WO2023072322A2 - Method of accelerated non-destructive measurement of a layered structure on a massive substrate and a device for the implementation of the method - Google Patents

Method of accelerated non-destructive measurement of a layered structure on a massive substrate and a device for the implementation of the method Download PDF

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Publication number
WO2023072322A2
WO2023072322A2 PCT/CZ2022/050106 CZ2022050106W WO2023072322A2 WO 2023072322 A2 WO2023072322 A2 WO 2023072322A2 CZ 2022050106 W CZ2022050106 W CZ 2022050106W WO 2023072322 A2 WO2023072322 A2 WO 2023072322A2
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camera
analysed
item
penetrating radiation
semi
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PCT/CZ2022/050106
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French (fr)
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WO2023072322A3 (en
Inventor
Daniel Vavrik
Tomas FILA
Vaclav RADA
Petr ZLAMAL
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Ustav Teoreticke A Aplikovane Mechaniky Av Cr, V.V.I.
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Priority to PCT/CZ2022/050106 priority Critical patent/WO2023072322A2/en
Publication of WO2023072322A2 publication Critical patent/WO2023072322A2/en
Publication of WO2023072322A3 publication Critical patent/WO2023072322A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/615—Specific applications or type of materials composite materials, multilayer laminates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/646—Specific applications or type of materials flaws, defects
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation

Definitions

  • the invention presents a method of non-destructive analysis of a layered structure that is present on a substrate that is massive compared to the layered structure in terms of the ratio of a total thickness of the layered structure and that of the substrate.
  • Non-destructive analysis of a layered structure i.e. stratigraphy
  • a massive and structured substrate such as wood
  • a good example of such a layered structure is polychromy found in medieval panel paintings and sculptures.
  • a total thickness of polychromy is in this case in the order of tenths of a millimetre while a thickness of individual layers is in the order of units of micrometers up to tens of micrometers.
  • the layered composition of polychromy cannot be described with a sufficient resolution using the commonly employed computed tomography method.
  • invention CZ 308 631 B6 has been registered that overcomes the disadvantages of computed tomography methods and allows to distinguish the layers of layered structure deposited onto a massive substrate.
  • the invention uses a narrow planar beam of penetrating radiation with two parallel sharp and planar edges. Thanks to the known thickness of the beam, and thanks to the known angle of incidence on the layered structure, and also thanks to the known position of the pixelated camera for secondary radiation imaging, it is possible to determine the number of layers of the layered structure, their composition, and their thickness by analysing the behaviour of the signal obtained by the pixelated camera.
  • the slow rate of measurement performed by the said known invention is its weak point, in particular with serially produced products or in analysed items with large dimensions.
  • the purpose of the invention is to create a method of accelerated non-destructive testing of a layered structure on a massive substrate, including a device for the method implementation that would maintain a majority of the advantages provided by the previous invention and, however, would be able to analyse the surfaces of analysed items in a shorter working time.
  • the determined goal has been achieved by the method of accelerated non-destructive measurement of a layered structure on a massive substrate and a device for the implementation of the method of the present invention.
  • the method of accelerated non-destructive measurement of a layered structure on a massive substrate consists of the following procedure steps: a) at least a part of the analysed item surface is irradiated by a beam of penetrating radiation with an acute angle of incidence; the incident penetrating radiation induces a response during which the penetrating radiation can scatter by the analysed item material or can cause the emission of secondary radiation, b) the emitted or scattered radiation coming from the surface of the of the analysed item is detected by at least one camera for detection of such emitted or scattered radiation, c) the signal detected by the camera is analysed for each camera pixel to obtain the results of a non-destructive measurement of the layered structure covering the object under analysis.
  • a semi-conical beam of penetrating radiation with one sharp plane edge is modelled.
  • the semi-conical shape of a beam with a sharp planar edge brings two advantages: firstly, a beam of penetrating radiation shaped in this manner can irradiate a much larger area of the surface of the object to be analysed as than the narrow planar beam known from the invention CZ 308 631 B6. Therefore, it is possible to irradiate a large area of the analysed object in a relatively short time.
  • a semi-conical beam of penetrating radiation maintains its sharp edge for the subsequent detailed measurement in the same manner as provided in the CZ 308 631 B6 patent for which such a detailed measurement is essential, i.e. to determine whether the irradiated layers on the analysed object contain anomalies.
