WO2024045341A1 - 一种基于光声光谱的气体检测装置 - Google Patents

一种基于光声光谱的气体检测装置 Download PDF

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WO2024045341A1
WO2024045341A1 PCT/CN2022/131048 CN2022131048W WO2024045341A1 WO 2024045341 A1 WO2024045341 A1 WO 2024045341A1 CN 2022131048 W CN2022131048 W CN 2022131048W WO 2024045341 A1 WO2024045341 A1 WO 2024045341A1
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photoacoustic
component
pool
visible light
laser
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PCT/CN2022/131048
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English (en)
French (fr)
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王邸博
廖建平
卓然
刘志峰
高帆
成传晖
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南方电网科学研究院有限责任公司
中国南方电网有限责任公司超高压输电公司检修试验中心
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Publication of WO2024045341A1 publication Critical patent/WO2024045341A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Definitions

  • the present invention relates to the technical field of gas detection, and in particular, to a gas detection device based on photoacoustic spectroscopy.
  • Photoacoustic spectroscopy is a spectral analysis technology based on the photoacoustic effect. It has been more than a hundred years since Bell discovered the solid-state photoacoustic effect in 1880. In recent years, semiconductor laser technology has matured, and gas detection based on photoacoustic spectrum analysis technology has become a hot research industry. It has the advantages of high detection sensitivity, fast response, continuous real-time monitoring, small size, and multi-component gas detection. It is widely used in petrochemical analysis, air pollution detection, coal mine gas concentration monitoring, and dissolved gas analysis in transformer oil. , medical exhaled gas diagnosis and other fields. Photoacoustic spectroscopy measures the effect of absorbed light on a substance through acoustic detection.
  • the gas to be measured is dissolved in the background gas (such as air, nitrogen or inert gas); the gas flows in the photoacoustic cell; when the gas to be measured is When the wavelength of the gas corresponds to an absorption peak of the gas to be measured, the laser beam propagating in the photoacoustic cell will immediately excite the background gas; the heat generated repeatedly from this absorption will generate pressure fluctuations in the photoacoustic cell; the pressure fluctuations are absorbed by the light.
  • Microphone detection in the sound pool identify the gas to be measured and measure its concentration based on the wavelength of the laser and the recorded sound intensity.
  • the present invention provides a gas detection device based on photoacoustic spectrum, which is used to solve the technical problem in the prior art that the gas detection device based on photoacoustic spectrum cannot calibrate the optical path deviation caused by internal vibration caused by movement.
  • the invention provides a gas detection device based on photoacoustic spectrum, including:
  • Laser emission component first photoacoustic pool, acoustic signal detection component, signal amplification component, phase detection component and visible light emission component;
  • the output end of the laser emitting component is aligned with the incident end of the first photoacoustic pool
  • the acoustic signal detection component is accommodated in the first photoacoustic pool, and its output end is connected to the input end of the signal amplification component;
  • the output end of the signal amplification component is connected to the input end of the phase detection component
  • the output end of the phase detection component is connected to the laser emitting component
  • the visible light emitting component is used to emit visible light to the exit end of the first photoacoustic pool.
  • the laser emitting component includes a laser and a function signal generator
  • the output end of the function signal generator is connected to the input end of the laser
  • the output end of the laser is aligned with the incident end of the first photoacoustic pool.
  • the second possible device also includes: a collimator
  • One end of the collimator is aligned with the output end of the laser emitting component, and the other end is aligned with the incident end of the first photoacoustic pool.
  • the third possible device also includes: a second photoacoustic pool and a photoelectric detection component;
  • the second photoacoustic cell is used to contain background gas
  • the incident end of the second photoacoustic pool is aligned with the exit end of the first photoacoustic pool, and the exit end of the second photoacoustic pool is aligned with the input end of the photoelectric detection component;
  • the first photoacoustic cell is aligned with the input end of the photoelectric detection component.
  • the fourth possible device further includes: a waveform display component
  • the input end of the waveform display component is connected to the output end of the photoelectric detection component
  • the waveform display component is signally connected to the phase detection component.
  • the visible light emitting component includes a visible light source and a beam splitter
  • the first emission direction of the beam splitter corresponds to the incident end of the second photoacoustic cell
  • the second emission direction corresponds to the emission end of the first photoacoustic cell
  • the incident direction corresponds to the output end of the visible light source.
  • the visible light emitting component includes a visible light source, a beam splitter and a reflector;
  • the first emission direction of the beam splitter corresponds to the incident end of the second photoacoustic pool
  • the second emission direction corresponds to the emission end of the first photoacoustic pool
  • the incident direction corresponds to the reflection position of the mirror
  • the output end of the visible light source corresponds to the reflection position.
  • the reflector is a concave reflector.
  • the photoelectric detection component is a photodetector
  • the waveform display component is an oscilloscope.
  • the acoustic signal detection component is a capacitive microphone
  • the signal amplification component is a preamplifier
  • the phase detection component is a lock-in amplifier.
