WO2024016701A1 - Precision water jet guided laser cutter head - Google Patents

Precision water jet guided laser cutter head Download PDF

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Publication number
WO2024016701A1
WO2024016701A1 PCT/CN2023/082880 CN2023082880W WO2024016701A1 WO 2024016701 A1 WO2024016701 A1 WO 2024016701A1 CN 2023082880 W CN2023082880 W CN 2023082880W WO 2024016701 A1 WO2024016701 A1 WO 2024016701A1
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WO
WIPO (PCT)
Prior art keywords
plate
guided laser
water
cutting head
wall
Prior art date
Application number
PCT/CN2023/082880
Other languages
French (fr)
Chinese (zh)
Inventor
蒋习锋
倪善才
Original Assignee
济南金威刻激光科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 济南金威刻激光科技股份有限公司 filed Critical 济南金威刻激光科技股份有限公司
Priority to AU2023219871A priority Critical patent/AU2023219871B2/en
Publication of WO2024016701A1 publication Critical patent/WO2024016701A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0408Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/40Semiconductor devices

Definitions

  • the invention relates to the technical field of water-guided laser cutting heads, and in particular to a water-guided laser precision cutting head.
  • Water-guided laser focuses the laser and then introduces it into the micro-water column.
  • the laser will be transmitted along the water column, and the product to be processed will be processed within the range where the water column remains stable, so that The heat generated by the accumulation and conduction of laser energy is taken away by water, which can avoid thermal damage and burning of the laser around the cutting path of the product, thus making the cutting path clear.
  • the water-guided laser precision cutting head basically meets the efficiency of precision instrument processing operations during use.
  • Most of the existing chip placement frames are usually fixed with multi-point bolts when docking with the water-guided laser precision cutting head.
  • the operator needs to use tools to disassemble and fix the bolts. This method is not only cumbersome and complicated to operate, but also reduces the efficiency of wafer replacement to a certain extent, thereby reducing the use of water-guided laser precision cutting heads. issues such as efficiency.
  • the purpose of the present invention is to at least solve one of the technical problems existing in the prior art, and provide a water-guided laser precision cutting head that can solve the problem when the wafer placement frame is docked with the water-guided laser precision cutting head.
  • Multi-point bolts are usually used for fixation, and when the operator replaces the wafer, the operator needs to use tools to disassemble and fix the bolts. This method is not only cumbersome and complicated in operation, but also reduces the efficiency of wafer replacement to a certain extent. , thereby reducing the efficiency of the water-guided laser precision cutting head.
  • a water-guided laser precision cutting head including a water-guided laser precision cutting head.
  • the surface of the water-guided laser precision cutting head is provided with a placement groove, and the inner wall of the placement groove is slidingly connected.
  • a fixed plate is slidably connected to the inner wall of the slot.
  • a second spring is slidably connected to the surface of the fixed plate. Both ends of the second spring are fixedly connected to the surface of the fixed plate and the fixed plate.
  • the surface of the fixing plate is slidingly connected to the inner wall of the fixing slot.
  • the surface of the fixing plate is connected with a rolling ball, and the inner side of the docking plate is connected with an adjusting column. .
  • a placement frame is fixedly connected to the surface of the docking plate, and the shape of the inside of the placement frame is a concave shape.
  • a wafer is arranged inside the placement frame, and a positioning ring is slidably connected to the inside of the placement frame, and the positioning ring is located on the upper side of the wafer.
  • a positioning plate is fixedly connected to the surface of the positioning ring
  • a chute is provided on the surface of the positioning plate
  • a clamping plate is slidingly connected to the inner wall of the chute
  • a first spring is fixedly connected to the surface of the clamping plate, and the first spring is away from the clamping plate.
  • One end of the plate is fixedly connected to the inner wall of the chute.
  • a docking groove is provided on the surface of the placement frame, and the docking groove is L-shaped.
  • the surface of the positioning plate is slidingly connected to the inner wall of the docking groove
  • a clamping slot is provided on the inside of the placement frame
  • the surface of the clamping plate is slidably connected to the inner wall of the clamping slot.
  • the shape of the adjusting post is an arc shape.
  • the surface of the adjustment column is fixedly sleeved with a torsion spring, and the surface of the torsion spring is fixedly connected to the inside of the docking plate.
  • This device connects the water-guided laser precision cutting head to the docking plate, which not only simplifies the separation and docking operations between the docking plate and the water-guided laser precision cutting head, but also greatly improves the efficiency of the docking plate and the water-guided laser precision cutting head.
  • the operational efficiency of disassembling and fixing the heads ensures the processing efficiency of replacing the wafers on the water-guided laser precision cutting head.
  • This water-guided laser precision cutting head by utilizing the concave shape of the placement frame, can have a good limiting effect when the wafer is placed inside the placement frame, thereby making it convenient for the positioning ring to position and clamp the wafer. sex.
  • the L-shape of the docking groove can make the positioning ring pass through the positioning plate to form a good limiting effect. This ensures that when the positioning ring is rotated and adjusted inside the placement frame to fix the wafer, the L-shape of the docking groove can be used to achieve compact positioning and clamping between the positioning ring and the wafer.
  • This water-guided laser precision cutting head sets a rotating rolling ball on the surface of the fixed plate.
  • the fixed plate can be lowered by the rolling ball on the surface of the fixed plate.
  • the friction resistance caused by the direct contact between the plate and the adjusting column, and the increase in the distance between the fixed plate and the adjusting column The adjusting column has a smooth sliding effect when adjusting.
  • Figure 1 is a schematic structural diagram of a water-guided laser precision cutting head of the present invention
  • Figure 2 is a schematic structural diagram of the placement frame of the present invention.
  • Figure 3 is a schematic plan view of a water-guided laser precision cutting head of the present invention.
  • Figure 4 is a schematic structural diagram of the placement frame of the present invention.
  • Figure 5 is a schematic diagram of the planar structure of the adjusting column of the present invention.
