WO2022270407A1 - Photosensitive resin composition, cured resin film, and image display device - Google Patents

Photosensitive resin composition, cured resin film, and image display device Download PDF

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Publication number
WO2022270407A1
WO2022270407A1 PCT/JP2022/024139 JP2022024139W WO2022270407A1 WO 2022270407 A1 WO2022270407 A1 WO 2022270407A1 JP 2022024139 W JP2022024139 W JP 2022024139W WO 2022270407 A1 WO2022270407 A1 WO 2022270407A1
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group
meth
alkali
resin
resin composition
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PCT/JP2022/024139
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French (fr)
Japanese (ja)
Inventor
正偉 周
正義 柳
健宏 木下
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昭和電工株式会社
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Priority to JP2023530407A priority Critical patent/JPWO2022270407A1/ja
Publication of WO2022270407A1 publication Critical patent/WO2022270407A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/04Acids; Metal salts or ammonium salts thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/12Esters of monohydric alcohols or phenols
    • C08F220/16Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F220/18Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/26Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/32Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds

Definitions

  • the present invention relates to a photosensitive resin composition, a cured resin film thereof, and an image display device comprising the cured resin film.
  • touch panels have become popular as input devices for mobile phones, tablet computers, vending machines, bank ATMs (automated teller machines), etc.
  • touch panels there are resistive type, optical type, ultrasonic type, and capacitive type touch panels.
  • a capacitive touch panel detects an input position by detecting a change in capacitance between electrodes caused by pressing.
  • Patent Document 1 even if a detection electrode portion having a wide-pitch mesh pattern with small parasitic capacitance and high detection sensitivity is used, visibility is improved, and moire occurs when a touch panel and a display device are combined.
  • a touch panel using a conductive member capable of suppressing is described.
  • Patent Document 2 discloses a touch panel using a glass substrate coated with a film-forming composition.
  • Patent Document 2 describes a film-forming composition containing a polysiloxane compound, a polythiol compound containing no silicon in the molecule, a polymerization initiator and an organic solvent.
  • Patent Document 3 describes a touch panel protective film and a touch panel insulating film obtained by curing a photosensitive resin composition.
  • Patent Document 3 discloses a hydrophilic resin (A) having a radically polymerizable group, a polyfunctional (meth)acrylate (B) having no phosphoric acid group, and a (meth)acrylate (C) having a phosphoric acid group.
  • a photosensitive resin composition used as a material for a resin cured film used as an insulating film and/or a protective film has good storage stability and is highly accurate using a photolithography method. It is required to have good developability capable of forming a cured resin film having a pattern shape of . Furthermore, in the photosensitive resin composition used for the above applications, the resin cured film obtained by curing the photosensitive resin composition has high hardness, adhesion to the substrate and / or base, water resistance, High temperature and high humidity resistance and good transparency are required. However, conventional photosensitive resin compositions do not satisfy all of the above performances required for materials for cured resin films used in image display devices.
  • the present invention has been made in view of the above circumstances, has good storage stability, and has good developability that can form a resin cured film having a highly accurate pattern shape using a photolithography method,
  • a photosensitive resin composition which, when cured, provides a cured resin film having high hardness, adhesion to substrates and/or substrates, water resistance, resistance to high temperature and high humidity, and transparency.
  • the present invention provides a cured resin obtained by curing the photosensitive resin composition of the present invention, which has high hardness, adhesion to a substrate and / or a base, water resistance, high temperature and high humidity resistance, and good transparency.
  • An object of the present invention is to provide a film and an image display device having the same.
  • the present invention provides a composition of the following first aspect.
  • the (A) alkali-soluble resin contains a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and has an acid group and a (meth)acryloyloxy group.
  • a photosensitive resin composition wherein the (B) alkoxysilyl group-containing resin comprises a structural unit (b-1) derived from an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group.
  • the first aspect of the present invention has the following features. Combinations of two or more of the following features are also preferred.
  • [2] The photosensitive resin composition according to [1], wherein the mass ratio of (A) the alkali-soluble resin and (B) the alkoxysilyl group-containing resin is 40:60 to 99:1.
  • [3] The photosensitive resin according to [1] or [2], wherein the content of the structural unit (b-1) in all repeating structural units of the alkoxysilyl group-containing resin (B) is 45 mol% or more. Composition.
  • the (A) alkali-soluble resin comprises the structural unit (a-1), the structural unit (a-2) derived from an unsaturated monobasic acid (ma-2), and an alicyclic hydrocarbon group.
  • the (B) alkoxysilyl group-containing resin contains a structural unit (b-2) derived from an unsaturated monobasic acid (mb-2), The photosensitive resin composition according to any one of [1] to [6], which has an acid value of 150 KOHmg/g or less.
  • the solvent (E) contains one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms,
  • the photosensitive resin composition according to any one of [1] to [9], wherein the total alcohol content in all solvents is 15 to 100% by mass.
  • (F) The photosensitive resin composition according to any one of [1] to [10], further comprising a silane coupling agent.
  • (F) The photosensitive resin composition according to [11], wherein the (F) silane coupling agent has one or more functional groups selected from (meth)acrylic, vinyl and styryl groups.
  • (C) reactive diluent With respect to a total of 100 parts by mass of the (A) alkali-soluble resin, the (B) alkoxysilyl group-containing resin, and the (C) reactive diluent, The photosensitive resin composition according to [11] or [12], containing 0.1 to 20 parts by mass of the (F) silane coupling agent.
  • the present invention provides a cured resin film of the following second aspect.
  • a cured resin film comprising a cured product of the photosensitive resin composition according to any one of [1] to [13].
  • the present invention provides an image display device according to a third aspect described below.
  • An image display device comprising the cured resin film of [14].
  • the device of the third aspect of the invention preferably has the following features. Combinations of two or more of the following features are also preferred.
  • the image display device according to [15] which has a protective film made of the cured resin film.
  • the image display device according to [15] which has an insulating film made of the cured resin film.
  • the photosensitive resin composition of the present invention comprises a specific (A) alkali-soluble resin, a specific (B) alkoxysilyl group-containing resin, (C) a reactive diluent, and (D) a photoradical polymerization initiator. , and (E) a solvent. Therefore, the photosensitive resin composition of the present invention has good storage stability. Moreover, since the photosensitive resin composition of the present invention has good developability, a cured resin film having a highly accurate pattern shape can be formed using a photolithographic method. Moreover, by curing the photosensitive resin composition of the present invention, a cured resin film having high hardness, good adhesion to the base material and/or base, water resistance, resistance to high temperature and high humidity, and transparency can be obtained. be done. Therefore, the photosensitive resin composition of the present invention is suitable as a material for cured resin films used as insulating films and/or protective films in image display devices such as touch panels.
  • the cured resin film of the present invention is made of the cured product of the photosensitive resin composition of the present invention, it has high hardness, adhesion to the base material and / or the base, water resistance, high temperature and high humidity resistance, transparency. Good properties. Since the image display device of the present invention includes the cured resin film of the present invention, it is excellent in reliability and durability.
  • (meth)acrylic acid means at least one selected from methacrylic acid and acrylic acid. The same applies to "(meth)acrylate", “(meth)acryloyloxy” and the like.
  • the photosensitive resin composition of the present embodiment includes (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, (D) a photoradical polymerization initiator, and (E ) solvent and
  • the photosensitive resin composition of the present embodiment may further contain (F) a silane coupling agent, if necessary.
  • a silane coupling agent if necessary.
  • the alkali-soluble resin is a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group (hereinafter also simply referred to as "structural unit (a-1)"). ) and has an acid group and a (meth)acryloyloxy group.
  • a resin having an alkoxysilyl group does not correspond to (A) an alkali-soluble resin.
  • the photosensitive resin composition of the present embodiment contains (A) an alkali-soluble resin, it has good storage stability.
  • (A) contains an alkali-soluble resin, the photosensitive resin composition has good developability and can form a resin cured film having good water resistance and high temperature and high humidity resistance.
  • As the acid group it is preferable to have a carboxy group from the viewpoint of alkali solubility of the photosensitive resin composition.
  • (A) As a method for introducing an acid group into an alkali-soluble resin for example, a method of introducing by polymerizing a raw material monomer containing a monomer having an acid group, a method of introducing an epoxy group into a precursor of (A) an alkali-soluble resin , a method of introducing by adding an acid anhydride, and the like.
  • a functional group-containing resin precursor is produced by polymerizing a raw material monomer containing a monomer having a functional group. After that, a group reactive with the functional group contained in the functional group-containing resin precursor and a compound having a (meth)acryloyloxy group are reacted with the functional group-containing resin precursor. As a result, (A) an alkali-soluble resin having a (meth)acryloyloxy group is obtained.
  • Examples of the combination of the functional group contained in the functional group-containing resin precursor and the group reactive with the functional group include a combination of a carboxy group and an epoxy group, an isocyanato group and a hydroxy group, and the like.
  • Specific examples of the combination of a carboxy group and an epoxy group include a combination of an unsaturated monobasic acid such as (meth)acrylic acid and an epoxy group-containing (meth)acrylate such as glycidyl (meth)acrylate.
  • isocyanato groups and hydroxy groups include isocyanato group-containing monomers such as 2-(meth)acryloyloxyethyl isocyanate and hydroxy group-containing (meth)acrylates such as 2-hydroxyethyl (meth)acrylate. combinations, etc.
  • the alkali-soluble resin includes, in addition to the structural unit (a-1), a structural unit (a-2) derived from an unsaturated monobasic acid (ma-2) (hereinafter simply referred to as “structural unit (a-2 )". It is preferable that an acid group is introduced by having ).
  • the alkali-soluble resin is derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group in addition to the structural unit (a-1) and the structural unit (a-2) (hereinafter simply referred to as “structural unit (a-3)”).
  • the alkali-soluble resin includes, in addition to the structural units (a-1) to (a-3), the structural unit (a-4) derived from another ethylenically unsaturated group-containing compound (ma-4) ( Hereinafter, it may be simply referred to as “structural unit (a-4)”).
  • the alkali-soluble resin is such that when the acid group of (A) the alkali-soluble resin is a carboxy group, a part of the carboxy group is an epoxy group-containing (meth)acrylate (ma-5)-derived structural unit ( It is preferably a resin modified with a-5) (hereinafter also simply referred to as “structural unit (a-5)”). That is, (A) the alkali-soluble resin is preferably a resin in which a (meth)acryloyloxy group is introduced into the side chain.
  • the alkali-soluble resin has an ethylenically unsaturated group equivalent of 400 g/mol or more, preferably 500 g/mol or more, more preferably 550 g/mol or more, and still more preferably 590 g/mol or more.
  • the ethylenically unsaturated group equivalent is 400 g / mol or more, it can sufficiently react with the reactive diluent (C), resulting in a photosensitive resin composition having good developability and obtaining a cured resin film with high hardness. It becomes a photosensitive resin composition.
  • ethylenically unsaturated group equivalent is 400 g/mol or more
  • curing shrinkage in a cured resin film obtained by curing the photosensitive resin composition can be suppressed.
  • a cured resin film having good adhesion to the substrate and/or base can be obtained.
  • the alkali-soluble resin has an ethylenically unsaturated group equivalent of 2500 g/mol or less, preferably 2000 g/mol or less, more preferably 1500 g/mol or less, and still more preferably 1400 g/mol or less.
  • the ethylenically unsaturated group equivalent is 2500 g/mol or less, it is possible to ensure sufficient alkali solubility, to have sufficient developability, and to obtain a resin cured film having sufficient high temperature and high humidity resistance by curing. It becomes the photosensitive resin composition obtained.
  • the ethylenically unsaturated group equivalent of the alkali-soluble resin is, for example, (A) the ratio of the structural unit (a-2) derived from the unsaturated monobasic acid (ma-2) in the alkali-soluble resin and / or epoxy It can be adjusted by the proportion of the structural unit (a-5) derived from the group-containing (meth)acrylate (ma-5).
  • Ethylenically unsaturated bond equivalent is the mass of the polymer per 1 mol of unsaturated bond of the polymer.
  • (A) The ethylenically unsaturated bond equivalent of the alkali-soluble resin is obtained by dividing the mass of the (A) alkali-soluble resin by the number of moles of unsaturated bonds contained in the (A) alkali-soluble resin (g /mol).
  • the alkali-soluble resin contains a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group and having no acid group or epoxy group.
  • the alkali-soluble resin (A) contains the structural unit (a-1), it has good developability and is photosensitive to form a cured resin film with good water resistance and high temperature and high humidity resistance. It becomes a resin composition.
  • the structural unit (a-1) may be derived from only one ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, or two or more aromatic groups. It may be derived from the ethylenically unsaturated group-containing compound (ma-1) having
  • Examples of the ethylenically unsaturated group-containing compound (ma-1) having an aromatic group as a starting material for the structural unit (a-1) include styrene, methoxystyrene, tert-butoxystyrene, methylstyrene, chlorostyrene, p - Styrene compounds such as nitrostyrene, p-cyanostyrene, p-acetylaminostyrene; benzyl (meth)acrylate, rosin (meth)acrylate, triphenylmethyl (meth)acrylate, phenyl (meth)acrylate, cumyl (meth)acrylate , 4-phenoxyphenyl (meth)acrylate, phenoxyethyl (meth)acrylate, phenoxypolyethylene glycol (meth)acrylate, nonylphenoxypolyethylene glycol mono (meth)acrylate, biphenyloxyethyl (meth)acrylate,
  • aromatic group-containing ethylenically unsaturated group-containing compounds (ma-1) styrene compounds and aromatic ring-containing (meth)acrylic acid esters are preferred from the viewpoint of raw material availability and reaction easiness.
  • an ethylenically unsaturated monomer having a phenolic hydroxyl group is preferred.
  • the ethylenically unsaturated group-containing compound (ma-1) is more preferably one or more selected from benzyl (meth) acrylate, styrene, and 4-hydroxyphenyl methacrylate, and benzyl (meth) acrylate and/or styrene. It is even more preferable to have
  • the (A) alkali-soluble resin may have an acid group introduced therein by containing a structural unit (a-2) derived from an unsaturated monobasic acid (ma-2).
  • a-2 an unsaturated monobasic acid
  • the structural unit (a-2) may be derived from only one unsaturated monobasic acid (ma-2), or derived from two or more unsaturated monobasic acids (ma-2). It may be something to do.
  • the unsaturated monobasic acid (ma-2) as a starting material for the structural unit (a-2) include (meth)acrylic acid, itaconic acid, crotonic acid, vinyl benzoic acid, and ⁇ -position of (meth)acrylic acid. Haloalkyl, alkoxyl, halogen, nitro, cyano substituted and the like.
  • (meth)acrylic acid is preferred because it provides a photosensitive resin composition with good developability.
  • the alkali-soluble resin has an ethylenically unsaturated group-containing compound (ma-3) having no aromatic group, acid group, or epoxy group and having an alicyclic hydrocarbon group (ma-3)-derived structural unit (a- 3).
  • ma-3 ethylenically unsaturated group-containing compound having no aromatic group, acid group, or epoxy group and having an alicyclic hydrocarbon group (ma-3)-derived structural unit (a- 3).
  • a cured resin film having higher hardness, excellent high-temperature and high-humidity resistance, excellent resistance to heat yellowing, and good transparency can be obtained.
  • the structural unit (a-3) may be derived from only one ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group, or may be derived from two or more It may be derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group.
  • the structural unit (a-3) includes a monomer unit derived from an ester compound of alicyclic alcohol and methacrylic acid.
  • Alicyclic alcohols preferably have 6 to 20 carbon atoms, more preferably 6 to 18 carbon atoms.
  • the alicyclic alcohol may be a monocyclic alicyclic alcohol or a polycyclic alicyclic alcohol, preferably a polycyclic alicyclic alcohol.
  • Examples of the ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group as a starting material for the structural unit (a-3) include cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, and methylcyclohexyl.
  • (meth)acrylate ethylcyclohexyl (meth)acrylate, dicyclohexyl (meth)acrylate, 1,4-cyclohexanedimethanol mono (meth)acrylate, tricyclodecanyl (meth)acrylate (dicyclopentanyl (meth)acrylate), tricyclodecanyloxyethyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentenyloxyethyl (meth)acrylate, isobornyl (meth)acrylate, adamantyl (meth)acrylate, rosin (meth)acrylate, norbornyl (meth)acrylate ) acrylate, 5-methylnorbornyl (meth)acrylate, 5-ethylnorbornyl (meth)acrylate and the like.
  • ethylenically unsaturated group-containing compounds (ma-3) having an alicyclic hydrocarbon group resins with high hardness, good high-temperature and high-humidity resistance, excellent heat resistance to yellowing, and good transparency
  • (Meth) acrylate having an alicyclic hydrocarbon group having 6 to 20 carbon atoms is preferable, and a (meth) acrylate having a polycyclic alicyclic hydrocarbon group is preferred because the photosensitive resin composition provides a cured film. is more preferred, and tricyclodecanyl (meth)acrylate is even more preferred.
  • the structural unit (a-1) A structural unit derived from one or more selected from benzyl (meth) acrylate, styrene, and hydroxyphenyl (meth) acrylate, which are ethylenically unsaturated group-containing compounds (ma-1) having a group
  • the unit (a-2) is a structural unit derived from (meth)acrylic acid, which is an unsaturated monobasic acid (ma-2), and the structural unit (a-3) has an alicyclic hydrocarbon group.
  • Structural units derived from tricyclodecanyl (meth)acrylate, which is the ethylenically unsaturated group-containing compound (ma-3), are preferred.
  • the structural unit (a-4) may be derived from only one other ethylenically unsaturated group-containing compound (ma-4), or two or more other ethylenically unsaturated group-containing It may be derived from the compound (ma-4).
  • Any compound having a group is not particularly limited, and examples include dienes such as butadiene, isoprene, and chloroprene; methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, iso-propyl (meth)acrylate , n-butyl (meth)acrylate, tert-butyl (meth)acrylate, pentyl (meth)acrylate, neopentyl (meth)acrylate, isoamyl (meth)acrylate, hexyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, lauryl (meth) acrylate, dodecyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, 1,1,1-trifluoroethyl (meth) acrylate, perfluoroethyl (meth) acrylate,
  • a photosensitive resin cured film having good adhesion to the substrate and/or the undercoat can be obtained.
  • (Meth)acrylic acid esters having no aromatic ring are preferred, and tetrahydrofurfuryl (meth)acrylate is more preferred, since the resin composition is a flexible resin composition.
  • the epoxy group-containing (meth)acrylate (ma-5) is not particularly limited as long as it is a (meth)acrylate having an epoxy group and having neither an aromatic group nor an acid group.
  • the structural unit (a-5) may be derived from only one epoxy group-containing (meth)acrylate (ma-5), or may be derived from two or more epoxy group-containing (meth)acrylates (ma- 5) may be derived.
  • Examples of the epoxy group-containing (meth)acrylate (ma-5) as a starting material for the structural unit (a-5) include glycidyl (meth)acrylate, 3,4-epoxycyclohexylmethyl (meth)acrylate, and alicyclic epoxy groups. (meth)acrylates and their lactone adducts, 3,4-epoxycyclohexylmethyl-3′,4′-epoxycyclohexane carboxylate, epoxidized dicyclopentenyl (meth)acrylate, and dicyclopentenyloxyethyl (meth) Examples include epoxidized acrylates. Among these epoxy group-containing (meth)acrylates (ma-5), glycidyl (meth)acrylate and 3,4-epoxycyclohexylmethyl (meth)acrylate are preferred from the standpoint of availability of raw materials.
  • Alkali-soluble resin comprises a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and a structural unit derived from an unsaturated monobasic acid (ma-2) (a-2), and a configuration (a-3) derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group, and if necessary, other ethylenically unsaturated Part of the carboxy groups of the resin precursor comprising a copolymer containing the structural unit (a-4) derived from the saturated group-containing compound (ma-4) is converted to the epoxy group-containing (meth)acrylate (ma-5).
  • the alkali-soluble resin contains structural units (a-1) to (a-3) which are resin precursors, and optionally further contains a structural unit (a-4).
  • the chain is preferably a resin modified with the structural unit (a-5).
  • the content of the structural unit (a-1) in all repeating structural units of the alkali-soluble resin is 15 mol% or more, preferably 20 mol% or more, more preferably 30 mol% or more, and still more preferably. is 35 mol % or more.
  • the photosensitive resin composition has sufficient developability and can form a resin cured film having sufficient water resistance and high temperature and high humidity resistance. Become.
  • the content of the structural unit (a-1) is 60 mol% or less, preferably 50 mol% or less, more preferably 45 mol% or less.
  • the content of the structural unit (a-1) is 60 mol % or less, a cured resin film having sufficient transparency can be obtained.
  • the function due to inclusion of other components of the structural unit (a-1) can be sufficiently obtained. Therefore, it is possible to prevent the formation of a photosensitive resin composition that easily provides a cured resin film having poor adhesion to the substrate and/or the undercoat due to an excessive content of the structural unit (a-1).
  • the content of the structural unit (a-2) in all repeating structural units of the alkali-soluble resin (A) is the alkali of the photosensitive resin composition. From the viewpoint of solubility in a developer, it is preferably 15 mol % to 60 mol %, more preferably 20 mol % to 55 mol %, even more preferably 25 mol % to 50 mol %.
  • the content of the structural unit (a-3) in all repeating structural units of the alkali-soluble resin (A) is preferably 2 mol% to 50 mol%. , more preferably 5 mol % to 40 mol %, more preferably 9 mol % to 30 mol %.
  • the content of the structural unit (a-3) is 2 mol% or more, a photosensitive resin film having higher hardness, excellent high-temperature and high-humidity resistance, excellent resistance to heat yellowing, and good transparency can be obtained. It becomes a flexible resin composition.
  • the content of the structural unit (a-3) is 50 mol% or less, the content of other structural units of the structural unit (a-3) can be sufficiently ensured, and the balance of various performances is further improved. It becomes the removed photosensitive resin composition or a resin cured film.
  • the acid group of the alkali-soluble resin is a carboxy group, and a part of the carboxy group is modified with an epoxy group-containing (meth)acrylate (ma-5) to be converted into the structural unit (a-5).
  • the modification amount of the carboxy group converted to the structural unit (a-5) is preferably 15 mol% to 90 mol%, more preferably 20 mol% to 80 mol%, and 30 mol% to More preferably, it is 70 mol %.
  • the modified amount of the carboxy group converted to the structural unit (a-5) is the structural unit (a-5) relative to the sum of the number of structural units (a-5) and the number of carboxy groups of the alkali-soluble resin (A). means a percentage of numbers.
  • the modification amount of the carboxy group converted to the structural unit (a-5) is 15 mol% or more, a sufficient amount of (meth)acryloyloxy group is introduced into (A) the alkali-soluble resin, and (C) the reaction It is possible to obtain a cured resin film which can sufficiently react with a polar diluent, has good developability, and has sufficient hardness and adhesion to a base material and/or an undercoat.
  • the modified amount of carboxy groups is 90 mol % or less, a sufficient amount of carboxy groups remains in (A) the alkali-soluble resin. Therefore, the photosensitive resin composition can ensure sufficient alkali solubility, has good developability, and can provide a cured resin film having sufficient resistance to high temperature and high humidity.
  • the photosensitive resin composition in which the ethylenically unsaturated group equivalent of (A) the alkali-soluble resin is in the range of 400 g/mol to 2500 g/mol is likely to be obtained.
  • the acid value of the alkali-soluble resin is preferably 20KOHmg/g to 200KOHmg/g, more preferably 25KOHmg/g to 180KOHmg/g, and further preferably 30KOHmg/g to 150KOHmg/g. preferable.
  • the photosensitive resin composition has excellent solubility in an alkaline developer and good developability.
  • the acid value is 200 KOH mg/g or less
  • the decomposition of the (B) alkoxysilyl group-containing resin due to the too high acid value of the (A) alkali-soluble resin can be suppressed, and the photosensitive resin has good storage stability. It becomes a composition.
  • the acid value can be arbitrarily selected within the above range, and may be, for example, 40 mg KOH/g to 130 mg KOH/g or 60 mg KOH/g to 100 mg KOH/g.
  • the acid value of the alkali-soluble resin can be adjusted, for example, by adjusting the amount of the unsaturated monobasic acid (ma-2) used as the starting material for the structural unit (a-2). ) can be adjusted by adjusting the content.
  • a portion of the alkali-soluble resin is modified to the structural unit (m-5)
  • a carboxy group derived from an unsaturated monobasic acid (ma-2) is modified into structural units (m-5) derived from epoxy group-containing (meth)acrylate (ma-5), and the acid value of (A) the alkali-soluble resin may be insufficient.
  • a carboxyl group may be introduced into (A) the alkali-soluble resin partially modified with the structural unit (m-5) to compensate for the insufficient acid value.
  • an acid anhydride is added to a hydroxy group generated by ring-opening of the epoxy group contained in (A) the alkali-soluble resin partially modified with the structural unit (m-5). and other methods can be used.
  • the acid value of (A) the alkali-soluble resin in this embodiment is a value measured using a mixed indicator of bromothymol blue and phenol red according to JIS K6901 5.3.
  • the acid value of the alkali-soluble resin means the number of mg of potassium hydroxide required to neutralize the acidic component contained in 1 g of the sample comprising the (A) alkali-soluble resin.
  • the alkali-soluble resin preferably has a polystyrene equivalent weight average molecular weight (Mw) of 1,000 to 50,000, more preferably 5,000 to 45,000, and 8,000 to 42 ,000 is more preferred.
  • Mw polystyrene equivalent weight average molecular weight
  • the weight average molecular weight (Mw) of the alkali-soluble resin is 1,000 or more, the cured resin film obtained by curing the photosensitive resin composition has sufficiently small curing shrinkage, The adhesiveness with is good.
  • the weight average molecular weight (Mw) of the alkali-soluble resin is 50,000 or less, the photosensitive resin composition has good developability.
  • the weight average molecular weight (Mw) of (A) the alkali-soluble resin in the present embodiment is measured using gel permeation chromatography (GPC) under the following conditions and calculated in terms of polystyrene. .
  • GPC gel permeation chromatography
  • Developing solvent Tetrahydrofuran Detector: Differential refractometer (trade name: Shodex (registered trademark) RI-71S, Showa Denko Co., Ltd.)
  • an alkali-soluble resin is a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and an unsaturated monobasic acid (ma-2) derived from Containing a structural unit (a-2) and a structure (a-3) derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group, and optionally other ethylene
  • the carboxy groups of the resin precursor comprising a copolymer containing a structural unit (a-4) derived from a polyunsaturated group-containing compound (ma-4) is an epoxy group-containing (meth)acrylate (ma-5 ) derived from the structural unit (a-5), it can be produced by the following method.
  • An ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, an unsaturated monobasic acid (ma-2), and an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group ) and optionally containing other ethylenically unsaturated group-containing compound (a-4) are placed in a solvent together with a polymerization initiator, and heated to 1 to 20 at 50 to 130 ° C. Allow time to copolymerize. As a result, a reaction liquid containing a resin precursor composed of a copolymer containing the structural units (a-1) to (a-3) and optionally the structural unit (a-4) is produced.
  • polymerization initiators examples include t-butyl peroxy-2-ethylhexanoate, azobisisobutyronitrile, azobisisovaleronitrile, 2,2'-azobis(methyl isobutyrate), benzoyl peroxide, and the like. can be used. These polymerization initiators can be used alone or in combination of two or more.
  • the amount of the polymerization initiator used is generally 0.5 to 20 parts by mass, preferably 1.0 to 10 parts by mass, per 100 parts by mass of the raw material monomers.
  • the solvent is not particularly limited as long as it is inert in the polymerization reaction of the raw material monomers.
  • solvents include alkyl alcohols such as propyl alcohol, butyl alcohol, pentyl alcohol, hexyl alcohol, octyl alcohol, nonyl alcohol, decyl alcohol, and dodecyl alcohol; benzyl alcohol; Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, diprop
  • glycol ether solvents are preferable, and (poly)alkylene glycol monoalkyl ethers such as propylene glycol monomethyl ether and (poly)alkylene glycol monoalkyl ether acetates such as propylene glycol monomethyl ether acetate are particularly preferred. preferable.
  • These solvents can be used alone or in combination of two or more.
  • an epoxy group-containing (meth)acrylate (ma-5) and, if necessary, a catalyst and/or a polymerization inhibitor are added to the reaction solution and reacted.
  • the epoxy group in the epoxy group-containing (meth)acrylate (ma-5) undergoes a ring-opening addition reaction with some of the carboxy groups in the structural unit (a-2) contained in the resin precursor.
  • part of the side chain of the copolymer, which is the resin precursor was modified to the structural unit (m-5) derived from the epoxy group-containing (meth)acrylate (ma-5) (A) alkali-soluble resin is obtained.
  • all of the epoxy group-containing (meth)acrylate (ma-5) used in the reaction reacts with the carboxy group in the structural unit (a-2) contained in the resin precursor, and the structural unit (a -5) can be regarded as denatured.
  • catalysts include triphenylphosphine, tri(o-tolyl)phosphine, tri(m-tolyl)phosphine, tri(p-tolyl)phosphine, tris(p-methoxyphenyl)phosphine, tris(2,6-dimethoxy phenyl)phosphine, p-styryldiphenylphosphine, and the like can be used.
  • Examples of polymerization inhibitors that can be used include methylhydroquinone, butylhydroxytoluene, hydroquinone, methoquinone, and methylhydroquinone.
  • the alkoxysilyl group-containing resin is a structural unit (b-1) derived from an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group (hereinafter simply referred to as "structural unit (b-1)" Say.) including.
  • the alkoxysilyl group-containing resin is, if necessary, a structural unit (b-2) derived from unsaturated monobasic acid (mb-2) (hereinafter simply referred to as "structural unit (b-2)").
  • the photosensitive resin composition of the present embodiment contains (B) the alkoxysilyl group-containing resin, it becomes a photosensitive resin composition that can form a resin cured film having high hardness and good resistance to high temperature and high humidity.
  • the structural unit (b-1) may be derived from only one ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group, or may be derived from two or more alkoxysilyl groups. It may be derived from the ethylenically unsaturated group-containing compound (mb-1) having
  • the ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group, which is a raw material for the structural unit (b-1), may be a monomer having an alkoxysilyl group and an ethylenically unsaturated group, and is particularly limited. not.
  • the alkoxy group of the alkoxysilyl group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, even more preferably 1 to 2 carbon atoms.
  • the number of alkoxy groups in the alkoxysilyl group may be one or plural.
  • the alkoxysilyl group is a trialkoxysilyl group having three alkoxy groups
  • the (B) alkoxysilyl group-containing resin having many cross-linking points of the structural unit (b-1) is obtained, so that photosensitivity with better curability is obtained. It becomes a flexible resin composition, which is preferable.
  • the ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group has good reaction easiness when synthesizing the alkoxysilyl group-containing resin (B), and is easily available.
  • (Meth)acrylate is preferable, and the structural unit (b-1) is more preferably a structural unit represented by the following formula (1).
  • R 1 represents a hydrogen atom or a methyl group.
  • R 2 to R 4 independently represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms. At least one of R 2 to R 4 is an alkoxy group having 1 to 6 carbon atoms.
  • n is an integer of 1-10.
  • R 1 represents a hydrogen atom or a methyl group, preferably a methyl group.
  • R 2 to R 4 each independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms. At least one of R 2 to R 4 is an alkoxy group having 1 to 6 carbon atoms.
  • R 2 to R 4 are alkyl groups having 1 to 6 carbon atoms, the number of carbon atoms is preferably 1 to 4, more preferably 1 to 2.
  • R 2 to R 4 are alkoxy groups having 1 to 6 carbon atoms, the number of carbon atoms is preferably 1 to 4, more preferably 1 to 2.
  • each of R 2 to R 4 is preferably an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, and two of R 2 to R 4 Or it is more preferable that three of them are alkoxy groups having 1 to 6 carbon atoms, resulting in (B) an alkoxysilyl group-containing resin with many cross-linking points of the structural unit (b-1), and a photosensitive resin with better curability. More preferably, all three of R 2 to R 4 are alkoxy groups having 1 to 6 carbon atoms in order to obtain a composition.
  • R 2 to R 4 are each independently preferably a methyl group, an ethyl group, a methoxy group, or an ethoxy group, and at least one of R 2 to R 4 is A methoxy group or an ethoxy group is more preferred.
  • n is an integer of 1-10, preferably 1-4.
  • the structural unit represented by the above formula (1) include, for example, 3-(meth)acryloyloxypropylmethyldimethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 : methyl group; R 3 , R 4 : methoxy group; n: 3), 3-(meth)acryloyloxypropylethyldimethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 : ethyl group; R 3 , R 4 : methoxy group; n: 3), 3-(meth)acryloyloxypropylmethyldiethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 : methyl group; R 3 , R 4 : ethoxy group; n: 3), 3-(meth)acryloyloxypropylethyldiethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group);
  • 3-(meth)acryloyloxypropyl Structural units derived from methyldiethoxysilane and/or structural units derived from 3-(meth)acryloyloxypropyltriethoxysilane are preferred.
  • ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group a commercially available one may be used.
  • the structural unit (b-2) may be derived from only one unsaturated monobasic acid (mb-2), or derived from two or more unsaturated monobasic acids (mb-2). It may be something to do.
  • the unsaturated monobasic acid (mb-2), which is the starting material for the structural unit (b-2), is preferably a silicon-free compound having an acid group and an ethylenically unsaturated group.
  • a carboxy group is more preferable because it results in a photosensitive resin composition having good developability.
  • Examples of the unsaturated monobasic acid (mb-2) as a starting material for the structural unit (b-2) include (meth)acrylic acid, crotonic acid, cinnamic acid, vinylsulfonic acid, and 2-(meth)acryloyloxyethyl. succinic acid, 2-(meth)acryloyloxyethyl phthalic acid, 2-(meth)acryloyloxyethyl hexahydrophthalic acid, 2-(meth)acryloyloxyethyl acid phosphate and the like.
