WO2023143042A1 - Exposure apparatus - Google Patents

Abstract

An exposure apparatus (300), comprising: an exposure device (301) used for exposing a material (30); a feeding device (302) used for continuously conveying the material (30) to an exposure area (301a) of the exposure device (301) at a first speed in a feeding direction; and a covering device (303) used for continuously conveying a covering film (31) to the exposure area (301a) at a first speed in the feeding direction, the covering film (31) being used for carrying out regional shading when the exposure device (301) exposes the material (30), and the feeding device (302) and the covering device (303) enabling a feeding path of the material (30) to coincide with a feeding path of the covering film (31) when the material (30) and the covering film (31) enters the exposure area (301a). The exposure apparatus (300) can perform continuous exposure, thereby effectively improving exposure efficiency and exposure performance.

Description

an exposure device

Cross References to Related Applications

This patent document claims the priority and rights and interests of the Chinese patent application with the application number 202220220979.3 filed on January 26, 2022 with the title of invention "An Exposure Equipment". The entire content of the aforementioned patent application is incorporated by reference as part of the disclosure content of this patent document.

technical field

The present application relates to the field of exposure technology, and more specifically, to an exposure device.

Background technique

Exposure equipment is a device that uses ultraviolet light emitted by a light source to transfer image information on a transparent body (such as a film sheet) to the surface of the material. It is widely used in printing, flexible electronics and other fields. During the mass production process, the material is continuously conveyed along the conveyor belt or in other ways, and the film is fixed between the light source and the material to expose the material.

With people's further pursuit of production efficiency, during the operation of the existing exposure equipment, the material needs to stay under the film periodically for exposure, which limits the production capacity of the exposure equipment; the pattern on the film needs to be transported with the material The same direction limits the scope of exposure equipment patterning processing; and because the material needs to stay periodically, the accuracy of the joint position between exposure patterns cannot be controlled, which limits the processing performance of exposure equipment. Therefore, how to improve the efficiency and performance of the exposure equipment is a problem to be solved.

Contents of the invention

The embodiment of the present application provides an exposure device, which can provide continuous exposure for materials so as to improve exposure efficiency and exposure performance.

In the first aspect, an embodiment of the present application provides an exposure device, the device comprising: an exposure device for exposing materials; a feeding device for continuously transporting the materials to the exposure device at a first speed along the feeding direction Exposure area; a masking device, used for continuously conveying a masking film to the exposure area at the first speed along the feeding direction, and the masking film is used for regional shading when the exposure device exposes the material; The feeding device and the masking device make the feeding path of the material and the masking film coincide when entering the exposure area.

In the embodiment of the present application, the exposure equipment has a masking device capable of continuously transporting the masking film to the exposure area. The masking film is no longer fixed between the light source and the material, but passes through the exposure area together with the material at the same speed and direction , to achieve continuous exposure; and, during the exposure process, the masking film and the material always maintain the same movement path, which can ensure that the pattern on the masking film is exposed to the material quickly, completely and consistently, with good pattern consistency; in addition, the exposure The pattern does not need to be consistent with the traveling direction of the material, which enables the exposure equipment to process continuous complex patterns, improves the working efficiency of the exposure equipment, and improves the exposure performance of the exposure equipment.

In some embodiments, the covering device includes: a first discharging roller, a first driving roller and a first receiving roller; wherein, the first discharging roller and the first receiving roller are respectively arranged on the On both sides of the exposure device, the first driving roller rotates at the first speed as a linear speed, so that the masking film continuously enters the exposure area at the first speed.

In the embodiment of the present application, the masking device transports the masking film in a roll-to-roll manner, and can control the motion state of the masking film by controlling the speed and direction of rotation of the first driving roller, thereby realizing flexible control of the masking film and helping to improve exposure Equipment flexibility.

In some embodiments, the masking device includes: a first driven roller for supporting the masking film so that the masking film passes through the exposure area and leaves the exposure area continuously at the first speed .

In the embodiment of the present application, the movement state of the masking film in the exposure area is precisely controlled by setting the first driven roller so that the masking film between the first driving roller and the first driven roller passes through and leaves the exposure area stably.

