WO2023033622A1 - Dispositif de collecte de liquide ayant une efficacité spatiale et une efficacité de collecte améliorées - Google Patents

Dispositif de collecte de liquide ayant une efficacité spatiale et une efficacité de collecte améliorées Download PDF

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Publication number
WO2023033622A1
WO2023033622A1 PCT/KR2022/013301 KR2022013301W WO2023033622A1 WO 2023033622 A1 WO2023033622 A1 WO 2023033622A1 KR 2022013301 W KR2022013301 W KR 2022013301W WO 2023033622 A1 WO2023033622 A1 WO 2023033622A1
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Prior art keywords
wing plate
liquid
efficiency
collecting
collection
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PCT/KR2022/013301
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English (en)
Korean (ko)
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신종수
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신종수
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Publication of WO2023033622A1 publication Critical patent/WO2023033622A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
    • B01D45/08—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present invention relates to a liquid collecting device having improved space efficiency and collection efficiency, and more particularly, an inlet pipe into which fluid flows is formed on the lower side of a collecting container so that when the liquid collecting device is connected to a wet station or the like, an elbow or the like is formed. It is a liquid collection device that prevents unnecessary space from being wasted as no additional piping equipment is required, and increases the liquid collection efficiency by allowing most of the fluid that has entered the collection box through the inlet pipe to collide with the upper wing plate. it's about
  • semiconductors are manufactured through various processes such as oxidation, etching, deposition, and photolithography. These manufacturing processes include ammonia (NH 3 ), nitrogen monoxide (NO), Toxic gases such as acid (AsH 3 ) and phosphine (PH 3 ) are used.
  • NH 3 ammonia
  • NO nitrogen monoxide
  • Toxic gases such as acid (AsH 3 )
  • PH 3 phosphine
  • the above-mentioned toxic gas may have a fatal adverse effect on the human body, and a fire accident due to spontaneous combustion of the waste gas may occur.
  • the generated waste gas is purified through a scrubber or the like and released into the atmosphere.
  • These scrubbers include a heat-wet scrubber that burns waste gas using an induction heating method in an indirect combustion wet type and then filters it once more using water, and a wet type that uses water to Wet Scrubber, which collects waste gas and purifies water, and Burn-Wet Scrubber, which collects waste gas using water after burning waste gas with a high-temperature flame as a direct combustion wet type etc.
  • a scrubber uses water in the process of treating waste gas regardless of its type. Since the used water contains many pollutants, the water containing pollutants is treated with a filter, etc., and discharged to the outside through the drain pipe. should be discharged
  • FIG. 1 is a view showing a conventional liquid collecting device 90, which is disclosed in Korean Patent Registration No. 10-0682621 (February 7, 2007).
  • the conventional liquid collecting device 90 includes an inlet pipe 91 having one end coupled to the pipe of the wet station W and the other end coupled to the collecting container, and the inlet pipe ( 91) and a collection tube 93 for collecting liquid components scattered from the inflow fluid, a liquid collection pipe 95 disposed on the lower surface of the collection tube 93 and discharging the collected liquid components to the outside, , It is configured to include an exhaust pipe 97 coupled to the collecting cylinder 93 in a direction opposite to the inlet pipe 91.
  • the collection container 93 is attached to the upper part of the inlet pipe 91 and is located apart from the upper wing plate 931 extending to a predetermined diameter area of the inlet pipe 91, and the upper wing plate 931 A lower wing plate 933 was included.
  • the conventional liquid collecting device 90 Since the space where the semiconductor manufacturing equipment is located is not spare, although the space that can be provided for the liquid collecting device 90 is limited, the conventional liquid collecting device 90 has a wet station W located on one side. If there is, it has a structure that discharges gas to the other side by connecting it horizontally, which is disadvantageous in terms of space utilization.
  • the inlet pipe 91 is connected to the wet station W.
  • Additional plumbing equipment such as an elbow must be used, and when such a pipe connection is made, a problem in that the volume of the liquid collecting device 90 increases.
  • FIG. 3 is a cross-sectional view of a conventional liquid collecting device 90.
  • the conventional liquid collecting device 90 is generally horizontal, as shown in FIG. Since it is oriented, it is a structure inevitably generating laminar flow.
