WO2023233889A1

WO2023233889A1 - Measurement apparatus, measurement circuit, and measurement method

Info

Publication number: WO2023233889A1
Application number: PCT/JP2023/016762
Authority: WO
Inventors: 慎吾田丸
Original assignee: 国立研究開発法人産業技術総合研究所
Priority date: 2022-06-02
Filing date: 2023-04-27
Publication date: 2023-12-07

Abstract

This measurement apparatus has: a circuit 100 that, in response to application of a voltage in the form of triangle waves to a one-side-grounded object being measured, outputs an output voltage corresponding to an electric current flowing through the object being measured; and a device 200 that performs a first process for calculating a capacitance component included in the object being measured and a second process for calculating a resistance component included in the object being measured, on the basis of an inclination of a slope in a waveform of the output voltage.

Description

Measuring device, measuring circuit, and measuring method

The present invention relates to a technique for measuring capacitance components and resistance components of an object to be measured.

In the development of electronic devices and circuits, there are many situations where the minute capacitance of a component that is grounded on one side is measured. For example, in voltage torque MRAM (VT (Voltage Torque)-MRAM (Magnetoresistive Random Memory)), the dielectric constant of the tunnel barrier layer is important, so a VT-MRAM test cell is formed on a wafer and this is connected to a parallel plate. Regard it as a capacitor and calculate the dielectric constant from its capacitance. That is, as schematically shown in FIG. 1, it is assumed that a metal layer 30, a dielectric layer 40, and a metal layer 50 are formed between the electrode 10 on the upper surface and the electrode 20 on the lower surface. be able to. Generally, devices formed on a wafer are electrically connected using a high frequency probe, and the coaxial GND side of such a probe is grounded. Furthermore, since the capacitance of a VT-MRAM test cell is approximately several tens to hundreds of fF, it is required to measure the capacitance with an accuracy of several fF or less. Furthermore, the tunnel barrier layer of the VT-MRAM is not a perfect insulator, and a finite tunnel current flows through it. Therefore, in measuring the dielectric constant of VT-MRAM, it is required to measure the capacitance and resistance, that is, the complex impedance, of a single-side grounded device with high precision.

Such measurements are disclosed in

Non-Patent Documents

1 and 2, for example. Non-Patent Document 1 discloses a measurement method using an oscilloscope, the simplest method generally called the IV method. In this method, the current detection method determines the overall accuracy and band. When a series resistor is inserted in a current path and the voltage across it is measured, the voltage applied to the DUT changes due to the interaction between the device under test (DUT) and the resistor. To prevent this, a current transformer is sometimes used, but in that case the frequency characteristics of the transformer become a problem.

On the other hand, Non-Patent Document 2 discloses a measurement method called the Advanced IV method, which is a measurement method in which an option for a grounding device is added to an impedance analyzer. Specifically, by inserting a high-speed, high-precision current-to-voltage conversion amplifier into the ground side of the DUT without using a current transformer, it is possible to measure single-side grounded devices over a wider band and with higher accuracy than the conventional IV method. are doing. However, even in this Advanced IV method, the stray capacitance of the cable connecting the measurement device and the DUT is corrected by calibration, the frequency characteristics of the current detection circuit are corrected by calibration, and the DUT is It is necessary to perform absolute value calibration.

As described above, in these conventional methods, when measuring the capacitance or resistance of an object to be measured that is grounded on one side, it takes time and effort for calibration.

Therefore, according to one aspect, an object of the present invention is to provide a new technique for easily measuring the capacitance and resistance of a device under test that is grounded on one side.

