WO2023207225A1 - Design method for apparatus for performing live detection on gas on basis of mid-infrared spectrum - Google Patents
Design method for apparatus for performing live detection on gas on basis of mid-infrared spectrum Download PDFInfo
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- 238000002360 preparation method Methods 0.000 claims description 5
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 claims description 4
- 238000001285 laser absorption spectroscopy Methods 0.000 claims description 4
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- 239000011159 matrix material Substances 0.000 claims description 3
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- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/121—Correction signals
- G01N2201/1211—Correction signals for temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/121—Correction signals
- G01N2201/1218—Correction signals for pressure variations
Definitions
- the invention belongs to gas detection technology, and in particular relates to a design method of a device based on mid-infrared spectrum charged gas detection.
- the main methods used in the existing technology include gas chromatography, Fourier transform infrared spectroscopy, carbon nanotube sensor method or gas-mass spectrometry, etc.
- the carbon nanotube sensor method has not been put into practical use and remains in the laboratory theoretical research stage.
- Other methods have good results in laboratory applications due to their high environmental requirements, but they cannot be used for portable electronic detection of fault characteristic components and frequent cylinder collection. Returning the gas in the equipment to the laboratory for testing will cause a low air pressure alarm in the equipment, or even cause the circuit breaker to lock, which is not conducive to the safe operation of the equipment.
- the optical method is the mainstream method for live detection due to its good stability, high sensitivity and strong anti-interference ability; in the mid-infrared region, gas components are It has good absorption peaks.
- mid-infrared spectrum detection methods including laser cavity ring-down (CRDS), laser photoacoustic spectroscopy (PAS) or tunable semiconductor laser absorption spectroscopy (TDLAS) and other mid-infrared laser spectrum detection.
- the technical problem to be solved by this invention is to provide a design method for a device for charged gas detection based on mid-infrared spectrum, so as to solve the problem that gas charged detection devices in the existing technology all rely on their own research plans and do not have a standardized set of charged detection devices.
- Device design plan; the determination of the live detection device requires a lot of manpower and material resources, and it cannot be put into practical application in time and other technical issues.
- a design method for a device for charged gas detection based on mid-infrared spectrum includes:
- Step 1 Determine the absorption characteristics and detection plan of the gas to be detected in the mid-infrared spectrum
- Step 2 Determine the key technologies for mid-infrared spectrum charged detection of the gas to be detected
- Step 3 Preparation and testing of the mid-infrared spectrum charged detection device for the gas to be detected.
- the method for determining the absorption characteristics of the gas to be detected in the mid-infrared spectrum described in step 1 includes:
- Step 1.1 Based on the molecular dynamics theory, analyze the vibration, rotational energy level and distribution of the gas to be tested, and focus on the spectral absorption capacity of the gas to be tested in the 4-8um range in the gas background with a relative molecular weight greater than 100; determine the macromolecular gas background Based on the influence of the absorption spectrum broadening and intensity of the gas molecules to be tested, the molecular infrared absorption spectrum is simulated to obtain a high-precision absorption spectrum with a spectral resolution better than 0.4cm-1;
- Step 1.2 Based on the gas partition function theory, determine the effect of temperature on the infrared absorption spectrum of the gas to be tested, design and complete the temperature and pressure test of the gas to be tested; determine the gas under different temperature and pressure conditions based on Fourier transform infrared spectroscopy technology Absorption spectrum intensity changes and broadening effects.
- the method for determining the detection plan described in step 1 includes:
- Step 1.3 Determine the feasibility, advantages and disadvantages of using laser absorption spectroscopy, photoacoustic spectroscopy, or cavity ring-down infrared spectroscopy to measure the gas to be detected; analyze the absorption spectrum shape, amplitude, wavelength position, and interference wavelength position characteristics of coexisting interferents.
- the mid-infrared optional light source select the appropriate detection wavelength position and corresponding light source based on the luminescence principle, emission spectrum characteristics, output power and electrical modulation characteristics factors; carry out infrared spectroscopy technology to compare and select gases to be detected Test to determine the spectral technology with cost advantages while meeting the same performance indicators.
- step 2 determines the key technologies for mid-infrared spectrum charged detection of the gas to be detected.
- Step 2.1 Select the gas absorption pool material with a material density greater than 2.6g/cm3, a tensile strength greater than 300MPa, an electrical conductivity greater than 30S ⁇ m -1 , a thermal conductivity greater than 200W/(m ⁇ k), and capable of achieving passivation and vulcanization surface treatments.
- Process materials ensure the rigidity of the gas absorption pool, achieve constant temperature control to ensure structural stability, and achieve ppb level anti-adsorption properties;
- Step 2.2 Use optical path design software to design the optical path of the optical gas absorption cell.
- the optical path transmission matrix model of the Gaussian beam simulate the optical path.
- the absorption spectrum intensity of the gas and the determined measurement range make a measurement that meets the measurement optical path requirements.
- Gas pool optical path design carry out optical path optical noise and optical interference simulation analysis, and analyze optical path noise suppression methods to improve the effective light intensity of the gas pool and reduce optical noise.
- step 2 determines the key technologies for mid-infrared spectrum charged detection of the gas to be detected.
- Step 2.3 Analyze the influence of current and voltage drive, heat dissipation factors and environmental temperature parameters on wavelength stability to determine the small signal acquisition amplification and demodulation of the mid-infrared detector; based on the light source waveform function and gas absorption spectrum function, theoretically study the temperature , pressure and concentration influence factors on gas absorbance, providing algorithm basis for temperature and pressure compensation; conduct gas absorption experimental test experiments, and apply chemometrics algorithms based on the measured temperature, pressure and light intensity signal data to propose temperature, pressure Compensation and concentration inversion algorithms.
