WO2023119710A1 - Electrostatic induction type vibration element - Google Patents

Electrostatic induction type vibration element Download PDF

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WO2023119710A1
WO2023119710A1 PCT/JP2022/029947 JP2022029947W WO2023119710A1 WO 2023119710 A1 WO2023119710 A1 WO 2023119710A1 JP 2022029947 W JP2022029947 W JP 2022029947W WO 2023119710 A1 WO2023119710 A1 WO 2023119710A1
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comb
shaped electrode
flexible member
electrostatic induction
vibration element
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French (fr)
Japanese (ja)
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原 橋口
泰 芝田
巧真 石黒
裕幸 三屋
典子 下村
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国立大学法人静岡大学
株式会社鷺宮製作所
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets

Abstract

Provided is an electrostatic induction type vibration element that suppresses contact between interdigitated electrodes and that can withstand external impacts. Specifically provided is an electrostatic induction type vibration element having: a flexible member; a plurality of first interdigitated electrodes of which one end is fixed so as to be insulated from the flexible member and which stand up from the flexible member; a plurality of second interdigitated electrodes of which one end is fixed so as to be insulated from the flexible member and which stand up from the flexible member at internals relative to the first interdigitated electrodes, wherein, when the flexible member vibrates, the intervals between the other end sides of the first interdigitated electrodes and the second interdigitated electrodes fluctuate.

Description

静電誘導型振動素子Electrostatic induction vibration element
　本発明は、静電誘導型振動素子に関する。 The present invention relates to an electrostatic induction vibration element.
　電気エネルギーを印加して振動を発生、または振動エネルギーを電気信号または電気エネルギーに変換する振動素子は、マイクロフォンや超音波センサ、または振動発電の分野で利用されている（例えば、特許文献１および特許文献２等参照）。 Vibration elements that generate vibrations by applying electrical energy or convert vibrational energy into electrical signals or electrical energy are used in the field of microphones, ultrasonic sensors, or vibration power generation (for example, Patent Document 1 and Patent Reference 2, etc.).
　特許文献２に記載の静電誘導型振動素子は、対向する櫛歯型電極にエレクトレット、すなわち、誘電体に電圧を印加するなどして帯電を維持させた部材が用いられている。これらエレクトレット面の重なる面積が変化することで、櫛歯型電極間に働く静電力により力学的な仕事が静電エネルギーに変換され、起電力を発生することができる。 The electrostatic induction vibration element described in Patent Document 2 uses an electret, that is, a member that maintains its charge by applying a voltage to a dielectric, for the comb-shaped electrodes facing each other. By changing the overlapping area of these electret surfaces, mechanical work is converted into electrostatic energy by the electrostatic force acting between the comb-shaped electrodes, and electromotive force can be generated.
特開２０１７－２２５７６号公報JP 2017-22576 A 特許第６６８２１０６号Patent No. 6682106 特開２０１３－７８２０６号公報JP 2013-78206 A
　しかし、一方で、櫛歯型電極の静電ギャップが、極めて小さく設定されていることから、外的な衝撃に対して、電極同士の貼り付きが生じてしまうおそれがあった。具体的には、静電誘導型振動素子の動作時において、外的な衝撃により、櫛歯間の静電ギャップに変動が生じ、櫛歯側面の静電引力のバランスが崩れると、変動が増長されることがあった。この状況下においては際、櫛歯型電極間でプルインが生じ、櫛歯同士が接触すると、電位差を持った電極間に瞬時に大電流が流れ、最悪の場合には、電極同士の融着による貼り付きが生じて復帰不能な状態となることがあった。（特許文献３等参照）。 However, on the other hand, since the electrostatic gap of the comb-shaped electrodes is set to be extremely small, there is a risk that the electrodes will stick to each other due to external impact. Specifically, when the electrostatic induction vibration element is in operation, the electrostatic gap between the comb teeth fluctuates due to an external impact, and if the balance of the electrostatic attraction on the side surfaces of the comb teeth is lost, the fluctuation increases. There was something to be done. Under this condition, pull-in occurs between the comb-shaped electrodes, and when the comb-teeth come into contact with each other, a large current flows instantaneously between the electrodes having a potential difference. In some cases, sticking occurred, resulting in an unrecoverable state. (See Patent Document 3, etc.).
　これらを鑑み、本発明は、櫛歯型電極間の接触を抑制し、外的な衝撃に強い静電誘導型振動素子を提供することを目的とする。 In view of the above, it is an object of the present invention to provide an electrostatic induction vibrating element that suppresses contact between comb-shaped electrodes and is resistant to external impact.
　上記課題を解決するために、本発明に係る一実施態様の静電誘導型振動素子は、
可撓性部材と、
　前記可撓性部材に絶縁された状態で一端側が固定され、前記可撓性部材から立設する複数の第１の櫛歯型電極と、
　前記可撓性部材に絶縁された状態で一端側が固定され、前記可撓性部材から前記第１の櫛歯型電極と間隔を隔てて立設する複数の第２の櫛歯型電極と、
を有する静電誘導型振動素子であって、
　前記可撓性部材が振動する際に、前記第１の櫛歯型電極と前記第２の櫛歯型電極の他端側の間隔が変動する。 In order to solve the above problems, an electrostatic induction vibration element according to one embodiment of the present invention includes:
a flexible member;
a plurality of first comb-shaped electrodes fixed at one end in a state of being insulated from the flexible member and erected from the flexible member;
a plurality of second comb-shaped electrodes fixed at one end in a state of being insulated from the flexible member and erected from the flexible member with a gap from the first comb-shaped electrodes;
An electrostatic induction vibration element having
When the flexible member vibrates, the distance between the first comb-shaped electrode and the second comb-shaped electrode on the other end side varies.
　本発明は櫛歯型電極間の接触を抑制し、外的な衝撃に強い静電誘導型振動素子を提供することができる。 The present invention can provide an electrostatic induction vibrating element that suppresses contact between comb-shaped electrodes and is resistant to external shocks.