According to one aspect of the present invention, there is provided a circuit that outputs an output voltage corresponding to a current flowing through the device under test in response to application of a triangular wave voltage to the device under test whose one side is grounded; A first process of calculating a capacitance component included in the object to be measured based on the height of the step, and a first process of calculating a resistance component included in the object to be measured based on the slope inclination of the waveform of the output voltage. A measuring device is provided, which includes: a device that performs at least one of the above two processes;

According to another aspect of the present invention, there is provided a probe for applying a triangular wave voltage to an object to be measured whose one side is grounded; A measuring method using a measuring device including a device that includes a circuit that outputs an output voltage according to a current flowing through the device, the device separating the probe connected to the circuit from the object to be measured. A first step of acquiring a first output voltage from the circuit while outputting the triangular wave voltage from the probe, and calculating a background capacitance component based on the height of the step in the waveform of the first output voltage. and a second process of calculating a background resistance component based on the inclination of the slope in the waveform of the first output voltage, and the device includes a probe connected to the circuit. is brought into contact with the object to be measured and the triangular wave voltage is output from the probe, and the second output voltage from the circuit is obtained, and the height of the step in the waveform of the second output voltage and the back A third process of calculating the capacitance component included in the object to be measured based on the ground capacitance component, and a third process of calculating the capacitance component included in the object to be measured based on the slope inclination of the waveform of the second output voltage from the circuit and the background resistance component. The measuring method described above is provided, including the step of performing at least one of the fourth processing of calculating a resistance component contained in the measurement object.

According to another aspect of the present invention, a first terminal for inputting a triangular wave voltage, a second terminal for applying a triangular wave voltage to an object to be measured whose one side is grounded, and A circuit that outputs an output voltage corresponding to the current flowing through the object under test in response to the applied voltage; and a third terminal for outputting to a device that calculates at least one of the values.

According to another aspect of the present invention, the waveform of the output voltage from a circuit that outputs an output voltage corresponding to the current flowing through the object under test in response to application of a triangular wave voltage to the object under test whose one side is grounded. a first process of calculating a capacitance component included in the object to be measured based on the height of the step; and calculating a resistance component included in the object to be measured based on the slope inclination of the waveform of the output voltage. A program for causing a processor to execute at least one of the second processing is provided.

According to one aspect, it becomes possible to easily measure the capacitance and resistance of an object to be measured that is grounded on one side.

FIG. 3 is a diagram illustrating an example of an object to be measured whose one side is grounded. 1 is a diagram showing an example of a system configuration according to an embodiment of the present invention. It is a figure which shows an example of various voltage waveforms. FIG. 3 is a diagram showing an example of an output waveform of a circuit. FIG. 3 is a diagram showing a specific example of the configuration of a circuit. It is a figure showing the flow of a measurement method. FIG. 3 is a diagram for explaining a measurement method. FIG. 3 is a diagram for explaining a measurement method. FIG. 7 is a diagram showing a circuit configuration of a modified example.

Hereinafter, one embodiment of the present invention will be described based on the drawings. Note that the same reference numerals are given to elements that are common among a plurality of drawings, and repeated detailed explanations of the elements will be omitted.

FIG. 2 shows a configuration example of a measuring device according to this embodiment. Referring to FIG. 2, the measuring device according to the present embodiment includes a circuit 100, a digital oscilloscope 200, and a triangular wave generation circuit 300, which are the main components of the present embodiment. The equivalent circuit of the device under test 400 is a complex impedance Z _DUT in which a resistance component Rp due to leakage current and a capacitance component Cp are connected in parallel, one being connected to the circuit 100 and the other being grounded. It is assumed that The device under test 400 is not limited to the VT-MRAM shown in FIG. 1.

The circuit 100 has a terminal A connected to a probe that is brought into contact with the object to be measured 400, a terminal B connected to the triangular wave generation circuit 300, a negative input connected to the terminal A, and a positive input connected to the terminal B. Outputs the difference between the operational amplifier 110 that is input, the resistor _Rf that connects the output C of the operational amplifier 110 and the negative input, and the voltage VB of the triangular wave input from the terminal _B from the voltage _VC of the output C of the operational amplifier 110. and a terminal D connected to a digital oscilloscope 200.

