond wire).
  • the wire arrangement wheel assembly is mainly used to discharge the diamond wire emitted by the retracting and unwinding wire assembly.
  • the tension wheel in the tension wheel assembly is mainly used to ensure the tension of the diamond wire.
  • Each roller in the wheel set is mainly used to realize the movement of the diamond wire. The direction changes during the winding process, and the diamond wire between the cutting wheels in the cutting wheel assembly is used to cut the silicon rod, so it is called a diamond wire cutting section.
  • the cutting wheel assembly includes two pairs arranged oppositely.
  • Each cutting wheel assembly includes one cutting wheel (referred to as cutting wheels ((1), (2), (3), (4) respectively)).
  • the reference numbers are 241(1), 241(2), 241(3), and 241(4) respectively.
  • the two cutting wheel assemblies on the same side are in the same direction as the screw in the aforementioned transverse cutting feed assembly.
  • the silicon rod can be cut through the diamond wire cutting section between the cutting wheels of two pairs of oppositely arranged cutting wheel assemblies to produce a pair of edges.
  • the first and second cutting devices can be configured with two retracting and unwinding wire assemblies, two wire arrangement wheel assemblies, two tension wheel assemblies, and a separate roller group.
  • some structures thereof are Sharing is adopted, specifically, a set of retracting and releasing wire assemblies (two) are shared. On this basis, the relevant structures were also adjusted.
  • the roller set corresponding to the second cutting device includes a roller 1 arranged on the cutting column, a roller 2 arranged on the basic workbench, and rollers 2 respectively arranged on the first cutting wheel seat corresponding to the cutting wheel.
  • the rollers 1 and 2 and the rollers 3/4 located close to the roller 2, the rollers 5/6 respectively arranged on the cutting wheel bearing seats of the cutting wheels 1 and 2, the rollers 3/4 arranged on the cutting wheels of the cutting wheels 3
  • the roller 7 on the wheel bearing seat, the roller 8/9 are all arranged on the cutting wheel bearing seat of the cutting wheel 4, and the roller 10 is arranged on the second cutting wheel seat corresponding to the position of the cutting wheel 4.
  • the reference numbers for wheels 1-10 are respectively 2451, 2452, 2453, 2454, 2455, 2456, 2457, 2458, 2459, 24510.
  • the diamond wire used to cut the silicon rod is released from the first wire retracting and unwinding assembly 2421, and passes through the wire arrangement wheel assembly, tension wheel assembly, passing wheels 1-5, cutting wheels 1, 2,
  • the rollers 6 and 7, the cutting wheels 3 and 4, and the rollers 8-10 are wound and recovered to the second retracting and unwinding wire assembly 2422 provided on the first cutting device, thereby forming two diamond wire cutting sections on the second cutting device.
  • a diamond wire cutting section is formed between the cutting wheels 1 and 2
  • another diamond wire cutting section is formed between the cutting wheels 3 and 4.
  • the combination of wire pay-off and wire pay-off can be used to make the diamond wire cut the silicon rod in a manner similar to that of a saw.
  • the functions of the wire take-up device and the wire pay-off device are Functions are interchanged over and over again.
  • the wheel sets corresponding to the first cutting device or the second cutting device are roughly symmetrically distributed, and in the case of partial sharing, the above-mentioned The passing wheels 6, 7, 9, and 10 are not strictly symmetrically distributed.
  • the first wire take-up and pay-off assembly 2421 is located on the rear side of the second work station, and the second wire take-up and pay-off assembly 2421 is located on the back side of the first work station.
  • the first retracting and unwinding assembly 2421 mainly includes a retracting and unwinding motor, a retracting and unwinding main body and a retracting and unwinding I-wheel.
  • the basic workbench is provided with a retracting and unwinding line on the side corresponding to the rear of the cutting column. Bracket, the main body of the retracting and releasing wire is installed on the retracting and releasing wire bracket.
  • the two diamond wire cutting sections between the two pairs of cutting wheel assemblies can be driven to move along the Z direction to perform double wire cutting operations on a pair of edge skins at the same time.
  • the separation/closing of the two diamond wire cutting sections along the X direction can be realized, so that the aforementioned double wire cutting operation can be performed on silicon rods of different specifications (radial dimensions).
  • the cutting wheel assembly mainly includes a cutting wheel motor 2415, a cutting wheel bearing box 2416, and a cutting wheel.
  • the cutting wheel motor drives the cutting wheel to achieve high-speed rotation of the ring-shaped diamond wire.
  • the cutting wheel assembly is fixedly connected to the nut of the aforementioned screw nut mechanism through the cutting wheel seat, and the cutting wheel seat is slidingly connected to the transverse cutting feed lifting slide.
  • the cutting wheel seat includes a cutting wheel seat table 2417 and a cutting wheel seat slide 2418.
  • the cutting wheel seat slide is fixedly connected to the nut of the transverse cutting screw nut mechanism and slides with the feed lift slide of the aforementioned transverse cutting feed assembly. connect.
  • the cable arrangement wheel assembly is disposed on the side of the cutting column and mainly includes a cable arrangement wheel motor 2431, a cable arrangement module 2432, a cable arrangement slide assembly 2433, a cable arrangement pivot seat 2434, and a cable arrangement bracket. 2435 and line wheel 2436.
  • the cable arranging wheel motor is set in the cable arranging module
  • the cable arranging slide assembly is slidingly connected to the cable arranging module
  • the cable arranging shaft seat is arranged on the cable arranging sliding assembly
  • the cable arranging bracket is connected to the cable arranging shaft seat on the one hand and the other side. On the one hand, it is connected to the cable wheel.
  • the cable arranging slide assembly and the cable arranging wheel can move up and down along Z on the cable arranging module to prevent the diamond wire from gathering on the I-shaped wheel.
  • the cable arrangement wheel can rotate in the horizontal plane around the axis of the cable arrangement wheel to adjust the cable arrangement angle.
  • the tension wheel assembly is disposed on the side of the first/second cutting column and mainly includes a tension wheel motor 2441, a tension arm 2442 and a tension wheel 2443.
  • Tension wheel limiting structures 2444 are respectively provided at positions corresponding to both sides of the swing range of the tension arm to ensure that the tension arm can swing within the angle defined by the two tension wheel limiting structures.
  • the tension arm includes a first tension arm connection part connected to the tension wheel motor and a second tension arm part extending from it and connected to the tension wheel, wherein the second tension arm part is generally a rod-shaped structure,
  • the swing of the tension wheel is realized through the cooperation of the rod-shaped structure and the aforementioned tension wheel limiting structure.
  • the tension wheel limiting structure can be a block or a structure with a buffering function.
  • the cutting wheel on the first cutting device is roughly the same as the aforementioned second cutting device.
  • a corresponding passing wheel is also configured for the diamond wire and a passing wheel is also provided on the left side of the figure. , tension wheel assembly and cable arranging wheel assembly.
  • the main difference is that the first cutting device only contains cutting operations and is therefore not equipped with a grinding device (hereinafter the first grinding device).
  • the operation process of the first cutting device corresponding to the first station and the second cutting device corresponding to the second station is: loading and waiting: before the silicon rod is transported to the first station, the cutting device passes The transverse cutting feed assembly rises to the highest position along the Z direction on the vertical cutting feed assembly.
  • the two pairs of oppositely arranged cutting head assemblies are separated to the required distance along the X direction and are clamping heads for clamping the silicon rods. Leave enough space for the components to avoid.
  • Equipment tool setting The clamping and transfer device drives the silicon rod to rotate to the cutting area corresponding to the first station.
  • the edge support component moves along the Y direction to a position corresponding to the edge of the silicon rod.
  • the cutting device moves downward along the Z direction for a certain distance to the cutting start position.
  • the cutting wheels of the two sets of cutting wheel assemblies corresponding to the two edges of the silicon rod move toward each other in the X direction.
  • the diamond wire cutting sections between the two cutting wheels on the same side are aligned with the cutting position corresponding to the cutting start position, and the two diamond wire cutting sections between the two sets of cutting wheels on different sides are parallel, corresponding to The distance between the two diamond wire cutting sections during the loading waiting and equipment tool setting steps are both preset.
  • Silicon rod squaring The cutting wheel motor drives the diamond wire to move at high speed, and the entire cutting device moves downward in the Z direction along with the sliding of the transverse cutting and feeding assembly of the cutting column and the vertical cutting and feeding assembly to cut and remove the silicon rod.
  • the edge skin completes the squaring of the silicon rod.
  • the diamond wire cutting section on each side is located exactly between the floating clamping head (supported on the end surface of the silicon rod near the middle area) and the edge support component on the corresponding side (supported on the end surface of the silicon rod corresponding to the area of the edge). in the gap between.
  • a first grinding device installation space is formed inside the cutting wheel seat corresponding to the cutting device of the second station. At least part of the first grinding device described below is mounted to this space. If, in the installed state, the grinding motor is exposed to the environment, the grinding head can be retractably disposed in this space. For example, when the cutting wheel assembly is in working condition, the grinding head is retracted to avoid interference with the cutting operation. When the grinding head operation is required, the grinding head is extended to a position where it is not interfered by the cutting wheel, so that the silicon rod can be ground by the rotation of the grinding head. As in this example, it is mainly used for grinding the edges of silicon rods. As in this example, the first grinding device installation space is located between the two cutting wheels and close to one of the cutting wheels, and the axis of the grinding head of the first grinding device is lower than the cutting wheel.
  • the edge unloading device 7 mainly includes an edge unloading column 71, an edge clamping component 72, an opening and closing mechanism 73, Telescopic mechanism and the rotary mechanism 76.
  • the edge peeling unloading device is mainly used to move the edge peelings of the first and second work stations to the edge peeling collection device.
  • the edge skin clamping component is mainly used to clamp the edge skin.
  • the clamped edge skin can realize linear motion along the Z direction/Y direction, along the X direction. linear motion and rotational motion in the horizontal plane (along the A direction).
  • the edge skin clamping assembly 72 mainly includes an edge skin clamping cylinder 721 (such as a rodless cylinder), an edge skin clamping moving clamp 722, and an edge skin clamping linear guide 723.
  • the edge skin clamping and fixing claws are located below the edge skin and can give upward pushing force to the lower end surface of the edge skin.
  • the edge skin clamping movable clamping jaw can move upward along the edge skin clamping linear guide rail in the Z direction to hold the upper end surface of the edge skin from top to bottom, that is, to clamp the upper end surface of the edge skin downward. force.
  • edge skins of silicon rods of different specifications can be clamped through the cooperation of the edge skin clamping movable clamping jaws and the edge skin clamping fixed clamping jaws.
  • a buffer structure such as a polyurethane pad can be provided on the inside of the end surface of the lower edge skin clamping fixed clamping claw and/or the upper edge skin clamping movable clamping claw facing the edge skin.
  • the integrated grinding machine is equipped with two sets of edge skin clamping assemblies to simultaneously clamp a pair of edge skins after double-line cutting.
  • the edge skin produced by the silicon rod is reliably clamped through the cooperation of a pair of clamping jaws.
  • the edge skin produced by the silicon rod is reliably clamped through the cooperation of a pair of clamping jaws.
  • the lower edge skin clamping fixed clamp has a fixed clamp extension end at approximately the middle position.
  • This arrangement is mainly related to the two pairs of top edge skin rods in the aforementioned edge skin support assembly.
  • the extended end of a fixed clamping claw is located between two pairs of top leather rods, so that the action of the top leather and the clamping action of the top leather can be carried out without interference.
  • the upper edge clamping moving jaw has two symmetrical moving jaw extensions.
  • This arrangement is mainly adapted to the two pairs of edge support structures in the aforementioned edge support assembly.
  • the two pairs of edge skin supporting structures are respectively located inside the extended ends of the moving clamping claws on the corresponding sides, so that the action of supporting the edge skin and the work of clamping the edge skin can be performed without interference.
  • edge clipping fixed/moving jaws can be adjusted according to implementation requirements. For example, they can be adjusted according to the structures of the edge support component and the edge support component, or other avoidable structural forms can be adopted while the structures of the edge support component and the edge support component remain unchanged.
  • the opening and closing mechanism 73 mainly includes an opening and closing motor, an opening and closing rack and pinion mechanism, and an opening and closing bracket 734.
  • the opening and closing bracket is provided with an opening and closing linear guide rail 735, and two sets of edge clamping assemblies. They are respectively slidably arranged on the opening and closing linear guide rails, and the two sets of edge clamping assemblies are respectively equipped with opening and closing motors (referred to as the first opening and closing motor 7311 and the second opening and closing motor 7312 respectively).
  • the first opening and closing motor 7311 and the second opening and closing motor 7312 respectively.
  • the motor and the second opening and closing motor are respectively connected to the first opening and closing gear rack 7321 and the second opening and closing gear rack 7322 in the opening and closing gear rack mechanism. Based on this, two sets can be realized by using the first/second opening and closing motor-the first/second opening and closing gear (7331, 7332)-the first/second opening and closing gear rack-the edge skin clamping assembly on the corresponding side.
  • the opening and closing movement between the edge clamping assemblies enables the two sets of edge clamping assemblies to clamp silicon rods of different specifications (diameters).
  • the specifications of the first/second opening and closing motor, the first/second opening and closing gear, and the first/second opening and closing gear rack are approximately the same, except that the first opening and closing gear on the left side
  • the installation position on the opening and closing bracket is higher than the second opening and closing gear on the right side, and the height difference can ensure that the first rack and the second gear can move without interference.
  • the addendum of the first opening and closing gear rack is higher than the addendum circle of the second opening and closing gear, so the first opening and closing gear rack does not mesh with the second opening and closing gear.
  • opening and closing limiting structures may be provided on both sides of the opening and closing bracket to limit the maximum opening of the two sets of edge skin clamping assemblies.
  • the lubricating oil pipe of the linear guide rail can be equipped with an opening and closing drag chain, for example, the lubricating oil pipe of the linear guide rail is supported on the opening and closing bracket by the opening and closing drag chain.
  • the telescopic mechanism includes a first telescopic component and a second telescopic component, wherein the first telescopic component is mainly used to realize the up and down telescopic action of the edge skin clamping component (hereinafter referred to as the up and down telescopic component 74). and forward and backward movement (hereinafter referred to as the front and rear telescopic assembly 75).
  • the up and down telescopic assembly 74 mainly includes an up and down telescopic motor 741, an up and down telescopic rack and pinion mechanism 742, an outer nest 743, an up and down telescopic bracket 744 connected to the aforementioned opening and closing mechanism, a first up and down telescopic bracket 744, and a first up and down telescopic bracket 744.
  • the gear and the upper and lower telescopic rack and pinion mechanism The upper and lower telescopic racks and racks are connected to the telescopic motor, and the racks of the upper and lower telescopic gear and rack mechanisms are arranged on the side of the outer nest along the Z direction.
  • the upper and lower telescopic brackets are provided with first upper and lower telescopic sliding guide rails.
  • the telescopic bracket is slidingly connected, the inner side of the outer nest is provided with a second upper and lower telescopic sliding guide rail, and the inner nest is slidingly connected to the outer nest through the second upper and lower telescopic sliding guide rail.
  • the top of the upper and lower telescopic hinges is connected to the upper and lower telescopic brackets, the position near the middle of the upper and lower telescopic hinges is connected to the outer nest, and the bottom end of the upper and lower telescopic hinges is connected to the inner nest.
  • outer nest and the inner nest are roughly two U-shaped structures with opening directions opposite to each other, and are slidably connected after being fastened to each other.
  • outer nest and the inner nest are only an exemplary description of the first movable part and the second movable part of the upper and lower telescopic components respectively, and those skilled in the art can adjust their structures according to actual needs.
  • the transmission method of the upper and lower telescopic components is: the upper and lower telescopic motor drives the outer nest to move in the Z direction along the first upper and lower telescopic sliding guide rail of the upper and lower telescopic bracket through gear and rack transmission.
