WO2023096302A1 - Générateur de distribution de lumière dynamique à trajet libre comprenant une métasurface universelle - Google Patents

Générateur de distribution de lumière dynamique à trajet libre comprenant une métasurface universelle Download PDF

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WO2023096302A1
WO2023096302A1 PCT/KR2022/018476 KR2022018476W WO2023096302A1 WO 2023096302 A1 WO2023096302 A1 WO 2023096302A1 KR 2022018476 W KR2022018476 W KR 2022018476W WO 2023096302 A1 WO2023096302 A1 WO 2023096302A1
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metasurface
structures
universal
dynamic light
free path
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PCT/KR2022/018476
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English (en)
Korean (ko)
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신종화
김현희
장태용
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한국과학기술원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1721—Electromodulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/216—Polarisation-affecting properties using circular polarised light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/218—Measuring properties of electrooptical or magnetooptical media

Definitions

  • the present invention relates to a free-path dynamic light condensation distribution generator including a universal metasurface capable of controlling an optical path.
  • Microfluidic channels are used in many industries, such as pharmaceutical/bio, medical, point-of-care device manufacturing, etc.
  • Conventionally since physical solid structures are mainly used as microfluidic channels, the structure can be easily changed once created. However, it is difficult to implement a 3D path, and most of them are limited to topological structures with two-dimensional connectivity.
  • the use of an optical tractor based on optical force enables a tractor differentiated from the conventional microfluidic channel.
  • optical forces are suitable for manipulating and controlling mesoscopic systems characterized by length scales in the range of tens of nanometers to hundreds of micrometers, force scales in the range of femtonewtons to nanonewtons, and time scales in the range of microseconds or longer.
  • Research on optical tweezers and optical tractors has been conducted in various fields. However, since these optical tractors still have the disadvantage of not being able to transport particles over a long distance and in a complicated path, even if the optical tractor is applied to a microfluidic channel, the implementation of a 3D path is limited, as in conventional microfluidic channels.
  • Patent Document Republic of Korea Patent Publication No. 10-2021-0080431
  • the present invention provides a free path dynamic light focusing distribution generator including a universal metasurface capable of forming and adjusting a free light path including 3D.
  • a first aspect of the present application is a free path dynamic light focusing distribution generator including a polarization control unit, a universal metasurface, and an image transfer unit, wherein polarized light incident through the polarization control unit passes through the universal metasurface to obtain a desired electric field intensity.
  • a free path dynamic light condensing distribution generator is provided in which a distribution is formed and the electric field intensity distribution is transmitted to a desired location through the image transfer unit.
  • a second aspect of the present invention provides a microfluidic chip, including the free path dynamic light focusing distribution generator according to the first aspect, wherein the electric field intensity distribution transmitted to a desired location forms a free path opto-fluidic channel.
  • the free path dynamic light convergence distribution generator is variable in that it can change the path of a free path optical fluid channel formed by replacing only the metasurface.
  • the polarization control unit such as a half-wave plate is placed in front of the metasurface to adjust the incident polarization, thereby moving the position of the maximum beam intensity (light focusing distribution) to move the particles in a desired direction, so the system has a simple feature.
  • the microfluidic chip to which the free-path dynamic light convergence distribution generator according to embodiments of the present application is applied uses a universal metasurface that can function independently according to different incident polarization states, It is a microfluidic channel device that allows particles of any size to move in an arbitrary three-dimensional path inside a fluid without a structure acting as a physical passage.
  • the present invention can change the network configuration of the fluid channel through real-time control of the incident light or change the movement speed of particles. It has the advantage of being able to control differently depending on the zone or to change various functions such as splitter, circulator, and accumulator in real time.
  • the microfluidic chip of the present application can be implemented without a physical structure inside a fluid, and shows the possibility of being used in various industrial fields where the behavior of particles must be controlled in a complex and fine manner with spatial efficiency. Representatively, it can be applied to the pharmaceutical industry that requires fine drug manufacturing technology.
  • FIG. 1 is a schematic diagram showing the implementation of a free path dynamic light convergence distribution generator and a microfluidic chip using the same, according to one embodiment of the present invention.
  • FIG. 2 is a schematic diagram showing independent electric field intensity distributions formed passing through a universal metasurface according to two incident polarizations perpendicular to each other, according to an embodiment of the present invention.
  • FIG. 4 is a graph (a) showing a change in the polarization of an incident beam from x-polarized light to polarization forming a specific angle with the x-axis over time, and the distribution of electric field strength accordingly It is a graph (b) showing the movement along the path.