  • the gas detection device based on photoacoustic spectrum is provided with a laser emission component, a first photoacoustic pool, an acoustic signal detection component, a signal amplification component, a phase detection component and a visible light emission component; the output end of the laser emission component is aligned with the first The incident end of a photoacoustic pool; the acoustic signal detection component is accommodated in the first photoacoustic pool, and its output end is connected to the input end of the signal amplification component; the output end of the signal amplification component is connected to the input end of the phase detection component; The output end of the phase detection component is connected to the laser emitting component; the visible light emitting component is used to emit visible light to the exit end of the first photoacoustic cell.
  • the visible light emitting component By setting the visible light emitting component to emit visible light to the exit end of the first photoacoustic pool, the visible light propagates to the laser emitting component after passing through the first photoacoustic pool, forming a calibration light path that coincides with the standard detection light path, and the laser emitting component is adjusted according to the calibration light path and the position of the first photoacoustic pool, the calibration of the detection light path can be achieved.
  • Figure 1 is a schematic structural diagram of a gas detection device based on photoacoustic spectroscopy according to an embodiment of the present invention
  • Oscilloscope Calibrate the optical path.
  • Embodiments of the present invention provide a gas detection device based on photoacoustic spectrum.
  • the technical problem used to solve the problem is that the gas detection device based on photoacoustic spectrum in the prior art cannot detect the optical path deviation caused by internal vibration caused by movement. Perform calibration.
  • connection should be understood in a broad sense.
  • it can be a fixed connection or a fixed connection.
  • Replaceable connections, or integral connections can be mechanical connections or electrical connections, direct connections, indirect connections through an intermediary, or internal connections between two components.
  • connection can be a fixed connection or a fixed connection.
  • Replaceable connections, or integral connections can be mechanical connections or electrical connections, direct connections, indirect connections through an intermediary, or internal connections between two components.
  • a gas detection device based on photoacoustic spectroscopy provided by an embodiment of the present invention includes:
  • Laser emission component first photoacoustic pool 3, acoustic signal detection component, signal amplification component, phase detection component and visible light emission component; the output end of the laser emission component is aligned with the incident end of the first photoacoustic pool 3; the acoustic signal detection component It is accommodated in the first photoacoustic pool 3, and its output end is connected to the input end of the signal amplification component; the output end of the signal amplification component is connected to the input end of the phase detection component; the output end of the phase detection component is connected to the laser emitting component ;
  • the visible light emitting component is used to emit visible light to the exit end of the first photoacoustic pool 3 .
  • the laser emitting component is used to generate monochromatic laser, and any device that can generate monochromatic laser that meets the requirements can be used, such as Ar ion laser, He-Ne laser, CO2 laser, semiconductor laser, etc.
  • any device that can generate monochromatic laser that meets the requirements can be used, such as Ar ion laser, He-Ne laser, CO2 laser, semiconductor laser, etc.
  • it is also necessary to set up devices for amplitude modulation and frequency modulation of the laser such as mechanical choppers, function signal generators, etc.
  • the first photoacoustic cell 3 is a closed container, which contains background gas, gas to be measured and acoustic signal detection components.
  • a beam of monochromatic light with modulated intensity is used to illuminate the gas to be measured sealed in the photoacoustic cell.
  • the gas to be measured absorbs light energy and de-excites by releasing heat energy.
  • the released heat energy causes the background gas and the gas to be measured to be periodically heated according to the modulation frequency of the light, resulting in periodic pressure fluctuations in the background gas and the gas to be measured. This is the photoacoustic effect, through which the concentration of gas can be detected.
  • the acoustic signal detection component is used to detect pressure fluctuations in the photoacoustic pool and convert the pressure fluctuations into electrical signals. Any device that can detect pressure fluctuations can be used, such as microphones, piezoelectric ceramic microphones, etc.
  • the signal amplification component is used to amplify the electrical signal generated by the acoustic signal detection component due to pressure fluctuations. Any device that can amplify the electrical signal can be used, such as an amplifier.
  • the phase detection component is used to separate the specific carrier frequency corresponding to the gas to be measured from the electrical signal amplified by the signal amplification component and amplify it again, that is, to demodulate the electrical signal amplified by the amplification component into the signal to be measured.
  • the photoacoustic signal related to the concentration of the measured gas can be calculated based on the photoacoustic signal. Any device that can realize the aforementioned functions can be used, such as the lock-in amplifier 12.
  • the visible light generating component is used to generate a visible light beam, and any device that can stably generate a visible light beam can be used, such as a visible red light source 10, a visible green light source, etc.; by injecting the visible light beam from the exit end of the first photoacoustic pool 3 , is emitted from the incident end of the first photoacoustic pool 3, propagates to the laser emitting component, and is finally emitted from the output end of the laser emitting component into the laser emitting component, forming a calibration optical path 14 that coincides with the standard detection optical path.
  • the calibration optical path 14 By adjusting the positions of the laser emitting component and the first photoacoustic cell 3, the deviation of the detection light path caused by the internal vibration caused by moving the gas detection device based on photoacoustic spectrum can be eliminated; the detection light path is used for gas detection.