本発明の第１の実施形態に係る静電誘導型振動素子を示す上面図である。1 is a top view showing an electrostatic induction vibration element according to a first embodiment of the invention; FIG. （ａ）図１の静電誘導型振動素子の静止時の断面図である。（ｂ）図１の静電誘導型振動素子の撓んだ時の断面図である。(a) is a cross-sectional view of the electrostatic induction vibration element of FIG. 1 when it is stationary. (b) is a cross-sectional view of the electrostatic induction vibration element of FIG. 1 when it is bent. 本発明の第２の実施形態に係る静電誘導型振動素子を示す上面図である。FIG. 5 is a top view showing an electrostatic induction vibration element according to a second embodiment of the invention; （ａ）図３の静電誘導型振動素子の静止時の断面図である。（ｂ）図３の静電誘導型振動素子の撓んだ時の断面図である。4A is a cross-sectional view of the electrostatic induction vibration element of FIG. 3 when it is stationary; FIG. 4B is a cross-sectional view of the electrostatic induction vibration element of FIG. 3 when it is bent; FIG. 本発明の第３の実施形態に係る静電誘導型振動素子を示す裏面斜視図である。FIG. 11 is a rear perspective view showing an electrostatic induction vibration element according to a third embodiment of the present invention; （ａ）図５の静電誘導型振動素子の静止時の断面図である。（ｂ）図５の静電誘導型振動素子の撓んだ時の断面図である。6A is a cross-sectional view of the electrostatic induction vibration element of FIG. 5 when it is stationary; FIG. (b) is a cross-sectional view of the electrostatic induction vibration element of FIG. 5 when it is bent. 本発明の第３の実施形態の静電誘導型振動素子を用いた超音波送受信装置の模式図である。FIG. 10 is a schematic diagram of an ultrasonic transmission/reception device using an electrostatic induction transducer according to a third embodiment of the present invention;
　以下、本発明の実施形態について、詳細に説明するが、本発明はこれらに限られない。 Although the embodiments of the present invention will be described in detail below, the present invention is not limited to these.
 ＜第１の実施形態＞
　図１は、本発明の第１の実施形態に係る静電誘導型振動素子１００を示す上面図である。 <First embodiment>
FIG. 1 is a top view showing an electrostatic induction vibration element 100 according to a first embodiment of the invention.
　本発明の第１の実施形態において、静電誘導型振動素子１００は、振動発電素子であり、可撓性部材１０と、第１の櫛歯型電極２０と、第２の櫛歯型電極３０と、第１の端子４０と、第２の端子５０と、および錘６０と、を備える。第１の櫛歯型電極２０と第２の櫛歯型電極３０はそれぞれ、間隔を隔てて交互に延出するように、可撓性部材１０に絶縁された状態で設置される。以下、静電誘導型振動素子１００の各構成を順に説明する。 In the first embodiment of the present invention, an electrostatic induction vibration element 100 is a vibration power generation element, and includes a flexible member 10, a first comb-shaped electrode 20, and a second comb-shaped electrode 30. , a first terminal 40 , a second terminal 50 , and a weight 60 . The first comb-shaped electrodes 20 and the second comb-shaped electrodes 30 are installed in an insulated state on the flexible member 10 so as to alternately extend at intervals. Hereinafter, each configuration of the electrostatic induction vibration element 100 will be described in order.
　可撓性部材１０は、一端が基部（図示せず）に固定された片持ち梁構造を有し、当該片持ち梁構造の自由端に錘６０が配置される。この可撓性部材１０は、外部からの振動により、撓みが生じる片持ち梁として機能する。なお、詳細は後述するが、可撓性部材１０の固定端と自由端との間の領域に、第１の櫛歯型電極２０と第２の櫛歯型電極３０が設置される。 The flexible member 10 has a cantilever structure with one end fixed to a base (not shown), and a weight 60 is arranged at the free end of the cantilever structure. This flexible member 10 functions as a cantilever that is bent by external vibration. Although details will be described later, a first comb-shaped electrode 20 and a second comb-shaped electrode 30 are provided in a region between the fixed end and the free end of the flexible member 10 .
　図１に記載の実施形態において可撓性部材１０は三角形状を有するが、これに限定されず、矩形状であってもよい。可撓性部材１０は可撓性を有するものであれば、単一の部材により形成されたものであってもよく、また、複数の部材により形成されてもよい。例えば、図２（ａ）および図２（ｂ）に記載の実施形態では、可撓性部材１０はＳＯＩ基板ハンドル層１０ａにＳｉＯ2層１０ｂが積層された構造となっている。 Although the flexible member 10 has a triangular shape in the embodiment shown in FIG. 1, it is not limited thereto and may be rectangular. The flexible member 10 may be formed of a single member or may be formed of a plurality of members as long as it has flexibility. For example, in the embodiment shown in FIGS. 2(a) and 2(b), the flexible member 10 consists of an SOI substrate handle layer 10a laminated with a SiO 2 layer 10b.
　第１の櫛歯型電極２０および第２の櫛歯型電極３０は、それぞれ間隔を隔てて交互に延出するように、可撓性部材１０上に立設される。櫛歯型電極とは、図１ならびに図２（ａ）および図２（ｂ）のように、複数の平面状電極を櫛歯のように並列配置した電極である。櫛歯の本数は任意の数であってよく、図１に示したものに限定されない。櫛歯の本数が最小である場合の櫛歯型電極は、第１の櫛歯型電極および第２の櫛歯型電極の一方の電極に２つの櫛歯が形成され、その２つの櫛歯の間に挿入されるように他方の電極に１つの櫛歯が形成されている。このような基本構成を有する櫛歯型電極であれば、櫛歯の本数に関わらず、以下に記載されるような機能を有する振動素子を構成することができる。 The first comb-shaped electrodes 20 and the second comb-shaped electrodes 30 are erected on the flexible member 10 so as to alternately extend at intervals. A comb-shaped electrode is an electrode in which a plurality of planar electrodes are arranged in parallel like comb teeth, as shown in FIGS. 1 and 2(a) and 2(b). The number of comb teeth may be any number and is not limited to that shown in FIG. The comb-shaped electrode having the minimum number of comb-teeth has two comb-shaped electrodes formed on one of the first comb-shaped electrode and the second comb-shaped electrode. One comb tooth is formed on the other electrode so as to be inserted therebetween. A comb-shaped electrode having such a basic configuration can constitute a vibrating element having functions as described below, regardless of the number of comb-teeth.