- the preparation method of the mid-infrared spectrum charged detection device of the gas to be detected includes:
- Step 3.1 Establish a three-dimensional model of the mechanical structure of the optical gas absorption cell through auxiliary design software, conduct simulation analysis of thermal deformation, environmental vibration and pressure-bearing environmental factors through finite element simulation analysis software, and carry out targeted design of air-tight characteristics; Carry out assembly and optical path debugging of the optical gas absorption cell to ensure the sealing of the gas cell and debug the effective optical path of the gas cell; pass in gas with a certain concentration to measure the absorbance, compare with theoretical calculations, and verify the optical path of the absorption cell;
- Step 3.2 Design and manufacture a charged gas detection device based on mid-infrared quantum cascade laser, lock-in amplification technology and long optical path gas absorption cell.
- the method of designing the locked-in amplification technology and the charged gas detection device of the long optical path gas absorption cell as described in step 3.2 is to: design the laser drive circuit, the modulation circuit and the signal acquisition amplification circuit, and use FPGA and embedded systems to achieve high-speed modulation of the laser signal and demodulation to achieve phase-locked amplification of the measurement signal; enhance the absorbance of the gas through the long optical path gas absorption cell; perform more accurate concentration inversion of the measured optical signal through chemometrics algorithms, temperature and pressure compensation; Design a human-computer interaction platform to realize device parameter setting, status monitoring and display of measurement results.
- test methods of the mid-infrared spectrum charged detection device of the gas to be tested include:
- Step 3.3 Perform performance inspection on the calibrated equipment, and test the performance indicators of the entire equipment by passing in standard gases of different concentrations to ensure that the indication error is less than 0.5ppm, the minimum detection limit is less than 1ppm, the repeatability is less than 1%, and The linearity is better than 0.99; carry out adaptability tests for on-site detection of environmental temperature and humidity, and verify the detection performance of the instrument to meet the live detection requirements.
- a scientific and systematic mid-infrared spectrum charged detection device for determining the gas to be detected can be formed, pointing out the research direction for various spectral detection gas component technologies.
- a practical detection device can be formed more quickly .
- a design method for a device based on mid-infrared spectrum charged gas detection including:
- Step 1 Determine the absorption characteristics of the gas to be detected in the mid-infrared spectrum and the specific implementation process of the detection plan is as follows:
- Step 2 Determine the key technologies for charged detection of mid-infrared spectrum of the gas to be detected
- the gas molecules to be detected are highly polar and have strong adsorption properties. It is particularly critical to select appropriate inert materials and surface treatment processes to prepare optical gas absorption cells. Comprehensive evaluation of gas absorption pool materials, select materials with a density greater than 2.6g/cm3, a tensile strength greater than 300MPa, an electrical conductivity greater than 30S ⁇ m -1 , and a thermal conductivity greater than 200W/(m ⁇ k), which can achieve surface passivation and vulcanization. Handling process materials. Ensure the rigidity of the gas absorption pool, achieve constant temperature control to ensure structural stability, and achieve ppb level anti-adsorption properties.
- Step 3 Preparation and testing of the mid-infrared spectrum charged detection device for the gas to be detected.
- auxiliary design software to establish a three-dimensional model of the mechanical structure of the optical gas absorption cell, and combine it with finite element simulation analysis software to simulate and analyze environmental factors such as thermal deformation, environmental vibration, and pressure-bearing capacity, and conduct targeted design of air-tight characteristics.
- finite element simulation analysis software to simulate and analyze environmental factors such as thermal deformation, environmental vibration, and pressure-bearing capacity, and conduct targeted design of air-tight characteristics.
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Abstract
A design method for an apparatus for performing live detection on a gas on the basis of a mid-infrared spectrum. The method comprises: step 1, determining absorption characteristics, in a mid-infrared spectrum, of a gas to be subjected to detection, and a detection scheme; step 2, determining a mid-infrared spectrum live detection key technique for said gas; and step 3, preparing and testing a mid-infrared spectrum live detection apparatus for said gas. The technical problems in the prior art are solved, for example, the exploration of gas live detection apparatuses depending on respective research schemes, there being no standardized design scheme for live detection apparatuses, a large amount of manpower and material resources needing to be consumed to determine the live detection apparatuses, and practical application being unable to be realized in a timely manner.
Description
本发明属于气体检测技术，尤其涉及一种基于中红外光谱带电检测气体的装置的设计方法。The invention belongs to gas detection technology, and in particular relates to a design method of a device based on mid-infrared spectrum charged gas detection.
针对气体检测技术中，现有技术主要采用的方法有气相色谱法、傅里叶红外光谱法、碳纳米管传感器法或气-质联用法等。然而，碳纳米管传感器法实际未实用化，停留在实验室理论研究阶段，其他因方法对环境的要求高在实验室应用效果好，却不能用于便携带电检测故障特征组分，频繁钢瓶采集设备中气体回实验室检测会导致设备气压低告警，甚至造成断路器闭锁，不利于设备安全运行。For gas detection technology, the main methods used in the existing technology include gas chromatography, Fourier transform infrared spectroscopy, carbon nanotube sensor method or gas-mass spectrometry, etc. However, the carbon nanotube sensor method has not been put into practical use and remains in the laboratory theoretical research stage. Other methods have good results in laboratory applications due to their high environmental requirements, but they cannot be used for portable electronic detection of fault characteristic components and frequent cylinder collection. Returning the gas in the equipment to the laboratory for testing will cause a low air pressure alarm in the equipment, or even cause the circuit breaker to lock, which is not conducive to the safe operation of the equipment.
