WO2023160504A1 - Dielectric ceramic, dielectric ceramic material, filter, radio frequency unit, and communication device - Google Patents

Dielectric ceramic, dielectric ceramic material, filter, radio frequency unit, and communication device Download PDF

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WO2023160504A1
WO2023160504A1 PCT/CN2023/077261 CN2023077261W WO2023160504A1 WO 2023160504 A1 WO2023160504 A1 WO 2023160504A1 CN 2023077261 W CN2023077261 W CN 2023077261W WO 2023160504 A1 WO2023160504 A1 WO 2023160504A1
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dielectric ceramic
dielectric
ceramics
molecular formula
ceramic
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科洛迪亚兹尼塔拉斯
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华为技术有限公司
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    • H01B3/12Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
    • HELECTRICITY
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Definitions

  • the present application relates to a dielectric ceramic, a microwave dielectric ceramic material, a dielectric filter including the microwave dielectric ceramic material, a radio frequency unit and a communication device including the dielectric filter.
  • the filter is one of the core components of the radio frequency unit, which is used to pass specific frequency components in the signal and greatly attenuate other frequency components.
  • 5G massive antenna (Massive MIMO) technology the number of antennas and filters has increased dramatically, and the high integration and miniaturization of 5G base stations have higher requirements for the size and loss of filters.
  • Dielectric ceramics have a high dielectric constant, which is conducive to the small size and light weight of the filter.
  • the dielectric ceramic material has a high Qf value, which helps to greatly reduce the insertion loss of the dielectric ceramic filter. Therefore, the dielectric ceramic filter It will become the mainstream filter of 5G base stations.
  • dielectric constants Dk value is greater than or equal to 60
  • the dielectric constant generally refers to the relative dielectric constant, which characterizes the dielectric Dielectric properties of materials or physical parameters of polarization properties
  • high quality coefficient generally refers to Qf value, dielectric loss tan ⁇ at microwave frequency, Q is 1/tan ⁇ , f is resonance frequency, Qf value is Q value and resonance
  • the product of the frequency f) and the temperature coefficient of the zero resonant frequency (to measure the stability of the resonant frequency in a certain temperature range, that is, the change of the resonant frequency in a specific temperature range) are necessary.
  • the first aspect of the embodiment of the present application provides a dielectric ceramic, which has a tungsten bronze structure crystal phase, including Ba, Nd, Eu, Ti, Al and O elements, which are Eu elements instead of Ba 6-3x Nd 8+2x Ti Nd in 18 O 54 ceramics, and part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics is replaced by Al element, wherein Eu replaces less than or equal to 10 mol% of Nd.
  • Eu elements replace part of Nd in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics
  • Al elements replace part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, so as to achieve
  • the material has excellent comprehensive microwave dielectric properties, with high dielectric constant, high Qf value, and zero resonance frequency temperature coefficient ⁇ f .
  • the range of the molar substitution content of Eu and Al elements in the dielectric ceramic for example, Eu substitutes less than or equal to 10 mole percent of Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic.
  • the molecular formula of the dielectric ceramic is Ba 6-3x (Nd 1-z Eu z ) 8+2x+y/3 Ti 18-y Aly O 54 , where 0.6 ⁇ x ⁇ 0.8, 0.1 ⁇ y ⁇ 3, 0 ⁇ z ⁇ 0.1.
  • the range of the molar substitution content of Eu and Al elements in the dielectric ceramic for example, Eu substitutes less than or equal to 10 mole percent of Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic.
  • the dielectric ceramic further includes Sm element, and the Sm element and the Eu element replace less than or equal to 30 mol% of Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic.
  • the dielectric ceramic has a molecular formula of Ba 6-3x [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x+y/3 Ti 18-y Aly O 54 , wherein 0.6 ⁇ x ⁇ 0.8, 0.1 ⁇ y ⁇ 4, 0 ⁇ z ⁇ 0.3, 0 ⁇ a ⁇ 0.1.
  • the molar content range of Eu, Sm, and Al elements in the dielectric ceramics for example, Eu and Sm jointly replace Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics to less than or equal to 30% moles of Nd, and the range of molar ratios of both Eu and Sm.
  • the dielectric ceramic has a molecular formula of Ba 6-3x (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6 ⁇ x ⁇ 0.8,0.1 ⁇ y ⁇ 4,0 ⁇ z ⁇ 0.3,0 ⁇ a ⁇ 0.1.
  • the molar content range of Eu, Sm, and Al elements in the dielectric ceramics for example, Eu and Sm jointly replace Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics to less than or equal to 30% moles of Nd, and the range of molar ratios of both Eu and Sm.
  • the dielectric constant of the dielectric ceramic is 63-67, and the Qf value is >14000 GHz.
  • part of Nd in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic is replaced by Eu element
  • part of Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic is replaced by Al element Ti, so as to realize the excellent comprehensive microwave dielectric properties of the material, with high dielectric constant and high Qf value.
  • the resonant frequency temperature coefficient ⁇ f of the dielectric ceramic satisfies -3 ⁇ f ⁇ 3ppm/°C,
  • the dielectric ceramic of the present application has a resonant frequency temperature coefficient ⁇ f that tends to zero.
  • the second aspect of the embodiment of the present application provides a microwave dielectric ceramic material, including dielectric ceramics, the dielectric ceramics have a tungsten bronze structure crystal phase, including Ba, Nd, Eu, Ti, Al and O elements, which are Eu Elements replace Nd in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, and Al elements replace part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, where Eu replaces less than or equal to 10% Moore's Nd.
  • This application aims at the low Qf value of the Ba 6-3x Ln 8+2x Ti 18 O 54 tungsten bronze system at microwave frequencies.
  • the system maintains a high dielectric constant, Under the premise of low resonance frequency temperature coefficient, its Qf value is greatly improved.
  • the microwave dielectric ceramic material includes at least one of the following dielectric ceramics:
  • FIG. 1 is a scanning electron microscope image of a dielectric ceramic according to an embodiment of the present application.
  • the purpose of this application is to improve the Qf value and resonant frequency temperature coefficient of Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic materials.
  • the preparation method of dielectric ceramics specifically includes the following steps:
  • the present application also provides a dielectric filter 100 , including a dielectric ceramic body 10 , an input terminal 11 and an output terminal 13 connected to the dielectric ceramic body 10 .
  • the material of the dielectric ceramic body 10 is the microwave dielectric ceramic material mentioned above.
  • the dielectric ceramic body 10 is in the shape of a rectangular block, but it is not limited thereto, and the specific shape can be designed according to the needs of the product.

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Abstract

The present application provides a dielectric ceramic, having a crystal phase of a tungsten bronze structure, and comprising Ba, Nd, Eu, Ti, Al and O elements, wherein Nd in Ba6-3xNd8+2xTi18O54 ceramic is replaced with Eu element, and part of Ti in Ba6-3xNd8+2xTi18O54 ceramic is replaced with Al element, wherein Eu replaces 10% or less of Nd by moles. The present application further provides a microwave dielectric ceramic material, a dielectric filter comprising the microwave dielectric ceramic material, and a radio frequency unit and a communication device comprising the dielectric filter. By replacing part of Nd in Ba6-3xNd8+2xTi18O54 ceramic with Eu element, and replacing part of Ti with Al element, excellent comprehensive microwave dielectric properties of dielectric ceramic materials are achieved, and a high dielectric constant, a high Qf value, and a near-zero temperature coefficient of resonant frequency τf are achieved.

