WO2023200919A1

WO2023200919A1 - Compression and tension vibration reducer assembly

Info

Publication number: WO2023200919A1
Application number: PCT/US2023/018435
Authority: WO
Inventors: Michael Birk BINNARD; Yoon Jung JEONG; Matthew Parker-Mccormick Bjork
Original assignee: Nikon Corporation
Priority date: 2022-04-13
Filing date: 2023-04-13
Publication date: 2023-10-19

Abstract

A vibration reducer assembly (1006) for connecting a first object (2) to a second object (4) includes a first vibration reducer (1006A) and a second vibration reducer (1006B). The first vibration reducer (1006A) couples the first object (2) to the second object (4) and reduces a magnitude of a vibration being transferred to the second object (4). The first vibration reducer (1006A) is configured to inhibit the second object (4) from moving towards the first object (2) by providing a compression force on the second object (4). The second vibration reducer (1006B) couples the first object (2) to the second object (4) and reduces a magnitude of a vibration being transferred to the second object (4). The second vibration reducer (1006B) is configured to inhibit the second object (4) from moving away from the first object (2) by providing a tension force on the second object (4).

Description

COMPRESSION AND TENSION VIBRATION REDUCER ASSEMBLY

RELATED APPLICATION

[0001] This application claims priority on U.S. Provisional Application No: 63/330,621 filed on April 13, 2022, and entitled “COMPRESSION AND TENSION VIBRATION REDUCER ASSEMBLY”. As far as permitted the contents of U.S. Provisional Application No: 63/330,621 are incorporated in their entirety herein by reference.

[0002] As far as permitted, the contents of Patent Cooperation Treaty Application No: PCT/US2021/054188 are incorporated in their entirety herein by reference.

BACKGROUND

[0003] Machines are used in many industrial applications. One type of machine is a robot that includes a mechanical arm, e.g., a robotic arm, that positions a payload. There is a never-ending desire to improve the operation and positioning accuracy of robots.

SUMMARY

[0004] An innovative vibration reducer for reducing a magnitude of a vibration being transferred from a first component to a second component includes (i) a first housing that is coupled to one of the components; (ii) a second housing positioned within the first housing; (iii) a movable member; and (iv) a first flexure assembly. The movable member is at least partly positioned within the second housing, and the movable member includes a movable member head that moves relative to the second housing, and a movable member shaft that extends away from the movable member head. In this design, the movable member shaft is coupled to the other of the components. The first flexure assembly flexibly couples and seals one of (i) the second housing to the first housing, and (ii) the movable member and the second housing. Further, the first flexure assembly has a low stiffness along a first axis, and a high stiffness along a second axis that is orthogonal to the first axis.

[0005] As an overview, in certain implementations, the vibration reducer is uniquely designed to at least partly inhibit vibration in the first component from being transferred to the second component with at least one degree of freedom, regardless of the orientation of the vibration reducer. Stated in another fashion, the vibration reducer can provide a force to counteract gravity (or another external force) in any direction and effectively reduces (inhibits or isolates) vibration from the first component from being transferred to the second component along at least one axis. As a result thereof, the second component can be positioned with improved accuracy. This, for example, allows for the manufacturing, measurement, processing, and/or assembly of parts with improved precision. It should be noted that the vibration reducer can be utilized and positioned to not support the gravitational load of the second component, or the vibration reducer can be utilized and positioned to only partly support the gravitational load of the second component.

[0006] Additionally, the first flexure assembly can have one or more of the following characteristics: (i) a high stiffness along a third axis that is orthogonal to the first axis and the second axis; (ii) a high stiffness about the first axis; (iii) a low stiffness about the second axis; (iv) a low stiffness about the third axis. Stated in another fashion, the first flexure assembly has (i) a first axis stiffness along the first axis, (ii) a second axis stiffness along the second axis; (iii) a third axis stiffness along the third axis; (iv) a theta first axis stiffness about the first axis, (v) a theta second axis stiffness about the second axis; and (vi) a theta third axis stiffness about the third axis. In this design, (i) the first axis stiffness is less than the second axis stiffness and the third axis stiffness; and (ii) the theta first axis stiffness is greater than the theta second axis stiffness and the theta third axis stiffness. The first flexure assembly can include a first seal and a first flexure. [0007] Additionally, the vibration reducer can include a second flexure assembly that flexibly couples and seals the other of (i) the second housing to the first housing, and (ii) the movable member and the second housing. The second flexure assembly can have one or more of the following characteristics: (i) a low stiffness along the first axis; (ii) a high stiffness along a second axis that is orthogonal to the first axis; (iii) a high stiffness along a third axis that is orthogonal to the first axis and the second axis; (iv) a high stiffness about the first axis; (v) a low stiffness about the second axis; (vi) a low stiffness about the third axis. Stated in another fashion, the second flexure assembly has (i) a first axis stiffness along the first axis, (ii) a second axis stiffness along the second axis; (iii) a third axis stiffness along the third axis; (iv) a theta first axis stiffness about the first axis, (v) a theta second axis stiffness about the second axis; and (vi) a theta third axis stiffness about the third axis. In this design, (i) the first axis stiffness is less than the second axis stiffness and the third axis stiffness; and (ii) the theta first axis stiffness is greater than the theta second axis stiffness and the theta third axis stiffness. The second flexure assembly can include a second seal and a second flexure.

[0008] In one implementation, (i) the first flexure assembly couples and seals the second housing to the first housing, and allows pivoting between the second housing and the first housing like a first universal joint; and (ii) the second flexure assembly couples and seals the movable member to the second housing, and allows pivoting between the movable member and the second housing like a second universal joint. [0009] Optionally, the vibration reducer can include a reducer adjuster that adjusts a pressure of a fluid against the movable member head to adjust a force generated by the movable member head.

[0010] It should be noted that the vibration reducer can be used in a number of different machines that include the first component. For example, the first component can be a robotic assembly having a multiple degree of freedom robotic arm, and the vibration reducer reduces (at least partly inhibits) vibration in multiple degrees of freedom. Alternatively, or additionally, the first component can be part of a mobile vehicle, or an aerial vehicle.

[0011] Depending on the design of the machine, multiple, spaced apart vibration reducers can be used to couple the second component to the first component. In certain implementations, a force produced by each vibration reducer is directed through a center of gravity of the second component. The vibration reducers can be arranged parallel to three perpendicular axes. Alternatively, the vibration reducers can be arranged in a tetrahedron configuration. Still alternatively, one or more vibration reducers can be arranged in different orientations such that the first axis of the respective vibration reducer is oriented toward a certain position.

[0012] A control system can actively control a force produced by each vibration reducer.

[0013] Additionally, the machine can include one or more actuators that connect the first component to the second component. At least one vibration reducer and at least one actuator act can parallel.

[0014] The second component can include a laser or another type of payload.

[0015] In another implementation, a machine for positioning a payload includes a robotic assembly; and a vibration reducer that couples the payload to the robotic assembly and reduces a magnitude of a vibration being transferred from the robotic assembly to the payload. The vibration reducer defines a fluid chamber that can counteract the gravitational force of the payload or another external force regardless of the orientation of the vibration reducer.

[0016] The vibration reducer can include (i) a first housing that is coupled to one of the robotic assembly and the payload; (ii) a second housing positioned within the first housing; (iii) a movable member that is at least partly positioned within the second housing, the movable member having a movable member head that moves relative to the second housing, and a movable member shaft that extends away from the movable member head, the movable member shaft being coupled to the other side of the payload and the robotic assembly; and (iv) a first flexure assembly that flexibly couples and seals one of (a) the second housing to the first housing, and (b) the movable member and the second housing; wherein the first flexure assembly has a low stiffness along a first axis, and a high stiffness along a second axis that is orthogonal to the first axis.

[0017] In another implementation, a method for reducing vibration in a first component from being transferred to a second component includes coupling a first housing to one of the components; positioning a second housing within the first housing; positioning a movable member at least partly within the second housing, the movable member having a movable member head that moves relative to the second housing, and a movable member shaft that is extends away from the movable member head; coupling the movable member shaft to the other of the components; and coupling and sealing one of (i) the second housing to the first housing, and (ii) the movable member and the second housing with a first flexure assembly having a low stiffness along a first axis, and a high stiffness along a second axis that is orthogonal to the first axis.

[0018] In still another implementation, the vibration reducer includes: a housing that is coupled to one of the components; a movable member; a first coupler that couples the movable member to the housing while allowing the movable member to move relative to the housing along a first axis; and a connector that connects the movable member to the other of the components, the connector having high stiffness along the first axis, and a low stiffness along the second axis.

[0019] In this implementation, the connector can be in tension. As non-exclusive examples, the connector can be a tension wire or a thin, solid rod.

[0020] Additionally, the vibration reducer can include a second coupler spaced apart from the first coupler, the second coupler coupling the movable member to the housing while allowing the movable member to move relative to the housing along the first axis. With this design, the couplers cooperate with the housing and the movable member to define a chamber. Further, the moveable member can include a movable member head so that the pressure in the chamber generates force on the moveable member. Additionally, a reducer adjuster can adjust a pressure of a fluid in the chamber to adjust a force generated by the movable member head.

[0021] In one implementation, (i) the first coupler includes a first seal that seals the moveable member to the housing; and (ii) the second coupler includes a second seal that seals the moveable member to the housing.

[0022] In a non-exclusive implementation, (i) the first coupler allows the movable member to move relative to the housing about the second axis, and about a third axis that is orthogonal to the first axis and the second axis; and (ii) the connector has low stiffness along the third axis, about the first axis, about the second axis, and about the third axis. One or both couplers can have a first axis stiffness along the first axis, and a second axis stiffness along the second axis; and the first axis stiffness can be lower than the second axis stiffness.

[0023] In certain implementations, a machine for positioning a payload includes a robotic assembly; a first vibration reducer that couples the payload to the robotic assembly and reduces a magnitude of a vibration being transferred to the payload from the robotic assembly; wherein the first vibration reducer is configured to provide a compression force on the payload; and a second vibration reducer that couples the payload to the robotic assembly and reduces a magnitude of a vibration being transferred to the payload from the robotic assembly; wherein the second vibration reducer is configured to provide a tension force on the payload. There are a number of spacing and positioning issues associated with vibration reduction assemblies and coupled payloads. The overall vibration reducer assembly can be efficiently designed and/or more compact by providing a combination of vibration reducer designs. In particular, in some implementations, the vibration reducers can be positioned closer to each other and the payload center of gravity, increasing the available space for additional components and/or payload clearance. Additionally, this can lower the production cost of the vibration reducer assembly.

[0024] As provided herein, the vibration reducer assembly can be designed to inhibit one or more vibrations in the first component from being transferred to the second component. The vibration reducer assembly can include the first vibration reducer that reduces a first magnitude of the vibration from being transferred to the payload from the robotic assembly; and the second vibration reducer that reduces a second magnitude of the vibration being transferred to the payload from the robotic assembly. Moreover, the vibration reducer assembly can include additional vibration reducers that reduce the magnitude of the vibration from being transferred to the payload.

[0025] Additionally, the first vibration reducer can include a first housing that is coupled to one of the robotic assembly and the payload; a second housing; a movable member having a movable member head that moves relative to the second housing, the movable member being coupled to the other of the payload and the robotic assembly; a first coupling member that flexibly couples one of (i) the second housing to the first housing, and (ii) the movable member to the second housing; wherein the first coupling member has a first axis stiffness along a first axis, and a second axis stiffness along a second axis that is orthogonal to the first axis of the first coupling member; wherein the first axis stiffness is lower than the second axis stiffness; and a seal assembly that seals (i) the second housing to the first housing, and (ii) the movable member to the second housing.

[0026] The second vibration reducer can include a housing that is coupled to one of the robotic assembly and the payload; a movable member having a movable member head that moves relative to the housing, the movable member head being coupled to the other of the payload and the robotic assembly; a first coupling member that flexibly couples the movable member to the housing; wherein the first coupling member has high tensile strength; and a seal assembly that seals the movable member to the housing.

[0027] The robotic assembly can have a multiple degree of freedom robotic arm, and wherein the vibration reducers inhibit vibration in multiple degrees of freedom.

[0028] In some implementations, a first force produced by the first vibration reducer is directed from the first vibration reducer through a center of gravity of the payload.

[0029] In one implementation, a second force produced by the second vibration reducer is directed from the second vibration reducer through a center of gravity of the payload.

[0030] The machine can further include a control system that actively controls a force produced by each vibration reducer.

[0031] The machine can still further include at least one actuator that exerts a force between the robotic assembly and the payload. In some embodiments, at least one vibration reducer and at least one actuator act in parallel.

[0032] In another implementation, a vibration reducer assembly for connecting a first object to a second object includes a first vibration reducer and a second vibration reducer. The first vibration reducer couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; the first vibration reducer having a first vibration reducer axis; wherein the first vibration reducer is configured to inhibit the second object from moving towards the first object by providing a compression force on the second object; the second vibration reducer couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; the second vibration reducer having a second vibration reducer axis that is different than the first vibration reducer axis; wherein the second vibration reducer is configured to inhibit the second object from moving away from the first object by providing a tension force on the second object.