  • the upper wing plate 931 and the lower wing plate 933 do not sufficiently contact each other, the distance between the upper wing plate 931 and the lower wing plate 933 horizontally by a, and the upper wing plate ( 931) and the lower wing plate 933, through the space formed by the distance vertically separated by b, a flow of gas moving from the inlet pipe 91 directly to the exhaust pipe 97 is generated, sufficient liquid collection A problem arises where this cannot be achieved.
  • the liquid collecting device 90 arranges the inlet pipe 91 and the exhaust pipe 97 horizontally so that a sufficient area is not secured when in contact with the fluid, and furthermore, a uniform flow of the fluid, that is, laminar flow is induced, and the liquid is collected. There was also the problem of insufficient efficiency.
  • Patent Document 1 Korea Patent Registration No. 10-0682621 (2007.02.07.)
  • the present invention has been made to solve the above problems,
  • An object of the present invention is to form an inlet pipe into which the fluid flows is formed on the lower side of the collecting cylinder, so that when connecting the liquid collecting device to the wet station, there is no need to use additional piping equipment such as an elbow, so that unnecessary space is wasted. is to prevent
  • Another object of the present invention is to configure a first inclined surface and a second inclined surface on the lower surface of the collecting barrel, but configure the inlet pipe to be coupled to the first inclined surface, and to a point inside the collecting barrel spaced upward from the first inclined surface.
  • Another object of the present invention is to generate turbulence inside the collecting tube by causing most of the fluid moving upward through the inlet pipe to rapidly change the direction of movement while colliding with the upper wing plate located inside the collecting tube.
  • Another object of the present invention is to generate a turbulent flow inside the collecting barrel so that the time the fluid stays inside the collecting barrel is lengthened, and through this, the liquid contained in the fluid can be sufficiently removed.
  • Another object of the present invention is to increase the residence time of the fluid inside the collecting cylinder, so that the collection efficiency of the liquid is greatly improved by increasing the number of contact times and the contact time between the wing plate and the fluid.
  • Another object of the present invention is to configure the horizontal length of the upper wing plate to be larger than the inner diameter of the inlet pipe, and to project the area of the upper wing plate vertically to the upper wing plate side of the end shape of the inlet pipe coupled to the first inclined surface. As it is configured so that the shape of the orthographic projection is included in the upper wing plate when it is made, all the fluids entering the collection tube through the inlet pipe collide with the upper wing plate.
  • Another object of the present invention is a first upper wing plate having a downwardly convex side shape, a second upper wing plate having an upwardly convex side shape, and a third upper wing having a downward side shape at a constant inclination. It is configured to include a wing plate so that turbulence is generated by the fluid flowing into the collecting container.
  • Another object of the present invention is to ensure that the inflection point between the first upper wing plate and the second upper wing plate is located within the inner diameter section of the inlet pipe, so that a complex and rapid flow change occurs in the fluid hitting the upper wing plate. .
  • Another object of the present invention is to construct a liquid collection tube on a horizontal surface of the lower side of the collection tube so that the liquid collected at a specific location of the collection tube is easily discharged to the outside through the liquid collection tube.
  • Another object of the present invention is to form a lower wing plate on the upper side of the horizontal plane so that even if there is a fluid in which liquid is not sufficiently removed, the liquid can be secondarily removed through the lower wing plate.
  • Another object of the present invention is to form a bending point between the first lower wing plate and the second lower wing plate to be located within the inner diameter section of the liquid collection pipe, so that the liquid removed from the fluid by hitting the lower wing plate is immediately transferred to the liquid collection pipe. so that it can flow into the side.
  • Another object of the present invention is to configure the inlet pipe on the lower side of the collecting barrel and form the exhaust pipe on the rear side of the collecting barrel so that the inlet pipe and the exhaust pipe are vertically arranged, so that when connecting the liquid collecting device to the peripheral device , to minimize the space required for installation.
  • Another object of the present invention is to form a funnel having a tapered space whose diameter decreases toward the lower side in the liquid collection pipe so that the liquid collected toward the liquid collection pipe can be easily discharged to the outside.
  • the present invention is implemented by an embodiment having the following configuration in order to achieve the above object.
