WO2022254306A1

WO2022254306A1 - Apparatus and method for translating a sheet

Info

Publication number: WO2022254306A1
Application number: PCT/IB2022/055044
Authority: WO
Inventors: Damian Ehrensperger; Thomas SCHEIBLING; Marc Kaelin; Thomas Netter
Original assignee: Flisom Ag
Priority date: 2021-05-31
Filing date: 2022-05-30
Publication date: 2022-12-08

Abstract

Clamping device (1200) and method (4000) for a conveyor system (2000) for conveying a sheet (100), comprising a clamping device (1200) for gripping an edge (101, 102) of the sheet, the clamping device comprising a first jaw member (1210) comprising a first clamping surface (1210F) and a second jaw member (1220) comprising a second clamping surface (1220F) facing, on its front side, the first clamping surface, wherein one or more of the first clamping surface and the second clamping surface comprises one or more pad (1210P, 1220P), characterized in that the pad comprises one or more layer (1210L, 1220L) comprising graphite.

Description

APPARATUS AND METHOD FOR TRANSLATING A SHEET

Field

[0001] This disclosure relates to apparatuses and methods for translating a sheet, for example a web, for example in a hot and vacuum environment.

Background

[0002] Many manufacturing processes involve translating sheets, foils, or webs along a system. The sheets and webs are thin materials that are subjected to tension and deformation. In some coating processes, the sheet or web is translated past coating apparatuses, for example sprays or evaporation sources. For example, in some coating processes comprising evaporation sources, the heat radiated by the coating apparatus may cause the sheet or web to sag and sometimes tear.

[0003] US4601421 presents a clamp for feeding a web in a packaging machine. However, use of this clamp may cause a web to tear. US6092709 presents a machine for advancing a sheet metal strip comprising gripping units comprising pads. However, use of the clamp of US4601421 with the pads presented in US6092709 does not solve the problem of tearing during transport of some web materials, for example polymer-based sheets or webs. Consequently, there still is a need for devices, systems, and methods to improve the precision and reliability of sheet or web transport in manufacturing systems.

Summary

[0004] This disclosure presents a clamping device for a conveyor drive assembly of a conveyor system oriented for conveying a sheet in an X-direction. The clamping device forms an aperture configurable between an open aperture configuration and a closed aperture configuration for gripping an edge of the sheet. The clamping device comprises: a first jaw member comprising a first clamping surface and a second jaw member comprising a second clamping surface facing, on its front side, the first clamping surface. One or more of the first clamping surface and the second clamping surface comprises one or more pad. For example, the pad comprises one or more layer comprising graphite.

[0005] For example, the one or more layer comprises expanded graphite. For example, the one or more layer is at the surface of the one or more pad. For example, the one or more pad comprises a foam. For example, the one or more pad covers the entirety of the clamping surface. For example, the one or more pad comprises a pad extending from the first clamping surface to the second clamping surface. For example, the one or more pad comprises one or more insert.

[0006] For example, the one or more pad has a width within the clamping surface, in a Y- direction orthogonal to the X-direction, that is comprised in a range from 3 mm to 50 mm. For example, the one or more pad is comprised on the first jaw member. For example, each of the first clamping surface and the second clamping surface comprises one or more pad. For example, the one or more pad is bonded to the jaw by a silicate adhesive. For example, the contour of one or more of the pad’s clamping surface is a rectangle ablated by one or more chamfers along a contour portion of the pad facing into the sheet to be gripped (Y-direction). For example, the contour of one or more of the pad’s clamping surface comprises one or more convex curved portion having a radius of curvature comprised in a range between 1.5 mm and 250 mm and a length of at least 1.5 mm. For example, the one or more convex curved portion is comprised along a contour portion of the pad facing into the sheet to be gripped. For example, the one or more convex curved portion has a radius of curvature comprised in a range between 3 mm and 40 mm. For example, the contour of the one or more pad comprises a sloping edge sloping away from the clamping surface. For example, the one or more pad has a thermal conductivity in a range from 25 Wnr¹K¹ to 2000 Wnr¹K¹. For example, the one or more pad comprises a foam material having a thermal conductivity in a range from 40 Wnr¹K¹ to 2000 Wnr¹K¹. For example, the one or more pad has a thickness in an undamped configuration comprised in a range from 0.1 mm to 5 mm. For example, the one or more pad has a compressive strength in a range from 50 N/mm² to 500 N/mm².

[0007] For example, the clamping force, measured othogonally to a clamping surface in a closed aperture configuration, is comprised in a range from 10 N to 500 N. For example, the clamping pressure in a closed aperture configuration is comprised in a range from 50 kPa to 4000 kPa. For example, the breakout friction force per clamped area measured by clamping a polyimide sheet between a first contacting pad comprising graphite and a second contacting pad comprising graphite is comprised in a range from 40 kN/m² to 700 kN/m².

[0008] For example, the first jaw member comprises one or more arm rail extending, past the second clamping surface, to the back side of the second clamping surface. For example, the first jaw member comprises a first arm rail and a second arm rail extending past the second clamping surface of the second jaw member. For example, the first arm rail and the second arm rail are joining to form a U-shape. For example, the first arm rail comprises a first fold extremity and the second arm rail comprises a second fold extremity that are aimed at each other at an angle comprised in a range from 20 to 160 For example, the first fold extremity contacts the second fold extremity. For example, the clamping device further comprises a compression spring support and a compression spring comprised between the compression spring support and the second jaw member.

[0009] For example, the one or more pad has a surface area that covers at least a cross- section of the compression spring projected onto the clamping surface. For example, the clamping device is further comprising a heat shield comprising a surface that is parallel to the direction of compression of the compression spring. For example, the heat shield comprises graphite. For example, the compression spring comprises a ceramic coating.

[0010] For example, the one or more clamping surface further comprises a sensor assembly.

For example, the sensor assembly is at least partly sandwiched between the clamping surface and the jaw member. For example, the sensor assembly is at least partly sandwiched between two or more sheets comprising graphite. For example, the sensor assembly comprises one or more force sensor a measuring axis of which is parallel to the clamping surface. For example, the sensor assembly comprises one or more force sensor a measuring axis of which is orthogonal to the X-direction. For example, the sensor assembly comprises a temperature sensor. For example, the sensor assembly comprises an identification device. For example, the sensor assembly comprises a wireless power receiver. For example, the sensor assembly comprises a computer processor and a non-volatile computer-readable storage medium. For example, the sensor assembly comprises a data transceiver.

[0011] Furthermore, this disclosure presents a conveying system for conveying a sheet in an X-direction comprising one or more conveyor track oriented in the X-direction and comprising one or more of the clamping device. For example, the one or more conveyor track comprises two or more track segments arranged consecutively along the X-direction. For example, one or more of the two or more track segments is positioned at an offset different from a first track segment in a direction orthogonal to that of the X-direction. For example, one or more of the two or more track segments is positioned at an offset different from a first track segment in a horizontal direction orthogonal to that of the X-direction. For example, one or more of the two or more track segments is connected to a track support, a motion component of which is a translating motion in a direction orthogonal to the X-direction. For example, one or more of the track segment comprises a track wall comprising one or more chamfer at one or more of the track segment’s extremities.

[0012] For example, the one or more chamfer is on the track segment’s wall that is closest to the clamping device. For example, the one or more conveyor track is driven by one or more conveyor drive assembly. For example, the one or more conveyor track comprises a first clamping device and a second clamping device spaced apart by a distance comprised in a range from 5 mm to 1000 mm measured along the length of the conveyor track. For example, the one or more conveyor track comprises a plurality of clamping devices regularly spaced apart from each other by a distance comprised in a range from 5 mm to 1000 mm measured along the length of the conveyor track. For example, the system comprises a first conveyor track and a second conveyor track spaced apart from the first conveyor track by a distance comprised in a range from 100 mm to 3000 mm.

[0013] For example, the system further comprises one or more evaporation source comprised beneath a conveying plane comprised between a first conveyor track and a second conveyor track parallel to the first conveyor track and wherein at least a portion of the first conveyor track faces at least a portion of the second conveyor track. For example, the conveyor drive assembly comprises a first chain drive and a second chain drive parallel to the first chain drive, wherein the second chain drive comprises a coupling to the first chain drive. For example, a first clamping device comprised in the first conveyor track is facing a second clamping device comprised in the second conveyor track.

[0014] For example, the first conveyor track comprises a first clamping device and a second clamping device, and the second conveyor track comprises a third clamping device wherein the third clamping device is comprised on a perpendicular bisector of the track segment joining the first clamping device to the second clamping device.

[0015] For example, the system further comprises one or more railing assembly comprising one or more railing oriented in the X-direction and wherein one or more railing of the one or more railing is within a line of sight of the second clamping surface of the closed aperture of the clamping device when it is being conveyed in the X-direction.

[0016] For example, the railing is fastened to a first railing anchor and resting free-floatingly onto one or more railing support. For example, the first railing anchor is comprised at a first location along the bar’s X-direction and the railing support is comprised at a second location at least 0.5 m away from the first location along the bar’s X-direction. For example, the one or more railing support is connected to one or more railing support actuator for adjusting the position of one or more of the one or more railing support in one or more direction (Y, Z) orthogonal to the X-direction. For example, the one or more railing support is connected to a track segment of a conveyor track oriented in the X-direction, each track segment arranged consecutively along the X-direction.

[0017] For example, the railing comprises a cable. For example, the railing comprises a conveyor belt. For example, the first railing anchor comprises one or more pulley. For example, the one or more railing support comprises one or more pulley.

[0018] For example, the system comprises a first conveyor track and a second conveyor track parallel to the first conveyor track wherein a surface of the railing is tangent with a plane at an elevation angle comprised in a range from -80° to +80° with respect to a plane joining the closed aperture of a first clamping device of the first conveyor track to the closed aperture of a second clamping device of the second conveyor track. For example, the elevation angle is comprised in a range from -15° to +15°.

[0019] For example, the system comprises a first conveyor track and a second conveyor track parallel to the first conveyor track and comprising a first railing and a second railing wherein: the first railing and the second railing are parallel to the first conveyor track; the first railing and the second railing are comprised between the first conveyor track and the second conveyor track; and the top surface of the first railing and the top surface of the second railing are tangent with a plane joining the closed aperture of a first clamping device of the first conveyor track to the closed aperture of a second clamping device of the second conveyor track.

[0020] For example, a surface of the railing is tangent with a plane that is coplanar with the clamping surface of the closed aperture of the clamping device. For example, the railing comprises a cross-section forming a body of revolution having a radius in a range from 1 mm to 30 mm. For example, the railing comprises a cross-section comprising at least a quarter of an ellipse in the cross-section’s upper quadrant that is most distal from the nearest conveyor track. For example, the railing forms a wall masking, per unit of railing length in the Z-direction, the volume beneath the plane tangent to the top surface of the railing from the clamping device’s closed aperture. For example, the railing comprises an upward ramp portion leading to a railing portion oriented in the X-direction.

[0021] For example, the cross section of the railing comprises a drooping upper surface in a direction leading away from the nearest conveyor track, starting from the top of the cross section positioned at a distance in a horizontal plane comprised between 2 mm and 50 mm from the closed aperture 1215C of the clamping device 1200. For example, at least a portion of the surface of the one or more railing comprises one or more coating layer. For example, at least a portion of the surface of the one or more railing comprises a layer of fibrous material.

[0022] For example, the railing assembly comprises one or more first railing and one or more upper railing comprised within 300 mm of a conveyor track. For example, the first railing is connected to a support comprised on a first side of a conveying plane extending from the second clamping surface of the clamping device and the upper railing is connected to a support comprised on a second side of the conveying plane.

[0023] For example, the first railing and the upper railing are configured in a staggered arrangement 2100ST with respect to a conveying plane extending from the second clamping surface of the clamping device. For example, the highest point in the Z-direction of the first railing is higher than the lowest point in the Z-direction of the upper railing. For example, the upper railing is arranged closest to the conveyor track, and the first railing is arranged distally from the conveyor track. For example, the first railing is parallel to the upper railing over at least a 300 mm portion of the length in the X-direction of the first railing and the upper railing. For example, looking down in a -Z-direction onto the X-Y plane, the first railing and the upper railing converge at least over a second portion of at least a 300 m of the length of the railing in the X- direction. For example, looking down in a -Z-direction onto the X-Y plane, the first railing and the upper railing are configured in a divergent-convergent arrangement over the length of the railing in the X-direction.