  • FIG. 5 is a schematic diagram (a) showing that a desired light path (electric field intensity distribution) is formed in front of the universal metasurface in one embodiment of the present application and a diagram showing the result of simulating the image formed according to the z-axis position (b, c).
  • FIG. 6 is a simulation result showing field intensity patterns (a, b) formed at a position of 480 nm from the universal metasurface in one embodiment of the present application: the circle shape is out of focus (out of focus). out of focus, so it looks blurry.
  • FIG. 7 is a simulation result showing field intensity patterns (a, b) formed at a position of 720 nm from the universal metasurface in one embodiment of the present application: the line shape is out of focus (out of focus). out of focus, so it looks blurry.
  • FIG. 8 is a diagram showing the shapes of structures in the first layer structure group of the universal metasurface and their control factors according to one embodiment of the present invention.
  • FIG. 9 is a diagram showing the shapes of structures in the first layer structure group and the second layer structure group of the universal metasurface and their control factors in one embodiment of the present application.
  • FIG. 10 is a scanning electron microscope (SEM) photograph showing the shape of a structure in a first layer structure group (a) and a second layer structure group (b) of a universal metasurface according to an embodiment of the present application. am.
  • FIG. 11 is a diagram showing a first layer metasurface of a universal metasurface and an arrangement of structures according to its enlargement according to an embodiment of the present application.
  • FIG. 12 is a diagram illustrating a second layer metasurface of a universal metasurface and an arrangement of structures according to its enlargement according to an embodiment of the present application.
  • FIG. 13 is a schematic diagram illustrating a free path dynamic light convergence distribution generator and an apparatus for generating an image using the same, according to an embodiment of the present disclosure.
  • FIG. 14 is a schematic diagram showing independent electric field intensity distributions formed passing through a universal metasurface according to incident circular polarization according to an embodiment of the present disclosure.
  • 15 is a schematic diagram showing independent electric field intensity distributions formed passing through a universal metasurface according to incident linear polarization according to an embodiment of the present disclosure.
  • step of or “step of” as used throughout this specification does not mean “step for”.
  • a first aspect of the present application is a free path dynamic light focusing distribution generator including a polarization control unit, a universal metasurface, and an image transfer unit, wherein polarized light incident through the polarization control unit passes through the universal metasurface to obtain a desired electric field intensity.
  • a free path dynamic light condensing distribution generator is provided in which a distribution is formed and the electric field intensity distribution is transmitted to a desired position through the image transfer unit.
  • the universal metasurface may form independent electric field intensity distributions for two incident polarizations perpendicular to each other.
  • the universal metasurface may implement a dynamic light focusing distribution that appears as a dynamic electric field intensity distribution by continuously adjusting the orientation of incident polarized light.
  • a schematic design of the present free path dynamic light condensation distribution generator can be confirmed.
  • incident light having linear polarization passes through a half-wave plate for controlling alignment of linear polarization
  • the incident light has linear polarization whose alignment is controlled.
  • the incident light having linearly polarized light whose alignment is controlled passes through a properly designed universal metasurface (a two-layer metasurface) to form a designed electric field intensity distribution.
  • the metasurface is designed to have a light focusing distribution in which the maximum intensity of the electric field is located along the target free light path.
  • an appropriate optical system including a lens or the like, it is possible to transfer the light path through the metasurface so that the formed light path is focused on a desired position in the microfluidic chip.
  • green and blue arrows inside the microfluidic chip indicate the moving paths of different microparticles, respectively, and yellow circles indicate positions of the maximum intensity of an electric field periodically present along an optical path. The blue path and the green path do not intersect.
  • the optical path it is possible to move different types of microparticles in a desired direction along the optical path in a physically disconnected microfluidic channel so that the moving paths of different types of microparticles do not cross each other.
  • the maximum electric field intensity distribution is formed on the optical path and at the same time, it must be designed to be staggered from the case of the x-polarized beam.
  • the electric field intensity distribution can be implemented so that the waist (maximum intensity) of the beam is located at the position where the particle is desired to be trapped by using the universal metasurface.
  • a properly designed two-layer metasurface is used, independent arbitrary intensity distributions for two mutually orthogonal polarizations can be implemented. Therefore, in a of FIG. 2, when a two-layer metasurface is irradiated with an x-polarized beam, the microparticles in the fluid tend to gather at the position of maximum intensity (yellow circle) on the light path. Similarly, in the case of b of FIG. 2 using the y-polarized beam, the microparticles in the fluid will try to gather at the point of maximum intensity (yellow circle) on the optical path alternately positioned with the case of a of FIG. 2 .
  • the polarization control unit may include a polarizing plate and/or a phase retardation plate. Specifically, the orientation of incident polarization may be adjusted through the polarization control unit, and a dynamic light focusing distribution appearing as a dynamic electric field intensity distribution may be generated through continuous adjustment.