The triangular wave generation circuit 300 outputs a triangular wave voltage _VB having an amplitude A (pp) and a frequency f as shown in FIG. 3A(a), for example. Assuming that the operational amplifier 110 is an ideal operational amplifier, the voltages of the negative and positive inputs are always the same, so the voltage _VB is also applied to the device under test 400, and the current _IZ is applied to the device under test 400. flows. At the output C of the operational amplifier 110, a voltage V _C =GI _Z +V _B is generated, where G (=R _f ) is a proportional constant to the current I _Z. This voltage V _C has a waveform in which GI _Z is superimposed on the triangular wave voltage V _B , as schematically shown in FIG. 3A(b). As described above, although the approximate waveform is a triangular wave, distortion due to a transient response caused by the operational amplifier 110 having finite frequency characteristics is also included near the minimum and maximum points of the voltage. Then, the subtraction circuit 120 outputs the voltage V _C −voltage V _B =(GI _Z +V _B )−V _B =GI _Z as the voltage V _D. As schematically shown in Fig. 3A(c), the voltage _VD increases rapidly at first and then gradually increases, but after the maximum point of the triangular wave (half period 1/(2f)), it suddenly decreases. , and then gradually decreases.

That is, the digital oscilloscope 200 measures and analyzes the waveform as shown in FIG. 3A(c) obtained from the terminal D of the circuit 100, and determines the steps at the timing when the voltage of the triangular wave changes from decreasing to increasing or from increasing to decreasing. The height V _h and the slope inclination dV _D /dt after the transient response converges are measured. Specifically, this will be explained using FIG. 3B, which is an enlarged version of FIG. 3A(c). The period 1/f of the triangular wave is T, the half period is T/2, the slope after the transient response converges in the first half of the triangular wave is a straight line _L1 , and the slope after the transient response converges in the second half of the triangular wave is a straight line _L2 . At this time, from the intersection a (T/2, a) between t=T/2 and straight line L ₁ and the intersection b (T/2, b) between t=T/2 and straight line L ₂ , (a -b) becomes the step height V _h . Note that if the waveform of the voltage _VD is completely symmetrical, the intersection point c (0 or T, c) between t=0 or T and the straight line _L1 , and the intersection point d(0 or T, c) between t=0 or T and the straight line _L2 . Or (cd) obtained from T, d) is also the same as (ab). However, in reality, the waveform of voltage _VD is not completely symmetrical due to minute distortion of the triangular wave and minute nonlinearity of the circuit, so their average {(a-b)+(c-d) }/2 is preferably used as the voltage V _h .

In addition, in the period from t=0 to t=T/2 or from t=T/2 to t=T, the first half is affected by the transient response, but in the second half, the transient response converges. Therefore, the inclination of the slope can be obtained by performing linear fitting on the latter half. As mentioned above, if the waveform of the voltage V _D is completely symmetrical, the slope of L ₁ = the slope of -L ₂ , but if the waveform of the voltage V _D is not completely symmetrical, then , their average {slope of L ₁ − slope of L ₂ }/2 measures the slope slope.

More specifically, the voltage _VD is expressed as follows.

The first term on the right side of this equation represents proportionality, and the second term represents differentiation. Since the triangular wave input to terminal B has frequency f and amplitude A (pp), the step height and slope inclination in the waveform of voltage _VD are given by the following equations.
V _h =4AfR _f Cp (2)

That is, since the height of the step and the slope of the waveform of the voltage _VD depend on Cp and Rp, respectively, these values of the device under test 400 can be calculated independently. As mentioned above, the actual operational amplifier 110 has finite frequency characteristics, and when the slope of the triangular wave _VB changes from positive to negative or from negative to positive, a transient response appears in the voltage _VD . However, even in such a case, after the transient response converges, it converges to the waveform shown by the dotted line in FIG. 2) and (3).