[0024] For example, the system further comprises one or more wireless receiver. For example, the system further comprises one or more wireless power transmitter a power-transmitting axis of which is aimed at the conveyor track.

[0025] For example, the system further comprises one or more computer controller and one or more computer-readable non-volatile storage medium comprising instructions that, when executed by the controller, cause the system to adjust the speed of the one or more conveyor drive assembly. For example, the system further comprises instructions that, when executed by the controller, cause the system to: read data from one or more wireless receiver. For example, the system further comprises instructions that, when executed by the controller, cause the system to: send one or more command to one or more track support for adjusting the position of one or more track segment in one or more direction (Y, Z) orthogonal to the X-direction. For example, the system further comprises instructions that, when executed by the controller, cause the system to read one or more torque value of the conveyor drive assembly and to adjust the position of the one or more track segment as a function of the one or more torque value.

[0026] For example, the system further comprises instructions that, when executed by the controller, cause the system to: send one or more command to one or more railing support actuator for adjusting the position of one or more railing support in one or more direction orthogonal to the X-direction. For example, the one or more command sent to the one or more railing support actuator for adjusting the position of one or more railing support is a function of one or more force measurement data. For example, the data comprises force measurement data. For example, the data comprises temperature measurement data. For example, the data comprises identification data.

[0027] This disclosure further presents a method for conveying a sheet in an X-direction, comprising: clamping a first edge of the sheet with respect to the X-direction with a first clamping device; clamping a second edge of the sheet opposite the first edge with respect to the X-direction with a second clamping device; and simultaneously translating the first clamping device and the second clamping device in the X-direction, wherein clamping the first edge and clamping the second edge comprises compressing between the clamping device and the sheet, within each of the first clamping device and the second clamping device, one or more pad comprising one or more layer comprising graphite between the clamping device and the sheet. For example, the one or more layer comprises expanded graphite. For example, the sheet comprises a polymer. For example, one or more surface of the sheet comprises a polymer. For example, the sheet comprises polyimide. For example, at least a portion of the sheet contacting the one or more pad comprises polyimide.

[0028] For example, the clamping comprises forming a graphite-to-polyimide contact between the surface of the pad and the surface of the sheet. For example, at least a portion of the sheet contacting the one or more pad comprises a coating comprising molybdenum. For example, a portion of pad width contacting the sheet within each clamping device, in a direction orthogonal to the X-direction, is comprised in a range from 3 mm to 50 mm. For example, the clamping comprises compressing one or more of the pad against a first face of the sheet and against a second face of the sheet.

[0029] For example, the translating comprises sliding the sheet against one or more railing oriented in the X-direction. For example, the sliding the sheet comprises sliding onto a first railing and onto a second railing, the first railing and the second railing being comprised between the first clamping device and the second clamping device and wherein a top surface of the first railing and a top surface of the second railing are tangent to a conveying plane extending from the second clamping surface of the first clamping device to the second clamping surface of the second clamping device.

[0030] For example, the method further comprises adjusting the position of one or more track segment in one or more direction (Y, Z) orthogonal to the X-direction. For example, adjusting the position of the one or more track segment comprises measuring one or more torque value. For example, the method further comprises adjusting the position of one or more railing support in one or more direction (Y, Z) orthogonal to the X-direction. For example, the adjusting the position of one or more railing support is a function of one or more of a force measurement data, a torque measurement data, and a temperature measurement data. For example, the translating the first clamping device and the second clamping device in the X-direction comprises adjusting the speed of the translating. For example, the adjusting the speed of the translating is a function of one or more of a force measurement data, a torque measurement data, and a temperature measurement data.

[0031] Yet further, the disclosure presents a system for conveying in an X-direction a sheet clamped between a first conveyor track and a second conveyor track. For example, the system comprises a first conveyor track and a second conveyor track extending in the X-direction, each of the first and the second conveyor track comprising one or more clamping device comprising a first jaw member and a second jaw member, and defining a conveying plane along the X- direction and spanning from the second jaw member of the first conveyor track to the second jaw member of the second conveyor track; and one or more railing assembly comprising one or more railing extending in the X-direction; wherein one or more railing of the one or more railing assembly is comprised in a volume extending in a Z-direction between the first conveyor track and the second conveyor track, and a contact surface of the railing is tangent with a plane exiting the second jaw at an elevation angle comprised in a range from -80° to +80° with respect to the conveying plane.

[0032] For example, the system further comprises a vacuum chamber forming an enclosure around the first conveyor track, the second conveyor track, and the one or more railing assembly. For example, the system further comprises one or more evaporation source in a volume extending in a Z-direction between the first conveyor track and the second conveyor track.

[0033] For example, the first jaw member comprises a first clamping surface and the second jaw member comprises a second clamping surface facing, on its front side, the first clamping surface; and one or more of the first clamping surface and the second clamping surface comprises one or more pad, wherein the pad comprises one or more layer comprising graphite. For example, the one or more layer comprises expanded graphite. For example, the one or more railing is fastened to a first railing anchor and resting free-floatingly onto one or more railing support.

[0034] For example, the one or more railing support is connected to one or more railing support actuator for adjusting the position of one or more of the one or more railing support in one or more direction (Y, Z) orthogonal to the X-direction. For example, one or more of the first conveyor track and the second conveyor track comprises two or more track segment, each track segment arranged consecutively along the X-direction, and the one or more railing is connected to one or more of the track segment.

[0035] For example, the one or more railing assembly comprises: a front side railing comprising a top contact surface along its contact surface at greatest Z-direction position and a back side railing comprising a bottom contact surface along its contact surface at lowest Z-direction position, wherein along at least a portion of length in the X-direction of the railing assembly, the Z-direction position of the top contact surface is greater than the Z-direction position of the bottom contact surface.

[0036] For example, on a Y-axis extending orthogonally from the first conveyor track to the second conveyor track, a back side railing is comprised, along at least a portion of length in the X-direction of the railing assembly, between a conveyor track and its nearest front side railing. For example, one or more of the one or more railing comprises a pulley. For example, one or more of the one or more railing comprises a conveyor belt. For example, at least a portion of the surface of one or more of the one or more railing comprises a layer of fibrous material.

[0037] The disclosure presents yet another embodiment of a method for conveying in an X-direction a sheet clamped between a first conveyor track and a second conveyor track. For example, the method comprises: clamping the sheet between the first conveyor track and the second conveyor track, each of the first and the second conveyor track comprising one or more clamping device comprising a first jaw member and a second jaw member and defining a conveying plane along the X-direction and spanning from the second jaw member of the clamping device of the first conveyor track to the second jaw member of the clamping device of the second conveyor track; and translating the sheet in the X-direction, wherein the sheet is in contact with one or more railing of one or more railing assembly extending in the X-direction, one or more railing of the one or more railing assembly is comprised in a volume extending in a Z-direction between the first conveyor track and the second conveyor track, and a contact surface of the railing is tangent with a plane exiting from the second jaw at an elevation angle comprised in a range from -80° to +80° with respect to the conveying plane.

[0038] For example, the clamping the sheet comprises clamping a first side of the sheet at the first conveyor track within one or more clamping device and clamping a second opposite side of the sheet at the second conveyor track within one or more clamping device, wherein one or more of the clamping device comprises a clamping surface comprising one or more pad comprising one or more layer comprising graphite. For example, the one or more layer comprises expanded graphite.

[0039] For example, the translating the sheet comprises sliding the sheet against one or more of the railing. For example, one or more of the railing comprises a conveyor belt. For example, the method further comprises adjusting the speed of the conveyor belt as a function of the speed of the translating of the sheet. For example, the translating the sheet comprises adjusting the speed of one or more of the first conveyor track and the second conveyor track as a function of one or more of: one or more torque value of a conveyor drive assembly; one or more force measurement data measured in one or more direction at one or more of the conveyor track; and one or more temperature measurement data.

[0040] For example, the method further comprises adjusting one or more railing support. For example, the adjusting one or more railing support comprises commanding a position of one or more railing support actuator as a function of one or more of: one or more torque value of a conveyor drive assembly; one or more force measurement data measured in one or more direction at one or more of the conveyor track; and one or more temperature measurement data.

[0041] For example, the translating comprises translating the sheet at a distance comprised between 0.01 m and 1.5 m past one or more evaporation source in a volume extending in a Z- direction between the first conveyor track and the second conveyor track. For example, the translating comprises translating the sheet in a vacuum chamber forming an enclosure around the first conveyor track, the second conveyor track, and the one or more railing assembly. [0042] Still further, the disclosure presents a system for conveying a sheet in an X-direction and tensioning the sheet in a Y-direction transverse to the X-direction, wherein the sheet is taut from a first edge of the sheet from a first conveyor track and from a second opposite edge of the sheet from a second conveyor track, comprising: a first conveyor track and a second conveyor track extending in the X-direction, wherein one or more of the first first conveyor track and the second conveyor track comprises a coupling to a track support.

[0043] For example, the track support comprises one or more track support rail oriented in the Y-direction. For example, the track support comprises a track support drive assembly. For example, the system further comprises one or more railing assembly comprising one or more railing extending in the X-direction, wherein the first first conveyor track and the second conveyor track define a conveying plane along the X-direction and spanning from the first conveyor track to the second conveyor track, and wherein one or more railing of the one or more railing assembly is comprised in a volume extending in a Z-direction between the first conveyor track and the second conveyor track. For example, the one or more railing is connected to one or more railing support actuator for adjusting the position of at least a portion of one or more of the one or more railing in one or more direction orthogonal to the X-direction. [0044] For example, one or more of the first and the second conveyor track comprises one or more clamping device comprising a first jaw member and a second jaw member. For example, the conveying plane is spanning from the second jaw member of the first conveyor track to the second jaw member of the second conveyor track, and a contact surface of the railing is tangent with a plane exiting from the second jaw at an elevation angle comprised in a range from -80° to +80° with respect to the conveying plane. For example, one or more of the first jaw member and the second jaw member comprises one or more layer of expanded graphite. For example, the one or more railing assembly comprises: a front side railing comprising a top contact surface along its contact surface at greatest Z-direction position and a back side railing comprising a bottom contact surface along its contact surface at lowest Z-direction position, wherein along at least a portion of length in the X-direction of the railing assembly, the Z-direction position of the top contact surface is greater than the Z-direction position of the bottom contact surface. For example, at least a portion of the surface of one or more of the one or more railing comprises a layer of fibrous material. For example, the system further comprises a vacuum chamber forming an enclosure around the first conveyor track, the second conveyor track, and the one or more railing assembly. For example, the system further comprises one or more evaporation source comprised beneath the conveying plane.

[0045] Accordingly, the disclosure presents a method for conveying a sheet in an X- direction and tensioning the sheet in a Y-direction transverse to the X-direction, wherein the sheet is taut from a first edge of the sheet from a first conveyor track and from a second opposite edge of the sheet from a second conveyor track, comprising: translating the sheet in the X-direction, and adjusting one or more of the first conveyor track and the second conveyor track in the Y-direction. For example, the adjusting one or more conveyor track comprises adjusting a track support comprising one or more track support rail oriented in the Y-direction. For example, the adjusting a track support comprises sending commands to a track support drive assembly. For example, the method further comprises adjusting one or more railing support actuator for adjusting the position of at least a portion of one or more railing in one or more direction (Y, Z) orthogonal to the X-direction.

[0046] For example, the method further comprises clamping one or more side of the sheet with one or more clamping device conveyed by one or more the first conveyor track and the second conveyor track. For example, the one or more clamping device comprises a first jaw member and a second jaw member. For example, one or more of the first jaw member and the second jaw member comprises one or more pad comprising graphite. For example, the one or more pad comprises expanded graphite.

[0047] For example, the adjusting one or more railing support actuator comprises commanding a position of one or more railing support actuator as a function of one or more of: one or more torque value of a conveyor drive assembly; one or more force measurement data measured in one or more direction at one or more of the conveyor track; and one or more temperature measurement data.

[0048] For example, the translating is comprised in an evacuated vacuum chamber. For example, the translating comprises translating the sheet past one or more evaporation source comprised beneath the conveying plane. For example, the method further comprises depositing material onto the sheet. For example, the method further comprises forming vacuum.

Brief description of drawings

[0049] Figs. 1 A to 1C are perspective, front, and side views of a clamp in a closed aperture configuration.

[0050] Figs. 1D to 1F are perspective, front, and side views of a clamp in an open aperture configuration.