  • (meth)acrylic acid is preferred because of its favorable reaction easiness in synthesizing the (B) alkoxysilyl group-containing resin and its easy availability.
  • the structural unit (b-3) is neither an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group nor an unsaturated monobasic acid (mb-2), other ethylenic It may be derived only from the unsaturated group-containing compound (mb-3), or may be derived from two or more ethylenically unsaturated group-containing compounds (mb-3).
  • an ethylenically unsaturated group-containing compound that does not have an acid group and an alkoxysilyl group can be used.
  • dienes such as butadiene, (meth)acrylic acid esters, (meth)acrylic acid amides, vinyl compounds, styrenes, unsaturated dicarboxylic acid diesters, unsaturated polybasic acid anhydrides, and the like.
  • (meth)acrylates include methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, isopropyl (meth)acrylate, n-butyl (meth)acrylate, sec- Butyl (meth)acrylate, isobutyl (meth)acrylate, tert-butyl (meth)acrylate, pentyl (meth)acrylate, neopentyl (meth)acrylate, benzyl (meth)acrylate, isoamyl (meth)acrylate, hexyl (meth)acrylate , 2-ethylhexyl (meth)acrylate, benzyl (meth)acrylate, lauryl (meth)acrylate, dodecyl (meth)acrylate, cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, methylcyclohexyl (meth)acryl
  • (meth)acrylic acid amides include (meth)acrylic acid amide, (meth)acrylic acid N,N-dimethylamide, (meth)acrylic acid N,N-diethylamide, (meth)acrylic acid N, N-dipropylamide, (meth)acrylic acid N,N-di-isopropylamide, (meth)acrylic acid anthracenylamide, N-isopropyl (meth)acrylamide, (meth)acrylic morpholine, diacetone (meth) acrylamide and the like.
  • vinyl compounds include norbornene (bicyclo[2.2.1]hept-2-ene), 5-methylbicyclo[2.2.1]hept-2-ene, 5-ethylbicyclo[2.2 .1]hept-2-ene, tetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodeca-3-ene, 8-methyltetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodeca-3-ene, 8-ethyltetracyclo[4.4.0.1 2,5 .
  • styrene derivatives include styrene, ⁇ -, o-, m-, and p-alkyl, nitro, cyano, and amide derivatives of styrene.
  • unsaturated dicarboxylic acid diesters include diethyl citraconate, diethyl maleate, diethyl fumarate, and diethyl itaconate.
  • unsaturated polybasic acid anhydrides include maleic anhydride, itaconic anhydride, and citraconic anhydride.
  • the reaction easiness in synthesizing the (B) alkoxysilyl group-containing resin is good and is easily available, so methyl (meth) Acrylate, 2-ethylhexyl (meth)acrylate, benzyl (meth)acrylate, dicyclopentanyl (meth)acrylate, glycidyl (meth)acrylate, (3-ethyloxetan-3-yl)methyl (meth)acrylate, N, N - diethylaminoethyl (meth)acrylate, (meth)acrylic acid N,N-dimethylamide, (meth)acrylic morpholine, styrene, vinyltoluene and norbornene are preferred, methyl (meth)acrylate, benzyl (meth)acrylate, dicyclo More preferred are pentanyl (meth)acrylate, glycidyl
  • the other ethylenically unsaturated group-containing compound (mb-3) it is excellent in heat decomposition resistance and heat yellowing resistance, and it becomes a photosensitive resin composition that can obtain a cured resin film with good high temperature and high humidity resistance.
  • alkyl (meth)acrylates are preferred, and methyl (meth)acrylate, benzyl (meth)acrylate and dicyclopentanyl (meth)acrylate are preferred.
  • the other ethylenically unsaturated group-containing compound (mb-3) has a functional group that reacts with an acid group from the viewpoint of forming a photosensitive resin composition capable of obtaining a cured resin film having good solvent resistance. It is preferred to use a polymerizable compound.
  • Functional groups that react with acid groups include glycidyl groups, oxetanyl groups, isocyanato groups, or blocked isocyanato groups.
  • Specific examples of the polymerizable compound having a functional group that reacts with an acid group include glycidyl (meta- ) acrylate, (3-ethyloxetan-3-yl)methyl (meth)acrylate and the like are preferably used.
  • agents include lactams such as ⁇ -caprolactam, ⁇ -valerolactam, ⁇ -butyrolactam, ⁇ -propiolactam; methanol, ethanol, propanol, butanol, ethylene glycol, methyl cellosolve, butyl cellosolve, methyl carbitol , benzyl alcohol, phenyl cellosolve, furfuryl alcohol, alcohols such as cyclohexanol; Phenols such as nonylphenol, styrenated phenol, oxybenzoate, thymol, p-naphthol, p-nitrophenol, p-chlorophenol; di
  • the content of the structural unit (b-1) in all repeating structural units of the alkoxysilyl group-containing resin is preferably 45 mol% or more, more preferably 50 mol% or more, and 55 mol% or more. It is even more preferable to have When the content of the structural unit (b-1) is 45 mol % or more, the photosensitive resin composition can provide a cured resin film having even higher hardness and excellent resistance to high temperature and high humidity.
  • the upper limit of the content of the structural unit (b-1) is not particularly limited, but may be 99 mol% or less, 90 mol% or less, or 85 mol% or less.
  • the content of the structural unit (b-1) can be arbitrarily selected within the above range. % or more and 75 mol % or less.
  • the content thereof is From the viewpoint of solubility and storage stability, the content is preferably 1 mol % to 40 mol %, more preferably 10 mol % to 30 mol %, even more preferably 15 mol % to 25 mol %.
  • the content thereof is preferably 1 mol% to 40 mol% of all repeating structural units of the alkoxysilyl group-containing resin (B). , more preferably 5 mol % to 30 mol %, even more preferably 10 mol % to 25 mol %.
  • the acid value of the alkoxysilyl group-containing resin is preferably 150 mg KOH/g or less, more preferably 100 mg KOH/g or less, and even more preferably 70 mg KOH/g or less.
  • the photosensitive resin composition has excellent storage stability, excellent solubility in an alkaline developer, and good developability.
  • the lower limit of the acid value of the alkoxysilyl group-containing resin is not particularly limited, but may be, for example, 1 mg KOH/g or more, 5 mg KOH/g or more, or 10 mg KOH/g or more. Also good.
  • the acid value of the alkoxysilyl group-containing resin (B) is 1 KOHmg/g or more, alkali developability can be imparted to the alkoxysilyl group-containing resin (B).
  • the acid value of the alkoxysilyl group-containing resin can be adjusted, for example, by adjusting the amount of the unsaturated monobasic acid (mb-2) used as the starting material for the structural unit (b-2). -2) can be adjusted by adjusting the content.
  • the acid value of the (B) alkoxysilyl group-containing resin is measured in the same manner as the acid value of the (A) alkali-soluble resin.
  • the alkoxysilyl group-containing resin preferably has a polystyrene equivalent weight average molecular weight (Mw) of 1,000 to 20,000, more preferably 1,500 to 10,000, and 3,000. ⁇ 6,000 is more preferred.
  • Mw polystyrene equivalent weight average molecular weight
  • the photosensitive resin composition has good developability.
  • the weight-average molecular weight (Mw) of (B) the alkoxysilyl group-containing resin is 20,000 or less, the photosensitive resin composition has an appropriate development time.
  • the weight average molecular weight (Mw) of the (B) alkoxysilyl group-containing resin is calculated in the same manner as the weight average molecular weight (Mw) of the (A) alkali-soluble resin.
  • the silyl group equivalent weight of (B) the alkoxysilyl group-containing resin is not particularly limited, but is preferably 100 g/mol to 700 g/mol, preferably 150 g/mol to 500 g/mol, most preferably 290 g/mol to 450 g/mol.
  • the silyl group equivalent of (B) the alkoxysilyl group-containing resin is 100 g/mol or more, the resulting photosensitive resin composition has high hardness and excellent developability.
  • the silyl group equivalent weight of the alkoxysilyl group-containing resin (B) is 700 g/mol or less, a photosensitized resin film having sufficient hardness and good adhesion to the base material and/or base can be obtained. It becomes a flexible resin composition.
  • the silyl group equivalent of (B) alkoxysilyl group-containing resin is a value obtained by dividing the molecular weight of (B) alkoxysilyl group-containing resin by the average number of silyl groups per molecule of (B) alkoxysilyl group-containing resin.
  • the average number of silyl groups per molecule of the alkoxysilyl group-containing resin contains an ethylenically unsaturated group having an alkoxysilyl group serving as a raw material for the structural unit (b-1) of the (B) alkoxysilyl group-containing resin. It is a calculated value calculated based on the charged amount of compound (mb-1).
  • the mass ratio of (A) alkali-soluble resin to (B) alkoxysilyl group-containing resin ((A) alkali-soluble resin: (B) alkoxysilyl group-containing resin) contained in the photosensitive resin composition of the present embodiment is It is preferably 40:60 to 99:1, more preferably 50:50 to 99:1, even more preferably 60:40 to 90:10, and 60:40 to 80:20. is particularly preferred.
  • the ratio can be selected as necessary within the above range, and may be, for example, 55:45 to 85:15 or 65:35 to 75:25.
  • the function due to the inclusion of the (B) alkoxysilyl group-containing resin can be sufficiently obtained. It becomes a photosensitive resin composition that can form a cured resin film having high hardness and good resistance to high temperature and high humidity.
  • the mass ratio of (A) the alkali-soluble resin and (B) the alkoxysilyl group-containing resin is within the above range, the function due to the inclusion of (A) the alkali-soluble resin can be sufficiently obtained.
  • the photosensitive resin composition has good storage stability, excellent developability, and can form a resin cured film having good water resistance and high temperature and high humidity resistance.
  • a conventionally known method can be used as a method for producing the alkoxysilyl group-containing resin. Specifically, for example, an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group, and optionally added other unsaturated monobasic acid (mb-2) and ethylenically unsaturated The group-containing compound (mb-3) is put into a solvent together with a polymerization initiator and subjected to a copolymerization reaction to form a reaction liquid containing the copolymer (B) alkoxysilyl group-containing resin.
  • polymerization initiators examples include 2,2′-azobis(isobutyrate)dimethyl, t-butylperoxy-2-ethylhexanoate, azobisisobutyronitrile, azobisisovaleronitrile, benzoyl peroxide, etc. can be used.
  • solvent those mentioned as the solvent that can be used in (A) the method for producing an alkali-soluble resin can be used in the same manner. Among them, from the viewpoint of availability and storage stability as a photosensitive resin composition, a primary alcohol or secondary alcohol solvent is preferable, and 3-methoxy-1-butanol, propylene glycol monomethyl Ethers are more preferred.
  • (C) reactive diluent As the reactive diluent, a low molecular weight compound having an ethylenically unsaturated group such as a vinyl group, an allyl group and a (meth)acryloyloxy group can be used.
  • (C) Reactive diluents may be used singly or in combination of two or more.
  • (C) Reactive diluents include, for example, aromatic vinyl monomers; polycarboxylic acid monomers such as vinyl acetate and vinyl adipate; (meth)acrylates; polyfunctional (meth)acrylates; nurate and the like.
  • polyfunctional (meth)acrylates are used because the photosensitive resin composition has good developability and provides a cured resin film having sufficient hardness. is particularly preferred.
  • aromatic vinyl monomers include styrene, ⁇ -methylstyrene, ⁇ -chloromethylstyrene, vinyltoluene, divinylbenzene, diallyl phthalate, diallylbenzene phosphonate and the like.
  • (meth)acrylates include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, butyl (meth)acrylate, ⁇ -hydroxyethyl (meth)acrylate, and hydroxypropyl (meth)acrylate. etc.
  • polyfunctional (meth)acrylates include ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, ethylene glycol di(meth)acrylate, trimethylolpropane di(meth)acrylate. ) acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol hexa(meth)acrylate, tris(hydroxyethyl)isocyanurate tri(meth)acrylate, and the like.
  • the content of the (C) reactive diluent contained in the photosensitive resin composition of the present embodiment includes (A) the alkali-soluble resin contained in the photosensitive resin composition, (B) the alkoxysilyl group-containing resin, (C) with respect to 100 parts by mass in total with the reactive diluent, preferably 5 parts by mass to 75 parts by mass, more preferably 15 parts by mass to 65 parts by mass, most preferably 20 parts by mass to 55 parts by mass part by mass. (C) When the content of the reactive diluent is within the above range, the viscosity and photocurability of the photosensitive resin composition become more appropriate.
  • the radical photopolymerization initiator is not particularly limited as long as it is a compound that generates radicals upon irradiation with light.
  • Photoradical polymerization initiators may be used alone or in combination of two or more.
  • Photoradical polymerization initiators include, for example, benzoin and alkyl ethers thereof such as benzoin, benzoin methyl ether, benzoin ethyl ether; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone , 4-(1-t-butyldioxy-1-methylethyl)acetophenone and other acetophenones; 1-hydroxycyclohexylphenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one and other alkylphenones; Anthraquinones such as 2-methylanthraquinone, 2-amylanthraquinone, 2-t-butylanthraquinone and 1-chloroanthraquinone; Thioxanthones such as 2,4-dimethylthioxanthone, 2,4-diisopropylthioxanthone and 2-chloro
  • benzophenones 1,2-octanedione, 2-(benzoyloxyimino)-1-[4-(phenylthio)phenyl]-1-octanone, 1-[4-(phenylthio)-2-(o-benzoyloxime )], ethanone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl], 1-(o-acetyloxime) and other oxime esters; 2-methyl-1- [4-(methylthio)phenyl]-2-morpholino-propan-1-one; 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)butanone-1; 2,4,6-trimethylbenzoyldiphenylphosphine oxides, acylphosphine oxides such as bis(2,4,6-trimethylbenzoyl)phenylphosphine oxide; and xanthones.
  • the content of the (D) photoradical polymerization initiator contained in the photosensitive resin composition of the present embodiment is the (A) alkali-soluble resin contained in the photosensitive resin composition and the (B) alkoxysilyl group-containing resin. , (C) with respect to 100 parts by mass in total with the reactive diluent, preferably 0.1 parts by mass to 20 parts by mass, more preferably 1 part by mass to 15 parts by mass, most preferably 3 parts by mass parts to 10 parts by mass.
  • the content of the radical photopolymerization initiator is 0.1 parts by mass or more, the photosensitive resin composition has sufficient photocurability.
  • the (D) photoradical polymerization initiator When the content of the (D) photoradical polymerization initiator is 20 parts by mass or less, the (D) photoradical polymerization initiator provides the storage stability of the photosensitive resin composition and the performance of the cured resin film obtained by curing the composition. have no adverse effect on
  • the solvent is not particularly limited as long as it is inert to each component contained in the photosensitive resin composition of the present embodiment and can dissolve each component.
  • a solvent may be used individually by 1 type, and may be used in combination of 2 or more types.
  • the (E) solvent may contain the same solvent as the solvent used in the preparation of (A) the alkali-soluble resin and/or (B) the alkoxysilyl group-containing resin, or may be a different solvent alone.
  • the (E ) may be used as part or all of the solvent.
  • the same solvent or a different solvent as the solvent used for preparing (A) the alkali-soluble resin and/or (B) the alkoxysilyl group-containing resin is newly added. may be added.
  • the solvent is one or more selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms, so that the photosensitive resin composition has good storage stability.
  • primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms include alkyl alcohols, benzyl alcohol, (poly)alkylene glycol monoalkyl ethers, and the like.
  • Poly)alkylene glycol monoalkyl ethers are preferably used because they are readily available and provide a photosensitive resin composition with good storage stability.
  • the solvent is not one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms. may be used instead of the above alcohol. Only one type of other solvent may be used, or two or more types may be used.
  • (poly)alkylene glycol monoalkyl ether acetate-based solvents such as propylene glycol monomethyl ether acetate
  • the solubility of each component contained in the photosensitive resin composition is good.
  • the (poly)alkylene glycol monoalkyl ether acetate-based solvent is mixed with one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms. The compatibility when used is also good, which is preferable.
  • the total content of one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms contained in the solvent is 15 to It is preferably 100% by mass.
  • the content of the alcohol is more preferably 25% by mass or more, still more preferably 35% by mass or more, in order to obtain a photosensitive composition with better storage stability.
  • the upper limit of the alcohol content is not particularly limited, but may be 90% by mass or 80% by mass.
  • the content of the (E) solvent contained in the photosensitive resin composition of the present embodiment is preferably 30 parts by mass to 100 parts by mass in total of the components excluding the (E) solvent in the photosensitive resin composition. 1000 parts by mass, more preferably 50 to 800 parts by mass, most preferably 100 to 500 parts by mass. (E) When the content of the solvent is within the above range, the viscosity of the photosensitive resin composition can be adjusted to an appropriate range.
  • the viscosity of the photosensitive resin composition of the present embodiment can be appropriately adjusted according to the desired thickness of the cured resin film.
  • the viscosity of the photosensitive resin composition is preferably 4 mP s to 25 mP s, more preferably 6 mP s to 20 mP s. More preferably, it is 8 mP ⁇ s to 15 mP ⁇ s.
  • the viscosity of the photosensitive resin composition is measured using an E-type viscometer (RE-80, manufactured by Toki Sangyo, rotor type: standard cone 1°34′ ⁇ R24, rotor code: 1). It means the value measured at 25°C.
  • a silane coupling agent can be contained in the photosensitive resin composition of the present embodiment, if necessary.
  • the silane coupling agent improves compatibility among (A) the alkali-soluble resin, (B) the alkoxysilyl group-containing resin, and (C) the reactive diluent contained in the photosensitive resin composition.
  • As the silane coupling agent it is preferable to use a low molecular weight compound having one or more functional groups selected from (meth)acrylic groups, vinyl groups and styryl groups.
  • the silane coupling agent may be used alone or in combination of two or more.
  • silane coupling agent a commercially available one may be used.
  • silane coupling agents manufactured by Shin-Etsu Chemical Co., Ltd. (descriptions in parentheses are trade names) can be used.
  • the content of (F) the silane coupling agent is (A) the alkali-soluble resin contained in the photosensitive resin composition, ( It is preferably 0.1 to 20 parts by mass, more preferably 1 to 15 parts by mass, relative to a total of 100 parts by mass of B) the alkoxysilyl group-containing resin and (C) the reactive diluent. and most preferably 3 parts by mass to 10 parts by mass.
  • the photosensitive resin composition of the present embodiment contains (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, and (C) a reactive diluent in order to impart predetermined properties as necessary. , (D) a photoradical polymerization initiator, (E) a solvent, and (F) other components different from the silane coupling agent.
  • Other components include, for example, known additives such as leveling agents and thermal polymerization inhibitors.
  • the content of other components contained in the photosensitive resin composition is not particularly limited as long as it does not impair the effects of the present invention.
  • the photosensitive resin composition of the present embodiment includes, for example, (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, and (D) a photoradical polymerization initiator, (E) a solvent and (F) a silane coupling agent and/or other components that are optionally contained can be mixed using a known mixing apparatus.
  • (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, and (D) a radical photopolymerization initiator , (E) the solvent, and (F) the silane coupling agent and/or other components that are optionally contained are not particularly limited.
  • a resin composition containing (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, and (E) a solvent is prepared, and the resulting resin composition is added with (C) a reactive diluent.
  • (D) a radical photopolymerization initiator, and (F) a silane coupling agent and/or other components, which are optionally contained may be mixed.
  • the photosensitive resin composition of the present embodiment includes (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, (D) a photoradical polymerization initiator, and (E ) solvent and Therefore, due to the synergistic effects of (1) to (3) shown below, the storage stability and developability are good, and by curing, the hardness is high, the adhesion to the substrate and / or the base, and the water resistance , a cured resin film having excellent high-temperature and high-humidity resistance and transparency can be obtained. Therefore, the photosensitive resin composition of the present embodiment is suitable as a material for cured resin films used as insulating films and/or protective films in image display devices such as touch panels.
  • the (A) alkali-soluble resin contained in the photosensitive resin composition has an acid group and a (meth)acryloyloxy group, and has an ethylenically unsaturated group equivalent of 400 g/mol or more and 2500 g/mol or less. , Curing shrinkage is sufficiently small, a cured resin film with good adhesion to the substrate and / or substrate can be obtained, and the resin cure has good storage stability and developability, and has good high temperature and high humidity resistance. A membrane is obtained.
  • the alkali-soluble resin contains a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and (A) the total repetition of the alkali-soluble resin Since 15 mol % or more and 60 mol % or less of the structural unit (a-1) is contained in the structural units, it has good developability, and can form a resin cured film having good water resistance, high temperature and high humidity resistance, and transparency. It becomes a photosensitive resin composition.
  • a-1 derived from an ethylenically unsaturated group-containing compound having an aromatic group
  • the (B) alkoxysilyl group-containing resin contained in the photosensitive resin composition contains a structural unit (b-1) derived from an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group , a cured resin film having high hardness and good resistance to high temperature and high humidity can be obtained.
  • the cured resin film of the present embodiment is composed of a cured product of the photosensitive resin composition of the present embodiment.
  • the cured resin film of the present embodiment can be suitably used, for example, as a protective film and/or an insulating film in an image display device such as a touch panel.
  • the cured resin film of this embodiment is formed on a substrate or a base.
  • the base material or base include those made of members used in image display devices such as touch panels.
  • a base material such as a glass base material, an electrode material such as ITO, molybdenum, or a metal mesh, an organic film, or the like can be used.
  • the cured resin film of the present embodiment can be produced using a known method.
  • the photosensitive resin composition of the present embodiment is applied to a base material or a substrate by a known method to form a coating film, and the resulting coating film is irradiated with light by a known method to obtain a photosensitive resin. It can be produced by a method of curing the composition.
  • a photolithography method can be used. Specifically, it is preferable to use a method in which the following coating step, pre-baking (pre-heat treatment) step, exposure step, development step, and post-baking step are performed in this order.
  • a coating film is formed by coating the photosensitive resin composition of the present embodiment on a substrate or a base.
  • a known method can be used as a method of applying the photosensitive resin composition to the base material or base.
  • the coating method of the photosensitive resin composition includes a screen printing method, a roll coating method, a curtain coating method, a spray coating method, a spin coating method, a slit coating method, and the like.
  • Pre-baking (pre-heat treatment) step the content of the solvent (E) contained in the coating film is reduced by heating the base material or base on which the coating film is formed.
  • a known method such as a method using a hot plate can be used as a method for heating the base material or base on which the coating film is formed.
  • the heating temperature in the prebaking step can be appropriately determined according to the composition of the photosensitive resin composition and the like.
  • the heating temperature can be, for example, 70 to 120.degree. C., preferably 90 to 110.degree.
  • the heating time in the prebaking step can be appropriately determined according to the composition of the photosensitive resin composition, the thickness of the coating film, and the like.
  • the heating time can be, for example, 10 to 600 seconds, preferably 120 to 180 seconds.
  • a part of the coating film after the pre-baking step is irradiated with light through a photomask having a shape corresponding to the pattern shape of the cured resin film to be produced, and photocured.
  • a known light source can be used for light irradiation. Specific examples of light sources include low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, xenon lamps, and metal halide lamps.
  • the irradiation amount of light (exposure amount) in the exposure step is not particularly limited, and is appropriately set according to the pattern shape of the photomask, the composition of the photosensitive resin composition, the thickness of the coating film, and the like.
  • the unexposed portion of the coating film after the exposure step is dissolved and removed using a developer.
  • a known alkaline developer used for developing photosensitive compositions can be used.
  • an alkaline developer aqueous solutions of sodium carbonate, potassium carbonate, calcium carbonate, sodium hydroxide, potassium hydroxide, etc.; aqueous solutions of amine compounds such as ethylamine, diethylamine, dimethylethanolamine; Aqueous solutions of quaternary ammonium salts such as methylammonium; 3-methyl-4-amino-N,N-diethylaniline, 3-methyl-4-amino-N-ethyl-N- ⁇ -hydroxyethylaniline, 3-methyl -4-amino-N-ethyl-N- ⁇ -methanesulfonamidoethylaniline, 3-methyl-4-amino-N-ethyl-N- ⁇ -me
  • Additives such as antifoaming agents and surfactants may be added to the alkali developer as needed.
  • Development conditions such as development temperature and development time in the development step can be appropriately determined according to the composition of the photosensitive resin composition, the composition of the developer, the thickness of the coating film, and the like.
  • it is preferable to develop the coating by dissolving the unexposed portion of the coating film using the alkaline developer, followed by washing with water and drying.
  • post-baking process In the post-baking process, the coating film after the developing process is heated.
  • a known method such as a method using a hot plate can be used.
  • the heating temperature in the post-baking step can be appropriately determined according to the composition of the photosensitive resin composition, the base material on which the coating film is formed, or the underlying material.
  • the heating temperature can be, for example, 130.degree. C. to 250.degree.
  • the heating time in the post-baking step can be appropriately determined according to the composition of the photosensitive resin composition, the thickness of the coating film, and the like.
  • the heating time can be, for example, 10 minutes to 60 minutes.
  • the cured resin film of this embodiment consists of a cured product obtained by curing the photosensitive resin composition of this embodiment. Therefore, it has high hardness, good adhesion to the substrate and/or base, good water resistance, high temperature and high humidity resistance, and transparency. Further, when the cured resin film of the present embodiment has a predetermined pattern shape formed by a photolithography method, it is formed using the photosensitive resin composition of the present embodiment having good developability. Therefore, it is highly accurate. For these reasons, the cured resin film of the present embodiment is suitable as an insulating film and/or protective film provided in an image display device such as a touch panel.
  • the image display device of this embodiment includes the cured resin film of this embodiment. It is particularly preferable that the image display device of the present embodiment is a touch panel.
  • the cured resin film in the image display device of the present embodiment is preferably one selected from the group consisting of a protective film and an insulating film, and is particularly preferably a protective film or insulating film of a touch panel.
  • the image display device of this embodiment can be manufactured using a conventionally known method.
  • the image display device of the present embodiment includes the cured resin film of the present embodiment, which has high hardness, good adhesion to the substrate and / or base, water resistance, high temperature and high humidity resistance, and transparency, Excellent reliability and durability.
  • BZMA benzyl methacrylate St: styrene
  • PQMA 4-hydroxyphenyl methacrylate
  • MAA methacrylic acid
  • TCDMA dicyclopentanyl methacrylate
  • THFMA tetrahydrofurfuryl methacrylate
  • GMA glycidyl methacrylate
  • TBO t-butylperoxy-2-ethylhexanoate (Product name: Perbutyl O, manufactured by NOF Corporation)
  • PGMEA propylene glycol monomethyl ether acetate
  • the numerical values of the monomers (ma-1) to (ma-4) in Table 1 indicate the ratio (mol%) of each monomer to the total amount of the monomers (ma-1) to (ma-4) used in the resin precursor. show.
  • the numerical value of the monomer (ma-5) in Table 1 indicates the amount (parts by mass) added to the total 100 parts by mass of the monomers (ma-1) to (ma-4) used in the resin precursor.
  • the numerical value of the solvent in Table 1 indicates the content (% by mass) in the sample containing (A) the alkali-soluble resin.
  • the numerical values of the polymerization initiator shown in Table 1 indicate the amount (parts by mass) added to 100 parts by mass in total of the monomers (ma-1) to (ma-4) used in the resin precursor.
  • (Ethylenically unsaturated group equivalent) (A) From the charged amount of the monomers (ma-1) to (ma-5) used in producing the alkali-soluble resin, (A) alkali-soluble resin per 1 mol of unsaturated bond in (A) alkali-soluble resin The mass of (A) was calculated as the ethylenically unsaturated group equivalent (g/mol) of the alkali-soluble resin.
  • KBE-502 3-methacryloyloxypropylmethyldiethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
  • KBE-503 3-methacryloyloxypropyltriethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
  • MAA methacrylic acid AA: acrylic acid St: styrene
  • GMA glycidyl methacrylate
  • AIBME 2,2'-azobis(isobutyrate) dimethyl
  • MB 3-methoxy-1-butanol
  • the numerical values of the monomers (mb-1) to (mb-3) in Table 2 are the ratio of each monomer to the total amount of the monomers (mb-1) to (mb-3) used in the alkoxysilyl group-containing resin (B). (mol%).
  • the numerical value of the solvent in Table 2 indicates the content (% by mass) in the sample containing the (B) alkoxysilyl group-containing resin.
  • the numerical values of the polymerization initiator shown in Table 2 indicate the amount (parts by weight) added to 100 parts by weight in total of the monomers (mb-1) to (mb-3) used in the alkoxysilyl group-containing resin (B).
  • the weight average molecular weight (Mw) was measured using GPC (GPC-101, manufactured by Shodex). In addition, the viscosity at 25° C. was measured for each specimen by the method described above. 10 g of each test sample was weighed into a 20 ml glass container, sealed, and placed in a thermostat kept at 40° C. for 1 month for preservation test. The weight average molecular weight (Mw) and the viscosity at 25° C. of each specimen after the storage test were measured again by the above method.
  • DPHA dipentaerythritol hexaacrylate (manufactured by Toagosei Co., Ltd.)
  • OXE-01 2-(benzoyloxyimino)-1-[4-(phenylthio)phenyl]-1-octanone (manufactured by BASF Japan)
  • PGMEA propylene glycol monomethyl ether acetate MB: 3-methoxy-1-butanol
  • KBE-503 3-methacryloyloxypropyltriethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
  • the numerical values of (A) alkali-soluble resin shown in Tables 3 to 7 include the solvent Contains only other ingredients and does not contain solvents.
  • the numerical values of the (B) alkoxysilyl group-containing resin shown in Tables 3 to 7 include only the components other than the solvent in the samples containing the (B) alkoxysilyl group-containing resin synthesized in Synthesis Examples 9 to 13. contains no solvents.
  • the compounding amount indicates the content (parts by mass) of each of components (A) to (D) and (F) with respect to 100 parts by mass of (A) to (C) in total.
  • (E) The blending amount of the solvent indicates the content (parts by mass) per 100 parts by mass of the above (A) to (D) and (F).
  • a coating film was formed by coating the photosensitive resin composition on a glass substrate (non-alkali glass substrate) of 5 cm long and 5 cm wide using a spin coater. By heating the glass substrate on which the coating film was formed on a hot plate at 100°C for 3 minutes, the content of the solvent (E) contained in the coating film was reduced to form a coating film on the glass substrate. . Next, the coating film was irradiated with light having a wavelength of 365 nm at an exposure amount of 200 mJ/cm 2 to be photocured. Next, the glass substrate having the photo-cured coating film was heated at 230° C. for 30 minutes in a dryer to obtain a cured resin film having a thickness of 2.0 ⁇ m.
  • the pencil hardness of the cured resin film thus prepared was measured according to JIS K5600-5-4 using a pencil hardness tester (No. 553-M, manufactured by Yasuda Seiki Seisakusho). The results are shown in Tables 4-6.
  • a glass substrate having a cured resin film was prepared as a test piece in the same manner as in (1) Evaluation of hardness. Further, in place of the glass substrate, a glass substrate on which an indium tin oxide (ITO) film is formed, a substrate on which a metal mesh (Cu, Ag) is formed, and a glass substrate on which a molybdenum (Mo) film is formed are used. A cured resin film was prepared as a test sample in the same manner as in (1) Hardness evaluation, except that it was used.
  • ITO indium tin oxide
  • Mo molybdenum
  • Adhesion of the cured resin film was evaluated by the cross-cut method of JIS K5600-5-6 on the specimens having the cured resin film thus prepared. Specifically, the number of peeled pieces in 100 grids was counted and evaluated according to the following criteria. The results are shown in Tables 3-7. "criterion" ⁇ (possible): 0 peeled pieces ⁇ (impossible): 1 or more peeled pieces
  • a photosensitive resin composition was applied by a spin coater onto a molybdenum (Mo) substrate having a length of 5 cm and a width of 5 cm to form a coating film (coating step).
  • a photomask having a line-and-space pattern with a width of 3 to 100 ⁇ m was arranged with a distance of 100 ⁇ m from the surface of the coating film.
  • the coating film was irradiated with light of 200 mJ/cm 2 from an extra-high pressure mercury lamp through a photomask to be photocured (exposure step).
  • the unexposed portion of the coated film after exposure was dissolved and removed using a developer (development step).
  • developer semi-clean DL-A10 developer (product (manufactured by Yokohama Yushi Kogyo Co., Ltd.) diluted 75 times was used.
  • Development was carried out by spraying the developer onto the exposed coating film at a temperature of 23° C. and a pressure of 0.1 MPa for 30 to 60 seconds.
  • the glass substrate having the photo-cured coating film was heated in a dryer at 230° C. for 30 minutes (post-baking step).
  • post-baking step a cured resin film having a line-and-space pattern with a film thickness of 2.0 ⁇ m and a width of 3 to 100 ⁇ m was produced on the molybdenum substrate.
  • the molybdenum substrate having the cured resin film prepared in this way was allowed to stand for 1000 hours in a thermo-hygrostat at a temperature of 85° C. and a relative humidity of 85% RH. Thereafter, the molybdenum substrate having the cured resin film was taken out, and the presence or absence of discoloration of the cured resin film was visually evaluated according to the following criteria. The results are shown in Tables 3-7. "criterion" ⁇ (acceptable): no discoloration ⁇ (impossible): slightly discolored to blue
  • the cured resin films of Examples 1 to 16 had (1) a pencil hardness of 4H or 5H, (2) transmittance (transparency), (3 ) Adhesion, (4) Water resistance, (5) High temperature and high humidity resistance, (6) Developability (residue) are all evaluated as ⁇ (acceptable), and (6) Minimum development size in developability is 20 ⁇ m. (7) Comprehensive judgment was ⁇ (acceptable).
  • the cured resin films of Comparative Examples 1 to 5 were all evaluated as (7) overall judgment of x (improper). More specifically, (B) the cured resin films of Comparative Examples 1 and 2, which did not contain an alkoxysilyl group-containing resin, had (1) a pencil hardness of H, and sufficient hardness was not obtained. . In addition, the resin cured films of Comparative Examples 1 and 2 were evaluated as (5) high temperature and high humidity resistance x (improper), and the high temperature and high humidity resistance was also insufficient.
  • the storage stability is good
  • the resin cured film having a highly accurate pattern shape can be formed by photolithography
  • the resin has good developability.
  • a photosensitive resin composition capable of obtaining a resin cured film having excellent adhesion to a substrate and/or an underlayer, water resistance, resistance to high temperature and high humidity, and transparency.
  • the photosensitive resin composition can be preferably used as a material for protective films and insulating films of touch panels.