  • orientation descriptions such as up, down, front, back, left, right, etc., are based on the orientation or position relationships shown in the drawings and are only In order to facilitate the description of the present invention and simplify the description, it is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as a limitation of the present invention.
  • a water-guided laser precision cutting head including a water-guided laser precision cutting head 1.
  • the surface of the water-guided laser precision cutting head 1 is provided with a placement groove 2.
  • the placement groove A docking plate 3 is slidably connected to the inner wall of 2, and a placement frame 4 is fixedly connected to the surface of the docking plate 3.
  • the shape of the inside of the placement frame 4 is a concave shape.
  • a chip 5 is provided on the inside of the placement frame 4, and the inside of the placement frame 4 is slidably connected.
  • the positioning ring 6 is located on the upper side of the wafer 5.
  • the surface of the positioning ring 6 is fixedly connected with a positioning plate 7.
  • the surface of the positioning plate 7 is provided with a chute 8.
  • the inner wall of the chute 8 is slidingly connected with a clamping plate 9.
  • a first spring 10 is fixedly connected to the surface of the clamping plate 9.
  • One end of the first spring 10 away from the clamping plate 9 is fixedly connected to the inner wall of the chute 8.
  • a docking slot 11 is provided on the surface of the placement frame 4.
  • the docking slot 11 is in the shape of L. shape
  • the surface of the positioning plate 7 is slidably connected to the inner wall of the docking groove 11, and a slot 12 is provided on the inside of the placing frame 4.
  • the surface of the clamping plate 9 is slidably connected to the inner wall of the slot 12. shape, the wafer 5 can have a good limiting effect when placed inside the placing frame 4, thereby facilitating the convenience of positioning and clamping the wafer 5 by the positioning ring 6.
  • the L-shape of the docking groove 11 can make the positioning ring 6 pass through the positioning plate 7 to form a good limiting effect, thereby ensuring the positioning.
  • the L-shape of the docking groove 11 can be used to achieve compact positioning and clamping between the positioning ring 6 and the wafer 5 .
  • the placement frame 4 presses the clamping plate 9 into the inner wall of the chute 8 until the positioning ring 6 drives the positioning plate 7 to enter the inner wall of the docking groove 11.
  • the clamping plate 9 matches the clamping slot 12, and the clamping plate 9 is pushed into the inner wall of the clamping slot 12 by the elasticity of the compressed first spring 10. This way ensures the positioning ring. 6.
  • a slot 12 is provided on the inside of the docking plate 3.
  • the inner wall of the slot 12 is slidably connected to a fixed plate 13.
  • the surface of the fixed plate 13 is slidably sleeved with a second spring 14. Both ends of the second spring 14 are fixedly connected respectively.
  • a fixing slot 15 is provided on the inside of the water-guided laser precision cutting head 1.
  • the surface of the fixing plate 13 is slidably engaged with the inner wall of the fixing slot 15, and the surface of the fixing plate 13 is rotationally connected.
  • the shape of the adjusting column 17 is an arc shape.
  • a torsion spring 18 is fixedly connected to the surface of the adjusting column 17, and the surface of the torsion spring 18 is fixedly connected to the docking plate 3.
  • the adjustment column 17 drives the torsion spring 18 to twist.
  • the adjustment column 17 moves the surface
  • the contacting roller ball 16 enters the concave arc surface through the arc surface.
  • the adjusting column 17 gradually no longer squeezes the fixed plate 13, and the fixed plate 13 is driven by the tension of the second spring 14. Reset, and then the fixing plate 13 slides out from the inner wall of the fixing groove 15.
  • the operator pulls out the placing frame 4 on the docking plate 3 from the inside of the water-guided laser precision cutting head 1 and replaces the wafer 5.
  • the wafer 5 is replaced.
  • the docking plate 3 and the placing frame 4 are butted on the inner wall of the placing groove 2, and then the operator releases the adjusting column 17, and the adjusting column 17 is driven to reset by the torsion force of the torsion spring 18, and the adjusting column 17 moves the roller in the groove.
  • the ball 16 is pushed to the arc surface, and then the fixing plate 13 is pushed by the adjusting column 17 and slides out from the inside of the docking plate 3 into the inner wall of the fixing groove 15.
  • the multi-point disassembly and fixation of bolts is cumbersome, and then the water-guided laser precision cutting head 1 and the docking plate 3 are connected through this device, which not only simplifies the separation between the docking plate 3 and the water-guided laser precision cutting head 1
  • the docking operation method also greatly improves the operating efficiency of disassembly and fixation between the docking plate 3 and the water-guided laser precision cutting head 1, thereby ensuring that the wafer 5 on the water-guided laser precision cutting head 1 can be replaced. Processing efficiency.
  • a water-guided laser precision cutting head drives the positioning plate 7 into the inner wall of the docking groove 11 through the positioning ring 6.
  • the placing frame 4 squeezes the clamping plate 9 into the inner wall of the chute 8 until the positioning ring 6
  • the clamping plate 9 matches the clamping slot 12, and the clamping plate 9 is pushed into the inner wall of the clamping slot 12 by the elasticity of the compressed first spring 10.
  • the adjusting column 17 drives the torsion spring 18 to twist.
  • the adjusting column 17 makes the surface contact
  • the rolling ball 16 enters the concave arc surface through the arc surface.
  • the adjusting column 17 gradually no longer squeezes the fixed plate 13, and the fixed plate 13 is reset by the tension of the second spring 14.
  • the fixing plate 13 slides out from the inner wall of the fixing groove 15.
  • the operator pulls out the placement frame 4 on the docking plate 3 from the inside of the water-guided laser precision cutting head 1 and replaces the wafer 5, and then docks again.
  • the plate 3 and the placing frame 4 are butted on the inner wall of the placing groove 2, and then the operator releases the adjusting column 17, and the adjusting column 17 is driven to reset by the torsion force of the torsion spring 18, and the adjusting column 17 moves the rolling ball 16 in the groove.
  • the fixing plate 13 is pushed by the adjusting column 17 to slide out of the inside of the docking plate 3 and into the inner wall of the fixing groove 15 .