In some embodiments, the covering device further includes: a first guide roller, arranged between the first discharge roller and the first driving roller and/or between the first driven roller and the first driving roller. Between a receiving roller, it is used to support the masking film so that the masking film is transported according to the arrangement path of the first guide roller.

In the embodiment of the present application, by setting guide rollers on the feeding path of the masking film, the masking film is conveyed according to the arrangement path of the guiding rollers, which facilitates the control of the conveying path of the masking film.

In some embodiments, the feeding device includes: a second discharging roller, a second driving roller, and a second receiving roller; wherein, the second discharging roller and the second receiving roller are respectively arranged on the The two sides of the exposure device, the second driving roller rotates at the first speed as the linear speed, so that the material and the masking film are rolled by the first driving roller and the second driving roller And continuously enter the exposure area at the first speed.

In the embodiment of the present application, the roll-to-roll material delivery method is adopted, so that the material can be collected quickly after processing, and the working efficiency of the exposure device can be improved; secondly, by controlling the speed and rotation direction of the second driving roller that transports the material, it can Control the movement state of the material, realize the flexible control of the material, and help to improve the flexibility of the exposure equipment; moreover, the second driving roller and the first driving roller form a rolling pressure, so that the conveying path of the masking film and the material is the same, and can be entered synchronously In the exposure area, while improving the consistency of the masking film and material movement, it can also be controlled by a set of control system to reduce the rotation error between the roller shaft and the roller shaft, and further improve the consistency of the masking film and material movement.

In some embodiments, the feeding device includes: a second driven roller for supporting the material so that the material passes through the exposure area and leaves the exposure area continuously at the first speed.

In the embodiment of the present application, when the second driven roller is set at a position corresponding to the first driven roller, it can also form a rolling pressure on the exposed masking film and material, so that the roller between the driving roller and the driven roller The masking film and materials can pass through and leave the exposure area smoothly; by setting the second driven roller, the movement state of the materials in the exposure area can be precisely controlled, helping to improve the movement stability of the masking film and materials in the exposure area.

In some embodiments, the feeding device further includes: a second guide roller, arranged between the second discharge roller and the second driving roller and/or arranged between the second driven roller and the second driving roller. Between the second receiving rollers, it is used to support the materials, so that the materials are transported according to the arrangement path of the second guide rollers.

In the embodiment of the present application, the movement trajectory of the material can be supported and designed by setting the second guide roller, so that the material can move along the required trajectory, which facilitates the design of the exposure equipment to be more compact, while improving the stability of the movement of the material. The volume of the exposure equipment is reduced.

In some embodiments, the exposure device includes: a plurality of light sources arranged in a row along the feeding direction.

In the embodiment of the present application, by setting multiple light sources, the exposure area of the material in the exposure area at the same time can be increased, thereby improving the working efficiency of the exposure equipment.

In some embodiments, the apparatus includes: a first exposure device and a second exposure device respectively disposed on a first side of the material and a second side opposite to the first side.

In some embodiments, the apparatus comprises: a first masking device and a second masking device disposed on the first side and the second side, respectively.

In the embodiment of the present application, by setting the exposure device and the masking device on both sides of the material, both sides of the material can be exposed simultaneously when the material passes through the exposure area, thereby improving the working efficiency of the exposure equipment.

In some embodiments, the masking film of the first masking means has the same pattern as the masking film of the second masking means.

In the embodiment of the present application, the pattern of the masking film on both sides of the material is the same, so that the exposed material can have completely consistent and corresponding patterns on both sides, so that structures such as through holes are formed in some application scenarios, so that the exposure equipment can Applied in the hole making process, the application scene of the exposure equipment is expanded.

Description of drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the accompanying drawings that need to be used in the embodiments of the present application. Obviously, the accompanying drawings described below are only some embodiments of the present application. Those of ordinary skill in the art can also obtain other drawings based on the accompanying drawings on the premise of not paying creative efforts.

Fig. 1 is a schematic structural diagram of a vehicle of the present application;

Fig. 2 is a schematic structural diagram of a battery of the present application;

Fig. 3 is a schematic structural diagram of an exposure device of the present application;

Fig. 4 is a schematic structural diagram of a masking film of the present application;

Fig. 5 is a schematic structural view of another exposure device of the present application.

