WO2023093234A1 - Actuator assembly, anti-shake module, and terminal - Google Patents

Abstract

The present application provides an actuator assembly, which is applied to the field of actuators. The actuator assembly comprises a micro-electro-mechanical system (MEMS) driver and an electrical connection part. The MEMS driver comprises an outer driving frame and a built-in driving member. The built-in driving member is arranged in the outer driving frame. The electrical connection part comprises an outer electrical connection frame, an elastic connection member, and a built-in electrical connection member. The built-in electrical connection member is arranged in the outer electrical connection frame. The built-in electrical connection member establishes an electrical connection with the outer electrical connection frame by means of the elastic connection member. The electrical connection part and the MEMS driver are stacked. The outer electrical connection frame is connected to the outer driving frame, and the built-in electrical connection member is connected to the built-in driving member. In the present application, the actuator assembly can provide an electric signal for an electronic device by means of the electrical connection part. Therefore, the electrical connection between the electronic device and the built-in driving member is separated, thereby reducing the processing cost of the actuator assembly.

Description

Actuator components, anti-shake modules and terminals

This application claims the priority of the Chinese patent application with the application number CN202111433847.5 and the application name "actuator assembly, anti-shake module and terminal" submitted to the State Intellectual Property Office of China on November 29, 2021, all of which The contents are incorporated by reference in this application.

technical field

This application relates to the field of actuators, in particular to actuator components, anti-shake modules and terminals.

Background technique

Taking pictures or videos is a common function of terminals. However, when the user holds the terminal to take pictures or record videos, the terminal may shake, thus resulting in blurred images.

To this end, the terminal can compensate for jitter through micro electro mechanical systems (MEMS) drivers. The MEMS driver includes a driver outer frame, a driver elastic connector and a driver inner part. The outer frame of the drive and the housing of the terminal are fixed. When the terminal shakes, the drive outer frame shakes with the shaking of the terminal. The drive inner part is connected with the drive outer frame through the drive elastic connector. When a driving signal is applied to the driving inner part by driving the elastic connecting part, the driving inner part can translate or rotate within the driving outer frame. The image sensor is fixedly arranged on the driver built-in part. When the terminal shakes, by driving the translation or rotation of the built-in component, the shake of the terminal can be compensated, thereby reducing the influence of the shake on the image quality.

However, in addition to the driving elastic connector, a flexure is required between the drive outer frame and the drive inner part, and the flexure is used to provide the electrical connection of the image sensor. Therefore, the structure of the MEMS driver is relatively complicated, and the processing cost is relatively high.

Contents of the invention

The present application provides an actuator assembly, an anti-shake module, and a terminal. By adding electrical connection components, the electrical connection between the electronic device and the drive built-in parts can be separated, thereby reducing the processing cost of the actuator assembly.

The first aspect of the present application provides an actuator assembly. The actuator assembly includes a MEMS driver and electrical connections. A MEMS driver includes a driver outer frame and a driver inner part. The drive inner part is arranged in the drive outer frame. The MEMS actuator may also include an actuation elastic link. The driving inner part is connected with the driving outer frame through the driving elastic connector. The actuator assembly provides a drive signal to the drive built-in by driving the elastic connector. The electrical connection part includes an electrical connection outer frame, an elastic connector and an electrical connection built-in part. The electrical connection built-in part is arranged in the electrical connection outer frame. The electrical connection outer frame is connected with the electrical connection built-in part through elastic connectors. The electrical connection built-in part establishes electrical connection with the electrical connection outer frame through the elastic connector. Electrical connection components and MEMS actuators are stacked. The electrical connection outer frame is connected with the driving outer frame. The electrical connection insert is connected to the driver insert.

In the present application, the actuator assembly can provide electrical signals to the electronic device through the electrical connection part. Therefore, the electrical connections of the electronics and the drive built-in are separated, so that the machining costs of the actuator assembly can be reduced.

In an optional manner of the first aspect, the electrical connection built-in part or the driving built-in part is used to connect with the electronic device. The electrical connection built-in is used to establish an electrical connection with the electronic device.

In an optional manner of the first aspect, the electrical connection component is stacked on the MEMS driver. The electrical connection built-in part is provided with a first through hole. The electronic device is arranged in the first through hole. Wherein, by increasing the first through hole, the height of the MEMS driver can be reduced, thereby reducing the thickness of the actuator assembly. When the actuator assembly is mounted on the terminal, the thinner the actuator assembly is, the thinner the lens part of the terminal can be made. Therefore, the present application can improve user experience.

In an optional manner of the first aspect, the built-in driver is used to connect with the electronic device. Wherein, when the electronic device is arranged in the first through hole, the electronic device may be connected to the side wall of the first through hole through the side wall. In this case, the machining cost of the actuator assembly is high. In this application, by connecting the electronics to the drive built-in, the tooling cost of the actuator assembly can be reduced.

In an optional manner of the first aspect, the length of the first through hole is A micrometer (micrometre, μm) longer than the length of the electronic device, or, the width of the first through hole is A μm longer than the width of the electronic device, A The range is between 100 and 1000. Wherein, when the value of A is large, the electrical connection built-in part needs to have a large length or width, thus resulting in a large size of the actuator assembly. When the value of A is small, the heat dissipation efficiency of the electronic device will be reduced. Therefore, the present application can define a reasonable range of the value of A, so as to improve the heat dissipation efficiency of the electronic device while reducing the size of the actuator assembly.

In an optional manner of the first aspect, the driving built-in part is provided with a first groove. The electronic device is arranged in the first groove. Wherein, by setting the first groove, the height of the electronic device can be reduced. When the actuator assembly is installed on the terminal, the front of the electronic device needs to have a certain distance from other devices. Other devices may be optical filters. Therefore, the lower the height of the electronic device, the thinner the lens portion of the terminal can be made, thereby improving user experience.

In an optional manner of the first aspect, a second through hole is provided on the driving inner part. The area of the second through hole is smaller than that of the first groove. The second through hole and the first groove form a step. The drive insert is used to connect to the back of the electronics via a step. Wherein, by adding the second through hole, the heat dissipation efficiency of the electronic device can be improved.