各行业迫切需要在现场带电检测故障特征气体组分，从而指示设备故障，光学方法因其稳定好，灵敏度高，抗干扰能力强，是形成带电检测的主流方法；在中红外区域，对气体组分有很好的吸收峰，然而，中红外光谱检测方法众多，包含激光光腔衰荡(CRDS)、激光光声光谱(PAS)或可调谐半导体激光吸收光谱(TDLAS)等中红外激光光谱检测技术等，而各种检测方法研制的带电检测装置均依靠各自的研究方案进行摸索，没有一套标准化的带电检测装置设计方案；带电检测装置的确定需要消耗大量人力物力，而且还不能及时走向实用化应用。Various industries urgently need to detect fault characteristic gas components on-site to indicate equipment failure. The optical method is the mainstream method for live detection due to its good stability, high sensitivity and strong anti-interference ability; in the mid-infrared region, gas components are It has good absorption peaks. However, there are many mid-infrared spectrum detection methods, including laser cavity ring-down (CRDS), laser photoacoustic spectroscopy (PAS) or tunable semiconductor laser absorption spectroscopy (TDLAS) and other mid-infrared laser spectrum detection. Technology, etc., and the live detection devices developed by various detection methods all rely on their own research plans, and there is no standardized design plan for the live detection device; the determination of the live detection device requires a lot of manpower and material resources, and it cannot be put into practical use in time. application.
发明内容Contents of the invention
本发明要解决的技术问题：提供一种基于中红外光谱带电检测气体的装置的设计方法，以解决现有技术中气体带电检测装置均依靠各自的研究方案进行摸索，没有一套标准化的带电检测装置设计方案；带电检测装置的确定需要消耗大量人力物力，而且还不能及时走向实用化应用等技术问题。The technical problem to be solved by this invention is to provide a design method for a device for charged gas detection based on mid-infrared spectrum, so as to solve the problem that gas charged detection devices in the existing technology all rely on their own research plans and do not have a standardized set of charged detection devices. Device design plan; the determination of the live detection device requires a lot of manpower and material resources, and it cannot be put into practical application in time and other technical issues.
本发明技术方案：Technical solution of the present invention:
一种基于中红外光谱带电检测气体的装置的设计方法，所述方法包括：A design method for a device for charged gas detection based on mid-infrared spectrum, the method includes:
步骤1、确定待检气体在中红外光谱的吸收特性及检测方案；Step 1. Determine the absorption characteristics and detection plan of the gas to be detected in the mid-infrared spectrum;
步骤2、确定待检气体中红外光谱带电检测关键技术；Step 2. Determine the key technologies for mid-infrared spectrum charged detection of the gas to be detected;
步骤3、待检气体中红外光谱带电检测装置的制备及测试。Step 3. Preparation and testing of the mid-infrared spectrum charged detection device for the gas to be detected.
步骤1所述确定待检气体在中红外光谱的吸收特性的方法包括：The method for determining the absorption characteristics of the gas to be detected in the mid-infrared spectrum described in step 1 includes:
步骤1.1、基于分子动力学理论，分析待检气体的振动、转动能级及分布，针对4～8um区间待检气体在相对分子量大于100的气体背景下的光谱吸收能力；确定大分子气体背景下对待检气体分子吸收光谱展宽、强度的影响，模拟出分子红外吸收光谱，获取光谱分辨率优于0.4cm-1的高精度吸收谱图；Step 1.1. Based on the molecular dynamics theory, analyze the vibration, rotational energy level and distribution of the gas to be tested, and focus on the spectral absorption capacity of the gas to be tested in the 4-8um range in the gas background with a relative molecular weight greater than 100; determine the macromolecular gas background Based on the influence of the absorption spectrum broadening and intensity of the gas molecules to be tested, the molecular infrared absorption spectrum is simulated to obtain a high-precision absorption spectrum with a spectral resolution better than 0.4cm-1;
步骤1.2、基于气体配分函数理论，确定温度对待检气体的红外吸收光谱影响，设计并完成待检气体的温度和压力试验；根据傅里叶变换红外光谱技术确定在不同温度和压力条件下的气体吸收光谱强度变化和展宽效应。Step 1.2. Based on the gas partition function theory, determine the effect of temperature on the infrared absorption spectrum of the gas to be tested, design and complete the temperature and pressure test of the gas to be tested; determine the gas under different temperature and pressure conditions based on Fourier transform infrared spectroscopy technology Absorption spectrum intensity changes and broadening effects.
步骤1所述检测方案的确定方法包括：The method for determining the detection plan described in step 1 includes:
步骤1.3、确定激光吸收光谱技术、光声光谱技术或光腔衰荡红外光谱技术测量待检气体的可行性和优缺点；对吸收谱形状、幅度、波长位置及共存干扰物的干扰波长位置特性的研究和试验数据，根据中红外可选光源的发光原理、发射谱特性、输出功率和电调制特性因素，选择合适的探测波长位置和相应光源；开展红外光谱技术进行待检气体气体的比选试验，在满足同等性能指标前提下确定具有成本优势的光谱技术。Step 1.3. Determine the feasibility, advantages and disadvantages of using laser absorption spectroscopy, photoacoustic spectroscopy, or cavity ring-down infrared spectroscopy to measure the gas to be detected; analyze the absorption spectrum shape, amplitude, wavelength position, and interference wavelength position characteristics of coexisting interferents. According to the research and experimental data of the mid-infrared optional light source, select the appropriate detection wavelength position and corresponding light source based on the luminescence principle, emission spectrum characteristics, output power and electrical modulation characteristics factors; carry out infrared spectroscopy technology to compare and select gases to be detected Test to determine the spectral technology with cost advantages while meeting the same performance indicators.
