WO2023117334A1 - Procédé de vérification de la fonctionnalité ou de vérification de la plausibilité d'un capteur vibronique - Google Patents

Procédé de vérification de la fonctionnalité ou de vérification de la plausibilité d'un capteur vibronique Download PDF

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Publication number
WO2023117334A1
WO2023117334A1 PCT/EP2022/083676 EP2022083676W WO2023117334A1 WO 2023117334 A1 WO2023117334 A1 WO 2023117334A1 EP 2022083676 W EP2022083676 W EP 2022083676W WO 2023117334 A1 WO2023117334 A1 WO 2023117334A1
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WO
WIPO (PCT)
Prior art keywords
unit
magnetic field
magnetostrictive material
vibronic sensor
vibronic
Prior art date
Application number
PCT/EP2022/083676
Other languages
German (de)
English (en)
Inventor
Sergey Lopatin
Anh Tuan Tham
Peter KLÖFER
Benjamin Scherer
Raphael KUHNEN
Original Assignee
Endress+Hauser SE+Co. KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Endress+Hauser SE+Co. KG filed Critical Endress+Hauser SE+Co. KG
Publication of WO2023117334A1 publication Critical patent/WO2023117334A1/fr

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/296Acoustic waves
    • G01F23/2966Acoustic waves making use of acoustical resonance or standing waves
    • G01F23/2967Acoustic waves making use of acoustical resonance or standing waves for discrete levels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/296Acoustic waves
    • G01F23/2966Acoustic waves making use of acoustical resonance or standing waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/20Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of apparatus for measuring liquid level
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/16Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/002Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/002Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
    • G01N2009/006Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis vibrating tube, tuning fork

Definitions

  • the invention relates to a method for checking the functionality or plausibility check of a vibronic sensor.
  • Vibronic sensors are used to monitor a specified fill level, the density or the viscosity of a medium in a container.
  • the vibronic sensor is installed in a container at the level of the specified level to be monitored.
  • the container is usually a tank or a closed or open tubular container.
  • the sensor In order to measure viscosity or density, the sensor must be positioned in the container in such a way that it is in contact with the medium, at least temporarily, up to a defined immersion depth.
  • a vibronic sensor consists of a sensor tube and a membrane that seals the sensor tube gas-tight in one end area.
  • DE 10 2005 044 725 A1 has disclosed what is known as a membrane oscillator, which is suitable for use in a wide variety of media.
  • an oscillatable element an oscillating rod or an oscillating fork with two symmetrically arranged tines, is usually attached to the oscillatable membrane.
  • the known configurations are subsumed under the term oscillatable unit.
  • Vibration sensors with vibrating forks are used in liquid, gaseous or solid or solid flowable media and are offered and sold by the applicant under the name LIQUIPHANT.
  • Vibration sensors with an oscillating rod, a so-called single rod have become known under the name SOLIPHANT. These are designed primarily for use in solids or in liquids with a high solids content.
  • Excitation signals are transmitted to the oscillatable unit via a transmitter/receiver unit and corresponding response signals are received.
  • a control/evaluation unit uses the response signals received to determine whether the predetermined fill level has been reached and/or the density and/or the viscosity of the medium.
  • Vibronic sensors for level measurement usually oscillate at a defined resonance frequency - i.e. they carry out a harmonic oscillation.
  • the resonant frequency is determined by the design of the oscillating unit and the materials used.
  • Each vibration can be characterized by frequency and damping. If the oscillatable unit oscillates in a liquid medium with a high density, then the medium density as a comoving mass has a Influence on the oscillatable unit. Consequently, the vibration frequency is lower in a liquid medium than in a gaseous medium. A change in frequency thus indicates, for example, the transition from a gaseous to a liquid medium.
  • the damping of the medium also has an influence on the vibrations of a vibronic sensor. Bulk materials such as wheat or rice dampen the vibrations of the oscillatable unit of a vibration sensor and cause a drastic reduction in amplitude at the transition from air to bulk material.