  • the inner nest moves in the Z direction along the second up and down telescopic sliding guide rail in the outer nest.
  • the two telescopic movements are superimposed through scissor-type hinges to realize the up and down telescopic movement of the edge skin clamping component.
  • edge clamping component uses two sets of sliding guide rails superimposed by scissor hinges to achieve its movement in the Z direction, this component can achieve half the movement space without changing the stroke.
  • the application space of the device is greatly reduced.
  • up and down telescopic movements of the two sets of edge skin clamping assemblies are driven by their respective up and down telescopic motors (such as servo motors), they can be controlled in association (synchronously) or relatively independently according to actual needs.
  • the front and rear telescopic assembly 75 mainly includes a front and rear telescopic motor 751, a front and rear telescopic rack and pinion mechanism 752, a first bracket 753 fixed on the side unloading column, a second bracket 754, and a first bracket 754. Front and rear telescopic linear guides 755 on the bracket.
  • the front and rear telescopic motor realizes the front and rear telescopic action of the edge skin clamping assembly through the gear and rack meshing transmission of the front and rear telescopic gear and rack mechanism.
  • the rack of the front and rear telescopic gear and rack mechanism is arranged on the first bracket, and the front and rear telescopic motor drives the gear to rotate and therefore causes the gear to rotate along the rack, thereby including the opening and closing mechanism and the edge skin clamping assembly.
  • the movable part slides along the front and rear telescopic linear guides.
  • the front and rear telescopic components are arranged above the slewing mechanism.
  • a pair of front and rear telescopic linear guide rails are provided on both sides of the first bracket, and the rack is disposed between the two and close to the position far away from the first/second opening and closing motor, so that the overall The structure maintains balance.
  • a reinforcing plate is provided between the second bracket and the back of the opening and closing bracket.
  • reinforcing plates are respectively provided at positions corresponding to the two front and rear telescopic linear guide rails.
  • the two ends of the first bracket along its telescopic direction are respectively provided with flanges in order to limit the forward and backward telescopic range of motion.
  • other structures such as blocks can also be used to achieve similar functions.
  • the rotary mechanism 76 mainly includes a rotary cylinder 761, a rotary gear and rack mechanism 762 and a rotary linear guide 763 provided on the table of the edge unloading column.
  • a rotation area corresponding to the rotation range is provided on the table.
  • the rotation area 764 is generally an area formed by a 90° arcuate groove.
  • the part (for example, it can be called the edge-taking part) performs a rotary motion on the table.
  • the entire edge clamping assembly including the opening and closing mechanism can rotate clockwise or counterclockwise in the rotation area.
  • two buffers 765 can be provided in the rotation area to ensure the stability of the edge clamping assembly after rotating to the extreme position. It can be seen that based on the rotary mechanism, the edge clipping assembly that clamps the edge can realize its transfer from the cutting area corresponding to the first station or the second station to the collection area corresponding to the edge collection device.
  • the top end of the edge leather clamping component is connected to the bottom end of the inner nest of the upper and lower telescopic components, and the top end of the upper and lower telescopic brackets of the upper and lower telescopic components is connected to a connecting bracket, corresponding to the two sets of edge wallets.
  • the two connecting brackets of the holding assembly are slidingly connected to the opening and closing bracket.
  • the front and rear telescopic components are arranged on the back of the opening and closing bracket (the side away from the edge clamping component).
  • the slewing mechanism is arranged below the front and rear telescopic components, specifically, between the front and rear telescopic brackets and the side unloading column.
  • the edge collection device 8 mainly includes an edge collection cylinder 81, an edge collection slide assembly, and an edge collection box 84.
  • the edge collection slide assembly includes a side portion provided on the edge unloading column.
  • the edge collection box is mainly responsible for collecting the edge removed from the first/second work station by the edge unloading device.
  • the edge collection cylinder drives the edge collection box to move up and down on the edge collection slide assembly along the edge collection slide guide rail to achieve efficient edge collection function.
  • an edge collection box can be configured for both the first workstation and the workstation including the cutting function. Moreover, in order to ensure the sustainability of the operation, each edge collection box should accommodate multiple pieces of edge.
  • the edge scrap collection box 84 includes a box body and four pairs of storage areas 841 provided in the box body so as to be able to store 8 pieces of edge scraps, and a pair of edges are cut out for the same silicon rod at the first station and the second station.
  • the edge scraping box in this example can store the scrapings produced by 4 round rods. After the edge skin is collected, the edge skin collection box moves downward along the edge skin collection slide guide rail to complete the edge skin unloading.
  • the storage area is provided with a vertical reserved space 842 at a position corresponding to the edge clipping fixed jaws of the aforementioned edge clipping assembly.
  • edge skin clamping component can be driven by the upper and lower telescopic components, and the edge skin clamping fixed jaws below it can freely move to a position close to the bottom in the vertical reserved space, thereby stabilizing the edge skin. placed in the storage area.
  • each pair of storage areas defines an area with a rectangular cross-sectional outline, and each rectangular area is approximately the same.
  • the height of the storage areas differs between pairs.
  • the two pairs of storage areas at the middle position (inside) are approximately of the same height, and the heights of the two pairs of storage areas on the outside are approximately the same but lower than the height of the two pairs of storage areas on the inside.
  • each pair of storage areas can determine the structural form and distribution position of each pair of storage areas and the manner in which they constitute the edge collection box according to actual needs (such as the specifications of the silicon rods, the movement form of the edge unloading device, etc.).
  • the heights of the four pairs of storage areas can be completely staggered (eg, in descending order) to facilitate placement and unloading.
  • the edge collection box can be used for automated equipment or manual unloading.
  • Edge skin clamping After the cutting operation of the silicon rod is completed, the rotary mechanism moves, and the edge skin unloading device The edge skin clamping assembly rotates 90° counterclockwise to reach the cutting area corresponding to the edge skin.
  • the opening and closing mechanism causes the edge skin clamping jaws of the edge skin clamping assembly to open laterally to adapt to the radial size of the silicon rod.
  • the first/second telescopic component of the telescopic mechanism moves the edge cover clamping component downward/forward respectively, so that the edge cover fixing jaw moves to a position corresponding to the lower end surface of the edge cover.
  • the edge cover moving clamp By moving the edge cover moving clamp along the Z direction, the edge cover moving clamp is positioned corresponding to the upper end surface of the edge cover, so that the edge cover clamping assembly is adapted to silicon rods of different axial dimensions (lengths).
  • the two edge skin clamping assemblies are moved in a direction close to each other through the opening and closing mechanism, so that the edge skin clamping assemblies are adapted to silicon rods of different radial sizes (diameters). Based on this, the edge skin produced by cutting can be clamped through the cooperation of the edge skin clamping fixed clamping claw and the edge skin clamping movable clamping claw.
  • the fixed clamping jaws of the edge cover have a structure capable of avoiding the top edge cover assembly
  • the moving jaws of the edge cover clamping have a structure capable of avoiding the support edge cover assembly.
  • the edge cover support assembly and the edge cover assembly need to be kept out of the way to ensure the operation of the edge cover unloading device.
  • the top edge skin component in the edge skin support assembly is lowered, so that the edge skin support assembly exits along the Y direction to achieve avoidance.
  • the edge support structure of the edge support component is raised to achieve avoidance.
  • the opening and closing mechanism moves the two edge skin clamping assemblies in directions away from each other, thereby opening the pair of edge skins and silicon rods produced by cutting along the X direction to separate the edge skins and silicon rods.
  • the edge skin and the silicon rod are opened along the X direction.
  • the way the edge skin and the silicon rod are staggered can be: using the upper and lower telescopic components to stagger the edge skin and the silicon rod in the Z direction, or using the front and rear telescopic components to stagger the edge skin and the silicon rod in the Y direction, etc.
  • Edge cover transfer After the edge cover clamping assembly clamps the edge cover, the first/second telescopic component in the telescopic mechanism drives the edge cover clamping assembly holding the edge cover to move upward and backward respectively, and the opening and closing mechanism Drive the two sets of leather clamping mechanisms closer together to minimize the radius of rotation.
  • the rotary mechanism can be activated, and the whole edge scraping part, including the telescopic mechanism, the opening and closing mechanism, and the edge scraping clamping assembly that holds the edge scraps, rotates 90° clockwise to reach the edge scraping collection device. collection area.
  • Edge collection After the edge part reaches the collection area, the edge collection cylinder of the edge collection device drives the edge collection box to move upward, and the upper and lower telescopic components make the edge clamping fixed jaws of the edge clamping assembly move along the edge.
  • the vertical reserved space corresponding to one of the pair of storage areas of the edge collection box moves downward to the position where it is stored in place.
  • a pair of edge covers can be stored in a corresponding pair of storage areas, thus completing the edge cover storage.
  • edge collection cylinder moves the edge collection device downward, and the edge is collected in the storage area through manual cutting or docking with automated equipment such as AGV.
  • the edges are removed from the collection area.
  • the edge skins can also be removed when all eight storage areas are not filled with edge skins.
  • the first grinding device 26 included in the aforementioned second station mainly includes a first grinding fixed seat 261, a first grinding electric cylinder 262, The first grinding feed slide 263 , the first grinding spindle assembly 264 and the first grinding head assembly 265 .
  • the present invention mainly uses a pair of first grinding devices arranged opposite to perform grinding (chamfering) on two pairs of edges of the square bar after removing the edge skin.
  • the first grinding device can also be used to grind the two pairs of side surfaces of the square rod, or both.
  • the second station of the invention also includes a cutting device, so the edges of the square bar after the squaring operation are cut through a pair of parallel diamond wire cutting sections and then ground.
  • a first grinding spindle linear guide is provided on the first grinding fixed seat that can move along the Z-direction/X-direction with the cutting device, and the first grinding spindle assembly is slidably disposed on the first grinding spindle.
  • the first grinding electric cylinder is installed on the first grinding fixed seat and its power output end Connected to the first grinding feed slide. In this way, the feeding action of the first grinding spindle assembly along its axial direction (along the X direction) can be realized through the movement of the first grinding electric cylinder.
  • the pair of grinding electric cylinders of the first grinding device Driven by , the grinding head assemblies of the two first grinding devices can move toward each other to perform grinding operations on a pair of edges of the silicon rod.
  • the first grinding spindle assembly mainly includes a first grinding spindle housing, a grinding spindle inserted in the first grinding spindle housing, and a first grinding spindle.
  • the first grinding motor is driven and connected to drive the first grinding motor to rotate.
  • a first grinding installation space is formed between the first grinding spindle housing and the part of the first grinding spindle close to the first grinding electric cylinder, and the first grinding motor is installed in this space to achieve The first grinding motor is built in.
  • the first grinding motor is connected to the grinding spindle through a combination bearing, and the grinding spindle is connected to the aforementioned first grinding head assembly through a grinding wheel adapter plate.
  • the built-in first grinding spindle motor provides power to cause the first grinding spindle to rotate, thereby driving the grinding head to rotate to perform grinding operations on the edges of the square bar.
  • the first grinding head assembly is equipped with a grinding spray member to reduce the amount of silicon powder produced by grinding by spray cleaning the silicon rod being ground. Attachment to the stick.
  • the first grinding spindle housing is disposed on the first grinding feed slide.
  • the first grinding feed slide is slidingly connected to the aforementioned first grinding spindle linear guide.
  • the lubricating oil pipe of the first grinding spindle linear guide is The first grinding energy chain that provides protection and serves as its mounting carrier.
  • the operation process of grinding the edge of the silicon rod through the first grinding device of the second station is as follows: Preparation: The second edge support component of the second cutting device moves away from the edge in the Y direction The transfer device is clamped to avoid possible interference between the first grinding head assembly and the second edge support assembly when the first grinding device moves up and down.
  • the first grinding head assemblies of the two first grinding devices are relatively separated along the The two first grinding head assemblies correspond to each other.
  • Edge grinding The two first grinding head assemblies are rotated at high speed through the built-in first grinding motor, and the first grinding head assembly is extended toward the second side along the X direction through the first grinding cylinder.
  • the cutting device drives the first grinding device to move back and forth along the Z direction, thereby grinding a pair of edges of the square rod.
  • the clamping head assembly is rotated 90°, and the above movement is repeated to grind the other pair of edges on the square bar.
  • the edge can be cut first through the two diamond wire cutting sections of the second cutting device and then ground using the first grinding device.
  • the second grinding device 31 mainly includes a second grinding column 311 and a second grinding motor 312 disposed on the second grinding column.
  • the second grinding head assembly mainly includes a rough grinding head and a fine grinding head set at the same station, and the second grinding feed assembly mainly drives the second grinding head assembly (as well as the composite shaft assembly and the composite shaft
  • the transmission assembly moves along the Z direction/X direction to grind the two pairs of sides of silicon rods (square rods) of different specifications to the required processing requirements.
  • the detection component is mainly used to determine the grinding amount.
  • the nitrogen balance system is installed.
  • the rear side of the second grinding column is mainly used to balance the weight of the second grinding head assembly.
  • the second grinding head assembly 313 includes a fine grinding wheel 3131 and a rough grinding wheel 3132.
  • the fine grinding wheel and the rough grinding wheel are concentrically arranged at the same station, as in this example. , the rough grinding wheel is freely accommodated in the reserved space formed inside the fine grinding wheel.
  • a pair of second grinding head assemblies and a pair of detection assemblies are symmetrically arranged on the two second grinding feed slides of the second grinding feed assembly (located on both sides of the silicon rod). In this way, the second grinding head assembly can perform fine grinding and rough grinding of the silicon rod at the same station.
  • the fact that the rough grinding wheel is located radially inside the fine grinding wheel is just an exemplary description, and the positions of the two can also be reversed.
  • the composite shaft assembly 314 includes a first transmission shaft 3141 (shaft sleeve) of a cylindrical structure and a second transmission shaft 3142 (inner shaft) accommodated in the cylindrical structure, wherein the shaft The sleeve is connected to the fine grinding wheel so as to drive the fine grinding wheel to connect when the sleeve rotates, and the second transmission shaft is connected to the rough grinding wheel to drive the rough grinding wheel to connect when the second transmission shaft rotates.
  • the second grinding head assembly is configured with a second grinding spray component and an air gun, which respectively perform spray cleaning and air blowing on the silicon rod being ground to reduce the silicon powder generated by grinding. Attachment to silicon rods.
  • a square brush is arranged on the outer edge of the second grinding head assembly to prevent water mist from spreading randomly during grinding. To a certain extent, it can also wash away the residual silicon powder after grinding the surface of the silicon rod.
  • the composite shaft assembly also includes a composite shaft box housing 3143.
  • a second grinding installation space is formed between the composite shaft box housing and the first transmission shaft, and is connected with the first transmission shaft and the first transmission shaft.
  • the second grinding motor 312 which is driven and connected by a composite shaft composed of a second transmission shaft, is installed in this space to realize the built-in second grinding motor. For example, driven by the second grinding motor, the first transmission shaft and the second transmission shaft always keep rotating synchronously.
  • the composite shaft transmission assembly is mainly used to drive the inner shaft in the composite shaft assembly to perform telescopic movement along the axial direction of the bushing, thereby ensuring that rough grinding operations or fine grinding operations can be realized without interference.
  • the composite shaft transmission assembly 315 mainly includes a composite shaft transmission motor 3151, a composite shaft transmission screw nut mechanism (including a composite shaft transmission nut seat and a composite shaft transmission screw), and a composite shaft transmission connection seat 3152 , composite shaft transmission linear guide 3153, composite shaft transmission guide rail bracket 3154, composite shaft transmission locking nut 3155 and composite shaft transmission bearing box 3156.
  • the composite shaft transmission bearing box includes a bearing sleeve, a bearing seat and a combined bearing between the two.
  • the inner shaft passes through the bearing sleeve and is limited by a limiting flange.
  • the outer part of the bearing sleeve is connected to the combined bearing.
  • the combined bearing One end of the combined bearing is fixed on the bearing seat, and the other end is fixed through the bearing gland.