　第１の櫛歯型電極２０および第２の櫛歯型電極３０は、可撓性部材１０に絶縁された状態で設置される。絶縁状態で設置するために、例えば、可撓性部材１０の櫛歯型電極が立設される面を絶縁部材で作成してもよい。図２（ａ）および図２（ｂ）に記載の実施形態では、ＳｉＯ2層１０ｂが絶縁性を有するため、それに接するように設けられた各櫛歯型電極は絶縁されている。また、各櫛歯型電極を可撓性部材１０とは別途に作成し、絶縁性の接着剤等で可撓性部材１０に張り付けてもよい。 The first comb-shaped electrode 20 and the second comb-shaped electrode 30 are installed on the flexible member 10 in an insulated state. For installation in an insulated state, for example, the surface of the flexible member 10 on which the comb-shaped electrodes are erected may be made of an insulating member. In the embodiment shown in FIGS. 2(a) and 2(b), since the SiO 2 layer 10b has insulating properties, each comb-shaped electrode provided in contact therewith is insulated. Alternatively, each comb-shaped electrode may be prepared separately from the flexible member 10 and attached to the flexible member 10 with an insulating adhesive or the like.
　第１の櫛歯型電極２０および第２の櫛歯型電極３０の少なくともいずれか一方は、それぞれの対向面の表面近傍にエレクトレットが形成されている。これにより、第１の櫛歯型電極２０および第２の櫛歯型電極３０の少なくとも一方が帯電されることとなる。そのため、可撓性部材１０が変形して第１の櫛歯型電極２０と第２の櫛歯型電極３０の間の距離が変動すると、櫛歯型電極間に静電誘導が生じ、発電を行うことができる。 At least one of the first comb-teeth-shaped electrode 20 and the second comb-teeth-shaped electrode 30 has an electret formed in the vicinity of the surface of each opposing surface. As a result, at least one of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 is charged. Therefore, when the flexible member 10 deforms and the distance between the first comb-shaped electrode 20 and the second comb-shaped electrode 30 fluctuates, electrostatic induction occurs between the comb-shaped electrodes to generate power. It can be carried out.
　第１の櫛歯型電極２０および第２の櫛歯型電極３０は、可撓性部材１０の固定端と自由端との間の領域に設置される。好ましくは、可撓性部材１０の片持ち梁構造の曲げモーメントが大きい固定端近傍に設置される。これにより、振動素子が振動する際に、櫛歯型電極設置部分がより大きく変形し、櫛歯型電極間距離の変動が大きくなるため、より大きな電力を得ることができる。 The first comb-shaped electrode 20 and the second comb-shaped electrode 30 are installed in a region between the fixed end and the free end of the flexible member 10 . Preferably, it is installed near the fixed end where the bending moment of the cantilever structure of the flexible member 10 is large. As a result, when the vibrating element vibrates, the portion where the comb tooth-shaped electrodes are provided is deformed more greatly, and the distance between the comb tooth-shaped electrodes is greatly changed, so that a larger electric power can be obtained.
　また、第１の櫛歯型電極２０および第２の櫛歯型電極３０の延在する方向は、可撓性部材１０の片持ち梁構造の梁中心軸に対して垂直な水平方向（図１の左右方向）に設置されることが好ましい。これにより、櫛歯型電極間距離が櫛歯型電極設置部分の変形により大きく影響され、大きな変動を得ることができる。 The direction in which the first comb-shaped electrode 20 and the second comb-shaped electrode 30 extend is the horizontal direction perpendicular to the beam center axis of the cantilever structure of the flexible member 10 (see FIG. 1). (left and right direction). As a result, the inter-comb-shaped electrode distance is greatly affected by the deformation of the comb-shaped electrode installation portion, and a large variation can be obtained.
　第１の端子４０および第２の端子５０は、第１の櫛歯型電極２０および第２の櫛歯型電極３０とそれぞれ電気的に接続される。第１の端子および第２の端子は、それぞれ外部回路（図示せず）へと接続され、静電誘導型振動素子１００の振動により生じた電気エネルギーを外部回路へと供給する。 The first terminal 40 and the second terminal 50 are electrically connected to the first comb-shaped electrode 20 and the second comb-shaped electrode 30, respectively. The first terminal and the second terminal are each connected to an external circuit (not shown), and supply electrical energy generated by vibration of the electrostatic induction vibration element 100 to the external circuit.
　錘６０は、可撓性部材１０の自由端に配置される。この錘６０は可撓性部材１０の変形を大きくし、これにより、静電誘導型振動素子１００の振動が大きくなり、結果、より大きな出力電力を静電誘導型振動素子１００から得ることができる。 A weight 60 is arranged at the free end of the flexible member 10 . The weight 60 increases the deformation of the flexible member 10, thereby increasing the vibration of the electrostatic induction vibration element 100, and as a result, a larger output power can be obtained from the electrostatic induction vibration element 100. .
（振動発電素子の動作について）
　図２（ａ）に示すように、静電誘導型振動素子１００の静止時には、第１の櫛歯型電極２０および第２の櫛歯型電極３０の一端側が可撓性部材１０に絶縁された状態で固定されている一方、第１の櫛歯型電極２０および第２の櫛歯型電極３０の自由端側である他端側は、互いに離間している。 (About the operation of the vibration power generation element)
As shown in FIG. 2( a ), when the electrostatic induction vibration element 100 is stationary, one end side of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are insulated by the flexible member 10 . While the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are fixed in this state, the other free ends of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are separated from each other.