Detailed ways

The implementation manner of the present application will be further described in detail below with reference to the drawings and embodiments. The detailed description and drawings of the following embodiments are used to illustrate the principles of the application, but not to limit the scope of the application, that is, the application is not limited to the described embodiments.

In the description of this application, it should be noted that, unless otherwise specified, the meaning of "plurality" is more than two; the terms "upper", "lower", "left", "right", "inner", " The orientation or positional relationship indicated by "outside" and so on are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a reference to this application. Application Restrictions. In addition, the terms "first", "second", "third", etc. are used for descriptive purposes only and should not be construed as indicating or implying relative importance. "Vertical" is not strictly vertical, but within the allowable range of error. "Parallel" is not strictly parallel, but within the allowable range of error.

The orientation words appearing in the following description are the directions shown in the figure, and do not limit the specific structure of the application. In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be interpreted in a broad sense, for example, it can be a fixed connection or a flexible connection. Disassembled connection, or integral connection; it can be directly connected or indirectly connected through an intermediary. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific situations.

The term "and/or" in this application is just an association relationship describing associated objects, which means that there may be three relationships, for example, A and/or B, which can mean: there is A, A and B exist at the same time, and B exists These three situations. In addition, the character "/" in this application generally indicates that the contextual objects are an "or" relationship.

Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by those skilled in the technical field of this application; the terms used in this application in the description of the application are only to describe specific implementations The purpose of the example is not intended to limit the present application; the terms "comprising" and "having" and any variations thereof in the description and claims of the present application and the description of the above drawings are intended to cover non-exclusive inclusion. The terms "first", "second" and the like in the description and claims of the present application or the above drawings are used to distinguish different objects, rather than to describe a specific sequence or primary-subordinate relationship.

Reference in this application to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The appearances of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are independent or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the embodiments described in this application can be combined with other embodiments.

In actual production and life, in order to improve the stability of the active material layer on the surface of the current collector and increase the loading capacity of the active material on the surface of the current collector, a recess is usually formed on the surface of the current collector to accommodate part of the active material layer. Therefore, it is necessary to process the surface of the current collector. The general processing method is: coating photoresist on the surface of the current collector, covering the processed masking film, exposing the exposure source through the exposure source, after developing the patterned photoresist on the masking film, and then etching the current collector. Recesses are formed on the surface of the current collector.

During the mass production and processing of the current collector by the exposure equipment, the masking film is fixed between the light source and the current collector. The current collector is usually a continuous copper foil strip or aluminum foil strip, and its surface is coated with photoresist, which can be compared with the light source. With the masking film being shipped continuously. When exposing the current collector, since the positions of the masking film and the light source are fixed, the current collector needs to stay in the exposure area to wait for exposure during exposure. The fluid continues to be transported to the exposure area, so that the current collector needs to stay in the exposure area periodically, and the light source also needs to start exposure periodically, thus limiting the throughput of the exposure equipment. In addition, the pattern on the masking film needs to be consistent with the direction in which the current collector is transported, which limits the diversification of exposure patterns and makes it impossible to expose complex patterns.

In view of this, in order to solve the problems of low exposure efficiency of the current collector and the low complexity of the exposure pattern, the present application provides an exposure device, which enables the ring-shaped masking film and the current collector to move synchronously in the exposure area through the masking device, and can provide the current collector. Continuous exposure improves exposure efficiency and exposure performance.

It should be understood that the embodiments of the present application take the processing of current collectors as an example, and the exposure equipment provided in the embodiments of the present application can be used, but not limited, to manufacture current collectors. It can also be used in the graphics processing operations of display panels, integrated circuits and semiconductors, and can also improve exposure efficiency, production efficiency and the complexity of exposure patterns.

In recent years, batteries, as a main power equipment, have been widely used in many fields such as electronic equipment, electric bicycles, electric motorcycles, electric vehicles, military equipment, and aerospace.