  • Vibration sensors designed as limit level measuring devices with an oscillatable element thus use the effect that both the oscillation frequency and the oscillation amplitude are dependent on the respective degree of coverage of the oscillatable element: While the oscillatable element can oscillate freely and undamped in air, it experiences a frequency and amplitude change once partially or fully immersed in the medium. Based on a predetermined change in frequency (usually only the frequency is measured), a clear conclusion can be drawn as to whether the predetermined fill level of the medium in the container has been reached.
  • the change in frequency in non-damping media such as gases and low-viscosity liquids, depends on the density of the medium. The change in frequency is sufficient to identify the medium and evaluate the density.
  • level gauges are primarily used as overfill protection, for the purpose of pump idling protection or to detect flow in a pipeline.
  • the damping of the vibration of the oscillatable unit is predominantly determined by the frictional forces between the solid particles or molecules of the respective medium. Therefore, with a constant degree of coverage, there is a functional relationship between the vibration amplitude and the density of the bulk material (friction in heavy bulk materials with a high bulk density is higher than in light ones) or between the vibration amplitude and viscosity, so vibration sensors for both level and are suitable for determining the density of bulk solids. Furthermore, vibronic sensors are used to determine the viscosity of a liquid medium.
  • the oscillations of a vibration sensor are generated by an electro-mechanical converter.
  • the electromechanical converter is usually a piezo drive with at least one piezoelectric element.
  • the piezo drive stimulates the oscillatable unit to produce harmonic oscillations at a resonant frequency and compensates for the energy losses that occur in the oscillatable unit.
  • a high level of efficiency can be achieved with piezo drives. Since the Energy supply is relatively low, a wide use in automation technology is possible. Further information can be found, for example, in DE 10 2008 050 266 A1.
  • bimorph drives are often used as piezo drives.
  • stack drives several disc-shaped piezoelectric elements are stacked one on top of the other.
  • bimorph drives are used to generate and detect vibrations.
  • a bimorph drive consists of a disk-shaped piezoelectric element which is non-positively connected to the membrane and which has a polarization in at least two flat areas.
  • Different configurations of bimorph drives are described in EP 0 985 916 A1 and EP 1 281 051 B1.
  • an evaluation unit monitors the vibration frequency and/or the vibration amplitude of the oscillatable unit and signals the 'sensor covered' or 'sensor uncovered' status as soon as the measurement signals fall below or exceed a specified reference value.
  • a corresponding message to the operating personnel can be made optically and/or acoustically.
  • a switching process is triggered; for example, an inlet or outlet valve on the container is opened or closed.
  • the invention is based on the object of proposing a vibronic sensor that reliably supplies measured values with a specified measuring accuracy.
  • a vibronic sensor for determining a process variable of a medium located in a container with an oscillatable unit, an excitation-Zreceiving unit and a control-Zevaluation unit, wherein the excitation-Zreceiving unit excites the oscillatable unit through excitation signals to mechanical oscillations and the corresponding Response signals are detected, with the rule-Zevaluation unit providing measurement signals relating to the process variable based on the response signals.
  • the oscillatable unit is at least partially made of a magnetostrictive material.
  • a detection unit for a magnetic field is provided. This measures the magnetic field that occurs in the magnetostrictive material as a result of the mechanical forces acting on the oscillatable unit.
  • the control/evaluation unit uses the measured magnetic field to generate a statement about the functionality and/or a plausibility statement about the measured values supplied by the vibronic sensor.
  • the vibronic sensor ensures that the sensor provides reliable readings throughout its service life delivers within the guaranteed measurement accuracy. If the deviation of the measured values exceeds a specified limit value, this is an indication that the vibronic sensor must be serviced or replaced. This monitoring can take place continuously or during correspondingly provided maintenance intervals. In addition, it is alternatively or additionally provided that the vibronic sensor supplies redundant measured values continuously or at predetermined time intervals, which allow at least a plausibility statement with regard to the measured values supplied. The fact that it is possible to use the sensor according to the invention in safety-critical applications.
  • Magnetostriction is the change in the geometric dimensions of a ferromagnetic body under the influence of a magnetic field. This effect can be measured with all ferromagnetic materials.
  • the opposite effect the so-called Villari effect, comes into play, i. H. the change in the magnetic field or the magnetic properties of the magnetostrictive material under the influence of mechanical forces acting on the material is considered.