　次に、図２（ｂ）に示すように、静電誘導型振動素子１００が取り付けられた構造体（不図示）の振動により、可撓性部材１０が撓んだ時には、第１の櫛歯型電極２０および第２の櫛歯型電極３０の他端側の間隔が変動し発電が行われる。この際、第１の櫛歯型電極２０および第２の櫛歯型電極３０の一端側は可撓性部材１０に固定されているため、電位差を持った電極同士が接触することを抑制することができる。さらに、仮に、可撓性部材１０の上方への撓みが大きくなり、櫛歯型電極同士が接触し得る程度に接近した場合でも、接触面積は、従来技術の面接触と比べ、極めて小さい線接触となるため、電極同士の融着が生じること、つまり、貼り付きが生じることを抑制することができる。加えて、この線接触は継続するものではなく、次の瞬間に、可撓性部材１０が下方へと撓むことにより、櫛歯型電極が互いに離れる方向に力がかかるため、電極同士の線接触は即座に解消される。以上より、第１の実施形態の静電誘導型振動素子１００は、外的な衝撃に強い構成であるため、従来の課題を解消することができる。　 Next, as shown in FIG. 2B, when the flexible member 10 is bent due to vibration of a structure (not shown) to which the electrostatic induction vibration element 100 is attached, the first comb teeth The interval between the pattern electrode 20 and the second comb-tooth-shaped electrode 30 on the other end side is varied to generate power. At this time, since one end sides of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are fixed to the flexible member 10, it is possible to prevent the electrodes having a potential difference from coming into contact with each other. can be done. Furthermore, even if the upward deflection of the flexible member 10 increases and the comb-shaped electrodes approach each other to the extent that they can contact each other, the contact area is extremely small compared to the surface contact of the prior art. Therefore, it is possible to suppress the occurrence of fusion between the electrodes, that is, the occurrence of sticking. In addition, this line contact does not continue, and at the next instant, the flexible member 10 bends downward, and force is applied in the direction in which the comb-shaped electrodes are separated from each other. Contact is immediately terminated. As described above, the electrostatic induction vibration element 100 of the first embodiment has a configuration that is resistant to external shocks, and thus can solve the conventional problems.　
　なお、本実施形態の静電誘導型振動素子１００において、必須の構成ではないがストッパ（図示せず）を有してもよい。ストッパは、可撓性部材１０の変形が櫛歯型電極同士が接触する程度まで大きくなることを抑制するためのものである。例えば、ストッパは、錘６０の移動先に設置し、錘６０の過剰な移動を抑止してもよい。 Note that the electrostatic induction vibration element 100 of the present embodiment may have a stopper (not shown) although it is not an essential configuration. The stopper serves to prevent the deformation of the flexible member 10 from increasing to the extent that the comb-shaped electrodes come into contact with each other. For example, a stopper may be installed at the destination of the weight 60 to prevent excessive movement of the weight 60 .
＜第２の実施形態＞
　図３は、本発明の第２の実施形態に係る静電誘導型振動素子２００を示す上面図である。第２の実施形態に係る静電誘導型振動素子２００は、錘６０を中心に一対の可撓性部材１０が対称的に延伸し、端部がそれぞれ基部（図示せず）に固定された両持ち梁構造を有する点で、第１の実施形態に係る静電誘導型振動素子１００と相違するが、その他の基本構成は第１の実施形態と同一である。ここで、同一構成には同一符号を付し、重複する説明は省略する。第２の実施形態の場合、一対の可撓性部材１０の固定端と錘６０との間のそれぞれの領域に、第１の櫛歯型電極２０と第２の櫛歯型電極３０が設置される。第１の実施形態と同様、第１の櫛歯型電極２０および第２の櫛歯型電極３０の延在する方向は、可撓性部材１０の両持ち梁構造の梁中心軸に対して垂直な水平方向（図３の左右方向）に設置されることが好ましい。これにより、櫛歯型電極間距離が櫛歯型電極設置部分の変形により大きく影響され、大きな変動を得ることができる。 <Second embodiment>
FIG. 3 is a top view showing an electrostatic induction vibration element 200 according to a second embodiment of the invention. In the electrostatic induction vibration element 200 according to the second embodiment, a pair of flexible members 10 extend symmetrically around a weight 60, and both ends are fixed to bases (not shown). Although it differs from the static induction vibration element 100 according to the first embodiment in that it has a support beam structure, the rest of the basic configuration is the same as that of the first embodiment. Here, the same configurations are denoted by the same reference numerals, and overlapping descriptions are omitted. In the case of the second embodiment, the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are installed in respective regions between the fixed ends of the pair of flexible members 10 and the weight 60. be. As in the first embodiment, the extending direction of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 is perpendicular to the beam center axis of the beam structure of the flexible member 10. It is preferable to install in a horizontal direction (horizontal direction in FIG. 3). As a result, the inter-comb-shaped electrode distance is greatly affected by the deformation of the comb-shaped electrode installation portion, and a large variation can be obtained.
（振動発電素子の動作について）
　第２の実施形態では、図４（ａ）に示すように、静電誘導型振動素子２００の静止時には、第１の櫛歯型電極２０および第２の櫛歯型電極３０の一端側が可撓性部材１０に絶縁された状態で固定されている一方、第１の櫛歯型電極２０および第２の櫛歯型電極３０の自由端側である他端側は、互いに離間している。 (About the operation of the vibration power generation element)
In the second embodiment, as shown in FIG. 4A, when the electrostatic induction vibration element 200 is stationary, one end sides of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are flexible. The first comb-shaped electrode 20 and the second comb-shaped electrode 30 are fixed to the magnetic member 10 in an insulated state, while the other free ends of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are separated from each other.
　次いで、図４（ｂ）に示すように、静電誘導型振動素子２００が取り付けられた構造体（不図示）の振動により、錘６０が下方向に移動するように可撓性部材１０が撓んだ時には、第１の櫛歯型電極２０および第２の櫛歯型電極３０の他端側の間隔が変動し発電が行われる。この際、第１の実施形態と同様、第１の櫛歯型電極２０および第２の櫛歯型電極３０の一端側は可撓性部材１０に固定されているため、電位差を持った電極同士が接触することを抑制することができる。そのため、仮に、可撓性部材１０の上方への撓みが大きくなり、櫛歯型電極同士が接触し得る程度に接近した場合でも、接触面積は、従来技術の面接触と比べ、極めて小さい線接触となるため、電極同士の融着が生じること、つまり、貼り付きが生じることを抑制することができる。加えて、第２の実施形態は両持ち梁構造を有するため、錘６０の上下運動は特定の範囲内に規制され、可撓性部材１０の過度の変形による櫛歯型電極間の接触が抑制される。以上より、第２の実施形態の静電誘導型振動素子２００は、外的な衝撃に強い構成であるため、従来の課題を解消することができる。 Next, as shown in FIG. 4(b), the flexible member 10 bends so that the weight 60 moves downward due to the vibration of the structure (not shown) to which the electrostatic induction vibration element 200 is attached. At the time of soldering, the interval between the first comb-shaped electrode 20 and the second comb-shaped electrode 30 on the other end side changes to generate power. At this time, since one end sides of the first comb-shaped electrode 20 and the second comb-shaped electrode 30 are fixed to the flexible member 10 in the same manner as in the first embodiment, the electrodes having a potential difference are separated from each other. contact can be suppressed. Therefore, even if the upward deflection of the flexible member 10 increases and the comb-shaped electrodes approach each other to the extent that they can contact each other, the contact area is extremely small compared to the surface contact of the prior art. Therefore, it is possible to suppress the occurrence of fusion between the electrodes, that is, the occurrence of sticking. In addition, since the second embodiment has a double-supported beam structure, the vertical movement of the weight 60 is restricted within a specific range, and contact between the comb-shaped electrodes due to excessive deformation of the flexible member 10 is suppressed. be done. As described above, the electrostatic induction vibration element 200 of the second embodiment has a configuration that is resistant to external shocks, and thus can solve the conventional problems.