[0033] The vibration reducer assembly can further include a third vibration reducer that couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; the third vibration reducer having a third vibration reducer axis that is different than both the first vibration reducer axis and the second vibration reducer axis; wherein the third vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object by providing a compression force on the second object, and (ii) moving away from the first object by providing a tension force on the second object.

[0034] The vibration reducers can be configured to support a gravitational weight of the second object.

[0035] In some implementations, the first vibration reducer inhibits vibration in at least five degrees of freedom.

[0036] In certain implementations, the second vibration reducer inhibits vibration in at least six degrees of freedom.

[0037] The vibration reducer assembly can further include a support assembly that interconnects the vibration reducers. In various implementations, the support assembly can include a ring-shaped structure.

[0038] In still another implementation, a machine comprising a first component, a second component, and a vibration reducer assembly that couples the second component to the first component. The first component can include a robotic assembly having a multiple degree of freedom robotic arm, and wherein the vibration reducers inhibit vibration in multiple degrees of freedom. The first component can include a mobile vehicle or a vehicle. The second component can include at least a portion of a laser.

[0039] A force produced by each vibration reducer is one of (i) directed through a center of gravity of the second component, and (ii) directed from the center of gravity of the second component toward the vibration reducer.

[0040] In some implementations, the axes of the vibration reducers are placed at an angle relative to each other.

[0041] In certain implementations, a vibration reducer assembly for connecting a first object to a second object includes a first vibration reducer, a second vibration reducer, a third vibration reducer, and a fourth vibration reducer. The first vibration reducer couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the first vibration reducer is configured to inhibit the second object from moving towards the first object by providing a compression force on the second object; the second vibration reducer couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the second vibration reducer is configured to inhibit the second object from moving away from the first object by providing a tension force on the second object; the third vibration reducer couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the third vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object by providing a compression force on the second object, and (ii) moving away from the first object by providing a tension force on the second object; and the fourth vibration reducer couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the fourth vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object by providing a compression force on the second object, and (ii) moving away from the first object by providing a tension force on the second object. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The novel features of this embodiment, as well as the embodiment itself, both as to its structure and its operation, will be best understood from the accompanying drawings, taken in conjunction with the accompanying description, in which similar reference characters refer to similar parts, and in which:

[0043] Figure 1A is a simplified cut-away perspective view of a first component, a second component, and an implementation of a vibration reducer;

[0044] Figure 1 B is a perspective view of a first housing, and a housing flexure assembly of the vibration reducer of Figure 1A;

[0045] Figure 1 C is a partly cut-away perspective view of the first housing and the housing flexure assembly of Figure 1 B;

[0046] Figure 1 D is a perspective view of a second housing of the vibration reducer of Figure 1A;

[0047] Figure 1 E is a partly cut-away perspective view of the second housing and a movable member flexure assembly;

[0048] Figure 1 F is a perspective view of a movable member and the movable member flexure assembly;

[0049] Figure 1 G is a perspective view of the movable member flexure assembly and a cut-away view of the movable member;

[0050] Figures 1 H and 11 are alternative perspective views of a flexure;

[0051] Figures 2A and 2B are simplified, cross-sectional illustrations of another implementation of the vibration reducer at two different positions;

[0052] Figure 3A is a simplified perspective view of another implementation of a machine that includes the payload, the robot, and the vibration isolation assembly;

[0053] Figure 3B is a perspective view of the payload, the vibration isolation assembly, and a portion of a robot of Figure 3A;

[0054] Figure 3C is a perspective view of a portion of the robot and a portion of the vibration isolation assembly of Figure 3B;

[0055] Figure 3D is a perspective view of a portion of the vibration isolation assembly and the payload of Figure 3B;

[0056] Figure 3E is a side view of a portion of the robot and a portion of the vibration isolation assembly of Figure 3B;

[0057] Figure 3F is a bottom view of the portion of the robot and the portion of the vibration isolation assembly of Figure 3B;

[0058] Figure 3G is a perspective view of the portion of the robot and the portion of the vibration isolation assembly of Figure 3B;

[0059] Figures 4 is a perspective view of the payload, the vibration isolation assembly, and a portion of a robot of Figure 1A;

[0060] Figure 5 is a simplified cut-away of the first component, the second component, and another implementation of a vibration reducer;

[0061] Figure 6 is a simplified side view of another implementation of a machine; [0062] Figure 7 is a simplified side view of still another implementation of a machine;

[0063] Figure 8 is a simplified cut-away view of yet another implementation of a vibration reducer with a first component and a second component;

[0064] Figure 9 is a simplified cut-away view of still another implementation of a vibration reducer with a first component and a second component;

[0065] Figure 10 is a bottom view of yet another implementation of a portion of a robot and a portion of a vibration isolation assembly; and

[0066] Figure 11 is a simplified side view of another implementation of a machine that includes the payload, a gantry, and the vibration isolation assembly.

DESCRIPTION

[0067] Figure 1 A is a simplified cut-away perspective view of a first component 2, a second component 4, and an implementation of a vibration reducer 6 that cooperate to form a portion of a machine 10. As an overview, the vibration reducer 6 is uniquely designed to reduce a magnitude of a vibration transferred from the first component 2 to the second component 4 with at least one degree of freedom, regardless of the orientation of the vibration reducer 6. Stated in another fashion, the vibration reducer 6 can provide a controlled force in the positive V1 direction on the second component 4, and a corresponding reaction force in the negative V1 direction on the first component 2 while effectively reducing (isolating) vibration from the first component 2 from being transferred to the second component 4. As a result thereof, the second component 4 can be positioned with improved accuracy. This, for example, allows for the manufacturing, measurement, processing, and/or assembly of parts with improved precision.

[0068] A number of Figures include a vibration reducer orientation system that is referenced to the vibration reducer 6 and that illustrates a first vibration reducer axis (“V1 axis”), a second vibration reducer axis (“V2 axis”) that is orthogonal to the V1 axis, and a third vibration reducer axis (“V3 axis”) that is orthogonal to the V1 and V2 axes. It should be noted that any of these vibration reducer axes can also be referred to as the first, second, and/or third axes. Further, movement along or about a single axis can be referred to as a one degree of freedom, and movement along and about the V1 , V2, and V3 axes can be referred to as six degrees of freedom.

[0069] The term “vibration” as used herein shall mean and include steady-state vibration, short-term disturbances, random disturbances, transient disturbances, repeatable disturbances, and any unwanted motion.

[0070] The type of machine 10 that utilizes the vibration reducer 6 can vary. As a non-exclusive example, the machine 10 can be a programmable and/or controllable robotic assembly (not shown in Figure 1A) that carries out one or more complex actions. In this example, the first component 2 can be a robotic arm of the robotic assembly, and the second component 4 can be the payload (not shown in Figure 1 A) that is moved and positioned with the robotic assembly. In this design, one or more vibration reducers 6 at least partly inhibit vibration in the robotic assembly and the surrounding environment from being transferred to the payload. This allows the payload to be positioned with improved accuracy. A non-exclusive example of a robotic assembly that utilizes the vibration reducer 6 is discussed below in reference to Figures 3A-3G.

[0071] It should be noted that the surrounding environment can influence the first component 2 and/or the second component 4. As used herein, “surrounding environment” is understood to mean forces, elements, fluids, and/or physical objects that may contact and/or impose a magnitude of a vibration or a force on the first component 2 and/or the second component 4. As non-exclusive, non-limiting examples, a wind can directly impose a vibration on the first component 2, or the ground can impose a vibration on the first component 2. The first component 2 can also generate vibrations. The vibration reducers 6 disclosed herein can reduce the magnitude of a vibration transferred from the first component 2 to the second component 4 regardless of the source of the vibration. Other non-limiting, nonexclusive examples of the “surrounding environment” include wind, water, fluids, and physical objects that directly or indirectly impose vibrations on the first component 2 and/or the second component 4.

[0072] In some embodiments, the vibration reducers 6 only reduce magnitudes of vibrations from being transferred from the first component 2 to the second component 4. If the surrounding environment imposes a magnitude of a vibration directly on the second component 4, actuators 340 (for example, as illustrated in Figure 3B-3D) can be utilized to hold the second component 4 in a desired location and/or reduce the impact of the surrounding environment.

[0073] It should be noted that the machine 10 can be another type of processing machine other than a robotic assembly with a robotic arm. As alternative, nonexclusive examples, the vibration reducer 6 can be used in a conventional processing machine (e.g., a laser processing machine or a machining center) or a transport machine (e.g., an automated guided vehicle and/or aerial drone).

[0074] The size, shape and design of each component 2, and 4 can be varied to achieve the task the machine 10 is designed to perform. For example, each component 2, 4 can be any type of object, item, part, or assembly. For ease of illustration, in the non-exclusive implementation of Figure 1A, the first component 2 is represented as a rectangular-shaped structure, and the second component 4 is also represented as a rectangular-shaped structure. For example, the first component 2 can be part of the robotic arm, and the second component 4 can be an optical instrument that is positioned by the robotic arm. In another example, the first component 2 can be a part that is connected to the robotic arm; and the second component 4 can be a part that secures a payload such as an optical device. The first component 2 and the second component 4 are described in more detail with reference to Figures 3A-3G.

[0075] The vibration reducer 6 at least partly inhibits vibration in the first component 2 from being transferred to the second component 4 with at least one degree of freedom, regardless of the orientation of the vibration isolation assembly 6. In one non-exclusive implementation, the vibration reducer 6 at least partly inhibits vibration in the first component 2 from being transferred to the second component 4 with at least three degrees of freedom. In Figure 1 A, the vibration reducer 6 at least partly inhibits vibration in the first component 2 along the V1 axis, along the V2 axis, along the V3 axis, about the V2 axis, and about the V3 axis from being transferred to the second component 4.

[0076] As used herein, in the alternative, non-exclusive examples, the term “relatively soft” or “low stiffness” with regards to stiffness along an axis shall mean a stiffness of less than 1 , 2, 5, 10, 20, 30, 50 or 100 Newton/millimeter. Stated in another fashion, as an alternative, non-exclusive examples, low stiffness along an axis shall mean that the second component 4 will have a natural frequency of less than 1 , 2, 5, or 10 hertz. Further, the term “relatively soft” or “low stiffness” with regards to stiffness about an axis shall mean a stiffness of less than 10, 20, 50, 100, 200, 300, 500, or 1000 Newton-meters per radian.

[0077] As used herein, in the alternative, non-exclusive examples, the term “relatively high” or “high stiffness” with regards to stiffness along an axis shall mean a stiffness of greater than 10, 20, 50, 100, 200, 500, or 1000 Newton/millimeter. Stated in another fashion, as alternative, non-exclusive examples, “relatively high” or “high stiffness” along an axis shall mean that the second component 4 will have a natural frequency of greater than 10, 15, 20, or 50 hertz. Further, the term “relatively high” or “high stiffness” with regards to stiffness about an axis shall mean a stiffness of greater than 1000, 2000, 5000, or 10000 Newton-meters per radian.

[0078] In certain implementations, the term “relatively stiff” or “high stiffness” shall mean a stiffness of at least 10, 100, or 1000 times of “relatively soft” or “low stiffness” for both linear and rotational stiffness. It should be noted that other numbers for the factor are possible depending on the desired characteristics of the vibration reducer. [0079] In Figure 1A, the vibration reducer 6 includes an outer, first housing 12, an inner, second housing 14, a movable member 16, a housing flexure assembly 18, a movable member flexure assembly 20, a control system 22 (illustrated as a box), a sensor system 24 (illustrated as a box), and a reducer adjuster 26 (illustrated as a box). The housing flexure assembly 18 flexibly connects and seals the second housing 1 to the first housing 12, and allows the second housing 14 to pivot relative to the first housing 12 like a first universal joint as well as to translate along the V1 axis. Somewhat similarly, the movable member flexure assembly 20 flexibly connects and seals the movable member 16 to the second housing 14, and allows the movable member 16 to pivot relative to the second housing 14 like a second universal joint as well as to translate along the V1 axis. Stated in another fashion, (i) the housing flexure assembly 18 acts as both a first universal joint that allows pivoting and as a slide that allows translation along the V1 axis between the second housing 14 and the first housing 12; and (ii) the movable member flexure assembly 20 acts as both a second universal joint that allows pivoting and as a slide that allows translation along the V1 axis between the movable member 16 and the second housing 14. In this design, the two effective universal joints are spaced apart along the V1 axis, each flexure assembly 18, 20 has high stiffness in the plane of the flexure (along the V2 and V3 axes, and about V1 axis), and low stiffness for out-of-plane motions (along the V1 axis, and about the V2 and V3 axes).

[0080] Further, the reducer adjuster 26 can actively control the pressure of a fluid 28 (illustrated with a few circles) in the first housing 12. With this design, the problem of providing vibration reduction for an industrial robot performing a precision operation is solved by utilizing one or more vibration reducers 6 to counteract the force of gravity (or other required forces) that each allow for lateral motion, a low stiffness movable member 16, and one or more low stiffness (in certain directions) flexure assemblies 18, 20.

[0081] The size, shape, and design of each of the components of the vibration reducer 6 can be varied, and the vibration reducer 6 can be designed to include more or fewer components than are illustrated in Figure 1 A. For example, in Figure 1 A, the pressure of the fluid 28 is actively adjusted, and the vibration reducer 6 is an actively controlled system. Alternatively, the vibration reducer 6 can be a passive system in which the pressure of the fluid 28 is not actively controlled. In the passive system, for example, the vibration reducer 6 can be designed without the control system 22, the sensor system 24, and the reducer adjuster 26.