In an optional manner of the first aspect, the length of the second through hole is shorter than the length of the electronic device by B μm, or the width of the second through hole is shorter than the width of the electronic device by B μm. B is between 100 and 1000. Wherein, when the value of B is small, it is difficult to connect the back of the electronic device with the built-in part of the drive, thereby increasing the processing cost of the actuator assembly. When the value of B is larger, the area of the second through hole is smaller, thereby reducing the heat dissipation efficiency of the electronic device. Therefore, the present application can limit the reasonable range of the B value, so as to improve the heat dissipation efficiency of the electronic device while reducing the processing cost.

In an optional manner of the first aspect, a third through hole is provided on the driving inner part. The electronic device is arranged in the third through hole. The driving built-in part is used to connect with the side wall of the electronic device through the side wall of the third through hole. Wherein, by setting the third through hole, the height of the electronic device can be reduced, thereby improving user experience.

In an optional manner of the first aspect, the electrical connection built-in component is used to establish an electrical connection with the electronic device by wire bonding. Wherein, when the electronic device is disposed in the first through hole, if the electronic device is connected to the built-in electrical connection by bonding, conductive adhesive bonding or welding, the processing cost of the actuator assembly is relatively high. In this application, the processing cost of the actuator assembly can be reduced by wire bonding.

In an optional manner of the first aspect, the driving built-in component is provided with a driving area. The drive zone is outside the target zone. The target area is the projected area of the electronic device on the drive built-in. Wherein, the driving area generates a driving force through a driving signal. Therefore, heat is generated in the drive area. By setting the driving area outside the target area, the heat dissipation efficiency of the electronic device can be improved.

In an optional manner of the first aspect, the MEMS driver is stacked on the electrical connection component, a first through hole is arranged on the built-in driver, and the electronic device is arranged in the first through hole. Wherein, by providing the first through hole, the thickness of the actuator assembly can be reduced.

In an optional manner of the first aspect, the electrical connection built-in part is used to connect with the electronic device. Wherein, when the electronic device is arranged in the first through hole, the electronic device may be connected to the side wall of the first through hole through the side wall. In this case, the machining cost of the actuator assembly is high. In this application, by connecting the electronics with the electrical connection built-in, the tooling cost of the actuator assembly can be reduced.

In an optional manner of the first aspect, the built-in electrical connection part is provided with a first groove. The electronic device is arranged in the first groove. Wherein, by setting the first groove, the height of the electronic device can be reduced, thereby improving user experience.

In an optional manner of the first aspect, the built-in electrical connection part is provided with a second through hole. The area of the second through hole is smaller than that of the first groove. The second through hole and the first groove form a step. The electrical connection insert is used to connect to the back of the electronic device through the step. Wherein, by adding the second through hole, the heat dissipation efficiency of the electronic device can be improved.

In an optional manner of the first aspect, a third through hole is disposed on the built-in electrical connection, and the electronic device is disposed in the third through hole. The electrical connection built-in part is used for connecting with the side wall of the electronic device through the side wall of the third through hole. Wherein, by setting the third through hole, the height of the electronic device can be reduced, thereby improving user experience.

In an optional manner of the first aspect, the electrical connection built-in component is used to establish an electrical connection with the electronic device with a signal source and a driving source. Wherein, the electronic device may not only need to be connected to a driving source, but also may need to output a signal source. At this time, the driving source can be transmitted through the elastic connector, and the signal source can be transmitted through the external wire. One end of the external wire is connected with the electronic device. The other end of the external wire is connected to the base. At this point, the external wires will provide additional resistance to the drive internals compared to the elastic connectors. In the present application, the signal source and the driving source are transmitted through the elastic connecting part, which is beneficial to the resistance balance of the driving built-in part, thereby improving the reliability of the actuator assembly.

In an optional manner of the first aspect, the thickness of the electrical connection component is between 100 μm and 1000 μm. Wherein, the thicker the electrical connection part is, the thicker the actuator assembly is. When the actuator assembly is mounted on the terminal, the thicker the actuator assembly is, the thicker the terminal is. When the thickness of the terminal is too thick, user experience will be degraded. Therefore, the present application can improve user experience by setting the thickness of the electrical connection component.

In an optional manner of the first aspect, the material of the electrical connection component is single crystal silicon or polycrystalline silicon.

In an optional manner of the first aspect, the length or width of the electrical connection outer frame is between 4 mm (mm) and 30 mm. Wherein, the greater the length or width of the electrically connected outer frame, the greater the size of the actuator assembly. By setting the length or width of the electrically connected outer frame, the size of the actuator assembly can be reduced.

In an optional manner of the first aspect, the number of elastic connectors is a multiple of 4. Among other things, the elastic connector also exerts resistance to the drive inner part. The reliability of the MEMS driver will be affected when the resistance to the drive internals is unbalanced. Also, the number of elastic connectors will affect the resistance balance. Therefore, when the shape of the electrical connection outer frame and the electrical connection built-in part is a rectangle or a square, the number of elastic connectors is a multiple of 4, which is beneficial to resistance balance.

In an optional manner of the first aspect, the length of the electrical connection outer frame is equal to the length of the driving outer frame. Or, the width of the electrical connection outer frame is equal to the width of the driving outer frame. Wherein, when the length or width of the electrical connection outer frame is equal to the length or width of the driving outer frame, the difficulty of connecting the electrical connection component and the MEMS driver can be reduced, thereby reducing the processing cost.

In an optional manner of the first aspect, the actuator assembly further includes a base. The MEMS driver and electrical connection components are arranged on the base.

The second aspect of the present application provides an anti-shake module. The anti-shake module includes a lens assembly, a filter, a casing, and the actuator assembly described in any one of the first aspect and the optional manner of the first aspect. The actuator assembly is arranged in the housing. The optical filter is arranged on the actuator assembly. The lens assembly is arranged on the optical filter.

The third aspect of the present application provides a terminal. The terminal includes a power supply, a processor, and the anti-shake module described in the aforementioned second aspect. The power supply is used to provide the driving source for the anti-shake module. The anti-shake module is used to obtain the signal source containing image information according to the driving source. The processor is used for data processing on the signal source.