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Abstract

A photosensitive resin composition comprising an alkali-soluble resin, an alkoxysilylated resin, a reactive diluent, a photo-radical polymerization initiator, and a solvent, wherein the alkali-soluble resin contains a constituent unit (a-1) derived from a compound having an ethylenically unsaturated group and containing an aromatic group, has an acid group and a (meth)acryloyloxy group, has an ethylenically-unsaturated-group equivalent of 400-2,500 g/mol, and contains the constituent unit (a-1) in an amount of 15-60 mol% with respect to all the repeating constituent units of the alkali-soluble resin and the alkoxysilylated resin includes a constituent unit derived from a compound having an ethylenically unsaturated group and containing an alkoxysilyl group.

Description

感光性樹脂組成物、樹脂硬化膜および画像表示装置Photosensitive resin composition, cured resin film and image display device
 本発明は、感光性樹脂組成物、その樹脂硬化膜、樹脂硬化膜を具備する画像表示装置に関する。
本願は、2021年6月21日に、日本に出願された特願2021-102284号に基づき優先権を主張し、その内容をここに援用する。
The present invention relates to a photosensitive resin composition, a cured resin film thereof, and an image display device comprising the cured resin film.
This application claims priority based on Japanese Patent Application No. 2021-102284 filed in Japan on June 21, 2021, the content of which is incorporated herein.
 近年、携帯電話、タブレット型コンピュータ、自動販売機、銀行ATM(現金自動預け払い機)等の入力装置として、タッチパネルが普及している。タッチパネルとしては、抵抗膜方式、光学方式、超音波方式、静電容量方式のものがある。静電容量方式のタッチパネルは、押圧によって生じる電極間の静電容量の変化を検知して、入力位置を検出する。 In recent years, touch panels have become popular as input devices for mobile phones, tablet computers, vending machines, bank ATMs (automated teller machines), etc. As touch panels, there are resistive type, optical type, ultrasonic type, and capacitive type touch panels. A capacitive touch panel detects an input position by detecting a change in capacitance between electrodes caused by pressing.
 特許文献1には、寄生容量が小さく検出感度が高い広ピッチのメッシュパターンを有した検出電極部を用いても、視認性を向上させるとともに、タッチパネルと表示装置とを組み合わせた際のモアレの発生を抑制できる導電性部材を用いたタッチパネルが記載されている。
 特許文献2には、皮膜形成用組成物を塗工してなるガラス基材を用いたタッチパネルが開示されている。特許文献2には、ポリシロキサン化合物、分子内にケイ素を含まないポリチオール化合物、重合開始剤および有機溶剤を含有する皮膜形成用組成物が記載されている。
In Patent Document 1, even if a detection electrode portion having a wide-pitch mesh pattern with small parasitic capacitance and high detection sensitivity is used, visibility is improved, and moire occurs when a touch panel and a display device are combined. A touch panel using a conductive member capable of suppressing is described.
Patent Document 2 discloses a touch panel using a glass substrate coated with a film-forming composition. Patent Document 2 describes a film-forming composition containing a polysiloxane compound, a polythiol compound containing no silicon in the molecule, a polymerization initiator and an organic solvent.
 特許文献3には、感光性樹脂組成物を硬化させてなるタッチパネル用保護膜、タッチパネル用絶縁膜が記載されている。特許文献3には、ラジカル重合性基を有する親水性樹脂(A)と、リン酸基を有しない多官能(メタ)アクリレート(B)と、リン酸基を有する(メタ)アクリレート(C)と、アミノ基を有するシラン化合物(D)と、光重合開始剤(E)とを含有する感光性樹脂組成物が記載されている。 Patent Document 3 describes a touch panel protective film and a touch panel insulating film obtained by curing a photosensitive resin composition. Patent Document 3 discloses a hydrophilic resin (A) having a radically polymerizable group, a polyfunctional (meth)acrylate (B) having no phosphoric acid group, and a (meth)acrylate (C) having a phosphoric acid group. , a photosensitive resin composition containing a silane compound (D) having an amino group and a photopolymerization initiator (E).
国際公開第2018/163603号WO2018/163603 特開2020-75992号公報Japanese Patent Application Laid-Open No. 2020-75992 特開2018-116271号公報JP 2018-116271 A
 タッチパネルなどの画像表示装置において、絶縁膜および/または保護膜として用いられる樹脂硬化膜の材料に使用される感光性樹脂組成物には、保存安定性が良好で、フォトリソグラフィ法を用いて高精度のパターン形状を有する樹脂硬化膜を形成できる良好な現像性を有することが要求されている。さらに、上記の用途に使用される感光性樹脂組成物には、感光性樹脂組成物を硬化させてなる樹脂硬化膜が、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性の良好なものであることが要求されている。
 しかしながら、従来の感光性樹脂組成物は、画像表示装置に用いられる樹脂硬化膜の材料に要求される上記性能を全て満たすものではなかった。
In an image display device such as a touch panel, a photosensitive resin composition used as a material for a resin cured film used as an insulating film and/or a protective film has good storage stability and is highly accurate using a photolithography method. It is required to have good developability capable of forming a cured resin film having a pattern shape of . Furthermore, in the photosensitive resin composition used for the above applications, the resin cured film obtained by curing the photosensitive resin composition has high hardness, adhesion to the substrate and / or base, water resistance, High temperature and high humidity resistance and good transparency are required.
However, conventional photosensitive resin compositions do not satisfy all of the above performances required for materials for cured resin films used in image display devices.
 本発明は、上記事情を鑑みてなされたものであり、保存安定性が良好であり、フォトリソグラフィ法を用いて高精度のパターン形状を有する樹脂硬化膜を形成できる良好な現像性を有し、硬化させることにより、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性の良好な樹脂硬化膜が得られる感光性樹脂組成物を提供することを目的とする。
 更に、本発明は、本発明の感光性樹脂組成物を硬化させてなる、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性の良好な樹脂硬化膜、これを具備する画像表示装置を提供することを目的とする。
The present invention has been made in view of the above circumstances, has good storage stability, and has good developability that can form a resin cured film having a highly accurate pattern shape using a photolithography method, Provided is a photosensitive resin composition which, when cured, provides a cured resin film having high hardness, adhesion to substrates and/or substrates, water resistance, resistance to high temperature and high humidity, and transparency. and
Furthermore, the present invention provides a cured resin obtained by curing the photosensitive resin composition of the present invention, which has high hardness, adhesion to a substrate and / or a base, water resistance, high temperature and high humidity resistance, and good transparency. An object of the present invention is to provide a film and an image display device having the same.
 本発明は以下の第一の態様の組成物を提供する。
[1] (A)アルカリ可溶性樹脂と、
 (B)アルコキシシリル基含有樹脂と、
 (C)反応性希釈剤と、
 (D)光ラジカル重合開始剤と、
 (E)溶剤と、を含有し、
 前記(A)アルカリ可溶性樹脂は、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)を含有し、酸基および(メタ)アクリロイルオキシ基を有し、エチレン性不飽和基当量が400g/mol以上2500g/mol以下であり、前記(A)アルカリ可溶性樹脂の全繰り返し構成単位中、前記構成単位(a-1)を15mol%以上60mol%以下含有し、
 前記(B)アルコキシシリル基含有樹脂は、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)由来の構成単位(b-1)を含むことを特徴とする感光性樹脂組成物。
The present invention provides a composition of the following first aspect.
[1] (A) an alkali-soluble resin;
(B) an alkoxysilyl group-containing resin;
(C) a reactive diluent;
(D) a radical photopolymerization initiator;
(E) a solvent, and
The (A) alkali-soluble resin contains a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and has an acid group and a (meth)acryloyloxy group. and having an ethylenically unsaturated group equivalent of 400 g/mol or more and 2500 g/mol or less, and containing 15 mol% or more and 60 mol% or less of the structural unit (a-1) among all the repeating structural units of the alkali-soluble resin (A). death,
A photosensitive resin composition, wherein the (B) alkoxysilyl group-containing resin comprises a structural unit (b-1) derived from an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group.
 本発明の第一の態様は以下の特徴を有することが好ましい。以下の特徴は2つ以上を組み合わせることも好ましい。
[2] 前記(A)アルカリ可溶性樹脂と、前記(B)アルコキシシリル基含有樹脂との質量比が、40:60~99:1である[1]に記載の感光性樹脂組成物。
[3] 前記(B)アルコキシシリル基含有樹脂の全繰り返し構成単位中、前記構成単位(b-1)の含有量が、45mol%以上である[1]または[2]に記載の感光性樹脂組成物。
Preferably, the first aspect of the present invention has the following features. Combinations of two or more of the following features are also preferred.
[2] The photosensitive resin composition according to [1], wherein the mass ratio of (A) the alkali-soluble resin and (B) the alkoxysilyl group-containing resin is 40:60 to 99:1.
[3] The photosensitive resin according to [1] or [2], wherein the content of the structural unit (b-1) in all repeating structural units of the alkoxysilyl group-containing resin (B) is 45 mol% or more. Composition.
[4] 前記(A)アルカリ可溶性樹脂は、前記構成単位(a-1)と、不飽和一塩基酸(ma-2)由来の構成単位(a-2)と、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)由来の構成単位(a-3)とを含む共重合体のカルボキシ基の一部が、エポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(a-5)に変性された樹脂である[1]~[3]のいずれかに記載の感光性樹脂組成物。 [4] The (A) alkali-soluble resin comprises the structural unit (a-1), the structural unit (a-2) derived from an unsaturated monobasic acid (ma-2), and an alicyclic hydrocarbon group. A part of the carboxy groups of the copolymer containing the structural unit (a-3) derived from the ethylenically unsaturated group-containing compound (ma-3) having an epoxy group-containing (meth) acrylate (ma-5) derived from The photosensitive resin composition according to any one of [1] to [3], which is a resin modified with the structural unit (a-5).
[5] 前記(A)アルカリ可溶性樹脂は、酸価が20KOHmg/g以上200KOHmg/g以下である[1]~[4]のいずれかに記載の感光性樹脂組成物。
[6] 前記(A)アルカリ可溶性樹脂は、重量平均分子量(Mw)が1000以上50000以下である[1]~[5]のいずれかに記載の感光性樹脂組成物。
[7] 前記(B)アルコキシシリル基含有樹脂は、不飽和一塩基酸(mb-2)由来の構成単位(b-2)を含み、
 酸価が150KOHmg/g以下である[1]~[6]のいずれかに記載の感光性樹脂組成物。
[8] 前記(B)アルコキシシリル基含有樹脂は、重量平均分子量(Mw)が1000以上20000以下である[1]~[7]のいずれかに記載の感光性樹脂組成物。
[5] The photosensitive resin composition according to any one of [1] to [4], wherein the alkali-soluble resin (A) has an acid value of 20 KOHmg/g or more and 200 KOHmg/g or less.
[6] The photosensitive resin composition according to any one of [1] to [5], wherein the alkali-soluble resin (A) has a weight average molecular weight (Mw) of 1000 or more and 50000 or less.
[7] The (B) alkoxysilyl group-containing resin contains a structural unit (b-2) derived from an unsaturated monobasic acid (mb-2),
The photosensitive resin composition according to any one of [1] to [6], which has an acid value of 150 KOHmg/g or less.
[8] The photosensitive resin composition according to any one of [1] to [7], wherein the (B) alkoxysilyl group-containing resin has a weight average molecular weight (Mw) of 1,000 to 20,000.
[9] 前記(A)アルカリ可溶性樹脂と、前記(B)アルコキシシリル基含有アルコキシシリル基含有樹脂と、前記(C)反応性希釈剤との合計100質量部に対して、
 前記(C)反応性希釈剤を5~75質量部含有し、
 前記(D)光ラジカル重合開始剤を0.1~20質量部含有する[1]~[8]のいずれかに記載の感光性樹脂組成物。
[10] 前記(E)溶剤が、炭素原子数3~10の第一級アルコールおよび炭素原子数3~10の第二級アルコールから選択される一種以上のアルコールを含有し、
 全溶剤中の前記アルコールの合計含有量が15~100質量%である[1]~[9]のいずれかに記載の感光性樹脂組成物。
[9] With respect to a total of 100 parts by mass of the (A) alkali-soluble resin, the (B) alkoxysilyl group-containing alkoxysilyl group-containing resin, and the (C) reactive diluent,
Containing 5 to 75 parts by mass of the (C) reactive diluent,
The photosensitive resin composition according to any one of [1] to [8], containing 0.1 to 20 parts by mass of the (D) photoradical polymerization initiator.
[10] The solvent (E) contains one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms,
The photosensitive resin composition according to any one of [1] to [9], wherein the total alcohol content in all solvents is 15 to 100% by mass.
[11] (F)シランカップリング剤をさらに含む[1]~[10]のいずれかに記載の感光性樹脂組成物。
[12] 前記(F)シランカップリング剤が、(メタ)アクリル基、ビニル基、スチリル基から選ばれる1つ以上の官能基を有する[11]に記載の感光性樹脂組成物。
[13] 前記(A)アルカリ可溶性樹脂と、前記(B)アルコキシシリル基含有樹脂と、前記(C)反応性希釈剤との合計100質量部に対して、
 前記(F)シランカップリング剤を0.1~20質量部含有する[11]または[12]に記載の感光性樹脂組成物。
[11] (F) The photosensitive resin composition according to any one of [1] to [10], further comprising a silane coupling agent.
[12] The photosensitive resin composition according to [11], wherein the (F) silane coupling agent has one or more functional groups selected from (meth)acrylic, vinyl and styryl groups.
[13] With respect to a total of 100 parts by mass of the (A) alkali-soluble resin, the (B) alkoxysilyl group-containing resin, and the (C) reactive diluent,
The photosensitive resin composition according to [11] or [12], containing 0.1 to 20 parts by mass of the (F) silane coupling agent.
 本発明は以下の第二の態様の樹脂硬化膜を提供する。
[14] [1]~[13]のいずれかに記載の感光性樹脂組成物の硬化物からなる樹脂硬化膜。
 本発明は以下に述べる第三の態様の画像表示装置を提供する。
[15] [14]に記載の樹脂硬化膜を具備する画像表示装置。
 本発明の第三の態様の装置は以下の特徴を有することが好ましい。以下の特徴は2つ以上を組み合わせることも好ましい。
[16] 前記樹脂硬化膜からなる保護膜を有する[15]に記載の画像表示装置。
[17] 前記樹脂硬化膜からなる絶縁膜を有する[15]に記載の画像表示装置。
The present invention provides a cured resin film of the following second aspect.
[14] A cured resin film comprising a cured product of the photosensitive resin composition according to any one of [1] to [13].
The present invention provides an image display device according to a third aspect described below.
[15] An image display device comprising the cured resin film of [14].
The device of the third aspect of the invention preferably has the following features. Combinations of two or more of the following features are also preferred.
[16] The image display device according to [15], which has a protective film made of the cured resin film.
[17] The image display device according to [15], which has an insulating film made of the cured resin film.
 本発明の感光性樹脂組成物は、特定の(A)アルカリ可溶性樹脂と、特定の(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、(E)溶剤と、を含有する。このため、本発明の感光性樹脂組成物は、保存安定性が良好である。また、本発明の感光性樹脂組成物は、良好な現像性を有するため、フォトリソグラフィ法を用いて高精度のパターン形状を有する樹脂硬化膜を形成できる。しかも、本発明の感光性樹脂組成物は、硬化させることにより、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性の良好な樹脂硬化膜が得られる。したがって、本発明の感光性樹脂組成物は、タッチパネルなどの画像表示装置において、絶縁膜および/または保護膜として使用される樹脂硬化膜の材料として好適である。 The photosensitive resin composition of the present invention comprises a specific (A) alkali-soluble resin, a specific (B) alkoxysilyl group-containing resin, (C) a reactive diluent, and (D) a photoradical polymerization initiator. , and (E) a solvent. Therefore, the photosensitive resin composition of the present invention has good storage stability. Moreover, since the photosensitive resin composition of the present invention has good developability, a cured resin film having a highly accurate pattern shape can be formed using a photolithographic method. Moreover, by curing the photosensitive resin composition of the present invention, a cured resin film having high hardness, good adhesion to the base material and/or base, water resistance, resistance to high temperature and high humidity, and transparency can be obtained. be done. Therefore, the photosensitive resin composition of the present invention is suitable as a material for cured resin films used as insulating films and/or protective films in image display devices such as touch panels.
 本発明の樹脂硬化膜は、本発明の感光性樹脂組成物の硬化物からなるものであるため、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性が良好である。
 本発明の画像表示装置は、本発明の樹脂硬化膜を具備するため、信頼性および耐久性に優れる。
Since the cured resin film of the present invention is made of the cured product of the photosensitive resin composition of the present invention, it has high hardness, adhesion to the base material and / or the base, water resistance, high temperature and high humidity resistance, transparency. Good properties.
Since the image display device of the present invention includes the cured resin film of the present invention, it is excellent in reliability and durability.
 以下、本発明の感光性樹脂組成物、樹脂硬化膜および画像表示装置の好ましい例について詳細に説明する。なお、本発明は、以下に示す実施形態のみに限定されるものではない。例えば、本発明の趣旨を逸脱しない範囲で、数値、種類、量、材料、種類、時間、温度、順番等について、省略、追加、置換、その他の変更が可能である。
 本明細書において、「(メタ)アクリル酸」は、メタクリル酸およびアクリル酸から選択される少なくとも1種を意味する。「(メタ)アクリレート」「(メタ)アクリロイルオキシ」などについても同様である。
Preferred examples of the photosensitive resin composition, the cured resin film and the image display device of the present invention are described in detail below. In addition, this invention is not limited only to embodiment shown below. For example, numerical values, types, amounts, materials, types, times, temperatures, orders, etc. may be omitted, added, replaced, or otherwise changed within the scope of the present invention.
As used herein, "(meth)acrylic acid" means at least one selected from methacrylic acid and acrylic acid. The same applies to "(meth)acrylate", "(meth)acryloyloxy" and the like.
[感光性樹脂組成物]
 本実施形態の感光性樹脂組成物は、(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、(E)溶剤と、を含有する。本実施形態の感光性樹脂組成物は、必要に応じて(F)シランカップリング剤をさらに含有していてもよい。本実施形態の感光性樹脂組成物は、光照射されることにより、(A)アルカリ可溶性樹脂と(B)アルコキシシリル基含有樹脂と(C)反応性希釈剤とが重合硬化して硬化物となり、樹脂硬化膜を形成する。
[Photosensitive resin composition]
The photosensitive resin composition of the present embodiment includes (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, (D) a photoradical polymerization initiator, and (E ) solvent and The photosensitive resin composition of the present embodiment may further contain (F) a silane coupling agent, if necessary. In the photosensitive resin composition of the present embodiment, when irradiated with light, (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, and (C) a reactive diluent are polymerized and cured to form a cured product. , to form a cured resin film.
[(A)アルカリ可溶性樹脂]
 (A)アルカリ可溶性樹脂は、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)(以下、単に「構成単位(a-1)」とも言う。)を含有し、酸基および(メタ)アクリロイルオキシ基を有する。ただし、アルコキシシリル基を有する樹脂は、(A)アルカリ可溶性樹脂には該当しない。
 本実施形態の感光性樹脂組成物は、(A)アルカリ可溶性樹脂を含むため、保存安定性が良好である。また、(A)アルカリ可溶性樹脂を含むため、良好な現像性を有し、耐水性および耐高温高湿性の良好な樹脂硬化膜を形成できる感光性樹脂組成物となる。
[(A) alkali-soluble resin]
(A) The alkali-soluble resin is a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group (hereinafter also simply referred to as "structural unit (a-1)"). ) and has an acid group and a (meth)acryloyloxy group. However, a resin having an alkoxysilyl group does not correspond to (A) an alkali-soluble resin.
Since the photosensitive resin composition of the present embodiment contains (A) an alkali-soluble resin, it has good storage stability. In addition, since (A) contains an alkali-soluble resin, the photosensitive resin composition has good developability and can form a resin cured film having good water resistance and high temperature and high humidity resistance.
 (A)アルカリ可溶性樹脂の有する酸基としては、カルボキシ基、リン酸基(-O-P(=O)(OH))、スルホン酸基(-S(=O)OH)等が挙げられる。酸基としては、感光性樹脂組成物のアルカリ可溶性の観点から、カルボキシ基を有することが好ましい。(A)アルカリ可溶性樹脂に酸基を導入する方法としては、例えば、酸基を有するモノマーを含む原料モノマーを重合することにより導入する方法、エポキシ基を有する(A)アルカリ可溶性樹脂の前駆体に、酸無水物を付加することにより導入する方法などが挙げられる。 (A) Examples of the acid group possessed by the alkali-soluble resin include a carboxy group, a phosphoric acid group (-OP(=O)(OH) 2 ), a sulfonic acid group (-S(=O) 2 OH), and the like. be done. As the acid group, it is preferable to have a carboxy group from the viewpoint of alkali solubility of the photosensitive resin composition. (A) As a method for introducing an acid group into an alkali-soluble resin, for example, a method of introducing by polymerizing a raw material monomer containing a monomer having an acid group, a method of introducing an epoxy group into a precursor of (A) an alkali-soluble resin , a method of introducing by adding an acid anhydride, and the like.
 (A)アルカリ可溶性樹脂に(メタ)アクリロイルオキシ基を導入する方法としては、例えば、以下に示す方法を用いることができる。官能基を有するモノマーを含む原料モノマーを重合することにより、官能基含有樹脂前駆体を製造する。その後、官能基含有樹脂前駆体に含まれる官能基と反応性を有する基、及び(メタ)アクリロイルオキシ基を有する化合物を、官能基含有樹脂前駆体と反応させる。このことにより、(メタ)アクリロイルオキシ基を有する(A)アルカリ可溶性樹脂が得られる。 (A) As a method for introducing a (meth)acryloyloxy group into an alkali-soluble resin, for example, the following method can be used. A functional group-containing resin precursor is produced by polymerizing a raw material monomer containing a monomer having a functional group. After that, a group reactive with the functional group contained in the functional group-containing resin precursor and a compound having a (meth)acryloyloxy group are reacted with the functional group-containing resin precursor. As a result, (A) an alkali-soluble resin having a (meth)acryloyloxy group is obtained.
 官能基含有樹脂前駆体に含まれる官能基と、前記官能基と反応性を有する基との組み合わせとしては、カルボキシ基とエポキシ基、イソシアナト基とヒドロキシ基等の組み合わせが挙げられる。カルボキシ基とエポキシ基との組み合わせとしては、具体的には、(メタ)アクリル酸等の不飽和一塩基酸とグリシジル(メタ)アクリレート等のエポキシ基含有(メタ)アクリレートの組み合わせが挙げられる。イソシアナト基とヒドロキシ基との組み合わせとしては、具体的には、2-(メタ)アクリロイルオキシエチルイソシアネート等のイソシアナト基含有モノマーと2-ヒドロキシエチル(メタ)アクリレート等のヒドロキシ基含有(メタ)アクリレートの組み合わせなどが挙げられる。 Examples of the combination of the functional group contained in the functional group-containing resin precursor and the group reactive with the functional group include a combination of a carboxy group and an epoxy group, an isocyanato group and a hydroxy group, and the like. Specific examples of the combination of a carboxy group and an epoxy group include a combination of an unsaturated monobasic acid such as (meth)acrylic acid and an epoxy group-containing (meth)acrylate such as glycidyl (meth)acrylate. Specific examples of combinations of isocyanato groups and hydroxy groups include isocyanato group-containing monomers such as 2-(meth)acryloyloxyethyl isocyanate and hydroxy group-containing (meth)acrylates such as 2-hydroxyethyl (meth)acrylate. combinations, etc.
 (A)アルカリ可溶性樹脂は、前記構成単位(a-1)に加えて、不飽和一塩基酸(ma-2)由来の構成単位(a-2)(以下、単に「構成単位(a-2)」とも言う。)を有することにより酸基が導入されていることが好ましい。(A)アルカリ可溶性樹脂は、前記構成単位(a-1)及び前記構成単位(a-2)に加えて、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)由来の構成単位(a-3)(以下、単に「構成単位(a-3)」とも言う。)を含むことがより好ましい。(A)アルカリ可溶性樹脂は、前記構成単位(a-1)~(a-3)に加えて、その他のエチレン性不飽和基含有化合物(ma-4)由来の構成単位(a-4)(以下、単に「構成単位(a-4)」とも言う。)を有していても良い。 (A) The alkali-soluble resin includes, in addition to the structural unit (a-1), a structural unit (a-2) derived from an unsaturated monobasic acid (ma-2) (hereinafter simply referred to as "structural unit (a-2 )". It is preferable that an acid group is introduced by having ). (A) the alkali-soluble resin is derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group in addition to the structural unit (a-1) and the structural unit (a-2) (hereinafter simply referred to as “structural unit (a-3)”). (A) the alkali-soluble resin includes, in addition to the structural units (a-1) to (a-3), the structural unit (a-4) derived from another ethylenically unsaturated group-containing compound (ma-4) ( Hereinafter, it may be simply referred to as “structural unit (a-4)”).
 (A)アルカリ可溶性樹脂は、(A)アルカリ可溶性樹脂の有する酸基がカルボキシ基である場合、前記カルボキシ基の一部が、エポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(a-5)(以下、単に「構成単位(a-5)」とも言う。)に変性された樹脂であることが好ましい。すなわち、(A)アルカリ可溶性樹脂は、側鎖に(メタ)アクリロイルオキシ基が導入された樹脂であることが好ましい。 (A) the alkali-soluble resin is such that when the acid group of (A) the alkali-soluble resin is a carboxy group, a part of the carboxy group is an epoxy group-containing (meth)acrylate (ma-5)-derived structural unit ( It is preferably a resin modified with a-5) (hereinafter also simply referred to as “structural unit (a-5)”). That is, (A) the alkali-soluble resin is preferably a resin in which a (meth)acryloyloxy group is introduced into the side chain.
 (A)アルカリ可溶性樹脂は、エチレン性不飽和基当量が400g/mol以上であり、好ましくは500g/mol以上、より好ましくは550g/mol以上、更に好ましくは590g/mol以上である。エチレン性不飽和基当量が400g/mol以上であると、(C)反応性希釈剤と十分に反応でき、良好な現像性を有する感光性樹脂組成物となり、硬度の高い樹脂硬化膜が得られる感光性樹脂組成物となる。また、エチレン性不飽和基当量が400g/mol以上であると、感光性樹脂組成物を硬化させてなる樹脂硬化膜における硬化収縮を抑制できる。このため、基材および/または下地との密着性が良好な樹脂硬化膜が得られる。 (A) The alkali-soluble resin has an ethylenically unsaturated group equivalent of 400 g/mol or more, preferably 500 g/mol or more, more preferably 550 g/mol or more, and still more preferably 590 g/mol or more. When the ethylenically unsaturated group equivalent is 400 g / mol or more, it can sufficiently react with the reactive diluent (C), resulting in a photosensitive resin composition having good developability and obtaining a cured resin film with high hardness. It becomes a photosensitive resin composition. Further, when the ethylenically unsaturated group equivalent is 400 g/mol or more, curing shrinkage in a cured resin film obtained by curing the photosensitive resin composition can be suppressed. As a result, a cured resin film having good adhesion to the substrate and/or base can be obtained.
 (A)アルカリ可溶性樹脂は、エチレン性不飽和基当量が2500g/mol以下であり、好ましくは2000g/mol以下、より好ましくは1500g/mol以下、更に好ましくは1400g/mol以下である。エチレン性不飽和基当量が2500g/mol以下であると、十分なアルカリ可溶性を確保することができ、十分な現像性を有し、硬化させることにより十分な耐高温高湿性を有する樹脂硬化膜が得られる感光性樹脂組成物となる。
 (A)アルカリ可溶性樹脂のエチレン性不飽和基当量は、例えば、(A)アルカリ可溶性樹脂中の不飽和一塩基酸(ma-2)由来の構成単位(a-2)の割合および/またはエポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(a-5)の割合によって調節できる。
(A) The alkali-soluble resin has an ethylenically unsaturated group equivalent of 2500 g/mol or less, preferably 2000 g/mol or less, more preferably 1500 g/mol or less, and still more preferably 1400 g/mol or less. When the ethylenically unsaturated group equivalent is 2500 g/mol or less, it is possible to ensure sufficient alkali solubility, to have sufficient developability, and to obtain a resin cured film having sufficient high temperature and high humidity resistance by curing. It becomes the photosensitive resin composition obtained.
(A) The ethylenically unsaturated group equivalent of the alkali-soluble resin is, for example, (A) the ratio of the structural unit (a-2) derived from the unsaturated monobasic acid (ma-2) in the alkali-soluble resin and / or epoxy It can be adjusted by the proportion of the structural unit (a-5) derived from the group-containing (meth)acrylate (ma-5).
 本明細書における「エチレン性不飽和結合当量」とは、ポリマー(重合体)の不飽和結合1mol当たりの重合体の質量である。(A)アルカリ可溶性樹脂のエチレン性不飽和結合当量は、(A)アルカリ可溶性樹脂の質量を、(A)アルカリ可溶性樹脂中に含まれる不飽和結合のモル数で除することにより求められる(g/mol)。本明細書では、「エチレン性不飽和結合当量」として、(A)アルカリ可溶性樹脂を製造する際に用いたモノマー(ma-1)~(ma-5)の仕込み量から計算した理論値を用いる。 "Ethylenically unsaturated bond equivalent" as used herein is the mass of the polymer per 1 mol of unsaturated bond of the polymer. (A) The ethylenically unsaturated bond equivalent of the alkali-soluble resin is obtained by dividing the mass of the (A) alkali-soluble resin by the number of moles of unsaturated bonds contained in the (A) alkali-soluble resin (g /mol). In this specification, as the "ethylenically unsaturated bond equivalent", (A) a theoretical value calculated from the charged amount of the monomers (ma-1) to (ma-5) used in producing the alkali-soluble resin is used. .
<構成単位(a-1)>
 (A)アルカリ可溶性樹脂は、酸基及びエポキシ基を有さず、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)を含有する。本実施形態においては、(A)アルカリ可溶性樹脂が構成単位(a-1)を含むため、良好な現像性を有し、耐水性および耐高温高湿性の良好な樹脂硬化膜を形成できる感光性樹脂組成物となる。
 構成単位(a-1)は、1種の、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)のみに由来するものであってもよいし、2種以上の、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)に由来するものであってもよい。
<Constituent unit (a-1)>
(A) The alkali-soluble resin contains a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group and having no acid group or epoxy group. In the present embodiment, since the alkali-soluble resin (A) contains the structural unit (a-1), it has good developability and is photosensitive to form a cured resin film with good water resistance and high temperature and high humidity resistance. It becomes a resin composition.
The structural unit (a-1) may be derived from only one ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, or two or more aromatic groups. It may be derived from the ethylenically unsaturated group-containing compound (ma-1) having
 構成単位(a-1)の原料となる芳香族基を有するエチレン性不飽和基含有化合物(ma-1)としては、例えば、スチレン、メトキシスチレン、tert-ブトキシスチレン、メチルスチレン、クロロスチレン、p-ニトロスチレン、p-シアノスチレン、p-アセチルアミノスチレン等のスチレン化合物;ベンジル(メタ)アクリレート、ロジン(メタ)アクリレート、トリフェニルメチル(メタ)アクリレート、フェニル(メタ)アクリレート、クミル(メタ)アクリレート、4-フェノキシフェニル(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、フェノキシポリエチレングリコール(メタ)アクリレート、ノニルフェノキシポリエチレングリコールモノ(メタ)アクリレート、ビフェニルオキシエチル(メタ)アクリレート、ナフタレン(メタ)アクリレート、アントラセン(メタ)アクリレートなどの芳香環を有する(メタ)アクリル酸エステル;4-ヒドロキシフェニルメタクリレート、N-ヒドロキシフェニルマレイミド等のフェノール性水酸基を有するエチレン性不飽和単量体;ビニルトルエン等が挙げられる。 Examples of the ethylenically unsaturated group-containing compound (ma-1) having an aromatic group as a starting material for the structural unit (a-1) include styrene, methoxystyrene, tert-butoxystyrene, methylstyrene, chlorostyrene, p - Styrene compounds such as nitrostyrene, p-cyanostyrene, p-acetylaminostyrene; benzyl (meth)acrylate, rosin (meth)acrylate, triphenylmethyl (meth)acrylate, phenyl (meth)acrylate, cumyl (meth)acrylate , 4-phenoxyphenyl (meth)acrylate, phenoxyethyl (meth)acrylate, phenoxypolyethylene glycol (meth)acrylate, nonylphenoxypolyethylene glycol mono (meth)acrylate, biphenyloxyethyl (meth)acrylate, naphthalene (meth)acrylate, anthracene (meth)acrylic acid esters having an aromatic ring such as (meth)acrylate; ethylenically unsaturated monomers having a phenolic hydroxyl group such as 4-hydroxyphenyl methacrylate and N-hydroxyphenylmaleimide; and vinyltoluene.
 これらの芳香族基を有するエチレン性不飽和基含有化合物(ma-1)の中でも、原料入手性および反応容易性の観点から、スチレン化合物、芳香環を有する(メタ)アクリル酸エステルが好ましい。また、アルカリ現像性をコントロールする観点から、フェノール性水酸基を有するエチレン性不飽和単量体が好ましい。エチレン性不飽和基含有化合物(ma-1)は、ベンジル(メタ)アクリレート、スチレン、4-ヒドロキシフェニルメタクリレートから選ばれる1種以上であることがより好ましく、ベンジル(メタ)アクリレートおよび/またはスチレンであることがさらに好ましい。 Among these aromatic group-containing ethylenically unsaturated group-containing compounds (ma-1), styrene compounds and aromatic ring-containing (meth)acrylic acid esters are preferred from the viewpoint of raw material availability and reaction easiness. Moreover, from the viewpoint of controlling alkali developability, an ethylenically unsaturated monomer having a phenolic hydroxyl group is preferred. The ethylenically unsaturated group-containing compound (ma-1) is more preferably one or more selected from benzyl (meth) acrylate, styrene, and 4-hydroxyphenyl methacrylate, and benzyl (meth) acrylate and/or styrene. It is even more preferable to have
<構成単位(a-2)>
 (A)アルカリ可溶性樹脂は、不飽和一塩基酸(ma-2)由来の構成単位(a-2)を含有することにより、酸基が導入されていても良い。(A)アルカリ可溶性樹脂が、構成単位(a-2)を含有することにより、より良好なアルカリ可溶性を有する感光性樹脂組成物となる。
<Constituent unit (a-2)>
The (A) alkali-soluble resin may have an acid group introduced therein by containing a structural unit (a-2) derived from an unsaturated monobasic acid (ma-2). When the alkali-soluble resin (A) contains the structural unit (a-2), a photosensitive resin composition having better alkali solubility can be obtained.
 構成単位(a-2)は、1種の不飽和一塩基酸(ma-2)のみに由来するものであってもよいし、2種以上の不飽和一塩基酸(ma-2)に由来するものであってもよい。 構成単位(a-2)の原料となる不飽和一塩基酸(ma-2)としては、例えば、(メタ)アクリル酸、イタコン酸、クロトン酸、ビニル安息香酸、(メタ)アクリル酸のα位ハロアルキル、アルコキシル、ハロゲン、ニトロ、シアノ置換体等が挙げられる。これらの不飽和一塩基酸(ma-2)の中でも、現像性の良好な感光性樹脂組成物となるため、(メタ)アクリル酸が好ましい。 The structural unit (a-2) may be derived from only one unsaturated monobasic acid (ma-2), or derived from two or more unsaturated monobasic acids (ma-2). It may be something to do. Examples of the unsaturated monobasic acid (ma-2) as a starting material for the structural unit (a-2) include (meth)acrylic acid, itaconic acid, crotonic acid, vinyl benzoic acid, and α-position of (meth)acrylic acid. Haloalkyl, alkoxyl, halogen, nitro, cyano substituted and the like. Among these unsaturated monobasic acids (ma-2), (meth)acrylic acid is preferred because it provides a photosensitive resin composition with good developability.
<構成単位(a-3)>
 (A)アルカリ可溶性樹脂は、芳香族基、酸基、及びエポキシ基を有さず、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)由来の構成単位(a-3)を有していても良い。(A)アルカリ可溶性樹脂が構成単位(a-3)を有することにより、より硬度が高く、良好な耐高温高湿性を有し、耐熱黄変性に優れる透明性の良好な樹脂硬化膜が得られる。
<Constituent unit (a-3)>
(A) the alkali-soluble resin has an ethylenically unsaturated group-containing compound (ma-3) having no aromatic group, acid group, or epoxy group and having an alicyclic hydrocarbon group (ma-3)-derived structural unit (a- 3). (A) When the alkali-soluble resin has the structural unit (a-3), a cured resin film having higher hardness, excellent high-temperature and high-humidity resistance, excellent resistance to heat yellowing, and good transparency can be obtained. .
 構成単位(a-3)は、1種の、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)のみに由来するものであってもよいし、2種以上の、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)に由来するものであってもよい。 構成単位(a-3)としては、脂環式アルコールとメタクリル酸とのエステル化合物に由来するモノマーユニットが挙げられる。
 脂環式アルコールとしては、好ましくは炭素数6~20のもの、より好ましくは炭素数6~18のものが挙げられる。脂環式アルコールは、単環の脂環式アルコールであってもよいし、多環の脂環式アルコールであってもよく、多環の脂環式アルコールであることが好ましい。
The structural unit (a-3) may be derived from only one ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group, or may be derived from two or more It may be derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group. The structural unit (a-3) includes a monomer unit derived from an ester compound of alicyclic alcohol and methacrylic acid.
Alicyclic alcohols preferably have 6 to 20 carbon atoms, more preferably 6 to 18 carbon atoms. The alicyclic alcohol may be a monocyclic alicyclic alcohol or a polycyclic alicyclic alcohol, preferably a polycyclic alicyclic alcohol.
 構成単位(a-3)の原料となる脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)としては、例えば、シクロペンチル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、メチルシクロヘキシル(メタ)アクリレート、エチルシクロヘキシル(メタ)アクリレート、ジシクロヘキシル(メタ)アクリレート、1,4-シクロヘキサンジメタノールモノ(メタ)アクリレート、トリシクロデカニル(メタ)アクリレート(ジシクロペンタニル(メタ)アクリレート)、トリシクロデカニルオキシエチル(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、ジシクロペンテニルオキシエチル(メタ)アクリレート、イソボルニル(メタ)アクリレート、アダマンチル(メタ)アクリレート、ロジン(メタ)アクリレート、ノルボルニル(メタ)アクリレート、5-メチルノルボルニル(メタ)アクリレート、5-エチルノルボルニル(メタ)アクリレート等が挙げられる。 Examples of the ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group as a starting material for the structural unit (a-3) include cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, and methylcyclohexyl. (meth)acrylate, ethylcyclohexyl (meth)acrylate, dicyclohexyl (meth)acrylate, 1,4-cyclohexanedimethanol mono (meth)acrylate, tricyclodecanyl (meth)acrylate (dicyclopentanyl (meth)acrylate), tricyclodecanyloxyethyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentenyloxyethyl (meth)acrylate, isobornyl (meth)acrylate, adamantyl (meth)acrylate, rosin (meth)acrylate, norbornyl (meth)acrylate ) acrylate, 5-methylnorbornyl (meth)acrylate, 5-ethylnorbornyl (meth)acrylate and the like.