  • step b) anomalies are searched for in the signal recorded by pixelated camera. Anomalies are manifested by non-standard signal values of emitted or scattered radiation, the coordinates of their occurrence are recorded for subsequent analysis in step c) using the planar sharp edge of the semi-conical beam.
  • This arrangement is advantageous, for example, for the inspection of mass-produced parts where a signal value outside the standard limits indicates a defect or other anomaly.
  • the procedure step c) is performed when the coordinates of the identified anomaly are scanned by the sharp edge of the semi-conical beam with the angle of incidence within a range of 0° and 15° to ascertain detailed information on the layered structure in the anomalies.
  • Such detailed measurements allow to determine whether an anomaly in the structure is disqualifying the analysed item from the manufacturing process, or an anomaly with no impact on the quality of the analysed item is concerned. This means that it is possible to further classify anomalies whose type is not apparent at first sight.
  • the main benefit of the invention is the increased speed of measurement that is higher compared to the original invention CZ 308 631 B6.
  • the new invention at first irradiates and scans a large area of the surface of the analysed item to discover anomalies, which are then purposefully precisely measured by the sharp planar edge, although this is a time-consuming process in itself.
  • the invention reduces the time of measurement by leaving out the portions of the analysed item that show no presence of anomalies.
  • an imaging X-ray camera sensitive to low-energy X-ray photons with resolution in the order of tens of pm is used. It is possible to use low-energy X-ray radiation, which, in particular with organic substrates such as for example wood or carbon-fibre laminated material, does not generate significant amount of the scattered radiation.
  • a collimator equipped with at least two Soller slits is used for modelling the semi-conical beam of penetrating radiation with sharp edge.
  • the essence of the invention is that the collimator is equipped with at least two Soller slits, which ensure that the semi-conical beam of penetrating radiation is planar at its edge and that this edge is sharp and planar. If the sharp edge of the semi-conical beam would be modelled by the simple sharp edge collimator only, the plane beam of penetrating radiation would become defocused with an increasing distance from the collimator, which would have a negative impact on the accuracy of measurement.
  • the use of Soller slits allows the sharp planar edge of the semi-conical beam to remain in focused at sufficient distance, which allows accurate measurement to be made according to the invented method.
  • the invention includes a device for accelerated non-destructive measurement of a layered structure on a massive substrate comprising a source of penetrating radiation equipped with a collimator for shaping a beam of penetrating radiation emitted by the source of penetrating radiation.
  • the device further comprises at least one pixelated camera recording a signal originating from emitted or scattered penetrating radiation emanating from the object to be analysed.
  • the device also comprises a carrier table to carry and position the analysed item, and an evaluation unit connected to the camera to receive and analyse the signal.
  • the collimator is provided with at least two Soller slits, which provide a planar part of the beam with sharp planar edge of the semi-conical beam of penetrating radiation.
  • the penetrating radiation source and the camera in the device form an assembly with a fixed geometry, mounted on a carrier table, the position of the carrier table being then controlled by a dedicated control unit.
  • the quality of the sharp planar edge of the semi-conical beam of penetrating radiation is improved; the planar edge must be as sharp as possible to have accurate measurement.
  • the source of the penetrating radiation and the camera are rigidly arranged relative to each other to eliminate signal distortion caused by their relative spatial displacement.
  • the camera is equipped with means for image zooming.
  • Image zooming in is advantageous in particular when analysing specific anomalies, while image zooming out is advantageous when a larger portion of the irradiated surface of the analysed item is measured at a time.
  • the invention accelerates non-destructive measurement of a layered structure for deployment in industrial production where series of products are manufactured, while retaining the high resolution of the measurement.
  • Fig. 1 shows a side view of a simplified diagram of the device according to the invention
  • Fig. 2 shows a simplified detail diagram of a collimator equipped with Soller slits to model the semi-conical beam of penetrating radiation so that it has a sharp planar edge
  • Fig. 3 shows a diagrammatic representation of a change in the signal from the camera pixels for the penetration of the plane beam through the layers of a layered structure
  • Fig. 4 shows an axonometric view of the diagrammatic representation of the device according to the invention
  • Fig. 5 shows a detail of the collimator of Fig. 4.
  • Fig. 1 shows a schematic representation of the device for the implementation of the method of accelerated non-destructive measurement of a layered structure on the surface of an analysed item 6, being for example a painting on a wooden panel, a painting on canvas, ship shells, sandwich structure, etc.