The fourth aspect of the present application provides a method for preparing an actuator assembly. The preparation method includes the following steps: providing an electrical connection component and a MEMS driver. A MEMS driver includes a driver outer frame and a driver inner part. The drive inner part is arranged in the drive outer frame. The electrical connection part includes an electrical connection outer frame, an elastic connector and an electrical connection built-in part. The electrical connection built-in part is arranged in the electrical connection outer frame. The electrical connection built-in part establishes electrical connection with the electrical connection outer frame through the elastic connector to connect the electrical connection part with the MEMS driver. Wherein, the electrical connection outer frame is connected with the driving outer frame, and the electrical connection inner part is connected with the driving inner part.

In an optional manner of the fourth aspect, the manufacturing method further includes the following step: connecting the electronic device with the built-in drive component or the built-in electrical connection component. An electrical connection is established between the electrical connection built-in and the electronic device.

In an optional manner of the fourth aspect, connecting the electrical connection component to the MEMS driver includes: stacking the electrical connection component on the MEMS driver. The preparation method also includes: processing the first through hole on the driving built-in part. Connecting the electronic device to the drive insert or the electrical connection insert includes mounting the electronic device to the drive insert through the back of the electronic device. Wherein, the electronic device is located in the first through hole.

In an optional manner of the fourth aspect, the manufacturing method further includes: machining the first groove on the driving built-in component. Connecting the electronic device to the drive built-in or the electrical connection built-in includes: installing the electronic device into the first groove of the drive built-in through the back of the electronic device.

Description of drawings

Figure 1a is the first structural schematic diagram of the actuator assembly provided in the embodiment of the present application;

Figure 1b is a second structural schematic diagram of the actuator assembly provided in the embodiment of the present application;

Figure 2 is a partial cross-sectional view of the actuator assembly shown in Figure 1b;

Figure 3a is the first partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

Figure 3b is a second partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

Figure 3c is a third partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

Figure 3d is a fourth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

Figure 3e is a fifth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

Fig. 4a is the sixth partial sectional view of the actuator assembly provided in the embodiment of the present application;

Fig. 4b is the seventh partial sectional view of the actuator assembly provided in the embodiment of the present application;

Fig. 4c is the eighth partial sectional view of the actuator assembly provided in the embodiment of the present application;

Fig. 4d is the ninth partial sectional view of the actuator assembly provided in the embodiment of the present application;

5 is a tenth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application;

FIG. 6 is a third schematic structural view of the actuator assembly provided in the embodiment of the present application;

Fig. 7 is a schematic diagram of the expansion of the actuator assembly shown in Fig. 6;

FIG. 8 is a schematic structural diagram of the anti-shake module provided in this application;

FIG. 9 is a schematic structural diagram of a terminal provided in this application;

Fig. 10 is a schematic flow chart of the method for preparing the actuator assembly provided in this application.

Detailed ways

The present application provides an actuator assembly, an anti-shake module, and a terminal. By adding electrical connection components, the electrical connection between the electronic device and the drive built-in parts can be separated, thereby reducing the processing cost of the actuator assembly.

It should be understood that "first", "second", "target" and the like used in this application are only used for the purpose of distinguishing and describing, and cannot be interpreted as indicating or implying relative importance, nor indicating or implying order. In addition, reference numerals and/or letters are repeated in the various figures of this application for the sake of brevity and clarity. Repetition does not imply a strictly limited relationship between the various embodiments and/or configurations. For convenience of description, in the embodiment of the present application, the direction of the Z axis is the height direction. The direction of the X-axis is the width direction. The direction of the Y axis is the longitudinal direction.

The actuator assembly in this application is applied to the field of actuators. In the field of actuators, the electronics can be fixed on the drive built-in of the MEMS actuator. When the driving built-in part translates or rotates in the driving outer frame, the driving built-in part drives the electronic device to translate or rotate. However, a drive signal is required to drive the built-in. Electrical signals are also required by the electronics connected to the drive built-in. Therefore, the structure of the MEMS driver is relatively complicated, and the processing cost is relatively high.

To this end, the present application provides an actuator assembly. Fig. 1a is a first structural schematic diagram of the actuator assembly provided in the embodiment of the present application. As shown in Figure 1a, the actuator assembly includes a MEMS driver and electrical connection components. The MEMS driver includes a driving outer frame 102 , a driving inner part 103 and a driving elastic connecting part 104 . The driving inner part 103 is disposed in the driving outer frame 102 . The driving inner part 103 is connected with the driving outer frame 102 through the driving elastic connecting part 104 . The actuator assembly provides a driving signal to the driving inner part 103 by driving the elastic connecting part 104 . Driven by the driving signal, the driving inner part 103 can translate or rotate within the driving outer frame 102 .

The electrical connection components include an electrical connection outer frame 105 , an elastic connector 106 and an electrical connection built-in part 101 . The thickness of the electrical connection part is between 100 μm and 1000 μm. The material of the electrical connection component is a conductive material such as single crystal silicon or polycrystalline silicon, such as an SOI wafer. The length or width of the electrical connection outer frame 105 is between 4 mm and 30 mm. The electrical connection built-in component 101 is disposed in the electrical connection outer frame 105 . The electrical connection outer frame 105 is connected to the electrical connection built-in part 101 through an elastic connector 106 . Electrical connection components and MEMS actuators are stacked. The electrical connection outer frame 105 is connected to the driving outer frame 102 . The electrical connection built-in part 101 is connected to the driving built-in part 103 . For example, in Figure 1a, the electrical connections are layered over the MEMS actuator. The electrical connection part is fixedly connected with the MEMS driver. The way of fixed connection can be adhesive, welding, or bonding and so on. When adopting the way of bonding to fix the connection, the bonding material can be various glues and epoxy resins. Wherein, the electrical connection outer frame 105 is fixedly connected with the driving outer frame 102 . The electrical connection built-in part 101 and the drive built-in part 103 are fixedly connected. When the driving built-in part 103 translates or rotates in the driving outer frame 102 , the driving built-in part 103 drives the electrical connection built-in part 101 to translate or rotate.

The electrical connection built-in part 101 or the drive built-in part 103 is used for connecting with an electronic device. The electronic device may be an image sensor, a display, or the like. Fig. 1b is a second structural schematic diagram of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 1 b , on the basis of FIG. 1 a , an electronic device 107 is stacked on the electrical connection built-in component 101 . The electronic device 107 is fixedly connected to the built-in electrical connection part 101 . The way of fixed connection can be adhesive, welding, or bonding and so on. In the following descriptions, when any two structures need to be connected, methods such as adhesion, welding, or bonding can be used, and details will not be described later. In FIG. 1 b , when the driving built-in part 103 translates or rotates in the driving outer frame 102 , the driving built-in part 103 drives the electrical connection built-in part 101 to translate or rotate. The electrical connection built-in component 101 drives the electronic device 107 to translate or rotate.