 これらの脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)の中でも、硬度が高く、良好な耐高温高湿性を有し、耐熱黄変性に優れる透明性の良好な樹脂硬化膜が得られる感光性樹脂組成物となるため、炭素数6~20の脂環式炭化水素基を有する(メタ)アクリレートが好ましく、多環の脂環式炭化水素基を有する(メタ)アクリレートがより好ましく、トリシクロデカニル(メタ)アクリレートがさらに好ましい。 Among these ethylenically unsaturated group-containing compounds (ma-3) having an alicyclic hydrocarbon group, resins with high hardness, good high-temperature and high-humidity resistance, excellent heat resistance to yellowing, and good transparency (Meth) acrylate having an alicyclic hydrocarbon group having 6 to 20 carbon atoms is preferable, and a (meth) acrylate having a polycyclic alicyclic hydrocarbon group is preferred because the photosensitive resin composition provides a cured film. is more preferred, and tricyclodecanyl (meth)acrylate is even more preferred.
 (A)アルカリ可溶性樹脂に含まれる構成単位の好ましい組み合わせとしては、感光性樹脂組成物を硬化させてなる樹脂硬化膜の物性および原料入手性の観点から、構成単位(a-1)が、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)であるベンジル(メタ)アクリレート、スチレン、ヒドロキシフェニル(メタ)アクリレートから選ばれる1種又は2種以上に由来する構成単位であり、構成単位(a-2)が、不飽和一塩基酸(ma-2)である(メタ)アクリル酸に由来する構成単位であり、構成単位(a-3)が、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)であるトリシクロデカニル(メタ)アクリレートに由来する構成単位であることが好ましい。 (A) As a preferred combination of structural units contained in the alkali-soluble resin, from the viewpoint of the physical properties of the cured resin film obtained by curing the photosensitive resin composition and the availability of raw materials, the structural unit (a-1) A structural unit derived from one or more selected from benzyl (meth) acrylate, styrene, and hydroxyphenyl (meth) acrylate, which are ethylenically unsaturated group-containing compounds (ma-1) having a group, and The unit (a-2) is a structural unit derived from (meth)acrylic acid, which is an unsaturated monobasic acid (ma-2), and the structural unit (a-3) has an alicyclic hydrocarbon group. Structural units derived from tricyclodecanyl (meth)acrylate, which is the ethylenically unsaturated group-containing compound (ma-3), are preferred.
<構成単位(a-4)>
 (A)アルカリ可溶性樹脂は、必要に応じて、構成単位(a-1)~(a-3)に加えて、その他のエチレン性不飽和基含有化合物(ma-4)に由来する構成単位(a-4)を含んでいてもよい。構成単位(a-4)は、1種のその他のエチレン性不飽和基含有化合物(ma-4)のみに由来するものであってもよいし、2種以上のその他のエチレン性不飽和基含有化合物(ma-4)に由来するものであってもよい。
<Constituent unit (a-4)>
(A) the alkali-soluble resin, if necessary, in addition to the structural units (a-1) to (a-3), structural units derived from other ethylenically unsaturated group-containing compounds (ma-4) ( a-4) may be included. The structural unit (a-4) may be derived from only one other ethylenically unsaturated group-containing compound (ma-4), or two or more other ethylenically unsaturated group-containing It may be derived from the compound (ma-4).
 構成単位(a-4)の原料となるその他のエチレン性不飽和基含有化合物(ma-4)としては、芳香族基、酸基、脂環式炭化水素基を有さず、エチレン性不飽和基を有する化合物であれば特に限定されず、例えば、ブタジエン、イソプレン、クロロプレンなどのジエン;メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-プロピル(メタ)アクリレート、イソ-プロピル(メタ)アクリレート、n-ブチル(メタ)アクリレート、tert-ブチル(メタ)アクリレート、ペンチル(メタ)アクリレート、ネオペンチル(メタ)アクリレート、イソアミル(メタ)アクリレート、ヘキシル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、ラウリル(メタ)アクリレート、ドデシル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、1,1,1-トリフルオロエチル(メタ)アクリレート、パーフルオロエチル(メタ)アクリレート、パーフルオロ-n-プロピル(メタ)アクリレート、パーフルオロ-イソプロピル(メタ)アクリレート、3-(N,N-ジメチルアミノ)プロピル(メタ)アクリレートなどの芳香環を有さない(メタ)アクリル酸エステル;(メタ)アクリル酸アミド、(メタ)アクリル酸N,N-ジメチルアミド、(メタ)アクリル酸N,N-ジエチルアミド、(メタ)アクリル酸N,N-ジプロピルアミド、(メタ)アクリル酸N,N-ジ-イソプロピルアミドなどの(メタ)アクリル酸アミド;(メタ)アクリル酸アニリド、(メタ)アクリロニトリル、アクロレイン、塩化ビニル、塩化ビニリデン、フッ化ビニル、フッ化ビニリデン、N-ビニルピロリドン、ビニルピリジン、酢酸ビニル、ビニルトルエンなどのビニル化合物;シトラコン酸ジエチル、マレイン酸ジエチル、フマル酸ジエチル、イタコン酸ジエチルなどの不飽和ジカルボン酸ジエステル;N-フェニルマレイミド、N-ラウリルマレイミドなどのモノマレイミド;などが挙げられる。 The other ethylenically unsaturated group-containing compound (ma-4), which is a raw material for the structural unit (a-4), does not have an aromatic group, an acid group, or an alicyclic hydrocarbon group and is ethylenically unsaturated. Any compound having a group is not particularly limited, and examples include dienes such as butadiene, isoprene, and chloroprene; methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, iso-propyl (meth)acrylate , n-butyl (meth)acrylate, tert-butyl (meth)acrylate, pentyl (meth)acrylate, neopentyl (meth)acrylate, isoamyl (meth)acrylate, hexyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, lauryl (meth) acrylate, dodecyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, 1,1,1-trifluoroethyl (meth) acrylate, perfluoroethyl (meth) acrylate, perfluoro-n-propyl (meth) (Meth) acrylic acid esters having no aromatic ring such as acrylate, perfluoro-isopropyl (meth) acrylate, 3-(N,N-dimethylamino) propyl (meth) acrylate; (meth) acrylic acid amide, (meth) ) acrylic acid N,N-dimethylamide, (meth) acrylic acid N,N-diethylamide, (meth)acrylic acid N,N-dipropylamide, (meth)acrylic acid N,N-di-isopropylamide ( meth)acrylic acid amide; (meth)acrylate anilide, (meth)acrylonitrile, acrolein, vinyl chloride, vinylidene chloride, vinyl fluoride, vinylidene fluoride, N-vinylpyrrolidone, vinylpyridine, vinyl acetate, vinyl such as vinyltoluene compounds; unsaturated dicarboxylic acid diesters such as diethyl citraconate, diethyl maleate, diethyl fumarate and diethyl itaconate; monomaleimides such as N-phenylmaleimide and N-laurylmaleimide;
 これらの構成単位(a-4)の原料となるその他のエチレン性不飽和基含有化合物(ma-4)の中でも、基材および/または下地との密着性の良好な樹脂硬化膜が得られる感光性樹脂組成物となるため、芳香環を有さない(メタ)アクリル酸エステルが好ましく、テトラヒドロフルフリル(メタ)アクリレートがより好ましい。 Among the other ethylenically unsaturated group-containing compounds (ma-4) used as raw materials for these structural units (a-4), a photosensitive resin cured film having good adhesion to the substrate and/or the undercoat can be obtained. (Meth)acrylic acid esters having no aromatic ring are preferred, and tetrahydrofurfuryl (meth)acrylate is more preferred, since the resin composition is a flexible resin composition.
<エポキシ基含有(メタ)アクリレート(ma-5)>
 (A)アルカリ可溶性樹脂の有する酸基がカルボキシ基である場合、(A)アルカリ可溶性樹脂は、前記カルボキシ基の一部がエポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(a-5)に変性されることにより、(メタ)アクリロイルオキシ基が導入されたものであっても良い。(A)アルカリ可溶性樹脂は、前記不飽和一塩基酸(ma-2)由来のカルボキシ基の一部が、前記構成単位(m-5)に変性されたものであることが好ましい。
<Epoxy group-containing (meth)acrylate (ma-5)>
(A) When the acid group possessed by the alkali-soluble resin is a carboxy group, (A) the alkali-soluble resin has a structural unit (a -5) may be modified to introduce a (meth)acryloyloxy group. (A) The alkali-soluble resin is preferably one in which a part of the carboxy groups derived from the unsaturated monobasic acid (ma-2) is modified with the structural unit (m-5).
 (A)アルカリ可溶性樹脂が、一部が構成単位(m-5)に変性されたものである場合、(A)アルカリ可溶性樹脂を製造する工程において、製造途中の樹脂を、エポキシ基含有(メタ)アクリレート(ma-5)と反応させて、樹脂の一部を構成単位(m-5)に変性する。このため、エチレン性不飽和基当量が好ましい範囲である(A)アルカリ可溶性樹脂が、容易に得られる。したがって、(A)アルカリ可溶性樹脂の一部が構成単位(m-5)に変性されたものである場合、良好な現像性を有し、耐高温高湿性の良好な樹脂硬化膜を形成できる感光性樹脂組成物が容易に得られる。 (A) When the alkali-soluble resin is partially modified with the structural unit (m-5), in the step of producing the (A) alkali-soluble resin, the resin during production is treated with an epoxy group-containing (meta ) A portion of the resin is modified into the structural unit (m-5) by reacting with acrylate (ma-5). Therefore, (A) an alkali-soluble resin having an ethylenically unsaturated group equivalent in a preferred range can be easily obtained. Therefore, when a part of the alkali-soluble resin (A) is modified to the structural unit (m-5), it has good developability and can form a cured resin film having good high-temperature and high-humidity resistance. A flexible resin composition can be obtained easily.
 エポキシ基含有(メタ)アクリレート(ma-5)は、芳香族基及び酸基を有さず、エポキシ基を有する(メタ)アクリレートであればよく、特に限定されない。
 構成単位(a-5)は、1種のエポキシ基含有(メタ)アクリレート(ma-5)のみに由来するものであってもよいし、2種以上のエポキシ基含有(メタ)アクリレート(ma-5)に由来するものであってもよい。
The epoxy group-containing (meth)acrylate (ma-5) is not particularly limited as long as it is a (meth)acrylate having an epoxy group and having neither an aromatic group nor an acid group.
The structural unit (a-5) may be derived from only one epoxy group-containing (meth)acrylate (ma-5), or may be derived from two or more epoxy group-containing (meth)acrylates (ma- 5) may be derived.
 構成単位(a-5)の原料となるエポキシ基含有(メタ)アクリレート(ma-5)としては、グリシジル(メタ)アクリレート、3,4-エポキシシクロヘキシルメチル(メタ)アクリレート、脂環式エポキシ基を有する(メタ)アクリレートおよびそのラクトン付加物、3,4-エポキシシクロヘキシルメチル-3’,4’-エポキシシクロヘキサンカルボキシレート、ジシクロペンテニル(メタ)アクリレートのエポキシ化物、並びにジシクロペンテニルオキシエチル(メタ)アクリレートのエポキシ化物が挙げられる。
 これらのエポキシ基含有(メタ)アクリレート(ma-5)の中でも、原料の入手容易性の点から、グリシジル(メタ)アクリレートおよび3,4-エポキシシクロヘキシルメチル(メタ)アクリレートが好ましい。
Examples of the epoxy group-containing (meth)acrylate (ma-5) as a starting material for the structural unit (a-5) include glycidyl (meth)acrylate, 3,4-epoxycyclohexylmethyl (meth)acrylate, and alicyclic epoxy groups. (meth)acrylates and their lactone adducts, 3,4-epoxycyclohexylmethyl-3′,4′-epoxycyclohexane carboxylate, epoxidized dicyclopentenyl (meth)acrylate, and dicyclopentenyloxyethyl (meth) Examples include epoxidized acrylates.
Among these epoxy group-containing (meth)acrylates (ma-5), glycidyl (meth)acrylate and 3,4-epoxycyclohexylmethyl (meth)acrylate are preferred from the standpoint of availability of raw materials.
 (A)アルカリ可溶性樹脂は、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)と、不飽和一塩基酸(ma-2)由来の構成単位(a-2)と、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)由来の構成(a-3)とを含み、必要に応じてさらに、その他のエチレン性不飽和基含有化合物(ma-4)に由来する構成単位(a-4)を含む共重合体からなる樹脂前駆体のカルボキシ基の一部が、エポキシ基含有(メタ)アクリレート(ma-5)に由来する官能基(a-5)に変性された樹脂であることが好ましい。すなわち、(A)アルカリ可溶性樹脂は、樹脂前駆体である構成単位(a-1)~(a-3)を含み、必要に応じてさらに構成単位(a-4)を含む共重合体の側鎖が、構成単位(a-5)に変性された樹脂であることが好ましい。 (A) Alkali-soluble resin comprises a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and a structural unit derived from an unsaturated monobasic acid (ma-2) (a-2), and a configuration (a-3) derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group, and if necessary, other ethylenically unsaturated Part of the carboxy groups of the resin precursor comprising a copolymer containing the structural unit (a-4) derived from the saturated group-containing compound (ma-4) is converted to the epoxy group-containing (meth)acrylate (ma-5). It is preferably a resin modified with the derived functional group (a-5). That is, (A) the alkali-soluble resin contains structural units (a-1) to (a-3) which are resin precursors, and optionally further contains a structural unit (a-4). The chain is preferably a resin modified with the structural unit (a-5).
<(A)アルカリ可溶性樹脂に含まれる各構成単位の割合>
 本明細書において、「(A)アルカリ可溶性樹脂の全繰り返し構成単位」とは、(A)アルカリ可溶性樹脂の主鎖を構成する構成単位のことを指し、変性により側鎖に導入された構成単位は含まない。
<Proportion of each structural unit contained in (A) alkali-soluble resin>
In the present specification, "(A) all repeating structural units of the alkali-soluble resin" refers to the structural units constituting the main chain of the (A) alkali-soluble resin, and the structural units introduced into the side chains by modification. does not include
 (A)アルカリ可溶性樹脂の全繰り返し構成単位中の構成単位(a-1)の含有量は、15mol%以上であり、好ましくは20mol%以上であり、より好ましくは30mol%以上であり、更に好ましくは35mol%以上である。構成単位(a-1)の含有量が、15mol%以上であると、十分な現像性を有し、十分な耐水性および耐高温高湿性を有する樹脂硬化膜を形成できる感光性樹脂組成物となる。 (A) The content of the structural unit (a-1) in all repeating structural units of the alkali-soluble resin is 15 mol% or more, preferably 20 mol% or more, more preferably 30 mol% or more, and still more preferably. is 35 mol % or more. When the content of the structural unit (a-1) is 15 mol% or more, the photosensitive resin composition has sufficient developability and can form a resin cured film having sufficient water resistance and high temperature and high humidity resistance. Become.
 また、構成単位(a-1)の含有量は、60mol%以下であり、好ましくは50mol%以下であり、より好ましくは45mol%以下である。構成単位(a-1)の含有量が、60mol%以下であると、十分な透明性を有する樹脂硬化膜が得られるものとなる。また、構成単位(a-1)の含有量が、60mol%以下であると、構成単位(a-1)の他の成分の含むことによる機能が十分に得られる。したがって、構成単位(a-1)の含有量が多すぎることによって、基材および/または下地との密着性が劣る樹脂硬化膜が得られやすい感光性樹脂組成物となることを防止できる。 In addition, the content of the structural unit (a-1) is 60 mol% or less, preferably 50 mol% or less, more preferably 45 mol% or less. When the content of the structural unit (a-1) is 60 mol % or less, a cured resin film having sufficient transparency can be obtained. Further, when the content of the structural unit (a-1) is 60 mol % or less, the function due to inclusion of other components of the structural unit (a-1) can be sufficiently obtained. Therefore, it is possible to prevent the formation of a photosensitive resin composition that easily provides a cured resin film having poor adhesion to the substrate and/or the undercoat due to an excessive content of the structural unit (a-1).
 (A)アルカリ可溶性樹脂が構成単位(a-2)を含む場合、(A)アルカリ可溶性樹脂の全繰り返し構成単位中の構成単位(a-2)の含有量は、感光性樹脂組成物のアルカリ現像液に対する溶解性の観点から、15mol%~60mol%であることが好ましく、20mol%~55mol%がより好ましく、25mol%~50mol%がさらに好ましい。 (A) When the alkali-soluble resin contains the structural unit (a-2), the content of the structural unit (a-2) in all repeating structural units of the alkali-soluble resin (A) is the alkali of the photosensitive resin composition. From the viewpoint of solubility in a developer, it is preferably 15 mol % to 60 mol %, more preferably 20 mol % to 55 mol %, even more preferably 25 mol % to 50 mol %.
 (A)アルカリ可溶性樹脂が構成単位(a-3)を含む場合、(A)アルカリ可溶性樹脂の全繰り返し構成単位中の構成単位(a-3)の含有量は、2mol%~50mol%が好ましく、5mol%~40mol%がより好ましく、更に好ましくは9mol%~30mol%である。構成単位(a-3)の含有量が2mol%以上であると、より硬度が高く、良好な耐高温高湿性を有し、耐熱黄変性に優れる透明性の良好な樹脂硬化膜が得られる感光性樹脂組成物となる。構成単位(a-3)の含有量が50mol%以下であると、構成単位(a-3)の他の構成単位の含有量を十分に確保することができ、より一層、各種性能のバランスが取れた感光性樹脂組成物、あるいは樹脂硬化膜となる。 (A) When the alkali-soluble resin contains the structural unit (a-3), the content of the structural unit (a-3) in all repeating structural units of the alkali-soluble resin (A) is preferably 2 mol% to 50 mol%. , more preferably 5 mol % to 40 mol %, more preferably 9 mol % to 30 mol %. When the content of the structural unit (a-3) is 2 mol% or more, a photosensitive resin film having higher hardness, excellent high-temperature and high-humidity resistance, excellent resistance to heat yellowing, and good transparency can be obtained. It becomes a flexible resin composition. When the content of the structural unit (a-3) is 50 mol% or less, the content of other structural units of the structural unit (a-3) can be sufficiently ensured, and the balance of various performances is further improved. It becomes the removed photosensitive resin composition or a resin cured film.
 (A)アルカリ可溶性樹脂の有する酸基がカルボキシ基であって、前記カルボキシ基の一部がエポキシ基含有(メタ)アクリレート(ma-5)で変性されて、構成単位(a-5)に変換されている場合、構成単位(a-5)に変換されているカルボキシ基の変性量は、15mol%~90mol%であることが好ましく、20mol%~80mol%であることがより好ましく、30mol%~70mol%であることがさらに好ましい。 構成単位(a-5)に変換されているカルボキシ基の変性量とは、(A)アルカリ可溶性樹脂の有する構成単位(a-5)数とカルボキシ基数との合計に対する構成単位(a-5)数の割合を意味する。 (A) The acid group of the alkali-soluble resin is a carboxy group, and a part of the carboxy group is modified with an epoxy group-containing (meth)acrylate (ma-5) to be converted into the structural unit (a-5). is, the modification amount of the carboxy group converted to the structural unit (a-5) is preferably 15 mol% to 90 mol%, more preferably 20 mol% to 80 mol%, and 30 mol% to More preferably, it is 70 mol %. The modified amount of the carboxy group converted to the structural unit (a-5) is the structural unit (a-5) relative to the sum of the number of structural units (a-5) and the number of carboxy groups of the alkali-soluble resin (A). means a percentage of numbers.
 構成単位(a-5)に変換されているカルボキシ基の変性量が15mol%以上であると、十分な量の(メタ)アクリロイルオキシ基が(A)アルカリ可溶性樹脂に導入され、(C)反応性希釈剤と十分反応でき、良好な現像性を有し、十分な硬度、基材および/または下地との密着性を有する樹脂硬化膜が得られる。
 カルボキシ基の変性量が90mol%以下であると、(A)アルカリ可溶性樹脂中に十分な量のカルボキシ基が残存する。このため、十分なアルカリ可溶性を確保でき、良好な現像性を有し、十分な耐高温高湿性を有する樹脂硬化膜が得られる感光性樹脂組成物となる。
 カルボキシ基の変性量が15mol%~90mol%であると、(A)アルカリ可溶性樹脂のエチレン性不飽和基当量が400g/mol~2500g/molの範囲である感光性樹脂組成物となりやすい。
When the modification amount of the carboxy group converted to the structural unit (a-5) is 15 mol% or more, a sufficient amount of (meth)acryloyloxy group is introduced into (A) the alkali-soluble resin, and (C) the reaction It is possible to obtain a cured resin film which can sufficiently react with a polar diluent, has good developability, and has sufficient hardness and adhesion to a base material and/or an undercoat.
When the modified amount of carboxy groups is 90 mol % or less, a sufficient amount of carboxy groups remains in (A) the alkali-soluble resin. Therefore, the photosensitive resin composition can ensure sufficient alkali solubility, has good developability, and can provide a cured resin film having sufficient resistance to high temperature and high humidity.
When the modified amount of the carboxy group is 15 mol % to 90 mol %, the photosensitive resin composition in which the ethylenically unsaturated group equivalent of (A) the alkali-soluble resin is in the range of 400 g/mol to 2500 g/mol is likely to be obtained.
<(A)アルカリ可溶性樹脂の酸価>
 (A)アルカリ可溶性樹脂の酸価は、20KOHmg/g~200KOHmg/gであることが好ましく、25KOHmg/g~180KOHmg/gであることがより好ましく、30KOHmg/g~150KOHmg/gであることがさらに好ましい。酸価が20KOHmg/g以上であると、アルカリ現像液に対する溶解性に優れ、良好な現像性を有する感光性樹脂組成物となる。酸価が200KOHmg/g以下であると、(A)アルカリ可溶性樹脂の酸価が高すぎることに起因する(B)アルコキシシリル基含有樹脂の分解を抑制でき、保存安定性の良好な感光性樹脂組成物となる。前記酸価は、上記範囲内で任意に選択でき、例えば、40KOHmg/g~130KOHmg/gや、60KOHmg/g~100KOHmg/gなどであってもよい。
<(A) Acid value of alkali-soluble resin>
(A) The acid value of the alkali-soluble resin is preferably 20KOHmg/g to 200KOHmg/g, more preferably 25KOHmg/g to 180KOHmg/g, and further preferably 30KOHmg/g to 150KOHmg/g. preferable. When the acid value is 20 KOHmg/g or more, the photosensitive resin composition has excellent solubility in an alkaline developer and good developability. When the acid value is 200 KOH mg/g or less, the decomposition of the (B) alkoxysilyl group-containing resin due to the too high acid value of the (A) alkali-soluble resin can be suppressed, and the photosensitive resin has good storage stability. It becomes a composition. The acid value can be arbitrarily selected within the above range, and may be, for example, 40 mg KOH/g to 130 mg KOH/g or 60 mg KOH/g to 100 mg KOH/g.
 (A)アルカリ可溶性樹脂の酸価は、例えば、構成単位(a-2)の原料として使用する不飽和一塩基酸(ma-2)の使用量を調節することにより、構成単位(a-2)の含有量を調節する方法により調整できる。(A)アルカリ可溶性樹脂の一部が構成単位(m-5)に変性されている場合、(A)アルカリ可溶性樹脂を製造する工程において、不飽和一塩基酸(ma-2)由来のカルボキシ基の一部が、エポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(m-5)に変性されて、(A)アルカリ可溶性樹脂の酸価が不足している場合がある。この場合には、一部が構成単位(m-5)に変性されている(A)アルカリ可溶性樹脂に、カルボキシ基を導入して、不足する酸価を補っても良い。具体的には、一部が構成単位(m-5)に変性されている(A)アルカリ可溶性樹脂中に含まれる前記エポキシ基が開環して生じたヒドロキシ基に、酸無水物を付加するなどの方法を用いることができる。 (A) The acid value of the alkali-soluble resin can be adjusted, for example, by adjusting the amount of the unsaturated monobasic acid (ma-2) used as the starting material for the structural unit (a-2). ) can be adjusted by adjusting the content. (A) When a portion of the alkali-soluble resin is modified to the structural unit (m-5), (A) in the step of producing the alkali-soluble resin, a carboxy group derived from an unsaturated monobasic acid (ma-2) is modified into structural units (m-5) derived from epoxy group-containing (meth)acrylate (ma-5), and the acid value of (A) the alkali-soluble resin may be insufficient. In this case, a carboxyl group may be introduced into (A) the alkali-soluble resin partially modified with the structural unit (m-5) to compensate for the insufficient acid value. Specifically, an acid anhydride is added to a hydroxy group generated by ring-opening of the epoxy group contained in (A) the alkali-soluble resin partially modified with the structural unit (m-5). and other methods can be used.
 本実施形態における(A)アルカリ可溶性樹脂の酸価は、JIS K6901 5.3にしたがって、ブロモチモールブルーとフェノールレッドの混合指示薬を用いて測定された値である。(A)アルカリ可溶性樹脂の酸価とは、(A)アルカリ可溶性樹脂からなる試料1g中に含まれる酸性成分を中和するのに要する水酸化カリウムのmg数を意味する。 The acid value of (A) the alkali-soluble resin in this embodiment is a value measured using a mixed indicator of bromothymol blue and phenol red according to JIS K6901 5.3. (A) The acid value of the alkali-soluble resin means the number of mg of potassium hydroxide required to neutralize the acidic component contained in 1 g of the sample comprising the (A) alkali-soluble resin.
<(A)アルカリ可溶性樹脂の重量平均分子量(Mw)>
 (A)アルカリ可溶性樹脂は、ポリスチレン換算の重量平均分子量(Mw)が1,000~50,000であることが好ましく、5,000~45,000であることがより好ましく、8,000~42,000であることが更に好ましい。(A)アルカリ可溶性樹脂の重量平均分子量(Mw)が1,000以上であると、感光性樹脂組成物を硬化させてなる樹脂硬化膜は、硬化収縮が十分に小さく、基材および/または下地との密着性が良好なものとなる。(A)アルカリ可溶性樹脂の重量平均分子量(Mw)が50,000以下であると、良好な現像性を有する感光性樹脂組成物となる。
<(A) Weight average molecular weight (Mw) of alkali-soluble resin>
(A) the alkali-soluble resin preferably has a polystyrene equivalent weight average molecular weight (Mw) of 1,000 to 50,000, more preferably 5,000 to 45,000, and 8,000 to 42 ,000 is more preferred. (A) When the weight average molecular weight (Mw) of the alkali-soluble resin is 1,000 or more, the cured resin film obtained by curing the photosensitive resin composition has sufficiently small curing shrinkage, The adhesiveness with is good. (A) When the weight average molecular weight (Mw) of the alkali-soluble resin is 50,000 or less, the photosensitive resin composition has good developability.
 本実施形態における(A)アルカリ可溶性樹脂の重量平均分子量(Mw)は、ゲル・パーミエーション・クロマトグラフィー(GPC)を用いて、下記条件にて測定し、ポリスチレン換算にて算出されたものである。
 カラム:ショウデックス(登録商標)LF-804+LF-804(昭和電工株式会社製)
 カラム温度:40℃
 試料:(A)アルカリ可溶性樹脂からなる試料の含有量が0.2質量%であるテトラヒドロフラン溶液
 展開溶媒:テトラヒドロフラン
 検出器:示差屈折計(商品名:ショウデックス(登録商標)RI-71S、昭和電工株式会社製)
 流速:1mL/min
The weight average molecular weight (Mw) of (A) the alkali-soluble resin in the present embodiment is measured using gel permeation chromatography (GPC) under the following conditions and calculated in terms of polystyrene. .
Column: Shodex (registered trademark) LF-804 + LF-804 (manufactured by Showa Denko Co., Ltd.)
Column temperature: 40°C
Sample: (A) Tetrahydrofuran solution containing 0.2% by mass of sample made of alkali-soluble resin Developing solvent: Tetrahydrofuran Detector: Differential refractometer (trade name: Shodex (registered trademark) RI-71S, Showa Denko Co., Ltd.)
Flow rate: 1 mL/min
<(A)アルカリ可溶性樹脂の製造方法>
 (A)アルカリ可溶性樹脂の製造方法としては、従来公知の方法を用いることができる。例えば、(A)アルカリ可溶性樹脂が、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)と、不飽和一塩基酸(ma-2)由来の構成単位(a-2)と、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)由来の構成(a-3)とを含み、必要に応じてさらに、その他のエチレン性不飽和基含有化合物(ma-4)に由来する構成単位(a-4)を含む共重合体からなる樹脂前駆体のカルボキシ基の一部が、エポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(a-5)に変性された樹脂である場合、以下に示す方法により製造できる。
<(A) Method for producing alkali-soluble resin>
(A) As a method for producing the alkali-soluble resin, a conventionally known method can be used. For example, (A) an alkali-soluble resin is a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and an unsaturated monobasic acid (ma-2) derived from Containing a structural unit (a-2) and a structure (a-3) derived from an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group, and optionally other ethylene Part of the carboxy groups of the resin precursor comprising a copolymer containing a structural unit (a-4) derived from a polyunsaturated group-containing compound (ma-4) is an epoxy group-containing (meth)acrylate (ma-5 ) derived from the structural unit (a-5), it can be produced by the following method.
 芳香族基を有するエチレン性不飽和基含有化合物(ma-1)と、不飽和一塩基酸(ma-2)と、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)と、必要に応じて含有される、その他のエチレン性不飽和基含有化合物(a-4)とからなる原料モノマーを、重合開始剤とともに溶剤中に入れて、50~130℃で1~20時間共重合反応させる。このことにより、構成単位(a-1)~(a-3)及び必要に応じて含有される構成単位(a-4)を含む共重合体からなる樹脂前駆体を含む反応液を生成させる。 An ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, an unsaturated monobasic acid (ma-2), and an ethylenically unsaturated group-containing compound (ma-3) having an alicyclic hydrocarbon group ) and optionally containing other ethylenically unsaturated group-containing compound (a-4) are placed in a solvent together with a polymerization initiator, and heated to 1 to 20 at 50 to 130 ° C. Allow time to copolymerize. As a result, a reaction liquid containing a resin precursor composed of a copolymer containing the structural units (a-1) to (a-3) and optionally the structural unit (a-4) is produced.
 重合開始剤としては、例えば、t-ブチルパーオキシ-2-エチルヘキサノエート、アゾビスイソブチロニトリル、アゾビスイソバレロニトリル、2,2’-アゾビス(イソ酪酸メチル)、過酸化ベンゾイルなどを用いることができる。これらの重合開始剤は、単独で又は2種以上を組み合わせて用いることができる。
 重合開始剤の使用量は、原料モノマーの仕込み量の合計100質量部に対して、一般に0.5~20質量部であり、好ましくは1.0~10質量部である。
Examples of polymerization initiators include t-butyl peroxy-2-ethylhexanoate, azobisisobutyronitrile, azobisisovaleronitrile, 2,2'-azobis(methyl isobutyrate), benzoyl peroxide, and the like. can be used. These polymerization initiators can be used alone or in combination of two or more.
The amount of the polymerization initiator used is generally 0.5 to 20 parts by mass, preferably 1.0 to 10 parts by mass, per 100 parts by mass of the raw material monomers.
 溶剤としては、原料モノマーの重合反応において不活性のものであればよく、特に限定されない。溶剤としては、例えば、プロピルアルコール、ブチルアルコール、ペンチルアルコール、ヘキシルアルコール、オクチルアルコール、ノニルアルコール、デシルアルコール、ドデシルアルコール等のアルキルアルコール類;ベンジルアルコール;
 エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノ-n-プロピルエーテル、ジエチレングリコールモノ-n-ブチルエーテル、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノ-n-プロピルエーテル、ジプロピレングリコールモノ-n-ブチルエーテル、トリプロピレングリコールモノメチルエーテル、トリプロピレングリコールモノエチルエーテル、3-メトキシ-1-ブタノール等の(ポリ)アルキレングリコールモノアルキルエーテル類;
 エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート等の(ポリ)アルキレングリコールモノアルキルエーテルアセテート類;
 ジエチレングリコールジメチルエーテル、ジエチレングリコールメチルエチルエーテル、ジエチレングリコールジエチルエーテル、テトラヒドロフラン等の他のエーテル類; メチルエチルケトン、シクロヘキサノン、2-ヘプタノン、3-ヘプタノン等のケトン類;
 2-ヒドロキシプロピオン酸メチル、2-ヒドロキシプロピオン酸エチル、2-ヒドロキシ-2-メチルプロピオン酸メチル、2-ヒドロキシ-2-メチルプロピオン酸エチル、3-メトキシプロピオン酸メチル、3-メトキシプロピオン酸エチル、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、エトキシ酢酸エチル、ヒドロキシ酢酸エチル、2-ヒドロキシ-3-メチル酪酸メチル、3-メチル-3-メトキシブチルアセテート、3-メチル-3-メトキシブチルプロピオネート、酢酸エチル、酢酸n-ブチル、酢酸n-プロピル、酢酸i-プロピル、酢酸n-ブチル、酢酸i-ブチル、酢酸n-アミル、酢酸i-アミル、プロピオン酸n-ブチル、酪酸エチル、酪酸n-プロピル、酪酸i-プロピル、酪酸n-ブチル、ピルビン酸メチル、ピルビン酸エチル、ピルビン酸n-プロピル、アセト酢酸メチル、アセト酢酸エチル、2-オキソ酪酸エチル等のエステル類;
 トルエン、キシレン等の芳香族炭化水素類;
 N-メチルピロリドン、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド等のカルボン酸アミド類等が挙げられる。
The solvent is not particularly limited as long as it is inert in the polymerization reaction of the raw material monomers. Examples of solvents include alkyl alcohols such as propyl alcohol, butyl alcohol, pentyl alcohol, hexyl alcohol, octyl alcohol, nonyl alcohol, decyl alcohol, and dodecyl alcohol; benzyl alcohol;
Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol (poly)alkylene glycol monoalkyl ethers such as monoethyl ether and 3-methoxy-1-butanol;
(poly)alkylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate;
other ethers such as diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol diethyl ether, tetrahydrofuran; ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone;
methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, Methyl 3-ethoxypropionate, Ethyl 3-ethoxypropionate, Ethyl ethoxyacetate, Ethyl hydroxyacetate, Methyl 2-hydroxy-3-methylbutyrate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl Propionate, ethyl acetate, n-butyl acetate, n-propyl acetate, i-propyl acetate, n-butyl acetate, i-butyl acetate, n-amyl acetate, i-amyl acetate, n-butyl propionate, ethyl butyrate , n-propyl butyrate, i-propyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, esters such as ethyl 2-oxobutyrate;
aromatic hydrocarbons such as toluene and xylene;
Examples thereof include carboxylic acid amides such as N-methylpyrrolidone, N,N-dimethylformamide and N,N-dimethylacetamide.
 これらの溶剤の中でも、グリコールエーテル系溶剤が好ましく、特に、プロピレングリコールモノメチルエーテルなどの(ポリ)アルキレングリコールモノアルキルエーテル類、およびプロピレングリコールモノメチルエーテルアセテートなどの(ポリ)アルキレングリコールモノアルキルエーテルアセテート類が好ましい。これらの溶剤は、単独でまたは2種以上を混合して使用できる。 Among these solvents, glycol ether solvents are preferable, and (poly)alkylene glycol monoalkyl ethers such as propylene glycol monomethyl ether and (poly)alkylene glycol monoalkyl ether acetates such as propylene glycol monomethyl ether acetate are particularly preferred. preferable. These solvents can be used alone or in combination of two or more.
 その後、反応液に、エポキシ基含有(メタ)アクリレート(ma-5)と、必要に応じて添加される触媒および/または重合禁止剤とを加えて反応させる。このことにより、樹脂前駆体に含まれる構成単位(a-2)中のカルボキシ基の一部に、エポキシ基含有(メタ)アクリレート(ma-5)中のエポキシ基が開環付加反応する。その結果、樹脂前駆体である共重合体の側鎖の一部が、エポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(m-5)に変性された(A)アルカリ可溶性樹脂が得られる。
 本実施形態では、反応に使用したエポキシ基含有(メタ)アクリレート(ma-5)の全てが、樹脂前駆体に含まれる構成単位(a-2)中のカルボキシ基と反応し、構成単位(a-5)に変性されたとみなすことができる。
Thereafter, an epoxy group-containing (meth)acrylate (ma-5) and, if necessary, a catalyst and/or a polymerization inhibitor are added to the reaction solution and reacted. As a result, the epoxy group in the epoxy group-containing (meth)acrylate (ma-5) undergoes a ring-opening addition reaction with some of the carboxy groups in the structural unit (a-2) contained in the resin precursor. As a result, part of the side chain of the copolymer, which is the resin precursor, was modified to the structural unit (m-5) derived from the epoxy group-containing (meth)acrylate (ma-5) (A) alkali-soluble resin is obtained.
In the present embodiment, all of the epoxy group-containing (meth)acrylate (ma-5) used in the reaction reacts with the carboxy group in the structural unit (a-2) contained in the resin precursor, and the structural unit (a -5) can be regarded as denatured.
 触媒としては、例えば、トリフェニルホスフィン、トリ(o-トリル)ホスフィン、トリ(m-トリル)ホスフィン、トリ(p-トリル)ホスフィン、トリス(p-メトキシフェニル)ホスフィン、トリス(2,6-ジメトキシフェニル)ホスフィン、p-スチリルジフェニルホスフィンなどを用いることができる。
 重合禁止剤としては、例えば、メチルハイドロキノン、ブチルヒドロキシトルエン、ヒドロキノン、メトキノン、メチルヒドロキノンなどを用いることができる。
Examples of catalysts include triphenylphosphine, tri(o-tolyl)phosphine, tri(m-tolyl)phosphine, tri(p-tolyl)phosphine, tris(p-methoxyphenyl)phosphine, tris(2,6-dimethoxy phenyl)phosphine, p-styryldiphenylphosphine, and the like can be used.
Examples of polymerization inhibitors that can be used include methylhydroquinone, butylhydroxytoluene, hydroquinone, methoquinone, and methylhydroquinone.
[(B)アルコキシシリル基含有樹脂]
 (B)アルコキシシリル基含有樹脂は、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)由来の構成単位(b-1)(以下、単に「構成単位(b-1)」とも言う。)を含む。
 (B)アルコキシシリル基含有樹脂は、必要に応じて、不飽和一塩基酸(mb-2)由来の構成単位(b-2)(以下、単に「構成単位(b-2)」とも言う。)および/またはその他のエチレン性不飽和基含有化合物(mb-3)由来の構成単位(b-3)(以下、単に「構成単位(b-3)」とも言う。)を含んでいてもよい。
 本実施形態の感光性樹脂組成物は、(B)アルコキシシリル基含有樹脂を含むため、硬度が高く、耐高温高湿性の良好な樹脂硬化膜を形成できる感光性樹脂組成物となる。
[(B) Alkoxysilyl group-containing resin]
(B) the alkoxysilyl group-containing resin is a structural unit (b-1) derived from an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group (hereinafter simply referred to as "structural unit (b-1)" Say.) including.
(B) The alkoxysilyl group-containing resin is, if necessary, a structural unit (b-2) derived from unsaturated monobasic acid (mb-2) (hereinafter simply referred to as "structural unit (b-2)"). ) and/or other ethylenically unsaturated group-containing compound (mb-3)-derived structural units (b-3) (hereinafter also simply referred to as “structural units (b-3)”). .
Since the photosensitive resin composition of the present embodiment contains (B) the alkoxysilyl group-containing resin, it becomes a photosensitive resin composition that can form a resin cured film having high hardness and good resistance to high temperature and high humidity.
<構成単位(b-1)>
 構成単位(b-1)は、1種の、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)のみに由来するものであってもよいし、2種以上の、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)に由来するものであってもよい。
<Constituent unit (b-1)>
The structural unit (b-1) may be derived from only one ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group, or may be derived from two or more alkoxysilyl groups. It may be derived from the ethylenically unsaturated group-containing compound (mb-1) having
 構成単位(b-1)の原料となるアルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)は、アルコキシシリル基とエチレン性不飽和基とを有するモノマーであればよく、特に限定されない。アルコキシシリル基のアルコキシ基は、炭素数1~6であることが好ましく、炭素数1~4であることがより好ましく、炭素数1~2であることがさらに好ましい。アルコキシシリル基におけるアルコキシ基の数は、1つであってもよいし、複数であってもよい。アルコキシシリル基が、3つのアルコキシ基を有するトリアルコキシシリル基であると、構成単位(b-1)の架橋点が多い(B)アルコキシシリル基含有樹脂となるため、硬化性のより良好な感光性樹脂組成物となり、好ましい。 The ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group, which is a raw material for the structural unit (b-1), may be a monomer having an alkoxysilyl group and an ethylenically unsaturated group, and is particularly limited. not. The alkoxy group of the alkoxysilyl group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, even more preferably 1 to 2 carbon atoms. The number of alkoxy groups in the alkoxysilyl group may be one or plural. When the alkoxysilyl group is a trialkoxysilyl group having three alkoxy groups, the (B) alkoxysilyl group-containing resin having many cross-linking points of the structural unit (b-1) is obtained, so that photosensitivity with better curability is obtained. It becomes a flexible resin composition, which is preferable.
 アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)は、(B)アルコキシシリル基含有樹脂を合成する際の反応容易性が良好であり、容易に入手できるため、アルコキシシリル基含有(メタ)アクリレートであることが好ましく、構成単位(b-1)が、下記式(1)で表される構成単位であることがより好ましい。 The ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group has good reaction easiness when synthesizing the alkoxysilyl group-containing resin (B), and is easily available. (Meth)acrylate is preferable, and the structural unit (b-1) is more preferably a structural unit represented by the following formula (1).
Figure JPOXMLDOC01-appb-C000001