[0051] Fig. 2A is a top view of a clamp’s pad.

[0052] Fig. 2B is a side view of two pads of a clamp in a near-closed aperture configuration. [0053] Fig. 2C is a side view of a pad comprising an insert.

[0054] Fig. 3 is a perspective view of a conveying system comprising clamps.

[0055] Fig. 4 is a top view of a conveying system comprising clamps.

[0056] Fig. 5A is a side view of a portion of a conveying system’s conveyor track comprising a railing. [0057] Fig. 5B is a front view of a portion of a conveying system’s conveyor track comprising a railing.

[0058] Fig. 5C is a top view of a portion of a conveying system’s adjusted conveyor track comprising a railing.

[0059] Fig. 5D is a top view of a portion of a conveying system’s adjusted conveyor track comprising an adjustable railing.

[0060] Fig. 5E is a side view of a portion of a conveying system’s conveyor track comprising a railing comprising a ramp.

[0061] Fig. 5F is a side view of a portion of a conveying system’s conveyor track comprising a railing comprising a fibrous material.

[0062] Fig. 6A is a side view of a conveyor track and a pulley-based railing.

[0063] Fig. 6B is a side view of a conveyor track and a railing comprising a conveyor belt.

[0064] Fig. 7A is a front view a conveying system transporting a sheet.

[0065] Fig. 7B is a front view of a railing arrangement for a conveying system.

[0066] Fig. 8A is a side view of a clamp facing a railing with a circular cross-section.

[0067] Fig. 8B is a side view of a clamp facing a railing forming a heat shield.

[0068] Fig. 8C is a side view of a clamp facing a railing comprising a drooping top edge.

[0069] Fig. 8D is a side view of a clamp facing two or more railings in a staggered arrangement. [0070] Figs. 8E, 8F, 8G are top views of 2 railings along a conveyor track.

[0071] Fig. 9 is a block diagram of a computer-based method to translate a sheet in a conveying system.

[0072] Fig. 10 is a block diagram of a method for conveying a sheet in a conveying system.

Description of embodiments

[0073] Embodiments presented in this disclosure are, for example, directed towards solving problems related to the transport and tensioning of a sheet, a foil, or a web 100. For example, it has been found that transporting, for example translating, a web in a high temperature environment or past sources of heat may cause a web to one or more of sag and contract. Fig.

3 presents an embodiment of a chamber 2001 , for example a vacuum chamber, for transporting a web 100 past one or more evaporation source 2300 that, for example, radiates heat towards the sheet. For example, a chamber 2001 is used for depositing 4060 material onto the sheet 100. For example, a method for depositing a layer of material, for example a thin-film coating, onto a sheet 100 comprises maintaining the sheet at a constant distance from the sources of material, for example one or more evaporation source 2300. Constant distance means, for example, constant with respect to time. In a spatial sense, constant means the same distance is maintained over a plurality of sequentially arranged sources of material, for example arranged in the X-direction of translation of the sheet or web 100. A problem in the field of sheet or web transport relates to the tensioning of the sheet 100, for example in proximity of a source of heat, for example the heat radiating from one or more evaporation source 2300. A further problem relates to transport and tensioning in a vacuum or evacuated environment, for example wherein friction forces between materials and surfaces are greater than in a gas-filled environment. [0074] For example, the chamber 2001 is of a free span configuration, for example without intermediate rollers against which a sheet, foil, or web 100 may be supported and risk damaging the coating deposited on its coated surface. For example, a foil is a thin sheet, for example a flexible sheet, for example less than 1 mm thick, for example less than 0.1 mm thick. For example a web is a continuous sheet, for example a continuous foil. In this description, the term sheet is used as a general word for the material being transported, for example clamped. A person skilled in the art will infer that the word sheet stands in for a foil or a web although the foil and the web is, in some embodiments, more flexible than, for example a sheet of a material that is, in some embodiments, a rigid material, for example a glass sheet. A web is, for example, a foil transported from a pay-out roll to a pick-up roll.

[0075] In some coating applications, for example for the production of Cu(ln,Ga)Se₂ thin-film semiconductor devices, for example photovoltaic devices, a free span transport configuration has a free span length greater than 5 m. For some applications, for example for the production of Cu(ln,Ga)Se₂ devices, a manufacturing method comprises substantial variations in temperature along the length of the manufacturing zone comprising one or more evaporation source 2300. For example, a first evaporation source comprises Cu, a second evaporation source comprises In, a third evaporation source comprises Ga, and a fourth evaporation source comprises Se. Compared to manufacturing systems that comprise one or more drum, with substantial thermal inertia, against which the back side of a web is supported during the coating process, a free span configuration presents a solution wherein greater changes in variation of temperature are possible thanks to a reduced thermal inertia due to the absence of a drum. Furthermore, compared to a manufacturing system comprising a drum, a free span configuration provides a solution wherein a web expands and contracts without friction against a back surface, thereby reducing problems relating to friction, alignment, and wrinkling. Yet further, when considering a given coating zone length, compared to a manufacturing system comprising a drum, a free span configuration takes up less volume and reduces the complexity of separating a coating zone from, for example, one or more web pay-out and pick-up assemblies.

[0076] In a free span system as presented in chamber 2001 , the web or sheet 100 is, for example, gripped from each edge of the sheet by one or more clamping device 1200-1, 1200-2. For example, the one or more clamping device 1200-1, 1200-2 comprises a respective chain link device 1000. For example, one or more clamping device comprises a clamping device presented in Figs. 1A to 1F. This disclosure also presents devices and methods to grip and tension a sheet as it one or more of expands and contracts during transport. The devices comprise one or more of: the clamping devices 1200-1, 1200-2, for example to grip and tension the edge of the sheet; one or more conveyor track 2010, 2020, for example an adjustable conveyor track (Figs. 5C-5D), for example to guide the path of the one or more clamping device during transport and tensioning of the sheet; and one or more railing assembly 2100, for example to one or more of guide, support, and tension the sheet during its transport (Figs. 5A- 5F, 6A-6B, 7A, 7B, 8A-8D).

[0077] In another embodiment, the disclosure presents a system 2000 for conveying a sheet 100 in an X-direction and tensioning the sheet in a Y-direction transverse to the X-direction. For example, the sheet is taut from a first edge of the sheet from a first conveyor track 2010 and from a second opposite edge of the sheet from a second conveyor track 2020. For example, the first conveyor track 2010 and the second conveyor track 2020 extend in the X-direction. For example, one or more of the first first conveyor track 2010 and the second conveyor track 2020 comprises a coupling to a track support 2220. For example, the track support 2220 comprises one or more track support rail 2220R oriented in the Y-direction.

[0078] Yet in another embodiment, the disclosure presents a method for conveying a sheet 100 in an X-direction and tensioning the sheet in a Y-direction transverse to the X-direction. For example, the method comprises translating 4030 the sheet 100 in the X-direction, and adjusting 3040 one or more of the first conveyor track 2010 and the second conveyor track 2020. For example, the adjusting 3040 comprises adjusting in one or more of the Y-direction and the Z- direction. For example, the adjusting 3040 comprises adjusting 3042 a track support 2220 oriented in one or more of the Y-direction and the Z-direction.

[0079] Figs. 1 A to 1C are respectively perspective, front, and side views of a clamping device 1200 in a closed aperture configuration 1215C. Figs. 1D to 1F are perspective and side views of the clamping device 1200 in an open aperture configuration 12150. For example, the clamping device 1200 is comprised in a conveyor system 2000 as shown in Figs. 3, 4, and 7 A. For example, the clamping device 1200 is oriented for conveying a sheet 100 in an X-direction. For example, the conveyor system 2000 comprises one or more conveyor track 2010, 2020 comprising one or more chain drive 2060, 2070 comprising one or more chain link device 1000, for example oriented for translating a clamping device 1200 in a direction parallel to the X- direction.

[0080] For example, the chain link device 1000 comprises a link assembly 1100. For example, the link assembly is configured to connecting to one or more of a chain and a belt, for example comprising one or more chain link device 1000. For example, the chain link device 1000 comprises one or more link plate 1110, 1120. For example, the chain link device 1000 comprises a first link plate 1110 and a second link plate 1120. In some embodiments of the chain link device 1000, for example in some embodiments of the clamping device 1200, the second link plate 1120 and the second jaw member 1220 are formed as a single part, for example as a folded sheet, for example a folded metal sheet, for example a folded stainless steel sheet. For example, one or more of the chain link device 1000 and the clamping device 1200 comprise stainless steel.

[0081] For example, the chain link device 1000 comprises a clamping device 1200 forming an aperture 1215 configurable between an open aperture configuration 12150 and a closed aperture configuration 1215C. For example, the open aperture 1215 corresponds to the gap, for example defined by one or more of an opening distance and an opening angle, between the first jaw member 1120 and the second jaw member 1220. For example, the closed aperture 1215C is coplanar with the second clamping surface 1220F. For example the closed aperture 1215C is parallel to the X-direction, for example the direction of translation of the sheet 100. For example, the aperture of the clamping device faces a Y-direction orientation that is orthogonal to the X- direction. For example, the closed aperture 1215C forms a configuration for gripping an edge 101, 102 of the sheet 100. For example, a method for transporting, for example translating, and tensioning a sheet or web 100 comprises gripping the sheet or web 100 from a first edge 101 and a second edge 102.

[0082] For example, the clamping device 1200 comprises a first jaw member 1210 comprising a first clamping surface 1210F. For example, the clamping device 1200 further comprises a second jaw member 1220 comprising a second clamping surface 1220F facing, on its front side, the first clamping surface 121 OF. For example, the first jaw member comprises one or more arm rail 1211 , 1212. For example, the one or more arm rail 1211, 1212 extends, past the second clamping surface 1220F, to the back side 1220B of the second clamping surface. For example, the one or more arm rail 1211, 1212 comprises one or more oblong hole 1211 H, 1212H. For example, the path of the one or more arm rail, for example of the oblong hole, comprises one or more of a straight line segment and a curved segment.

[0083] For example (see Fig. 1C), the first jaw member 1210 comprises the first clamping surface 1210F at its front end, for example to grip a sheet or web 100, and a rear portion 1210R at its back end, for example that is most distal from the front end. For example, the rear portion 1210R ends with a rear edge 1210RE. For example the rear edge 1210RE forms a line that is comprised in a plane 1210FP that is coplanar with the first clamping surface 1210F. For example, the rear portion 121 OR approaches the rear edge with an angle ranging from 70° to 90°, for example 90°, with respect to the plane 1210FP that is coplanar with the first clamping surface 1210F. For example, the rear portion 1210R comprises one or more of a flat surface and a curved surface. For example, the first jaw member 1210 comprises a rear bend 121 ORB supporting the rear portion 121 OR. For example, a first jaw member 1210 comprising, from front to back, the first clamping surface 121 OF, the rear bend 1210RB, the rear portion 1210R, and the rear edge 121 ORE forms a first jaw member with rigidity, stability within environments where temperatures vary with amplitudes greater than 300°C, and repeatable manufacturability to ensure parallelism between a first jaw member and a second jaw member. For example (see Fig. 1A), the first jaw member 1210 comprises a hole 1210H between the first clamping surface 1210F and the rear edge 1210RE, for example between the first clamping surface 1210F and the rear bend 121 ORB, for example comprised in a central position between the span from the front to the back of the developed surface forming the first jaw member 1210. The hole 1210H provides, for example, a fastening point for forming the first jaw member 1210, for example for bending a metal sheet to form the first jaw member 1210.

[0084] In some embodiments, the first jaw member 1210 comprises a first arm rail 1211 and a second arm rail 1212 extending past the second clamping surface 1220F of the second jaw member 1220. For example, the first arm rail 1211 and the second arm rail 1212 are joining to form a U-shape 1200U. For example, a U-shape comprises one or more of a V-shaped bottom, a rounded U bottom, and a square U bottom. In some embodiments, the first arm rail 1211 comprises a first fold extremity 1211 F and the second arm rail 1212 comprises a second fold extremity 1212F. For example, the first fold extremity 1211 F and the second fold extremity 1212F are aimed at each other at an angle 1200PA comprised in a range from 20° to 160°, for example from 45° to 120°, for example from 80° to 100°. For example, the first fold extremity 1211 F contacts the second fold extremity 1212F.