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)

Abstract

A precision water jet guided laser cutter head (1), having a surface thereof provided with a placement recess (2). A connection plate (3) is slidably connected to the inner wall of the placement recess (2); the inside of the connection plate (3) is provided with slots (12); fixing plates (13) are slidably connected to the inner walls of the slots (12); the surface of each fixing plate (13) is slidably sleeved with a second spring (14); two ends of the second spring (14) are respectively fixedly connected to the surface of the fixing plate (13) and the inner wall of the slot (12); the inside of the precision water jet guided laser cutter head (1) is provided with fixing grooves (15); the surfaces of the fixing plates (13) are slidably fastened on the inner walls of the fixing grooves (15); rolling balls (16) are rotatably connected to the surfaces of the fixing plates (13); an adjustment column (17) is rotatably connected to the inside of the connection plate (3). By means of the connection between the device and the connection plate, the operation modes of separation and connection between the connection plate and the precision water jet guided laser cutter head are simplified, and the operation efficiency of disassembling and fixing between the connection plate and the precision water jet guided laser cutter head is greatly improved, thereby ensuring the processing efficiency of replacing a wafer on the precision water jet guided laser cutter head.

Description

一种水导激光精密切割头A water-guided laser precision cutting head
本发明要求于2022年7月18日提交中国专利局、申请号为202210842593.0、发明名称为“一种水导激光精密切割头”的中国专利申请的优先权,其全部内容通过引用结合在本发明中。The present invention claims the priority of the Chinese patent application submitted to the China Patent Office on July 18, 2022, with the application number 202210842593.0 and the invention name "A water-guided laser precision cutting head", the entire content of which is incorporated into the present invention by reference. middle.
技术领域Technical field
本发明涉及水导激光切割头技术领域,特别涉及一种水导激光精密切割头。The invention relates to the technical field of water-guided laser cutting heads, and in particular to a water-guided laser precision cutting head.
背景技术Background technique
水导激光是采用将激光进行聚焦后导入微水柱中,利用微水柱与空气界面的全反射的原理,激光将沿着水柱传导,在水柱维持稳定的范围内,对待加工的产品进行加工,使得激光能量累积和传导产生的热量被水带走,可以避免激光对产品切割道周围的热损伤及灼烧,从而使得切割道清。Water-guided laser focuses the laser and then introduces it into the micro-water column. Using the principle of total reflection at the interface between the micro-water column and the air, the laser will be transmitted along the water column, and the product to be processed will be processed within the range where the water column remains stable, so that The heat generated by the accumulation and conduction of laser energy is taken away by water, which can avoid thermal damage and burning of the laser around the cutting path of the product, thus making the cutting path clear.
经查阅文献得知,对于现有的大部分水导激光切割机用水导激光精密切割头在使用的过程中,基本上满足了精密仪器进行加工操作的高效性,但是对于水导激光精密切割头在使用的过程中,通常需要对水导激光精密切割头内侧的晶片进行定时的更换,现有大部分晶片放置框在与水导激光精密切割头对接时通常采用多点位螺栓固定,进而当操作者对晶片更换时就需要操作者借助工具对螺栓拆卸和固定,这样的方式不但存在操作时繁琐复杂,并且也在一定程度上降低了晶片更换的效率,进而降低水导激光精密切割头使用的效率等问题。After consulting the literature, it is known that for most of the existing water-guided laser cutting machines, the water-guided laser precision cutting head basically meets the efficiency of precision instrument processing operations during use. However, for the water-guided laser precision cutting head During use, it is usually necessary to regularly replace the wafer inside the water-guided laser precision cutting head. Most of the existing chip placement frames are usually fixed with multi-point bolts when docking with the water-guided laser precision cutting head. When the operator replaces the wafer, the operator needs to use tools to disassemble and fix the bolts. This method is not only cumbersome and complicated to operate, but also reduces the efficiency of wafer replacement to a certain extent, thereby reducing the use of water-guided laser precision cutting heads. issues such as efficiency.
发明内容Contents of the invention
本发明的目的在于至少解决现有技术中存在的技术问题之一,提供一种水导激光精密切割头,能够解决晶片放置框在与水导激光精密切割头对接时 通常采用多点位螺栓固定,进而当操作者对晶片更换时就需要操作者借助工具对螺栓拆卸和固定,这样的方式不但存在操作时繁琐复杂,并且也在一定程度上降低了晶片更换的效率,进而降低水导激光精密切割头使用的效率的问题。The purpose of the present invention is to at least solve one of the technical problems existing in the prior art, and provide a water-guided laser precision cutting head that can solve the problem when the wafer placement frame is docked with the water-guided laser precision cutting head. Multi-point bolts are usually used for fixation, and when the operator replaces the wafer, the operator needs to use tools to disassemble and fix the bolts. This method is not only cumbersome and complicated in operation, but also reduces the efficiency of wafer replacement to a certain extent. , thereby reducing the efficiency of the water-guided laser precision cutting head.
为实现上述目的,本发明提供如下技术方案:一种水导激光精密切割头,包括水导激光精密切割头,所述水导激光精密切割头的表面开设有放置槽,放置槽的内壁滑动连接有对接板,对接板的内侧开设有卡槽,卡槽的内壁滑动连接有固定板,固定板的表面滑动套接有第二弹簧,第二弹簧的两端分别固定连接在固定板的表面和卡槽的内壁,水导激光精密切割头的内侧开设有固定槽,固定板的表面滑动卡接在固定槽的内壁,固定板的表面转动连接有滚球,对接板的内侧转动连接有调节柱。In order to achieve the above object, the present invention provides the following technical solution: a water-guided laser precision cutting head, including a water-guided laser precision cutting head. The surface of the water-guided laser precision cutting head is provided with a placement groove, and the inner wall of the placement groove is slidingly connected. There is a docking plate, and a slot is provided on the inside of the docking plate. A fixed plate is slidably connected to the inner wall of the slot. A second spring is slidably connected to the surface of the fixed plate. Both ends of the second spring are fixedly connected to the surface of the fixed plate and the fixed plate. There is a fixing groove on the inner wall of the slot, and the inside of the water-guided laser precision cutting head. The surface of the fixing plate is slidingly connected to the inner wall of the fixing slot. The surface of the fixing plate is connected with a rolling ball, and the inner side of the docking plate is connected with an adjusting column. .