  • the locking nut is fixed to the combined bearing so as to drive the inner shaft to telescopic movement together.
  • the composite shaft transmission nut seat is provided on the composite shaft transmission connection seat
  • the composite shaft transmission motor, the composite shaft transmission connection seat and the composite shaft transmission linear guide are all provided on the composite shaft axle box housing
  • the composite shaft transmission motor is located on the composite shaft transmission connection seat.
  • the axle box housing corresponds to the circumferential outer position of the composite shaft assembly
  • the composite shaft transmission connection seat and the composite shaft transmission linear guide are located at the end of the composite shaft assembly away from the second grinding head assembly.
  • the composite shaft transmission motor drives the composite shaft transmission connection seat and the inner shaft to move in the direction of the composite shaft transmission linear guide through the composite shaft transmission screw nut mechanism, so that the telescopic movement of the inner shaft relative to the shaft sleeve can be realized.
  • the inner shaft is retracted.
  • the inner shaft is extended.
  • the detection assembly 316 mainly includes a probe housing 3161, a probe 3162, a probe bracket 3163 and a probe cylinder 3164. Among them, a group of probes (including three in this example) is installed on the probe bracket, and the power output end of the probe cylinder is connected to the probe bracket to drive the probe to move in the X direction.
  • the detection assembly also includes a detection plate and a collision block, where the detection plate is used to calibrate the probe, and the collision block is used to push open the front panel of the probe protective cover to avoid direct contact between the probe and the protective door, thereby effectively preventing The probe is damaged.
  • a detection component is installed on a pair of second grinding devices respectively. Based on this, the operation process of the detection component is roughly as follows: the probe cylinder pushes the probe to the cut surface of the silicon rod to detect the grinding quality. For example, the detection process can calculate the grinding amount corresponding to the rough grinding wheel, and the rough grinding wheel advances to the X-axis by a distance suitable for the grinding amount to perform rough grinding. After the rough grinding is completed, the detection component repeats the previous detection process to calculate the grinding amount of the fine grinding wheel. The fine grinding wheel advances to the X-axis by a distance suitable for the grinding amount and performs fine grinding.
  • the second grinding feed assembly 317 mainly includes a second grinding transverse feed assembly 3171 and a second grinding vertical feed assembly 3172, respectively used to implement the second grinding head.
  • the components are fed straight along the X and Z directions.
  • the second grinding transverse feed assembly 3171 mainly includes a second grinding transverse lifting slide 31711, and two second grinding transverse lifting slides slidingly disposed on the second grinding transverse lifting slide in the horizontal direction.
  • the two second grinding feed lifting slides are provided with positioning rotating shafts 31714 to facilitate the positioning of the second grinding head assembly.
  • the second grinding vertical feed assembly 3172 mainly includes a second grinding vertical motor 31721 and a second grinding vertical linear guide 31722 provided on the second grinding column 311.
  • the second grinding vertical feed motor drives the transverse lifting slide of the second grinding transverse feed assembly to move in the Z direction, thereby driving the second grinding head assembly to move in the Z direction.
  • the two second grinding transverse feed motors drive the corresponding second grinding transverse feed slide plates to move in the X direction to drive the second grinding head assemblies closer to/away from each other in the X direction.
  • the second grinding transverse lifting slide is provided with upper guide rails,
  • the lower guide rail and the installation directions of the two are different.
  • the upper guide rail is installed vertically, so it can bear the weight and guide
  • the lower guide rail is installed sideways, so it can resist overturning force and guide.
  • the upper and lower guide rails are equipped with false guide rails near the middle and both ends along their length, which not only plays a position limiting role but also saves materials.
  • the nitrogen balance system 318 mainly includes a nitrogen cylinder 3181, a balance cylinder 3182, a plate chain transmission mechanism 3183, and a nitrogen guide wheel seat 3184.
  • the high-pressure nitrogen required for balance is provided
  • the cylinder is supported by the cylinder bracket and placed on the rear side of the second grinding column.
  • the balance cylinder is fixed on the rear side of the second grinding column through the balance cylinder bracket.
  • the balance cylinder is guided to the front side of the second grinding column through the nitrogen guide wheel seat through the plate chain transmission mechanism.
  • the chain screw on the front side of the plate chain transmission mechanism is in contact with the second grinding column. Two grinding feed lifting slides are connected.
  • the nitrogen balance system uses the high pressure in the nitrogen cylinder to balance the pressure of the balance cylinder against the weight of the second grinding head assembly, thereby ensuring good dynamic performance during the operation of the second grinding device.
  • a nitrogen balancing system with a stronger balancing capacity than the balancing cylinder assembly is used.
  • the silicon rod can be squared in the same equipment (the silicon rod can also be squared). edges for cutting) and grinding operations. Since the silicon rod does not need to be re-clamped when transferring between various stations in the integrated grinding machine, the processing accuracy of the silicon rod is improved. Since the workstations in the integrated grinding machine contain multiple functions, it is expected to improve the production efficiency of silicon rods through cooperation between the workstations.
  • part of the squaring operation in the first station and part of the grinding operation in the third station can be shared , and the two operations are integrated to be completed at the same work station, which improves the collaboration between various work stations in the integrated grinding machine.