[0082] It should be noted that (i) either of the housings 12, 14 can alternatively be referred to as a first housing or a second housing; and/or (ii) either of the flexure assemblies 18, 20 can alternatively be referred to as a first flexure assembly or a second flexure assembly.

[0083] The first housing 12 is coupled to one of the components 2, 4, and the movable member 16 is coupled to the other of the components 4, 2. In the implementation of Figure 1A, the first housing 12 is fixedly secured to the first component 2 (e.g., the robotic arm), and the movable member is fixedly secured to the second component 4 (e.g., the payload).

[0084] In Figure 1A, the first housing 12 is rigid, generally cylindrical shaped, and includes a first outer part 30, a second outer part 32, an outer seal (not shown) that seals the first outer part 30 to the second outer part 32, and an outer fastener assembly (not shown) that fixedly secures the first outer part 30 to the second outer part 32 with the outer seal therebetween. In Figure 1 A, the bottom of the first outer part 30 is fixedly secured to the first component 2. Further, the first housing 12 has a housing axis 12A at its center that is aligned with and parallel to the V1 axis.

[0085] In one non-exclusive implementation, the first outer part 30 is generally cylindrical cup-shaped and includes an annular side wall 30A, a disk-shaped bottom 30B, and a first outer flange 30C that extends away from the annular side wall 30A. Further, the second outer part 32 is generally cylindrical cup-shaped and includes an annular side wall 32A, an annular disk-shaped top 32B, and a second flange 32C that extends away from the annular side wall 32A.

[0086] Additionally, the first housing 12 cooperates with the second housing 14, the movable member 16, and the flexure assemblies 18, 20 to define an outer, first chamber 34 (e.g., a pneumatic chamber) that encircles the second housing 14 and the movable member 16. Stated in another fashion, in this design, the second housing 14 and the movable member 16 are positioned within the first housing 12 and the first chamber 34.

[0087] In certain implementations, the second housing 14 is positioned within the first housing 12. In Figure 1A, the second housing 14 is rigid, generally cylindrical shaped, and includes a first inner part 36, a second inner part 38, an inner seal (not shown) that seals the first inner part 36 to the second inner part 38, and an inner fastener assembly (not shown) that fixedly secures the first inner part 36 to the second inner part 38 with the inner seal therebetween.

[0088] In one non-exclusive implementation, the first inner part 36 is generally cylindrical bell-shaped and includes a proximal, first end 36A that is secured to the second inner part 38, and a distal, second end 36B that cantilevers away from the second inner part 38. In this non-exclusive design, an inner diameter at the distal, second end 36B is greater than an inner diameter at the proximal, first end 36A.

[0089] In one non-exclusive implementation, the second inner part 38 is generally cylindrical tube-shaped and includes an annular, proximal, first flange 38A, and an annular, distal second flange 38B. In this design, the second flange 38B of the second inner part 38 is fixedly secured to the first end 36A of the first inner part 36, and the inner seal seals the first inner part 36 to the second inner part 38.

[0090] In one non-exclusive implementation, the movable member 16 is rigid and includes a movable member head 40, and a movable member shaft 42 that extends away from the movable member head 40. In certain implementations, the movable member 16 is piston shaped, with the member head 40 having the shape of a piston head, and the member shaft 42 having a piston shaft shape. These components can be formed together or separately. Further, the movable member 16 has a movable member axis 16A that is aligned with the V1 axis when the vibration reducer 6 is in the neutral position. In Figure 1A, the movable member head 40 is somewhat cylindrical disk-shaped, and the movable member shaft 42 is generally cylindrical beam-shaped. In this design, the movable member shaft 42 has a first shaft end 42A that is coupled to the second component 4, and a second shaft end 42B that is secured to the movable member head 40. Further, the movable member shaft 42 is positioned within the second inner part 38 of the second housing 14, and the movable member head 40 is positioned within the first inner part 36 of the second housing 14.

[0091] Additionally, the second housing 14 cooperates with the movable member 16 and the movable member flexure assembly 20 to define an inner, second chamber 43 that receives the movable member shaft 42. In the non-exclusive design of Figure 1 A, (i) the second chamber 43 is open at the top, near the first shaft end 42A, (ii) the movable member 16 is maintained spaced apart from the second housing 14 within the second chamber 43; (iii) the first shaft end 42A is spaced apart from and extends through the opening in the second inner part 38 of the second housing 14; and (iv) the movable member 16 is at least partly positioned within the second housing 14. In alternative embodiments, the second housing 14 can be placed outside the first housing 12, and/or the movable member 16 can be placed outside the second housing 14. These embodiments may be preferable in applications that require a smaller diameter of the vibration reducer 6 but can allow a longer overall length.

[0092] The movable member head 40 includes a first movable member side 40A that is subjected to the pressure in the second chamber 43, and a second movable member side 40B that is subjected to the pressure in the first chamber 34. In the described embodiment, the second chamber 43 is in fluid communication with the ambient atmosphere and the pressure on the first movable member side 40A is equal to the ambient pressure. In the orientation of Figure 1 A, the first movable member side 40A is on the top, and the second movable member side 40B is on the bottom.

[0093] As stated above, the housing flexure assembly 18 flexibly connects and seals the second housing 14 to the first housing 12, and allows for pivoting of the second housing 14 relative to the first housing 12 like a first universal joint. In the nonexclusive implementation of Figure 1A, the housing flexure assembly 18 includes (i) a housing seal 44 that seals the second housing 14 to the first housing 12; and (ii) a housing flexure 46 that flexibly couples and secures the second housing 14 to the first housing 12. In Figure 1 A, the housing seal 44 is spaced apart from the housing flexure 46. Alternatively, the housing seal 44 and the housing flexure 46 can be an integrated assembly. In some embodiments, the housing flexure 46 is omitted.

[0094] The design of the housing seal 44 and the housing flexure 46 can be varied to achieve the desired vibration isolation characteristics. In the non-exclusive implementation of Figure 1A, (i) the first flange 38A of the second housing 14 is positioned within the opening in the top 32B of the first housing 12; (ii) the housing seal 44 is a rolling diaphragm type seal that includes a flexible membrane that extends between and is attached to the first flange 38A of the second housing 14 and the top 32B of the first housing 12; (iii) the housing flexure 46 is somewhat open disk-shaped, and extends between and is attached to the first flange 38A of the second housing 1 and the top 32B of the first housing 12; and (iv) the housing flexure 46 flexibly couples the second housing 14 to the first housing 12. In other embodiments, the housing seal 44 can be a flat diaphragm or a sliding seal such as an O-ring.

[0095] Further, the housing flexure 46 is designed to be relatively stiff (high stiffness) along the V2 axis, along the V3 axis, and about the V1 axis, and relatively soft (low stiffness) along the V1 axis, about the V2 axis, and about the V3 axis, and has a relatively compact form factor. With this design, (i) the housing flexure 46 allows for relative movement between the second housing 14 and the first housing 12 along the V1 axis, about the V2 axis, and about the V3 axis; and (ii) the housing flexure 46 inhibits relative movement between the second housing 14 and the first housing 12 about the V1 axis, along the V2 axis, and along the V3 axis. With this design, the second housing 14 can move up and down, and pivot relative to the first housing 12 like the first universal joint.

[0096] Somewhat similarly, the movable member flexure assembly 20 flexibly connects and seals the movable member 16 to the second housing 14, and allows for pivoting between the movable member 16 and the second housing 14 like the second universal joint. In the non-exclusive implementation of Figure 1A, the movable member flexure assembly 20 includes (i) a movable member seal 48 that seals the movable member head 40 to the second housing 14; and (ii) a movable member flexure 50 that flexible couples and secures the movable member head 40 to the second housing 14. In Figure 1A, the movable member seal 48 is spaced apart from the movable member flexure 50. Alternatively, the movable member seal 48 and the movable member flexure 50 can be an integrated assembly. In some embodiments, the movable member flexure 50 is omitted.

[0097] The design of the movable member seal 48 and the movable memberflexure 50 can be varied to achieve the desired vibration isolation characteristics. In the nonexclusive implementation of Figure 1A, (i) the movable member head 40 of the movable member 16 is positioned within the opening of the first inner part 36 of the second housing 14; (ii) the movable member seal 48 is a rolling diaphragm type seal that includes a flexible membrane that extends between and is attached to the movable member head 40 and the first inner part 36 of the second housing 14; (iii) the movable member flexure 50 is somewhat open disk-shaped, and extends between and is attached to the movable member head 40 and the first inner part 36 of the second housing 14; and (iv) the movable member flexure 50 flexibly couples the movable member 16 to the second housing 14. In other embodiments, the movable member seal 48 can be a flat diaphragm or a sliding seal such as an O-ring.

[0098] Further, the movable member flexure 50 is designed to be relatively stiff (high stiffness) along the V2 axis, along the V3 axis, and about the V1 axis, and relatively soft (low stiffness) along the V1 axis, about the V2 axis, and about the V3 axis, and has a relatively compact form factor. With this design, (i) the movable member flexure 50 allows for relative movement between the movable member 16 and the second housing 14 along the V1 axis, about the V2 axis, and about the V3 axis; and (ii) the movable member flexure 50 inhibits relative movement between the movable member 16 and the second housing 14 about the V1 axis, along the V2 axis, and along the V3 axis. With this design, the movable member 16 can move up and down, and pivot relative to the first housing 12 and the second housing 14 like the second universal joint.

[0099] It should be noted that (i) either of the seals 44, 48 can alternatively be referred to as a first seal or a second seal; and/or (ii) either of the flexures 46, 50 can alternatively be referred to as a first flexure or a second flexure. Still alternatively, (i) either of the seals 44, 48 can alternatively be referred to as a first sealing member or a second sealing member; and/or (ii) either of the flexures 46, 50 can alternatively be referred to as a first coupling member, a first flexure member, a second coupling member, or a second flexure member. Further, the seals 44, 48 can be collectively referred to as a seal assembly.

[00100] The control system 22 controls the components of the machine 10. For example, the control system 22 (i) can control the reducer adjuster 26, and (ii) can acquire data from the sensor assembly 24. The control system 22 can be a centralized or distributed system.

[00101] The control system 22 may include, for example, a CPU (Central Processing Unit) 22A, and electronic memory 22B. The control system 22 functions as a device that controls the operation of the machine 10 by the CPU executing the computer program. The control system 22 may not be disposed inside the machine 10, and may be arranged as a server or the like outside the machine 10, for example. In this case, the control system 22 and the machine 10 may be connected via a communication line such as a wired communications line (cable communications), a wireless communications line, or a network. Furthermore, each processing and function included in the program may be executed by program software that can be executed by a computer, or processing of each part may be executed by hardware such as a predetermined gate array (FPGA), ASIC, or program software, and a partial hardware module that realizes a part of hardware elements may be implemented in a mixed form. [00102] The programming and the hardware for the control system 22 can be varied to achieve the desired task that the machine 10 will be performing.

[00103] The sensor assembly 24 senses a condition of the vibration reducer 6 and provides feedback that is used by the control system 22 to control the reducer adjuster 26. For example, the sensor assembly 24 can sense the pressure of the fluid 28 (e.g., air) in the first chamber 34, and can provide the desired feedback to the control system 22.

[00104] The reducer adjuster 26 is controlled by the control system 22 to actively control the pressure of the fluid 28 in the first chamber 34. The reducer adjuster 26 can actively control the pressure of the fluid 28 in the first chamber 34 to control vertical (parallel to V1 ) accelerations to the second component 4 or to compensate for changes in the second component 4. The reducer adjuster 26 can include one or more electronic regulators, servo valves, pumps, and reservoirs to selectively add and remove pneumatic fluid 28 to the first chamber 34 under the control of the control system 22.

[00105] In certain non-exclusive implementations, the reducer adjuster 26 adjusts the pressure of the fluid 28 in the first chamber 34 to be greater than the pressure outside of the first chamber 34. For example, the fluid 28 can be air. In Figure 1 A, the pressure of the fluid 28 in the first chamber 34 (i) acts on the second movable member side 40B (e.g., the bottom in Figure 1A) of the movable member head 40 to provide a force on the movable member head 40 (upwards in the illustration along the V1 axis). When the pressure of the fluid 28 in the first chamber 34 is greater than the pressure in the second chamber 43, the pressure on the second movable member side 40B is greater than the pressure on the first movable member side 40A and the force created is upward (in the orientation of Figure 1A). Alternatively, when the pressure of the fluid 28 in the first chamber 34 is less than the pressure in the second chamber 43, the pressure on the second movable member side 40B is less than the pressure on the first movable member side 40A and the force created is downward (in the orientation of Figure 1A).

[00106] With this design, the movable member 16 can be used to counteract the gravitational load of the assembly (e.g., the second component 4 and the movable member 16) or other required forces.