步骤2所述确定待检气体中红外光谱带电检测关键技术的方法包括：The method described in step 2 to determine the key technologies for mid-infrared spectrum charged detection of the gas to be detected includes:
步骤2.1、气体吸收池材料选择材料密度大于2.6g/cm3，抗拉强度大于300MPa，电导率大于30S·m
-1，导热系数大于200W/(m·k)，能够实现钝化和硫化表面处理工艺的材料；保证气体吸收池的刚性实现恒温控制保证结构稳定性，并达到ppb级别的防吸附特性；
Step 2.1. Select the gas absorption pool material with a material density greater than 2.6g/cm3, a tensile strength greater than 300MPa, an electrical conductivity greater than 30S·m -1 , a thermal conductivity greater than 200W/(m·k), and capable of achieving passivation and vulcanization surface treatments. Process materials; ensure the rigidity of the gas absorption pool, achieve constant temperature control to ensure structural stability, and achieve ppb level anti-adsorption properties;
步骤2.2、采用光路设计软件对光学气体吸收池进行光路设计，根据高斯光束的光路传输矩阵模型，对光路进行模拟仿真，根据气体的吸收光谱强度和确定的测量范围，进行满足测量光程需求的气体池光路设计；开展光路光噪声及光干涉模拟仿真分析，对光路噪声抑制方法进行分析提升气体池的有效光强，降低光噪声。Step 2.2. Use optical path design software to design the optical path of the optical gas absorption cell. According to the optical path transmission matrix model of the Gaussian beam, simulate the optical path. According to the absorption spectrum intensity of the gas and the determined measurement range, make a measurement that meets the measurement optical path requirements. Gas pool optical path design; carry out optical path optical noise and optical interference simulation analysis, and analyze optical path noise suppression methods to improve the effective light intensity of the gas pool and reduce optical noise.
步骤2所述确定待检气体中红外光谱带电检测关键技术的方法包括：The method described in step 2 to determine the key technologies for mid-infrared spectrum charged detection of the gas to be detected includes:
步骤2.3、从电流电压驱动、散热因素及环境温度参数对波长稳定 性的影响进行分析，确定中红外探测器小信号采集放大及解调；根据光源波形函数和气体吸收谱型函数，理论研究温度、压力和浓度对气体吸光度的影响因素，为温度和压力补偿提供算法依据；进行气体吸收实验测试实验，根据测量到的温度、压力和光强信号数据，应用化学计量学算法，提出温度、压力补偿及浓度反演算法。Step 2.3. Analyze the influence of current and voltage drive, heat dissipation factors and environmental temperature parameters on wavelength stability to determine the small signal acquisition amplification and demodulation of the mid-infrared detector; based on the light source waveform function and gas absorption spectrum function, theoretically study the temperature , pressure and concentration influence factors on gas absorbance, providing algorithm basis for temperature and pressure compensation; conduct gas absorption experimental test experiments, and apply chemometrics algorithms based on the measured temperature, pressure and light intensity signal data to propose temperature, pressure Compensation and concentration inversion algorithms.
所述待检气体中红外光谱带电检测装置的制备方法包括：The preparation method of the mid-infrared spectrum charged detection device of the gas to be detected includes:
步骤3.1、通过辅助设计软件建立光学气体吸收池机械结构三维模型，通过有限元仿真分析软件对热变形、环境震动及承压能力环境因素进行仿真分析，对气密特性进行针对性设计；对研制的光学气体吸收池开展组装及光路调试，确保气体池密封性和调试气体池的有效光程；通入确定浓度的气体进行吸光度的测量，与理论计算进行对比，验证吸收池的光程；Step 3.1. Establish a three-dimensional model of the mechanical structure of the optical gas absorption cell through auxiliary design software, conduct simulation analysis of thermal deformation, environmental vibration and pressure-bearing environmental factors through finite element simulation analysis software, and carry out targeted design of air-tight characteristics; Carry out assembly and optical path debugging of the optical gas absorption cell to ensure the sealing of the gas cell and debug the effective optical path of the gas cell; pass in gas with a certain concentration to measure the absorbance, compare with theoretical calculations, and verify the optical path of the absorption cell;
步骤3.2、设计制作基于中红外量子级联激光器、锁相放大技术和长光程气体吸收池的带电气体检测装置。Step 3.2. Design and manufacture a charged gas detection device based on mid-infrared quantum cascade laser, lock-in amplification technology and long optical path gas absorption cell.
步骤3.2所述设计锁相放大技术和长光程气体吸收池的带电气体检测装置的方法为：设计激光驱动电路、调制电路和信号采集放大电路，利用FPGA和嵌入式系统实现激光信号的高速调制和解调，实现测量信号的锁相放大；通过该长光程气体吸收池增强气体的吸光度；通过化学计量学算法、温度和压力补偿，对测量到的光信号进行更准确的浓度反演；进行人机交互平台设计，实现对装置参数设置、状态监控和测量结果的显示。The method of designing the locked-in amplification technology and the charged gas detection device of the long optical path gas absorption cell as described in step 3.2 is to: design the laser drive circuit, the modulation circuit and the signal acquisition amplification circuit, and use FPGA and embedded systems to achieve high-speed modulation of the laser signal and demodulation to achieve phase-locked amplification of the measurement signal; enhance the absorbance of the gas through the long optical path gas absorption cell; perform more accurate concentration inversion of the measured optical signal through chemometrics algorithms, temperature and pressure compensation; Design a human-computer interaction platform to realize device parameter setting, status monitoring and display of measurement results.
待检气体中红外光谱带电检测装置的的测试方法包括：The test methods of the mid-infrared spectrum charged detection device of the gas to be tested include:
步骤3.3、对已经标定好的设备进行性能检验，通入不同浓度的标气对整机设备的性能指标进行测试，满足示值误差小于0.5ppm、最低检测限小于1ppm、重复性小于1％及线性优于0.99；开展现场检测环境温湿度的适应性测试，并验证仪器检出性能以满足带电检测要求。Step 3.3. Perform performance inspection on the calibrated equipment, and test the performance indicators of the entire equipment by passing in standard gases of different concentrations to ensure that the indication error is less than 0.5ppm, the minimum detection limit is less than 1ppm, the repeatability is less than 1%, and The linearity is better than 0.99; carry out adaptability tests for on-site detection of environmental temperature and humidity, and verify the detection performance of the instrument to meet the live detection requirements.