  • iron, nickel and cobalt have ferromagnetic properties at room temperature.
  • the fourth element with ferromagnetic properties at room temperature was ruthenium in the metastable body-centered tetragonal phase. Ferromagnetic alloys such as e.g. B.
  • the ferromagnetic material used in connection with the invention depends on whether the ferromagnetic material will be in contact with the medium or whether it will be isolated from the medium.
  • the magnetostrictive material itself does not generate its own magnetic field, but changes its permeability p under the influence of an acting force. Therefore, in order to measure changes in the magnetic field, it is necessary to create an offset magnetic field, e.g. by a permanent magnet or a coil. In this way, changes in the magnetic field as a result of a force acting on the magnetostrictive material can be measured using the magnetic field detection unit.
  • the oscillatable unit is made from the magnetostrictive material.
  • a second embodiment provides that the oscillatable unit is coated with the magnetostrictive material.
  • it is considered when the oscillatable unit, at least in a partial area in which the maximum mechanical stresses occur when the vibrations are excited, with a coating of the magnetostrictive material is provided or is made in this at least a portion of the magnetostrictive material.
  • the known magnetic field detection units can be used in connection with the invention.
  • the magnetic field detection unit is preferably a quantum sensor.
  • Quantum sensors have become known in a wide variety of configurations. They use different quantum effects to determine various physical and/or chemical process variables. In the field of industrial process automation, the use of quantum sensors is interesting in two respects: Quantum sensors enable the miniaturization of the sensors used and at the same time increase their performance.
  • the magnetic field detection unit can be a quantum sensor that has at least one crystal body with at least one magnetic field-sensitive defect.
  • the crystal body can be, for example, a diamond with at least one nitrogen defect, silicon carbide with at least one silicon defect, or hexagonal boron nitride with at least one defect color center. It is of course also possible for several defects to be arranged in the crystal body. These are preferably arranged linearly. An increase in the number of defects leads to an increased intensity, so that the measurement resolution is improved and changes in intensity can be detected even with comparatively weak magnetic fields.
  • a quantum sensor designed as a gas cell can be used as a magnetic field detection unit.
  • Corresponding sensors are known in different configurations.
  • DE3742878A1 describes an optical magnetic field sensor in which a crystal is used as a magnetically sensitive optical component.
  • DE 102017205099 A1 discloses a sensor device with a crystal body having at least one defect, a light source, a high-frequency device for applying a high-frequency signal to the crystal body, and a detection unit for detecting a magnetic-field-dependent fluorescence signal.
  • the light source is arranged on a first substrate and the detection device on a second substrate, while the high-frequency device and the Crystal bodies can be arranged on both interconnected substrates. External magnetic fields, electrical currents, temperature, mechanical stress or pressure can be used as measured variables.
  • a similar device has become known from DE102017205265A1.
  • DE 102014219550 A1 describes a combination sensor for detecting pressure, temperature and/or magnetic fields, the sensor element having a diamond structure with at least one nitrogen vacancy center.
  • DE 102018214617 A1 discloses a sensor device which also has a crystal body with a number of color centers, in which various optical filter elements are used to increase effectiveness and for miniaturization.
  • the DE 102016210259 A1 proposes a further configuration for a sensor device and a calibration and evaluation method based on defects in a crystal.
  • the sensor device comprises a crystal body with at least one defect, a light source, a microwave antenna for applying microwaves to the crystal body, a detection device for detecting fluorescence from the crystal body, and an application device by means of which an induction current can be applied to the microwave antenna.
  • the microwave antenna is used on the one hand to generate the microwaves and to generate an internal magnetic field. The internal magnetic field enables calibration during ongoing operation.
  • Fig. 1 shows schematically a vibronic sensor 1 for determining a process variable of a medium 2 located in a container 3.
  • the process variable which is determined by the vibronic sensor 1 according to the invention, is in particular the level, the density and/or the Viscosity of the medium 2.
  • the oscillatable unit 4 is a so-called tuning fork with two symmetrical paddle-shaped oscillating rods 6 arranged on a membrane 5.