  • the present invention an inlet pipe through which the fluid flows, a collecting passage for collecting liquid components from the introduced fluid, a liquid collection pipe for discharging the collected liquid components to the outside, the It includes an exhaust pipe for discharging the fluid from which the liquid component has been removed to the outside, and the inlet pipe is formed on the collecting container on the side where the fluid flows into the collecting container.
  • the inlet pipe is formed on the lower side of the collection tube.
  • the lower surface of the collecting barrel is formed extending from the first inclined surface and inclined while forming a first inclined angle, and inclined while forming a second inclined angle. It is characterized by including a true second slope.
  • the inlet pipe is formed on the first inclined surface.
  • the collecting barrel is located at a point inside the collecting barrel spaced upward from the first inclined surface, and the fluid entering the collecting barrel through the inlet pipe rises It is characterized in that it includes an upper wing plate having a shape that generates turbulence while blocking.
  • the upper wing plate has a longitudinal horizontal length longer than the inner diameter of the inlet pipe, and the inlet pipe has an end shape coupled to the first inclined surface as the upper wing It is characterized in that when projected vertically to the plate side, the projected shape has an area included in the upper wing plate.
  • the upper wing plate has a first upper wing plate having a downwardly convex side shape, and extending from the first upper wing plate and having an upwardly convex side shape It is characterized in that it includes a second upper wing plate and a third upper wing plate extending from the second upper wing plate and having a side shape downward at a certain inclination.
  • the upper wing plate is formed such that the inflection point between the first upper wing plate and the second upper wing plate viewed from the side is located within the inner diameter section of the inlet pipe characterized by
  • the lower surface of the collecting barrel includes a horizontal surface extending horizontally from the second inclined surface.
  • the liquid collection pipe is formed on the horizontal surface.
  • the collecting barrel is located at a point inside the collecting barrel spaced upward from the horizontal plane, and has a shape that generates turbulence while guiding the fluid flowing inside the collecting barrel.
  • the branch is characterized in that it includes a lower wing plate.
  • the present invention the lower wing plate, a first lower wing plate having a side shape downward at a constant slope, and a second vertically extending from the first lower wing plate It is characterized in that it includes a lower wing plate.
  • the present invention the lower wing plate, the bending point between the first lower wing plate and the second lower wing plate viewed from the side is formed to be located within the inner diameter section of the liquid collection pipe characterized by being
  • the present invention the liquid collecting pipe, a hollow tube having a shape in which one side and the other side are open while forming an inner space, and the inner space of the hollow tube is divided up and down, but one side
  • It is characterized in that it includes a funnel formed to communicate.
  • the present invention can obtain the following effects by combining and using the above embodiments and configurations to be described below.
  • the inlet pipe through which the fluid flows is formed on the lower side of the collecting cylinder, so that when the liquid collecting device is connected to the wet station, there is no need to use additional piping equipment such as an elbow, thereby preventing unnecessary space from being wasted has the effect of
  • a first inclined surface and a second inclined surface are configured on the lower side of the collecting barrel, but the inlet pipe is configured to be coupled to the first inclined surface, and the upper wing plate is located at a point inside the collecting barrel upwardly spaced from the first inclined surface.
  • the present invention has the effect of causing turbulence to occur inside the collecting tube by causing most of the fluid moving upward through the inlet pipe to rapidly change its moving direction while colliding with the upper wing plate located inside the collecting tube.
  • the present invention has an effect of generating a turbulent flow inside the collecting barrel so that the time the fluid stays inside the collecting barrel is lengthened, and through this, the liquid contained in the fluid can be sufficiently removed.
  • the present invention derives the effect of greatly improving the collection efficiency of the liquid by increasing the fluid residence time inside the collecting barrel and increasing the number of contact times and contact time between the wing plate and the fluid.
  • the horizontal length of the upper wing plate is larger than the inner diameter of the inlet pipe, and the area of the upper wing plate is projected vertically when the shape of the end of the inlet pipe coupled to the first inclined surface is projected vertically toward the upper wing plate.
  • the shape is configured to be included in the upper wing plate, there is an effect that all of the fluids entering the collection container through the inlet pipe collide with the upper wing plate.
  • the present invention includes a first upper wing plate having a downwardly convex side shape, a second upper wing plate having an upwardly convex side shape, and a third upper wing plate having a downward side shape at a constant inclination. It is configured to do so, and has the effect of generating turbulence by the fluid introduced into the collecting barrel.