  • the thickness of the layers of a layered structure on a surface is multiple times lower than the thickness of the supporting substrate of the analysed item 6.
  • a beam of penetrating radiation is emitted and modelled by the collimator 2 into a semi-conical beam 4 of penetrating radiation with a sharp planar edge 5 of penetrating radiation.
  • the semi-conical beam 4 interacts with the surface of the analysed item 6, through which it starts penetrating.
  • secondary radiation comprising fluorescent radiation, scattered particles, and/or reflected penetrating radiation, is emitted in the material found along the path of the semi-conical beam 4.
  • Such secondary radiation is registered by a camera 3 for displaying the emitted and scattered penetrating radiation. The signal from the camera 3 is subsequently evaluated.
  • the evaluation unit e.g. a computer with a data repository for measurement data archiving and for saving the software based on whose instructions the computer processor evaluates the measured signal, is used for evaluation.
  • the evaluation unit is not illustrated as it can refer to a remote component of the device to which data can be transmitted, for example via the Ethernet.
  • a carrier table on which the analysed item 6 is positioned.
  • the carrier table is not illustrated for the sake of conciseness and clarity of the drawings. Basically, a common carrier table driven by actuators to set the relative position of the analysed item 6 against the source 1_ of radiation or the camera 3 in Cartesian coordinates directions x, y, and z is concerned.
  • the carrier table can tilt the analysed item 6 relatively against the incident penetrating radiation, thus changing the angle of incidence a.
  • Secondary radiation is emitted also by the sharp edge 5 of semi-conical beam 4, but during the initial phase of measurement such secondary radiation is not used as the surface of the analysed item 6 irradiated by the sharp edge 5 is many times smaller than the surface of the analysed item 6 hit by the semi-conical beam 4.
  • Fig. 2 shows a detail of the collimator 2 in side view where it is obvious that the collimator 2 is equipped with Soller slits 7 to model the sharp edge 5 of the semi-conical beam 4.
  • Fig. 2 shows the technical characteristics and their arrangement that are intentionally magnified for clarity and easy understanding of the invention. This is not an accurate mutually proportionate representation; however, the presented principle remains unchanged.
  • the number of Soller slits 7 is a result of professional discretion depending on a specific application as the general rule is that the higher the number of Soller slits collimating the beam of penetrating radiation, the lower the tendency of the resulting beam to diverge.
  • Fig. 4 and Fig. 5 show an axonometric view of the presented device.
  • Fig. 4 shows the portion of the surface of the analysed item 6 irradiated by the semi-conical beam 4 forming the observed area 8. Additionally, Fig. 4 shows the beginning 9 of the zone of detailed scanning and the end 10 of the zone of detailed scanning by the sharp edge 5.
  • the invention works as follows: at first, at least a portion of the surface of the analysed item 6 is irradiated by the semi-conical beam 4 and at the same time the emitted or scattered penetrating radiation is detected by the camera 3. The signal of each pixel of the camera 3 is analysed and compared to the expected standard behaviour of the signal. If the detected signal exhibits an anomaly, the anomaly is localized by means of coordinates for subsequent localization on the surface of the analysed item 6. Once the anomalies have been localized, their detailed measurement starts using the sharp edge 5 of the semi-conical beam 4.
  • the direction of radiation spreading through the space is provided.
  • the thickness St of the sharp edge 5 remains constant.
  • the angle a of incidence is acute and the size of it is in the order of units of degrees.
  • the analysed item 6 is covered by two superficial layers whose thicknesses are ti and k, respectively.
  • the accuracy of measurement is affected by the quality of the total signal in which the passages 6 of the signal concerning transmission through the layered structure are searched for.
  • the source j_ of penetrating radiation is an X-ray tube operated at a voltage of 40 kV and a current of 0.5 mA.
  • the beam of penetrating radiation was modelled using the slit collimator 2 equipped with Soller slits 7 to create a semi-conical beam 4 of penetrating radiation with a sharp edge 5 with a thickness of 0.5 mm.
  • the analysed item 6 was arranged onto the carrier table with the semi-conical beam 4 of penetrating radiation hitting the place of interest of the analysed item at the angle of incidence a being 15°. To analyse the anomalies, the sharp edge 5 hit the irradiated surface of the analysed item 6 at the angle of incidence a being 8°.