Description

介电陶瓷、介质陶瓷材料、滤波器、射频单元和通信设备Dielectric ceramics, dielectric ceramic materials, filters, radio frequency units and communication equipment
相关申请的交叉引用Cross References to Related Applications
本申请主张于2022年02月24日提交的、申请号为202210171618.9、申请名称为“介电陶瓷、介质陶瓷材料、滤波器、射频单元和通信设备”的中国专利申请的优先权,其全部内容以引用的方式并入本文。This application claims the priority of the Chinese patent application with the application number 202210171618.9 and the application name "dielectric ceramics, dielectric ceramic materials, filters, radio frequency units and communication equipment" filed on February 24, 2022, the entire content of which Incorporated herein by reference.
技术领域technical field
本申请涉及一种介电陶瓷、微波介质陶瓷材料以及包括该微波介质陶瓷材料的介质滤波器、包括该介质滤波器的射频单元和通信设备。The present application relates to a dielectric ceramic, a microwave dielectric ceramic material, a dielectric filter including the microwave dielectric ceramic material, a radio frequency unit and a communication device including the dielectric filter.
背景技术Background technique
滤波器为射频单元的核心器件之一,用于使信号中特定的频率成分通过,且极大地衰减其他频率成分。5G大规模天线(Massive MIMO)技术中,天线数量和滤波器数量剧增,5G基站的高度集成化和小型化对滤波器的体积和损耗有更高的要求。介质陶瓷具有较高的介电常数,有利于滤波器的小体积、轻量化,同时介质陶瓷材料具有高的Qf值,有助于极大降低介质陶瓷滤波器的插损,故介质陶瓷滤波器将成为5G基站的主流滤波器。The filter is one of the core components of the radio frequency unit, which is used to pass specific frequency components in the signal and greatly attenuate other frequency components. In 5G massive antenna (Massive MIMO) technology, the number of antennas and filters has increased dramatically, and the high integration and miniaturization of 5G base stations have higher requirements for the size and loss of filters. Dielectric ceramics have a high dielectric constant, which is conducive to the small size and light weight of the filter. At the same time, the dielectric ceramic material has a high Qf value, which helps to greatly reduce the insertion loss of the dielectric ceramic filter. Therefore, the dielectric ceramic filter It will become the mainstream filter of 5G base stations.
随着5G基站收发通道数的增多,对介质滤波器小型化、低插损提出更高要求,具有更高介电常数(Dk值大于等于60,介电常数一般指相对介电常数,表征介质材料的介电性质或极化性质的物理参数)、高品质系数(一般指Qf值,微波频率下的介电损耗tanδ,Q为1/tanδ,f为谐振频率,Qf值为Q值与共振频率f之积)及趋零谐振频率温度系数(衡量谐振频率在一定温度范围内的稳定性,即在特定温度区间内谐振频率的变化量)的材料成为必需。With the increase in the number of transceiver channels of 5G base stations, higher requirements are put forward for the miniaturization and low insertion loss of dielectric filters, which have higher dielectric constants (Dk value is greater than or equal to 60, and the dielectric constant generally refers to the relative dielectric constant, which characterizes the dielectric Dielectric properties of materials or physical parameters of polarization properties), high quality coefficient (generally refers to Qf value, dielectric loss tanδ at microwave frequency, Q is 1/tanδ, f is resonance frequency, Qf value is Q value and resonance The product of the frequency f) and the temperature coefficient of the zero resonant frequency (to measure the stability of the resonant frequency in a certain temperature range, that is, the change of the resonant frequency in a specific temperature range) are necessary.
发明内容Contents of the invention
本申请实施例第一方面提供了一种介电陶瓷,具有钨青铜结构晶相,包括Ba、Nd、Eu、Ti、Al和O元素,其为Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的Nd,且Al元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Ti,其中Eu取代小于等于10%摩尔的Nd。The first aspect of the embodiment of the present application provides a dielectric ceramic, which has a tungsten bronze structure crystal phase, including Ba, Nd, Eu, Ti, Al and O elements, which are Eu elements instead of Ba 6-3x Nd 8+2x Ti Nd in 18 O 54 ceramics, and part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics is replaced by Al element, wherein Eu replaces less than or equal to 10 mol% of Nd.
本申请通过Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Nd,且Al元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Ti,从而实现材料优异的综合微波介电性能,具有高的介电常数、高的Qf值、及趋零谐振频率温度系数τfIn this application, Eu elements replace part of Nd in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, and Al elements replace part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, so as to achieve The material has excellent comprehensive microwave dielectric properties, with high dielectric constant, high Qf value, and zero resonance frequency temperature coefficient τ f .
本申请实施方式中,所述介电陶瓷的分子式为Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.1。In the embodiment of the present application, the molecular formula of the dielectric ceramic is Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8, 0.1<y <4, 0<z≤0.1.
由分子式可清楚地了解所述介电陶瓷中,Eu、Al元素的取代摩尔含量范围,例如Eu取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于10%摩尔的Nd。It can be clearly understood from the molecular formula that the range of the molar substitution content of Eu and Al elements in the dielectric ceramic, for example, Eu substitutes less than or equal to 10 mole percent of Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic.
本申请实施方式中,所述介电陶瓷的分子式为Ba6-3x(Nd1-zEuz)8+2x+y/3Ti18-yAlyO54,其中0.6 <x<0.8,0.1<y≤3,0<z≤0.1。In the embodiment of the present application, the molecular formula of the dielectric ceramic is Ba 6-3x (Nd 1-z Eu z ) 8+2x+y/3 Ti 18-y Aly O 54 , where 0.6 <x<0.8, 0.1<y≤3, 0<z≤0.1.
由分子式可清楚地了解所述介电陶瓷中,Eu、Al元素的取代摩尔含量范围,例如Eu取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于10%摩尔的Nd。It can be clearly understood from the molecular formula that the range of the molar substitution content of Eu and Al elements in the dielectric ceramic, for example, Eu substitutes less than or equal to 10 mole percent of Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic.
本申请实施方式中,所述介电陶瓷还包括Sm元素,所述Sm元素和所述Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于30%摩尔的Nd。In the embodiment of the present application, the dielectric ceramic further includes Sm element, and the Sm element and the Eu element replace less than or equal to 30 mol% of Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic.
本申请实施方式中,所述介电陶瓷具有分子式为Ba6-3x[Nd1-z(Sm1-aEua)z]8+2x+y/3Ti18-yAlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。In the embodiment of the present application, the dielectric ceramic has a molecular formula of Ba 6-3x [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x+y/3 Ti 18-y Aly O 54 , wherein 0.6<x<0.8, 0.1<y<4, 0<z≤0.3, 0<a≤0.1.
由分子式可清楚地了解所述介电陶瓷中,Eu、Sm、Al元素的取代摩尔含量范围,例如Eu和Sm共同取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于30%摩尔的Nd,且Eu与Sm二者的摩尔比例范围。It can be clearly understood from the molecular formula that the molar content range of Eu, Sm, and Al elements in the dielectric ceramics, for example, Eu and Sm jointly replace Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics to less than or equal to 30% moles of Nd, and the range of molar ratios of both Eu and Sm.
本申请实施方式中,所述介电陶瓷具有分子式为Ba6-3x(Nd1-z(Sm1-aEua)z)8+2xTi18-3y/4AlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。In the embodiment of the present application, the dielectric ceramic has a molecular formula of Ba 6-3x (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1.