  • Such sensors are offered and sold by the applicant under the name LIQUIPHANT.
  • the oscillatable unit 4 can also be a single-rod or a membrane oscillator.
  • the excitation/receiving unit 7 transmits excitation signals to the membrane 5 and causes the membrane 5 and the oscillating rods 6 arranged on the membrane 5 to oscillate mechanically.
  • a force is transmitted to the membrane 5 by means of a drive/receiver unit 7 materially attached to the surface of the membrane 5 facing away from the process.
  • the drive/receiver unit 7 is preferably an electromechanical converter unit and includes, for example, a piezoelectric element or an electromagnetic drive (not shown). Either the drive unit and the receiver unit are designed as two separate units or as a combined drive/receiver unit 7.
  • the force applied to the membrane 5 is generated by applying an excitation signal, for example in the form of an electrical alternating voltage.
  • an excitation signal for example in the form of an electrical alternating voltage.
  • a change in the electrical voltage applied causes a change in the geometric shape of the drive/receiver unit 7, i.e. a contraction or relaxation within the piezoelectric element in such a way that the application of an electrical AC voltage as an excitation signal results in a mechanical vibration of the integral part of the drive/receiver unit 7 associated membrane 5 leads.
  • the mechanical oscillations of the oscillatable unit 4 are transmitted via the membrane 5 to the drive/receiver unit 7 and converted into an electrical reception signal.
  • the frequency of the received signal corresponds to the mechanical oscillation frequency of the oscillatable unit 4.
  • a control/evaluation unit 9 detects the corresponding electrical response signals and uses the response signals to provide measurement signals relating to the process variable.
  • the oscillatable unit 4 consists at least partially of a magnetostrictive material 11 . It is possible in connection with the invention to manufacture the membrane 6 and/or the oscillating rods 6 - or the single rod - entirely from the magnetostrictive material 11 . Alternatively, a coating of magnetostrictive material 11 can also be applied to the membrane 5 and/or the oscillating rods 6 . If necessary, the coating is provided with an inert protective layer. In both configurations, the magnetostrictive material 11 can be provided continuously or else in partial areas of the oscillatable unit 4 .
  • the magnetostrictive material 11 is arranged in the area of the membrane 5 or the oscillating rods 6 in which the maximum mechanical stresses are to be expected as a result of the respective oscillations excited by the excitation/receiving unit 7 . Furthermore, it is considered advantageous if the magnetostrictive material 11 can be found in an area of the membrane 5 facing away from the medium 2, for example on the surface of the membrane 5 facing away from the medium 2, which is located inside the housing of the vibronic sensor 1. in which, for example, the drive/receiver unit 7 can also be found.
  • a suitable magnetic field detection unit 10 which measures the magnetic field that occurs in the magnetostrictive material as a result of the mechanical forces acting on the oscillatable unit 4 (Villari effect).
  • FIG. 3 schematically shows an embodiment of the vibronic sensor 1 according to the invention.
  • the oscillatable unit 1 is provided with a coating of magnetostrictive material.
  • the magnetic field generated as a result of the mechanical stress generated in the magnetostrictive material 11 is detected by the magnetic field detection unit 10 .
  • the magnetic field detection unit 10 is preferably a quantum sensor. Different configurations of quantum sensors have already been described in detail above, so that a repetition can be dispensed with at this point. Quantum sensors have the advantage over conventional magnetic field detection sensors, such as Hall sensors, that they are small in terms of their dimensions—that is, they can also preferably be integrated into the vibronic sensor 1—and measure extremely sensitively. Of course, it is also possible to design the magnetic field detection unit 10 as a separate component and to place it outside of the vibronic sensor 1 in such a way that the magnetic field is measured. With the aid of a magnet, for example a permanent magnet, which generates an offset magnetic field, the magnetostrictive material 11 generates a magnetic field which can be measured by the magnetic field detection unit 10 with the required accuracy.
  • a magnet for example a permanent magnet, which generates an offset magnetic field
  • the magnetostrictive material 11 itself does not generate its own magnetic field, but changes its permeability p under the influence of an acting force. It is therefore necessary to generate an offset magnetic field, for example by a permanent magnet or a coil, in order to measure the change in the magnetic field due to a force acting on the magnetostrictive material 11.