  • the camera 3 referred to a pinhole RTG camera oriented perpendicularly to the surface of the analysed item 6, i.e. the detector of the RTG camera was oriented in parallel to the sharp edge 5 of the semi-conical beam 4 of penetrating radiation.
  • the RTG camera was installed onto a carrier table that guided the camera 3 to obtain an undisturbed receipt of secondary radiation.
  • the RTG camera 3 was fitted with the Timepix detector with a thickness of the silicon chip of 300 pm with a resolution of 256 x 256 square pixels with a side length of 55 pm. Secondary radiation was projected through the pinhole of the RTG camera 3 with a diameter of 100 pm.
  • the detection threshold of the RTG camera 3 was set at 3 keV to filter off the noise generated by the detector.
  • the observed surface of the place of interest of the analysed item 6 was zoomed in 1.4 times given by the distance of the RTG camera pinhole to the analysed item 6 to obtain the ratio in which one pixel of the RTG camera detector corresponds to 40 pm on the surface of the place of interest of the analysed item 6.
  • the method of accelerated non-destructive analysis of a layered structure and a device for the implementation of the method according to the invention will find application in the field of analysis of the quality of surface treatment applied onto a massive substrate, e.g. with the measurement of a thickness of protective coatings or for the analysis of the quality of composite sandwich structures.

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Abstract

The invented method and device accelerate the non-destructive measurement of layered structures on massive substrates by at first irradiating the analysed item (6) by a semi-conical beam (4) of penetrating radiation to localize anomalies possibly present in the layered structure of the analysed item (6). The localized anomalies of the analysed item (6) are measured in detail by the sharp edge of the semi-conical beam (4) formed by the plane beam (5) according to the invented method. The semi-conical beam (4) with a sharp edge formed by the plane beam (5) is modelled using a collimator (2) fitted with at least two Seller slits.

Description

Method of accelerated non-destructive measurement of a layered structure on a massive substrate and a device for the implementation of the method
Field of the Invention
The invention presents a method of non-destructive analysis of a layered structure that is present on a substrate that is massive compared to the layered structure in terms of the ratio of a total thickness of the layered structure and that of the substrate.
Background of the Invention
Non-destructive analysis of a layered structure (i.e. stratigraphy) covering a massive and structured substrate, such as wood, is rather a complex task. A good example of such a layered structure is polychromy found in medieval panel paintings and sculptures. A total thickness of polychromy is in this case in the order of tenths of a millimetre while a thickness of individual layers is in the order of units of micrometers up to tens of micrometers. Considering the significant disparity between a thickness of polychromy and that of a wooden substrate, the layered composition of polychromy cannot be described with a sufficient resolution using the commonly employed computed tomography method.
For the above-mentioned reason, invention CZ 308 631 B6 has been registered that overcomes the disadvantages of computed tomography methods and allows to distinguish the layers of layered structure deposited onto a massive substrate. The invention uses a narrow planar beam of penetrating radiation with two parallel sharp and planar edges. Thanks to the known thickness of the beam, and thanks to the known angle of incidence on the layered structure, and also thanks to the known position of the pixelated camera for secondary radiation imaging, it is possible to determine the number of layers of the layered structure, their composition, and their thickness by analysing the behaviour of the signal obtained by the pixelated camera.
Although the aforementioned invention has proven itself in practice as very well-functioning, a disadvantage of the solution, resting in a very slow rate of data acquisition concerning information about the layered structure, was discovered soon. Nevertheless, the invention with its speed and simplification of work still exceeds the respective state-of-the-art.
It turns out that the narrow planar beam of the invention is incident on relatively thin zone of the analysed item. Such a fact is irrelevant in particular for artworks. Analysis of such items, considering their irreplaceableness, must be precise and not hasty at all.
On the other hand, if the invention is to be employed under industrial conditions, such as for a check of the quality of varnished and coated surfaces, for example in the automotive industry, or in the quality control of coatings and integrity of ship shells, and also for a check of the quality of sandwich composite parts, for example in aircraft wing skins, etc., the slow rate of measurement performed by the said known invention is its weak point, in particular with serially produced products or in analysed items with large dimensions.
The purpose of the invention is to create a method of accelerated non-destructive testing of a layered structure on a massive substrate, including a device for the method implementation that would maintain a majority of the advantages provided by the previous invention and, however, would be able to analyse the surfaces of analysed items in a shorter working time.
Summary of the Invention
The determined goal has been achieved by the method of accelerated non-destructive measurement of a layered structure on a massive substrate and a device for the implementation of the method of the present invention.