  • the laser propagation path, the standard detection optical path is the laser propagation path before deviation.
  • the output end of the laser emitting component is aligned with the incident end of the first photoacoustic pool 3, so that the modulated monochromatic laser generated by the laser emitting component can be emitted into the first photoacoustic pool 3, so that the laser in the first photoacoustic pool 3 can The gas to be measured and the laser produce a photoacoustic effect.
  • the acoustic signal detection component is housed in the first photoacoustic pool 3 to detect pressure fluctuations in the first photoacoustic pool 3.
  • the output end of the acoustic signal detection assembly is connected to the input end of the signal amplification component to convert the pressure fluctuation.
  • the resulting electrical signal is sent to the signal amplifying component, and the signal amplifying component amplifies the electrical signal.
  • the output end of the signal amplification component is connected to the input end of the phase detection component to transmit the amplified electrical signal to the phase detection component.
  • the phase detection component separates the specific carrier frequency corresponding to the gas to be measured from the amplified electrical signal. , and zoom in again.
  • the output end of the phase detection component is connected to the laser emitting component to feed back the specific carrier frequency corresponding to the gas to be measured to the laser emitting component.
  • the laser emitting component modulates the laser of this specific carrier frequency to form a detection light path for gas detection, which can improve Detection accuracy.
  • the visible light emitting component By setting the visible light emitting component to emit visible light to the exit end of the first photoacoustic pool 3, the visible light propagates to the laser emitting component through the first photoacoustic pool 3, forming a calibration light path 14 that coincides with the standard detection light path. According to the calibration light path 14. Adjust the positions of the laser emitting component and the first photoacoustic pool 3 to achieve calibration of the detection light path.
  • the calibration of the detection light path is more intuitive, which facilitates the calibration of the detection light path and improves the calibration efficiency.
  • the laser emitting component includes a laser 1 and a function signal generator 11; the output end of the function signal generator 11 is connected to the input end of the laser 1; the output end of the laser 1 is aligned with the incident end of the first photoacoustic pool 3.
  • the function signal generator 11 emits a voltage waveform signal of a certain frequency to provide a driving current for the laser 1.
  • the laser 1 generates an infrared laser of a specific frequency.
  • the infrared laser is emitted from the output end of the laser 1 toward the first light beam.
  • the sound pool 3 propagates and enters the first photoacoustic pool 3 from the input end of the first photoacoustic pool 3 to produce a photoacoustic effect with the gas to be measured.
  • a collimator 2 is also provided for the gas detection device based on photoacoustic spectrum; one end of the collimator 2 is aligned with the output end of the laser emitting component. , the other end is aligned with the incident end of the first photoacoustic cell 3. More specifically, the collimator 2 is located between the laser 1 and the first photoacoustic cell 3, with one end aligned with the output end of the laser 1, and the other end Aim at the incident end of the first photoacoustic pool 3. In this way, the infrared laser emitted by the laser 1 is collimated into the first photoacoustic pool 3 after passing through the collimator 2.
  • the background gas in the first photoacoustic cell 3 has a small amount of absorption of the infrared laser, so the photoacoustic signal detected by the acoustic signal detection component contains the noise caused by the background gas, which reduces the detection signal-to-noise ratio.
  • the gas detection device based on photoacoustic spectroscopy is provided with a second photoacoustic cell 5 for containing the background gas and a photoelectric detection component for detecting the light intensity of the laser; the incident end of the second photoacoustic cell 5 is The exit end of the first photoacoustic cell 3 is aligned with the exit end of the second photoacoustic cell 5 and the input end of the photoelectric detection component, that is, the second photoacoustic cell 5 is located between the first photoacoustic pool 3 and the photoelectric detection component.
  • the infrared laser is emitted from the output end of the first photoacoustic pool 3, it propagates to the second photoacoustic pool 5, enters the second photoacoustic pool 5 from the input end of the second photoacoustic pool 5, and then passes from the second photoacoustic pool 5 to the second photoacoustic pool 5.
  • the output end of the sound pool 5 is emitted, propagates to the photoelectric detection component, and enters the photoelectric detection component from the input end of the photoelectric detection component; or the output end of the first photoacoustic pool 3 is aligned with the input end of the photoelectric detection component, that is, the second photoacoustic
  • the cell 5 is removed from between the first photoacoustic cell 3 and the photoelectric detection component. In this way, after the infrared laser is emitted from the output end of the first photoacoustic cell 3, it propagates to the photoelectric detection component and enters the photoelectric detection component from the input end of the photoacoustic component. Detection component.
  • the infrared laser emitted by the laser 1 passes through the first photoacoustic pool 3 and the second photoacoustic pool 5 in sequence.
  • the infrared laser is absorbed by the gas to be measured in the first photoacoustic pool 3 and attenuates.
  • the first photoacoustic pool 3 The background gas in the second photoacoustic cell 5 absorbs the infrared laser slightly, so that the concentration of the gas to be measured in the first photoacoustic cell 3 can be measured indirectly through photoacoustic spectroscopy, or through the infrared absorption of the photoelectric detection component.