由分子式可清楚地了解所述介电陶瓷中,Eu、Sm、Al元素的取代摩尔含量范围,例如Eu和Sm共同取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于30%摩尔的Nd,且Eu与Sm二者的摩尔比例范围。It can be clearly understood from the molecular formula that the molar content range of Eu, Sm, and Al elements in the dielectric ceramics, for example, Eu and Sm jointly replace Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics to less than or equal to 30% moles of Nd, and the range of molar ratios of both Eu and Sm.
本申请实施方式中,所述介电陶瓷的介电常数为63~67,Qf值>14000GHz。In the implementation manner of the present application, the dielectric constant of the dielectric ceramic is 63-67, and the Qf value is >14000 GHz.
本申请的介电陶瓷,通过Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Nd,且Al元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Ti,从而实现材料优异的综合微波介电性能,具有高的介电常数、高的Qf值。In the dielectric ceramic of the present application, part of Nd in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic is replaced by Eu element, and part of Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic is replaced by Al element Ti, so as to realize the excellent comprehensive microwave dielectric properties of the material, with high dielectric constant and high Qf value.
本申请实施方式中,所述介电陶瓷的谐振频率温度系数τf满足-3<τf<3ppm/℃,|Δτf/ΔT|<30ppb/℃2在-40℃≤T≤+105℃的温度区间内。In the embodiment of the present application, the resonant frequency temperature coefficient τ f of the dielectric ceramic satisfies -3<τ f <3ppm/°C, |Δτ f /ΔT|<30ppb/°C 2 at -40°C≤T≤+105°C within the temperature range.
本申请的介电陶瓷具有趋零的谐振频率温度系数τfThe dielectric ceramic of the present application has a resonant frequency temperature coefficient τ f that tends to zero.
本申请实施例第二方面提供了一种微波介质陶瓷材料,包括介电陶瓷,所述介电陶瓷具有钨青铜结构晶相,包括Ba、Nd、Eu、Ti、Al和O元素,其为Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的的Nd,且Al元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Ti,其中Eu取代小于等于10%摩尔的Nd。The second aspect of the embodiment of the present application provides a microwave dielectric ceramic material, including dielectric ceramics, the dielectric ceramics have a tungsten bronze structure crystal phase, including Ba, Nd, Eu, Ti, Al and O elements, which are Eu Elements replace Nd in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, and Al elements replace part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, where Eu replaces less than or equal to 10% Moore's Nd.
本申请针对Ba6-3xLn8+2xTi18O54钨青铜体系在微波频率下的Qf值较低,通过选取合适的稀土元素及异价元素掺杂,在保持该体系高介电常数、低谐振频率温度系数的前提下,大幅提升其Qf值。This application aims at the low Qf value of the Ba 6-3x Ln 8+2x Ti 18 O 54 tungsten bronze system at microwave frequencies. By selecting appropriate rare earth elements and doping with asymmetric elements, the system maintains a high dielectric constant, Under the premise of low resonance frequency temperature coefficient, its Qf value is greatly improved.
本申请实施方式中,所述的微波介质陶瓷材料包括以下介电陶瓷中的至少一种:In the implementation manner of the present application, the microwave dielectric ceramic material includes at least one of the following dielectric ceramics:
分子式为Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.1;Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8, 0.1<y<4, 0<z≤0.1 ;
分子式为Ba6-3x(Nd1-zEuz)8+2x+y/3Ti18-yAlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y≤3,0<z≤0.1;Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z Eu z ) 8+2x+y/3 Ti 18-y Al y O 54 , where 0.6<x<0.8, 0.1<y≤3, 0<z ≤0.1;
分子式为Ba6-3x[Nd1-z(Sm1-aEua)z]8+2x+y/3Ti18-yAlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1;Dielectric ceramics with molecular formula Ba 6-3x [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x+y/3 Ti 18-y Al y O 54 , where 0.6<x<0.8, 0.1<y<4,0<z≤0.3,0<a≤0.1;
分子式为Ba6-3x(Nd1-z(Sm1-aEua)z)8+2xTi18-3y/4AlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8, 0.1<y< 4. 0<z≤0.3, 0<a≤0.1.
由分子式可清楚地了解所述介电陶瓷中,Eu、Sm、Al等元素的取代摩尔含量范围。 From the molecular formula, it can be clearly understood that the range of the molar substitution content of Eu, Sm, Al and other elements in the dielectric ceramics.
本申请实施方式中,所述微波介质陶瓷材料还包括以下晶相中的至少一种:Al2O3、(Nd,Eu)2Ti2O7、BaTi4O9、Ba2Ti9O20和TiO2In the embodiment of the present application, the microwave dielectric ceramic material further includes at least one of the following crystal phases: Al 2 O 3 , (Nd,Eu) 2 Ti 2 O 7 , BaTi 4 O 9 , Ba 2 Ti 9 O 20 and TiO 2 .
在微波介质陶瓷材料的制备过程中,目的是获得具有钨青铜结构相的粉体,但获得钨青铜结构相的粉体的同时也可能少量生成其他晶相,如(Nd,Eu)2Ti2O7、BaTi4O9、Ba2Ti9O20中的至少一种,以及少量未反应的原料Al2O3和TiO2In the preparation process of microwave dielectric ceramic materials, the purpose is to obtain a powder with a tungsten bronze structural phase, but a small amount of other crystal phases, such as (Nd,Eu) 2 Ti 2 , may also be generated while obtaining a powder with a tungsten bronze structural phase. At least one of O 7 , BaTi 4 O 9 , Ba 2 Ti 9 O 20 , and a small amount of unreacted raw materials Al 2 O 3 and TiO 2 .
本申请实施例第三方面提供了一种介质滤波器,包括介质陶瓷体、与所述介质陶瓷体连接的输入端子和输出端子,所述介质陶瓷体的材料包括本申请实施例第一方面所述的介电陶瓷或本申请实施例第二方面所述的微波介质陶瓷材料。The third aspect of the embodiment of the present application provides a dielectric filter, including a dielectric ceramic body, an input terminal and an output terminal connected to the dielectric ceramic body, and the material of the dielectric ceramic body includes the material described in the first aspect of the embodiment of the present application. The dielectric ceramic mentioned above or the microwave dielectric ceramic material described in the second aspect of the embodiment of the present application.
所述介质滤波器由于采用了高的相对介电常数、高品质系数Qf值、接近0ppm/℃的温度系数τf的介质陶瓷体,因此具有良好性能,所述介质滤波器具有小型化、低插损的优点。The dielectric filter has good performance due to the use of a dielectric ceramic body with a high relative permittivity, a high quality coefficient Qf value, and a temperature coefficient τf close to 0ppm/°C. The dielectric filter has the advantages of miniaturization, low insertion advantage of loss.
本申请实施例第四方面提供了一种射频单元,包括本申请实施例第三方面所述的介质滤波器。A fourth aspect of the embodiment of the present application provides a radio frequency unit, including the dielectric filter described in the third aspect of the embodiment of the present application.
本申请实施例第五方面提供了一种通信设备,包括本申请实施例第三方面所述的介质滤波器。A fifth aspect of the embodiment of the present application provides a communication device, including the dielectric filter described in the third aspect of the embodiment of the present application.
附图说明Description of drawings
图1是本申请一实施例的介电陶瓷的扫描电镜图。FIG. 1 is a scanning electron microscope image of a dielectric ceramic according to an embodiment of the present application.