The method of accelerated non-destructive measurement of a layered structure on a massive substrate consists of the following procedure steps: a) at least a part of the analysed item surface is irradiated by a beam of penetrating radiation with an acute angle of incidence; the incident penetrating radiation induces a response during which the penetrating radiation can scatter by the analysed item material or can cause the emission of secondary radiation, b) the emitted or scattered radiation coming from the surface of the of the analysed item is detected by at least one camera for detection of such emitted or scattered radiation, c) the signal detected by the camera is analysed for each camera pixel to obtain the results of a non-destructive measurement of the layered structure covering the object under analysis.
The essence of the invention rests in the fact that for the procedure step a) a semi-conical beam of penetrating radiation with one sharp plane edge is modelled. The semi-conical shape of a beam with a sharp planar edge brings two advantages: firstly, a beam of penetrating radiation shaped in this manner can irradiate a much larger area of the surface of the object to be analysed as than the narrow planar beam known from the invention CZ 308 631 B6. Therefore, it is possible to irradiate a large area of the analysed object in a relatively short time. In addition, a semi-conical beam of penetrating radiation maintains its sharp edge for the subsequent detailed measurement in the same manner as provided in the CZ 308 631 B6 patent for which such a detailed measurement is essential, i.e. to determine whether the irradiated layers on the analysed object contain anomalies.
Then the procedure step b) is performed, anomalies are searched for in the signal recorded by pixelated camera. Anomalies are manifested by non-standard signal values of emitted or scattered radiation, the coordinates of their occurrence are recorded for subsequent analysis in step c) using the planar sharp edge of the semi-conical beam. Such this arrangement is advantageous, for example, for the inspection of mass-produced parts where a signal value outside the standard limits indicates a defect or other anomaly.
Then the procedure step c) is performed when the coordinates of the identified anomaly are scanned by the sharp edge of the semi-conical beam with the angle of incidence within a range of 0° and 15° to ascertain detailed information on the layered structure in the anomalies. Such detailed measurements allow to determine whether an anomaly in the structure is disqualifying the analysed item from the manufacturing process, or an anomaly with no impact on the quality of the analysed item is concerned. This means that it is possible to further classify anomalies whose type is not apparent at first sight.
The main benefit of the invention is the increased speed of measurement that is higher compared to the original invention CZ 308 631 B6. Basically, the new invention at first irradiates and scans a large area of the surface of the analysed item to discover anomalies, which are then purposefully precisely measured by the sharp planar edge, although this is a time-consuming process in itself. The invention reduces the time of measurement by leaving out the portions of the analysed item that show no presence of anomalies.
Preferably, an imaging X-ray camera sensitive to low-energy X-ray photons with resolution in the order of tens of pm is used. It is possible to use low-energy X-ray radiation, which, in particular with organic substrates such as for example wood or carbon-fibre laminated material, does not generate significant amount of the scattered radiation.
In a preferred embodiment, a collimator equipped with at least two Soller slits is used for modelling the semi-conical beam of penetrating radiation with sharp edge. The essence of the invention is that the collimator is equipped with at least two Soller slits, which ensure that the semi-conical beam of penetrating radiation is planar at its edge and that this edge is sharp and planar. If the sharp edge of the semi-conical beam would be modelled by the simple sharp edge collimator only, the plane beam of penetrating radiation would become defocused with an increasing distance from the collimator, which would have a negative impact on the accuracy of measurement. The use of Soller slits allows the sharp planar edge of the semi-conical beam to remain in focused at sufficient distance, which allows accurate measurement to be made according to the invented method.
The invention includes a device for accelerated non-destructive measurement of a layered structure on a massive substrate comprising a source of penetrating radiation equipped with a collimator for shaping a beam of penetrating radiation emitted by the source of penetrating radiation. The device further comprises at least one pixelated camera recording a signal originating from emitted or scattered penetrating radiation emanating from the object to be analysed. The device also comprises a carrier table to carry and position the analysed item, and an evaluation unit connected to the camera to receive and analyse the signal.
The essence of the invention is that the collimator is provided with at least two Soller slits, which provide a planar part of the beam with sharp planar edge of the semi-conical beam of penetrating radiation. Furthermore, the penetrating radiation source and the camera in the device form an assembly with a fixed geometry, mounted on a carrier table, the position of the carrier table being then controlled by a dedicated control unit..
