WO2023284894A1 - 超长放电管负高压激光器 - Google Patents

超长放电管负高压激光器 Download PDF

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WO2023284894A1
WO2023284894A1 PCT/CN2022/115391 CN2022115391W WO2023284894A1 WO 2023284894 A1 WO2023284894 A1 WO 2023284894A1 CN 2022115391 W CN2022115391 W CN 2022115391W WO 2023284894 A1 WO2023284894 A1 WO 2023284894A1
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tube
discharge tube
gas storage
pipe
water
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French (fr)
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殷卫援
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成都微深科技有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms

Definitions

  • the utility model relates to the structural improvement of a carbon dioxide laser, in particular to a negative high-voltage small-sized ultra-long discharge tube negative high-voltage laser with higher power through structural improvement.
  • Existing small-scale sealed carbon dioxide lasers are usually composed of gas storage tubes, discharge tubes, water-cooled tubes, electrodes, and resonant cavity mirrors.
  • the two ends of the discharge tube are respectively provided with cavities for placing electrodes, that is, an anode chamber and a cathode chamber.
  • the usual sealed-off carbon dioxide laser will be connected with a helical gas return pipe in the anode chamber.
  • Chinese invention patent application CN111934172A discloses a slab-type carbon dioxide glass tube laser, which includes a core discharge cavity, and the core discharge cavity is sequentially covered by an inner glass tube and an outer glass tube, and the inner glass tube
  • the two ends of the tube are respectively provided with a positive discharge electrode and a negative discharge electrode
  • the two ends of the inner glass tube are respectively provided with a gas return disc and a fixed disc near the positive discharge electrode and the negative discharge electrode; in the case of no increase in length Under this condition, the discharge volume is increased, the working gas pressure is high, and the saturated light intensity is higher.
  • the carbon dioxide laser with this structure is quite different from the traditional structure, and requires a large adjustment in the production and processing process.
  • This utility model is to provide a super-long discharge tube negative high-voltage laser with a structure similar to that of the traditional sealed carbon dioxide laser, which can increase the output power without increasing the overall length of the laser.
  • a negative high-voltage laser with an ultra-long discharge tube which includes,
  • the gas storage pipe, the two ends of the gas storage pipe are respectively provided with reflectors and light-emitting surfaces;
  • a water-cooled tube which is located inside the gas storage tube;
  • a discharge tube which is located inside the water-cooled tube, electrodes are respectively arranged at both ends of the discharge tube, and the electrodes are connected to the outside of the gas storage tube through a lead wire, and a space for liquid circulation is formed between the discharge tube and the water-cooled tube,
  • the water-cooled pipe is connected to the outside of the gas storage pipe through a water inlet pipe and a water outlet pipe, and is characterized in that:
  • the cathode in the electrode is installed in the cathode chamber located at the end of the discharge tube close to the reflector, and the cathode chamber is connected with a spiral air return pipe; the anode is sleeved outside the water-cooled tube at the other end of the discharge tube.
  • the ultra-long discharge tube in this patent means that compared with the discharge tube in the existing carbon dioxide laser, the length of the discharge tube can be made longer without increasing the overall length of the gas storage tube, making full use of the gas storage tube. length.
  • the above technical solution can make the discharge tube longer without increasing the size of the laser, that is, the power of the laser is increased. Specifically, the difference between it and the existing carbon dioxide laser will be explained.
  • the gas return pipe is connected to the anode side, so a corresponding anode chamber needs to be provided for connecting the gas return pipe to the side wall of the anode chamber.
  • the cathode must be installed in the cathode chamber in the tube due to its characteristics, and must maintain a certain length along the axial direction of the discharge tube, and keep a certain distance from the end of the gas storage tube.
  • the technology of this utility model moves the air return pipe to the side of the cathode electrode, utilizes the length of the cathode chamber, and wraps the anode outside the water-cooled tube at the other end, replacing the original anode chamber , can fully extend the length of the discharge tube.
  • both ends of the gas storage tube have reduced-diameter pipe sections, and the end of the discharge tube at the anode end extends into the reduced-diameter pipe sections.
  • the cathode is used to connect to the negative high voltage terminal of the power supply.
  • the end of the cathode chamber is connected to the inner wall of the gas storage pipe, and the pipe section where the anode is located directly communicates with the inside of the gas storage pipe.
  • the distance between the outlet of the discharge tube at the anode end and the light-emitting surface is between 5 mm and 20 mm.
  • the utility model has the beneficial effect: the electrode chamber of the cathode is fully utilized, and the length of the anode chamber at the other end is eliminated, thereby allowing a longer length of the discharge tube without increasing the external size of the laser , increasing the power of the laser.
  • the entire length of the original anode chamber is used as the length of the discharge tube, and because the anode chamber is canceled, the pipe diameter of this section is reduced, and it can extend to the end of the gas storage pipe.
  • the length of the discharge tube can be further increased.
  • Fig. 1 is the schematic diagram of the utility model embodiment 1;
  • Fig. 2 is the partially enlarged view of cathode chamber in the utility model embodiment
  • Fig. 3 is a partially enlarged cross-sectional view of the anode part in the embodiment of the present invention.
  • a negative high-voltage ultra-long discharge tube carbon dioxide laser as shown in Figure 1, the laser includes a gas storage tube 101, usually the gas storage tube 101 is made of glass, and its two ends are respectively provided with a reflector 103 and a light output surface 111.
  • a water-cooling tube 108 is arranged in the gas storage tube 101 , and a discharge tube 107 is arranged in the water-cooling tube 108 .
  • the gap between the outer wall of the discharge tube 107 and the inner wall of the water-cooling tube 108 constitutes a flow space for cooling water.
  • the water cooling pipe 108 is connected to the outside of the gas storage pipe 101 through a water inlet pipe 112 and a water outlet pipe 105 .
  • both the water-cooling tube 108 and the discharge tube 107 are made of glass, and the length and diameter of the water-cooling tube 108 are compatible with the discharge tube.
  • the above structures are similar to existing lasers, and can be adjusted by those skilled in the art according to the specific parameters of the laser.
  • a cathode chamber 1041 is provided at the end of the discharge tube 107 close to the end of the reflector 111.
  • the diameter of the cathode chamber 1041 is slightly larger than that of the discharge tube 107.
  • the end of the cathode chamber 1041 is in contact with the storage tank.
  • the inner wall of the gas pipe 101 is connected, and the side wall of the cathode chamber 1041 is provided with a pipeline 1061 communicating with the spiral air return pipe 106 , and the pipeline 1061 is staggered with the water outlet pipe 105 .
  • the gas in the discharge tube 107 enters the gas storage tube 101 through the cathode chamber 1041 and the gas return tube 106 .
  • a cathode 104 is arranged in the cathode chamber 1041 , and the cathode 104 is connected to the negative high-voltage end of the power supply outside the gas storage tube 101 through a wire 102 .
  • an anode 109 is provided at the end of the discharge tube 107 near the end of the light-emitting surface 111. The high-voltage end of the power supply outside the air pipe 101.
  • the gas mixture in the discharge tube 107 is excited by the impact of electrons, energy level transition occurs and the particle beam reverses to emit laser light.
  • the length of the discharge tube 107 is proportional to the output power, that is, the distance between the two electrodes. Within a certain length range, the output power per meter length of the discharge tube increases with the total length.
  • the purpose of adding the water cooling pipe 108 is to cool the working gas and stabilize the output power.
  • the discharge tube 107 is connected to the gas storage tube 101 at both ends, that is, one end of the gas storage tube 101 has a small hole to communicate with the discharge tube 107, and the other end communicates with the discharge tube through the spiral air return tube 106, so that the gas can flow in the discharge tube 107.
  • the gas in the discharge tube 107 is exchanged at any time. Since the connection between the gas return pipe 106 and the cathode chamber 1041 requires a certain space (access space for the gas return pipe), the connection requires an electrode chamber and a certain length.
  • the cathode 104 will sputter during operation, that is, the cathode 104 needs to be placed in the cathode chamber 1041, and has a certain length, which is used to generate electricity from the gas flowing out of the discharge tube under the working state. sputtering. If the gas return pipe is set on the anode side, both sides need a certain length of electrode chambers (anode chamber and cathode chamber), so that the length of the discharge tube (the length between the two electrodes) is limited, which limits further increase the power of the laser.
  • the discharge tube 107 can be increased accordingly, and the power of the laser can be increased.
  • the radial dimension of the anode segment becomes smaller, that is, the segment can be extended into the storage tank.
  • the diameter of the trachea gradually decreases in the gradient section.
  • the distance between the outlet of the discharge tube at the anode end and the reflector may be between 5mm and 20mm (for example, 5mm or 8mm).