The electronic device 107 establishes an electrical connection with the electrical connection built-in component 101 . The way of electrical connection may be wire bonding, bonding, conductive adhesive bonding, or welding. The elastic connector 106 is a conductive material. The electrical connection built-in part 101 establishes an electrical connection with the electrical connection outer frame 105 through the elastic connector 106 . The actuator assembly provides electrical signals to the electronic device 107 through the electrical connection outer frame 105 , the elastic connection member 106 and the electrical connection inner member 101 .

In this application, the outer frame 105 is electrically connected to provide a driving signal for driving the built-in component 103 . The electrical connection components provide electrical signals to the electronic device 107 . Therefore, the electrical connections of the electronics 107 and the drive built-in 103 are separated, so that the machining costs of the actuator assembly can be reduced.

It should be understood that the actuator assembly provided in Figures 1a and 1b is only one example provided by the present application. The shape or quantity of each structure in the figure should not be used as a condition to limit the protection scope of the present application.

For example, in FIG. 1a and FIG. 1b, the electrical connection outer frame 105 and the driving outer frame 102 are directly connected, so that the positions of the electrical connection outer frame 105 and the driving outer frame 102 do not move relative to each other during operation. The working process refers to the process in which the driving inner part 103 translates or rotates in the driving outer frame 102 . In practical applications, the actuator assembly may also include a base. The electrical connection outer frame 105 and the driving outer frame 102 can be fixedly connected to the base respectively. At this time, the electrical connection outer frame 105 and the driving outer frame 102 are indirectly connected through the base. The positions where the outer frame 105 is electrically connected and the outer frame 102 is driven have no relative movement during the working process.

For example, in FIG. 1 a , the number of elastic connectors 106 is four. The four elastic connectors 106 correspond to the four side walls of the electrical connection built-in part 101 one by one. In practical applications, the electrical connection component may include other numbers of elastic connection members 106 . When the electrical connection component includes 8 elastic connectors 106 , each side wall of the electrical connection built-in component 101 may correspond to 2 elastic connectors 106 . In practical application, the elastic connecting member 106 will also exert a resistance to the electrical connection built-in member 101 . When the electrical connection built-in component 101 receives unbalanced resistance, the resistance will affect the normal translation or rotation of the drive built-in component 103 . Therefore, when the shapes of the electrical connection outer frame and the electrical connection built-in part are rectangles, squares, circles, or octagons, the number of elastic connectors can be a multiple of 4.

For example, assume that the four elastic connectors 106 include elastic connector 1 , elastic connector 2 , elastic connector 3 and elastic connector 4 . The four side walls of the electrical connection built-in part 101 include side wall 1 , side wall 2 , side wall 3 and side wall 4 . The four side walls electrically connected to the outer frame 105 include a side wall 11 , a side wall 12 , a side wall 13 and a side wall 14 . The side wall 1 is adjacent to the side wall 11 . The side wall 2 is adjacent to the side wall 12 . The side wall 3 is adjacent to the side wall 13 . The side wall 4 is adjacent to the side wall 14 . In FIG. 1 a , each elastic connecting piece 106 connects the electrical connection built-in component 101 and the adjacent side wall of the electrical connection outer frame 105 . Specifically, the elastic connector 1 is used to connect the side wall 1 and the side wall 11 . The elastic connecting piece 2 is used for connecting the side wall 2 and the side wall 12 . The elastic connecting piece 3 is used for connecting the side wall 3 and the side wall 13 . The elastic connecting piece 4 is used for connecting the side wall 4 and the side wall 14 . In practical applications, each elastic connecting piece 106 can connect the non-adjacent side walls of the electrical connection built-in component 101 and the electrical connection outer frame 105 . In one example, the elastic connecting member 1 is used to connect the side wall 1 and the side wall 12 . The elastic connecting piece 2 is used for connecting the side wall 2 and the side wall 13 . The elastic connecting piece 3 is used for connecting the side wall 3 and the side wall 14 . The elastic connecting piece 4 is used for connecting the side wall 4 and the side wall 11 .

For example, in FIG. 1 a , adjacent sidewalls among the sidewall 11 , sidewall 12 , sidewall 13 and sidewall 14 are connected to each other to form an outer frame 105 without gaps for electrical connection. In practical application, the side wall 11 , the side wall 12 , the side wall 13 and the side wall 14 may not be connected, so as to form an electrical connection outer frame 105 with gaps.

For example, in FIG. 1 a , the shape of the electrical connection outer frame 105 , the electrical connection inner part 101 , the driving outer frame 102 and the driving inner part 103 is a rectangle on the X plane. The X plane is perpendicular to the X axis. In practical applications, the shapes of the electrical connection outer frame 105 , the electrical connection inner part 101 , the driving outer frame 102 and the driving inner part 103 on the X plane can also be square, hexagonal, circular, etc.

Figure 2 is a partial cross-sectional view of the actuator assembly shown in Figure 1b. As shown in FIG. 2 , the actuator assembly includes a MEMS driver, electrical connections and electronics 107 . The MEMS driver includes a driving outer frame 102 , a driving inner part 103 and a driving elastic connecting part 104 . The electrical connection components include an electrical connection outer frame 105 , an elastic connector 106 and an electrical connection built-in part 101 . In the height direction, MEMS drivers, electrical connection parts and electronics 107 are stacked. Wherein, the electronic device 107 is laminated on the electrical connection component. Electrical connections are layered over the MEMS actuator. In practical applications, the actuator assembly can be combined with other devices to form a module. For example, when the electronic device 107 is an image sensor, other devices may be optical filters. At this time, there needs to be a certain distance between the front of the image sensor 107 and the filter. When the height of the image sensor 107 is higher, the height of the optical filter is also higher, resulting in a thicker module. Therefore, the present application can reduce the thickness of the module by reducing the height of the image sensor 107 .