图2是本申请一实施例的介电陶瓷的X射线衍射图。FIG. 2 is an X-ray diffraction diagram of a dielectric ceramic according to an embodiment of the present application.
图3是本申请实施例的介质滤波器的示意图。Fig. 3 is a schematic diagram of a dielectric filter according to an embodiment of the present application.
主要元件符号说明Description of main component symbols
介质滤波器                        100Dielectric filter 100
介质陶瓷体                        10Dielectric Ceramic Body 10
输入端子                          11Input terminal 11
输出端子                          13Output terminal 13
具体实施方式Detailed ways
下面结合本申请实施例中的附图对本申请实施例进行描述。本申请中记载的数据范围值如无特别说明均应包括端值。Embodiments of the present application are described below with reference to the drawings in the embodiments of the present application. The data range values recorded in this application shall include the end values unless otherwise specified.
随着5G基站收发通道数的增多,对介质滤波器小型化、低插损提出更高要求,从而要求介电材料具有更高介电常数、高Qf值及趋零谐振频率温度系数τfWith the increase in the number of transceiver channels in 5G base stations, higher requirements are put forward for the miniaturization and low insertion loss of dielectric filters, thus requiring dielectric materials to have higher dielectric constants, high Qf values, and zero-resonant frequency temperature coefficient τ f .
Ba6-3xLn8+2xTi18O54为钨青铜结构晶相的高介电材料,在此结构中,钛氧八面体(TiO6)共顶角连接在立体空间形成未充满型钨青铜结构。每个晶胞中有三种不同形状的空隙,依据空隙从大到小排序分别为五边形空隙(A2)、四角菱形空隙(A1)和三角形空隙(C),其中离子半径最大的Ba2+一般占据最大的五边形空隙;稍小的四角菱形空隙则主要是由Ln3+占据,Ba2+占满五边形空隙后也会部分占据四角菱形空隙位;最小的三角形空隙在未充满型钨青铜结构中是空的,一般不被离子占据。正是由于四角菱形空隙可以被“Ba2+”和“Ln3+”两类离子共同占有的可能性,使得该材料体系呈现出纷繁复杂的异质同构性。 Ba 6-3x Ln 8+2x Ti 18 O 54 is a high dielectric material with a tungsten bronze structure crystal phase. In this structure, titanium oxide octahedrons (TiO 6 ) share vertices and connect in a three-dimensional space to form an underfilled tungsten bronze structure. There are three different shapes of voids in each unit cell. According to the order of the voids from large to small, they are pentagonal voids (A2), quadrangular rhomboid voids (A1) and triangular voids (C). Among them, Ba 2+ with the largest ionic radius Generally occupy the largest pentagonal void; the smaller quadrangular rhombus void is mainly occupied by Ln 3+ , and Ba 2+ will partially occupy the quadrangular rhombus void after filling the pentagonal void; the smallest triangular void is not filled Type tungsten bronze structure is empty, generally not occupied by ions. It is precisely because of the possibility that the quadrangular rhombohedral voids can be shared by two types of ions, "Ba 2+ " and "Ln 3+ ", makes this material system present a complex heterogeneous isomorphism.
通过对四角菱形空隙、五边形空隙或者(TiO6)之B位Ti原子置换,可调控该材料体系的介电常数在55~90范围之间变化,并实现较低的、甚至是趋近于0ppm/℃的谐振频率温度系数。注:谐振频率温度系数为热稳定性的参数,指当温度发生变化时,微波介质陶瓷材料谐振频率漂移程度。By substituting tetragonal rhombohedral voids, pentagonal voids, or B-site Ti atoms of (TiO 6 ), the dielectric constant of the material system can be adjusted to vary between 55 and 90, and a lower or even approaching Resonant frequency temperature coefficient at 0ppm/°C. Note: The resonant frequency temperature coefficient is a parameter of thermal stability, which refers to the degree of resonant frequency drift of microwave dielectric ceramic materials when the temperature changes.
Ba6-3xLn8+2xTi18O54体系高介电材料在微波频率下的Qf值较低,目前该体系材料的Qf值约为10000~12000GHz,虽能满足某些特定场景的需求,但对于5G基站对介质滤波器低插损的需求,需要更高的Qf值方能满足。Ba 6-3x Ln 8+2x Ti 18 O 54 system high dielectric material has a low Qf value at microwave frequency. Currently, the Qf value of this system material is about 10000-12000 GHz, although it can meet the needs of some specific scenarios. However, for the 5G base station's demand for low insertion loss of the dielectric filter, a higher Qf value is required to meet it.
本申请针对Ba6-3xLn8+2xTi18O54钨青铜体系的Qf值不能满足5G基站滤波器需求这一技术问题,通过选取合适的稀土元素及异价元素掺杂,在保持该体系高介电常数、低谐振频率温度系数的前提下,大幅提升其Qf值。This application aims at the technical problem that the Qf value of the Ba 6-3x Ln 8+2x Ti 18 O 54 tungsten bronze system cannot meet the requirements of 5G base station filters. Under the premise of high dielectric constant and low resonant frequency temperature coefficient, its Qf value is greatly improved.
基于学术界、产业界对Ba6-3xLn8+2xTi18O54钨青铜体系的持续研究,明确其微波波段的Qf值与晶格应力及TiO6八面体倾斜角度强相关,而通过元素的掺杂改性可以改变上述因素。在已知的掺杂改性手段中,发现Al元素掺杂改性对Ba6-3xLn8+2xTi18O54材料的Qf值影响最为明显,而Al元素掺杂则有5种方式,列举在表1中,其中表1中的化学式中的V代表空位。Based on the continuous research on the Ba 6-3x Ln 8+2x Ti 18 O 54 tungsten bronze system in academia and industry, it is clear that the Qf value in the microwave band is strongly related to the lattice stress and the TiO 6 octahedron tilt angle, and the element Doping modification can change the above factors. Among the known doping modification methods, it is found that Al element doping modification has the most obvious effect on the Qf value of Ba 6-3x Ln 8+2x Ti 18 O 54 material, and there are five ways of Al element doping, Listed in Table 1, wherein V in the chemical formula in Table 1 represents a vacancy.
表1
Table 1
Al元素掺杂的第1种方式,Al3+离子取代Ti4+离子,电荷平衡由额外的1/3个Nd3+离子进入A1型亚晶格来维持。Al元素掺杂的第2种方式,Al3+离子取代Ti4+离子,电荷平衡由额外的1/3Nd3+和额外的1/2个Ba2+离子进入该体系晶体的A1型亚晶格来维持。Al元素掺杂的第3种方式,Al3+离子取代Ti4+离子,电荷平衡由额外的1/2个Ba2+离子进入A1型亚晶格来维持。Al元素掺杂的第4种方式,3/4的Al3+离子取代Ti4+离子和1/4的Al3+离子进入该结构的空C位,从而使电荷平衡。Al元素掺杂的第5种方式,Al3+离子取代Ti4+离子,电荷平衡通过进入氧亚晶格的氧空位来维持。In the first way of Al doping, Al 3+ ions replace Ti 4+ ions, and the charge balance is maintained by an additional 1/3 Nd 3+ ions entering the A1-type sublattice. The second way of Al element doping, Al 3+ ions replace Ti 4+ ions, and the charge balance is entered by the extra 1/3 Nd 3+ and extra 1/2 Ba 2+ ions into the A1-type subcrystal of the system crystal grid to maintain. In the third way of Al doping, Al 3+ ions replace Ti 4+ ions, and the charge balance is maintained by the addition of 1/2 Ba 2+ ions into the A1-type sublattice. In the fourth way of Al element doping, 3/4 Al 3+ ions replace Ti 4+ ions and 1/4 Al 3+ ions enter the vacant C sites of the structure, thereby balancing the charge. In the fifth way of Al doping, Al 3+ ions replace Ti 4+ ions, and the charge balance is maintained by entering the oxygen vacancies of the oxygen sublattice.