  • the method directly measures the concentration of the gas to be measured in the first photoacoustic cell 3.
  • the difference between the two measurement methods is that the photoacoustic spectrometry method has higher measurement accuracy, while the infrared absorption method can detect the light of the infrared laser through the photoelectric detection component. strong situation.
  • the second photoacoustic pool 5 is placed between the first photoacoustic pool 3 and the photoelectric detection component, the light intensity of the infrared laser after passing through the first photoacoustic pool 3 and the second photoacoustic pool 5 is detected by the photoelectric detection component.
  • the absorbed light intensity A1 is calculated by comparing the light intensity with the initial light intensity.
  • A1 represents the infrared laser absorbed by the gas to be measured, the background gas in the first photoacoustic cell 3 and the background gas in the second photoacoustic cell 5
  • the sum of The difference between the light intensity and the initial light intensity is used to calculate the absorbed light intensity A2.
  • A2 represents the sum of the infrared laser absorbed by the gas to be measured and the background gas in the first photoacoustic cell 3, and the absorbed light intensity and the concentration of the gas to be measured follow the Bill Lambert's law, after subjecting Bill Lambert's law to Taylor transformation, the mathematical relationship shown in the following formula is obtained. Substitute A1 into this formula to calculate the corresponding concentration of the gas to be measured.
  • ⁇ is the absorption coefficient (fixed value) corresponding to the wavelength
  • L is the optical path length
  • a ⁇ is the absorbed light intensity
  • a waveform display component is also provided for the gas detection device based on photoacoustic spectrum; the input end of the waveform display component is connected to the output end of the photoelectric detection component, so that the photoelectric detection component
  • the light intensity of the infrared laser detected by the detection component can be transmitted to the waveform display component for real-time display; the waveform display component is signal-connected to the phase detection component.
  • the photoacoustic signal related to the concentration of the gas to be measured modulated by the phase detection component is also It can be wirelessly transmitted to the waveform display component for real-time display.
  • the visible light emitting component includes a visible light source and a beam splitter 4; the first exit direction of the beam splitter 4 corresponds to the incident end of the second photoacoustic pool 5, and the second exit direction corresponds to the first photoacoustic cell.
  • the exit end of pool 3 corresponds to the incident direction and the output end of the visible light source.
  • the visible light beam emitted by the visible light source is divided into two visible light beams by the beam splitter 4, and the propagation path of one of the visible light beams is: the exit end of the first photoacoustic pool 3 > the incident end of the first photoacoustic pool 3 > Collimator 2>The output end of laser 1, the propagation path of the other beam is: the incident end of the second photoacoustic cell 5>the exit end of the second photoacoustic cell 5>the input end of the photoelectric detection component, two visible beams
  • the propagation path is combined into a calibration optical path 14 that coincides with the standard detection optical path.
  • the propagation path of the infrared laser corresponding to the detection optical path is: output end of laser 1 > collimator 2 > incident end of first photoacoustic pool 3 >The exit end of the first photoacoustic cell 3 >The beam splitter 4 >The incident end of the second photoacoustic cell 5 >The exit end of the second photoacoustic cell 5 >The input end of the photoelectric detection component.
  • a reflector is also provided for the visible light emitting component.
  • the first exit direction of the beam splitter 4 corresponds to the incident end of the second photoacoustic pool 5
  • the second emission direction corresponds to the emission end of the first photoacoustic pool 3
  • the incident direction corresponds to the reflection position of the mirror
  • the output end of the visible light source corresponds to the reflection position.
  • the beam splitter 4 is divided into two visible light beams.
  • the propagation path of one of the visible light beams is: the exit end of the first photoacoustic pool 3.
  • the propagation path of the other beam is: the incident end of the second photoacoustic cell 5>The exit end of the second photoacoustic cell 5>
  • the propagation paths of the two visible light beams are combined into a calibration optical path 14 that coincides with the standard detection optical path.
  • the propagation path of the infrared laser corresponding to the detection optical path is: output end of laser 1 > collimator 2>The incident end of the first photoacoustic cell 3>The exit end of the first photoacoustic cell 3>The beam splitter 4>The incident end of the second photoacoustic cell 5>The exit end of the second photoacoustic cell 5>Photoelectric detection component input terminal.
  • the calibration optical path 14 can be adjusted.
  • the photodetection component is a photodetector 6; the waveform display component is an oscilloscope 13; the acoustic signal detection component is a capacitive microphone 7; the signal amplification component is a preamplifier 8; the phase detection component is a lock-in amplifier 12, and the visible light source It is a visible red light source 10, and the reflector is a concave reflector 9.