  • the incident light has x-polarized light (a), linear polarized light having an angle of 45 degrees with the x-axis (b), and y-polarized light (c), in each case, the maximum The electric field intensity distribution can be confirmed.
  • the position of the maximum electric field strength on the optical path is at the midpoint between the distribution of a (x-polarized incident beam) in FIG. 3 and the distribution of c (y-polarized incident beam) in FIG.
  • the present free path dynamic light convergence distribution generator can operate as a light conveyor.
  • the incident polarization may include linear polarization, circular polarization, or elliptical polarization.
  • the formation of the dynamic electric field intensity distribution may be performed through polarization control that changes polarization alignment in the polarization control unit.
  • the change in the dynamic electric field intensity distribution is a change in the configuration of the universal metasurface, a distance between the universal metasurface and the polarization control unit, and a distance between the universal metasurface and the image transfer unit. It may be performed by adjusting one or more.
  • the polarization of the incident light may be changed from x-polarized light to polarized light forming a specific angle with the x-axis according to time.
  • the complex intensity is a cosine form along an arbitrary one-dimensional light path
  • the complex intensity is a sine form (pi/2 phase difference ) to design the phase distribution.
  • the x-axis component of the electric field is cos( ⁇ t)
  • the y-axis component is sin( ⁇ t)
  • the complex intensity on the image plane is It can be expressed as a linear sum of the intensity multiplied by the target phase distribution curve along each path.
  • the distribution of the electric field intensity over time gradually moves along the light path. That is, the location of the maximum intensity on the optical path moves in parallel.
  • incident polarization may be gradually changed over time using a half-wave plate.
  • the particles inside the fluid are trapped at the position of the electric field's maximum intensity, and when the polarization state of the electric field changes over time, the particles move along an arbitrary designed path, thereby acting as an optical tractor. This can be implemented.
  • the optical path designed through the universal metasurface is formed and confirmed through simulation.
  • x-polarized light incident through the polarization control unit forms an optical path through the universal metasurface (Fig. 5a) and observes it through an image camera according to the position of the z-axis.
  • the angular shape can be confirmed.
  • the line shape is clearly visible, but the circle shape is out of focus, so it can be confirmed that it looks blurry.
  • the field intensity pattern formed at the z-axis 720 ⁇ m from the universal metasurface is clearly visible in the circle shape, but blurry because the line shape is out of focus. (a and b in FIG. 7).
  • the universal metasurface may be a dual-layer metasurface, including a first-layer metasurface and a second-layer metasurface.
  • the metasurface of the first layer is formed on a substrate, includes a first host material and a plurality of first structures, and the metasurface of the second layer is the metasurface of the first layer. and may include a plurality of second structures, and the first and second plurality of structures may be arranged independently and spaced apart from each other.
  • the substrate may be a glass substrate, and each of the first and second plurality of structures may include silicon, but is not limited thereto.
  • the first host material supports the plurality of first structures and may include SU-8 (epoxy-based photoresist), but is not limited to use as long as it is a transparent dielectric.
  • a transparent material may have a lower refractive index than that of the plurality of first structures.
  • each of the plurality of first structures and the plurality of second structures may have a shape of a rectangular parallelepiped, an elliptical column, a semi-ellipsoid, or a lying semi-cylindrical column.
  • each of the plurality of first structures and the plurality of second structures includes selected from the group consisting of metals, metal mixtures, alloys, inorganic materials, organic/inorganic hybrid materials, and combinations thereof.
  • the inorganic material may include one selected from among oxides, nitrides, semiconductors having a bandgap greater than that of visible light, and dielectric materials, but may not be limited thereto.
  • the oxide may include one selected from SiO 2 , ZnO, Al 2 O 3 , ITO, TiO 2 , ZrO 2 , HfO 2 , and SnO 3 , and the nitride may be Si 3 N 4 or It may include nitrides of transition metals, but may not be limited thereto.
  • the first host material may include a gaseous material, a liquid material, or a solid material.
  • the gaseous material may include air, nitrogen, or an inert gas, and the inert gas may specifically include argon gas, but may not be limited thereto.
  • the solid material may be a low refractive index dielectric material such as SiO 2 , MgF 2 , or NaF, or poly(methyl methacrylate) [poly(methyl methacrylate)], polystyrene, polycarbonate, and the like. It may include an organic material or a material including pores such as expandable polystyrene, but may not be limited thereto.
  • the first plurality of structures include two or more first layer structure groups, each of the first layer structure groups includes structures having different shapes from each other, and the second plurality of structure groups
  • the structure may include two or more groups of second layer structures, and each group of second layer structures may include structures having the same shape.
  • the first plurality of structures and the second plurality of structures are in the shape of an elliptical column, and the length of the long axis, the length of the short axis and the horizontal of the structures in the first layer structure group are rotated At least one of the angles ⁇ 1 may be adjusted, and at least one of the length of the major axis, the length of the minor axis, and the angle ⁇ 2 rotated with respect to the horizontal of the structures in the second layer structure group may be adjusted.