  • the inflection point between the first upper wing plate and the second upper wing plate is located within the inner diameter section of the inlet pipe, so that a complex and rapid flow change occurs in the fluid colliding with the upper wing plate.
  • the present invention has the effect of constructing a liquid collection tube on a horizontal surface among the lower surfaces of the collection tube so that the liquid collected at a specific location of the collection tube is easily discharged to the outside through the liquid collection tube.
  • the present invention has the effect of forming a lower wing plate on the upper side of the horizontal plane so that even if there is a fluid in which the liquid is not sufficiently removed, the liquid can be secondarily removed through the lower wing plate.
  • the bending point between the first lower wing plate and the second lower wing plate is formed to be located within the inner diameter section of the liquid collection pipe, so that the liquid removed from the fluid by hitting the lower wing plate can directly flow into the liquid collection pipe side.
  • the present invention configures the inlet pipe on the lower side of the collecting cylinder, forms the exhaust pipe on the rear side of the collecting cylinder, and arranges the inlet pipe and the exhaust pipe vertically, so that when connecting the liquid collecting device with the peripheral device, necessary for installation It has the effect of minimizing space.
  • the present invention has an effect of forming a funnel having a tapered space whose diameter decreases toward the lower side in the liquid collecting pipe so that the liquid collected toward the liquid collecting pipe can be easily discharged to the outside.
  • Figure 2 shows a conventional liquid collection device that occupies a large volume.
  • FIG. 3 is a cross-sectional view of a conventional liquid collecting device
  • FIG. 4 shows a liquid collecting device according to an embodiment of the present invention.
  • FIG. 5 is a cross-sectional view taken along line A-A' of FIG. 4;
  • Figure 6 is a state of use showing that the space efficiency is increased by the liquid collecting device of the present invention.
  • FIG. 7 is a use state diagram showing that the collection efficiency is increased by the liquid collection device of the present invention.
  • an inlet pipe is formed on the lower side of the collecting cylinder to connect the liquid collecting device 1 and the wet station with a straight pipe, so unnecessary installation space is wasted due to the use of an elbow, etc. It has a feature to increase the liquid collection efficiency by inducing the occurrence of turbulence by preventing the flow and having a structure in which the fluid rising from the bottom collides with the upper wing plate located on the upper side.
  • the liquid collecting device 1 includes an inlet pipe 10 and a collecting container 30 , a liquid collection pipe 50, and an exhaust pipe 70.
  • the inlet pipe 10 is a pipe through which fluid flows, and may be configured in a shape in which one surface and the other surface are open while forming an empty space inside.
  • the fluid refers to a gas containing scattered liquid components.
  • the shape of the inlet pipe 10 is not limited to any specific shape, it may preferably be configured as a circular straight pipe.
  • the inlet pipe 10 is configured to allow the fluid generated in the wet station to flow into a collection container 30 to be described later. To this end, one end of the inlet pipe 10 is fixed to the wet station, and the inlet pipe ( The other end of 10) may be fixed to the collection container 30.
  • the inlet pipe 10 may be formed on the collecting tube 30 on the side where the fluid flows into the collecting tube 30, and is preferably formed on the lower surface 31 of the collecting tube 30, and more Preferably, it may be formed on a first inclined surface 311 to be described later among the collecting cylinders 30.
  • the collecting cylinder 30 is connected to the inlet pipe 10 and refers to a configuration for collecting liquid components from the fluid introduced from the inlet pipe 10 .
  • the collection container 30 may be formed in the form of a box with an empty space formed therein, and while the fluid containing the liquid component stays inside the collection container 30, the liquid contained in the fluid is collected do. Referring to FIG. 4 , the collection container 30 includes a lower side surface 31, an upper wing plate 33, a lower wing plate 35, a front side surface 37, and a rear side surface 39.
  • the lower surface 31 refers to a surface formed on the lower side of the collecting container 30, and the present invention forms the inlet pipe 10 on the lower surface 31 to collect liquid on the upper side of the target equipment. By installing the device 1, the space occupied by the equipment can be minimized.
  • the lower side surface 31 includes a first inclined surface 311 , a second inclined surface 313 , and a horizontal surface 315 .