优选的,所述对接板的表面固定连接有放置框,放置框内侧的形状为凹字状。Preferably, a placement frame is fixedly connected to the surface of the docking plate, and the shape of the inside of the placement frame is a concave shape.
优选的,所述放置框的内侧设置有晶片,放置框的内侧滑动连接有定位环,定位环位于晶片的上侧。Preferably, a wafer is arranged inside the placement frame, and a positioning ring is slidably connected to the inside of the placement frame, and the positioning ring is located on the upper side of the wafer.
优选的,所述定位环的表面固定连接有定位板,定位板的表面开设有滑槽,滑槽的内壁滑动连接有卡板,卡板的表面固定连接有第一弹簧,第一弹簧远离卡板的一端固定连接在滑槽的内壁。Preferably, a positioning plate is fixedly connected to the surface of the positioning ring, a chute is provided on the surface of the positioning plate, a clamping plate is slidingly connected to the inner wall of the chute, a first spring is fixedly connected to the surface of the clamping plate, and the first spring is away from the clamping plate. One end of the plate is fixedly connected to the inner wall of the chute.
优选的,所述放置框的表面开设有对接槽,对接槽的形状为L状。Preferably, a docking groove is provided on the surface of the placement frame, and the docking groove is L-shaped.
优选的,所述定位板的表面滑动连接在对接槽的内壁,放置框的内侧开设有卡槽,卡板的表面滑动卡接在卡槽的内壁。Preferably, the surface of the positioning plate is slidingly connected to the inner wall of the docking groove, a clamping slot is provided on the inside of the placement frame, and the surface of the clamping plate is slidably connected to the inner wall of the clamping slot.
优选的,所述调节柱的形状为弧形状。Preferably, the shape of the adjusting post is an arc shape.
优选的,所述调节柱的表面固定套接有扭力弹簧,扭力弹簧的表面固定连接在对接板的内侧。Preferably, the surface of the adjustment column is fixedly sleeved with a torsion spring, and the surface of the torsion spring is fixedly connected to the inside of the docking plate.
与现有技术相比,本发明的有益效果是: Compared with the prior art, the beneficial effects of the present invention are:
(1)、该水导激光精密切割头,通过操作者释放调节柱,则调节柱通过被扭转扭力弹簧的扭力带动复位下,调节柱则将凹槽内的滚球推动至弧面,进而固定板则被调节柱推动在对接板的内侧滑出进入固定槽的内壁,这样的方式改善了传统晶片更换前后需要操作者对对接板上的螺栓进行多点位拆卸和固定的繁琐性,进而通过该装置将水导激光精密切割头与对接板对接下,不但简化了对接板与水导激光精密切割头之间进行分离和对接的操作方式,也大大的提高了对接板与水导激光精密切割头之间进行拆卸和固定的操作效率,进而保障了水导激光精密切割头上的晶片进行更换使用的加工效率。(1) For this water-guided laser precision cutting head, when the operator releases the adjusting column, the adjusting column is driven to reset by the torsion force of the torsion spring, and the adjusting column pushes the rolling ball in the groove to the arc surface and then fixes it. The plate is pushed by the adjusting column and slides out from the inside of the docking plate into the inner wall of the fixing groove. This method improves the tediousness of traditional chip replacement, which requires the operator to disassemble and fix the bolts on the docking plate at multiple points. This device connects the water-guided laser precision cutting head to the docking plate, which not only simplifies the separation and docking operations between the docking plate and the water-guided laser precision cutting head, but also greatly improves the efficiency of the docking plate and the water-guided laser precision cutting head. The operational efficiency of disassembling and fixing the heads ensures the processing efficiency of replacing the wafers on the water-guided laser precision cutting head.
(2)、该水导激光精密切割头,通过定位环带动定位板进入对接槽的内壁时,此时放置框则挤压卡板进入滑槽的内壁,直至定位环带动定位板在对接槽的内壁旋转至既定位置后,此时卡板则与卡槽吻合,则卡板通过被压缩第一弹簧的弹力性能推动下进入卡槽的内壁,这样的方式则保障了定位环对晶片进行夹持定位时能够形成便捷的固定,进而降低了传统晶片直接放置在放置框的内侧后通过定位环进行放置夹持时,不能快速的对晶片形成夹持稳定的效果,进而提高了晶片在放置框内侧进行夹持放置的稳定性。(2) When the water guide laser precision cutting head drives the positioning plate into the inner wall of the docking groove through the positioning ring, the placing frame will squeeze the clamping plate into the inner wall of the chute until the positioning ring drives the positioning plate to the inner wall of the docking groove. After the inner wall rotates to the predetermined position, the clamping plate matches the slot, and the clamping plate is pushed into the inner wall of the slot by the elasticity of the compressed first spring. This method ensures that the positioning ring clamps the wafer. It can form a convenient fixation during positioning, thereby reducing the difficulty of quickly forming a stable clamping effect on the wafer when the traditional wafer is directly placed inside the placement frame and then clamped through the positioning ring, thus improving the stability of the wafer inside the placement frame. To ensure the stability of clamping placement.
(3)、该水导激光精密切割头,通过利用放置框的凹字状,可以使晶片在放置框的内侧放置时具备良好的限位效果,进而便于定位环对晶片进行定位夹持的便捷性。(3) This water-guided laser precision cutting head, by utilizing the concave shape of the placement frame, can have a good limiting effect when the wafer is placed inside the placement frame, thereby making it convenient for the positioning ring to position and clamp the wafer. sex.