Fig. 3a is a first partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 3 a , the actuator assembly includes a MEMS driver and an electrical connection part 107 . The MEMS driver includes a driving outer frame 102 , a driving inner part 103 and a driving elastic connecting part 104 . The electrical connection components include an electrical connection outer frame 105 , an elastic connector 106 and an electrical connection built-in part 101 . In the height direction, the electrical connection components are stacked on top of the MEMS actuator. The electrical connection outer frame 105 is fixedly connected with the driving outer frame 102 . The electrical connection built-in part 101 and the drive built-in part 103 are fixedly connected. A first through hole is disposed in the electrical connection built-in part 101 . The length of the first through hole is longer than the length of the electronic device 107 by A μm. The width of the first via hole is A μm longer than the width of the electronic device 107 . A ranges from 100 to 1000. The value of A can be 100 or 1000. The electronic device 107 is disposed in the first through hole. The electronic device 107 is fixedly connected to the drive built-in part 103 through the back. The black squares in the diagram represent the glue or solder points that connect the two. When the driving inner part 103 translates or rotates in the driving outer frame 102 , the driving inner part 103 drives the electronic device 107 to translate or rotate. Electrodes are provided on the front of the electronic device 107 . The electronic device 107 establishes an electrical connection with the built-in electrical connection component 101 by wire bonding.

Fig. 3b is a second partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 3 b , on the basis of FIG. 3 a , a first groove is provided on the driving inner part 103 . The length of the first groove is 100 μm to 1000 μm longer than that of the electronic device 107 . The width of the first groove is 100 μm to 1000 μm longer than that of the electronic device 107 . The electronic device 107 is disposed in the first groove. The electronic device 107 is fixedly connected to the drive built-in part 103 through the back of the electronic device 107 . Compared with FIG. 3a, the height of the image sensor 107 can be further reduced in FIG. 3b.

Fig. 3c is a third partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 3 c , on the basis of FIG. 3 b , a second through hole is provided on the driving built-in part 103 . The length of the second through hole is shorter than the length of the electronic device 107 by B μm. The width of the second via hole is shorter than the width of the electronic device 107 by B μm. B is between 100 and 1000. The value of B can be 100 or 1000. The length of the second through hole is smaller than the length of the first groove. The second through hole and the first groove form a step. The back of the electronic device 107 is fixedly connected with the drive built-in part 103 through steps. Wherein, the back of the electronic device 107 can dissipate heat through the second through hole. Therefore, the present application can improve the heat dissipation efficiency of the electronic device 107 .

Fig. 3d is a fourth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 3d , on the basis of FIG. 3a , a third through hole is provided on the driving built-in part 103 . The length of the third through hole is 100 μm to 1000 μm longer than that of the electronic device 107 . The width of the third through hole is 100 μm to 1000 μm longer than that of the electronic device 107 . The electronic device 107 is disposed in the third through hole. The sidewall of the electronic device 107 is connected to the sidewall of the third through hole. Compared with FIGS. 3a to 3c, the height of the image sensor 107 can be further reduced in FIG. 3d.

In the foregoing description of FIGS. 3 a to 3 d , the driving built-in component 103 is provided with a first through hole. The length of the first through hole is greater than the length of the electronic device 107 . The width of the first through hole is greater than the width of the electronic device 107 . In practical applications, the length of the first through hole may be smaller than the length of the electronic device 107 . Alternatively, the width of the first through hole may be smaller than the width of the electronic device 107 . For example, Fig. 3e is a fifth partial sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 3 e , a first through hole is disposed in the electrical connection built-in component 101 . The length of the first through hole is smaller than the length of the electronic device 107 . The electronic device 107 is disposed in the first through hole. A first groove is provided in the drive built-in part 103 . The electronic device 107 is fixedly connected to the drive built-in part 103 through the back.

In the foregoing description of the actuator assembly, the electrical connections are layered on top of the MEMS actuator. In practical applications, MEMS drivers can be stacked on top of the electrical connections.

Fig. 4a is a sixth partial sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 4 a , the actuator assembly includes a MEMS driver and an electrical connection part 107 . The MEMS driver includes a driving outer frame 102 , a driving inner part 103 and a driving elastic connecting part 104 . The electrical connection components include an electrical connection outer frame 105 , an elastic connector 106 and an electrical connection built-in part 101 . In the height direction, MEMS actuators are stacked on top of the electrical connections. The connecting outer frame 105 is fixedly connected with the driving outer frame 102 . The electrical connection built-in part 101 and the drive built-in part 103 are fixedly connected. A first through hole is disposed in the driving built-in part 103 . The length of the first through hole is 100 μm to 1000 μm longer than that of the electronic device 107 . The width of the first through hole is 100 μm to 1000 μm longer than that of the electronic device 107 . The electronic device 107 is disposed in the first through hole. The electronic device 107 is fixedly connected to the electrical connection built-in part 101 through the back. When the driving built-in part 103 translates or rotates in the driving outer frame 102 , the driving built-in part 103 drives the electrical connection built-in part 101 to translate or rotate. The electrical connection built-in component 101 drives the electronic device 107 to translate or rotate. Electrodes are provided on the front surfaces of the electronic device 107 and the electrical connection built-in part 101 . The electronic device 107 establishes an electrical connection with the built-in electrical connection component 101 by wire bonding.

Fig. 4b is a seventh partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 4 b , on the basis of FIG. 4 a , a first groove is provided on the electrical connection built-in component 101 . The length of the first groove is 100 μm to 1000 μm longer than that of the electronic device 107 . The width of the first groove is 100 μm to 1000 μm longer than that of the electronic device 107 . The electronic device 107 is disposed in the first groove. The back of the electronic device 107 is fixedly connected to the built-in electrical connection part 101 . Compared with FIG. 4a, the height of the image sensor 107 can be further reduced in FIG. 4b.

Fig. 4c is an eighth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 4c , on the basis of FIG. 4b , a second through hole is provided on the electrical connection built-in component 101 . The length of the second through hole is shorter than the length of the electronic device 107 by 100 μm to 1000 μm. The width of the second through hole is shorter than the width of the electronic device 107 by 100 μm to 1000 μm. The length of the second through hole is smaller than the length of the first groove. The second through hole and the first groove form a step. The back of the electronic device 107 is fixedly connected with the built-in electrical connection part 101 through steps. Wherein, the back of the electronic device 107 can dissipate heat through the second through hole, therefore, the present application can improve the heat dissipation efficiency of the electronic device 107 .