According to this embodiment, there are the following advantages compared to the conventional IV method or the Advanced IV method.
1) In the conventional measurement method, a sine wave is applied to the object under test, the complex amplitude of the current is measured, and the complex impedance of the object under test is determined from there. However, if the distance between the measuring instrument and the object to be measured is large, the complex amplitude, that is, the absolute value and phase of the current, will be influenced by both Cp and Rp due to the cable and the current detection resistor connected in series. Therefore, in order to separate them, it is necessary to calibrate them using a standard device with known impedance. On the other hand, in this embodiment, Cp and Rp appear independently of the step height and slope inclination, respectively. Furthermore, since the magnitudes thereof are all determined by known quantities A, f, and _Rf , there is no need for calibration.
2) In this embodiment, by arranging the circuit 100 near the object under test 400, the influence of the length of the cable can be removed. In that case, since a short cable can be treated as one capacity, zero point correction can be easily performed by measuring and subtracting the capacity in advance. This corresponds to OPEN calibration in conventional equipment, but in conventional equipment, the main body and the object to be measured are separated, the cable has a very large capacity, and the capacity changes due to bending etc. , the accuracy of zero point correction deteriorates.
3) In the Advanced IV method, OPEN, SHORT, and LOAD calibrations are performed to correct all stray capacitances in each part of the device and frequency characteristics of the circuit. Since 50Ω is used for this LOAD, the impedance near this value has relatively good accuracy, but as it deviates from this value, the accuracy deteriorates. On the other hand, in this embodiment, the impedance is determined by comparing _it with the internal resistance R _f , but since this R _f can be a resistor of any value, it is possible to Even the object 400 to be measured can be measured with high accuracy.

Note that a specific configuration example of the circuit 100 shown in FIG. 2 is shown in FIG. The first circuit X, which includes an operational amplifier 110 and _a resistor R _f _, is the same as in FIG. corresponds to That is, terminal B is connected to one end of the first resistor _R1 , and the other end of the first resistor _R1 is connected to one end of the second resistor _R1 and the negative input of the operational amplifier 150. ing. The positive input of the operational amplifier 150 is grounded. Further, the other end of the second resistor _R1 is connected to the output of the operational amplifier 150 and one end of the first resistor _R2 . The other end of this first resistor _R2 is connected to the terminal D and one end of the second resistor _R2 , and the other end of the second resistor _R2 is connected to the output of the operational amplifier 110 and the resistor _Rf. connected to one end of the

Even if terminal A is connected to the probe to shorten the distance between the circuit 100 and the object under test 400 as much as possible, terminal A of the circuit 110 and the probe have finite capacitance and leakage resistance. It is preferable to remove it and measure the capacitance component and resistance component of only the object to be measured 400.

Therefore, in this embodiment, a measurement method as shown in FIG. 5 is adopted. That is, the digital oscilloscope 200 measures the output waveform of the circuit 100 with the probe connected to the terminal A separated from the device under test 400 (DUT) and the probe 500 outputting a triangular wave voltage (step S1). As schematically shown in FIG. 6(a), the probe 500 is not in contact with the object to be measured 400, but is in a separated state. Then, a waveform of the voltage _VD as schematically shown in FIG. 6(b) is obtained. The digital oscilloscope 200 measures the step height V _h0 and slope inclination dV _D0 /dt (after convergence) in such a waveform. Then, the digital oscilloscope 200 determines, from the measurement results in step S1, capacitance components and resistance components other than the object to be measured, that is, background capacitance components Ci and background resistance components of the input terminals of the operational amplifier 110, connectors, wiring, probes, etc. Ri is calculated (step S3).

The basic formula is as described above, but the specific formula is as follows.
V _h0 =4AfR _f Ci (4)

Next, with the probe 500 in contact with the device under test 400 (DUT) and a triangular wave voltage being output from the probe 500, the digital oscilloscope 200 performs a second measurement of the output waveform of the circuit 100 (step S5). As schematically shown in FIG. 7(a), the probe 500 is brought into contact with the object to be measured 400. Then, a waveform of the voltage _VD as schematically shown in FIG. 7(b) is obtained. The digital oscilloscope 200 measures the step height V _h1 and slope inclination dV _D1 /dt (after convergence) in such a waveform. Then, the digital oscilloscope 200 calculates the capacitance component Cp and the resistance component Rp of the device under test 400 (DUT) from the calculation result in step S3 and the second measurement result in step S5 (step S7).