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

一种超长放电管负高压激光器，包括储气管（101），储气管（101）的两端部的位置分别设置有反射镜（103）和出光面（111）；水冷管（108），其位于储气管（101）内部；放电管（107），其位于水冷管（108）内侧，放电管（107）两端分别设置有电极，电极通过引线连接至储气管（101）外部，放电管（107）和水冷管（108）之间形成液体流通的空间，水冷管（108）通过入水管（112）和出水管（105）连接至储气管（101）外部。电极中的阴极（104）安装在位于放电管（107）靠近反射镜（103）一端的阴极室（1041）内，阴极室（1041）上连通有螺旋状的回气管（106）；阳极（109）套在放电管（107）的另一端的水冷管（108）外侧。这种超长放电管负高压激光器能够在有限的长度下提高其功率。

Description

超长放电管负高压激光器 技术领域
本实用新型涉及二氧化碳激光器的结构改进，更具体的是涉及一种通过结构改进具有更高功率的负高压小型超长放电管负高压激光器。
背景技术
现有的小型封离式二氧化碳激光器通常由储气管、放电管、水冷管、电极和谐振腔镜等组成。在放电管的两端分别设置有放置有电极的空腔，即阳极室和阴极室。通常的封离式二氧化碳激光器会在阳极室连接有螺旋结构的回气管。
类似的结构在中国实用新型专利89215596.5，中国实用新型专利201420436154.0和中国实用新型专利201922497384.3均有公开。这种结构的封离式二氧化碳激光管为了提高输出功率，通常是采用增加放电管长度的方法，即增加了激光器的总长，也增加了激光器的生产、运输和安装使用成本。
为了解决这一问题，中国发明专利申请CN111934172A中公开了一种板条式二氧化碳玻璃管激光器，包括核心放电腔，所述核心放电腔依次被内玻璃管和外玻璃管包覆，所述内玻璃管的两端分别设有正极放电电极和负极放电电极，所述内玻璃管的两端靠近正极放电电极和负极放电电极处分别设有回气圆盘与固定圆盘；在长度没有增加的情况下，增加了放电体积，工作气体气压高，获得饱和光强更高。该结构的二氧化碳激光器与传统的结构区别较大，需要对生产加工过程做较大的调整。
实用新型内容
本实用新型的目的在于针对现有技术的不足，提供一种与传统封离式二氧化碳激光器结构类似，能够在不增加激光器整体长度的前提下，提高输出功率的超长放电管负高压激光器。
为了实现上述实用新型目的，本实用新型提供了以下技术方案：
一种超长放电管负高压激光器，其包括，
储气管，储气管的两端部的位置分别设置有反射镜和出光面；
水冷管，其位于所述放储气管内部；
放电管，其位于所述水冷管内侧，所述放电管两端分别设置有电极，所述电极通过引线连接至储气管外部，所述放电管和所述水冷管之间形成液体流通的空间，所述水冷管通过入水管和出水管连接至所述储气管外部，其特征在于：
电极中的阴极安装在位于放电管靠近反射镜一端的阴极室内，阴极室上连通有螺旋状的回气管；阳极套在放电管另一端的水冷管外侧。
本专利中的超长放电管是指的与现有二氧化碳激光器中的放电管相比，在不增加储气管整体长度的情况下，放电管的长度可以做得更长，充分利用了储气管的长度。
由于阳极外套在水冷管外侧，不再占用管内长度，上述技术方案能够在不增加激光器尺寸的情况下，放电管可以做得更长，即提高了激光器的功率。具体而言，将结合其与 现有的二氧化碳激光器区别进行说明。
在现有的二氧化碳激光器中，其回气管连接于阳极一侧，因此需要设置有相应的阳极室，用于将回气管连接于阳极室侧壁。而阴极由于其特性必须安装在管内的阴极室内，而且必须保持一定的沿放电管轴向的长度，与储气管的端部保持一定距离。
而本实用新型的技术与现有的二氧化碳激光器相比，将回气管移到了阴电极一侧，利用了阴极室长度，并且将阳极外套在另一端的水冷管外侧，取代了原有的阳极室，可以充分延长放电管的长度。
本实用新型的一些优选技术方案如下：
优选地，所述储气管的两端有直径缩小的管段，在所述阳极端的放电管端部延伸进入所述直径缩小的管段内。
优选地，所述阴极用于连接电源的负高压端。
优选地，阴极室的端部与储气管内壁连接，阳极所处管段直接与储气管内部连通。
优选地，所述阳极端的放电管管口距离出光面的距离是5mm至20mm之间。