Fig. 4d is a ninth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 4d , on the basis of FIG. 4a , a third through hole is provided on the built-in electrical connection part 101 . The length of the third through hole is 100 μm to 1000 μm longer than that of the electronic device 107 . The width of the third through hole is 100 μm to 1000 μm longer than that of the electronic device 107 . The electronic device 107 is disposed in the third through hole. The sidewall of the electronic device 107 is connected to the sidewall of the third through hole. Compared with FIGS. 4a to 4c, the height of the image sensor 107 can be further reduced in FIG. 4d.

In practical applications, the actuator assembly may also include a base. The MEMS driver and electrical connection components are arranged on the base. For example, FIG. 5 is a tenth partial cross-sectional view of the actuator assembly provided in the embodiment of the present application. As shown in FIG. 5 , the actuator assembly includes a base 501 , a MEMS driver and an electrical connection part 107 . The MEMS driver includes a driving outer frame 102 , a driving inner part 103 and a driving elastic connecting part 104 . The electrical connection components include an electrical connection outer frame 105 , an elastic connector 106 and an electrical connection built-in part 101 . In the height direction, the MEMS driver is stacked on the base 501 . The thickness of the driving outer frame 102 is greater than that of the driving inner part 103 . The driving outer frame 102 is fixedly connected to the base 501 . The driving built-in part 103 is suspended above the base 501 . Electrical connections are layered over the MEMS actuator. The electrical connection outer frame 105 is fixedly connected with the driving outer frame 102 . The electrical connection built-in part 101 and the drive built-in part 103 are fixedly connected. The electronic device 107 is laminated on the electrical connection components. The electronic device 107 is fixedly connected to the built-in electrical connection part 101 .

The driving inner part 103 and the driving outer frame 102 are electrically connected through the driving elastic connector 104 . An electrical connection is established between the driving outer frame 102 and the base 501 . The base 501 can provide a driving signal for the driving inner part 103 by driving the outer frame 102 and driving the elastic connecting part 104 .

An electrical connection is established between the electronic device 107 and the electrical connection built-in component 101 . An electrical connection is established between the electrical connection inner part 101 and the electrical connection outer frame 105 through the elastic connector 106 . Electrical Connection An electrical connection is established between the outer frame 105 and the base 501 . The base 501 is also referred to as a base. The base 501 can provide electrical signals to the electronic device 107 through the path 1 . Path 1 passes through the electrical connection outer frame 105 , the elastic connector 106 and the electrical connection inner part 101 . An electrical signal may include a signal source and a driving source. The driving source is an electrical signal that drives the electronic device 107 to work. The signal source is an electrical signal output by the electronic device 107 . In practical applications, the electronic device 107 may also directly establish an electrical connection with the base 501 via the path 2 . At this time, the electronic device 107 transmits the driving source through the path 1 . The electronic device 107 transmits the signal source through the path 2 . Alternatively, the electronic device 107 transmits the driving source through the path 2 . The electronic device 107 transmits the signal source through the path 1 .

In practical applications, a driving area is provided in the driving built-in component 103 . The driving area generates a driving force through a driving signal. The driving force drives the driving inner part 103 to translate or rotate in the driving outer frame 102 . During the operation of the drive zone, the drive zone generates heat. During the working process of the electronic device 107, the electronic device 107 also generates heat. In order to improve the heat dissipation of the electronic device 107, the electronic device 107 and the driving area can be staggered.

Fig. 6 is a third schematic structural view of the actuator assembly provided in the embodiment of the present application. As shown in Figure 6, the actuator assembly includes a MEMS driver and electrical connection components. The MEMS driver includes a driving outer frame 102 , a driving inner part 103 and a driving elastic connecting part 104 . The electrical connection components include an electrical connection outer frame 105 , an elastic connector 106 and an electrical connection built-in part 101 . In the height direction, the electrical connection components are stacked on top of the MEMS actuator. The electrical connection outer frame 105 is fixedly connected with the driving outer frame 102 . The electrical connection built-in part 101 and the drive built-in part 103 are fixedly connected. The electronic device 107 is laminated on the electrical connection components. The electronic device 107 is fixedly connected to the electrical connection built-in part 101 through the back. A drive area 601 is provided on the drive built-in part 103 .

FIG. 7 is a schematic expanded view of the actuator assembly shown in FIG. 6 . As shown in FIG. 7 , the number of driving elastic connectors 104 is eight. Each side wall of the driving built-in part 103 is connected with two driving elastic connecting parts 104 . Four drive regions 601 are provided on the drive built-in component 103 . Each driving area 601 is between two driving elastic connectors 104 . The electronic device 107 projects the area on the MEMS driver as the target area. It can be seen from FIG. 7 and FIG. 6 that the driving area 601 is outside the target area.

It can be seen from the previous description of FIG. 1a that the number of elastic connectors 106 in FIG. 1a is just an example. In practical applications, the electrical connection component may also include other numbers of elastic connectors 106 . For example, in FIG. 7, the number of elastic connectors 106 is twenty. Wherein, 5 elastic connectors 106 form a group. Each set of elastic connectors 106 is connected to a side wall of the electrical connection built-in part 101 .

The foregoing describes the actuator assembly provided in this application. The anti-shake module provided in this application is described below. FIG. 8 is a schematic structural diagram of the anti-shake module provided in this application. As shown in FIG. 8 , the anti-shake module includes a lens assembly 804 , a filter 803 , a casing 801 and an actuator assembly 802 . The actuator assembly 802 is disposed in the housing 801 . The filter 803 is fixedly connected to the housing 801 . The filter 803 is disposed on the actuator assembly 802 . The distance between the filter 803 and the actuator assembly 802 is between 0.05mm and 25mm. The lens assembly 804 is fixedly connected to the casing 801 . The lens assembly 804 is disposed on the filter 803 . The distance between the lens assembly 804 and the optical filter 803 is between 0.5mm and 25mm. The lens assembly 804 is used to receive the light beam and irradiate the light beam to the filter 803 . The light beam reaches the actuator assembly 802 after passing through the optical filter 803 . Electronics are provided on the actuator assembly 802 . Electronics are used to obtain electrical signals from the light beams. Actuator assembly 802 includes a MEMS driver. The MEMS driver is used to drive the electronic device to translate or rotate, so that the electronic device and the housing 801 generate relative motion.