Due to the fact that the collimator is equipped with Soller slits, the quality of the sharp planar edge of the semi-conical beam of penetrating radiation is improved; the planar edge must be as sharp as possible to have accurate measurement. In addition, it is important for the invention that the source of the penetrating radiation and the camera are rigidly arranged relative to each other to eliminate signal distortion caused by their relative spatial displacement. Whereby the subsequent positioning of the sharp edge of the semi-conical beam to the coordinates of the detected anomalies is realized by a carrier table, which is controlled by instructions from the evaluation unit.
In a possible extended preferred embodiment of the device according to the present invention the camera is equipped with means for image zooming. Image zooming in is advantageous in particular when analysing specific anomalies, while image zooming out is advantageous when a larger portion of the irradiated surface of the analysed item is measured at a time.
Compared to the known state-of-the-art, the invention accelerates non-destructive measurement of a layered structure for deployment in industrial production where series of products are manufactured, while retaining the high resolution of the measurement. Brief Description of Figures
The present invention will be explained in detail by means of the following figures where:
Fig. 1 shows a side view of a simplified diagram of the device according to the invention,
Fig. 2 shows a simplified detail diagram of a collimator equipped with Soller slits to model the semi-conical beam of penetrating radiation so that it has a sharp planar edge,
Fig. 3 shows a diagrammatic representation of a change in the signal from the camera pixels for the penetration of the plane beam through the layers of a layered structure,
Fig. 4 shows an axonometric view of the diagrammatic representation of the device according to the invention,
Fig. 5 shows a detail of the collimator of Fig. 4.
Examples of the Invention Embodiment
It shall be understood that the specific cases of the invention embodiments described and depicted below are provided for illustration only and do not limit the invention to the examples provided here. Persons skilled in the art will find or, based on routine experiments, will be able to provide a greater or lesser number of equivalents to the specific embodiments of the invention which are described here.
Fig. 1 shows a schematic representation of the device for the implementation of the method of accelerated non-destructive measurement of a layered structure on the surface of an analysed item 6, being for example a painting on a wooden panel, a painting on canvas, ship shells, sandwich structure, etc. The thickness of the layers of a layered structure on a surface is multiple times lower than the thickness of the supporting substrate of the analysed item 6.
From the source j_ of penetrating radiation, a beam of penetrating radiation is emitted and modelled by the collimator 2 into a semi-conical beam 4 of penetrating radiation with a sharp planar edge 5 of penetrating radiation. The semi-conical beam 4 interacts with the surface of the analysed item 6, through which it starts penetrating. At the same time, secondary radiation comprising fluorescent radiation, scattered particles, and/or reflected penetrating radiation, is emitted in the material found along the path of the semi-conical beam 4. Such secondary radiation is registered by a camera 3 for displaying the emitted and scattered penetrating radiation. The signal from the camera 3 is subsequently evaluated.
The evaluation unit, e.g. a computer with a data repository for measurement data archiving and for saving the software based on whose instructions the computer processor evaluates the measured signal, is used for evaluation. The evaluation unit is not illustrated as it can refer to a remote component of the device to which data can be transmitted, for example via the Ethernet.
Another not illustrated component of the invented device is a carrier table on which the analysed item 6 is positioned. The carrier table is not illustrated for the sake of conciseness and clarity of the drawings. Basically, a common carrier table driven by actuators to set the relative position of the analysed item 6 against the source 1_ of radiation or the camera 3 in Cartesian coordinates directions x, y, and z is concerned. In addition, the carrier table can tilt the analysed item 6 relatively against the incident penetrating radiation, thus changing the angle of incidence a.
Secondary radiation is emitted also by the sharp edge 5 of semi-conical beam 4, but during the initial phase of measurement such secondary radiation is not used as the surface of the analysed item 6 irradiated by the sharp edge 5 is many times smaller than the surface of the analysed item 6 hit by the semi-conical beam 4.
Fig. 2 shows a detail of the collimator 2 in side view where it is obvious that the collimator 2 is equipped with Soller slits 7 to model the sharp edge 5 of the semi-conical beam 4. Fig. 2 shows the technical characteristics and their arrangement that are intentionally magnified for clarity and easy understanding of the invention. This is not an accurate mutually proportionate representation; however, the presented principle remains unchanged. A person skilled in the art will easily derive that the number of Soller slits 7 is a result of professional discretion depending on a specific application as the general rule is that the higher the number of Soller slits collimating the beam of penetrating radiation, the lower the tendency of the resulting beam to diverge.