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Abstract

一种基于光声光谱的气体检测装置，设置有激光发射组件、第一光声池、声信号检测组件、信号放大组件、相位检测组件和可见光发射组件；激光发射组件的输出端对准第一光声池的入射端；声信号检测组件容置于第一光声池中，且其输出端与信号放大组件的输入端连接；信号放大组件的输出端与相位检测组件的输入端连接；相位检测组件的输出端与激光发射组件连接；可见光发射组件用于向第一光声池的出射端发射可见光。可见光发射组件向第一光声池的出射端发射可见光，可见光透过第一光声池后向激光发射组件传播，形成校准光路，根据校准光路调整激光发射组件和第一光声池的位置，实现检测光路的校准。

Description

一种基于光声光谱的气体检测装置
本申请要求于2022年9月1日提交中国专利局、申请号为202211064408.6、发明名称为“一种基于光声光谱的气体检测装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及气体检测技术领域，尤其涉及一种基于光声光谱的气体检测装置。
背景技术
光声光谱是基于光声效应的一种光谱分析技术。从1880年贝尔发现固体光声效应以来，至今已有一百多年的历史。近年来，半导体激光器工艺发展成熟，基于光声光谱分析技术检测气体成为研究热业。它具有高检测灵敏度，快时间响应，可连续实时监测，小体积，可实现多组分气体检测等优点，被广泛应用于石化分析、空气污染检测、煤矿瓦斯浓度监测、变压器油中溶解气体分析、医学呼出气体诊断等领域。光声光谱是通过声学检测来测量吸收光对物质的影响，其工作原理为：将待测气体溶解在背景气体(例如空气，氮气或惰性气体)；气体在光声池中流动；当待测气体的波长对应于待测气体的一个吸收峰时，在光声池内传播的激光光束会立即激发背景气体；从该吸收中反复产生的热量会在光声池中产生压力波动；压力波动被光声池内的麦克风检测；根据激光的波长和记录的声强识别待测气体并测量其浓度。
现有的基于光声光谱的气体检测装置没有设置光路校准部件，无法对因移动产生的内部震动所引发的光路偏移进行校准，而光路的偏移会对检测结果产生影响。
发明内容
本发明提供了一种基于光声光谱的气体检测装置，用于解决现有技术中基于光声光谱的气体检测装置无法对因移动产生的内部震动所引发的光路偏移进行校准的技术问题。
本发明提供的一种基于光声光谱的气体检测装置，包括：
激光发射组件、第一光声池、声信号检测组件、信号放大组件、相位检测组件和可见光发射组件；
该激光发射组件的输出端对准该第一光声池的入射端；
该声信号检测组件容置于该第一光声池中，且其输出端与该信号放大组件的输入端连接；
该信号放大组件的输出端与该相位检测组件的输入端连接；
该相位检测组件的输出端与该激光发射组件连接；
该可见光发射组件用于向该第一光声池的出射端发射可见光。
在第一种可能实现的装置中，该激光发射组件包括激光器和函数信号发生器；
该函数信号发生器的输出端与该激光器的输入端连接；
该激光器的输出端对准该第一光声池的入射端。
在第二种可能实现的装置中，还包括：准直器；
该准直器的一端对准该激光发射组件的输出端，另一端对准该第一光声池的入射端。
在第三种可能实现的装置中，还包括：第二光声池和光电探测组件；
该第二光声池用于容纳背景气体；
该第二光声池的入射端对准该第一光声池的出射端，该第二光声池的出射端对准该光电探测组件的输入端；
该第一光声池对准该光电探测组件的输入端。
结合第三种可能实现的装置，在第四种可能实现的装置中，还包括：波形显示组件；
该波形显示组件的输入端与该光电探测组件的输出端连接；
该波形显示组件与该相位检测组件信号连接。
结合第三种可能实现的装置，在第五种可能实现的装置中，该可见光发射组件包括可见光光源和分束镜；
该分束镜的第一出射方向与该第二光声池的入射端对应，第二出射方向与该第一光声池的出射端对应，入射方向与该可见光光源的输出端对应。
结合第三种可能实现的装置，在第六种可能实现的装置中，该可见光 发射组件包括可见光光源、分束镜和反射镜；
该分束镜的第一出射方向与该第二光声池的入射端对应，第二出射方向与该第一光声池的出射端对应，入射方向与该反射镜的反射位对应；
该可见光光源的输出端与该反射位对应。
结合第六种可能实现的装置，在第七种可能实现的装置中，该反射镜为凹面反射镜。
结合第三至第四种中任一种可能实现的装置，在第八种可能实现的装置中，该光电探测组件为光电探测器；
该波形显示组件为示波器。
结合上述任一种可能实现的装置，在第九种可能实现的装置中，该声信号检测组件为电容式微音器；
该信号放大组件为前置放大器；
该相位检测组件为锁相放大器。
从以上技术方案可以看出，本发明具有以下优点：
本发明提供的基于光声光谱的气体检测装置设置有激光发射组件、第一光声池、声信号检测组件、信号放大组件、相位检测组件和可见光发射组件；激光发射组件的输出端对准第一光声池的入射端；声信号检测组件容置于第一光声池中，且其输出端与信号放大组件的输入端连接；信号放大组件的输出端与相位检测组件的输入端连接；相位检测组件的输出端与激光发射组件连接；可见光发射组件用于向第一光声池的出射端发射可见光。通过设置可见光发射组件向第一光声池的出射端发射可见光，可见光透过第一光声池后向激光发射组件传播，形成与标准的检测光路重合的校准光路，根据校准光路调整激光发射组件和第一光声池的位置，即可实现检测光路的校准。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其它的 附图。