In step S7, Cp and Rp are calculated by substituting known numerical values including Ci and Ri into the following formulas.
V _h1 =4AfR _f (Ci+Cp) (6)

Measuring the capacitance Ci and resistance Ri of the terminal A of the circuit 100 and the probe 500 with the probe 500 floating above the object to be measured 400 using such a measurement method is a 0 (zero) point in a general LCR meter or impedance analyzer. This corresponds to the OPEN correction that determines the However, these measuring instruments require two additional corrections to determine how the two variables, amplitude and phase, change with the complex impedance of the object under test, that is, resistance and capacitance. This is SHORT/LOAD correction. On the other hand, in this embodiment, the resistance Rp and the capacitance Cp of the device under test 400 are separated into the step height and slope inclination of the observed waveform, and the coefficients indicating their dependence also depend on the circuit constants and input signal constants. Since it is uniquely determined, there is no need to perform SHORT/LOAD correction, and only the 0 (zero) point needs to be determined by OPEN correction. That is, the effort required for measurement can be reduced.

[Modified example]
The actual circuit for realizing the functions of circuit 100 described above is not limited to that described above. For example, in order to reduce noise and improve frequency characteristics, the first circuit X in FIG. 5 may be replaced with a circuit as shown in FIG. 8.

Specifically, it includes two

operational amplifiers

610 and 620, two capacitors C ₁ and C ₂ , and three resistors R ₁₁ to R ₁₃ . A positive input of the operational amplifier 610 is connected to a terminal B, and a negative input is connected to a terminal A connected to the object under test 400. The capacitor C ₁ and the resistor R ₁₁ are connected in parallel, one end of which is connected to the negative input of the operational amplifier 610, and the other end connected to the output of the operational amplifier 610. Further, a capacitor C ₂ and a resistor R ₁₂ are also connected in parallel, one end of which is connected to the output of the operational amplifier, and the other end connected to the negative input of the operational amplifier 620. The positive input of operational amplifier 620 is connected to terminal B. One end of a resistor R ₁₃ is further connected to the negative input of the operational amplifier 620 , and the other end of the resistor R ₁₃ is connected to the output of the operational amplifier 620 . Connected to C.

In such a circuit, if C ₁ R ₁₁ =C ₂ R ₁₂ , the frequency characteristics will be flat. In the case of the first circuit X in FIG. 5, if the current flowing to the negative input of the operational amplifier 110 is Iin, the voltage applied to the positive input is Vin, and the output voltage of the operational amplifier 110 is Vout, then Vout= It becomes Vin+ _IinRf . On the other hand, in the circuit _of FIG. 8, Vout=Vin+ _IinR11R13 / _R12 . Therefore, if R _f =R ₁₁ R ₁₃ /R ₁₂ , then both will be functionally equivalent.

In addition to this, a circuit configuration may be adopted to achieve the same function and obtain more preferable characteristics.

Although the embodiments of the present invention have been described above, the present invention is not limited thereto. Various modifications and changes can be made to the present invention within the scope of the present invention as set forth in the claims. As mentioned above, other circuit configurations that achieve the same functionality may be employed. Further, in the device configuration example of FIG. 2, the circuit 100 and the triangular wave generation circuit 300 are shown as separate devices, but in some cases they may be integrated. Additionally, digital oscilloscope 200 may be any other device that performs the measurements and analyzes described above on the output of circuit 100. The digital oscilloscope 200 and other devices having the functions described above include a memory and a microprocessor, and the microprocessor uses the memory to execute a program to implement the functions described above. It may be configured by a dedicated circuit.

The embodiments described above can be summarized as follows.