与现有技术相比，本实用新型的有益效果：充分利用了阴极的电极室，免去了另一端的阳极室长度，从而允许更长的放电管长度，在不增加激光器外部尺寸的情况下，提高了激光器的功率。在部分实施例中，由于做到了无阳极室，将原有阳极室的长度全部作为放电管长度，并且由于取消了阳极室，该段管径减小，可以延伸至储气管的端部，也可以进一步增加放电管的长度。
附图说明：
图1是本实用新型实施例1的示意图；
图2是本实用新型实施例中阴极室的局部放大视图；
图3是本实用新型实施例中阳极部分的局部放大剖视图；
附图标识含义如下，101-储气管，102-导向，103-反射镜，104-阴极，1041-阴极室，105-出水管，106-回气管，1061-管路，107-放电管，108-水冷管，109-阳极，110-导线，111-出光面。
具体实施方式
下面结合试验例及具体实施方式对本实用新型作进一步的详细描述。但不应将此理解为本实用新型上述主题的范围仅限于以下的实施例，凡基于本实用新型内容所实现的技术均属于本实用新型的范围。
实施例1
一种负高压超长放电管二氧化碳激光器，如图1所示，所述激光器包括储气管101，通常储气管101是由玻璃制成，其两端分别设置有反射镜103和出光面111。在储气管101内设置有水冷管108，水冷管108内设置有放电管107，放电管107外壁和水冷管108内壁之间的间隙构成冷却水的流动空间。如图1中所示的，所述水冷管108通过入水管112和出水管105连接至所述储气管101外部。在本实施例中水冷管108和放电管107均采用玻璃材质，水冷管108的长度与直径与放电管相适应。以上结构与现有的激光器相类似，本领域技术人员也可以根据激光器的具体参数要求进行调整。
在本实施例中，如图2所示，在放电管107上靠近反射镜111一端的端部设置有阴极 室1041，阴极室1041的直径略大于放电管107，阴极室1041的端部与储气管101的内壁连接，在阴极室1041的侧壁上设有与螺旋状的回气管106连通的管路1061，该管路1061与出水管105错开。放电管107内的气体经由阴极室1041、回气管106进入储气管101。阴极室1041内设置有阴极104，阴极104通过导线102连接至储气管101外的电源负高压端。如图3所示，在放电管107上靠近出光面111的一端的端部设置有阳极109，阳极109套在放电管107靠近出光面111一端的管壁外侧，阳极109通过导线110连接至储气管101外的电源高压端。
在上述激光器通电后，放电管107中的混合气体受到电子的撞击而被激发，发生能级跃迁形成粒子束反转发出激光。通常来说放电管107长度与输出功率成正比，即两个电极之间的距离。在一定的长度范围内，每米放电管长度输出的功率随总长度而增加。加水冷管108的目的是冷却工作气体，使输出功率稳定。放电管107在两端都与储气管101连接，即储气管101的一端有一小孔与放电管107相通，另一端经过螺旋形回气管106与放电管相通，这样就可使气体在放电管107中与储气管101中循环流动，放电管107中的气体随时交换。由于回气管106与阴极室1041连接处需要一定的空间(回气管的接入空间)，所以该连接处需要电极室和一定的长度。进一步的，在负高压状态下，阴极104会在工作时发生溅射，即阴极104需要放置在阴极室1041内，并具有一定的长度，用于在工作状态下与放电管中流出的气体发生溅射。如果回气管设置在阳极一侧，则两侧均需要一定长度的电极室(阳极室和阴极室)，这样留给放电管(两电极之间的长度)的长度受限，即限制了进一步增加激光器的功率。
在本实施例中，由于将回气管106放置在具有阴极室的阴极一侧，而阳极109侧则可以不再设置相应的阳极室，相应的可以增长放电管107，也就提高了激光器的功率。
如图1所示的，本实施例的一种优选方案，由于阳极去除了阳极室，回气管也不再连接于阳极，导致阳极段的径向尺寸变小，即可以将该段延长进入储气管的直径逐渐缩小的渐变段，这样在储气管长度一定的情况下，充分利用了储气管的长度，延长了放电管的长度，即提高了激光器的功率。在部分优选的实施例中，所述阳极端的放电管管口距离反射镜的距离可以是5mm至20mm之间(例如，5mm或者8mm)。这样的配置可以尽量利用储气管的长度，在不增加整个激光器外部长度的前提下，提高了激光器的功率。