Fig. 4 and Fig. 5 show an axonometric view of the presented device. Fig. 4 shows the portion of the surface of the analysed item 6 irradiated by the semi-conical beam 4 forming the observed area 8. Additionally, Fig. 4 shows the beginning 9 of the zone of detailed scanning and the end 10 of the zone of detailed scanning by the sharp edge 5.
The invention works as follows: at first, at least a portion of the surface of the analysed item 6 is irradiated by the semi-conical beam 4 and at the same time the emitted or scattered penetrating radiation is detected by the camera 3. The signal of each pixel of the camera 3 is analysed and compared to the expected standard behaviour of the signal. If the detected signal exhibits an anomaly, the anomaly is localized by means of coordinates for subsequent localization on the surface of the analysed item 6. Once the anomalies have been localized, their detailed measurement starts using the sharp edge 5 of the semi-conical beam 4.
Detailed measurement of anomalies is based on the method disclosed in the CZ 308 631 B6 invention document. The principle of the method is diagrammatically represented in Fig. 3 where a section of the place of interest (a detected anomaly) of the analysed item 6 and also a section of the sharp edge 5 of penetrating radiation can be seen. In addition, the direction of radiation spreading through the space is provided. The thickness St of the sharp edge 5 remains constant. The angle a of incidence is acute and the size of it is in the order of units of degrees. The analysed item 6 is covered by two superficial layers whose thicknesses are ti and k, respectively.
As it is obvious from Fig. 3, the deeper the penetration of the sharp edge 5 into the first layer of the layered structure, the higher the amplification of the measured signal on individual pixels of the camera 3, as it can be seen in the first increasing passage 5n of the signal. At the transition between the first and second layers, the signal from the first layer becomes substantially constant with the second increasing passage 812 of the signal for the second layer becoming noticeable. Similar behaviour is detected also in the area of emergence of the plane beam 5 from the place of interest of the analysed item 6, where for the first layer, the passage 621 of the signal with decreasing values is visible. The subsequent visible passage 622 of the signal with decreasing values for the second layer can be seen as well.
For the sake of clarity and better understanding of the invented method, the increase and/or decrease in the passages 6 of the signal of both layers is depicted linearly, however, under real conditions, non-linear behaviour of the signal can be expected. In addition, to simplify the demonstration, a contribution of the substrate to the total signal was neglected.
As far as the determination of the thickness of the arbitrary first layer is concerned, the equation is as follows: ti = 5n • tg a
As far as the determination of the thickness of the arbitrary n-th layer is concerned, the equation is as follows: tn = Sin • tg a
As far as the determination of the total thickness of the superficial structure is concerned, the equation is as follows:
T = Etn = 5in • tg a
Practically the same equations apply to layers in the area of emergence of the sharp edge 5 from the place of interest of the analysed item 6.
Therefore, the accuracy of measurement is affected by the quality of the total signal in which the passages 6 of the signal concerning transmission through the layered structure are searched for.
The source j_ of penetrating radiation is an X-ray tube operated at a voltage of 40 kV and a current of 0.5 mA. The beam of penetrating radiation was modelled using the slit collimator 2 equipped with Soller slits 7 to create a semi-conical beam 4 of penetrating radiation with a sharp edge 5 with a thickness of 0.5 mm. The analysed item 6 was arranged onto the carrier table with the semi-conical beam 4 of penetrating radiation hitting the place of interest of the analysed item at the angle of incidence a being 15°. To analyse the anomalies, the sharp edge 5 hit the irradiated surface of the analysed item 6 at the angle of incidence a being 8°.
The camera 3 referred to a pinhole RTG camera oriented perpendicularly to the surface of the analysed item 6, i.e. the detector of the RTG camera was oriented in parallel to the sharp edge 5 of the semi-conical beam 4 of penetrating radiation. The RTG camera was installed onto a carrier table that guided the camera 3 to obtain an undisturbed receipt of secondary radiation. The RTG camera 3 was fitted with the Timepix detector with a thickness of the silicon chip of 300 pm with a resolution of 256 x 256 square pixels with a side length of 55 pm. Secondary radiation was projected through the pinhole of the RTG camera 3 with a diameter of 100 pm. The detection threshold of the RTG camera 3 was set at 3 keV to filter off the noise generated by the detector.