The measuring device according to the present embodiment includes (A) a circuit that outputs an output voltage according to a current flowing through the object to be measured in response to application of a triangular wave voltage to the object to be measured whose one side is grounded; and (B) The first process calculates the capacitance component included in the DUT based on the height of the step in the output voltage waveform, and the resistance component included in the DUT is calculated based on the slope inclination of the output voltage waveform. and a device that performs at least one of the second processes.

By using such a circuit, it becomes possible to easily measure the capacitance and resistance components of an object under test that is grounded on one side. Note that the height of the step in the output voltage waveform corresponds to the step that occurs at the change point of the voltage increase/decrease in the triangular wave, and the slope corresponds to the slope after the transient response converges due to the change in voltage increase/decrease in the triangular wave. .

Note that the circuit described above outputs a second voltage in which a first voltage proportional to the current flowing through the object under test is superimposed on the triangular wave voltage in response to the application of the triangular wave voltage. and a second circuit that outputs the first voltage as an output voltage by subtracting the triangular wave voltage from the second voltage. By doing so, it is possible to improve the accuracy of measuring the waveform of the output voltage.

In addition, in the above measurement device, when a probe for applying a triangular wave voltage to the object to be measured is connected to the above circuit, the device (b1) separates the probe from the object to be measured. a process of obtaining a first output voltage from the circuit while outputting a triangular wave voltage, and calculating a background capacitance component based on the height of the step in the waveform of the first output voltage; (b2) with the probe in contact with the object to be measured and outputting a triangular wave voltage from the probe; a process of acquiring a second output voltage from the circuit, and calculating a capacitance component included in the device under test based on the step height in the waveform of the second output voltage and the background capacitance component; At least one of a process of calculating a resistance component included in the object to be measured may be performed based on the inclination of the slope in the waveform of the second output voltage and the background resistance component. In this way, the capacitance component and resistance component of the object to be measured can be measured with high precision without stray capacitances such as those of the probe or the like being excluded.

Note that the measurement device described above may include a triangular wave generator that generates a triangular wave voltage.

The measurement method according to the present embodiment includes (A) a probe for applying a triangular wave voltage to an object to be measured whose one side is grounded; and a probe for applying a triangular wave voltage to the object to be measured; A measurement method using a measuring device including a circuit that outputs an output voltage according to a current flowing through the object to be measured, the device separating a probe connected to the circuit from the object to be measured. A first process of acquiring a first output voltage from the circuit while outputting a triangular wave voltage from the probe, and calculating a background capacitance component based on the height of the step in the waveform of the first output voltage. and a second process of calculating a background resistance component based on the slope of the waveform of the first output voltage; (B) the device is connected to the circuit; With the probe in contact with the object to be measured and a triangular wave voltage being output from the probe, the second output voltage from the circuit is obtained, and the height of the step in the second waveform and the background capacitance component are calculated. a third process of calculating the capacitance component included in the object to be measured based on the above, and a resistance component included in the object to be measured based on the slope inclination of the waveform of the second output voltage and the background component. and a step of performing at least one of the fourth processing of calculating .

By doing this, it becomes possible to accurately measure the capacitance and resistance components of the object to be measured, which is grounded on one side, with a simple configuration.

Furthermore, the measurement circuit according to the present embodiment has (A) a first terminal for inputting a triangular wave voltage, and (B) a terminal for applying a triangular wave voltage to an object to be measured whose one side is grounded. (C) a circuit that outputs an output voltage according to the current flowing through the object under test in response to the application of a triangular wave voltage, and (D) an output voltage that analyzes the waveform of the output voltage. and a third terminal for outputting to a device that calculates at least one of a capacitance component and a resistance component of the object to be measured.

Regarding the above-mentioned circuit in the measurement circuit, the first voltage that is proportional to the current flowing through the object to be measured in response to the application of the triangular wave voltage outputs a second voltage that is superimposed on the triangular wave voltage. and a second circuit that outputs the first voltage as an output voltage by subtracting the triangular wave voltage from the second voltage.