＜第３の実施形態＞
　図５は、本発明の第３の実施形態に係る静電誘導型振動素子３００を示す裏面斜視図である。第３の実施形態に係る静電誘導型振動素子３００は、可撓性部材１０’が膜部材からなる点、錘を有しない点、第１の櫛歯型電極２０’及び第２の櫛歯型電極３０’の配置関係、及び、超音波振動子として用いられる点で、第１の実施形態に係る静電誘導型振動素子１００と相違するが、その他の基本構成は第１の実施形態と同一である。ここで、同一構成には同一符号を付し、重複する説明は省略する。 <Third Embodiment>
FIG. 5 is a rear perspective view showing a static induction vibration element 300 according to a third embodiment of the invention. The electrostatic induction vibration element 300 according to the third embodiment is characterized in that the flexible member 10' is made of a film member, that it does not have a weight, and that the first comb-teeth-shaped electrode 20' and the second comb-teeth are Although it differs from the electrostatic induction vibration element 100 according to the first embodiment in the arrangement of the mold electrodes 30' and in that it is used as an ultrasonic transducer, the rest of the basic configuration is the same as that of the first embodiment. are identical. Here, the same configurations are denoted by the same reference numerals, and overlapping descriptions are omitted.
　本発明の第３の実施形態において、静電誘導型振動素子３００は、超音波振動子であり、可撓性部材１０’と、第１の櫛歯型電極２０’と、第２の櫛歯型電極３０’と、第１の端子４０と、および第２の端子５０と、を備える。以下、静電誘導型振動素子３００の各構成を順に説明する。 In the third embodiment of the present invention, the electrostatic induction vibration element 300 is an ultrasonic transducer and includes a flexible member 10', a first comb-teeth electrode 20', and a second comb-teeth. It comprises a mold electrode 30 ′, a first terminal 40 and a second terminal 50 . Hereinafter, each configuration of the electrostatic induction vibration element 300 will be described in order.
　可撓性部材１０’は、外周が基部（図示せず）に固定された膜構造を有し、可撓性の膜部材から形成される。第１の櫛歯型電極２０’および第２の櫛歯型電極３０’が当該外周の内側に位置し、開口部７０を画定する。詳細は後述するが、可撓性部材１０’は、第１の櫛歯型電極２０’、第２の櫛歯型電極３０’および開口部７０を覆うように、かつこれらの電極と絶縁された状態で設置される。 The flexible member 10' has a membrane structure whose outer periphery is fixed to a base (not shown) and is formed from a flexible membrane member. A first comb-shaped electrode 20' and a second comb-shaped electrode 30' are located inside the perimeter and define an opening 70. As shown in FIG. Although the details will be described later, the flexible member 10' covers the first comb-shaped electrode 20', the second comb-shaped electrode 30' and the opening 70 and is insulated from these electrodes. installed in the state.
　第１の櫛歯型電極２０’および第２の櫛歯型電極３０’はそれぞれ、半径方向に間隔を隔てた状態で、交互に円周方向に延在するように設置される。第１の櫛歯型電極２０’は第１の端子４０と、第２の櫛歯型電極３０’は第２の端子５０とそれぞれ電気的に接続され、第１の端子４０および第２の端子５０は外部回路（図示せず）に電気的に接続される。外部回路は外部電源を備えてもよい。　 The first comb-shaped electrodes 20' and the second comb-shaped electrodes 30' are arranged so as to alternately extend in the circumferential direction while being spaced apart in the radial direction. The first comb-shaped electrode 20' is electrically connected to the first terminal 40, the second comb-shaped electrode 30' is electrically connected to the second terminal 50, and the first terminal 40 and the second terminal are electrically connected. 50 is electrically connected to an external circuit (not shown). The external circuitry may comprise an external power source.　
　ここから、図６（ａ）および（ｂ）を用いて、超音波振動子である静電誘導型振動素子３００が、超音波受信機（センサ）（図７の３００Ｒ参照）、及び、超音波発生器（図７の３００Ｔ参照）として機能することを説明する。 From here, using FIGS. 6A and 6B, the electrostatic induction transducer 300, which is an ultrasonic transducer, is an ultrasonic receiver (sensor) (see 300R in FIG. 7) and an ultrasonic wave It will be explained that it functions as a generator (see 300T in FIG. 7).
　まず、静電誘導型振動素子３００が、超音波受信機（センサ）３００Ｒとして機能する場合について説明する。櫛歯型電極２０’および３０’は、それぞれの対向面の表面近傍にエレクトレットが形成されているか、または外部回路に備えられた外部電源から直流バイアス電圧が印加され、櫛歯型電極間に電位が生じている（図６（ａ））。 First, the case where the electrostatic induction transducer 300 functions as an ultrasonic receiver (sensor) 300R will be described. The comb-shaped electrodes 20' and 30' have electrets formed near the surfaces facing each other, or a DC bias voltage is applied from an external power source provided in an external circuit, and a potential is generated between the comb-shaped electrodes 20' and 30'. is occurring (Fig. 6(a)).