本发明的有益效果：Beneficial effects of the present invention:
根据本发明方法，可形成科学、系统的确定待检气体中红外光谱带电检测装置，为各种光谱检测气体组分技术指明研究方向，同时根据本发明的方法能更快速的形成实用化检测装置。According to the method of the present invention, a scientific and systematic mid-infrared spectrum charged detection device for determining the gas to be detected can be formed, pointing out the research direction for various spectral detection gas component technologies. At the same time, according to the method of the present invention, a practical detection device can be formed more quickly .
解决了现有技术中红外光谱检测气体的带电检测装置的确定均依靠各自的研究方案进行摸索，没有一套标准化的带电检测装置设计方案；带电检测装置的确定需要消耗大量人力物力，而且还不能及时走向实用化应用等技术问题。It solves the problem that in the existing technology, the determination of the charged detection device for detecting gases under infrared spectrum relies on individual research plans, and there is no standardized design scheme for the charged detection device; the determination of the charged detection device requires a lot of manpower and material resources, and it is not yet available. Technical issues such as moving towards practical application in a timely manner.
一种基于中红外光谱带电检测气体的装置的设计方法，包括：A design method for a device based on mid-infrared spectrum charged gas detection, including:
步骤1、确定待检气体在中红外光谱的吸收特性及检测方案具体的实施过程如下：Step 1. Determine the absorption characteristics of the gas to be detected in the mid-infrared spectrum and the specific implementation process of the detection plan is as follows:
1)基于分子动力学理论，分析待检气体的振动、转动能级及其分布，重点研究4～8um区间待检气体在相对分子量大于100的气体背景下的光谱吸收能力；研究大分子气体背景下对待检气体分子吸收光谱展宽、强度的影响，模拟出分子红外吸收光谱，获取光谱分辨率优于0.4cm
-1的高精度吸收谱图。
1) Based on the molecular dynamics theory, analyze the vibration, rotational energy level and distribution of the gas to be tested, focusing on the spectral absorption capacity of the gas to be tested in the 4-8um range in the background of gases with a relative molecular weight greater than 100; study the background of macromolecular gases Under the influence of the absorption spectrum broadening and intensity of the gas molecules to be tested, the molecular infrared absorption spectrum is simulated to obtain a high-precision absorption spectrum with a spectral resolution better than 0.4cm -1 .
2)基于气体配分函数理论，研究温度对待检气体的红外吸收光谱影响，设计并完成待检气体的温度、压力试验；结合傅里叶变换红外光谱技术，研究在不同温度和压力条件下的气体吸收光谱强度变化和展宽效应。为不同的测量方案提供中心波长选择、带宽确定、气体温度和压力等测试条件提供理论参考，优化测量方案，提升检测限、示值误差和重复性等性能指标。2) Based on the gas partition function theory, study the effect of temperature on the infrared absorption spectrum of the gas to be tested, design and complete the temperature and pressure test of the gas to be tested; combined with Fourier transform infrared spectroscopy technology, study the gas under different temperature and pressure conditions Absorption spectrum intensity changes and broadening effects. It provides theoretical reference for different measurement schemes such as center wavelength selection, bandwidth determination, gas temperature and pressure and other test conditions, optimizes the measurement scheme, and improves performance indicators such as detection limit, indication error and repeatability.
3)采用调研和理论分析方法，研究激光吸收光谱技术、光声光谱技术、光腔衰荡技术等红外光谱技术测量待检气体的可行性、优缺点。对吸收谱形状、幅度、波长位置、共存干扰物的干扰波长位置等特性的研究和试验数据，结合中红外可选光源的发光原理、发射谱特性、输出功率、电调制特性等因素，选择合适的探测波长位置和相应光源。在此基础上，开展红外光谱技术进行待检气体气体的比选试验，在满足同等性能指标前提下着重研究具有成本优势的光谱技术，将更利于推广及产业化应用，从而确定最佳光谱测量方案。3) Use research and theoretical analysis methods to study the feasibility, advantages and disadvantages of infrared spectroscopy technologies such as laser absorption spectroscopy, photoacoustic spectroscopy, and optical cavity ring-down technology to measure the gas to be detected. Based on the research and experimental data on the absorption spectrum shape, amplitude, wavelength position, interference wavelength position of coexisting interferents and other characteristics, combined with the luminescence principle, emission spectrum characteristics, output power, electrical modulation characteristics and other factors of the mid-infrared optional light source, select the appropriate The detection wavelength position and corresponding light source. On this basis, carrying out infrared spectroscopy technology to carry out comparison and selection tests of gases to be detected, and focusing on researching spectroscopy technologies with cost advantages under the premise of meeting the same performance indicators, will be more conducive to promotion and industrial application, thereby determining the best spectrum measurement plan.