[式(1)中、Rは水素原子又はメチル基を表す。R~Rは各々独立に、水素原子、炭素原子数1~6のアルキル基又は炭素原子数1~6のアルコキシ基を表す。R~Rのうち少なくとも1つは、炭素原子数1~6のアルコキシ基である。nは1~10の整数である。]
Figure JPOXMLDOC01-appb-C000001

[In formula (1), R 1 represents a hydrogen atom or a methyl group. Each of R 2 to R 4 independently represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms. At least one of R 2 to R 4 is an alkoxy group having 1 to 6 carbon atoms. n is an integer of 1-10. ]
 式(1)中、Rは水素原子またはメチル基を表し、メチル基が好ましい。
 式(1)中、R~Rは各々独立に、水素原子、炭素原子数1~6のアルキル基又は炭素原子数1~6のアルコキシ基を表す。R~Rのうち少なくとも1つは、炭素原子数1~6のアルコキシ基である。
 R~Rが炭素原子数1~6のアルキル基である場合、炭素原子数は1~4であることが好ましく、1~2であることがより好ましい。R~Rが炭素原子数1~6のアルコキシ基である場合、炭素原子数は1~4であることが好ましく、1~2であることがより好ましい。
In formula (1), R 1 represents a hydrogen atom or a methyl group, preferably a methyl group.
In formula (1), R 2 to R 4 each independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms. At least one of R 2 to R 4 is an alkoxy group having 1 to 6 carbon atoms.
When R 2 to R 4 are alkyl groups having 1 to 6 carbon atoms, the number of carbon atoms is preferably 1 to 4, more preferably 1 to 2. When R 2 to R 4 are alkoxy groups having 1 to 6 carbon atoms, the number of carbon atoms is preferably 1 to 4, more preferably 1 to 2.
 式(1)中、R~Rは各々独立に、炭素原子数1~6のアルキル基又は炭素原子数1~6のアルコキシ基であることが好ましく、R~Rのうち2つまたは3つが炭素原子数1~6のアルコキシ基であることがより好ましく、構成単位(b-1)の架橋点が多い(B)アルコキシシリル基含有樹脂となり、硬化性のより良好な感光性樹脂組成物となるため、R~Rのうち3つ全てが炭素原子数1~6のアルコキシ基であることがさらに好ましい。
 具体例としては、式(1)中、R~Rは各々独立に、メチル基、エチル基、メトキシ基、又はエトキシ基であることが好ましく、R~Rのうち少なくとも1つはメトキシ基又はエトキシ基であることがより好ましい。
 式(1)中、nは1~10の整数であり、1~4であることが好ましい。
In formula (1), each of R 2 to R 4 is preferably an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, and two of R 2 to R 4 Or it is more preferable that three of them are alkoxy groups having 1 to 6 carbon atoms, resulting in (B) an alkoxysilyl group-containing resin with many cross-linking points of the structural unit (b-1), and a photosensitive resin with better curability. More preferably, all three of R 2 to R 4 are alkoxy groups having 1 to 6 carbon atoms in order to obtain a composition.
As a specific example, in formula (1), R 2 to R 4 are each independently preferably a methyl group, an ethyl group, a methoxy group, or an ethoxy group, and at least one of R 2 to R 4 is A methoxy group or an ethoxy group is more preferred.
In formula (1), n is an integer of 1-10, preferably 1-4.
 上記式(1)で表される構成単位の具体例としては、例えば、
3-(メタ)アクリロイルオキシプロピルメチルジメトキシシラン(式(1)中、R:水素原子(又はメチル基);R:メチル基;R、R:メトキシ基;n:3)、
3-(メタ)アクリロイルオキシプロピルエチルジメトキシシラン(式(1)中、R:水素原子(又はメチル基);R:エチル基;R、R:メトキシ基;n:3)、
3-(メタ)アクリロイルオキシプロピルメチルジエトキシシラン(式(1)中、R:水素原子(又はメチル基);R:メチル基;R、R:エトキシ基;n:3)、
3-(メタ)アクリロイルオキシプロピルエチルジエトキシシラン(式(1)中、R:水素原子(又はメチル基);R:エチル基;R、R:エトキシ基;n:3)、
3-(メタ)アクリロイルオキシプロピルトリメトキシシラン(式(1)中、R:水素原子(又はメチル基);R~R:メトキシ基;n:3)、
3-(メタ)アクリロイルオキシプロピルトリエトキシシラン(式(1)中、R:水素原子(又はメチル基);R~R:エトキシ基;n:3)
等の化合物に由来する構成単位が挙げられる。
Specific examples of the structural unit represented by the above formula (1) include, for example,
3-(meth)acryloyloxypropylmethyldimethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 : methyl group; R 3 , R 4 : methoxy group; n: 3),
3-(meth)acryloyloxypropylethyldimethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 : ethyl group; R 3 , R 4 : methoxy group; n: 3),
3-(meth)acryloyloxypropylmethyldiethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 : methyl group; R 3 , R 4 : ethoxy group; n: 3),
3-(meth)acryloyloxypropylethyldiethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 : ethyl group; R 3 , R 4 : ethoxy group; n: 3),
3-(meth)acryloyloxypropyltrimethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 to R 4 : methoxy group; n: 3),
3-(meth)acryloyloxypropyltriethoxysilane (in formula (1), R 1 : hydrogen atom (or methyl group); R 2 to R 4 : ethoxy group; n: 3)
Structural units derived from compounds such as
 これらの式(1)で表される構成単位の中でも、(B)アルコキシシリル基含有樹脂を合成する際の反応容易性が良好であり、容易に入手できるため、3-(メタ)アクリロイルオキシプロピルメチルジエトキシシランに由来する構成単位および/または3-(メタ)アクリロイルオキシプロピルトリエトキシシランに由来する構成単位が好ましい。 Among the structural units represented by these formulas (1), 3-(meth)acryloyloxypropyl Structural units derived from methyldiethoxysilane and/or structural units derived from 3-(meth)acryloyloxypropyltriethoxysilane are preferred.
 アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)としては、市販されているものを用いてもよい。例えば、信越化学工業株式会社製の以下に示す化合物(括弧内の記載は商品名である)3-メタクリロイルオキシプロピルメチルジエトキシシラン(KBE-502)、3-メタクリロイルオキシプロピルトリエトキシシラン(KBE-503)、3-メタクリロイルオキシプロピルメチルジメトキシシラン(KBM-502)、3-メタクリロイルオキシプロピルトリメトキシシラン(KBM-503)、メタクリロキシオクチルトリメトキシシラン(KBM-5803)、3-アクリロキシプロピルトリメトキシシラン(KBM-5103)などが挙げられる。 As the ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group, a commercially available one may be used. For example, the following compounds manufactured by Shin-Etsu Chemical Co., Ltd. (the description in parentheses is the trade name) 3-methacryloyloxypropylmethyldiethoxysilane (KBE-502), 3-methacryloyloxypropyltriethoxysilane (KBE- 503), 3-methacryloyloxypropylmethyldimethoxysilane (KBM-502), 3-methacryloyloxypropyltrimethoxysilane (KBM-503), methacryloxyoctyltrimethoxysilane (KBM-5803), 3-acryloxypropyltrimethoxy Examples include silane (KBM-5103).
<構成単位(b-2)>
 構成単位(b-2)は、1種の不飽和一塩基酸(mb-2)のみに由来するものであってもよいし、2種以上の不飽和一塩基酸(mb-2)に由来するものであってもよい。 構成単位(b-2)の原料となる不飽和一塩基酸(mb-2)は、酸基とエチレン性不飽和基を有し、ケイ素を含まない化合物であることが好ましい。不飽和一塩基酸(mb-2)の有する酸基は、特に限定されないが、カルボキシ基、リン酸基(-O-P(=O)(OH))、スルホン酸基(-S(=O)OH)等であることが好ましい。これらの酸基の中でも、良好な現像性を有する感光性樹脂組成物となることから、カルボキシ基がより好ましい。
<Constituent unit (b-2)>
The structural unit (b-2) may be derived from only one unsaturated monobasic acid (mb-2), or derived from two or more unsaturated monobasic acids (mb-2). It may be something to do. The unsaturated monobasic acid (mb-2), which is the starting material for the structural unit (b-2), is preferably a silicon-free compound having an acid group and an ethylenically unsaturated group. The acid group of the unsaturated monobasic acid (mb-2) is not particularly limited, but a carboxy group, a phosphoric acid group (-OP(=O)(OH) 2 ), a sulfonic acid group (-S(= O) 2 OH) and the like are preferred. Among these acid groups, a carboxy group is more preferable because it results in a photosensitive resin composition having good developability.
 構成単位(b-2)の原料となる不飽和一塩基酸(mb-2)としては、例えば、(メタ)アクリル酸、クロトン酸、桂皮酸、ビニルスルホン酸、2-(メタ)アクリロイルオキシエチルコハク酸、2-(メタ)アクリロイルオキシエチルフタル酸、2-(メタ)アクリロイルオキシエチルヘキサヒドロフタル酸、2-(メタ)アクリロイルオキシエチルアシッドホスフェート等が挙げられる。これらの不飽和一塩基酸(mb-2)の中でも、(B)アルコキシシリル基含有樹脂を合成する際の反応容易性が良好であり、容易に入手できるため、(メタ)アクリル酸が好ましい。 Examples of the unsaturated monobasic acid (mb-2) as a starting material for the structural unit (b-2) include (meth)acrylic acid, crotonic acid, cinnamic acid, vinylsulfonic acid, and 2-(meth)acryloyloxyethyl. succinic acid, 2-(meth)acryloyloxyethyl phthalic acid, 2-(meth)acryloyloxyethyl hexahydrophthalic acid, 2-(meth)acryloyloxyethyl acid phosphate and the like. Among these unsaturated monobasic acids (mb-2), (meth)acrylic acid is preferred because of its favorable reaction easiness in synthesizing the (B) alkoxysilyl group-containing resin and its easy availability.
<構成単位(b-3)>
 構成単位(b-3)は、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)ではなく、不飽和一塩基酸(mb-2)でもない、1種の、その他のエチレン性不飽和基含有化合物(mb-3)のみに由来するものであってもよいし、2種以上のエチレン性不飽和基含有化合物(mb-3)に由来するものであってもよい。
<Constituent unit (b-3)>
The structural unit (b-3) is neither an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group nor an unsaturated monobasic acid (mb-2), other ethylenic It may be derived only from the unsaturated group-containing compound (mb-3), or may be derived from two or more ethylenically unsaturated group-containing compounds (mb-3).
 構成単位(b-3)の原料となるその他のエチレン性不飽和基含有化合物(mb-3)としては、酸基およびアルコキシシリル基を有さないエチレン性不飽和基含有化合物を用いることができ、例えば、ブタジエン等のジエン類、(メタ)アクリル酸エステル類、(メタ)アクリル酸アミド類、ビニル化合物類、スチレン類、不飽和ジカルボン酸ジエステル、不飽和多塩基酸無水物などが挙げられる。 As the other ethylenically unsaturated group-containing compound (mb-3) that is a raw material for the structural unit (b-3), an ethylenically unsaturated group-containing compound that does not have an acid group and an alkoxysilyl group can be used. , for example, dienes such as butadiene, (meth)acrylic acid esters, (meth)acrylic acid amides, vinyl compounds, styrenes, unsaturated dicarboxylic acid diesters, unsaturated polybasic acid anhydrides, and the like.
 (メタ)アクリル酸エステル類の具体例としては、メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-プロピル(メタ)アクリレート、イソプロピル(メタ)アクリレート、n-ブチル(メタ)アクリルレート、sec-ブチル(メタ)アクリレート、イソブチル(メタ)アクリレート、tert-ブチル(メタ)アクリルレート、ペンチル(メタ)アクリレート、ネオペンチル(メタ)アクリレート、ベンジル(メタ)アクリレート、イソアミル(メタ)アクリレート、ヘキシル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、ベンジル(メタ)アクリレート、ラウリル(メタ)アクリレート、ドデシル(メタ)アクリレート、シクロペンチル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、メチルシクロヘキシル(メタ)アクリレート、エチルシクロヘキシル(メタ)アクリレート、1,4-シクロヘキサンジメタノールモノ(メタ)アクリレート、ロジン(メタ)アクリレート、ノルボルニル(メタ)アクリレート、5-メチルノルボルニル(メタ)アクリレート、5-エチルノルボルニル(メタ)アクリレート、アリル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、1,1,1-トリフルオロエチル(メタ)アクリレート、パーフルオロエチル(メタ)アクリレート、パーフルオロ-n-プロピル(メタ)アクリレート、パーフルオロ-イソプロピル(メタ)アクリレート、トリフェニルメチル(メタ)アクリレート、クミル(メタ)アクリレート、3-(N,N-ジメチルアミノ)プロピル(メタ)アクリレート、グリセロールモノ(メタ)アクリレート、ブタントリオールモノ(メタ)アクリレート、ペンタントリオールモノ(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、イソボルニル(メタ)アクリレート、アダマンチル(メタ)アクリレート、ナフタレン(メタ)アクリレート、アントラセン(メタ)アクリレート、2-(2-ビニロキシエトキシ)エチル(メタ)アクリレート、グリシジル(メタ)アクリレート、3,4-エポキシシクロヘキシルメチル(メタ)アクリレート、(3-エチルオキセタン-3-イル)メチル(メタ)アクリレート、2-イソシアナトエチル(メタ)アクリレート、2-イソシアナトプロピル(メタ)アクリレート、3-イソシアナトプロピル(メタ)アクリレート、2-イソシアナト-1-メチルエチル(メタ)アクリレート、2-イソシアナト-1,1-ジメチルエチル(メタ)アクリレート、4-イソシアナトシクロヘキシル(メタ)アクリレート、前記のイソシアナト基を有するエチレン性不飽和化合物のイソシアナト基を、ブロック剤を用いてブロック化したブロックイソシアナト基を有する化合物、N,N-ジメチルアミノエチル(メタ)アクリレート、N,N-ジエチルアミノエチル(メタ)アクリレート、N-tert-ブチルアミノエチル(メタ)アクリレート、テトラメチルピペリジル(メタ)アクリレート、ヘキサメチルピペリジル(メタ)アクリレート等が挙げられる。 Specific examples of (meth)acrylates include methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, isopropyl (meth)acrylate, n-butyl (meth)acrylate, sec- Butyl (meth)acrylate, isobutyl (meth)acrylate, tert-butyl (meth)acrylate, pentyl (meth)acrylate, neopentyl (meth)acrylate, benzyl (meth)acrylate, isoamyl (meth)acrylate, hexyl (meth)acrylate , 2-ethylhexyl (meth)acrylate, benzyl (meth)acrylate, lauryl (meth)acrylate, dodecyl (meth)acrylate, cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, methylcyclohexyl (meth)acrylate, ethylcyclohexyl (meth)acrylate ) acrylate, 1,4-cyclohexanedimethanol mono (meth) acrylate, rosin (meth) acrylate, norbornyl (meth) acrylate, 5-methylnorbornyl (meth) acrylate, 5-ethylnorbornyl (meth) acrylate, allyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, 1,1,1-trifluoroethyl (meth) acrylate, perfluoroethyl (meth) acrylate, perfluoro-n-propyl (meth) acrylate, perfluoro- Isopropyl (meth) acrylate, triphenylmethyl (meth) acrylate, cumyl (meth) acrylate, 3-(N,N-dimethylamino) propyl (meth) acrylate, glycerol mono (meth) acrylate, butanetriol mono (meth) acrylate , pentanetriol mono (meth) acrylate, dicyclopentenyl (meth) acrylate, dicyclopentanyl (meth) acrylate, isobornyl (meth) acrylate, adamantyl (meth) acrylate, naphthalene (meth) acrylate, anthracene (meth) acrylate, 2-(2-vinyloxyethoxy)ethyl (meth)acrylate, glycidyl (meth)acrylate, 3,4-epoxycyclohexylmethyl (meth)acrylate, (3-ethyloxetan-3-yl)methyl (meth)acrylate, 2 - isocyanatoethyl (meth) acrylate, 2-isocyanatopropyl (meth) acrylate, 3-iso Cyanatopropyl (meth) acrylate, 2-isocyanato-1-methylethyl (meth) acrylate, 2-isocyanato-1,1-dimethylethyl (meth) acrylate, 4-isocyanatocyclohexyl (meth) acrylate, the above isocyanato groups A compound having a blocked isocyanato group obtained by blocking the isocyanato group of the ethylenically unsaturated compound with a blocking agent, N,N-dimethylaminoethyl (meth) acrylate, N,N-diethylaminoethyl (meth) acrylate , N-tert-butylaminoethyl (meth)acrylate, tetramethylpiperidyl (meth)acrylate, hexamethylpiperidyl (meth)acrylate and the like.
 (メタ)アクリル酸アミド類の具体例としては、(メタ)アクリル酸アミド、(メタ)アクリル酸N,N-ジメチルアミド、(メタ)アクリル酸N,N-ジエチルアミド、(メタ)アクリル酸N,N-ジプロピルアミド、(メタ)アクリル酸N,N-ジ-イソプロピルアミド、(メタ)アクリル酸アントラセニルアミド、N-イソプロピル(メタ)アクリルアミド、(メタ)アクリルモルフォリン、ダイアセトン(メタ)アクリルアミド等が挙げられる。 Specific examples of (meth)acrylic acid amides include (meth)acrylic acid amide, (meth)acrylic acid N,N-dimethylamide, (meth)acrylic acid N,N-diethylamide, (meth)acrylic acid N, N-dipropylamide, (meth)acrylic acid N,N-di-isopropylamide, (meth)acrylic acid anthracenylamide, N-isopropyl (meth)acrylamide, (meth)acrylic morpholine, diacetone (meth) acrylamide and the like.
 ビニル化合物の具体例としては、ノルボルネン(ビシクロ[2.2.1]ヘプト-2-エン)、5-メチルビシクロ[2.2.1]ヘプト-2-エン、5-エチルビシクロ[2.2.1]ヘプト-2-エン、テトラシクロ[4.4.0.12,5.17,10]ドデカ-3-エン、8-メチルテトラシクロ[4.4.0.12,5.17,10]ドデカ-3-エン、8-エチルテトラシクロ[4.4.0.12,5.17,10]ドデカ-3-エン、ジシクロペンタジエン、トリシクロ[5.2.1.02,6]デカ-8-エン、トリシクロ[5.2.1.02,6]デカ-3-エン、トリシクロ[4.4.0.12,5]ウンデカ-3-エン、トリシクロ[6.2.1.01,8]ウンデカ-9-エン、トリシクロ[6.2.1.01,8]ウンデカ-4-エン、テトラシクロ[4.4.0.12,5.17,10.01,6]ドデカ-3-エン、8-メチルテトラシクロ[4.4.0.12,5.17,10.01,6]ドデカ-3-エン、8-エチリデンテトラシクロ[4.4.0.12,5.17,12]ドデカ-3-エン、8-エチリデンテトラシクロ[4.4.0.12,5.17,10.01,6]ドデカ-3-エン、ペンタシクロ[6.5.1.13,6.02,7.09,13]ペンタデカ-4-エン、ペンタシクロ[7.4.0.12,5.19,12.08,13]ペンタデカ-3-エン、5-ノルボルネン-2,3-ジカルボン酸無水物、(メタ)アクリル酸アニリド、(メタ)アクリロイルニトリル、アクロレイン、塩化ビニル、塩化ビニリデン、フッ化ビニル、フッ化ビニリデン、ビニルピリジン、酢酸ビニル、ビニルトルエン、ノルボルネン等が挙げられる。 Specific examples of vinyl compounds include norbornene (bicyclo[2.2.1]hept-2-ene), 5-methylbicyclo[2.2.1]hept-2-ene, 5-ethylbicyclo[2.2 .1]hept-2-ene, tetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodeca-3-ene, 8-methyltetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodeca-3-ene, 8-ethyltetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodeca-3-ene, dicyclopentadiene, tricyclo[5.2.1.0 2,6 ]dec-8-ene, tricyclo[5.2.1.0 2,6 ]dec-3 -ene, tricyclo[4.4.0.1 2,5 ]undec-3-ene, tricyclo[6.2.1.0 1,8 ]undec-9-ene, tricyclo[6.2.1.0 1,8 ]undec-4-ene, tetracyclo[4.4.0.1 2,5 . 1 7, 10 . 0 1,6 ]dodeca-3-ene, 8-methyltetracyclo[4.4.0.1 2,5 . 1 7, 10 . 0 1,6 ]dodeca-3-ene, 8-ethylidenetetracyclo[4.4.0.1 2,5 . 1 7,12 ]dodeca-3-ene, 8-ethylidenetetracyclo[4.4.0.1 2,5 . 1 7, 10 . 0 1,6 ]dodeca-3-ene, pentacyclo[6.5.1.1 3,6 . 0 2, 7 . 0 9,13 ]pentadeca-4-ene, pentacyclo[7.4.0.1 2,5 . 19, 12 . 0 8,13 ]pentadeca-3-ene, 5-norbornene-2,3-dicarboxylic anhydride, (meth)acrylic anilide, (meth)acryloylnitrile, acrolein, vinyl chloride, vinylidene chloride, vinyl fluoride, fluorine vinylidene chloride, vinylpyridine, vinyl acetate, vinyltoluene, norbornene and the like.
 スチレン頼の具体例としては、スチレン、スチレンのα-、o-、m-、p-アルキル、ニトロ、シアノ、アミド誘導体等が挙げられる。
 不飽和ジカルボン酸ジエステルの具体例としては、シトラコン酸ジエチル、マレイン酸ジエチル、フマル酸ジエチル、イタコン酸ジエチル等が挙げられる。
 不飽和多塩基酸無水物の具体例としては、無水マレイン酸、無水イタコン酸、無水シトラコン酸等が挙げられる。
Specific examples of styrene derivatives include styrene, α-, o-, m-, and p-alkyl, nitro, cyano, and amide derivatives of styrene.
Specific examples of unsaturated dicarboxylic acid diesters include diethyl citraconate, diethyl maleate, diethyl fumarate, and diethyl itaconate.
Specific examples of unsaturated polybasic acid anhydrides include maleic anhydride, itaconic anhydride, and citraconic anhydride.
 これらのその他のエチレン性不飽和基含有化合物(mb-3)の中でも、(B)アルコキシシリル基含有樹脂を合成する際の反応容易性が良好であり、容易に入手できるため、メチル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、ベンジル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、グリシジル(メタ)アクリレート、(3-エチルオキセタン-3-イル)メチル(メタ)アクリレート、N,N-ジエチルアミノエチル(メタ)アクリレート、(メタ)アクリル酸N,N-ジメチルアミド、(メタ)アクリルモルフォリン、スチレン、ビニルトルエンおよびノルボルネンが好ましく、メチル(メタ)アクリレート、ベンジル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、グリシジル(メタ)アクリレート、(3-エチルオキセタン-3-イル)メチル(メタ)アクリレート、スチレンおよびビニルトルエンがより好ましい。 Among these other ethylenically unsaturated group-containing compounds (mb-3), the reaction easiness in synthesizing the (B) alkoxysilyl group-containing resin is good and is easily available, so methyl (meth) Acrylate, 2-ethylhexyl (meth)acrylate, benzyl (meth)acrylate, dicyclopentanyl (meth)acrylate, glycidyl (meth)acrylate, (3-ethyloxetan-3-yl)methyl (meth)acrylate, N, N - diethylaminoethyl (meth)acrylate, (meth)acrylic acid N,N-dimethylamide, (meth)acrylic morpholine, styrene, vinyltoluene and norbornene are preferred, methyl (meth)acrylate, benzyl (meth)acrylate, dicyclo More preferred are pentanyl (meth)acrylate, glycidyl (meth)acrylate, (3-ethyloxetan-3-yl)methyl (meth)acrylate, styrene and vinyltoluene.
 また、その他のエチレン性不飽和基含有化合物(mb-3)としては、耐熱分解性および耐熱黄変性に優れ、耐高温高湿性の良好な樹脂硬化膜が得られる感光性樹脂組成物となるため、アルキル(メタ)アクリレートが好ましく、メチル(メタ)アクリレート、ベンジル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレートが好ましい。 In addition, as the other ethylenically unsaturated group-containing compound (mb-3), it is excellent in heat decomposition resistance and heat yellowing resistance, and it becomes a photosensitive resin composition that can obtain a cured resin film with good high temperature and high humidity resistance. , alkyl (meth)acrylates are preferred, and methyl (meth)acrylate, benzyl (meth)acrylate and dicyclopentanyl (meth)acrylate are preferred.
 また、その他のエチレン性不飽和基含有化合物(mb-3)としては、耐溶剤性の良好な樹脂硬化膜が得られる感光性樹脂組成物となる観点から、酸基と反応する官能基を有する重合性化合物を用いることが好ましい。酸基と反応する官能基としては、グリシジル基、オキセタニル基、イソシアナト基、又はブロックイソシアナト基が挙げられる。酸基と反応する官能基を有する重合性化合物としては、具体的には、(B)アルコキシシリル基含有樹脂を合成する際の反応容易性が良好であり、容易に入手できるため、グリシジル(メタ)アクリレート、(3-エチルオキセタン-3-イル)メチル(メタ)アクリレートなどを用いることが好ましい。 Further, the other ethylenically unsaturated group-containing compound (mb-3) has a functional group that reacts with an acid group from the viewpoint of forming a photosensitive resin composition capable of obtaining a cured resin film having good solvent resistance. It is preferred to use a polymerizable compound. Functional groups that react with acid groups include glycidyl groups, oxetanyl groups, isocyanato groups, or blocked isocyanato groups. Specific examples of the polymerizable compound having a functional group that reacts with an acid group include glycidyl (meta- ) acrylate, (3-ethyloxetan-3-yl)methyl (meth)acrylate and the like are preferably used.
 その他のエチレン性不飽和基含有化合物(mb-3)が、イソシアナト基を有するエチレン性不飽和化合物のイソシアナト基を、ブロック剤を用いてブロック化したブロックイソシアナト基を有する化合物である場合におけるブロック剤の例としては、例えば、ε-カプロラクタム、δ-バレロラクタム、γ-ブチロラクタム、β-プロピオラクタム等のラクタム系;メタノール、エタノール、プロパノール、ブタノール、エチレングリコール、メチルセロソルブ、ブチルセロソルブ、メチルカルビトール、ベンジルアルコール、フェニルセロソルブ、フルフリルアルコール、シクロヘキサノール等のアルコール系;フェノール、クレゾール、キシレノール、エチルフェノール、o-イソプロピルフェノール、p-tert-ブチルフェノール等のブチルフェノール、p-tert-オクチルフェノール、ノニルフェノール、ジノニルフェノール、スチレン化フェノール、オキシ安息香酸エステル、チモール、p-ナフトール、p-ニトロフェノール、p-クロロフェノール等のフェノール系;マロン酸ジメチル、マロン酸ジエチル、アセト酢酸メチル、アセト酢酸エチル、アセチルアセトン等の活性メチレン系;ブチルメルカプタン、チオフェノール、tert-ドデシルメルカプタン等のメルカプタン系;ジフェニルアミン、フェニルナフチルアミン、アニリン、カルバゾール等のアミン系;アセトアニリド、アセトアニシジド、酢酸アミド、ベンズアミド等の酸アミド系;コハク酸イミド、マレイン酸イミド等の酸イミド系;イミダゾール、2-メチルイミダゾール、2-エチルイミダゾール等のイミダゾール系;尿素、チオ尿素、エチレン尿素等の尿素系;N-フェニルカルバミン酸フェニル、2-オキサゾリドン等のカルバミド酸塩系;エチレンイミン、ポリエチレンイミン等のイミン系;ホルムアルドオキシム、アセトアルドオキシム、アセトオキシム、メチルエチルケトオキシム、メチルイソブチルケトオキシム、シクロヘキサノンオキシム等のオキシム系;重亜硫酸ソーダ、重亜硫酸カリウム等の重亜硫酸塩系等が挙げられる。 Blocking when the other ethylenically unsaturated group-containing compound (mb-3) is a compound having a blocked isocyanato group obtained by blocking the isocyanato group of the ethylenically unsaturated compound having an isocyanato group using a blocking agent Examples of agents include lactams such as ε-caprolactam, δ-valerolactam, γ-butyrolactam, β-propiolactam; methanol, ethanol, propanol, butanol, ethylene glycol, methyl cellosolve, butyl cellosolve, methyl carbitol , benzyl alcohol, phenyl cellosolve, furfuryl alcohol, alcohols such as cyclohexanol; Phenols such as nonylphenol, styrenated phenol, oxybenzoate, thymol, p-naphthol, p-nitrophenol, p-chlorophenol; dimethyl malonate, diethyl malonate, methyl acetoacetate, ethyl acetoacetate, acetylacetone active methylene; mercaptans such as butyl mercaptan, thiophenol and tert-dodecylmercaptan; amines such as diphenylamine, phenylnaphthylamine, aniline and carbazole; acid amides such as acetanilide, acetanisidide, acetic amide and benzamide; Acid imides such as maleic acid imide; imidazoles such as imidazole, 2-methylimidazole and 2-ethylimidazole; urea systems such as urea, thiourea and ethylene urea; carbamides such as phenyl N-phenylcarbamate and 2-oxazolidone acid salts; imine-based compounds such as ethyleneimine and polyethyleneimine; A sulfite system etc. are mentioned.
<(B)アルコキシシリル基含有樹脂に含まれる各構成単位の割合>
 (B)アルコキシシリル基含有樹脂の全繰り返し構成単位中の構成単位(b-1)の含有量は、45mol%以上であることが好ましく、50mol%以上であることがより好ましく、55mol%以上であることが更に好ましい。構成単位(b-1)の含有量が45mol%以上であると、より一層、硬度が高く、耐高温高湿性の良好な樹脂硬化膜が得られる感光性樹脂組成物となる。
 構成単位(b-1)の含有量の上限は特に限定されないが、99mol%以下であってもよく、90mol%以下であってもよく、85mol%以下であっても良い。前記構成単位(b-1)の含有量は、上記範囲の中で任意に選択でき、例えば、50mol%以上100mol%以下や、60mol%以上95mol%以下や、65mol%以上80mol%以下や、70mol%以上75mol%以下などであってもよい。
<Ratio of Each Structural Unit Contained in (B) Alkoxysilyl Group-Containing Resin>
(B) The content of the structural unit (b-1) in all repeating structural units of the alkoxysilyl group-containing resin is preferably 45 mol% or more, more preferably 50 mol% or more, and 55 mol% or more. It is even more preferable to have When the content of the structural unit (b-1) is 45 mol % or more, the photosensitive resin composition can provide a cured resin film having even higher hardness and excellent resistance to high temperature and high humidity.
The upper limit of the content of the structural unit (b-1) is not particularly limited, but may be 99 mol% or less, 90 mol% or less, or 85 mol% or less. The content of the structural unit (b-1) can be arbitrarily selected within the above range. % or more and 75 mol % or less.
 (B)アルコキシシリル基含有樹脂が構成単位(b-2)を含む場合、その含有量は、(B)アルコキシシリル基含有樹脂の全繰り返し構成単位中、感光性樹脂組成物のアルカリ現像液に対する溶解性と、保存安定性の観点から、1mol%~40mol%であることが好ましく、10mol%~30mol%であることがより好ましく、15mol%~25mol%であることが更に好ましい。 (B) When the alkoxysilyl group-containing resin contains the structural unit (b-2), the content thereof is From the viewpoint of solubility and storage stability, the content is preferably 1 mol % to 40 mol %, more preferably 10 mol % to 30 mol %, even more preferably 15 mol % to 25 mol %.
 (B)アルコキシシリル基含有樹脂が構成単位(b-3)を含む場合、その含有量は、(B)アルコキシシリル基含有樹脂の全繰り返し構成単位中、1mol%~40mol%であることが好ましく、5mol%~30mol%であることがより好ましく、10mol%~25mol%であることが更に好ましい。 When the alkoxysilyl group-containing resin (B) contains the structural unit (b-3), the content thereof is preferably 1 mol% to 40 mol% of all repeating structural units of the alkoxysilyl group-containing resin (B). , more preferably 5 mol % to 30 mol %, even more preferably 10 mol % to 25 mol %.
<(B)アルコキシシリル基含有樹脂の酸価>
 (B)アルコキシシリル基含有樹脂の酸価は150KOHmg/g以下であることが好ましく、100KOHmg/g以下であることがより好ましく、70KOHmg/g以下であることがさらに好ましい。酸価が150KOHmg/g以下であると、優れた保存安定性を有し、アルカリ現像液に対する溶解性に優れ、良好な現像性を有する感光性樹脂組成物となる。(B)アルコキシシリル基含有樹脂の酸価の下限値は、特に限定されないが、例えば、1KOHmg/g以上であっても良く、5KOHmg/g以上であっても良く、10KOHmg/g以上であっても良い。(B)アルコキシシリル基含有樹脂の酸価が1KOHmg/g以上であると、(B)アルコキシシリル基含有樹脂にもアルカリ現像性を付与できる。(B)アルコキシシリル基含有樹脂の酸価は、例えば、構成単位(b-2)の原料として使用する不飽和一塩基酸(mb-2)の使用量を調節することにより、構成単位(b-2)の含有量を調節する方法により調整できる。
 (B)アルコキシシリル基含有樹脂の酸価は、(A)アルカリ可溶性樹脂の酸価と同様にして測定されたものである。
<(B) Acid value of alkoxysilyl group-containing resin>
(B) The acid value of the alkoxysilyl group-containing resin is preferably 150 mg KOH/g or less, more preferably 100 mg KOH/g or less, and even more preferably 70 mg KOH/g or less. When the acid value is 150 KOHmg/g or less, the photosensitive resin composition has excellent storage stability, excellent solubility in an alkaline developer, and good developability. (B) The lower limit of the acid value of the alkoxysilyl group-containing resin is not particularly limited, but may be, for example, 1 mg KOH/g or more, 5 mg KOH/g or more, or 10 mg KOH/g or more. Also good. When the acid value of the alkoxysilyl group-containing resin (B) is 1 KOHmg/g or more, alkali developability can be imparted to the alkoxysilyl group-containing resin (B). (B) The acid value of the alkoxysilyl group-containing resin can be adjusted, for example, by adjusting the amount of the unsaturated monobasic acid (mb-2) used as the starting material for the structural unit (b-2). -2) can be adjusted by adjusting the content.
The acid value of the (B) alkoxysilyl group-containing resin is measured in the same manner as the acid value of the (A) alkali-soluble resin.
<(B)アルコキシシリル基含有樹脂の重量平均分子量(Mw)>
 (B)アルコキシシリル基含有樹脂は、ポリスチレン換算の重量平均分子量(Mw)が1,000~20,000であることが好ましく、1,500~10,000であることがより好ましく、3,000~6,000であることが更に好ましい。(B)アルコキシシリル基含有樹脂の重量平均分子量(Mw)が1,000以上であると、良好な現像性を有する感光性樹脂組成物となる。(B)アルコキシシリル基含有樹脂の重量平均分子量(Mw)が20,000以下であると、現像時間が適切な範囲である感光性樹脂組成物となる。
 (B)アルコキシシリル基含有樹脂の重量平均分子量(Mw)は、(A)アルカリ可溶性樹脂の重量平均分子量(Mw)と同様にして算出されたものである。
<(B) Weight Average Molecular Weight (Mw) of Alkoxysilyl Group-Containing Resin>
(B) The alkoxysilyl group-containing resin preferably has a polystyrene equivalent weight average molecular weight (Mw) of 1,000 to 20,000, more preferably 1,500 to 10,000, and 3,000. ~6,000 is more preferred. (B) When the weight average molecular weight (Mw) of the alkoxysilyl group-containing resin is 1,000 or more, the photosensitive resin composition has good developability. When the weight-average molecular weight (Mw) of (B) the alkoxysilyl group-containing resin is 20,000 or less, the photosensitive resin composition has an appropriate development time.
The weight average molecular weight (Mw) of the (B) alkoxysilyl group-containing resin is calculated in the same manner as the weight average molecular weight (Mw) of the (A) alkali-soluble resin.
<(B)アルコキシシリル基含有樹脂のシリル基当量>
 (B)アルコキシシリル基含有樹脂のシリル基当量は、特に限定されないが、好ましくは100g/mol~700g/molであり、好ましくは150g/mol~500g/molであり、最も好ましくは290g/mol~450g/molである。(B)アルコキシシリル基含有樹脂のシリル基当量が100g/mol以上であると、硬度が高く、より現像性の良好な感光性樹脂組成物となる。一方、(B)アルコキシシリル基含有樹脂のシリル基当量が700g/mol以下であると、十分な硬度を有し、基材および/または下地との密着性の良好な樹脂硬化膜が得られる感光性樹脂組成物となる。
<(B) Silyl Group Equivalent of Alkoxysilyl Group-Containing Resin>
The silyl group equivalent weight of (B) the alkoxysilyl group-containing resin is not particularly limited, but is preferably 100 g/mol to 700 g/mol, preferably 150 g/mol to 500 g/mol, most preferably 290 g/mol to 450 g/mol. When the silyl group equivalent of (B) the alkoxysilyl group-containing resin is 100 g/mol or more, the resulting photosensitive resin composition has high hardness and excellent developability. On the other hand, when the silyl group equivalent weight of the alkoxysilyl group-containing resin (B) is 700 g/mol or less, a photosensitized resin film having sufficient hardness and good adhesion to the base material and/or base can be obtained. It becomes a flexible resin composition.
 (B)アルコキシシリル基含有樹脂のシリル基当量は、(B)アルコキシシリル基含有樹脂の分子量を、(B)アルコキシシリル基含有樹脂1分子当たりのシリル基の平均個数で割った値である。(B)アルコキシシリル基含有樹脂1分子当たりのシリル基の平均個数は、(B)アルコキシシリル基含有樹脂の構成単位(b-1)の原料となるアルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)の仕込み量に基づいて算出される計算値である。 The silyl group equivalent of (B) alkoxysilyl group-containing resin is a value obtained by dividing the molecular weight of (B) alkoxysilyl group-containing resin by the average number of silyl groups per molecule of (B) alkoxysilyl group-containing resin. (B) The average number of silyl groups per molecule of the alkoxysilyl group-containing resin contains an ethylenically unsaturated group having an alkoxysilyl group serving as a raw material for the structural unit (b-1) of the (B) alkoxysilyl group-containing resin. It is a calculated value calculated based on the charged amount of compound (mb-1).
<(A)アルカリ可溶性樹脂と(B)アルコキシシリル基含有樹脂の含有量>
 本実施形態の感光性樹脂組成物に含まれる(A)アルカリ可溶性樹脂と(B)アルコキシシリル基含有樹脂との質量比((A)アルカリ可溶性樹脂:(B)アルコキシシリル基含有樹脂)は、40:60~99:1であることが好ましく、50:50~99:1であることがより好ましく、60:40~90:10であることがさらに好ましく、60:40~80:20であることが特に好ましい。前記比は、上記範囲の中で必要に応じて選択でき、例えば、55:45~85:15や、65:35~75:25などであってもよい。(A)アルカリ可溶性樹脂と(B)アルコキシシリル基含有樹脂との質量比が上記範囲内であると、(B)アルコキシシリル基含有樹脂を含むことによる機能が十分に得られるため、より一層、硬度が高く、耐高温高湿性の良好な樹脂硬化膜を形成できる感光性樹脂組成物となる。また、(A)アルカリ可溶性樹脂と(B)アルコキシシリル基含有樹脂との質量比が上記範囲内であると、(A)アルカリ可溶性樹脂を含むことによる機能が十分に得られるため、より一層、保存安定性が良好で、優れた現像性を有し、耐水性および耐高温高湿性の良好な樹脂硬化膜を形成できる感光性樹脂組成物となる。
<Contents of (A) alkali-soluble resin and (B) alkoxysilyl group-containing resin>
The mass ratio of (A) alkali-soluble resin to (B) alkoxysilyl group-containing resin ((A) alkali-soluble resin: (B) alkoxysilyl group-containing resin) contained in the photosensitive resin composition of the present embodiment is It is preferably 40:60 to 99:1, more preferably 50:50 to 99:1, even more preferably 60:40 to 90:10, and 60:40 to 80:20. is particularly preferred. The ratio can be selected as necessary within the above range, and may be, for example, 55:45 to 85:15 or 65:35 to 75:25. When the mass ratio of (A) the alkali-soluble resin and (B) the alkoxysilyl group-containing resin is within the above range, the function due to the inclusion of the (B) alkoxysilyl group-containing resin can be sufficiently obtained. It becomes a photosensitive resin composition that can form a cured resin film having high hardness and good resistance to high temperature and high humidity. In addition, when the mass ratio of (A) the alkali-soluble resin and (B) the alkoxysilyl group-containing resin is within the above range, the function due to the inclusion of (A) the alkali-soluble resin can be sufficiently obtained. The photosensitive resin composition has good storage stability, excellent developability, and can form a resin cured film having good water resistance and high temperature and high humidity resistance.
<(B)アルコキシシリル基含有樹脂の製造方法>
 (B)アルコキシシリル基含有樹脂の製造方法としては、従来公知の方法を用いることができる。具体的には、例えば、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)と、必要に応じて添加されるその他の不飽和一塩基酸(mb-2)とエチレン性不飽和基含有化合物(mb-3)とを、重合開始剤とともに溶剤中に入れて共重合反応させることにより、共重合体である(B)アルコキシシリル基含有樹脂を含む反応液を生成させる。
<(B) Method for producing alkoxysilyl group-containing resin>
(B) A conventionally known method can be used as a method for producing the alkoxysilyl group-containing resin. Specifically, for example, an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group, and optionally added other unsaturated monobasic acid (mb-2) and ethylenically unsaturated The group-containing compound (mb-3) is put into a solvent together with a polymerization initiator and subjected to a copolymerization reaction to form a reaction liquid containing the copolymer (B) alkoxysilyl group-containing resin.
 重合開始剤としては、例えば、2,2’-アゾビス(イソ酪酸)ジメチル、t-ブチルパーオキシ-2-エチルヘキサノエート、アゾビスイソブチロニトリル、アゾビスイソバレロニトリル、過酸化ベンゾイル、などを用いることができる。
 溶剤としては、前記(A)アルカリ可溶性樹脂の製造方法で使用できる溶剤として挙げたものを同様に使用することができる。中でも、入手のし易さおよび感光性樹脂組成物としての保存安定性の観点から、第一級アルコール又は第二級アルコールのいずれかの溶剤が好ましく、3-メトキシ-1-ブタノール、プロピレングリコールモノメチルエーテルがより好ましい。
Examples of polymerization initiators include 2,2′-azobis(isobutyrate)dimethyl, t-butylperoxy-2-ethylhexanoate, azobisisobutyronitrile, azobisisovaleronitrile, benzoyl peroxide, etc. can be used.
As the solvent, those mentioned as the solvent that can be used in (A) the method for producing an alkali-soluble resin can be used in the same manner. Among them, from the viewpoint of availability and storage stability as a photosensitive resin composition, a primary alcohol or secondary alcohol solvent is preferable, and 3-methoxy-1-butanol, propylene glycol monomethyl Ethers are more preferred.
[(C)反応性希釈剤]
 (C)反応性希釈剤としては、ビニル基、アリル基、(メタ)アクリロイルオキシ基等のエチレン性不飽和基を有する低分子量化合物などを用いることができる。(C)反応性希釈剤は、1種のみを単独で用いてもよいし、2種以上を組み合わせて用いてもよい。 (C)反応性希釈剤としては、例えば、芳香族ビニル系モノマー類;酢酸ビニル、アジピン酸ビニル等のポリカルボン酸モノマー類;(メタ)アクリレート類;多官能(メタ)アクリレート類;トリアリルシアヌレート等が挙げられる。これらの(C)反応性希釈剤の中でも、良好な現像性を有し、十分な硬度を有する樹脂硬化膜が得られる感光性樹脂組成物となるため、多官能(メタ)アクリレート類を用いることが特に好ましい。
[(C) reactive diluent]
(C) As the reactive diluent, a low molecular weight compound having an ethylenically unsaturated group such as a vinyl group, an allyl group and a (meth)acryloyloxy group can be used. (C) Reactive diluents may be used singly or in combination of two or more. (C) Reactive diluents include, for example, aromatic vinyl monomers; polycarboxylic acid monomers such as vinyl acetate and vinyl adipate; (meth)acrylates; polyfunctional (meth)acrylates; nurate and the like. Among these (C) reactive diluents, polyfunctional (meth)acrylates are used because the photosensitive resin composition has good developability and provides a cured resin film having sufficient hardness. is particularly preferred.
 芳香族ビニル系モノマー類の具体例としては、スチレン、α-メチルスチレン、α-クロロメチルスチレン、ビニルトルエン、ジビニルベンゼン、ジアリルフタレート、ジアリルベンゼンホスホネート等が挙げられる。