[00107] It should be noted that the unique design of the vibration reducer 6 provided herein allows for the vibration reducer 6 to be used in applications where the movable member axis 16A is aligned with gravity or not aligned with gravity. Stated in another fashion, the vibration reducer 6 is uniquely designed to reduce vibration transmission, regardless of the orientation of the vibration reducer 6 relative to gravity. With the present design, (i) the housing flexure assembly 18 provides the required radial constraints between the first housing 12 and the second housing 14 to maintain the desired level of concentricity; and (ii) the movable member flexure assembly 20 provides the required radial constraints between the second housing 14 and the movable member 16 to maintain the desired level of concentricity.

[00108] Figure 1 B is a top perspective view, and Figure 1 C is a partly cut-away perspective view of the first housing 12 and the housing flexure assembly 18 of the vibration reducer of Figure 1A. In Figures 1 B and 1 C, the (i) the first outer part 30, including the side wall 30A, the bottom 30B, and the first outer flange 30C are visible; and (ii) the second outer part 32, including the side wall 32A, the top 32B, and the second flange 32C are visible.

[00109] With reference to Figure 1 C, the housing seal 44 is generally annularshaped and includes an outer perimeter 44A, an inner perimeter 44B, and a rolling ridge 44C. Additionally, the housing seal 44 includes a plurality of spaced-apart outer apertures 44D and a plurality of spaced-apart inner apertures 44E. In this design, a plurality of fasteners (not shown) extend through the outer apertures 44D to fixedly secure the outer perimeter 44A of the housing seal 44 to the top 32B of the second outer part 32. Further, a plurality of fasteners (not shown) extends through the inner apertures 44E to fixedly secure the inner perimeter 44B to the second housing 14 (illustrated in Figure 1 A). Alternatively, the housing seal 44 can be attached to the first housing 12 and the second housing 14 in another fashion.

[00110] Further, the housing flexure 46 is generally open annular shaped and includes an outer perimeter 46A, an inner perimeter 46B, and a plurality of connector beams 46C that connect the outer perimeter 46A to the inner perimeter 46B. Additionally, the housing flexure 46 includes a plurality of spaced-apart outer apertures 46D and a plurality of spaced-apart inner apertures 46E. In this design, a plurality of fasteners (not shown) extend through the outer apertures 46D to fixedly secure the outer perimeter 46A of the housing flexure 46 to the top 32B of the second outer part 32. Further, a plurality of fasteners (not shown) extends through the inner apertures 46E to fixedly secure the inner perimeter 46B to the second housing 14 (illustrated in Figure 1A). Alternatively, the housing flexure 46 can be attached to the first housing 12 and the second housing 14 in another fashion.

[00111] Figure 1 D is a perspective view of the second housing 14; and Figure 1 E is a partly cut-away perspective view of the second housing 14 and the movable member flexure assembly 20. In Figures 1 D and 1 E, the (i) the first inner part 36, including the proximal end 36A and the distal end 36B, is visible; and (ii) the second inner part 38, including the first flange 38A and the second flange 38B, is visible.

[00112] With reference to Figure 1 E, the movable member seal 48 is generally annular-shaped and includes an outer perimeter 48A, an inner perimeter 48B, and a rolling ridge 48C. Additionally, the movable member seal 48 includes a plurality of spaced-apart outer apertures 48D and a plurality of spaced-apart inner apertures 48E. In this design, a plurality of fasteners (not shown) extend through the outer apertures 48D to fixedly secure the outer perimeter 48A of the movable member seal 48 to the distal end 36B of the inner part 14. Further, a plurality of fasteners (not shown) extends through the inner apertures 48E to fixedly secure the inner perimeter 48B to the movable member 16 (illustrated in Figure 1A). Alternatively, the movable member seal 48 can be attached to the second housing 14 and the movable member 16 in another fashion.

[00113] Further, the movable member flexure 50 is generally open annular shaped and includes an outer perimeter 50A, an inner perimeter 50B, and a plurality of connector beams 50C that connect the outer perimeter 50A to the inner perimeter 50B. Additionally, the movable member flexure 50 includes a plurality of spaced-apart outer apertures 50D and a plurality of spaced-apart inner apertures 50E. In this design, a plurality of fasteners (not shown) extend through the outer apertures 50D to fixedly secure the outer perimeter 50A of the movable member flexure 50 to the distal end 36B of the second housing 14. Further, a plurality of fasteners (not shown) extends through the inner apertures 50E to fixedly secure the inner perimeter 50B to the movable member 16. Alternatively, the movable member flexure 50 can be attached to the second housing 14 and the movable member 16 in another fashion.

[00114] Figure 1 F is a perspective view of the movable member 16 and the movable member flexure assembly 20; and Figure 1 G is a partly cut-away perspective view of the movable member 16 and the movable member flexure assembly 20. In Figures 1 F and 1 G, the (i) the movable member head 40, including the first movable member side 40A, is visible, and (ii) the movable member shaft 42, including the first shaft end 42A and the second shaft end 42B, is visible.

[00115] With reference to Figure 1 G, a plurality of fasteners (not shown) extend through the inner apertures 48E of the movable member seal 48 to fixedly secure the movable member seal 48 to the movable member head 40. Somewhat similarly, the movable memberflexure 50 is fixedly secured to the movable member head 40 spaced apart (e.g., below) movable member seal 48. In this design, the movable member seal 48 and the movable member flexure 50 are secure to the second movable member side 40B (illustrated in Figure 1 ).

[00116] Figures 1 H and 11 are alternative perspective views of a non-exclusive example of the housing flexure 46. It should be noted that the movable member flexure 50 (illustrated in Figure 1 G can be similar or different from the design illustrated in Figures 1 H and 11. In this design, the housing flexure 46 has high stiffness in the plane of the flexure 46 (along the V2 and V3 axes, and about V1 axis), and low stiffness for out-of-plane motions (along the V1 axis, and about the V2 and V3 axes). Stated in another fashion, the housing flexure 46 has (i) a first axis stiffness along the V1 axis, (ii) a second axis stiffness along the V2 axis; (iii) a third axis stiffness along the V3 axis; (iv) a theta first axis stiffness about the V1 axis, (v) a theta second axis stiffness about the V2 axis; and (vi) a theta third axis stiffness about the V3 axis. In this design, for each flexure 46, (i) the first axis stiffness is less than the second axis stiffness and the third axis stiffness; and (ii) the theta first axis stiffness is greater than the theta second axis stiffness and the theta third axis stiffness. As alternative, non-exclusive examples, the second axis stiffness and the third axis stiffness are at least 5, 10, 20, 50, 100, 200, 200, 500, or 1000 percent greater than the first axis stiffness. Further, as alternative, non-exclusive examples, the theta first axis stiffness is at least 5, 10, 20, 50, 100, 200, 200, 500, or 1000 percent greater than the theta second axis stiffness and the theta third axis stiffness.

[00117] As illustrated in Figures 1 H and 11, the housing flexure 46 is generally open annular disk-shaped and includes the outer perimeter 46A, the inner perimeter 46B, the plurality of connector beams 46C (“legs”) that connect the outer perimeter 46A to the inner perimeter 46B, the plurality of spaced-apart outer apertures 46D, and the plurality of spaced-apart inner apertures 46E. In this example, the outer perimeter 46A has a generally annular shape, and the inner perimeter 46B has a generally annular shape. Further, each connector beam 46C has an outer connector end 52A that is connected to the outer perimeter 46A, and an inner connector end 52B that is connected to the inner perimeter 46B. It should be noted that the housing flexure 46 can be made as separate parts or an integral part. For example, the housing flexure 46 can be a stamped, laser-cut, milled, or waterjet-fabricated part. In addition, the housing flexure 46 can be formed, as shown in the figures, from a single sheet of material or may comprise several thin parallel sheets of material.

[00118] In this non-exclusive example, the characteristics of the housing flexure 46 can be varied by varying the number, size, shape, length, and design of the connector beams 46C. For example, the housing flexure 46 can include three, more than three, or fewer than three connector beams 46C. In Figures 1 H and 11, each connector beam 46C can be flat, curved beam-shaped.

[00119] It should be noted that other configurations of the flexures 46, 50 are possible. For example, in alternative embodiments, each connector beam 46C can be a flat, straight beam shaped. In still other alternative embodiments, the inner perimeter 46B, outer perimeter 46A, and connector beams 46C may be thicker (along the V1 axis) than the inner and outer connector ends 52A, 52B. Uniquely, each flexure 46, 50 acts like a universal joint (or ball joint) that has high stiffness in the plane (along V2 and V3 axes, and about V1 axis) of the flexure 46, 50 and low stiffness for out-of-plane (about V2 and V3 axes) motions in series with a guide that allows low stiffness out-of- plane motion along the V1 axis. Thus, the flexures 46, 50 provide the in-plane constraints without causing too much stiffness in the other degrees of freedom. Stated in another fashion, to achieve these characteristics of the vibration reducer 6, the circular flexures 46, 50 provide low stiffness along the V1 axis, and about V2 and V3 axes; while constraining motions along V2 and V3 axes, and about the V1 axis. This flexure 46, 50 design is advantageous in terms of providing lightweight and compact packaging.

[00120] Figures 2A and 2B are simplified, cross-sectional illustrations of another implementation of the vibration reducer 206, the first component 202, and the second component 204. Further, Figures 2A and 2B illustrate the first housing 212, the second housing 214, the movable member 216, the housing flexure assembly 218, and the movable member flexure assembly 220 of the vibration reducer. These Figures illustrate the behavior of the vibration reducer 206, in exaggerated amplitude.

[00121] More specifically, Figure 2A illustrates the characteristics of the vibration reducer 206 when the first component 202 and the first housing 212 experience a movement 254 downward along the V1 axis. At this time, the housing flexure assembly 218 and the movable member flexure assembly 220 flex along the V1 axis, and the first housing 212 and the second housing 214 move relative to the movable member 216, thereby maintaining the position of the second component 204. Stated in another fashion, the vibration reducer 206 has inhibited the vibration of the first component 202 along the V1 axis from being transferred to the second component 204.

[00122] Further, Figure 2B illustrates the characteristics of the vibration reducer 206 when the first component 202 and the first housing 212 experience a lateral movement 256 along the V2 axis. Stated in a different fashion, Figure 2B shows a V2 lateral motion 256 of the first component 202 relative to the second component 204. It should be noted that the amplitude of the lateral movement is exaggerated for clarity. The second housing 214 rotates about V3 to accommodate the motion 256. At this time, the housing flexure assembly 218 and the movable member flexure assembly 220 flex about the V3 axis, and the first housing 212 and the second housing 214 move relative to the movable member 216, thereby maintaining the position of the second component 204. Stated in another fashion, the vibration reducer 206 has inhibited the vibration of the first component 202 along the V2 axis from being transferred to the second component 204.

[00123] Figure 3A is a simplified perspective view of another implementation of a machine 310 that includes a first component 302, a second component 304, and a plurality of spaced-apart vibration reducers 306 that inhibit vibration from the first component 302 from being transferred to the second component 304. In Figure 3A, the machine 310 that is programmable and controllable to carry out one or more complex actions automatically.

[00124] Figures 3A-3D include a gravitational orientation system that is referenced to the gravity, and that illustrates an X-axis, a Y-axis that is orthogonal to the X-axis, and a Z-axis that is orthogonal to the X and Y axes. In this orientation system, the Z- axis is aligned with gravity and directed upward. It should be noted that any of these axes can also be referred to as the first, second, and/or third gravitational axes. Further, movement along or about a single axis can be referred to as a one degree of freedom, and movement along and about the X, Y, and Z axes can be referred to as six degrees of freedom.

[00125] It should be noted that the number and design of the components of the machine 310, and the number of vibration reducers 306 utilized can be varied to achieve the task(s) to be performed by the machine 310. In Figure 3A, the machine 310 is a robotic assembly that includes a robot arm that is supported by a support (not shown). In this implementation, the robotic assembly can be considered the first component 302. Alternatively, the machine 310 can be another type of processing machine other than a robotic assembly with a robotic arm. For example, the robot is not limited to an anthropomorphic type such as an articulated robot. As non-exclusive examples, the robot can be a SCARA robot; a serial-link robot such as a rectangular robot; a cylindrical robot; a polar robot; or a parallel-link robot. As alternative, nonexclusive examples, the vibration reducers 306 can be used in a conventional processing machine (e.g., a laser processing machine or a machining center) or a transport machine (e.g., an automated guided vehicle or aerial drone).

[00126] The robotic assembly 302 moves and positions the second component 304. The design of the robotic assembly 302 can be varied to suit the movement requirements of the second component 304. For example, the robotic assembly 302 can be a multiple degree of freedom robotic (mechanical) arm that can be controlled by a control system 322 to move and position the second component 304 with at least one, two, three, four, five, or six degrees of freedom. The robotic assembly 302 can include one or more rigid links 302A, one or more joints 302B, and one or more link actuators 302C. The links 302A are connected by joints 302B that allow for either rotational motion or translational movement, and the link actuators 302C are controlled to rotationally and/or translationally move the links 302A. The rebotic assembly 302 can be generically referred to as a mover assembly or positioning assembly.

[00127] In one implementation, the distal end of the robotic assembly 302 can include a robot connector frame 302D that provides a rigid structure for (i) supporting the vibration reducers 306, (ii) connecting the vibration reducers 306 to the robotic assembly 302, and (iii) properly positioning the vibration reducers 306 for vibration isolation of the second component 304. The robot connector frame 302D can be generically referred to as an object, or stage.