Claims (5)

  1. 一种超长放电管负高压激光器，其包括，
    储气管，储气管的两端部的位置分别设置有反射镜和出光面；
    水冷管，其位于所述储气管内部；
    放电管，其位于所述水冷管内侧，所述放电管两端分别设置有电极，所述电极通过引线连接至储气管外部，所述放电管和所述水冷管之间形成液体流通的空间，所述水冷管通过入水管和出水管连接至所述储气管外部，其特征在于：
    电极中的阴极安装在位于放电管靠近反射镜一端的阴极室内，阴极室上连通有螺旋状的回气管；阳极套在放电管另一端的水冷管外侧。
  2. 根据权利要求1所述的超长放电管负高压激光器，其特征在于：所述储气管的两端有直径缩小的管段，在所述阳极端的放电管端部延伸进入所述直径缩小的管段内。
  3. 根据权利要求1所述的超长放电管负高压激光器，其特征在于：所述阴极用于连接电源的负高压端。
  4. 根据权利要求1所述的超长放电管负高压激光器，其特征在于：阴极室的端部与储气管内壁连接，阳极所处管段直接与储气管内部连通。
  5. 根据权利要求1所述的超长放电管负高压激光器，其特征在于：所述阳极端的放电管管口距离出光面的距离是5mm至20mm之间。
PCT/CN2022/115391 2021-07-15 2022-08-29 超长放电管负高压激光器 WO2023284894A1 (zh)

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