 (メタ)アクリレート類の具体例としては、メチル(メタ)アクリレート、エチル(メタ)アクリレート、プロピル(メタ)アクリレート、ブチル(メタ)アクリレート、β-ヒドロキシエチル(メタ)アクリレート、ヒドロキシプロピル(メタ)アクリレート等が挙げられる。
Specific examples of aromatic vinyl monomers include styrene, α-methylstyrene, α-chloromethylstyrene, vinyltoluene, divinylbenzene, diallyl phthalate, diallylbenzene phosphonate and the like.
Specific examples of (meth)acrylates include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, butyl (meth)acrylate, β-hydroxyethyl (meth)acrylate, and hydroxypropyl (meth)acrylate. etc.
 多官能(メタ)アクリレート類の具体例としては、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、プロピレングリコールジ(メタ)アクリレート、エチレングリコールジ(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、トリス(ヒドロキシエチル)イソシアヌレートのトリ(メタ)アクリレート等が挙げられる。 Specific examples of polyfunctional (meth)acrylates include ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, ethylene glycol di(meth)acrylate, trimethylolpropane di(meth)acrylate. ) acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol hexa(meth)acrylate, tris(hydroxyethyl)isocyanurate tri(meth)acrylate, and the like.
<(C)反応性希釈剤の含有量>
 本実施形態の感光性樹脂組成物に含まれる(C)反応性希釈剤の含有量は、感光性樹脂組成物に含まれる(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤との合計100質量部に対して、好ましくは5質量部~75質量部であり、より好ましくは15質量部~65質量部であり、最も好ましくは20質量部~55質量部である。(C)反応性希釈剤の含有量が上記範囲内であると、感光性樹脂組成物の粘度および光硬化性がより適切になる。
<(C) Content of reactive diluent>
The content of the (C) reactive diluent contained in the photosensitive resin composition of the present embodiment includes (A) the alkali-soluble resin contained in the photosensitive resin composition, (B) the alkoxysilyl group-containing resin, (C) with respect to 100 parts by mass in total with the reactive diluent, preferably 5 parts by mass to 75 parts by mass, more preferably 15 parts by mass to 65 parts by mass, most preferably 20 parts by mass to 55 parts by mass part by mass. (C) When the content of the reactive diluent is within the above range, the viscosity and photocurability of the photosensitive resin composition become more appropriate.
[(D)光ラジカル重合開始剤]
 (D)光ラジカル重合開始剤としては、光照射によりラジカルを発生する化合物であればよく、特に限定されない。(D)光ラジカル重合開始剤は、1種のみを単独で用いてもよいし、2種以上を組み合わせて用いてもよい。
[(D) Photoradical polymerization initiator]
(D) The radical photopolymerization initiator is not particularly limited as long as it is a compound that generates radicals upon irradiation with light. (D) Photoradical polymerization initiators may be used alone or in combination of two or more.
 (D)光ラジカル重合開始剤としては、例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル等のベンゾインとそのアルキルエーテル類;アセトフェノン、2,2-ジメトキシ-2-フェニルアセトフェノン、1,1-ジクロロアセトフェノン、4-(1-t-ブチルジオキシ-1-メチルエチル)アセトフェノン等のアセトフェノン類;1-ヒドロキシシクロヘキシルフェニルケトン、2-ヒドロキシ-2-メチル-1-フェニルプロパン-1-オン等のアルキルフェノン類;2-メチルアントラキノン、2-アミルアントラキノン、2-t-ブチルアントラキノン、1-クロロアントラキノン等のアントラキノン類;2,4-ジメチルチオキサントン、2,4-ジイソプロピルチオキサントン、2-クロロチオキサントン等のチオキサントン類;アセトフェノンジメチルケタール、ベンジルジメチルケタール等のケタール類;ベンゾフェノン、4-(1-t-ブチルジオキシ-1-メチルエチル)ベンゾフェノン、3,3’,4,4’-テトラキス(t-ブチルジオキシカルボニル)ベンゾフェノン等のベンゾフェノン類;1,2-オクタンジオン,2-(ベンゾイルオキシイミノ)-1-[4-(フェニルチオ)フェニル]-1-オクタノン、1-[4-(フェニルチオ)-2-(o-ベンゾイルオキシム)]、エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル],1-(o-アセチルオキシム)等のオキシムエステル類;2-メチル-1-[4-(メチルチオ)フェニル]-2-モルホリノ-プロパン-1-オン;2-ベンジル-2-ジメチルアミノ-1-(4-モルホリノフェニル)ブタノン-1;2,4,6-トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,4,6-トリメチルベンゾイル)フェニルホスフィンオキサイド等のアシルホスフィンオキサイド類;キサントン類等が挙げられる。 (D) Photoradical polymerization initiators include, for example, benzoin and alkyl ethers thereof such as benzoin, benzoin methyl ether, benzoin ethyl ether; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone , 4-(1-t-butyldioxy-1-methylethyl)acetophenone and other acetophenones; 1-hydroxycyclohexylphenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one and other alkylphenones; Anthraquinones such as 2-methylanthraquinone, 2-amylanthraquinone, 2-t-butylanthraquinone and 1-chloroanthraquinone; Thioxanthones such as 2,4-dimethylthioxanthone, 2,4-diisopropylthioxanthone and 2-chlorothioxanthone; Acetophenone Ketals such as dimethyl ketal and benzyl dimethyl ketal; benzophenone, 4-(1-t-butyldioxy-1-methylethyl)benzophenone, 3,3′,4,4′-tetrakis(t-butyldioxycarbonyl)benzophenone, etc. benzophenones; 1,2-octanedione, 2-(benzoyloxyimino)-1-[4-(phenylthio)phenyl]-1-octanone, 1-[4-(phenylthio)-2-(o-benzoyloxime )], ethanone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl], 1-(o-acetyloxime) and other oxime esters; 2-methyl-1- [4-(methylthio)phenyl]-2-morpholino-propan-1-one; 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)butanone-1; 2,4,6-trimethylbenzoyldiphenylphosphine oxides, acylphosphine oxides such as bis(2,4,6-trimethylbenzoyl)phenylphosphine oxide; and xanthones.
<(D)光ラジカル重合開始剤の含有量>
 本実施形態の感光性樹脂組成物に含まれる(D)光ラジカル重合開始剤の含有量は、感光性樹脂組成物に含まれる(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤との合計100質量部に対して、好ましくは0.1質量部~20質量部であり、より好ましくは1質量部~15質量部であり、最も好ましくは3質量部~10質量部である。(D)光ラジカル重合開始剤の含有量が0.1質量部以上であると、十分な光硬化性を有する感光性樹脂組成物となる。(D)光ラジカル重合開始剤の含有量が20質量部以下であると、(D)光ラジカル重合開始剤が感光性樹脂組成物の保存安定性およびこれを硬化させてなる樹脂硬化膜の性能に悪影響を及ぼすことがない。
<(D) Content of radical photopolymerization initiator>
The content of the (D) photoradical polymerization initiator contained in the photosensitive resin composition of the present embodiment is the (A) alkali-soluble resin contained in the photosensitive resin composition and the (B) alkoxysilyl group-containing resin. , (C) with respect to 100 parts by mass in total with the reactive diluent, preferably 0.1 parts by mass to 20 parts by mass, more preferably 1 part by mass to 15 parts by mass, most preferably 3 parts by mass parts to 10 parts by mass. (D) When the content of the radical photopolymerization initiator is 0.1 parts by mass or more, the photosensitive resin composition has sufficient photocurability. When the content of the (D) photoradical polymerization initiator is 20 parts by mass or less, the (D) photoradical polymerization initiator provides the storage stability of the photosensitive resin composition and the performance of the cured resin film obtained by curing the composition. have no adverse effect on
[(E)溶剤]
 (E)溶剤は、本実施形態の感光性樹脂組成物に含まれる各成分に対して不活性であり、かつ各成分を溶解可能なものであればよく、特に限定されない。(E)溶剤は、1種のみを単独で用いてもよいし、2種以上組み合わせて用いてもよい。
[(E) solvent]
(E) The solvent is not particularly limited as long as it is inert to each component contained in the photosensitive resin composition of the present embodiment and can dissolve each component. (E) A solvent may be used individually by 1 type, and may be used in combination of 2 or more types.
 (E)溶剤は、(A)アルカリ可溶性樹脂および/または(B)アルコキシシリル基含有樹脂の調製に用いた溶剤と同じ溶剤を含んでいてもよいし、異なる溶剤のみであってもよい。例えば、(A)アルカリ可溶性樹脂の調製に用いた溶剤および(B)アルコキシシリル基含有樹脂の調製に用いた溶剤を、分離したり除去したりすることなく、そのまま感光性樹脂組成物の(E)溶剤の一部または全部として用いてもよい。また、感光性樹脂組成物の各成分を混合する際には、(A)アルカリ可溶性樹脂および/または(B)アルコキシシリル基含有樹脂の調製に用いた溶剤と同じ溶剤または異なる溶剤を、新たに添加してもよい。(A)アルカリ可溶性樹脂および/または(B)アルコキシシリル基含有樹脂の調製に用いた溶剤の一部または全部を除去し、感光性樹脂組成物の各成分を混合する際に、新たに(A)アルカリ可溶性樹脂および/または(B)アルコキシシリル基含有樹脂の調製に用いた溶剤と同じ溶剤または異なる溶剤を添加してもよい。 The (E) solvent may contain the same solvent as the solvent used in the preparation of (A) the alkali-soluble resin and/or (B) the alkoxysilyl group-containing resin, or may be a different solvent alone. For example, the (E ) may be used as part or all of the solvent. Further, when mixing each component of the photosensitive resin composition, the same solvent or a different solvent as the solvent used for preparing (A) the alkali-soluble resin and/or (B) the alkoxysilyl group-containing resin is newly added. may be added. (A) Alkali-soluble resin and / or (B) The solvent used in the preparation of the alkoxysilyl group-containing resin is partially or entirely removed, and when mixing the components of the photosensitive resin composition, a new (A ) the alkali-soluble resin and/or (B) the solvent used in the preparation of the alkoxysilyl group-containing resin, or a different solvent may be added.
 (E)溶剤は、保存安定性の良好な感光性樹脂組成物となるため、炭素原子数3~10の第一級アルコールおよび炭素原子数3~10の第二級アルコールから選択される一種以上のアルコールを含有することが好ましい。炭素原子数3~10の第一級アルコールおよび炭素原子数3~10の第二級アルコールの例としては、例えば、アルキルアルコール類、ベンジルアルコール、(ポリ)アルキレングリコールモノアルキルエーテル類等が挙げられ、容易に入手でき、かつ保存安定性の良好な感光性樹脂組成物となるため、(ポリ)アルキレングリコールモノアルキルエーテル類を用いることが好ましい。 (E) The solvent is one or more selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms, so that the photosensitive resin composition has good storage stability. of alcohol. Examples of primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms include alkyl alcohols, benzyl alcohol, (poly)alkylene glycol monoalkyl ethers, and the like. (Poly)alkylene glycol monoalkyl ethers are preferably used because they are readily available and provide a photosensitive resin composition with good storage stability.
 (E)溶剤としては、炭素原子数3~10の第一級アルコールおよび炭素原子数3~10の第二級アルコールから選択される一種以上のアルコールではない、その他の溶剤を上記アルコールとともに用いてもよいし、上記アルコールに代えて用いてもよい。その他の溶剤は、1種のみ用いてもよいし、2種以上用いてもよい。 (E) The solvent is not one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms. may be used instead of the above alcohol. Only one type of other solvent may be used, or two or more types may be used.
 上述の(A)アルカリ可溶性樹脂および/または(B)アルコキシシリル基含有樹脂の調製に用いた溶剤の例示の中でも、プロピレングリコールモノメチルエーテルアセテート等の(ポリ)アルキレングリコールモノアルキルエーテルアセテート系溶剤は、感光性樹脂組成物に含まれる各成分の溶解性が良好であるため好ましい。また、(ポリ)アルキレングリコールモノアルキルエーテルアセテート系溶剤は、炭素原子数3~10の第一級アルコールおよび炭素原子数3~10の第二級アルコールから選択される一種以上のアルコールと混合して用いる場合の相溶性も良好であり、好ましい。 Among the solvents used in the preparation of the above-mentioned (A) alkali-soluble resin and/or (B) alkoxysilyl group-containing resin, (poly)alkylene glycol monoalkyl ether acetate-based solvents such as propylene glycol monomethyl ether acetate, It is preferable because the solubility of each component contained in the photosensitive resin composition is good. In addition, the (poly)alkylene glycol monoalkyl ether acetate-based solvent is mixed with one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms. The compatibility when used is also good, which is preferable.
 (E)溶剤中に含まれる炭素原子数3~10の第一級アルコールおよび炭素原子数3~10第二級アルコールから選択される一種以上のアルコールの合計含有量は、全溶剤中に15~100質量%であることが好ましい。上記アルコールの含有量は、より保存安定性の良好な感光性組成物となるため、25質量%以上であることがより好ましく、35質量%以上であることが更に好ましい。上記アルコールの含有量上限は特に制限されないが、90質量%であってもよく、80質量%であっても良い。 (E) The total content of one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms contained in the solvent is 15 to It is preferably 100% by mass. The content of the alcohol is more preferably 25% by mass or more, still more preferably 35% by mass or more, in order to obtain a photosensitive composition with better storage stability. The upper limit of the alcohol content is not particularly limited, but may be 90% by mass or 80% by mass.
<(E)溶剤の含有量>
 本実施形態の感光性樹脂組成物に含まれる(E)溶剤の含有量は、感光性樹脂組成物中の(E)溶剤を除く成分の合計100質量部に対して、好ましくは30質量部~1000質量部、より好ましくは50質量部~800質量部、最も好ましくは100質量部~500質量部である。(E)溶剤の含有量が、上記範囲内であると、感光性樹脂組成物の粘度を適切な範囲に調整できる。
<(E) Content of solvent>
The content of the (E) solvent contained in the photosensitive resin composition of the present embodiment is preferably 30 parts by mass to 100 parts by mass in total of the components excluding the (E) solvent in the photosensitive resin composition. 1000 parts by mass, more preferably 50 to 800 parts by mass, most preferably 100 to 500 parts by mass. (E) When the content of the solvent is within the above range, the viscosity of the photosensitive resin composition can be adjusted to an appropriate range.
 本実施形態の感光性樹脂組成物の粘度は、目的とする樹脂硬化膜の厚さなどに応じて適宜調整できる。例えば、樹脂硬化膜の厚さを1μm~4μmに調整する場合、感光性樹脂組成物の粘度は、4mP・s~25mP・sであることが好ましく、6mP・s~20mP・sであることがより好ましく、8mP・s~15mP・sであることがさらに好ましい。 The viscosity of the photosensitive resin composition of the present embodiment can be appropriately adjusted according to the desired thickness of the cured resin film. For example, when the thickness of the cured resin film is adjusted to 1 μm to 4 μm, the viscosity of the photosensitive resin composition is preferably 4 mP s to 25 mP s, more preferably 6 mP s to 20 mP s. More preferably, it is 8 mP·s to 15 mP·s.
 本明細書において、感光性樹脂組成物の粘度とは、E型粘度計(RE-80、東機産業製、ロータ種類:標準コーン1°34’×R24、ロータコード:1)を使用して25℃で測定した値を意味する。 In this specification, the viscosity of the photosensitive resin composition is measured using an E-type viscometer (RE-80, manufactured by Toki Sangyo, rotor type: standard cone 1°34′×R24, rotor code: 1). It means the value measured at 25°C.
[(F)シランカップリング剤]
 (F)シランカップリング剤は、本実施形態の感光性樹脂組成物に必要に応じて含有できる。(F)シランカップリング剤は、感光性樹脂組成物に含まれる(A)アルカリ可溶性樹脂と(B)アルコキシシリル基含有樹脂と(C)反応性希釈剤との相溶性を向上させる。
 (F)シランカップリング剤としては、(メタ)アクリル基、ビニル基、スチリル基から選ばれる1つ以上の官能基を有する低分子量化合物を用いることが好ましい。(F)シランカップリング剤は、1種のみを単独で用いてもよいし、2種以上を組み合わせて用いてもよい。
[(F) Silane coupling agent]
(F) A silane coupling agent can be contained in the photosensitive resin composition of the present embodiment, if necessary. (F) The silane coupling agent improves compatibility among (A) the alkali-soluble resin, (B) the alkoxysilyl group-containing resin, and (C) the reactive diluent contained in the photosensitive resin composition.
(F) As the silane coupling agent, it is preferable to use a low molecular weight compound having one or more functional groups selected from (meth)acrylic groups, vinyl groups and styryl groups. (F) The silane coupling agent may be used alone or in combination of two or more.
 (F)シランカップリング剤としては、市販されているものを用いてもよい。例えば、信越化学工業株式会社製の以下に示すシランカップリング剤(括弧内の記載は商品名である)などを用いることができる。ビニルトリメトキシシラン(KBM-1003)、ビニルトリエトキシシラン(KBE-1003)、オクテニルトリメトキシシラン(KBM-1083)、p-スチリルトリメトキシシラン(KBM-1403)、3-メタクリロイルオキシプロピルメチルジメトキシシラン(KBM-502)、3-メタクリロイルオキシプロピルトリメトキシシラン(KBM-503)、3-メタクリロイルオキシプロピルメチルジエトキシシラン(KBE-502)、3-メタクリロイルオキシプロピルトリエトキシシラン(KBE-503)、メタクリロイルオキシオクチルトリメトキシシラン(KBM-5803)、3-アクリロキシプロピルトリメトキシシラン(KBM-5103)などが挙げられる。 (F) As the silane coupling agent, a commercially available one may be used. For example, the following silane coupling agents manufactured by Shin-Etsu Chemical Co., Ltd. (descriptions in parentheses are trade names) can be used. Vinyltrimethoxysilane (KBM-1003), Vinyltriethoxysilane (KBE-1003), Octenyltrimethoxysilane (KBM-1083), p-Styryltrimethoxysilane (KBM-1403), 3-Methacryloyloxypropylmethyldimethoxy Silane (KBM-502), 3-methacryloyloxypropyltrimethoxysilane (KBM-503), 3-methacryloyloxypropylmethyldiethoxysilane (KBE-502), 3-methacryloyloxypropyltriethoxysilane (KBE-503), methacryloyloxyoctyltrimethoxysilane (KBM-5803), 3-acryloxypropyltrimethoxysilane (KBM-5103) and the like.
<(F)シランカップリング剤の含有量>
 本実施形態の感光性樹脂組成物が(F)シランカップリング剤を含む場合、(F)シランカップリング剤の含有量は、感光性樹脂組成物に含まれる(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤との合計100質量部に対して、好ましくは0.1質量部~20質量部であり、より好ましくは1質量部~15質量部であり、最も好ましくは3質量部~10質量部である。(F)シランカップリング剤の含有量が上記範囲内であると、(A)アルカリ可溶性樹脂と(B)アルコキシシリル基含有樹脂と(C)反応性希釈剤との相溶性および光硬化性がより適切な感光性樹脂組成物となる。
<(F) Content of silane coupling agent>
When the photosensitive resin composition of the present embodiment contains (F) a silane coupling agent, the content of (F) the silane coupling agent is (A) the alkali-soluble resin contained in the photosensitive resin composition, ( It is preferably 0.1 to 20 parts by mass, more preferably 1 to 15 parts by mass, relative to a total of 100 parts by mass of B) the alkoxysilyl group-containing resin and (C) the reactive diluent. and most preferably 3 parts by mass to 10 parts by mass. (F) When the content of the silane coupling agent is within the above range, the compatibility and photocurability of (A) the alkali-soluble resin, (B) the alkoxysilyl group-containing resin, and (C) the reactive diluent are improved. It becomes a more suitable photosensitive resin composition.
[その他の成分]
 本実施形態の感光性樹脂組成物は、必要に応じて所定の特性を付与するために、(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、(E)溶剤と、(F)シランカップリング剤とは異なる他の成分を、含有していてもよい。
 その他の成分としては、例えば、レベリング剤、熱重合禁止剤等の公知の添加剤が挙げられる。感光性樹脂組成物中に含まれるその他の成分の含有量は、本発明の効果を阻害しない範囲であればよく、特に限定されない。
[Other ingredients]
The photosensitive resin composition of the present embodiment contains (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, and (C) a reactive diluent in order to impart predetermined properties as necessary. , (D) a photoradical polymerization initiator, (E) a solvent, and (F) other components different from the silane coupling agent.
Other components include, for example, known additives such as leveling agents and thermal polymerization inhibitors. The content of other components contained in the photosensitive resin composition is not particularly limited as long as it does not impair the effects of the present invention.
[感光性樹脂組成物の製造方法]
 本実施形態の感光性樹脂組成物は、例えば、(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、(E)溶剤と、必要に応じて含有される(F)シランカップリング剤および/またはその他の成分とを、公知の混合装置を用いて混合する方法により製造できる。
[Method for producing a photosensitive resin composition]
The photosensitive resin composition of the present embodiment includes, for example, (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, and (D) a photoradical polymerization initiator, (E) a solvent and (F) a silane coupling agent and/or other components that are optionally contained can be mixed using a known mixing apparatus.
 本実施形態の感光性樹脂組成物の製造方法において、(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、(E)溶剤と、必要に応じて含有される(F)シランカップリング剤および/またはその他の成分とを混合する順序は、特に限定されない。例えば、(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(E)溶剤とを含む樹脂組成物を調製し、得られた樹脂組成物に、(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、必要に応じて含有される(F)シランカップリング剤および/またはその他の成分とを混合する方法により製造してもよい。 In the method for producing a photosensitive resin composition of the present embodiment, (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, and (D) a radical photopolymerization initiator , (E) the solvent, and (F) the silane coupling agent and/or other components that are optionally contained are not particularly limited. For example, a resin composition containing (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, and (E) a solvent is prepared, and the resulting resin composition is added with (C) a reactive diluent. , (D) a radical photopolymerization initiator, and (F) a silane coupling agent and/or other components, which are optionally contained, may be mixed.
 本実施形態の感光性樹脂組成物は、(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、(E)溶剤と、を含有する。このため、以下に示す(1)~(3)の相乗効果によって、保存安定性および現像性が良好で、硬化させることにより、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性の良好な樹脂硬化膜が得られる。したがって、本実施形態の感光性樹脂組成物は、タッチパネルなどの画像表示装置において、絶縁膜および/または保護膜として使用される樹脂硬化膜の材料として好適である。 The photosensitive resin composition of the present embodiment includes (A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, (D) a photoradical polymerization initiator, and (E ) solvent and Therefore, due to the synergistic effects of (1) to (3) shown below, the storage stability and developability are good, and by curing, the hardness is high, the adhesion to the substrate and / or the base, and the water resistance , a cured resin film having excellent high-temperature and high-humidity resistance and transparency can be obtained. Therefore, the photosensitive resin composition of the present embodiment is suitable as a material for cured resin films used as insulating films and/or protective films in image display devices such as touch panels.
(1)感光性樹脂組成物に含まれる(A)アルカリ可溶性樹脂が、酸基および(メタ)アクリロイルオキシ基を有し、エチレン性不飽和基当量が400g/mol以上2500g/mol以下であるため、硬化収縮が十分に小さく、基材および/または下地との密着性が良好な樹脂硬化膜が得られ、かつ良好な保存安定性および現像性を有し、耐高温高湿性の良好な樹脂硬化膜が得られるものとなる。 (1) The (A) alkali-soluble resin contained in the photosensitive resin composition has an acid group and a (meth)acryloyloxy group, and has an ethylenically unsaturated group equivalent of 400 g/mol or more and 2500 g/mol or less. , Curing shrinkage is sufficiently small, a cured resin film with good adhesion to the substrate and / or substrate can be obtained, and the resin cure has good storage stability and developability, and has good high temperature and high humidity resistance. A membrane is obtained.
(2)(A)アルカリ可溶性樹脂が、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)を含有し、(A)アルカリ可溶性樹脂の全繰り返し構成単位中、前記構成単位(a-1)を15mol%以上60mol%以下含有するため、良好な現像性を有し、耐水性、耐高温高湿性、透明性の良好な樹脂硬化膜を形成できる感光性樹脂組成物となる。
(3)感光性樹脂組成物に含まれる(B)アルコキシシリル基含有樹脂が、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)由来の構成単位(b-1)を含むため、高い硬度を有し、耐高温高湿性の良好な樹脂硬化膜が得られる。
(2) (A) the alkali-soluble resin contains a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and (A) the total repetition of the alkali-soluble resin Since 15 mol % or more and 60 mol % or less of the structural unit (a-1) is contained in the structural units, it has good developability, and can form a resin cured film having good water resistance, high temperature and high humidity resistance, and transparency. It becomes a photosensitive resin composition.
(3) Because the (B) alkoxysilyl group-containing resin contained in the photosensitive resin composition contains a structural unit (b-1) derived from an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group , a cured resin film having high hardness and good resistance to high temperature and high humidity can be obtained.
[樹脂硬化膜]
 本実施形態の樹脂硬化膜は、本実施形態の感光性樹脂組成物の硬化物からなる。本実施形態の樹脂硬化膜は、例えば、タッチパネルなどの画像表示装置における保護膜および/または絶縁膜として好適に用いることができる。
 本実施形態の樹脂硬化膜は、基材または下地上に形成される。基材または下地としては、例えば、タッチパネルなどの画像表示装置に使用される部材からなるものが挙げられる。具体的には、基材または下地として、ガラス基材などの基材、ITO、モリブデン、メタルメッシュなどの電極材料、有機膜などからなるものを用いることができる。
[Resin cured film]
The cured resin film of the present embodiment is composed of a cured product of the photosensitive resin composition of the present embodiment. The cured resin film of the present embodiment can be suitably used, for example, as a protective film and/or an insulating film in an image display device such as a touch panel.
The cured resin film of this embodiment is formed on a substrate or a base. Examples of the base material or base include those made of members used in image display devices such as touch panels. Specifically, as the base material or underlayer, a base material such as a glass base material, an electrode material such as ITO, molybdenum, or a metal mesh, an organic film, or the like can be used.
 本実施形態の樹脂硬化膜は、公知の方法を用いて製造できる。例えば、基材または下地上に、公知の方法により本実施形態の感光性樹脂組成物を塗布して塗膜を形成し、得られた塗膜に公知の方法により光を照射し、感光性樹脂組成物を硬化させる方法により製造できる。
 また、本実施形態の樹脂硬化膜が、所定のパターン形状を有するものである場合には、フォトリソグラフィ法を用いることができる。具体的には、以下に示す塗布工程、プリベーク(前加熱処理)工程、露光工程、現像工程、ポストベーク工程をこの順に行う方法を用いることが好ましい。
The cured resin film of the present embodiment can be produced using a known method. For example, the photosensitive resin composition of the present embodiment is applied to a base material or a substrate by a known method to form a coating film, and the resulting coating film is irradiated with light by a known method to obtain a photosensitive resin. It can be produced by a method of curing the composition.
Further, when the cured resin film of this embodiment has a predetermined pattern shape, a photolithography method can be used. Specifically, it is preferable to use a method in which the following coating step, pre-baking (pre-heat treatment) step, exposure step, development step, and post-baking step are performed in this order.
(塗布工程)
 塗布工程では、基材または下地上に、本実施形態の感光性樹脂組成物を塗布して塗膜を形成する。
 感光性樹脂組成物を基材または下地上に塗布する方法としては、公知の方法を用いることができる。具体的には、例えば、感光性樹脂組成物の塗布方法として、スクリーン印刷法、ロールコート法、カーテンコート法、スプレーコート法、スピンコート法、スリットコート法等が挙げられる。
(Coating process)
In the coating step, a coating film is formed by coating the photosensitive resin composition of the present embodiment on a substrate or a base.
A known method can be used as a method of applying the photosensitive resin composition to the base material or base. Specifically, for example, the coating method of the photosensitive resin composition includes a screen printing method, a roll coating method, a curtain coating method, a spray coating method, a spin coating method, a slit coating method, and the like.
(プリベーク(前加熱処理)工程)
 プリベーク工程では、塗膜の形成された基材または下地を加熱することにより、塗膜中に含まれる(E)溶剤の含有量を減少させる。
 プリベーク工程において、塗膜の形成された基材または下地を加熱する方法としては、ホットプレートを用いる方法など、公知の方法を用いることができる。
(Pre-baking (pre-heat treatment) step)
In the pre-baking step, the content of the solvent (E) contained in the coating film is reduced by heating the base material or base on which the coating film is formed.
In the pre-baking step, a known method such as a method using a hot plate can be used as a method for heating the base material or base on which the coating film is formed.
 プリベーク工程における加熱温度は、感光性樹脂組成物の組成などに応じて適宜決定できる。加熱温度は、例えば、70~120℃とすることができ、90~110℃とすることが好ましい。
 プリベーク工程における加熱時間は、感光性樹脂組成物の組成、塗膜の厚みなどに応じて適宜決定できる。加熱時間は、例えば、10~600秒間とすることができ、120~180秒間とすることが好ましい。
The heating temperature in the prebaking step can be appropriately determined according to the composition of the photosensitive resin composition and the like. The heating temperature can be, for example, 70 to 120.degree. C., preferably 90 to 110.degree.
The heating time in the prebaking step can be appropriately determined according to the composition of the photosensitive resin composition, the thickness of the coating film, and the like. The heating time can be, for example, 10 to 600 seconds, preferably 120 to 180 seconds.
(露光工程)
 露光工程では、製造する樹脂硬化膜のパターン形状に対応する形状を有するフォトマスクを介して、プリベーク工程後の塗膜の一部に光を照射して光硬化させる。
 露光工程において、光の照射に用いる光源としては、公知のものを用いることができる。具体的には、例えば、光源として、低圧水銀ランプ、中圧水銀ランプ、高圧水銀ランプ、キセノンランプ、メタルハライドランプ等が挙げられる。
 露光工程における光の照射量(露光量)は、特に限定されるものではなく、フォトマスクのパターン形状、感光性樹脂組成物の組成、塗膜の厚みなどに応じて適宜設定される。
(Exposure process)
In the exposure step, a part of the coating film after the pre-baking step is irradiated with light through a photomask having a shape corresponding to the pattern shape of the cured resin film to be produced, and photocured.
In the exposure step, a known light source can be used for light irradiation. Specific examples of light sources include low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, xenon lamps, and metal halide lamps.
The irradiation amount of light (exposure amount) in the exposure step is not particularly limited, and is appropriately set according to the pattern shape of the photomask, the composition of the photosensitive resin composition, the thickness of the coating film, and the like.
(現像工程)
 現像工程では、露光工程後の塗膜における未露光部分を、現像液を用いて溶解し、除去する。
 現像液としては、感光性組成物の現像に用いられている公知のアルカリ現像液を用いることができる。具体的には、例えば、アルカリ現像液として、炭酸ナトリウム、炭酸カリウム、炭酸カルシウム、水酸化ナトリウム、水酸化カリウム等の水溶液;エチルアミン、ジエチルアミン、ジメチルエタノールアミン等のアミン系化合物の水溶液;水酸化テトラメチルアンモニウム等の第4級アンモニウム塩の水溶液;3-メチル-4-アミノ-N,N-ジエチルアニリン、3-メチル-4-アミノ-N-エチル-N-β-ヒドロキシエチルアニリン、3-メチル-4-アミノ-N-エチル-N-β-メタンスルホンアミドエチルアニリン、3-メチル-4-アミノ-N-エチル-N-β-メトキシエチルアニリンおよびこれらの硫酸塩、塩酸塩又はp-トルエンスルホン酸塩等のp-フェニレンジアミン系化合物の水溶液等を用いることができる。これらのアルカリ現像液の中でも、p-フェニレンジアミン系化合物の水溶液を用いることが好ましい。
(Development process)
In the development step, the unexposed portion of the coating film after the exposure step is dissolved and removed using a developer.
As the developer, a known alkaline developer used for developing photosensitive compositions can be used. Specifically, for example, as an alkaline developer, aqueous solutions of sodium carbonate, potassium carbonate, calcium carbonate, sodium hydroxide, potassium hydroxide, etc.; aqueous solutions of amine compounds such as ethylamine, diethylamine, dimethylethanolamine; Aqueous solutions of quaternary ammonium salts such as methylammonium; 3-methyl-4-amino-N,N-diethylaniline, 3-methyl-4-amino-N-ethyl-N-β-hydroxyethylaniline, 3-methyl -4-amino-N-ethyl-N-β-methanesulfonamidoethylaniline, 3-methyl-4-amino-N-ethyl-N-β-methoxyethylaniline and their sulfates, hydrochlorides or p-toluene An aqueous solution of a p-phenylenediamine compound such as a sulfonate can be used. Among these alkaline developers, it is preferable to use an aqueous solution of a p-phenylenediamine compound.
 アルカリ現像液には、必要に応じて、消泡剤、界面活性剤などの添加剤を1種または2種以上添加してもよい。
 現像工程における現像温度、現像時間などの現像条件は、感光性樹脂組成物の組成、現像液の組成、塗膜の厚みなどに応じて適宜決定できる。
 現像工程においては、上記のアルカリ現像液を用いて塗膜の未露光部分を溶解して現像した後、水洗して乾燥させることが好ましい。
Additives such as antifoaming agents and surfactants may be added to the alkali developer as needed.
Development conditions such as development temperature and development time in the development step can be appropriately determined according to the composition of the photosensitive resin composition, the composition of the developer, the thickness of the coating film, and the like.
In the developing step, it is preferable to develop the coating by dissolving the unexposed portion of the coating film using the alkaline developer, followed by washing with water and drying.
(ポストベーク工程)
 ポストベーク工程では、現像工程後の塗膜を加熱する。
 ポストベーク工程において、現像工程後の塗膜を加熱する方法としては、ホットプレートを用いる方法など、公知の方法を用いることができる。
(Post-baking process)
In the post-baking process, the coating film after the developing process is heated.
In the post-baking step, as a method for heating the coating film after the developing step, a known method such as a method using a hot plate can be used.
 ポストベーク工程における加熱温度は、感光性樹脂組成物の組成、塗膜の形成された基材または下地の材料などに応じて適宜決定できる。加熱温度は、例えば、130℃~250℃とすることができる。
 ポストベーク工程における加熱時間は、感光性樹脂組成物の組成、塗膜の厚みなどに応じて適宜決定できる。加熱時間は、例えば、10分~60分間とすることができる。
 以上の工程により、所定のパターン形状を有する樹脂硬化膜が得られる。
The heating temperature in the post-baking step can be appropriately determined according to the composition of the photosensitive resin composition, the base material on which the coating film is formed, or the underlying material. The heating temperature can be, for example, 130.degree. C. to 250.degree.
The heating time in the post-baking step can be appropriately determined according to the composition of the photosensitive resin composition, the thickness of the coating film, and the like. The heating time can be, for example, 10 minutes to 60 minutes.
Through the above steps, a cured resin film having a predetermined pattern shape is obtained.
 本実施形態の樹脂硬化膜は、本実施形態の感光性樹脂組成物を硬化させてなる硬化物からなる。このため、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性が良好である。また、本実施形態の樹脂硬化膜がフォトリソグラフィ法により形成された所定のパターン形状を有するものである場合、現像性の良好な本実施形態の感光性樹脂組成物を用いて形成されたものであるため、高精度である。これらのことから、本実施形態の樹脂硬化膜は、タッチパネルなどの画像表示装置に具備される絶縁膜および/または保護膜として好適である。 The cured resin film of this embodiment consists of a cured product obtained by curing the photosensitive resin composition of this embodiment. Therefore, it has high hardness, good adhesion to the substrate and/or base, good water resistance, high temperature and high humidity resistance, and transparency. Further, when the cured resin film of the present embodiment has a predetermined pattern shape formed by a photolithography method, it is formed using the photosensitive resin composition of the present embodiment having good developability. Therefore, it is highly accurate. For these reasons, the cured resin film of the present embodiment is suitable as an insulating film and/or protective film provided in an image display device such as a touch panel.
[画像表示装置]
 本実施形態の画像表示装置は、本実施形態の樹脂硬化膜を具備する。本実施形態の画像表示装置は、特に、タッチパネルであることが好ましい。本実施形態の画像表示装置における樹脂硬化膜は、保護膜および絶縁膜からなる群から選択される一種であることが好ましく、タッチパネルの保護膜または絶縁膜であることが特に好ましい。
 本実施形態の画像表示装置は、従来公知の方法を用いて製造できる。
[Image display device]
The image display device of this embodiment includes the cured resin film of this embodiment. It is particularly preferable that the image display device of the present embodiment is a touch panel. The cured resin film in the image display device of the present embodiment is preferably one selected from the group consisting of a protective film and an insulating film, and is particularly preferably a protective film or insulating film of a touch panel.
The image display device of this embodiment can be manufactured using a conventionally known method.
 本実施形態の画像表示装置は、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性が良好である本実施形態の樹脂硬化膜を具備するため、信頼性および耐久性に優れる。 The image display device of the present embodiment includes the cured resin film of the present embodiment, which has high hardness, good adhesion to the substrate and / or base, water resistance, high temperature and high humidity resistance, and transparency, Excellent reliability and durability.
 以下、本発明を実施例および比較例により具体的に説明する。なお、以下に示す実施例は、本発明の内容の理解をより容易にするためのものである。本発明は、これらの実施例のみに制限されるものではない。
[(A)アルカリ可溶性樹脂の合成]
 以下に示す方法により、合成例1~合成例8、比較合成例1および比較合成例2の(A)アルカリ可溶性樹脂を製造した。
