WO2022271135A3 - A mems comb finger resonator coating method - Google Patents
A mems comb finger resonator coating method Download PDFInfo
- Publication number
- WO2022271135A3 WO2022271135A3 PCT/TR2022/050630 TR2022050630W WO2022271135A3 WO 2022271135 A3 WO2022271135 A3 WO 2022271135A3 TR 2022050630 W TR2022050630 W TR 2022050630W WO 2022271135 A3 WO2022271135 A3 WO 2022271135A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- selecting
- comb finger
- group
- mems comb
- finger resonator
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title abstract 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 2
- 229920000867 polyelectrolyte Polymers 0.000 abstract 2
- -1 tetrabutyl ammonium tetrafluoroborate Chemical compound 0.000 abstract 2
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 1
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 abstract 1
- 229910000366 copper(II) sulfate Inorganic materials 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract 1
- 239000013067 intermediate product Substances 0.000 abstract 1
- MHCFAGZWMAWTNR-UHFFFAOYSA-M lithium perchlorate Chemical compound [Li+].[O-]Cl(=O)(=O)=O MHCFAGZWMAWTNR-UHFFFAOYSA-M 0.000 abstract 1
- 229910001486 lithium perchlorate Inorganic materials 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 229910021392 nanocarbon Inorganic materials 0.000 abstract 1
- 239000002105 nanoparticle Substances 0.000 abstract 1
- 239000003960 organic solvent Substances 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 239000011780 sodium chloride Substances 0.000 abstract 1
- 229940083575 sodium dodecyl sulfate Drugs 0.000 abstract 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- 239000003115 supporting electrolyte Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0214—Biosensors; Chemical sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0271—Resonators; ultrasonic resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0136—Comb structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Micromachines (AREA)
Abstract
The present relates to a MEMS comb finger resonator coating method comprising the steps of, Selecting a material to be coated on the MEMS comb finger resonator, from a group consisting of organic-inorganic molecules, polymer nanocarbon structures and nanoparticles, that can electrochemically form a film, Selecting a solution that does not undergo electrochemical changes in the potential range to be applied, does not react with intermediate products formed in the environment during the electrochemical process, and does not dissolve the sensing element formed as a result of the electrochemical process, using MEMS comb finger resonator as working electrode, Selecting a counter electrode from a group consisting of metal or metal oxide materials such as platinum, gold, palladium, tungsten, steel, Selecting a reference electrode from a group consisting of reference electrodes such as SCE, Ag/AgC1, Cu/CuSO4, Ag, selecting a supporting electrolyte from a group consisting of molecular salts soluble in organic solvents such as tetrabutyl ammonium tetrafluoroborate, tetrabutyl ammonium hexa fluorophosphate, lithium perchlorate, polyelectrolytes or mixtures thereof, water-soluble sodium chloride, hydrogen chloride, sodiumdodecylsulfate, p-20 toluenesulfonic acid, polyelectrolytes, or mixtures thereof, Placing a MEMS comb finger resonator in solution contacting the working electrode with the thinned tip to the proof mass, contacting the counter electrode and the working electrode with the solution, applying potential to the system through electrodes according to the type of sensing element and desired thickness.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TR2021/010193 | 2021-06-22 | ||
| TR2021010193 | 2021-06-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2022271135A2 WO2022271135A2 (en) | 2022-12-29 |
| WO2022271135A3 true WO2022271135A3 (en) | 2023-06-01 |
Family
ID=84546023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/TR2022/050630 WO2022271135A2 (en) | 2021-06-22 | 2022-06-22 | A mems comb finger resonator coating method |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2022271135A2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1672654A1 (en) * | 2004-12-16 | 2006-06-21 | Electronics and Telecommunications Research Institute | Microelectromechanical System Actuator |
| US20110256484A1 (en) * | 2010-04-14 | 2011-10-20 | Tokyo Metropolitan University | Method for producing comb-shaped electrode |
| US20180372675A1 (en) * | 2017-06-27 | 2018-12-27 | Honeywell International Inc. | Compact gas sensor including a mems element having capillaries to facilitate gas diffusion |
-
2022
- 2022-06-22 WO PCT/TR2022/050630 patent/WO2022271135A2/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1672654A1 (en) * | 2004-12-16 | 2006-06-21 | Electronics and Telecommunications Research Institute | Microelectromechanical System Actuator |