(4)、该水导激光精密切割头,通过定位环上的定位板在对接槽的内壁对接时,此时通过对接槽的L状,可以使定位环通过定位板形成良好的限位效果,进而保障定位环在放置框的内侧进行旋转调节对晶片固定时,利用对接槽的L状可以使定位环与晶片之间进行紧凑的定位夹持。(4) When the water guide laser precision cutting head is docked with the inner wall of the docking groove through the positioning plate on the positioning ring, the L-shape of the docking groove can make the positioning ring pass through the positioning plate to form a good limiting effect. This ensures that when the positioning ring is rotated and adjusted inside the placement frame to fix the wafer, the L-shape of the docking groove can be used to achieve compact positioning and clamping between the positioning ring and the wafer.
(5)、该水导激光精密切割头,通过在固定板的表面上设置一个转动的滚球,进而当调节柱对固定板进行位置调节变化时,可以通过固定板表面滚动的滚球降低固定板与调节柱直接接触造成的摩擦阻力,以及提高固定板与 调节柱进行配合调节时具备流畅的滑动效果。(5) This water-guided laser precision cutting head sets a rotating rolling ball on the surface of the fixed plate. When the adjusting column adjusts the position of the fixed plate, the fixed plate can be lowered by the rolling ball on the surface of the fixed plate. The friction resistance caused by the direct contact between the plate and the adjusting column, and the increase in the distance between the fixed plate and the adjusting column The adjusting column has a smooth sliding effect when adjusting.
附图说明Description of drawings
下面结合附图和实施例对本发明进一步地说明:The present invention will be further described below in conjunction with the accompanying drawings and examples:
图1为本发明一种水导激光精密切割头结构示意图;Figure 1 is a schematic structural diagram of a water-guided laser precision cutting head of the present invention;
图2为本发明放置框结构示意图;Figure 2 is a schematic structural diagram of the placement frame of the present invention;
图3为本发明一种水导激光精密切割头平面结构示意图;Figure 3 is a schematic plan view of a water-guided laser precision cutting head of the present invention;
图4为本发明放置框平面结构示意图;Figure 4 is a schematic structural diagram of the placement frame of the present invention;
图5为本发明调节柱平面结构示意图。Figure 5 is a schematic diagram of the planar structure of the adjusting column of the present invention.
附图标记:1水导激光精密切割头、2放置槽、3对接板、4放置框、5晶片、6定位环、7定位板、8滑槽、9卡板、10第一弹簧、11对接槽、12卡槽、13固定板、14第二弹簧、15固定槽、16滚球、17调节柱、18扭力弹簧。Reference signs: 1 water guide laser precision cutting head, 2 placement slot, 3 docking plate, 4 placement frame, 5 chip, 6 positioning ring, 7 positioning plate, 8 chute, 9 clamping plate, 10 first spring, 11 docking slot, 12 card slot, 13 fixed plate, 14 second spring, 15 fixed slot, 16 rolling ball, 17 adjusting column, 18 torsion spring.
具体实施方式Detailed ways
本部分将详细描述本发明的具体实施例,本发明之较佳实施例在附图中示出,附图的作用在于用图形补充说明书文字部分的描述,使人能够直观地、形象地理解本发明的每个技术特征和整体技术方案,但其不能理解为对本发明保护范围的限制。This section will describe the specific embodiments of the present invention in detail. The preferred embodiments of the present invention are shown in the accompanying drawings. The function of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand the present invention. Each technical feature and overall technical solution of the invention shall not be construed as limiting the scope of protection of the invention.
在本发明的描述中,需要理解的是,涉及到方位描述,例如上、下、前、后、左、右等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or position relationships shown in the drawings and are only In order to facilitate the description of the present invention and simplify the description, it is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as a limitation of the present invention.
在本发明的描述中,大于、小于、超过等理解为不包括本数,以上、以下、以内等理解为包括本数。如果有描述到第一、第二只是用于区分技术特征为目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量或者隐含指明所指示的技术特征的先后关系。 In the description of the present invention, greater than, less than, more than, etc. are understood to exclude the original number, and above, below, within, etc. are understood to include the original number. If there is a description of first and second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the order of indicated technical features. relation.
本发明的描述中,除非另有明确的限定,设置、安装、连接等词语应做广义理解,所属技术领域技术人员可以结合技术方案的具体内容合理确定上述词语在本发明中的具体含义。In the description of the present invention, unless otherwise explicitly limited, words such as setting, installation, and connection should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meaning of the above words in the present invention in combination with the specific content of the technical solution.
请参阅图1-5,本发明提供一种技术方案:一种水导激光精密切割头,包括水导激光精密切割头1,水导激光精密切割头1的表面开设有放置槽2,放置槽2的内壁滑动连接有对接板3,对接板3的表面固定连接有放置框4,放置框4内侧的形状为凹字状,放置框4的内侧设置有晶片5,放置框4的内侧滑动连接有定位环6,定位环6位于晶片5的上侧,定位环6的表面固定连接有定位板7,定位板7的表面开设有滑槽8,滑槽8的内壁滑动连接有卡板9,卡板9的表面固定连接有第一弹簧10,第一弹簧10远离卡板9的一端固定连接在滑槽8的内壁,放置框4的表面开设有对接槽11,对接槽11的形状为L状,定位板7的表面滑动连接在对接槽11的内壁,放置框4的内侧开设有卡槽12,卡板9的表面滑动卡接在卡槽12的内壁,通过利用放置框4的凹字状,可以使晶片5在放置框4的内侧放置时具备良好的限位效果,进而便于定位环6对晶片5进行定位夹持的便捷性。Please refer to Figures 1-5. The present invention provides a technical solution: a water-guided laser precision cutting head, including a water-guided laser precision cutting head 1. The surface of the water-guided laser precision cutting head 1 is provided with a placement groove 2. The placement groove A docking plate 3 is slidably connected to the inner wall of 2, and a placement frame 4 is fixedly connected to the surface of the docking plate 3. The shape of the inside of the placement frame 4 is a concave shape. A chip 5 is provided on the inside of the placement frame 4, and the inside of the placement frame 4 is slidably connected. There is a positioning ring 6. The positioning ring 6 is located on the upper side of the wafer 5. The surface of the positioning ring 6 is fixedly connected with a positioning plate 7. The surface of the positioning plate 7 is provided with a chute 8. The inner wall of the chute 8 is slidingly connected with a clamping plate 9. A first spring 10 is fixedly connected to the surface of the clamping plate 9. One end of the first spring 10 away from the clamping plate 9 is fixedly connected to the inner wall of the chute 8. A docking slot 11 is provided on the surface of the placement frame 4. The docking slot 11 is in the shape of L. shape, the surface of the positioning plate 7 is slidably connected to the inner wall of the docking groove 11, and a slot 12 is provided on the inside of the placing frame 4. The surface of the clamping plate 9 is slidably connected to the inner wall of the slot 12. shape, the wafer 5 can have a good limiting effect when placed inside the placing frame 4, thereby facilitating the convenience of positioning and clamping the wafer 5 by the positioning ring 6.