[00128] It should be noted that the industrial robotic assembly 302 can be subjected to some amount of vibration disturbance from the support, from the environment, or from its own motion. Because of the mechanical dynamics of the robotic assembly 302, some of those vibrations are transmitted to the robot connector frame 302D. Additionally, the robotic assembly 302 itself may add additional vibration modes. Still further, disturbance forces from air currents (i.e. , wind), acoustic noise, and cables or hoses may act on the second component 304. As discussed below, the vibration reducer 306 inhibits this vibration from being transmitted to the second component 304 and counteracts the effects of these disturbances.

[00129] The size, shape and design of the second component 304 can be varied to achieve the task the machine 310 is designed to perform. In Figure 3A, the second component 304 is an optical instrument that is designed to interact with a target workpiece. As non-exclusive examples, the second component 304 can be a device for performing a desired task such as welding, cutting, measuring, soldering, manufacturing, cladding, grooving, depositing material, ablating material, gripping, spinning, placement, or fastening. For example, the second component 304 as a payload can include at least a part of an optical system or an optical element (e.g., a light source), for example, for outputting a laser beam. In certain embodiments, the laser light source can be located around a proximal base of the robotic arm or at other locations, and can be linked to the end effector by an optical fiber or other light guide/wave guide. As another example, the second component 304 can be an optical instrument, such as a laser, and the desired task can be (i) precisely cutting or removing one or more grooves (not shown) in one or more components (not shown); (ii) welding one or more components; and/or (iii) soldering one or more components. Alternatively, for example, the second component 304 can be a gripper (e.g., a robotic hand), and the desired task is moving and/or positioning an object (not shown). The term “second component” can also be referred to as a “payload” or “object”. It should be noted that the design of the vibration reducers 306 can be adjusted to suit also any sized or shaped payload.

[00130] Figure 3B is a perspective view of the payload 304, some of the vibration reducers 306, and a portion of the robot assembly 302, including the robot connector frame 302D of Figure 3A. In the implementation of Figure 3B, the payload 304 includes a rigid payload connector frame 304A and the vibration reducers 306 extend and are coupled between robot connector frame 302D and the payload connector frame 304A. It should be noted that (i) the robot connector frame 302D can be referred to as a robot support frame, (ii) the payload connector frame 304A can be referred to as a payload support assembly, and/or (iii) the robot connector frame 302D and the payload connector frame 304A can be generically referred to as the support assembly. [00131] Figure 3C is a perspective view of a portion of the robotic assembly 302, and the vibration reducers 306, and the payload connector frame 304A. Figure 3D is a perspective view of the payload 304, including the payload connector frame 304A, and the vibration reducers 306. With reference to Figures 3B-3D, the vibration reducers 306 are directly secured to the payload connector frame 304A and the robot connector frame 302 D.

[00132] Figure 3E is a side view of a portion of the robot 302 and the vibration reducers 306. Figure 3F is a bottom view of a portion of the robot 302 and the vibration reducers 306. Figure 3G is a perspective view of a portion of the robot 302 and the vibration reducers 306. It should be noted that Figures 3E-3G each include a triangular or tetrahedral outline to illustrate the possible positioning of a support assembly (not shown in these figures) that interconnects the vibration reducers 306 . This outline is not part of the machine 310.

[00133] With reference to Figures 3B-3G, the vibration reducers 306 each extend between the robotic connector frame 302D and the payload connector frame 304A. Further, the vibration reducers 306 support the mass of the payload connector frame 304A and the payload 304 and isolate the payload 304 from high frequency external disturbances.

[00134] The number and design of the vibration reducers 306 can be varied. For example, the non-exclusive implementation in Figures 3B-3G includes four spaced apart, vibration reducers 306 that each extend between the robot connector frame 302D, and the payload connector frame 304A. In this design, the four pneumatic vibration reducers 306 are arranged in a tetrahedron-based configuration pointed at a payload center of gravity 304B (illustrated with a small dashed cross in Figures 3F and 3G). The payload center of gravity 304B is the center of gravity of the entire payload, including (in this example) the second component 304, the payload connector frame 304A, the portion (e.g., the movable members) of the vibration reducers 306 that are secured to the payload connector frame 304A, and the portion of the actuators 340 that are secured to the payload connector frame 304A. For example, each vibration reducer 306 has its own alignment axis 307 (parallel to V1 axis of Figure 1 A).

[00135] In the tetrahedron-based configuration, the payload connector frame 304A is designed to retain the vibration reducers 306 so that the alignment axis 307 of each vibration reducer 306 is perpendicular to a different face of the imaginary tetrahedron, and each alignment axis 307 extends through the payload center of gravity 304B. In this implementation, the payload connector frame 304A is designed so that each of the vibration reducers 306 is positioned so that their force is perpendicular to a separate one of the faces of the imaginary tetrahedron. More specifically, (i) a first vibration reducer 306A is positioned to direct its force perpendicular to a first face of the imaginary tetrahedron and through the payload center of gravity 304B; (ii) a second vibration reducer 306B is positioned to direct its force perpendicular to a second face of the imaginary tetrahedron and through the payload center of gravity 304B; (iii) a third vibration reducer 306C is positioned to direct its force perpendicular to a third face of the imaginary tetrahedron shape and through the payload center of gravity 304B; and (iv) a fourth vibration reducer 306D is positioned to direct its force perpendicular to a fourth face of the imaginary tetrahedron and through the payload center of gravity 304B. In this design, aligning the axes 307 perpendicular to the faces of the imaginary tetrahedron ensures that the vibration reducers 306 are oriented so that an angle between any two vibration reducers 306 is the same. It should be noted that the vibration reducers 306 do not have to be located at the faces of the imaginary tetrahedron, and that the location of the tetrahedron is irrelevant. Instead, the alignment axis 307 of each of the vibration reducers 306 needs to be perpendicular to the faces of the tetrahedron. In other words, the imaginary tetrahedron is a way to establish the angular orientation of each of the vibration reducers 306. In summary, with this design, effectively, the alignment axis 307 of the vibration reducers 306 are each oriented towards a single location (e.g., the payload center of gravity 304B). As a result thereof, the four vibration reducers 306 are symmetrically positioned, and their forces act through the payload center of gravity 304B. With this design, the location of the imaginary tetrahedron will vary according to the location of the payload center of gravity 304B. Further, the location of the imaginary tetrahedron will influence the design of the connector frames 302D, 304A.

[00136] Alternatively, the payload center of gravity 304B may be located out of the center of the tetrahedron or may be located within the bounds of the tetrahedron. However, it should be noted that the vibration reducers 306 may be configured in other arrangements other than tetrahedrons. For example, if the number of vibration reducers 306 is greater than four, the vibration reducers 306 can be configured with their axes perpendicular to the faces of a polyhedron with that number of faces. In other examples, the vibration reducers 306 can be configured, so the angles between them are not equal, but vary by an amount less than 10, 20, 30, or 50 percent.

[00137] For convenience, these vibration reducers 306 are labeled (i) the first vibration reducer 306A; (ii) the second vibration reducer 306B; (iii) the third vibration reducer 306C; and (iv) the fourth vibration reducer 306D. The design of each vibration reducer 306 can be similar to the vibration reducer 6 described above with reference to Figures 1A-1 I. In this design, each vibration reducer 306 isolates vibration regardless of orientation, and the four vibration reducers 306 can cooperate together to support the payload 304 against gravity in any direction (if necessary) and effectively isolate vibration from the robot 302.

[00138] Further, each vibration reducer 306 can be passive or can be actively controlled. For an actively controlled system, the sensor system 24 (illustrated in Figure 1 A) for each vibration reducer 306 can provide feedback, and the control system 322 (illustrated in Figure 3A) can individually and actively adjust and control the pressure in each vibration reducer 306. This active control of the pressure also actively controls the force produced by each of the vibration reducers 306.

[00139] It should be noted that this embodiment can be further enhanced by adding one or more actuators 340 to create an augmented active vibration system. This system may allow for the payload 304 to be held at desired position via tracking an object (not shown) in the environment while being decoupled from the vibration of the robot 302. It should be noted that the one or more vibration reducers 306 and/or the one or more actuators 340 can be referred to as a vibration isolation assembly.

[00140] The number of optional, actively controlled, actuators 340 can be varied. The non-exclusive implementation in Figures 3B-3C includes six spaced apart actuators 340 that each extend between the robot connector frame 302 D and the payload connector frame 304A. For convenience, these actuators 340 can be labeled (i) a first actuator 340A, which extends along the X-axis; (ii) a second actuator 340B and a third actuator 340C, which extend along the Y-axis; and (iii) a fourth actuator 340D, a fifth actuator 340E, and a sixth actuator 340F which extend along the Z-axis. [00141] In this design, (i) the first actuator 340A generates a controllable force along the X-axis on the payload 304; (ii) the second actuator 340B and the third actuator 340C each generate a separate, individually controllable force along the Y-axis on the payload 304; and (iii) the fourth actuator 340D, the fifth actuator 340E, and the sixth actuator 340F each generate a separate, individually controllable force along the Z- axis on the payload 304. Further, the Y-axis forces generated by the second actuator 340B and the third actuator 340C can be used to generate a controllable rotational force on the payload 12 about the Z-axis. Moreover, the Z-axis forces generated by the fourth actuator 340D, the fifth actuator 340E, and the sixth actuator 340F can be used the generate a controllable rotational force on the payload 12 about the X-axis and about the Y-axis. With this design, the actuators 340 can be controlled to position the payload 312 with six degrees of freedom.

[00142] As non-exclusive examples, each actuator 340 can be a voice coil actuator, a linear actuator, rotational actuator, variable reluctance actuator, or another type of actuator.

[00143] With this design, a measurement system (not shown) can provide feedback to the control system 322 (illustrated in Figure 3A), and the control system 322 can actively control (direct electric current) to the actuators 340 to individually and actively adjust the force generated by each actuator 340. This active control of the force by each actuator 340 can be used to rapidly maintain the position of the payload 304 under the control of the control system 322. For example, the feedback can include the position, orientation, velocity, and/or acceleration of the payload 304 relative to the robot connector frame 302D or other reference. It should be noted that the measurement system or a portion thereof, can be considered part of the payload 304, and separate from the machine 310.

[00144] Figure 4 is a simplified perspective view of another implementation of a portion of a second machine 410 that is programmable and controllable to carry out one or more complex actions automatically. In Figure 4, the first component 402 is again a robotic assembly having a connector frame 402D (also referred to as an object or stage). Further, the payload 404 is isolated from the vibration of the first component 402 with a vibration isolation assembly that includes a plurality of vibration reducers 406 and a plurality of actuators 440 that are somewhat similar to the corresponding components described above and illustrated in Figures 3A-3G. However, in this implementation, the payload 404 is generally rectangular-shaped and includes six sides.

[00145] Further, the non-exclusive implementation in Figure 4 includes six spaced apart, vibration reducers 406 that each extend between the connector frame 402D and the payload 404. In this design, there is one vibration reducer 406 for each of the six sides of the payload 404 (three are visible in Figure 4).

[00146] Moreover, the non-exclusive implementation in Figure 4 includes six spaced apart actuators 440 that each extend between the connector frame 426 and the payload 404. The actuators 440 can be designed and positioned to generate controllable forces along the X, Y, and Z axes, and about the X, Y, and Z axes.

[00147] It should be noted that the vibration reducers 406 can have a different arrangement than illustrated in Figures 3A-4. For example, the vibration reducers 406 can be arranged in a non-parallel configuration. In this design, one or more (e.g., all) of the vibration reducers 406 are not parallel to each other. For example, the vibration reducers 406 can be arranged in other “polyhedral” configurations, or other configurations than just the tetrahedron or X, Y, Z axes configuration.

[00148] Figure 5 is a simplified cut-away of the first component 502, the second component 504, and another implementation of the vibration reducer 506. The vibration reducer 506 is again uniquely designed to at least partly inhibit vibration in the first component 502 from being transferred to the second component 504 with at least one degree of freedom, regardless of the orientation of the vibration reducer 506. Stated in another fashion, the vibration reducer 506 can provide a controlled force in the positive V1 direction on the second component 504, and a corresponding reaction force in the negative V1 direction on the first component 502 while effectively reducing (isolating) vibration from the first component 502 from being transferred to the second component 504.

[00149] The vibration reducer 506 of Figure 5, includes (i) a first housing 512, (ii) a second housing 514, (iii) a movable member 516, (iii) a housing flexure assembly 518 including a housing seal 544, and a housing flexure 546, (iv) a movable member flexure assembly 520 including a movable member seal 548 and a movable member flexure 550, (v) a control system 522 (illustrated as a box), (vi) a sensor system 524 (illustrated as a box), and (vii) a reducer adjuster 526 (illustrated as a box) that are similar in function and design to the corresponding components described above with reference to Figures 1 A-11. However, in the implementation of Figure 5, the second housing 514 is positioned above and not within the first housing 512, and the movable member 516 is positioned above and not with the second housing 514.

[00150] In Figure 5, similar as the implementation of Figures 1 A-11, (i) the housing flexure assembly 518 acts as a first universal joint that allows pivoting between the second housing 514 and the first housing 512 and as a slide that allows motion along the V1 axis; and (ii) the movable member flexure assembly 520 acts as a second universal joint that allows pivoting between the movable member 516 and the second housing 514 and as a slide that allows motion along the V1 axis. In this design, the two universal joints are spaced apart along the V1 axis, each flexure assembly 518, 520 has high stiffness in the plane of the flexure (along the V2 and V3 axes, and about V1 axis), and low stiffness for out-of-plane motions (along the V1 axis, and about the V2 and V3 axes).