  • the first/second cutting device by configuring the first/second cutting device with a first/second edge support assembly that can advance/retreat in the Y direction, the first/second cutting device can be moved forward to the first/second workstation.
  • the edge skin of the work station is supported and retreated to avoid the grinding head mechanism of the first/second station and the edge skin unloading device. Therefore, on the premise of ensuring that the functions of the first and second stations of the integrated grinding machine can be reliably completed, the overall size of the integrated grinding machine is made more compact.
  • the basic workbench can have a smaller diameter, thus reducing the footprint of the entire machine, and accordingly reducing production costs and transportation costs.

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Abstract

一种开磨一体机,属于硬脆材料加工设备技术领域,至少包括第二工位(2),第二工位(2)包括:第一磨削装置,其能够对待加工件进行至少一部分的磨削作业;以及第二切割装置,其能够对待加工件进行至少一部分的开方作业和/或对待加工的棱边进行切割;优选地,开磨一体机(100)进一步包括:第一工位(1),其包括第一切割装置(11),第一切割装置(11)能够对待加工件进行至少一部分的开方作业和/或对待加工的棱边进行切割;并且/或者第三工位,其包括第二磨削装置(31),第二磨削装置(31)能够对待加工件进行至少一部分的磨削作业。通过在同一工位上通过至少一种组合方式实现对待加工件的开方作业/至少一部分开方作业和磨削作业/至少一部分磨削作业以及能够通过多个工位的组合实现对待加工件的开方和磨削作业,提升了开磨一体机中各个工位之间的协作性。

Description

开磨一体机 技术领域
本发明涉及硬脆材料的加工设备技术领域,具体涉及一种开磨一体机。
背景技术
现有的开磨一体机将对应于开方装置的功能以及对应于磨削装置的功能进行整合,从而能够在同一台开磨一体机上完成对硅棒的开方作业和磨削作业。不过,目前的开磨一体机通常存在如下的问题:对应于开方装置的功能的工位与对应于磨削装置的功能的工位在功能上仍然与整合前的功能基本保持一致,如对应于磨削装置功能的工位仍能够对方棒的磨削面和倒角进行完整的粗磨和精磨,这样一来,整合后的不同工位之间的协作性尚存一定的提升空间。
发明内容
为了至少一定程度地解决上述技术问题,本发明提供了一种开磨一体机,该开磨一体机至少包括:第二工位,其包括:第一磨削装置,其能够对待加工件进行至少一部分的磨削作业;以及第二切割装置,其能够对待加工件进行至少一部分的开方作业和/或对待加工的棱边进行切割;优选地,所述开磨一体机进一步包括:第一工位,其包括第一切割装置,所述第一切割装置能够对待加工件进行至少一部分的开方作业和/或对待加工的棱边进行切割;并且/或者第三工位,其包括第二磨削装置,所述第二磨削装置能够对待加工件进行至少一部分的磨削作业。
通过这样的构成,能够谋求通过在同一工位上通过至少一种组合方式实现对待加工件的开方作业/至少一部分开方作业和磨削作业/至少一部分磨削作业以及能够通过多个工位的组合实现对待加工件的开方和磨削作业。
可以理解的是,本领域技术人员可以根据实际需求确定开方作业和磨削作业在第二工位上的分配形式以及第二切割装置和第一磨削装置在第二工位上的具体的设置方式等。
可以理解的是,本领域技术人员可以根据实际需求确定开方作业在第一工位和第二工位上的分配形式以及磨削作业在第二工位和第三工位上的分配形式,示例性地,可以仅通过第一工位和第二工位完成全部的开方作业,也可以通过第一工位或者第二工位的协作完成全部的开方作业。同理,可以仅通过第二工位和第三工位完成全部的磨削作业,也可以通过第二工位和第三工位的协作完成全部的磨削作业。
此外,本领域技术人员可以根据实际需求确定第一工位、第二工位和第三工位的结构形式、可能的功能以及各个工位之间的位置关系以及工位之间的工序得以衔接所借助的具体结构。以第一工位为例,如第一工位除了进行开方作业,还可以进行如磨削作业或者上下料作业等其他功能。以第二工位为例,如首先与第一工位类似,除了进行开方和磨削作业,还可以进行如上下料作业等其他功能。以其仅能进行开方作业和磨削作业为例,本领域技术人员可以根据实际需求确定对应于开方作业和磨削作业的作业区之间的结构形式、相对位置以及二者之间的关联等。如用于实现与两种作业相关的伸缩运动的机构可以共用等。
附图说明
下面以待加工件为待磨削的硅棒(下文简称硅棒,如硅棒包括原棒、方棒以及二者之间的状态(如去除了其中一对边皮的圆棒))并参照附图来描述本发明的优选实施方式,附图中:图1示出本发明一种实施例的开磨一体机的立体结构示意图;图2示出本发明一种实施例的开磨一体机的俯视结构示意图;图3示出本发明一种实施例的开磨一体机的第一工位的结构示意图;图4示出本发明一种实施例的开磨一体机的第二工位的结构示意图;图5示出本发明一种实施例的开磨一体机的上下料装置的结构示意图;图6示出本发明一种实施例的开磨一体机的上下料装置中底板组件的结构示意图;图7示出本发明一种实施例的开磨一体机的上下料装置中上料组件的结构示意图;图8示出本发明一种实施例的开磨一体机的上料组件中上料输送组件的结构示意图;图9示出本发明一种实施例的开磨一体机的上料组件中上料输送组件的(局部)剖视示意图;图10示出本发明一种实施例的开磨一体机的上料组件中上料夹爪组件的结构示意图;图11示出本发明一种实施例的开磨一体机的上料组件中上料翻转组件的结构示意图;图12示出本发明一种实施例的开磨一体机的下料组件的结构示意图;图13示出本发明一种实施例的开磨一体机的下料组件中下料夹爪组件的结构示意图;图14示出本发明一种实施例的开磨一体机的下料组件中下料翻转组件的 结构示意图;图15示出本发明一种实施例的开磨一体机的下料组件中下料输送组件的结构示意图;图16示出本发明一种实施例的开磨一体机的夹持转运装置的结构示意图;图17示出图16中顶紧块的局部示意图;图18示出本发明一种实施例的开磨一体机的夹持转运装置中的夹持转运立柱的结构示意图;图19示出本发明一种实施例的开磨一体机的夹持转运装置中的夹紧头组件中的第二夹紧头(浮动夹紧头)的结构示意图;图20示出本发明一种实施例的开磨一体机的夹持转运装置中的扶边皮组件的结构示意图;图21示出本发明一种实施例的开磨一体机的夹持转运装置中的扶边皮组件和边皮支撑组件(以第二边皮支撑组件为例)的结构示意图;图22示出本发明一种实施例的开磨一体机的边皮支撑组件(以第二边皮支撑组件为例)的结构示意图一(立体);图23示出本发明一种实施例的开磨一体机的边皮支撑组件的结构示意图二;图24示出本发明一种实施例的开磨一体机的边皮支撑组件中顶边皮组件的结构示意图;图25示出本发明一种实施例的开磨一体机的边皮支撑组件中换型块的结构示意图;图26示出本发明一种实施例的开磨一体机的切割装置(以第二切割装置为例)中切割进给组件的结构示意图;图27示出本发明一种实施例的开磨一体机的切割装置中切割机头组件的结构示意图一;图28示出本发明一种实施例的开磨一体机的切割装置中切割机头组件的(局部)结构示意图二;图29示出本发明一种实施例的开磨一体机的切割机头组件中的切割轮组件(以切割轮(1)为例)的结构示意图;图30示出本发明一种实施例的开磨一体机的切割机头组件中的张力轮组件的结构示意图一;图31示出本发明一种实施例的开磨一体机的切割机头组件中的张力轮组件的结构示意图二;图32示出本发明一种实施例的开磨一体机的切割机头组件中的排线轮组件的结构示意图;图33示出本发明一种实施例的开磨一体机的第一切割装置的结构示意图;图34示出本发明一种实施例的开磨一体机的边皮卸载装置的结构示意图;图35示出本发明一种实施例的开磨一体机的边皮卸载装置中边皮夹持组件的结构示意图;图36示出本发明一种实施例的开磨一体机的边皮卸载装置中开合机构的结构示意图;图37示出本发明一种实施例的开磨一体机的边皮卸载装置中伸缩机构中第一伸缩组件的结构示意图一;图38示出本发明一种实施例的开磨一体机的边皮卸载装置中伸缩机构中第一伸缩组件的结构示意图二;图39示出本发明一种实施例的开磨一体机的边皮卸载装置中伸缩机构中第二伸缩组件的结构示意图;图40示出本发明一种实施例的开磨一体机的边皮卸载装置中回转机构的结构示意图;图41示出本发明一种实施例的开磨一体机的边皮收集装置的结构示意图;图42示出本发明一种实施例的开磨一体机的边皮收集装置中边皮收集盒的结构示意图;图43示出本发明一种实施例的开磨一体机的边皮收集装置与边皮卸载装置的装配示意图;图44示出本发明一种实施例的开磨一体机的第二工位中第一磨削装置的结构示意图;图45示出本发明一种实施例的开磨一体机的第二工位的第一磨削装置的磨削主轴组件的结构示意图;图46示出本发明一种实施例的开磨一体机的第二工位的作业流程示意图;图47示出本发明一种实施例的开磨一体机的第二磨削装置的结构示意图;图48示出本发明一种实施例的开磨一体机的第二磨削装置中第二磨削磨头组件的结构示意图;图49示出本发明一种实施例的开磨一体机的第二磨削装置中复合轴组件的结构示意图;图50示出本发明一种实施例的开磨一体机的第二磨削装置中复合轴传动组件的结构示意图一;图51示出本发明一种实施例的开磨一体机的第二磨削装置中复合轴传动组件的结构示意图二;图52示出本发明一种实施例的开磨一体机的第二磨削装置中第二磨削进给组件的结构示意图;图53示出本发明一种实施例的开磨一体机的第二磨削装置中检测组件的结构示意图;以及图54示出本发明一种实施例的开磨一体机的第二磨削装置中氮气平衡系统的结构示意图。
具体实施方式
需要说明的是,在本发明的描述中,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方向或位置关系的术语是基于附图所示的方向或位置关系,这仅仅是为了便于描述,而不是指示或暗示所述装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性。此外,还需要说明的是,在本发明的描述中,除非另有明确的规定和限定,术语“安装”、“设置”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是直接相连,也可以通过中间媒介间接相连,还可以是两个元件内部的连通。对于本领域技术人员而言,可根据具体情况理解上述术语在本发明中的具体含义。另外,为了更好地说明本发明,在下文的具体实施方式中给出了众多的具体细节,本领域技术人员应当理解,没有某些具体细节,本发明同样可以实施。在一些实例中,对于本领域技术人员熟知的磨床的原理等未作详细描述,以便于凸显本发明的主旨。
下文将参照图1至图54中的全部或者部分来阐述本发明。
主要参照图1至图4,在一种可能的实施方式中,本发明的开磨一体机100主要包括设备主体,设备主体包括第一工位1、第二工位2以及第三工位3,其中,第一工位能够对原料圆棒进行切割从而形成方棒(对原料圆棒进行四次(单边)去边皮作业)或者半成品方棒(对原料圆棒进行小于四次(单边)的去边皮作业),第二工位既能够对进行原料圆棒/半成品方棒进行切割作业又能够对方棒的棱边进行磨削(第一部分磨削作业,磨倒角),第三工位主要用于对方棒的侧面进行磨削(第二部分磨削作业)。如第一工位以及开二工位中的切割作业主要是通过金刚线对硅棒进行线锯切割的方式对圆棒或者半成品方棒进行开方作业。显然,可以将第二工位和第三工位磨削作业进行互换或者由其中的任意一个工位完成。
在一种可能的实施方式中,设备主体还包括上下料装置4,上下料装置主要用于将原料圆棒、半成品方棒、方棒等形式的硅棒加载至开磨一体机或者从其上卸载/移除的上下料装置。
在一种可能的实施方式中,设备主体还包括夹持转运装置5,夹持转运装置主要用于将硅棒在各个工位的相应装置之间进行转运以保证开磨一体机的工作持续性。
在一种可能的实施方式中,设备主体还包括边皮卸载装置7和边皮收集装置8,边皮卸载装置主要用于将切割产生的边皮从第一/第二工位中产生边皮的位置转移至边皮收集装置,边皮收集装置主要用于收集在进行前述的切割作业期间产生的边皮料并将其从开磨一体机的作业区域移除。
为了便于说明,首先对开磨一体机的方向作如下设定:在水平面内沿径向靠近夹持转运装置(如上、下料方向等)的方向记作Y向,在水平面内与Y向垂直的方向记作X向(如开合机构的运动方向等),竖直方向记作Z方向。下文中将结合该方向设定并结合附图对本发明的开磨一体机进行描述。
主要参照图5至图6,在一种可能的实施方式中,开磨一体机的上下料装置4主要包括将硅棒(如圆棒)加载至开磨一体机的上料组件41、将硅棒(如方棒)从开磨一体机卸载的下料组件42以及承载上料组件和下料组件的底板组件43,其中,底板组件43主要包括X轴底板组件431(与Y轴垂直,可实现上/下料组件的整体移动)以及设置于X轴底板组件上的Y轴底板组件432(靠近/远离夹持转运装置的方向,称作上下料方向)。
在一种可能的实施方式中,X轴底板组件431包括X轴底板4311,X轴底板配置有X轴移动电机4312,X轴移动电机通过丝杠螺母机构带动Y轴底板组件整体沿X方向移动。
示例性地,X轴底板的下方安装有滚轮和脚架对其进行支撑,在X轴底板的上方安装有导轨,Y轴底板组件的下方安装有与导轨匹配的滑条或者滑块。这样一来,X轴移动电机驱动丝杠螺母机构运动且在导轨的引导下,Y轴底板组件及其搭载的上、下料组件能够沿X向移动,从而保证了上、下料组件和夹持运转装置之间能够沿X方向精准对接。
在一种可能的实施方式中,Y轴底板组件432包括与上、下料组件对应的上料Y轴底板4321以及下料Y轴底板4322,上料/下料Y轴底板分别配置有上料Y轴移动电机4323和下料Y轴移动电机4324,上料Y轴移动电机和下料Y轴移动电机分别通过丝杠螺母机构驱动上、下料组件沿Y方向移动,从而带动承载于其上的上、下料组件沿Y方向与夹持运转装置精准对接。
主要参照图5、图7至图11,在一种可能的实施方式中,上下料装置中的上料组件41主要包括上料输送组件411、上料夹爪组件412和上料翻转组件413,其中,上料夹爪组件411主要用于将待加载的硅棒(如圆棒)夹持,上料输送组件412主要用于将硅棒沿Y向输送至对应于与夹持转运装置对接的位置,上料翻转组件413主要用于将硅棒由水平状态(卧)向上翻转为竖直状态(立)从而到达能够与夹持转运装置直接对接的位置。
在一种可能的实施方式中,上料输送组件411主要包括上料驱动电机4111和滚轮组4112,滚轮组包括具有锥形面的两排滚轮,上料驱动电机为双出轴驱动电机,双出轴驱动电机通过链传动的方式分别带动两排滚轮组沿上料方向滚动,硅棒的表面与滚轮的锥形面接触,从而通过两排滚轮的同步转动实现硅棒沿Y向的水平输送。显然,双出轴驱动电机仅为一种较佳的实施方式,如也可以为两排滚轮组均配置一个上料驱动电机。