进一步地,通过定位环6上的定位板7在对接槽11的内壁对接时,此时通过对接槽11的L状,可以使定位环6通过定位板7形成良好的限位效果,进而保障定位环6在放置框4的内侧进行旋转调节对晶片5固定时,利用对接槽11的L状可以使定位环6与晶片5之间进行紧凑的定位夹持。Furthermore, when the positioning plate 7 on the positioning ring 6 is docked with the inner wall of the docking groove 11, the L-shape of the docking groove 11 can make the positioning ring 6 pass through the positioning plate 7 to form a good limiting effect, thereby ensuring the positioning. When the ring 6 is rotated and adjusted inside the placement frame 4 to fix the wafer 5 , the L-shape of the docking groove 11 can be used to achieve compact positioning and clamping between the positioning ring 6 and the wafer 5 .
进一步地,通过定位环6带动定位板7进入对接槽11的内壁时,此时放置框4则挤压卡板9进入滑槽8的内壁,直至定位环6带动定位板7在对接槽11的内壁旋转至既定位置后,此时卡板9则与卡槽12吻合,则卡板9通过被压缩第一弹簧10的弹力性能推动下进入卡槽12的内壁,这样的方式则保障了定位环6对晶片5进行夹持定位时能够形成便捷的固定,进而降低了传统晶片5直接放置在放置框4的内侧后通过定位环6进行放置夹持时,不 能快速的对晶片5形成夹持稳定的效果,进而提高了晶片5在放置框4内侧进行夹持放置的稳定性。Further, when the positioning ring 6 drives the positioning plate 7 into the inner wall of the docking groove 11, the placement frame 4 presses the clamping plate 9 into the inner wall of the chute 8 until the positioning ring 6 drives the positioning plate 7 to enter the inner wall of the docking groove 11. After the inner wall rotates to a predetermined position, the clamping plate 9 matches the clamping slot 12, and the clamping plate 9 is pushed into the inner wall of the clamping slot 12 by the elasticity of the compressed first spring 10. This way ensures the positioning ring. 6. When clamping and positioning the wafer 5, it can form a convenient fixation, thereby reducing the need for traditional wafer 5 to be placed directly inside the placement frame 4 and then placed and clamped through the positioning ring 6. It can quickly form a stable clamping effect on the wafer 5, thereby improving the stability of clamping and placing the wafer 5 inside the placement frame 4.
进一步地,对接板3的内侧开设有卡槽12,卡槽12的内壁滑动连接有固定板13,固定板13的表面滑动套接有第二弹簧14,第二弹簧14的两端分别固定连接在固定板13的表面和卡槽12的内壁,水导激光精密切割头1的内侧开设有固定槽15,固定板13的表面滑动卡接在固定槽15的内壁,固定板13的表面转动连接有滚球16,对接板3的内侧转动连接有调节柱17,调节柱17的形状为弧形状,调节柱17的表面固定套接有扭力弹簧18,扭力弹簧18的表面固定连接在对接板3的内侧,通过操作者对晶片5进行更换时,当操作者控制调节柱17在对接板3的内侧旋转时,此时调节柱17则带动扭力弹簧18进行扭转,此时调节柱17则将表面接触的滚球16通过弧形面进入凹状弧面,此时由于调节柱17对固定板13逐渐不再形成挤压下,进而固定板13则在第二弹簧14被拉伸的拉力带动下进行复位,进而固定板13在固定槽15的内壁滑出,此时通过操作者将对接板3上的放置框4在水导激光精密切割头1的内侧拉出对晶片5更换后,此时再将对接板3和放置框4在放置槽2的内壁对接,进而操作者释放调节柱17,则调节柱17通过被扭转扭力弹簧18的扭力带动复位下,调节柱17则将凹槽内的滚球16推动至弧面,进而固定板13则被调节柱17推动在对接板3的内侧滑出进入固定槽15的内壁,这样的方式改善了传统晶片5更换前后需要操作者对对接板3上的螺栓进行多点位拆卸和固定的繁琐性,进而通过该装置将水导激光精密切割头1与对接板3对接下,不但简化了对接板3与水导激光精密切割头1之间进行分离和对接的操作方式,也大大的提高了对接板3与水导激光精密切割头1之间进行拆卸和固定的操作效率,进而保障了水导激光精密切割头1上的晶片5进行更换使用的加工效率。Further, a slot 12 is provided on the inside of the docking plate 3. The inner wall of the slot 12 is slidably connected to a fixed plate 13. The surface of the fixed plate 13 is slidably sleeved with a second spring 14. Both ends of the second spring 14 are fixedly connected respectively. On the surface of the fixing plate 13 and the inner wall of the slot 12, a fixing slot 15 is provided on the inside of the water-guided laser precision cutting head 1. The surface of the fixing plate 13 is slidably engaged with the inner wall of the fixing slot 15, and the surface of the fixing plate 13 is rotationally connected. There is a rolling ball 16, and an adjusting column 17 is rotatably connected to the inner side of the docking plate 3. The shape of the adjusting column 17 is an arc shape. A torsion spring 18 is fixedly connected to the surface of the adjusting column 17, and the surface of the torsion spring 18 is fixedly connected to the docking plate 3. When the operator replaces the wafer 5, when the operator controls the adjustment column 17 to rotate on the inside of the docking plate 3, the adjustment column 17 drives the torsion spring 18 to twist. At this time, the adjustment column 17 moves the surface The contacting roller ball 16 enters the concave arc surface through the arc surface. At this time, the adjusting column 17 gradually no longer squeezes the fixed plate 13, and the fixed plate 13 is driven by the tension of the second spring 14. Reset, and then the fixing plate 13 slides out from the inner wall of the fixing groove 15. At this time, the operator pulls out the placing frame 4 on the docking plate 3 from the inside of the water-guided laser precision cutting head 1 and replaces the wafer 5. At this time, the wafer 5 is replaced. The docking plate 3 and the placing frame 4 