For example, as shown in Figure 1, it is a schematic structural diagram of a vehicle 1 of the present application, the vehicle 1 can be a fuel vehicle, a gas vehicle or a new energy vehicle, and the new energy vehicle can be a pure electric vehicle, a hybrid vehicle or an extended-range vehicle, etc. . A motor 11 , a controller 12 and a battery 10 can be arranged inside the vehicle 1 , and the controller 12 is used to control the battery 10 to supply power to the motor 11 . For example, the battery 10 may be provided at the bottom or front or rear of the vehicle 1 . The battery 10 can be used for power supply of the vehicle 1 , for example, the battery 10 can be used as an operating power source of the vehicle 1 , for a circuit system of the vehicle 1 , for example, for starting, navigating and running power requirements of the vehicle 1 . In another embodiment of the present application, the battery 10 can not only be used as an operating power source for the vehicle 1 , but can also be used as a driving power source for the vehicle 1 , replacing or partially replacing fuel or natural gas to provide driving power for the vehicle 1 .

In this application, a battery refers to a physical module including one or more battery cells to provide electrical energy. For example, the battery mentioned in this application may include a battery module or a battery pack, and the like. Batteries generally include a case for enclosing one or more battery cells. The box can prevent liquid or other foreign objects from affecting the charging or discharging of the battery cells.

In order to meet different power usage requirements, the battery may include multiple battery cells, wherein the multiple battery cells may be connected in series, in parallel or in parallel, and the hybrid connection refers to a mixture of series and parallel connections. Batteries can also be called battery packs. Optionally, a plurality of battery cells can be connected in series, parallel or mixed to form a battery module, and then a plurality of battery modules can be connected in series, parallel or mixed to form a battery. That is to say, multiple battery cells can directly form a battery, or form a battery module first, and then form a battery from the battery module.

For example, as shown in FIG. 2 , which is a schematic structural diagram of a battery 10 of the present application, the battery 10 may include a plurality of battery cells 20 . The number of battery cells 20 can be set to any value. Multiple battery cells 20 can be connected in series, in parallel or in parallel to achieve greater capacity or power.

Optionally, the battery cell 20 may include a lithium-ion secondary battery, a lithium-ion primary battery, a lithium-sulfur battery, a sodium-lithium-ion battery, a sodium-ion battery, or a magnesium-ion battery, which is not limited in this embodiment of the present application. In some embodiments, the battery cells 20 can also be referred to as battery cells.

The battery cell 20 includes an electrode assembly and an electrolyte, and the electrode assembly is composed of a positive electrode sheet, a negative electrode sheet and a diaphragm. A battery cell works primarily by moving metal ions between the positive and negative plates. The positive electrode sheet includes a positive electrode current collector and a positive electrode active material layer. The positive electrode active material layer is coated on the surface of the positive electrode current collector. The current collector not coated with the positive electrode active material layer protrudes from the current collector coated with the positive electrode active material layer. The current collector coated with the positive electrode active material layer serves as the positive electrode tab. Taking a lithium-ion battery as an example, the material of the positive electrode current collector can be aluminum, and the positive electrode active material can be lithium cobaltate, lithium iron phosphate, ternary lithium or lithium manganate. The negative electrode sheet includes a negative electrode current collector and a negative electrode active material layer. The negative electrode active material layer is coated on the surface of the negative electrode current collector. The current collector without the negative electrode active material layer protrudes from the current collector coated with the negative electrode active material layer. The current collector coated with the negative electrode active material layer serves as the negative electrode tab. The material of the negative electrode current collector may be copper, and the negative electrode active material may be carbon or silicon. In order to ensure that a large current is passed without fusing, the number of positive pole tabs is multiple and stacked together, and the number of negative pole tabs is multiple and stacked together. The material of the diaphragm can be polypropylene (Polypropylene, PP) or polyethylene (Polyethylene, PE). In addition, the electrode assembly may be a wound structure or a laminated structure, which is not limited in the embodiment of the present application.

As shown in FIG. 3 , it is a schematic structural diagram of an exposure device provided by an embodiment of the present application. Exposure equipment 300 includes:

Exposure device 301, used for exposing material 30;

The feeding device 302 is used to continuously transport the material 30 to the exposure area 301a of the exposure device 301 at a first speed along the feeding direction;

The masking device 303 is used to continuously convey the masking film 31 to the exposure area 301a at a first speed along the feeding direction. The masking film 31 is used to perform regional shading when the exposure device 301 exposes the material 30. The feeding device 302 and the masking device 303 make the material 30 coincides with the feeding path of the mask film 31 when it enters the exposure region 301a.

