WO2023024449A1 - Appareil et procédé pour générer un faisceau de tophat réglable de manière dynamique - Google Patents

Appareil et procédé pour générer un faisceau de tophat réglable de manière dynamique Download PDF

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Publication number
WO2023024449A1
WO2023024449A1 PCT/CN2022/076029 CN2022076029W WO2023024449A1 WO 2023024449 A1 WO2023024449 A1 WO 2023024449A1 CN 2022076029 W CN2022076029 W CN 2022076029W WO 2023024449 A1 WO2023024449 A1 WO 2023024449A1
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Prior art keywords
lens
light
linearly polarized
hat
gaussian
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PCT/CN2022/076029
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English (en)
Chinese (zh)
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刘琳
陈亚红
王海云
王飞
蔡阳健
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苏州大学
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Publication of WO2023024449A1 publication Critical patent/WO2023024449A1/fr

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012Optical design, e.g. procedures, algorithms, optimisation routines
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat

Definitions

  • the invention relates to the technical field of flat-hat beams, in particular to a device and method for generating dynamically adjustable flat-hat beams.
  • the energy distribution of the top-hat beam is uniform in the cross-section, so it is widely used in many fields, such as laser material processing, laser nuclear fusion, radar, lithography, optical biomedicine, etc.
  • methods for generating flat-hat beams are mainly divided into two categories.
  • One is to shape known beams such as Gaussian beams into flat-hat beams such as aspheric lens systems, microlens arrays, diffractive optical elements, and so on.
  • Such methods are either strict on known beams or strict on optical components.
  • the preparation process of the required optical components is complex, the requirements for precision are particularly high, and the flexibility is not high.
  • the other is to directly design a laser that generates a flat-hat beam.
  • the phase delay of the intracavity laser is radially modulated by using the phase adjustment mirror and resonant cavity mirror in the laser cavity to realize the radial modulation of the reflectivity of the coupled output polarizer.
  • the cost of such lasers is relatively high.
  • the technical problem to be solved by the present invention is to provide a device and method for generating a dynamically adjustable flat-hat beam, which can shape linearly polarized light into a multi-Gaussian beam, and change some parameters of the multi-Gaussian beam through a spatial light modulator to realize dynamic control , and the multi-Gaussian beam can be shaped into a flat-hat beam.
  • the present invention provides a device for generating dynamically adjustable flat-hat light beams, including a light source assembly that emits linearly polarized light; a spatial light modulator that is located on one side of the light source assembly, and the linear Polarized light is input to the spatial light modulator, and the linearly polarized light is shaped into a multi-Gaussian beam output by the spatial light modulator; a 4F imaging system and a first lens, and the 4F imaging system and the first lens are sequentially arranged on The other side of the light source assembly; the multi-Gaussian beam passes through the 4F imaging system and the first lens in turn, and outputs a flat-hat beam on the focal plane of the first lens; the light intensity distribution detection component is located at On the focal plane of the first lens, the light intensity distribution detecting component is used to detect the light intensity distribution of the top-hat light beam.
  • the light source assembly includes a He-Ne laser and an optical beam expander; the optical beam expander is located below the He-Ne laser, and the linearly polarized light beam emitted by the He-Ne laser is input to the optical beam expander , the optical beam expander expands the linearly polarized light beam and adjusts it to a plane wave output.
  • the light source assembly further includes a polarizer and a half-wave plate
  • the polarizer is located below the optical beam expander, the plane wave passes through the polarizer, and the polarizer filters out the The non-linearly polarized part and output linearly polarized light
  • the half-wave plate is arranged below the polarizer and rotates the linearly polarized light
  • the polarizer and the half-wave plate cooperate with each other to eliminate the impact of background light on the experiment impact.
  • a beam splitter is arranged below the half-wave plate; the beam splitter divides the linearly polarized light into two, and divides the linearly polarized light into a reflected light part and a transmitted light part; The reflected light portion is input to the spatial light modulator.
  • the 4F imaging system includes a second lens and a third lens arranged in sequence, and the focal length of the second lens is equal to that of the third lens.
  • the focal lengths of the second lens and the third lens are both 150 mm.
  • the 4F imaging system further includes an aperture, and the aperture is disposed between the second lens and the third lens.
  • the light intensity distribution detection component includes a CCD charge-coupled device, and the CCD charge-coupled device is located on the focal plane of the first lens to capture the light intensity distribution of the top-hat beam.