示例性地,上料输送组件包括设置于上料Y轴底板上的上料底板4113以及设置于上料底板上的上料垫板4114,滚轮组设置于上料垫板,上料驱动电机固定至上料底板。上料输送组件在对应于链传动中连接上料驱动电机和滚轮之间的上料链条4115的位置配置有上料罩体4116,上料罩体如有防尘、防呆的效果,其靠近上端的位置固定至上料垫 板。通过调整上料垫板可以改变对应于滚轮组的上料高度。可以理解的是,上料垫板仅为一种示例性的描述,如可以将上料垫板和下文中对应于下料组件的可调节高度的支撑立板进行互换。即:上料组件可以采用与可调节高度的支撑立板类似的结构来调整上料高度,同样地,下料组件也可以采用与上料垫板类似的结构来调整下料高度。优选地,在硅棒的自重较重的情形下,优选保留与上料垫板类似的结构,如可以是:在与上料垫板类似的结构的基础上增加与可调节高度的支撑立板类似的结构。
在一种可能的实施方式中,上料夹爪组件412主要包括沿Y向分布的多对彼此相向的上料夹爪(如本示例中为两对即4个),通过使每对上料夹爪相向运动,实现对圆棒的夹紧。示例性地,上料夹爪靠近硅棒的面大致为V型面,以便更好地圆棒进行夹持。
在一种可能的实施方式中,上料夹爪组件412包括上料夹爪安装基体4121,上料夹爪安装基体上设置有上料伺服电机4122和直线导轨,上料伺服电机通过上料同步带4123带动丝杠螺母机构中的丝杠转动,丝杠螺母机构中的螺母固定至上料夹爪4124的底部且上料夹爪的底部设置有与直线导轨匹配的滑块,这样一来,在上料伺服电机的带动下,上料夹爪中的一对夹爪便可通过沿X向运动彼此靠近从而实现对硅棒的夹持。如在上料夹爪中部沿其宽度方向的两侧分别安装有上料光电开关4125以便检测是否有硅棒正在上料的行为。上料夹爪中部的中间位置安装有上料接触传感器4126以便检测硅棒的夹紧程度。
在本示例中,同侧的上料夹爪包括两个,其中,左侧的上料夹爪的位置相对固定,右侧的上料夹爪配置有上料夹爪调节直线导轨4127和上料夹爪调节电机4128,以便通过对右侧的上料夹爪进行调整,能够通过两对上料夹爪将不同的轴向尺寸的圆棒夹紧。
在一种可能的实施方式中,上料翻转组件413主要包括上料翻转液压缸4131、上料翻转板4133以及上料接料挡板4133,其中,上料翻转板和上料翻转液压缸均枢转设置于上料Y轴底板,上料翻转液压缸的动力输出端与上料翻转板连接。这样一来,伴随着上料翻转液压缸的动力输出端逐渐伸出,上料翻转板以相对上料Y轴底板枢转运动的方式(记作绕A1轴翻转)由对应于水平状态逐渐翻转为竖直状态,上料接料挡板在硅棒处于竖直状态的情形下支撑于硅棒的下方。
示例性地,上料翻转组件包括上料限位开关组,上料限位开关组包括对应于竖直状态的第一上料限位开关4134和对应于水平状态的第二上料限位开关4135。如在上料翻转板由水平状态绕A1轴逆时针翻转至与第一上料限位开关接触的位置时,可确定已翻转到位。同理,在上料翻转板绕A1轴顺时针由竖直状态翻转至与第二上料限位开关接触的位置时,同样可确认已翻转到位。
在一种可能的实施方式中,上料翻转组件的初始位置如图5和图7所示,此时上料翻转板和第二上料限位开关接触。硅棒水平放置于上料输送组件的两排滚轮上。首先,硅棒由上料输送组件传送至与接料挡板相对应的位置,之后上料夹爪组件将硅棒夹紧。此时,通过上料翻转液压缸提供的动力使上料翻转板绕A1轴翻转至如图9所示的、与第一上料限位开关接触的位置。
可以看出,通过上料组件实现的硅棒在上料时的作业流程如下:上料接收准备:上料组件向Y向移动到开磨一体机的上料位置,并使上料夹爪组件中的两对相向设置的夹爪彼此分开,做好接收硅棒的准备工作。上料夹紧以及输送:将硅棒水平地放置在上料输送组件上,其中,上料光电开关能够检测到硅棒的存在。当硅棒的下游端在两排滚轮的作用下运动至对应于接料挡板的位置时,使滚轮停止运动,两对上料夹爪向内移动,其中,上料接触传感器能够检测硅棒是否被夹紧。上料组件通过底板组件调整其在X向的位置以保证后续能够将硅棒顺利地运送至开磨一体机的加工位置。上料翻转:上料翻转液压缸的动力输出端伸出,在动力输出端的支撑下,上料组件沿A1轴向上翻转90°从而将水平放置的硅棒转换为竖立状态,在此情形下,便可通过与夹持转运组件的衔接接收完成对硅棒的上料作业。通过(第一、第二)上料限位开关可保证翻转前后的硅棒的位置的准确性。
主要参照图5、图12至图15,在一种可能的实施方式中,上下料装置中的下料组件42主要包括下料夹爪组件421、下料翻转组件422和下料输送组件423。其中,下料夹爪组件主要用于将待卸载的硅棒(如方棒)夹持,下料翻转组件主要用于将硅棒由竖直状态(立)向下翻转为水平状态(卧)。下料输送组件主要用于将硅棒沿Y向输送至可将硅棒从开磨一体机中脱离的下料位置。
在一种可能的实施方式中,下料夹爪组件421主要包括一对下料夹爪4211、下料夹爪气缸4212(如下料夹爪气缸为锁紧气缸)、下料夹爪直线导轨4213、连杆4214以及浮动推块4215。
下料夹爪气缸的动力输出端与浮动推块连接,两个下料夹爪分别通过一个 连杆与浮动推块连接,具体地,连杆与浮动推块以及相应的下料夹爪之间均为枢转连接,两个下料夹爪的下方设置有与下料夹爪直线导轨匹配的下料夹爪导槽。这样一来,下料夹爪气缸推动浮动推块沿X向移动,在两端均为枢转连接的枢转连接的连杆的作用下并伴随着下料夹爪导槽与下料夹爪直线导轨之间的配合,一对下料夹爪便相对彼此开合从而实现对硅棒的松开/夹紧。
在一种可能的实施方式中,下料夹爪为板状结构,板状结构的内侧(两个下料夹爪靠近彼此的一侧)设置有能够与方棒直接接触的下料支撑结构,如下料支撑结构包括多个条状结构。板状结构靠近下料夹爪气缸的一侧向内延伸有下料翻边,这样一来,便可形成能够与方棒很好地适配的下料夹持空间。
在一种可能的实施方式中,板状结构的外侧设置有下料夹爪加强筋,板状结构在向靠近连杆的方向延伸有下料夹爪安装部分,安装部分在向靠近连杆的方向延伸有下料夹爪伸出端,连杆枢转设置于相应的下料夹爪伸出端。如下料夹爪伸出端包括一对带孔的安装板,连杆借助于螺栓等连接件与孔的配合枢转设置于安装板。前述的下料导槽设置于安装部分的底部。
示例性地,下料夹爪组件包括下料夹爪安装基体,前述的下料夹爪气缸和下料夹爪直线导轨均设置于下料夹爪安装基体。如前述的下料夹爪直线导轨设置于下料夹爪安装基体的横向部分,下料夹爪气缸设置于下料夹爪安装基体的竖向部分。下料夹爪安装基体的底部还设置有的与下文的曲柄滑块机构的滑块连接的安装板,下料夹爪安装基体在对应于安装板的位置设置有安装基体加强筋以保证安装的可靠性。
在一种可能的实施方式中,下料翻转组件422主要包括下料翻转液压缸4221、下料曲柄滑块机构4222、与下料曲柄滑块机构4223的滑块配合的直线导轨以及与下料夹爪安装基体固定连接的下料翻转架,下料翻转架的左侧通过转轴与下料Y轴底板枢转连接,右侧与下料曲柄滑块机构的滑块枢转连接。基于此,可将竖直状态的方棒翻转至能够与下料输送组件衔接的水平状态。具体而言,竖直放置的方棒由一对下料夹爪夹紧。此时,下料翻转液压缸的动力输出端向右收回从而带动下料曲柄滑块机构的滑块沿直线导轨滑动,当滑块滑动至右侧的下料液压缓冲器4224时停止。此时,方棒便处于水平放置在下料输送组件上方。之后,一对下料夹爪松开,方棒由下料输送组件输送下料。
在一种可能的实施方式中,下料输送组件423主要包括下料输送框架4231、下料输送支撑立板4232、下料输送电机4233以及下料输送传送带4234。下料输送电机驱动链轮带动下料输送链条进行传动,放置于下料输送传送带上方的方棒因此被输送至下料位置。
其中,下料组件在对应于下料输送传送带的上方的位置配置有下料光电开关4235,以检测当前的下料输送传送上是否有方棒正在下料。
在一种可能的实施方式中,两对下料输送支撑立板安装于下料Y轴底板,下料输送支撑立板和下料输送框架之间可借助于螺钉等紧固件固定连接,框架的支撑高度可以通过螺钉的锁紧位置来调节。
示例性地,在下料输送支撑立板上设置有两个沿竖直方向分布的下料输送安装槽4236,螺钉的螺纹部分能够穿过安装槽的不同位置与下料输送框架连接。如本领域技术人员可以根据实际需求在下料输送框架上与下料输送安装槽对应的位置设置多个螺纹孔,这样一来,便可根据实际需求调整对应于下料的支撑高度。如对应于每个支撑高度,在每个安装槽内均配置有两个螺钉,即通过16个螺钉来实现下料输送支撑立板与下料输送框架之间的固定。
可以看出,通过下料组件实现的硅棒在下料时的作业流程如下:下料接收准备:下料组件向上翻转90°(记作绕A2轴翻转)并沿Y向移动到下料位置,同时使一对下料夹爪彼此分开,做好接收硅棒的准备工作。下料夹紧以及翻转:一对下料夹爪沿X向靠近彼此的方向(内侧)并拢,直至下料夹爪与方棒的表面紧密接触并使得施加的夹持力能够保证一对下料夹爪对方棒的可靠固定。下料夹爪气缸的动力输出端伸出推动浮动推块产生向前的位移,浮动推块推动连杆运动,伴随着下料导槽沿下料夹爪直线导轨的滑动,两个下料夹爪彼此分开。下料夹爪组件沿A2轴翻转90度,将竖向状态的方棒切换为水平摆放的状态。下料输送:通过下料输送传送带将方棒沿Y向输送至下料位置。通过液压缓冲器的设置能够保证翻转位置的准确性。
主要参照图16至图21,在一种可能的实施方式中,夹持转运装置5主要包括基础工作台51以及可转动地安装(记作绕B轴旋转)在基础工作台上的旋转工作台52以及设置于旋转工作台上的夹持转运立柱53,在本示例中,夹持转运立柱大致为三棱柱结 构,夹持转运立柱的三个侧面分别配置有滑座组件56、夹紧头组件57和扶边皮组件58,以负责硅棒在各个位置之间的夹持和转运。示例性地,旋转工作台可以使用齿轮传动的方式进行旋转。
在一种可能的实施方式中,夹持转运立柱包括夹持转运立柱主体,夹持转运立柱主体在对应于其三个棱边的位置插设有三根连接杆54,通过为连接杆施加预紧力,以提高夹持转运立柱的刚度。夹持转运立柱主体上安装有顶紧块55以提高硅棒夹持运转装置的安装精度。
在一种可能的实施方式中,顶紧块包括用于卡置于滑座组件的侧边的顶紧块基体以及设置于顶紧块基体上的能够沿夹持转运立柱的侧面以靠近滑座组件的方式运动的第一调整构件551以及能够沿夹持转运立柱的侧面以远离滑座组件的方式运动的第二调整构件552,通过第一调整构件和第二调整构件形成的一顶一拉结构能够对滑座组件在夹持转运立柱的侧面上的安装位置进行调整,保证滑座组件的轴线与旋转工作台垂直。
在一种可能的实施方式中,夹持转运立柱安装于旋转工作台上从而便可随旋转工作台的转动使三个侧面处于不同的位置。如在本示例中,以与上下料装置中的上料工位对应的位置为0°起点使夹持转运立柱逆时针旋转60°至第一工位,如可以对棒料进行首次开方(如可以是全部的开方作业或者是仅进行一部分的开方作业)的作业。首次开方结束,通过边皮卸载装置将边皮移除之后,使夹持转运立柱再旋转120°至第二工位,在首次开方仅进行了一部分的开方作业的情形下,可以在第二工位对首次开方后的棒料进行二次开方,二次开方结束,通过边皮卸载装置将边皮移除之后,同时在该第二工位对方棒的四个棱边进行磨削。显然,在首次开方为进行了全部的开方作业的情形下,仅在第二工位进行磨倒角的作业即可。在磨倒角的作业结束之后,使夹持转运立柱再旋转120°至第三工位,对开方以及磨倒角作业后的方棒的四个侧面进行磨削作业以达到所需精度,如磨削作业通常包括粗磨和精磨。磨削作业完成后,最后使夹持转运立柱再旋转60°至上下料装置中的下料工位,之后便可通过前述下料组件的夹持、翻转、松开、输送等作业以实现方棒的下料。
以在第一工位去除其中的一对边皮的作业、在第二工位进行去除其中的另一对边皮以及磨倒角的作业、在第三工位进行磨削作业为例,在上一个工位的全部作业完成时无间隔地旋转至下一工位、每一个工位内部的环节之间采用无间隔地衔接的情形下,第一工位的加工时长约为16min,第二工位的加工时长约为22min,第三工位的加工时长约为25min。
在一种可能的实施方式中,滑座组件56主要包括滑座支座、滑座直线导轨、滑座电机以及滑座连接板561,其中,滑座支座设置于夹持转运立柱的侧面(夹持面),一对滑座直线导轨沿竖直方向安装在滑座支座上,滑座连接板以可活动的方式设置于滑座直线导轨,滑座电机用于驱动滑动连接板沿滑座直线导轨移动。示例性地,滑座电机驱动丝杠螺母机构中的丝杠转动,固定至滑座连接板上的丝杠螺母机构中的螺母沿滑座直线导轨的运动,从而带动滑座连接板沿竖直方向运动。
在一种可能的实施方式中,夹紧头组件57包括位于上方的第一夹紧头571以及位于下方的第二夹紧头572,其中,第一夹紧头设置于第一夹紧头座5711,第一夹紧头座设置于滑座连接板上,从而使得第一夹紧头(动夹头)能够对滑座连接板沿竖直方向运动。其中,第二夹紧头(定夹头)设置于第二夹紧头座5721,第二夹紧头座固定设置于夹持转运立柱的侧面,以在通过与动夹头之间的配合将硅棒夹紧的同时实现对硅棒的支撑。
这样一来,便可通过可沿竖直方向运动的动夹头与位于动夹头下方的、沿竖直方向的位置相对固定的定夹头之间的配合,实现对不同规格(长度)的硅棒的夹紧和松开作业。
同时,动夹头和定夹头分别配置有动夹头旋转电机和定夹头旋转电机,主要用于实现硅棒的转动,如需要通过第三工位对硅棒不同(对)的侧面进行磨削时,便可通过对应于第三工位的夹紧头组件的动夹头旋转电机和定夹头旋转电机使得硅棒由其中的一对侧面对准粗/精磨砂轮的状态旋转至另一对侧面对准与粗/精磨砂轮的状态。
在实际加工中,硅棒的端面与硅棒的轴线之间并不是理想状态下的完全垂直的关系,此外,在上料环节以及夹紧硅棒的过程中,硅棒也可能发生一定程度的倾斜。故而,在一种可能的实施方式中,定夹头为浮动夹紧头,以补偿硅棒端面的不垂直度。
示例性地,定夹头旋转电机和浮动夹紧头之间设置有定夹头减速器和定夹头轴承箱,浮动夹紧头主要包括壳体、具有弹性的膜片以及浮动球,其中,壳体包括与轴承箱连接的内壳体以及能够与硅棒的端面接触的外壳体,膜片与内壳体和外壳体分别连接从而允许内壳体和外壳体之间产生一定的偏移量。浮动球容纳于环状结构的膜片的中部,通过浮 动球在配置于内、外壳体上的浮动球座内的运动,有望使得外壳体相对于内壳体在任意方向倾斜从而产生一定的浮动量,并因此弥补硅棒端面的不垂直度。
可以理解的是,上述定夹头为浮动夹紧头以及浮动夹紧头的具体结构形式只是一种示例性的描述,如本领域技术人员可以根据实际需求采用其他形式的浮动夹紧头,或者将动夹头也调整为如具有沿周向缓冲功能的夹紧头等。
在一种可能的实施方式中,扶边皮组件58主要包括扶边皮支座581、扶边皮气缸582、扶边皮直线导轨583、扶持支架584以及扶持组件585。其中,扶边皮支座与前述的第一夹紧头座5711固定连接或者一体成型从而使得扶边皮组件固定设置于前述的滑座支座561,扶边皮气缸与扶边皮直线导轨均设置于扶边皮支座上。示例性地,扶边皮气缸为无杆气缸,无杆气缸与扶持支架相连,这样一来,扶边皮气缸带动扶持支架沿扶边皮直线导轨方向上下运动,从而使得扶持组件能够紧密地抵接至边皮的端部。
在一种可能的实施方式中,扶持支架包括两个扶持子支架,两个扶持子支架之间通过扶边皮连接结构相连,无杆气缸设置于扶边皮支座且与动力输出端与扶边皮连接结构相连。每个扶持子支架上配置有一个扶持组件从而保证能够同时对一对边皮进行扶持。扶持组件585包括边皮扶持安装基体以及设置于边皮扶持安装基体上的边皮扶持结构586。示例性地,每个边皮扶持安装基体上设置有两个边皮扶持安装结构,边皮扶持安装结构为柱状体,这样一来,便可通过多点抵接的方式来保证边皮扶持的可靠性。显然,本领域技术人员可以根据实际需求选择边皮扶持安装结构的具体结构形式、个数等。
示例性地,边皮扶持安装基体包括第一边皮扶持安装部分和第二边皮扶持安装部分,边皮扶持结构设置于第一边皮扶持安装部分上,第一边皮扶持安装部分通过第二边皮扶持安装部分固定至扶持支架。如第二边皮扶持安装部分包括两个L型安装架,两个柱状体设置于两个L型安装架之间,L型安装架的横向部分固定设置于第一边皮扶持安装部分,L型安装架的竖向部分固定连接至边皮夹持支架的外侧。显然,本领域技术人员可以根据实际需求选择边皮扶持安装基体的具体结构形式、个数等。
基于此,在对硅棒进行开方作业时,扶边皮组件顶住从硅棒移除的边皮,从而对边皮进行防护,如可以有效地防止硅棒两侧的边皮出现倾斜、歪倒等现象。
可以看出,通过夹持运转装置实现的硅棒在夹持运转时的作业流程如下:
在硅棒在被上下料装置的上料组件运送至开磨一体机的加工区域之后,通过上料输送组件(输送至夹持位置)、上料夹爪组件(夹爪夹持)以及上料翻转组件(对夹持状态下的硅棒进行翻转)的配合,从而将带加工的硅棒运送至夹持转运装置的定夹头上,然后动夹头向下移动从而与定夹头一同将硅棒夹紧。此时,上料组件便可沿Y向移出加工区域以对其他作业进行避让。
主要参照图22至图33,第一工位1和第二工位2均配置有切割装置,分别记作第一切割装置11和第二切割装置21。在一种可能的实施方式中,第一/第二切割装置均主要包括第一/第二边皮支撑组件(12、22)、第一/第二切割进给组件(13、23)、第一/第二切割机头组件(14、24)以及第一/第二切割立柱(15、25)(在本示例中,切割立柱和相应的边皮卸载立柱为一体成型)。第一/第二切割装置主要用于将硅棒由圆棒切割为方棒。其中,第一/第二切割进给组件设置于切割立柱以便带动切割机头组件之间的切割段对硅棒进行切割并产生边皮,第一/第二边皮支撑组件在切割作业进行期间抵接至对硅棒底部对应于边皮的位置,以便通过与前述的扶边皮组件的配合将切割产生的边皮稳定地扶持在切割工位。下面以其中的第二切割装置21(下文亦可称作切割装置)为例来进行说明。
与第一切割装置不同,第二切割装置还包括第一磨削装置26。与之相适配,第二切割装置还配置有平衡气缸组件27。之所以为第二工位配置平衡气缸组件,是因为:磨削装置在工作时需要快速升降而切割装置在工作期间升降较缓。由于第二工位中同时包含有磨削装置和切割装置,因此通过为第一磨削装置配置平衡缸,可以平衡掉第一磨削装置在使用期间的自重,因此可以实现很好的动态性能。
在一种可能的实施方式中,平衡气缸组件27主要包括平衡气缸、设置于切割立柱上的链轮支架、安装于链轮支架上的链轮以及与链轮匹配连接的板式链。如平衡气缸固定在平衡气缸支架上,平衡气缸支架固定于切割立柱。平衡气缸组件主要用于平衡切割机头组件的重量。
示例性地,板式链利用链轮支撑换向并与横向切割进给升降滑台背侧的平衡块连接。如在本发明中,第二工位的切割机头组件还带有用于磨倒角的第一磨削装置,因此,平衡气缸组件可用于平衡第二工位中的第二切割装置和第一磨削装置的重量,从而延长竖向进给组件的使用寿命。
在一种可能的实施方式中,第二边皮支撑组件22主要包括边皮支撑气缸221、边皮支撑架222、顶边皮组件223和换型块224。其中,边皮支撑气缸驱动设置于基础工作台上的边皮支撑丝杠螺母机构的丝杠转动,边皮支撑丝杠螺母机构的螺母通过边皮支撑架与顶边皮组件相连且螺母的底端能够在同样设置于基础工作台的边皮支撑直线滑轨内滑动。边皮支撑组件主要用于对切割后产生的边皮进行支撑。换型块主要用于使得顶边皮组件能够对不同规格的硅棒的边皮进行支撑。
在一种可能的实施方式中,边皮支撑架包括下方的边皮支撑架基体以及设置于第一边皮支撑架上的、与双切割作业的一对边皮对应的第一边皮支撑架和第二边皮支撑架,第一边皮支撑架和第二边皮支撑架上分别设置有与其中的一块边皮对应的两个顶边皮组件。第一边皮支撑架和第二边皮支撑架的上方分别配置有一个换型块。
基于上述结构,在边皮支撑气缸的推动下,顶边皮组件可沿直线导轨的方向(Y向)移动。在此基础上,边皮支撑架上沿顶边皮组件在在直线导轨上的移动方向设置有第一边皮支撑限位结构2291和第二边皮支撑限位结构2292,通过边皮支撑限位块与第一/第二边皮支撑限位结构之间的配合,保证了顶边皮组件沿直线导轨移动时的准确定位。
在一种可能的实施方式中,顶边皮组件224主要包括顶边皮气缸225和顶边皮杆226。当硅棒切割完成产生边皮后,顶边皮气缸驱动顶边皮杆向上移动从而推动边皮沿Z向向上移动从而将边皮顶起。之后可由边皮卸载装置将边皮移出切割区域。
示例性地,顶边皮组件还包括边皮杆导向套227以及边皮杆垫块228,其中,顶边皮杆导向套主要用于引导边皮杆沿Z向运动,边皮杆垫块设置于顶边皮杆靠近硅棒的端部,从而在顶边皮作业时与硅棒的边皮直接接触。如边皮杆垫块的面积通常大于边皮杆的横截面面积以保证作业的稳定性。示例性地,为每侧的边皮配置两个顶边皮组件。
如在本示例中,顶边皮杆导向套的下方具有安装法兰,第一/第二边皮支撑架包括对应于两个顶边皮组件的两个边皮支撑支架,两个边皮支撑支架之间设置有边皮支撑连接架,导向套通过安装法兰设置于边皮支撑连接架从而设置于边皮支撑架上。
可以理解的是,上述顶边皮组件的结构只是一种示例性地描述,本领域技术人员可以根据实际需求对顶边皮组件的结构进行调整,如将垫块的表面设置为曲面、将边皮杆导向套防护套进行合一等。
在一种可能的实施方式中,换型块224上设置有能够适配于不同规格的硅棒的安装位,通过选取不同的安装位并在其上安装相应的顶边皮组件,便可对不同规格的硅棒的边皮进行支撑。
示例性地,换型块224的上方设置有两组安装孔2241,下方设置有一组安装孔,在换型块的上方朝上的情形下,可选用两组安装孔中的任一组,若需要选用下方的一组安装孔,则先将换型块上下调位并将其重新安装至边皮支撑架上,之后选用原先位于下方的该组安装孔进行安装即可。
可以看出,通过第一/第二边皮支撑组件实现的硅棒在切割期间的作业流程如下:
切割转运:硅棒由上下料装置中的上料组件完成上料后运送到夹持运转装置,通过夹持运转装置的夹紧头组件将其夹紧并通过夹持转运立柱的旋转至对应于第一工位或者第二工位的第一/第二切割装置的切割区。
顶紧边皮:在切割作业开始之前,在边皮支撑气缸的驱动下,顶边皮组件沿Y向移动至硅棒下方与边皮相对应的位置。在顶边皮气缸的驱动下顶边皮杆(的顶边皮垫块)伸出至与硅棒的边皮的下端面接触进而将其顶紧。
此时,第一/第切割装置便可开始对硅棒进行切割。切割完成后,产生的边皮由边皮卸载装置转移至边皮收集装置,边皮支撑组件沿Y向退回至原处(避让)。即:在切割作业进行期间以及之后(直至边皮卸载装置的边皮夹持组件将边皮夹紧前),顶边皮组件保持对边皮的下端面的支撑作用。可以理解的是,切割完成后,金刚线切割段应当恰好位于夹紧头组件的下方的定夹头和第一/第二边皮支撑组件的顶边皮组件(的顶边皮杆)之间的空隙中。
在一种可能的实施方式中,第一/第二切割进给组件主要包括竖向切割进给组件231以及横向切割进给组件232,切割进给组件主要用于实现切割机头组件沿横向(X向)和竖向(Z向)的直线进给运动。
在一种可能的实施方式中,竖向切割进给组件231主要包括设置于第一/第二切割立柱上的竖向切割进给电机2311、竖向切割直线导轨2312和竖向切割丝杠螺母机构2313,竖向切割进给电机与竖向切割丝杠螺母机构的丝杠连接,竖向切割丝杠螺母机构的螺 母与横向切割进给组件连接,竖向切割丝杠螺母机构的螺母能够沿竖向切割直线导轨滑动。此外,竖向进给组件还与设置于切割立柱的两条直线导轨滑动连接,这样一来,在竖向切割进给电机的驱动下以及在竖向切割直线导轨的引导下,竖向进给组件可带动横向进给组件实现其沿Z向的移动,进一步使设置于横向进给组件上的切割机头组件竖直向下进给切割硅棒。
示例性地,在第一/第二切割装置的底部设置有接近开关等检测检测部件,以便在切割到位(完成)后能够准确地停止切割。以及在切割装置靠近底部的位置还设置有与横向切割进给组件的底部抵接的缓冲垫,以保证横向切割进给组件能够稳定地下落至最低位置。
在一种可能的实施方式中,横向切割进给组件232主要包括横向切割进给升降滑台2321以及设置于横向切割进给升降滑台上的横向切割进给电机2322以及横向切割丝杠螺母机构2323。其中,横向切割升降滑台与前述的竖向切割进给组件滑动连接,以便通过竖向切割进给电机带动横向切割升降滑台以及安装于其上的切割机头组件沿Z向运动。
在一种可能的实施方式中,横向切割进给电机与横向切割丝杠螺母机构的丝杠连接且丝杠两端的旋向相反,横向切割丝杠螺母机构的两个螺母分别连接有形成一个金刚线切割段的一对切割轮(两对切割轮,与一个螺母对应的一对切割轮之间形成一个金刚线切割段),横向切割丝杠螺母机构的螺母能够沿设置于切割机头组件上的直线导轨滑动。这样一来,在横向切割进给电机的驱动下,便可通过一个横向切割进给电机实现两对切割轮之间的张开与闭合,从而能够对不同规格(径向尺寸)的硅棒进行双线切割(一次产生一对边皮)。此外,横向切割进给组件还配置有横向切割进给限位结构2324以保证两对切割轮之间的靠近程度。
在一种可能的实施方式中,第一/第二切割机头组件24均包括切割轮组件、收放线组件、排线轮组件243、张力轮组件244、过轮组以及切割轮座。其中,收放线组件主要用于在上游侧时发放的金刚线以及在下游侧时将金刚线收回,从而形成循环的切割线246(如通常为金刚线)。排线轮组件主要用于将收放线组件发放出的金刚线排出,张力轮组件中的张力轮主要用于保证金刚线的张力,过轮组中的各个过轮主要用于实现金刚线在缠绕过程中的方向改变,切割轮组件中的切割轮之间的金刚线用于切割硅棒,故而被称作金刚线切割段。
在一种可能的实施方式中,切割轮组件包括相向设置的两对每个切割轮组件包括一个切割轮(分别记作切割轮((1)、(2)、(3)、(4))(附图标记分别为241(1)、241(2)、241(3)、241(4),同侧的两个切割轮组件与前述的横向切割进给组件中的丝杠的一个旋向相对应。通过两对相向设置的切割轮组件的切割轮之间的金刚线切割段能够对硅棒进行切割从而产生一对边皮。
如可以为第一/第二切割装置分别配置两个收放线组件、两个排线轮组件、两个张力轮组件、一个单独的过轮组。不过在实施例中,由于包含第一切割装置的第一工位和包含第二切割装置的第二工位在构成开磨一体机时位置较近,因此在本示例中,对其中的部分结构采用了共用,具体而言,共用一套收放线组件(两个)。在此基础上对相关的结构也进行了调整。
在一种可能的实施方式中,对应于第二切割装置的过轮组包括设置于切割立柱的过轮1、设置于基础工作台的过轮2、分别设置于第一切割轮座对应于切割轮1、2且靠近过轮2的位置的过轮3/过轮4、分别设置于切割轮1、2的切割轮轴承座上的过轮5/过轮6、设置于切割轮3的切割轮轴承座上的过轮7、均设置于切割轮4的切割轮轴承座上的过轮8/过轮9、设置于第二切割轮座对应于切割轮4的位置的过轮10,过轮1-10的附图标记分别为2451、2452、2453、2454、2455、2456、2457、2458、2459、24510。
基于此,以放线为例,用于切割硅棒的金刚线从第一收放线组件2421放出,依次经排线轮组件、张力轮组件、过轮1-5、切割轮1、2、过轮6、7、切割轮3、4、过轮8-10缠绕后回收至设置于第一切割装置的第二收放线组件2422,从而在第二切割装置形成两个金刚线切割段。具体地,切割轮1、2之间形成一个金刚线切割段,切割轮3、4之间形成另一个金刚线切割段。显然,收线和放线的功能可以互换,如可以通过放线与收线相结合的方式使得金刚线以类似于锯的方式对硅棒进行切割,此时收线装置和放线装置的功能会反复互换。
以调整为例,如在为二者分别配置一组前述的结构的情形下,对应于第一切割装置或者第二切割装置的过轮组大致呈对称分布,而在部分共用的情形下,上述的过轮6、7、9、10便不是严格地对称分布。
如在本示例中,第一收放线组件2421位于第二工位的后侧,第二收放线组件2421位于第一工位的后侧。以其中的第一收放线组件2421为例,其主要包括收放线电机、收放线主体和收线工字轮,基础工作台在对应于切割立柱的后方的侧部设置有收放线支架,收放线主体安装至收放线支架上。
通过前述的竖向切割进给组件,可以带动两对切割轮组件之间的两个金刚线切割段沿Z向运动从而同时对一对边皮进行双线切割作业。通过前述的横向切割进给组件,可实现两个金刚线切割段之间沿X向的分开/合拢,从而能够对不同规格(径向尺寸)的硅棒进行前述的双线切割作业。
在一种可能的实施方式中,切割轮组件主要包括切割轮电机2415、切割轮轴承箱2416和切割轮。切割轮电机驱动切割轮实现环形金刚丝的高速转动。切割轮组件通过切割轮座与前述的丝杠螺母机构的螺母固接,切割轮座与横向切割进给升降滑台滑动连接。如切割轮座包括切割轮座台面2417以及切割轮座滑台2418,切割轮座滑台与横向切割丝杠螺母机构的螺母固接并与前述的横向切割进给组件的进给升降滑台滑动连接。
在一种可能的实施方式中,排线轮组件设置于切割立柱的侧面并主要包括排线轮电机2431、排线模组2432、排线滑座组件2433、排线转轴座2434、排线支架2435以及排线轮2436。其中,排线轮电机设置于排线模组,排线滑座组件与排线模组滑动连接,排线转轴座设置于排线滑动组件上,排线支架一方面与排线转轴座连接另一方面与排线轮连接。在排线轮电机的驱动下,排线滑座组件以及排线轮能够在排线模组上沿Z向上下移动以防止金刚线在工字轮上聚集。排线轮可绕排线轮转轴在水平面内转动以调整排线角度。
在一种可能的实施方式中,张力轮组件设置于第一/第二切割立柱的侧面并主要包括张力轮电机2441、张力臂2442和张力轮2443。对应于张力臂的摆动范围的两侧的位置分别设置有张力轮限位结构2444,以保证张力臂能够在由两个张力轮限位结构限定出的角度内摆动。
示例性地,张力臂包括与张力轮电机连接的第一张力臂连接部分以及由其延伸出的、与张力轮连接的第二张力臂部分,其中,第二张力臂部分大致为杆状结构,通过杆状结构与前述的张力轮限位结构的配合来实现张力轮的摆动。如张力轮限位结构可以为挡块或者具有缓冲功能的结构等。
主要参照图33,可以看出,第一切割装置上的切割轮与前述的第二切割装置大致相同,同时也为金刚线配置了相应的过轮以及在图中的左侧也设置有过轮、张力轮组件以及排线轮组件。主要的不同在于第一切割装置仅包含切割作业,因此不配置磨削装置(下文中的第一磨削装置)。
可以看出,对应于第一工位的第一切割装置和对应于第二工位的第二切割装置的作业流程为:上料等待:硅棒被运送至第一工位之前,切割装置通过横向切割进给组件在竖向切割进给组件上沿Z向上升至最高位,两对相向设置的切割头组件之间沿X向分开至要求的距离,并为夹持硅棒的夹紧头组件留出足够的避让空间。设备对刀:夹持转运装置带动硅棒旋转至对应于第一工位的切割区。边皮支撑组件沿Y向移动至对应于硅棒的边皮的位置。切割装置沿Z向向下运动一定距离到达切割开始位。对应于硅棒的两个边皮的两组切割轮组件的切割轮沿X向相向合拢运动。同侧的两个切割轮之间的金刚线切割段与对应于切割开始位的切割位置对齐,位于不同侧的两组切割轮之间的两个金刚线切割段之间是平行的,对应于上料等待和设备对刀步骤的两个金刚线切割段之间的距离均为预先设定的。硅棒开方:切割轮电机带动金刚线高速运动,切割装置整体随着切割立柱的横向切割进给组件沿竖向切割进给组件的滑动沿Z向向下运动从而对硅棒进行切割,切除边皮完成硅棒的开方。切割完成后,每侧的金刚线切割段恰好位于浮动夹紧头(支撑于硅棒端面靠近中部的区域)与相应侧的边皮支撑组件(支撑于硅棒端面对应于边皮的区域)之间的空隙中。
在一种可能的实施方式中,在对应于第二工位的切割装置的切割轮座的内部形成有一个第一磨削装置安装空间。下文中所述的第一磨削装置的至少一部分安装至该空间。如在安装好的状态下,磨削电机暴露于环境中,磨头能够以可伸缩的方式设置于该空间。如在切割轮组件处于工作状态的情形下,磨头缩回从而避免与切割作业发生干涉。在需要磨头作业的情形下,则使磨头伸出至不受切割轮干涉的位置从而通过磨头的转动对硅棒进行磨削。如在本示例中,主要用于与硅棒的棱边进行磨削。如在本示例中,第一磨削装置安装空间位于两个切割轮之间且靠近其中的一个切割轮,并且第一磨削装置的磨头的轴线低于切割轮。
主要参照图34至图43,在一种可能的实施方式中,边皮卸载装置7主要包括边皮卸载立柱71以及设置于边皮卸载立柱上的边皮夹持组件72、开合机构73、伸缩机构 和回转机构76,边皮卸载装置主要用于将第一工位和第二工位的边皮移至边皮收集装置。其中边皮夹持组件主要用于将边皮夹紧,在此基础上,通过伸缩机构、开合机构和回转机构分别实现夹紧的边皮沿Z向/Y向的直线运动、沿X向的直线运动以及在水平面内(沿A向)的旋转运动。