[00151] It should be noted that the vibration reducer 506 of Figure 5 can be used in any of the machines disclosed herein.

[00152] Figure 6 is a simplified view of another implementation of a machine 610. In this implementation, the machine 610 is an aerial vehicle (e.g., an Automatically Guided Vehicle (AGV) or an aerial drone). In this design, the aerial vehicle can be considered the first component 602.

[00153] Further, the machine 610 can include a robotic arm 660, a laser 662, and a vibration isolation assembly 664 (illustrated as a box) that couples the robotic arm 660 to the aerial vehicle 602. The vibration isolation assembly 664 can include one or more vibration reducers 6 (illustrated in Figure 1A) that at least partly inhibit vibration from the aerial vehicle 602 from being transferred to the robotic arm 660 and the laser 662 relative to a target surface 666. In Figure 6, the robotic arm 660 and the laser 662 can be considered the second component.

[00154] Alternatively, the machine 610 can be used to position another type of payload 604. The drone can be remotely operated, autonomous, or preprogrammed. [00155] Figure 7 is a simplified view of another implementation of a machine 710. In this implementation, the machine 710 includes a vehicle 768 (e.g., an automatically, remotely or manually driven cart) and a robotic arm 760. In this design, the vehicle 768 and the robotic arm 760 can be considered the first component 702.

[00156] Further, the machine 710 can include a payload 704 and one or more vibration reducers 706 that couple the payload 704 to the robotic arm 760, and inhibits vibration from the robotic arm 760 from being transferred to the payload 704. The vibration reducer(s) 706 can be similar to the corresponding vibration reducer 6, illustrated in Figure 1A.

[00157] It should be noted that the vibration reducer(s) 6 disclosed herein can be used with other machines or vehicles. For example, the vehicle can be a water or underwater vehicle, or another type of vehicle.

[00158] Additionally, it should be noted that other designs of the vibration reducer(s) are possible. For example, Figure s is a simplified cut-away view of the first component 802 (illustrated as a box), a second component 804 (illustrated as a box), and another implementation of a vibration reducer 806 that cooperate to form a portion of a machine 810. In this design, the vibration reducer 806 is again designed to reduce a magnitude of a vibration transferred from the first component 802 to the second component 804 with at least one degree of freedom, regardless of the orientation of the vibration reducer 806.

[00159] The design of each component 802, 804 can be similar to the corresponding components described above. For example, the first component 802 can be part of the robotic arm, and the second component 804 can be an optical instrument that is positioned by the robotic arm.

[00160] Similar to the designs above, the vibration reducer 806 at least partly inhibits vibration in the first component 802 from being transferred to the second component 804 with at least one degree of freedom, regardless of the orientation of the vibration isolation assembly. In one non-exclusive implementation, the vibration reducer 806 at least partly inhibits vibration in the first component 802 from being transferred to the second component 804 with at least three degrees of freedom. In Figure 8, the vibration reducer 806 at least partly inhibits vibration in the first component 802 with six degrees of freedom (along the V1 , V2, V3 axes, and about the V1 , V2, V3 axes) from being transferred to the second component 804.

[00161] In Figure 8, the vibration reducer 806 includes a housing 812, a movable member 816, a first coupler 860, a second coupler 862 that is spaced apart from the first coupler 860, a connector 864, a control system 822 (illustrated as a box), a sensor system 824 (illustrated as a box), and a reducer adjuster 826 (illustrated as a box). The size, shape, and design of each of the components of the vibration reducer 806 can be varied.

[00162] The housing 812 is coupled to one of the components 802, 804, and the movable member 816 is coupled to the other of the components 804, 802. In the implementation of Figure 8, the housing 812 is fixedly secured to the first component 802 (e.g., the robotic arm), and the movable member 816 is secured through connector 864 to the second component 804 (e.g., the payload).

[00163] In Figure 8, the housing 812 is rigid, generally cylindrical-shaped, and includes (i) a housing axis 812A at its center that is aligned with and parallel to the V1 axis, (ii) a tubular housing wall 812B, (iii) an annular, disk-shaped housing base 812C, and (iv) a tubular, inner wall 812D that extends upward from the housing base 812C. In Figure 8, the top of the housing wall 812B is fixedly secured to the first component 802.

[00164] In one non-exclusive implementation, the movable member 816 is at least partly positioned within the housing 812, and the moveable member 816 is rigid. In Figure 8, the movable member 816 includes a movable member head 840, and a movable member shaft 842 that extends away from the movable member head 840. In certain implementations, the movable member 816 is piston shaped, with the member head 840 having the shape of a piston head, and the member shaft 842 having a piston shaft shape. Stated differently, the movable member head 840 is somewhat cylindrical disk-shaped, and the movable member shaft 842 is generally cylindrical beam-shaped. In this design, the movable member shaft 842 has a first shaft end 842A that is coupled to the second component 804 via the connector 864, and a second shaft end 842B that is secured to the movable member head 840. The movable member head 840 and the movable member shaft 842 can be formed together or separately. Further, the movable member 816 has a movable member axis 816A that is aligned with the V1 axis and/or the housing axis 812A.

[00165] The first coupler 860 and the second coupler 862 cooperate to flexibly connect and seal the movable member 816 to the housing 812. With this design, the two couplers 860, 862 are spaced apart along the V1 axis, each coupler 860, 862 has high stiffness in the plane of the coupler 860, 862 (along the V2 and V3 axes, and about V1 axis), and low stiffness for out-of-plane motions (along the 1 axis, and about the V2 and V3 axes).

[00166] It should be noted that either of the couplers 860, 862 can be referred to as the first coupler or the second coupler. Further, the design of each coupler 860, 862 can be varied to achieve the desired vibration isolation characteristics.

[00167] In the non-exclusive implementation of Figure 8, the first coupler 860 includes (i) a first seal 860A that seals the movable member head 840 to the housing 812; and (ii) a first flexure 860B that flexibly couples and secures the movable member head 840 to the housing 812. In Figure 8, the first seal 860A is spaced apart from the first flexure 860B.

[00168] Somewhat similarly, in Figure 8, the second coupler 862 includes (i) a second seal 862A that seals the movable member shaft 842 to the housing 812; and (ii) a second flexure 862B that flexibly couples and secures the movable member shaft 842 to the housing 812. In Figure 8, the second seal 862A is spaced apart from the second flexure 862B.

[00169] As non-exclusive examples, (i) one or each seal 860A, 862A can be a rolling diaphragm type seal similar to that described above, an “O” ring type seal that allows for low stiffness axial motion, a piston ring type seal, a “U-cup” type seal, or another type of seal; and (ii) one or each flexure 860B, 862B can be similar to the flexures described above. Alternatively, one or both of the couplers 860, 862 can be designed without the respective flexure 860B, 862B. Still alternatively, one or both of the couplers 860, 862 can be designed with the seal 860A, 862A, and the respective flexure 860B, 862B integrated together.

[00170] With the present design, the couplers 860, 862 allow the movable member 816 to move freely (within a certain range) along the V1 axis relative to the housing 812 while inhibiting the movement of the movable member 816 along the V2 and V3 axes, and about the V1 , V2, and V3 axes relative to the housing 812.

[00171] Additionally, the housing 812 cooperates with the movable member816, and the couplers 860, 862 to define a chamber 834 (e.g., a pneumatic chamber) that receives a portion of the movable member 816. In Figure 8, the movable member head 840 includes a first side 840A that is subjected to the pressure in the chamber 834 and a second side 840B that is subjected to the pressure around the vibration isolator 806. For example, the second side 840B can be subjected to ambient atmosphere, and the pressure on the second side 840B is equal to the ambient pressure. In the orientation of Figure 8, the second side 840B is on the top, and the first side 840A is on the bottom. [00172] The connector 864 connects the movable member 816 to the second component 804. In one implementation, the connector 864 has (i) high stiffness along the V1 axis, (ii) low stiffness along the V2 and V3 axes, and (iii) low stiffness about the V1 , V2, and V3 axes. Further, vibration isolator 806 is positioned and configured so that the connector 864 is always in tension during operation. As non-exclusive examples, the connector 864 can be a tension wire (e.g., 7x19 wire rope) or a thin, solid rod. In certain implementations, the connector 864 has high tensile strength. As used herein, in alternative, non-exclusive examples, the term “high tensile strength” shall mean tensile strength of the material greater than 200, 400, or 500 MPa, and the term "high stiffness" shall mean stiffness along an axis of greater than 10, 20, 50, 100, 200, 500, or 1000 N/mm.

[00173] The control system 822, the sensor system 824, and the reducer adjuster 826 can be similar to the corresponding components described above. In Figure 8, the reducer adjuster 826 is controlled by the control system 822 using feedback from the sensor system 824 to actively adjust and control the pressure of fluid 828 (illustrated as small circles) within the chamber 834 that acts against the first side 840A of the movable member head 840, and thereby the force produced by the vibration reducer 806. With this design, the vibration reducer 806 is an actively controlled by the control system 822. Alternatively, the vibration reducer 806 can be a passive system in which the pressure of the fluid 828 is not actively controlled. In this way, a controlled force along the direction of the V1 axis (upwards in Figure 8) can be transferred through the connector 864 to second object 804 while bending or twisting of the connector 864 can allow relative motion in all six degrees of freedom between the first component 802 and the second component 804.

[00174] With this design, the problem of providing vibration reduction for an industrial robot performing a precision operation is solved by utilizing one or more vibration reducers 806 that each allows for lateral motion, and provides a low stiffness controlled force to counteract the force of gravity (or other required forces). As a result of this design, the vibration reducer 806 can be used to counteract the gravitational load of the assembly hanging from the movable member 816 and the connector 864 or other required forces.

[00175] It should be noted that the unique design of the vibration reducer 806 provided herein allows for the vibration reducer 806 to be used in applications where the movable member axis 816A is aligned with gravity or not aligned with gravity. As provided herein, the problem of providing a low-cost, high-performance vibration isolator 806 that uses a low stiffness fluid support to compensate for gravity is solved by using a design that creates a tension force through a connector 864.

[00176] In Figure 8, the movable member 840 is connected to the pressurized chamber 834 by two seals 860A, 862A. Because the two seals 860A, 862A are different diameters, a pressure differential creates a force (upwards, as seen in the Figure 8) on the movable member 840. The movable member 816 is connected to the vibration-isolated load 804 by the connector 864 in tension.

[00177] It should be noted that one or more of the vibration reducers 806 can be used in any of the machines disclosed herein, including the robot assembly 310 of Figure 3A, the aerial vehicle 610 of Figure 6, the vehicle 710 of Figure 7, or another type of machine, such as a conventional processing machine (e.g., a laser processing machine or a machining center).

[00178] Further, similar to the examples discussed above, one or more of the vibration reducers 806 (only one is shown in Figure 8) can extend between and couple the components 802, 804. For example, four vibration reducers 806 can be arranged in a tetrahedron-based configuration and/or pointed at a payload center of gravity somewhat similar to what is illustrated in Figures 3A-3G. However, it should be noted that the vibration reducers 806 may be configured in arrangements other than tetrahedrons. For example, if the number of vibration reducers 806 is greater than four, the vibration reducers 806 can be configured with their axes perpendicular to the faces of a polyhedron with that number of faces. In other examples, the vibration reducers 806 can be configured, so the angles between them are not equal, but vary by an amount less than 10, 20, 30, or 50 percent. In yet another example, the vibration reducers 806 can be arranged parallel to three perpendicular axes. In still another example, the vibration reducers 806 are arranged in a non-parallel configuration.

[00179] Additionally, the vibration reducers 806 can be used in conjunction with one or more (e.g., a plurality) actuators 340 (illustrated in Figure 3B) that exert a force between the first component 802 and the second component 804. In a specific, nonexclusive example, at least one vibration reducer 806 and at least one actuator 340 can act in parallel.

[00180] Figure 9 is a simplified cut-away view of the first component 902 (illustrated as a box), a second component 904 (illustrated as a box), and yet another implementation of a vibration reducer 906 that cooperate to form a portion of a machine 910. In this design, the vibration reducer 906 is designed to function similarly to the vibration reducer 806 described above and illustrated in Figure 8. Further, each component 902, 904 can be similar to the corresponding components described above.

[00181] In Figure 9, the vibration reducer 906 includes a housing 912, a movable member 916, a first coupler 960, a second coupler 962 that is spaced apart from the first coupler 960, a control system 922 (illustrated as a box), a sensor system 924 (illustrated as a box), and a reducer adjuster 926 (illustrated as a box). In Figure 9, the first coupler 960, the second coupler 962, the control system 922, the sensor system 924, and the reducer adjuster 926 are the same as the corresponding components described above and illustrated in Figure 8.