EXAMPLES Hereinafter, the present invention will be specifically described with reference to examples and comparative examples. It should be noted that the following examples are intended to facilitate understanding of the content of the present invention. The invention is not limited to only these examples.
[(A) Synthesis of alkali-soluble resin]
Alkali-soluble resins (A) of Synthesis Examples 1 to 8, Comparative Synthesis Examples 1 and 2 were produced by the methods shown below.
[合成例1(試料番号A1)]
 攪拌装置、滴下ロート、コンデンサー、温度計およびガス導入管を備えたフラスコに、(A)アルカリ可溶性樹脂を含む試料中の固形分濃度が30質量%となるように、表1に示す溶剤であるプロピレングリコールモノメチルエーテルアセテート700.0gを入れ、窒素ガス置換しながら攪拌し、120℃に昇温した。
[Synthesis Example 1 (Sample No. A1)]
A flask equipped with a stirrer, a dropping funnel, a condenser, a thermometer and a gas inlet tube is charged with the solvent shown in Table 1 so that the solid content concentration in the sample containing (A) an alkali-soluble resin is 30% by mass. 700.0 g of propylene glycol monomethyl ether acetate was added, and the mixture was stirred while being replaced with nitrogen gas, and heated to 120°C.
 次いで、表1に示すモノマー(ma-1)~(ma-3)であるベンジルメタクリレート142.6g(0.45mol)と、メタクリル酸69.7g(0.45mol)と、ジシクロペンタニルメタクリレート39.6g(0.1mol)とからなる原料モノマーを混合し、モノマー混合物とした。 Then, 142.6 g (0.45 mol) of benzyl methacrylate, which are the monomers (ma-1) to (ma-3) shown in Table 1, 69.7 g (0.45 mol) of methacrylic acid, and 39 of dicyclopentanyl methacrylate .6 g (0.1 mol) of raw material monomers were mixed to obtain a monomer mixture.
 モノマー混合物に、重合開始剤であるt-ブチルパーオキシ-2-エチルヘキサノエート4.5g(1.8質量部)を添加し、上記のフラスコ中で攪拌されている120℃の溶剤中に、滴下ロートを用いて1時間かけて滴下し、反応液とした。得られた反応液を120℃でさらに2時間攪拌して共重合反応させて、共重合体である樹脂前駆体を含む反応液を生成させた。 4.5 g (1.8 parts by mass) of t-butylperoxy-2-ethylhexanoate, which is a polymerization initiator, was added to the monomer mixture, and added to the solvent at 120° C. that was being stirred in the above flask. was added dropwise over 1 hour using a dropping funnel to obtain a reaction solution. The obtained reaction liquid was further stirred at 120° C. for 2 hours to carry out a copolymerization reaction to produce a reaction liquid containing a resin precursor which is a copolymer.
 次に、樹脂前駆体を生成させたフラスコ内を6%の酸素ガスに置換し、フラスコ内の樹脂前駆体を含む反応液に、表1に示すモノマー(ma-5)であるグリシジルメタクリレート38.3g(0.15mol)と、触媒であるトリフェニルホスフィン0.871gと、重合禁止剤であるメチルハイドロキノン0.871gとを加え、120℃で6時間付加反応を行い、樹脂前駆体の側鎖が変性された合成例1の(A)アルカリ可溶性樹脂を含む試料(試料番号A1)を得た。 Next, the inside of the flask in which the resin precursor was generated was replaced with 6% oxygen gas, and the reaction liquid containing the resin precursor in the flask was added with glycidyl methacrylate 38.5, which is the monomer (ma-5) shown in Table 1. 3 g (0.15 mol), 0.871 g of triphenylphosphine as a catalyst, and 0.871 g of methylhydroquinone as a polymerization inhibitor are added, and an addition reaction is performed at 120° C. for 6 hours to convert the side chain of the resin precursor to A sample (Sample No. A1) containing the modified (A) alkali-soluble resin of Synthesis Example 1 was obtained.
[合成例2~合成例8、比較合成例1および比較合成例2(試料番号A2~A10)] 合成例1においてモノマー混合物に使用したモノマーに代えて、表1に示すモノマー(ma-1)~(ma-4)を表1に示す割合で用いたことと、表1に示す重合開始剤の添加量としたこと以外は、合成例1と同様にして、合成例2~合成例8、比較合成例1および比較合成例2の樹脂前駆体を含む反応液を生成させた。 [Synthesis Example 2 to Synthesis Example 8, Comparative Synthesis Example 1 and Comparative Synthesis Example 2 (Sample Nos. A2 to A10)] Instead of the monomer used in the monomer mixture in Synthesis Example 1, the monomer (ma-1) shown in Table 1 In the same manner as in Synthesis Example 1, except that ~ (ma-4) was used in the proportion shown in Table 1 and the amount of polymerization initiator added was as shown in Table 1, Synthesis Examples 2 to 8, A reaction solution containing the resin precursors of Comparative Synthesis Example 1 and Comparative Synthesis Example 2 was produced.
 その後、フラスコ内の樹脂前駆体を含む反応液に、表1に示すモノマー(ma-5)を表1に示す割合で加えたこと以外は、合成例1と同様にして、樹脂前駆体の側鎖が変性された合成例2~合成例8、比較合成例1および比較合成例2の(A)アルカリ可溶性樹脂を含む試料(試料番号A2~A10)を得た。 Thereafter, in the same manner as in Synthesis Example 1, except that the monomer (ma-5) shown in Table 1 was added to the reaction solution containing the resin precursor in the flask at the ratio shown in Table 1, the resin precursor side Samples containing (A) the alkali-soluble resin of Synthesis Examples 2 to 8, Comparative Synthesis Example 1 and Comparative Synthesis Example 2 (Sample Nos. A2 to A10) having modified chains were obtained.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表1において、使用した化合物は以下の通りである。
BZMA:ベンジルメタクリレート
St:スチレン
PQMA:4-ヒドロキシフェニルメタクリレート
MAA:メタクリル酸
TCDMA:ジシクロペンタニルメタクリレート
THFMA:メタクリル酸テトラヒドロフルフリル
GMA:グリシジルメタクリレート
TBO:t-ブチルパーオキシ-2-エチルヘキサノエート(商品名;パーブチルO、日油株式会社製)
PGMEA:プロピレングリコールモノメチルエーテルアセテート
In Table 1, the compounds used are as follows.
BZMA: benzyl methacrylate St: styrene PQMA: 4-hydroxyphenyl methacrylate MAA: methacrylic acid TCDMA: dicyclopentanyl methacrylate THFMA: tetrahydrofurfuryl methacrylate GMA: glycidyl methacrylate TBO: t-butylperoxy-2-ethylhexanoate (Product name: Perbutyl O, manufactured by NOF Corporation)
PGMEA: propylene glycol monomethyl ether acetate
 表1におけるモノマー(ma-1)~(ma-4)の数値は、樹脂前駆体に使用したモノマー(ma-1)~(ma-4)の合計量に対する各モノマーの割合(mol%)を示す。
 表1におけるモノマー(ma-5)の数値は、樹脂前駆体に使用したモノマー(ma-1)~(ma-4)の合計100質量部に対する添加量(質量部)を示す。
 表1における溶剤の数値は、(A)アルカリ可溶性樹脂を含む試料中の含有量(質量%)を示す。
 表1に示す重合開始剤の数値は、樹脂前駆体に使用したモノマー(ma-1)~(ma-4)の合計100質量部に対する添加量(質量部)を示す。
The numerical values of the monomers (ma-1) to (ma-4) in Table 1 indicate the ratio (mol%) of each monomer to the total amount of the monomers (ma-1) to (ma-4) used in the resin precursor. show.
The numerical value of the monomer (ma-5) in Table 1 indicates the amount (parts by mass) added to the total 100 parts by mass of the monomers (ma-1) to (ma-4) used in the resin precursor.
The numerical value of the solvent in Table 1 indicates the content (% by mass) in the sample containing (A) the alkali-soluble resin.
The numerical values of the polymerization initiator shown in Table 1 indicate the amount (parts by mass) added to 100 parts by mass in total of the monomers (ma-1) to (ma-4) used in the resin precursor.
 このようにして得られた合成例1~合成例8、比較合成例1および比較合成例2の(A)アルカリ可溶性樹脂について、それぞれ上述した方法により重量平均分子量(Mw)と酸価を測定し、以下に示す方法によりエチレン性不飽和基当量を算出した。その結果を表1に示す。 The weight average molecular weight (Mw) and the acid value of (A) the alkali-soluble resins of Synthesis Examples 1 to 8, Comparative Synthesis Examples 1 and 2 thus obtained were measured by the methods described above. , the ethylenically unsaturated group equivalent was calculated by the method shown below. Table 1 shows the results.
(エチレン性不飽和基当量)
 (A)アルカリ可溶性樹脂を製造する際に用いたモノマー(ma-1)~(ma-5)の仕込み量から、(A)アルカリ可溶性樹脂中の不飽和結合1mol当たりの(A)アルカリ可溶性樹脂の質量を算出し、(A)アルカリ可溶性樹脂のエチレン性不飽和基当量(g/mol)とした。
(Ethylenically unsaturated group equivalent)
(A) From the charged amount of the monomers (ma-1) to (ma-5) used in producing the alkali-soluble resin, (A) alkali-soluble resin per 1 mol of unsaturated bond in (A) alkali-soluble resin The mass of (A) was calculated as the ethylenically unsaturated group equivalent (g/mol) of the alkali-soluble resin.
[(B)アルコキシシリル基含有樹脂の合成]
 以下に示す方法により、合成例9~合成例13の(B)アルコキシシリル基含有樹脂を製造した。
[(B) Synthesis of alkoxysilyl group-containing resin]
The alkoxysilyl group-containing resins (B) of Synthesis Examples 9 to 13 were produced by the method shown below.
[合成例9(試料番号B1)]
 攪拌装置、滴下ロート、コンデンサー、温度計およびガス導入管を備えたフラスコに、(B)アルコキシシリル基含有樹脂を含む試料中の固形分濃度が40質量%となるように、表2に示す溶剤である3-メトキシ-1-ブタノール600gを入れ、窒素ガス置換しながら攪拌し、105℃に昇温した。
[Synthesis Example 9 (Sample No. B1)]
A solvent shown in Table 2 was added to a flask equipped with a stirrer, dropping funnel, condenser, thermometer, and gas inlet tube so that the solid content concentration in the sample containing (B) the alkoxysilyl group-containing resin was 40% by mass. 600 g of 3-methoxy-1-butanol was added, and the mixture was stirred while being replaced with nitrogen gas, and the temperature was raised to 105°C.
 次いで、表2に示すモノマー(mb-1)(mb-2)である3-メタクリロイルオキシプロピルメチルジエトキシシラン327.0g(0.8mol)と、メタクリル酸27.0g(0.2mol)とを混合し、モノマー混合物とした。モノマー混合物に、重合開始剤である2,2’-アゾビス(イソ酪酸)ジメチル46.0g(13質量部)を添加し、上記のフラスコ中で攪拌されている105℃の溶剤中に、滴下ロートを用いて滴下し、反応液とした。得られた反応液を105℃でさらに2時間攪拌して共重合反応させて、共重合体である合成例9の(B)アルコキシシリル基含有樹脂を含む試料(試料番号B1)を得た。 Then, 327.0 g (0.8 mol) of 3-methacryloyloxypropylmethyldiethoxysilane, which is the monomers (mb-1) and (mb-2) shown in Table 2, and 27.0 g (0.2 mol) of methacrylic acid were added. were mixed to form a monomer mixture. To the monomer mixture, 46.0 g (13 parts by mass) of 2,2′-azobis(isobutyrate)dimethyl, which is a polymerization initiator, was added, and the dropping funnel was added to the solvent at 105° C. that was being stirred in the flask. was added dropwise to obtain a reaction solution. The obtained reaction solution was further stirred at 105° C. for 2 hours to carry out a copolymerization reaction to obtain a sample (Sample No. B1) containing the (B) alkoxysilyl group-containing resin of Synthesis Example 9, which is a copolymer.
[合成例10~合成例13(試料番号B2~B5)]
 合成例9においてモノマー混合物に使用したモノマーに代えて、表2に示すモノマー(mb-1)~(mb-3)を表2に示す割合で用いたことと、表2に示す重合開始剤の添加量としたこと以外は、合成例9と同様にして、合成例10~合成例13の(B)アルコキシシリル基含有樹脂を含む試料(試料番号B2~B5)を得た。
[Synthesis Example 10 to Synthesis Example 13 (Sample Nos. B2 to B5)]
Instead of the monomers used in the monomer mixture in Synthesis Example 9, the monomers (mb-1) to (mb-3) shown in Table 2 were used in the proportions shown in Table 2, and the polymerization initiator shown in Table 2 was used. Samples (Sample Nos. B2 to B5) containing the (B) alkoxysilyl group-containing resins of Synthesis Examples 10 to 13 were obtained in the same manner as in Synthesis Example 9, except that the added amount was changed.
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
 表2において、使用した化合物は以下の通りである。
KBE-502:3-メタクリロイルオキシプロピルメチルジエトキシシラン(信越化学工業株式会社製)
KBE-503:3-メタクリロイルオキシプロピルトリエトキシシラン(信越化学工業株式会社製)
MAA:メタクリル酸
AA:アクリル酸
St:スチレン
GMA:グリシジルメタクリレート
AIBME:2,2’-アゾビス(イソ酪酸)ジメチル
MB:3-メトキシ-1-ブタノール
In Table 2, the compounds used are as follows.
KBE-502: 3-methacryloyloxypropylmethyldiethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
KBE-503: 3-methacryloyloxypropyltriethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
MAA: methacrylic acid AA: acrylic acid St: styrene GMA: glycidyl methacrylate AIBME: 2,2'-azobis(isobutyrate) dimethyl MB: 3-methoxy-1-butanol
 表2におけるモノマー(mb-1)~(mb-3)の数値は、(B)アルコキシシリル基含有樹脂に使用したモノマー(mb-1)~(mb-3)の合計量に対する各モノマーの割合(mol%)を示す。
 表2における溶剤の数値は、(B)アルコキシシリル基含有樹脂を含む試料中の含有量(質量%)を示す。
 表2に示す重合開始剤の数値は、(B)アルコキシシリル基含有樹脂に使用したモノマー(mb-1)~(mb-3)の合計100質量部に対する添加量(質量部)を示す。
The numerical values of the monomers (mb-1) to (mb-3) in Table 2 are the ratio of each monomer to the total amount of the monomers (mb-1) to (mb-3) used in the alkoxysilyl group-containing resin (B). (mol%).
The numerical value of the solvent in Table 2 indicates the content (% by mass) in the sample containing the (B) alkoxysilyl group-containing resin.
The numerical values of the polymerization initiator shown in Table 2 indicate the amount (parts by weight) added to 100 parts by weight in total of the monomers (mb-1) to (mb-3) used in the alkoxysilyl group-containing resin (B).
 このようにして得られた合成例9~合成例13の(B)アルコキシシリル基含有樹脂について、それぞれ上述した方法により重量平均分子量(Mw)と酸価とシリル基当量とを測定した。その結果を表2に示す。 For the (B) alkoxysilyl group-containing resins of Synthesis Examples 9 to 13 thus obtained, the weight average molecular weight (Mw), acid value, and silyl group equivalent were measured by the methods described above. Table 2 shows the results.
(保存安定性)
 次に、合成例9~合成例13の(B)アルコキシシリル基含有樹脂(試料番号B1~B5)を含む試料から採取した(B)アルコキシシリル基含有樹脂(試験体)について、以下に示す方法により、保存安定性の評価を行った。その結果を表2に示す。
(Storage stability)
Next, the (B) alkoxysilyl group-containing resins (specimen) collected from the samples containing the (B) alkoxysilyl group-containing resins (sample numbers B1 to B5) of Synthesis Examples 9 to 13 were prepared by the following method. was used to evaluate the storage stability. Table 2 shows the results.
 各試験体について、GPC(GPC-101、Shodex製)を使用して重量平均分子量(Mw)を測定した。また、各試験体について、上記の方法により25℃での粘度を測定した。
 各試験体を10gずつ20mlのガラス容器に計り取って密閉し、40℃に保った恒温器測定の中に1ヶ月間静置して保存する保存試験を行った。
 保存試験後の各試験体について、再び上記の方法により重量平均分子量(Mw)と25℃での粘度とを測定した。
For each specimen, the weight average molecular weight (Mw) was measured using GPC (GPC-101, manufactured by Shodex). In addition, the viscosity at 25° C. was measured for each specimen by the method described above.
10 g of each test sample was weighed into a 20 ml glass container, sealed, and placed in a thermostat kept at 40° C. for 1 month for preservation test.
The weight average molecular weight (Mw) and the viscosity at 25° C. of each specimen after the storage test were measured again by the above method.
 保存試験前と後の重量平均分子量(Mw)、および保存試験前と後の25℃での粘度を用いて、下記式(I)により、重量平均分子量の増加率と25℃での粘度の増加率とをそれぞれ求め、以下の基準により評価した。その結果を表2~表7に示す。
 増加率(%)=((保存試験前-保存試験後)/保存試験前)×100    (I)「評価基準」
 ○(可):分子量の増加率と粘度の増加率の両方とも10%未満
 ×(不可):分子量の増加率と粘度の増加率の一方または両方が10%以上
Using the weight average molecular weight (Mw) before and after the storage test and the viscosity at 25°C before and after the storage test, the rate of increase in the weight average molecular weight and the increase in viscosity at 25°C are calculated by the following formula (I). The rate was obtained and evaluated according to the following criteria. The results are shown in Tables 2 to 7.
Increase rate (%) = ((before storage test - after storage test) / before storage test) x 100 (I) "Evaluation criteria"
○ (acceptable): both the rate of increase in molecular weight and the rate of increase in viscosity are less than 10% × (impossible): one or both of the rate of increase in molecular weight and the rate of increase in viscosity is 10% or more
 表2に示すように、合成例9~合成例13の(B)アルコキシシリル基含有樹脂(試料番号B1~B5)は、いずれも保存安定性の評価が○(可)であり、優れた保存安定性を有していることが確認できた。 As shown in Table 2, the (B) alkoxysilyl group-containing resins (Sample Nos. B1 to B5) of Synthesis Examples 9 to 13 were all evaluated for storage stability as ◯ (acceptable), indicating excellent storage. It was confirmed that it has stability.
<実施例1~実施例16、比較例1~比較例5>
[感光性樹脂組成物の調製]
 合成例1~合成例8、比較合成例1および比較合成例2の(A)アルカリ可溶性樹脂(試料番号A1~A10)と、合成例9~合成例13の(B)アルコキシシリル基含有樹脂(試料番号B1~B5)と、表3~表7に示す(C)反応性希釈剤と、(D)光ラジカル重合開始剤と、(E)溶剤と、(F)シランカップリング剤とを、表3~表7に示す割合で混合し、実施例1~実施例16、比較例1~比較例5の感光性樹脂組成物を調製した。
<Examples 1 to 16, Comparative Examples 1 to 5>
[Preparation of photosensitive resin composition]
(A) alkali-soluble resins (sample numbers A1 to A10) of Synthesis Examples 1 to 8, Comparative Synthesis Examples 1 and 2, and (B) alkoxysilyl group-containing resins of Synthesis Examples 9 to 13 ( Sample numbers B1 to B5), (C) reactive diluents shown in Tables 3 to 7, (D) photoradical polymerization initiators, (E) solvents, and (F) silane coupling agents, By mixing at the ratios shown in Tables 3 to 7, photosensitive resin compositions of Examples 1 to 16 and Comparative Examples 1 to 5 were prepared.
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000005
Figure JPOXMLDOC01-appb-T000005
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000008
Figure JPOXMLDOC01-appb-T000008
 表3~表7において、使用した化合物は以下の通りである。
DPHA:ジペンタエリスリトールヘキサアクリレート(東亞合成株式会社製)
OXE-01:2-(ベンゾイルオキシイミノ)-1-[4-(フェニルチオ)フェニル]-1-オクタノン(BASFジャパン社製)
PGMEA:プロピレングリコールモノメチルエーテルアセテート
MB:3-メトキシ-1-ブタノール
KBE-503:3-メタクリロイルオキシプロピルトリエトキシシラン(信越化学工業株式会社製)
The compounds used in Tables 3 to 7 are as follows.
DPHA: dipentaerythritol hexaacrylate (manufactured by Toagosei Co., Ltd.)
OXE-01: 2-(benzoyloxyimino)-1-[4-(phenylthio)phenyl]-1-octanone (manufactured by BASF Japan)
PGMEA: propylene glycol monomethyl ether acetate MB: 3-methoxy-1-butanol KBE-503: 3-methacryloyloxypropyltriethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
 表3~表7に示す(A)アルカリ可溶性樹脂の数値には、合成例1~合成例8、比較合成例1および比較合成例2において合成した(A)アルカリ可溶性樹脂を含む試料中の溶剤以外の成分のみが含まれ、溶剤は含まれない。
 表3~表7に示す(B)アルコキシシリル基含有樹脂の数値には、合成例9~合成例13において合成した(B)アルコキシシリル基含有樹脂を含む試料中の溶剤以外の成分のみが含まれ、溶剤は含まれない。
The numerical values of (A) alkali-soluble resin shown in Tables 3 to 7 include the solvent Contains only other ingredients and does not contain solvents.
The numerical values of the (B) alkoxysilyl group-containing resin shown in Tables 3 to 7 include only the components other than the solvent in the samples containing the (B) alkoxysilyl group-containing resin synthesized in Synthesis Examples 9 to 13. contains no solvents.
 表3~表7における(A)アルカリ可溶性樹脂と、(B)アルコキシシリル基含有樹脂と、(C)反応性希釈剤、(D)光ラジカル重合開始剤と、(F)シランカップリング剤の配合量は、(A)~(C)の合計100質量部に対する(A)~(D)(F)各成分それぞれの含有量(質量部)を示す。
 (E)溶剤の配合量は、上記(A)~(D)(F)の合計100質量部に対する含有量(質量部)を示す。
(A) an alkali-soluble resin, (B) an alkoxysilyl group-containing resin, (C) a reactive diluent, (D) a photoradical polymerization initiator, and (F) a silane coupling agent in Tables 3 to 7. The compounding amount indicates the content (parts by mass) of each of components (A) to (D) and (F) with respect to 100 parts by mass of (A) to (C) in total.
(E) The blending amount of the solvent indicates the content (parts by mass) per 100 parts by mass of the above (A) to (D) and (F).
(保存安定性)
 表3~表7に示した実施例1~実施例16、比較例1~比較例5の配合のうち、(C)反応性希釈剤と(D)光ラジカル重合開始剤と(E)シランカップリング剤を添加しない条件で、合成例9~合成例13の保存安定性試験と同様にして、保存安定性の評価を行った。その結果を表3~表7に示す。
(Storage stability)
Among the formulations of Examples 1 to 16 and Comparative Examples 1 to 5 shown in Tables 3 to 7, (C) a reactive diluent, (D) a photoradical polymerization initiator and (E) a silane cup Storage stability was evaluated in the same manner as in the storage stability tests of Synthesis Examples 9 to 13 under the condition that no ring agent was added. The results are shown in Tables 3-7.
 表3~表7に示すように、実施例1~実施例16、比較例1~5の感光性樹脂組成物は、いずれも保存安定性の評価が○(可)であり、優れた保存安定性を有していることが確認できた。 As shown in Tables 3 to 7, the photosensitive resin compositions of Examples 1 to 16 and Comparative Examples 1 to 5 were all evaluated for storage stability as ◯ (acceptable), indicating excellent storage stability. I was able to confirm that I had sex.
 次に、実施例1~実施例16、比較例1~比較例5の感光性樹脂組成物を硬化させてなる樹脂硬化膜について、(1)硬度(鉛筆硬度)、(2)透過率(透明性)、(3)密着性、(4)耐水性、(5)耐高温高湿性、(6)現像性、(7)総合判定の各項目を、以下に示す方法により評価した。 Next, for the cured resin films obtained by curing the photosensitive resin compositions of Examples 1 to 16 and Comparative Examples 1 to 5, (1) hardness (pencil hardness), (2) transmittance (transparency properties), (3) adhesion, (4) water resistance, (5) resistance to high temperature and high humidity, (6) developability, and (7) overall evaluation were evaluated by the following methods.
(1)硬度(鉛筆硬度)
 縦5cm、横5cmのガラス基板(無アルカリガラス基板)上に、スピンコーターにより感光性樹脂組成物を塗布して塗膜を形成した。塗膜の形成されたガラス基板を100℃のホットプレート上で3分間加熱することにより、塗膜中に含まれる(E)溶剤の含有量を減少させて、ガラス基板上に塗布膜を形成した。次に、塗布膜に波長365nmの光を200mJ/cmの露光量で照射して光硬化させた。次いで、光硬化させた塗布膜を有するガラス基板を、乾燥機中、230℃で30分間加熱し、膜厚2.0μmの樹脂硬化膜を得た。
(1) Hardness (pencil hardness)
A coating film was formed by coating the photosensitive resin composition on a glass substrate (non-alkali glass substrate) of 5 cm long and 5 cm wide using a spin coater. By heating the glass substrate on which the coating film was formed on a hot plate at 100°C for 3 minutes, the content of the solvent (E) contained in the coating film was reduced to form a coating film on the glass substrate. . Next, the coating film was irradiated with light having a wavelength of 365 nm at an exposure amount of 200 mJ/cm 2 to be photocured. Next, the glass substrate having the photo-cured coating film was heated at 230° C. for 30 minutes in a dryer to obtain a cured resin film having a thickness of 2.0 μm.
 このようにして作製した樹脂硬化膜の鉛筆硬度を、鉛筆硬度計(No.553-M、安田精機製作所製)を用いて、JIS K5600-5-4にしたがって測定した。その結果を表4~6に示す。 The pencil hardness of the cured resin film thus prepared was measured according to JIS K5600-5-4 using a pencil hardness tester (No. 553-M, manufactured by Yasuda Seiki Seisakusho). The results are shown in Tables 4-6.
(2)透過率(透明性)
 上記(1)硬度の評価を行う場合と同様にして作製した樹脂硬化膜を有するガラス基板について、分光光度計(UV-1650PC、島津製作所製)を用いて400~800nmの分光透過率を測定した。そして、波長400nmにおける透過率を以下に示す基準により評価した。その結果を表3~表7に示す。
「評価基準」
 〇(可):98%以上
 ×(不可):98%未満
(2) transmittance (transparency)
For a glass substrate having a cured resin film prepared in the same manner as in (1) hardness evaluation, the spectral transmittance at 400 to 800 nm was measured using a spectrophotometer (UV-1650PC, manufactured by Shimadzu Corporation). . Then, the transmittance at a wavelength of 400 nm was evaluated according to the criteria shown below. The results are shown in Tables 3-7.
"Evaluation criteria"
○ (acceptable): 98% or more × (impossible): less than 98%
(3)密着性(ガラス、ITO、メタルメッシュ(Cu,Ag)、Moに対する)
 上記(1)硬度の評価を行う場合と同様にして作製した、樹脂硬化膜を有するガラス基板を試験体として用意した。
 また、ガラス基板に代えて、ガラス基板上に酸化インジウムスズ(ITO)膜を形成した基板、メタルメッシュ(Cu、Ag)を形成した基板、ガラス基板上にモリブデン(Mo)膜を形成した基板を用いたこと以外は、上記(1)硬度の評価を行う場合と同様にして樹脂硬化膜を作製し、試験体とした。
(3) Adhesion (to glass, ITO, metal mesh (Cu, Ag), Mo)
A glass substrate having a cured resin film was prepared as a test piece in the same manner as in (1) Evaluation of hardness.
Further, in place of the glass substrate, a glass substrate on which an indium tin oxide (ITO) film is formed, a substrate on which a metal mesh (Cu, Ag) is formed, and a glass substrate on which a molybdenum (Mo) film is formed are used. A cured resin film was prepared as a test sample in the same manner as in (1) Hardness evaluation, except that it was used.
 このようにして作製した樹脂硬化膜を有する試験体について、JIS K5600-5-6のクロスカット法により、それぞれ樹脂硬化膜の密着性を評価した。具体的には、碁盤目100個中の剥離個数を数え、以下の基準により評価した。その結果を表3~表7に示す。
「判定基準」
 ○(可):剥離個数0個
 ×(不可):剥離個数1個以上
Adhesion of the cured resin film was evaluated by the cross-cut method of JIS K5600-5-6 on the specimens having the cured resin film thus prepared. Specifically, the number of peeled pieces in 100 grids was counted and evaluated according to the following criteria. The results are shown in Tables 3-7.
"criterion"
○ (possible): 0 peeled pieces × (impossible): 1 or more peeled pieces
(4)耐水性
 上記(1)硬度の評価を行う場合と同様にして、樹脂硬化膜を有するガラス基板を作製し、温度100℃の水に1時間浸漬した。
 このようにして作製した樹脂硬化膜を有するガラス基板について、JIS K5600-5-6のクロスカット法により、樹脂硬化膜の密着性を評価した。具体的には、碁盤目100個中の剥離個数を数え、以下の基準により評価した。その結果を表3~表7に示す。
「判定基準」
 ○(可):剥離個数0個
 ×(不可):剥離個数1個以上
(4) Water Resistance A glass substrate having a cured resin film was prepared in the same manner as in (1) hardness evaluation, and immersed in water at a temperature of 100° C. for 1 hour.
The adhesion of the cured resin film was evaluated by the cross-cut method of JIS K5600-5-6 on the glass substrate having the cured resin film thus prepared. Specifically, the number of peeled pieces in 100 grids was counted and evaluated according to the following criteria. The results are shown in Tables 3-7.
"criterion"
○ (possible): 0 peeled pieces × (impossible): 1 or more peeled pieces
(5)耐高温高湿性
 縦5cm、横5cmのモリブデン(Mo)基板上に、スピンコーターにより感光性樹脂組成物を塗布して塗膜を形成した(塗布工程)。塗膜の形成されたモリブデン基板を100℃のホットプレート上で3分間加熱(プリベーク工程)することにより、塗膜中に含まれる(E)溶剤の含有量を減少させて、モリブデン基板上に塗布膜を形成した。次に、幅3~100μmのラインアンドスペースパターンを有するフォトマスクを、塗布膜の表面との間に100μmの距離をあけて配置した。そして、フォトマスクを介して、超高圧水銀ランプから塗布膜に光を200mJ/cmの露光量で照射して光硬化させた(露光工程)。
(5) High Temperature and High Humidity Resistance A photosensitive resin composition was applied by a spin coater onto a molybdenum (Mo) substrate having a length of 5 cm and a width of 5 cm to form a coating film (coating step). By heating the molybdenum substrate on which the coating film is formed for 3 minutes on a hot plate at 100 ° C. (pre-baking process), the content of (E) solvent contained in the coating film is reduced, and the molybdenum substrate is coated. A film was formed. Next, a photomask having a line-and-space pattern with a width of 3 to 100 μm was arranged with a distance of 100 μm from the surface of the coating film. Then, the coating film was irradiated with light of 200 mJ/cm 2 from an extra-high pressure mercury lamp through a photomask to be photocured (exposure step).
 その後、露光後の塗膜における未露光部分を、現像液を用いて溶解し、除去した(現像工程)。現像液としては、水酸化カリウムを4.0~5.0質量%、非イオン系の界面活性剤を1.0~15.0質量%含有する水溶液であるセミクリーンDL-A10現像液(商品名;横浜油脂工業株式会社製)を75倍に希釈したものを使用した。現像は、露光後の塗膜に現像液を、温度23℃、圧力0.1MPaで30秒~60秒間噴霧することにより行った。
 次いで、光硬化させた塗布膜を有するガラス基板を、乾燥機中、230℃で30分間加熱した(ポストベーク工程)。
 以上の工程により、モリブデン基板上に、膜厚2.0μm、幅3~100μmのラインアンドスペースパターンを有する樹脂硬化膜を作製した。
Thereafter, the unexposed portion of the coated film after exposure was dissolved and removed using a developer (development step). As the developer, semi-clean DL-A10 developer (product (manufactured by Yokohama Yushi Kogyo Co., Ltd.) diluted 75 times was used. Development was carried out by spraying the developer onto the exposed coating film at a temperature of 23° C. and a pressure of 0.1 MPa for 30 to 60 seconds.
Then, the glass substrate having the photo-cured coating film was heated in a dryer at 230° C. for 30 minutes (post-baking step).
Through the above steps, a cured resin film having a line-and-space pattern with a film thickness of 2.0 μm and a width of 3 to 100 μm was produced on the molybdenum substrate.
 このようにして作製した樹脂硬化膜を有するモリブデン基板を、温度85℃、相対湿度85%RHの恒温恒湿槽内に1000時間静置した。その後、樹脂硬化膜を有するモリブデン基板を取り出し、目視にて樹脂硬化膜の変色の有無を、以下に示す基準により評価した。その結果を表3~表7に示す。
「判定基準」
○(可):全く変色が無い
×(不可):わずかに青く変色している
The molybdenum substrate having the cured resin film prepared in this way was allowed to stand for 1000 hours in a thermo-hygrostat at a temperature of 85° C. and a relative humidity of 85% RH. Thereafter, the molybdenum substrate having the cured resin film was taken out, and the presence or absence of discoloration of the cured resin film was visually evaluated according to the following criteria. The results are shown in Tables 3-7.
"criterion"
○ (acceptable): no discoloration × (impossible): slightly discolored to blue
(6)現像性
 モリブデン基板に代えて、縦5cm、横5cmのガラス基板(無アルカリガラス基板)を用いたこと以外は、上記(5)耐高温高湿性の評価を行う場合と同様にして、膜厚2.0μm、幅3~100μmのラインアンドスペースパターンを有する樹脂硬化膜を作製した。
(6) Developability In the same manner as in (5) Evaluation of high-temperature and high-humidity resistance, except that a glass substrate (non-alkali glass substrate) having a length of 5 cm and a width of 5 cm was used instead of the molybdenum substrate. A cured resin film having a line-and-space pattern with a thickness of 2.0 μm and a width of 3 to 100 μm was prepared.
 このようにして作製した樹脂硬化膜を有するガラス基板について、顕微鏡(商品名;RH-2000、株式会社ハイロックス製)を用いて、倍率500倍で樹脂硬化膜を観察し、解像された最小ライン幅(最小現像寸法)を測定した。その結果を表3~表7に示す。 また、上記の樹脂硬化膜を上記の方法により顕微鏡を用いて観察し、解像できたパターン間の未露光部の残渣の有無を、以下に示す基準により評価した。その結果を表3~表7に示す。
 「判定基準」
○(可):パターン間の未露光部に残渣無し
×(不可):パターン間の未露光部に残渣あり
For the glass substrate having the resin cured film thus prepared, a microscope (trade name; RH-2000, manufactured by Hylox Co., Ltd.) was used to observe the resin cured film at a magnification of 500 times, and the resolved minimum The line width (minimum development dimension) was measured. The results are shown in Tables 3-7. The above cured resin film was observed with a microscope by the above method, and the presence or absence of residues in unexposed areas between resolved patterns was evaluated according to the following criteria. The results are shown in Tables 3-7.
"criterion"
○ (possible): no residue in the unexposed area between patterns × (impossible): residue in the unexposed area between patterns
(7)総合判定
 以下に示す基準により評価した。その結果を表3~表7に示す。
「評価基準」
○(可):以下の項目を全て満たす。
(1)硬度での鉛筆硬度が4H以上
(2)透過率が98%以上
(3)密着性での剥離個数が0個
(4)耐水性での剥離個数が0個
(5)耐高温高湿性の評価において全く変色が無い
(6)現像性での最小現像寸法が20μm以下、かつパターン間の未露光部に残渣無し
×(不可):上記○(可)で示したs項目のうちいずれか1以上を満たさない。
(7) Comprehensive Judgment Evaluation was made according to the criteria shown below. The results are shown in Tables 3-7.
"Evaluation criteria"
○ (Possible): Satisfies all of the following items.
(1) Pencil hardness in terms of hardness is 4H or more (2) Transmittance is 98% or more (3) The number of peeled pieces in adhesion is 0 (4) The number of peeled pieces in water resistance is 0 (5) High temperature resistance and high temperature There is no discoloration in the wetness evaluation (6) The minimum development dimension in developability is 20 μm or less, and there is no residue in the unexposed area between patterns × (impossible): Any of the s items indicated by the above ○ (possible) or 1 or more.
 表3~表6に示すように、実施例1~実施例16の樹脂硬化膜は、(1)硬度での鉛筆硬度が4Hまたは5Hであり、(2)透過率(透明性)、(3)密着性、(4)耐水性、(5)耐高温高湿性、(6)現像性(残渣)の全ての評価が○(可)であり、(6)現像性での最小現像寸法が20μm以下であり、(7)総合判定が○(可)であった。 As shown in Tables 3 to 6, the cured resin films of Examples 1 to 16 had (1) a pencil hardness of 4H or 5H, (2) transmittance (transparency), (3 ) Adhesion, (4) Water resistance, (5) High temperature and high humidity resistance, (6) Developability (residue) are all evaluated as ○ (acceptable), and (6) Minimum development size in developability is 20 μm. (7) Comprehensive judgment was ◯ (acceptable).
 これに対し、表7に示すように、比較例1~比較例5の樹脂硬化膜は、いずれも(7)総合判定が×(不可)であった。
 より詳細には、(B)アルコキシシリル基含有樹脂を含まない比較例1および比較例2の樹脂硬化膜は、(1)硬度での鉛筆硬度がHであり、十分な硬度が得られなかった。また、比較例1および比較例2の樹脂硬化膜は、(5)耐高温高湿性の評価が×(不可)であり、耐高温高湿性も不十分であった。
On the other hand, as shown in Table 7, the cured resin films of Comparative Examples 1 to 5 were all evaluated as (7) overall judgment of x (improper).
More specifically, (B) the cured resin films of Comparative Examples 1 and 2, which did not contain an alkoxysilyl group-containing resin, had (1) a pencil hardness of H, and sufficient hardness was not obtained. . In addition, the resin cured films of Comparative Examples 1 and 2 were evaluated as (5) high temperature and high humidity resistance x (improper), and the high temperature and high humidity resistance was also insufficient.
 (A)アルカリ可溶性樹脂を含まない比較例3の樹脂硬化膜は、(6)現像性での最小現像寸法が50μmであり、実施例1~実施例16の樹脂硬化膜と比較して、現像性が劣るものであった。 (A) The cured resin film of Comparative Example 3, which does not contain an alkali-soluble resin, has (6) a minimum developable dimension of 50 μm in developability, and compared with the cured resin films of Examples 1 to 16, the developed It was of poor quality.
 (A)アルカリ可溶性樹脂の全繰り返し構成中における芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)の含有量が少ない比較例4の樹脂硬化膜は、(4)耐水性、(5)耐高温高湿性の評価が×(不可)であり、耐水性、耐高温高湿性が不十分であった。また、比較例4の樹脂硬化膜は、(6)現像性での最小現像寸法が30μmであり、実施例1~実施例16の樹脂硬化膜と比較して、現像性が劣るものであった。 (A) The resin cured film of Comparative Example 4 having a low content of the structural unit (a-1) derived from the ethylenically unsaturated group-containing compound (ma-1) having an aromatic group in the total repeating structure of the alkali-soluble resin (4) water resistance and (5) high temperature and high humidity resistance were evaluated as x (improper), and the water resistance and high temperature and high humidity resistance were insufficient. In addition, the cured resin film of Comparative Example 4 had a minimum development size of 30 μm in (6) developability, and was inferior in developability compared to the cured resin films of Examples 1 to 16. .
 (A)アルカリ可溶性樹脂のエチレン性不飽和基当量が2500g/mol以上である比較例5の樹脂硬化膜は、(5)耐高温高湿性の評価が×(不可)であり、耐高温高湿性が不十分であった。また、比較例5の樹脂硬化膜は、現像性での最小現像寸法が30μmであり、実施例1~実施例16の樹脂硬化膜と比較して、現像性が劣るものであった。 (A) The resin cured film of Comparative Example 5 in which the ethylenically unsaturated group equivalent of the alkali-soluble resin is 2500 g / mol or more is evaluated as (5) high temperature and high humidity resistance × (impossible), and high temperature and high humidity resistance was insufficient. The cured resin film of Comparative Example 5 had a minimum developable dimension of 30 μm, and was inferior in developability to the cured resin films of Examples 1 to 16.
 本発明によれば、保存安定性が良好であり、フォトリソグラフィ法を用いて高精度のパターン形状を有する樹脂硬化膜を形成できる良好な現像性を有し、硬化させることにより、硬度が高く、基材および/または下地との密着性、耐水性、耐高温高湿性、透明性の良好な樹脂硬化膜が得られる感光性樹脂組成物が提供される。該感光性樹脂組成物は、タッチパネルの保護膜および絶縁膜の材料として好ましく用いることができる。 According to the present invention, the storage stability is good, the resin cured film having a highly accurate pattern shape can be formed by photolithography, and the resin has good developability. Provided is a photosensitive resin composition capable of obtaining a resin cured film having excellent adhesion to a substrate and/or an underlayer, water resistance, resistance to high temperature and high humidity, and transparency. The photosensitive resin composition can be preferably used as a material for protective films and insulating films of touch panels.