  • an offset magnetic field for example by a permanent magnet or a coil
  • a quantum sensor for determining the magnetic field is preferred in connection with the present invention, it goes without saying that, depending on the design and arrangement of the magnetostrictive material 11 and the permanent magnet on the oscillatable unit 4, a conventional magnetic field sensor can also be used .
  • the magnetostrictive material 11 is arranged in the areas of the oscillatable unit 4 in which maximum or higher mechanical stresses occur than in other areas of the oscillatable unit 4.
  • the maximum stress occurs at the outer edge of the membrane 5 and in the center of the membrane 5.
  • a coil or a permanent magnet (not shown) is used to generate a magnetic flux which is conducted through the magnetic field detection unit 10 via an armature structure, for example. The magnetic field is measured.
  • the strength of the occurring magnetic field and thus the measuring accuracy and reliability of the vibronic sensor according to the invention can be optimized by appropriate arrangement of the magnetostrictive material 11 .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • Health & Medical Sciences (AREA)
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  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
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  • Measuring Magnetic Variables (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention se rapporte à un capteur vibronique (1) permettant de déterminer une variable de traitement d'un milieu (2) situé dans un récipient (3), comprenant une unité vibratoire (4), une unité d'excitation/réception (7) et une unité de commande/évaluation (9), l'unité d'excitation/réception (7) excitant l'unité vibratoire (4) pour la soumettre à des vibrations mécaniques au moyen de signaux d'excitation et détectant les signaux de réponse correspondants, l'unité de commande/évaluation (9) fournissant des signaux de mesure concernant la variable de traitement en fonction des signaux de réponse, l'unité vibratoire (4) étant au moins partiellement fabriquée à partir d'un matériau magnétostrictif (11), une unité de détection de champ magnétique (10) mesurant le champ magnétique se produisant dans le matériau magnétostrictif en raison des forces mécaniques agissant sur l'unité vibratoire (4) et, en fonction du champ magnétique mesuré (11), l'unité de commande/évaluation générant un énoncé concernant la fonctionnalité et/ou un énoncé concernant la plausibilité concernant les valeurs mesurées fournies par le capteur vibronique (1).
PCT/EP2022/083676 2021-12-20 2022-11-29 Procédé de vérification de la fonctionnalité ou de vérification de la plausibilité d'un capteur vibronique WO2023117334A1 (fr)

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DE102021133927.8A DE102021133927A1 (de) 2021-12-20 2021-12-20 Verfahren zur Überprüfung der Funktionstüchtigkeit oder zur Plausibilitätsprüfung eines vibronischen Sensors
DE102021133927.8 2021-12-20

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WO2023117334A1 true WO2023117334A1 (fr) 2023-06-29

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Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3304223A1 (de) * 1983-02-08 1984-08-16 VEGA Grieshaber GmbH & Co, 7620 Wolfach Verfahren und vorrichtung zur feststellung der an- oder abwesenheit eines stoffs an einem detektor oder des abstands zwischen stoff und detektor
DE3742878A1 (de) 1987-08-07 1989-07-06 Siemens Ag Optischer magnetfeldsensor
EP0985916A1 (fr) 1998-09-09 2000-03-15 Endress + Hauser GmbH + Co. Dispositif de détection et/ou de surveillance d'un niveau prédéterminé dans un résevoir
US6286361B1 (en) * 1998-01-05 2001-09-11 Rolls-Royce Plc Method and apparatus for remotely detecting pressure, force, temperature, density, vibration, viscosity and speed of sound in a fluid