通过大量样品的制备、测试和分析,发现Ba6-3xNd8+2xTi18O54(Ln选择Nd)体系陶瓷的Al掺杂可以获得谐振频率温度系数(τf)接近零的高Qf值配方,特别是通过第1种和第4种掺杂方式或通过两种掺杂方式的组合;一些基于上述掺杂方式的配方实例列举于表2中。Through the preparation, testing and analysis of a large number of samples, it is found that the Al doping of Ba 6-3x Nd 8+2x Ti 18 O 54 (Ln chooses Nd) system ceramics can obtain a high Qf value with a resonant frequency temperature coefficient (τ f ) close to zero Formulations, in particular by the 1st and 4th doping methods or by a combination of the two doping methods; some examples of formulations based on the above-mentioned doping methods are listed in Table 2.
表2

Table 2

此外,从表2可以看出,虽然Ba6-3xNd8+2xTi18O54陶瓷的Al掺杂可以显著降低τf值,甚至获得τf值接近零的高Qf配方,但是|Δτf/ΔT|保持在30ppb/℃2以上,故为了将|Δτf/ΔT|降低到30ppb/℃2以下,可利用其它掺杂元素(如Sm、Eu等元素)部分取代Ba,对|Δτf/ΔT|值降低到30ppb/℃2以下最有效。In addition, it can be seen from Table 2 that although the Al doping of Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics can significantly reduce the value of τf , and even obtain a high-Qf formulation with a value of τf close to zero, but | Δτf /ΔT| is kept above 30ppb/°C 2 , so in order to reduce |Δτ f /ΔT| to below 30ppb/°C 2 , other doping elements (such as Sm, Eu and other elements) can be used to partially replace Ba, and the |Δτ f It is most effective to lower the /ΔT| value to below 30ppb/°C 2 .
本申请提供一种介电陶瓷,具有钨青铜结构晶相,包括Ba、Nd、Eu、Ti、Al和O元素,其为Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于10%(摩尔百分比)的Nd,且Al元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Ti,从而实现材料优异的综合微波介电性能,具有高的介电常数、高的Qf值、及趋零谐振频率温度系数τfThe application provides a dielectric ceramic, which has a crystal phase of tungsten bronze structure, including Ba, Nd, Eu, Ti, Al and O elements, which are Eu elements replacing Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics. Less than or equal to 10% (mol percent) of Nd, and Al element replaces part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, so as to achieve excellent comprehensive microwave dielectric properties of the material, with high dielectric Constant, high Qf value, and zero resonant frequency temperature coefficient τ f .
一些实施例中,所述介电陶瓷的分子式为Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.1。由分子式可清楚地了解所述介电陶瓷中,Eu、Al等元素的取代摩尔含量范围。所述介电陶瓷的分子式可按照价态平衡换算得到,Eu与Nd价态相同,则Eu取代Ba6-3xNd8+2xTi18O54陶瓷中的小于z摩尔百分比的Nd表示为(Nd1-zEuz)8+2x;y摩尔份的Al取代部分的Ti,为满足价态平衡Ti要减少3y/4摩尔份,则表示为Ti18-3y/4AlyIn some embodiments, the molecular formula of the dielectric ceramic is Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Al y O 54 , wherein 0.6<x<0.8, 0.1<y< 4. 0<z≤0.1. From the molecular formula, it can be clearly understood the range of the substitution molar content of elements such as Eu and Al in the dielectric ceramic. The molecular formula of the dielectric ceramic can be converted according to the valence state balance, Eu and Nd have the same valence state, then Eu replaces Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics less than z mole percentage expressed as (Nd 1-z Eu z ) 8+2x ; y mole parts of Al replace part of Ti, in order to satisfy the valence balance, Ti needs to be reduced by 3y/4 mole parts, which is expressed as Ti 18-3y/4 Al y .
一些实施例中,所述介电陶瓷的分子式为Ba6-3x(Nd1-zEuz)8+2x+y/3Ti18-yAlyO54,其中0.6<x<0.8,0.1<y≤3,0<z≤0.1。所述介电陶瓷的分子式可按照化学计量比换算得到,y摩尔份的Al取代Ba6-3xNd8+2xTi18O54陶瓷中y摩尔份的Ti,则Ti对应减少y摩尔份,表示为Ti18-yAly,Eu取代Ba6-3xNd8+2xTi18O54陶瓷的小于z摩尔百分比的Nd表示为(Nd1-zEuz)8+2x,且为了使分子式的整体价态平衡,则(Nd1-zEuz)需增加y/3摩尔份表示为(Nd1-zEuz)8+2x+y/3In some embodiments, the molecular formula of the dielectric ceramic is Ba 6-3x (Nd 1-z Eu z ) 8+2x+y/3 Ti 18-y Aly O 54 , where 0.6<x<0.8, 0.1< y≤3, 0<z≤0.1. The molecular formula of the dielectric ceramic can be converted according to the stoichiometric ratio. If y molar parts of Al replace the y molar parts of Ti in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, then the corresponding reduction of y molar parts of Ti is represented by For Ti 18-y Aly , Eu replaces Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics with less than z mole percent of Nd expressed as (Nd 1-z Eu z ) 8+2x , and in order to make the overall If the valence state is balanced, then (Nd 1-z Eu z ) needs to increase y/3 mole fraction to express as (Nd 1-z Eu z ) 8+2x+y/3 .
由上述两个分子式中的z值大小可知,Eu取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于10%摩尔的Nd。From the z values in the above two molecular formulas, it can be seen that Eu replaces less than or equal to 10 mole percent of Nd in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics.
所述介电陶瓷还可包括Sm元素,所述Sm元素和所述Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于30%摩尔的Nd。The dielectric ceramic may further include a Sm element, and the Sm element and the Eu element replace 30% or less of Nd by mole in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic.
一些实施例中,所述介电陶瓷具有分子式为Ba6-3x[Nd1-z(Sm1-aEua)z]8+2x+y/3Ti18-yAlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。所述介电陶瓷的分子式可按照化学计量比换算得到,y摩尔份的Al取代Ba6-3xNd8+2xTi18O54陶瓷中y摩尔份的Ti,则Ti对应减少y摩尔份,表示为Ti18-yAly,Eu和Sm共同取代Ba6-3xNd8+2xTi18O54陶瓷的小于z摩尔百分比的Nd表示为(Nd1-zEuz)8+2x,而为了使分子式的整体价态平衡,则[Nd1-z(Sm1-aEua)z]需增加y/3摩尔份表示为[Nd1-z(Sm1-aEua)z]8+2x+y/3In some embodiments, the dielectric ceramic has a molecular formula of Ba 6-3x [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x+y/3 Ti 18-y Aly O 54 , where 0.6 <x<0.8, 0.1<y<4, 0<z≤0.3, 0<a≤0.1. The molecular formula of the dielectric ceramic can be converted according to the stoichiometric ratio. If y molar parts of Al replace the y molar parts of Ti in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, then the corresponding reduction of y molar parts of Ti is represented by For Ti 18-y Al y , Eu and Sm jointly replace Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics with less than z mole percentage of Nd expressed as (Nd 1-z Eu z ) 8+2x , and in order to make The overall valence state of the molecular formula is balanced, then [Nd 1-z (Sm 1-a Eu a ) z ] needs to increase y/3 mole parts and express it as [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x +y/3 .