Specifically, the material 30 includes a substrate and a photoresist coated thereon, and the substrate may be a current collector (a positive current collector or a negative current collector), a circuit board, and the like. The exposure device 301 has a light source 3011, which can emit light in the UV band to the material, corresponding to the exposure area 301a. The light emitted by the exposure device 301 in this area is blocked by the masking film 31, so that the light part passes through the masking film 31 to reach the surface of the material 30 and light. The engraving works. During the exposure process, the material 30 and the masking film 31 in the exposure area 301a move in the same direction and at the same speed, that is, the material 30 and the masking film 31 move synchronously in the exposure area 301a.

As shown in FIG. 4 , it is a schematic structural view of a masking film 31 according to an embodiment of the present application. The masking film 31 has a light-shielding portion 311 and a light-transmitting portion 312 , and the light-shielding portion 311 and/or the light-transmitting portion 312 constitute an exposure pattern on the masking film 31 .

The light shielding portion 311 shown in FIG. 4 is circular, and a plurality of light shielding portions 311 are arranged in a rectangular array. In some embodiments, the shape of the light-shielding portion 311 can also be in other forms, and the shape, quantity, and arrangement of the light-shielding portion 311 or the light-transmitting portion 312 can be set according to actual processing requirements, which is not limited in this application.

Photoresist, also known as photoresist, refers to a thin corrosion-resistant material whose solubility changes through irradiation or radiation of ultraviolet light, electron beams, ion beams, X-rays, etc. Photoresist can be a light-sensitive mixed liquid composed mainly of photosensitive resin, sensitizer and solvent. Using an appropriate selective photoresist, the desired pattern can be obtained on the surface.

In some embodiments, after the photoresist is exposed and developed, the exposed part of the photoresist is melted, and the unexposed part remains, and this type of photoresist is a positive photoresist; in other embodiments, it can also be Yes, after the photoresist is exposed and developed, the exposed part is retained, while the unexposed part is dissolved. This type of photoresist is a negative photoresist.

The exposure process uses light to project the pattern on the mask film 31 onto the photoresist after passing through the optical system, so as to realize pattern transfer. For the exposure equipment 300 provided in the embodiment of the present application, it can be understood that the exposure equipment 300 in the embodiment of the present application is a photolithography method that uses the light of the exposure device 301 to project the pattern on the masking film 31 onto the surface of the substrate after being irradiated by light. Glue on. The light-transmitting portion 312 allows light to pass through and irradiate the photoresist on the substrate, and the light-shielding portion 311 prevents light from passing through the masking film 31 and irradiating the photoresist on the substrate. If the photoresist is a positive photoresist, the part of the photoresist that is irradiated by the light passing through the light-transmitting part 312 is dissolved to form a pattern consistent with the shape of the light-transmitting part 312, and the part corresponding to the light-shielding part 311 The photoresist remains. If the photoresist is a negative photoresist, the part of the photoresist that is irradiated by the light passing through the light-transmitting portion 312 is retained; 311 shapes consistent with the pattern.

In this embodiment, the exposure equipment 300 has a masking device 303 capable of continuously transporting the masking film 31 to the exposure area 301a. The masking film 31 is no longer fixed between the light source 3011 and the material 30, but together with the material 30 in the same The speed and direction pass through the exposure area 301a to achieve continuous exposure; and, during the exposure process, the masking film 31 and the material 30 always maintain the same movement path, which can ensure that the pattern on the masking film 31 is exposed to the material 30 quickly, completely and consistently , has good pattern consistency; in addition, the exposure pattern does not need to be consistent with the traveling direction of the material 30, so that the exposure equipment 300 can process continuous complex patterns, and the exposure performance of the exposure equipment 300 can be improved while improving the working efficiency of the exposure equipment. .

Several implementation forms of the masking device 303 are introduced below.

Optionally, please continue to refer to FIG. 3 , the masking device 303 includes: a first unwinding roller 3032, a first driving roller 3031, and a first receiving roller 3033, and the first driving roller 3031 rotates at a first speed as a linear speed to The masking film 31 is continuously entered into the exposure region 301a at a first speed.