DE102005044725A1 (de) 2005-09-19 2007-03-29 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße eines Mediums in einem Behälter
EP1281051B1 (fr) 2000-05-10 2009-03-18 Endress + Hauser GmbH + Co. KG Dispositif pour determiner et/ou controler le niveau de remplissage d'un produit contenu dans un recipient
DE102008050266A1 (de) 2008-10-07 2010-04-08 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße eines Mediums
US20130033255A1 (en) * 2011-08-05 2013-02-07 Thad Gilbert Walker Gas Magnetometer
DE102014219550A1 (de) 2014-09-26 2016-03-31 Robert Bosch Gmbh Kombinationssensor zur Messung von Druck und/oder Temperatur und/oder Magnetfeldern
DE102016210259A1 (de) 2016-06-10 2017-12-14 Robert Bosch Gmbh Sensorvorrichtung, Verfahren zum Kalibrieren einer Sensorvorrichtung und Verfahren zum Erfassen einer Messgröße
DE102017205099A1 (de) 2017-03-27 2018-09-27 Robert Bosch Gmbh Sensorvorrichtung, Sensorvorrichtungseinheit, System und Verfahren zum Erfassen einer Messgröße sowie Verfahren zum Herstellen einer Sensorvorrichtung
DE102017205265A1 (de) 2017-03-29 2018-10-04 Robert Bosch Gmbh Sensorvorrichtung, System und Verfahren zum Erfassen einer Messgröße
DE102018214617A1 (de) 2018-08-29 2020-03-05 Robert Bosch Gmbh Sensoreinrichtung
DE102019109487A1 (de) * 2019-04-10 2020-10-15 Endress+Hauser SE+Co. KG Zustandsüberwachung eines vibronischen Sensors
DE102019131485A1 (de) * 2019-11-21 2021-05-27 Endress+Hauser SE+Co. KG Zustandsüberwachung eines vibronischen Sensors

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3304223A1 (de) * 1983-02-08 1984-08-16 VEGA Grieshaber GmbH & Co, 7620 Wolfach Verfahren und vorrichtung zur feststellung der an- oder abwesenheit eines stoffs an einem detektor oder des abstands zwischen stoff und detektor
DE3742878A1 (de) 1987-08-07 1989-07-06 Siemens Ag Optischer magnetfeldsensor
US6286361B1 (en) * 1998-01-05 2001-09-11 Rolls-Royce Plc Method and apparatus for remotely detecting pressure, force, temperature, density, vibration, viscosity and speed of sound in a fluid
EP0985916A1 (fr) 1998-09-09 2000-03-15 Endress + Hauser GmbH + Co. Dispositif de détection et/ou de surveillance d'un niveau prédéterminé dans un résevoir
EP1281051B1 (fr) 2000-05-10 2009-03-18 Endress + Hauser GmbH + Co. KG Dispositif pour determiner et/ou controler le niveau de remplissage d'un produit contenu dans un recipient
DE102005044725A1 (de) 2005-09-19 2007-03-29 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße eines Mediums in einem Behälter
DE102008050266A1 (de) 2008-10-07 2010-04-08 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße eines Mediums
US20130033255A1 (en) * 2011-08-05 2013-02-07 Thad Gilbert Walker Gas Magnetometer
DE102014219550A1 (de) 2014-09-26 2016-03-31 Robert Bosch Gmbh Kombinationssensor zur Messung von Druck und/oder Temperatur und/oder Magnetfeldern
DE102016210259A1 (de) 2016-06-10 2017-12-14 Robert Bosch Gmbh Sensorvorrichtung, Verfahren zum Kalibrieren einer Sensorvorrichtung und Verfahren zum Erfassen einer Messgröße
DE102017205099A1 (de) 2017-03-27 2018-09-27 Robert Bosch Gmbh Sensorvorrichtung, Sensorvorrichtungseinheit, System und Verfahren zum Erfassen einer Messgröße sowie Verfahren zum Herstellen einer Sensorvorrichtung
DE102017205265A1 (de) 2017-03-29 2018-10-04 Robert Bosch Gmbh Sensorvorrichtung, System und Verfahren zum Erfassen einer Messgröße
DE102018214617A1 (de) 2018-08-29 2020-03-05 Robert Bosch Gmbh Sensoreinrichtung
DE102019109487A1 (de) * 2019-04-10 2020-10-15 Endress+Hauser SE+Co. KG Zustandsüberwachung eines vibronischen Sensors
DE102019131485A1 (de) * 2019-11-21 2021-05-27 Endress+Hauser SE+Co. KG Zustandsüberwachung eines vibronischen Sensors

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