are butted on the inner wall of the placing groove 2, and then the operator releases the adjusting column 17, and the adjusting column 17 is driven to reset by the torsion force of the torsion spring 18, and the adjusting column 17 moves the roller in the groove. The ball 16 is pushed to the arc surface, and then the fixing plate 13 is pushed by the adjusting column 17 and slides out from the inside of the docking plate 3 into the inner wall of the fixing groove 15. This method improves the traditional wafer 5 replacement that requires the operator to adjust the docking plate 3 before and after. The multi-point disassembly and fixation of bolts is cumbersome, and then the water-guided laser precision cutting head 1 and the docking plate 3 are connected through this device, which not only simplifies the separation between the docking plate 3 and the water-guided laser precision cutting head 1 The docking operation method also greatly improves the operating efficiency of disassembly and fixation between the docking plate 3 and the water-guided laser precision cutting head 1, thereby ensuring that the wafer 5 on the water-guided laser precision cutting head 1 can be replaced. Processing efficiency.
进一步地,通过在固定板13的表面上设置一个转动的滚球16,进而当调 节柱17对固定板13进行位置调节变化时,可以通过固定板13表面滚动的滚球16降低固定板13与调节柱17直接接触造成的摩擦阻力,以及提高固定板13与调节柱17进行配合调节时具备流畅的滑动效果。Further, by arranging a rotating rolling ball 16 on the surface of the fixed plate 13, when adjusting When the segment column 17 adjusts the position of the fixed plate 13, the frictional resistance caused by the direct contact between the fixed plate 13 and the adjusting column 17 can be reduced by the rolling ball 16 on the surface of the fixed plate 13, and the cooperation between the fixed plate 13 and the adjusting column 17 can be improved. It has a smooth sliding effect when adjusting.
工作原理:一种水导激光精密切割头,通过定位环6带动定位板7进入对接槽11的内壁时,此时放置框4则挤压卡板9进入滑槽8的内壁,直至定位环6带动定位板7在对接槽11的内壁旋转至既定位置后,此时卡板9则与卡槽12吻合,则卡板9通过被压缩第一弹簧10的弹力性能推动下进入卡槽12的内壁,通过操作者对晶片5进行更换时,当操作者控制调节柱17在对接板3的内侧旋转时,此时调节柱17则带动扭力弹簧18进行扭转,此时调节柱17则将表面接触的滚球16通过弧形面进入凹状弧面,此时由于调节柱17对固定板13逐渐不再形成挤压下,进而固定板13则在第二弹簧14被拉伸的拉力带动下进行复位,进而固定板13在固定槽15的内壁滑出,此时通过操作者将对接板3上的放置框4在水导激光精密切割头1的内侧拉出对晶片5更换后,此时再将对接板3和放置框4在放置槽2的内壁对接,进而操作者释放调节柱17,则调节柱17通过被扭转扭力弹簧18的扭力带动复位下,调节柱17则将凹槽内的滚球16推动至弧面,进而固定板13则被调节柱17推动在对接板3的内侧滑出进入固定槽15的内壁。Working principle: A water-guided laser precision cutting head drives the positioning plate 7 into the inner wall of the docking groove 11 through the positioning ring 6. At this time, the placing frame 4 squeezes the clamping plate 9 into the inner wall of the chute 8 until the positioning ring 6 After the positioning plate 7 is driven to rotate to a predetermined position on the inner wall of the docking groove 11, the clamping plate 9 matches the clamping slot 12, and the clamping plate 9 is pushed into the inner wall of the clamping slot 12 by the elasticity of the compressed first spring 10. When the operator replaces the wafer 5, when the operator controls the adjusting column 17 to rotate inside the docking plate 3, the adjusting column 17 drives the torsion spring 18 to twist. At this time, the adjusting column 17 makes the surface contact The rolling ball 16 enters the concave arc surface through the arc surface. At this time, the adjusting column 17 gradually no longer squeezes the fixed plate 13, and the fixed plate 13 is reset by the tension of the second spring 14. Then the fixing plate 13 slides out from the inner wall of the fixing groove 15. At this time, the operator pulls out the placement frame 4 on the docking plate 3 from the inside of the water-guided laser precision cutting head 1 and replaces the wafer 5, and then docks again. The plate 3 and the placing frame 4 are butted on the inner wall of the placing groove 2, and then the operator releases the adjusting column 17, and the adjusting column 17 is driven to reset by the torsion force of the torsion spring 18, and the adjusting column 17 moves the rolling ball 16 in the groove. Pushed to the arc surface, the fixing plate 13 is pushed by the adjusting column 17 to slide out of the inside of the docking plate 3 and into the inner wall of the fixing groove 15 .
上面结合附图对本发明实施例作了详细说明,但是本发明不限于上述实施例,在所述技术领域普通技术人员所具备的知识范围内,还可以在不脱离本发明宗旨的前提下作出各种变化。 The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the technical field, various modifications can be made without departing from the purpose of the present invention. kind of change.