It should be understood that, for the description of the actuator assembly 802 in FIG. 8 , reference may be made to the relevant descriptions in the aforementioned FIGS. 1a-7 . For example, actuator assembly 802 includes a MEMS driver and electrical connections. The actuator assembly 802 provides electrical signals to the electronic device 107 through electrical connection components. For example, actuator assembly 802 also includes a base. The MEMS driver and electrical connection components are arranged on the base.

The anti-shake module provided in this application is described above. The terminals provided in this application are described below. FIG. 9 is a schematic structural diagram of a terminal provided in this application. As shown in FIG. 9 , a terminal 900 includes a power supply 901 , an anti-shake module 902 and a processor 903 . The power supply 901 is used to provide a driving source for the anti-shake module 902 . Power source 901 may be a rechargeable battery. The anti-shake module 902 is used to obtain a signal source containing image information according to a driving source. For the description of the anti-shake module 902, reference may be made to the related description in FIG. 8 above.

The processor 903 is configured to perform data processing on the signal source to obtain target data. Data processing includes editing, compositing, beautifying, sharing, or naming, etc. The processor 903 may be a central processing unit (central processing unit, CPU), a network processor (network processor, NP) or a combination of CPU and NP. The processor 903 may further include a hardware chip or other general-purpose processors. The aforementioned hardware chip may be an application specific integrated circuit (ASIC), a programmable logic device (PLD) or a combination thereof.

In other embodiments, the terminal 900 may further include a memory. The memory is used to store object data. Memory can be volatile memory or nonvolatile memory, or can include both volatile and nonvolatile memory. Wherein, the non-volatile memory can be read-only memory (read-only memory, ROM), programmable read-only memory (programmable ROM, PROM), erasable programmable read-only memory (erasable PROM, EPROM), or flash memory wait. The volatile memory may be random access memory (RAM).

The terminals provided in this application are described above. The preparation method of the actuator assembly provided in this application is described below. Fig. 10 is a schematic flow chart of the method for preparing the actuator assembly provided in this application. As shown in FIG. 10 , the manufacturing method of the actuator assembly includes the following steps.

In step 1001, an electrical connection component and a MEMS driver are provided, and the MEMS driver includes a driving outer frame and a driving inner part. The electrical connection part includes an electrical connection outer frame and an electrical connection built-in part. Wherein, the MEMS driver can be connected by driving the elastic connector. The electrical connection parts can be connected by elastic connectors. The driving elastic connector and the elastic connector are conductive materials.

In step 1002, the electrical connection component is connected to the MEMS driver. Wherein, the electrical connection outer frame is connected with the driving outer frame, and the electrical connection inner part is connected with the driving inner part. The way of connection may be adhesion, welding, or bonding. In the height direction, electrical connection components may be stacked on top of the MEMS actuator. Alternatively, MEMS actuators are layered over the electrical connections. During the process of connecting the electrical connection part and the MEMS driver, the electrical connection part and the MEMS driver cannot be misaligned too much in the length or width direction. Therefore, it is necessary to find a reference to determine whether there is misalignment during the connection process. For this reason, the length of the electrical connection outer frame may be equal to the length of the driving outer frame. The width of the electrical connection outer frame may be equal to the width of the driving outer frame. Alternatively, the length of the electrical connection insert may be equal to the length of the drive insert. The width of the electrical connection insert may be equal to the width of the driver insert.

It should be understood that, for the description of the method for preparing the actuator assembly, reference may be made to the foregoing description of the actuator assembly in FIGS. 1a-7.

For example, in FIG. 1 b , an electronic device 107 is disposed on the built-in electrical connection part 101 . Therefore, the manufacturing method may further include the step of mounting the electronic device on the electrical connection built-in. An electrical connection is established between the electronic device and the electrical connection built-in.

For example, in FIG. 3a, when the electrical connection component is stacked on the MEMS driver, the electrical connection built-in component 101 is provided with a first through hole. At this time, in the manufacturing method of the actuator assembly, the manufacturing method may further include: processing the first through hole on the built-in electrical connection part. The electronic device is installed into the first through hole through the back of the electronic device.

For example, in FIG. 3 b , the driving built-in part 103 is provided with a first groove. The electronic device 107 is disposed in the first groove. At this time, in the manufacturing method of the actuator assembly, the manufacturing method may further include: machining the first groove on the driving built-in part. Mount the electronics into the first recess of the drive insert through the back of the electronics.

For example, in FIG. 4a, when the MEMS driver is stacked on the electrical connection component, the driver built-in component 103 is provided with a first through hole. At this time, in the manufacturing method of the actuator assembly, the manufacturing method may further include: processing the first through hole on the built-in electrical connection part. The electronic device is mounted to the electrical connection insert through the back of the electronic device.

The above is only the specific implementation of the application, but the scope of protection of the application is not limited thereto. Anyone familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the application, and should cover Within the protection scope of this application.

Claims (29)

1. An actuator assembly is characterized in that it includes a microelectromechanical system MEMS driver and an electrical connection part, wherein:

   The MEMS driver includes a driving outer frame and a driving inner part, and the driving inner part is arranged in the driving outer frame;

   The electrical connection part includes an electrical connection outer frame, an elastic connector and an electrical connection inner part, the electrical connection inner part is arranged in the electrical connection outer frame, and the electrical connection inner part is connected to the electrical connection inner part through the elastic connector Establishing an electrical connection with the electrical connection outer frame;

   The electrical connection component is stacked with the MEMS driver, the electrical connection outer frame is connected to the drive outer frame, and the electrical connection built-in part is connected to the drive built-in part.
2. The actuator assembly according to claim 1, wherein the electrical connection built-in or the driving built-in is used to connect with an electronic device;

   The electrical connection built-in component is used to establish electrical connection with the electronic device.
3. The actuator assembly according to claim 2, wherein the stacking of the electrical connection component and the MEMS driver comprises: the electrical connection component is stacked on the MEMS driver;