图1为本发明实施例示出的一种基于光声光谱的气体检测装置的结构示意图；
其中：1、激光器        2、准直器      3、第一光声池
      4、分束镜        5、第二光声池  6、光电探测器
      7、电容式微音器  8、前置放大器  9、反射镜
10、可见光光源  11、函数信号发生器  12、锁相放大器
13、示波器      14、校准光路。
具体实施方式
本发明实施例提供了一种基于光声光谱的气体检测装置，用于解决的技术问题是现有技术中基于光声光谱的气体检测装置无法对因移动产生的内部震动所引发的光路偏移进行校准。
为使得本发明的目的、特征、优点能够更加的明显和易懂，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，下面所描述的实施例仅仅是本发明一部分实施例，而非全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。
在本申请实施例的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请实施例和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请实施例的限制。此外，术语“第一”、“第二”、“第三”仅用于描述目的，而不能理解为指示或暗示相对重要性。
在本申请实施例的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可更换连接，或一体地连接，可以是机械连接，也可以是电连接，可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术 语在本申请实施例中的具体含义。
现有的基于光声光谱的气体检测装置没有设置光路校准部件，无法对因移动产生的内部震动所引发的光路偏移进行校准，而光路的偏移会对检测结果产生影响。
请参阅图1，本发明实施例提供的一种基于光声光谱的气体检测装置，包括：
激光发射组件、第一光声池3、声信号检测组件、信号放大组件、相位检测组件和可见光发射组件；激光发射组件的输出端对准第一光声池3的入射端；声信号检测组件容置于第一光声池3中，且其输出端与信号放大组件的输入端连接；信号放大组件的输出端与相位检测组件的输入端连接；相位检测组件的输出端与激光发射组件连接；可见光发射组件用于向第一光声池3的出射端发射可见光。
需要说明的是：激光发射组件用于产生单色激光，任何可产生符合需求的单色激光的器件均可采用，如Ar离子激光器、He-Ne激光器、CO2激光器、半导体激光器等，另外，为了得到经过调制的激光，还需设置用于对激光进行振幅调制和频率调制的器件，如机械斩波器、函数信号发生器等。
第一光声池3是一种封闭容器，其内盛放背景气体、待测气体和声信号检测组件，用一束强度可调制的单色光照射密封于光声池中的待测气体，待测气体吸收光能，并以释放热能的方式退激，释放的热能使背景气体和待测气体按光的调制频率产生周期性加热，从而导致背景气体和待测气体产生周期性压力波动，这就是光声效应，通过光声效应可检测气体的浓度。
声信号检测组件用于检测光声池中的压力波动，将压力波动转换成电信号，任何可检测压力波动的器件均可采用，如微音器、压电陶瓷传声器等。
信号放大组件用于将声信号检测组件因压力波动而生成的电信号进行放大，任何可将电信号进行放大的器件均可采用，如放大器。
相位检测组件用于将与待测气体对应的特定载波频率从经信号放大组件放大后的电信号中分离出来并进行再次放大，即用于将经放大组件放大 后的电信号解调成与待测气体的浓度相关的光声信号，根据该光声信号即可计算出待测气体的浓度，任何可实现前述功能的器件均可采用，如锁相放大器12。
可见光发生组件用于产生可见光束，任何可稳定产生可见光束的器件均可采用，如可见红光光源10、可见绿光光源等；通过将可见光束从第一光声池3的出射端射入，从第一光声池3的入射端射出，向激光发射组件传播，最终从激光发射组件的输出端射入激光发射组件，形成与标准的检测光路重合的校准光路14，根据校准光路14对激光发射组件和第一光声池3的位置进行调整，即可消除因移动基于光声光谱的气体检测装置所导致的内部震动而引发的检测光路的偏移；检测光路即用于进行气体检测的激光的传播路径，标准的检测光路即未发生偏移前的激光传播路径。
激光发射组件的输出端对准第一光声池3的入射端，以让激光发射组件所产生的可调制单色激光可射入第一光声池3，让第一光声池3内的待测气体与激光发生光声效应。
声信号检测组件容置于第一光声池3中，以检测第一光声池3内的压力波动，将声信号检测组件的输出端与信号放大组件的输入端连接，以将由压力波动转换成的电信号传送给信号放大组件，信号放大组件将电信号进行放大。