Specifically, there is a roll of masking film 31 on the first discharge roller 3032, and the masking film has a continuous pattern, and the first driving roller 3031 rotates to drive the first discharge roller 3032 to release the masking film 31, and the masking film 31 is exposed The area 301a is recovered by the first take-up roll 3033 afterwards.

It should be understood that in the masking device 303, the first unwinding roller 3032 and/or the first receiving roller 3033 can also be driving rollers, which rotate at the same linear speed as the first driving roller 3031, so that the material 31 can move from unwinding to rewinding. The process is always moving forward at a constant speed.

In this embodiment, the masking device 303 transports the masking film 31 in a roll-to-roll manner, so that while the masking film 31 and the material 30 move synchronously, the movement path of the masking film 31 and the material 30 can be adjusted through the arrangement of the rollers. Overlapping, finally in the exposure area 301a, the material 30 is exposed continuously to improve the exposure efficiency; by controlling the rotation speed and rotation direction of the first driving roller 3031, the movement state of the masking film 31 entering the exposure area 301a can be accurately controlled, thereby realizing the masking Flexible control of membrane 31.

Optionally, the masking device 303 includes: a first driven roller 3034 for supporting the masking film 31 so that the masking film 31 passes through the exposure area 301 a and leaves the exposure area 301 a continuously at a first speed.

Specifically, the first driven roller 3034 is arranged on the moving path of the masking film 31 after passing through the exposure device 301 , and the first driven roller 3034 can support the masking film 31 so that it is positioned between the first driving roller 3031 and the first driven roller 3034 The first drive roller 3031 rotates to drive the first driven roller 3034 to rotate in the same direction so that the masking film 31 rotates, and precisely controls the movement state of the masking film in the exposure area 301a while making the masking film 31 stably and continuously pass through the exposure area. The region 301a improves the stability of the movement of the masking film 31 . After passing through the first driven roller 3034 , the masking film 31 is separated from the material 30 driven by the first receiving roller 3033 and recovered by the first receiving roller 3033 .

Optionally, the masking device 303 further includes: a first guide roller 3035 disposed between the first unwinding roller 3032 and the first driving roller 3031 and/or between the first driven roller 3034 and the first receiving roller 3033 , used to support the masking film 31 so that the masking film 31 is transported along the arrangement path of the first guide rollers 3035 .

Specifically, between the first discharge roller 3032 and the first driving roller 3031, between the first transmission roller 3034 and the first receiving roller 3033, all can be according to the size of the masking film 31, the first discharge roller 3032 and the first A certain number of first guide rollers 3035 are set by factors such as the distance between the driving rollers 3031, the distance between the first drive roller 3034 and the first receiving roller 3033, so that the masking film 31 is arranged according to the arrangement of the first guide rollers 3035 The path is conveyed, and the feeding path of the masking film 31 is reasonably set to facilitate the control of the feeding path of the masking film 31 .

It should be understood that when the area of the exposure area 301a is large, a certain number of first guide rollers 3035 may also be arranged between the first driving roller 3031 and the first driven roller 3034 to improve the stability of the movement of the masking film in the exposure area 301a sex.

Please continue to refer to FIG. 3 , and the feeding device 302 will be introduced below.

Optionally, the feeding device 302 includes: a second discharging roller 3022, a second driving roller 3021, and a second receiving roller 3023; wherein, the second discharging roller 3022 and the second receiving roller 3023 are respectively arranged on the exposure device 301 The two sides of the second driving roller 3021 rotate at the first speed as the linear speed, so that the material 30 and the masking film 31 are rolled by the first driving roller 3031 and the second driving roller 3021 and continuously enter the exposure area 301a at the first speed .