  • the structure of the first layer and the structure of the second layer may be the same as or different from each other.
  • the first layer has a length of a major axis and a length of a minor axis. and the rotated angle of the major axis with respect to the horizontal ( ⁇ 1 ).
  • the lengths of the major axis and the minor axis are fixed, and the metasurface can be adjusted by a factor of the rotated angle of the major axis with respect to the horizontal ( ⁇ 1 ).
  • the structure of the first layer may include two groups having different lengths of major and minor axes and different rotated angles.
  • the metasurface configured as shown in FIG. 9 can realize the formation of independent electric field intensity distributions for incident polarizations perpendicular to each other, by adjusting a total of 8 control factors.
  • the universal metasurface of the present invention can create an elliptical nanopost array by patterning each layer of the two-layer metasurface through two E-beam lithography processes. Therefore, since a universal metasurface can be formed through a patterning process through two lithography processes, the universal metasurface of the present application has a minimum line width (about 80 nm) of a metasurface that is less than that of a commercially available DRAM semiconductor (about 20 nm). ), and considering that only two patterning is required unlike semiconductor devices that require dozens of patterning, mass production is sufficiently recognized.
  • the image transfer unit may include an objective lens and a convex lens.
  • the image transfer unit may use a general optical system, and a commercially available microscope may be used.
  • the free path dynamic light focusing distribution generator may include an optical tractor or an optical tweezer.
  • the free path dynamic light focusing distribution generator may include an optical tractor or an optical tweezer.
  • using a universal metasurface it is possible to create a 3D hologram with phase, polarization, and intensity all adjusted.
  • independent 3D holograms can be created according to two incident polarizations that are orthogonal to each other.
  • FIG. 13 is an optical measurement setup in which an image can be obtained from a fabricated sample by adjusting incident polarization and metasurface position.
  • incident polarization states are right-circular polarization (RCP) and left-circular polarization (LCP) polarization, respectively
  • an image such as a hologram can be formed by measuring an image by adjusting the position of the metasurface. This is like a video that can be displayed by scanning a 3D image in the z direction in front of the metasurface.
  • the present application shows spiral images and KAIST characters in RCP and left-circular polarization (LCP) incident beam polarizations, respectively, by using the principle of a universal metasurface that can independently control polarization, intensity, and phase in two polarizations perpendicular to each other. It can be implemented by designing a universal metasurface that can be implemented (FIG. 14).
  • the free path dynamic light convergence distribution generator of the present invention can implement completely different field profiles independently in RCP and LCP, and polarizations of x- and y-polarized incident light (FIGS. 14 and 15).
  • a second aspect of the present invention provides a microfluidic chip, including the free path dynamic light focusing distribution generator according to the first aspect, wherein the electric field intensity distribution transmitted to a desired location forms a free path opto-fluidic channel.
  • incident polarization as dynamic polarization (when the orientation of polarized light is continuously adjusted) in the free path dynamic light focusing distribution generator
  • the electric field intensity distribution on the light path formed through the metasurface is a dynamic electric field intensity distribution. (moving condensing distribution).
  • the dynamic electric field intensity distribution (light focusing distribution) may serve as an optofluidic channel.
  • the microfluidic chip may include any disconnected fluid channels, and the free path optical fluid channels may connect the arbitrary disconnected fluid channels.
  • a free path optical fluidic channel having an arbitrary path is formed in the empty space between the junctions at both ends of the physically disconnected channel of the microfluidic chip. Particles can be moved from one broken junction to another.
  • conventional microfluidic channels are only capable of two-dimensional paths, cross-propagation is difficult (difficulty in cross-propagation due to encounters between paths), the present invention forms 3-dimensional arbitrary paths and moves particles through a free-path dynamic light convergence distribution generator. By doing so, cross-transfer between channels and fine adjustment may be possible.
  • microfluidic chip of the present disclosure can be applied to various industrial fields because an arbitrarily formed microfluidic channel can be integrated with a microactuator capable of driving and controlling the system.
  • a microactuator capable of driving and controlling the system.
  • the microfluidic chip by applying the microfluidic chip to a lab-on-a-chip system that can integrate various analyzes performed in a laboratory into a single chip using only a small amount of fluid, advantages such as cost efficiency, parallelization, and increased diagnostic speed and sensitivity can be obtained. there is.
  • microfluidic chips are used in various fields such as medicine, drug manufacturing, cell biology, etc., and the present invention overcomes the limitations of existing microfluidic channels to obtain path variability and high degree of freedom, thereby solving problems in the above industrial fields. can be used to solve

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Abstract

La présente invention concerne un générateur de distribution de lumière dynamique à trajet libre comprenant une métasurface universelle capable de commander un trajet optique.
PCT/KR2022/018476 2021-11-24 2022-11-22 Générateur de distribution de lumière dynamique à trajet libre comprenant une métasurface universelle WO2023096302A1 (fr)

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