Data was recorded in time for all events exceeding the threshold value of 3 keV and individual events were subsequently analysed within the framework of the analysis method one event after another in individual pixels, which provided information about the energy of each detected particle. In addition, it was possible to exactly determine the coordinates of the localized anomalies from the known geometrical arrangement of the analysed item 6, source 1_ and camera 3.
The observed surface of the place of interest of the analysed item 6 was zoomed in 1.4 times given by the distance of the RTG camera pinhole to the analysed item 6 to obtain the ratio in which one pixel of the RTG camera detector corresponds to 40 pm on the surface of the place of interest of the analysed item 6. Industrial Applicability
The method of accelerated non-destructive analysis of a layered structure and a device for the implementation of the method according to the invention will find application in the field of analysis of the quality of surface treatment applied onto a massive substrate, e.g. with the measurement of a thickness of protective coatings or for the analysis of the quality of composite sandwich structures.
Overview of the Positions
1 source of penetrating radiation
2 collimator of penetrating radiation
3 camera
4 semi-conical beam of penetrating radiation with a sharp edge
5 sharp edge of semi-conical beam of penetrating radiation
6 analysed item
7 S oiler slit
8 observed area
9 beginning of the zone with detailed measurement by a sharp edge of semi-conical beam
10 end of the zone with detailed measurement by a sharp edge beam of semi-conical beam a angle of incidence of sharp edge of semi-conical beam
611 passage of signal with an increasing change in values for the first layer
612 passage of signal with an increasing change in values for the second layer
621 passage of signal with a decreasing change in values for the first layer
622 passage of signal with a decreasing change in values for the second layer ti thickness of the first layer t2 thickness of the second layer
St thickness of the sharp edge of semi-conical beam

Claims

CLAIMS The method of accelerated non-destructive measurement of a layered structure on a massive substrate consisting of the following procedure steps: a) at least a part of the analysed item (6) surface is irradiated by a beam of penetrating radiation with an acute angle of incidence, b) the emitted or scattered radiation coming from the surface of the of the analysed item (6) is detected by at least one camera (3) for detection of such emitted or scattered radiation, c) the signal detected by the camera (3) is analysed for each camera (3) pixel to obtain the results of a non-destructive measurement of the layered structure covering the analysed item (6), characterized in that for the procedure step a) a semi-conical beam (4) of penetrating radiation with one sharp plane edge (5) is modelled, and that for the procedure step b) is first performed irradiation by the semi-conical beam (4) and anomalies manifested by non-standard signal values of emitted or scattered radiation are searched for in the signal recorded by pixelated camera (3); subsequently the coordinates of anomalies occurrence are recorded for subsequent analysis in step c), then the procedure step c) is performed when the coordinates of the identified anomaly are scanned by the sharp edge (5) of the semi-conical beam (4) with the angle of incidence within a range of 0° and 15° to ascertain detailed information on the layered structure in the anomalies. The method according to claim 1, characterized in that X-ray is employed. The method according to claim 1 or 2, characterized in that a camera (3) with resolution in the order of tens of pm is employed. The method according to any of claims 1 through 3, characterized in that for the modelling of the semi-conical beam (4) with a sharp edge (5) of penetrating radiation, a collimator (2) fitted with at least two Soller slits (7) is used. A device of accelerated non-destructive measurement of a layered structure on a massive substrate in a manner according to any of claims 1 through 4, comprising a source (1) of penetrating radiation equipped with a collimator (2) to for shaping a beam of penetrating radiation emitted from the source (1) of penetrating radiation further comprising a pixelated camera (3) to recording a signal originating from emitted or scattered penetrating radiation emanating from the analysed item (6), further comprising a table to carry and position the analysed item (6) against the source (1) or camera (3), and further comprising an evaluation unit connected to the camera (3) to receive and analyse the signal, characterized in that the collimator (2) is provided with at least two Soller slits (7) which provide sharp planar edge (5) of the semi-conical beam (4) of penetrating radiation, and the penetrating radiation source (1) and the camera (3) in the device form an assembly with a fixed geometry, mounted on a carrier table, the position of the carrier table being then controlled by a dedicated control unit. A device according to claim 5, characterized in that the camera (3) is equipped with means for zooming the image.
PCT/CZ2022/050106 2022-10-25 2022-10-25 Method of accelerated non-destructive measurement of a layered structure on a massive substrate and a device for the implementation of the method WO2023072322A2 (en)

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