[0085] For example, the arm rail guides the motion of the first jaw member 1210 with respect to the second jaw member 1220, for example with respect to a second jaw member baseplate 1230 against which the second jaw member is anchored, for example via a baseplate anchoring pin 1233. For example, the oblong hole 1211 H, 1212H has a length comprised in a range from 3 mm to 100 mm, for example from 5 mm to 50 mm, for example from 8 mm to 15 mm, for example from 10 mm to 14 mm. For example, the path length of the oblong hole enables one or more baseplate arm rail pin 1231, 1232 to cover a path length in a range from 3 mm to 100 mm, for example from 5 mm to 50 mm, for example from 8 mm to 15 mm, for example from 6 mm to 10 mm. For example, the motion of the first jaw member transitioning from an open aperture configuration 12150 to a closed aperture configuration 1215C (or the reverse) comprises one or more of a translation and a rotation of the first jaw member with respect to the second jaw member. For example, in a frame of reference wherein the X-direction corresponds to that in which the clamping device is translated on a chain or belt, the jaw member transitioning comprises one or more of: translation in the Z-direction; translation in the Y-direction; and rotation around an axis parallel to the X-direction.

[0086] For example, the clamping device 1200 comprises a compression spring support 1250. For example, the clamping device 1200 comprises a compression spring 1240 comprised between the compression spring support 1250 and the second jaw member 1220. For example, the compression spring contacts at a first end the compression spring support 1250 and, at a second end, the reverse side of the second clamping surface 1220F of the second jaw member 1220. In another example, the compression spring contacts at a first end the compression spring support 1250 and, at a second end, the baseplate 1230. In some embodiments, the baseplate comprises a recess 1235, for example to restrict the motion of the compression spring 1240, for example to prevent it from sliding off the baseplate. For example, the compressive force exerted by the compression spring 1240 configures the clamping device 1200 into a closed aperture configuration 1215C. For example, the baseplate 1230 has a thickness comprised in a range from 2 mm to 8 mm, for example from 3 mm to 5 mm. For example, the baseplate comprises metal. For example, the baseplate 1230 provides a method to increase the thermal inertia of one or more of the compression spring 1240 and the clamping device 1200. For example, in an embodiment wherein the clamping device 1200 is comprised in a system 2000 comprising one or more source of heat, for example one or more evaporation source 2300, the clamping device is subjected to variations in temperature that, for example, affect the materials comprised in the clamping device 1200, for example the materials of the compression spring 1240, for example the crystals of the metal forming the compression spring. For example, heat cycling of the compression spring causes annealing of its metal, creep, and a reduction of spring constant resulting in weaker clamping. The creep is, for example, accentuated by the compression cycling to which the clamping device 1200 is subjected to during a transport cycle past one or more sources of heat.

[0087] Fig. 1B illustrates how the first arm rail 1211 joins the second arm rail 1212. For example, the first arm rail 1211 and the second arm rail 1212 are joining to form a U-shape 1200U. For example, the first arm rail 1211 comprises a first fold extremity 1211 F. For example, the second arm rail 1212 comprises a second fold extremity 1212F. For example, the compression spring support 1250 comprises the first fold extremity 1211F of the first arm rail 1211 and the second fold extremity 1212F of the second arm rail 1212 that form a pin-like support for the compression string 1240. For example, the first fold extremity 1211 F and the second fold extremity 1212F are aimed at each other at an angle 1200PA comprised in a range from 20° to 160°, for example from 45° to 135°, for example from 60° to 120°, for example from 80° to 100°, for example 90°. For example, the first fold extremity 1211 F and the second fold extremity 1212F contact each other at a contact point 1200P. For example, the first arm rail 1211 contacts the second arm rail 1212 at a contact point 1200P.

[0088] Fig. 1C presents a side view of an embodiment of a clamping device 1200 in a closed aperture configuration 1215C. For example, the clamping device 1200 comprises a chain link device 1000. In the embodiment of Fig. 1C, the compression spring 1240 comprises, for example, a heat shield 1242. For example, the heat shield 1242 comprises a surface 1242S that is parallel to the direction of compression 1240C of the compression spring 1240. For example, the heat shield 1242 comprises graphite, for example a graphite foam, for example a flexible sheet of graphite foam. For example, the heat shield 1242 has a thickness comprised in a range from 0.3 mm to 5 mm, for example from 1 mm to 3 mm. For example, the heat shield 1242 forms a sheath surrounding at least a portion of the compression spring’s length. For example, the heat shield 1242 provides a method to reduce the amount of heat radiated towards the compression spring during passage of the clamping device 1200 in the vicinity of sources of heat, for example evaporation sources 2300 (Fig. 3). For example, the heat shield 1242 provides a method to reduce the effect of changes induced to the metal of the compression spring 1240 caused by heat cycling during translation of the clamping device within a vacuum chamber 2001 comprising one or more evaporation source 2300. In some embodiments, the compression spring 1240 comprises a ceramic coating, for example comprising AI₂O₃. In some embodiments, the compression spring 1240 comprises an austenitic nickel-chromium-based alloy.

[0089] For example, the one or more evaporation source 2300 is used for melting and evaporating a metal, for example one or more of Cu, In, and Ga. For example, the vacuum chamber 2001 is comprised in a system for manufacturing thin-film photovoltaic devices, for example photovoltaic devices comprising a flexible substrate, for example a polyimide substrate. For example, the one or more evaporation source 2300 for evaporating one or more of Cu, In, and Ga are comprised in a system for manufacturing Cu(ln,Ga)Se₂ photovoltaic devices, for example on a polyimide substrate conveyed by a conveying system 2000 comprised in the vacuum chamber 2001.

[0090] For example, the first clamping surface 1210F comprises one or more pad 1210P. For example, the second clamping surface 1220F comprises one or more pad 1220P. For example, the one or more pad 1210P is comprised on the first jaw member 1210. For example, the one or more pad 1210P forms a cover around the first jaw member 1210. For example, one or more of the first clamping surface 1210F and the second clamping surface 1220F comprises one or more pad 1210P, 1220P. For example, each of the first clamping surface 1210F and the second clamping surface 1220F comprises one or more pad 121 OP, 1220P. For example, the one or more pad 1210P, 1220P is bonded to the jaw 1210, 1220 by an adhesive that maintains bonding characteristics at temperatures comprised at least between 300°C and 650°C, for example a temperature up to 900°C, for example up to 1370°C. For example the adhesive is a silicate adhesive.

[0091] For example, the one or more pad 1210P, 1220P comprises one or more layer 1210L, 1220L of an expanded material. For example, the expanded material comprises a foam material. For example, a method to compensate for one or more of position and orientation offset of the clamping surface 121 OF, 1220F with respect to a sheet 100 to be clamped is to provide a pad comprising a layer of expanded material, for example to absorb the offset via compression of the expanded material. For example, a method to attenuate the stresses induced by variations in one or more of position and orientation of a clamp during translation along a track during transporting a sheet or web 100, for example along a track comprising a plurality of segments that may induce deflections or shocks during translation, comprises providing a clamp 1200 comprising one or more pad 1210P, 1220P comprising one or more layer 1210L, 1220L of an expanded material.

[0092] For example, the one or more pad 1210P, 1220P comprises graphite. For example, the one or more pad 1210P, 1220P comprises one or more layer 1210L, 1220L comprising graphite. For example, the one or more layer 1210L, 1220L is a layer of graphite. For example, the one or more pad 1210P, 1220P comprises one or more layer 1210L, 1220L of expanded graphite. For example, the one or more pad 121 OP, 1220P comprises a foam, for example comprising one or more of a metal foam and a foam comprising carbon. For example, the one or more pad 121 OP, 1220P comprises a material comprising fibers, for example carbon fibers. For example, the one or more pad 121 OP, 1220P comprises a woven material, for example comprising filaments, for example comprising one or more of metal and carbon filaments. For example, the one or more layer 1210L, 1220L has a DIN 28090-2 compressibility at 20°C in a range from 20 to 70, for example from 30 to 60, for example from 40 to 50, for example from 42 to 48. For example, the one or more layer 1210L, 1220L comprises a material that is thermally stable at temperatures greater than 500°C, for example from 500°C to 2000°C, for example from 500°C to 1000°C, for example from 500°C to 700°C. Thermal stability means that a material retains its properties in strength, toughness, and elasticity over a given range of temperatures.

[0093] For example, the one or more pad 121 OP, 1220P, for example the one or more layer 1210L, 1220L, has a thermal conductivity in a direction parallel to the surface greater than 25 Wnr¹K¹, for example in a range from 25 Wnr¹K¹ to 2000 Wnr¹K¹, for example from 40 Wnr ¹K ¹ to 2000 Wnr¹K¹, for example from 40 Wnr¹K ¹ to 750 Wnr¹K ¹, for example from 115 Wm ¹K

¹ to 430 Wnr¹K ¹, for example from 150 Wnr¹K ¹ to 400 Wnr¹K ¹, for example from 200 Wnr¹K ¹ to 240 Wm ¹K¹, for example 220 Wrrr¹K-¹. [0094] For example, two or more layers 1210L, 1220L comprised in the pad 121 OP, 1220P are arranged in one or more of a superimposed, a layered, and a side-by-side arrangement. For example, the arrangement of pads or sheets forms a pattern or textures. For example, the pad comprises one or more pattern or texture at its surface. For example, the one or more pad material provides a method to shield one or more portion of the clamping device 1200 from heat radiated by the operating environment. For example, the one or more pad 1210P, 1220P has a surface area that covers at least a cross-section of the compression spring 1240 projected onto the clamping surface.

[0095] For example, the one or more pad 121 OP, 1220P covers at least the entirety of the clamping surface. For example, the one or more pad has a width 1220W within the clamping surface 121 OF, 1220F, in a Y-direction orthogonal to the X-direction, that is comprised in a range from 2 mm to 50 mm, for example from 3 mm to 10 mm, 3 mm to 5 mm. For example, the one or more pad 121 OP, 1220P has a thickness, for example in the Z-direction, comprised in a range from 0.3 mm to 10 mm, for example from 0.5 mm to 5 mm, for example from 1 mm to 3 mm. [0096] For example, the one or more pad 121 OP, 1220P, for example the one or more layer 1210L, 1220L, for example comprising a graphite material, for example comprising an expanded graphite material, for example positioned at the surface of the pad configured to contact the sheet or web 100, provides a method to one or more of: evenly distribute a clamping force onto the sheet; spread out and flatten sheet or web undulations between the clamp’s jaws against the surface of the one or more pad 1210P, 1220P; evenly distribute heat gathered by the clamp 1200 during transport in the vicinity of a plurality of sources of heat; absorb shocks induced by translation of the clamp 1200 along a conveyor track 2010, 2020, for example a track comprising a plurality of track segments 2200-1, 2200-2, 2200-3; increase grip compliance in the plane of the sheet 100, for example in the framework of a method to transport a sheet wherein the tension is subjected to variations, for example due to the sheet being subjected to heat and one or more of expansion and contraction.

[0097] Fig. 1F presents a side view of a chain link device 1000 wherein the clamping device 1200 comprises a pad 1210P extending from the first clamping surface 1210F to the second clamping surface 1220F.

[0098] Fig. 2A is a top view of an embodiment of a clamp’s pad 121 OP, 1220P. For example, the contour 1210PC of one or more of the pad’s clamping surface is a rectangle ablated by one or more chamfers 1210PC1 along a contour portion of the pad facing into the sheet 100 to be gripped (Y-direction). For example, the contour portion of the pad facing into the sheet 100 to be gripped has a normal which projects towards the inside of the sheet 100 to be gripped. For example, the contour 1210PC of one or more of the pad’s clamping surface comprises one or more convex curved portion 1210PC2. For example, the convex curved portion 1210PC2 has a radius of curvature comprised in a range between 1.5 m and 250 mm, for example between 2 mm and 10 mm, for example between 2 mm and 4 mm, for another example between 3 mm and 40 mm. For example, the convex curved portion 1210PC2 has a length, for example a developed length along the curve or segment-approximated curve, of at least 1.5 mm, for example in a range from 1.5 mm to 315 mm. For example from 2.5 mm to 15 mm, for example from 2.5 mm to 5 mm. In some embodiments, the convex curved portion 1210PC2 is approximated by a one or more straight segments. For example, a method to reduce the occurrence of concentrated stress points on the sheet, for example a heated sheet or web comprising polyimide, comprises using a pad comprising one or more convex curved portion 1210PC2 where the sheet is gripped by the clamp.

