WO2022271852A9 - Ultrathin free-standing solid state membrane chips and methods of making - Google Patents

Ultrathin free-standing solid state membrane chips and methods of making Download PDF

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Publication number
WO2022271852A9
WO2022271852A9 PCT/US2022/034558 US2022034558W WO2022271852A9 WO 2022271852 A9 WO2022271852 A9 WO 2022271852A9 US 2022034558 W US2022034558 W US 2022034558W WO 2022271852 A9 WO2022271852 A9 WO 2022271852A9
Authority
WO
WIPO (PCT)
Prior art keywords
solid state
making
methods
state membrane
standing solid
Prior art date
Application number
PCT/US2022/034558
Other languages
French (fr)
Other versions
WO2022271852A1 (en
Inventor
Bo Zhang
Todd Anderson
Chris Mcallister
Original Assignee
University Of Washington
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University Of Washington filed Critical University Of Washington
Publication of WO2022271852A1 publication Critical patent/WO2022271852A1/en
Publication of WO2022271852A9 publication Critical patent/WO2022271852A9/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/05—Arrays
    • B81B2207/053—Arrays of movable structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

An ultrathin free-standing solid state membrane, including an etched well on a glass wafer, and a layer of SiX deposited on a backside of the etched well on the glass wafer.
PCT/US2022/034558 2021-06-22 2022-06-22 Ultrathin free-standing solid state membrane chips and methods of making WO2022271852A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202163213621P 2021-06-22 2021-06-22
US63/213,621 2021-06-22

Publications (2)

Publication Number Publication Date
WO2022271852A1 WO2022271852A1 (en) 2022-12-29
WO2022271852A9 true WO2022271852A9 (en) 2023-02-16

Family

ID=84544776

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2022/034558 WO2022271852A1 (en) 2021-06-22 2022-06-22 Ultrathin free-standing solid state membrane chips and methods of making

Country Status (1)

Country Link
WO (1) WO2022271852A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040197793A1 (en) * 2002-08-30 2004-10-07 Arjang Hassibi Methods and apparatus for biomolecule detection, identification, quantification and/or sequencing
CN103282518B (en) * 2010-12-17 2016-11-16 纽约哥伦比亚大学理事会 Use synthesis limit, the DNA limit order-checking of modified nucleotide and nano-pore detection
JP2016518117A (en) * 2013-03-15 2016-06-23 ユニバーシティ オブ ワシントン スルー イッツ センター フォー コマーシャリゼーション Devices and methods comprising microelectrode arrays for conductive cells
US20180095067A1 (en) * 2015-04-03 2018-04-05 Abbott Laboratories Devices and methods for sample analysis
US10274478B2 (en) * 2016-03-03 2019-04-30 The Trustees Of The University Of Pennsylvania Ultra low capacitance glass supported dielectric membranes for macromolecular analysis

Also Published As

Publication number Publication date
WO2022271852A1 (en) 2022-12-29

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