[00182] However, in Figure 9, the housing 912, the movable member 916, and the connector 964 are similar, but slightly different from the corresponding components described above. More specifically, in Figure 9 (in contrast to Figure 8), (i) the tubular, inner wall 912D is longer and extends upward from the housing base 912C; (ii) the moveable member shaft 942 is relatively short and only extends a short distance from the movable member head 940; and (iii) the connector 964 is longer and partly encircled by the inner wall 912D and the chamber 934. With this design, the vibration isolator 906 can be made with a smaller footprint than the corresponding vibration isolator 806 with a similar length connector 964.

[00183] It should be noted that one or more of the vibration reducers 906 can be used in any of the machines disclosed herein, including the robot assembly 310 of Figure 3A, the aerial vehicle 610 of Figure 6, the vehicle 710 of Figure 7, or another type of machine, such as a conventional processing machine (e g., a laser processing machine or a machining center).

[00184] Further, similar to the examples discussed above, one or more of the vibration reducers 906 (only one is shown in Figure 9) can extend between and couple the components 902, 904. For example, four vibration reducers 906 can be arranged in a tetrahedron-based configuration and/or pointed at a payload center of gravity somewhat similar to what is illustrated in Figures 3A-3G. However, it should be noted that the vibration reducers 906 may be configured in other arrangements other than tetrahedrons. For example, if the number of vibration reducers 906 is greater than four, the vibration reducers 906 can be configured with their axes perpendicular to the faces of a polyhedron with that number of faces. In other examples, the vibration reducers 906 can be configured, so the angles between them are not equal, but vary by an amount less than 10, 20, 30, or 50 percent. In yet another example, the vibration reducers 906 can be arranged parallel to three perpendicular axes. In still another example, the vibration reducers 806 are arranged in a non-parallel configuration.

[00185] Additionally, the vibration reducers 906 can be used in conjunction with one or more (e.g., a plurality) actuators 340 (illustrated in Figure 3B) that exert a force between the first component 902 and the second component 904. In a specific, nonexclusive example, at least one vibration reducer 906 and at least one actuator 340 can act in parallel. [00186] Figure 10 is a bottom view of yet still another implementation of a portion of a machine 1010 that includes robotic assembly 1002 and a portion of a vibration isolation assembly 1006 that inhibits vibration from the robotic assembly 1002 from being transferred to the payload 304 (illustrated in Figure 3A). It should be noted that Figure 10 includes a triangular or tetrahedral outline to illustrate the possible positioning of a support assembly (e.g., the payload connector frame 304A illustrated in Figure 3B) that interconnects the vibration reducers 1006. As explained herein, this outline is not part of the design. The embodiment displayed in Figure 10 can be somewhat similar to those implementations illustrated in Figures 3A-3G.

[00187] Figure 10 includes a gravitational orientation system referenced to gravity, illustrating an X-axis, a Y-axis that is orthogonal to the X-axis. While the Z-axis is not shown in Figure 10, it is illustrated in other figures, such as Figure 3G.

[00188] The design of the machine 1010 and/or the vibration reducers 1006 can be somewhat similar to any of the embodiments described herein. It should be noted that the number and design of the components of the machine 1010, and the number of vibration reducers 1006 utilized can be varied to achieve the task(s) to be performed by the machine 1010. In Figure 10, the machine 1010 includes a robotic assembly 1002 that includes a robot arm. In this implementation, the robotic assembly 1002 can be considered the first component 1002 or object. Alternatively, the machine 1010 can be another type of processing machine other than a robotic assembly with a robotic arm.

[00189] With reference to Figure 10, the vibration reducers 1006 each extend between the robotic connector frame (see for example the robotic connector frame 302D illustrated in Figures 3B-3G) and the payload connector frame (see for example the payload connector frame 304A illustrated in Figure 3B-3G). Further, the vibration reducers 1006 support the mass of the payload connector frame and the payload 304 (for example, as illustrated in Figure 3B-3G) and isolates the payload 304 from high frequency external disturbances.

[00190] The number and design of the vibration reducers 1006 can be varied. For example, the non-exclusive implementation in Figure 10 includes four spaced apart, vibration reducers 1006A-D. In this design, the four vibration reducers 1006A-D are arranged in a tetrahedron-based configuration pointed at a payload center of gravity 1004B (illustrated with a small dashed cross in Figure 10). For example, each vibration reducer 1006 has its own alignment axis 1007 (in some embodiments, the alignment axis 1007 is parallel to V1 axis of Figure 1 A). Alternatively, the system can be designed to have more than four or fewer than four vibration reducers 1006A-D.

[00191] As an overview, in this embodiment, the vibration reducers 1006A-D are arranged and designed so that at least one of the vibration reducers 1006A-D acts in compression, and at least one of the vibration reducers 1006A-D acts in tension. As a result thereof, the vibration reducers 1006A-D can be designed and positioned to support the gravitational weight of the payload 304, while not completely encircling the payload 304 with the vibration reducers 1006A-D, the robotic connector frame 302D, and the payload connector frame 304A. This, for example, can allow the payload 304 to perform a wider variety of tasks because it is not completely encircled. Further, the use of both compression style and tension style vibration reducers 1006A-D allows the assembly designer to more easily position the vibration reducers 1006A-D out of the desired workspace for the payload 304.

[00192] In the tetrahedron based configuration of Figure 10, the payload connector frame 304A (for example, as illustrated in Figures 3B-3G) is designed to retain the vibration reducers 1006 so that the alignment axis 1007 of each vibration reducer 1006 is perpendicular to a different face of the imaginary tetrahedron, and each alignment axis 1007 extends through the payload center of gravity 1004B. More specifically, in this implementation, (i) a first vibration reducer 1006A is positioned to direct its force perpendicular to a first face of the imaginary tetrahedron and through the payload center of gravity 1004B; (ii) a second vibration reducer 1006B is positioned to direct its force perpendicular to a second face (the face in the lower left of Figure 10) of the imaginary tetrahedron and through the payload center of gravity 1004B; (iii) a third vibration reducer 1006C is positioned to direct its force perpendicular to a third face of the imaginary tetrahedron shape and through the payload center of gravity 1004B; and (iv) a fourth vibration reducer 1006D is positioned to direct its force perpendicular to a fourth face of the imaginary tetrahedron and through the payload center of gravity 1004B. [00193] For convenience, these vibration reducers 1006 are labeled (i) the first vibration reducer 1006A; (ii) the second vibration reducer 1006B; (iii) the third vibration reducer 1006C; and (iv) the fourth vibration reducer 1006D. As provided above, at least one of the vibration reducers 1006A-D is a compression type system that can be similar to the vibration reducer described above with reference to Figures 1A-1 I, 2A, 2B, and 5, and at least one other of the vibration reducers 1006A-D is a tension-type system that can be similar to the vibration reducer described above with reference to Figures 8, and 9. In this design, each vibration reducer 1006 isolates vibration regardless of orientation, and together the vibration reducers 1006 can support gravity in any direction (if necessary) and effectively isolate vibration from the robot 1002.

[00194] For example, in some non-exclusive, non-limiting embodiments, the first vibration reducer 1006A, the third vibration reducer 1006C, and the fourth vibration reducer 1006D can be similar to the vibration reducer 6 described above with reference to Figures 1A-11, and the second vibration reducer 1006B can be similar to the vibration reducer 806 or the vibration reducer 906 described above with reference to Figure 8 and Figure 9. In some such embodiments, the first vibration reducer 1006A, the third vibration reducer 1006C, and the fourth vibration reducer 1006D can be configured to provide a compression force on the payload, and the second vibration reducer is configured to provide a tension force on the payload.

[00195] As used herein, (i) “providing a compression force on the payload” is understood to mean a vibration reducer that applies a force on the payload that pushes the payload away from the vibration reducer, and (ii) “providing a tension force on the payload” is understood to mean a vibration reducer that applies a force on the payload that pulls the payload towards the vibration reducer. For example, with reference to Figures 3A-3G and 10, (i) the first vibration reducer 1006A, the third vibration reducer 1006C, and the fourth vibration reducer 1006D can each be configured to inhibit the second object 304A from moving towards the first component 1002 by providing a compression force on the second component 304, and (ii) the second vibration reducer 1006B is configured to inhibit the second component 304 from moving away from the first component 1002 by providing a tension force on the second component 304. In various embodiments, the first vibration reducer 1006A, the third vibration reducer 1006C, and the fourth vibration reducer 1006D can each inhibit vibration in at least five degrees of freedom, and the second vibration reducer 1006B can inhibit vibration in at least six degrees of freedom.

[00196] As provided above, at least one of the vibration reducers 1006A-D is a compression-type system, and at least one other of the vibration reducers 1006A-D is a tension-type system. In Figure 10, the vibration reducer assembly includes three compression-type systems and one tension-type system. Alternatively, the vibration reducers 1006A-D can be designed and positioned so that the vibration reducer assembly includes (i) two compression-type systems and two tension-type systems or (ii) one compression-type system, and three tension-type systems. This gives the designer for the assembly greater flexibility to achieve the desired characteristics while allowing the payload to have increased access. By using a mixture of tension and compression vibration reducers 1006A-D, it is easier to develop a compact and efficient design by clustering the vibration reducers 1006A-D closer together.

[00197] Stated in another fashion, for the tetrahedron based configuration or other configuration, (i) the first vibration reducer 1006A can act in compression; (ii) the second vibration reducer 1006B can act in tension; (iii) the third vibration reducer 1006C can be configured to inhibit the second component 304 from one of (a) moving towards the first component 1002 by providing a compression force on the second component 304, and (b) moving away from the first component 1002 by providing a tension force on the second component 304; and (iv) the fourth vibration reducer 1006D can be configured to inhibit the second component 304 from one of (a) moving towards the first component 1002 by providing a compression force on the second component 304, and (b) moving away from the first component 1002 by providing a tension force on the second component 304. The terms “Payload,” “Robotic Arm,” “Robotic Assembly,” “First Component,” and “Second Component” can alternatively be referred to as a “first object” and a “second object.” Additionally, the use of “first” and “second” is merely for ease of reference, and it is understood than any of the “Payload,” “Robotic Arm,” “Robotic Assembly,” “First Component,” and “Second Component” could be referred to as the “First Object,” “Second Object,” and “Third Object,” etc.

[00198] The vibration reducers 1006A-D can be configured to support the gravitational weight of the second component 304. A support assembly (e.g., the robotic connector frame 302D and/or the payload connector frame 304A) can interconnect the vibration reducers 1006A-D. The support assembly can be any suitable design or shape to accommodate the vibration reducers 1006A-D. However, the shape of the support assembly can be adjusted by adjusting the design and positioning of the vibration reducers 1006A-D.

[00199] In Figure 10, a reference plane 1009 into the page is represented as a dashed line. This reference plane 1009 is illustrated to demonstrate the relative positioning of the vibration reducers 1006 at the particular time illustrated in Figure 10. At this time, two of the vibration reducers 1006A, 1006D are centered on the reference plane 1009, and the other two vibration reducers 1006C, 1006B are positioned above the reference plane 1009. As a result thereof, the space below the reference plane 1009 is generally open to allow for access to the payload.

[00200] It should be noted that as the robotic arm 1002 moves the payload in three- dimensional space, the position of the reference plane 1009 will move. However, regardless of this motion, at any given time, one side of the reference plane 1009 will be unencumbered with vibration reducers 1006, thereby providing space for the payload.

[00201] By way of comparison, Figure 10 and Figure 3F are somewhat similar in design. However, the design in Figure 3F includes four similar (e.g., compression type) vibration reducers 306. As a result thereof, the vibration reducers 306 are positioned around and encircle the payload. In contrast, the design in Figure 10, includes three compression-type vibration reducers 1006A, 1006C, 1006D, and one tension-type vibration reducer 1006B. As a result thereof, a portion of the payload (in the +X and +Y quadrant in Figure 10) is not encircled by the vibration reducers 1006. Thus, the design displayed in Figure 10 can allow greater payload 304 access.

[00202] It should be noted that other arrangements of the vibration reducers 306, vibration reducers 1006A, 1006B, 1006C, 1006D are possible. For example, one or more tension-type vibration reducers 1006B can be utilized and positioned differently than illustrated in Figure 10. For example, the first vibration reducer 1006A could be the tension-type, and the second vibration reducer 1006B could be the compression- type instead. In this design, one of the faces of the imaginary tetrahedron is opened and it provides a space for the payload 1004. In other words, any configuration or combination of the tension-type vibration reducer and the compression-type vibration reducer can be selected in accordance with the volume, size, and/or shape of the payload.

[00203] In certain non-limiting implementations, regardless of the movement of the vibration reducers 1006, there will always be an angle between the alignment axis 1007 (e.g., first axis, second axis, third axis, fourth axis, etc.,) of each corresponding vibration reducer 1006. Stated in another fashion, none of the alignment axes 1007 of the vibration reducers 1006 will be coaxial and/or substantially coaxial.

[00204] Figure 11 is a simplified side view of a target workpiece 1190 (illustrated as a box), and another implementation of a machine 1110. In this example, the machine 1110 that includes (i) a first component 1102, (ii) a second component 1104 (illustrated as a box), (iii) a vibration isolation assembly 1164 (illustrated as a box) that inhibits vibration from the first component 1102 from being transferred to the second component 1104, and (iv) a control system 1122 that controls the first component 1102, the second component 1104, and/or the vibration isolation assembly 1164. In Figure 11 , the machine 1110 is programmable and controllable to carry out one or more complex actions automatically. Alternatively, for example, the machince 1110 can be controllable for on the fly movements of the second component 1104.