[0099] In some embodiments, the one or more clamping surface 121 OF, 1220F comprises a sensor assembly 1300. For example, the sensor assembly 1300 is at least partly sandwiched between the clamping surface 1210F, 1220F and the jaw member 1210, 1220. In some embodiments, the sensor assembly 1300 is at least partly sandwiched between two or more sheets, for example sheets comprising graphite, for example one or more sheet of a pad 1210P, 1220P. For example, the sensor assembly 1300 comprises one or more of: one or more force sensor 1330; a temperature sensor 1320; an identification device 1360; a wireless power receiver 1310; a computer processor 1340; a non-volatile computer-readable storage medium 1350; and a data transceiver 1370. For example, the force sensor 1330 comprises one or more measuring axis: for example a measuring axis parallel to the clamping surface; and a measuring axis orthogonal to the clamping surface, for example orthogonal to the X-direction. For example, the identification device 1360 comprises one or more of: a radio frequency identification device (RFID); a label; a bar code; a QR code; and an identification code stored in the non-volatile computer-readable storage medium 1350. For example, the wireless power receiver 1310 comprises one or more of: a photovoltaic device; a wire coil; a metal plate electrode; and a rectifying antenna. For example, one or more jaw member 1210, 1220 comprises an aperture at the location of the wireless power receiver 1310, for example to enable passage of wirelessly transmitted power to the wireless power receiver 1310.

[0100] Fig. 2B is a side view of two pads 1210P, 1220P of a clamping device 1200 in a near- closed aperture configuration. For example, the clamping device 1200 is about to grip or clamp a sheet or web 100. For example, the contour 1210PC of the one or more pad 1210P, 1220P comprises a sloping edge 1210PC3 sloping away from the clamping surface 121 OF, 1220F. For example, the sloping edge 1210PC3 comprises one or more of a chamfer, a bevel, and a rounded contour. For example, the one or more pad 121 OP, 1220P has a thickness 1210T, 1220T in an unclamped configuration, for example in an open aperture configuration 12150, comprised in a range from 0.1 mm to 5 mm. For example, the one or more pad 1210P, 1220P has a compressive strength in a range from 50 N/mm² to 500 N/mm². For example, the clamping force, measured othogonally to a clamping surface 121 OF, 1220F in a closed aperture configuration 1215C, is comprised in a range from 10 N to 500 N, for example from 15 N to 100 N, for example from 20 N to 35 N. For example, the clamping pressure in a closed aperture configuration 1215C is comprised in a range from 50 kPa to 4000 kPa, for example from 100 kPa to 800 kPa, for example from 200 kPa to 400 kPa. For example, the breakout friction force per clamped area, for example measured by clamping a sheet 100, for example a sheet comprising a polymer on at least one or more surface, for example a sheet comprising polyimide, between a first contacting pad 121 OP, for example a pad comprising graphite, for example comprising graphite at the contacting surface, and a second contacting pad 1220P, for example comprising graphite, is comprised in a range from 40 kN/m² to 700 kN/m², for example from 60 kN/m² to 300 kN/m², for example from 80 kN/m² to 200 kN/m², for example from 85 kN/m² to 150 kN/m². For example, the breakout friction force is measured by clamping a sheet, for example a polyimide sheet, and measuring a force exerted in the clamping plane, for example parallel to the clamping surface 1210F, 1220F, in a direction towards which the clamp opens. The clamped area is, for example, the portion of surface of a sheet 100 that, upon gripping within a clamping device, contacts the first pad 121 OP on the sheet’s first side and contacts the second pad 1220P on the sheet’s second side.

[0101] Fig. 2C is a side view of a pad 1220P comprising one or more insert 1220PI. For example, the insert comprises a layer of material that is parallel to one or more of the surface of the pad and the base of the pad. For example, the insert 1220PI comprises one or more of a metal and a carbon material, for example graphite, for example expanded graphite, for example of another carbon material: carbon fiber. For example a metal insert comprises one or more of a metal sheet, for example a smooth metal sheet, for another example an expanded metal sheet. For example the insert 1220PI is at a base of the pad 1220P, for example at the surface of the pad that contacts the jaw.

[0102] Fig. 3 is a perspective view of a conveying system 2000 comprising one or more clamping device 1200, for example each carried by or comprising a chain link device 1000. For example, the conveying system 2000 is comprised in a chamber 2001 , for example a vacuum chamber. Fig. 4 is a top view of a conveying system 2000 comprising one or more clamping device 1200-1 , 1200-2, 1200-3. Fig. 5A is a side view and Fig. 5B is a front view of a portion of the conveyor track 2010 of a conveying system 2000 that comprises a railing assembly 2100. Fig. 5C is a top view of a portion of a conveying system 2000 comprising an adjusted conveyor track 2010-1. Fig. 5D is a top view of a portion of a conveying system 2000 comprising an adjustable conveyor track 2010-2. Fig. 5E is a side view of a portion of a conveying system 2000 comprising a front side railing 2110 comprising a ramp 2115R. For example, a front side railing 2110 is a railing for contacting the front surface of a sheet or web 100. For example, the front surface of a web 100 is the surface of the sheet subjected to receiving a coating, for example from one or more evaporation source 2300. Fig. 5F is a side view of a portion of a conveying system 2000 comprising one or more railing 2110, 2110U, for example 2 railings. For example, the one or more railing 2110, 2110U comprises a fibrous material 2100F. For example, the conveying system 2000 comprises one or more conveyor track 2010, 2020 oriented in an X- direction and comprising one or more chain link 1000. For example, the conveying system 2000 is used for transporting a sheet or web 100. For example, the one or more clamping device 1200 is conveyed in the X-direction.

[0103] For example, as shown in Figs. 5C, 5D, the one or more conveyor track 2010, 2010-1, 2010-2, 2020 comprises two or more track segments 2200-1 , 2200-2, 2200-3 arranged consecutively along the X-direction. For example, one or more of the two or more track segments 2200-1, 2200-2, 2200-3 is positioned at an offset different from a first track segment 2200-1 in a direction, for example one or more of the Y-direction and the Z-direction, orthogonal to that of the X-direction. For example, one or more of the two or more track segments 2200-1 , 2200-2, 2200-3 is positioned at an offset different from a first track segment 2200-1 in a horizontal direction, for example the Y-direction, orthogonal to that of the X-direction. For example, one or more of the two or more track segments 2200-1, 2200-2, 2200-3 is connected to a track support 2220, for example comprising one or more of a worm drive, a jack, a lever, a track support rail, and a shaft and rail assembly. For example, the track support 2220 comprises an actuated support, for example comprising one or more track support drive assembly 2220D. For example, the track support drive assembly 2220D comprises one or more translatory drive element, for example comprising one or more of a worm drive, a jack, a lever, a track support rail, and a shaft and rail assembly. For example, the track support drive assembly 2220D comprises one or more of a rotating motor and a linear motor. For example, a motion component of the track support 2220 is a translating motion in a direction orthogonal to the X- direction, for example one or more of the Y-direction and the Z-direction. For example, the track support 2220 comprises one or more sensor 2220S, for example one or more force sensor, for example measuring force in one or more of the X-. Y-, and Z-direction.

[0104] Fig. 5B presents a front view of a portion of the conveyor track 2010, for example a front view of a track segment 2200-1 , 2200-2, 2200-3. Fig. 5C presents a top view of 3 track segments 2200-1 , 2200-2, 2200-3. For example, one or more of the track segment 2200-1 , 2200-2, 2200-3 comprises a track wall 2200W, for example extending in the Z-direction, comprising one or more chamfer 2200C1 , 2200C2 at one or more of the track segment’s extremity 2200E. For example, the one or more chamfer 2200C1, 2200C2 is on the track segment’s wall that is closest to the clamping device 1200. For example, a method to offset a chain link device 1000, for example a clamping device 1200, in one or more of the Y-direction and the Z-direction, for example simultaneously to translation of the chain link device 1000, for example the clamping device 1200, in the X-direction, comprises using one or more of the chamfer 2200C1, 2200C2.

[0105] For example, the one or more conveyor track 2010, 2020 is driven by one or more conveyor drive assembly 2011, 2012, for example comprising a motor. For example, the one or more conveyor drive assembly 2011 , 2012 is comprised at one or more end of the conveyor track 2010, 2020. For example, the conveyor drive assembly 2011, 2012 comprises a first chain drive 2060 and a second chain drive 2070 parallel to the first chain drive. For example, the second chain drive comprises a coupling 2016 to the first chain drive. For example, the coupling 2016 comprises a mechanical coupling. For another example, the coupling 2016 comprises one or more of an electronic and computer-controlled coupling, for example to adjust the rotation speed of the second chain drive 2070 as a function of the rotation speed of the first chain drive 2060.

[0106] For example, the one or more conveyor track 2010, 2020 comprises a first clamping device 1200-1 and a second clamping device 1200-2 spaced apart, for example in the X- direction, by a distance 2011 comprised in a range from 5 mm to 1000 mm measured along the length of the conveyor track 2010, 2020. For example, the one or more conveyor track 2010, 2020 comprises a plurality of clamping devices 1200-1, 1200-2 regularly spaced apart from each other by a distance 2401 comprised in a range from 5 mm to 1000 mm measured along the length of the conveyor track 2010, 2020. For example, the distance 2011 is comprised in a range from 10 mm to 500 mm, for example from 12 mm to 400 mm, for example from 15 mm to 300 mm, for example from 100 mm to 280 mm, for example from 200 mm to 260 mm. For example, a first conveyor track 2010 and a second conveyor track 2020 are spaced apart from the first conveyor track by a distance 2402 comprised in a range from 100 mm to 3000 mm, for example from 200 mm to 2000 mm, for example from 500 mm to 1500 mm, for example from 800 mm to 1200 mm, for example from 900 mm to 1100 mm.

[0107] For example, a first clamping device 1200-1 comprised in the first conveyor track 2010 is facing a second clamping device 1200-2 comprised in the second conveyor track 2020. In another example, the first conveyor track 2010 comprises a first clamping device 1200-1 and the second conveyor track 2020 comprises a second clamping device 1200-2 and a third clamping device 1200-3 wherein the first clamping device is comprised on a perpendicular bisector of the segment joining the second clamping device to the third clamping device. For example, the first clamping device 1200-1 is at the apex of an isosceles triangle the base of which comprises the second clamping device 1200-2 and a third clamping device 1200-3. In some embodiments, the apex of the isosceles triangle at the third clamping device 1200-1 forms an angle of 90° with the second clamping device 1200-2 and the third clamping device 1200-3. For example, the first clamping device 1200-1, the second clamping device 1200-2, and the third clamping device 1200-3 form an equilateral triangle.

[0108] For example, the conveying system 2000 comprises one or more evaporation source 2300. For example, the one or more evaporation source 2300 is comprised beneath a conveying plane 2250 comprised between a first conveyor track 2010 and a second conveyor track 2020 parallel to the first conveyor track. For example, beneath means a volume comprised on one side of the plane formed by a sheet or web 100. In some embodiments, beneath means in a gravitational direction below the conveying plane 2250. For example, at least a portion of the first conveyor track 2010 faces at least a portion of the second conveyor track 2020. For example, a front side of the conveying plane 2250 is the side facing towards the one or more evaporation source 2300 and the back side is the side facing away from the one or more evaporation source 2300. For example, the front side of the conveying plane 2250 is the side facing into the -Z-direction and the back side is the side facing into the Z-direction.

[0109] Referring to Figs. 1C, 5A, 5B, 5C, 5D, 5E, 5F, 6A, 6B, 7A, 7B, 8A, 8B, 8C, 8D, 8E, 8F,

8G for example, the conveying system 2000 comprises one or more railing assembly 2100. For example, the railing assembly comprises one or more railing 2110, 2120, 2110U, 2120U oriented in the X-direction. For example, one or more railing 2110, 2120, 2110U, 2120U of the railing assembly 2100 is within a line of sight 1215L of the closed aperture 1215C of the clamping device 1200, for example when it is being conveyed in the X-direction, for example along one or more of the conveyor track 2010, 2020. In some embodiments, the railing assembly 2100 is within a line of sight 1215L of the closed aperture 1215C. For example, the closed aperture 1215C corresponds to a clamping device 1200 configured along a path of motion in the X-direction. For example, the railing 2110 comprises one or more of: a rod; a tube; a cylindrical tube; a tube comprising a rectangular cross-section; a profiled rod; a beam comprising a rectangular cross-section; an I-beam; a cable; and a conveyor belt. For example, the line of sight is comprised in a sector extending from 80° above the clamping surface 121 OF, 1220F of the clamping device 1200 in a closed configuration 1215C to 80° below the clamping surface of the clamping device in a closed configuration. For another example, the line of sight is comprised in a sector extending up to 80° from the plane of the clamping surface 121 OF, 1220F of the clamping device 1200 in a closed configuration 1215C.