在一种可能的实施方式中,边皮夹持组件72主要包括边皮夹持气缸721(如无杆气缸)以及边皮夹持移动夹爪722、设置有边皮夹持直线导轨723的边皮夹持支架724以及边皮夹持固定夹爪725。其中,边皮夹持固定夹爪位于边皮的下方,能够给予边皮的下端面以向上推举的力。边皮夹持移动夹爪在无杆气缸的带动下可沿边皮夹持直线导轨在Z向上移动从而自上而下地顶住边皮的上端面,即给予边皮的上端面以向下夹持的力。这样一来,便可通过边皮夹持移动夹爪和边皮夹持固定夹爪的配合实现对不同规格(长度)的硅棒的边皮的夹取。如可以在下方的边皮夹持固定夹爪和/或上方的边皮夹持活动夹爪面向边皮的端面的内侧设置有如聚氨酯垫等缓冲结构。示例性地,开磨一体机配置有两套边皮夹持组件,以对双线切割后的一对边皮实现同时夹取的作业。
可以看出,在本发明中,通过一对夹爪的配合实现了对产生于硅棒的边皮的可靠夹持。在此基础上,为了保证开磨一体机中各程序能够顺利地进行,需要对在空间上有所交叉的结构进行相应的避让设计。
如在本示例中,下方的边皮夹持固定夹爪在大约为中部的位置具有一个固定夹爪伸出端,这样的设置主要是与前述的边皮支撑组件中的两对顶边皮杆相适应。具体而言,一个固定夹爪伸出端位于两对顶边皮杆之间,以便顶边皮的动作和边皮夹持的动作能够无干涉地进行。此外,与该一个固定夹爪伸出端的结构相适配,在下文所述的边皮收集装置的边皮收集盒上具有竖向的预留空间,以便固定夹爪伸出端能够通过沿预留空间自上而下地运动的方式,将边皮放置于边皮收集盒内。
如在本示例中,上方的边皮夹持移动夹爪具有两个对称的移动夹爪伸出端。这样的设置主要是与前述的扶边皮组件中的两对边皮扶持结构相适应。具体而言,两对边皮扶持结构分别位于相应侧的移动夹爪伸出端的内侧,以便扶边皮的动作和边皮夹持的工作能够无干涉地进行。
显然,本领域技术人员可以根据实现需求对边皮夹持固定/移动夹爪的结构形式进行灵活地调整。如可以根据边皮支撑组件和扶边皮组件的结构对其进行调整,或者在边皮支撑组件和扶边皮组件的结构不变的情形下,采用其他的可避让的结构形式。
在一种可能的实施方式中,开合机构73主要包括开合电机、开合齿轮齿条机构和开合支架734,开合支架上设置有开合直线导轨735,两套边皮夹持组件分别可滑动地设置于开合直线导轨,两套边皮夹持组件分别配置有开合电机(分别记作第一开合电机7311和第二开合电机7312),具体地,第一开合电机和第二开合电机分别与开合齿轮齿条机构中的第一开合齿条7321和第二开合齿条7322连接。基于此,通过第一/第二开合电机-第一/第二开合齿轮(7331、7332)-第一/第二开合齿条-相应侧的边皮夹持组件便可实现两套边皮夹持组件之间的开合移动,从而使得两套边皮夹持组件能够对不同规格(直径)的硅棒进行夹持。
在一种可能的实施方式中,第一/第二开合电机、第一/第二开合齿轮、第一/第二开合齿条的规格大致相同,不过左侧的第一开合齿轮在开合支架上的安装位置高于右侧的第二开合齿轮且该高度差可以保证第一齿条与第二齿轮之间可以无干涉地运动。具体而言,第一开合齿条的齿顶高于第二开合齿轮的齿顶圆,因此不会出现第一开合齿条与第二开合齿轮啮合的情形。基于此,便可通过控制开合机构中对应于两套边皮夹持组件的开合电机,使得两个单套边皮夹持组件之间单独移动或者同时移动,减少了后续的回转空间,使得整机更加和谐。
示例性地,可以在开合支架的两侧设置有开合限位结构,以便对两套边皮夹持组件的最大开度进行限位。以及可以为开合直线导轨的润滑油管配置开合拖链,如通过开合拖链将直线导轨的润滑油管环绕地支撑于开合支架。
在一种可能的实施方式中,伸缩机构包括第一伸缩组件和第二伸缩组件,其中,第一伸缩组件主要用于实现边皮夹持组件的上下伸缩动作(下文称作上下伸缩组件74)和前后移动动作(下文称作前后伸缩组件75)。
在一种可能的实施方式中,上下伸缩组件74主要包括上下伸缩电机741、上下伸缩齿轮齿条机构742、外嵌套743、和前述的开合机构连接的上下伸缩支架744、第一上下伸缩滑动导轨745、与边皮夹持组件连接的内嵌套746、第二上下伸缩滑动导轨747和上下伸缩铰链748(如本示例中为剪叉式结构)。上下伸缩齿轮齿条机构的齿轮与上下伸 缩电机相连,上下伸缩齿轮齿条机构的齿条沿Z向设置于外嵌套的侧部,上下伸缩支架上设置有第一上下伸缩滑动导轨,外嵌套通过第一上下伸缩滑动导轨与上下伸缩支架滑动连接,外嵌套的内侧设置有第二上下伸缩滑动导轨,内嵌套通过第二上下伸缩滑动导轨与外嵌套滑动连接。上下伸缩铰链的顶端与上下伸缩支架相连,上下伸缩铰链靠近中部的位置与外嵌套连接,上下伸缩铰链的底端与内嵌套连接。
可以理解的是,外嵌套和内嵌套大致为开口方向相对且彼此扣合后滑动连接的两个U型结构。显然,外嵌套和内嵌套只是分别作为上下伸缩组件的第一活动部分和第二活动部分的一种示例性的描述,本领域技术人员可以根据实际需求对其结构进行调整。
基于上述结构,上下伸缩组件的传动方式为:上下伸缩电机通过齿轮齿条传动的方式带动外嵌套沿上下伸缩支架的第一上下伸缩滑动导轨在Z向移动。内嵌套沿外嵌套内的第二上下伸缩滑动导轨在Z向移动。两种伸缩运动通过剪叉式铰链得以叠加从而实现了边皮夹持组件的上下伸缩。
可以看出,由于边皮夹持组件是借助于剪叉式铰链叠加的两套滑动导轨来实现其沿Z向的移动的,因此该组件可以实现行程不变的情况下移动空间的减半,大大缩小了装置的应用空间。
此外,由于两套边皮夹持组件的上下伸缩移动是由各自的上下伸缩电机(如伺服电机)驱动的,因此可以根据实际需要关联控制(同步)或者对二者进行相对独立地控制。
在一种可能的实施方式中,前后伸缩组件75主要包括前后伸缩电机751、前后伸缩齿轮齿条机构752、固定于边皮卸载立柱上的第一支架753、第二支架754以及设置于第一支架上的前后伸缩直线导轨755。前后伸缩电机通过前后伸缩齿轮齿条机构的齿轮齿条啮合传动实现边皮夹持组件的前后伸缩动作。具体地,前后伸缩齿轮齿条机构的齿条设置于第第一支架上,前后伸缩电机带动齿轮转动并因此使得齿轮沿齿条转动,从而使得包含开合机构和边皮夹持组件等在内的活动部分沿前后伸缩直线导轨滑动。如在本示例中,前后伸缩组件设置于回转机构的上方。
在一种可能的实施方式中,第一支架的两侧设置有一对前后伸缩直线导轨,齿条设置于二者之间且靠近远离第一/第二开合电机位置,这样一台使得整体的结构能够保持平衡。
示例性地,为了保证第二支架的强度,在第二支架和开合支架的背部之间设置有加强板。示例性地,如在对应于两个前后伸缩直线导轨的位置分别设置有加强板。如第一支架沿其伸缩方向的两个端部分别设置有翻边,以便限定出前后伸缩的活动范围。显然,也可以采用如挡块等其他结构来实现类似的功能。
在一种可能的实施方式中,回转机构76主要包括设置于边皮卸载立柱的台面上的回转气缸761、回转齿轮齿条机构762和回转直线导轨763。此外,在台面上还设置有一个对应于回转范围的旋转区域。如在本示例中,旋转区域764大致为由90°的弧形槽形成的区域。这样一来,由回转气缸带动回转齿轮齿条机构的齿条沿回转直线导轨移动从而使得回转齿轮齿条机构的齿轮旋转,进而带动包含边皮夹持组件、伸缩机构和开合机构等在内的部分(如可称作取边皮部分)进行在台面上进行回转运动。这样一来,包含开合机构的整个边皮夹持组件便可在旋转区域进行顺时针或者逆时针的回转。如可以在旋转区域设置有两个缓冲器765,从而保证回转至极限位置之后边皮夹持组件的稳定性。可以看出,基于回转机构,夹取边皮的边皮夹持组件可以实现其从对应于第一工位或者第二工位的切割区至对应于边皮收集装置的收集区的转移。
在一种可能的实施方式中,边皮夹持组件的顶端与上下伸缩组件的内嵌套的底端相连,上下伸缩组件的上下伸缩支架的顶端连接有连接支架,对应于两套边皮夹持组件的两个连接支架与开合支架滑动连接。前后伸缩组件设置于开合支架的背部(远离边皮夹持组件的一侧)。回转机构设置于前后伸缩组件的下方,具体而言,位于前后伸缩支架和边皮卸载立柱之间。
在一种可能的实施方式中,边皮收集装置8主要包括边皮收集气缸81、边皮收集滑台组件和边皮收集盒84,边皮收集滑台组件包括设置于边皮卸载立柱的侧边的边皮收集滑台座82以及设置于边皮收集滑台座上的边皮收集直线导轨83。边皮收集盒主要负责收纳边皮卸载装置从第一/第二工位移出的边皮。边皮收集气缸带动边皮收集盒在边皮收集滑台组件上沿边皮收集滑台导轨上下移动,实现高效的边皮收集功能。
在一种可能的实施方式中,可以为包含切割功能的第一工位和工位均配置一个边皮收集盒。并且,为了保证作业的可持续性,每个边皮收集盒应当通纳多块边皮。
示例性地,边皮收集盒84包括盒体以及设置于盒体的四对收纳区841从而能够收纳8块边皮,以第一工位和第二工位分别针对同一硅棒切割出一对边皮的作业方式为例,本示例中的边皮收集盒能够收纳4根圆棒产生的边皮。在边皮收满后,边皮收集盒沿沿边皮收集滑台导轨向下移动,以便完成边皮的下料。收纳区在对应于前述的边皮夹持组件的边皮夹持固定夹爪的位置设置有竖向预留空间842。这样一来,便可使得边皮夹持组件在上下伸缩组件的带动下,其下方的边皮夹持固定夹爪在竖向预留空间内自由运动至靠近底部的位置,从而将边皮稳定地放置于收纳区内。
示例性地,四对收纳区由中间向两侧依次分布,不同对的收纳区的结构形式可以相同或者不同。如在本实例中,每对收纳区围设出一个截面轮廓为矩形的区域且各个矩形区域大致相同。不过,不同对的收纳区之间的高度有所区别。如在本示例中,中间位置(内侧)的两对收纳区之间大致等高,外侧的两对收纳区的高度大致相等不过比内侧的两对收纳区的高度要低。
可以理解的是,本领域技术人员可以根据实际需求(如硅棒的规格、边皮卸载装置的运动形式等)确定每对收纳区的结构形式、分布位置及其构成边皮收集盒的方式。如四对收纳区之间可以高度完全错开(如依次递减),方便放置和卸料。此外,该边皮收集盒可以承接自动化设备或者适用于人工卸料。
可以看出,通过边皮卸载装置和边皮收集装置实现的边皮卸、收集的作业流程如下:边皮夹紧:在对硅棒的切割作业完成后,回转机构动作,边皮卸载装置的边皮夹持组件逆时针旋转90°到达对应于边皮的切割区,开合机构使边皮夹持组件的边皮夹持夹爪横向张开以适配硅棒的径向尺寸。首先,伸缩机构的第一/第二伸缩组件分别使边皮夹持组件向下/向前移动,从而使得边皮固定夹爪移动至与边皮的下端面对应的位置。通过边皮移动夹爪沿Z向的移动使边皮移动夹爪与边皮的上端面对应的位置,从而使得边皮夹持组件与不同轴向尺寸(长度)的硅棒相适配。通过开合机构使两个边皮夹持组件沿靠近彼此的方向运动,从而使得边皮夹持组件与不同径向尺寸(直径)的硅棒相适配。基于此,便可通过边皮夹持固定夹爪与边皮夹持移动夹爪的配合将切割产生的边皮夹紧。
在该过程中,边皮夹持固定夹爪具有能够避让顶边皮组件的结构,边皮夹持移动夹爪具有能够避让扶边皮组件的结构。如在边皮夹紧的情形下,需要将边皮支撑组件和扶边皮组件避让以保证边皮卸载装置的作业。如使扶边皮的使得边皮支撑组件中的顶边皮组件下降之后使得边皮支撑组件沿Y向退出实现避让。如使扶边皮组件的边皮扶持结构上升以实现避让。
边皮分离:通过开合机构使两个边皮夹持组件沿远离彼此的方向运动,从而将切割产生的一对边皮与硅棒沿X方向打开从而使得边皮与硅棒分离。
优选地,首先使边皮和硅棒错开以破坏边皮与硅棒之间的吸附力之后,再使边皮与硅棒沿X方向打开。如边皮和硅棒错开的方式可以是:通过上下伸缩组件使得边皮和硅棒沿Z向错开或者通过前后伸缩组件使得边皮和硅棒沿Y方向错开等。
边皮转运:在边皮夹持组件将边皮夹紧之后,伸缩机构中的第一/第二伸缩组件分别带动夹持有边皮的边皮夹持组件向上、向后运动,开合机构带动两套皮夹持机构之间向内靠拢,以最大可能地减小回转半径。此时,便可使回转机构动作,包含伸缩机构、开合机构以及夹持有边皮的边皮夹持组件在内的取边皮部分整体顺时针旋转90°从而到达对应于边皮收集装置的收集区。
边皮收集:在取边皮部分到达收集区之后,边皮收集装置的边皮收集气缸带动边皮收集盒向上移动,通过上下伸缩组件使边皮夹持组件的边皮夹持固定夹爪沿对应于边皮收集盒的其中一对收纳区的竖向预留空间向下移动至收纳到位的位置。之后,通过前后伸缩组件使边皮夹持组件的边皮固定/移动夹爪沿Y向退出,便可将一对边皮收纳于相应的一对收纳区,从而完成边皮收纳。如此重复,如直到边皮收集盒内的8个收纳区装满边皮之后,边皮收集气缸使边皮收集装置下移,通过人工下料或者对接AGV等自动化设备的方式将收集于收纳区的边皮从收集区移除。显然,也可以在8个收纳区未全部装满边皮的情形下将移走边皮。
主要参照图44至图46,在一种可能的实施方式中,包含于前述的第二工位的第一磨削装置26主要包括第一磨削固定座261、第一磨削电缸262、第一磨削进给滑板263、第一磨削主轴组件264和第一磨削磨头组件265。本发明主要通过一对相向设置的第一磨削装置来对除边皮之后的方棒的两对棱边进行磨削作业(磨倒角)。显然,也可以通过第一磨削装置对方棒的两对侧面进行磨削也可以二者兼具。
仍以采用第一磨削装置对方棒的两对棱边进行磨削为例,特别地,由于本 发明的第二工位中同时包含有切割装置,因此通过一对平行的金刚线切割段对开方作业之后的方棒的棱边进行切割之后再磨削。
在一种可能的实施方式中,能够随切割装置沿Z向/X向运动的第一磨削固定座上设置有第一磨削主轴直线导轨,第一磨削主轴组件滑动设置于第一磨削主轴直线导轨上(第一磨削进给滑板的底部设置有与第一磨削直线导轨配合的滑块),第一磨削电缸安装在第一磨削固定座上且其动力输出端连接至第一磨削进给滑板。这样一来,便可通过第一磨削电缸的运动来实现第一磨削主轴组件沿其轴向(沿X方向)的进给动作,在一对第一磨削装置的磨削电缸的驱动下,两个第一磨削装置的磨削磨头组件能够相向运动从而在此基础上进行对硅棒的一对棱边的磨削作业。
在一种可能的实施方式中,第一磨削主轴组件主要包括第一磨削主轴轴箱壳体、穿设于第一磨削主轴轴箱壳体内的磨削主轴、与第一磨削主轴驱动连接以带动其转动的第一磨削电机。其中,第一磨削主轴轴箱壳体和第一磨削主轴靠近第一磨削电缸的部分之间形成有第一磨削安装空间,第一磨削电机安装于此空间内从而实现了第一磨削电机的内置。
其中,第一磨削电机通过组合轴承与磨削主轴连接,磨削主轴通过砂轮转接盘连接有前述的第一磨削磨头组件。这样一来,由内置的第一磨削主轴电机提供动力使第一磨削主轴做回转运动从而带动磨头转动以进行针对方棒的棱边的磨削作业。
在一种可能的实施方式中,第一磨削磨头组件上配置有磨削喷淋构件以便通过对正在磨削的硅棒进行喷淋式清洗的方式来减少磨削产生的硅粉在硅棒上的附着。第一磨削主轴轴箱壳体设置于第一磨削进给滑板上,第一磨削进给滑板与前述的第一磨削主轴直线导轨滑动连接,第一磨削主轴直线导轨的润滑油管提供防护并作为其安装载体的第一磨削拖链。
可以看出,通过第二工位的第一磨削装置实现的对硅棒的棱边的磨削的作业流程如下:准备工作:第二切割装置的第二边皮支撑组件沿Y方向移动远离夹持转运装置,以避让第一磨削装置在上下移动时第一磨削磨头组件可能与第二边皮支撑组件发生的干涉。通过相应的第一磨削气缸使两个第一磨削装置的第一磨削磨头组件沿X方向相对分开,并使夹持转运装置旋转45°以使得方棒的一对棱边恰好与两个第一磨削磨头组件相对应。
棱边磨削:通过内置的第一磨削电机使两个第一磨削磨头组件高速旋转,并且通过第一磨削气缸使第一磨削磨头组件沿X方向相向伸出至第二工位的切割区内。通过切割装置带动第一磨削装置沿Z向来回运动,从而对方棒的一对棱边进行磨削。在对一对棱边的磨削作业完成之后,使夹紧头组件旋转90°,重复上述运动从而对方棒的另一对棱边进行磨削。如为了更好地利用第二工位的集成功能,可以通过第二切割装置的两条金刚线切割段先对棱边进行切割然后采用第一磨削装置进行磨削。
主要参照图47至图54,在一种可能的实施方式中,第二磨削装置31主要包括第二磨削立柱311以及设置于第二磨削立柱的第二磨削电机312、第二磨削磨头组件313、复合轴组件314、复合轴传动组件315、检测组件316、第二磨削进给组件317和氮气平衡系统318。其中,第二磨削磨头组件主要包括同工位设置的粗磨磨头和精磨磨头,第二磨削进给组件主要带动第二磨削磨头组件(以及复合轴组件和复合轴传动组件)沿Z向/X向移动,从而将对不同规格的硅棒(方棒)的两对侧面磨削至所需的加工要求,检测组件主要用于确定磨削量,氮气平衡系统安装在第二磨削立柱的后侧,主要用于平衡掉第二磨削磨头组件的重量。