步骤2、确定待检气体中红外光谱带电检测关键技术Step 2. Determine the key technologies for charged detection of mid-infrared spectrum of the gas to be detected
具体的实施过程如下：The specific implementation process is as follows:
1)待检气体分子极性较强，有极强的吸附性，选取合适惰性材料和表面处理工艺制备光学气体吸收池尤为关键。综合评价气体吸收池材料，选择材料密度大于2.6g/cm3，抗拉强度大于300MPa，电导率大于30S·m
-1，导热系数大于200W/(m·k)，能够实现钝化和硫化等表面处理工艺的材料。保证气体吸收池的刚性，实现恒温控制保证结构稳定性，并达到ppb级别的防吸附特性。
1) The gas molecules to be detected are highly polar and have strong adsorption properties. It is particularly critical to select appropriate inert materials and surface treatment processes to prepare optical gas absorption cells. Comprehensive evaluation of gas absorption pool materials, select materials with a density greater than 2.6g/cm3, a tensile strength greater than 300MPa, an electrical conductivity greater than 30S·m -1 , and a thermal conductivity greater than 200W/(m·k), which can achieve surface passivation and vulcanization. Handling process materials. Ensure the rigidity of the gas absorption pool, achieve constant temperature control to ensure structural stability, and achieve ppb level anti-adsorption properties.
2)采用专业光路设计软件对光学气体吸收池进行光路设计，结合高斯光束的光路传输矩阵模型，对光路进行模拟仿真，根据气体的吸收光谱强度和确定的测量范围，进行满足测量光程需求的气体池光路设计。开展光路光噪声及光干涉模拟仿真分析，对光路噪声抑制方法进行分析研究，提升气体池的有效光强，降低光噪声。2) Use professional optical path design software to design the optical path of the optical gas absorption cell. Combined with the optical path transmission matrix model of the Gaussian beam, the optical path is simulated. According to the absorption spectrum intensity of the gas and the determined measurement range, the measurement optical path needs to be met. Gas cell optical path design. Carry out optical path optical noise and optical interference simulation analysis, conduct analysis and research on optical path noise suppression methods, improve the effective light intensity of the gas cell, and reduce optical noise.
3)研究量子级联激光器特性，从电流电压驱动、散热因素及环境温度等多参数对波长稳定性的影响开展研究；研究中红外探测器小信号采集放大及解调技术。根据光源波形函数和气体吸收谱型函数，理论研究温度、压力和浓度对气体吸光度的影响因素，为温度和压力补偿提供算法依据；进行气体吸收实验测试实验，根据测量到的温度、压力和光强信号数据，应用化学计量学算法，提出温度、压力补偿及浓度反演关键算法。3) Study the characteristics of quantum cascade lasers, including the effects of multiple parameters such as current and voltage drive, heat dissipation factors and ambient temperature on wavelength stability; study the small signal acquisition amplification and demodulation technology of mid-infrared detectors. According to the light source waveform function and gas absorption spectral type function, theoretically study the influencing factors of temperature, pressure and concentration on gas absorbance, providing algorithm basis for temperature and pressure compensation; conduct gas absorption experimental test experiments, according to the measured temperature, pressure and light For strong signal data, chemometric algorithms are applied to propose key algorithms for temperature, pressure compensation and concentration inversion.
步骤3、待检气体中红外光谱带电检测装置的制备及测试。Step 3. Preparation and testing of the mid-infrared spectrum charged detection device for the gas to be detected.
具体的实施过程如下：The specific implementation process is as follows:
1)通过辅助设计软件建立光学气体吸收池机械结构三维模型，结合有限元仿真分析软件，对热变形、环境震动、承压能力等环境因素进行仿真分析，对气密特性进行针对性设计。对研制的光学气体吸收池开展组装及光路调试，确保气体池密封性和调试气体池的有效光程；通入确定浓度的气体进行吸光度的测量，与理论计算进行对比，验证吸收池的光程。1) Use auxiliary design software to establish a three-dimensional model of the mechanical structure of the optical gas absorption cell, and combine it with finite element simulation analysis software to simulate and analyze environmental factors such as thermal deformation, environmental vibration, and pressure-bearing capacity, and conduct targeted design of air-tight characteristics. Carry out assembly and optical path debugging of the developed optical gas absorption cell to ensure the sealing of the gas cell and adjust the effective optical path of the gas cell; measure the absorbance by passing in gas with a certain concentration and compare it with the theoretical calculation to verify the optical path of the absorption cell. .
2)设计制作基于中红外量子级联激光器、锁相放大技术和长光程气体吸收池的带电气体检测装置。中红外量子级联激光器的可调 谐、窄线宽、高功率密度等特性，从源头避免交叉干扰；设计激光驱动电路、调制电路和信号采集放大电路，利用FPGA和嵌入式系统实现激光信号的高速调制和解调，实现测量信号的锁相放大，提高系统光信号的信噪比；结合长光程气体吸收池，增强气体的吸光度，提高系统响应灵敏度；通过化学计量学算法，结合温度和压力补偿，对测量到的光信号进行更准确的浓度反演；进行人机交互平台设计，实现对装置参数设置、状态监控和测量结果的显示。对已经标定好的设备进行性能检验，通入不同浓度的标气对整机设备的性能指标进行测试，满足示值误差小于0.5ppm、最低检测限小于1ppm、重复性小于1％、线性优于0.99等设计指标，并通过第三方检测机构的关键参数测试。2) Design and produce a charged gas detection device based on mid-infrared quantum cascade laser, lock-in amplification technology and long optical path gas absorption cell. The tunable, narrow linewidth, high power density and other characteristics of mid-infrared quantum cascade lasers can avoid cross-interference from the source; design laser drive circuits, modulation circuits and signal acquisition amplification circuits, and use FPGA and embedded systems to achieve high-speed laser signals Modulation and demodulation realize phase-locked amplification of the measurement signal and improve the signal-to-noise ratio of the system optical signal; combine with the long optical path gas absorption cell to enhance the absorbance of the gas and improve the system response sensitivity; combine temperature and pressure through chemometrics algorithm Compensation, more accurate concentration inversion of the measured optical signal; design of a human-computer interaction platform to achieve device parameter setting, status monitoring and display of measurement results. Conduct performance inspection on the calibrated equipment, and test the performance indicators of the complete equipment by passing in standard gases of different concentrations to ensure that the indication error is less than 0.5ppm, the minimum detection limit is less than 1ppm, the repeatability is less than 1%, and the linearity is better than 0.99 and other design indicators, and passed the key parameter test by a third-party testing agency.