  • a method for generating a dynamically adjustable flat-hat light beam comprising the following steps: S1, obtaining linearly polarized light; S2, using a complex screen method, using a spatial light modulator to shape the linearly polarized light, and converting the linearly polarized light to The linearly polarized light is shaped into a multi-Gaussian beam output; S3, the outputted multi-Gaussian beam passes through the 4F imaging system and the first lens in sequence, and finally outputs a flat-hat beam on the focal plane of the first lens.
  • the "multiple screen method is used to shape the linearly polarized light into a multi-Gaussian beam output", specifically including:
  • M indicates the order of the multi-Gaussian beam
  • ⁇ 0 indicates the beam waist
  • ⁇ x indicates the coherence width in the x direction
  • ⁇ y indicates the coherence width in the y direction
  • p(v) is an arbitrary non-negative weight function
  • represents the parameters related to the waist of a multi-Gaussian beam
  • ⁇ and ⁇ represent Parameters related to the coherence width of multi-Gaussian beams
  • the present invention realizes the construction of an optical path device that generates a dynamically adjustable flat-top beam by setting a light source component, a spatial light modulator, a 4F imaging system, a first lens, and a light intensity distribution detection component.
  • the structure is simple, the cost is low, and the energy consumption is low. .
  • the linearly polarized light emitted by the light source assembly of the present invention is shaped into a multi-Gaussian beam output by a spatial light modulator, and dynamic control can be realized by changing some parameters of the multi-Gaussian beam.
  • the Gaussian beam passes through the 4F imaging system and the first lens in turn, and the Gaussian beam is converted into a flat-hat beam output.
  • Fig. 1 is a structural representation of the present invention
  • Fig. 2 is the sectional view of the top-hat beam of the present invention
  • Fig. 3 is a light intensity distribution curve of the top-hat beam of the present invention.
  • the present invention discloses a device for generating a dynamically adjustable flat-hat beam, comprising:
  • a light source component a spatial light modulator 5, a 4F imaging system, a first lens 10 and a light intensity distribution detection component.
  • the above-mentioned light source assembly can emit linearly polarized light.
  • the above-mentioned light source assembly includes a helium-neon laser 1 , an optical beam expander 2 , a polarizer 3 and a half-wave plate 4 arranged sequentially from top to bottom.
  • the above-mentioned He-Ne laser 1 can emit a beam of completely coherent linearly polarized light
  • the above-mentioned completely coherent linearly polarized light beam is input to the above-mentioned optical beam expander 2, and the above-mentioned optical beam expander 2 can expand the above-mentioned completely coherent linearly polarized light beam and
  • the above perfectly coherent linearly polarized light is tuned into a plane wave.
  • the above-mentioned plane wave passes through the above-mentioned polarizer 3, and the above-mentioned polarizer 3 filters out the non-linearly polarized part of the plane wave and converts the above-mentioned plane wave into linearly polarized light for output.
  • the half-wave plate 4 is arranged below the polarizer 3, the half-wave plate 4 can rotate the linearly polarized light, and the cooperation between the polarizer 3 and the half-wave plate 4 can eliminate the influence of background light on the experiment.
  • a beam splitter 6 is arranged below the half-wave plate 4, and the beam splitter 6 can split the linearly polarized light into two, and divide it into a reflected light part and a transmitted light part.
  • the above-mentioned spatial light modulator 5 is located on one side of the above-mentioned light source assembly, more specifically, the above-mentioned spatial light modulator 5 is located on one side of the beam splitter 6 .
  • the above-mentioned linearly polarized light is split into two by the beam splitter 6, and the reflected light part is input to the spatial light modulator 5 and then shaped into a multi-Gaussian beam output by the above-mentioned spatial light modulator 5.
  • the above-mentioned spatial light modulator 5 is connected with the second computer 12, and the above-mentioned second computer 12 is used to load the speckle of the multi-Gaussian beam generated by the multi-screen method.
  • the above-mentioned 4F imaging system and the first lens 10 are sequentially arranged on the other side of the light source assembly, more specifically, the above-mentioned 4F imaging system and the first lens 10 are sequentially arranged on the other side of the beam splitter 6 .
  • the multi-Gaussian beam shaped and output by the above-mentioned light modulator passes through the above-mentioned beam splitter 6 again, and then passes through the above-mentioned 4F imaging system and the first lens 10 in sequence, and outputs a flat-hat beam on the focal plane of the first lens 10 .
  • the above-mentioned 4F imaging system includes a second lens 7, a third lens 9 and an aperture 8, and the above-mentioned aperture 8 is arranged between the second lens 7 and the third lens 9, and the focal length of the second lens 7 and the third lens 9 have the same focal length, the focal length of the second lens 7 and the focal length of the third lens 9 can be preferably 150mm.