在一种可能的实施方式中,第二磨削磨头组件313包括精磨砂轮3131和粗磨砂轮3132,精磨砂轮和粗磨砂轮以同心设置的方式处于同一个工位,如在本示例中,粗磨砂轮自由容纳于精磨砂轮内部形成的预留空间内。在本示例中,一对第二磨削磨头组件和一对检测组件在第二磨削进给组件的两个第二磨削进给滑板上对称设置(位于硅棒的两侧)。这样一来,便可使得第二磨削磨头组件在同一个工位实现对硅棒的精磨和粗磨作业。其中,粗磨砂轮位于精磨砂轮的径向内侧只是一种示例性的描述,如也可以将二者的位置调换。
在一种可能的实施方式中,复合轴组件314包括筒状结构的第一传动轴3141(轴套)和容纳于所述筒状结构内的第二传动轴3142(内轴),其中,轴套与精磨砂轮连接以便在轴套转动的情形下带动精磨砂轮连接,第二传动轴与粗磨砂轮连接以便在第二传动轴转动的情形下带动粗磨砂轮连接。
示例性地,第二磨削磨头组件配置有第二磨削喷淋构件和风枪,分别通过对正在磨削的硅棒进行喷淋式清洗以及喷气的方式来减少磨削产生的硅粉在硅棒上的附着。此外,在第二磨削磨头组件的外缘配置有和方形毛刷以避免磨削期间的水雾随意地扩散,同 时也在一定程度上能起到冲刷硅棒表面磨削后的残留硅粉的作用。
在一种可能的实施方式中,复合轴组件还包括复合轴轴箱壳体3143,复合轴轴箱壳体和第一传动轴之间形成有第二磨削安装空间,与第一传动轴和第二传动轴构成的复合轴驱动连接的第二磨削电机312安装于此空间内从而实现了第二磨削电机的内置。示例性地,在第二磨削电机的驱动下,第一传动轴和第二传动轴始终保持同步转动。
在一种可能的实施方式中,复合轴传动组件主要用于带动复合轴组件中的内轴进行沿轴套轴向的伸缩运动,从而保证粗磨作业或者精磨作业能够无干涉地实现。
在一种可能的实施方式中,复合轴传动组件315主要包括复合轴传动电机3151、复合轴传动丝杠螺母机构(包括复合轴传动螺母座和复合轴传动丝杠)、复合轴传动连接座3152、复合轴传动直线导轨3153、复合轴传动导轨支架3154、复合轴传动锁紧螺母3155和复合轴传动轴承箱3156。
示例性地,复合轴传动轴承箱包括轴承套、轴承座和二者之间的组合轴承,内轴穿过轴承套并通过限位法兰限位,轴承套的外部连接组合轴承,组合轴承,组合轴承的一端固定在轴承座上,另一端通过轴承压盖固定。锁紧螺母固定至组合轴承从而能够带动内轴一起伸缩运动。
示例性地,复合轴传动螺母座设置于复合轴传动连接座上,复合轴传动电机、复合轴传动连接座和复合轴传动直线导轨均设置于复合轴轴箱壳体,复合轴传动电机位于复合轴轴箱壳体对应于复合轴组件周向外侧的位置,复合轴传动连接座和复合轴传动直线导轨位于复合轴组件远离第二磨削磨头组件的端部。
可以看出,复合轴传动电机通过复合轴传动丝杠螺母机构带动复合轴传动连接座以及内轴沿复合轴传动直线导轨的方向移动,便可实现内轴相对于轴套的伸缩运动。这样一来,在需要对硅棒进行粗磨作业的情形下,则使内轴缩回。在需要对硅棒进行粗磨作业的情形下,则使内轴伸出。
在一种可能的实施方式中,检测组件316主要包括探针壳体3161、探针3162、探针支架3163和探针气缸3164。其中,一组(如本示例中包括3个)探针安装在探针支架上,探针气缸的动力输出端与探针支架相连以带动探针沿X向运动。
示例性地,检测组件还包括检测板和撞块,其中的检测板用来校准探针,撞块用来顶开探针防护罩前板以避免探针直接和防护门直接接触从而有效地防止探针被损坏。
在一对第二磨削装置上分别安装一个检测组件,基于此,检测组件的作业流程大致为:探针气缸推出探针至硅棒切割后的表面,实现对磨削质量的检测。如检测过程可以计算出对应于粗磨砂轮的磨削量,粗磨砂轮向X轴前进与磨削量相适配的距离,进行粗磨。粗磨结束后,检测组件重复之前的检测过程,计算出精磨砂轮的磨削量,精磨砂轮向X轴前进与磨削量相适配的距离,进行精磨。
在一种可能的实施方式中,第二磨削进给组件317主要包括第二磨削横向进给组件3171和第二磨削竖向进给组件3172,分别用于实现第二磨削磨头组件沿X向、Z向的直线进给。
在一种可能的实施方式中,第二磨削横向进给组件3171主要包括第二磨削横向升降滑台31711、沿水平方向滑动设置于第二磨削横向升降滑台上的两个第二磨削横向进给滑板31712、配置于第二磨削横向进给滑板的第二磨削横向进给电机31713。如在本示例中,两个第二磨削进给升降滑台上设置有便于第二磨削磨头组件定位的定位转轴31714。第二磨削竖向进给组件3172主要包括设置于第二磨削立柱311上的第二磨削竖向电机31721和第二磨削竖向直线导轨31722。
这样一来,第二磨削竖向进给电机驱动第二磨削横向进给组件的横向升降滑台沿Z向运动从而带动第二磨削磨头组件实现其沿Z向的运动。两个第二磨削横向进给电机驱动相应的第二磨削横向进给滑板沿X向运动从而带动第二磨削磨头组件之间沿X向彼此靠近/远离。
在一种可能的实施方式中,对于第二磨削横向进给滑板和第二磨削横向升降滑台之间的滑动连接而言,在第二磨削横向升降滑台分别设置有上导轨、下导轨且二者的安装方向不同。具体而言,上导轨竖直安装,因此能够起到承受重量和导向的作用,下导轨侧面安装,能够起到抵抗倾覆力和导向的作用。上、下导轨沿其长度方向靠近中部和两端的位置均安装有假导轨,起到限位作用的同时还节约了物料。
在一种可能的实施方式中,氮气平衡系统318主要包括氮气缸体3181、平衡油缸3182、板式链传动机构3183和氮气导轮座3184。其中,提供平衡所需的高压的氮气 缸体由缸体托架支撑放置于第二磨削立柱的后侧。平衡油缸通过平衡油缸支架固定在于第二磨削立柱的后侧,平衡油缸通过板式链传动机构经氮气导轮座导向第二磨削立柱的前侧,板式链传动机构前侧的链条螺杆与第二磨削进给升降滑台连接。这样一来,氮气平衡系统利用氮气缸体里的高压,使平衡油缸的压力平衡掉第二磨削磨头组件的重量,从而在第二磨削装置的作业过程中保证了良好动态性能。与前述的配置于第二工位的第一磨削装置相比,由于第二磨削装置的自重更大,因此采用可比平衡气缸组件的平衡能力更强的氮气平衡系统。
需要特别说明的是,上述实施例中提到的各种驱动部件和传动部件的具体形式以及部件的具体细节结构形式只是一种示例性的描述,本领域技术人员可以根据实际需求对其进行灵活地调整。如无杆气缸可以变更为如有杆气缸、电缸、液压缸等,双出轴驱动电机可以变更为两个同步动作的电机等,在空间允许的前提下,将电机-同步带-丝杠螺母机构中的同步带取缔等。
可以看出,在本发明的开磨一体机中,通过第一工位、第二工位和第三工位的协作,能够在同一设备实现对硅棒的开方作业(也可以对硅棒的棱边进行切割)和磨削作业。由于开磨一体机中在各个工位之间转运时无需对硅棒进行重新装夹,因此提高了硅棒的加工精度。由于开磨一体机中的工位包含多中功能,因此有望通过工位之间的配合提高硅棒的生产效率。
特别地,在本发明的开磨一体机中,通过第二工位的设置,能够将第一工位中的开方作业中的一部分和第三工位中的磨削作业中的一部分进行分担,并且将两种作业整合为能够在同一工位上完成,提升了开磨一体机中各个工位之间的协作性。
此外,在本发明的开磨一体机中,通过为第一/第二切割装置配置可沿Y向前进/后退的第一/第二边皮支撑组件,前进可对第一工位/第二工位的边皮进行支撑、后退可避让第一/第二工位的磨头机构以及边皮卸载装置等。因此,在保证开磨一体机的第一工位和第二工位的功能能够可靠完成的前提下,使得开磨一体机的整体尺寸更为紧凑,具体而言,基础工作台能够具有更小的直径,因此会降低整机的占地面积,相应地会降低生产成本和运输成本。
至此,已经结合附图所示的优选实施方式描述了本发明的技术方案,但是,本领域技术人员容易理解的是,本发明的保护范围显然不局限于这些具体实施方式。在不偏离本发明的原理的前提下,本领域技术人员可以对相关技术特征作出等同的更改或替换,这些更改或替换之后的技术方案都将落入本发明的保护范围之内。

Claims (20)

  1. 一种开磨一体机,其特征在于,至少包括:
    第二工位,其包括:第一磨削装置,其能够对待加工件进行至少一部分的磨削作业;以及第二切割装置,其能够对待加工件进行至少一部分的开方作业和/或对待加工的棱边进行切割;优选地,
    所述开磨一体机进一步包括:第一工位,其包括第一切割装置,所述第一切割装置能够对待加工件进行至少一部分的开方作业和/或对待加工的棱边进行切割;并且/或者第三工位,其包括第二磨削装置,所述第二磨削装置能够对待加工件进行至少一部分的磨削作业。
  2. 根据权利要求1所述的开磨一体机,其特征在于,所述开磨一体机包括夹持转运装置,设置于所述夹持转运装置的待加工件能够经所述上下料装置移入/移出所述开磨一体机,所述夹持转运装置能够将待加工件送达所述第一工位、所述第二工位和/或所述第三工位的作业区;并且/或者所述夹持转运装置能够将待加工件在所述第一工位、所述第二工位和/或所述第三工位的作业区之间转运;并且/或者在所述第一工位、所述第二工位和/或所述第三工位的作业区包括多个子作业区的情形下,所述夹持转运装置能够将待加工件在不同的子作业区之间转运。
  3. 根据权利要求2所述的开磨一体机,其特征在于,所述夹持转运装置包括:
    旋转工作台;以及夹持转运立柱,其设置于所述旋转工作台;
    其中,所述夹持转运立柱具有至少一个夹持面,待加工件能够固定在所述夹持转运立柱对应于所述夹持面的位置。
  4. 根据权利要求3所述的开磨一体机,其特征在于,所述开磨一体机包括基础工作台,所述旋转工作台能够通过齿轮啮合的方式相对所述基础工作台转动。
  5. 根据权利要求3所述的开磨一体机,其特征在于,所述夹持转运立柱上设置有夹紧头组件,所述夹紧头组件包括位于上方的第一夹紧头以及位于下方的第二夹紧头,待加工件能够通过夹持于所述第一夹紧头和所述第二夹紧头之间的方式固定至所述夹持转运立柱。
  6. 根据权利要求3所述的开磨一体机,其特征在于,所述夹持转运立柱上设置有扶边皮组件,所述扶边皮组件能够将开方产生的边皮的上端面顶紧,其中,所述扶边皮组件包括:
    扶边皮支座;扶持支架,其设置于所述扶边皮支座,所述扶持支架上设置有能够与产生于待加工件的边皮的端面抵接的扶持组件;以及扶边皮驱动部件,其能够驱动所述扶持支架相对所述扶边皮支座运动。
  7. 根据权利要求6所述的开磨一体机,其特征在于,所述扶持组件可滑动地设置于所述扶边皮支座,以便:基于该滑动,所述扶持组件能够靠近/远离产生自待加工件的边皮的端面。
  8. 根据权利要求6所述的开磨一体机,其特征在于,所述扶持支架包括与产生自待加工件的一对边皮对应的第一扶持子支架和第二扶持子支架,所述第一扶持子支架和所述第二扶持子支架上均设置有所述扶持组件。
  9. 根据权利要求6所述的开磨一体机,其特征在于,所述扶持组件包括能够与边皮的端面抵接的、至少一个边皮扶持结构,其中,在所述边皮扶持结构包括多个的情形下,多个所述边皮扶持结构的至少一部分沿边皮的端面的长度方向或者宽度方向分布。
  10. 根据权利要求4所述的开磨一体机,其特征在于,所述基础工作台上设置有边皮支撑组件,所述边皮支撑组件能够将待加工件的下端面对应于边皮的位置顶紧,其中,所述边皮支撑组件包括:顶边皮组件,其包括顶边皮结构,所述顶边皮结构能够抵接至待加工件的下端面对应于边皮的位置;以及边皮支撑驱动部件,其能够驱动所述顶边皮组件沿待加工件的径向靠近/远离待加工件。
  11. 根据权利要求10所述的开磨一体机,其特征在于,所述边皮支撑组件包括边皮支撑架以及设置于所述边皮支撑架上的顶边皮调节部件,其中,所述顶边皮调节部件具有多个安装位,所述顶边皮组件能够设置于所述多个安装位的至少一个。
  12. 根据权利要求10所述的开磨一体机,其特征在于,所述顶边皮组件包括顶边皮驱动部件,所述顶边皮驱动部件能够驱动所述顶边皮结构沿待加工件的轴向靠近/远离待加工件的下端面对应于边皮的位置。
  13. 根据权利要求10所述的开磨一体机,其特征在于,所述顶边皮结构为顶边皮杆,所述顶边皮杆在靠近待加工件的下端面对应于边皮的位置具有一个或者多个端部。
  14. 根据权利要求10所述的开磨一体机,其特征在于,所述边皮支撑架包括第一边皮支撑架和第二边皮支撑架,所述第一边皮支撑架和/或所述第二边皮支撑架上设置有至少两个所述顶边皮组件,所述边皮支撑架包括边皮支撑架基体,所述第一边皮支撑架和所述第二边 皮支撑架均设置于或者形成于所述边皮支撑架基体,所述边皮支撑架基体与所述边皮支撑驱动部件驱动连接,所述边皮支撑组件包括边皮支撑直线导轨,所述边皮支撑驱动部件驱动所述边皮支撑架基体可滑动地设置于所述边皮支撑直线导轨。
  15. 根据权利要求1所述的开磨一体机,其特征在于其特征在于,所述开磨一体机包括边皮卸载装置,所述边皮卸载装置包括:
    1)边皮夹持组件,其能够夹持产生于待加工件的边皮;以及
    2)卸载部,其包括:伸缩机构,其能够带动所述边皮夹持组件沿至少一个方向伸缩;
    回转机构,其能够至少带动所述边皮夹持组件发生转动;以及开合机构,两套所述边皮夹持组件能够通过所述开合机构以靠近/远离彼此的方式运动。
  16. 根据权利要求15所述的开磨一体机,其特征在于,所述伸缩机构包括:
    第一伸缩组件,其能够带动所述边皮夹持组件沿上下方向伸缩;以及第二伸缩组件,其能够带动所述边皮夹持组件沿靠近/远离待加工件的方向运动;
    并且/或者
    所述回转机构包括回转驱动部件,所述回转驱动部件通过回转齿轮齿条机构与所述边皮夹持组件相连;并且/或者所述开合机构包括:开合支架;以及两套所述边皮夹持组件分别与所述开合支架滑动连接;开合驱动部件,其能够驱动所述两套所述边皮夹持组件中的至少一套沿所述开合支架滑动。
  17. 根据权利要求16所述的开磨一体机,其特征在于,所述第一伸缩组件包括:
    第一伸缩支架;第一活动部分,其与所述第一伸缩支架滑动连接;第二活动部分,其与所述第一活动部分滑动连接;以及伸缩连接部件,所述伸缩连接部件与所述第一伸缩支架、所述第一活动部分以及所述第二活动部分分别连接;
    其中,所述第一活动部分和/或所述第二活动部分配置有第一伸缩驱动部件;
    并且/或者所述第二伸缩组件包括第二伸缩驱动部件,所述第二伸缩驱动部件通过第二伸缩齿轮齿条机构与所述边皮夹持组件滑动连接。
  18. 根据权利要求1所述的开磨一体机,其特征在于,所述开磨一体机包括边皮收集装置,所述边皮收集装置包括边皮收集盒,所述边皮收集盒包含盒体以及设置于所述盒体的多个能够收纳产生于待加工件的边皮的收纳区;其中,多个所述收纳区中的至少一部分成对设置于所述盒体。
  19. 根据权利要求18所述的开磨一体机,其特征在于,所述边皮收集装置包括:
    边皮收集滑台组件,所述边皮收集盒以可滑动的方式设置于所述边皮收集滑台组件;以及边皮收集驱动部件,其能够驱动所述边皮收集盒相对所述边皮收集滑台组件运动。
  20. 根据权利要求1所述的开磨一体机,其特征在于,所述开磨一体机包括上下料装置,所述上下料装置包括:
    1)上料组件,其包括:上料夹爪组件,其用于夹持待加工件;以及
    上料翻转组件,其用于至少夹持有待加工件的上料夹爪组件以翻转的方式进行转移;
    2)下料组件,其包括:下料夹爪组件,其用于夹持待加工件;以及
    下料翻转组件,其用于将至少夹持有待加工件的下料夹爪组件以翻转的方式从对应于下料组件的作业区移除;
    其中,所述上料组件包括上料输送组件,所述上料输送组件能够对将待加工件转移至能够与所述上料翻转组件实现其翻转操作相衔接的位置;并且/或者
    其中,所述下料组件包括下料输送组件,在下料翻转组件实现其翻转操作之后,所述下料输送组件能够将待加工件从对应于下料组件的作业区移除。
PCT/CN2023/116283 2022-08-31 2023-08-31 开磨一体机 WO2024046438A1 (zh)

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