一些实施例中,所述介电陶瓷具有分子式为Ba6-3x(Nd1-z(Sm1-aEua)z)8+2xTi18-3y/4AlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。所述介电陶瓷的分子式可按照价态平衡换算得到,Eu、Sm与Nd价态相同,则Eu和Sm共同取代Ba6-3xNd8+2xTi18O54陶瓷中的小于z摩尔百分比的Nd表示为(Nd1-z(Sm1-aEua)z)8+2x;y摩尔份的Al取代部分的Ti,为满足价态平衡Ti要减少3y/4摩尔份,则表示为Ti18-3y/4AlyIn some embodiments, the dielectric ceramic has a molecular formula of Ba 6-3x (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x <0.8, 0.1<y<4, 0<z≤0.3, 0<a≤0.1. The molecular formula of the dielectric ceramic can be converted according to the valence balance. Eu, Sm and Nd have the same valence, then Eu and Sm jointly replace less than z mole percentage of Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics Nd is expressed as (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x ; y mole parts of Al replace part of Ti, in order to meet the valence balance Ti needs to be reduced by 3y/4 mole parts, it is expressed as Ti 18-3y/4 Al y .
由上述两个分子式的z值大小可知,Eu和Sm共同取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于30%摩尔的Nd,由a值大小可知,Eu与Sm二者的摩尔比例范围。It can be seen from the z value of the above two molecular formulas that Eu and Sm jointly replace the Nd in the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics less than or equal to 30% by mole. It can be known from the a value that both Eu and Sm range of molar ratios.
上述介电陶瓷的介电常数为63~67,Qf值>14000GHz。所述介电陶瓷的谐振频率温度系数(τf)满足-3<τf<3ppm/℃,在-40℃≤T≤+105℃温度区间内|Δτf/ΔT|<30ppb/℃2The dielectric constant of the above-mentioned dielectric ceramic is 63-67, and the Qf value is >14000GHz. The resonant frequency temperature coefficient (τ f ) of the dielectric ceramic satisfies -3<τ f <3ppm/°C, and |Δτ f /ΔT|<30ppb/°C 2 in the temperature range of -40°C≤T≤+105°C.
本申请还提供一种微波介质陶瓷材料,包括钨青铜结构相的主晶相,主晶相为上述介电陶瓷中的至少一种,即为以下中的至少一种:The present application also provides a microwave dielectric ceramic material, including the main crystal phase of the tungsten bronze structural phase, and the main crystal phase is at least one of the above-mentioned dielectric ceramics, that is, at least one of the following:
分子式为Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.1;Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8, 0.1<y<4, 0<z≤0.1 ;
分子式为Ba6-3x(Nd1-zEuz)8+2x+y/3Ti18-yAlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y≤3,0<z≤0.1;Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z Eu z ) 8+2x+y/3 Ti 18-y Al y O 54 , where 0.6<x<0.8, 0.1<y≤3, 0<z ≤0.1;
分子式为Ba6-3x[Nd1-z(Sm1-aEua)z]8+2x+y/3Ti18-yAlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1;Dielectric ceramics with molecular formula Ba 6-3x [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x+y/3 Ti 18-y Al y O 54 , where 0.6<x<0.8, 0.1<y<4,0<z≤0.3,0<a≤0.1;
分子式为Ba6-3x(Nd1-z(Sm1-aEua)z)8+2xTi18-3y/4AlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8, 0.1<y< 4. 0<z≤0.3, 0<a≤0.1.
一些实施例中,所述微波介质陶瓷材料还可包括少量的下述晶相中的至少一种:Al2O3、(Nd,Eu)2Ti2O7、BaTi4O9、Ba2Ti9O20和TiO2In some embodiments, the microwave dielectric ceramic material may also include a small amount of at least one of the following crystal phases: Al 2 O 3 , (Nd,Eu) 2 Ti 2 O 7 , BaTi 4 O 9 , Ba 2 Ti 9 O 20 and TiO 2 .
本申请以改善Ba6-3xNd8+2xTi18O54陶瓷材料的Qf值及谐振频率温度系数为目的,介电陶瓷的制备方法具体包括如下步骤:The purpose of this application is to improve the Qf value and resonant frequency temperature coefficient of Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic materials. The preparation method of dielectric ceramics specifically includes the following steps:
(1)配料:原料可采用BaCO3、TiO2、Nd2O3、Sm2O3、Eu2O3和Al2O3等高纯度粉体,但不以此为限,将原料按照化学计量比配料;(1) Ingredients: Raw materials can be high-purity powders such as BaCO 3 , TiO 2 , Nd 2 O 3 , Sm 2 O 3 , Eu 2 O 3 and Al 2 O 3 , but not limited thereto. Measuring ratio ingredients;
(2)球磨,以将原料粉体磨成所需的粒径,例如小于100目;(2) ball milling, to grind the raw material powder into a required particle size, for example less than 100 mesh;
(3)高温固相合成,以获得具有钨青铜结构相的粉体,一般为1100℃~1200℃的空气中热处理3~10小时;(3) High-temperature solid-phase synthesis to obtain a powder with a tungsten bronze structural phase, generally heat-treated in air at 1100°C to 1200°C for 3 to 10 hours;
(4)二次球磨,以获得所需粒径尺寸的钨青铜结构相粉体; (4) Secondary ball milling to obtain tungsten bronze structural phase powder with required particle size;
(5)烧结:将钨青铜结构相粉体加入粘合剂混合均匀,然后压制成所需形状的生坯,然后在1360℃~1420℃下烧结生坯,然后在1100℃下进行退火5~10小时。(5) Sintering: Add the tungsten bronze structural phase powder to the binder and mix evenly, then press it into a green body of the desired shape, then sinter the green body at 1360 ° C ~ 1420 ° C, and then anneal at 1100 ° C for 5 ~ 10 hours.