Specifically, there is a roll of unexposed material 30 on the second discharge roller 3022, and the rotation of the second discharge roller 3022 can release the unexposed material 30; the second driving roller 3021 is arranged on the first driving roller 3031 matched position, and can form rolling pressure with the first driving roller 3031, so that the material 30 and the masking film 31 are rolled together after passing through the first driving roller 3031 and the second driving roller 3021, and the movement paths overlap, and can be completely The consistent and synchronous motion passes through the exposure area 301 a, improving the consistency of the material 30 and the masking film 31 . In addition, both the material 30 and the masking film 31 are transported in a roll-to-roll manner, so that the feeding device 302 and the masking device 303 can share a set of control systems, reduce the rotation error between the roller shafts, and improve the consistency of the roller shaft movement, thereby The consistency and stability of the movement of the masking film 31 and the material 30 are further improved. The above rotation error includes but not limited to the starting time of the roller shaft, the rotation speed of the roller shaft and the like. By controlling the rotation direction and rotation speed of the second driving roller 3021, the material 30 and the masking film 31 can be continuously transported to the exposure area 301a and the movement state of the material 30 can be controlled; the rotation of the second receiving roller 3023 can separate the material 30 from the masking film 31 The exposed material 30 is recovered and wound into rolls for subsequent further processing.

In this embodiment, the roll-to-roll material 30 is transported, so that the material 30 can be collected quickly after processing, and the working efficiency of the exposure device 300 is improved.

Optionally, the feeding device 302 includes: a second driven roller 3024 for supporting the material 31 so that the material 31 passes through the exposure area 301 a and leaves the exposure area 301 a continuously at a first speed.

Specifically, the second driven roller 3024 is arranged on the moving path of the material 30 after passing through the exposure device 301, and can support the material 30 to keep it flat in the exposure area 301a. Preferably, the second driven roller 3024 is arranged at a position matched with the first driven roller 3034 , so that the material 30 and the masking film 31 are rolled again at the first driven roller 3034 and the second driven roller 3024 . Thus, the movement path of the material 30 between the driving roller and the driven roller is exactly the same as that of the masking film 31. By controlling the rotation of the two driving rollers, the material 30 and the masking film 31 between the driving roller and the driven roller can Entering and leaving the exposure area 301 a continuously and stably further improves the consistency and stability of the movement of the material 30 and the masking film 31 .

Optionally, the feeding device 302 further includes: a second guide roller 3025, arranged between the second unwinding roller 3022 and the second driving roller 3021 and/or arranged between the second driven roller 3024 and the second receiving roller 3023 between them are used to support the material 30 so that the material 30 is conveyed according to the arrangement path of the second guide roller 3025 .

It should be understood that the number of the second guide rollers 3025 can be multiple, and their arrangement can be configured according to factors such as the length of the material 30 and the size of the exposure device 300; A certain number of second guide rollers are arranged between the roller 3021 and the second driven roller 3024 to support the material 30 and the masking film 31 to pass through the exposure area 301a continuously and stably.

In this embodiment, the guide roller 3025 can support and design the movement track of the material 30, so that the material 30 can move along the required track, which facilitates the design of the exposure device 300 to be more compact, and improves the movement stability of the material 30. At the same time, the volume of the exposure device 300 is reduced.

Optionally, the exposure device 301 includes: a plurality of light sources 3011 arranged in a row along the feeding direction.

Specifically, multiple light sources 3011 can increase the area of the exposure area 301a, so that more materials 30 passing through the exposure area 301a are exposed. A plurality of light sources 3011 are disposed between the first driving roller 3031 and the first driven roller 3034 of the masking device 303 . In other embodiments, the number of light source 3011 may be one.

In this embodiment, by setting multiple light sources 3011 , the exposure area of the material 30 in the exposure area 301 a at the same time can be increased, thereby improving the working efficiency of the exposure device 300 .

FIG. 5 is a schematic structural diagram of another exposure device 300 according to an embodiment of the present application.

As shown in FIG. 5 , optionally, the exposure equipment 300 includes: a first exposure device 301 and a second exposure device 301', which are respectively disposed on a first side of the material 30 and a second side opposite to the first side.

It should be understood that the material 30 generally includes a substrate and a photoresist coated thereon, and the photoresist may be coated on one side or both sides of the substrate. In some application scenarios, the material 30 needs to be exposed on both sides, so both sides of the substrate are coated with photoresist. At this time, the material 30 includes a substrate and photoresist coated on both sides of the substrate. By arranging two opposite exposure devices 301 and 301' in the exposure equipment 300, it is possible to simultaneously expose both sides of the material on both sides of the material 30, and has a double-sided exposure function.

Optionally, the exposure equipment 300 includes: a first masking device 303 and a second masking device 303', which are respectively disposed on the first side and the second side.