信号放大组件的输出端与相位检测组件的输入端连接，以将放大后的电信号传送给相位检测组件，相位检测组件将与待测气体对应的特定载波频率从放大后的电信号中分离出来，并再次放大。
相位检测组件的输出端与激光发射组件连接，以将待测气体对应的特定载波频率反馈给激光发射组件，激光发射组件调制出此特定载波频率的激光用于形成检测光路进行气体检测，可提高检测精度。
本实施例的有益效果包括：
①通过设置可见光发射组件向第一光声池3的出射端发射可见光，可见光透过第一光声池3后向激光发射组件传播，形成与标准的检测光路重合的校准光路14，根据校准光路14调整激光发射组件和第一光声池3的位置，即可实现检测光路的校准。
②通过设置可见光发射组件形成可见的校准光路14，使得检测光路的校准更直观，便于检测光路的校准，提高校准效率。
优选的，激光发射组件包括激光器1和函数信号发生器11；函数信号发生器11的输出端与激光器1的输入端连接；激光器1的输出端对准第一光声池3的入射端。通过函数信号发生器11发出一定频率的电压波形信号为激光器1提供驱动电流，激光器1在该驱动电流的驱动下生成特定频率的红外激光，红外激光从激光器1的输出端射出，向第一光声池3传播，从第一光声池3的输入端进入第一光声池3与待测气体发生光声效应。
优选的，为了使红外激光最大效率的耦合进入第一光声池3，还为基于光声光谱的气体检测装置设置了准直器2；准直器2的一端对准激光发射组件的输出端，另一端对准第一光声池3的入射端，更具体来说，准直器2设于激光器1和第一光声池3之间，其一端对准激光器1的输出端，另一端对准第一光声池3的入射端，如此，激光器1发出的红外激光，经过准直器2后准直进入第一光声池3。
优选的，第一光声池3中的背景气体对红外激光具有微量的吸收，所以声信号检测组件所检测到的光声信号包含背景气体所造成的噪音，降低了检测信噪比，为了消除这一缺陷，为基于光声光谱的气体检测装置设置了用于容纳背景气体的第二光声池5和用于探测激光的光强的光电探测组件；第二光声池5的入射端对准第一光声池3的出射端，第二光声池5的出射端对准光电探测组件的输入端，即第二光声池5设于第一光声池3和光电探测组件之间，如此，红外激光从第一光声池3的输出端射出后，向第二光声池5传播，从第二光声池5的输入端进入第二光声池5，然后从第二光声池5的输出端射出，向光电探测组件传播，从光电探测组件的输入端进入光电探测组件；或第一光声池3的出射端对准光电探测组件的输入端，即将第二光声池5从第一光声池3和光电探测组件之间移除，如此，红外激光从第一光声池3的输出端射出后，向光电探测组件传播，从光电探测组件的输入端进入光电探测组件。激光器1发出的红外激光依次穿过第一光声池3和第二光声池5，红外激光被第一光声池3中的待测气体吸收，发生衰减，同时，第一光声池3和第二光声池5中的背景气体对红外 激光进行微量吸收，从而可通过光声光谱法间接测量第一光声池3中的待测气体的浓度，也可通过光电探测组件的红外吸收法直接测量第一光声池3中的待测气体的浓度，两种测量方法的区别在于，光声光谱法的测量精度更高，而红外吸收法可通过光电探测组件探测出红外激光的光强情况。当将第二光声池5设于第一光声池3和光电探测组件之间时，通过光电探测组件探测出红外激光经过第一光声池3和第二光声池5后的光强，将该光强与初始光强作差计算出吸收光强A1，A1代表第一光声池3中的待测气体、背景气体以及第二光声池5中的背景气体所吸收的红外激光的总和，当将第二光声池5从第一光声池3和光电探测组件之间移除时，通过光电探测组件探测出红外激光经过第一光声池3后的光强，将该光强与初始光强作差计算出吸收光强A2，A2代表第一光声池3中的待测气体和背景气体所吸收的红外激光的总和，而吸收光强与待测气体浓度遵循比尔朗博定律，将比尔朗博定律经过泰勒变换后得到如下述公式所示的数学关系，将A1代入该公式计算出对应的待测气体浓度
Figure PCTCN2022131048-appb-000001
将A2代入公式计算出对应的待测气体浓度
Figure PCTCN2022131048-appb-000002
和
Figure PCTCN2022131048-appb-000003
的差即第二光声池5中的背景气体所造成的误差，该误差等于第一光声池3中背景气体所造成的误差，所以将通过光声光谱法计算得到的待测气体浓度减去该误差即可将背景气体所造成的噪音扣除，提高信噪比。
公式：
Figure PCTCN2022131048-appb-000004
其中：
Figure PCTCN2022131048-appb-000005
为待测气体浓度，a λ对应波长的吸收系数(固定值)，L为光程长度，A λ为吸收光强。
优选的，为了便于对红外激光的光强进行实时观察，还为基于光声光谱的气体检测装置设置了波形显示组件；波形显示组件的输入端与光电探测组件的输出端连接，如此，由光电探测组件探测到的红外激光的光强可传输至波形显示组件进行实时显示；波形显示组件与相位检测组件信号连接，如此，由相位检测组件调制成的有关待测气体的浓度的光声信号也可无线传输至波形显示组件进行实时显示。