以表2中Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54为例,其中x=0.85,y=1,z=0.15;将按照化学计量比称量后的原料粉末与钇稳定氧化锆球(研磨介质)、一定量的纯水在行星搅拌机中球磨混合12小时,将得到的浆体置于鼓风烘箱中干燥,再将干燥后的粉末通过100目尼龙筛筛分,筛分后的粉体置于99%Al2O3陶瓷坩埚中,在1150℃的空气中热处理10小时,目的是获得具有钨青铜结构相的粉体(获得钨青铜结构相的粉体的同时也可能少量生成其他晶相,如(Nd,Eu)2Ti2O7、BaTi4O9、Ba2Ti9O20中的至少一种,以及少量未反应的原料Al2O3和TiO2),之后,将合成后的粉体再次利用行星球磨机球磨7小时,将得到的浆体干燥过筛;将少量聚乙烯醇水溶液粘合剂加入干燥后的粉末中并混合均匀,之后,使用单轴压力机将粉末压制成直径为7mm~13mm、厚度为3.5mm~6.5mm的生坯圆片,并在1360℃~1420℃下烧结,然后在1100℃下进行退火5~10小时得到样品。请参图1样品的扫描电镜图,可知所获得样品的微观结构致密,晶粒呈棒状,尺寸均匀约3~5μm。请参图2样品的X射线衍射图,可知制备得到的样品为纯钨青铜结构晶相。Take Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Al y O 54 in Table 2 as an example, where x=0.85, y=1, z=0.15; The weighed raw material powder is mixed with yttrium stabilized zirconia balls (grinding media) and a certain amount of pure water in a planetary mixer for 12 hours, and the obtained slurry is placed in a blast oven to dry, and then the dried powder Sieve through a 100-mesh nylon sieve, place the sieved powder in a 99% Al 2 O 3 ceramic crucible, and heat-treat it in air at 1150°C for 10 hours, in order to obtain a powder with a tungsten bronze structure phase (to obtain tungsten The powder of the bronze structure phase may also generate a small amount of other crystal phases, such as at least one of (Nd,Eu) 2 Ti 2 O 7 , BaTi 4 O 9 , Ba 2 Ti 9 O 20 , and a small amount of unreacted Raw materials Al 2 O 3 and TiO 2 ), after that, use the planetary ball mill to mill the synthesized powder for 7 hours again, dry and sieve the obtained slurry; add a small amount of polyvinyl alcohol aqueous solution binder to the dried powder And mix evenly, after that, use a uniaxial press to press the powder into a green disc with a diameter of 7mm to 13mm and a thickness of 3.5mm to 6.5mm, and sinter at 1360°C to 1420°C, and then sinter at 1100°C Anneal for 5-10 hours to obtain the sample. Please refer to the scanning electron microscope image of the sample in Figure 1, it can be seen that the microstructure of the obtained sample is dense, the crystal grains are rod-shaped, and the uniform size is about 3-5 μm. Please refer to the X-ray diffraction pattern of the sample in Figure 2, it can be seen that the prepared sample is a crystal phase of pure tungsten bronze structure.
在1~6.8GHz的频率范围内进行该样品的微波介电性能测量:对于测试样品其直径和厚度的比值在1.8~2.2之间,采用Hakki-coleman法测试微波波段的介电常数,采用闭腔谐振法测试Qf值及谐振频率温度系数;测得微波介电性能:介电常数为66.6,Qf=15700GHz,τf=+3.0ppm/℃和|Δτf/ΔT|=28ppb/℃2在-40℃≤T≤+105℃温度范围内。The microwave dielectric properties of the sample are measured in the frequency range of 1-6.8 GHz: for the test sample whose diameter to thickness ratio is between 1.8 and 2.2, the dielectric constant of the microwave band is tested by the Hakki-coleman method, and the closed Cavity resonance method to test Qf value and resonant frequency temperature coefficient; measured microwave dielectric properties: dielectric constant 66.6, Qf = 15700GHz, τ f = +3.0ppm/℃ and |Δτ f /ΔT| = 28ppb/℃ 2 in -40℃≤T≤+105℃ temperature range.
表2中另一实施方案中,Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54,其中x=0.85,y=4,z=0.15,采用相同的制备工艺条件制得并采用相同的测试手段测试,可实现介电常数为66.5,Qf=15500GHz,τf=-1.06ppm/℃和|Δτf/ΔT|=23ppb/℃2在-40℃≤T≤+105℃温度范围内。In another embodiment in Table 2, Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Al y O 54 , where x=0.85, y=4, z=0.15, the same The preparation process conditions were prepared and tested by the same test method, which can achieve a dielectric constant of 66.5, Qf = 15500GHz, τ f = -1.06ppm/°C and |Δτ f /ΔT| = 23ppb/°C 2 at -40°C ≤T≤+105℃ temperature range.
如图3所示,本申请还提供一种介质滤波器100,包括介质陶瓷体10、与该介质陶瓷体10连接的输入端子11和输出端子13。所述介质陶瓷体10的材料为上述的微波介质陶瓷材料。本实施例中,所述介质陶瓷体10为矩形块状,但不以此为限,具体的形状可根据产品的需要进行设计。本实施例中,所述输入端子11和所述输出端子13间隔凸设在所述介质陶瓷体10的表面,所述输入端子11和所述输出端子13可为导电针且通过焊料(例如焊锡)连接在所述介质陶瓷体10的表面,另外设置所述输入端子11和所述输出端子13的区域还可设置较浅的凹槽(图未示),将焊料填充在凹槽中。所述介质陶瓷体10中开设有若干贯穿所述介质陶瓷体10的条形的通孔(图未示)和多个未贯穿所述介质陶瓷体10的圆形的盲孔(图未示),通孔和盲孔的形状和排布也可根据产品的需要进行设计。所述介质滤波器100由于采用了高的相对介电常数、高品质系数Qf值、且具有接近0ppm/℃的温度系数τf的介质陶瓷体10,因此具有良好性能。As shown in FIG. 3 , the present application also provides a dielectric filter 100 , including a dielectric ceramic body 10 , an input terminal 11 and an output terminal 13 connected to the dielectric ceramic body 10 . The material of the dielectric ceramic body 10 is the microwave dielectric ceramic material mentioned above. In this embodiment, the dielectric ceramic body 10 is in the shape of a rectangular block, but it is not limited thereto, and the specific shape can be designed according to the needs of the product. In this embodiment, the input terminal 11 and the output terminal 13 are protruded on the surface of the dielectric ceramic body 10 at intervals, and the input terminal 11 and the output terminal 13 can be conductive needles and pass through solder (such as solder ) is connected to the surface of the dielectric ceramic body 10, and shallower grooves (not shown in the figure) can also be arranged in the regions where the input terminals 11 and the output terminals 13 are arranged, and solder is filled in the grooves. The dielectric ceramic body 10 is provided with a plurality of strip-shaped through holes (not shown) passing through the dielectric ceramic body 10 and a plurality of circular blind holes (not shown) not penetrating the dielectric ceramic body 10 , The shape and arrangement of through holes and blind holes can also be designed according to the needs of the product. The dielectric filter 100 has good performance due to the use of a dielectric ceramic body 10 with a high relative permittivity, a high quality factor Qf, and a temperature coefficient τf close to 0 ppm/°C.
本申请还提供一种射频单元,包括所述介质滤波器。The present application also provides a radio frequency unit, including the dielectric filter.
本申请还提供一种通信设备,包括所述介质滤波器。The present application also provides a communication device, including the dielectric filter.
需要说明的是,以上仅为本申请的具体实施方式,但本申请的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本申请揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本申请的保护范围之内;在不冲突的情况下,本申请的实施方式及实施方式中的特征可以相互组合。因此,本申请的保护范围应以权利要求的保护范围为准。 It should be noted that the above is only a specific implementation of the application, but the scope of protection of the application is not limited thereto, and any person familiar with the technical field can easily think of changes or substitutions within the scope of the technology disclosed in the application , should be covered within the protection scope of the present application; in the case of no conflict, the implementation modes and the features in the implementation modes of the application can be combined with each other. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims (14)

  1. 一种介电陶瓷,具有钨青铜结构晶相,其特征在于,包括Ba、Nd、Eu、Ti、Al和O元素,其为Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的Nd,且Al元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Ti,其中Eu取代小于等于10%摩尔的Nd。A kind of dielectric ceramic, has tungsten bronze structure crystal phase, is characterized in that, comprises Ba, Nd, Eu, Ti, Al and O element, and it is that Eu element replaces Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics Nd, and Al element replaces part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics, wherein Eu replaces less than or equal to 10 mol% of Nd.