Claims (8)

  1. 一种水导激光精密切割头,包括水导激光精密切割头(1),其特征在于:所述水导激光精密切割头(1)的表面开设有放置槽(2),放置槽(2)的内壁滑动连接有对接板(3),对接板(3)的内侧开设有卡槽(12),卡槽(12)的内壁滑动连接有固定板(13),固定板(13)的表面滑动套接有第二弹簧(14),第二弹簧(14)的两端分别固定连接在固定板(13)的表面和卡槽(12)的内壁,水导激光精密切割头(1)的内侧开设有固定槽(15),固定板(13)的表面滑动卡接在固定槽(15)的内壁,固定板(13)的表面转动连接有滚球(16),对接板(3)的内侧转动连接有调节柱(17)。A water-guided laser precision cutting head, including a water-guided laser precision cutting head (1), characterized in that: the surface of the water-guided laser precision cutting head (1) is provided with a placement groove (2), and the placement groove (2) A docking plate (3) is slidably connected to the inner wall of the docking plate (3), a slot (12) is provided on the inside of the docking plate (3), a fixing plate (13) is slidably connected to the inner wall of the slot (12), and the surface of the fixing plate (13) slides A second spring (14) is sleeved, and both ends of the second spring (14) are fixedly connected to the surface of the fixing plate (13) and the inner wall of the slot (12), and the inner side of the water-guided laser precision cutting head (1) A fixing slot (15) is provided, and the surface of the fixing plate (13) is slidably engaged with the inner wall of the fixing slot (15). A rolling ball (16) is rotatably connected to the surface of the fixing plate (13), and the inner side of the docking plate (3) An adjusting column (17) is rotatably connected.
  2. 根据权利要求1所述的一种水导激光精密切割头,其特征在于:所述对接板(3)的表面固定连接有放置框(4),放置框(4)内侧的形状为凹字状。A water-guided laser precision cutting head according to claim 1, characterized in that: a placement frame (4) is fixedly connected to the surface of the docking plate (3), and the shape of the inside of the placement frame (4) is a concave shape. .
  3. 根据权利要求2所述的一种水导激光精密切割头,其特征在于:所述放置框(4)的内侧设置有晶片(5),放置框(4)的内侧滑动连接有定位环(6),定位环(6)位于晶片(5)的上侧。A water-guided laser precision cutting head according to claim 2, characterized in that: a wafer (5) is provided inside the placement frame (4), and a positioning ring (6) is slidably connected to the inside of the placement frame (4). ), the positioning ring (6) is located on the upper side of the wafer (5).
  4. 根据权利要求3所述的一种水导激光精密切割头,其特征在于:所述定位环(6)的表面固定连接有定位板(7),定位板(7)的表面开设有滑槽(8),滑槽(8)的内壁滑动连接有卡板(9),卡板(9)的表面固定连接有第一弹簧(10),第一弹簧(10)远离卡板(9)的一端固定连接在滑槽(8)的内壁。A water-guided laser precision cutting head according to claim 3, characterized in that: a positioning plate (7) is fixedly connected to the surface of the positioning ring (6), and a chute (7) is provided on the surface of the positioning plate (7). 8), the inner wall of the chute (8) is slidingly connected with a clamping plate (9), the surface of the clamping plate (9) is fixedly connected with a first spring (10), and the first spring (10) is away from one end of the clamping plate (9) Fixedly connected to the inner wall of the chute (8).
  5. 根据权利要求3所述的一种水导激光精密切割头,其特征在于:所述放置框(4)的表面开设有对接槽(11),对接槽(11)的形状为L状。A water-guided laser precision cutting head according to claim 3, characterized in that: a docking groove (11) is provided on the surface of the placement frame (4), and the docking groove (11) is L-shaped.
  6. 根据权利要求5所述的一种水导激光精密切割头,其特征在于:所述定位板(7)的表面滑动连接在对接槽(11)的内壁,放置框(4)的内侧开设有卡槽(12),卡板(9)的表面滑动卡接在卡槽(12)的内壁。A water-guided laser precision cutting head according to claim 5, characterized in that: the surface of the positioning plate (7) is slidingly connected to the inner wall of the docking groove (11), and a clamp is provided on the inside of the placement frame (4). slot (12), and the surface of the clamping plate (9) is slidably clamped on the inner wall of the clamping slot (12).
  7. 根据权利要求1所述的一种水导激光精密切割头,其特征在于:所述 调节柱(17)的形状为弧形状。A water guide laser precision cutting head according to claim 1, characterized in that: The shape of the adjusting column (17) is an arc shape.
  8. 根据权利要求7所述的一种水导激光精密切割头,其特征在于:所述调节柱(17)的表面固定套接有扭力弹簧(18),扭力弹簧(18)的表面固定连接在对接板(3)的内侧。 A water-guiding laser precision cutting head according to claim 7, characterized in that: the surface of the adjustment column (17) is fixedly connected to a torsion spring (18), and the surface of the torsion spring (18) is fixedly connected to the butt joint. inside of plate (3).
PCT/CN2023/082880 2022-07-18 2023-03-21 Precision water jet guided laser cutter head WO2024016701A1 (en)

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CN115213571A (en) * 2022-07-18 2022-10-21 济南金威刻科技发展有限公司 Water-conducting laser precision cutting head

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JP2001071163A (en) * 1999-09-08 2001-03-21 Shibaura Mechatronics Corp Laser beam machine
JP2009061486A (en) * 2007-09-07 2009-03-26 Uht Corp Laser beam machining apparatus
CN111975221A (en) * 2020-08-24 2020-11-24 东莞颠覆产品设计有限公司 Water-guiding laser processing device suitable for amorphous alloy parts
CN214641076U (en) * 2021-01-11 2021-11-09 莱州市鲁屹激光设备有限公司 Laser cutting head convenient to dismantle
CN113634921A (en) * 2021-09-23 2021-11-12 山东理工大学 High-power air explosion-free water-guide laser water-light coupling alignment cutting head with multi-focus focusing lens
CN115213571A (en) * 2022-07-18 2022-10-21 济南金威刻科技发展有限公司 Water-conducting laser precision cutting head

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