Claims (17)

  1.  (A)アルカリ可溶性樹脂と、
     (B)アルコキシシリル基含有樹脂と、
     (C)反応性希釈剤と、
     (D)光ラジカル重合開始剤と、
     (E)溶剤と、を含有し、
     前記(A)アルカリ可溶性樹脂は、芳香族基を有するエチレン性不飽和基含有化合物(ma-1)由来の構成単位(a-1)を含有し、酸基および(メタ)アクリロイルオキシ基を有し、エチレン性不飽和基当量が400g/mol以上2500g/mol以下であり、
     前記(A)アルカリ可溶性樹脂の全繰り返し構成単位中、前記構成単位(a-1)を15mol%以上60mol%以下含有し、
     前記(B)アルコキシシリル基含有樹脂は、アルコキシシリル基を有するエチレン性不飽和基含有化合物(mb-1)由来の構成単位(b-1)を含むことを特徴とする感光性樹脂組成物。
    (A) an alkali-soluble resin;
    (B) an alkoxysilyl group-containing resin;
    (C) a reactive diluent;
    (D) a radical photopolymerization initiator;
    (E) a solvent, and
    The (A) alkali-soluble resin contains a structural unit (a-1) derived from an ethylenically unsaturated group-containing compound (ma-1) having an aromatic group, and has an acid group and a (meth)acryloyloxy group. and the ethylenically unsaturated group equivalent is 400 g / mol or more and 2500 g / mol or less,
    Containing 15 mol% or more and 60 mol% or less of the structural unit (a-1) in all the repeating structural units of the alkali-soluble resin (A),
    A photosensitive resin composition, wherein the (B) alkoxysilyl group-containing resin comprises a structural unit (b-1) derived from an ethylenically unsaturated group-containing compound (mb-1) having an alkoxysilyl group.
  2.  前記(A)アルカリ可溶性樹脂と、前記(B)アルコキシシリル基含有樹脂との質量比が、40:60~99:1である請求項1に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 1, wherein the mass ratio of (A) the alkali-soluble resin and (B) the alkoxysilyl group-containing resin is 40:60 to 99:1.
  3.  前記(B)アルコキシシリル基含有樹脂の全繰り返し構成単位中、前記構成単位(b-1)の含有量が、45mol%以上である請求項1または請求項2に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 1 or claim 2, wherein the content of said structural unit (b-1) in all repeating structural units of said (B) alkoxysilyl group-containing resin is 45 mol% or more.
  4.  前記(A)アルカリ可溶性樹脂は、前記構成単位(a-1)と、不飽和一塩基酸(ma-2)由来の構成単位(a-2)と、脂環式炭化水素基を有するエチレン性不飽和基含有化合物(ma-3)由来の構成単位(a-3)とを含む共重合体のカルボキシ基の一部が、エポキシ基含有(メタ)アクリレート(ma-5)由来の構成単位(a-5)に変性された樹脂である請求項1または請求項2に記載の感光性樹脂組成物。 The (A) alkali-soluble resin comprises the structural unit (a-1), a structural unit (a-2) derived from an unsaturated monobasic acid (ma-2), and an ethylenic having an alicyclic hydrocarbon group. Part of the carboxy groups of the copolymer containing the unsaturated group-containing compound (ma-3)-derived structural unit (a-3) is an epoxy group-containing (meth)acrylate (ma-5)-derived structural unit ( 3. The photosensitive resin composition according to claim 1, which is a resin modified by a-5).
  5.  前記(A)アルカリ可溶性樹脂は、酸価が20KOHmg/g~200KOHmg/gである請求項1または請求項2に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 1 or claim 2, wherein (A) the alkali-soluble resin has an acid value of 20 mg KOH/g to 200 mg KOH/g.
  6.  前記(A)アルカリ可溶性樹脂は、重量平均分子量(Mw)が1000~50000である請求項1または請求項2に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 1 or claim 2, wherein (A) the alkali-soluble resin has a weight average molecular weight (Mw) of 1,000 to 50,000.
  7.  前記(B)アルコキシシリル基含有樹脂は、不飽和一塩基酸(mb-2)由来の構成単位(b-2)を含み、
     酸価が150KOHmg/g以下である請求項1または請求項2に記載の感光性樹脂組成物。
    The (B) alkoxysilyl group-containing resin contains a structural unit (b-2) derived from an unsaturated monobasic acid (mb-2),
    3. The photosensitive resin composition according to claim 1, which has an acid value of 150 KOHmg/g or less.
  8.  前記(B)アルコキシシリル基含有樹脂は、重量平均分子量(Mw)が1000~20000である請求項1または請求項2に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 1 or claim 2, wherein the (B) alkoxysilyl group-containing resin has a weight average molecular weight (Mw) of 1,000 to 20,000.
  9.  前記(A)アルカリ可溶性樹脂と、前記(B)アルコキシシリル基含有樹脂と、前記(C)反応性希釈剤との合計100質量部に対して、
     前記(C)反応性希釈剤を5~75質量部含有し、
     前記(D)光ラジカル重合開始剤を0.1~20質量部含有する請求項1または請求項2に記載の感光性樹脂組成物。
    With respect to a total of 100 parts by mass of the (A) alkali-soluble resin, the (B) alkoxysilyl group-containing resin, and the (C) reactive diluent,
    Containing 5 to 75 parts by mass of the (C) reactive diluent,
    3. The photosensitive resin composition according to claim 1, containing 0.1 to 20 parts by mass of (D) the radical photopolymerization initiator.
  10.  前記(E)溶剤が、炭素原子数3~10の第一級アルコールおよび炭素原子数3~10の第二級アルコールから選択される一種以上のアルコールを含有し、
     全溶剤中の前記アルコールの合計含有量が15~100質量%である請求項1または請求項2に記載の感光性樹脂組成物。
    The (E) solvent contains one or more alcohols selected from primary alcohols having 3 to 10 carbon atoms and secondary alcohols having 3 to 10 carbon atoms,
    3. The photosensitive resin composition according to claim 1, wherein the total alcohol content in all solvents is 15 to 100% by mass.
  11.  (F)シランカップリング剤をさらに含む請求項1または請求項2に記載の感光性樹脂組成物。 (F) The photosensitive resin composition according to claim 1 or 2, further comprising a silane coupling agent.
  12.  前記(F)シランカップリング剤が、(メタ)アクリル基、ビニル基、スチリル基から選ばれる1つ以上の官能基を有する請求項11に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 11, wherein the (F) silane coupling agent has one or more functional groups selected from (meth)acrylic groups, vinyl groups and styryl groups.
  13.  前記(A)アルカリ可溶性樹脂と、前記(B)アルコキシシリル基含有樹脂と、前記(C)反応性希釈剤との合計100質量部に対して、
     前記(F)シランカップリング剤を0.1~20質量部含有する請求項11に記載の感光性樹脂組成物。
    With respect to a total of 100 parts by mass of the (A) alkali-soluble resin, the (B) alkoxysilyl group-containing resin, and the (C) reactive diluent,
    12. The photosensitive resin composition according to claim 11, containing 0.1 to 20 parts by mass of the (F) silane coupling agent.
  14.  請求項1に記載の感光性樹脂組成物の硬化物からなる樹脂硬化膜。 A cured resin film comprising a cured product of the photosensitive resin composition according to claim 1.
  15.  請求項14に記載の樹脂硬化膜を具備する画像表示装置。 An image display device comprising the cured resin film according to claim 14.
  16.  前記樹脂硬化膜からなる保護膜を有する請求項15に記載の画像表示装置。 The image display device according to claim 15, which has a protective film made of the cured resin film.
  17.  前記樹脂硬化膜からなる絶縁膜を有する請求項15に記載の画像表示装置。 The image display device according to claim 15, which has an insulating film made of the cured resin film.
PCT/JP2022/024139 2021-06-21 2022-06-16 Photosensitive resin composition, cured resin film, and image display device WO2022270407A1 (en)

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CN115960303A (en) * 2022-12-30 2023-04-14 阜阳欣奕华材料科技有限公司 Resin having thermally crosslinked structure and method for producing the same, photosensitive resin composition, microlens and method for producing the same, and optical device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013064973A (en) * 2011-08-26 2013-04-11 Toppan Printing Co Ltd Photosensitive resin composition, material for touch panel, touch panel protective film, touch panel insulating film, and touch panel
JP2021024929A (en) * 2019-08-02 2021-02-22 昭和電工株式会社 Resin composition and resist

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013064973A (en) * 2011-08-26 2013-04-11 Toppan Printing Co Ltd Photosensitive resin composition, material for touch panel, touch panel protective film, touch panel insulating film, and touch panel
JP2021024929A (en) * 2019-08-02 2021-02-22 昭和電工株式会社 Resin composition and resist

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115960303A (en) * 2022-12-30 2023-04-14 阜阳欣奕华材料科技有限公司 Resin having thermally crosslinked structure and method for producing the same, photosensitive resin composition, microlens and method for producing the same, and optical device

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