　次いで、膜状の可撓性部材１０’が超音波を受信して振動すると、膜の固定端近傍、すなわち、櫛歯型電極の設置部分に曲げモーメントが発生して、図６（ｂ）に示すように、櫛歯型電極間距離が広がる方向に変形する。その際に櫛歯型電極間に生じた静電誘導は、電気信号を発生させ、第１の端子４０および第２の端子５０から、静電誘導型振動素子３００と接続する外部回路（図示せず）に送られる。 Next, when the membrane-like flexible member 10′ receives ultrasonic waves and vibrates, a bending moment is generated in the vicinity of the fixed end of the membrane, that is, in the portion where the comb-teeth-shaped electrode is installed, as shown in FIG. As shown, it deforms in the direction in which the distance between the comb-shaped electrodes increases. Electrostatic induction generated between the comb-shaped electrodes at that time generates an electric signal, and an external circuit (not shown) is connected from the first terminal 40 and the second terminal 50 to the electrostatic induction vibration element 300 . ).
　次に、静電誘導型振動素子３００が、超音波発生器３００Ｔとして機能する場合について説明する。超音波発生器３００Tの場合も、櫛歯型電極２０’および３０’は、それぞれの対向面の表面近傍にエレクトレットが形成されているか、または外部回路に備えられた外部電源から直流バイアス電圧が印加され、櫛歯型電極間に電位が生じている。 Next, a case where the electrostatic induction vibration element 300 functions as an ultrasonic generator 300T will be described. In the case of the ultrasonic generator 300T as well, the comb-shaped electrodes 20' and 30' either have electrets formed in the vicinity of the surfaces facing each other, or a DC bias voltage is applied from an external power supply provided in an external circuit. , and a potential is generated between the comb-shaped electrodes.
　そして、電位が生じている櫛歯型電極２０’および３０’に交流電圧を重畳させると櫛歯型電極間に印加周波数と同じ周波数で振動（線形振動）が生じ、その結果、膜状の可撓性部材１０’が振動して超音波を発生させることができる。 Then, when an AC voltage is superimposed on the comb-shaped electrodes 20' and 30' in which a potential is generated, vibration (linear vibration) occurs between the comb-shaped electrodes at the same frequency as the applied frequency. The flexible member 10' can vibrate to generate ultrasonic waves.
（超音波送受信装置の動作について）
　図７は、本発明の第３の実施形態の静電誘導型振動素子３００を複数組み合わせて作成した超音波送受信装置の模式図である。超音波発生器３００Ｔは、電位差を有する櫛歯型電極間に交流電圧が印加され、超音波を発生する。次いで、もう一方の超音波受信機（センサ）３００Ｒは、物体に当たって反射した超音波によって振動し、電気信号を発生させ、物体の存在を感知することができる。 (Operation of ultrasonic transmitter/receiver)
FIG. 7 is a schematic diagram of an ultrasonic transmission/reception device produced by combining a plurality of electrostatic induction transducers 300 according to the third embodiment of the present invention. The ultrasonic generator 300T generates ultrasonic waves by applying an AC voltage between comb-shaped electrodes having a potential difference. The other ultrasonic receiver (sensor) 300R can then vibrate due to the ultrasonic waves reflected by the object, generate an electrical signal, and sense the presence of the object.
　このように、本発明の第３の実施形態の静電誘導型振動素子３００では、第１の実施形態と同様の効果（櫛歯同士の接触を抑制し、外的な衝撃に強い構成）を奏する。加えて、第３の実施形態の静電誘導型振動素子３００では、同じ構成でありながら超音波発生装置としても、超音波受信装置としても利用することができるため、生産性の向上や低コスト化を行うことができるとの効果を奏する。 As described above, the electrostatic induction vibration element 300 of the third embodiment of the present invention has the same effect as the first embodiment (a structure that suppresses contact between comb teeth and is resistant to external impact). Play. In addition, the electrostatic induction transducer 300 of the third embodiment can be used both as an ultrasonic wave generator and as an ultrasonic receiver with the same configuration, thus improving productivity and reducing costs. There is an effect that it is possible to perform conversion.
　以上説明した実施の形態によれば、以下の作用効果を奏する。 According to the embodiment described above, the following effects are achieved.
（１）静電誘導型振動素子は、可撓性部材と、前記可撓性部材に絶縁された状態で一端側が固定され、前記可撓性部材から立設する複数の第１の櫛歯型電極と、前記可撓性部材に絶縁された状態で一端側が固定され、前記可撓性部材から前記第１の櫛歯型電極と間隔を隔てて立設する複数の第２の櫛歯型電極と、を有する静電誘導型振動素子であって、前記可撓性部材が振動する際に、前記第１の櫛歯型電極と前記第２の櫛歯型電極の他端側の間隔が変動する静電誘導型振動素子を備える。 (1) The static induction vibration element includes a flexible member, and a plurality of first comb-teeth-shaped portions fixed at one end thereof while being insulated from the flexible member, and erected from the flexible member. an electrode and a plurality of second comb-shaped electrodes fixed at one end thereof in a state of being insulated from the flexible member and erected from the flexible member at a distance from the first comb-shaped electrode; and wherein, when the flexible member vibrates, the distance between the first comb-shaped electrode and the second comb-shaped electrode on the other end side varies. Equipped with an electrostatic induction vibration element.
　このように構成したので、静電誘導型振動素子は、櫛歯型電極間の接触を抑制し、外的な衝撃に強い静電誘導型振動素子を提供することができる。 With this configuration, the electrostatic induction vibration element suppresses contact between the comb-shaped electrodes and can provide an electrostatic induction vibration element that is resistant to external shocks.
（２）第１の櫛歯型電極および第２の櫛歯型電極の少なくともいずれか一方は表面近傍にエレクトレットが形成されている。 (2) Electrets are formed near the surface of at least one of the first comb-shaped electrode and the second comb-shaped electrode.
　このように構成したので、第１の櫛歯型電極および第２の櫛歯型電極の少なくとも一方が帯電されることとなる。そのため、可撓性部材が変形して第１の櫛歯型電極と第２の櫛歯型電極の間の距離が変動すると、櫛歯型電極間に静電誘導が生じ、発電を行うことができる。　 With this configuration, at least one of the first comb-shaped electrode and the second comb-shaped electrode is charged. Therefore, when the flexible member deforms and the distance between the first comb-shaped electrode and the second comb-shaped electrode changes, electrostatic induction occurs between the comb-shaped electrodes, and power generation can be performed. can.　