[0110] For example, one or more portion of the railing 2110, 2120 is fastened to a first railing anchor 2140, 2110P. For example, one or more portion of the railing 2110, 2120 is resting free- floatingly onto one or more railing support 2130, 2130R For example, a first portion of the railing 2110, 2120 is fastened to a first railing anchor 2140, 2110P and a second portion of the railing 2110, 2120 is supported free-floatingly by one or more railing support 2130, 2130P For example, the first railing anchor 2140, 2110P is comprised at a first location along the bar’s X- direction and the railing support 2130, 2130P is comprised at a second location at least 0.5 m away from the first location along the bar’s X-direction. For example, the second location is at most 10 m away from the first location.

[0111] As shown in Fig. 6A, in some embodiments of the conveying system 2000, the railing assembly 2100, 2100A comprises, for example, a cable 2110C. For example, the cable 2110C is maintained in tension at one or more end by one or more of a weight and a tensioning spring 2110W. In some embodiments of the conveying system 2000, the first railing anchor 2140,

211 OP comprises one or more pulley 211 OP. In some embodiments, the one or more railing support 2130, 2130P comprises one or more pulley 2130P.

[0112] For example, the one or more railing support 2130, 2130P is connected to one or more railing support actuator 2135. For example, the one or more railing support actuator 2135 provides a method for adjusting the position of one or more of the one or more railing support 2130, 2130P in one or more direction (Y, Z) orthogonal to the X-direction. For example, the one or more railing support 2130, 2130P is connected to a track segment 2200-1, 2200-2, 2200-3 of a conveyor track 2010, 2010-1, 2010-2, 2020 oriented in the X-direction, each track segment arranged consecutively along the X-direction.

[0113] Fig. 6B presents an embodiment of the conveying system 2000 wherein the railing assembly 2100, 2100B comprises, for example, one or more conveyor belt 2110B. For example the conveyor belt 2110B comprises one or more of a cable, a chain, and a belt. For example, the conveyor belt loops around one or more conveyor pulley 211 OCR For example, the conveyor belt 2110B is driven, for example at one or more of the conveyor pulley 2110CP, by one or more conveyor motor 2110M. For example the speed of the conveyor belt 2110B is adjusted, for example by the controller 2500, to be the same at which the one or more conveyor track 2010, 2020 translates. For example, the speed of the one or more conveyor motor 2110M is adjusted, for example by the controller 2500, as a function of the speed of one or more of the first chain drive 2060 and the second chain drive 2070. For example, the one or more conveyor belt 2110B is guided by one or more pulley 2130P. For example, the pulley 2130P is connected to a railing support actuator 2135. For example, a method for adjusting the position of one or more of the pulley 2130P and the railing support actuator 2135 in one or more direction (Y, Z) orthogonal to the X-direction comprises measuring one or more of the tension in the sheet 100, for example by measuring one of more of: the torque in one or more of the first chain drive 2060 and the second chain drive 2070; one or more force measured by one or more clamping device 1200; one or more force measured by one or more sensor assembly 1300, for example comprised in the one or more clamping surface 121 OF, 1220F; and one or more force measured in one or more track support, for example in one or more track support 2220. In some embodiments, the conveyor belt 211 OB comprises one or more tensioning assembly 2150. For example, the tensioning assembly comprises one or more pulley and weight assembly, the pulley being configured to contact and apply tension to the conveyor belt 211 OB.

[0114] In some embodiments of the conveying system 2000 comprising one or more railing assembly 2100 comprising one or more railing 2110, 2120, 2110U, 2120U, a first conveyor track 2010, and a second conveyor track 2020 parallel to the first conveyor track, a surface of one or more railing is tangent with a plane at an elevation angle 1215A comprised in a range from -80° to +80°, for example from -45° to +45°, for example from -30° to +30°, for example from -15° to +15°, with respect to a plane joining the closed aperture 1215C of a first clamping device 1200 of the first conveyor track to the closed aperture 1215C of a second clamping device 1200 of the second conveyor track.

[0115] For example, an embodiment of the conveying system 2000 comprises: a first conveyor track 2010; a second conveyor track 2020 parallel to the first conveyor track; a first front side railing 2110; and a second front side railing 2120. For example, the first front side railing and the second front side railing are parallel to the first conveyor track. For example, the first front side railing and the second front side railing are comprised between the first conveyor track and the second conveyor track. For example, a contact surface, for example the top surface 2110T, for example at a greatest Z-direction position, of the first front side railing and a contact surface, for example the top surface 2120T, of the second front side railing are tangent with a plane joining the closed aperture of a first chain link of the first conveyor track to the closed aperture of a second chain link of the second conveyor track. For example, a contact surface 2110T, 2120T, 2110UB of a railing comprises one or more of: a uniform surface along the X-direction, a wire rope helical surface, and a woven braided surface.

[0116] In some embodiments of the conveying system 2000, a surface 2110S, 2120S of the railing 2110, 2120 is tangent with a plane that is coplanarwith the clamping surface of the closed aperture 1215C of the clamping device 1200. In some embodiments of the conveying system 2000, the railing 2110, 2120 comprises a cross-section forming a body of revolution 2110-1 having a radius 2110R in a range from 0.5 mm to 30 mm, for example from 2 mm to 10 mm, for example from 3 mm to 7 mm. For example, a radius from 3 mm to 10 mm provides a radius of curvature that matches that of the reliability of a polyimide sheet or web 100, for example having a thickness up to 500 pm, for example from 7 pm to 150 pm. In some embodiments, for example for use with a given sheet or web material, a radius greater than 30 mm is selectable but may induce a greater load due to friction of the transported material against the railing due to a larger contact surface.

[0117] In some embodiments of the railing 2110, 2120, at least a portion of the surface of the one or more railing 2110, 2120 comprises one or more of a coating layer 2116 and a low friction metal finish. For example, the coating layer 2116 comprises a low friction coating layer, for example comprising one or more of: a tungsten disulfide, a molybdenum disulfide, a fluoropolymer, and a polytetrafluoroethylene. In some embodiments, as shown in Fig. 5F, the railing 2110, 2110U, 2120 comprises a layer of fibrous material 2100F. For example, the fibrous material 2100F is on at least a portion of the surface of the railing 2110, 2120, for example a portion of the surface configured for contacting the sheet 100, for example at least a top surface that is tangent with the conveying plane 2250 joining the closed aperture of a first chain link of the first conveyor track to the closed aperture of a second chain link of the second conveyor track. For example, the fibrous material is configured as a felt. For example, the fibrous material is configured as a plurality of parallel fibers, for example oriented orthogonally to the conveying plane 2250. For example, the fibrous material 21 OOF comprises one or more of a glass fiber, a carbon fiber, and a metallic fiber. For example, the thickness of the layer of fibrous material 21 OOF is comprised in a range from 1 mm to 30 mm, for example from 5 mm to 20 mm.

[0118] In some embodiments of a conveying system 2000, a railing assembly 2100 comprises, for example, a plurality of railings 2110, 2110U. In some embodiments, a railing 2110, 2110U comprises a plurality of segments, for example extending in the X-direction. For example, extending in the X-direction means extending with an angle comprised in a range from -15° to 15°, for example from -10° to 10°, for example from -5° to 5°, for example from -3° to 3°, with respect to the X-direction, for example the direction of translation of the sheet 100. For example, a first or front side railing 2110 is configured to contact a first or front surface of the sheet 100 and a second or back side or upper railing 2110U is configured to contact an opposite second or back side surface of the sheet 100. For example, the front side railing 2110 and the back side railing 2110U are arranged in a symmetrical configuration, for example a mirror configuration, with respect to the conveying plane 2250.

[0119] In some embodiments, for example in an embodiment where one or more of the front side (abbreviated FS) railing 2110 and the back side (abbreviated BS) railing 2110U comprises a fibrous material, the FS railing 2110 contacts the BS railing 2110U, for example along a portion of the surface configured for contacting the sheet 100, for example for the FS railing 2110 along at least a portion of the top surface of the FS railing extending in the Z-direction and for the BS railing 211 OU along at least a portion the bottom surface of the BS railing extending in the -Z-direction. In some embodiments, the FS railing 2110 is connected to a support 2110C at least a portion of which is comprised on a front side of a conveying plane 2250 extending from the second clamping surface 1220F of the clamping device 1200 and the BS railing 2110U is connected to a support 2110UC at least a portion of which is comprised on a back side of the conveying plane 2250. [0120] For example, the conveying system comprises: a first track 2010 flanked with a BS railing 2110U supported along at least a portion of the back side of the conveying plane 2250 and a FS railing 2110 supported along at least a portion of the front side of the conveying plane, a second track 2020 flanked with a corresponding second BS railing 2120U and a second FS railing 2120, wherein the railings 2110, 2110U, 2120, 2120U are arranged between the first track 2010 and the second track 2020, for example in a mirror arrangement with respect to the conveying system’s centerline parallel to the first conveyor track 2010 and the second conveyor track 2020. For example, the BS railing 2110U, 2120U is arranged closest to its respective first track 2010 or second track 2020, and the FS railing 2110, 2120 is arranged distally from its respective first track 2010 or second track 2020.

[0121] Fig. 8D is a side view of a clamping device 1200, for example comprising a chain link device 1000, facing a FS railing 2110 and a BS railing 2110U. In some embodiments, the BS railing 2110U is offset in the Y-direction with respect to the FS railing 2110. For example, along at least a portion of the length of the one or more railing 2110, 2110U in the X-direction, the offset 2110SY of the BS railing 2110U in the Y-direction with respect to the FS railing 2110 is greater than half the width of the portion of railing 2110 intercepting the conveying plane 2250. For example, along at least a portion of the length of the one or more railing 2110, 2110U in the X-direction, the offset 2110SY of the BS railing 2110U in the Y-direction with respect to the FS railing 2110 is comprised in a range from 2 mm to 100 mm, for example from 5 mm to 80 mm, for example from 10 mm to 50 mm.

[0122] In some embodiments, the bottom of the BS railing 2110U is offset in the Z-direction with respect to the top of the FS railing 2110. For example, the FS railing 2110 and the BS railing 211 OU are configured, at one or more location along the railing in the X-direction, in a staggered arrangement 2100ST. For example, in a staggered arrangement 2100ST, the contact surface, for example the bottom surface 2110UB of the BS railing 2110U, is offset in a Y-direction and in a Z-direction with respect to the top 2110T of the FS railing 2110, for example with the bottom of the BS railing 2110U being arranged lower than the top of the FS railing 2110. For example, the highest point 2110T in the Z-direction of the FS railing is higher than the lowest point 2110UB in the Z-direction of the BS railing. For example, the top 2110T of the FS railing 2110 is tangent with the plane extending from the first clamping surface 121 OF in a closed aperture configuration 1215C and the bottom 2110UB of the BS railing 2110U intercepts the plane extending from the first clamping surface 121 OF, for example the conveying plane 2250.

[0123] Figs. 8E, 8F, 8G are top views of a FS or bottom railing 2110 and a BS railing 2110U arranged along a first conveyor track 2010. For example, the sheet 100 (not shown, but represented by a white arrow) is configured to translate from left to right in the figures. Not represented are a corresponding second FS or bottom railing 2120 and a second BS railing 2120U arranged along the second conveyor track 2020, a cross-section of which is presented in Fig. 7B. For example, Fig. 8E presents a top view of an embodiment of a system 2000, 2000-1 comprising a first track 2010, a BS railing 2110U, and a FS or bottom railing 2110 that is parallel to the BS railing 2110U. For example one or more of the FS railing 2110 and the BS railing 2110U is adjustable in one or more of the Y-direction and Z-direction. For example, one or more of the FS railing 2110 and the BS railing 211 OU is actuated by one or more actuator receiving commands from the controller 2550, for example executing one or more instructions to adjust the one or more railing 3030. In some embodiments, the one or more adjustment of the FS railing 2110 and of the BS railing 2110U with respect to the first track 2010 preserves parallelism between the FS railing 2110 and the BS railing 2110U. For example, parallelism is preserved via one or more of a mechanical coupling, for example via a local connection to a common railing support 2130, and a computer-controlled coupling, for example via a controller 2500, for example wherein a command to an actuator connected to the BS railing 2110U is a function of a command to an actuator connected to the FS railing 2110. In some embodiments, the FS railing 2110, 2120 is parallel to the BS railing 2110U, 2120U over at least a 300 mm portion of the length in the X-direction of the FS railing and the BS railing.