The program according to this embodiment provides a processor with a waveform of an output voltage from a circuit that outputs an output voltage corresponding to a current flowing through the device under test in response to application of a triangular wave voltage to the device under test, which is grounded on one side. The first process calculates the capacitance component included in the DUT based on the step height in the step, and the second process calculates the resistance component included in the DUT based on the slope of the output voltage waveform. This is to execute at least one of the following processes.

100 circuits
200 Digital oscilloscope 300 Triangular wave generation circuit 400 DUT 500 Probe

Claims

a circuit that responds to application of a triangular wave voltage to an object to be measured whose one side is grounded and outputs an output voltage corresponding to a current flowing through the object to be measured;
a first process of calculating a capacitance component included in the object to be measured based on the height of a step in the waveform of the output voltage; A measuring device comprising: a second process for calculating a resistance component; and a second process for calculating a resistance component.
The circuit is
a first circuit that outputs a second voltage in which a first voltage proportional to the current flowing through the object to be measured is superimposed on the triangular voltage in response to the application of the triangular wave voltage;
a second circuit that outputs the first voltage as the output voltage by subtracting the triangular wave voltage from the second voltage;
The measuring device according to claim 1, comprising:
A probe for applying the triangular wave voltage to the object to be measured is connected to the circuit,
The device is
Obtain a first output voltage from the circuit while the probe is separated from the object to be measured and the triangular wave voltage is output from the probe, and based on the height of the step in the waveform of the first output voltage. performing at least one of a process of calculating a background capacitance component and a process of calculating a background resistance component based on the slope of the waveform of the first output voltage;
Obtain the second output voltage from the circuit while the probe is in contact with the object to be measured and the triangular wave voltage is output from the probe, and determine the height of the step in the waveform of the second output voltage and A process of calculating a capacitance component included in the device under test based on the background capacitance component, and a process of calculating a capacitance component included in the device under test based on the slope inclination of the waveform of the second output voltage and the background resistance component. performing at least one of the following:
The measuring device according to claim 1 or 2.
The measuring device according to claim 3, further comprising a triangular wave generator that generates the triangular wave voltage.
The measuring device according to claim 1 or 2, further comprising a triangular wave generator that generates the triangular wave voltage.
A probe for applying a triangular wave voltage to a device under test that is grounded on one side, and an output voltage corresponding to the current flowing through the device in response to the application of the triangular wave voltage to the device under test. A measuring method using a measuring device having a device including a circuit for
The device obtains a first output voltage from the circuit while the probe connected to the circuit is separated from the object under test and the triangular wave voltage is output from the probe, and the device obtains the first output voltage from the circuit. A first process of calculating a background capacitance component based on the height of a step in the voltage waveform, and a second process of calculating a background resistance component based on the slope inclination of the first output voltage waveform. a step of performing at least one of the following;
The apparatus obtains a second output voltage from the circuit in a state in which a probe connected to the circuit is brought into contact with the object under test and the probe outputs the triangular wave voltage, and outputs the second output voltage. a third process of calculating a capacitance component included in the object to be measured based on the height of the step in the voltage waveform and the background capacitance component; The measuring method includes the step of performing at least one of a fourth process of calculating a resistance component included in the object to be measured based on a ground resistance component.
a first terminal for inputting a triangular wave voltage;
a second terminal for applying the triangular wave voltage to an object to be measured whose one side is grounded;
a circuit that outputs an output voltage according to the current flowing through the object under test in response to the application of the triangular wave voltage;
a third terminal for outputting the output voltage to a device that analyzes the waveform of the output voltage and calculates at least one of a capacitance component and a resistance component of the object to be measured;
A measurement circuit with
Based on the height of the step in the waveform of the output voltage from a circuit that outputs an output voltage corresponding to the current flowing through the device under test in response to the application of a triangular wave voltage to the device under test, which is grounded on one side, At least one of a first process of calculating a capacitance component included in the object to be measured, and a second process of calculating a resistance component included in the object to be measured based on the slope inclination of the waveform of the output voltage. A program that causes a processor to execute.