（３）可撓性部材は一端が固定された片持ち梁構造を有し、前記片持ち梁構造の自由端に錘が設置され、前記第１の櫛歯型電極と前記第２の櫛歯型電極は、前記可撓性部材の前記固定端と前記自由端との間の領域に設置される。 (3) The flexible member has a cantilever structure with one end fixed, a weight is installed at the free end of the cantilever structure, and the first comb-shaped electrode and the second comb-shaped electrode A mold electrode is placed in the region between the fixed end and the free end of the flexible member.
　このように構成したので、錘が静電誘導型振動素子の振動を大きくし、それにより可撓性部材の変形が大きくなり、より大きな出力電力を得ることができる。 With this configuration, the weight increases the vibration of the electrostatic induction vibration element, thereby increasing the deformation of the flexible member and obtaining a greater output power.
（４）第１の櫛歯型電極および第２の櫛歯型電極の延在方向は、前記可撓性部材の片持ち梁構造の梁中心軸に対して垂直な水平方向に設置される。 (4) The extending direction of the first comb-shaped electrode and the second comb-shaped electrode is set in the horizontal direction perpendicular to the beam central axis of the cantilever beam structure of the flexible member.
　このように構成したので、櫛歯型電極間距離が櫛歯型電極設置部分の変形により大きく影響され、大きな変動を得ることができる。 With this configuration, the inter-comb-shaped electrode distance is greatly affected by the deformation of the comb-shaped electrode installation portion, and a large variation can be obtained.
（５）前記可撓性部材は錘を中心に対称的に延伸し、端部がそれぞれ固定された両持ち梁構造を有し、前記第１の櫛歯型電極と前記第２の櫛歯型電極は前記可撓性部材の固定端と前記錘との間の領域に設置される。 (5) The flexible member extends symmetrically about a weight and has a double-supported beam structure in which the ends are respectively fixed, and the first comb-shaped electrode and the second comb-shaped electrode are provided. An electrode is placed in the region between the fixed end of the flexible member and the weight.
　このように構成したので、錘の上下運動は特定の範囲内に規制され、可撓性部材の過度の変形による櫛歯型電極間の接触が抑制される。 With this configuration, the vertical movement of the weight is restricted within a specific range, and contact between the comb-shaped electrodes due to excessive deformation of the flexible member is suppressed.
（６）第１の櫛歯型電極および第２の櫛歯型電極の延在方向は、前記可撓性部材の両持ち梁構造の梁中心軸に対して垂直な水平方向に設置される。 (6) The extending direction of the first comb-shaped electrode and the second comb-shaped electrode is set in the horizontal direction perpendicular to the beam central axis of the double-supported beam structure of the flexible member.
　このように構成したので、櫛歯型電極間距離が櫛歯型電極設置部分の変形により大きく影響され、大きな変動を得ることができる。 With this configuration, the inter-comb-shaped electrode distance is greatly affected by the deformation of the comb-shaped electrode installation portion, and a large variation can be obtained.
（７）可撓性部材は膜部材から形成され、前記第１の櫛歯型電極と前記第２の櫛歯型電極は開口部を画定し、前記開口部を覆うように前記可撓性部材が設置される。 (7) The flexible member is formed of a film member, the first comb-shaped electrode and the second comb-shaped electrode define an opening, and the flexible member covers the opening. is installed.
　このように構成したので、膜状の可撓性部材は超音波を受信して振動し、第１の櫛歯型電極および第２の櫛歯型電極間に静電誘導を生じ、電気信号を発生させ、超音波受信機（センサ）として機能でき、また反対に櫛歯型電極に交流電圧を印加し、振動を発生させ、膜状の可撓性部材から超音波を発生させる超音波発生器としても機能することができる。 With this configuration, the film-like flexible member receives ultrasonic waves and vibrates, causing electrostatic induction between the first comb-shaped electrode and the second comb-shaped electrode to generate an electric signal. An ultrasonic generator that can function as an ultrasonic receiver (sensor), and on the other hand, can apply an AC voltage to the comb-shaped electrode to generate vibration and generate ultrasonic waves from a membrane-like flexible member can also function as
（８）超音波側送受信装置は、超音波振動子を複数含み、少なくとも１の前記超音波振動子が超音波送信子として機能し、少なくとも１の他の超音波振動子が超音波発信子として機能する。 (8) The ultrasonic transmission/reception device includes a plurality of ultrasonic transducers, at least one of which functions as an ultrasonic transmitter, and at least one other ultrasonic transducer functions as an ultrasonic transmitter. Function.
　このように構成したので、同じ構成でありながら超音波発生装置としても、超音波受信装置としても利用することができ、生産性の向上や低コスト化を行うことができる。 Since it is configured in this way, it can be used as an ultrasonic generator or an ultrasonic receiver with the same configuration, and productivity can be improved and costs can be reduced.
　上記では、種々の実施の形態および変形例を説明したが、本発明はこれらの内容に限定されるものではない。本発明の技術的思想の範囲内で考えられるその他の態様も本発明の範囲内に含まれる。 Although various embodiments and modifications have been described above, the present invention is not limited to these contents. Other aspects conceivable within the scope of the technical idea of the present invention are also included in the scope of the present invention.
　また、上述の各実施の形態および変形例の一つもしくは複数を、適宜組合せてもよい。 Also, one or more of the above embodiments and modifications may be combined as appropriate.