  • the positive first-order light spot or the negative first-order light spot can be filtered through the diaphragm 8 in the above-mentioned 4F imaging system.
  • the light intensity distribution detection component is located on the side of the first lens 10 away from the 4F imaging system, and it can be used to detect the light intensity distribution of the top-hat beam.
  • the light intensity distribution detection component includes a CCD charge-coupled device 11, and the CCD charge-coupled device 11 is located on the focal plane of the first lens 10 to capture the light intensity distribution of the top-hat beam.
  • the above-mentioned CCD charge-coupled device 11 can be connected with the first computer 13 to save the light intensity distribution map captured by the CCD charge-coupled device 11 .
  • the linearly polarized light emitted by the light source assembly of the present invention is shaped into a multi-Gaussian beam output by the spatial light modulator 5, and dynamic control can be realized by changing some parameters of the multi-Gaussian beam.
  • the Gaussian beam passes through the 4F imaging system and the first lens 10 in sequence, so that the Gaussian beam is converted into a flat-hat beam output. Based on this, the present invention further discloses a method for generating a dynamically adjustable flat-hat beam, comprising the following steps:
  • is a complex function representing the amplitude, and its physical meaning is the shape of the light source.
  • is also a complex function, representing the degree of coherence of a partially coherent laser beam.
  • H ( ⁇ , v) determines the type of light field, what produce in the present invention is the Shell model light beam, so H function has Fourier transform form, and amplitude function satisfies Gaussian distribution, thus can obtain:
  • H( ⁇ , v) exp(- ⁇ 2 )exp[-i(xv x +yv y )], where ⁇ is a parameter related to the beam waist, and the value is taken according to the experimental requirements.
  • the cross spectral density function of the multi-Gaussian beam is:
  • M represents the order of the multi-Gaussian beam
  • ⁇ 0 represents the beam waist
  • ⁇ x represents the coherence width in the x direction
  • ⁇ y represents the coherence width in the y direction
  • represents the beam waist of the multi-Gaussian beam
  • ⁇ and ⁇ are coefficients related to the coherence width of the multi-Gaussian beam, which can be selected according to the experimental requirements.
  • the ABCD optical system is a simple focusing system (i.e. the first lens 10) among the present invention, so:
  • z represents the transmission distance
  • f' represents the focal length of the lens.
  • the linearly polarized light is divided into two by the beam splitter 6, and is shaped into a multi-Gaussian beam by the spatial light modulator 5,
  • the spatial light modulator 5 is loaded with 10,000 speckle images.
  • the second computer 12 loads the speckle pattern, and the CCD charge-coupled device 11 captures the corresponding speckle pattern after the light beam is transmitted.
  • Figure 2 and Figure 3 can be obtained by analyzing and processing the obtained speckle pattern.
  • Figure 2 is a light intensity profile
  • Figure 3 (b) is the light intensity distribution in the x direction
  • (c) is the light intensity distribution in the y direction.
  • the invention obtains the corresponding H function and p function according to the cross spectral density function of the multi-Gaussian beam, and then obtains the complex transmittance function, and uses the complex screen method to generate the multi-Gaussian beam.
  • the invention can realize dynamic regulation and generate a partially coherent elliptical flat-top beam with a specific beam waist, coherent width or flat-top degree.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un appareil pour générer un faisceau de tophat à réglage dynamique, comprenant un ensemble source de lumière, qui émet une lumière à polarisation linéaire; un modulateur spatial de lumière (5), qui est situé sur un côté de l'ensemble source de lumière, la lumière polarisée linéairement étant entrée dans le modulateur spatial de lumière (5), et le modulateur spatial de lumière (5) mettant en forme la lumière polarisée linéairement en un faisceau multi-gaussien pour la sortie; un système d'imagerie 4F et une première lentille (10), qui sont disposés de manière séquentielle sur l'autre côté de l'ensemble source de lumière, le faisceau multi-gaussien passant de manière séquentielle à travers le système d'imagerie 4F et la première lentille (10), et un faisceau de tophat étant émis sur un plan focal de la première lentille (10); et un ensemble de détection de distribution d'intensité de lumière, qui est situé sur le plan focal de la première lentille (10) et utilisé pour détecter la distribution d'intensité de lumière du faisceau de tophat. Est divulgué également un procédé de génération d'un faisceau de tophat à réglage dynamique. La lumière à polarisation linéaire peut être façonnée en un faisceau multi-gaussien. Des paramètres du faisceau multi-gaussien sont modifiés au moyen du modulateur spatial de lumière (5) pour obtenir une régulation et une commande dynamiques, et le faisceau multi-gaussien peut être façonné en un faisceau de tophat.
PCT/CN2022/076029 2021-08-27 2022-02-11 Appareil et procédé pour générer un faisceau de tophat réglable de manière dynamique WO2023024449A1 (fr)

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CN114200672B (zh) * 2022-02-17 2022-08-09 苏州大学 动态光场空间相干函数和振幅函数同步调制系统及方法

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