| US20110256484A1 (en) * | 2010-04-14 | 2011-10-20 | Tokyo Metropolitan University | Method for producing comb-shaped electrode |
| US20180372675A1 (en) * | 2017-06-27 | 2018-12-27 | Honeywell International Inc. | Compact gas sensor including a mems element having capillaries to facilitate gas diffusion |
Non-Patent Citations (3)
| Title |
|---|
| CHEN DA, YANG LEI, YU WENHUA, WU MAOZENG, WANG WEI, WANG HONGFEI: "Micro-Electromechanical Acoustic Resonator Coated with Polyethyleneimine Nanofibers for the Detection of Formaldehyde Vapor", MICROMACHINES, vol. 9, no. 2, 1 January 2018 (2018-01-01), pages 1 - 12, XP093071121, DOI: 10.3390/mi9020062 * |
| DAM V.A.T.; WOUTERS D.; KNOBEN W.; BRONGERSMA S.H.; VAN SCHAIJK R.: "Polymer coated MEMS resonator for room temperature NH3 sensing", IEEE SENSORS 2014 PROCEEDINGS, 2 November 2014 (2014-11-02), pages 194 - 197, XP032702690, DOI: 10.1109/ICSENS.2014.6984966 * |
| TEZ, SERDAR; AYTAŞKIN, ERGUN: "Design and fabrication of mems technology based capacitive resonator", MSC THESIS, 31 December 2020 (2020-12-31), Turkey, pages 1 - 109, XP009546593 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022271135A2 (en) | 2022-12-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Debiemme-Chouvy et al. | Electrosynthesis of polypyrrole nano/micro structures using an electrogenerated oriented polypyrrole nanowire array as framework | |
| Rohwerder et al. | Conducting polymers for corrosion protection: What makes the difference between failure and success? | |
| Pernaut et al. | Use of conducting electroactive polymers for drug delivery and sensing of bioactive molecules. A redox chemistry approach | |
| Jin et al. | A facile approach for the fabrication of core–shell PEDOT nanofiber mats with superior mechanical properties and biocompatibility | |
| Dudin et al. | Electrochemistry at nanoscale electrodes: individual single-walled carbon nanotubes (SWNTs) and SWNT-templated metal nanowires | |
| Brahim et al. | Electroconductive hydrogels: Electrical and electrochemical properties of polypyrrole‐poly (HEMA) composites | |
| CN101104940B (en) | Preparation for gold electrode with nano-pore structure by electrochemistry alloying/dealloying method | |
| Szewczyk et al. | Polydopamine films: Electrochemical growth and sensing applications | |
| Atta et al. | Voltammetric behavior and determination of isoniazid using PEDOT electrode in presence of surface active agents | |
| Láng et al. | In situ monitoring of the electrochemical degradation of polymer films on metals using the bending beam method and impedance spectroscopy | |
| Rather et al. | Electrochemical sensing of parabens in solubilized ionic liquid system at polyaniline decorated gold nanoparticles constructed interface | |
| Nia et al. | One-step electrodeposition of polypyrrole-copper nano particles for H2O2 detection | |
| Koene et al. | Electrochemical behaviour of poly (pyrrole) coatings on steel | |
| Troiani et al. | Cathodically pretreated poly (1-aminoanthraquinone)-modified electrode for determination of ascorbic acid, dopamine, and uric acid | |
| DE10018750A1 (en) | Ion-selective glass electrode, useful in chemical analysis to determine ion activity, has contact layer of intrinsically conducting polymer and/or cation exchange polymer on internal conductor | |
| CN105907844A (en) | Electrochemical DNA biosensor based on three-dimensional graphene-dendritic nanogold, and preparation method thereof | |
| WO2022271135A3 (en) | A mems comb finger resonator coating method | |
| Belghiti et al. | Boron doped diamond/metal nanoparticle catalysts hybrid electrode array for the detection of pesticides in tap water | |
| Pyo et al. | Potential dependent dual ion transport of conducting polymer: Redox polymer bilayers | |
| Hathoot et al. | Electrooxidation and determination of tramadol in the presence of dopamine at poly 1, 8-diaminonaphthalene derivative modified platinum electrode | |
| Gutierrez Pineda et al. | Electrochemical preparation and characterization of polypyrrole/stainless steel electrodes decorated with gold nanoparticles | |
| Brito et al. | Electron transfer kinetics across derivatized self-assembled monolayers on platinum: a cyclic voltammetry and electrochemical impedance spectroscopy study | |
| Myeni et al. | Organic matrix stabilized copper sulfide nanoparticles: Synthesis, characterization and application in glucose recognition | |
| Ball | Electrodeposition of pyrocatechol based films: Influence of potential scan rate, pyrocatechol concentration and pH | |
| Fall et al. | Electrochemical impedance spectroscopy of poly (3-methoxythiophene) thin films in aqueous LiClO4 solutions |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NENP | Non-entry into the national phase |
Ref country code: DE |