3)开展现场检测环境温湿度的适应性测试，并验证仪器检出性能以满足带电检测要求；以变电站作为装置应用试点，开展多次现场SF
6电气设备的带电检测试点应用。
3) Carry out adaptability tests for on-site detection of environmental temperature and humidity, and verify the detection performance of the instrument to meet the live detection requirements; use the substation as a device application pilot, and carry out multiple on-site live detection pilot applications of SF 6 electrical equipment.
Claims (8)
- 一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：所述方法包括：A design method for a device for charged gas detection based on mid-infrared spectrum, characterized in that the method includes:步骤1、确定待检气体在中红外光谱的吸收特性及检测方案；Step 1. Determine the absorption characteristics and detection plan of the gas to be detected in the mid-infrared spectrum;步骤2、确定待检气体中红外光谱带电检测关键技术；Step 2. Determine the key technologies for mid-infrared spectrum charged detection of the gas to be detected;步骤3、待检气体中红外光谱带电检测装置的制备及测试。Step 3. Preparation and testing of the mid-infrared spectrum charged detection device for the gas to be detected.
- 根据权利要求1所述的一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：步骤1所述确定待检气体在中红外光谱的吸收特性的方法包括：A design method for a device for charged gas detection based on mid-infrared spectrum according to claim 1, characterized in that: the method for determining the absorption characteristics of the gas to be detected in the mid-infrared spectrum in step 1 includes:步骤1.1、基于分子动力学理论，分析待检气体的振动、转动能级及分布，针对4～8um区间待检气体在相对分子量大于100的气体背景下的光谱吸收能力；确定大分子气体背景下对待检气体分子吸收光谱展宽、强度的影响，模拟出分子红外吸收光谱，获取光谱分辨率优于0.4cm -1的高精度吸收谱图； Step 1.1. Based on the molecular dynamics theory, analyze the vibration, rotational energy level and distribution of the gas to be tested, and focus on the spectral absorption capacity of the gas to be tested in the 4-8um range in the gas background with a relative molecular weight greater than 100; determine the macromolecular gas background Based on the influence of the absorption spectrum broadening and intensity of the gas molecules to be examined, the molecular infrared absorption spectrum is simulated to obtain a high-precision absorption spectrum with a spectral resolution better than 0.4cm -1 ;步骤1.2、基于气体配分函数理论，确定温度对待检气体的红外吸收光谱影响，设计并完成待检气体的温度和压力试验；根据傅里叶变换红外光谱技术确定在不同温度和压力条件下的气体吸收光谱强度变化和展宽效应。Step 1.2. Based on the gas partition function theory, determine the effect of temperature on the infrared absorption spectrum of the gas to be tested, design and complete the temperature and pressure test of the gas to be tested; determine the gas under different temperature and pressure conditions based on Fourier transform infrared spectroscopy technology Absorption spectrum intensity changes and broadening effects.
- 根据权利要求2所述的一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：步骤1所述检测方案的确定方法包括：The design method of a device for charged gas detection based on mid-infrared spectrum according to claim 2, characterized in that: the method for determining the detection scheme in step 1 includes:步骤1.3、确定激光吸收光谱技术、光声光谱技术或光腔衰荡红外 光谱技术测量待检气体的可行性和优缺点；对吸收谱形状、幅度、波长位置及共存干扰物的干扰波长位置特性的研究和试验数据，根据中红外可选光源的发光原理、发射谱特性、输出功率和电调制特性因素，选择合适的探测波长位置和相应光源；开展红外光谱技术进行待检气体气体的比选试验，在满足同等性能指标前提下确定具有成本优势的光谱技术。Step 1.3. Determine the feasibility, advantages and disadvantages of using laser absorption spectroscopy, photoacoustic spectroscopy, or cavity ring-down infrared spectroscopy to measure the gas to be detected; analyze the absorption spectrum shape, amplitude, wavelength position, and interference wavelength position characteristics of coexisting interferents. According to the research and experimental data of the mid-infrared optional light source, select the appropriate detection wavelength position and corresponding light source based on the luminescence principle, emission spectrum characteristics, output power and electrical modulation characteristics factors; carry out infrared spectroscopy technology to compare and select gases to be detected Test to determine the spectral technology with cost advantages while meeting the same performance indicators.
- 根据权利要求1所述的一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：步骤2所述确定待检气体中红外光谱带电检测关键技术的方法包括：A design method for a device based on mid-infrared spectrum charged detection of gas according to claim 1, characterized in that: the method of determining key technologies for mid-infrared spectrum charged detection of gas to be detected in step 2 includes:步骤2.1、气体吸收池材料选择材料密度大于2.6g/cm3，抗拉强度大于300MPa，电导率大于30S·m -1，导热系数大于200W/(m·k)，能够实现钝化和硫化表面处理工艺的材料；保证气体吸收池的刚性实现恒温控制保证结构稳定性，并达到ppb级别的防吸附特性； Step 2.1. Select the gas absorption pool material with a material density greater than 2.6g/cm3, a tensile strength greater than 300MPa, an electrical conductivity greater than 30S·m -1 , a thermal conductivity greater than 200W/(m·k), and capable of achieving passivation and vulcanization surface treatments. Process materials; ensure the rigidity of the gas absorption pool, achieve constant temperature control to ensure structural stability, and achieve ppb level anti-adsorption properties;步骤2.2、采用光路设计软件对光学气体吸收池进行光路设计，根据高斯光束的光路传输矩阵模型，对光路进行模拟仿真，根据气体的吸收光谱强度和确定的测量范围，进行满足测量光程需求的气体池光路设计；开展光路光噪声及光干涉模拟仿真分析，对光路噪声抑制方法进行分析提升气体池的有效光强，降低光噪声。Step 2.2. Use optical path design software to design the optical path of the optical gas absorption cell. According to the optical path transmission matrix model of the Gaussian beam, simulate the optical path. According to the absorption spectrum intensity of the gas and the determined measurement range, make a measurement that meets the measurement optical path requirements. Gas pool optical path design; carry out optical path optical noise and optical interference simulation analysis, and analyze optical path noise suppression methods to improve the effective light intensity of the gas pool and reduce optical noise.