  2. 根据权利要求1所述的介电陶瓷,其特征在于,所述介电陶瓷的分子式为Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.1。The dielectric ceramic according to claim 1, wherein the molecular formula of the dielectric ceramic is Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Aly O 54 , wherein 0.6<x<0.8, 0.1<y<4, 0<z<0.1.
  3. 根据权利要求1所述的介电陶瓷,其特征在于,所述介电陶瓷的分子式为Ba6-3x(Nd1-zEuz)8+2x+y/3Ti18-yAlyO54,其中0.6<x<0.8,0.1<y≤3,0<z≤0.1。The dielectric ceramic according to claim 1, wherein the molecular formula of the dielectric ceramic is Ba 6-3x (Nd 1-z Eu z ) 8+2x+y/3 Ti 18-y Aly O 54 , where 0.6<x<0.8, 0.1<y≤3, 0<z≤0.1.
  4. 根据权利要求1所述的介电陶瓷,其特征在于,所述介电陶瓷还包括Sm元素,所述Sm元素和所述Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的小于等于30%摩尔的Nd。The dielectric ceramic according to claim 1, wherein the dielectric ceramic further comprises Sm element, and the Sm element and the Eu element replace the Ba 6-3x Nd 8+2x Ti 18 O 54 ceramic 30 mol% or less of Nd.
  5. 根据权利要求4所述的介电陶瓷,其特征在于,所述介电陶瓷具有分子式为Ba6-3x[Nd1-z(Sm1-aEua)z]8+2x+y/3Ti18-yAlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。The dielectric ceramic according to claim 4, wherein the dielectric ceramic has a molecular formula of Ba 6-3x [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x+y/3 Ti 18-y Al y O 54 , where 0.6<x<0.8, 0.1<y<4, 0<z≤0.3, 0<a≤0.1.
  6. 根据权利要求4所述的介电陶瓷,其特征在于,所述介电陶瓷具有分子式为Ba6-3x(Nd1-z(Sm1-aEua)z)8+2xTi18-3y/4AlyO54,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。The dielectric ceramic according to claim 4, wherein the dielectric ceramic has a molecular formula of Ba 6-3x (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x Ti 18-3y/ 4 Al y O 54 , where 0.6<x<0.8, 0.1<y<4, 0<z≤0.3, 0<a≤0.1.
  7. 根据权利要求1至6中任一项所述的介电陶瓷,其特征在于,所述介电陶瓷的介电常数为63~67,Qf值>14000GHz。The dielectric ceramic according to any one of claims 1 to 6, characterized in that, the dielectric constant of the dielectric ceramic is 63-67, and the Qf value is >14000 GHz.
  8. 根据权利要求1至7中任一项所述的介电陶瓷,其特征在于,所述介电陶瓷的谐振频率温度系数τf满足-3<τf<3ppm/℃,|Δτf/ΔT|<30ppb/℃2在-40℃≤T≤+105℃的温度区间内。The dielectric ceramic according to any one of claims 1 to 7, characterized in that the resonant frequency temperature coefficient τ f of the dielectric ceramic satisfies -3<τ f <3ppm/°C, |Δτ f /ΔT| <30ppb/°C 2 in the temperature range of -40°C≤T≤+105°C.
  9. 一种微波介质陶瓷材料,包括介电陶瓷,其特征在于,所述介电陶瓷具有钨青铜结构晶相,包括Ba、Nd、Eu、Ti、Al和O元素,其为Eu元素取代Ba6-3xNd8+2xTi18O54陶瓷中的Nd,且Al元素取代Ba6-3xNd8+2xTi18O54陶瓷中的部分的Ti,其中Eu取代小于等于10%摩尔的Nd。A microwave dielectric ceramic material, comprising a dielectric ceramic, is characterized in that the dielectric ceramic has a tungsten bronze structure crystal phase, including Ba, Nd, Eu, Ti, Al and O elements, which are Eu elements replacing Ba 6- Nd in 3x Nd 8+2x Ti 18 O 54 ceramics, and part of Ti in Ba 6-3x Nd 8+2x Ti 18 O 54 ceramics replaced by Al element, wherein Eu replaces less than or equal to 10 mol% of Nd.
  10. 根据权利要求9所述的微波介质陶瓷材料,其特征在于,所述的微波介质陶瓷材料包括以下介电陶瓷中的至少一种:The microwave dielectric ceramic material according to claim 9, wherein the microwave dielectric ceramic material comprises at least one of the following dielectric ceramics:
    分子式为Ba6-3x(Nd1-zEuz)8+2xTi18-3y/4AlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.1;Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z Eu z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8, 0.1<y<4, 0<z≤0.1 ;
    分子式为Ba6-3x(Nd1-zEuz)8+2x+y/3Ti18-yAlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y≤3,0<z≤0.1;Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z Eu z ) 8+2x+y/3 Ti 18-y Al y O 54 , where 0.6<x<0.8, 0.1<y≤3, 0<z ≤0.1;
    分子式为Ba6-3x[Nd1-z(Sm1-aEua)z]8+2x+y/3Ti18-yAlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1;Dielectric ceramics with molecular formula Ba 6-3x [Nd 1-z (Sm 1-a Eu a ) z ] 8+2x+y/3 Ti 18-y Al y O 54 , where 0.6<x<0.8, 0.1<y<4,0<z≤0.3,0<a≤0.1;
    分子式为Ba6-3x(Nd1-z(Sm1-aEua)z)8+2xTi18-3y/4AlyO54的介电陶瓷,其中0.6<x<0.8,0.1<y<4,0<z≤0.3,0<a≤0.1。Dielectric ceramics with molecular formula Ba 6-3x (Nd 1-z (Sm 1-a Eu a ) z ) 8+2x Ti 18-3y/4 Al y O 54 , where 0.6<x<0.8, 0.1<y< 4. 0<z≤0.3, 0<a≤0.1.
  11. 根据权利要求9或10所述的微波介质陶瓷材料,其特征在于,所述微波介质陶瓷材料还包括以下晶相中的至少一种:Al2O3、(Nd,Eu)2Ti2O7、BaTi4O9、Ba2Ti9O20和TiO2The microwave dielectric ceramic material according to claim 9 or 10, characterized in that the microwave dielectric ceramic material further comprises at least one of the following crystal phases: Al 2 O 3 , (Nd,Eu) 2 Ti 2 O 7 , BaTi 4 O 9 , Ba 2 Ti 9 O 20 and TiO 2 .
  12. 一种介质滤波器,包括介质陶瓷体、与所述介质陶瓷体连接的输入端子和输出端子,其特征在于,所述介质陶瓷体的材料包括如权利要求1至8中任一项所述的介电陶瓷或权利要求9至11中任一项所述的微波介质陶瓷材料。 A dielectric filter, comprising a dielectric ceramic body, an input terminal connected to the dielectric ceramic body, and an output terminal, characterized in that the material of the dielectric ceramic body includes any one of claims 1 to 8 Dielectric ceramics or the microwave dielectric ceramic material according to any one of claims 9 to 11.
  13. 一种射频单元,其特征在于,所述射频单元包括如权利要求12所述的介质滤波器。A radio frequency unit, characterized in that the radio frequency unit comprises the dielectric filter according to claim 12.
  14. 一种通信设备,其特征在于,所述通信设备包括如权利要求12所述的介质滤波器。 A communication device, characterized in that the communication device comprises the dielectric filter according to claim 12.
PCT/CN2023/077261 2022-02-24 2023-02-20 Dielectric ceramic, dielectric ceramic material, filter, radio frequency unit, and communication device WO2023160504A1 (en)

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