  • the first inclined surface 311 is a surface inclined while forming a first inclined angle, and referring to FIG. 5 , the first inclined angle may be ⁇ 1.
  • the first inclined angle may be ⁇ 1.
  • the second inclined surface 313 extends from the first inclined surface 311 and is inclined while forming a second inclined angle.
  • the second inclined angle may be ⁇ 2.
  • the ⁇ 2 may be configured to be greater than 0° and less than 90°.
  • the inclination angle ⁇ 2 of the second inclined surface 313 is 0° or 90°, the dropped liquid does not move smoothly. am.
  • the size of ⁇ 2 can be configured to be larger than the size of ⁇ 1, and the slope of the second inclined surface 313 is made more steep so that the fallen liquid can move quickly to the liquid collection pipe 50 to be described later do.
  • the horizontal surface 315 refers to a surface extending horizontally from the second inclined surface 313 of the lower surface of the collecting container 30 .
  • a liquid collection pipe 50 which will be described later, is connected to the horizontal surface 315, and liquid droplets aggregated through contact with the wing plate are collected on the horizontal surface 315 to the outside through a liquid collection pipe 50 to be described later. may be discharged.
  • the horizontal surface 315 may also be configured to be inclined, and the liquid droplets that are aggregated and fall may flow into the liquid collection tube 50 through the inclined surface.
  • the upper wing plate 33 is located at a point inside the collecting cylinder 30 spaced upward from the first inclined surface 311, and the fluid entering the collecting cylinder 30 through the inlet pipe 10 It refers to a configuration having a shape that generates turbulence while preventing the rise of
  • the upper wing plate 33 has a longitudinal horizontal length longer than the inner diameter of the inlet pipe 10, and the upper wing plate 33 has an end shape in which the inlet pipe 10 is coupled to the first inclined surface 311.
  • the orthographically projected shape has an area included in the upper wing plate 33 when projected vertically to the side. Through this, all the fluids entering the inside of the collection container 30 through the inlet pipe 10 can collide with the upper wing plate 33.
  • one end of the upper wing plate 33 may be coupled to a corner portion formed by the front and upper surfaces of the collecting container 30 .
  • the upper wing plate 33 includes a first upper wing plate 331, a second upper wing plate 333, a third upper wing plate 335, and an inflection point 337. .
  • the first upper wing plate 331 refers to a part of the upper wing plate 33 having a downwardly convex side shape so that turbulence can occur in the fluid contacting the lower surface of the first upper wing plate 331. .
  • the second upper wing plate 333 extends from the first upper wing plate 331 and generates turbulence in the fluid contacting the lower surface of the first upper wing plate 331.
  • the upper wing plate ( 33) refers to the part with a convex lateral shape.
  • the third upper wing plate 335 refers to a configuration having a side shape extending from the second upper wing plate 333 and descending at a constant slope.
  • the inflection point 337 refers to a point at which the bending direction between the first upper wing plate 331 and the second upper wing plate 333 changes when viewed from the side.
  • the inflection point 337 is configured to be located within the inner diameter section of the inlet pipe 10 so that a complex and rapid flow change occurs in the fluid colliding with the upper wing plate 33.
  • the lower wing plate 35 is located at a point inside the collecting container 30 spaced upward from the horizontal surface 315 and has a shape that generates turbulence while guiding the fluid flowing inside the collecting container 30. say composition. Even in the fluid in contact with the upper wing plate 33, there may be a case where the liquid component is not sufficiently removed, so the lower wing plate 35 is formed so that the liquid component can be removed secondarily. Referring to FIG. 5 , the front end of the lower wing plate 35 may exist on a position spaced apart from the rear end of the upper wing plate 33 by a specific distance to the rear and spaced downward by a specific distance. The residence time of the fluid inside the collecting container 30 is greatly increased by the upper wing plate 33 and the lower wing plate 35, and the collection efficiency of the liquid increases as the number of contact between the wing plate and the fluid increases. can be greatly improved.
  • the lower wing plate 35 includes a first lower wing plate 351, a second lower wing plate 353, and a bending point 355.