[0124] In some embodiments of the system 2000, one or more adjustment of the FS railing 2110 is independent from a one or more adjustment of the BS railing 2110U. For example, Figs. 8F and 8G present embodiments wherein the BS railing 2110U is not parallel to the FS railing along the entire length of the railing. Fig. 8F presents an embodiment of a system 2000, 2000-2 wherein the FS railing 2110 and the BS railing 2110U are parallel over a first portion of the length of the railing, for example over a portion wherein the sheet 100 enters the railing assembly. For example, as seen in the top view, for example looking down in a -Z-direction onto the X-Y plane, the FS railing 2110 and the BS railing 2110U converge at least over a second portion 2110C of the length of the railing in the X-direction. For example, the second portion 2110C has a length of at least 300 mm. For example, the beginning of the convergence is in a region comprised after or down-web or down-sheet the position where one or more source of heat is comprised, for example the one or more evaporation source 2300. For example, the FS railing 2110 and the BS railing 2110U are arranged in a staggered arrangement (see Figs. 7B and 8D) in at least the first portion of the length of the railing.

[0125] Fig. 8G presents an embodiment of a system 2000, 2000-3 wherein the FS railing 2110 and the BS railing 2110U are configured in a divergent-convergent arrangement over the length of the railing in the X-direction. For example, the point of maximum divergence 2100D, for example of the FS railing 2110 with respect to the BS railing 2110U is comprised within a region extending in the X-direction comprised between the one or more source of heat, for example the one or more evaporation source 2300, and the one or more conveyor track 2010, 2020. In some embodiments of the system 2000, 2000-1, 2000-2, 2000-3, both the FS railing 2110 and the BS railing 2110U are configured with variations in distance, for example in one or more of the Y- direction and the Z-direction, with respect to the conveyor track. For example, an embodiment 2000-3 comprises both the FS railing 2110 and the BS railing 2110U one or more of diverging and converging along the length of the railing. A combination comprising one or more of a divergent arrangement (Fig. 8G), a convergent arrangement (Figs. 8F and 8G), a parallel arrangement (Fig. 8E), a staggered arrangement (Fig. 8D), a plane-tangent arrangement (Fig. 7B wherein the BS rail 2110U, 2120U and FS rail 2110, 2120 are tangent to the sheet plane 2250) forms an embodiment within the scope of this description. In some embodiments, the arrangement is adjusted by a controller 2500, for example as a function of one or more of measured tension or force 3110 on the sheet 100, measured torque 3140 on the drive assembly 2011, 2012, for example the torque of one or more conveyor motor 2110M, and one or more measured temperature 3120.

[0126] In some embodiments, the railing 2110, 2120 comprises a cross-section comprising at least a quarter of an ellipse in the cross-section’s upper quadrant 2110-2 that is most distal from the nearest conveyor track 2010, 2020. In some embodiments, for example as shown in Fig.

8C, the cross section of the railing 2110, 2120 comprises a drooping upper surface 2110-3. For example, the drooping upper surface 2110-3 droops in a direction leading away from the nearest conveyor track 2010, 2020. For example, the drooping is starting from the top 2110T of the cross section positioned at a distance in a horizontal plane comprised between 2 mm and 50 mm from the closed aperture 1215C of the clamping device 1200. For example, the drooping profile comprises one or more of an elliptic profile and a parabolic profile. For example, the radius of curvature of the drooping is greater than 3 mm in the portion comprised from horizontal (for example at top of railing cross-section) to tangent to a 20° slope. Although the drawings present railings with a circular cross-section and an L-shaped cross section, other cross-sections, for example rectangular and I-beam cross-sections are applicable as railing embodiments.

[0127] Referring to Figs. 8B, 8C, and 8D, in some embodiments, the railing 2110, 2120 forms a wall 2110WL masking, per unit of railing length in the Z-direction, the volume beneath the plane tangent to the top surface 2110T of the railing 2110, 2120 from the clamping device’s closed aperture 1215C. For example, as shown in Figs. 5A, 5E, 5F, 6A and 6B, the railing 2110, 2120 comprises an upward portion 2115 leading to the plane tangent to the top surface 2110T of the railing. For example the upward portion comprises an arc. In some embodiments, the railing 2110, 2120 comprises an upward ramp portion 2115R leading to a railing portion oriented in the X-direction. [0128] For example, the conveying system 2000 comprises one or more wireless receiver 2560. For example, the wireless receiver 2560 is comprised within the vacuum chamber 2001. For example, the conveying system 2000 comprises one or more wireless power transmitter 2510. For example, a power-transmitting axis 251 OP of the wireless power transmitter 2510 is aimed at the conveyor track. For example, the conveying system 2000 comprises one or more computer controller 2500. For example, one or more of the conveying system 2000 and the controller 2500 comprises one or more computer-readable non-volatile storage medium 2550. For example, the non-volatile storage medium 2550 comprises instructions 3000 that, when executed by the controller 2500, cause the system to adjust the speed 3020 of the one or more conveyor drive assembly 2011, 2012. For example, the non-volatile storage medium 2550 comprises instructions 3000 that, when executed by the controller 2500, cause the system to read 3010 data 3100 from one or more wireless receiver 2560. For example, the data 3100 comprises force measurement data 3110. For example, the data 3100 comprises temperature measurement data 3120. For example, the data 3100 comprises identification data 3130. For example, one or more of the data is acquired from measurements acquired by the sensor assembly 1300, for example embedded in or in contact with one or more pad 1210P, 1220P. [0129] For example, the non-volatile storage medium 2550 comprises instructions 3000 that, when executed by the controller 2500, cause the system 2000 to send one or more command to one or more track support 2220, for example to a track support drive assembly 2220D for adjusting 3040 the position of one or more track segment 2200-1 , 2200-2, 2200-3 in one or more direction (Y, Z) orthogonal to the X-direction, for example by adjusting 3042 a track support 2220. For example, the adjusting 3040 one or more conveyor track 2010, 2020 comprises adjusting 3042 a track support 2220 embodiment comprising one or more track support rail 2220R oriented in the Y-direction. For example, the conveyor track 2010, 2020 is translated along the track support 2220, for example along the one or more track support rail 2220R. For example, the instructions 3000 comprise instructions for reading one or more torque value 3140 of the conveyor drive assembly 2011, 2012. For example, the instructions 3000 comprise instructions for adjusting 3030 the position of the one or more track segment 2200-1 , 2200-2, 2200-3 as a function of the one or more torque value 3140. For example, the torque value 3140 is acquired or estimated by measuring one or more power consumption values of the conveyor drive assembly 2011, 2012.

[0130] For example, the non-volatile storage medium 2550 comprises instructions 3000 that, when executed by the controller 2500, cause the system 2000 to send one or more command to one or more railing support actuator 2135. For example, sending one or more command to one or more railing support actuator 2135 provides a method, for example a computer-based method, for adjusting 3030 the position of one or more railing support 2130, 2130P, for example in one or more direction (Y, Z) orthogonal to the X-direction. For example, the one or more command sent to the one or more railing support actuator 2135 for adjusting 3030 the position of one or more railing support 2130, 2130P is a function of one or more force measurement data 3110.

[0131] For example, the force measurement data 3110 is acquired from measurements acquired by the sensor assembly 1300, for example embedded in or in contact with one or more pad 1210P, 1220P. For example, the force measurement data 3110 comprises one or more force value of the force transferred by the sheet or web 100 under tension to the one or more force sensor 1330 of the sensor assembly 1300 with the clamping device 1200 in a closed aperture configuration 1215C. For example, the force measurement data 3110 is a function of one or more of: temperature, for example temperature measured within the vacuum chamber 2001, for example one or more temperature measurements acquired by one or more temperature sensor 1320, for example comprised on the clamping device 1200; conveyor system translation speed, for example driven by the conveyor drive assembly 2011, 2012; position of the clamping device 1200-1, 1200-2, 1200-3, for example comprised on a chain link device 1000; position of the one or more track segment 2200-1, 2200-2, 2200-3; and position of the one or more railing support actuator 2135.

[0132] For example, a method to measure one or more of the temperature inside a vacuum chamber 2001 and the tension on a sheet 100, comprises translating the clamping device 1200, for example set in motion in the X-direction, for example in a closed aperture configuration 1215C, for example with a sheet 100 gripped between the first jaw member 1210 and the second jaw member 1220, and acquiring one or more measurements at one or more locations along the X-directions comprising one or more of: a force measurement, for example a sheet tension measurement, for example from data acquired by the force sensor 1330 of the sensor assembly 1300 of the clamping device 1200; and a temperature measurement, for example from data acquired by the temperature sensor 1320 of the sensor assembly 1300 of the clamping device 1200.

[0133] For example, a method 4000 for conveying a sheet 100 in an X-direction comprises clamping 4010 a first edge 101 of the sheet 100 with respect to the X-direction with a first clamping device 1200-1, for example connected to a chain link device 1000 of the first clamping device. For example, the method 4000 further comprises clamping 4020 a second edge 102 of the sheet 100 opposite the first edge 101 with respect to the X-direction with a second clamping device 1200-2, for example connected to a chain link device 1000 of the second clamping device. For example, the method 4000 further comprises simultaneously translating 4030 the first clamping device 1200-1 and the second clamping device 1200-2 in the X-direction. For example, clamping the first edge 101 and clamping the second edge 102 comprises compressing 4015, 4025 between the clamping device 1200-1, 1200-2 and the sheet 100 within each of the first clamping device 1200-1 and the second clamping device 1200-2, for example between the first jaw member 1210 and the second jaw member 1220 of each clamping device 1200-1, 1200-2, one or more pad 121 OP, 1220P comprising a foam material having a thermal conductivity greater than 25 Wnr¹K¹ between the clamp and the sheet 100.

[0134] For example, the foam material comprises graphite. For example, a portion of pad width 1220W contacting the sheet 100 within each clamping device 1200, in a direction orthogonal to the X-direction, is comprised in a range from 3 mm to 50 mm. For example, the clamping 4010, 4020 comprises compressing 4015, 4025 one or more of the pad 1210P, 1220P against a first face 101 F of the sheet and against a second face 102F of the sheet or web 100.

[0135] For example, the sheet 100 comprises polyimide. For example, the portion of sheet or web 100 that is clamped by the one or more pad 121 OP, 1220P comprises polyimide. For example, at least a portion of the sheet 100 contacting the one or more pad 121 OP, 1220P comprises polyimide. For example, the portion of sheet or web 100 that is clamped by the one or more pad 121 OP, 1220P comprises molybdenum, for example a molybdenum coating. For example, the portion of sheet or web 100 that is clamped by the one or more pad 121 OP, 1220P comprises polyimide and molybdenum. For example, the clamping 4020 between the sheet or web 100 and the one or more pad 121 OP, 1220P comprises forming a graphite to polyimide contact. For example, the clamping 4010, 4020 comprises forming a graphite-to-polyimide contact between the surface of the pad 1210P, 1220P and the surface of the sheet 100.

[0136] For example, the sheet 100 is a web comprised in a vacuum chamber 2001. For example, the sheet 100 is translated 4030 past one or more evaporation source 2300 comprised inside the vacuum chamber 2001. For example, at least a portion of the sheet or web 100 contacting the one or more pad 121 OP, 1220P comprises a coating comprising molybdenum. For example, the translating 4030 comprises sliding 4040 the sheet 100 against one or more railing 2110, 2120 oriented in the X-direction. For example, the sliding 4040 the sheet 100 against one or more railing 2110, 2120 comprises sliding the sheet 100 against one or more railing upward portion 2115, for example comprising an upward ramp 2115R. For example, sliding 4040 the sheet 100 comprises sliding onto a first railing 2110 and onto a second railing 2120, the first railing 2110 and the second railing 2120 being comprised between the first clamping device 1200-1 and the second clamping device 1200-2. For example, a top surface 2110T of the first railing 2110 and a top surface 2120T of the second railing 2120 are tangent to a conveying plane 2250 extending from the second clamping surface 1220F of the first clamping device 1200-1 to the second clamping surface 1220F of the second clamping device 1200-2. [0137] For example, a method 4000 for conveying a sheet 100 comprises adjusting 3040 the position of one or more track segment 2200-1, 2200-2, 2200-3 in one or more direction (Y, Z) orthogonal to the X-direction. For example, the adjusting 3040 the position of the one or more track segment 2200-1, 2200-2, 2200-3 comprises measuring one or more torque value 3140.