Specifically, the exposure device 300 has two masking devices 303 and 303' corresponding to the exposure device 301 and the exposure device 301' respectively, which can perform patterned exposure on both sides of the material 30 at the same time, further improving the performance of the exposure device 300. productivity and performance.

In the exposure equipment 300 shown in FIG. 5 , after passing through the second driving roller 3021, the material 30 is passed by the first driving roller 3031 of the masking device 303 and the third driving roller 303' of the masking device 303' together with the masking film 31 and the masking film 31'. The driving roller 3031' rolls and enters the exposure area 301a. The material 30, the masking film 31 and the masking film 31', pass through the exposure area 301a through the same feeding path, and after being rolled by the first driven roller 3034 of the masking device 303 and the third driven roller 3034' of the masking device 303, they are collected respectively. roll, thereby ensuring the stability and consistency of the movement of the material 30, the masking film 31 and the masking film 31' in the exposure area 301a. That is, the first masking device 303, the second masking device 303' and the feeding device 302 make the material 30 coincide with the feeding path of the masking film 31 and the masking film 31' when entering the exposure area 301a.

Optionally, the masking film 31 of the first masking device 303 has the same pattern as the masking film 31' of the second masking device 303'.

In this embodiment, the pattern of the masking film 31 on both sides of the material is the same as that of the masking film 31', so that the exposed material 30 can have completely consistent and corresponding patterns on both sides, thereby forming structures such as through holes in some application scenarios , so that the exposure equipment 300 can be applied in the hole-making process, and the application scenarios of the exposure equipment 300 are expanded.

While the application has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the application. In particular, as long as there is no structural conflict, the technical features mentioned in the various embodiments can be combined in any manner. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims (11)

An exposure device, characterized in that the device comprises: Exposure device for exposing materials; a feeding device, configured to continuously transport the material to the exposure area of the exposure device at a first speed along the feeding direction; a masking device, configured to continuously transport a masking film to the exposure area at the first speed along the feeding direction, and the masking film is used for regional shading when the exposure device exposes the material; The feeding device and the masking device make the feeding path of the material and the masking film coincide when entering the exposure area. The apparatus of claim 1, wherein said masking means comprises: The first unwinding roller, the first driving roller and the first receiving roller; Wherein, the first unwinding roller and the first receiving roller are respectively arranged on both sides of the exposure device, and the first driving roller rotates at the first speed as a linear speed, so that the covering Film enters said exposure zone continuously at said first speed. The apparatus of claim 2, wherein said masking means comprises: The first driven roller is used to support the masking film so that the masking film passes through the exposure area and leaves the exposure area continuously at the first speed. The apparatus according to claim 3, wherein said masking means further comprises: A first guide roller, arranged between the first unwinding roller and the first driving roller and/or between the first driven roller and the first receiving roller, for supporting the cover film so that the masking film is conveyed along the arrangement path of the first guide roller. The device according to any one of claims 2-4, wherein the feeding device comprises: The second unwinding roller, the second driving roller and the second receiving roller; Wherein, the second discharging roller and the second receiving roller are respectively arranged on both sides of the exposure device, and the second driving roller is arranged at a position matched with the first driving roller and The first speed is rotating at a linear speed, so that the material and the masking film are rolled by the first driving roller and the second driving roller and continuously enter the exposure area at the first speed. The apparatus according to claim 5, wherein the feeding device comprises: The second driven roller is used to support the material so that the material passes through the exposure area and leaves the exposure area continuously at the first speed. The device according to claim 6, wherein the feeding device further comprises: The second guide roller is arranged between the second unwinding roller and the second driving roller and/or between the second driven roller and the second receiving roller for supporting the the materials so that the materials are transported according to the arrangement path of the second guide rollers. The apparatus according to any one of claims 1-7, wherein the exposure device comprises: A plurality of light sources, the plurality of light sources are arranged in a row along the feeding direction. The device according to any one of claims 1-8, wherein the device comprises: The first exposure device and the second exposure device are respectively arranged on the first side of the material and the second side opposite to the first side. The device according to claim 9, characterized in that said device comprises: The first covering device and the second covering device are respectively arranged on the first side and the second side. The apparatus of claim 10, wherein the masking film of the first masking means is of the same pattern as the masking film of the second masking means.

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