[00205] Figure 11 includes a gravitational orientation system that is referenced to gravity, and that illustrates an X-axis, a Y-axis that is orthogonal to the X-axis, and a Z-axis that is orthogonal to the X and Y axes.

[00206] It should be noted that design of the components of the machine 1110, and the vibration isolation assembly 1164 can be varied to achieve the task(s) to be performed by the machine 1110. In the non-exclusive design of Figure 11 , the first component 1102 can be a gantry that includes a bridge like frame 1102A, a gantry base 1102B, a gantry mover assembly 1102C (illustrated in phantom), and a movable gantry stage 1102D. In this design, the gantry mover assembly 1102C moves and positions the gantry stage 1102D and the second component 1104 (e.g., the payload) with one or more degrees of freedom. As examples, the gantry mover assembly 1102C can be designed to move and position the gantry stage 1102D with at least one, two, three, four, five, or six degrees of freedom. The gantry mover assembly 1102C can include one or more actuators (not shown in Figure 11 ) and/or intermediate stages. The gantry stage 1102D can be referred to as an object. Further, the gantry 1102 can be generically referred to as a mover assembly or positioning assembly.

[00207] It should be noted that the gantry 1102 can be subjected to some amount of vibration disturbance from the support, from the environment, or from its own motion. Because of the mechanical dynam ics of the gantry 1102, some of those vibrations are transmitted to the gantry stage 1102D. Additionally, the gantry 1102 itself may add additional vibration modes. Still further, disturbance forces from air currents (i.e., wind), acoustic noise, and cables or hoses may act on the second component 1104. As discussed below, the vibration isolation assembly 1164 inhibits this vibration from being transmitted to the second component 1104 and counteracts the effects of these disturbances.

[00208] The design of the vibration isolation assembly 1164 can be varied to suit the design requirements of the machine 1110. In Figure 11 , the vibration isolation assembly 1164 extends between the gantry stage 1102D and the payload 1104. Further, the vibration isolation assembly 1164 supports the mass of the payload 1104 and isolates the payload 1104 from high frequency external disturbances. For example, the vibration isolation assembly 1164 can include one or more vibration reducers and/or actuators as described above in reference to the other Figures. Further, these vibration reducer(s) and/or actuator(s) can be organized in any of the arrangements described above.

[00209] The size, shape and design of the payload 1104 can be varied to achieve the task the machine 1110 is designed to perform. For example, the payload 1104 can be an optical instrument that is designed to interact with a target workpiece 1190. As non-exclusive examples, the payload 1104 can be a device for performing a desired task such as welding, cutting, measuring, soldering, manufacturing, cladding, grooving, depositing material, ablating material, gripping, spinning, placement, or fastening. For example, the payload 1104 can include at least a part of an optical system or an optical element (e.g., a light source), for example, for outputting a laser beam which can be used to perform one or more tasks, such as welding, cutting, measuring, soldering, manufacturing, cladding, grooving, depositing material, and/or ablating material. It should be noted that the design of the vibration isolation assembly 1164 can be adjusted to suit also any sized or shaped payload 1104.

[00210] It is understood that although a number of different embodiments of the vibration reducer assembly and the machine have been illustrated and described herein, one or more features of any one embodiment can be combined with one or more features of one or more of the other embodiments, provided that such a combination satisfies the intent of the present disclosure. Further, while a number of exemplary aspects and embodiments of the machine have been discussed above, those of skill in the art will recognize certain modifications, permutations, additions, and sub-combinations thereof. It is therefore intended that the following appended claims and claims hereafter introduced are interpreted to include all such modifications.

Claims

What is claimed is:

1 . A machine for positioning a payload comprising: a mover assembly that moves an object; a first vibration reducer that couples the payload to the object and reduces a magnitude of a vibration being transferred to the payload from the object; wherein the first vibration reducer is configured to provide a compression force on the payload; and a second vibration reducer that couples the payload to the object and reduces a magnitude of a vibration being transferred to the payload from the object; wherein the second vibration reducer is configured to provide a tension force on the payload.

2. The machine of claim 1 wherein the first vibration reducer includes: a first housing that is coupled to one of the object and the payload; a second housing; a movable member having a movable member head that moves relative to the second housing, the movable member being coupled to the other of the payload and the object; a first coupling member that flexibly couples one of (i) the second housing to the first housing, and (ii) the movable member to the second housing; wherein the first coupling member has a first axis stiffness along a first axis, and a second axis stiffness along a second axis that is orthogonal to the first axis of the first coupling member; wherein the first axis stiffness is lower than the second axis stiffness; and a seal assembly that seals (i) the second housing to the first housing, and (ii) the movable member to the second housing.

3. The machine of any one of claims 1-2 wherein the second vibration reducer includes: a housing that is coupled to one of the object and the payload; a movable member having a movable member head that moves relative to the housing, the movable member head being coupled to the other of the payload and the object; a first coupling member that flexibly couples the movable member to the housing; wherein the first coupling member has high tensile strength; and a seal assembly that seals the movable member to the housing.

4. The machine of claim 1 wherein the mover assembly is a robotic assembly.

5. The machine of claim 1 wherein the mover assembly is a gantry.

6. The machine of claim 1 wherein the mover assembly moves the object with at least two degrees of freedom, and wherein the vibration reducers inhibit vibration in at least two degrees of freedom.

7. The machine of claim 1 wherein a first force produced by the first vibration reducer is directed from the first vibration reducer through a center of gravity of the payload.

8. The machine of claim 6 wherein a second force produced by the second vibration reducer is directed from the second vibration reducer through a center of gravity of the payload.

9. The machine of claim 1 further comprising a control system that actively controls a force produced by at least one of the vibration reducers.

10. The machine of any one of claims 1 -9 further comprising at least one actuator that exerts a force between the object and the payload.

11. The machine of claim 10 further comprising a plurality of spaced apart actuators that exert a force between the object and the payload.

12. The machine of any one of claims 10-11 wherein at least one vibration reducer and at least one actuator act in parallel.

13. A vibration reducer assembly for connecting a first object to a second object, the vibration reducer assembly comprising: a first vibration reducer that couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; the first vibration reducer having a first vibration reducer axis; wherein the first vibration reducer is configured to inhibit the second object from moving towards the first object along the first vibration reducer axis by providing a compression force on the second object; and a second vibration reducer that couples the first object to the second object and reduces a magnitude of the vibration from the first object from being transferred to the second object; the second vibration reducer having a second vibration reducer axis that is different than the first vibration reducer axis; wherein the second vibration reducer is configured to inhibit the second object from moving away from the first object along the second vibration reducer axis by providing a tension force on the second object.

14. The vibration reducer assembly of claim 13 further comprising a third vibration reducer that couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; the third vibration reducer having a third vibration reducer axis that is different than both the first vibration reducer axis and the second vibration reducer axis; wherein the third vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object along the third vibration reducer axis by providing a compression force on the second object, and (ii) moving away from the first object along the vibration reducer third axis by providing a tension force on the second object.

15. The vibration reducer assembly of any one of claims 13-14 wherein the vibration reducers are configured to support a gravitational weight of the second object.

16. The vibration reducer assembly of claim 13 wherein the vibration reducers inhibit vibration in multiple degrees of freedom.

17. The vibration reducer assembly of claim 13 wherein the first vibration reducer inhibits vibration in at least five degrees of freedom.

18. The vibration reducer assembly of claim 17 wherein the second vibration reducer inhibits vibration in at least six degrees of freedom.

19. The vibration reducer assembly of claim 13 further comprising a control system that actively controls a force produced by each vibration reducer.

20. The vibration reducer assembly of claim 13 further comprising a support assembly that interconnects the vibration reducers.

21. The vibration reducer assembly of claim 20 wherein the support assembly includes a ring-shaped structure.

22. A machine comprising a first object, a second object, and the vibration reducer assembly of claim 13 that couples the second object to the first object.

23. The machine of claim 22 wherein the first object includes a robotic assembly having a multiple degree of freedom robotic arm, and wherein the vibration reducers inhibit vibration in multiple degrees of freedom.

24. The machine of claim 22 wherein the first object includes a mobile vehicle.

25. The machine of claim 22 wherein the first object includes a vehicle.

26. The machine of claim 22 wherein the first object includes a gantry.

27. The machine of claim 22 wherein a force produced by each vibration reducer is one of (i) directed from the second object toward a center of gravity of the second object, and (ii) directed from the center of gravity of the second object toward the vibration reducer.

28. The machine of claim 22 wherein the axes of the vibration reducers are placed at an angle relative to each other.

29. The machine of any one of claims 22-28 further comprising a control system that actively controls a force produced by at least one of the vibration reducers.

30. The machine of claim 22 further comprising at least one actuator that exerts a force between the first object and the second object.

31. The machine of claim 29 further comprising a plurality of spaced apart actuators that exert a force between the first object and the second object.

32. The machine of claim 22 wherein the second object includes at least a portion of a laser.

33. A vibration reducer assembly for connecting a first object to a second object, the vibration reducer assembly comprising: a first vibration reducer that couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the first vibration reducer is configured to inhibit the second object from moving towards the first object by providing a compression force on the second object; a second vibration reducer that couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the second vibration reducer is configured to inhibit the second object from moving away from the first object by providing a tension force on the second object; a third vibration reducer that couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the third vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object by providing a compression force on the second object, and (ii) moving away from the first object by providing a tension force on the second object; and a fourth vibration reducer that couples the first object to the second object and reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the fourth vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object by providing a compression force on the second object, and (ii) moving away from the first object by providing a tension force on the second object.

34. A machine comprising a first object, a second object, and the vibration reducer assembly of claim 33 that couples the second object to the first object.

35. The machine of claim 34 further comprising a robotic assembly having a multiple degree of freedom robotic arm that moves the first object, and wherein the vibration reducers inhibit vibration in multiple degrees of freedom.

36. The machine of claim 34 further comprising a mobile vehicle that moves the first object.

37. The machine of claim 34 further comprising a gantry that moves the first object.

38. The machine of claim 34 wherein a force produced by each vibration reducer is one of (i) directed from the second object toward a center of gravity of the second object, and (ii) directed from the center of gravity of the second object toward the vibration reducer.

39. The machine of claim 34 wherein each vibration reducer has an axis and the axes of the vibration reducers are placed at an angle relative to each other.

40. The machine of claim 34 further comprising a control system that actively controls a force produced by at least one of the vibration reducers.

41. The machine of claim 34 further comprising at least one actuator that exerts a force between the first object and the second object.

42. The machine of claim 41 further comprising a plurality of spaced apart actuators that exert a force between the first object and the second object.

43. The machine of claim 34 wherein the second object includes at least a portion of a laser.

44. A method for positioning a payload comprising: providing a robotic assembly; coupling the payload to the robotic assembly with a first vibration reducer that reduces a magnitude of a vibration being transferred to the payload from the robotic assembly; wherein the first vibration reducer is configured to provide a compression force on the payload; and coupling the payload to the robotic assembly with a second vibration reducer that reduces a magnitude of a vibration being transferred to the payload from the robotic assembly; wherein the second vibration reducer is configured to provide a tension force on the payload.

45. A method for positioning a payload comprising: providing a gantry; coupling the payload to the gantry with a first vibration reducer that reduces a magnitude of a vibration being transferred to the payload from the gantry; wherein the first vibration reducer is configured to provide a compression force on the payload; and coupling the payload to the gantry with a second vibration reducer that reduces a magnitude of a vibration being transferred to the payload from the gantry; wherein the second vibration reducer is configured to provide a tension force on the payload.

46. A method for connecting a first object to a second object comprising: coupling the first object to the second object with a first vibration reducer that reduces a magnitude of a vibration from the first object from being transferred to the second object; the first vibration reducer having a first vibration reducer axis; wherein the first vibration reducer is configured to inhibit the second object from moving towards the first object along the first vibration reducer axis by providing a compression force on the second object; and coupling the first object to the second object with a second vibration reducer that reduces a magnitude of the vibration from the first object from being transferred to the second object; the second vibration reducer having a second vibration reducer axis that is different than the first vibration reducer axis; wherein the second vibration reducer is configured to inhibit the second object from moving away from the first object along the first vibration reducer axis by providing a tension force on the second object.

47. A method for connecting a first object to a second object comprising: coupling the first object to the second object with a first vibration reducer that reduces a magnitude of a vibration from the first object from being transferred to the second object; wherein the first vibration reducer is configured to inhibit the second object from moving towards the first object by providing a compression force on the second object; coupling the first object to the second object with a second vibration reducer that reduces a magnitude of the vibration from the first object from being transferred to the second object; wherein the second vibration reducer is configured to inhibit the second object from moving away from the first object by providing a tension force on the second object; coupling the first object to the second object with a third vibration reducer that reduces a magnitude of the vibration from the first object from being transferred to the second object; wherein the third vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object by providing a compression force on the second object, and (ii) moving away from the first object by providing a tension force on the second object; and coupling the first object to the second object with a fourth vibration reducer that reduces a magnitude of the vibration from the first object from being transferred to the second object; wherein the fourth vibration reducer is configured to inhibit the second object from one of (i) moving towards the first object by providing a compression force on the second object, and (ii) moving away from the first object by providing a tension force on the second object.