- 根据权利要求4所述的一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：步骤2所述确定待检气体中红外光谱带电检测关键技术的方法包括：A design method for a device based on mid-infrared spectrum charged detection of gas according to claim 4, characterized in that: the method of determining key technologies for mid-infrared spectrum charged detection of gas to be detected in step 2 includes:步骤2.3、从电流电压驱动、散热因素及环境温度参数对波长稳定 性的影响进行分析，确定中红外探测器小信号采集放大及解调；根据光源波形函数和气体吸收谱型函数，理论研究温度、压力和浓度对气体吸光度的影响因素，为温度和压力补偿提供算法依据；进行气体吸收实验测试实验，根据测量到的温度、压力和光强信号数据，应用化学计量学算法，提出温度、压力补偿及浓度反演算法。Step 2.3. Analyze the influence of current and voltage drive, heat dissipation factors and environmental temperature parameters on wavelength stability to determine the small signal acquisition amplification and demodulation of the mid-infrared detector; based on the light source waveform function and gas absorption spectrum function, theoretically study the temperature , pressure and concentration influence factors on gas absorbance, providing algorithm basis for temperature and pressure compensation; conduct gas absorption experimental test experiments, and apply chemometrics algorithms based on the measured temperature, pressure and light intensity signal data to propose temperature, pressure Compensation and concentration inversion algorithms.
- 根据权利要求1所述的一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：所述待检气体中红外光谱带电检测装置的制备方法包括：A design method for a device based on mid-infrared spectrum charged detection gas according to claim 1, characterized in that: the preparation method of the mid-infrared spectrum charged detection device for gas to be detected includes:步骤3.1、通过辅助设计软件建立光学气体吸收池机械结构三维模型，根据有限元仿真分析软件对热变形、环境震动及承压能力环境因素进行仿真分析，对气密特性进行针对性设计；对研制的光学气体吸收池开展组装及光路调试，确保气体池密封性和调试气体池的有效光程；通入确定浓度的气体进行吸光度的测量，与理论计算进行对比，验证吸收池的光程；Step 3.1. Establish a three-dimensional model of the mechanical structure of the optical gas absorption cell through auxiliary design software, conduct simulation analysis of thermal deformation, environmental vibration and pressure-bearing capacity environmental factors based on finite element simulation analysis software, and carry out targeted design of air-tight characteristics; Carry out assembly and optical path debugging of the optical gas absorption cell to ensure the sealing of the gas cell and debug the effective optical path of the gas cell; pass in gas with a certain concentration to measure the absorbance, compare with theoretical calculations, and verify the optical path of the absorption cell;步骤3.2、设计制作基于中红外量子级联激光器、锁相放大技术和长光程气体吸收池的带电气体检测装置。Step 3.2. Design and manufacture a charged gas detection device based on mid-infrared quantum cascade laser, lock-in amplification technology and long optical path gas absorption cell.
- 根据权利要求6所述的一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：步骤3.2所述设计锁相放大技术和长光程气体吸收池的带电气体检测装置的方法为：设计激光驱动电路、调制电路和信号采集放大电路，利用FPGA和嵌入式系统实现激光信号的高速调制和解调，实现测量信号的锁相放大；根据长光程气体吸收池增强气体的吸光度，通过化学计量学算法， 通过温度和压力补偿，对测量到的光信号进行更准确的浓度反演；进行人机交互平台设计，实现对装置参数设置、状态监控和测量结果的显示。A method of designing a device for charged gas detection based on mid-infrared spectrum according to claim 6, characterized in that: the method of designing a charged gas detection device using lock-in amplification technology and long optical path gas absorption cell in step 3.2 is : Design laser drive circuit, modulation circuit and signal acquisition amplification circuit, use FPGA and embedded system to realize high-speed modulation and demodulation of laser signals, and realize phase-lock amplification of measurement signals; enhance the absorbance of gas according to the long optical path gas absorption cell, Through chemometric algorithms and temperature and pressure compensation, more accurate concentration inversion of the measured optical signal is performed; a human-computer interaction platform is designed to realize device parameter setting, status monitoring and display of measurement results.
- 根据权利要求6所述的一种基于中红外光谱带电检测气体的装置的设计方法，其特征在于：待检气体中红外光谱带电检测装置的的测试方法包括：A design method for a device based on mid-infrared spectrum charged detection gas according to claim 6, characterized in that: the testing method of the mid-infrared spectrum charged detection device for the gas to be detected includes:步骤3.3、对已经标定好的设备进行性能检验，通入不同浓度的标气对整机设备的性能指标进行测试，满足示值误差小于0.5ppm、最低检测限小于1ppm、重复性小于1％及线性优于0.99；开展现场检测环境温湿度的适应性测试，并验证仪器检出性能以满足带电检测要求。Step 3.3. Perform performance inspection on the calibrated equipment, and test the performance indicators of the entire equipment by passing in standard gases of different concentrations to ensure that the indication error is less than 0.5ppm, the minimum detection limit is less than 1ppm, the repeatability is less than 1%, and The linearity is better than 0.99; carry out adaptability tests for on-site detection of environmental temperature and humidity, and verify the detection performance of the instrument to meet the live detection requirements.
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