  • the first lower wing plate 351 refers to a configuration having a side shape downward with a certain inclination among the lower wing plates 35. As shown in FIG. 5, although the first lower wing plate 351 is shown as having a flat plate-like shape, the present invention is not limited to the first lower wing plate 351 only in this shape, It may also be configured to form a curved surface of a wave.
  • the second lower wing plate 353 refers to a configuration extending vertically from the first lower wing plate 351 among the lower wing plates 35 . Like the first lower wing plate 351, the second lower wing plate 353 is also configured to form a wave-like curved surface.
  • the bending point 355 is a bent point between the first lower wing plate 351 and the second lower wing plate 353 viewed from the side, and the bending point 355 is a liquid collection pipe to be described later ( 50) may be formed to be located within the inner diameter section. Through this, when the liquid component removed from the fluid by colliding with the lower wing plate 35 falls due to gravity, it can immediately flow into the liquid collection pipe 50 to be described later. As described above, when the first lower wing plate 351 and the second lower wing plate 353 are configured to form a wavy curved surface, the bending point 355 may be understood as an inflection point.
  • the front surface 37 refers to a surface formed on the front side extending vertically from the end of the first inclined surface 311 in the collecting container 30 .
  • the inlet pipe 10 is formed on the front side surface 37, but the present invention does not form the inlet pipe 10 on the front side surface 37, and the inlet pipe 10 is formed on the first inclined surface 311. As (10) is formed, space efficiency and liquid collection efficiency are increased.
  • the rear side surface 39 refers to a surface formed on the rear side of the collecting cylinder 30 that extends vertically from the end of the horizontal surface 315 and faces the front side surface 37 .
  • An exhaust pipe 70 to be described below is formed on the rear side surface 39, and the fluid entering through the lower side of the collecting container 30 maintains the fluid flow in the upward direction, and then It is changed to a fluid flow in the rear direction, and is then exposed to the outside of the collection container 30 through the exhaust pipe 70 formed on the rear side surface 39.
  • the liquid collection pipe 50 has a configuration for discharging the collected liquid components to the outside, and may be preferably formed on the horizontal surface 315 of the lower surface 31 of the collection container 30. .
  • the liquid collected at a specific location of the collecting container 30 is easily discharged to the outside through the liquid collecting pipe 50 .
  • the liquid collecting pipe 50 may be disposed in the same direction as the inlet pipe 10, so that unnecessary waste of space when installing the liquid collecting device 1 can be prevented. there is.
  • the liquid collection pipe 50 includes a hollow pipe 51, a diaphragm 53, and a funnel 55.
  • the hollow tube 51 has a configuration in which one side and the other side are open while forming an internal space, and the shape of the hollow tube 51 is not limited to any specific shape, but preferably a circular straight tube. may consist of
  • the diaphragm 53 refers to a structure that partitions the inner space of the hollow tube 51 up and down.
  • the diaphragm 53 may be formed in a circular plate shape, and a through hole 531, which is a hole formed to penetrate from one surface of the diaphragm 53 to the other surface, may be formed on the diaphragm 53. More preferably, a plurality of through holes 531 may be formed on the diaphragm 53 at regular intervals.
  • the funnel 55 has a truncated conical shape in which one side and the other side are open while forming an empty space inside, and refers to a configuration coupled to the lower surface of the diaphragm 53.
  • the funnel 55 includes a taper space 551, and the taper space 551 refers to an empty space having a shape in which the diameter decreases toward the lower side.
  • the taper space 551 is formed to communicate with the through hole 531 .
  • the tapered space 551 is formed, the flow rate of the fluid increases due to Bernoulli's theorem, so that the liquid collected toward the liquid collecting pipe 50 can be easily discharged to the outside.
  • the exhaust pipe 70 is configured to discharge the fluid from which the liquid component is removed to the outside, and the inlet pipe 10 and the exhaust pipe 70 may be vertically disposed. Through this, when connecting the liquid collecting device 1 and peripheral devices, the space required for installation can be minimized.
  • the shape of the exhaust pipe 70 is not limited to any specific shape, it may preferably be configured in the form of a circular pipe with one side and the other side open while forming an empty space therein.
  • FIG. 6 is a state of use diagram showing that the space efficiency is increased by the liquid collecting device 1 of the present invention.