For example, measuring the torque value 3140 comprises measuring the torque of one or more chain drive 2060, 2070, for example by measuring the power consumption of one or more motor of one or more conveyor drive assembly 2011, 2012. For example, measuring the torque value 3140 provides a method to estimate whether the adjusting of one or more track segment 2200- 1, 2200-2, 2200-3 causes friction to exceed a predefined threshold. For example the friction is induced by one or more of the chain devices against the track segment and the sheet 100 against the one or more railing 2110, 2120. For example, the friction of the sheet 100 against the one or more railing 2110, 2120 is a function of one or more of: temperature of the sheet 100; duration of exposure of the sheet 100 to temperature; dilatation or contraction of the sheet 100 as a function of the duration of the exposure of the sheet 100 to temperature; tension on the sheet 100; waviness induced by tension on the sheet; and heat radiated by one or more heat source, for example one or more evaporation source, against the sheet, for example inducing waves on the sheet.

[0138] For example, the method 4000 for conveying a sheet 100 comprises adjusting 3030 the position of one or more railing support 2130, 2130P in one or more direction (Y, Z) orthogonal to the X-direction. For example, the adjusting 3030 the position of one or more railing support 2130, 2130P is a function of one or more of a force measurement data 3110 and a temperature measurement data 3120, for example from data acquired by one or more of the temperature sensor 1320 and by the force sensor 1330 of the sensor assembly 1300 of the clamping device 1200.

[0139] For example, the method 4000 for conveying a sheet 100 that comprises translating 4030 the first clamping device 1200-1 and the second clamping device 1200-2 in the X-direction comprises adjusting the speed 3020 of the translating. For example, the adjusting the speed 3020 of the translating is a function of one or more of a force measurement data 3110 and a temperature measurement data 3120, for example from data acquired by one or more of the temperature sensor 1320 and by the force sensor 1330 of the sensor assembly 1300 of the clamping device 1200. For example, one or more of the adjusting 3020, 3040, 3040, the clamping 4010, 4020, the translating 4030, and the sliding 4040, occurs one or more of before, during, and after one or more of forming vacuum 4050 and depositing material 4060, for example in the chamber 2001.

[0140] The use of the terms “a” and “an” and “the” and similar referents in the context of describing the disclosed embodiments (especially in the context of the following claims) are to be construed to cover both the singular and the plural, unless otherwise indicated herein or clearly contradicted by context. The terms “comprising,” “having,” “including,” and “containing” are to be construed as open-ended terms (that is, meaning “including, but not limited to,”) unless otherwise noted. The term “connected” is to be construed as partly or wholly contained within, attached to, or joined together, even if there is something intervening. Recitation of ranges of values herein are merely intended to serve as a shorthand method of referring individually to each separate value falling within the range, unless otherwise indicated herein and each separate value is incorporated into the specification as if it were individually recited herein. All methods described herein can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context. No language in the specification should be construed as indicating any non-claimed element as essential to the practice of the invention.

[0141] Preferred embodiments of this disclosure are described herein, including the best mode known to the inventors for carrying out the invention. Variations of those preferred embodiments become, for example, apparent upon reading the foregoing description. The inventors expect skilled artisans to employ such variations as appropriate and the inventors intend for the invention to be practiced otherwise than as specifically described herein.

Claims

1. A clamping device (1200) for a conveyor drive assembly (2011, 2012) of a conveyor system (2000) oriented for conveying a sheet (100) in an X-direction, the clamping device (1200) forming an aperture (1215) configurable between an open aperture configuration (12150) and a closed aperture configuration (1215C) for gripping an edge (101, 102) of the sheet, the clamping device comprising: a first jaw member (1210) comprising a first clamping surface (121 OF) and a second jaw member (1220) comprising a second clamping surface (1220F) facing, on its front side, the first clamping surface; and one or more of the first clamping surface and the second clamping surface comprises one or more pad (121 OP, 1220P), characterized in that the pad comprises one or more layer (1210L, 1220L) comprising graphite.

2. The device of claim 1, wherein the one or more layer (1210L, 1220L) comprises expanded graphite.

3. The device of claim 1, wherein the one or more pad (121 OP, 1220P) has a thermal conductivity in a range from 25 Wnr¹K¹ to 2000 Wnr¹K¹.

4. The device of claim 1, wherein the one or more pad (121 OP, 1220P) has a thickness (1210T, 1220T) in an unclamped configuration comprised in a range from 0.1 mm to 5 mm.

5. The device of claim 1, wherein the clamping pressure in a closed aperture configuration (1215C) is comprised in a range from 50 kPa to 4000 kPa.

6. A conveying system (2000) for conveying a sheet (100) in an X-direction comprising one or more conveyor track (2010, 2020) oriented in the X-direction and comprising one or more of the clamping device (1200) according to claim 1.

7. The system of claim Error: Reference source not found, wherein the one or more conveyor track (2010, 2020) is driven by one or more conveyor drive assembly (2011 , 2012).

8. The system of claim Error: Reference source not found, wherein the one or more conveyor track (2010, 2020) comprises a first clamping device (1200-1) and a second clamping device (1200-2) spaced apart by a distance (2011) comprised in a range from 5 mm to 1000 mm measured along the length of the conveyor track (2010, 2020).

9. The system of claim Error: Reference source not found, comprising a first conveyor track (2010) and a second conveyor track (2020) spaced apart from the first conveyor track by a distance (2012) comprised in a range from 100 mm to 3000 mm.

10. The system of claim Error: Reference source not found, further comprising one or more evaporation source (2300) comprised beneath a conveying plane (2250) comprised between a first conveyor track (2010) and a second conveyor track (2020) parallel to the first conveyor track and wherein at least a portion of the first conveyor track faces at least a portion of the second conveyor track.

11. The system of claim 10, wherein a first clamping device (1200) comprised in the first conveyor track (2010) is facing a second clamping device (1200) comprised in the second conveyor track (2020).

12. The system of claim 10, wherein the first conveyor track (2010) comprises a first clamping device (1200-1) and a second clamping device (1200-2) and the second conveyor track (2020) comprises a third clamping device (1200-3) wherein the third clamping device is comprised on a perpendicular bisector of the track segment joining the first clamping device to the second clamping device.

13. The system of claim Error: Reference source not found, further comprising one or more railing assembly (2100) comprising one or more railing (2110, 2110U, 2120, 2120U) oriented in the X-direction and wherein one or more railing of the one or more railing is within a line of sight (1215L) of the second clamping surface (1220F) of the closed aperture (1215C) of the clamping device (1200) when it is being conveyed in the X- direction.

14. The system of claim 13, wherein the railing (2110, 2110U, 2120, 2120U) is fastened to a first railing anchor (2140, 2110P) and resting free-floatingly onto one or more railing support (2130, 2130P).

15. The system of claim 13, comprising a first conveyor track (2010) and a second conveyor track (2020) parallel to the first conveyor track wherein a surface of the railing (2110) is tangent with a plane at an elevation angle (1215A) comprised in a range from -80° to +80° with respect to a plane joining the closed aperture (1215C) of a first clamping device (1200) of the first conveyor track to the closed aperture (1215C) of a second clamping device (1200) of the second conveyor track.

16. The system of claim 13, comprising a first conveyor track (2010) and a second conveyor track (2020) parallel to the first conveyor track and comprising a first railing (2110) and a second railing (2120) wherein:

- the first railing and the second railing are parallel to the first conveyor track;

- the first railing and the second railing are comprised between the first conveyor track and the second conveyor track; and

- the top surface (2110T) of the first railing and the top surface (2120T) of the second railing are tangent with a plane joining the closed aperture of a first clamping device of the first conveyor track to the closed aperture of a second clamping device of the second conveyor track.

17. The system of claim 13, wherein the railing (2110, 2120) forms a wall (2110WL) masking, per unit of railing length in the Z-direction, the volume beneath the plane tangent to the top surface (2110T) of the railing from the clamping device’s closed aperture (1215C).

18. The system of claim 6, further comprising one or more computer controller (2500) and one or more computer-readable non-volatile storage medium (2550) comprising instructions (3000) that, when executed by the controller (2500), cause the system to adjust the speed (3020) of the one or more conveyor drive assembly (2011, 2012).

19. A method (4000) for conveying a sheet (100) in an X-direction, comprising: clamping (4010) a first edge (101) of the sheet with respect to the X-direction with a first clamping device (1200-1); clamping (4020) a second edge (102) of the sheet opposite the first edge with respect to the X-direction with a second clamping device (1200-2); and simultaneously translating (4030) the first clamping device and the second clamping device in the X-direction, wherein clamping the first edge and clamping the second edge comprises compressing (4015, 4025) between the clamping device and the sheet, within each of the first clamping device and the second clamping device, one or more pad (121 OP, 1220P) comprising one or more layer (1210L, 1220L) comprising graphite between the clamping device and the sheet.

20. The method of claim 19, wherein the one or more layer (1210L, 1220L) comprises expanded graphite.

21. The method of claim 19, wherein the sheet (100) comprises a polymer.

22. The method of claim 19, wherein at least a portion of the sheet (100) contacting the one or more pad (121 OP, 1220P) comprises polyimide.

23. The method of claim 19, wherein at least a portion of the sheet (100) contacting the one or more pad (121 OP, 1220P) comprises a coating comprising molybdenum.

24. The method of claim 19, wherein the translating (4030) comprises sliding (4040) the sheet (100) against one or more railing (2110, 2120) oriented in the X-direction.

25. The method of claim 24, wherein the sliding (4040) the sheet (100) comprises sliding onto a first railing (2110) and onto a second railing (2120), the first railing (2110) and the second railing (2120) being comprised between the first clamping device (1200-1) and the second clamping device (1200-2) and wherein a top surface (2110T) of the first railing and a top surface (2120T) of the second railing are tangent to a conveying plane (2250) extending from the second clamping surface (1220F) of the first clamping device to the second clamping surface (1220F) of the second clamping device.

26. A system (2000) for conveying in an X-direction a sheet (100) clamped between a first conveyor track (2010) and a second conveyor track (2020), comprising: a first conveyor track (2010) and a second conveyor track (2020) extending in the X- direction, each of the first and the second conveyor track comprising one or more clamping device (1200) comprising a first jaw member (1210) and a second jaw member (1220), and defining a conveying plane (2250) along the X-direction and spanning from the second jaw member of the first conveyor track to the second jaw member of the second conveyor track; and one or more railing assembly (2100) comprising one or more railing (2010, 2010U, 2120,

2120U) extending in the X-direction; wherein one or more railing of the one or more railing assembly (2100) is comprised in a volume extending in a Z-direction between the first conveyor track (2010) and the second conveyor track (2020), and a contact surface (2110T, 2110UB, 2120T, 2120UB) of the railing is tangent with a plane exiting the second jaw at an elevation angle (1215A) comprised in a range from -80° to +80° with respect to the conveying plane.

27. The system of claim 26, further comprising a vacuum chamber (2001) forming an enclosure around the first conveyor track (2010), the second conveyor track (2020), and the one or more railing assembly (2100).

28. The system of claim 26, further comprising one or more evaporation source (2300) in a volume extending in a Z-direction between the first conveyor track (2010) and the second conveyor track (2020).

29. The system of claim 26, wherein the first jaw member (1210) comprises a first clamping surface (1210F) and the second jaw member (1220) comprises a second clamping surface (1220F) facing, on its front side, the first clamping surface; and one or more of the first clamping surface and the second clamping surface comprises one or more pad (121 OP, 1220P), wherein the pad comprises one or more layer (1210L, 1220L) comprising graphite.

30. The system of claim 29, wherein the one or more layer (1210L, 1220L) comprises expanded graphite.

31. The system of claim 26, wherein the one or more railing (2110, 2110U, 2120, 2120U) is fastened to a first railing anchor (2140, 2110P) and resting free-floatingly onto one or more railing support (2130, 2130P).