　１０、１０’　可撓性部材
　２０、２０’　第１の櫛歯型電極
　３０、３０’　第２の櫛歯型電極
　４０　第１の端子
　５０　第２の端子
　６０　錘
　７０　開口部
　１００、２００、３００　静電誘導型振動素子
　３００Ｒ　超音波受信機（センサ）
　３００Ｔ　超音波発生器 10, 10' flexible member 20, 20' first comb-shaped electrode 30, 30' second comb-shaped electrode 40 first terminal 50 second terminal 60 weight 70 opening 100, 200, 300 Electrostatic induction transducer 300R Ultrasonic receiver (sensor)
300T ultrasonic generator

Claims (10)

  1. 　可撓性部材と、
    　前記可撓性部材に絶縁された状態で一端側が固定され、前記可撓性部材から立設する複数の第１の櫛歯型電極と、
    　前記可撓性部材に絶縁された状態で一端側が固定され、前記可撓性部材から前記第１の櫛歯型電極と間隔を隔てて立設する複数の第２の櫛歯型電極と、
    を有する静電誘導型振動素子であって、
    　前記可撓性部材が振動する際に、前記第１の櫛歯型電極と前記第２の櫛歯型電極の他端側の間隔が変動する静電誘導型振動素子。     a flexible member;
    a plurality of first comb-shaped electrodes fixed at one end in a state of being insulated from the flexible member and erected from the flexible member;
    a plurality of second comb-shaped electrodes fixed at one end in a state of being insulated from the flexible member and erected from the flexible member with a gap from the first comb-shaped electrodes;
    An electrostatic induction vibration element having
    An electrostatic induction vibrating element in which the distance between the first comb-shaped electrode and the second comb-shaped electrode on the other end side varies when the flexible member vibrates.
  2. 　前記第１の櫛歯型電極および前記第２の櫛歯型電極の少なくともいずれか一方は表面近傍にエレクトレットが形成されている請求項１に記載の静電誘導型振動素子。 The electrostatic induction vibration element according to claim 1, wherein at least one of the first comb-shaped electrode and the second comb-shaped electrode has an electret formed near the surface thereof.
  3. 　前記可撓性部材は一端が固定された片持ち梁構造を有し、前記片持ち梁構造の自由端に錘が設置され、前記第１の櫛歯型電極と前記第２の櫛歯型電極は、前記可撓性部材の前記固定端と前記自由端との間の領域に設置される請求項１または２に記載の静電誘導型振動素子。 The flexible member has a cantilever structure with one end fixed, a weight is installed at the free end of the cantilever structure, and the first comb-shaped electrode and the second comb-shaped electrode are connected to each other. is installed in a region between the fixed end and the free end of the flexible member.
  4. 　前記第１の櫛歯型電極および前記第２の櫛歯型電極の延在方向は、前記可撓性部材の片持ち梁構造の梁中心軸に対して垂直な水平方向に設置される、請求項３に記載の静電誘導型振動素子。 Extending directions of the first comb-shaped electrode and the second comb-shaped electrode are set in a horizontal direction perpendicular to a beam center axis of the cantilever beam structure of the flexible member. Item 4. The electrostatic induction vibration element according to item 3.
  5. 　前記可撓性部材は一対であり、錘を中心に対称的に延伸し、端部がそれぞれ固定された両持ち梁構造を有し、前記第１の櫛歯型電極と前記第２の櫛歯型電極は、前記可撓性部材の前記固定端と前記錘との間のそれぞれの領域に設置される請求項１または２に記載の静電誘導型振動素子。 The flexible members are a pair, extend symmetrically about the weight, and have a double-supported beam structure with fixed ends, the first comb-shaped electrode and the second comb-shaped electrode. 3. The electrostatic induction vibration element according to claim 1, wherein the pattern electrodes are provided in respective regions between the fixed end of the flexible member and the weight.
  6. 　前記第１の櫛歯型電極および前記第２の櫛歯型電極の延在方向は、前記可撓性部材の両持ち梁構造の梁中心軸に対して垂直な水平方向に設置される、請求項５に記載の静電誘導型振動素子。 Extending directions of the first comb-shaped electrode and the second comb-shaped electrode are arranged in a horizontal direction perpendicular to a beam central axis of the beam structure of the flexible member. Item 6. The electrostatic induction vibration element according to item 5.
  7. 　静電誘導型発電素子として用いられる、請求項１～６のいずれか一項に記載の静電誘導型振動素子。 The electrostatic induction vibration element according to any one of claims 1 to 6, which is used as an electrostatic induction power generating element.
  8. 　前記可撓性部材は膜部材から形成され、前記第１の櫛歯型電極と前記第２の櫛歯型電極は開口部を画定し、前記開口部を覆うように前記可撓性部材が設置される、請求項１または２に記載の静電誘導型振動素子。 The flexible member is formed of a film member, the first comb-shaped electrode and the second comb-shaped electrode define an opening, and the flexible member is placed to cover the opening. The electrostatic induction vibration element according to claim 1 or 2, wherein
  9. 　超音波振動子として用いられる、請求項８に記載の静電誘導型振動素子。 The electrostatic induction vibration element according to claim 8, which is used as an ultrasonic transducer.
  10. 　請求項９に記載の静電誘導型振動素子を複数含む超音波側送受信装置であって、少なくとも一つの前記静電誘導型振動素子が超音波送信子として機能し、少なくとも一つの静電誘導型振動素子が超音波発信子として機能する、超音波送受信装置。 10. An ultrasonic transmitting/receiving device including a plurality of electrostatic induction transducers according to claim 9, wherein at least one electrostatic induction transducer functions as an ultrasonic transmitter, and at least one electrostatic induction transducer An ultrasonic transmitting/receiving device in which a vibrating element functions as an ultrasonic transmitter.
PCT/JP2022/029947 2021-12-23 2022-08-04 Electrostatic induction type vibration element WO2023119710A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003246056A (en) * 2002-02-26 2003-09-02 Ricoh Co Ltd Electrostatic actuator, liquid drop discharge head and inkjet recorder
US20170302197A1 (en) * 2016-04-19 2017-10-19 Mems Start, Llc Flexure shear and strain actuator
JP2018191481A (en) * 2017-05-11 2018-11-29 学校法人 関西大学 Oscillation power generation element
JP2019512894A (en) * 2016-03-01 2019-05-16 ヴァーモン エス．エー．Ｖｅｒｍｏｎ Ｓ．Ａ． Piezoelectric energy harvester system using composite shims

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003246056A (en) * 2002-02-26 2003-09-02 Ricoh Co Ltd Electrostatic actuator, liquid drop discharge head and inkjet recorder
JP2019512894A (en) * 2016-03-01 2019-05-16 ヴァーモン エス．エー．Ｖｅｒｍｏｎ Ｓ．Ａ． Piezoelectric energy harvester system using composite shims
US20170302197A1 (en) * 2016-04-19 2017-10-19 Mems Start, Llc Flexure shear and strain actuator
JP2018191481A (en) * 2017-05-11 2018-11-29 学校法人 関西大学 Oscillation power generation element

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