  • the liquid collecting device 1 when the liquid collecting device 1 is connected to the wet station W, etc., when the liquid collecting device 1 is disposed above the wet station W, As the inlet pipe 10 can be directly connected to the wet station W without using additional piping equipment such as an elbow, unnecessary installation space can be prevented from being wasted.
  • FIG. 7 is a use state diagram showing that the collecting efficiency is increased by the liquid collecting device 1 of the present invention.
  • inclined surface 311 and the second inclined surface 313 are configured, but the inlet pipe 10 is configured to be coupled to the first inclined surface 311, and the collecting cylinder is spaced upward from the first inclined surface 311.
  • the upper wing plate 33 By locating the upper wing plate 33 at an internal point, all the fluids entering the collection container 30 through the inlet pipe 10 can collide with the upper wing plate 33 Accordingly, the liquid collection efficiency is increased.
  • the fluid moving upward through the inlet pipe 10 collides with the upper wing plate 33 located inside the collecting container 30, and the moving direction is rapidly changed, and the upper wing plate 33 is configured to have a wave shape as a whole, and a turbulent flow as shown in FIG. 7 is generated inside the collection tube 30. Due to the turbulence generated inside the collecting container 30, the fluid F stays inside the collecting container 30 for a longer time, and as a result, the liquid contained in the fluid F can be sufficiently removed.
  • the liquid component is removed by the upper wing plate 33 and the relatively light gas (G) moves toward the exhaust pipe 70 through the separation space between the upper wing plate 33 and the lower wing plate 35. And, the fluid F from which the liquid component L is less removed is relatively heavy and moves downward and hits the lower wing plate 35 to remove the liquid component L contained in the fluid F, the liquid component
  • the gas (G) from which (L) is removed rises and exits to the outside through the exhaust pipe (70).
  • the droplets that have fallen are gathered toward the liquid collecting tube 50 along the inclined surface, and since a taper space 551 is formed in the liquid collecting tube 50, the liquid collecting tube 50 ), it can be discharged to the outside at a high speed.

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Abstract

La présente invention concerne un dispositif de collecte de liquide ayant une efficacité spatiale et une efficacité de collecte améliorées et, plus spécifiquement, un dispositif de collecte de liquide qui : comprend un tuyau d'entrée dans lequel un fluide est introduit et qui est formé au niveau d'un côté inférieur d'un récipient de collecte, de façon à rendre inutile, lorsque le dispositif de collecte de liquide est relié à une station humide, l'utilisation d'un équipement de tuyau supplémentaire tel qu'un coude et analogue, ce qui permet d'empêcher le gaspillage d'un espace inutile ; et permet à la majeure partie du fluide ayant été introduit à l'intérieur du récipient de collecte à travers le tuyau d'entrée d'entrer en collision avec une plaque d'aile supérieure, ce qui permet d'améliorer l'efficacité de collecte de liquide.
PCT/KR2022/013301 2021-09-06 2022-09-06 Dispositif de collecte de liquide ayant une efficacité spatiale et une efficacité de collecte améliorées WO2023033622A1 (fr)

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KR10-2021-0118650 2021-09-06
KR1020210118650A KR20230035995A (ko) 2021-09-06 2021-09-06 향상된 공간 효율과 포집 효율을 가지는 액체 포집 장치

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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JP2005023824A (ja) * 2003-07-01 2005-01-27 Uchihama Kasei Kk オイルミスト捕集装置
KR100682621B1 (ko) * 2006-08-18 2007-02-16 신종수 액체포집장치
KR20120057902A (ko) * 2010-11-29 2012-06-07 신종수 수분제거장치
KR20180034062A (ko) * 2016-09-27 2018-04-04 롯데케미칼 주식회사 비말동반 현상 방지를 위한 분리 장치

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0988544A (ja) * 1995-09-29 1997-03-31 Tenetsukusu:Kk オイルミストセパレータ
JP2005023824A (ja) * 2003-07-01 2005-01-27 Uchihama Kasei Kk オイルミスト捕集装置
KR100682621B1 (ko) * 2006-08-18 2007-02-16 신종수 액체포집장치
KR20120057902A (ko) * 2010-11-29 2012-06-07 신종수 수분제거장치
KR20180034062A (ko) * 2016-09-27 2018-04-04 롯데케미칼 주식회사 비말동반 현상 방지를 위한 분리 장치

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