可见光发射组件的优选实施方式：可见光发射组件包括可见光光源和 分束镜4；分束镜4的第一出射方向与第二光声池5的入射端对应，第二出射方向与第一光声池3的出射端对应，入射方向与可见光光源的输出端对应。如此，由可见光光源发射出的可见光束由分束镜4分为两束可见光束，其中一束的传播路径为：第一光声池3的出射端>第一光声池3的入射端>准直器2>激光器1的输出端，另一束的传播路径为：第二光声池5的入射端>第二光声池5的出射端>光电探测组件的输入端，两束可见光束的传播路径组合成与标准的检测光路重合的校准光路14，此时检测光路所对应的红外激光的传播路径为：激光器1的输出端>准直器2>第一光声池3的入射端>第一光声池3的出射端>分束镜4>第二光声池5的入射端>第二光声池5的出射端>光电探测组件的输入端。
进一步优化的，为了使校准光路14具备较高的可调性，还为可见光发射组件设置了反射镜，此时，分束镜4的第一出射方向与第二光声池5的入射端对应，第二出射方向与第一光声池3的出射端对应，入射方向与反射镜的反射位对应；可见光光源的输出端与反射位对应。如此，由可见光光源发射出可见光束由反射镜发射后射入分束镜4，由分束镜4分为两束可见光束，其中一束的传播路径为：第一光声池3的出射端>第一光声池3的入射端>准直器2>激光器1的输出端，另一束的传播路径为：第二光声池5的入射端>第二光声池5的出射端>光电探测组件的输入端，两束可见光束的传播路径组合成与标准的检测光路重合的校准光路14，此时检测光路所对应的红外激光的传播路径为：激光器1的输出端>准直器2>第一光声池3的入射端>第一光声池3的出射端>分束镜4>第二光声池5的入射端>第二光声池5的出射端>光电探测组件的输入端。通过调节反射镜和分束镜4的位置，即可对校准光路14进行调节。
优选的，光电探测组件为光电探测器6；波形显示组件为示波器13；声信号检测组件为电容式微音器7；信号放大组件为前置放大器8；相位检测组件为锁相放大器12，可见光光源为可见红光光源10，反射镜为凹面反射镜9。
以上实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解： 其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。

Claims (10)

  1. 一种基于光声光谱的气体检测装置，其特征在于，包括：
    激光发射组件、第一光声池、声信号检测组件、信号放大组件、相位检测组件和可见光发射组件；
    所述激光发射组件的输出端对准所述第一光声池的入射端；
    所述声信号检测组件容置于所述第一光声池中，且其输出端与所述信号放大组件的输入端连接；
    所述信号放大组件的输出端与所述相位检测组件的输入端连接；
    所述相位检测组件的输出端与所述激光发射组件连接；
    所述可见光发射组件用于向所述第一光声池的出射端发射可见光。
  2. 根据权利要求1所述的一种基于光声光谱的气体检测装置，其特征在于：
    所述激光发射组件包括激光器和函数信号发生器；
    所述函数信号发生器的输出端与所述激光器的输入端连接；
    所述激光器的输出端对准所述第一光声池的入射端。
  3. 根据权利要求1所述的一种基于光声光谱的气体检测装置，其特征在于，还包括：准直器；
    所述准直器的一端对准所述激光发射组件的输出端，另一端对准所述第一光声池的入射端。
  4. 根据权利要求1所述的一种基于光声光谱的气体检测装置，其特征在于，还包括：
    第二光声池和光电探测组件；
    所述第二光声池用于容纳背景气体；
    所述第二光声池的入射端对准所述第一光声池的出射端，所述第二光声池的出射端对准所述光电探测组件的输入端；或
    所述第一光声池对准所述光电探测组件的输入端。
  5. 根据权利要求4所述的一种基于光声光谱的气体检测装置，其特征在于，还包括：波形显示组件；
    所述波形显示组件的输入端与所述光电探测组件的输出端连接；
    所述波形显示组件与所述相位检测组件信号连接。
  6. 根据权利要求4所述的一种基于光声光谱的气体检测装置，其特征在于：
    所述可见光发射组件包括可见光光源和分束镜；
    所述分束镜的第一出射方向与所述第二光声池的入射端对应，第二出射方向与所述第一光声池的出射端对应，入射方向与所述可见光光源的输出端对应。
  7. 根据权利要求4所述的一种基于光声光谱的气体检测装置，其特征在于：
    所述可见光发射组件包括可见光光源、分束镜和反射镜；
    所述分束镜的第一出射方向与所述第二光声池的入射端对应，第二出射方向与所述第一光声池的出射端对应，入射方向与所述反射镜的反射位对应；
    所述可见光光源的输出端与所述反射位对应。
  8. 根据权利要求7所述的基于光声光谱的气体检测装置，其特征在于：
    所述反射镜为凹面反射镜。
  9. 根据权利要求4至8任一项所述的一种基于光声光谱的气体检测装置，其特征在于：
    所述光电探测组件为光电探测器；
    所述波形显示组件为示波器。
  10. 根据权利要求1至8任一项所述的一种基于光声光谱的气体检测装置，其特征在于：
    所述声信号检测组件为电容式微音器；
    所述信号放大组件为前置放大器；
    所述相位检测组件为锁相放大器。
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