   A first through hole is arranged on the electrical connection built-in part, and the electronic device is arranged in the first through hole.
4. The actuator assembly according to claim 3, wherein the electrical connection built-in part or the driving built-in part for connecting with an electronic device comprises: the driving built-in part for connecting with the electronic device.
5. The actuator assembly according to claim 3 or 4, wherein the length of the first through hole is longer than the length of the electronic device by A μm, or the width of the first through hole is longer than the length of the electronic device The width of the device is A μm long, where A ranges from 100 to 1000.
6. The actuator assembly according to claim 4 or 5, wherein a first groove is arranged on the driving built-in part, and the electronic device is arranged in the first groove.
7. The actuator assembly according to claim 6, wherein a second through hole is provided on the driving built-in part, and the area of the second through hole is smaller than the area of the first groove, and the first through hole is The second through hole and the first groove form a step;

   The driving built-in part being used to connect with the electronic device comprises: the driving built-in part being used to be connected to the back of the electronic device through the step.
8. The actuator assembly according to claim 7, wherein the length of the second through hole is B μm shorter than the length of the electronic device, or the width of the second through hole is shorter than the length of the electronic device The width is short by B μm, said B being between 100 and 1000.
9. The actuator assembly according to claim 4 or 5, wherein a third through hole is arranged on the driving built-in part, and the electronic device is arranged in the third through hole;

   The driving built-in part being used for connecting with the electronic device includes: the driving built-in part being used for connecting with the side wall of the electronic device through the side wall of the third through hole.
10. The actuator assembly according to any one of claims 4 to 9, wherein the electrical connection built-in part is used to establish an electrical connection with the electronic device comprises: the electrical connection built-in part is used to Electrical connections are established with the electronic device in the form of wires.
11. The actuator assembly according to any one of claims 2 to 10, wherein a drive area is set on the drive built-in part, the drive area is outside the target area, and the target area is the electron The projected area of the device on the drive built-in.
12. The actuator assembly according to claim 2, wherein the stacking of the electrical connection component and the MEMS driver comprises: the MEMS driver is stacked on the electrical connection component, and the drive built-in component is provided with There is a first through hole, and the electronic device is arranged in the first through hole.
13. The actuator assembly according to claim 12, wherein the electrical connection built-in part or the driving built-in part for connecting with an electronic device comprises: the electrical connection built-in part for connecting with the electronic device .
14. The actuator assembly according to claim 13, wherein a first groove is arranged on the built-in electrical connection part, and the electronic device is arranged in the first groove.
15. The actuator assembly according to claim 14, wherein a second through hole is provided on the built-in electrical connection, the area of the second through hole is smaller than the area of the first groove, and the the second through hole and the first groove form a step;

    The built-in electrical connection part for connecting with the electronic device comprises: the built-in electrical connection part for connecting with the back of the electronic device through the step.
16. The actuator assembly according to claim 13, wherein a third through hole is arranged on the electrical connection built-in part, and the electronic device is arranged in the third through hole;

    The electrical connection built-in part for connecting with the electronic device includes: the electrical connection built-in part for connecting with the side wall of the electronic device through the side wall of the third through hole.
17. The actuator assembly according to any one of claims 2 to 16, wherein the built-in electrical connection part is used to establish an electrical connection with the electronic device comprises: the built-in electrical connection part is used to connect with the electronic device The electronic device establishes an electrical connection with a signal source and a driving source.
18. The actuator assembly according to any one of claims 1 to 17, characterized in that the material of the electrical connection part is single crystal silicon or polycrystalline silicon.
19. The actuator assembly according to any one of claims 1 to 18, wherein the length or width of the electrical connection outer frame is between 4 mm and 30 mm.
20. The actuator assembly according to any one of claims 1 to 19, characterized in that the number of the elastic connectors is a multiple of four.
21. The actuator assembly according to any one of claims 1 to 20, wherein the length of the electrical connection outer frame is equal to the length of the driving outer frame, or the width of the electrical connection outer frame is equal to The width of the drive outer frame.
22. The actuator assembly according to any one of claims 1 to 21, characterized in that the thickness of the electrical connection part is between 100 μm and 1000 μm.
23. The actuator assembly according to any one of claims 1 to 22, wherein the actuator assembly further comprises a base;

    The MEMS driver and the electrical connection part are arranged on the base.
24. An anti-shake module, characterized in that it includes a lens assembly, a filter, a housing, and the actuator assembly according to any one of claims 1 to 23;

    The actuator assembly is arranged in the housing, the filter is arranged on the actuator assembly, and the lens assembly is arranged on the filter.
25. A terminal, characterized by comprising a power supply, a processor, and the anti-shake module of claim 24, wherein:

    The power supply is used to provide a driving source for the anti-shake module;

    The anti-shake module is used to obtain a signal source containing image information according to the driving source;

    The processor is used to perform data processing on the signal source.
26. A method for preparing an actuator assembly, comprising:

    An electrical connection component and a MEMS driver are provided, the MEMS driver includes a drive outer frame and a drive inner part, the drive inner part is arranged in the drive outer frame, and the electrical connection part includes an electrical connection outer frame, an elastic connector and An electrical connection built-in part, the electrical connection built-in part is arranged in the electrical connection outer frame, and the electrical connection built-in part establishes an electrical connection with the electrical connection outer frame through the elastic connector;

    The electrical connection component is connected to the MEMS driver, wherein the electrical connection outer frame is connected to the drive outer frame, and the electrical connection internal part is connected to the drive internal part.
27. The preparation method according to claim 26, wherein the method further comprises:

    connecting an electronic device to said drive built-in or said electrical connection built-in;

    An electrical connection is established between the electrical connection built-in and the electronic device.
28. The preparation method according to claim 27, wherein the connecting the electrical connection component to the MEMS driver comprises: stacking the electrical connection component on the MEMS driver;

    The method also includes:

    machining a first through hole on the built-in electrical connection;

    The connecting the electronic device to the drive built-in or the electrical connection built-in includes: mounting the electronic device to the drive built-in through the back of the electronic device, wherein the electronic device is located on the drive built-in inside the first through hole.
29. The preparation method according to claim 28, wherein the method further comprises:

    machining a first groove on the drive inner part;

    The connecting the electronic device with the drive built-in part or the electrical connection built-in part includes: installing the electronic device into the first groove of the drive built-in part through the back of the electronic device.

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